TW201134571A - Wire handling unit, wire saw device and method for operating same - Google Patents

Wire handling unit, wire saw device and method for operating same Download PDF

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Publication number
TW201134571A
TW201134571A TW099131670A TW99131670A TW201134571A TW 201134571 A TW201134571 A TW 201134571A TW 099131670 A TW099131670 A TW 099131670A TW 99131670 A TW99131670 A TW 99131670A TW 201134571 A TW201134571 A TW 201134571A
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TW
Taiwan
Prior art keywords
wire
pulley
axis
management unit
reel
Prior art date
Application number
TW099131670A
Other languages
Chinese (zh)
Inventor
Fabrice Coustier
De Buffieres Frederique Lombard
Guillaume Mercay
Daniel Rotundo
Luc Luyckx
Der Meer Mathijs Pieter Van
Roberto Ferreiro
Nicolas Poulet
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Applied Materials Inc
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Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of TW201134571A publication Critical patent/TW201134571A/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23DPLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D57/00Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
    • B23D57/003Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts
    • B23D57/0053Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts of drives for saw wires; of wheel mountings; of wheels
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0076Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)

Abstract

A wire management unit has a main frame portion 110 and a wire handling section 200, the wire handling section comprising: a spool shaft adapted for carrying a spool 212 providing the wire 10 towards the wire web; a first pulley 220 adapted for receiving the wire from the spool and for redirecting the wire, the first pulley being rotatably mounted to a pulley carrying unit 224 for rotation around a first pulley axis 222, the pulley carrying unit being longitudinally movable along a pulley motion track; and a second pulley 230 adapted for receiving the wire from the first pulley 220 and for redirecting the wire. The second pulley is rotatably mounted to the main frame portion 100 for rotation around a second pulley axis 232. The first pulley 220 and the second pulley 230 are arranged such that during operation the wire is redirected by the first pulley by a first redirection angle of not more than 120 DEG, and that the wire is redirected by the second pulley by a second redirection angle of not less than 60 DEG.

Description

201134571 六、發明說明: 【發明所屬之技術領域】 本發明之態樣係關於一種絲線切鋸裝置與一種用以操 作這樣的絲線切蘇裝置之方法。更詳細地說,本發明之 態樣係關於-種用在削方器(squarer)、截斷器(⑽p㈣ 或諸如此類者之絲線切鑛褒置’其用以切割(cut)或切鑛 (saw)諸如碎或石英塊材之硬材料,例如以為了切割石夕晶 【先前技術】 絲線切鑛裝置是存在用來從一件硬材料(諸如们來切 割塊材或塊體、薄片(例如半導體晶圓)。在這樣的裝置 中經拉伸的絲線是從捲筒來饋送以及藉由絲線引導圓 柱來引導且拉緊。用於㈣之絲線係大致上被提供有一 研磨材料。作為-選擇,可以漿料形式來提供研磨材料。 這可在絲線碰觸待切割的材料之前迅速地完成。藉此, 研磨材係被絲線承載到切割位置以用於切割材料。作為 另二選擇’ m線上以塗層形式來提供研磨材。舉例 而言’可在金屬絲線上以塗層形式來提供鑽石微粒,其 中鑽石微粒是嵌入為絲令 在絲線的塗層中。藉此,研磨材係穩 固地接合到絲線。 “ 大致上,具有使用越薄之絲線以為了減小切割厚度且 藉此減少經浪費之妇_ 4 之材枓的趨勢。亦希望使用鑽石絲線。 201134571 &些越溥之絲線與鑽石絲線大致上亦遭受損壞,並且絲 線在高應變下會更容易地斷裂。再者,希望增加切割速 度以為了改善絲線㈣裝置之產出。移動件材通過網的 最大速度與在依給定時間内最大有效切割面積是受限於 些因素,其包括絲線速度、待切鋸之材料的硬度、分 佈影響、期望之精確度等。當速度增加時,絲線上之應 變也會大致上増加。因此,上述之避免絲線之損壞或斷 裂的問題在更高的切鋸速度下會變得更嚴重。 【發明内容】 鑑於上述,提供了根據獨立項1和2之絲線管理單元 及根據請求項2G之絲線㈣裝置及根據獨立項22之方 法。進-步優點、特徵、態樣與細節可由附屬項、發明 說明及圖式變得明顯。 根據f施例,提供一帛適於一絲線切鑛裝置之絲線 管理單元,該絲線切㈣置具有形成—絲線網之一絲 線。該絲線管理單元具有一主框架部分與一絲線處理 部’該絲線處理部包括:一捲筒車由,其適於承載一捲筒, 該捲筒提供該絲線朝向該絲m —滑輪,其適於 接收來自該捲筒之該絲線且再引導該絲線,該第一滑輪 係可旋轉地裝設到—滑輪承鮮元而繞著-第-滑輪軸 線旋轉,該滑料財元可沿著―滑輪運動執道縱向地 移動;及-第二滑輪’其適於接收來自該第—滑輪之該 201134571 絲線且再引導該絲線,其中該第二滑輪係可旋轉地裝設 到該主框架部分而繞著一第二滑輪軸線旋轉,其中該第 一滑輪與該第二滑輪係被安排成使得,在操作期間,該 絲線係由該第一滑輪再引導不大於12〇。之一第一再引導 角度,且該絲線係由該第二滑輪再引導不小於6〇。之一第 二再引導角度。根據一進一步實施例,該第一滑輪與該 第二滑輪係被安排成使得,在操作期間,該絲線係由該 第一滑輪再引導一第一再引導角度,且該絲線係由該第 二滑輪再引導一第二再引導角度,該第二再引導角度大 於該第一再引導角度。 根據一進一步實施例,提供一種絲線切鋸裝置,該絲 線切鋸裝置具有形成一絲線網之一絲線。該絲線切鋸裝 置包括一絲線管理單元。該絲線管理單元具有一主框架 部分與一絲線處理部。該主框架部分係剛性地連接到該 絲線切鋸裝置之一底座。該絲線處理部包括··一捲筒軸, 其適於承載一捲筒,該捲筒提供該絲線朝向該絲線網; 第/月輪,其適於接收來自該捲筒之該絲線且再引導 該絲線,該第—滑輪係可旋轉地裝設到一滑輪承載單元 而繞著一第一滑輪軸線旋轉,該滑輪承載單元可沿著一 滑輪運動軌道縱向地移動;及—第二滑輪,其適於接收 來自該第一滑輪之該絲線且再引導該絲線,其中該第二 滑輪係可旋轉地裝設到該主框架部分而繞著一第二滑輪 轴線旋轉’其中㈣―滑輪與㈣二滑輪係被安排成使 得’在操作期間’該絲線係由該第—滑輪再引導不大於 6 201134571 120°之一第一再引導角度,且該絲線係由該第二滑輪再 引導不小於60。之一第二再引導角度。根據一進一步實施 例’該第一滑輪與該第二滑輪係被安排成使得’在操作 期間,該絲線係由該第一滑輪再引導一第一再引導角 度’且該絲線係由該第二滑輪再引導一第二再引導角 度,該第二再引導角度大於該第一再引導角度。 根據一進一步實施例,提供一種操作一絲線切鑛裝置 之方法,該絲線切鋸裝置具有一主框架部分,該方法包 括下列步驟:從一捲筒提供絲線;縱向地沿著一滑輪運 動執道移動一滑輪承載單元;由一第一滑輪接收來自該 捲筒之該絲線且由該第一滑輪再引導該絲線,該第一滑 輪係可旋轉地裝設到該滑輪承載單元而繞著一第一滑輪 軸線旋轉;由一第二滑輪接收來自該第一滑輪之該絲線 且由該第二滑輪再引導該絲線,該第二滑輪係可旋轉地 裝設到該主框架部分而繞著一第二滑輪軸線旋轉,藉此 該第一滑輪係再引導該絲線不大於12〇。之一第一再引導 角度,並且該第二滑輪係再引導該絲線不小於6〇。之一第 一再引導角度。根據一進一步眚姑也丨丨 斗尬 ^ 7貫施例,該第二滑輪因該 絲線之絲線張力而接收比該第一滑輪更大的負載。 實施例亦導向設備,該設備用w杳分e t 又筒用以實施所揭示方法且包 括用以執行各個所描述方法舟翻 刀次π驟的设備部件。這些方法 步驟可精由硬體.構件、被程式仆以、奋A k 狂式化u適當軟體之電腦、此 兩者之任何組合、或以任何方4 Α丑/ 订方式來執行。又,根據本發 明之實施例亦導向方法,所描述 Γ田迷之设備係藉由該等方法 201134571 來操作。該等方法包括用以實施設備之各功能的多個方 法步驟。 【實施方式】 下文將詳細地描述本發明之各種實施例,其一或多個 實例係繪示在圖式中。在以下的圖式的敘述中,相同的 元件代表符號係指相同的元件。大致上,僅描述個別實 施例的差異。各實蚪是被提供用來解釋本發明之態樣, 並且不欲被構成本發明之限制。又,所繪示或描述之作 為一實施例之部分的特徵可用在其他實施例中或與其他 實施例結合,而產生進一步實施例。吾等意圖將說明包 括這樣的變更和變化。 再者,在以下敘述中,一絲線管理單元將可被瞭解成 一裝置,其係處理絲線到絲線切鋸裝置(諸如截斷器、削 方器、或晶圓切割絲線鋸)之工作區的供應。典型地,絲 線鋸包括一絲線引導件,該絲線引導件用以傳送且引導 絲線於絲線移動方向,同時絲線管理單元提供絲線張力 的控制。又,絲線管理單元提供之絲線形成了一絲線網, 如上所述。在下文中,一絲線網將被認定成由單一絲線 管理單元形成的網。應瞭解,一絲線網可含有超過一個 工作區,其中工作區是被定義成切鋸製程所執行的區域。 典型地,在此所描述之絲線引導件之實施例係適於或 設以用於絲線切鋸裝置,絲線引導件可用在絲線切鋸裝 8 201134571 置中與(或)可以是絲線切鋸裝置之一部分。除了可用以 適配或設置任何滑輪或其他在此所描述之部件的其他態 樣,這樣的滑輪可具有一溝槽結構,該溝槽結構係設以 引導厚度為40〇μιη或以下或厚度為任何上述其他直徑之 絲線。藉此,應注意,溝槽結構是特別地被設計用在絲 線直徑和切割製程,以為了容許高精確度切割(例如 25 0μηι或以下、或甚至5〇μιη或以下的精確度)。 如第1圖所示,在一絲線切鋸裝置中,絲線1〇係從捲 筒12來提供。在切鋸期間,絲線10從捲筒12鬆開。藉 此,捲筒繞著其軸線12a旋轉。第i圖顯示了絲線1〇正 被承載在捲筒之絲線承載區$ 13a丨。在絲線切鑛裝置 1内,絲線10從捲筒12被引導越過滑輪丨丨到滑輪20、 3〇,其繞著各自的滑輪軸線(例如32)旋轉。接著,絲線 10被引導到一切割區域’一絲線網在該切割區域中形 成。藉此,例如,絲線10被傳送通過絲線切鋸裝置γ 100’。在此,可瞭解主框架係201134571 VI. Description of the Invention: [Technical Field] The present invention relates to a wire sawing device and a method for operating such a wire cutting device. In more detail, the aspect of the present invention relates to a squarer, a cutoff ((10)p(4) or the like, which is used for cutting or cutting (saw). Hard materials such as broken or quartz blocks, for example in order to cut Shi Xijing [Prior Art] Wire cutting devices are used to cut blocks or blocks, such as semiconductor crystals, from a piece of hard material. Round). The drawn wire in such a device is fed from a reel and guided and tensioned by a wire guiding cylinder. The wire for (4) is substantially provided with an abrasive material. The slurry is provided in the form of a slurry. This can be done quickly before the wire touches the material to be cut. Thereby, the abrasive material is carried by the wire to the cutting position for cutting the material. The layer is provided in the form of a layer. For example, 'the diamond particles can be provided in the form of a coating on the wire, wherein the diamond particles are embedded in the coating of the wire. Thereby, the abrasive is firmly connected Incorporating to the thread. "In general, there is a tendency to use a thinner wire in order to reduce the thickness of the cut and thereby reduce the waste of the material. It is also desirable to use a diamond thread. 201134571 & The diamond wire is also generally damaged, and the wire is more easily broken under high strain. Furthermore, it is desirable to increase the cutting speed in order to improve the output of the wire (4) device. The maximum speed of the moving piece through the net and in the The maximum effective cutting area in a given time is limited by factors such as the speed of the wire, the hardness of the material to be sawed, the influence of the distribution, the accuracy of the desired, etc. As the speed increases, the strain on the wire will also increase substantially. Therefore, the above-mentioned problem of avoiding damage or breakage of the wire becomes more serious at a higher cutting speed. SUMMARY OF THE INVENTION In view of the above, a wire management unit according to the independent items 1 and 2 and a request item are provided. 2G wire (4) device and method according to independent item 22. The advantages, features, aspects and details of the step can be obvious by the subsidiary item, invention description and schema According to the embodiment, a wire management unit suitable for a wire cutting device is provided, the wire cutting (four) having a wire forming a wire mesh. The wire management unit has a main frame portion and a wire processing portion. The wire processing portion includes: a reel vehicle adapted to carry a reel that provides the wire toward the wire m-pulley adapted to receive the wire from the reel and re-direct the wire, The first pulley system is rotatably mounted to the pulley bearing fresh element and rotates around the -first pulley axis, the sliding material fiscal element can be moved longitudinally along the "pulley movement"; and - the second pulley is suitable Receiving the 201134571 wire from the first pulley and re-directing the wire, wherein the second pulley is rotatably mounted to the main frame portion and rotates about a second pulley axis, wherein the first pulley and the first pulley The second pulley train is arranged such that during operation, the wire is redirected by the first pulley by no more than 12 inches. One of the first re-directing angles, and the wire is redirected by the second pulley by no less than 6 inches. One of the second redirection angles. According to a further embodiment, the first pulley and the second pulley are arranged such that during operation, the wire is redirected by the first pulley by a first redirection angle and the wire is The pulley re-directs a second re-directing angle that is greater than the first re-directing angle. According to a further embodiment, a wire sawing device is provided having a wire forming a wire mesh. The wire cutting device includes a wire management unit. The wire management unit has a main frame portion and a wire processing portion. The main frame portion is rigidly coupled to a base of the wire cutting device. The wire processing portion includes a reel shaft adapted to carry a reel that provides the wire toward the wire web; a month/moon wheel adapted to receive the wire from the reel and redirect The wire, the first pulley is rotatably mounted to a pulley carrying unit for rotating about a first pulley axis, the pulley carrying unit is longitudinally movable along a pulley moving track; and—the second pulley, Suitable for receiving the wire from the first pulley and redirecting the wire, wherein the second pulley is rotatably mounted to the main frame portion and rotates about a second pulley axis 'where (four) - pulley and (four) The two pulley systems are arranged such that during the operation, the wire is redirected by the first pulley to a first re-directing angle of no more than 6 201134571 120°, and the wire is re-guided by the second pulley by not less than 60 . One of the second redirection angles. According to a further embodiment, the first pulley and the second pulley are arranged such that during operation, the wire is redirected by the first pulley by a first redirection angle and the wire is second The pulley re-directs a second re-directing angle that is greater than the first re-directing angle. According to a further embodiment, a method of operating a wire cutting device having a main frame portion, the method comprising the steps of: providing a wire from a reel; and performing a longitudinal movement along a pulley Moving a pulley carrying unit; receiving the thread from the reel by a first pulley and re-directing the thread by the first pulley, the first pulley is rotatably mounted to the pulley carrying unit and surrounds the first Rotating a pulley axis; receiving the wire from the first pulley by a second pulley and re-guiding the wire by the second pulley, the second pulley is rotatably mounted to the main frame portion around the first The two pulley axes rotate, whereby the first pulley train redirects the wire no more than 12 inches. One of the first re-directing angles, and the second pulley re-directs the wire no less than 6 inches. One of the first re-directed angles. According to a further embodiment, the second pulley receives a greater load than the first pulley due to the thread tension of the thread. The embodiment is also directed to a device that is used to implement the disclosed method and includes apparatus components for performing the various methods of the boat. These method steps can be performed by hardware, components, programs, hacking, computers, any combination of the two, or in any way. Moreover, the apparatus according to the present invention is also directed to the method, and the apparatus described in the field is operated by the method 201134571. The methods include a plurality of method steps for implementing various functions of the device. [Embodiment] Various embodiments of the present invention are described in detail below, and one or more examples thereof are illustrated in the drawings. In the following description of the drawings, the same elements represent the same elements. In general, only the differences of the individual embodiments are described. The various embodiments are provided to explain the invention and are not intended to be construed as limiting. Further, features illustrated or described as part of an embodiment can be used in other embodiments or in combination with other embodiments to yield further embodiments. We intend to include such changes and changes in the description. Further, in the following description, a wire management unit will be understood as a device that processes the supply of a wire to a work area of a wire sawing device such as a cutter, a squarer, or a wafer-cut wire saw. Typically, the wire saw includes a wire guide for conveying and guiding the wire in the direction of wire movement while the wire management unit provides control of the wire tension. Further, the wire provided by the wire management unit forms a wire mesh as described above. In the following, a wire mesh will be identified as a mesh formed by a single wire management unit. It should be understood that a wire mesh may contain more than one work area, where the work area is defined as the area in which the sawing process is performed. Typically, embodiments of the wire guides described herein are suitable or provided for use in a wire sawing device, which may be used in a wire sawing device 8 201134571 and/or may be a wire sawing device Part of it. In addition to other aspects that may be used to fit or set any pulley or other components described herein, such a pulley may have a grooved structure that is configured to direct a thickness of 40 〇μηη or less or a thickness of Any of the other diameter wires described above. By this, it should be noted that the groove structure is specifically designed for the wire diameter and the cutting process in order to allow high-precision cutting (e.g., 25 μm or less, or even 5 μm or less). As shown in Fig. 1, in the wire sawing device, the wire 1 is supplied from the spool 12. The wire 10 is released from the spool 12 during the sawing. Thereby, the spool rotates about its axis 12a. Figure i shows that the wire 1〇 is being carried on the wire carrying area of the reel $13a丨. In the wire cutting device 1, the wire 10 is guided from the spool 12 over the pulleys to the pulleys 20, 3, which rotate about respective pulley axes (e.g., 32). Next, the wire 10 is guided to a cutting area where a wire web is formed. Thereby, for example, the wire 10 is conveyed through the wire sawing device γ 100'. Here, you can understand the main frame system.

替地從捲筒之一側移動到另一 之主框架之一主框架部分100, 為設備的一部分,其在操作期 裝置之底座。因此’當絲線管 裝設在主框架部分上時,此裝 田佈同崧開時,絲線係交 側(凸緣到凸緣)。這可由 201134571 暴在從捲筒1 2之不同位置處被鬆開的絲線丨〇 出’如同顯示了在和絲線丨〇不同位置處之絲線1 〇 ’之虛 線所示。 為了先進的絲線切鋸裝置(諸如截斷器、削方器或絲線 鋸),存在著以高速來切割諸如半導體材料(例如矽、石 英、或諸如此類者)之硬材料的期望。絲線速度,其為絲 線移動通過絲線切鋸裝置、絲線管理單元與待切鋸的材 料的速度,可以是例如1〇m/s或更高。典型地,絲線速 度可以是15-20 m/s。然而,25 m/s或3〇 m/s之更高的絲 線速度亦是令人期望的且可在特定條件下實現。 為了在期望的絲線速度下鬆開絲線,捲筒係以高達每 分鐘數千轉的旋轉速度來旋轉。舉例而言,可提供 1〇〇〇-2_ rpm來鬆開絲線。是以,如第i圖所示,絲線 10離開捲筒12之不同位置亦在相當高的速度下改變, 並且絲線10進入滑輪20之角度相應地改變。因而,絲 線在捲筒12處與在滑# 2〇之固定滑輪溝槽之入口處之 間的角度會週期性地改變。當絲線從滑輪溝槽之一側滑 動到另-側時,此改變在絲線中產生震動。此改變最終 甚至會造成絲線爬上溝槽的側壁23。這些震動對於製程 是有害的’這是因為其產生了絲線斷裂的高風險(例如當 絲線容納在滑輪溝槽側壁23上的震動振幅與上下移動 時’由於絲線内之張力的尖峰)。再者,當存在更薄絲線 直徑和鑽石塗覆絲線的期望時,這是特別有關的,這是 因為在這些情況中,絲線甚至會更容易地斷裂。又,捲 10 201134571 筒12上的變化絲線位置與尤其是絲線⑺進入滑輪汕之 變化角度會造成絲線切鋸裝置中的波動,其會惡化切割 精確度。 為此目的,固定滑輪20可由一可移動滑輪來取代,其 中該可移動滑輪係可縱向地移動於平行捲筒軸線12a之 方向。可移動;骨輪可被裝設有一跟蹤系统,該跟縱系統 係容許其追隨絲線從捲筒之一側移動到另一側的位置, 因此絲線總疋切線地進入滑輪。這樣的滑輪係被描述在 例如歐洲專利申請案EP〇9153〇51 9中,其在此以引置方 式併入本文作為參考,尤其是參照歐洲專利申請案 EP09153051.9中第3A圖和第⑶圖之跟蹤系統的敘述及 其相應敘述。然而,由於有時候絲線之相當高張力,足 夠穩固地支撐可移動滑輪以使可移動滑輪能承受高絲線 張力是困難的。若可移動滑輪無法足夠穩固地被支撐, 滑輪支撐件、可移動化輪與絲線的不希望變形和震動會 發生。這樣的震動會再次地造成絲線中之不希望的波 動’並且在一些情況中會造成絲線斷裂。 疋以,希望可改善絲線管理單元,從而能減少上述困 難。根據第2圖所描述之一實施例,提供一絲線切鋸裝 置1。在絲線切鋸裝置令,存在有一絲線管理單元,絲 線管理單元之一些部件顯示在第2圖。根據不同之實施 例,絲線切鋸裝置丨可以是截斷器、削方器、絲線鋸或 多絲線鋸。藉此,截斷器可被瞭解成一裝置,其可用以 從塊體或塊材(其已經在削方器中被分離成多個塊體)切 11 201134571 鋸鈿件削方器是一絲線鋸,其大致上切鋸矽鑄塊成希 望尺寸的方塊,以致一絲線鋸或多絲線鋸可在一晶圓化 製程中從塊體切鋸晶圓。在此之絲線管理單元是特別地 適用於削方器的絲線切鋸裝置,但不限於削方器。 第2圖之絲線管理單元包括一捲筒212,捲筒212具 有一捲筒軸線2l2a。捲筒是由一捲筒軸21〇所承載。捲 筒軸210係可旋轉地裝設到主框架部分⑽而繞著捲筒 軸線212a旋轉。藉此,捲筒軸21〇係將捲筒繞著捲筒軸 線212a旋轉。捲筒軸旋轉可由一捲筒馬達來驅動。相對 地,下文將描述的滑輪係大致上可自由地旋轉。在捲筒 212上,將朝向絲線網提供的絲線1〇係被承載在捲筒 之一絲線承載區域213a中。絲線承載區域213a具有沿 著捲筒轴線212a之方向的絲線承載長度。在絲線1〇從 捲筒212鬆開的期間,絲線係朝向絲線鋸之絲線網來提 供。 一第一滑輪220顯示在第2圖中。在此且大致上,滑 輪具有一適於引導絲線之溝槽。再者,滑輪大致上具有 一絲線引導位置以為了引導一絲線在滑輪中,即在滑輪 溝槽中。第一滑輪220係適於從捲筒212(尤其是直接從 捲筒212)接收絲線且接著再引導絲線。第一滑輪係可旋 轉地裝設到一滑輪承載單元224 ,以致第一滑輪22〇可 繞著第一滑輪軸線222旋轉。滑輪承載單元224進而連 接到絲線切鋸裝置(更詳細地說,連接到絲線切鋸裝置1 之主框架部分),以致滑輪承載單元224可縱向地沿著一 12 201134571 滑輪運動執道移動(即滑輪運動軌道是被定義成滑輪承 載單元了其移動的區域)。藉此,亦定義了第一滑輪之 第一滑輪運動軌道(即第一滑輪220可縱向地沿其移動的 軌道)。再者,作為一般態樣,第一滑輪運動軌道可具有 捲筒212之絲線承載區域213a之長度之至少9〇%的長 度。在此,絲線承載區域213a是絲線可從捲筒顯露出之 絲線212之長度節段,即大致上是從捲筒之凸緣到凸緣 的長度。作為進一步一般態樣,滑輪運動執道可延伸橫 越絲線承載區域213a之長度,從凸緣到凸緣。 主框架部分1 〇〇係剛性地連接或可剛性地連接到絲線 切鋸裝置底座。藉此,主框架部分1〇〇是非常強健的, 並且例如主框架部分上的負載可由底座吸收。主框架部 为1〇〇可被製成單件式,或由多件來構成(如第2圖之件 110與112)。在此,該些件!丨〇、丨丨2係彼此剛性地連接, 例如藉由螺絲或一些其他連接器。不受所顯示之實施例 影響,主框架部分1〇〇在操作期間係整體剛性地連接到 絲線切鋸裝置之底座。 滑輪220之滑輪運動執道係實質上平行捲筒軸線 212a ^根據可和在此所描述之任何其他實施例結合之實 施例,其他的移動方向可重疊到上述移動。舉例而言, 可提供相較於捲筒軸線212a之一彎曲軌道與(或)一傾斜 軌道。 在第2圖中’滑輪承載單元224係顯示成一標。在可 和在此所描述之任何其他實施例結合之其他實施例中, 201134571 —承載滑輪 220 滑輪承载單元224可被提供成一桿或另 之支撐件,以致其可繞著軸線222旋轉 —滑輪軸線222係定向成相對於捲筒軸線η。呈實 質上90。之角度。在此,此角度係被定義成一空間角度, 即該些軸線橫跨之平面中之該些軸線的角度(若有需 要’在該些軸線之其一軸線平移以致該些軸線交叉且橫 跨-平面之後)。此角度被定義成一絕對角度,即總是為 正。 根據在此所描述之實施例,提供一滑輪移動裝置咖。 滑輪移動裝置228係由第2圖中之箭頭所顯示,且適於 使滑輪承鮮元224以U向模m賴運動執道移 動。滑輪移動裝置228適於沿著運動轨道(在此是平行於 捲筒之轴線2 i 2a)移動滑輪22〇與絲線位置㈣裝置,以 為了將滑輪定位在捲筒212上方期望的位置處。滑輪移 動裝置228可以是例如一線性致動器(諸如線性馬達)、 —氣動汽缸、-具有蜗桿驅動之馬達、一支架-齒條-齒 輪、或諸如此類者’以致滑輪移動裝置能至少於沿著滑 輪運動軌道之隸方向來移㈣輪。藉此,滑輪可藉由 移動π輪承載單224來相對於絲線切錯裝置丨之主框 架部分100而移動。 根據可和在此所描述之其他實施例結合之進一步實施 例’可提供-絲線位置偵測裝置226。絲線位置偵測裝 置係偵測沿著運動路徑方向(在此是沿著捲筒軸線幻 的絲線位置,更詳細地說,其係偵測絲線橫越了絲線位 201134571 置偵測裝置226之偵測區域的絲線位置。藉此,可獲得 絲線10離開捲筒212或絲線承載區域213a的位置(若有 需要可藉由三角測量)。 絲線位置偵測裝置226連接到滑輪移動裝置228。藉 此,可在絲線位置偵測裝置226與滑輪移動裝置228之 間提供例如一訊號接收單元、一控制器、一用以計算正 確滑輪位置之電腦等。在—特定實施例中,—控制器係 可操作地連接到絲線位置偵測裝置226,以用於接收偵 測到的絲線位置。控制器決定一目標位置且傳送一移動 命令到第一滑輪移動裝置228,從而使第一滑輪移動裝 置可移動第一滑輪到目標位置。尤其,目標位置可以是 相應於絲線10離開捲筒之位置的位置。藉由此目標位 置,絲線係以相對於滑輪軸線2123之直角離開捲筒,如 第2圖所示。第一滑輪移動裝置2 2 8、絲線位置伯測裝 置226與第一滑輪位置控制器可共同地稱為第一滑輪絲 線跟蹤系統。大致上,可提供__第—滑輪絲線跟縱系統 以谷許第一滑輪移動裝置228回應所偵測絲線位置的致 動。 再者作為一般態樣,第一滑輪2 2 0之滑輪運動軌道 係被安排成使得對於絲線10離開線圈212之絲線承載區 域213a的任何位置,在滑輪運動軌道上存在有第一滑輪 之至 >、位置’以致絲線係實質上切線地進入第一 z月輪220。再者,大致上,第一滑輪220(與任何其他滑 輪,右存在於實施例中,諸如下述之第二滑輪230)可被 15 201134571 安排成使得對於料Η)離開線圈212之絲線承載區域 213& ^壬何位置,在滑輪運動軌道上存在有第-滑輪 220之至少一位置’以致絲線係實質上切線地離開且進 入線圈和滑輪之任一者。此安排容許一不扭轉之絲線。 在此:「不扭轉」係指絲線實質上切線地進入且離開絲線 管理單元之線圈和滑輪。作為相反實例,第i圖顯示之 絲線(其係非切線地進入且離開滑輪20)會扭轉。因此, 控制器可經程式化以對於絲線1〇離開絲線承載單元 213a之任何位置來致動滑輪移動裝置228,從而使絲線 實質上切線地進入第一滑輪22〇,尤其從而使絲線實質 上不扭轉。 持續第2圖之實施例的說明,第2圖之絲線管理單元 具有一第二滑輪230,第二滑輪230適於接收來自第一 滑輪220(尤其是直接來自第一滑輪)之絲線且再引導絲 線第一滑輪230係可旋轉地裝設到主框架部分丨〇〇而 能繞著-第二滑輪軸線232旋轉。大致上,在絲線管理 單元内,亦可提供進一步滑輪。 絲線係由第一滑輪22〇再引導9〇。之第一再引導角 度’並且由第二滑輪230再引導180。之第二再引導角 度。由於大的第二再引導角度,絲線張力的主要部分(特 別是張力尖峰的情況中)係被第二滑輪吸收,其中該第二 滑輪由主框架部分1〇〇來穩固地支撐。由於主框架部分 100之穩固支撐’第二滑輪230可以比可移動之第—滑 輪220更輕易地且穩定地承受張力。藉此,可減少不希 16 201134571 望之可移動滑輪220與因而絲線的變形和震動。所以, 亦可減少絲線本身、絲料理單元之構件、或絲線切鑛 裝置之其他構件的波動。再者,可減少絲線斷裂的風險。 藉此’可達到更高之絲線速度與因而更高之絲線產出。 大致上,m線由第-滑輪再引導不大於12G。之第-再引導角度’並且若絲線由第二滑輪再引導不小於60。 之第二再引導角度’可藉由穩固接附之第二滑❺230來 吸收絲線張力到某程度。在第2圖之實例中,再引導角 度係獨立於第-滑輪220在第-運動軌道上之位置,但 更-般地’第一滑輪22〇在第一運動執道上之至少一位 置必須滿足上述情況。在可和在此所描述之任何其他實 施例結合之此y丨士 二實施例中,第一滑輪在第一運動軌道上 之任何位置甚至可滿足上述情況。在一些實施例中,第 再引導角度疋100°或更小、或甚至9〇。或更小。又, 在一些實施例中’第二再引導角度不小於90。、不小於 120或甚至18〇。。在此,再引導角度係被定義成絲線 偏斜之整個偏斜角度。因此,例如,四分之-旋轉會導 致9〇之偏斜角度,並且四分之三旋轉會導致270。之偏 斜角度無,偏斜方向為何,偏斜角度係被取絕對值且 因此總疋為。 又,可表示一替代性且大致上有用的組態如下:在一 組態中’第二再引導角度大於第-再引導角度。在此組 態中’由第二滑輪因絲線之絲線張力而接收的負載可以 大於由第—滑輪接收的負載。再次地,這可有助於避免 17 201134571 在可移動第-滑輪上之過度負載。可表示一進一步替代 性且大致上有用的組態如下:在一組態中,再引導角度 係經選擇而使得第:滑輪2則絲線iQ之料張力比第 一滑輪220接收更大的負载。 在第2圖中,第一與第二再引導角度係指向彼此相反 的纏繞方向。這可容許特別小型的配置,並且也可容許 特別有效之第二滑輪的絲線張力吸收。再者,第一滑輪 軸線222與第二滑輪軸、線232 f質上彼此平行。更大致 上’在實施例中,第一滑輪軸線222與第二滑輪軸線232 可具有相對於彼此之小於9〇。的角度。又,在第2圖中, 絲線10被第一滑輪220偏斜於遠離主框架1〇〇之壁元件 的方向。接著,絲線10被第二滑輪23〇偏斜於朝向 主框架1〇〇之壁元件11()的方向。 再者第2圖中之滑輪運動軌道平行於絲、線⑺在第一 /月輪220與第二滑輪23G之間的絲線節段。藉此,對於 第一滑輪22G之任何位置,第—與第二滑輪之間的絲線 係延伸於(即平行於)滑輪運動軌道的方向。這意謂著絲 線的方位不受第一滑輪22〇在滑輪運動執道上之位置所 影響X,對於第一滑輪之任何位置,第一滑輪與第二 滑輪係彼此被安排成使得絲線係切線地離開第一滑輪且 切線地饋送到第二滑輪,或不扭轉。 再者,若使用了具有塗層(例如鑽石塗層)之薄絲線或 絲線,捲筒軸可以是特別有用的。特別地,捲筒轴是適 ;肖丨方器因此,在可和在此所描述之任何其他實施 201134571 j »:之實知例中,在此描述之絲線處理部與絲線切鋸 裝:係適用於直徑小於約400叫之薄絲線(如約2〇〇_ μιη,更特別地為約2〇〇μιη至約叫爪)。然而, 在其他情況中,實施例亦可具有小至例如10_或甚至 μη之4線直輕。又’在此描述之絲線處理部與絲線切 裝係、適用於經塗覆之絲線’例如具有鑽石微粒内嵌 在其中之錄塗層的絲線。這樣的絲線可典型地具有約 则㈣至約4〇〇_之直徑,例如31〇μιη至340μΓη。因為 裝《又與卸下鑽石絲線可能是必要的(特別是時常的),例 如為了雙方向切鋸或因大致上短的絲線長度,在此揭示 之捲筒軸對於鑽石絲線是尤其有用的。對於絲線扭轉會 增加、4線斷裂或塗層損壞的風險之絲線 是有利的’如第2圖所示。藉由使用鑽石絲線,產= 增加2或甚至更大的倍數。在削方器的情況中,可依此 方式來達到1〇〇MW或甚至更大之產出速率。當使用了鑽 石絲線時,絲、絲之進—步料可適用於鑽^絲線。例 如’機械部件、電氣部件與⑷軟體可適用於鑽石絲線 之使用。 在下述中,描述了又進一步實施例,其元件可和在此 所描述之其他實施例之任何元件結合。在以下說明中, 僅描述了不同於前述實施例之元件或在此所描述其他實 施例之元件的元件。應瞭解’涉及其他實施例而描述之 構件、態樣與細節亦可廡^丨、Λ ^ ^ j』應用到沒有描述所有構件、態樣 或細節之實施例。 19 201134571 第3圖顯示一進一步實施例,其中第一滑輪220位在 不同於第2圖之在滑輪運動軌道上的位置(即遠離主框架 部分100)。又’第3圖繪示了第2圖所描述之實施例的 一些變化。所有的這些變化可彼此獨立地被包括在第2 圖之實施例中。作為第3圖中之第一變化,提供一凹部 116於主框架部分1〇〇中。凹部之尺寸可以且凹部被安 排成可以至少部分地容納第一滑輪220。此凹部容許第 一滑輪220與因而捲筒212被安排成更靠近主框架部分 1〇〇’同時仍容許第一滑輪運動軌道可覆蓋大部分或全部 的絲線承載區域2 1 3 a。 作為第3圖中之一進—步變化,第3圖之主框架部分 100係整體地被形成為單件式,而不是如第2圖所示包 括一些部件。主框架部分1〇〇甚至可整體地被形成在主 框架内而為一且相同的件。 作為第3圖中之一進—步變化,提供一第三滑輪24〇, 第三滑輪240適於接收來自第二滑輪230(尤其是直接來 自第二滑輪230)之絲線且再引導絲線一第三再引導角 度—第一π輪240係可旋轉地裝設到主框架部分丨〇〇而 繞著第三滑輪軸線242旋轉。第三滑輪軸線242實質上 垂直於捲筒軸線212a與第二滑輪軸線232。纟此,絲線 以垂直於第3圖之圖像平面的方向離開第三滑輪24〇(在 第圖中位在第二滑輪240之右側),以致再引導角度 為 90。。 第4圖為根據進一步實施例之絲線管理單元之一部分 20 201134571 的不意圖。其中,顯示了第3圖之裝設在捲筒軸210上 之捲筒212、絲線10、第一、第二與第三滑輪22〇、230 與240。相較於第3圖之側視圖,第4圖顯示一從捲筒 轴線212a之方向面對捲筒212(從第3圖的左側)的前視 圖。又,第4圖顯示一第四滑輪250 ,第四滑輪250接 收來自第二滑輪之絲線且再引導絲線一第四再引導角 度。第四滑輪250係可旋轉地裝設在框架上而繞著第四 滑輪轴線252旋轉。在此,第四再引導角度為約9〇。。在 其他實施例中’第四再引導角度可以介於6〇〇與丨2〇。之 間。第四滑輪軸線252實質上平行於捲筒軸線212a。又, 第四滑輪軸線252實質上垂直於第一滑輪軸線222、第 二滑輪軸線232與第三滑輪軸線242。在其他實施例中, 第四滑輪軸線252可實質上平行於這些軸線之至少一 者。 第4圖之實施例為一般態樣,其中參考框架可 定義成如下:捲筒轴線212a定義X軸,並且垂直於捲筒 軸線之第二滑輪轴線222定義y軸,並且z軸被定義成 垂直於X和y軸之軸。以此方式定義之x、y*z軸亦顯 不在第2-7圖中。作為一般態樣,在x_y_z參考框架内, 捲筒212與第一和第二滑輪22〇、23〇(與任何其他滑輪, 若存在於實施例中)可適於接收絲線,從而能滿足選自從 下述的至少一狀態: _介於捲筒與第一滑輪之間的絲線主要沿著z軸延伸; -"於第一滑輪與第二滑輪之間的絲線主要沿著X軸延 21 201134571 伸; X轴延 介於第二滑輪與第三滑於夕鬥从 月輪之間的絲線主要沿著 伸; _介於第工滑輪與第四滑輪 伸; 之間的絲線主要沿著y軸延 -介於第四滑輪與絲線張力 ^刀15之間的絲線主要沿著延伸;及(或) -介於第五滑輪與第六滑輪 ^ ;之間的絲線主要沿著 Z軸 伸 y轴延 在—些實施例中(諸如第4圖之實施例),甚至可滿, 所有的這些狀態。在此,「主要沿著一軸延伸」係編 絲線方向沿著各自軸的分量係大於沿著z軸之妇 意其他者。 再者,可滿足選自從下述狀態之至少-狀態(與在實施 例中為所有狀態): _第—滑輪軸線實質上延伸於y方向(更大致上,第一 滑輪軸線可延伸在y_z平面中,其亦包括第一滑輪相對 於z方向傾斜的情況); _第二滑輪軸線實質上延伸於y方向; _第三滑輪軸線實質上延伸於z方向; •第四滑輪軸線實質上延伸於X方向; 、、糸線由第一滑輪再引導約90。之第一再引導角度; 、’’糸線由第二滑輪再引導約丨8〇。之第二再引導角度; -絲線由第三滑輪再引導約90。之第三再弓丨導角度;及 22 201134571 (或) 糸線由第四滑輪再引導約90。至12〇。之第四再引導角 度。 第5圖顯不絲線管理單元之一部分的立體圖。裝設在 捲疴軸210上之捲筒212以及滑輪220、23 0與240係被 安排成如第4圖所示。此外,可看到第3圖(凹部116) 所述之EJ部。又,滑輪承載單& 224被提供成一可縮 回的或可伸縮的桿。可縮回或可伸縮桿可沿著平行於捲 筒軸線之桿軸線而縱向地移動。桿係可縱向移動地裝設 到主框架部分⑽之壁部分(更精確地說,㈣ιΐ6之壁 部分)。 再者,在第5圖之實施例中,主框架部| 100包括一 裝汉構件114,第二與第三滑輪23()、24()裝設到裝設構 牛4 t。又構件i 14(其為主框架部分之部分)係剛性地 _絲線切鑛裝置之底座。儘管裝設構件之其他設計 是可行的,在第5圖之胜令香丄 . 圆之特疋貫施例中,裝設構件是—桿, 更詳細地說是一L形桿而且右楚 ^ 1^仟旳具有一第一腳以及一第二 腳114b’第一腳U4a延伸到本娌细如\ 一 J主C架邛分1 〇〇之側表面(即 平行於X軸來延伸),第_ J第一腳114b和第一腳形成一實 上直角且延伸到主框架部分 卞I刀之頂表面(即平行於z軸來 伸)。獨立於所顯示之實旆你丨,铱 1 貫施例,第—滑輪220與第二滑輪 230裝設在一共同的裝 再仟上(特別是在一單件式的梦 設構件上)是一般態樣。 飞的裝 第6圖顯示根據進一步音 步實施例之絲線管理單元的立體 23 201134571 圖。第6圖之實施例包括第5圖所顯示之元件,並且上 述第5圖說明亦應用到第6圖。又,顯示一第四滑輪25〇。 第四滑輪250被安排成如第4圖所示,以致相應之第4 圖描述亦應用到第6圖。第四滑輪裝設在裝設構件114 上。第6圖之實施例更包括一絲線張力器,其用以控制 絲線之張力。絲線張力器包括一第五滑輪26〇與一第六 滑輪270,第五滑輪26〇可旋轉地裝設到框架而繞著第 五滑輪軸線262旋轉,第六滑輪27〇可旋轉地裝設到一 可移動兀件274而繞著第六滑輪軸線272旋轉。可移動 兀件274係可移動地裝設在主框架部分上。可移動元件 274之移動可由馬達來控制,或者可移動元件274可例 如藉由彈簧來預偏壓以控制絲線張力。在第6圖中,可 移動元件274係顯示成一預偏壓之旋轉桿。絲線張力器 接收來自第四滑輪250之絲線1〇且提供絲線1〇到絲線 網(到第6圖顯示之絲線管理單元的右側)。更精確地說, 第五滑輪260接收來自第四滑輪25〇之絲線1〇且偏斜絲 線一第五偏斜角度,並且接著第六滑輪26〇接收來自第 四滑輪250之絲線10且偏斜絲線—第六偏斜角度。 藉由上述定義之χ-y-z參考框架,第6圖之實施例為 一般態樣,其可滿足從以下所選擇之至少一狀態(與在— 些實施例中為甚至所有的狀態): -絲線張力器位在捲筒2 1 2之一側上,實質上相對於第 一滑輪220 ; _第四滑輪與絲線張力器之間的絲線(更詳細地說,介 24 201134571 於第四與第五滑輪之間的絲線)主要沿著2軸延伸; -第五滑輪與第六滑輪之間的絲線主要沿著7軸延伸; _絲線離開第六滑輪而實質上平行於y軸; , -第五與第六滑輪具有各自實質上延伸於χ方向 線; 孕 第五再引導角度為約60。至90。(更詳細地說,約8〇。至 90°); -第六再引導角度為約18〇。。 大致上,在可和在此所描述之任何其他實施例結合之 實施例_,該些滑輪具有下述半徑之至少一者(且在一些 實施例中為下述半徑之全部):捲筒軸21Q具有約15〇咖 之直徑。第一滑輪220與第二滑輪230具有__至 150 mm之直徑,特別是U2mm (在此,直徑係意謂著由 絲線依循的直徑’即絲線引導溝槽内的直徑)。第三滑輪 240具有140咖至170 mm之直徑,特別是158 mm。 第四滑輪250具有類似於第一滑輪22〇之心。第五滑 輪260與第六滑輪27〇具有類似於第三滑輪請之直徑。 持續第6圖之說明,除了絲線處理部200(其在下述中 亦將被稱為主要絲線處理部細),第6圖之絲線管理單 元亦具有一次要絲線處理單元300。在此,使用術語「主 要」與-欠要」係、為了輕易辨識所用,並且不意謂著絲 線處理。p、捲筒等之任何等級或功能順序。次要絲線處 理〇係以類似於主要絲線處理部則來建構且具有 相應於主要絲線處理部2〇〇之元件的元件。次要絲線處 25 201134571 理部之s件被標示成「次要」元件且被指派元件代 表符號310、312等,而對應於相應之主要絲線處理部 200之「主要」元件21〇、212等。因此,次要絲線處理 單元綱具有例如—用於捲筒312之次要捲筒軸31〇、 一次要第一滑輪320、一次要第二滑輪33〇等。次要第 一滑輪320係可旋轉地裝設到一次要滑輪承載單元324 而繞著次要第1輪軸線322旋轉’次要滑輪承載單元 324可沿著次要滑輪運動軌道縱向地移動❶主要與次要 絲線處理部200、300係彼此相鄰地被放置在丫方向。作 為一般態樣(由所顯示實施例顯示但獨立於所顯示實施 例),主要與次要絲線處理部2〇〇、3〇〇可被配置在主框 架部分⑽之-共同的壁部分上。χ,主要與次要絲線 處理部200、300可被配置在絲線切鋸裝置之一共同的容 至中。又,由第6圖可看到主要捲筒212和第二捲筒 具有不同類型(由次要捲筒312之前凸緣中不存在有狹縫 可知)。 大致上,根據在此所描述之任何實施例,次要絲線處 理部300係以和絲線處理部2〇"目同的方式來形成。所 以,主要絲線處理部200之元件的說明可以應用到次要 絲線處理部3 0 0之相應元件。 在-操作實例模式中(此後稱為主要至次要捲筒切 鑛)’主要絲線處理部係提供來自主要第—㈣212之絲 線到網Η)’以致絲線可用於網之切鑛。接著,次要絲線 處理部則接收來自網之絲線1〇β藉此,絲線1〇從網 26 201134571 被傳送到次要絲線張力器(更精確地說是到次要第六滑 輪370)且接著到次要第五滑輪36〇,從此處到次要第四 心此处判-人要第二滑輪34〇,從此處到次要第 二滑輪3 3 0,從此處至丨丨+里_ $ ±人<·><·* Λ 攸此地判_人要第一滑輪32〇,且從此處最後 被纏繞到捲筒312上…一控制器係控制次要第一滑 輪320沿著次要滑輪運動軌道之運動,以致絲線以一受 控方式被纏繞到次要捲筒312之絲線承載區域上。 為了接收絲線,一次要第一滑輪控制器包括一絲線纏 繞圖案,並且經程式化以決定為了纏繞絲線在次要捲筒 之絲線上的期望絲線纏繞位置,並且傳送一移動命令到 次要第一滑輪移動裝置328以使次要第一滑輪移動裝置 328能移動次要第—滑輪32〇到期望的絲線纏繞位置。 次要第二滑輪3 3 0再引導絲線約丨8 〇。,並且次要第一 滑輪再引導絲線約90。。由於大的次要第二滑輪33〇再引 導角度,可避免在絲線纏繞期間劇烈的張力和波動(如前 所解釋),以致絲線可穩固地被纏繞而具有減少的絲線損 壞風險。所以,獨立於第7圖之實施例,次要第二滑輪 330應該再引導絲線不小於6〇。,並且次要第一滑輪再引 導絲線不大於120。。 大致上,提供有新絲線於於其中之捲筒的類型(即第一 捲筒類型)係不同於經使用之絲線纏繞於其上之捲筒的 類型(即第二捲筒類型)。舉例而言,提供有新絲線於於 其中之捲筒可以是來自絲線製造業者之可拋棄捲筒。另 一方面’這樣的捲筒可能不適於接收經使用之絲線,這 27 201134571 是因為這樣的捲筒有時候盔、土 一 恢無法忍受經使用之絲線的高絲 線張力。為了在主要至次要棬 要捲疴切鋸期間支撐這些不同 的捲筒類型,主要捲筒軸(即 v |王要絲線處理部之捲筒軸) 可適於承載第一類型之捲筒, 並且。人要捲筒軸(即次要絲 線處理部之捲筒軸)可適於承 、%承載第二類型之捲筒,即第二 類型不同於第一類型。 、'在可和在此所描述之任何其他實施例結合之一 些實施例中’絲線管理部可支援雙方向切鑛。在此,雙 方向切鑛是被瞭解成_切4制 鑛製程’在該切鋸製程期間絲 線先從主要捲筒被傳送到 , 人要捲鸿,並且之後從次要捲The ground is moved from one side of the reel to one of the main frame portions of the main frame, which is part of the device, which is the base of the device during operation. Therefore, when the wire tube is mounted on the main frame portion, the wire is tied to the side (flange to flange) when the field is opened. This can be seen by the 201134571 bursting of the thread that was loosened from the different positions of the reel 12 as shown by the dashed line showing the thread 1 〇 ' at a different position from the thread. For advanced wire sawing devices, such as cutters, square cutters or wire saws, there is a desire to cut hard materials such as semiconductor materials (e.g., tantalum, quartz, or the like) at high speed. The wire speed, which is the speed at which the wire moves through the wire cutting device, the wire management unit, and the material to be cut, may be, for example, 1 〇 m/s or higher. Typically, the wire speed can be 15-20 m/s. However, higher wire speeds of 25 m/s or 3 〇 m/s are also desirable and can be achieved under certain conditions. In order to loosen the wire at the desired wire speed, the drum is rotated at a rotational speed of up to several thousand revolutions per minute. For example, 1〇〇〇-2_ rpm can be supplied to loosen the wire. Therefore, as shown in Fig. i, the different positions of the wire 10 from the reel 12 are also changed at a relatively high speed, and the angle at which the wire 10 enters the pulley 20 is correspondingly changed. Thus, the angle between the wire at the reel 12 and the entrance of the fixed pulley groove at the slide #2 periodically changes. This change creates a shock in the wire as the wire slides from one side of the pulley groove to the other side. This change eventually causes the wire to climb up the side wall 23 of the groove. These vibrations are detrimental to the process' because they create a high risk of wire breakage (e.g., when the wire is accommodated on the pulley groove sidewall 23 and the amplitude of the shock moves up and down) due to the tension in the wire. Again, this is particularly relevant when there is a desire for a thinner wire diameter and a diamond coated wire, because in these cases the wire will break even more easily. Again, the change in the position of the varying thread on the barrel 12, and in particular the entry of the thread (7) into the pulley 2011 10 201134571, causes fluctuations in the wire sawing device which can deteriorate the cutting accuracy. To this end, the fixed sheave 20 can be replaced by a movable sheave that is longitudinally movable in the direction of the parallel reel axis 12a. Movable; the bone wheel can be fitted with a tracking system that allows it to follow the position where the wire moves from one side of the reel to the other, so that the wire always enters the pulley tangentially. Such a pulley system is described in, for example, European Patent Application No. EP 9153 519, the disclosure of which is incorporated herein by reference in its entirety in its entirety in its entirety in its entirety in its entirety, in its entirety in The narrative of the graph tracking system and its corresponding narrative. However, due to the relatively high tension of the wire sometimes, it is difficult to sufficiently support the movable sheave so that the movable sheave can withstand high wire tension. Undesirable deformation and vibration of the pulley support, the movable wheel and the wire can occur if the movable pulley is not sufficiently supported. Such vibrations again cause undesirable fluctuations in the wire' and in some cases cause the wire to break. As a result, it is hoped that the wire management unit can be improved, thereby reducing the above difficulties. According to one embodiment described in Fig. 2, a wire sawing device 1 is provided. In the wire sawing device, there is a wire management unit, and some components of the wire management unit are shown in Fig. 2. According to various embodiments, the wire sawing device can be a cutter, a square cutter, a wire saw or a multi-wire saw. Thereby, the cut-off can be understood as a device which can be used to cut from a block or a block which has been separated into a plurality of blocks in a squarer. 201134571 A saw blade is a wire saw. It roughly cuts the saw block into blocks of a desired size so that a wire saw or a multi-wire saw can cut the wafer from the block in a wafer forming process. The wire management unit here is a wire sawing device which is particularly suitable for a squarer, but is not limited to a squarer. The wire management unit of Fig. 2 includes a spool 212 having a spool axis 2112a. The reel is carried by a reel shaft 21〇. The spool shaft 210 is rotatably mounted to the main frame portion (10) for rotation about the spool axis 212a. Thereby, the spool shaft 21 rotates the spool about the spool axis 212a. The reel shaft rotation can be driven by a reel motor. In contrast, the pulley system to be described hereinafter is substantially freely rotatable. On the reel 212, the wire 1 supplied to the wire web is carried in a wire carrying area 213a of one of the reels. The wire carrying area 213a has a wire carrying length in the direction of the spool axis 212a. During the unwinding of the wire 1 from the spool 212, the wire is supplied towards the wire mesh of the wire saw. A first pulley 220 is shown in FIG. Here and generally, the pulley has a groove adapted to guide the wire. Further, the pulley generally has a wire guiding position for guiding a wire in the pulley, i.e., in the pulley groove. The first pulley 220 is adapted to receive a wire from the spool 212 (especially directly from the spool 212) and then redirect the wire. The first pulley system is rotatably mounted to a pulley carrying unit 224 such that the first pulley 22 is rotatable about the first pulley axis 222. The pulley carrying unit 224 is in turn coupled to a wire sawing device (more specifically, to the main frame portion of the wire sawing device 1) such that the pulley carrying unit 224 can move longitudinally along a 12 201134571 pulley motion (ie, The pulley motion track is defined as the area in which the pulley carrying unit moves. Thereby, the first pulley motion track of the first pulley (i.e., the track along which the first pulley 220 can move longitudinally) is also defined. Still further, as a general aspect, the first pulley motion track can have a length of at least 9% of the length of the wire carrying region 213a of the spool 212. Here, the wire carrying area 213a is the length segment of the wire 212 from which the wire can be exposed from the reel, i.e., substantially the length from the flange of the reel to the flange. As a further general aspect, the pulley motion can extend across the length of the wire carrying area 213a from the flange to the flange. The main frame portion 1 is rigidly connected or rigidly connectable to the wire sawing device base. Thereby, the main frame portion 1 is very strong, and for example, the load on the main frame portion can be absorbed by the base. The main frame portion can be made in one piece or in multiple pieces (such as pieces 110 and 112 in Fig. 2). Here, these pieces! The 丨〇 and 丨丨 2 are rigidly connected to each other, for example by screws or some other connector. Without being affected by the embodiment shown, the main frame portion 1 is integrally rigidly coupled to the base of the wire sawing device during operation. The pulley motion of the pulley 220 is substantially parallel to the spool axis 212a. According to embodiments that may be combined with any of the other embodiments described herein, other directions of movement may overlap to the above movement. For example, one of the curved tracks and/or one of the inclined tracks can be provided as compared to the spool axis 212a. In Fig. 2, the pulley carrying unit 224 is shown as a standard. In other embodiments that may be combined with any of the other embodiments described herein, 201134571 - load-bearing pulley 220 pulley carrier unit 224 may be provided as a rod or another support such that it can rotate about axis 222 - the pulley axis The 222 series is oriented relative to the spool axis η. It is 90 in nature. The angle. Here, the angle is defined as a spatial angle, that is, the angle of the axes in the plane across the axes (if necessary) 'translating on one of the axes of the axes such that the axes intersect and straddle - After the plane). This angle is defined as an absolute angle, which is always positive. In accordance with an embodiment described herein, a pulley moving device is provided. The pulley shifting device 228 is shown by the arrows in Figure 2 and is adapted to move the pulley retainer 224 in a U-mode motion. The pulley moving device 228 is adapted to move the pulley 22 and the wire position (4) device along the moving track (here parallel to the axis 2 i 2a of the drum) in order to position the pulley at a desired position above the spool 212. The pulley moving device 228 can be, for example, a linear actuator (such as a linear motor), a pneumatic cylinder, a motor with a worm drive, a bracket-rack-gear, or the like so that the pulley moving device can be at least along Move the (four) wheel with the direction of the pulley's motion track. Thereby, the pulley can be moved relative to the main frame portion 100 of the thread cutting device by moving the π wheel carrier 224. A wire position detecting device 226 can be provided in accordance with a further embodiment that can be combined with other embodiments described herein. The wire position detecting device detects the direction along the moving path (here, the position of the thread along the axis of the reel, in more detail, the detecting wire crosses the wire position 201134571. The position of the wire of the area is measured. Thereby, the position of the wire 10 from the reel 212 or the wire carrying area 213a can be obtained (by triangulation if necessary). The wire position detecting device 226 is connected to the pulley moving device 228. For example, a signal receiving unit, a controller, a computer for calculating the correct pulley position, etc. may be provided between the wire position detecting device 226 and the pulley moving device 228. In a specific embodiment, the controller system may Operatively coupled to the wire position detecting device 226 for receiving the detected wire position. The controller determines a target position and transmits a movement command to the first pulley moving device 228 to move the first pulley moving device The first pulley to the target position. In particular, the target position may be a position corresponding to the position where the wire 10 leaves the reel. By the target position, the wire is phased. Leaving the reel at a right angle to the pulley axis 2123, as shown in Fig. 2. The first pulley moving device 2 28, the wire position detecting device 226 and the first pulley position controller may be collectively referred to as a first pulley wire tracking system. In general, the __first-pulley wire and longitudinal system can be provided to respond to the detected position of the detected wire by the first pulley moving device 228. Further, as a general aspect, the pulley of the first pulley 2 2 0 The track system is arranged such that for any position of the wire 10 away from the wire carrying area 213a of the coil 212, there is a first pulley to > position 'on the pulley moving track so that the wire line enters the first z-month substantially tangentially Wheel 220. Further, in general, the first pulley 220 (and any other pulley, right present in the embodiment, such as the second pulley 230 described below) may be arranged by 15 201134571 such that the material is removed from the coil 212 The wire bearing area 213 & ^ location, at least one position of the first pulley 220 is present on the pulley moving track so that the wire is substantially tangentially separated and enters either the coil and the pulleyThis arrangement allows for a thread that does not twist. Here, "non-twisting" means that the wire enters and exits the coil and pulley of the wire management unit substantially tangentially. As an opposite example, the wire shown in Figure i (which enters and exits the pulley 20 non-tangentially) will twist. Thus, the controller can be programmed to actuate the pulley moving device 228 for any position of the wire 1 〇 away from the wire carrying unit 213a, thereby causing the wire to enter the first pulley 22 实质上 substantially tangentially, particularly such that the wire does not substantially twist . Continuing with the description of the embodiment of Figure 2, the wire management unit of Figure 2 has a second pulley 230 adapted to receive the wire from the first pulley 220 (especially directly from the first pulley) and to redirect The wire first pulley 230 is rotatably mounted to the main frame portion and rotatable about the second pulley axis 232. In general, further pulleys can be provided in the wire management unit. The thread is re-guided by the first pulley 22〇9〇. The first re-orientation angle' is redirected 180 by the second pulley 230. The second redirection angle. Due to the large second re-directing angle, a major portion of the wire tension (especially in the case of a tension spike) is absorbed by the second pulley, which is stably supported by the main frame portion 1〇〇. Due to the stable support of the main frame portion 100, the second pulley 230 can withstand tension more easily and stably than the movable first-slide 220. Thereby, it is possible to reduce the deformation and vibration of the movable pulley 220 and thus the wire, which is not expected. Therefore, it is also possible to reduce the fluctuation of the wire itself, the member of the wire cooking unit, or other members of the wire cutting device. Furthermore, the risk of wire breakage can be reduced. This allows for higher thread speeds and thus higher thread yields. In general, the m-line is redirected by the first pulley to no more than 12G. The first-redirect angle' and if the wire is redirected by the second pulley is not less than 60. The second redirecting angle ' absorbs the tension of the wire to a certain extent by firmly attaching the second slider 230. In the example of Fig. 2, the redirection angle is independent of the position of the first pulley 220 on the first motion track, but more generally the 'first pulley 22' must be satisfied at least one position on the first motion track. The above situation. In this second embodiment, which can be combined with any of the other embodiments described herein, the first pulley can even satisfy the above situation at any position on the first motion track. In some embodiments, the second redirect angle is °100° or less, or even 9〇. Or smaller. Also, in some embodiments the 'second redirect angle is no less than 90. , no less than 120 or even 18 inches. . Here, the redirection angle is defined as the entire deflection angle of the wire deflection. Thus, for example, a quarter-rotation will result in a skew angle of 9 , and a three-quarter rotation will result in 270. The skew angle is absent, and the direction of the skew is taken. The skew angle is taken as an absolute value and therefore the total deviation is. Again, an alternative and substantially useful configuration can be represented as follows: In a configuration, the second redirection angle is greater than the first redirection angle. In this configuration, the load received by the second pulley due to the wire tension of the wire may be greater than the load received by the first pulley. Again, this can help to avoid the excessive load on the movable first pulley on 17 201134571. A further alternative and substantially useful configuration can be indicated as follows: In a configuration, the redirecting angle is selected such that the pulley 2, the material tension of the wire iQ, receives a greater load than the first pulley 220. In Fig. 2, the first and second re-directing angles are directed to opposite winding directions. This allows for a particularly small configuration and also allows for particularly effective wire tension absorption of the second pulley. Furthermore, the first pulley axis 222 and the second pulley shaft and line 232 are qualitatively parallel to each other. More generally, in an embodiment, the first pulley axis 222 and the second pulley axis 232 can have less than 9 turns relative to one another. Angle. Further, in Fig. 2, the wire 10 is deflected by the first pulley 220 in a direction away from the wall member of the main frame 1〇〇. Next, the wire 10 is deflected by the second pulley 23〇 in a direction toward the wall member 11 () of the main frame 1〇〇. Furthermore, the pulley movement track in Fig. 2 is parallel to the wire segment of the wire/line (7) between the first/moon wheel 220 and the second pulley 23G. Thereby, for any position of the first pulley 22G, the wire between the first and second pulleys extends in a direction (i.e., parallel to) the direction of movement of the pulley. This means that the orientation of the wire is not affected by the position of the first pulley 22 on the pulley motion. For any position of the first pulley, the first pulley and the second pulley are arranged to each other such that the thread is tangentially Leaving the first pulley and feeding it tangentially to the second pulley, or not twisting. Further, if a thin wire or wire having a coating (e.g., a diamond coating) is used, the spool shaft can be particularly useful. In particular, the spool shaft is suitable; therefore, in the embodiment of any other implementation 201134571 j »: described herein, the wire processing portion and the wire sawing device described herein are: Suitable for thin wires having a diameter of less than about 400 (e.g., about 2 〇〇 _ μιη, more specifically about 2 〇〇 μηη to about the claw). However, in other cases, the embodiment may also have a straight line of light as small as, for example, 10 or even η. Further, the wire processing portion and the wire cutting system described herein are applied to the coated wire, for example, a wire having a recording coating in which diamond particles are embedded. Such a wire may typically have a diameter of from about (iv) to about 4 angstroms, such as from 31 〇μηη to 340 μΓη. The reel shaft disclosed herein is particularly useful for diamond threads because it may be necessary to remove the diamond thread (especially from time to time), such as for a two-way saw or for a substantially short length of wire. A thread of increased risk of twisting of the wire, a loss of 4-wire or damage to the coating is advantageous as shown in Figure 2. By using a diamond thread, the production = an increase of 2 or even a larger multiple. In the case of a squarer, a throughput rate of 1 〇〇 MW or even greater can be achieved in this way. When the diamond thread is used, the silk and silk feed-step material can be applied to the drill wire. For example, 'mechanical parts, electrical parts and (4) software can be used for the use of diamond threads. In the following, further embodiments are described, the elements of which may be combined with any of the other embodiments described herein. In the following description, only elements that are different from the elements of the foregoing embodiments or the elements of other embodiments described herein are described. It should be understood that the components, aspects, and details described in connection with the other embodiments may be applied to embodiments that do not describe all components, aspects, or details. 19 201134571 Figure 3 shows a further embodiment in which the first pulley 220 is in a position different from that of Figure 2 on the pulley motion track (i.e., away from the main frame portion 100). Further, Fig. 3 depicts some variations of the embodiment described in Fig. 2. All of these variations can be included in the embodiment of Figure 2 independently of each other. As a first variation in Fig. 3, a recess 116 is provided in the main frame portion 1A. The recess is sized and the recess is arranged to at least partially receive the first pulley 220. This recess allows the first pulley 220 and thus the spool 212 to be arranged closer to the main frame portion 1' while still allowing the first pulley motion track to cover most or all of the wire carrying area 2 1 3 a. As a step change in Fig. 3, the main frame portion 100 of Fig. 3 is integrally formed as a single piece, instead of including some components as shown in Fig. 2. The main frame portion 1〇〇 may even be integrally formed in the main frame as one and the same member. As a step-by-step change in FIG. 3, a third pulley 24 is provided, and the third pulley 240 is adapted to receive a wire from the second pulley 230 (especially directly from the second pulley 230) and to redirect the wire Three Re-Guided Angles - The first π wheel 240 is rotatably mounted to the main frame portion 旋转 for rotation about the third pulley axis 242. The third pulley axis 242 is substantially perpendicular to the spool axis 212a and the second pulley axis 232. Thus, the wire exits the third pulley 24 (in the right side of the second pulley 240 in the figure) in a direction perpendicular to the image plane of Fig. 3, so that the redirection angle is 90. . Figure 4 is a schematic illustration of one of the wire management units 20 201134571 in accordance with a further embodiment. Here, the reel 212, the wire 10, the first, second and third pulleys 22, 230 and 240 mounted on the spool shaft 210 of Fig. 3 are shown. In contrast to the side view of Fig. 3, Fig. 4 shows a front view of the reel 212 (from the left side of Fig. 3) facing the direction of the spool axis 212a. Further, Fig. 4 shows a fourth pulley 250 which receives the wire from the second pulley and redirects the wire to a fourth redirection angle. The fourth pulley 250 is rotatably mounted on the frame for rotation about the fourth pulley axis 252. Here, the fourth redirection angle is about 9 〇. . In other embodiments, the fourth redirection angle can be between 6 〇〇 and 丨 2 。. Between. The fourth pulley axis 252 is substantially parallel to the spool axis 212a. Again, the fourth pulley axis 252 is substantially perpendicular to the first pulley axis 222, the second pulley axis 232, and the third pulley axis 242. In other embodiments, the fourth pulley axis 252 can be substantially parallel to at least one of the axes. The embodiment of Figure 4 is a general aspect in which the reference frame can be defined as follows: the spool axis 212a defines the X-axis, and the second pulley axis 222 perpendicular to the spool axis defines the y-axis, and the z-axis is defined It is perpendicular to the axis of the X and y axes. The x and y*z axes defined in this way are also not shown in Figures 2-7. As a general aspect, within the x_y_z reference frame, the reel 212 and the first and second pulleys 22〇, 23〇 (and any other pulley, if present in an embodiment) may be adapted to receive the wire so as to be selected from At least one of the following states: _ the wire between the reel and the first pulley extends mainly along the z-axis; -" the thread between the first pulley and the second pulley extends mainly along the X-axis 21 201134571 Extending; the X-axis extends between the second pulley and the third sliding line between the moon and the moon, mainly along the extension; _ between the working pulley and the fourth pulley; the thread is mainly along the y-axis Extending - the wire between the fourth pulley and the wire tensioning knife 15 is mainly extended; and/or - the wire between the fifth pulley and the sixth pulley is mainly extending along the Z axis In some embodiments (such as the embodiment of Figure 4), even these states can be filled. Here, the "mainly extending along one axis" means that the direction of the braided wire along the respective axes is greater than that of the other along the z-axis. Furthermore, at least a state selected from the following states (and all states in the embodiment) may be satisfied: _ the first pulley axis extends substantially in the y direction (more generally, the first pulley axis may extend in the y_z plane Also, including the case where the first pulley is inclined with respect to the z direction); the second pulley axis extends substantially in the y direction; the third pulley axis extends substantially in the z direction; • the fourth pulley axis extends substantially The X direction; and the 糸 line are redirected by the first pulley by about 90. The first re-guide angle; , the ''糸 line is redirected by the second pulley about 8 inches. The second re-guide angle; - the wire is redirected by the third pulley by about 90. The third re-guide angle; and 22 201134571 (or) The reel is re-guided by the fourth pulley about 90. To 12 baht. The fourth re-orientation angle. Figure 5 shows a perspective view of one of the wire management units. The reel 212 and the pulleys 220, 230 and 240 mounted on the reel shaft 210 are arranged as shown in Fig. 4. Further, the EJ portion described in Fig. 3 (concave portion 116) can be seen. Again, the pulley carrier single & 224 is provided as a retractable or telescopic rod. The retractable or telescopic rod is longitudinally movable along a rod axis that is parallel to the spool axis. The rod system is longitudinally movably mounted to the wall portion of the main frame portion (10) (more precisely, the wall portion of (iv) ΐ6). Further, in the embodiment of Fig. 5, the main frame portion | 100 includes a loading member 114, and the second and third pulleys 23(), 24() are attached to the mounting member 4t. Further, member i 14 (which is part of the main frame portion) is a rigid base of the wire cutting device. Although the other design of the mounting member is feasible, in the case of the victory of Figure 5, the installation of the member is a rod, in more detail an L-shaped rod and right Chu ^ The first leg U4a has a first leg and a second leg 114b', and the first leg U4a extends to the side surface of the main frame of the main frame (i.e., extending parallel to the X axis). The first leg 114b and the first leg form a solid right angle and extend to the top surface of the main frame portion (ie, parallel to the z-axis). Independent of the one shown, the first pulley 220 and the second pulley 230 are mounted on a common assembly (especially on a one-piece dream component). The general aspect. Flying Mount Figure 6 shows a perspective view of the Stereo 23 201134571 of the Wire Management Unit of the further step embodiment. The embodiment of Fig. 6 includes the elements shown in Fig. 5, and the above description of Fig. 5 is also applied to Fig. 6. Also, a fourth pulley 25 is displayed. The fourth pulley 250 is arranged as shown in Fig. 4, so that the corresponding Fig. 4 description is also applied to Fig. 6. The fourth pulley is mounted on the mounting member 114. The embodiment of Figure 6 further includes a wire tensioner for controlling the tension of the wire. The wire tensioner includes a fifth pulley 26 and a sixth pulley 270. The fifth pulley 26 is rotatably mounted to the frame and rotates about the fifth pulley axis 262. The sixth pulley 27 is rotatably mounted to A movable jaw 274 rotates about the sixth pulley axis 272. The movable jaw 274 is movably mounted on the main frame portion. Movement of the movable element 274 can be controlled by a motor, or the movable element 274 can be pre-biased, for example, by a spring to control wire tension. In Fig. 6, the movable member 274 is shown as a pre-biased rotary lever. The wire tensioner receives the wire 1 from the fourth pulley 250 and provides a wire 1 to the wire mesh (to the right of the wire management unit shown in Figure 6). More precisely, the fifth pulley 260 receives the wire 1〇 from the fourth pulley 25〇 and deflects the wire to a fifth skew angle, and then the sixth pulley 26〇 receives the wire 10 from the fourth pulley 250 and is skewed Silk - the sixth skew angle. With the χ-yz reference frame defined above, the embodiment of Fig. 6 is a general aspect that satisfies at least one state selected from the following (and all states in some embodiments): - Silk The tensioner is located on one side of the reel 2 1 2 , substantially relative to the first pulley 220 ; the wire between the fourth pulley and the thread tensioner (in more detail, the second and fifth of 2011 34571 in the fourth and fifth The wire between the pulleys extends mainly along the 2 axes; - the wire between the fifth pulley and the sixth pulley extends mainly along the 7 axis; the wire leaves the sixth pulley and is substantially parallel to the y axis; The sixth pulley has a direction substantially extending from the χ direction; the fifth re-guide angle of the pregnancy is about 60. To 90. (In more detail, about 8 〇 to 90 °); - The sixth re-guide angle is about 18 〇. . In general, in embodiments that may be combined with any of the other embodiments described herein, the pulleys have at least one of the following radii (and in some embodiments all of the following radii): reel shaft 21Q has a diameter of about 15 〇. The first pulley 220 and the second pulley 230 have a diameter of __ to 150 mm, particularly U2 mm (here, the diameter means the diameter traversed by the thread, i.e., the diameter within the wire guiding groove). The third pulley 240 has a diameter of 140 to 170 mm, in particular 158 mm. The fourth pulley 250 has a heart similar to the first pulley 22〇. The fifth pulley 260 and the sixth pulley 27A have a diameter similar to that of the third pulley. Continuing with the description of Fig. 6, in addition to the wire processing unit 200 (which will be referred to as a main wire processing unit in the following), the wire management unit of Fig. 6 also has a primary wire processing unit 300. Here, the terms "main" and "under-required" are used, which are used for easy identification, and do not mean silk processing. Any order or functional order of p, reel, etc. The secondary wire treatment is constructed similarly to the main wire processing portion and has elements corresponding to the elements of the main wire processing portion. The secondary wire portion 25 201134571 is labeled as a "minor" component and assigned component symbols 310, 312, etc., and corresponds to the "main" components 21, 212, etc. of the corresponding primary wire processing portion 200. . Therefore, the secondary wire processing unit has, for example, a secondary reel shaft 31 for the reel 312, a first pulley 320, a second pulley 33, and the like. The secondary first pulley 320 is rotatably mounted to the primary pulley carrier unit 324 and rotates about the secondary first wheel axis 322. The secondary pulley carrier unit 324 can be moved longitudinally along the secondary pulley motion track. The secondary wire processing units 200 and 300 are placed adjacent to each other in the x-direction. As a general aspect (shown by the illustrated embodiment but independent of the embodiment shown), the primary and secondary wire processing sections 2, 3 can be disposed on a common wall portion of the main frame section (10). That is, the primary and secondary wire processing sections 200, 300 can be disposed in a common tolerance of one of the wire sawing devices. Further, it can be seen from Fig. 6 that the main reel 212 and the second reel have different types (the slit is not present in the front flange of the secondary reel 312). In general, according to any of the embodiments described herein, the secondary thread processing portion 300 is formed in the same manner as the thread processing portion. Therefore, the description of the elements of the main wire processing unit 200 can be applied to the corresponding elements of the secondary wire processing unit 300. In the -operation example mode (hereinafter referred to as primary to secondary reel cutting) 'the main wire processing section provides the wire from the main - (four) 212 to the mesh) so that the wire can be used for the cutting of the wire. Next, the secondary wire processing portion receives the wire 1〇β from the mesh whereby the wire 1〇 is transferred from the mesh 26 201134571 to the secondary wire tensioner (more precisely to the secondary sixth pulley 370) and then To the fifth pulley 36 〇, from here to the second heart here - the second pulley 34 〇, from here to the second pulley 3 3 0, from here to 丨丨 + _ $ ±人<·><·* 攸 攸 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The movement of the pulley motion track is such that the wire is wound onto the wire carrying area of the secondary reel 312 in a controlled manner. In order to receive the wire, the first pulley controller at a time includes a wire winding pattern and is programmed to determine a desired wire winding position for winding the wire on the secondary winding wire and to transmit a movement command to the secondary first The pulley moving device 328 is configured to enable the secondary first pulley moving device 328 to move the secondary first pulley 32 to the desired wire winding position. The secondary second pulley 3 3 0 re-directs the wire about 8 〇. And the second pulley again guides the wire about 90. . Due to the large secondary second pulley 33〇 re-directing the angle, severe tension and fluctuations during winding of the wire (as explained above) can be avoided, so that the wire can be entangled stably with a reduced risk of wire damage. Therefore, independent of the embodiment of Figure 7, the secondary second pulley 330 should redirect the wire no less than 6 turns. And the secondary first pulley re-guides the wire to be no greater than 120. . In general, the type of reel (i.e., the first reel type) in which the new filament is provided is different from the type of reel on which the used filament is wound (i.e., the second reel type). For example, a reel provided with a new wire may be a disposable reel from a wire manufacturer. On the other hand, such a reel may not be suitable for receiving the used thread, which is due to the fact that such a reel sometimes has a high thread tension that cannot be tolerated by the used thread. In order to support these different reel types during the primary to secondary reeling of the saw, the main reel shaft (i.e., the reel shaft of the v-wang wire processing section) may be adapted to carry the first type of reel, and. The person wants the spool shaft (i.e., the spool shaft of the secondary wire processing portion) to be adapted to carry, and to carry, the second type of spool, i.e., the second type is different from the first type. In the embodiments, which may be combined with any of the other embodiments described herein, the wire management unit may support bidirectional cutting. Here, the bidirectional cutting is known as the _cut 4 mineral processing process. During the cutting process, the wire is first transferred from the main reel to the person who wants to be wounded, and then from the secondary volume.

请被傳送回到主尊摇贫 W 琦,並且再次地從主要捲筒被傳送 到次要捲料。因此,對於雙方向㈣,(主要)捲筒212 係適於提供絲線到絲線網,並且亦適於從絲線網接收經 使用之絲線。同槐祕 咕 ’ 樣地,—第二捲筒3 I2可適於提供絲線 到絲線網,並且亦,益 亦適於從絲線網接收經使用之絲線。 對於雙方1^7 ·1:7Ι ★ 刀鋸,一控制器係適於發送致動命令到主 要筒軸與到次要捲筒軸’致動命令係使得在一第一步 驟中第捲筒軸鬆開絲線到第二捲筒且使得在一第二步 驟"二捲筒軸鬆開絲線到第一捲筒。 第 7 圖顯- 示根據在此所描述進一步實施例之從絲線營 理單元之—部八 冰Β 刀的上方觀看的立體圖。第7圖之實施例 大致上相應於你丨1 、j如第4圖之實施例,除了以下提及之特 徵(最值得注音沾θ 思的Κ滑輪的安排)以外。在此,在χγζ座 標系統中,X細β丄 稍疋由捲筒轴線212a來定義,並且y軸是 28 201134571 由第一捲_ 232(指向垂直方向)來定義,第一滑輪軸 線222可位在Z方向或相對於2方向傾斜,但位在Η 平面内°第二與第三滑輪軸線232、242是位在y方向。 第四滑輪轴線252位在z方向。 在此,絲線U)係被第一滑輪22〇偏斜㈣向主_ 1〇0之—壁元件的方向。接著,絲線被第二滑輪23〇 偏斜於遠離主框架!⑼之壁元件的方向。在此實施例 中,第一偏斜角度為約9〇。,第二與第三偏斜角度為約 18〇° ’並且第四偏斜角度為約90。。 第8圖顯示-絲線切鑛裝置丨(其為_削方器)的俯視 圖。削方器包括-絲線管理單元,絲線管理單元具有一 第一絲線處理部200與一第二絲線處理部3〇〇。又,絲 線切鑛裝置1具有—卫作區域權,絲線ig在卫作區域 4〇〇中形成—絲線網41(),實際的㈣製程是在絲線網 410中執行。 包括第一絲線處理部2〇〇與第二絲線處理部3〇〇之絲 ' 單元了以疋根據在此所描述之任何實施例(例如 第6圖所顯示的實施例)。絲線處理部200與3〇〇各具有 一絲線捲筒以及複數個用以引導絲線10朝向絲線網410 之滑輪。絲線鋸1更包括滑輪420、430以從絲線管理單 元再引V絲線到絲線網。又,在工作區域4〇〇中,安排 有複數個滑輪412以引導絲線,從而建立絲線網。在第 6圖中’一似矩陣絲線網之削方器係顯示具有在兩個相 互正父方向的切割絲線節段。絲線網可具有在該兩個相Please be transferred back to the main squad, and again from the main reel to the secondary reel. Thus, for bidirectional (four), the (primary) reel 212 is adapted to provide a wire to the wire web and is also adapted to receive the used wire from the wire web. In the same manner, the second reel 3 I2 may be adapted to provide a wire to the wire mesh, and also, it is also suitable for receiving the used wire from the wire mesh. For both sides 1^7 ·1:7Ι ★ Knife saw, a controller is adapted to send an actuation command to the main cylinder shaft and to the secondary reel shaft 'actuation command system so that the first reel shaft is loose in a first step Opening the wire to the second reel and causing the second reel to unwind the wire to the first reel in a second step. Fig. 7 is a perspective view showing the upper portion of the ice knives from the wire arranging unit according to a further embodiment described herein. The embodiment of Fig. 7 generally corresponds to the embodiment of Fig. 4, except for the features mentioned below, except for the arrangement of the Κ pulley which is most worthy of the note. Here, in the χγζ coordinate system, the X thin β丄 is defined by the reel axis 212a, and the y axis is 28 201134571 is defined by the first roll _232 (pointing to the vertical direction), and the first pulley axis 222 can be The position is inclined in the Z direction or in the 2 direction, but in the Η plane. The second and third pulley axes 232, 242 are in the y direction. The fourth pulley axis 252 is in the z direction. Here, the wire U) is deflected by the first pulley 22 (four) in the direction of the wall element of the main _ 1 〇 0. Then, the wire is deflected away from the main frame by the second pulley 23〇! (9) The direction of the wall element. In this embodiment, the first skew angle is about 9 〇. The second and third skew angles are about 18 〇 ° ' and the fourth skew angle is about 90. . Figure 8 shows a top view of the wire cutting device 其 (which is a _ squarer). The square cutter includes a wire management unit, and the wire management unit has a first wire processing unit 200 and a second wire processing unit 3〇〇. Further, the wire cutting device 1 has a guard zone right, and the wire ig is formed in the blade zone 41 - the wire mesh 41 (), and the actual (four) process is performed in the wire mesh 410. The first wire processing portion 2" and the second wire processing portion 3" are included in accordance with any of the embodiments described herein (for example, the embodiment shown in Fig. 6). The wire processing sections 200 and 3 each have a wire spool and a plurality of pulleys for guiding the wire 10 toward the wire mesh 410. The wire saw 1 further includes pulleys 420, 430 for re-introducing the V wire from the wire management unit to the wire mesh. Further, in the work area 4, a plurality of pulleys 412 are arranged to guide the wires, thereby establishing a wire mesh. In Fig. 6, the square cutter of a matrix-like matrix is shown to have cut wire segments in two mutually opposite parent directions. a wire mesh can have in the two phases

29 S 201134571 互正父方向之各者中之例如六個切割絲線節段。或者, 可提供一截斷器絲線網,例如美國專利申請案號 08154493.4,其在此以弓丨置方式併入本文作為參考,例 如參見其第1圖。在工作區域4〇〇中,提供一樣品供應 線(未不出),其用以承載待切鋸之樣品。樣品供應板具 有多個溝槽,因此在切鋸期間,絲線可通過該些溝槽, 同時樣品由板之剩餘部分所承載。 再者,絲線管理單元具有一冷卻系統5〇〇。冷卻系統 5 00包括一用以儲存冷卻劑(一般為漿料)之冷卻劑槽 5 10、一用以從冷卻劑槽5丨〇供應冷卻劑到工作區域 之冷卻劑供應線520、與一用以從工作區域4〇〇返回冷 卻劑到冷卻劑槽5 10之冷卻劑返回線53〇 ^冷卻劑供應 線520具·有複數個喷嘴,其用以喷麗冷卻劑到絲線網内 之絲線上。該些噴嘴可沿著絲線網410之方形邊界來安 排。儘管僅顯示一供應線52〇,可存在超過一供應線, 例如絲線網之方形邊界之各側具有一供應線(即總共有 四供應線)’各供應線係供應冷卻劑到複數個喷灑喷嘴 (例如絲線網410之每一側具有六噴灑噴嘴以用於六絲線 節段之各者)。 在鑽石絲線之情況中,不需要聚料,但在切割期間冷 卻鑽石絲線仍是有利的。依此’漿料可由一些其他冷卻 劑(諸如水系冷卻液體)來取代。依此,冷卻系統可有利 地適於水系冷卻液體,如下所述。 第9圖顯示一噴灑噴嘴54〇,其特別是用在使用非毁 30 201134571 2 如水系冷卻劑)之鑽石絲線。錢喷嘴540 噴麗…、Γ之冷》卩劑供應線52G接收冷卻劑,並且適於 / 7部劑到絲線10。喷灑喷嘴540係大致上製成1形 狀為圓柱本體笛〇 敕成,、形 柱本體呈右 具有垂直圓柱軸線)’該圓 有—缺口(其位在第9圖之本體的左側),缺口 中提供有噴嘴出口。在第9圖中,㈣喷嘴系統54〇係 在喷灑方向542喷灑-些冷卻劑到絲線10上。在此,冷 卻劑喷灌具有—些擴展,並且喷邀方向542(虛線)係被: 義成噴霧之中心或主要方向’其中擴展係繞著該噴霧。 喷灑方向542與絲線10之間的角度544為9〇。至18〇。、 至170 (特別是約15〇。)是有利的。此大角度係容許 了藉由冷卻液體之足夠的絲線冷卻。並且,這樣的大角 度容許了冷卻劑之喷霧總是位在絲線10上,獨立於用在 絲線引導件上的溝槽。 第10圖係以立體圖來顯示第8圖之冷卻系統500之一 冷部劑槽系統《冷卻劑槽係適於非漿料冷卻劑(特別是水 系冷卻劑)’並且因此對於鑽石絲線是尤其有用的。冷卻 劑槽系統具有一用以儲存冷卻劑液體之冷卻劑槽容積 5 10。又,返回線5 3 0直接地連接到冷卻劑槽容積,以從 絲線鋸之工作區域直接地返回冷卻劑液體到冷卻劑槽容 積51〇(亦可參見第8圖)。在此,直接地返回係意謂著工 作區域400與冷卻劑槽容積510之間的返回線530中沒 有泵。又,冷卻劑槽返回線530在冷卻劑槽容積5 1 〇之 一連接部分處連接到冷卻劑槽容積5 1 0。有利地,連接 31 201134571 °P刀疋一底部,其被安排在正常操作期間之最小冷卻液 體位準下方。在冷卻劑槽容積51〇之底部處泵與安排兩 者的不存在係顯著地減少了在冷卻劑槽容積5丨〇中之泡 沬形成(其對於水系冷卻劑液體是一問題卜冷卻劑槽返 回線530可以可選擇地亦包括一用以填充新鮮之冷卻劑 供應到槽谷積5 1 〇的進料線。又,冷卻劑槽容積5 1 〇之 形狀係和一傾斜底表面(其導向在其最下方部分處的出 口(未不出))相配。又,槽容積51〇經由泵522 (例如氣動 栗)連接到冷卻劑液體供應線520。 根據可和在此所描述之任何實施例結合之一般態樣, 冷卻系統5 0 0之控制器可具有一排放程序’其係經程式 化以使得出口之致動器開啟開口以將槽排放(即從槽移 除所有的冷卻劑液體(除了可能的少量殘餘冷卻劑以 外))。在其他實施例中,栗522或一進一步果(例如氣動 果)連接到一排放線(未示出)。在此情況中,排放程序可 替代地或額外地經程式化而使得泵將冷卻劑液體從槽泉 送而將槽排放。這可容許冷卻劑的輕易更換,而不需要 將冷卻劑槽容積5 1 0從絲線切鋸設備移除。 在下述中,將摘述在此所描述實施例之一些—般,離、 樣。這些一般態樣之各者可和在此所描述之任何實施例 内之任何其他一般態樣結合,以產生又另一實施例。 根據一態樣,一絲線切鋸裝置與(或)其部分(諸如絲線 處理部,特別是滑輪、絲線捲筒軸與(或)絲線捲筒)可適 於鑽石絲線,並且操作方法能夠以鑽石絲線來執行。這 32 201134571 可藉由例如將滑輪之溝槽結構τ以適化並以適當溝槽節 距不同於傳統元件之溝槽深度與(或)不同溝槽形狀來 引導70件而元成。藉此’可典型地增加切割速度(例如增 加2的倍數)’可減少絲線切鋸裝置之能源消耗,並進一 步地作為又另一實例可顯著地減少將矽鑄塊予以削方且 從矽製造晶圓的成本。 根據一進一步態I,第一滑輪與第二滑輪係、被安排成 使得’對力第一運動軌道上第—滑輪之至少一位置且在 實施例中對於第—運動執道上第—滑輪之任何一位置, 在操作期間絲線由第一滑輪再引導不大於12〇。之第一再 引導角度且絲線由第二滑輪再引導不小於6〇。之第二再 引導角度。可藉由第二再引導角度大於第一再引導角度 之替代性態樣來獲得一類似的效果。 j據進一步態樣,捲筒包括一絲線承載區域(其具有 沿著捲筒軸線之方向的絲線承載長度)、適於在從捲筒鬆 開絲線的期間提供絲線朝向絲線網、及可旋轉地裝設到 主框架部分而繞著捲筒軸線旋轉。 乞根據-進-步態冑’第—滑輪軸線係定向&相對於捲 筒軸線呈實質上90。之角度。根據—進一步態樣,滑輪運 動軌道係被安排成使得,對於線圈上絲線之任何長度位 置,滑輪運動軌道上存在有第一滑輪之位置而使得絲線 係不扭轉地被饋送到第一滑輪(即切線地進入且離開各 自滑輪)。根據一進一步態樣,第一滑輪運動執道實質上 平行於旋轉轴線。根據一 進一步態樣,捲筒具有一絲線 33 201134571 承載區域’並且第一滑輪運動勅 勖執道具有絲線承載區域長 度之至少90%之長度。 场'長 根據一進一步態樣,絲線管 理早兀更包括一第—滑鯰 絲線跟蹤系統,其容許第一滑 仙山 私移動裝置回應於經偵測 絲線位置的致動。根據—進一 #態樣’第一滑輪絲線跟 蹤系統包括:一第一滑輪移動裝 置C、為選自從線性致動 器、線性馬達、汽缸、與具有 有蝸柃駆動之馬達所構成群 組之至少一元件);一絲線位 — 罝偵測裝置(其適於偵測沿 者運動路徑之方向的絲線位置 — ), 第—滑輪位置控制器 (其係可操作地連接到絲線位 置須測裝置以接收經偵測 之絲線位置,並且適於決定 〜位置,並且可操作地連 接到第一滑輪移動裝置以傳 丨斧达移動命令而使得第一滑輪 移動裝置移動第一滑輪到目標位置)。 根據一進-步態樣,第一滑輪轴線與第二滑輪轴線具 有:對於彼此之小於90。的角度,並且根據一進一步態樣 係實質上彼此平行。根據一進一步態樣,第一與第二再 引導角度係被引導於彼此相反的纏繞方向。根據一進一 步態樣’對於第一滑輪之任何位置,第一滑輪與第二滑 輪係被彼此安排成使得絲線係不扭轉地從第一滑輪離 開、不扭轉地被饋送到第二滑輪。根據一進一步態樣, 對於第一滑輪之任何位置,第一滑輪與第二滑輪係被彼 此安排成使得第一與第二滑輪之間的絲線延伸於滑輪運 動軌道的方向。 根據一進一步態樣’絲線管理單元更包括一第三滑輪 34 201134571 與 ' 一第四滑輪,第二,、典认·#- 弟一,月輪適於接收來自第二滑輪之絲線 且再引導絲線一第二再引導角度,其中第三滑輪係可旋 轉地裝δ又到框架而繞著—第三滑輪軸線旋轉,第四滑輪 適於接來自第二滑輪之絲線且再引導絲線—第四再引 導角度,其中第四滑輪係可旋轉地裝設到框架而繞著一 第四滑輪軸線旋轉。根據—進一步態樣,第三滑輪軸線 實質上垂直於捲筒軸線與第二滑輪轴線。根據一進一步 態樣,第二再引導角度為實質上90。。根據一進一步態 樣,第四滑輪軸線實質上平行於捲筒轴線。根據一進一 步態樣’第四滑輪軸線實質上垂直於第三滑輪軸線。根 據一進一步態樣’第四再引導角度為介於60。與120。之 間°根據一進一步態樣,第二滑輪適於直接地接收來自 第一滑輪之絲線。根據一進一步態樣,第三滑輪適於直 接地接收來自第二滑輪之絲線。根據一進一步態樣,第 四滑輪適於直接地接收來自第三滑輪之絲線。 根據一進一步態樣,絲線管理單元更包括一絲線張力 器’其適於控制絲線之張力◊根據一進一步態樣,絲線 張力器係接收來自第四滑輪之絲線。根據一進一步態 樣,絲線張力器包括一第五滑輪與一第六滑輪,第五滑 輪係可旋轉地裝設到例如框架而繞著一第五滑輪軸線旋 轉,第六滑輪係可旋轉地裝設到例如一彈性元件而繞著 一第六滑輪軸線旋轉。 根據一進一步態樣,第一和第二滑輪與任何其他滑輪 (若存在於實施例中)係被安排成使得,對於絲線離開線 35 201134571 圈的任何長度位置,滑輪運動轨道上存在有第一滑輪之 位置而使得絲線係實質上切線地(即不扭轉地)離開且進 入該些線圈之任一者。 根據一進一步態樣,絲線管理單元係適於鑽石絲線(即 包括鑽石)的絲線。根據一進一步態樣,主框架部分是剛 性的’並且可剛性地連接或連接到絲線切鋸裝置之底座 和絲線切鋸裝置之底座為一體。根據一進一步態樣,實 施例疋一用以將絲線鋸之現有絲線管理單元升級與(或) 用以將現有絲線鋸升級(特別是用以將其升級以諸如適 於鑽石絲線)的升級工具。 根據一進一步態樣,主框架部分包括一裝設構件(諸如 L形扣),第二、第三與第四滑輪裝設到該裝設構件。根 據進步態樣,接收係意謂著直接地接收以致例如第 I滑輪適於直接地接收來自第一捲筒之絲線,而絲線不 受任何其他其之間的元件所影響。根據—進—步態樣, 在此所描述之絲線安排為裝置之操作狀態的安排。 ★根據一進一步態樣’捲筒軸線係定義X軸,垂直於 筒軸線之第二滑輪軸線係定義y ’並且z軸係被定 、垂直於X* y轴之軸,以及其中捲筒與第一和第二; 輪與任何其他滑輪(若存在於實施射)係適於接收絲^ 從而能滿足選自從下述的至少-狀態(並且在一些實, :中為所有的狀態):介於捲筒與第-滑輪之間的絲線: =著4延伸;介於第__滑輪與第二滑輪之間的絲矣 要沿著X軸延伸;介於第二滑輪與第三滑輪之間的、· 36 201134571 線主要著x軸延伸;介於第三滑輪與第四滑輪之間的 絲線主要沿著y軸延伸。 根據it步態樣,捲筒適於提供絲線到絲線網且亦 適於從絲線網接枚經使用之絲線。根據-進-步態樣, 捲筒具有-絲線承載區域,並且第一滑輪位置控制器包 括一 ^線纏繞圖案,並以―滑輪位置控制器經程式化 以決定目;^立置並可操作地連接到第—骨輪移動裝置以 傳送移動命令到第—滑輪移動裝置而使得第-滑輪移動 裝置移動第一滑輪到目標位置。根據一進一步態樣,絲 線處理疋—主要絲線處理部,絲線管理單it更包括-人要絲線處理*卜根據__進—步態樣,主要絲線處理部 具有-適於承載第—類型之捲筒的捲筒軸,並且次要絲 線處理部具有一適於承載第二類型之捲筒的捲筒軸。 根據一進一步態樣’提供一絲線切鋸裝置,該絲線切 鑛裝置根據在此所描述之任—實施例包括—絲線管理單 元其中主架部分係剛性地連接到絲線切鑛裝置之底 座《根據-進-步態樣’絲線切鑛裝置是選自從絲線鑛、 多絲線銘、削方器與截斷器構成之元件。本發明之絲線 管理單元對於削方器是特別有用的。 根據一進一步態樣,提供一種操作絲線切鋸裝置之方 法’該絲線切鋸裝置具有一主框架部分,t亥方法包括: 從一捲筒提供絲線;縱向地沿著一滑輪運動執道移動一 滑輪承載單元;由-第__滑輪接收來自捲筒之絲線且由 第-滑輪再引導絲線’第一滑輪係可旋轉地裝設到滑輪 37 201134571 承載單元而繞著一第一滑輪軸線旋轉;由一第二滑輪接 收來自第一滑輪之絲線且由第二滑輪再引導絲線,第二 滑輪係可旋轉地裝設到主框架部分而繞著一第二滑輪軸 線旋轉,藉此第二滑輪因絲線之絲線張力而接收比第一 滑輪更大的負載。 根據一進一步態樣’絲線是鑽石絲線。根據一進一步 態樣,該方法更包括以絲線來形成一絲線網。根據一進 一步態樣,該方法包括由第一滑輪再引導絲線不大於 1 2〇。之第一再引導角度且由第二滑輪再引導絲線不小於 60°之第二再引導角度。可藉由第二再引導角度大於第一 再引導角度之替代性態樣來獲得一類似的效果。 一進一步態樣係導向一適於絲線切鋸裝置之絲線管理 單元’該絲線切据裝置具有形成一絲線網之絲線以用於 切割,該絲線管理單元包括:一主要絲線處理部(其具有 —適於承載主要捲筒之主要捲筒軸)與一主要第一滑輪 (其適於接收來自主要捲筒之絲線且再引導絲線),主要 滑輪係可旋轉地裝設到一主要滑輪承載單元而繞著 =主要第—滑輪軸線旋轉,主要滑輪承載單元係可沿著 要β輪運動軌道縱向地移動。該絲線管理單元更包 -人要絲線處理部(其具有一適於承載次要捲筒之次 、2輛)與—次要第一滑輪(其適於再引導絲線),次要 —π輪係可旋轉地裝設到_次要滑輪承載單元而繞著 =次要第一滑輪軸線旋轉,次要滑輪承載單元係可沿著 -欠要滑輪運動執道縱向地移動。這樣的絲線管理單元 38 201134571 具有其容許雙方向切鋸操作的優點。根據一態樣,絲綠 管理單元適於雙方向切鋸操作,其中在切鋸於一第—方 向的期間,主要捲筒係提供絲線朝向絲線網且次要捲筒 係接收來自絲線網之絲線,並且其中在切鋸於一第二方 向的期間,次要捲筒係提供絲線朝向絲線網且-主要捲筒 係接收來自絲線網之絲線。根據一進一步態樣,主要與 (或)-人要捲筒係適於提供絲線到絲線網且亦適於從絲線 網接收經使用之絲線。根據—進—步態樣,主要絲線處 理部具有-適於承載第一類型之捲筒的捲筒軸,並且次 要絲線處理Μ有一適於承載第二類型^筒的捲筒 轴。根據一進一步態樣,主要捲筒與次要捲筒是位在單 -腔室中’且(或)裝設到主框架部分之共同的壁部分。 根據一進—步態樣’―控制器包括—絲線纏繞圖案且具 有-跟縱程式(其係經程式化以回應於經偵測之絲線位 置來致動主要與(或)次要第一滑輪移動裝置)與__纏繞程 式(其係經程式化以決定期望之絲線纏繞位置而將絲線 纏繞在主要與(或)次要捲筒之承載區域上),並且傳送移 動命令到主要與(或)次要第一滑輪移動裝置以使其能移 動各自的滑輪到期望之絲線纏繞位置。 儘管前述說明是導向本發明之實施例,在不脫離本發 明之基本料下,可設想出本發明之其他與進—步實施 例,並且本發明之範衫由以下隨附之中請專利範圍來 決定。 39 201134571 【圖式簡單說明】 可藉由參考本發明之實施例來詳細暸解本發明之態樣 之上述特徵,其簡短地在前面概述過。圖式係關於本發 明之實施例且描述在以下: 第1圖為絲線管理單元之一部分的示意圖,其顯示從 捲筒經由滑輪而鬆開的絲線; 第2圖為根據在此所描述實施例之絲線管理單元之一 部分的側視圖; 第3圖為根據第2圖實施例之變化之絲線管理單元之 一部分的側視圖; 第4圖為根據進一步實施例之絲線管理單元之一部分 的前視圖; 第5圖為根據第2圖實施例之變化之絲線管理單元之 一部分的立體圖; 第6圖為包括上述圖中部分之絲線管理單元的立體 園, 第7圖為根據在此所描述進一步實施例之從上述絲線 管理單元之一部分的示意圖; 第8圖為根據在此所描述進一步實施例之包括絲線管 理單元之絲線切鑛裝置的俯視圖; 第9圖為根據在此所描述進一步實施例之喷灑噴嘴的 示意圖’其中該喷灑喷嘴為絲線切鋸裝置之部分;及 第10圖為根據在此所描述進一步實施例之冷卻劑槽 201134571 的立體圖,其中該冷卻劑槽為絲線切鋸裝置之部分。 【主要元件符號說明】 1 絲線切鋸裝置 10 絲線 105 絲線 11 滑輪 12 捲筒 12a 捲筒軸線 13a 絲線承載區域 20 滑輪 23 側壁 30 滑輪 32 滑輪轴線 100 主框架部分 110 件 112 件 114 裝設構件 114a 第一腳 114b 第二腳 116 凹部 200 絲線處理部 210 捲筒軸 212 捲筒 212a 捲筒軸線 213a 絲線承載區域 220 第一滑輪 222 第一滑輪軸線 224 滑輪承載單元 226 絲線位置偵測裝置 228 滑輪移動裝置 230 第二滑輪230 232 第二滑輪轴線 240 第三滑輪 242 第三滑輪軸線 250 第四滑輪 252 第四滑輪軸線 260 第五滑輪 270 第六滑輪 274 可移動元件 300 次要絲線處理單元 310 次要捲筒轴 312 捲筒 41 201134571 320 次要第一滑輪 328 次要第一滑輪移動裝置 330 次要第二滑輪 340 第三滑輪 350 第四滑輪 360 次要第五滑輪 370 次要第六滑輪 400 工作區域 410 絲線網 412 滑輪 430 滑輪 500 冷卻系統 510 冷卻劑槽 520 冷卻劑供應線 522 泵 530 冷卻劑返回線 540 喷灑喷嘴 542 噴灑方向 544 角度 4229 S 201134571 For example, six cutting wire segments in each of the mutually positive directions. Alternatively, a network of cut-off wires can be provided, for example, in U.S. Patent Application Serial No. 0815,449, the entire disclosure of which is incorporated herein by reference. In the work area 4, a sample supply line (not shown) is provided for carrying the sample to be sawed. The sample supply plate has a plurality of grooves so that during the sawing, the wires can pass through the grooves while the sample is carried by the remainder of the plate. Furthermore, the wire management unit has a cooling system 5〇〇. The cooling system 500 includes a coolant tank 5 10 for storing a coolant (generally slurry), a coolant supply line 520 for supplying coolant from the coolant tank 5 to the working area, and a use The coolant return line 53 is returned from the working area 4 to the coolant return line 53. The coolant supply line 520 has a plurality of nozzles for spraying the coolant to the wire in the wire mesh. . The nozzles can be arranged along the square boundary of the wire web 410. Although only one supply line 52A is shown, there may be more than one supply line, for example, each side of the square boundary of the wire mesh has a supply line (ie, there are four supply lines in total) 'each supply line supplies coolant to a plurality of sprays Nozzles (e.g., each side of the wire web 410 has six spray nozzles for each of the six wire segments). In the case of diamond threads, no aggregates are required, but it is still advantageous to cool the diamond threads during cutting. Accordingly, the slurry can be replaced by some other coolant such as a water-based cooling liquid. Accordingly, the cooling system can be advantageously adapted to a water system cooling liquid, as described below. Figure 9 shows a spray nozzle 54 特别 which is used in particular for the use of non-destroyed 30 201134571 2 such as water-based coolants. The money nozzle 540 is sprayed, and the crucible supply line 52G receives the coolant and is adapted to the /7 agent to the wire 10. The spray nozzle 540 is substantially formed into a shape of a cylindrical body, and the body of the column has a vertical cylindrical axis to the right. The circle has a notch (which is located on the left side of the body of FIG. 9). A nozzle outlet is provided in the middle. In Fig. 9, (iv) the nozzle system 54 is sprayed with some coolant onto the wire 10 in the spray direction 542. Here, the coolant spray has some expansion, and the spray direction 542 (dashed line) is: the center of the spray or the main direction 'where the expansion is around the spray. The angle 544 between the spray direction 542 and the wire 10 is 9 〇. To 18 baht. , to 170 (especially about 15 〇.) is advantageous. This large angle allows for sufficient wire cooling by cooling the liquid. Moreover, such a large angle allows the spray of coolant to always be on the wire 10, independent of the grooves used on the wire guide. Figure 10 is a perspective view showing one of the cooling system 500 of the cooling system 500 of Figure 8 "The coolant tank is suitable for non-slurry coolants (especially water-based coolants)" and is therefore particularly useful for diamond threads. of. The coolant tank system has a coolant tank volume 5 10 for storing coolant liquid. Again, the return line 530 is directly connected to the coolant tank volume to directly return the coolant liquid from the working area of the wire saw to the coolant tank volume 51 (see also Figure 8). Here, direct return means that there is no pump in the return line 530 between the working area 400 and the coolant tank volume 510. Further, the coolant tank return line 530 is connected to the coolant tank volume 5 1 0 at a connection portion of the coolant tank volume 5 1 〇. Advantageously, the connection 31 201134571 °P is at the bottom of the blade, which is arranged below the minimum coolant level during normal operation. The absence of both pump and arrangement at the bottom of the coolant tank volume 51〇 significantly reduces the formation of bubbles in the coolant tank volume 5丨〇 (which is a problem for the aqueous coolant liquid) The return line 530 can optionally also include a feed line for filling the fresh coolant supply to the trough volume 5 1 。. Further, the coolant tank volume 5 1 〇 is shaped and an inclined bottom surface (the guide The outlet (not shown) at its lowermost portion is matched. Again, the tank volume 51 is connected to the coolant liquid supply line 520 via a pump 522 (eg, a pneumatic pump). Any of the embodiments described herein can be used. In combination with the general aspect, the controller of the cooling system 500 can have a discharge program that is programmed to cause the actuator of the outlet to open the opening to discharge the tank (ie, remove all of the coolant liquid from the tank ( In addition to the possible small amount of residual coolant)). In other embodiments, the pump 522 or a further fruit (eg, aerodynamic fruit) is coupled to a drain line (not shown). In this case, the drain program may alternatively or additional The ground is stylized so that the pump delivers the coolant liquid from the tank to drain the tank. This allows for easy replacement of the coolant without the need to remove the coolant tank volume 5 1 0 from the wire sawing device. In the following, some of the embodiments described herein will be described as generally, and may be combined with any other general aspects of any of the embodiments described herein to produce yet another An embodiment. According to one aspect, a wire sawing device and/or portions thereof (such as a wire handling portion, particularly a pulley, a wire spool shaft and/or a wire spool) can be adapted to the diamond wire and operated The method can be performed with a diamond thread. This 32 201134571 can be guided by, for example, adapting the groove structure τ of the pulley to a different groove pitch than the groove depth and/or different groove shape of the conventional element. 70 pieces, by which 'can typically increase the cutting speed (for example, a multiple of 2)' can reduce the energy consumption of the wire sawing device, and further as another example can significantly reduce the casting block And the cost of fabricating the wafer from the crucible. According to a further state I, the first pulley and the second pulley train are arranged such that at least one position of the first pulley on the first motion track is on the force and in the embodiment In any position of the first-pulley on the first-exercise track, the wire is redirected by the first pulley during operation by no more than 12 〇. The first re-guide angle and the wire is redirected by the second pulley to be no less than 6 〇. Redirecting angle. A similar effect can be obtained by an alternative aspect in which the second redirection angle is greater than the first redirection angle. According to a further aspect, the reel includes a wire carrying area (which has a reel along the reel) The wire carrying length in the direction of the axis is adapted to provide a wire toward the wire web during release of the wire from the spool, and rotatably mounted to the main frame portion for rotation about the spool axis. The state - the pulley axis orientation & is substantially 90 with respect to the spool axis. The angle. According to a further aspect, the pulley motion track is arranged such that, for any length position of the wire on the coil, the position of the first pulley is present on the pulley motion track such that the wire is fed to the first pulley without twisting (ie Enter the line tangentially and leave the respective pulleys). According to a further aspect, the first pulley motion is substantially parallel to the axis of rotation. According to a further aspect, the spool has a wire 33 201134571 load bearing area & and the first pulley movement has a length of at least 90% of the length of the wire carrying region. Field 'Long According to a further aspect, the wire management early includes a first-sliding wire tracking system that allows the first sliding Xianshan private mobile device to respond to the actuation of the detected wire position. The first pulley wire tracking system includes: a first pulley moving device C, which is selected from the group consisting of a linear actuator, a linear motor, a cylinder, and a motor having a worm drive a component) a wire position detecting device (which is adapted to detect the position of the wire along the direction of the movement path), a first pulley position controller (which is operatively connected to the wire position measuring device) A detected wire position is received and adapted to determine a position and operatively coupled to the first pulley moving device to transmit the axe movement command such that the first pulley moving device moves the first pulley to the target position). According to an advance-step aspect, the first pulley axis and the second pulley axis have a smaller than 90 for each other. The angles, and according to a further aspect, are substantially parallel to each other. According to a further aspect, the first and second redirecting angles are directed to opposite winding directions. According to a further step aspect, for any position of the first pulley, the first pulley and the second pulley train are arranged to each other such that the thread is untwisted away from the first pulley and fed to the second pulley without twisting. According to a further aspect, for any position of the first pulley, the first pulley and the second pulley are arranged such that the wire between the first and second pulleys extends in the direction of the pulley motion track. According to a further aspect, the wire management unit further comprises a third pulley 34 201134571 and a fourth pulley, the second, the sacred one, the first one, the moon wheel is adapted to receive the thread from the second pulley and then redirect The wire is a second re-orientation angle, wherein the third pulley is rotatably mounted to the frame and rotates around the third pulley axis, and the fourth pulley is adapted to receive the wire from the second pulley and re-direct the wire—fourth The re-directing angle, wherein the fourth pulley is rotatably mounted to the frame for rotation about a fourth pulley axis. According to a further aspect, the third pulley axis is substantially perpendicular to the spool axis and the second pulley axis. According to a further aspect, the second redirecting angle is substantially 90. . According to a further aspect, the fourth pulley axis is substantially parallel to the spool axis. According to a further step, the fourth pulley axis is substantially perpendicular to the third pulley axis. According to a further aspect, the fourth redirection angle is between 60. With 120. According to a further aspect, the second pulley is adapted to directly receive the wire from the first pulley. According to a further aspect, the third pulley is adapted to receive the wire from the second pulley directly. According to a further aspect, the fourth pulley is adapted to directly receive the wire from the third pulley. According to a further aspect, the wire management unit further includes a wire tensioner adapted to control the tension of the wire. According to a further aspect, the wire tensioner receives the wire from the fourth pulley. According to a further aspect, the wire tensioner includes a fifth pulley and a sixth pulley, the fifth pulley is rotatably mounted to, for example, the frame and rotates about a fifth pulley axis, and the sixth pulley is rotatably mounted It is provided, for example, to a resilient member for rotation about a sixth pulley axis. According to a further aspect, the first and second pulleys, and any other pulleys (if present in the embodiment), are arranged such that for any length position of the wire leaving line 35 201134571, there is a first on the pulley motion track The position of the pulley causes the wire to exit substantially tangentially (ie, not twisted) and enter any of the coils. According to a further aspect, the wire management unit is adapted for the thread of a diamond thread (i.e., including diamonds). According to a further aspect, the main frame portion is rigid and can be rigidly connected or connected to the base of the wire sawing device and to the base of the wire cutting device. According to a further aspect, an embodiment is an upgrade tool for upgrading an existing wire management unit of a wire saw and/or for upgrading an existing wire saw (especially to upgrade it to a diamond wire, for example) . According to a further aspect, the main frame portion includes a mounting member (such as an L-shaped buckle) to which the second, third and fourth pulleys are mounted. According to an advanced aspect, receiving means means receiving directly such that, for example, the first pulley is adapted to directly receive the wire from the first reel, and the wire is not affected by any other elements therebetween. The wire described herein is arranged to be an arrangement of the operational state of the device, depending on the contingency. According to a further aspect, the reel axis defines the X axis, the second pulley axis perpendicular to the axis of the cylinder defines y ' and the z-axis is defined, perpendicular to the axis of the X* y axis, and wherein the reel and the One and second; the wheel and any other pulley (if present in the implementation of the shot) are adapted to receive the wire so as to satisfy at least the state selected from the following (and in some real, : all states): The wire between the reel and the first pulley: = 4 extension; the wire between the __ pulley and the second pulley extends along the X axis; between the second pulley and the third pulley , 36 201134571 The line is mainly extended by the x-axis; the thread between the third pulley and the fourth pulley extends mainly along the y-axis. According to the it's gait, the reel is adapted to provide a wire to the wire mesh and is also suitable for splicing the used wire from the wire mesh. According to the -step-step state, the reel has a wire carrying area, and the first pulley position controller includes a wire winding pattern, and is programmed by the "pulley position controller to determine the purpose; Groundly connected to the first-boom moving device to transmit a movement command to the first-pulley moving device such that the first-pulley moving device moves the first pulley to the target position. According to a further aspect, the wire processing 疋-main wire processing unit, the wire management sheet it further comprises - the human wire processing * according to the __ advance - step state, the main wire processing portion has - suitable for carrying the first type The spool shaft of the spool, and the secondary wire processing portion has a spool shaft adapted to carry a second type of spool. According to a further aspect, a wire cutting device is provided, the wire cutting device comprising, according to any of the embodiments described herein, a wire management unit, wherein the main frame portion is rigidly connected to the base of the wire cutting device -Inlet-step pattern The wire cutting device is selected from the group consisting of a wire mine, a multifilament wire, a square cutter and a cutter. The wire management unit of the present invention is particularly useful for squarers. According to a further aspect, a method of operating a wire cutting device is provided. The wire cutting device has a main frame portion, and the method includes: providing a wire from a roll; moving longitudinally along a pulley movement a pulley carrying unit; receiving a thread from the reel by the -___ pulley and re-directing the thread by the first pulley. The first pulley is rotatably mounted to the pulley 37 201134571 carrying unit and rotating about a first pulley axis; Receiving a wire from the first pulley by a second pulley and re-directing the wire by the second pulley, the second pulley being rotatably mounted to the main frame portion for rotation about a second pulley axis, whereby the second pulley The wire tension of the wire receives a greater load than the first pulley. According to a further aspect, the thread is a diamond thread. According to a further aspect, the method further comprises forming a wire mesh with a wire. According to a further aspect, the method includes re-directing the wire by the first pulley to no more than 12 〇. The first re-directing angle and the second pulley re-directs the second redirection angle of the wire not less than 60°. A similar effect can be obtained by an alternative aspect in which the second redirecting angle is greater than the first redirecting angle. A further aspect is directed to a wire management unit suitable for a wire cutting device. The wire cutting device has a wire forming a wire mesh for cutting. The wire management unit comprises: a main wire processing portion (which has - a main reel shaft adapted to carry a main reel) and a main first pulley adapted to receive a thread from the main reel and to reroute the thread, the main pulley being rotatably mounted to a main pulley carrying unit Rotating about the main - pulley axis, the main pulley carrying unit can be moved longitudinally along the moving track of the beta wheel. The wire management unit further comprises a human wire processing unit (having a second suitable for carrying the secondary reel, 2 cars) and a secondary first pulley (which is adapted to re-wire the wire), and a secondary π wheel The rotator is rotatably mounted to the _ secondary pulley carrying unit for rotation about the secondary secondary pulley axis, and the secondary pulley carrying unit is longitudinally movable along the under-driving pulley. Such a thread management unit 38 201134571 has the advantage of allowing a two-direction sawing operation. According to one aspect, the wire green management unit is adapted for a two-way sawing operation, wherein during the cutting of the first direction, the primary reel provides the wire towards the wire mesh and the secondary reel receives the wire from the wire mesh. And wherein during the cutting in a second direction, the secondary reel provides the wire toward the wire web and the primary reel receives the wire from the wire web. According to a further aspect, the primary and/or human reel is adapted to provide a wire to the wire mesh and is also adapted to receive the used wire from the wire mesh. According to the progressive manner, the primary wire handling portion has a spool shaft adapted to carry a first type of spool, and the secondary thread processing cartridge has a spool shaft adapted to carry a second type of cartridge. According to a further aspect, the primary and secondary reels are in a single-chamber and/or are mounted to a common wall portion of the main frame portion. According to a forward-step pattern, the controller includes a wire winding pattern and has a heel program (which is programmed to actuate the primary and/or secondary first pulley in response to the detected wire position). a mobile device) and a __winding program (which is programmed to determine the desired wire winding position to wrap the wire around the load bearing area of the primary and/or secondary reel) and to transmit the movement command to the primary (or The secondary first pulley moves the device so that it can move the respective pulley to the desired wire winding position. While the foregoing description is directed to embodiments of the present invention, other and further embodiments of the invention may be devised without departing from the scope of the invention. To decide. 39 201134571 [Brief Description of the Drawings] The above-described features of aspects of the present invention can be understood in detail by reference to the embodiments of the present invention, which are briefly described above. The drawings are in relation to embodiments of the invention and are described below: Figure 1 is a schematic illustration of a portion of a wire management unit showing the wire unwound from the drum via a pulley; Figure 2 is an embodiment according to the description herein. Side view of a portion of a wire management unit; FIG. 3 is a side elevational view of a portion of a wire management unit in accordance with a variation of the embodiment of FIG. 2; FIG. 4 is a front elevational view of a portion of a wire management unit in accordance with a further embodiment; Figure 5 is a perspective view of a portion of a wire management unit according to a variation of the embodiment of Figure 2; Figure 6 is a perspective view of a wire management unit including a portion of the above-described figure, and Figure 7 is a further embodiment according to the description herein. A schematic view of a portion of the wire management unit from the above; FIG. 8 is a plan view of a wire cutting device including a wire management unit according to further embodiments described herein; FIG. 9 is a spray according to a further embodiment described herein. Schematic diagram of a sprinkling nozzle wherein the spray nozzle is part of a wire sawing device; and Figure 10 is further based on what is described herein 201134571 perspective view of the coolant tank of the embodiment, wherein the coolant channel is a wire-cut parts of the saw device. [Main component symbol description] 1 Wire cutting device 10 Wire 105 Wire 11 Pulley 12 Reel 12a Reel axis 13a Wire bearing area 20 Pulley 23 Side wall 30 Pulley 32 Pulley axis 100 Main frame part 110 Piece 112 Piece 114 Mounting member 114a first leg 114b second leg 116 recess 200 wire processing portion 210 reel shaft 212 reel 212a reel axis 213a wire carrying region 220 first pulley 222 first pulley axis 224 pulley carrying unit 226 wire position detecting device 228 pulley Mobile device 230 second pulley 230 232 second pulley axis 240 third pulley 242 third pulley axis 250 fourth pulley 252 fourth pulley axis 260 fifth pulley 270 sixth pulley 274 movable component 300 secondary wire processing unit 310 Secondary reel shaft 312 reel 41 201134571 320 secondary first pulley 328 secondary first pulley moving device 330 secondary second pulley 340 third pulley 350 fourth pulley 360 secondary fifth pulley 370 secondary sixth pulley 400 Work area 410 Wire mesh 412 Pulley 430 Pulley 500 Cooling system 510 Coolant The coolant supply line 520 pump 522 line 530 returns the coolant 540 544 spray nozzle 542 spray direction 42 an angle

Claims (1)

201134571 七、申請專利範圍: 種適於一絲線切鋸裝置(1)之絲線管理單元,該絲 線切鑛裝置⑴具有形成-絲線網之—絲線(1〇),該絲 線管理單元具有—主框架部分⑴G)與—絲線處理部 (200),該絲線處理部包含: 一捲筒軸,其適於承載一捲筒(212),該捲筒(212) 提供該絲線(10)朝向該絲線網; 一第一滑輪(220) ’其適於接收來自該捲筒之該 絲線且再引導該絲線,該第一滑輪係可旋轉地裝設到 -滑輪承載單元(224) I㈣n輪軸線(222)旋 轉,該滑輪承載單元可沿著一滑輪運動軌道縱向地移 動;及 一第二滑輪(230),其適於接收來自該第一滑輪 (220)之該絲線且再引導該絲線,其中該第二滑輪係 可旋轉地裝設到豸主框架部分(1〇〇)而繞著一第二滑 輪軸線(232)旋轉, 其中5亥第一滑輪(220)與該第二滑輪(23〇)係被安 排成使得,在操作期間,該絲線係由該第一滑輪再引 導不大於120。之一第一再引導角度,且該絲線係由該 第二滑輪再引導不小於60。之-第二再引導角度。 一種適於一絲線切鋸裝置(1)之絲線管理單元,該絲 線切I®裝置⑴具有形成—絲線網之一絲線G 〇),該絲 43 2. 201134571 線管理單元具有一主框架部分(1 1 〇)與一絲線處理部 (200),該絲線處理部包含: 一捲筒軸’其適於承載一捲筒(2 12),該捲筒(212) 提供該絲線(1 0)朝向該絲線網; 一第一滑輪(220),其適於接收來自該捲筒之該 絲線且再引導該絲線,該第一滑輪係可旋轉地裝設到 一滑輪承載單元(224)而繞著一第一滑輪軸線(222)旋 轉’該滑輪承載單元可沿著一滑輪運動轨道縱向地移 動;及 一第二滑輪(230) ’其適於接收來自該第一滑輪 (220)之該絲線且再引導該絲線,其中該第二滑輪係 可旋轉地裝設到該主框架部分〇 00)而繞著一第二滑 輪軸線(232)旋轉, 其中該第一滑輪(220)與該第二滑輪(230)係被安 排成使得’在操作期間,該絲線係由該第一滑輪再引 導一第一再引導角度,且該絲線係由該第二滑輪再引 導一第二再引導角度’該第二再引導角度大於該第一 再引導角度。 3.如申請專利範圍第丨或2項所述之絲線管理單元,其 中該第一滑輪軸線(222)係定向成相對於該捲筒軸線 (212a)呈一傾斜角,尤其是相對於該捲筒軸線(212勾 呈實質上90。之角度。 201134571 4.如申請專利範圍第1或2項所述之絲線管理單元,其 中該第一滑輪運動軌道實質上平行於該旋轉軸線 (212a)。 5.如申請專利範圍第1或2項所述之絲線管理單元,更 包含一第一滑輪絲線跟蹤系統(226),其容許該第一 滑輪移動裝置(228)回應於一所偵測絲線位置的致 動’該第一滑輪絲線跟蹤系統係較佳地包含: —第一滑輪移動裝置(228),其為選自從以下所 構成群組之至少一元件:_線性致動器、一線性馬 達、一氣動汽缸、及一具有蝸桿驅動之馬達; 一絲線位置偵測裝置(226),其適於偵測沿著運 動路徑方向之絲線位置; .....〜1 r w疋设判碌 線位置偵測裝置以接收所㈣絲線位置,並且適於 決定一目標位寄,# α 並且可操作地連接到該第一滑輪移 =(228)以傳送一移動命令到該第-滑輪移動裝 而使得該第-滑輪移動裝置能移 該目標位置。 木α輪到 6.如申請專利範圍筮 圍第1或2項所述之絲線管理單元,Α =滑輪轴線(222)與該第二滑輪 ; 相對於彼此之小於& Λ a ’八有 質上彼此平行。、又’且在實施例中為實 45 201134571 7 ·如申請專利範圍第1或2項所述之絲線管理單元,其 中該第—與第二再引導角度係指向彼此相反的纏繞 方向。 8. 如申請專利範圍第1或2項所述之絲線管理單元,更 包含: 一第三滑輪(240) ’其適於接收來自該第二滑輪 (23 0)之該絲線且再引導該絲線一第三再引導角度, 其中該第三滑輪係可旋轉地裝設到該框架而繞著___ 第三滑輪軸線(242)旋轉;及 一第四滑輪(250),其適於接收來自該第三滑輪 之該絲線且再引導該絲線一第四再引導角度,其中該 第四滑輪係可旋轉地裝設到該框架而繞著一第四滑 輪軸線(252)旋轉, 其中該第三滑輪軸線係較佳地皆實質上垂直於 該捲筒軸線與該第二滑輪軸線。 9. 如申請專利範圍第1或2項所述之絲線管理單元,更 包含一絲線張力器(260,270),其適於控制該絲線之 張力’其中該絲線張力器係較佳地包含一第五滑輪 (260)與一第六滑輪(27〇),該第五滑輪係可旋轉地裝 設而繞著一第五滑輪軸線(262)旋轉,該第六滑輪係 可旋轉地裝設到一可移動元件(274)而繞著一第六滑 46 201134571 輪轴線(2 7 2 )旋轉。 I 〇·如申請專利範圍第1或2項所述之絲線管理單元,其 中該第一與第二滑輪(22〇,230)係被安排成使得,對 於該絲線(1 〇)離開線圈(212)之任何長度位置,該滑輪 運動執道上存在有該第一滑輪(220)之一位置而使得 該絲線係實質上切線地離開且進入該些線圈之任_ 者。 II ·如申請專利範圍第1或2項所述之絲線管理單元,其 中該主框架部分包含一實質上L形桿(114),該第二 滑輪裝設到該實質上L形桿(11 4)。 1 2.如申請專利範圍第1或2項所述之絲線管理單元,其 中該絲線管理單元係適於鑽石絲線的絲線(丨0)。 13.如申請專利範圍第1或2項所述之絲線管理單元,其 中該捲筒軸線(2 12a)係定義X轴,垂直於該捲筒軸線 之該第—滑輪軸線(222)係定義y軸,並z軸係被 定義成垂直於X和y軸之軸,及其中該捲筒(212)與 該第一和第二滑輪(220,230)係適於接收該絲線,從 而能滿足選自從下述的至少一狀態: 介於該捲筒與該第一滑輪之間的該絲線主要沿 著z軸延伸; 47 201134571 二滑輪之間的該絲線主 二滑輪之間的該絲線主 四滑輪之間的該絲線主 介於該第一滑輪與該第 要沿著X軸延伸; 介於該第二滑輪與該第 要沿著X轴延伸; 介於該第三滑輪與該第 要沿著y軸延伸。 14.如申請專利範圍第1戋2 矛及2項所述之絲線管理單元,其 中該捲筒(212)係適於提供兮 供孩絲線到該絲線網,且亦 適於從該絲線網接收經使用之絲線。 15·如申請專利範圍第!或2項所述之絲線管理單元,其 中該絲線處理部(200)是一主要絲線處理部,該絲線 管理單元更包含一次要絲線處理部(3〇〇),其中較佳 地該主要絲線處理部之該捲筒轴係適於承載第一類 型之捲筒’及其中較佳地該次要絲線處理部具有一適 於承載第二類型之捲筒的捲筒軸。 16.—種包含根據申請專利範圍第1或2項之絲線管理單 元的絲線切鋸裝置,其中該主框架部分(100)係剛性 地連接到該絲線切鋸裝置之一底座,其中該絲線切錯 裝置係較佳地為選自從以下所構成群組之一元件:一 絲線鑛、一多絲線鑛、一削方器、及一截斷器。 48 201134571 17. —種操作一絲線切鋸裴置(1)之方法,該絲線切鋸裝 置(1)具有一主框架部分(100),該方法包含下列步驟: 從一捲筒(2 12)提供絲線(10); 縱向地沿著一滑輪運動轨道移動一滑輪承载單 元; 由一第一滑輪(220)接收來自該捲筒之該絲線且 由該第一滑輪再引導該絲線,該第一滑輪係可旋轉地 裝設到該滑輪承載單元(224)而繞著一第一滑輪軸線 (222)旋轉; 由一第二滑輪(23 〇)接收來自該第一滑輪(22〇)之 該絲線且由該第二滑輪再引導該絲線,該第二滑輪係 可旋轉地裝設到該主框架部分(丨〇〇)而繞著一第二滑 輪軸線(232)旋轉, 藉此該第一滑輪(220)係再引導該絲線不大於 120°之一第一再引導角度,並且該第二滑輪(23〇)係再 引導該絲線不小於60。之一第二再引導角度。 1 8 · —種操作一絲線切鋸裝置(丨)之方法,該絲線切鋸裝 置(1)具有一主框架部分(100),該方法包含下列步驟: 從一捲筒(212)提供絲線(1〇); 縱向地沿著一滑輪運動轨道移動一滑輪承載單 元; 由一第一滑輪(220)接收來自該捲筒之該絲線且 由該第一滑輪再引導該絲線’該第一滑輪係可旋轉地 49 201134571 裝設到該滑輪承載單元(224)而繞著一第一滑輪軸線 (222)旋轉; 由一第二滑輪(230)接收來自該第一滑輪(220)之 該絲線且由該第二滑輪再引導該絲線,該第二滑輪係 可旋轉地裝設到該主框架部分(1 00)而繞著一第二滑 輪軸線(232)旋轉, 藉此該第二滑輪(2 3 0 )因該絲線(1 〇 )之絲線張力 而接收比該第一滑輪(220)更大的負載。 如申請專利範圍第17或18項所述之方法,其中該絲 線為鑽石絲線,且/或其中該方法更包含以該絲線來 形成一絲線網的步驟。 19201134571 VII. Patent application scope: A wire management unit suitable for a wire cutting device (1), the wire cutting device (1) has a wire-forming wire (1〇), the wire management unit has a main frame a portion (1) G) and a wire processing portion (200), the wire processing portion comprising: a spool shaft adapted to carry a reel (212), the reel (212) providing the wire (10) toward the wire mesh a first pulley (220) 'which is adapted to receive the wire from the reel and to redirect the wire, the first pulley rotatably mounted to the pulley carrier unit (224) I (four) n wheel axis (222) Rotating, the pulley carrying unit is movable longitudinally along a pulley moving track; and a second pulley (230) adapted to receive the thread from the first pulley (220) and to redirect the thread, wherein the pulley The two pulleys are rotatably mounted to the main frame portion (1〇〇) and rotate about a second pulley axis (232), wherein the 5th first pulley (220) and the second pulley (23〇) are Arranged such that during operation, the silk system The first guide pulley again not greater than 120. One of the first re-directing angles, and the wire is redirected by the second pulley by no less than 60. - the second redirection angle. A wire management unit suitable for a wire sawing device (1), the wire cutting I® device (1) having a wire-forming wire G), the wire 43 2. 201134571 wire management unit having a main frame portion ( 1 1 〇) and a wire processing portion (200), the wire processing portion comprising: a reel shaft 'which is adapted to carry a reel (2 12), the reel (212) providing the wire (10) orientation a wire mesh; a first pulley (220) adapted to receive the wire from the spool and to redirect the wire, the first pulley being rotatably mounted to a pulley carrying unit (224) a first pulley axis (222) is rotated 'the pulley carrying unit is movable longitudinally along a pulley moving track; and a second pulley (230) is adapted to receive the wire from the first pulley (220) and Redirecting the wire, wherein the second pulley is rotatably mounted to the main frame portion 〇 00) and rotates about a second pulley axis (232), wherein the first pulley (220) and the second pulley (230) is arranged such that 'the wire is tied during operation A first guide pulley and then reboot a first angle, and the wire line from the second guide pulley and then a second angle reboot 'reboot the second angle is greater than the first angle reboot. 3. The wire management unit of claim 2, wherein the first pulley axis (222) is oriented at an oblique angle relative to the spool axis (212a), particularly relative to the roll The wire management unit of the first or second aspect of the invention, wherein the first pulley motion track is substantially parallel to the axis of rotation (212a). 5. The wire management unit of claim 1 or 2, further comprising a first pulley wire tracking system (226) that allows the first pulley moving device (228) to respond to a detected wire position Actuating the first pulley wire tracking system preferably comprises: - a first pulley moving device (228) that is at least one component selected from the group consisting of: a linear actuator, a linear motor a pneumatic cylinder, and a motor with a worm drive; a wire position detecting device (226) adapted to detect the position of the wire along the direction of the movement path; ..... Position detection device to pick up Receiving (4) a wire position and adapted to determine a target position, #α and operatively coupled to the first pulley shift = (228) to transmit a movement command to the first pulley to cause the first pulley The moving device can move the target position. The wood α turns to 6. The wire management unit according to claim 1 or 2, Α = pulley axis (222) and the second pulley; relative to each other Less than & Λ a 'eight are qualitatively parallel to each other, and 'and in the embodiment is true 45 201134571 7 · The wire management unit according to claim 1 or 2, wherein the first and second The redirection angles are directed to opposite winding directions. 8. The wire management unit of claim 1 or 2, further comprising: a third pulley (240) adapted to receive from the second pulley ( 23) the wire and redirecting the wire to a third redirection angle, wherein the third pulley is rotatably mounted to the frame to rotate about the ___ third pulley axis (242); and a fourth a pulley (250) adapted to receive from the third The wire of the wheel and redirecting the wire to a fourth redirection angle, wherein the fourth pulley is rotatably mounted to the frame for rotation about a fourth pulley axis (252), wherein the third pulley axis is Preferably, the wire management unit of the first or second aspect of the invention further comprises a wire tensioner (260, 270), which is substantially perpendicular to the spool axis. Suitable for controlling the tension of the wire, wherein the wire tensioner preferably comprises a fifth pulley (260) and a sixth pulley (27〇), the fifth pulley is rotatably mounted around the first The fifth pulley axis (262) rotates and the sixth pulley is rotatably mounted to a movable member (274) for rotation about a sixth slide 46 201134571 wheel axis (2 7 2 ). The wire management unit of claim 1 or 2, wherein the first and second pulleys (22〇, 230) are arranged such that the wire (1 〇) leaves the coil (212) Any position of the length of the pulley, the position of one of the first pulleys (220) is present on the pulley motion path such that the wire is substantially tangentially separated and enters any of the coils. The thread management unit of claim 1 or 2, wherein the main frame portion includes a substantially L-shaped rod (114) to which the substantially L-shaped rod is attached (11 4 ). 1 2. The wire management unit of claim 1 or 2, wherein the wire management unit is adapted to a wire (丨0) of a diamond thread. 13. The wire management unit of claim 1 or 2, wherein the spool axis (2 12a) defines an X axis, and the first pulley axis (222) perpendicular to the spool axis defines y The shaft and the z-axis are defined as axes perpendicular to the X and y axes, and wherein the reel (212) and the first and second pulleys (220, 230) are adapted to receive the wire, thereby satisfying selection Since at least one state is as follows: the wire between the reel and the first pulley extends mainly along the z-axis; 47 201134571 the main four-cable of the wire between the two main pulleys of the wire between the two pulleys The wire between the main pulley and the first to extend along the X axis; the second pulley and the first to extend along the X axis; between the third pulley and the first along The y axis extends. 14. The thread management unit of claim 1 and 2, wherein the reel (212) is adapted to provide a silk thread to the wire mesh and is also adapted to receive from the wire mesh. The thread used. 15·If you apply for a patent scope! Or the wire management unit according to the item 2, wherein the wire processing unit (200) is a main wire processing unit, and the wire management unit further comprises a primary wire processing unit (3〇〇), wherein the main wire processing is preferably performed. The spool shaft is adapted to carry a first type of spool 'and preferably the secondary wire processing portion has a spool shaft adapted to carry a second type of spool. 16. A wire cutting device comprising a wire management unit according to claim 1 or 2, wherein the main frame portion (100) is rigidly connected to a base of the wire cutting device, wherein the wire is cut The faulty device is preferably one selected from the group consisting of: a wire mine, a multifilament mine, a square cutter, and a cutoff. 48 201134571 17. A method of operating a wire sawing device (1) having a main frame portion (100), the method comprising the steps of: from a reel (2 12) Providing a wire (10); longitudinally moving a pulley carrying unit along a pulley moving track; receiving the wire from the roll by a first pulley (220) and re-guiding the wire by the first pulley, the first a pulley is rotatably mounted to the pulley carrying unit (224) for rotation about a first pulley axis (222); the second pulley (23 〇) receives the thread from the first pulley (22〇) And reorienting the wire by the second pulley, the second pulley is rotatably mounted to the main frame portion and rotates about a second pulley axis (232), whereby the first pulley (220) redirecting the wire to a first redirecting angle of no greater than 120°, and the second pulley (23〇) redirecting the wire to no less than 60. One of the second redirection angles. 1 8 - A method of operating a wire sawing device (1) having a main frame portion (100), the method comprising the steps of: providing a wire from a reel (212) ( 1)) moving a pulley carrying unit longitudinally along a pulley moving track; receiving the wire from the roll by a first pulley (220) and re-directing the wire by the first pulley 'the first pulley system Rotatablely 49 201134571 is mounted to the pulley carrying unit (224) for rotation about a first pulley axis (222); the second pulley (230) receives the wire from the first pulley (220) and is The second pulley re-directs the wire, the second pulley is rotatably mounted to the main frame portion (100) and rotates about a second pulley axis (232), whereby the second pulley (23) 0) A larger load than the first pulley (220) is received due to the wire tension of the wire (1 〇). The method of claim 17 or 18, wherein the wire is a diamond thread, and/or wherein the method further comprises the step of forming a wire web with the wire. 19
TW099131670A 2009-09-18 2010-09-17 Wire handling unit, wire saw device and method for operating same TW201134571A (en)

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CN102873775A (en) * 2012-08-13 2013-01-16 安阳市凤凰光伏科技有限公司 Net breaking rescuing device for HCT slicer
CN102837371A (en) * 2012-08-20 2012-12-26 安阳市凤凰光伏科技有限公司 Cost-reducing method for HCT slicing
CN113579119B (en) * 2021-09-29 2021-11-30 江苏瑞徕电梯设备科技有限公司 Fixed-distance cutting structure of steel wire rope processing machine

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JPH0871911A (en) * 1994-09-01 1996-03-19 Tokyo Seimitsu Co Ltd Traverse device of wire saw
US20010002561A1 (en) * 1994-09-30 2001-06-07 Mitsuhiro Shiraga Wire saw apparatus and method
JP3107143B2 (en) * 1995-07-14 2000-11-06 株式会社東京精密 Wire traverse device for wire saw
JPH11291154A (en) * 1998-04-07 1999-10-26 Takatori Corp Wire driver in wire saw

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