TW201132450A - Machine tool with function for setting up a measurement reference point of a work - Google Patents

Machine tool with function for setting up a measurement reference point of a work Download PDF

Info

Publication number
TW201132450A
TW201132450A TW99109619A TW99109619A TW201132450A TW 201132450 A TW201132450 A TW 201132450A TW 99109619 A TW99109619 A TW 99109619A TW 99109619 A TW99109619 A TW 99109619A TW 201132450 A TW201132450 A TW 201132450A
Authority
TW
Taiwan
Prior art keywords
probe
machine
work
workpiece
axis
Prior art date
Application number
TW99109619A
Other languages
Chinese (zh)
Other versions
TWI389764B (en
Inventor
Yonp-Yo Hon
Kenzo Ebihara
Akira Yamamoto
Masayuki Hamura
Original Assignee
Fanuc Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fanuc Ltd filed Critical Fanuc Ltd
Priority to TW99109619A priority Critical patent/TWI389764B/en
Publication of TW201132450A publication Critical patent/TW201132450A/en
Application granted granted Critical
Publication of TWI389764B publication Critical patent/TWI389764B/en

Links

Landscapes

  • Machine Tool Sensing Apparatuses (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

A spherical measuring head of a probe in an on-machine measurement device is moved in one direction on a processed surface of a work. After the measuring head departs from one edge face of the work, the coordinate of the probe are detected when the moving speed of the probe in its axial direction reaches a predetermined speed that is set in advance. Then, the motion of the spherical measuring head on the processed surface of the work is conducted again in the reverse direction. Next, the coordinate of the middle point between the two edge faces are obtained from the above two detected coordinates, and the obtained coordinate of the middle point is set as the measurement reference position of the work.

Description

201132450 六、發明說明: 【發明所屬之技;^領域】 測定2:::===:=)之形狀 用以篁測I作件形狀之基準位置設定功能之工賊相係關於具有 【先前技術】 機上工時,為實現奈料位之形狀精度,不自工呈 樣置r針二尖^以 仏加工。為此,需確立加工工作件時之^沪盥確進仃 之關係。為她加 測時座標之關係,需設定工作件之量測基準位丁機载置 方法作紅作件之量測鱗位置之奴方法,自以㈣已知下列 (a)以工作件之量測基準位 心:為此,-_先放置定心粉安轉軸之中 然後,使祕移檢測ϋ使定心、球之中心 面盤。 之中心座標。織拆下定上述旋飾 件炎具之中心座標=轉 "ΐ標為工作件紅作件夾具之基準位置 位置之習知ί矿口=盤j以件基, 並ί,只要工作件非圓筒形,就難以使4件== 具之中心與工作件之中心一致。此 ^牛之圓同瓜夾 練度而產生相當大之設定誤差,此耗於操作者之熟 201132450 技術不必使工作公報令公開了以下 定必定存在於^ί形重合,藉由十 形:if陶峰稱形狀:::因t?=力,為對象之工作件 工作件形狀進行機载量測,所以加卫前經粗加工之 作件中心。因此,為對付 二=由量测求出之頂點係工 ^致之問題,在工作件上除加工G夕求出之頂點 使中心不-致,亦已加工 卜。又置了夕餘之空間,即 此外’最近除對工作件全面U加工 之技,無法因應如此最加=述專利文獻 或尺寸之南精度化之課題。 或工作件开 >狀 由推本之專利文獻_雇~2_4號公報中公Η 了萚 由,疋工作件之端面座標,求出工作件之 開了措 術藉由以接觸式探針進行作 二支術。該技 探針位移之劇烈變化,以求測疋,檢測於工作件端面 破带在專敝獻公開之触+,因為_錢針之接觸頭為 料;確地檢測出工作件端面之邊緣,所以藉由對測^資 二、^處來推定卫作件端面之邊緣。因此,測定資料之採樣數 Ξΐϊ或之Γ定。由於測定裝置之振動、被測定 資料與實際之端===污物之喪端面形狀 (d)在曰本專利文獻特開2008-200798號公報中公門τ貝女 檢測來設定工作件基準位置之功能之工具機 將具有加工面與直交之兩條線呈線對稱的工作件,配置在^ j藉由流體軸承支制可動軸之卫具機巾,俾機械座標系之^ 邊兩條線平行,且沿著與所述兩條線平行之第1、後,自工 ^ 侧接觸探針之觸針尖端之測定球,測定由於接觸而增大之位置偏 4 201132450 差接觸。 制程式進行位置偏差之=之技術中,藉由數健制裝置中之控 位置偏差值之設定虚。根據加工作業之安排,需每次變更 中,若存在有設定錯令广姓=直新進仃3又疋。在該重新設定作業 在最壞之敎下紐妨正叙檢測。 之力碰撞,有可能導跡轴持、,移動’探針與卫作件以較強 為量測微小位置偏差之^及卜,在該技術中, 此需限i為直線!接觸誤檢測導致流體軸承嗔合之危險,因 原點言日及本用專^=^_51號公報中公開了加工 以不花費成本之方式,容易並且。=術係用於 轉==:外表J 二 而L上ί專利文獻公開之技術中,檢測之面係工作件單側之 ί之ί ::侧之面安裝在夾具等上。當要檢測i裝 上之面日守’需使主軸或工作件旋轉18〇 a :此之姿態非常困難’即便使主軸旋轉度,4:以 水平亦非常困難。因此,無與移動軸保持 【發明内容】 『此,本發明之目的在於提供—種可解 201132450 工具==二 騎點設定功能之 r作件之形狀測定了及:===$^3線對稱 輸入有來自該機上量測,置 f j農置’且包含可藉由 控制之複數可動轴。又,該數值控制裝置加以 機上量測裝置内部因流體軸承受j支η:詈探針,於 包含可動«。且該工具機 出軸位置檢測信號。且4值具機各可動軸之位置並輸 構,驅動該可動轴,俾;裝置包含:可_驅動控制機 成; 分別朝各端面線2向,自工作件之加工面内 位置檢測機構所輸出之位置檢::二以根據由該 該移動速針飾速度計算機構計所計算之 機構判斷該移動速度已達機構’將由該判斷 置檢測機構所檢測出的各以該各可動轴位 構’根據由該儲存機構所儲存 σ以儲存,及設定機 中心奴其妓轉該工作件之 軸位置檢測驅練置所具有之介面將來自該可動 連接該馬達信號輸入該數值控制裝置;經由未 之該位置檢職構之位j所具有之介&將來自職上量測裝置 自該可動數值控制裝置。 上量測裝置之該位置出之軸位置檢測信號與自該機 相大致相差90产2相^構所輸出之位置檢測信號可分別由位 A/D轉換裝置,弦波類比信號所構成,該介面包含: 震置,將㈣㈣為數位錢;及内插分割 、、置所輸出之數位信號以該正弦波類比信 201132450 號之1周期分經分割之數位信號加以輸出。 置 檢測增謝術之該位 該儲存脸ί雷射干涉儀其中任一種檢測裝置。 定之速度時斷該移動速度已達到預先決 位置資料自動動轴位置檢測機構所檢測出的柯動轴之 機構該加工面之水平方向左右兩端中由該儲存 標,求取^ 的鋪作駐作狀水付向之中心座 該可==以ί直 二=的;標作為工作= 纽二^ ’以设疋其為工作件之量測基準點。 定功能具之結構,可提供-種具有量測基準點設 機上量^置f定用,式探針由流體軸承支持之結構之 里、j衷16又疋工作件之量測基準點。 【實施方式】 頻矛發明之工具機所具備之機載量測器之-例。圖1 1之重要部位剖面。該機上量測裝置1中包 省略圖示體lb ’其内建在殼體la中。探針本體1b由 該轴承Ϊ可#7用2,可沿探針本體lb之中心軸方向移動。作為 軸承二可使用空氣軸承等流體軸承。 昭射ΐί針i=b上安裝有直尺id。自雷射頭1c朝該直尺1d 圖示之受絲件接收來自直尺^反射光’ 叛測探針本體lb之轴向之移動位移。 觸針本·? ^之一端安裝有包含球型測定頭1f之觸針le。 m係,長之棒狀構件。並且,觸針le之一端固定在探針本 針本妒lh 安裝有球型測定頭1f。為簡化說明,以後將探 针本體lb、觸針le及球型測定頭lf合稱為探針pr。 201132450 探針Pr之球型測定 工面如,順著加工面按顯觸工作件f之加 裝置1中之磁鐵、彈簧等大fW吏用内建在機上量挪 .之‘丹之移動方向,,之iH:1、之值。探針忏可沿圖1所示 1内之限制機構(未圖示動。此外,藉由機上量崎置 此,即使探針ΡΓ之球型 ^針Pr之可移動位移之範圍。因 不需擔心探針PU探針本 上離開工作件W之加工面Wa,也 圖2顯示在本二本= 離開機上量測裝置卜 也 之加工面Wa麵之狀齡,人r之球型歡頭If在與工作件? (右端郎及左端LE)相對作件W之加工面Wa之兩端 RL)。在此, 工作件w 離^作件w (路彳线與路徑 工前之加工面。符號AP係a係!粗加工之加工面或修正加 鋪工作件w之加工面工作件f之端面位置,使探針pr 藉由圖2所示之探針Pr 稱為“靠近位置AP”)。 明本=之機上量測褒置中之探針作工面Wa之動作,說 百先,自工作件ψ之力 眾里上之動作。201132450 VI. Description of the invention: [Technology of the invention; field] The shape of the 2:::===:=) is used to determine the position of the workpiece. Technology] On-board working hours, in order to achieve the shape accuracy of the material level, the r-needle is not self-contained. To this end, it is necessary to establish the relationship between the work of the workpiece and the work piece. In order to increase the relationship between the coordinates of the test piece, it is necessary to set the measurement method of the work piece to measure the position of the Ding machine as the slave method of measuring the position of the red scale. Since (4) the following (a) the amount of the work piece is known. Measure the reference center: For this purpose, -_ first place the centering powder in the rotation axis and then make the secret detection ϋ to center the center of the ball. The center coordinates. Weaving and dismantling the center coordinates of the above-mentioned guillotine wares = turn " ΐ 为 为 为 工作 工作 工作 工作 ί ί ί ί ί = = = = = = = = = = = = = = = = = = = = = = = In the shape of a cylinder, it is difficult to make the center of the four pieces == the center of the work piece coincide with the center of the work piece. This ^Niu's circle has a considerable set error with the melon clip, which is consumed by the operator's familiar 201132450. The technique does not have to make the work bulletin disclose that the following must exist in the shape of the coincidence, by the ten-shaped: if Tao Feng said the shape::: Because of the t?= force, the airborne measurement is performed on the shape of the workpiece of the workpiece, so the center of the roughing is added before the reinforcement. Therefore, in order to deal with the problem of the vertices obtained by the measurement, the vertices obtained by the processing G on the work piece make the center not-induced, and have been processed. In addition, the space for the evening is set, that is, in addition to the recent U-processing of the work piece, it is impossible to cope with the problem of the patent document or the south precision of the size. Or the work piece is opened. The patent document _ hiring ~ 2_4 publishes the 端面 疋, 端面 端面 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋Two techniques. The violent change of the displacement of the probe is used to measure the flaw, and the end face of the workpiece is detected in the special touch of the touch, because the contact head of the _ money needle is the material; the edge of the end face of the workpiece is surely detected. Therefore, the edge of the end face of the guard piece is estimated by the measurement of the second and the second. Therefore, the number of samples of the measured data is determined or determined. The vibration of the measuring device, the measured data, and the actual end === the shape of the end face of the dirt (d) are set in the reference position of the workpiece by the public door τ feminine test in Japanese Patent Laid-Open Publication No. 2008-200798. The functional machine tool will have a line-symmetric working piece with the machined surface and the orthogonal line. The machine tool is arranged to support the movable shaft of the movable shaft by the fluid bearing, and the two sides of the mechanical coordinate system are parallel. And, along the first and second parallel to the two lines, the measuring ball of the stylus tip of the probe is contacted from the working side, and the positional difference 4 201132450 which is increased by the contact is measured. In the technique of performing the positional deviation =, the setting of the control position deviation value in the digital health device is imaginary. According to the arrangement of the processing operation, in the case of each change, if there is a setting error, the number of surnames = direct new 仃 3 疋. In this resetting operation, the worst case is detected. The force of the collision, it is possible that the guide axis is held, and the 'probe and the guarding piece are used to measure the slight positional deviation. In this technique, the limit i is a straight line! Contact misdetection leads to The danger of fluid bearing coupling is disclosed in the original Japanese and Japanese Patent Application No. ^_51, which is easy to handle without cost. = The system is used for the rotation ==: Appearance J II. In the technique disclosed in the patent document, the surface of the inspection surface is unilaterally attached to the workpiece. The side surface is mounted on a jig or the like. When it is necessary to detect the surface of the installation, it is necessary to rotate the spindle or the workpiece by 18 〇 a : This posture is very difficult. Even if the spindle rotation degree is 4, it is very difficult to level. Therefore, there is no movement with the moving shaft. [Invention, the object of the present invention is to provide a solution for the shape of the solvable 201132450 tool == two riding point setting function and: ===$^3 line The symmetrical input has a measurement from the machine, and the variable axis is controlled by a plurality of movable axes. Further, the numerical control device is provided with an internal movement of the on-machine measuring device due to the fluid bearing. And the machine tool output position detection signal. And the 4-value machine has the position of each movable shaft and is configured to drive the movable shaft, and the device comprises: a _ drive control machine; respectively, facing each end line 2, from the working surface position detecting mechanism of the working piece The position detection of the output:: two, according to the mechanism calculated by the moving speed decoration speed calculation mechanism, the movement speed has reached the mechanism 'the position of each movable axis detected by the determination detection mechanism 'According to the storage of the σ stored by the storage mechanism for storage, and setting the machine center to transfer the axis of the work piece to detect the position of the drive device, the motor signal from the movable connection is input to the numerical control device; The location of the position inspection structure j has a reference to the mobile measurement device from the movable numerical control device. The position detection signal of the position of the upper measuring device is substantially different from the phase of the machine. The position detection signal outputted by the two phases is respectively composed of a bit A/D conversion device and a sine wave analog signal. The interface includes: a shock, (4) (four) is a digital bit; and an interpolated split, and the output digital signal is output by the divided digital signal of the sine wave analog letter 201132450. This is the detection device. This storage face ί laser interferometer is one of the detection devices. When the speed is interrupted, the moving speed has reached the pre-determined position. The automatic moving shaft position detecting mechanism detects the mechanism of the Ke moving shaft. The horizontal and the opposite ends of the processing surface are stored by the storage target. The center of the water-paying direction can be == ί直二=; the standard is the work = 纽二^' to set it as the reference point for the work piece. The structure of the fixed function can be provided with a measuring reference point setting on the machine, a setting of the type of the probe supported by the fluid bearing, and a measuring reference point of the workpiece. [Embodiment] An example of an on-board measuring device provided in a machine tool of the invention. Figure 11. The important part of the section. The on-board measuring device 1 is omitted from the housing 1a. The probe body 1b is moved by the bearing Ϊ ##2 in the direction of the central axis of the probe body lb. As the bearing 2, a fluid bearing such as an air bearing can be used. There is a ruler id installed on the arrow ΐ 针 pin i=b. From the laser head 1c, the wire receiving member shown in the ruler 1d receives the displacement displacement from the axial direction of the ruler ^reflected light' One end of the stylus is equipped with a stylus le including a spherical measuring head 1f. m series, long rod-shaped members. Further, one end of the stylus le is fixed to the probe pin 1h to mount the spherical measuring head 1f. To simplify the description, the probe body lb, the stylus le, and the spherical measuring head lf will be collectively referred to as a probe pr in the future. 201132450 The ball type measuring work surface of the probe Pr is as follows: along the processing surface, according to the large fW of the magnet 1 and the spring in the device 1 of the touch device f, the built-in movement of the machine is used. , iH: 1, the value. The probe 忏 can be moved along the restriction mechanism shown in Fig. 1 (not shown). In addition, the range of the movable displacement of the ball type pin Pr can be set by the on-board measurement. It is necessary to worry about the processing surface Wa of the probe PU probe leaving the working piece W, and FIG. 2 also shows the age of the processing surface Wa surface of the second measuring device on the leaving machine. The head If is opposite to the working piece (right end lang and left end LE) as the opposite ends RL of the processing surface Wa of the workpiece W. Here, the workpiece w is separated from the workpiece w (the processing line of the road line and the path front. The symbol AP is a system! The rough processing surface or the end surface position of the processing surface workpiece f of the trimming work piece w Let the probe pr be referred to as "close to position AP" by the probe Pr shown in FIG. Mingben = the machine on the machine to measure the action of the probe in the work area Wa, said that the first, the force from the work piece, the action on the public.

使探針P"目對移動(路徑立置AP朝圖2中右側 後,再次返回工作件w 離開工作件W之右端面位置RE 加工面之靠近位置AP 然後,自工作件^ 此),使其移動直到離開工作件針卜相對移動(路徑 探針Pr相對於工作件W之加工面心,=LE:如此,藉由使 之兩端面(RE及LE)之位置。 相對移動,來檢測工作件wMove the probe P" to move the target (the path is set to the right side of Figure 2, and then return to the work piece w again, leaving the right end position of the workpiece W, the position close to the processing surface, AP, and then from the workpiece). It moves until it moves away from the workpiece (the path probe Pr is opposite to the machined face of the workpiece W, =LE: so, by making the positions of the two ends (RE and LE). Relative movement, to detect the work Piece w

然後,使用圖3更詳細地說明圖9 端面位置之本發明之原理。^ ^ 2中職明之制工作件W 之球型測定頭lf按壓工作件巧月圖3中之符號。T係探針Pr V〇係探針Pr離開工作 ^面Wa之力,亦即接觸壓。 V係探針pr自工作件w ° Wa時探針Pr軸向之初速度。 度,、探針Pr之質牛量, 開後探針Pr軸向之加速度。自工作件W之加工面Wa離 係彳木針Pr之球型測定頭If自工作 8 201132450 件识之加工面鼬之端面脫離之時 沿著工作件W之加工面Wa之進給速度。〜時間。V表示探針pr ,機上量測裝置i中所具備^^ 轴承等流雜承支持n藉由翻=本體lb’由空氣 工作件W之加工自Wa按壓之。接觸壓係頁Η以接觸射順著 對探針本體lb作用之外力。 〃上述之磁力等推壓機構 自紙面之表面—側朝直之方向,為 力之影響。此外,接 Τ係不變2定^針斤之運動中沒有重 在狀態Λ下,因為球型測定頭lf 狀態,所以球型測定頭lf自;頁:作件W之加工面之 作用力-τ。此外,在工作件之加工面受到接顧T之反 件心狀=定=r咖定㈣完— 觸壓τ之反作用力—τ員1 f不自工作件讲之加工面wa受到接 針作之加速度夺示之質量,以α表示探 Τ=Μχα來表示。並且,探^ Pr之運動方程式可藉由 動。又,在機上量測聚置i 15之可動範圍内運 開工作件W之加工面w p使探針pr之球型測定頭1 f離 瞬間即成為零。&,自推壓機構對探針卜作用之力也不會在 作件w之加i 速度v相同,球型測定頭Η自工 球型測定頭作面件離=菜針&之轴向初速度相同,則在 論在工作件w之加工而/ w之加卫面後’探針Pr之速度變化無 Pr之運動轨跡無論在^壬一端面之位置皆相同,此外,探針 相同之軌跡。 乍件?之加工面Wa之任一端面之位置皆為 201132450 變化。在於探針Pr之運動軌跡與速度之Next, the principle of the present invention of the end face position of Fig. 9 will be explained in more detail using Fig. 3. ^ ^ 2 The function of the ball type measuring head lf of the work piece W of the middle job is the symbol in the figure 3 of the work piece. The force of the T-system probe Pr V〇-based probe Pr leaving the working surface Wa, that is, the contact pressure. The initial velocity of the probe Pr axis when the V-system probe pr is from the working member w ° Wa. Degree, the mass of the probe Pr, and the acceleration of the probe Pr axis after opening. Since the processing surface Wa of the workpiece W is separated from the ball-shaped measuring head of the eucalyptus needle Pr, the working speed of the processing surface Wa along the workpiece W when the end surface of the processing surface 脱离 is removed from the work 8 201132450. ~time. V denotes the probe pr, and the flow bearing support such as the bearing provided in the on-board measuring device i is pressed by the processing of the air working member W from Wa by the turning body lb'. The contact pressure is applied to the probe body lb by an external force.推The above-mentioned magnetic force pushing mechanism is the influence of the force from the surface of the paper surface to the side. In addition, the contact system is not fixed. The movement of the needle is not in the state, because the ball type is measured in the head lf state, so the ball type measuring head lf is self-page; the force of the processing surface of the workpiece W - τ. In addition, in the processing surface of the workpiece, the object of the T is reversed. ====================================================================================== The quality of the acceleration is represented by α = Μχα. Moreover, the motion equation of the probe Pr can be moved. Further, the machined surface w p of the workpiece W is moved in the movable range of the measurement measuring unit i 15 so that the spherical measuring head 1 f of the probe pr becomes zero immediately. &, the force of the self-pushing mechanism on the probe is not the same as the speed i of the workpiece w, and the ball type measuring head is self-working ball type measuring head for the surface part = the needle and the axial direction of the needle The initial velocity is the same, then the speed of the probe Pr changes after the processing of the workpiece w/W is added. The motion track without Pr is the same regardless of the position of the end face. In addition, the probe is the same. The trajectory. Software? The position of either end face of the machined surface Wa is changed to 201132450. In the motion track and speed of the probe Pr

If離開工作件W之加卫面J 說,探針Pr之球型測定頭 來觀察圖4A及圖4B較容易理解里。'、時之情形。又,參照圖3 型測定於工作件W之端面位置,但由於球 面。員If為球型’因此在該時刻球型測定頭if多半未離開端 » itf 置Μ止探針Pr之探針轴(=面)移動,所以至位 起因於粗加工之加工面或2加^^零),微小之速度變化係 針斤進行移動之路徑RR與工^加 形狀誤差及探 Ρ2pa , pr ^ 但因為球型測定頭lf為球 離開工作件知面, 形狀進行移動,速_面),所以無法沿著 之部分,因此速度變化不規0則。侧㈣分之測定面係非加工面 不合a』丨ώ置烈球型測疋頭Η完全離開工作件W。自令日丰刿走ε,If the guard surface J of the work piece W is left, the spherical measuring head of the probe Pr is easier to understand by observing FIG. 4A and FIG. 4B. ', the situation of the time. Further, the position of the end face of the workpiece W is measured with reference to Fig. 3, but due to the spherical surface. If If is a ball type', therefore, the ball type measuring head if most of the time does not leave the end» itf is placed on the probe axis (= face) of the probe Pr, so it is caused by the roughing of the processing surface or 2 plus ^^零), the small speed change is the path of the movement of the pin and the shape of the force and the 2g, pr ^ but because the ball type measurement head lf is the ball to leave the work piece to know the surface, the shape moves, the speed _ Face), so it is impossible to follow the part, so the speed change is irregular. The side (four) points are measured on the non-machined surface. The abruptly placed ball is completely removed from the workpiece W. Since the day, I’m going to leave ε,

Wa (量,):二之;響 所述由流體軸承支拷 因為钬針斤之探針本體比如上 自該時刻ΐ ϊίΓ Λ擦力不作用於探針本體1b。因此, 變化呈線性(惟接艏1^^向^度基於接觸麗τ (頂出力)其速度 作件W離開定)。藉由Va表示球型測定頭If自工 如使用圖3已說明;。/4β^。關於探針Pr之軸向速度變化 探針Pr之逮戶i ’在猎由採針斤之傾斜調整接觸壓T時, 取決於重力加速度與傾斜角度。 下稱為檢椒以 又接觸射相同時,因為工作件f之端面位置(位置ρι) 10 201132450 與檢測座標(位置P4)夕至 正確之端面位置。^—端面皆恒定,所以可求出 置。 乂此為基礎,可求出正確之工作件w之中心位 在圖 4A-圖 4C Φ,j» si _ 外時’進行端面檢圖4C所示,在探針之軸向移動速度為 然而在觸壓τ恒定,無重力影響為前提。 之工作件$之加 ^,Pr之方向,使探針斤接觸圖2所示. 位置LE時,重力之 W之右端面位置RE與左端面 響之情況相同,此時也與上述無重力影 限定為ίίτ _間之變化相同之情況’接觸壓τ亦未必 ‘;=2二無論紅作0之任-端祕置,只m …潘說B月具有使用上述測定原理之工 …Wa (quantity,): two; ringing by the fluid bearing support because the probe body of the needle pin, such as from the moment ΐ ϊ Γ Γ Γ rubbing force does not act on the probe body 1b. Therefore, the change is linear (except that the 艏1^^^^^ is based on the contact τ (the ejection force) and its velocity W is determined to leave). The ball type measuring head If is represented by Va as described using Fig. 3; /4β^. Regarding the change in the axial velocity of the probe Pr, the capture of the probe Pr, i', depends on the acceleration of gravity and the angle of inclination when the contact pressure T is adjusted by the inclination of the needle. The latter is called the same as the contact shot, because the end position (position ρι) 10 201132450 and the detected coordinate (position P4) of the workpiece f are correct to the end position. ^—The end faces are all constant, so you can find them. Based on this, it can be found that the center position of the correct working piece w is shown in Fig. 4A - Fig. 4C Φ, j» si _ when the end face inspection is shown in Fig. 4C, and the moving speed in the axial direction of the probe is The pressure τ is constant and there is no premise of gravity. The working piece is added by ^, the direction of Pr, so that the probe pin contacts the one shown in Fig. 2. At the position LE, the right end position RE of the gravity W is the same as the left end face, and this is also limited with the above-mentioned gravity-free shadow. For the case where the change between ίίτ _ is the same as the 'contact pressure τ is not necessarily'; = 2 two regardless of the red work of the 0-end secret, only m ... Pan said that B has the use of the above measurement principle...

軸轴驅動之工具機之一例。在圖5中顯示具有X Υ軸上動軸,並且在Χ軸上具有係旋轉轴之Β軸,在 位軸上具有係旋轉軸之c軸,能夠同時控制5軸之工具機之重要^ 檢測機上量職置之接觸式探針脫離之方向 ^具機之可動軸並Ϊ 限疋於桃體妹,可適麟各種形式之可_。 神个 ,6係將來自機上量職置之位置檢測信號 呈 $動軸之位置檢測信號輸人數值控制 2機實 概要結構圖。在該實施方式中,自測定#“ 方^ ί 機上量測裝置1 ’經由介面2 (參照_朝數值= 測信號之位置檢測信號ipf。自設置在工位移之量 檢測裝置所輸出之位置檢測信號也經由介面 11 201132450 步輪入飼服控制部肋。該介面使自伺服馬達95中所内建之位置檢 測裝置96 (參照圖7)輸出之位置檢測信號與自機上量測裝置工 所輸出之量測信號同步並輸入數值控制裝置8之伺服控制部8b。 在本發明之實施方式中,檢測機上量測裝置丨之探針本體比 之移動位移之位置檢測裝置或檢測工具機直動軸位置之位置檢測 ,置内可使⑽如直尺、雷射干涉鮮高精度檢繼置。此外, 在檢測工具機旋轉軸位置之位置檢測裝置中可使用編碼器。 此外,數值控制裝置8包含:儲存機構,儲存工具機各可 八之位置資訊及來自機上量測裝置丨之量測資訊(位置資 及 “ U字在°亥儲存機構中所儲存之位置資訊送出到係外部儲存裝 叶算出根據在數值控制裝置8中所儲存之位置資訊 資訊之差移動速度。例如’可根據每個控制週期位置 介面可、蝴目幅結構之 ==上量測以=== 軸之位置檢測裝置與機上量測裝 '术目谷 位置檢測信號與機上量測裝置^二二(亦p,各軸之軸 裝置8之暫存器儲存在係數健制 在本發明中,為檢測出工作件w戚 標儲存該檢測位置,可藉由梯 古f作為檢測座 h之軸向移動速度為既定以^丁以下方法··如果探針 之位置資料之暫存器切_ 制週期改寫可動軸 將該改寫傳送給另—保存暫在f (,用梯形圖之常閉觸點:>,或是 資料傳送命令MOV等)等,(使用信號上升檢測命令DIFU或 此外,數值控制裝詈R妳丄 部裝置之個人電腦u進杆、”乙5網路(注冊商標〕I2對係外 内建在個人電腦η中之躲’針對與個人電腦11連接或 子裝置11a,朝個人電腦u發送來自各 201132450 每個採樣2測信號。個人電腦11在 置資訊同步並將其儲存麵縣自機上量測裝置1之位 8讀入之所儲^5=職軟體,根触由數健制裝置 理。該形狀量卿°,加卫物之職制等所需之運算處An example of a machine tool for shaft shaft drive. In Figure 5, the axis with the X Υ axis and the axis of rotation on the Χ axis, and the c axis with the axis of rotation on the axis, can control the importance of the 5-axis tool. The contact probes on the machine are out of the direction of the machine. The movable axis of the machine is limited to the peach girl, and can be used in various forms. God, the 6 series will be from the position of the on-board position detection signal is the axis of the position detection signal input value control 2 machine real outline structure. In this embodiment, the self-measurement #"方^ ί on-machine measuring device 1' is via interface 2 (refer to the position detection signal ipf of _ toward the value = measurement signal. The position is output from the amount of detection device The detection signal is also fed into the feeding service control rib via the interface 11 201132450. The interface causes the position detecting signal output from the position detecting device 96 (refer to FIG. 7) built in the servo motor 95 and the self-measuring measuring device. The output measurement signal is synchronized and input to the servo control unit 8b of the numerical control device 8. In the embodiment of the present invention, the position detecting device or the detecting tool machine of the probe body of the measuring device on the detecting device is moved. The position detection of the position of the linear motion shaft enables the (10), such as the ruler and the laser interference, to be quickly and accurately detected. In addition, the encoder can be used in the position detecting device for detecting the position of the rotating shaft of the machine tool. The device 8 comprises: a storage mechanism for storing the position information of each of the eight tools and the measurement information from the on-board measuring device (the position and the U-shaped storage in the storage device) The information is sent to the external storage leaf to calculate the difference moving speed according to the position information stored in the numerical control device 8. For example, 'the position interface can be determined according to each control cycle, and the butterfly frame structure == upper measurement Position detection device with on-axis =============================================================================================== In the present invention, in order to detect the workpiece w 戚 mark to store the detection position, the axial movement speed of the detection seat h can be determined by the following method: If the position of the probe is temporarily The memory cut _ cycle rewrites the movable axis to transfer the rewrite to another - save temporarily at f (using the normally closed contact of the ladder diagram: >, or the data transfer command MOV, etc.), etc. (using the signal rise detection command) DIFU or in addition, the numerical control of the R-unit device of the personal computer u into the pole, "B 5 network (registered trademark) I2 for the built-in hidden in the personal computer η' for connection with the personal computer 11 or Sub-device 11a, sent from the personal computer u from Each 201132450 each sampling 2 test signal. The personal computer 11 is in the synchronization of the information and stores it in the storage area of the county on the machine measuring device 1 bit 8 stored in the software, the root touches the number of health devices The shape is the amount of the Qing, the position of the Guardian, etc.

電腦11儲存有量判用理與習知技術相同。此外,個人 程式。子有里_ NC転式、加工用NC程式與加工用修正NC 饋控具财,藉由數健織置同時回 顯示藉ii值控:置可^The computer 11 stores the same amount of judgment as the conventional technique. In addition, the personal program. The sub-existing _ NC 転, machining NC program and machining correction NC feed control wealth, by the number of health woven back at the same time display ii value control: set can ^

« 6 ™;:t B :cb^£ T;bC 哭git^H9!包含誤差暫存器91&與位置環路增益K之放大 行處理以( β)而得到的位置偏差量進 圖7所示,藉由出給速气控制t92。。如 暫存f 9_出之順差量8也^給Ξ藉由誤差 剛ί==92根據自該速度指令中減去速度回馈量(速度 電心ϊ==ί3度環路控制’產生電流指令’將該 ΐΐΐ控制部93根據自該電流指令中減去來自軸祠服馬達 二,ft、94„中所内建,檢測流經伺服馬達95之電流之電流感 :隹ro圖不)之電流回饋(電流FB)而得到的電流偏差量, 進仃電路控制。舰馬達95係驅動χ軸之驅動機構,在舰 13 201132450 馬達95上安裝有檢測其位置及速度之檢測裝置卯(以 檢測裝置將來自位置檢測裝置96之位置回饋量(位 給位置控制部91,將速度回饋量(速度FB)回饋給速度控制 以上係X軸伺服控制部8bX結構之說明,關於其他可 =制部8bY、8bZ、8bB、,因為亦與χ _服控制部=』 2相同,所以省略說明。又,如上所述,χ軸、γ轴及 g 軸,β軸及C軸為旋轉軸。 勒 然後,在本實施方式中,進-步設置不連接驅動工具機 軸之馬達及其位置/速度檢測機構(“位置檢測裂,,) 號τ,來自於可使工具機之 制下獲付自由(free)之意,並非意指工具機之任一可動軸。 當數值控制裝置8連接伺服控制部8bF時,僅認知為增加 -個控制車由。並S ’該增加之飼服控制部與除此以外^飼 控制部8M〜8bC (控制工具機可動軸之伺服控制部)同樣地連接放 大器9[因為鋪服控制部8bF未連接舰馬達,所以數值控制 裝置8變更參數及控制軟體,俾伺服控制部8bF伺服關閉,並同 時使用追蹤(foll〇w-up)功能’像通常般進行位置檢測信號 數。 然後’飼服㈣部_不連_服馬達而代之⑽上量測裝 置1。並且,經由與伺服控制部8bF連接之放大器具有之介面,將 來自機上量測裝置1之量測信號ipf (取代來自内建在祠服馬達 95中之位置檢測裝置96之位置檢測信號)輸入該伺服控制部 .8bF。所述介面包含於放大器中,與習知技術無不同。 圖8A及圖8B係顯示在本發明之實施方式中所使用之介面— 例之方塊圖。如圖8A所示’在放大器單元中設置有係馬達驅動機 構之放大器94、A/D轉換装置97及内插分割裝置98。將自内建在 伺服馬達95中之位置檢測褒置%輸出之原信號(正弦波、余弦 波)輸入A/D轉換裝置97。 A/D轉換裝i 97將係來自位置檢測裝置之原信號之類比信號 14 201132450 之週期為解析度。 %』刀之處理。該經分割« 6 TM;:t B :cb^£ T;bC cry git^H9! The error offset obtained by the error register 91& and the position loop gain K is calculated by (β). Shown by the speed control t92. . For example, the temporary amount f 9_ out of the amount of 8 is also given by the error just ί == 92 according to the speed feedback from the speed command (speed core ϊ == ί3 degree loop control 'generate current command The current control unit 93 subtracts the current from the shaft motor 2, ft, 94 „ from the current command to detect the current flowing through the servo motor 95: 隹ro The amount of current deviation obtained by feedback (current FB) is controlled by the input circuit. The ship motor 95 drives the drive mechanism of the x-axis, and the detection device 检测 (detecting device) for detecting the position and speed is mounted on the motor 93 of the ship 13 201132450 The position feedback amount from the position detecting device 96 (the bit is fed to the position control unit 91, and the speed feedback amount (speed FB) is fed back to the above-described X-axis servo control unit 8bX for the speed control, and the other control unit 8bY, 8bZ and 8bB are the same as χ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ In this embodiment, the step-by-step setting does not connect the driving tool. The motor of the shaft and its position/speed detecting mechanism ("Position Detection Crack,") No. τ are derived from the freedom of the machine tool, and do not mean any of the movable axes of the machine tool. When the numerical control device 8 is connected to the servo control unit 8bF, it is only recognized that the control vehicle is increased by a number of control vehicles, and the addition of the feeding control unit and the other feeding control units 8M to 8bC (controlling the movable axis of the machine tool) The servo control unit is connected to the amplifier 9 in the same manner. [Because the shop control unit 8bF is not connected to the ship motor, the numerical controller 8 changes the parameters and the control software, and the servo control unit 8bF is turned off, and the tracking is used at the same time (foll〇w-up The function 'receives the number of position detection signals as usual. Then the 'feeding machine' (fourth part) _ does not connect the motor and replaces the motor (10) with the measuring device 1. And, via the interface with the amplifier connected to the servo control unit 8bF, The measurement signal ipf from the on-board measuring device 1 (instead of the position detection signal from the position detecting device 96 built in the servo motor 95) is input to the servo control portion .8bF. The interface is included in the amplifier. 8A and 8B are block diagrams showing an interface used in an embodiment of the present invention. As shown in FIG. 8A, an amplifier 94 is provided in the amplifier unit, which is provided with a motor driving mechanism. The A/D conversion device 97 and the interpolation dividing device 98. The original signal (sine wave, cosine wave) output from the position detecting device built in the servo motor 95 is input to the A/D conversion device 97. A/D The conversion device i 97 will be the resolution of the analog signal 14 201132450 from the original signal of the position detecting device. The resolution of the knife is divided.

顯示圖6之介面2之一例。該圖8B之介面也 二二面,ίίί?上量測裝置1中也使用伺服怎之S i不==數值控制裝置8之二 ,9A-圖9E係在本發明之實施方式中’工作件 ==:===置時之 m線對稱之形狀。又,加卫面Wa並不限於平面3二 之升r狀加卫面wa之圖形係相對於直交之兩條直線為冉 基準之量測 型測定頭If自工作件w之加工面谿之靠近 ^針1e上之球 稱之線平行之線順著加工s Wa移動,使 =,著與線對 加工面Wa之端部為止。然後,作為檢測:完 之軸向移動速度為既定值時之座標。 /加保存铋針?]^ 圖9B及圖9C係使探針Pr相對於工作件w沿 ^向士)相對移動’求*球型測朗lf完全離開工作(2 w晴之檢測座標之動作說明w。圖9B係自上 工面 表面wb時之圖,係在圖6中自上方俯視之圖。mw之上 者與X軸與Y軸雙方垂直之方向觀察工作件w之加工== 201132450 ==機之上圖量測裝置1之方向(沿z軸方向)觀察工 然後,驅動X轴之馬達95χ,使球^ ^位=(參照圖9C> 圖9B所述沿水平方向(χ麵方’、員自罪近位置ΑΡ起如 一開始先_^7 w ί此,_彳定頭lf 將探針㈣到預先設定之軸向Ϊ度時刻然後, ==,以儲存。又,關於“以其= 向相反之方向相對於加工面Wa=熱=疋頭1f沿與所述方 達到預先設定之軸向速度時之座卩 。/後’同樣地將探針Pr 加以儲存。又,加工面Wa %作為另一檢測座標«座標) 亦即,在使探針Pr 置AP亦可不限於係同-地點。 時,在使探針Pr^°方相向目對移動來檢測工作件贤之端面 W之加工面Wa以内即可。° ’之移動之直線上,並且在工作件An example of the interface 2 of Fig. 6 is shown. The interface of FIG. 8B is also two or two sides, and the measuring device 1 also uses the servo device S i not == the numerical control device 8 bis, and the 9A- FIG. 9E is the working member in the embodiment of the present invention. ==:=== The shape of the m-line symmetry at the time of the set. Moreover, the welcoming surface Wa is not limited to the plane 3 liters, the r-shaped wei wei, the figure of the wa is relative to the straight line, and the measurement type of the measurement head If the workpiece is close to the processing surface of the work piece w The ball on the needle 1e is said to be parallel to the line s Wa, so that the end of the line facing the processing surface Wa is made. Then, as a coordinate of the detection: the axial movement speed is a predetermined value. /Add a needle? Fig. 9B and Fig. 9C are such that the probe Pr is relatively moved relative to the workpiece w along the path of the workpiece, and the ball is completely removed from the operation. (The action description of the detection coordinate of the 2 w clear is shown. Figure 9B is from The figure of the upper working surface wb is a top view from the top in Fig. 6. The upper part of mw and the X axis and the Y axis are perpendicular to each other to observe the processing of the workpiece w == 201132450 == The direction of the device 1 (in the z-axis direction) is observed, and then the motor of the X-axis is driven 95 χ to make the ball ^ ^ position (refer to FIG. 9C > FIG. 9B as described in the horizontal direction (χ面方', member sin near position) Pick up the first _^7 w ί this, _ 彳 头 lf lf will probe (four) to the preset axial temperature moment and then ==, to store. Also, about "with its = opposite direction On the processing surface Wa=heat=skull 1f, the probe Pr is stored in the same manner as when the square reaches the preset axial speed. The same, the processing surface Wa% is used as another detection coordinate. «Coordinates", that is, when the probe Pr is placed in the AP, it is not limited to the same-location. When the probe Pr^° is moved toward the opposite direction, the end face of the workpiece is detected. W can be processed within the working surface Wa. ° ́ moves on a straight line, and in the workpiece

j 5 W 工面Wa水平方向之中心位置°xC中=標。該座標表示加 檢測座標之兩個X座桿值^中^座軚。又,係所述兩個 藉由_ ,因此, 隙等精度^二=之# 方向)相對移動作件w沿垂直方向(γ轴 Wa時檢測座標之動作說日^圖枝頭lf凡全離開工作件W之加工面 首先’使X軸、Y轴、z軸移動,使探針斤之球型測定頭Η 201132450 以接觸壓τ接觸工作件w之加 9E)。然後,驅動γ轴 面^之靠近位置AP’(參照圖 ΑΡ’如圖9D所示沿垂直方向型败頭Η自靠近位置 頭If -開始朝上側,順著力了工移動。在此,球型測定 相對移動,當球型測定頭if完= 目對於加工面Wa沿垂直方向 探針IV沿其轴向開始因接觸工面心時,如上所述, 達到預先設定之轴向速度時刻之3逮f =。然後,將探針斤 (Y座標)加以神。狀紅’作為其中之一之檢測座標 然後’使X軸、γ轴、Z轴_ 再次定位於靠独置AP,,购移卜之_測定頭if 方向相反之方向與加工面Wa相對移動^測定頭lf沿與所述 達到預先設定之轴向速度時之座f =後,同樣地將探針Pr 加以儲存。又,加工面Wa之靠二=另一檢測座標(Y座標) 點。亦即,在使探針Pr沿相反#方近亦可不限於係同一地 方向移動時移 ;此告藉由將兩個γ座標值相加寻到的值’ 有之齒隙等機械誤差。由此,可$ γ轴之驅動系具 如圖9Β〜圖犯所示,本發明m未出γ軸中心座標。 圖l〇A,loc係在本發明之 ^或作件W之損壞。 求出其加工面Wa中心座桿H ’工作件W為圓柱形, ,圖。該例亦如圖6所述,工^直W面之基準位置時之說 用圖9,與工作件^= 17 201132450 ^之端面之檢測動作。並且,如果檢測水平方向 方向(Y轴方向)之檢測座標,分別求出沿 工作件座標各自之中間點,即可求出圓柱ί之 作之加工面Wa之χ座標與γ座標之中心座標。$之 X轴%夕作件W中’亦與立方體之玉作件w相同, t果或工作件…= 可確立機上*、、靜t作件中心棘設^為基準位置,即 具==之球型測定頭lf尖端位置與』 件中心位置,則難由腺〇如果使加工程式之座標系原點為工作 端位置與工且定,座標作為原點,球型測定頭π之尖 之演算法之流程圖。、訪式巾工作件之基準位置設定處理 直於工作件工„上制裝置1之探針pr之中心軸垂 的加工程式後,當;用省控:裝置8輸入要執行 置輸入工作件w 手動輸入裝置等朝數值控制裝 控制部8a “if f設定指令日夺,數值控制裂置8之數值 工面中與兩個對稱f平二由入之加工程式’將工作件W之加 實施方式ΪΪ、^Ϊ3=Χ軸平行之線)、第2靠近線(在此 線與第2靠近線ί ===之/軸平行之線),在第靡 近位置,與工作件w 之加工面wa水平方向之兩個靠 朝步驟S2轉移。 面Wa垂直方向之兩個靠近位置,然後 第1靠ίϊ!2中步驟S1中求出之水平方向之 #近位置,使球型測定頭If以接觸壓τ接 201132450 觸並定位。 •步驟S3 :使探針Pr沿 亦即,驅動X轴之馬達95 Q 1 工作件W之一端面移動。 r定頭_,之加工面心"使之探—針二: 值 。·步’然後,探針pr<麵移動速度是否超卿 .步驟S5 :當在步驟以中判 基準值時,停止探針Pr之移動 、之軸向軸速度超過 ;,停止X軸平台之移動。在該時刻,,=軸之馬達95x之驅 完全離開工作件W。 』保針Pr之球型測定頭If .步驟S6 :將在步驟S4中 基準值時移動軸之座標,即χ 4 之軸向移動速度超過 R1中。 庋私作為檢測座標,儲存在暫存器 .步驟S7 .使探針pr退避以苴 S1中求出之水平方向之另一 一工作件W接觸,在步驟 頭1Γ以接觸壓Τ接觸定位。、 立置’使探針Pr之球型測定 •步驟S8:使探針Pr沿水平方 亦即,驅動X軸之馬達95χ,移動χ ,另-端面移動。j 5 W The center position of the work surface Wa in the horizontal direction °xC = mark. This coordinate indicates the value of the two X-seats of the test coordinates. In addition, the two are caused by _, and therefore, the accuracy of the gap, etc., the relative movement of the workpiece w in the vertical direction (the operation of detecting the coordinates when the γ-axis Wa is detected) The working surface of the workpiece W first moves the X-axis, the Y-axis, and the z-axis to make the probe type of the probe Η 201132450 to contact the workpiece w with the contact pressure τ plus 9E). Then, the proximity position AP' of the γ-axis surface is driven (refer to FIG. 9D, as shown in FIG. 9D, the vertical direction smash head starts from the position head If-starts upward, and moves along the force. Here, the ball type When the relative movement is measured, when the spherical measuring head is finished, the head is in contact with the working face in the vertical direction of the probe IV in the vertical direction. As described above, the preset axial speed is reached. Then, the probe (Y coordinate) is added to the god. The red character is used as one of the detection coordinates and then the X axis, the γ axis, and the Z axis _ are again positioned on the stand-alone AP. _ The measuring head if the direction of the opposite direction is opposite to the processing surface Wa. The measuring head lf stores the probe Pr in the same manner as the seat f = when the predetermined axial speed is reached. Further, the processing surface Wa By two = another detection coordinate (Y coordinate) point, that is, the probe Pr can be moved along the opposite side in the opposite direction, and is not limited to moving in the same direction; this is added by adding two γ coordinate values The value found is 'a mechanical error such as a backlash. Thus, the drive line of the γ-axis can be as shown. 9 Β 图 图 图 图 图 图 图 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 , , , It is a cylindrical shape, and the figure is also shown in Fig. 6. When the reference position of the W-face is used, the detection action of the end face of the working piece ^= 17 201132450 ^ is used, and if the detection level is The detection coordinates of the direction direction (Y-axis direction) are respectively obtained at the intermediate points along the coordinates of the workpiece, and the center coordinates of the χ coordinate and the γ coordinate of the processing surface Wa of the cylinder ί can be obtained. In the case of W, it is the same as the jade piece of the cube, t fruit or work piece...= can be established on the machine*, and the center of the workpiece is set as the reference position, that is, the ball type with == The position of the tip of the head lf and the center position of the piece are difficult to be caused by adenine. If the origin of the coordinate system of the machining program is the working position and the work is determined, the coordinates are used as the origin, and the algorithm of the algorithm of the spherical measuring head π is pointed. Figure. The reference position setting process of the visitor towel work piece is directly perpendicular to the center axis of the probe pr of the work piece „上制装置1 After the processing program, use the provincial control: device 8 input to perform the input input work piece w manual input device, etc. to the numerical control device control unit 8a "if f set command day, numerical control split 8 in the numerical work surface and Two symmetry f flat two by the processing program 'add the work piece W to the implementation method Ϊ, ^ Ϊ 3 = Χ axis parallel line), the second close line (in this line and the second close line ί === The line parallel to the axis is shifted to the step S2 at the second close position and the horizontal direction of the processing surface wa of the workpiece w. The two faces in the vertical direction of the surface Wa are close to each other, and then the first position in the horizontal direction obtained in the step S1 in FIG. 2 is made, and the spherical measuring head If is touched and positioned by the contact pressure τ 201132450. • Step S3: The probe Pr is moved, that is, the end face of the motor 95 Q 1 of the X-axis is moved. r fixed head _, the processing of the face of the heart " make it explore - pin two: value. Step ' Then, whether the probe pr<face movement speed is super-clear. Step S5: When the reference value is judged in the step, the movement of the probe Pr is stopped, and the axial axis speed exceeds; the movement of the X-axis platform is stopped. . At this moment, the drive of the motor 95x of the = axis completely leaves the work piece W. The ball type measuring head of the needle Pr is made. Step S6: The coordinate of the axis is moved at the reference value in step S4, that is, the axial moving speed of the crucible 4 exceeds R1. The smuggling is stored as a detection coordinate in the register. Step S7. The probe pr is retracted to contact the other workpiece W in the horizontal direction determined in 苴S1, and is contacted by the contact pressure at the first step of the step. , "Standing" to measure the spherical shape of the probe Pr. Step S8: The probe Pr is driven horizontally, that is, the motor of the X-axis is driven 95 χ, and the other end is moved.

軸之平台移動相反之方向),使探斜 ^ (朝與步驟S3中X 件W之加工面Wa朝工作件评之另5對=疋碩If順著工作 相對於工作件讲之加工面Wa 動:又,使探針Pr 反方向移動之速度相同。 & ^移動之速度與使其沿相 值。.步驟S9 :然後,判斷探針Pr之軸向移動速度是否超過基準 •步驟S10 :當在步驟S9中判斷探 基準值時,停止探針Pr之移動。^ =移動速度超過 動,停止X軸平台之移動。在該^ 軸之,達,之驅 完全離開工作件W。 、x木叶r之球型測定頭if •步驟sn:將在步驟S9中判斷探針pr之轴向移動速度超過 19 201132450 基準值時移動軸之座標,即χ R2中。 座軚作為檢測座標,儲存在暫存器 •步驟S12··使探針pr 求出垂直方向之第2靠近線 私動到在步驟S1中The axis of the axis moves in the opposite direction), so that the probing oblique ^ (toward the processing surface Wa of the X piece W in step S3 toward the working piece, another 5 pairs = 疋 If If the working surface is spoken relative to the working piece Wa Move: Again, the probe Pr moves at the same speed in the opposite direction. & ^Moving speed and its edge value. Step S9: Then, determine whether the axial movement speed of the probe Pr exceeds the reference. • Step S10: When the reference value is judged in step S9, the movement of the probe Pr is stopped. ^ = the moving speed exceeds the movement, and the movement of the X-axis platform is stopped. At the axis, the drive is completely separated from the workpiece W. The ball type measuring head of the wood leaf r: step sn: the coordinate of the moving axis when the axial moving speed of the probe pr is judged to exceed the reference value of 19 201132450 in step S9, that is, χ R2. The seat 軚 is used as the detecting coordinate, and is stored. In the register, step S12, the probe pr is determined to be privately moved to the second close line in the vertical direction to the step S1.

If以接觸壓τ接觸並定位。 之罪近位置,使球型測定頭 •步驟S13··使探針P、从 亦即,驅動γ軸之馬達95。3=向朝工作件W之-端面移動。 型測定頭If順著工作你w + f λ軸之平台移動,使探針Pr之球 移動。 加工面Wa朝該工作件W之一端相對 .步驟SH:然後,判斷 準值。 斷針Pr之軸向移動速度是否超過基 .步驟S15 :當在步驟幻4 過基準值時,停止探針pr 斷探針打之軸向移動速度超 驅動,停止γ軸平台之 。亦即Mr止Υ軸之馬達95y之 完全離開工作件W。 以時刻,探針打之球型測定頭lf .步驟S16 :將在步驟幻4 過基準值時移絲之座標,卩卩 I f Pr之軸向移動速度超 器R3中。 心作為檢測座標,儲存在暫存 •步驟S17:使探針Pr 驟S1中求出垂直方向之第2二^二使其不與工作件W接觸,在步 斤之球型測定頭lf以接觸定靠近位置,使探針 •步驟S18 :使探針p 。 動。亦即’驅動Y軸之馬達ϋ向朝工作件W之另一端面移 中Υ軸之平台移動相反 f Υ軸之平台(朝與步驟S13 工作件W之加工面Wa朝工作件 ^針汗之球型測定頭if順著 •步驟S19 :然後,判斷1另—端相對移動。 準值。 ’十Pr之軸向移動速度是否超過基 •步驟S20 :當在步驟q·! 0 | 過基準值時,停止探針泞之 判斷探針Pr之軸向移動速度超 驅動,停止X軸平台之移動。^亦即,停止Y軸之馬達95y之 μ守刻’探針pr之球型測定頭lf 20 201132450 完全離開工作件w。 .步驟S21 :將在步驟S19中判斷 求出工:=座測座標 標之以 13?SR4 該χ座標、γ座標之中間座標表示工作件巾、、π 將該工作件w之中心座標設定中n票,所以 在較小之-方之座標值上加糕之座標值之差,將 為工作件w水平方向之中:以:=得到的座標值作 ,,將在較小之一方之座標值二之 才示值作為工作件w齿古士 a 半之值而传到的座 標,將其設定為工作件基^^標以求出工作件w之中心座 針le 牛ϋ基準位置,使安裝在探針Pr之觸 量測裝置在工且機上ί工作件表面接觸,藉由機上 使球型測定頭Α尖二^ W。猎由該工作件W之基準位置, 的形狀,修正加工變得明確/、之刀尖相關聯’所以可根據量測到 【圖式簡單說明】 面圖I丨本么月之工具機所具備之機載量測器之重要部位剖 之狀f 4說r圖1之探針之_測定頭在紅作件之加工面接觸 拙分別朝該加工面之兩端 21 201132450 之原i f更詳細地說明檢測在圖2中所說明之工作件W端面位置 圖4A-圖4C詳細地說明探針自工作件之端面離開時之 圖5顯示由數值控制裝置所控制,藉由3個直動丄月二: ^軸驅動,可同時控制5個軸之依本發明之工具機—例之重要^ 圖6係將來自機上量測t置之位置檢測 各驅動軸之減制·輸讀健制 $ 之概要結構圖。 攸伞知明之工具機 饋押=自示之玉具機中’藉由數值控織置同時回 饋控制未自工具機之各可動軸與機上量測裝置之 方塊^ μ關8B係顯示在本發明之實施方式中所^用之介面之 圖9A-圖9E係在本發明之實施方式中,工作件係立方體 &作件之基準位置時之說明圖: 求出;中’工作件為圓柱體, 圖。 尾铋以°又疋為工作件之基準位置時之說明 演算本㈣纽项叙絲錄設定處理之 【主要元件符號說明】 AP、AP,…靠近位置 A、B…狀態 DIFU…信號上升檢測命令 Ipf···位置檢測信號(量測信號) K…位置環路增益 LE…左端(左端面位置) MOV…資料傳送命令 Μ…質量 22 201132450 P1 〜P4、FB···位置 Pr…探針 R1〜R4…暫存器 RE…右端(右端面位置) RL、RR…路徑 S1〜S22…步驟 t…時間 T···接觸力(接觸壓) 一T···接觸壓T之反作用力 Vo…初速度If contact and position with contact pressure τ. In the near position, the ball type measuring head is made. Step S13. · The probe P is driven, that is, the motor γ shaft is driven 95. 3 = moving toward the end surface of the workpiece W. The type of measuring head If you move along the platform that works on your w + f λ axis, the ball of the probe Pr moves. The processing surface Wa is opposed to one end of the workpiece W. Step SH: Then, the value is judged. Whether the axial movement speed of the broken needle Pr exceeds the base. Step S15: When the reference value is exceeded in the step, the axial movement speed of the probe pr-break probe is stopped, and the γ-axis platform is stopped. That is, the motor 95y of the Mr-stop shaft completely leaves the workpiece W. At the moment, the probe hits the ball type measuring head lf. Step S16: The coordinate of the moving wire when the step is over the reference value, 轴向 I f Pr is moved in the axial direction of the speed R3. The heart is stored as a detection coordinate and stored in the temporary storage step S17: the second step of the vertical direction is obtained in the probe Pr step S1 so as not to be in contact with the workpiece W, and the measuring head lf is contacted in the step of the ball. Set the probe close to the position • Step S18: Make the probe p. move. That is, the motor that drives the Y-axis moves toward the platform facing the other side of the workpiece W, and moves the platform opposite to the axis of the shaft (toward the processing surface Wa of the workpiece W with the step S13 toward the workpiece) The ball type measuring head if follows: Step S19: Then, it is judged that the other end is relatively moved. The value of the value. 'The axial movement speed of the ten Pr exceeds the base. · Step S20: When the step q·! 0 | When the probe 泞 is stopped, the axial movement speed of the probe Pr is overdriven, and the movement of the X-axis platform is stopped. That is, the Y-axis motor 95y is stopped, and the probe pr is determined. 20 201132450 completely leaves the work piece w. Step S21: In step S19, it is judged that the work: = seat test mark is 13? SR4, the middle coordinate of the γ coordinate, the γ coordinate indicates the work piece towel, π The center coordinate of the work piece w is set to n votes, so the difference between the coordinate values of the smaller-square coordinate value will be the horizontal direction of the work piece w: with the coordinate value obtained by:=, The value of the coordinate value of the smaller one of the squares is taken as the seat of the work piece w tooth Gus a. Set it as the base of the workpiece to find the reference position of the center pin of the work piece w, so that the touch measuring device installed on the probe Pr is in contact with the surface of the work piece on the machine. By the machine, the ball type measuring head is used to determine the shape of the head, and the shape of the reference position of the working piece W is corrected, and the correction processing becomes clear/, and the tool tip is associated with it. Explanation] The surface I of this machine tool is equipped with an important part of the on-board measuring device. Figure 4: The probe of the figure 1 is in contact with the processing surface of the red piece. The two ends of the machined surface 21 201132450 describe in more detail the position of the end face of the workpiece W as illustrated in Fig. 2. Fig. 4A - Fig. 4C illustrate in detail when the probe is separated from the end face of the workpiece. Controlled by the numerical control device, the machine tool according to the invention can be controlled simultaneously by three direct-moving two-month: ^-axis drive, and the machine tool according to the invention can be controlled at the same time - an important example of FIG. 6 is to set the on-board measurement t Position detection The schematic structure diagram of each drive shaft reduction and input training $. In the jade machine of the present invention, by means of numerically controlled weaving, the feedback control unit of each of the movable shaft and the on-machine measuring device is not controlled by the numerical control. The μ 8B system displays the interface used in the embodiment of the present invention. 9A-9E are explanatory diagrams of the working position of the cube & the reference position of the workpiece in the embodiment of the present invention: the determination; the middle working piece is a cylinder, and the figure is °°°疋For the explanation of the reference position of the workpiece, the calculation of the main component symbol (AP) AP, AP, ... close to the position A, B... state DIFU... signal rise detection command Ipf··· position detection Signal (measuring signal) K... Position loop gain LE... Left end (left end position) MOV... Data transfer command Μ...Quality 22 201132450 P1 ~ P4, FB··· Position Pr... Probe R1~R4... Register RE...Right end (right end position) RL, RR...Path S1 to S22...Step t...Time T··· Contact force (contact pressure) One T···Reaction force of contact pressure T... Initial velocity

Va…球型測定頭If離開工作件時之速度 Vb…為進行檢測預先決定之速度 v…探針之進給速度 V…速度 Wa···加工面 Wb…上表面 W…工作件 X、Y、Z、B、C···可動轴 α…加速度 l···機上量測裝置 la…殼體 lb…探針本體 lc…雷射頭Va...The speed Vb of the ball type measuring head If leaving the workpiece is the speed at which the detection is determined v...the feed speed of the probe V...the speed Wa···the processing surface Wb...the upper surface W...the workpiece X,Y , Z, B, C··· movable axis α... acceleration l··· on-board measuring device la... housing lb... probe body lc... laser head

Id…直尺 le…觸針Id... ruler le... stylus

If…球型測定頭 2…介面 8…數值控制裝置 8a數值控制部 8b···伺服控制部 23 201132450 8bX、8bY、8bZ、8bB、8bC…可動軸伺服控制部 8bF···伺服控制部 ll···個人電腦 11a···儲存裝置 12···乙太網路 91…位置控制部 91a···誤差暫存器 91b…放大器 92…速度控制部 93…電流控制部 94…放大器 95…伺服馬達 95x、95y…馬達 96…位置檢測裝置 97…A/D轉換裝置 98…内插分割裝置 24If...spherical measuring head 2...interface 8...numerical control device 8a numerical control unit 8b···servo control unit 23 201132450 8bX, 8bY, 8bZ, 8bB, 8bC... movable axis servo control unit 8bF···servo control unit ll ···Personal computer 11a···Storage device 12···Ethernet 91...Location control unit 91a··Error register 91b...Amplifier 92...Speed control unit 93... Current control unit 94...Amplifier 95... Servo motor 95x, 95y...motor 96...position detecting device 97...A/D converting device 98...interpolating dividing device 24

Claims (1)

201132450 申請專利範圍: 1. -種具有工作件之量·準點設定功能的工具; 七 =狀Κί工;=裝置用以施行一工作件的形狀測定及 J包J可藉由輸入來自該機上量測裝置之 畜 控制裂置加以控制之複數可動軸; m朗-數值 該機上量測裝置包含: ,觸式探針’藉由流體軸承受支持於機上制 位置機構’檢測該接觸式探針的轴向之移動位移並輸出 可動㈣,啸顺工具機的各 且該數值控制裝置包含·· 可動輛驅動控制機構,在兮垃斗' 觸壓接觸於配置成使該兩條線^行= = 一定之接 動速度是奸達_紐^之1^逮度縣機構計所計算之該移 之速先決定 置資料加以儲存;及置知雜構所檢測出的各可動軸之位 »又疋機構,根據由該儲存機 該工作件之t心麵,並鮮之位置計算 &如申請專利範園第】項==:件之量測基準點。 能的工具機,其中,貝之/、有工作件之量測基準點設定功 經由驅動馬較騎剛輪有⑽,將來自該可 25 201132450 動軸位置檢測機構之軸位置檢測仿妹 經由未連接該馬達之馬達驅^ ^人魏健織置;並 機上量測裝置之該位置檢测機構有之介面,將來自該 制裝置。 顯的位置檢_號,輸人該數值控 置中所具有之該位置檢測機構:】檢„或該機上量測裝 中任一種檢測裝置。 尺、、為碼器或雷射干涉儀其 4.如申請專利範圍第1 能的工具機,其中,在由、〔、有工作件之量測基準點設定功 決定之速度時,、_各可構騎鄉動速度已達到預先 之位置資構所檢_各可動軸 能的工具機’ 作件之量測基準點設定功 將 作件之水平方命夕i 〜厘栎,以如此獲得的座標作為工 端處的由該儲存機^座標;再求取該加卫面之垂直方向上下兩 差值的-半加算到^ f儲存之該可練之位置㈣之差值,將該 件之垂直方向之Φ、y、一方之座標,以如此獲得的座標作為工作 定作為工作件之量^^,而求取該卫作件之巾心座標,將其設 八、圖式: 26201132450 The scope of application for patents: 1. - A tool with the quantity of work pieces and the function of on-time setting; Seven = shape; the device is used to perform the shape measurement of a work piece and the J package J can be input from the machine The plurality of movable shafts controlled by the animal control splitting of the measuring device; m Lang-values The measuring device on the machine comprises: , the touch probe 'supported by the fluid bearing to the position mechanism on the machine' to detect the contact type The axial movement of the probe is displaced and outputted to move (4). Each of the numerical control devices includes a movable drive control mechanism, and the contact is placed in contact with the two wires. Line = = The fixed speed is a trait of __^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^ » 疋 疋 , , , , , , , , , , , , 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据 根据The machine tool of the energy tool, wherein the measuring point setting function of the working piece is via the driving horse (10), and the axis position detecting of the moving shaft position detecting mechanism from the 25201132450 is passed through The motor connected to the motor is woven by Wei Jian, and the interface of the position measuring device of the measuring device on the machine is provided with the interface. The position detection _ number is displayed, and the position detection mechanism possessed by the input control unit is: ??? or any one of the detection devices on the machine. The ruler, the code device or the laser interferometer 4. If the machine tool of the patent application scope is the first one, in the case where the speed of the work is determined by the measurement point of the work piece, the speed of each can be reached. The inspection machine _ the movable machine capable of the machine tool's measurement of the reference point setting work will be the level of the work of the square life i i ~ centistoke, with the coordinates thus obtained as the work end of the storage machine ^ coordinates Then, the difference between the upper and lower sides of the vertical direction of the plus-face is calculated - the half-added to the difference of the position (4) of the stored position of the ^f, the vertical direction of the piece is Φ, y, the coordinates of one side, The coordinate thus obtained is taken as the quantity of the work piece ^^, and the coordinates of the center of the guard piece are obtained, and the figure is set as follows: Figure 26
TW99109619A 2010-03-30 2010-03-30 Machine tool with function for setting up a measurement reference point of a work TWI389764B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW99109619A TWI389764B (en) 2010-03-30 2010-03-30 Machine tool with function for setting up a measurement reference point of a work

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW99109619A TWI389764B (en) 2010-03-30 2010-03-30 Machine tool with function for setting up a measurement reference point of a work

Publications (2)

Publication Number Publication Date
TW201132450A true TW201132450A (en) 2011-10-01
TWI389764B TWI389764B (en) 2013-03-21

Family

ID=46750803

Family Applications (1)

Application Number Title Priority Date Filing Date
TW99109619A TWI389764B (en) 2010-03-30 2010-03-30 Machine tool with function for setting up a measurement reference point of a work

Country Status (1)

Country Link
TW (1) TWI389764B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI573656B (en) * 2016-03-09 2017-03-11 由田新技股份有限公司 An angle correction system for a workpiece
TWI598178B (en) * 2012-03-13 2017-09-11 Toshiba Machine Co Ltd Processing device and method of controlling the profiling using the same
CN113176444A (en) * 2020-01-24 2021-07-27 日本发条株式会社 Insulation resistance measuring device and insulation resistance measuring method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI766781B (en) * 2021-07-29 2022-06-01 倍騰國際股份有限公司 A precision machining compensation method for finding non-symmetric edge

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI598178B (en) * 2012-03-13 2017-09-11 Toshiba Machine Co Ltd Processing device and method of controlling the profiling using the same
TWI573656B (en) * 2016-03-09 2017-03-11 由田新技股份有限公司 An angle correction system for a workpiece
CN113176444A (en) * 2020-01-24 2021-07-27 日本发条株式会社 Insulation resistance measuring device and insulation resistance measuring method
CN113176444B (en) * 2020-01-24 2023-07-25 日本发条株式会社 Insulation resistance measuring device and insulation resistance measuring method

Also Published As

Publication number Publication date
TWI389764B (en) 2013-03-21

Similar Documents

Publication Publication Date Title
He et al. A new error measurement method to identify all six error parameters of a rotational axis of a machine tool
Mutilba et al. Traceability of on-machine tool measurement: a review
Zhang et al. Geometric error measurement and compensation for the rotary table of five-axis machine tool with double ballbar
US8494800B2 (en) Method and program for identifying mechanical errors
EP2591310B1 (en) Method for recalibrating coordinate positioning apparatus
EP2889573B1 (en) Motorized inclinable measuring head
US9506736B2 (en) Measurement system
Xiang et al. Using a double ball bar to identify position-independent geometric errors on the rotary axes of five-axis machine tools
CN108572625B (en) The control system of lathe
CN101866163B (en) Numerical control machine tool and numerical control device
TWI258827B (en) Apparatus and method for positioning
JP5030653B2 (en) Numerical control machine tool and numerical control device
JP5962242B2 (en) Grinding equipment
CN108176897A (en) Burr removal device
CN104057447A (en) Robot Picking System And Method Of Manufacturing Workpiece
CN103365246A (en) Device for error correction for CNC machines
CN107824843A (en) Lathe and workpiece planarization processing method
CN105960571A (en) Calibrating position of motion systems by using inertial sensors
JP5355037B2 (en) Accuracy measuring method, error control method for numerically controlled machine tool, and numerically controlled machine tool having error correcting function
TW201132450A (en) Machine tool with function for setting up a measurement reference point of a work
Lei et al. Error measurement of five-axis CNC machines with 3D probe–ball
JP6086322B2 (en) Roundness measuring machine
Ding et al. Single-axis driven measurement method to identify position-dependent geometric errors of a rotary table using double ball bar
JP5275867B2 (en) 5 DOF error measuring device
CN109760016A (en) Teaching apparatus, robot system and teaching method