TW201129854A - Polarization evaluation mask, exposure device, and polarization evaluation method - Google Patents
Polarization evaluation mask, exposure device, and polarization evaluation methodInfo
- Publication number
- TW201129854A TW201129854A TW099121923A TW99121923A TW201129854A TW 201129854 A TW201129854 A TW 201129854A TW 099121923 A TW099121923 A TW 099121923A TW 99121923 A TW99121923 A TW 99121923A TW 201129854 A TW201129854 A TW 201129854A
- Authority
- TW
- Taiwan
- Prior art keywords
- quarter
- polarization
- polarization evaluation
- azimuth
- exposure device
- Prior art date
Links
- 230000010287 polarization Effects 0.000 title abstract 8
- 238000011156 evaluation Methods 0.000 title abstract 6
- 238000005286 illumination Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 238000011144 upstream manufacturing Methods 0.000 abstract 2
- 230000005540 biological transmission Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B27/00—Photographic printing apparatus
- G03B27/72—Controlling or varying light intensity, spectral composition, or exposure time in photographic printing apparatus
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J4/00—Measuring polarisation of light
- G01J4/04—Polarimeters using electric detection means
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
- G03F1/44—Testing or measuring features, e.g. grid patterns, focus monitors, sawtooth scales or notched scales
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
- G03F7/70566—Polarisation control
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70591—Testing optical components
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009184642 | 2009-08-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW201129854A true TW201129854A (en) | 2011-09-01 |
Family
ID=43534612
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW099121923A TW201129854A (en) | 2009-08-07 | 2010-07-02 | Polarization evaluation mask, exposure device, and polarization evaluation method |
Country Status (3)
Country | Link |
---|---|
US (1) | US20110032502A1 (zh) |
JP (1) | JP2011053664A (zh) |
TW (1) | TW201129854A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI615604B (zh) * | 2015-04-30 | 2018-02-21 | 寬波段消色差複合波片的定標方法 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102012203944A1 (de) * | 2012-03-14 | 2013-10-02 | Carl Zeiss Smt Gmbh | Verfahren zur Justage eines optischen Systems einer mikrolithographischen Projektionsbelichtungsanlage |
NL2011477A (en) * | 2012-10-10 | 2014-04-14 | Asml Netherlands Bv | Mark position measuring apparatus and method, lithographic apparatus and device manufacturing method. |
DE102013200394A1 (de) | 2013-01-14 | 2014-07-17 | Carl Zeiss Smt Gmbh | Polarisationsmessvorrichtung, Lithographieanlage, Messanordnung, und Verfahren zur Polarisationsmessung |
DE102014205406A1 (de) * | 2014-03-24 | 2015-09-24 | Carl Zeiss Smt Gmbh | Messvorrichtung zum Bestimmen eines Polarisationsparameters |
JP6739060B2 (ja) * | 2017-01-24 | 2020-08-12 | パナソニックIpマネジメント株式会社 | 画像生成装置及び画像生成方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6781692B1 (en) * | 2000-08-28 | 2004-08-24 | Therma-Wave, Inc. | Method of monitoring the fabrication of thin film layers forming a DWDM filter |
JP3971363B2 (ja) * | 2003-10-07 | 2007-09-05 | 株式会社東芝 | 露光装置及び露光装置の光学系のミュラー行列を測定する方法 |
JP2006140223A (ja) * | 2004-11-10 | 2006-06-01 | Toshiba Corp | 露光システム、偏光モニタマスク及び偏光モニタ方法 |
US7619747B2 (en) * | 2004-12-17 | 2009-11-17 | Asml Netherlands B.V. | Lithographic apparatus, analyzer plate, subassembly, method of measuring a parameter of a projection system and patterning device |
US7224458B2 (en) * | 2005-02-18 | 2007-05-29 | The Regents Of The University Of California | Phase-shifting test mask patterns for characterizing illumination polarization balance in image forming optical systems |
US7382535B2 (en) * | 2005-10-04 | 2008-06-03 | The Boeing Company | Wave plate and associated method |
JP4928897B2 (ja) * | 2005-12-01 | 2012-05-09 | 株式会社東芝 | 偏光評価マスク、偏光評価方法、及び偏光計測装置 |
US8023104B2 (en) * | 2007-01-22 | 2011-09-20 | Carl Zeiss Smt Gmbh | Microlithographic projection exposure apparatus |
-
2010
- 2010-07-02 TW TW099121923A patent/TW201129854A/zh unknown
- 2010-07-28 JP JP2010169078A patent/JP2011053664A/ja not_active Abandoned
- 2010-08-06 US US12/852,201 patent/US20110032502A1/en not_active Abandoned
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI615604B (zh) * | 2015-04-30 | 2018-02-21 | 寬波段消色差複合波片的定標方法 |
Also Published As
Publication number | Publication date |
---|---|
US20110032502A1 (en) | 2011-02-10 |
JP2011053664A (ja) | 2011-03-17 |
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