201124732 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種用於探針（probe pin)及探針 卡（Probe Card)，特別係關於一種具有奈米鍍膜之探針 及探針卡。 【先前技術】 習知的探針之基本結構，主要包含探針頭、套管、 • 彈簧，例如稱為P〇G〇TM PIN之探針，豆岸用極為卢 泛，例如：印刷電路板（空板與實板）測試用針、半導二 測試用針或顯示器測試用針，及通訊產品之元件測試用 針，例如··手機天線、電池、揚聲器、振動器、lCD 等之連結器，且可擴及到PDA、數位相機、Gps、nb… 等產品上。 … 探針卡（Probe Card)係由多層印刷電路板(pcB)所 構成，利用許多探針(Pr〇be pins)分別接觸（探觸）晶圓上 φ 一連串之電子接點（焊墊；Pad)進行測試。 探針兩端係分別電性連接待測晶粒與多層印刷電 路板，而由於測試時瞬間導通於探針頂端與各焊墊間之 電流相當高，經常因為探針頂端溫度過高、或甚至產生 火花，而導致探針頂端因產生氧化層或是發生碳化現 象^而使得探針導電性與電阻值升高，對於測試^靠度 及捸針卡使用壽命皆有不良的影響。 曰由於探針針尖接觸待測晶粒之焊墊時，會到起待測 晶粒表面之物質’而當封測次數累積後’探針會因反覆 201124732 ^人到起待測晶粒表面之物質 試品質變差或是誤測，導致測試良率^點’挪 解決此-問題，多半採用加大接觸以:滑。、:赴為 及良好之觸:r較佳，性 率稍有改善，但易破壞待測晶粒之下一良 :前晶圓製程中(。.13—一义^201124732 VI. Description of the Invention: [Technical Field] The present invention relates to a probe pin and a probe card, and more particularly to a probe and probe card having a nano coating . [Prior Art] The basic structure of a conventional probe mainly includes a probe head, a sleeve, a spring, for example, a probe called P〇G〇TM PIN, and the bean bank is extremely used, for example, a printed circuit board. (empty board and solid board) test pin, semi-conducting test pin or display test pin, and component test pin of communication product, for example, mobile phone antenna, battery, speaker, vibrator, lCD, etc. And can be extended to PDA, digital camera, Gps, nb... and other products. The probe card is made up of a multi-layer printed circuit board (PCB), which uses a plurality of probes (Pr〇be pins) to contact (detect) a series of electronic contacts on the wafer (pad; pad; )carry out testing. The two ends of the probe are electrically connected to the die to be tested and the multilayer printed circuit board, respectively, and the current between the tip of the probe and each pad is relatively high due to the test, and the temperature of the probe tip is too high, or even The spark is generated, which causes the probe tip to generate an oxide layer or carbonization phenomenon, which causes the probe conductivity and resistance value to rise, which has an adverse effect on the test reliability and the service life of the needle card.曰Because the tip of the probe touches the pad of the die to be tested, it will reach the surface of the die to be tested', and when the number of times of the test is accumulated, the probe will be over the surface of the die to be tested due to the repeated 201124732 Material quality deterioration or mis-testing, leading to test yield ^ point 'to solve this problem - mostly used to increase contact to: slip. ,: Going to and good touch: r is better, the performance rate is slightly improved, but it is easy to destroy the under-measurement of the die under the test: in the front wafer process (..13—一义^
易碎之低介電(1〇w.k dielectrics)材料時，增加)接 易導致待測晶粒之結構產生變形或破壞。二更 二由：潔探針來達到較佳之接觸性及良好二： 、、主探針數目多或探針間距小、分布密集等因素， r探針之頻率將會增加，可能導致測試機台稼動率降 低及探針壽命縮短。 近來雖有業界研發金屬鍍膜應用於探針表面，但大 夕僅此解決使用哥命短的問題，仍無法解決探針沾黏晶 粒^面材料之問題。因此，亟需一壽命長且抗沾黏及= 進—步提升測試良率與測試穩定度之探針及探針卡。 【發明内容】 本發明之目的在於提供一種探針及探針卡，藉由特 殊的奈米有機鍍膜，使探針具有不沾黏之效果，使用其 之探針卡可使晶圓測試品質穩定，可降低清洗探針的頻 率，因而提高測試機台稼動率並提升測試良率，降低整 體測試成本。 為達上述目的，本發明係提供一種探針，其包含： —探針本體，為一具導電性之金屬探針，其一端與該基 板間具有電性之連接，另一端用以與一待測元件之接腳 201124732 接觸’進行功能測試；以及一奈米鍍膜’形成於該探針 本體的表面，其中奈米鍵膜的厚度為奈米級’該奈米鍍 膜係由一有機材料所構成’該有機材料包含至少一第一 基團（first moiety )及至少一第二基團（second moiety )， 該第一基團化學鍵結於該探針本體的表面且該第二基 團遠離該金屬探針的表面，該奈米鍍膜具有不沾黏性 質，以及表面具有該奈米鍍膜之該探針本體的阻抗之增 加量相對表面無奈米鍍膜之該探針本體的阻抗之比值 為10%以下。 根據本發明另一實施例提供一種探針卡，其包含： 一基板’提供該探針卡與外部之電性連結；複數個金屬 探針’設置於該基板之下方’與該基板間具有電性之連 接’用以與一晶圓之表面接觸，進行功能測試；以及一 奈米鑛膜，形成於該金屬探針的表面，其中奈米鍍膜的 厚度為奈米級’該奈米鍍膜係由一有機材料所構成，該 有機材料包含至少一第一基團（行rst moiety )及至少一 第二基團（second moiety)，該第一基團化學鍵結於該 金屬探針的表面且該第二基團遠離該金屬探針的表 面’該奈米鍍獏具有不沾黏性質，以及表面具有該奈米 錢膜之該金屬探針的阻抗之增加量相對表面無奈米鍍 犋之該金屬探針的阻抗之比值為10%以下。 本發明之奈米鍍祺之厚度可為1〜40奈米，較理想 為20不米較佳為1〜5奈米（nm)。金屬探針之材質 =可為鎳、金、銅、鎢、銖、锆、鈷、鈀、鉑、鈦、鈹 a等具導電性之金屬材料或其合金。探針之結構例如為 ♦屬微彈簧或金屬線針。本發明中之奈米鑛膜能以化學 201124732 鍍膜製程之方式鍍於該些金屬探針之表面。並且依據本 發明，奈米鍍膜僅需鍍於自該些金屬探針之針尖處起延 伸5〜15密爾（mil)範圍之表面即可。 為達上述目的’本發明之奈米鍍膜可例如由包含甲 苯、乙醇、丙_以及矽烷類衍生物；或是包含曱苯、乙 酸乙醇以及矽烷類衍生物；或是包含曱苯、乙醇以及磷 酸類衍生物等各種組成物，透過自組裝（self assembly) 處理而形成。 根據本發明之探針及探針卡，藉由利用奈米材料鍍 膜於金屬探針表面，使得本發明之金屬探針具備不沾黏 (N〇n_stick)、高導電性、低接觸力（Low Contact force)、 使用奇命長之優良特性。 本發明所提供的探針卡之探針，能使測試品質穩 定，利用探針與待測晶粒間幾乎不產生吸引力的原理: 使得探針具有不沾黏特性，而使本發明具有降低清針頻 率，提高測試機台稼動率，提升測試良率，以及降低整 體測試成本的優點。 【實施方式】 以下舉出具體實施例以詳細說明本發明之内容，並 以圖示作為輔助說明。說明中提及之符號係參照圖式符 號。 根據本發明一實施例，揭露—種探針卡，其包含. 一基板；複數個金屬探針；以及—奈米鍍膜。 第1圖為本發明之探針卡實施例之結構示意圖，由 於探針卡主要係透過環氧樹脂環之黏結，將數根、甚 至數百根之探針設置於基板10,此種探針卡又可X稱 201124732In the case of fragile low dielectric (1〇w.k dielectrics) materials, the addition) causes deformation or damage to the structure of the die to be tested. Second and second: by the probe to achieve better contact and good two:, the number of main probes or probe spacing is small, the distribution is dense, etc., the frequency of the r probe will increase, may lead to the test machine Reduced feed rate and shortened probe life. Recently, although the industry has developed a metal coating for the surface of the probe, the problem of using the shortness of the probe is not solved by the eve, and the problem of the probe viscous grain surface material cannot be solved. Therefore, there is a need for a probe and probe card that has a long life and is resistant to sticking and step-up to improve test yield and test stability. SUMMARY OF THE INVENTION The object of the present invention is to provide a probe and a probe card. The special nano organic coating can make the probe have no sticking effect, and the probe card can be used to stabilize the wafer test quality. It can reduce the frequency of cleaning probes, thus increasing the test machine utilization rate and improving the test yield, reducing the overall test cost. In order to achieve the above object, the present invention provides a probe comprising: a probe body, which is a conductive metal probe, having an electrical connection between one end and the substrate, and the other end is used for The measuring element pin 201124732 is in contact with 'for functional testing; and one nano coating is formed on the surface of the probe body, wherein the thickness of the nano bond film is nanometer'. The nano coating is composed of an organic material. The organic material comprises at least a first moiety and at least a second moiety, the first group being chemically bonded to the surface of the probe body and the second group being remote from the metal The surface of the probe has a non-stick property, and the ratio of the impedance of the probe body having the nano-coating surface to the impedance of the probe body of the surface nano-coating is 10% or less. . According to another embodiment of the present invention, a probe card includes: a substrate 'providing the probe card electrically connected to the outside; a plurality of metal probes ' disposed under the substrate 'having electricity between the substrate The connection is used to contact the surface of a wafer for functional testing; and a nano-mineral film is formed on the surface of the metal probe, wherein the thickness of the nano-coating is nanometer' Consisting of an organic material comprising at least a first group (rst moiety) and at least a second moiety, the first group is chemically bonded to the surface of the metal probe and the The second group is away from the surface of the metal probe. The nano-plated crucible has non-stick properties, and the increase in the impedance of the metal probe having the surface of the nano-money film is relative to the surface of the surface. The impedance ratio of the probe is 10% or less. The nano-plated crucible of the present invention may have a thickness of 1 to 40 nm, more preferably 20 to 5 nm, preferably 1 to 5 nm (nm). The material of the metal probe = metal material such as nickel, gold, copper, tungsten, rhenium, zirconium, cobalt, palladium, platinum, titanium, yt or the like or an alloy thereof. The structure of the probe is, for example, a microspring or a metal wire needle. The nanomine film of the present invention can be plated on the surface of the metal probes in a chemical 201124732 coating process. Further, according to the present invention, the nano-coating film only needs to be plated on the surface extending from the tip of the metal probes in the range of 5 to 15 mils. For the above purposes, the nano coating of the present invention may, for example, comprise toluene, ethanol, propane and decane derivatives; or comprise toluene, acetic acid and decane derivatives; or include toluene, ethanol and phosphoric acid. Various compositions such as derivatives are formed by self-assembly processing. According to the probe and the probe card of the present invention, the metal probe of the present invention has a non-stick (N〇n_stick), high conductivity, and low contact force by using a nano material coated on the surface of the metal probe (Low) Contact force), using the excellent features of the odd long. The probe of the probe card provided by the invention can stabilize the test quality, and utilizes the principle that the probe and the die to be tested hardly attract the attraction: the probe has non-stick property, and the invention has the characteristics of being reduced. The frequency of needle cleaning increases the productivity of the test machine, increases the test yield, and lowers the overall test cost. BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, specific embodiments will be described in detail to explain the present invention. The symbols mentioned in the description are referenced to the symbol. According to an embodiment of the invention, a probe card is disclosed, comprising: a substrate; a plurality of metal probes; and a nano-coating film. 1 is a schematic structural view of an embodiment of a probe card according to the present invention. Since the probe card is mainly bonded through an epoxy ring, a plurality of or even hundreds of probes are disposed on the substrate 10, and the probe is provided. Card can also be called X 201124732
環f樹脂環探針卡⑽卿probe card)。如第】圖所示， ^實施例之探針卡整體之結構主要包括探針η、基板 L、陶莞環13以及強化體15，於第2圖中本實施例所 探針11 «臂式探針(水平式探針），而基板1〇 &供^卡與外部之電錢結且為Μ，以於陶曼環 U置放則述數十根、甚至數百根探針11。該些探針與 5板門/、有電性之連接。並且，前述之元件係經過設 計後’後續以組裝、黏著、膠合、架線以及最後各階級 探針位置之細部調整等階段，而完成—探針卡結構。第 2圖為第丨圖巾探針針尖奈讀膜之放大示意圖。 第3目&本發明之垂直式探針卡實施例之結構示 心圖如第3圖所不，本實施例之垂直式探針卡包括一 基板10、一引導機構12以及多數個探針14，其中基板 10底面”有夕數個呈現凸起狀之焊墊（未繪示於本圖 中），導引機構12則是設£在相對應於基板1G底面之 位置。與前-實施例不同的是，前述探針14之探針針 尖形狀係如圖所示為長圓柱狀者，並且所有探針Μ係 以可移動之方式設置於引導機構12内，各探針14之頂 端係對應於基板1G之各焊塾之位置下方，底端則朝向 導引機構丨2之外侧延伸，因此當探針卡應用於測試一 晶粒時，各探針14之底端係壓抵於待測晶片之接點(焊 塾）’同時错由各探針14之彈性使探針頂端驗於各焊 墊，以使待測晶片與探針卡可相互電性連接。 面 第4圖為第3圖中探針針尖奈米鍛膜之放 圖:本發明此實施例中之探針仍與原探針卡維持^ 201124732 根據本發明另一實施例，揭露—種 一探針本體，為一具導電性之金屬探 ^其包含： 板間具有電性之連接，另一端用以與— 端與該基 接觸’進行功能測試；以及-奈米铲J、測兀件之接腳 本體的表面。 又、，形成於該探針 於上述第1及3圖及上述探針中，太 =介於一之間，相對於以探針;Ring f resin ring probe card (10) clear probe card). As shown in the figure, the overall structure of the probe card of the embodiment mainly includes the probe η, the substrate L, the pottery ring 13 and the reinforcing body 15. In the second embodiment, the probe 11 of the present embodiment is «arm probe (horizontal probe), and the substrate 1 〇 & the card and the external electricity money are Μ, so that the Tauman ring U is placed tens or even hundreds of probes 11 . The probes are electrically connected to the 5-panel door. Moreover, the aforementioned components are completed after the design, followed by assembly, adhesion, gluing, wire splicing, and fine adjustment of the position of the final stage probes, to complete the probe card structure. Fig. 2 is an enlarged schematic view of the tip of the probe of the second towel. The third embodiment of the vertical probe card embodiment of the present invention is shown in FIG. 3. The vertical probe card of the present embodiment includes a substrate 10, a guiding mechanism 12, and a plurality of probes. 14. The bottom surface of the substrate 10 has a plurality of solder pads (not shown in the figure), and the guiding mechanism 12 is disposed at a position corresponding to the bottom surface of the substrate 1G. The difference is that the probe tip shape of the probe 14 is a long cylindrical shape as shown in the figure, and all the probes are movably disposed in the guiding mechanism 12, and the top end of each probe 14 is Corresponding to the position of each of the pads of the substrate 1G, the bottom end extends toward the outside of the guiding mechanism ,2, so when the probe card is applied to test a die, the bottom end of each probe 14 is pressed against The contact point of the wafer (welding pad) is simultaneously determined by the elasticity of each probe 14 so that the tip of the probe is inspected on each pad so that the wafer to be tested and the probe card can be electrically connected to each other. Figure 3 shows the probe tip nano-forged film: the probe in this embodiment of the present invention is still maintained with the original probe card ^ 201 According to another embodiment of the present invention, a probe body is disclosed as a conductive metal probe comprising: an electrical connection between the plates, and the other end is used to contact the terminal with the substrate Functional test; and - the surface of the nano-shovel J, the test piece connected to the script body. Also, the probe is formed in the first and third figures and the probe, too = between one, relative Probe
所需之精度而言’奈米鍍膜110之厚度不合二 :相對晶圓尺寸上的改變’同時奈米鍍膜u〇:厚= 稍微增加阻抗值外’不會對高頻電子訊號之量測產= 響’可藉由奈米賴的形成條件而調整。奈^ ^ 較理想4 i〜5 nm，例#可為單層分子： (Langmuir-Blodgett film)’第5圖表示本發明—命摊 例之銖鎢合金的基板上鍍有奈米鍍膜之穿透式電只 微鏡的相片’其中箭頭表示的層（相片中白色%分^ 本發明的奈米鍍膜’圖面的最上層為鍍金層，位^夺米 鍍膜的下方的層為銖鎢合金層。 ' $ ^ 於上述第1圖及第3圖中，基板10可為印刷電路 板或是碎基板’探針11及14之材料可為導電性材料， 例如金屬材料或合金’例如鎳、金、鋼、鶴、鍊、結、 鈷、鈀、鉑、鈦、鈹、鈹銅合金、鍊鎢合金或上述金屬 之合金’常見者例如為鍊鶴、鍵銅合金。 根據本發明之探針及探針卡之探針，於探針表面 上，具有一奈米鍍膜，該奈米鍍膜的厚度為奈米級該 奈米鍍膜係由一有機材料所構成，該有機材料包含至少 —第一基團（fim moiety)及至少—第二基團（sec〇nd 201124732 moiety)，該第一基團化學鍵結於該金屬探針的表面且 該第二基團遠離該金屬探針的表面，該奈米鍍膜具有不 沾黏性質’以及表面具有該奈米鍍膜之該金屬探針的阻 抗之增加量相對表面無奈米鑛膜之該金屬探針的阻抗 之比值為10%以下。該第一基團係選自下列群組之一 基團：硫醇基（-SH)、烷硫基（-S-R，其中R表示烷基）、 烧二硫基（-S-S-R，其中R表示烧基）、硫乙醇酸基 (-SCH2COOH)、胺基(_NH2)、-SiX3 (其中 X=ci，F，In terms of the required precision, 'the thickness of the nano-coating film 110 is different: the change in the relative wafer size' while the nano-coating u〇: thick = slightly increase the impedance value' will not measure the high-frequency electronic signal. = Ringing ' can be adjusted by the formation conditions of Nano Lai. Nai ^ ^ is ideally 4 i ~ 5 nm, Example # can be a single layer of molecules: (Langmuir-Blodgett film) 'Fig. 5 shows the present invention - the substrate of the tungsten alloy is coated with a nano-coating The photo of the micro-mirror of the transmissive type is the layer indicated by the arrow (the white color in the photo is the same. The uppermost layer of the nano-coating of the invention is the gold-plated layer, and the layer below the rice coating is the tantalum-tungsten alloy).层。 ' ^ ^ In the above figures 1 and 3, the substrate 10 can be a printed circuit board or a broken substrate 'the materials of the probes 11 and 14 can be a conductive material, such as a metal material or alloy 'such as nickel, Gold, steel, crane, chain, knot, cobalt, palladium, platinum, titanium, niobium, beryllium copper alloy, chain tungsten alloy or alloy of the above metals are common, for example, chain cranes, bond copper alloys. Probes according to the present invention And the probe of the probe card has a nano-coating on the surface of the probe, the nano-coating layer has a thickness of nanometer. The nano-coating film is composed of an organic material, and the organic material comprises at least—first a fim moiety and at least a second group (sec〇nd 201124732 moiety), the first base Chemically bonded to the surface of the metal probe and the second group is away from the surface of the metal probe, the nano coating has a non-stick property and an increase in the impedance of the metal probe having the nano coating on the surface The ratio of the impedance of the metal probe relative to the surface nano-mineral film is 10% or less. The first group is selected from one of the following groups: a thiol group (-SH), an alkylthio group (-SR) , wherein R represents an alkyl group, a disulfide group (-SSR, wherein R represents a burnt group), a thioglycolic acid group (-SCH2COOH), an amine group (_NH2), -SiX3 (where X = ci, F,
OCH2CH3 or OH)、磷酸基(_p〇42 )、亞磷酸基(_p〇32 )、 烧膦基（-PR2 ’其中R表示烷基）及羧基 (-C007-C00H);該第二基團為一疏水性基團。上述疏 水性基團可例如為直鏈狀或支鏈狀之烷基、具有取代基 之直鏈狀或支鏈狀之烷基、直鏈狀或支鏈狀之烯基、具 有取代基之直鏈狀或支鏈狀之烯基、芳香烧基。 具體地，上述有機材料可包含選自下列群組之一化 合物或其組合：硫醇衍生物、矽烷衍生物、磷酸衍生物 及胺付生物。上述有機材料例如為CH^CH2)nSH (n=l〜24 )、CH3(CH2)nC6H4_C6H4_SH ( n=〇〜12 )、或OCH2CH3 or OH), a phosphate group (_p〇42), a phosphite group (_p〇32), a phosphinyl group (-PR2' wherein R represents an alkyl group), and a carboxyl group (-C007-C00H); the second group is a hydrophobic group. The above hydrophobic group may, for example, be a linear or branched alkyl group, a linear or branched alkyl group having a substituent, a linear or branched alkenyl group, or a straight group having a substituent. A chain or branched alkenyl group or an aromatic alkyl group. Specifically, the above organic material may comprise a compound selected from the group consisting of a thiol derivative, a decane derivative, a phosphoric acid derivative, and an amine compound. The above organic material is, for example, CH^CH2)nSH (n=l~24), CH3(CH2)nC6H4_C6H4_SH (n=〇~12), or
CF3(CF2)nSH ( w〜24 )、CF3(CF2)nC6H4_c6H4_sH u♦⑴之硫醇衍生物等，又例如具有長鏈（碳數ι =麟族或具有部分氟化或全敦化長鏈（碳數t “ 月日肪^之钱何生物、錢衍生物及胺衍生物 i例如0恤㈣㈣加）等，上述僅為例示的化合物， 二= 二ΓΓ屬探針的表面狀況而調整或選 擇適==，並不限於上述的例示化合物。 本發明係利用例如：化學鍍膜之製程，將前述之奈 201124732 米鍍膜鍍於該些探針之表面。並且僅需將奈米鍍膜例如 鍍於該些探針之針尖處5〜15密爾（mil)之表面上即可。 前述之奈米鍍膜例如為具有不沾黏性質之有機奈米材 料。 又為利用形成分子自組單層膜之原理，亦即使薄膜 分子與探針表面作用力較強而不易脫落，且運用多種不 同類型之官能基，使表面性質得以控制之特性。故，該 奈米材料係包含有可分子自組成膜之官能基衍生物。所 φ 謂分子自組單層膜係利用分子自發性的吸附於表面，形 成一層具秩序性的單層分子膜。因此該官能基便會自發 性的吸附於基材表面進行化學反應。同時所形成之分子 自組單層膜與外界接觸部分為末端基團，該部分決定了 該分子自組單層膜之特性。例如疏水性（或親水性）或表 面具電子轉移之功能者。利用該些特性運用於探針操 作，獲得較佳量測效果。 上述奈米鍍膜，可將奈米鍍膜之製程液，藉由浸潰 法、蒸發法等各種習知的方法，塗敷（apply)於探針 • 的表面。上述奈米鍍膜之製程液可包含水、非極性有機 溶劑、曱醇、乙醇、丙醇疏醇衍生物、醚類衍生物以及 磷酸類衍生物等各類型官能基衍生物為較佳實施例。 以下範例（example)，雖以探針尖端材質為銅鍍金 或銶鎢合金，奈米鍍膜之製程液主要包含水、曱醇等為 例說明，但本發明不限此。測試探針之壽命之判斷，係 根據探針經歷一預設之測試次數（例如3萬次）後的阻 抗變化而決定。以下係針對各種可分子自組成膜製程液 之組成及比例而以化學鍵結方式附著成膜於探針本體 201124732 上之實驗數據。例如：硫醇衍生物、磷酸類衍生物、矽 烷類衍生物或是胺類衍生物其中之一。可使用非極性有 機溶劑，例如己烷、曱苯或二曱笨等。可使用醇類作為 溶劑，例如可使用曱醇、乙醇、丁醇、乙二醇、二乙二 醇或異丙基乙二醇等。上述溶劑的添加量會隨製程的方 式、環境、基板的種類及鍵結於基板的有機材料之種類 的不同而調整及改變，因此以下範例中的溶劑成分的添 加比例沒有特別述明。通常鍵結於基板的有機材料之添 I 加量為1 Owt%以下。 範例一： 測試探針尖端材質為銖鎢合金，奈米鍍膜之製程液 包含曱醇、乙醇、丙酮及硫醇衍生物（SlOwt%)，發現阻 抗增加約10%，探針壽命增加。 範例二： 探針尖端材質為合金，奈米鍍膜之製程液包含甲 苯、乙醇及磷酸衍生物（SlOwt%)，發現阻抗沒有明顯增 加，探針壽命增加。 • 範例三： 探針尖端材質為合金，奈米鍍膜之製程液包含曱 苯、乙醇及矽烷衍生物（SlOwt%)，發現阻抗增加約 10%，探針壽命增加。 範例四： 探針尖端材質為合金，奈米鍍膜之製程液包含曱 苯、乙醇及胺衍生物（SlOwt%)，發現阻抗沒有明顯增 加，探針壽命增加。 前述奈米鍍膜之厚度例如為1〜40奈米，較理想為 201124732 1〜20奈米，更較佳為1〜5奈米。 月g述探針之材質為金屬材料，例如：鎳、金、 鶴、銖、結”、麵、鈦、鈹等，具導電性之金屬 材料或其合金，例如：鍊鎢或鈹鋼合金。其中，俨 結構例如為金屬微彈簧或金屬線針。 衣对之 另外，在訊號傳輸的過程中，當探針在進 輸時，因為奈米賴使探針具有不沾轉性，也因此1 針更易於準確地接㈣測晶粒的正確測試 探針於進行訊號傳遞時可避免雜訊而達到 ^吏传 號傳遞，同時亦提高測試之穩定性。 之訊 此外，本發明所揭示探針卡之奈米 如：化學鍍膜製程方法，於探針表面上直紗 因此僅需藉由精密鍍膜治具控制探針“。 針相對距離，做為精贿膜治具之料=之;^及探 明能在不㈣雜針卡結狀前 本發 卡之探針針ίΐ丑平面Γ也亦使得本發明所揭示探針 錢膜的厚度而改變。X不致因於探針針尖增加奈米 所具:發明所提供之探針及探針卡，由於1 用於具有聽針具有不沾黏之特性，而能應 句阿積集度，高腳數，浓 =而應用於半導趙產業晶圓先;c進製程技 ，針於探針表：於本發明探針卡 不產生任何吸引力，使得探針具有不沾黏之特 S] 12 201124732 性，因此除能降低探針清潔頻率，提升測試良率外，更 具備提高測試機台稼動率及降低晶圓測試整體成本之 優點。 雖然本發明已就較佳實施例揭露如上，然其並非用 以限定本發明。本發明所屬技術領域中具有通常知識 者，在不脫離本發明之精神和範圍内，當可作各種之變 更和潤飾。因此，本發明之保護範圍當視後附之申請專 利範圍所界定者為準。 【圖式簡單說明】 第1圖為本發明之水平式探針卡實施例之結構示意圖。 第2圖為第1圖中探針針尖奈米鍍膜之放大示意圖。 第3圖為本發明之垂直式探針卡實施例之結構示意圖。 第4圖為第3圖中探針針尖奈米鍍膜之放太示意圖。 第5圖表示本發明一實施例之銖鎢合金的基板上鍍有 奈米鍍膜之穿透式電子顯微鏡的相片。 【主要元件符號說明】 10 基板 11 探針 12 引導機構 13 陶瓷環 14 探針 15 強化體 110 奈米鍍膜 140 奈米鍍膜 13a thiol derivative of CF3(CF2)nSH (w~24), CF3(CF2)nC6H4_c6H4_sH u♦(1), and the like, for example, has a long chain (carbon number ι = lin or a partially fluorinated or fully denatured long chain (carbon) The number t "the moon day fat ^ money of the organism, money derivatives and amine derivatives i such as 0 shirt (four) (four) plus), etc., the above is only the exemplified compound, the second surface of the diterpenoid probe is adjusted or selected The invention is not limited to the above-exemplified compounds. The present invention utilizes, for example, a process of electroless plating, to plate the aforementioned coating of 201124732 meters on the surface of the probes, and only needs to plate the nano coatings, for example. The tip of the probe may be on the surface of 5 to 15 mils. The aforementioned nano-coating is, for example, an organic nano-material having non-stick properties, and the principle of forming a molecular self-assembled monolayer film. Even if the film molecules and the surface of the probe are strong and not easy to fall off, and a plurality of different types of functional groups are used to control the surface properties, the nanomaterials contain functional groups capable of self-assembling the film. Derivative The membrane system spontaneously adsorbs on the surface to form a layer of a single-layer molecular film. Therefore, the functional group spontaneously adsorbs on the surface of the substrate for chemical reaction. At the same time, the molecular self-assembled monolayer film is formed. The part in contact with the outside is a terminal group which determines the characteristics of the self-assembled monolayer film of the molecule, such as hydrophobic (or hydrophilic) or surface-emitting electron transfer function. The above-mentioned nano-coating film can be applied to the surface of the probe by various conventional methods such as a dipping method and an evaporation method. The rice coating process liquid may comprise various types of functional group derivatives such as water, a non-polar organic solvent, a decyl alcohol, an ethanol, a propanol derivative, an ether derivative, and a phosphoric acid derivative, as preferred embodiments. (example), although the probe tip material is copper-plated gold or tantalum-tungsten alloy, the process liquid of the nano-coating film mainly includes water, decyl alcohol, etc., but the invention is not limited thereto. The judgment is determined according to the impedance change after the probe has undergone a predetermined number of tests (for example, 30,000 times). The following is a chemical bonding method for film formation and ratio of various molecular self-constituting film process liquids. Experimental data on probe body 201124732. For example: one of a thiol derivative, a phosphoric acid derivative, a decane derivative or an amine derivative. A non-polar organic solvent such as hexane, toluene or Dioxane, etc. Alcohols can be used as a solvent, for example, decyl alcohol, ethanol, butanol, ethylene glycol, diethylene glycol or isopropyl glycol can be used. The amount of the above solvent will vary depending on the process. Since the environment, the type of the substrate, and the type of the organic material bonded to the substrate are adjusted and changed, the ratio of addition of the solvent component in the following examples is not particularly described. Usually, the amount of addition of the organic material bonded to the substrate is 1% by weight or less. Example 1: The tip of the test probe is made of tantalum-tungsten alloy. The process solution of nano-coating contains decyl alcohol, ethanol, acetone and thiol derivatives (S10% by weight). It is found that the impedance is increased by about 10% and the probe life is increased. Example 2: The probe tip is made of alloy. The process solution of nano-coating contains toluene, ethanol and phosphoric acid derivatives (S10 wt%). It is found that the impedance is not significantly increased and the probe life is increased. • Example 3: The tip of the probe is made of alloy. The process solution of nano-coating contains benzene, ethanol and decane derivatives (S10 wt%). The impedance is increased by about 10% and the probe life is increased. Example 4: The tip of the probe is made of alloy. The process solution of nano-coating contains benzene, ethanol and amine derivatives (S10 wt%). It is found that the impedance is not significantly increased and the probe life is increased. The thickness of the above-mentioned nano-coating film is, for example, 1 to 40 nm, more preferably 201124732 1 to 20 nm, and still more preferably 1 to 5 nm. The material of the probe is a metal material, for example, nickel, gold, crane, tantalum, knot, surface, titanium, tantalum, etc., a conductive metal material or an alloy thereof, for example, a chain tungsten or a tantalum steel alloy. Wherein, the 俨 structure is, for example, a metal micro spring or a metal wire needle. In addition, during the signal transmission, when the probe is in the feed, because the nano ray makes the probe non-slip, it is also The needle is easier to accurately connect. (4) The correct test probe for measuring the die can avoid the noise and achieve the transmission of the signal when the signal is transmitted, and also improve the stability of the test. Further, the probe disclosed by the present invention Card Nylon, such as the electroless coating process, directs the yarn on the surface of the probe so that it only needs to be controlled by a precision coating fixture. The relative distance of the needle is used as the material of the fine bribe film; ^ and the probe needle that can be used in the card before the (four) needle is stuck, the ugly plane also makes the probe money disclosed by the present invention The thickness of the film changes. X is not caused by the increase of the tip of the probe tip: the probe and the probe card provided by the invention, since 1 is used for having the characteristics that the stylus has no stickiness, and can be used for the accumulation of sentences, the number of high feet Concentration = applied to the semi-conductor Zhao industry wafer first; c-bit technology, needle on the probe table: in the probe card of the present invention does not produce any attraction, so that the probe has a non-stick special S] 12 201124732 Therefore, in addition to reducing the probe cleaning frequency and improving the test yield, it has the advantages of improving the test machine utilization rate and reducing the overall cost of wafer testing. Although the present invention has been disclosed above in terms of preferred embodiments, it is not intended to limit the invention. A person skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the structure of an embodiment of a horizontal probe card of the present invention. Fig. 2 is an enlarged schematic view showing the probe tip nano-coating film in Fig. 1. FIG. 3 is a schematic structural view of an embodiment of a vertical probe card of the present invention. Fig. 4 is a schematic view showing the release of the probe tip nano-coating in Fig. 3. Fig. 5 is a view showing a photograph of a transmission electron microscope plated with a nano-coating film on a substrate of a tantalum-tungsten alloy according to an embodiment of the present invention. [Main component symbol description] 10 Substrate 11 Probe 12 Guide mechanism 13 Ceramic ring 14 Probe 15 Reinforcement 110 Nano coating 140 Nano coating 13