KR20110084127A - Probe pin and probe card using the same - Google Patents

Abstract

PURPOSE: A probe pin with a nano coating film and a probe card using the same is provided to have a non stick property by coating a probe pin in the organic nanometer material of 1~40nm. CONSTITUTION: A probe card is electrically connected to the outside. A plurality of metal probe pins(11) is installed in the down direction of a substrate and is electrically connected between the substrate. A nano coating film(110) is formed in the surface of a probe main body. The nano coating film is composed of one organic material. The organic material includes a first moiety and a second moiety. The first moiety is chemically combined in the surface of the probe pin main body. The second moiety falls far from the surface of the metal probe pin.

Description

PROBE PIN AND PROBE CARD USING THE SAME}

The present invention relates to a probe pin and a probe card using the same, and more particularly, to a probe pin and a probe card having a nano-coating film.

The basic structure of a conventional probe pin mainly includes a probe pin head, a drive pipe, a spring, and the like, for example, POGO ^™ Probe pins, also referred to as PINs, are also used in a very wide range of applications, such as pins for printing blank panel and real panel testing, pins for semiconductor testing, or display device testing, etc. For example, it can be extended to connectors such as mobile phone antennas, batteries, speakers, vibrators, LCDs, and also products such as PDAs, digital cameras, GPS, and NBs.

The probe card consists of a multilayer printed electrical circuit board (PCB), which is tested using a large number of probe pins, each with a subsequent electronic contact (Pad) on the contact (probe) wafer.

Both ends of the probe pin are electrically connected to the testing crystalline grain and multilayer printed electrical circuit board, respectively, and during testing, the current that is instantaneously conducted between the top end of the probe pin and each pad is considerably high. As the temperature at the tip end of the probe pin is too high or even sparks are created, this causes a situation in which the tip end of the probe pin forms an oxide layer or a carbonization phenomenon, and also causes the probe pin to Since the electrical resistance value is high, it has an undesirable effect on the reliability of testing and the service life of the probe card.

When the tip of the probe pin contacts the pad of the testing crystalline granule, it may scrape the material off the surface of the testing crystal grain, and as the testing orders accumulate, the probe pin repeatedly scrapes the material on the testing crystal grain surface. As the tip of the probe pin is deformed, the adhesive becomes easy to stick, causing a change in testing quality or incorrect testing, which leads to a situation in which the testing superiority rate is rapidly lowered. A large increase in contact force (overdrive) is employed to ensure that the tip of most probe pins more reliably contacts the surface of the testing crystalline granule, which can reach relatively desirable contact and good testing quality, but When this increases, the testing decision is made, although the testing rainfall rate may improve somewhat. One layer structure under the granules can be easily broken, especially when the low dielectric material is easily introduced during conventional wafer fabrication process (0,13um, 90nm, 65nm ... etc.), Thereby increasing the contact force. Easily deform or break the structure of the testing crystalline granules. In another aspect, even if the probe pins are cleaned to reach relatively desirable contact and good testing quality, the frequency of cleaning the probe pins may be due to factors such as the number of probe pins and the spacing and distribution density between the probe pins. As the number increases, the operation rate of the testing device may decrease or the life of the probe pin may be shortened.

In recent years, although there are advances in the application of metal coating films on the surface of probe pins in the industry, most of them only solve the problem of shortening the service life. There is no solution. Due to this, it is time to promptly require a probe pin and a probe card that can prevent sticking and further improve adhesion superiority and testing stability.

An object of the present invention is to provide a probe pin and a probe card, due to the special nano-organic coating film, the probe pin has a non-adhesive effect, the probe card using the probe pin to stabilize the wafer testing quality This reduces the frequency of cleaning the probe pins, which increases the operating efficiency of the testing equipment, increases the testing superiority rate, and reduces the overall testing cost.

In order to achieve the above object, the probe pin of the present invention includes one probe pin body and a nano coating film. The probe pin body is a metal probe pin having conductivity, one end is electrically connected to the substrate, and the other end is in contact with an angle of the testing component to perform a testing function. The nano coating film is formed on the surface of the probe body, the thickness of the nano coating film is nanometer class, the nano coating film is composed of one organic material, the organic material is at least one first moiety (first moiety) And at least one second moiety, wherein the first moiety is chemically bonded to the surface of the probe pin body and the second moiety is far from the surface of the metal probe pin, Silver has an adhesive property, and the resistance increase amount of the probe pin body having the nano coating film on the surface thereof is relatively less than 10% relative to the resistance of the probe pin body having no nano coating film on the surface thereof.

According to another embodiment of the present invention, a probe card is provided, and the probe card includes one substrate, a plurality of metal probe pins, and a nano coating film, and the probe card provides an electrical connection with the outside. The plurality of metal probe pins are installed in the lower direction of the substrate, are electrically connected to the substrate, and one wafer is used to contact the surface and the testing function is performed. The nano coating film is formed on the surface of the probe body, the thickness of the nano coating film is nanometer class, the nano coating film is composed of one organic material, the organic material is at least one first moiety (first moiety) and At least one second moiety, wherein the first moiety is chemically bonded to the surface of the probe pin body, the second moiety is remote from the surface of the metal probe pin, and the nanocoated film Silver has an adhesive property, and the resistance increase amount of the probe pin body having the nano coating film on the surface thereof is relatively less than 10% relative to the resistance of the probe pin body having no nano coating film on the surface thereof.

The thickness of the nanocoating film of this invention is 1-40 nm, a relatively ideal thing is 1-20 nm, and a comparatively preferable thing is 1-5 nm. Metal probe pins are made of nickel (Ni), gold (Au), copper (Cu), tungsten (W), rhenium (Re), zirconium (Zr), cobalt (Co), palladium (Pd), and platinum (Pt). , Titanium (Ti), beryllium (Be), or the like, or a metal material having conductivity, or an alloy thereof. The structure of the probe pins is for example metal micro springs or metal wire pins. The nanocoating film of the present invention is coated on the surface of the various metal probe pins in a chemical coating film manufacturing process. In addition, based on the present invention, the nano coating film requires a coating on the surface extending in the range of 5 to 15 mils from the tips of the various metal probe pins.

In order to achieve the above object, the nano-coating film of the present invention includes, for example, methylbenzene, ethyl alcohol, acetone and silane derivatives or methylbenzene, ethyl acetate and silane derivatives. Or include methylbenzene, ethyl alcohol and phosphoric acid derivatives and other compositions, and are formed through a self assembly process.

Based on the probe pin and the probe card of the present invention to form a coating film on the surface of the metal probe pin using nanometer material, the metal probe pin of the present invention is non-stick, high conductivity, low contact force (Low) Excellent characteristics such as contact force, long service life.

The probe pin of the probe card provided in the present invention is to stabilize the testing quality and to hardly generate the principle of suction force between the testing crystal granules by using the probe pin, and the probe pin has the property of non-adhesion. In the present invention, it is possible to lower the frequency of cleaning of the probe pins, to improve the operation rate of the testing apparatus, to improve the testing superiority rate, and to reduce the overall testing cost.

1 is a structural explanatory diagram of an embodiment of a horizontal probe card according to the present invention.
FIG. 2 is an enlarged explanatory view of the probe pin tip nano coating film of FIG. 1. FIG.
3 is a structural explanatory diagram of a vertical probe card embodiment according to the present invention;
FIG. 4 is an enlarged explanatory view of the probe pin tip nano coating film of FIG. 3. FIG.
5 shows a photograph of a penetrating electron microscope coated with a nano coating film on a rhenium-tungsten alloy substrate in one embodiment of the present invention.

Hereinafter, the contents of the present invention will be described in detail with reference to specific embodiments, and a supplementary description will be made with reference to the drawings. Reference numerals in the description refer to reference numerals.

In accordance with one embodiment of the present invention, a probe card is disclosed and includes a substrate, a plurality of metal probe pins, and a nano coating film.

1 is a structural explanatory diagram of a probe card embodiment according to the present invention, in which a probe card is attached to the substrate 10 by tens of pieces or even hundreds of pieces of probe pins by adhesion through an epoxy resin. Probe cards are also referred to as epoxy resin probe cards. As shown in Fig. 1, the overall structure of the probe card of this embodiment includes a probe pin 11, a substrate 10, a ceramic ring 13 and a reinforcement 15, in this embodiment of Fig. 2 The disclosed probe pin 11 is a cantilever mode probe (horizontal probe pin), the substrate 10 is provided with a probe card is connected to the electrical properties of the outside and is a cavity (cavity), the ceramic ring ( 13 is installed on the dozens or even hundreds of probe pins 11. The various probe pins are provided with electrical properties therebetween. In addition, after the design of the components, there is a subsequent procedure of assembling the device, gluing, adhesive bonding, wire (preliminary hypothesis), and finally adjusting the probe pin position for each step. The card structure is completed. FIG. 2 is an enlarged explanatory view of the probe pin tip nano coating film of FIG. 1.

3 is a structural explanatory diagram of a vertical probe card embodiment of the present invention. As shown in FIG. 3, the vertical probe card of this embodiment includes one substrate 10, one guide mechanism 12, and a plurality of probes. And a pad (not shown in the drawing) having a plurality of convex shapes on the bottom surface of the substrate 10, including the pin 14, and the guide mechanism 12 is relatively provided with the substrate 10. It is installed in the position corresponding to a bottom part. In contrast to the previous embodiment, the probe tip shape of the probe pin 14 is elongated circumferential shape as shown, and the probe pin 14 is installed in the guide mechanism 12 in a moving manner, The top end of the probe pin 14 corresponds to the downward direction of each pad position of the substrate 10, and the bottom end extends toward the outer side of the guide mechanism 12, whereby the probe card is applied to the testing crystal grain. In this case, the bottom end of each probe pin 14 is stably balanced to the contact (pad) of the testing crystal piece, and at the same time, the elasticity of each probe pin 14 is such that the probe pin top end is stably balanced to each pad. The testing crystal piece is electrically connected to the probe card.

FIG. 4 is an enlarged explanatory view of the probe pin tip nanocoating film of FIG. 3, wherein the probe pin of this embodiment of the present invention maintains the same plane according to the original probe card.

According to another embodiment of the present invention, one probe pin is disclosed, and includes one probe pin body and one nano coating film. One probe pin body is a conductive metal probe pin, one end of which is connected to the substrate with electrical properties, the other end is in contact with the joint using one testing component to test function It is going. One nano coating film is formed on the surface of the probe pin body.

1 and 3 and the above-described probe pin, the thickness of the nano-coating film is approximately 1 to 40nm, and relatively, if the probe card refers to the precision required as the testing proceeds with respect to the wafer, the nano-coating film 110 The thickness does not create a change in which the probe pins correspond to the wafer size, and at the same time, the thickness of the nano coating layer 110 does not affect the measurable amount of the high frequency electronic signal, in addition to a slight increase in the resistance value (impedance). The formation conditions of a nano coating film are adjusted. The thickness of the nanocoating film is relatively ideal is 1 to 5 nm, for example, such as a single layer molecular film (Langmuir-Blodgett film). FIG. 5 is a photograph of a penetrating electron microscope coated with a nano coating film on a rhenium-tungsten alloy substrate according to an embodiment of the present invention, in which a layer indicated by an arrow (white portion in the picture) is a nano coating film of the present invention. The uppermost layer in the figure is a plating layer, and the layer located in the lower direction of the nano coating film is a rhenium-tungsten alloy layer.

1 and 3, the substrate 10 is a printed circuit board or silicon substrate, and the material of the probe pins 11 or 14 is a conductive material, for example a metal material or an alloy, for example nickel, gold, Copper, tungsten, rhenium, zirconium, cobalt, palladium, platinum, titanium, beryllium-copper alloys, rhenium-tungsten alloys or alloys of these metals, which are customary for example rhenium-tungsten alloys and beryllium-copper alloys.

Based on the probe pin and the probe pin of the probe card of the present invention, on the surface of the probe pin, one nano coating film is provided, the thickness of the nano coating film is nanometer class, the nano coating film is composed of one organic material Wherein the organic material comprises at least one first moiety and at least one second moiety, the first moiety being chemically bonded to the surface of the probe pin body, The residue is far from the surface of the metal probe pin, the nano-coating film has a property of non-adhesion, the resistance increase of the metal probe pin body having the nano-coating film on the surface is relatively free of nano-coating film on the surface The ratio is 10% or less with respect to the resistance of the metal probe pin body. The first moiety is selected from the following population: thiol group (-SH), alkylsulfide group (-SR, R represents alkyl group), alkyldisulfide group (-SSR, R represents alkyl group), thioglycol acid group (-SCH ₂ COOH) an amino group _{(-NH 2), -SiX 3 (} X = Cl, F, OCH 2 CH 3 , or OH), a phosphate group (-PO ₄ ^{2 -),} Ain acid group (-PO ₃ ^{2 -)} , an alkyl phosphine group (-PR _2, R represents an alkyl group) and a carboxyl group (-COO ^- / -COOH) the like. The second residue is one hydrophobic group. The hydrophobic group is, for example, a straight chain or branched chain alkyl group, a straight chain or branched chain alkyl group provided with a substituent, a straight chain or branched chain alkenyl group, a straight chain or branched chain alkenyl group provided with a substituent, an aromatic alkyl group, and the like.

Specifically, the organic material selects one compound or combination thereof from the following group: thiol derivatives, silane derivatives, phosphoric acid derivatives, amine derivatives and the like. The organic material may be, for example, CH ₃ (CH ₂ ) _n SH (n = 1 to 24), CH ₃ (CH ₂ ) _n C ₆ H ₄ -C ₆ H ₄ -SH (n = 0 to 12), or Thiol derivatives of CF ₃ (CF ₂ ) _n SH (n = 1 to 24), CF ₃ (CF ₂ ) nC ₆ H ₄ -C ₆ H ₄ -SH (n = 0 to 12), and for example, Silane derivatives, phosphoric acid derivatives and amine derivatives (e.g., octadecylamine) of aliphatic hydrocarbons having a chain (C1-C24) or partially fluorinated or totally fluorinated long-chain (C1-C24) to be. The above exemplified compounds may be adjusted or selected as appropriate according to the needs of the metal probe pins in actual use, and are not limited to the above exemplified compounds.

For use in the present invention is as follows. That is, in the manufacturing process of the chemical coating film, the nano coating film is coated on the surface of the various probe pins. In addition, the nano-coating film may be coated at a position of, for example, 5-15mil at the tip of the various probe pins. The nano coating film is provided with an organic nanomaterial having, for example, a non-adhesive property.

In addition, in using the principle of forming a molecular self-combination monolayer, the action force of the surface of the thin film molecules and the probe pins is relatively strong and does not easily fall off, and the surface properties are controlled by operating various kinds of dissimilar types of functional groups. Characteristics can be obtained. Thus, the nanomaterial includes a functional group derivative having a molecular self-combination film. The so-called molecular self-combining monolayer film utilizes molecular spontaneous adsorption to the surface, and one layer is provided with a monolayer molecular film of ordered nature. This allows the functional groups to have more spontaneous adsorption to advance the chemical reaction on the substrate surface. At the same time, the formed molecular self-combining monolayer becomes a terminal residue in partial contact with the outside, and the portion determines the properties of the molecular self-combining monolayer. For example, hydrophobic (or hydrophilic) or surfaces are equipped with the function of electron transfer. The above various characteristics are used to operate the probe pin, and the effect of the comparatively desirable amount measurement can be obtained.

The nano-coating film is applied to the surface of the probe pin through a variety of well-known methods such as the deposition process, the deposition process and the evaporation method of the nano-coating film (apply). The nanocoating film production process solution includes various types of functional group derivatives which are relatively preferred embodiments such as water, nonpolar organic solvents, methyl alcohol, ethyl alcohol, propyl alcohol / sulfur-alcohol derivatives, ether derivatives and phosphate derivatives.

In the following legend, although the material of the tip end of the probe pin is copper plated or rhenium-tungsten alloy, the manufacturing process solution of the nano-coating film mainly includes water, methyl alcohol, etc., but the present invention is described by way of example. Is not limited to this. When judging the life of the testing probe pin, it is determined through a change in resistance after a predetermined testing order (for example, 30,000 orders) for the probe pin. Hereinafter, the formed film based on the experimental order on the probe pin body is adsorbed by the chemical bonding method with respect to the composition and proportion of the various molecular self-combination film production process solutions. For example, thiol derivatives, phosphoric acid derivatives, silane derivatives or amine derivatives. Nonpolar organic solvents can be used, for example hexane, methylbenzene, xylene or the like. Alcohols can be used to make solvents, for example methyl alcohol, ethyl alcohol, butyl alcohol, ethylene glycol, diethylene glycol or isopropyl glycol. The amount of the solvent added may be adjusted and varied according to the manufacturing process, the environment, the type of the substrate and the combination of unequal types of the organic materials of the substrate, and the proportion of the solvent component in the following legend is particularly reliably changed. I do not express it. By conventional bonding, the amount of the organic material added to the substrate is 10 wt% or less.

Example  One

The tip end material of the testing probe pin is made of rhenium-tungsten alloy, and the manufacturing process of the nano-coated film contains methyl alcohol, ethyl alcohol, acetone and mercaptone derivative (≤10 wt%), and the increase in resistance is about 10%. The life of the probe pins increases.

Example  2

The tip end material of the probe pin is alloyed, and the manufacturing process of the nanocoated film contains methyl benzene, ethyl alginol and phosphate derivative (≤10wt%), the resistance is shown without a clear increase, and the life of the probe pin is increased. .

Example  3

The tip end material of the probe pin is alloyed, and the manufacturing process of the nano-coated film contains methyl benzene, ethyl alcohol and silane derivative (≤10wt%), the resistance increase is about 10%, and the life of the probe pin is Increases.

Example  4

The tip end material of the probe pin is alloyed, and the process solution for manufacturing the nanocoated film contains methyl benzene, ethyl alcohol and amine derivative (≦ 10 wt%), the resistance is shown without a clear increase, and the life of the probe pin is increased.

The thickness of the above-mentioned nano coating film is 1-40 nm, for example, 1-20 nm is comparatively ideal, and 1-5 nm is more preferable.

The above-described probe pin may be made of a metal material. For example, nickel, gold, copper, tungsten, rhenium, zirconium, cobalt, palladium, platinum, titanium, beryllium, or the like may be a conductive metal material or an alloy thereof. For example, rhenium-tungsten or beryllium-copper alloys. Among them, the structure of the probe pin is, for example, a metal microspring or a metal wire pin.

In addition, during the signal transmission process, when the probe pin proceeds with the signal transmission, the nano-coated film has the characteristic of the non-adhesive property of the probe pin, which causes the probe pin to have a clear contact with the exact testing position of the testing crystal grain. It makes it easier, and when the probe pin proceeds with signal transmission, it can avoid miscellaneous signals, reach clearer signal transmission, and at the same time improve the stability of testing.

In addition, the nano-coating film of the probe card disclosed in the present invention, for example, the chemical coating film manufacturing process method is formed on the probe pin nano-coating film directly on the surface of the probe pin, thereby precisely controlling the coating film thickness of the probe pin Component fixing of the coating film is required, and also the size of the printed electrical circuit board or silicon substrate and the relative distance of the probe pin. A design parameter for the precision coating membrane component fixing device is made, and thus, the present invention completes the preliminary preparation of the probe card nanocoating membrane under the premise that the original probe card structure is not changed. The same top view of the probe pin of the probe card disclosed in the invention does not result in a change due to an increase in the thickness of the nanocoating film on the tip of the probe pin.

In general, the probe pin and the probe card provided in the present invention, the nano-coating film provided has a feature that the probe pin has a non-adhesive property, and the wafer advanced manufacturing process technology of high integration, high angle of contact, density distance It can be applied and provided. In addition, it is applied to wafer testing during the advanced wafer manufacturing process in the semiconductor industry, and solves the well-known problem of coarse crystal grains. In the present invention, the probe pin of the probe card is coated on the surface of the probe pin with a nano-coating film, the probe pin is hardly made any suction force between the test grains, the probe pin has a non-adhesive property, Due to this, the cleaning frequency rate of the probe pins may be lowered, and in addition to improving the test superiority rate, the present invention also provides advantages such as an increase in the utilization rate of the testing apparatus and a reduction in the overall cost of wafer testing.

Since the present invention has already been disclosed a relatively preferred embodiment, it is not limited to the present invention. The knowledge normally provided in the technical field belonging to the present invention should be variously changed and modified within the spirit and scope which cannot be separated from the present invention. For this reason, the protection scope of the present invention is limited to the claims.

10 Board 11 Probe Pin 12 Guide Mechanism
13 Ceramic Collar 14 Probe Pin 15 Reinforcement
110 Nano Coating Film 140 Nano Coating Film

Claims (14)

A probe card comprising a substrate, a plurality of metal probe pins, and a nano coating film, the probe card providing an electrical connection to an exterior, wherein the plurality of metal probe pins are installed in a lower direction of the substrate and between the substrate and the substrate. Electrically connected, one wafer is used to make contact with the surface for testing.
The nano coating film is formed on the surface of the probe body, the thickness of the nano coating film is nanometer class, the nano coating film is composed of one organic material, the organic material is at least one first residue and at least one A second moiety, wherein the first moiety is chemically bonded to the surface of the probe pin body, the second moiety is remote from the surface of the metal probe pin, and the nano-coating layer has a non-adhesive property. And a resistance increase amount of the probe pin body having the nanocoating film on the surface thereof is relatively less than 10% relative to the resistance of the probe pin body having no nanocoating film on the surface thereof. The method of claim 1, wherein the first residue is a thiol group (-SH), alkyl sulfide group (-SR, R represents an alkyl group), alkyl disulfide group (-SSR, R represents an alkyl group), thioglycolic acid group (-SCH ₂ COOH) an amino group _{(-NH 2), -SiX 3 (} X = Cl, F, OCH 2 CH 3 , or OH), a phosphate group (-PO ₄ ^{2 -),} Ain acid group (-PO ₃ ^{2 -),} an alkyl phosphine group (-PR _2, R represents an alkyl group) and a carboxyl group (-COO ^- / -COOH) is selected from the group consisting of, wherein the second moiety is hydrophobic due to the probe card. The method according to claim 2, wherein the hydrophobic group is a straight chain or branched chain alkyl group, a straight chain or branched chain alkyl group having a substituent, a straight chain or branched chain alkenyl group, a straight chain or branched chain alkenyl group having a substituent and an aromatic alkyl group Probe card selected from the group consisting of. The probe card according to claim 2, wherein the organic material is a compound selected from the group consisting of a thiol derivative, a silane derivative, a phosphoric acid derivative and an amine derivative or a combination thereof. The method of claim 1, wherein the nano-coating film is a method formed on the surface of the metal probe pin, one molecular self-combination device forming film method is that the organic material and at least one organic solvent is formed on the surface of the metal probe Probe card. The probe card of claim 1, wherein the nano-coating film has a thickness of 1 to 40 nm. The method of claim 1, wherein the metal probe pin is made of nickel (Ni), gold (Au), copper (Cu), tungsten (W), rhenium (Re), zirconium (Zr), cobalt (Co), and palladium ( Pd), platinum (Pt), titanium (Ti), beryllium (Be), beryllium-copper alloy, rhenium-tungsten alloy, and a probe card which is a metal selected from the group consisting of the said alloy, or a combination thereof. The probe card of claim 1 further comprising one ceramic ring or one guide mechanism. A probe pin comprising a probe pin body and a nano coating film,
The probe pin body is a conductive metal probe pin, one end is electrically connected with the substrate, the other end is in contact with the contact angle of the testing component, the testing function proceeds,
The nano coating film is formed on the surface of the probe body, the thickness of the nano coating film is nanometer class, the nano coating film is composed of one organic material, the organic material is at least one first residue and at least one A second moiety, wherein the first moiety is chemically bonded to the surface of the probe pin body, the second moiety is remote from the surface of the metal probe pin, and the nano-coating layer has a non-adhesive property. And an increase in resistance of the probe pin body having the nanocoating film on the surface thereof is relatively less than 10% relative to the resistance of the probe pin body having no nanocoating film on the surface thereof. The method of claim 9, wherein the first residue is a thiol group (-SH), an alkyl sulfide group (-SR, R represents an alkyl group), an alkyl disulfide group (-SSR, R represents an alkyl group), thioglycolic acid group (-SCH ₂ COOH) an amino group _{(-NH 2), -SiX 3 (} X = Cl, F, OCH 2 CH 3 , or OH), a phosphate group (-PO ₄ ^{2 -),} Ain acid group (-PO ₃ ^{2 -),} an alkyl phosphine group (-PR _2, R is an alkyl group shown) and a carboxyl group (-COO ^- / -COOH) is selected from the group consisting of, wherein the second moiety is hydrophobic due to the probe pin. The method according to claim 10, wherein the hydrophobic group is a straight chain or branched chain alkyl group, a straight chain or branched chain alkyl group having a substituent, a straight chain or branched chain alkenyl group, a straight chain or branched chain alkenyl group having a substituent and an aromatic alkyl group Probe pin selected from the group consisting of. 10. The probe pin of claim 9, wherein the organic material is a compound selected from the group consisting of thiol derivatives, silane derivatives, phosphoric acid derivatives and amine derivatives, or a combination thereof. The probe pin of claim 9, wherein the nanocoating layer has a thickness of 1 to 40 nm. 10. The method of claim 9, wherein the metal probe pin is made of nickel (Ni), gold (Au), copper (Cu), tungsten (W), rhenium (Re), zirconium (Zr), cobalt (Co), palladium ( Pd), platinum (Pt), titanium (Ti), beryllium (Be), beryllium-copper alloy, rhenium-tungsten alloy, and a probe pin which is a metal or combination thereof selected from the group consisting of an alloy of said metal.

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