201122125 六、發明說明： 【發明所屬之技術領域】 本發明是有關於一種鑛膜的方法以其產品，特別是才t 一種形成金屬玻璃鍍膜的方法及其產品。 【先前技術】201122125 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a method for depositing a mineral film, a product thereof, and particularly a method for forming a metallic glass coating film and a product thereof. [Prior Art]
金屬玻璃（metallic glass)」是由各種特定元素混 合溶煉再快速冷卻凝固而成的非結晶結構合金，又稱為 非晶質合金」，因其具有高強度、耐磨耗之優異的機械特 質，並於適當的溫度下具有超塑性成型之特性，且因其缺 乏晶界，所以可於較低的變形壓力下進行細微的充填成 型’所以廣受各界的重視。 金屬玻璃發展至今，锆基金屬玻璃（Zirc〇nium based metallic glass)除了具有極佳的抗拉強度 tensile strength )、抗 f 延展性（G〇〇d 叫 ductility)、鬲硬度（High以以的“）等特性之外，同時 還具有抗菌力、抗敍性、耐磨耗、高勒度等特性而可以 期待用於例如燃料電池的金屬雙極板、醫療用手術刀具、 產印设件等方面，特別是’若能在大面積的基材，或是 璃他特殊態樣的基材上形成厚薄、組成均—的锆基金屬玻 、進而形成具有金屬玻璃鍍膜的複合材料，將更具 钮乏而實際的工業、商業應用價值，這也成為業界、學 界努力研究的方向。 目前， 為採用單— 鑛覆形成錯基金屬玻璃鍍膜的方式’大致可分 複合乾材進行鍍膜與採用多數獨立靶材進行鍍 201122125 膜二大類·’採用單-複合㈣進行鑛膜的技術，例如美國 專利第 7282123 號「C0MP0SITE spunER target PHOSPHOR DEPOSITION METHOD」案，較易於掌控鍍膜過 程，進而得到鑛膜厚度均—、且較大面積的鑛肖，但缺點 在於複合靶材的設計、製作難度極高；而採用多數獨立靶 材進行鍍膜的技術，例如美國專利第4965139號 「CORROSION RESISTANT METALLIC GLASS COATINGS」案， 雖然在靶材的設計、製作較為單純，但相對的，多靶源於 鍍膜的過程中，鍍膜厚度的均勻性控制不易，同時，也較 無法¥握得到大面積的金屬玻璃錄膜。 因此，雖然鍅基金屬玻璃具有極佳的材料特性，但仍 需要業界不斷地創新努力，提出具有實際商業生產價值的 生產方法，俾供產業發展。 【發明内容】 因此，本發明之目的，即在提供一種多獨立把材製作 錯基金屬玻璃鍍膜的方法。 此外，本發明之另一目的，在於提供一種用多獨立靶 材製作鍅基金屬玻璃鍍膜所產製的產品。 於是，本發明一種多獨立靶材製作锆基金屬玻璃鍍膜 的方法，包含以下三步驟。 首先於一鍍膜設備中準備間隔設置的一主靶材，及複 數副乾材’其中’該絲材是Zr所構成，該複數副把材是 選自Al、Ni、Cu、Ti、V、Mg ’及此等之組合所構成。 接著將一清潔後的基材置於該鍍膜設備中，並控制該 201122125 鍍膜設備成—具有預定氣氛的高真空腔壓。 數㈣絲材㈣電衫1安培〜5安培，且該複 的乾電流不為0且不大於3安培激發該主㈣ 二X Μ Ιε材的組成π素至該基材上形成該錯基金屬玻璃 鍍膜。 者本發明一種具有錯基金屬玻璃鍍膜的複合材A metallic glass is a non-crystalline structural alloy obtained by mixing and melting various kinds of specific elements and then rapidly cooling and solidifying. It is also called an amorphous alloy because of its high strength and wear resistance. And it has the characteristics of superplastic forming at an appropriate temperature, and because of its lack of grain boundaries, it can be finely filled under a low deformation pressure, so it has received wide attention from all walks of life. Since the development of metallic glass, Zirciumium based metallic glass has excellent tensile strength, anti-f ductility (G〇〇d called ductility), and hardness (High). In addition to other characteristics, such as antibacterial, anti-narrative, abrasion resistance, high latitude and the like, it can be expected to be used for, for example, metal bipolar plates for fuel cells, medical surgical tools, and printed devices. In particular, 'If you can form a thick, uniform composition of zirconium-based metal glass on a large-area substrate or a special surface of the glass, and then form a composite material with a metallic glass coating, the button will be more The lack of practical industrial and commercial application value has become the direction of industry and academic research. At present, the method of forming a fault-based metallic glass coating by using single-mineral coating can be roughly divided into composite dry materials for coating and most independent. The target is plated with 201122125. Two types of membranes are used. 'Single-composite (4) is used to carry out mineral film technology. For example, US Patent No. 7282123 "C0MP0SITE spunER target PHOSPHOR DEPOSITION "Method", it is easier to control the coating process, and then obtain the mineral film thickness - and a larger area of the mine, but the disadvantage is that the composite target design and production is extremely difficult; and the use of most independent targets for coating technology For example, in the case of "CORROSION RESISTANT METALLIC GLASS COATINGS" in the US Patent No. 4965139, although the design and production of the target are relatively simple, relatively, the multi-target source is not easy to control the uniformity of the thickness of the coating during the coating process. It is also less able to get a large area of metal glass film. Therefore, although bismuth-based metallic glass has excellent material properties, it still requires continuous innovation in the industry to propose production methods with practical commercial production value for industrial development. SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a method of making a mis-based metallic glass coating on a multi-independent material. Further, another object of the present invention is to provide a product produced by producing a bismuth-based metallic glass coating film using a plurality of independent targets. Thus, the method for producing a zirconium-based metallic glass coating film of a multi-independent target of the present invention comprises the following three steps. First, a primary target material is prepared in a coating device, and a plurality of secondary dry materials are formed, wherein the wire is composed of Zr, and the plurality of secondary materials are selected from the group consisting of Al, Ni, Cu, Ti, V, and Mg. 'and the combination of these. A cleaned substrate is then placed in the coating apparatus and the 201122125 coating apparatus is controlled to have a high vacuum chamber pressure having a predetermined atmosphere. Number (4) wire (4) electric shirt 1 amp ~ 5 amps, and the dry current of the complex is not 0 and not more than 3 amps to excite the composition of the main (four) two X Μ Ι ε material to form the wrong base metal on the substrate Glass coating. Composite material with wrong base metal glass coating according to the invention
带f * 包*总IIWith f * package * total II
材’及一以多數獨立靶材控制靶電流方式形 成於6亥基材上的錯基金屬玻璃鍍膜，其中，該錯基金屬玻 璃锻膜的，、且成& ZraKbMcNd ,K、M、N選自於Al、Ni、Cu、 Τι v、MS，及此等之組合，且錘與κ之原子半徑比不小於 ，以原子組成百分比計，4〇&$3〇，2〇^b^i〇，3〇^ 20 > 10 ^ 5 ° 本發明之功效在於：以控制靶電流激發多獨立靶材的 方式製作錯基金屬玻璃鍍膜，可簡易地控制所成之锆基金 屬玻璃鑛膜的膜厚與均勻度，適合實際量產需求。 【實施方式】 有關本發明之前述及其他技術内容、特點與功效，在 以下配合參考圖式之二個較佳實施例的詳細說明中，將可 清楚的呈現。 在本發明被詳細描述之前，要注意的是，在以下的說 明内容中’類似的元件是以相同的編號來表示。 參閱圖1、圖2,本發明多獨立靶材製作鍅基金屬玻璃 鍍膜的方法的一第一較佳實施例，是製作如圖2所示的具 有鍅基金屬玻璃鍍膜的複合材料2。 201122125 先參閱圖2，該具有鍅基金屬玻璃鍍膜的複合材料2包 含一基材21，及一層錯基金屬玻璃鑛膜22。 该基材21可以是陶瓷、高分子材料、不銹鋼、鋁，戈 鋁合金等做為材料構成，較佳地，該基材是316L不銹鋼、 1***、2***、3***、5***系列的鋁合金（***表其中任意 號）。 忍 該鍅基金屬玻璃鍍膜22以多數獨立靶材控制靶電流方 式形成於該基材21上（此過程將於後詳述），組成表示為 ZraKbMcNd ’ 其中，K、Μ、N 县；$ q _l 六τ IV Μ Ν疋選自與Cr具有相同體心立方結 構且屬於週期表中ΠΑ、IVA、VA、遍、！〇族的元素，較 佳地，K、M、N是選自^、…、^、^、^，等的元 素，或此等元素所組成的合金，例如Ni v、CuTi等且錯 與K之原子半徑比不小於12%，以原子組成百分比計，邮 a^3〇>20^b^l〇i30^c^2〇, 錯基金屬玻璃鍍膜22的組成是ZwL sM|dN7 5，κ是，Μ 是 NiV ， Ν 是 Α1 。 ^ 7饲立祀材製作锆基金屬玻璃鍍塘 的方法的第一較佳實施例’是先進行步驟u，於一鍍膜認 備\中準備間隔設置的-主把材3卜及複數副無材^，其 中’該主⑨材31是Zr所構成，該複數副崎犯是選自與 鉻具有相同體心立方結構且屬於週期表中Μ、Μ、Η、 ^、㈣族的元素或此等元素的組成所成的合金所構成， 較佳地，是選自^、〜^，，等元素’或此等 儿素的組合所成的合金，例如，、⑽等所構成；在本 201122125 貫施例中，該二副無材32分別是a 1、CuTi、Ni V所構成。 接著進行步驟12，將該基材21清潔後置於該鍍膜設備 3胃中，並控制該鍍膜設備3成一具有預定氣氛的高真空腔 壓，更詳細地說，是置入該基材21後，將該鍍膜設備3進 行抽氣作業至腔壓保持低於2xl〇-5 T〇rr後，通入氬氣並控 制腔屋在1. GxlG 2 TQrr l. Qx1G.3Tqi^數次，最後，維持該 具有預定氣氛的高真空腔壓是分別以25〜35sccm、2〜a material and a fault-based metallic glass coating formed on a 6-well substrate by a plurality of independent targets, wherein the mis-base metal glass is forged, and is & ZraKbMcNd, K, M, N It is selected from the group consisting of Al, Ni, Cu, Τι v, MS, and the like, and the atomic radius ratio of the hammer to κ is not less than, in terms of atomic composition percentage, 4〇&$3〇,2〇^b^i 〇, 3〇^ 20 > 10 ^ 5 ° The effect of the invention is to produce a mis-base metal glass coating by controlling the target current to excite multiple independent targets, and to easily control the formed zirconium-based metallic glass ore film. Film thickness and uniformity, suitable for practical mass production needs. The above and other technical contents, features and effects of the present invention will be apparent from the following detailed description of the preferred embodiments of the invention. Before the present invention is described in detail, it is to be noted that in the following description, similar elements are denoted by the same reference numerals. Referring to Figures 1 and 2, a first preferred embodiment of the method of making a bismuth-based metallic glass coating of a plurality of independent targets of the present invention is to produce a composite 2 having a bismuth-based metallic glass coating as shown in Figure 2. Referring to Figure 2, the composite material 2 having a bismuth-based metallic glass coating comprises a substrate 21 and a layer of a mis-base metallic glass mineral film 22. The substrate 21 may be made of ceramics, polymer materials, stainless steel, aluminum, aluminum alloy, etc., preferably, the substrate is 316L stainless steel, 1***, 2***, 3*** , 5*** series of aluminum alloy (*** any of them). The bismuth-based metallic glass coating 22 is formed on the substrate 21 by controlling the target current by a plurality of independent targets (this process will be described later in detail), and the composition is expressed as ZraKbMcNd 'where K, Μ, N count; $ q _l Sixτ IV Μ Ν疋 is selected from the same body-centered cubic structure as Cr and belongs to the periodic table of ΠΑ, IVA, VA, and ubi, The element of the steroid, preferably, K, M, N are elements selected from the group consisting of ^, . . . , ^, ^, ^, etc., or an alloy composed of such elements, such as Ni v, CuTi, etc. The atomic radius ratio is not less than 12%, and is expressed as a percentage of atomic composition, a^3〇>20^b^l〇i30^c^2〇, and the composition of the wrong-base metallic glass coating 22 is ZwL sM|dN7 5 κ is, Μ is NiV, Ν is Α1. ^ 7 The first preferred embodiment of the method for producing a zirconium-based metallic glass plating pond by the coffin is to perform the step u first, and prepare the interval in a coating preparation - the main material 3 and the plural a material ^, wherein 'the main 9 material 31 is composed of Zr, and the plural sub-sand is selected from an element having the same body-centered cubic structure as chromium and belonging to the group of Μ, Μ, Η, ^, (4) in the periodic table or It is composed of an alloy formed by the composition of an element, and is preferably an alloy selected from the group consisting of elements such as ^, ~^, or a combination of these elements, for example, (10), etc.; in this 201122125 In the example, the two sub-materials 32 are composed of a 1, CuTi, and Ni V, respectively. Next, in step 12, the substrate 21 is cleaned and placed in the stomach of the coating device 3, and the coating device 3 is controlled to have a high vacuum chamber pressure having a predetermined atmosphere, and more specifically, after the substrate 21 is placed. After the pumping device 3 performs the pumping operation until the chamber pressure is kept below 2xl〇-5 T〇rr, the argon gas is introduced and the chamber is controlled at 1. GxlG 2 TQrr l. Qx1G.3Tqi^ several times, finally, Maintaining the high vacuum chamber pressure with a predetermined atmosphere is 25~35sccm, 2~
Hsccm、1〇〜20sccm的流量通人Ar(g)、N2(g)，與d⑴並 控制壓力在i.oxio-2 Tminr，在本例中，奸 u) N2(g”與C2H2(g)的通入流量分別是3〇sc⑽、usccm 與15Sccm。另外，本發明適用於進行維持該高真空腔壓的 氣體還可以選自He、Ne、Ar、Kr、Xe或N2。 最後，進行步驟13,控制該主乾材31的起電流是】安 培〜5安培’且該三副靶材32的靶電流不為〇且不大於3 安培，激發該絲材31與該等材32的組成元素沈積 至》亥基材21上形成㈣基金屬柄㈣22。在本例中控制 化構成的主乾材32的乾電流是。.i安培〜3安培，心 的綱的讓是〇」安培〜2安培，⑽構成的副 ㈣32的乾電流是。」安培〜2安培，Νιν構成 32的靶電流是〇 1安典〜9 ^^λ^Μ τ* ° 。，而激發其組成元素形成 該錯基金屬破璃链膜22。 ^閱附件^附件2,附件1是上述以本發明多獨立把 材製作錯基金屬玻璃㈣的方法的第_較佳實施例製作出 的複合材料2的Χ謂分析結果，㈣2収·分析任 201122125 果，由附件1 ' 2可以證實以本發明多獨立靶材製作锆基金 屬玻璃鍍膜的方法的製作出的鍅基金屬玻璃鍍膜22為非晶 結構’亦即確實達成本發明以多元獨立靶材，配合控制靶 電流而製作錐基金屬玻璃鍍膜的創作目的；另外，製作出 的複合材料2在鹽霧試驗中腐蝕液為5%NaC1中試驗72小 時不腐蝕，在極化曲線1ΜΗΑ〇4腐蝕液中Ic〇rr=8 7xi〇_ A/cm2，參照一般的3I6L不鏽鋼試片Ic〇rr=47 χ 1〇- A/cm2，有明顯的抗腐姓能力提升，其次，對金黃色葡萄球 菌、綠濃桿菌及大腸桿菌減菌測試結果達99· 9%，達到抗 菌要求，適用於燃料電池、醫療用具，及3C產品殼件等各 產業中。 參閱圆4、圖5,本發明多獨立乾材製作錯基金屬玻璃 鍍膜的方法的-第二較佳實施例，是製作如_ 5所示的具 有錯基金屬玻璃鍍膜的複合材料5。 先參閱圖5，該具有錯基金屬玻璃鍍膜的複合材料5的 第一較佳實施例與該第一較佳實施例製得的複合材料2相 類似，但不同的是該基材51與該錯基金屬玻璃鍍膜Μ之 間還具有-導電性合金構成且膜厚在G1〜G.3㈣的底層 鑛膜52,職層㈣52的組成元素與㈣基金屬破璃鑛膜 53的組成元素相同’藉此’使該锆基金屬玻璃鑛膜μ與該 基材51間獲得更良好且穩定的結合。 參閲圆4’ S&合參關3,本發明多獨立㉒材製作許其 金屬玻璃鍍膜的方法的第二較佳實施例是先進行步驟^二 將該基材51清潔後置於鑛膜設備3中，並用包含^，及選 201122125 . 自於週期表中船族、WB、族' VB族之元素或此等之植 合構成的複合乾材，在該基材51上鍍膜形成該底層鑛膜 52,在此，該複合乾材3卜32的組成是與後續欲形成的錯 基金屬玻璃鍍膜53的組成相同；由於此步驟乃一般形成合 金鍍膜的製程，在此不多加詳述。 接著進行步驟42,於鍍膜設備3中準備間隔設置的一 主把材3卜及複數副㈣32，其中，該主託材31是^所 構成，該複數副靶材32是選自與Cr具有相同體心立方結 * 構且屬於週期表中11 A、脱、VA、赐、DIB族的元素或此 等元素的組成所成的合金所構成，較佳地，是選自A1、 Ni、Cu、Τι、V、Mg等元素，或此等元素的組合所成的合 金例如N i V、CuT i等所構成；在本實施例中，該三副把 . 材32分別是Al、CuTi、NiV所構成。 接著進行步驟43,將步驟41得到的鍍有該底層鍍膜 52的基材51置於該鍍膜設備3中，並控制該鍍膜設備3成 一具有預定氣氛的高真空腔壓；更詳細地說，是置入鍍有 • 該底層鍍膜52的基材51後，將該鍍膜設備3進行抽氣作 業至腔壓保持低於2xl(T5 Torr後，通入氬氣並控制腔壓在 1·0χ10 T〇rr〜1. 0x10-3T〇rr數次，最後，維持該具有預定 氣氛的高真空腔壓是分別以25〜35sccm、2〜17sccm、1〇〜 20sccm的流量通入紅⑴、沁“），與C2ih(g)並控制壓力在 1. 0χ1(Γ2 Torr 〜1· 〇χι〇-3Τ〇ΓΓ，在本例中，Ar (g)、N2(g)，與 C2H2U)的通入流量分別是3〇Sccm、12sccm與15sccra。另 外’本發明適用於進行維持該高真空腔壓的氣體還可以選 201122125 自 He、Ne、Ar、Kr、Xe 或…。 最後’進行步驟44，控制該主起材31的耗電流是i安 培〜5安培’且該三副㈣32的乾電流不為0且不大於3 =Γ該主乾材31與該等陶32的組成元素沈積 _鍍膜52上形成該錯基金屬玻璃鑛膜53，製得該複 合材料5。在本例中控制Zr構成的主乾材32的乾電：是 〇. 1安培〜3安培，A1構成的副乾材32㈣電流是〇」安 ° 2安培CuTi構成的副乾材32的乾電流是〇 ^安择〜Hsccm, 1〇~20sccm flow rate through Ar(g), N2(g), and d(1) and control pressure in i.oxio-2 Tminr, in this case, u) (2) and C2H2(g) The flow rates of the inlets are 3 〇 sc (10), usccm and 15 Sccm, respectively. In addition, the gas suitable for maintaining the high vacuum chamber pressure of the present invention may also be selected from He, Ne, Ar, Kr, Xe or N2. Finally, proceed to step 13. The starting current of the main material 31 is controlled to be ampere ~ 5 amps and the target current of the three sub-targets 32 is not 〇 and not more than 3 amps, and the constituent elements of the wire 31 and the material 32 are excited to be deposited. The (four) base metal handle (four) 22 is formed on the base substrate 21. The dry current of the trunk material 32 which is controlled in this example is: i amp ~ 3 amps, and the heart of the core is 〇 amp ~ 2 amps (10) The dry current of the sub (4) 32 is composed." Ampere ~ 2 amps, Νιν constitutes the target current of 32 is 〇1 安典~9^^λ^Μ τ* °, and the constituent elements are excited to form the wrong base metal. Broken glass chain film 22. ^Accessory ^Attachment 2, Annex 1 is the above-described preferred embodiment of the method for producing a mis-base metal glass (4) from the multi-independent material of the present invention. The results of the analysis of the composite material 2, (4) 2, and analysis, 201122125, can be confirmed by the method of Annex 1 '2, the method for preparing the zirconium-based metallic glass coating film of the multi-independent target of the present invention is the bismuth-based metallic glass coating 22 The amorphous structure 'is indeed achieving the purpose of making the cone-based metallic glass coating with the multi-component independent target and the control target current; and the composite material 2 is 5% NaC1 in the salt spray test. In the middle test, it does not corrode for 72 hours. In the polarization curve 1ΜΗΑ〇4 corrosive solution, Ic〇rr=8 7xi〇_ A/cm2, refer to the general 3I6L stainless steel test piece Ic〇rr=47 χ 1〇- A/cm2, there is Obvious anti-corruption ability improvement, and secondly, the results of bacteriostatic test for Staphylococcus aureus, Pseudomonas aeruginosa and Escherichia coli reached 99.9%, meeting antibacterial requirements, suitable for fuel cells, medical appliances, and 3C product shells, etc. In the various industries, referring to the circle 4 and FIG. 5, the second preferred embodiment of the method for producing a mis-base metal glass coating of the multi-independent dry material of the present invention is to produce a composite having a mis-base metal glass coating as shown in FIG. Material 5. See first 5. The first preferred embodiment of the composite material 5 having a fault-based metallic glass coating is similar to the composite 2 produced in the first preferred embodiment, but differs in the substrate 51 from the base metal. The glass coated crucible also has an underlying mineral film 52 composed of a conductive alloy and having a thickness of G1 to G.3 (4), and the constituent elements of the (4) 52 layer are the same as those of the (4)-based metallic frag ore film 53. A better and stable bond between the zirconium-based metallic glass ore film μ and the substrate 51 is obtained. Referring to the round 4' S& ginseng 3, the method for producing a multi-independent 22 material of the present invention for making a metallic glass coating In the second preferred embodiment, the substrate 51 is cleaned and placed in the mineral film apparatus 3, and the inclusion of ^, and 201122125. From the periodic table, the ship family, the WB, the family 'VB family A composite dry material composed of elements or such a combination is formed on the substrate 51 to form the underlying mineral film 52. Here, the composition of the composite dry material 3b is a subsequent base metal glass coating to be formed. The composition of 53 is the same; since this step is a general process for forming an alloy coating, it is not added here. Detailed. Next, in step 42, a main material 3 and a plurality of sub-fours 32 are disposed in the coating device 3, wherein the main sub-material 31 is formed, and the plurality of sub-targets 32 are selected from the same as Cr. The body-centered cubic structure is composed of an element of the 11 A, VA, VA, and DIB groups of the periodic table or an alloy formed by the composition of the elements, preferably, is selected from the group consisting of A1, Ni, Cu, An element such as Τι, V, Mg or the like, or an alloy of such elements, such as N i V, CuT i or the like; in the present embodiment, the three pairs of materials 32 are Al, CuTi, NiV, respectively. Composition. Next, in step 43, the substrate 51 plated with the underlying plating film 52 obtained in the step 41 is placed in the coating device 3, and the coating device 3 is controlled to have a high vacuum chamber pressure having a predetermined atmosphere; more specifically, After the substrate 51 coated with the underlying plating film 52 is placed, the coating device 3 is evacuated until the chamber pressure is kept below 2xl (T5 Torr, argon gas is introduced and the chamber pressure is controlled at 1·0χ10 T〇). Rr~1. 0x10-3T〇rr several times, and finally, maintaining the high vacuum chamber pressure having a predetermined atmosphere is to pass red (1), 沁 ") at a flow rate of 25 to 35 sccm, 2 to 17 sccm, and 1 to 20 sccm, respectively. And C2ih(g) and control the pressure at 1. 0χ1 (Γ2 Torr 〜1· 〇χι〇-3Τ〇ΓΓ, in this case, Ar (g), N2(g), and C2H2U) 3〇Sccm, 12sccm and 15sccra. In addition, the present invention is applicable to the gas for maintaining the high vacuum chamber pressure, and may also select 201122125 from He, Ne, Ar, Kr, Xe or .... Finally, proceed to step 44 to control the main The current consumption of the material 31 is i ampere ~ 5 amps' and the dry current of the three pairs (four) 32 is not 0 and not more than 3 = Γ the trunk material 31 and the like The constituent element deposition of 32 is formed on the coating film 52 to form the fault-based metallic glass ore film 53 to obtain the composite material 5. In this example, the dry electricity of the trunk material 32 composed of Zr is controlled: 〇. 1 amp ~ 3 amps The dry current of the sub-dry material 32 (four) composed of A1 is the dry current of the sub-dry material 32 composed of 2 ° ampere CuTi is 〇 ^ 安 choose ~
2安培’NiV構成的副靶材32的靶電流是。」安培〜：安 培’而激發其組成元素形成該錯基金屬玻璃鑛膜53。 、上述以本發明多獨立把材製作錯基金屬玻璃鑛膜的方 法的第二較㈣施例製作出的複合材料5，不但明顯地提升 抗腐飯能力，同時達到抗菌要求，而且該底層鑛膜Μ使該 錯基金屬玻璃㈣53與該基材51間獲得更良好且穩定的 結合，特別是當基材是由例如陶究、高分子材料等所構成The target current of the sub-target 32 composed of 2 ampere 'NiV is. "Ampere ~: Amperes" excites its constituent elements to form the mis-based metallic glass ore film 53. The composite material 5 produced by the second (four) embodiment of the method for producing a mis-base metallized glass film by using the multi-independent material of the present invention not only obviously improves the anti-corrosion rice ability, but also achieves the antibacterial requirement, and the bottom layer ore The film 获得 obtains a better and stable bond between the mis-based metal glass (IV) 53 and the substrate 51, especially when the substrate is composed of, for example, ceramics, polymer materials, and the like.
時’藉著底層鑛膜52更可以實質使得錯基金屬玻璃鑛膜53 與基材51獲得更穩固的材料結合。 值知提的疋，在本第二實施例中，該底層鍍臈52的 構成元素與該锆基金屬玻璃鍍膜53相同，故可在同一鍍膜 設備3中，採用相同的主靶材31與副靶材犯進行製程， 也就疋，先在該基材上以一般鍍膜製程形成該底層鍍膜52 金鍍膜）後，再通入製程氣體紅⑴、N2(g)，與d⑴ 成高真空腔壓，最後以控制靶電流的方式在該底層鍍膜52 上形成該錯基金屬玻璃鍍膜53,而得到本發明具有錯基金 10 201122125 屬玻璃鍍膜的複合材料5。 综上所述，本發明多獨立靶材製作錯基金屬玻璃鍍膜 的方法與現行採用多數獨立靶材進行鍍膜的方法相比不 但可簡易地控制所成之锆基金屬玻璃鍍膜的膜厚與均勻 度，且適於大尺寸製程並降低製程成本；依本發明多獨立 靶材製作锆基金屬玻璃鍍膜的方法所製作出的具有鍅基金 屬玻璃鍍膜的複合材料，不但提升抗腐蝕能力，且達到抗 菌要求，更改進了鍍膜與基材間的結合度，可適用的產= • 涵蓋燃料電池、醫療用具，及3C產品殼件等，故確實達成 本發明之目的。 惟以上所述者，僅為本發明之較佳實施例而已，當不 能以此限定本發明實施之範圍，即大凡依本發明申請專利 ㈣及發明說明内容所作之簡單的等效變化與修飾’皆仍 屬本發明專利涵蓋之範圍内。 【圖式簡單說明】 _ 1是-流程圖’說明本發明-種多獨立㈣製作鍅 &金屬玻璃鍍膜的方法的-第-較佳實施例； ° 圖2是一剖視示意圖，說明以本發明第一較佳實施例 製得的具有鍅基金屬玻璃鍍膜的複合材料； 圖3是-示意圖，說明實施本發明多獨立乾材製作錯 基金屬玻璃鍍膜的方法的第—較佳音 权佳實％例時，使用的鍍膜 設備與主靶材、副靶材的配置狀况； 、 圖4是一流程圖，說明束絡日日 . 乃尽發明—種多獨立靶材製作錯 基金屬玻璃鍍膜的方法的-第二較佳實施例；及 201122125 ffl 5是-剖視示意圖，說明以本發明的第二較佳實施 例製得的具有锆基金屬玻璃鍍膜的複合材料。 【附件簡單說明】 附件1是一 X-ray分析，說明以本發明的第一較佳實 施例所製得的具有锆基金屬玻璃鍍膜的複合材料的晶體結 構；及 日日 例^件2是—™分析，說明以本發明的第—較佳實施 製得的具有錯基金屬玻璃㈣的複合材料的晶體結By the bottom layer of the mineral film 52, the base metal film 53 can be substantially combined with the substrate 51 to obtain a more stable material. In the second embodiment, the constituent elements of the underlying rhodium 52 are the same as those of the zirconium-based metallic glass coating film 53, so that the same main target 31 and the sub-substrate can be used in the same coating apparatus 3. The target is subjected to a manufacturing process, that is, the underlying coating film 52 is formed on the substrate by a general coating process, and then the process gas red (1), N2 (g) is introduced, and the d(1) is subjected to a high vacuum chamber pressure. Finally, the fault-based metallic glass coating film 53 is formed on the underlying coating film 52 in such a manner as to control the target current, thereby obtaining the composite material 5 having the glass coating film of the wrong fund 10 201122125 of the present invention. In summary, the method for fabricating a mis-based metallic glass coating film of the multi-independent target of the present invention can not only easily control the film thickness and uniformity of the zirconium-based metallic glass coating film compared with the current coating method using most independent targets. Degree, and suitable for large-scale process and reduce process cost; the composite material with bismuth-based metallic glass coating prepared by the method for preparing zirconium-based metallic glass coating by multiple independent targets according to the present invention not only improves corrosion resistance, but also achieves The antibacterial requirement improves the degree of bonding between the coating and the substrate, and the applicable product = • covers fuel cells, medical appliances, and 3C product shells, etc., so the object of the present invention is achieved. However, the above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto, that is, the simple equivalent change and modification made by the patent application (four) and the description of the invention. All remain within the scope of the invention patent. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 2 is a cross-sectional view showing the present invention in a multi-independent (four) method of fabricating a tantalum & metal glass coating film; The composite material having the bismuth-based metallic glass coating film prepared by the first preferred embodiment of the present invention; FIG. 3 is a schematic view showing the first preferred method for implementing the method for fabricating the mis-based metallic glass coating of the multi-independent dry material of the present invention. In the case of the actual example, the arrangement of the coating equipment and the main target and the sub-target are used; and FIG. 4 is a flow chart illustrating the day of the beam. It is the invention of the multi-independent target material to make the wrong base metal glass. A second preferred embodiment of the coating method; and 201122125 ffl 5 is a cross-sectional view showing a composite material having a zirconium-based metallic glass coating film produced by the second preferred embodiment of the present invention. [Attachment of the attachment] Annex 1 is an X-ray analysis illustrating the crystal structure of a composite material having a zirconium-based metallic glass coating film produced by the first preferred embodiment of the present invention; and - TM analysis, illustrating the crystal knot of a composite material having a mis-based metallic glass (IV) prepared by the first preferred embodiment of the present invention
12 201122125 【主要元件符號說明】 11 步驟 41 步驟 12 步驟 42 步驟 13 步驟 43 步驟 2 具有鍅基金屬玻璃 44 步驟 鍍膜的複合材料 5 具有锆基金屬玻璃 21 基材 鍍膜的複合材料 22 锆基金屬玻璃鍍膜 51 基材 3 鍍膜設備 52 底層鍍膜 31 主乾材 53 鍅基金屬玻璃鍍膜 32 副靶材12 201122125 [Explanation of main component symbols] 11 Step 41 Step 12 Step 42 Step 13 Step 43 Step 2 Composite material with bismuth-based metallic glass 44 step coating Composite material with zirconium-based metallic glass 21 substrate coating 22 Zirconium-based metallic glass Coating 51 Substrate 3 Coating Equipment 52 Underlying Coating 31 Main Material 53 Silicon-based Metallic Glass Coating 32 Sub-Target
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