TW201115666A - Testing platform and method for properties of process cooling machine - Google Patents

Testing platform and method for properties of process cooling machine Download PDF

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TW201115666A
TW201115666A TW98136131A TW98136131A TW201115666A TW 201115666 A TW201115666 A TW 201115666A TW 98136131 A TW98136131 A TW 98136131A TW 98136131 A TW98136131 A TW 98136131A TW 201115666 A TW201115666 A TW 201115666A
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heat
temperature
evaporator
flow
test platform
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TW98136131A
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Chinese (zh)
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TWI423363B (en
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Fu-Jen Wang
Yao-Jun Wang
Jian-Wei Kao
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Nat Univ Chin Yi Technology
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Abstract

The present invention relates to a testing platform and method for properties of a process cooling machine. Primarily, it may adjust the amount of load to meet variations of stimulations for actual loads, and precisely test the cooling capacity of a process cooling machine. With a testing platform of the process cooling machine, the temperatures and amounts for cooling water flowing out of or into an inlet or outlet thereof can be measured to obtain the data of cooling capacity of the process cooling machine, wherein a differential pressure device can be used to rectify flow rate and ensure the initiation of a heating device for evaporator heat capacity with sufficient flow rate in cooperation with an electricity protecting device so that the heating device can be prevented from damages of overheating or idle-running. Besides, to avoid any measurement errors of temperatures of cooling water flowing out of or into an inlet or outlet of the process cooling machine, a mixing device and an expansion water tank are particularly provided to mix the cooling water averagely to reduce uneven distribution of temperatures and also to exhaust the air inside piping to prevent piping and a pump from cavitations. Still, the testing platform of the process cooling machine may not only test precisely the capacity of the evaporator but also switch the linked piping to directly measure the capacity of a condenser of the cooling machine. Accordingly, the experimental tests can be substantially improved in speed convenience and accuracy.

Description

201115666 六、發明說明: [0001} 【發明所屬之技術領域】 , 本發明係有關於一種製程冷卻機之性能測試平台及 其測試方法,尤其是指一種針對高科技業的高冷卻用電 比例與製程溫度特性,於電能源與恆溫控制測試,以能 了解製程冷凍機之性能與系統特性,分析冷卻的高溫、 高熱製程流體’以能改良製程冷卻機系統,將有效削減 電能的消耗壓縮功損失’節電空間可觀,不僅檢測單位 產品用電,同時監測製程冷卻機性能效率,而在其整艘 施行使用上更增實用功被特牲的製程冷卻機之性能測試201115666 VI. Description of the invention: [0001] [Technical field to which the invention pertains] The present invention relates to a performance test platform for a process cooling machine and a test method thereof, and more particularly to a high cooling power consumption ratio for a high-tech industry. Process temperature characteristics, in electrical energy and constant temperature control test, to understand the performance and system characteristics of the process freezer, analyze the cooling high temperature, high heat process fluid 'to improve the process cooling system, will effectively reduce the power consumption of compression work loss 'The power saving space is considerable, not only to test the power consumption of the unit products, but also to monitor the performance efficiency of the process cooling machine, and to test the performance of the process cooling machine which is more practical and practical in the whole ship.

平台及其測試方法創新設汁者Vi· U0- VPlatform and its testing methods, innovative juicer Vi· U0- V

[先前技術] [0002] 按,伴隨自然資瀑極限化與限碳時代-的到來,歐美 等先進國家採取的因應策略愈見積極;而許多績優國際 企業亦亟思清潔生產與減量技術弟移跨國合作的可能性 ’以行動來達到抒緩日益壓力與減少 溫室氣艎排放《的承諾焱―綠内,近年來二- ί ||+1 · / '1 臨電ab源的開發曰益困難,而頻仍的增設電廠亦曝露出 部分區域電能源不足的事實;復加以製造業為主的工業[Prior Art] [0002] According to the arrival of the limit of natural resources and the carbon-limited era, the response strategies adopted by advanced countries such as Europe and the United States have become more active. Many international companies have also considered the clean production and the reduction of technology. The possibility of cross-border cooperation 'to achieve the goal of alleviating increasing pressure and reducing greenhouse gas emissions by action 焱-Green, in recent years two- ί || +1 · / '1 The development of the source of the ab source is difficult And the frequent addition of power plants also exposed the fact that some areas have insufficient electricity and energy;

重大產業投資案陸續啟動,同時環保部0也已將電能源 及二氧化碳排放列為審查重點項目。因此在可見的未來 ,能源利用的效率提升等議題,誠屬企業當務之急。我 國於時空因素分佈不均,天然資源短缺;復加近年全球 氣候異常變化,導致資源短缺、能源危機有逐漸升高之 趨勢。然而國内伴隨石油煉製、石化原料基礎工業區等 098136131 熏大開發案的提出,工業用電的需求未艾方興、與曰 表琴編號A0101 第4 1/共23頁 、 俱 0982061951-0 201115666 [0003] 增。面對天然資源之開發不易’如何積極有效地節約、 促進而效用電以因應,是個嚴肅的課題。 其中Major industrial investment cases have been launched, and the Ministry of Environmental Protection has also listed electricity and carbon dioxide emissions as key projects for review. Therefore, in the foreseeable future, issues such as the efficiency of energy utilization are a top priority for enterprises. In Japan, the distribution of time and space factors is uneven, and natural resources are in short supply. In addition, the abnormal global climate changes in recent years have led to a shortage of resources and an increasing energy crisis. However, with the development of the 098,136,131 smoked large-scale development in the petroleum refining and petrochemical raw material basic industrial zones, the demand for industrial electricity is not in the name of Fang Xing, and the 曰琴琴号 A0101 4 1 / 23 pages, 0982061951-0 201115666 [0003] Increased. It is not easy to develop natural resources. How to actively and effectively save, promote and use electricity to respond is a serious issue. among them

[0004][0004]

高科技產業向來是屬於用電密集行業,在經 過長期持續進行之製程操作條件等多方面改善及用電 減量、尖峰㈣管理湘技麟估之狀,產品單位耗 電與產值單位用電量呈逐年下修之勢;然,一部分電能 資源的耗用仍集中在製程反應的熱量移除。以國内半導 體及機械加工用之冷卻機〔chiller〕為標的舉例,全台 灣運轉中的製程冷卻機〔含冷鄭器〕超過5萬台,每年消 耗電量超過15億度耗,钱的浪費殊 為可觀。製程冷卻技術在業需求, 不過由於近年來原油價格遍’提高,將 會迫使丰導體、光電等系統設備廠商,研發更高效率之 製程設備〔包括製程冷涑設備〕,以節省能源成本提升 工業生產競爭力/ιIntellectual 尤其,台灣在半導體領導的地位, 囊括了全球丰數以上的晶療導體製造材料昂貴 ’任何製程中的疏失都將造成無可彌補的巨大損失。使 得製造設備的可靠度及精密度要求則成為必要條件,因 此,維持半導體製造之恆溫設備極為重要, [0005] 然而,综觀市面上之各式製程雖可達到製程冷卻、 維持製程恆溫之預期功效’但也在其實際操作施行使用 上發現’該類製程冷凍機設備中並無一套標準的測試規 範與平台,使得各家廠商間無—標準值可以判定其性能 優劣。 098136131 表單編號A0101 第5頁/共23頁 0982061951-0 201115666 [0006] [0007] 緣是,發明人有餘此,秉持多年該相關行業之豐 富設計開發及實際製作經驗,針對現有之結構再予以研 究改良’因而發明出-種製程冷♦機之性能測試平台及 其測試方法,以期達到更佳實用價值性之目的者。 【發明内容】 本發明之製程冷卻機之性能測試平台及其測試方法 ,其第-㈣主要係藉*管路轉裝置連結製程冷卻機 測試平台及其測試方法,經由管路銜接進入流量檢測裝 置,該流量檢測裝置以電磁力驅動使量測元件產生諧振 頻率,使流體流過流i檢測裝置時,產生作用下使量硎 元件的頻率產生變化’再藉 置的距離產生之摩擦損失’ ❹The high-tech industry has always been a power-intensive industry. In the long-term continuous process conditions and other aspects of improvement and power consumption reduction, peak (four) management of Hunan technology evaluation, product unit power consumption and output value unit electricity consumption The trend of repairing year by year; however, the consumption of some electrical energy resources is still concentrated on the heat removal of the process reaction. Taking the chiller of domestic semiconductor and machining as the standard example, more than 50,000 process cooling machines (including cold Zheng) are in operation in Taiwan, and the annual consumption of electricity exceeds 1.5 billion kWh. It is considerable. Process cooling technology is in demand, but due to the increase in crude oil prices in recent years, it will force Fengtong conductors, optoelectronics and other system equipment manufacturers to develop more efficient process equipment (including process cold heading equipment) to save energy costs and improve industry. Production competitiveness / iSmartlectual In particular, Taiwan's position as a semiconductor leader encompasses the world's richer crystallographic conductor manufacturing materials. 'The loss of any process will cause irreparable damage. The reliability and precision requirements of manufacturing equipment are necessary. Therefore, it is extremely important to maintain the constant temperature equipment for semiconductor manufacturing. [0005] However, the various processes on the market can achieve the process cooling and maintain the process constant temperature. Efficacy 'but found in its actual operation and implementation 'There is no standard test specification and platform in this type of process refrigeration equipment, so that there is no standard value between the manufacturers can determine its performance. 098136131 Form No. A0101 Page 5 of 23 0982061951-0 201115666 [0006] [0007] The reason is that the inventor has more than this, and has been studying the existing structure for many years in the rich design and development and practical production experience of the relevant industry. The improvement has thus invented a performance test platform and test method for the process of cold-free machine, in order to achieve better practical value. SUMMARY OF THE INVENTION The performance test platform and test method of the process cooling machine of the present invention, the first (four) is mainly by the * pipe transfer device connection process cooling machine test platform and its test method, through the pipeline connection into the flow detection device The flow detecting device is driven by electromagnetic force to cause the measuring element to generate a resonant frequency, so that when the fluid flows through the flow detecting device, the frequency of the measuring element is changed and the frictional loss caused by the distance borrowed is generated.

路銜接裝 口流量調 m · eaewweew -t- 整閥調整間門之開度,模擬測試實務應不同管路距 離之摩擦損失條件,最後經換算諧振頻率、管路差壓值 、流艘的密度與溫度,可_過此#化量測#流體的流量 ,因此在檢測流髗流量時,: 擦損失與不 同溫度下的密度變化 ^;>eriv [0008] 本發明之製程冷卻機之性能測試平台及其測試方法 ,其第二目的主要係在製程冷卻機中的板式蒸發器與板 式冷凝器,可連結製程冷卻測試機平台,檢測板式蒸發 器的能力,亦玎藉由出入口流量調整閥的控制’檢測板 式冷凝器的能力,因此,該製程冷卻測試機平台可檢測 板式冷凝器與板式蒸發器的能量。 [0009] 本發明之製程冷卻機之性能測試平台及其測試方法 ,其第三目的主要係在流艘進入流量檢測裝置時因管路 % 098136131 表單編號A0101 第6頁/兴23頁 0982061951-0 201115666 [0010] [0011] [0012] 098136131 中會有少許的氣泡,造成檢測的不穩定與精確度镇失, 亦會造成氣泡空蝕管路與低溫流體泵浦,因此可以透過 膨脹水箱將系統中的空氣排除之目的以利管路中的空氣 得以自由排至大氣令;雖然膨脹水箱可達到排氣的功能 ’但也造成系統的管路壓損過高,因此當排氣的程序— 成後,立即關閉膨脹水箱,改由旁通管路運行,緩此程 序後不但可排除空氣亦不會增加管路的壓降損失。 本發明之製程冷卻機之性能測試平台及其測試方法 ,其第四目的主要係在檢測過程中,產生冷熱流體的混 合現象,故導致溫度分布不均的問題,因此裝設攪拌裝 度分布不 矩與轉速 本發明之製程冷卻機之性能測試平台及其測試方法 ’其第五目的主要係在提制蒸發器熱 量加熱裝置,針對熱量無日彻續解,該裝置可設 定不同的流體溫度,而幻_赚‘能4與蒸發器熱 量加熱裝置相平衡,藉由紐_量加餘置所消耗 地功率,可量得板式蒸發器產生的能力。 本發明之製程冷卻機之性Μ試平台及其測試方法 ’其第六目的主要係在提供自動PID演算裝置控制蒸發器 熱量加熱裝置,針對熱量__烈變化陳態該裝 置可設定不同的流體溫度,亦可設定連續性的熱量變化 ’且具有皿度回授裝置,則板式蒸發器能量隨著熱量變 動可快速達到熱平衡,而蒸發器熱量加熱裝置所消耗地 表單編號A0101 第7頁/共23頁 置’則透過攪拌裝置均勻 均所造成檢測誤差的效果 ’以求得攪拌時所輸出的熱量The flow rate of the road connection port is adjusted. · eaewweew -t- The valve is adjusted to the opening degree of the door. The simulation test practice should be based on the friction loss condition of different pipeline distances. Finally, the converted resonance frequency, the differential pressure value of the pipeline, and the density of the flow vessel are converted. With the temperature, the flow rate of the fluid can be measured, so when detecting the flow rate of the flow, the rubbing loss and the density change at different temperatures ^; > eriv [0008] The performance of the process chiller of the present invention The test platform and its test method, the second purpose of which is mainly the plate evaporator and the plate condenser in the process cooling machine, which can be connected to the process cooling test machine platform to detect the capacity of the plate evaporator, and also through the inlet and outlet flow regulating valve The control 'detects the capacity of the plate condenser, so the process cooling tester platform can detect the energy of the plate condenser and the plate evaporator. [0009] The performance test platform and test method of the process cooling machine of the present invention, the third purpose of which is mainly because the flow vessel enters the flow detection device due to the pipeline % 098136131 Form No. A0101 Page 6 / Hing 23 Page 0982061951-0 [0012] [0012] [0012] There are a few bubbles in 098136131, which causes instability and accuracy of detection, and also causes bubble cavitation pipeline and low temperature fluid pumping, so the system can be moved through the expansion tank. The purpose of air removal is to allow the air in the pipeline to be freely vented to the atmosphere; although the expansion tank can achieve the function of the exhaust', but also causes the system's pipeline pressure loss is too high, so when the exhaust process - Immediately afterwards, the expansion tank is closed and operated by the bypass line. After this procedure, the air is not removed and the pressure drop of the pipeline is not increased. The performance test platform and the test method thereof of the process cooling machine of the present invention mainly have a mixing phenomenon of hot and cold fluids during the detection process, thereby causing a problem of uneven temperature distribution, and therefore the distribution of the stirring installation degree is not Moment and rotation speed The performance test platform and test method of the process cooling machine of the present invention's fifth purpose is mainly to improve the evaporator heat heating device, and the heat can be completely solved for the heat, the device can set different fluid temperatures, And the magic _ earning 'can 4' and the evaporator heat heating device balance, by the amount of _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The sixth object of the invention is to provide an automatic PID calculation device for controlling the evaporator heat heating device, and the device can set different fluids for the heat __ The temperature can also be set to a continuous heat change' and has a dish feedback device, the plate evaporator energy can quickly reach the heat balance with the heat change, and the evaporator heat heating device consumes the form number A0101 page 7 / total On page 23, 'the effect of detecting error caused by the stirring device evenly' is obtained to obtain the heat output during stirring.

0982061951-0 201115666 [0013} [0014] [0015] [0016] 098136131 功率,無法直接經由儀器檢測,因此透過測試平台系統 .檢測二次冷媒〔secondary coolant〕之比熱、流量與 進出口溫度,經換算變化量得蒸發器能量,故可透過上 述的方法達到檢測變動特性的板式蒸發器能量。 本發明之製程冷卻機之性能測試平台及其測試方法 ,其第七目的主要係在提供電力保護裝置,該電力保護 裝置透過流量感測裝置與溫度回授裝置進行電源供應裝 置的控制,該控制可防止異物阻塞或低溫流體泵浦故障 ,所導致流體的流量異常動作,可經由流量感測方法, 亦可透過溫度的回授方法,達到電源供應裝置開啟、關 閉控制的功能,防止蒸發:S热.量加Μ裝置走生空燒的危 險,因此藉由流量與溫度的筠找控制,達到製程冷卻測 試機平台的保護功效。 【實施方式】 為令本發明所運用之技術内容、發明目的及其達成 之功效有更完整且清楚的揭露,茲於下詳細說明之,並 請一併參閱所揭之圖式及圖號: 首先,請參閱第一圖本發明之結構方塊示意圖所示 ,本發明主要係包含一測試平台系統(1)、一二次冷 媒熱量控制系統(2)、一製程冷卻機(3)以及一管 路銜接裝置(4);其中: 該測試平台系統(1),請一併參閱第二圖本發明 之測試平台系統線路圖所示,其包含一膨脹水箱(1 1 )、一混合裝置(1 2)、一流量檢測裝置(1 3)、 一出口溫度感測裝置(14)、一差壓裝置(15)、 表單編號Α0101 第8頁/共23頁 201115666 出入口流量調整閥(1 6)與一入口溫度感測裝置(1 7);令該製程冷卻機(3)產生的冷却水經出入口流 量調整閥(1 6)流入測試平台系統(1 ),以能調整 至適當的流量進入測試平台系統(1),且由入口溫度 感測裝置(1 7)監測製程冷卻機(3)之冷却水的入 水溫度後’進入該二次冷媒熱量控制系統(2),以達 到熱量平衡的需求,透過該膨脹水箱(1 1)將管内的0982061951-0 201115666 [0013] [0016] [0016] 098136131 power, can not be directly detected by the instrument, so through the test platform system. Detect the secondary heat of the secondary coolant, flow and inlet and outlet temperatures, converted Since the amount of change is obtained by the evaporator energy, the energy of the plate evaporator for detecting the fluctuation characteristics can be achieved by the above method. The seventh object of the performance test platform and the test method thereof for the process cooling machine of the present invention is mainly to provide a power protection device, wherein the power protection device controls the power supply device through the flow sensing device and the temperature feedback device, the control It can prevent foreign matter from clogging or low-temperature fluid pumping failure, resulting in abnormal flow of fluid. It can be controlled by flow rate or by temperature feedback method to achieve the function of opening and closing the power supply device to prevent evaporation: S The heat and quantity of the twisting device is dangerous to burn, so the flow and temperature are controlled to achieve the protection effect of the process cooling tester platform. [Embodiment] For a more complete and clear disclosure of the technical content, the purpose of the invention and the effects thereof achieved by the present invention, the following is a detailed description, and please refer to the drawings and drawings: First, please refer to the first block diagram of the structural block diagram of the present invention. The present invention mainly comprises a test platform system (1), a secondary refrigerant heat control system (2), a process cooling machine (3) and a tube. The road connection device (4); wherein: the test platform system (1), please refer to the second diagram of the test platform system circuit diagram of the present invention, which comprises an expansion water tank (1 1 ) and a mixing device (1) 2), a flow detecting device (1 3), an outlet temperature sensing device (14), a differential pressure device (15), a form number Α 0101, a page 8 / a total of 23 pages 201115666 an inlet and outlet flow regulating valve (1 6) and An inlet temperature sensing device (17); cooling water generated by the process cooler (3) flows into the test platform system (1) through the inlet and outlet flow regulating valve (16) to be adjusted to an appropriate flow rate into the test platform System (1) and by inlet temperature The measuring device (17) monitors the inlet water temperature of the cooling water of the process cooling machine (3) and then enters the secondary refrigerant heat control system (2) to achieve the heat balance requirement, and the inside of the tube is passed through the expansion water tank (1 1) of

空氣排至大氣,並經混合裝置(i 2 ),以防止冷却水 的溫度分佈不均的問題,再經流量檢測裝置(1 3)及 出口溫度感測裝置(1.4 )檢澍冷:却水流量與溫度,最 後由差壓裝川5)來^^失,由另 一出入口流量調整閥(i 機(3 ) 完成一測試循環。 .// Vv^··'^ [0017] 該二次冷媒熱量控制系統(2) ’請一併參閱第三 圖本發明之二次冷媒熱量1制系淤線路圖个示,其包含 1 ?制裝置(2 蒸發器熱量加熱裝置(❿The air is discharged to the atmosphere and passed through a mixing device (i 2 ) to prevent the temperature distribution of the cooling water from being unevenly distributed. Then, the flow detecting device (13) and the outlet temperature sensing device (1.4) are used to check the cold: water The flow rate and temperature are finally lost by the differential pressure assembly 5), and the other inlet and outlet flow adjustment valve (i machine (3) completes a test cycle. .// Vv^··'^ [0017] Refrigerant heat control system (2) 'Please refer to the third figure of the present invention for the secondary refrigerant heat 1 system silt circuit diagram, which includes 1 ? device (2 evaporator heat heating device (❿

2) 、一電力保護裝置回授感測裝置。 Office 敷装 ^ Z 4 ) ’該熱量控制裝置(2 2 )包含一自動PID演算 裝置(221)與一設定調節裝置( 2 2 2 ),該電力 保護裝置(2 3)是由-流量感測裝置(2 3 i)與一 電源供應裝置(2 3 2)所構成的;使得製程冷卻機( 3) 之冷却水流入流經該溫度回授感測裝置(2 4)及 電力保護裝置(2 3),再經由蒸發器熱量加熱裝置( 2 1 )給予熱量平衡,但是冷却水流量過少時,會導致 蒸發器熱量加熱I置(2 1)過熱的危險,因此透過電 098136131 表單編號A0101 第9頁/共23頁 0982061951-0 201115666 力保護裝置(2 3)内的流量感測裝置(2 3 1 )來感 測流量,若感測到流量過小的時候,會驅使該電源供應 裝置(2 3 2)斷路’令該蒸發器熱量加熱裝置(2 1 )關閉,而達到保護的功能。再者,可透過該熱量控制 裝置(2 2)來控制蒸發器熱量加熱裝置(2 1 )的熱 量’而熱量控制裝置(2 2)可選用自動pid演算裝置( 2 2 1)或設定調節裝置(2 2 2),令溫度回授感測 裝置(24)迴授至自動PID演算裝置(221),使得 其可隨著冷却水溫度的變化’來自動調節蒸發器熱量加 熱敦置(2 1 )的戴囊i海争;f类邋糠定調節裝置 (22 2) ’以手動方式調加熱裝置 (2 1 )的熱f,進而達調節蒸發 器熱量加_縣(2 1:) [0018]2) A power protection device returns the sensing device. Office Coating ^ Z 4 ) 'The thermal control device (2 2 ) comprises an automatic PID calculation device (221) and a setting adjustment device (2 2 2), the power protection device (23) is driven by - flow rate The device (23 i) is formed by a power supply device (23 2); the cooling water flowing into the process cooler (3) flows through the temperature feedback sensing device (24) and the power protection device (23) ), and then the heat balance is given by the evaporator heat heating device (2 1 ), but when the flow rate of the cooling water is too small, the heat of the evaporator is heated (I 1) to overheat, so the transmission of electricity 098136131 Form No. A0101 Page 9 / 23 pages 0982061951-0 201115666 The flow sensing device (2 3 1) in the force protection device (2 3) senses the flow rate. If the flow rate is detected to be too small, the power supply device will be driven (2 3 2 The "open circuit" causes the evaporator heat heating device (2 1 ) to be turned off to achieve the function of protection. Furthermore, the heat control device (2 2) can be used to control the heat of the evaporator heat heating device (2 1 ), and the heat control device (22 can select an automatic pid calculation device ( 2 2 1) or a setting adjustment device. (2 2 2), the temperature feedback sensing device (24) is fed back to the automatic PID calculation device (221) so that it can automatically adjust the evaporator heat to heat with the change of the cooling water temperature (2 1 ) 戴 i i sea; f class adjustment device (22 2) 'Manually adjust the heat f of the heating device (2 1), and then adjust the evaporator heat plus _ county (2 1:) [0018 ]

該製程冷卻機(3),請一併參閱第四圖本發明之 製程冷卻機線路圖所示,其包含丨τ•高溫流體循環系統( 3 1 >、一製冷系統(3 2:) 流體循環系統(The process cooling machine (3), please refer to the fourth diagram of the process cooling circuit diagram of the present invention, which comprises a 丨τ high temperature fluid circulation system (3 1 >, a refrigeration system (3 2:) fluid Circulatory system

3 3 ),且再透過管路銜接滅金(、4 )連接測試平台系 統(1 )進行冷却水量測;該高溫流體循環系統(3 1 )包含一高溫流體泵浦(3 1 1 )及一高溫液體儲存裝 置(3 12) ’使得經製冷系統(3 2)熱交換後的流 體’透過高溫流體泵浦(3 1 1 )循環,在流經一高溫 液體儲存裝置(3 1 2),最後連接管路銜接裝置(4 )至測試平台系統(1 )或恆溫水槽;該製冷系統(3 2)是由一壓縮機(3 2 1)、一板式冷凝器(3 2 2 )、一膨脹閥( 3 2 3 )及一板式蒸發器(324)所 098136131 表單编號A0101 第10頁/共23頁 0982061951-0 201115666 建構成的,而該壓縮機(3 2 1)係、將氣態冷媒增壓, 送入板式冷凝器(3 2 2 )再予高溫流體循環系統(3 1)熱交換,冷凝後的液態冷媒透過膨脹閥(3 2 3 ) 降磨’再經板式蒸發器(3 2 4 )進行熱交換,板式蒸 發器(3 2 4 )之冷媒冷能傳遞給低溫流體循環系統( 3 3)降溫,最後再回到壓縮機(3 21)完成一循環 過程;該低溫流體循環系統(3 3)包含一低溫流體泵 浦(33 1)及一低溫液體儲存裝置(3 3 2 );而經 製冷系統(32)之板式蒸發器(3 2 4)熱交換後的 流體,透過該低溫流醴系浦(3 3 1)循環,在流經該 低溫液體儲存裝置(3 3泛銜接裝置 (4 )至測裁乎台系統(若欲測試該 製冷系統1:( 3 2 )之必須將低 ..... . 溫流體循環系統(3 3)與測試平台系统(1)連接, 再把高溫流體循環系統(31)連接至恆溫水槽,反之 ,若要測試板式冷凝器(將低温流體 循環系統( 3 3)妙至高溫流體循環 系統( 3Γ)連接Μ試明1)。 [0019] 而當欲測試製槎冷卻機(3 )的出入口溫度值與流 量值時,請一併參閲第五圖本發明之測試流程圓所示, 其係為: [0020] S 5 Ο 1 :令製槎冷卻機(3 )銜接至製程冷却測試機 台; S 5 〇 2 :判斷流量是否足夠; 098136131 表單編號Α0101 第11頁/共23頁 0982061951-0 [0021] 201115666 [0022] S 5 Ο 3 :若系統流量不足時,即會停止蒸發器熱量加 熱裝置(2 1 )之供電進行保護,並再回到S 5 Ο 1步 驟,直到流量供應正常為止; [0023] S 5 0 4 :而當流量供應充足後,即會判斷是否為浮動 的蒸發器熱量; [0024] S 5 0 5 :若系統為固定的蒸發器熱量條件時,則進行 設定溫度值之調節; [0025] S 5 0 6 :且啟動手動設定調節裝置: 參 [0026] S 5 0 7 :並判斷是否維持蒸發器熱量平衡,如果未維 持蒸發器熱量平衡則必須返回S Ε5 () 6步驟; [0027] S 5 0 8 :而若維持蒸發器熱量平衡則可輸出消耗的功 率值,以得知該製程冷卻機(3)的能力; [0028] S 5 0 9 :而若系統為浮動的蒸發器熱量條件時,則必 須透過出口溫度感測裝置(14)感測製鞋冷卻機(3 .)之出口溫度; .3 3), and then connected to the test platform system (1) through the pipeline to replace the gold (4) for cooling water measurement; the high temperature fluid circulation system (3 1 ) comprises a high temperature fluid pump (3 1 1) and a high temperature liquid storage device (3 12) 'so that the fluid after heat exchange through the refrigeration system (32) is circulated through the high temperature fluid pump (3 1 1 ) and flows through a high temperature liquid storage device (3 1 2), Finally, the pipeline connection device (4) is connected to the test platform system (1) or the constant temperature water tank; the refrigeration system (32) is composed of a compressor (3 2 1), a plate condenser (3 2 2 ), an expansion Valve (3 2 3 ) and a plate evaporator (324) 098136131 Form No. A0101 Page 10 / 23 pages 0982061951-0 201115666 Constructed, and the compressor (3 2 1) system, will increase the gaseous refrigerant Pressurized, sent to the plate condenser (3 2 2) and then exchanged with the high temperature fluid circulation system (3 1), the condensed liquid refrigerant is cooled by the expansion valve (3 2 3 ) and then passed through the plate evaporator (3 2 4 Heat exchange, the cold energy of the plate evaporator (3 2 4) is transferred to the low temperature fluid circulation system (3 3) to cool down, most And then returning to the compressor (3 21) to complete a cycle; the cryogenic fluid circulation system (33) comprises a cryogenic fluid pump (33 1) and a cryogenic liquid storage device (33 2); and the refrigeration system (32) The plate-type evaporator (3 2 4) heat-exchanged fluid is circulated through the low-temperature flow system (3 3 1), and flows through the cryogenic liquid storage device (3 3 pan-coupling device (4) to Measuring the system (if you want to test the refrigeration system 1: (3 2) must be low ..... The temperature fluid circulation system (3 3) is connected to the test platform system (1), and then the high temperature fluid is circulated The system (31) is connected to the constant temperature water tank, and conversely, to test the plate condenser (connect the low temperature fluid circulation system (3 3) to the high temperature fluid circulation system (3Γ). [0019] And when testing For the inlet and outlet temperature values and flow values of the sputum cooler (3), please refer to the fifth diagram of the test flow circle of the present invention, which is as follows: [0020] S 5 Ο 1 : 槎 槎 cooler (3) Connect to the process cooling test machine; S 5 〇 2: Determine whether the flow is sufficient; 098136131 Form No. Α0101 11 pages/total 23 pages 0982061951-0 [0021] 201115666 [0022] S 5 Ο 3 : If the system flow is insufficient, the power supply of the evaporator heat heating device (2 1 ) will be stopped for protection, and then return to S 5 Ο 1 step until the flow supply is normal; [0023] S 5 0 4 : When the flow supply is sufficient, it is judged whether it is floating evaporator heat; [0024] S 5 0 5 : If the system is fixed evaporation In the case of the heat condition, the set temperature value is adjusted; [0025] S 5 0 6 : and the manual setting adjustment device is activated: Ref. [0026] S 5 0 7 : and determine whether to maintain the evaporator heat balance if the evaporation is not maintained The heat balance must return to S Ε 5 () 6 steps; [0027] S 5 0 8 : If the evaporator heat balance is maintained, the consumed power value can be output to know the capacity of the process cooler (3); 0028] S 5 0 9 : and if the system is a floating evaporator heat condition, the outlet temperature of the shoe cooler (3 . ) must be sensed through the outlet temperature sensing device (14);

[0029] S 5 1 0 :且設定製程冷卻機(3 )之入口溫度; [0030] S 5 1 1 :再調節製程冷卻機(3 )出口溫差的時間變 化; [0031] S 5 1 2 :進入自動力演算蒸發器熱量加熱裝置; [0032] S 5 1 3 :感測冷却機入口溫度是否達到設定值,若未 達設定溫度必須返回S 5 1 2步驟; [0033] S 5 1 4 :待冷却機入口溫度到達設定溫度,即計算蒸 098206195卜0 098136131 表單編號A0101 第12頁/共23頁 201115666 [0034] [0035] [0036] 發器能量’以可取得該製程冷卻機(3)的能力。 :然而前述之實施例或圖式並非限定本發明之產品結 構或使用方式’任何所屬技術領域巾具有通常知識者之 適當變化或修飾,皆應視為不脫離本發明之專利範疇。 藉由以上所述,本發明之元件組成與使用實施說明 可知,本發明與現有結構相較之下,本發明確具有下列 優點: 1.本發明為了讓製程冷卻機達到真正測試之需要,使得 其設計易活動、可拆卸之方式,此設計將測試平台系統 可快速、方便的移動以連接 決因測試[0029] S 5 1 0 : and setting the inlet temperature of the process cooler (3); [0030] S 5 1 1 : re-adjusting the time variation of the outlet temperature difference of the process cooler (3); [0031] S 5 1 2 : Enter the automatic force calculation evaporator heat heating device; [0032] S 5 1 3 : Sensing whether the cooler inlet temperature reaches the set value, if it does not reach the set temperature, it must return to the S 5 1 2 step; [0033] S 5 1 4 : When the inlet temperature of the cooler reaches the set temperature, the calculation steam 098206195 Bu 0 098136131 Form No. A0101 Page 12 / Total 23 Page 201115666 [0034] [0036] [0036] The generator energy 'to obtain the process cooler (3) Ability. However, the above-described embodiments or drawings are not intended to limit the structure or the manner of use of the present invention. Any suitable variations or modifications of the present invention will be apparent to those skilled in the art. From the above, the component composition and use description of the present invention show that the present invention has the following advantages compared with the prior art: 1. The present invention makes the process cooler achieve the requirements of real testing, so that The design is easy to move and detachable. This design allows the test platform system to move quickly and easily to connect to the cause test.

[0037] 的不便利性與機動性。 詹 2.本發明測試平台系統採用自動PID演算裝置或手動調節 裝置,句精準調節蒸發器熱量加熱裝置且可隨著不同負 φ [0038] 3. 本發明可經由膨脹水箱管路中的氣體,再 由混合裝置來解決溫度分佈不均的問題’因此可更精準 取得出入溫度與流量值。 [0039] 4. 本發明為了解決因測試製程冷卻機銜接的管路過長之 問題,在測試平台系統中加裝差壓裝置’來修正管路的 壓力損失;或系統因異物阻塞所造成的流量不足的問題 ,也可透過壓差裝置結合電力保護裝置,而控制蒸發器 熱量加熱裝置的開啟或關閉,可預防蒸發器熱量加熱裝 置空燒的危險。 098136131[0037] Inconvenience and mobility. Zhan 2. The test platform system of the invention adopts an automatic PID calculation device or a manual adjustment device, and the sentence accurately adjusts the evaporator heat heating device and can vary with different negative φ [0038] 3. The invention can pass the gas in the expansion tank pipeline, The mixing device solves the problem of uneven temperature distribution, so the temperature and flow values can be more accurately obtained. [0039] 4. In order to solve the problem that the pipeline connected by the test process cooler is too long, the differential pressure device is installed in the test platform system to correct the pressure loss of the pipeline; or the flow caused by the foreign matter being blocked by the system. Insufficient problem, the pressure difference device can also be combined with the power protection device to control the opening or closing of the evaporator heat heating device, thereby preventing the risk of the evaporator heat heating device being burned. 098136131

表單編號A0101 第13頁/共23頁 n 201115666 [0040] 5.本發明可經由管路銜接裝置快速更換高溫流體循環系 統或低溫流體循環系統,進而取得製程冷却機的板式冷 凝器與板式蒸發器的能力, [004〗]6.本發明自動PID演算裝置可自動控制蒸發器熱量加熱裝 置的大小,且透過溫度回授感測裝置來精準調節蒸發器 熱量加熱裝置,由其可針對變動負栽的狀態下,可快迷 調節加熱量。 [0042] [0043] [0044] [0045] 綜上所述,本發明實施例確能達到所預期之使用功 效,又其所揭露之具體構造,*僅未曾見諸於同類產。 中’亦未曾公開於申請前法之規: 與要求’美依法提出發明專,彝|^%予審查, 並賜准專利,則實感德便。了二;4十_ 【圖式簡單說明】 第一圖:本發明之結構方塊示意圓 第二圖:本發明之測轉:平Form No. A0101 Page 13 of 23 n 201115666 [0040] 5. The invention can quickly replace the high temperature fluid circulation system or the low temperature fluid circulation system through the pipeline connecting device, thereby obtaining the plate condenser and the plate evaporator of the process cooling machine. Ability, [004]] 6. The automatic PID calculation device of the invention can automatically control the size of the evaporator heat heating device, and accurately adjusts the evaporator heat heating device through the temperature feedback sensing device, which can be used for the change In the state of the state, you can adjust the amount of heating. [0044] In summary, the embodiments of the present invention can achieve the intended use effect, and the specific structure disclosed therein is only seen in the same kind of production. China has not been disclosed in the pre-application law: and the requirements of the United States legally filed an invention, 彝|^% for review, and granted a patent, it is really sensible. 2; 4 _ [Simple diagram of the diagram] The first diagram: the schematic block of the invention is shown in the circle. The second diagram: the test of the invention: flat

第三圖:本發明之二表冷气熱,董丨控制系統線路圖The third figure: the second table of the present invention, cold air heat, Dong Hao control system circuit diagram

[0046] 第四圖:本發明之製程冷卻機線路_ [0047] 第五圖:本發明之測試流程圖 【主要元件符號說明】 [0048] ( 1 ) 測試平台系統 (11) 膨脹水箱 (12) 混合裝置 (13) 流量檢測裝置 (14) 出口溫度感測裝置(15) 差壓裝置 (16) 出入口流量調整閥 表單編號A0101 第14頁/共23頁 098136131 0982061951-0 201115666 [0049] (17) 入口溫度感測裝置 -(2 ) 二次冷媒熱量控制系統 (21) 蒸發器熱量加熱裝置 (22) 熱量控制裝置 (2 2 1 )自動PID演算裝置 (222)設定調節裝置 (23) 電力保護裝置 (231)流量感測裝置 (232)電源供應裝置 (24) 溫度回授感測裝置(3) 製程冷卻機 (31) 尚溫流體循環系統(3 1 1)尚溫流體果浦 (3 1 2)高溫液體儲存裝置(3 2) 製冷系統 (3 2 1)壓縮機 (3 2 2 )板式冷凝器 (3 2 3 )膨脹閥 (3:2 4.)板式蒸發器 (33) 低溫流體循環系統(3 31 )低溫流體泵浦 (3 3 2 )低溫液體儲存裝置(4) 管路銜接裝置Fourth Diagram: Process Cooler Circuit of the Invention [0047] Fifth Diagram: Test Flowchart of the Invention [Main Component Symbol Description] [0048] (1) Test Platform System (11) Expansion Water Tank (12) Mixing device (13) Flow detecting device (14) Outlet temperature sensing device (15) Differential pressure device (16) Inlet and outlet flow regulating valve form No. A0101 Page 14 of 23 098136131 0982061951-0 201115666 [0049] (17 ) Inlet temperature sensing device - (2) Secondary refrigerant heat control system (21) Evaporator heat heating device (22) Thermal control device (2 2 1 ) Automatic PID calculation device (222) Setting adjustment device (23) Power protection Device (231) flow sensing device (232) power supply device (24) temperature feedback sensing device (3) process cooling machine (31) still temperature fluid circulation system (3 1 1) still temperature fluid fruit pump (3 1 2) High temperature liquid storage device (3 2) Refrigeration system (3 2 1) Compressor (3 2 2) Plate condenser (3 2 3 ) Expansion valve (3:2 4.) Plate evaporator (33) Cryogenic fluid circulation System (3 31) Cryogenic fluid pumping (3 3 2) cryogenic liquid storage device (4) Pipe connection Device

098136131 表單編號A0101 第15頁/共23頁 0982061951-0098136131 Form No. A0101 Page 15 of 23 0982061951-0

Claims (1)

201115666 七、申請專利範圍: 1 . 一種製程冷卻機之性能測試平台,其主要係令製程冷卻機 連接至測試平台系統,該測試平台系統包含一膨脹水箱、 一混合裝置、一流量檢測裝置、一出口溫度感測裝置、一 差壓裝置、出入口流量調整閥與一入口溫度感測裝置;令 該製程冷卻機產生的冷却水經出入口流量調整閥流入測試 平台系統,以能調整至適當的流量進入測試平台系統,且 由入口溫度感測裝置監測製程冷卻機之冷却水的入水溫度 ,透過該膨脹水箱將管内的空氣排至大氣,並經混合裝置 ,以防止冷却水的溫度分佈不均的問題,再經流量檢測裝 置及出口溫度感測裝置檢測冷却水流量舆溢度,最後由差 .:: m 壓裝置來量測管路間的壓降損失*由男一出入口流量調整 閥再回到製程冷却機完成一測試循環。 2 .如申請專利範圍第1項所述之製程冷卻機之性能測試平台 ,其中,該製程冷卻機包含一高溫流體循環系統、一製冷 系統與一低溫流體循環系統,且透過管路銜接裝置連接測 試平台系統進行冷却水量測;該高溫流體循環系統包含一 高溫流體泵浦及一高溫液體Μ存致置,使得經製冷系統熱 交換後的流體,透過高溫流體泵浦循環,在流經一高溫液 體儲存裝置,最後連接管路銜接裝置至測試平台系統;該 製冷系統是由一壓縮機、一板式冷凝器、一膨脹閥及一板 式蒸發器所建構成的,而該壓縮機係將氣態冷媒增壓,送 入板式冷凝器再予高溫流體循環系統熱交換,冷凝後的液 態冷媒透過膨脹閥降壓,再經板式蒸發器進行熱交換,板 式蒸發器之冷媒冷能傳遞給低溫流體循環系統降溫,最後 098136131 表單編號Α0101 第16頁/共23頁 0982061951-0 201115666 再回到壓縮機完成一循環過程;該低溫流體循環系統包含 一低溫流體泵浦及一低溫液體儲存裝置;而經製冷系統之 板式蒸發器熱交換後的流體,透過該低溫流體泵浦循環, 在流經該低溫液體儲存裝置,最後連接管路銜接裝置至測 試平台系統。 3 .如申請專利範圍第1項所述之製程冷卻機之性能測試平台 ,其中,該測試平台系統由入口溫度感測裝置監測製程冷 卻機之冷却水的入水溫度後,能進入二次冷媒熱量控制系 統,以達到熱量平衡的需求;該二次冷媒熱量控制系統包 含一蒸發器熱量加熱裝置、一電力保護裝置、一溫度回授 感測裝置,該電力保護裝置是由一流量感測裝置與一電源 供應裝置所構成的;使得製程冷卻機之冷却水流入流經該 溫度回授感測裝置及電力保護裝置,再經由蒸發器熱量加 熱裝置給予熱量平衡,且透過電力保護裝置内的流量感測 裝置來感測流量,若感測到流量過小的時候,會驅使該電 源供應裝置斷路,令該蒸發器熱董加熱裝:^關閉。 4 .如申請專利範圍第3項所述之製輕:冷ipil之性能測試平台 • . .:' ψι m» ,其中,該二次冷媒熱量控·制^姨;媛有熱量控制裝置,以 利用熱量控制裝置來控制蒸發器熱量加熱裝置的熱量,而 熱量控制裝置可利用自動PID演算裝置,令溫度回授感測 裝置迴授至自動PID演算裝置,使得其可隨著冷却水溫度 的變化,來自動調節蒸發器熱量加熱裝置的熱量。 5 .如申請專利範圍第3項所述之製程冷卻機之性能測試平台 ,其中,該二次冷媒熱量控制系統設有熱量控制裝置,以 利用熱量控制裝置來控制蒸發器熱量加熱裝置的熱量,而 熱量控制裝置可利用設定調節裝置,透過該設定調節裝置 098136131 表單編號A0101 第17頁/共23頁 0982061951-0 201115666 ,以手動方式調節所需蒸發器熱量加熱裝置的熱量。 6 . —種製程冷卻機之性能測試平台測試方法,其係為: S 5 0 1 :令製程冷卻機銜接至製程冷却測試機台; S 5 0 2 :判斷流量是否足夠; S 5 0 3 :若系統流量不足時,即會停止蒸發器熱量加熱 裝置之供電進行保護,並再回到S 5 0 1步驟,直到流量 供應正常為止; S 5 0 4 :而當流量供應充足後,即會判斷是否為浮動的 蒸發器熱量; S 5 0 5 :若系統為固定的蒸發器熱量條件時,則進行設 定溫度值之調節; S 5 0 6 :且啟動手動設定霣節裝置; S 5 0 7 :並判斷是否維持蒸發器熱量平衡,如果未維持 蒸發器熱量平衡則必須返回S 5 0 6步驟; S 5 0 8 :而若維持蒸發器熱量平衡則可輸出消耗的功率 值,以得知該製程冷卻機的能力; S 5 0 9 :而若系统為浮動的蒸發器熱量條件時,則必須 φ 透過出口溫度感測裝置感測製程冷卻機之出口溫度; S 5 1 0 :且設定製程冷卻機之入口溫度; S 5 1 1 :再調節製程冷卻機出口溫差的時間變化; S 5 1 2 :進入自動力演算蒸發器熱量加熱裝置; S 5 1 3 :感測冷却機入口溫度是否達到設定值,若未達 設定溫度必須返回S 5 1 2步驟; S 5 1 4 :待冷却機入口溫度到達設定溫度,即計算蒸發 器能量,以可取得該製程冷卻機的能力。 098136131 表單編號A0101 第18頁/共23頁 0982061951-0201115666 VII. Patent application scope: 1. A performance test platform for a process cooling machine, which mainly connects a process cooling machine to a test platform system, the test platform system comprises an expansion water tank, a mixing device, a flow detecting device, and a An outlet temperature sensing device, a differential pressure device, an inlet and outlet flow regulating valve and an inlet temperature sensing device; the cooling water generated by the process cooling machine flows into the test platform system through the inlet and outlet flow regulating valve to be adjusted to an appropriate flow rate The platform system is tested, and the inlet temperature sensing device monitors the inlet water temperature of the cooling water of the process cooling machine, and the air in the tube is discharged to the atmosphere through the expansion water tank, and is mixed by the mixing device to prevent uneven temperature distribution of the cooling water. Then, the flow detection device and the outlet temperature sensing device detect the cooling water flow 舆 overflow, and finally the difference between the pressure drop by the difference::: m pressure device is measured by the male inlet and outlet flow regulating valve. The process chiller completes a test cycle. 2. The performance test platform for a process chiller according to claim 1, wherein the process chiller comprises a high temperature fluid circulation system, a refrigeration system and a low temperature fluid circulation system, and is connected through the pipeline connection device. The test platform system performs cooling water measurement; the high temperature fluid circulation system comprises a high temperature fluid pump and a high temperature liquid storage device, so that the fluid after heat exchange through the refrigeration system passes through the high temperature fluid pumping cycle and flows through the a high temperature liquid storage device, which is finally connected to the pipeline connection device to the test platform system; the refrigeration system is constructed by a compressor, a plate condenser, an expansion valve and a plate evaporator, and the compressor system is in a gaseous state The refrigerant is pressurized, sent to the plate condenser and then exchanged heat with the high temperature fluid circulation system. The condensed liquid refrigerant is depressurized through the expansion valve, and then exchanged heat through the plate evaporator. The cold energy of the plate evaporator is transferred to the low temperature fluid circulation. System cooling, finally 098136131 Form number Α0101 Page 16 / Total 23 page 0982061951-0 201115666 Back again The shrinking machine completes a cycle process; the cryogenic fluid circulation system comprises a cryogenic fluid pump and a cryogenic liquid storage device; and the fluid exchanged by the plate evaporator of the refrigeration system passes through the cryogenic fluid pumping cycle and flows through The cryogenic liquid storage device is finally connected to the pipeline connection device to the test platform system. 3. The performance test platform of the process chiller according to claim 1, wherein the test platform system is capable of entering the secondary refrigerant heat after the inlet temperature sensing device monitors the inlet water temperature of the cooling water of the process chiller. Controlling the system to achieve heat balance requirements; the secondary refrigerant heat control system includes an evaporator heat heating device, a power protection device, and a temperature feedback sensing device, the power protection device is configured by a flow sensing device a power supply device; the cooling water flowing into the process cooler flows through the temperature feedback sensing device and the power protection device, and then the heat is balanced by the evaporator heat heating device, and the flow rate is sensed through the power protection device The device senses the flow, and if the flow is sensed to be too small, the power supply device is driven to open, so that the evaporator is heated and closed: ^ is turned off. 4. The light system as described in item 3 of the patent application scope: the performance test platform of the cold ipil • . . . ' ψι m» , wherein the secondary refrigerant heat control system has a heat control device to The heat control device is used to control the heat of the evaporator heat heating device, and the heat control device can use the automatic PID calculation device to return the temperature feedback sensing device to the automatic PID calculation device so that it can change with the temperature of the cooling water. To automatically adjust the heat of the evaporator heat heater. 5. The performance test platform for a process chiller according to claim 3, wherein the secondary refrigerant heat control system is provided with a heat control device for controlling heat of the evaporator heat heating device by using a heat control device, The heat control device can use the setting adjustment device to manually adjust the heat of the required evaporator heat heating device through the setting adjustment device 098136131, Form No. A0101, page 17 / 23 pages 0982061951-0 201115666. 6. A method for testing the performance test platform of a process chiller, which is: S 5 0 1 : connecting the process chiller to the process cooling test machine; S 5 0 2 : determining whether the flow is sufficient; S 5 0 3 : If the system flow is insufficient, the power supply of the evaporator heat heating device will be stopped for protection, and then return to the S 5 0 1 step until the flow supply is normal; S 5 0 4 : When the flow supply is sufficient, it will be judged Whether it is floating evaporator heat; S 5 0 5 : If the system is a fixed evaporator heat condition, adjust the set temperature value; S 5 0 6 : and start the manual setting 霣 device; S 5 0 7 : And determine whether to maintain the evaporator heat balance, if the evaporator heat balance is not maintained, it must return to the S 5 0 6 step; S 5 0 8: and if the evaporator heat balance is maintained, the consumed power value can be output to know the process Cooling capacity; S 5 0 9 : If the system is a floating evaporator heat condition, then φ must sense the outlet temperature of the process cooler through the outlet temperature sensing device; S 5 1 0 : and set the process cooler It Port temperature; S 5 1 1 : Re-adjust the time change of the process cooler temperature difference; S 5 1 2: Enter the automatic force calculation evaporator heat heating device; S 5 1 3 : Sensing whether the cooler inlet temperature reaches the set value, If it does not reach the set temperature, it must return to S 5 1 2 step; S 5 1 4: When the inlet temperature of the cooler reaches the set temperature, the evaporator energy is calculated to obtain the capacity of the process cooler. 098136131 Form No. A0101 Page 18 of 23 0982061951-0
TW98136131A 2009-10-26 2009-10-26 Testing platform and method for properties of process cooling machine TWI423363B (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI490920B (en) * 2012-08-22 2015-07-01 Ap Systems Inc Apparatus for draining coolant and method for operating the same and apparatus for processing substrate
CN114166480A (en) * 2021-11-04 2022-03-11 珠海格力智能装备有限公司 Testing device and testing method for service life of cooling machine

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI328101B (en) * 2007-06-06 2010-08-01 Nat Univ Chin Yi Technology Testing apparatus for machine cooler and its testing method
JP2009031866A (en) * 2007-07-24 2009-02-12 Yamatake Corp Flow control valve and flow control method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI490920B (en) * 2012-08-22 2015-07-01 Ap Systems Inc Apparatus for draining coolant and method for operating the same and apparatus for processing substrate
CN114166480A (en) * 2021-11-04 2022-03-11 珠海格力智能装备有限公司 Testing device and testing method for service life of cooling machine
CN114166480B (en) * 2021-11-04 2024-04-26 珠海格力智能装备有限公司 Device and method for testing service life of cooler

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