201113159 六、發明說明： 【發明所屬之技術領域】 本發明有關於一種清潔裝置，其用來清潔—設備中的 構件，該設備用以在基材或印刷支撐件上印刷一或多個 印刷線路。舉例來說，在一結構配置中，使用絲網二刷 裝置來形成印刷線路’用以在基材上形成導電線路，該 些基材係用於形成電子、光電或其他類似元件的多個部 份。 【先前技術】 已知可使用適合的印刷膏以絲網印刷技術在矽基晶圓 上製造導電線路，特別是用於光電電池（但不僅限於此） 的矽基晶圓上製造導電線路。 4網印刷利用刷具或葉片以一決定壓力將印刷膏散佈 在一適合的印刷網上，且已根據將要製造的印刷線路期 望佈局來適當地裁切該印刷網。 由於非最佳化的分佈、或在葉片移動過程中或魏送管 線運作過程中發生印刷膏部份乾硬及/或異常現象，使 仔印刷膏易於在某些區域中過量分佈或形成堆積，這些 情形會發生在印刷網的較低表面上，而導致印刷品質較 差。 因此’必需定；期清潔印刷網，通常使用具有適當的刷 刀子（knife)或刮板等刮除裝置在印刷網下方進行機 201113159 械性清潔’以去除堆積的印刷膏。 為幫助機械清潔且使其更加有效率 膏，需在到除前或在到除過程中，士付乾硬的導電 定的溶劑物質，且通常是揮發性溶劑：除裳置上施加選 因溶劑可從印刷網轉移 主要缺點是溶劑會造成至少污”：已斤以使用溶劑的 而導致較差的印刷品質。 ”卩好的導電膏’ 事實上’不管如何小 乾燥溶劑的裝置，總有一部分:用來 印刷膏。 ”“接觸到用於印刷的 卜為了刀配溶劑’需提供適當的溶劑容器、加壓 分配管線及控制分配管線運作參數的相關控制。 在已知的國際專利申請案WO-A-2009/053782中描述 一種清潔裝置’該清潔裝置提供具有-黏著劑層的旋轉 紙條’該黏著劑層會接觸印刷網之下表面以清潔印刷 、.同而非使用到除及溶劑的清潔技術。從魏入滾轴 oiler)送入紙條且利用重卷滾轴『〇11叫回收 並捲繞紙條，且在兩滾轴之間設置刮除元件，該刮除元 件配合該清潔紙條以一決定接觸壓力作用於印刷網之下 表面。 本發明之目的是達成一種清潔裝置，其用於清潔利用 印刷材料在印刷支撐板上絲網印刷一或多個印刷線路的 設備’特別是用於清除絲網印刷網上過量或堆積的印刷 材料，該清潔裝置能避免因利用溶劑清潔印刷材料所造 201113159 成的污染，同時是有效；5 % n 文及把簡易且經濟製造的清潔裝置。 申請人已發明、測續日香+Λ_ , °式且貫施本發明，以克服當前技術 領域的缺點，並且雜> ., 獲仔如文中所述與其他目的及優點。 【發明内容】 本發月及其特徵描述於申請專利範圍的獨立項中，同 時申3專利|巳圍的附屬項描述本發明之其他特徵或主要 發明構想的變化態樣。 根據上述目的’使用根據本發明之清潔裝置來清潔絲 網印刷設備中之絲網印刷網’且通常是清潔印刷網的下 表：，該設備可藉著使用印刷材料在基材上絲網印刷一 s夕個Ρ刷線路，以例如（非限制性地）在用於製造光電 電池的矽基晶圓上印製導電線路。 一根據本發明’該清潔裝置包含第一軸桿、第二軸桿及 —條片’該條片能清潔印刷網’且藉由該第一軸桿及第 軸杯來支揮該條；^該第—軸桿及第二軸桿能決定該 條片通常在印刷網下方沿著一決定路徑所做的旋轉移動 佳為條片的鬆開/捲繞動作），以從印刷網移除 的印刷膏。 ’、置 根據一實施例態樣’第一軸桿及第二軸桿兩者皆安裝 :達’且較佳為同步馬達，其好處是允許完全控制條片、 ^條片路徑之上游及下游的旋轉速度。 或者，僅有第一軸桿安裝馬達用以回收條片，而該苐 201113159 二軸桿可空轉（idle)或因摩捧 手保向自由旋轉，反之亦秋。 該條片可順著介於第一和第二 ‘”' 禾一釉杯之間的一封閉環形 路徑而纏繞（wound)。 或者，該條片 一開放環形路徑 發明實施例之一 軸桿能傀送該條 且回收條片。 可順著介於第二軸桿及第一軸桿之間的 而展開（devel〇p)。在此情況中，根據本 特定態樣，空轉或受命令而旋轉的第二 片，受命令而旋轉之第一軸桿則能重卷 心银，该條片由非彈性或無 織物材料製成。由於如此Mm …生的 .± b 0又汁的條片不會延展並且保證 在使用中具有最佳值定性 … 是有利的，因為停留在印： 實施例 亦因為實質上不會變形^且 吻r上 甲長或收縮’所以能確伴祜音 潔區域的寬度或幅度—致 保、破'月 ψ ^五哲 再者，歸功於該織物的不變 匕力’ D專獲得該織物以恆 用，從而獾p <又，、丨部彳網相互作 從而獲侍恆定的接觸表面。 另一優點是當非彈性 慢時，該條片之速”做出條片的速度需要加快或減 此外，根據本發明，該 應 軸，壓力滾軸的周圍；：、&含-旋轉式壓力滾201113159 VI. Description of the Invention: [Technical Field] The present invention relates to a cleaning device for cleaning a component in a device for printing one or more printed circuits on a substrate or printing support . For example, in a structural configuration, a screen two-brush device is used to form a printed circuit 'for forming conductive traces on a substrate that are used to form portions of an electronic, optoelectronic, or other similar component. Share. [Prior Art] It is known to fabricate conductive traces on germanium-based wafers using screen printing techniques using suitable printing pastes, particularly on germanium-based wafers for photovoltaic cells, but not limited to. The 4-web printing utilizes a brush or blade to spread the printing paste on a suitable printing web at a determined pressure, and the printing web has been appropriately cut according to the desired layout of the printed wiring to be manufactured. Due to the non-optimized distribution, or the dry and/or abnormal phenomenon of the printing paste during the movement of the blade or during the operation of the pipeline, the printing paste is easily distributed or accumulated in some areas. These conditions can occur on the lower surface of the printing web, resulting in poor print quality. Therefore, it is necessary to clean the printing net, usually using a scraping device such as a knife or a squeegee to perform a mechanical cleaning under the printing net to remove the accumulated printing paste. In order to help the machine to clean and make it more efficient, it is necessary to pay a dry and conductive solvent substance before the removal or during the removal process, and usually it is a volatile solvent: in addition to the application of the solvent The main disadvantage of being able to transfer from the printing web is that the solvent will cause at least the stain: "The solvent has been used to cause poor printing quality." "Good conductive paste" In fact, no matter how small the solvent is, there is always a part: Used to print paste. “The contact with the solvent for printing is to provide a suitable solvent container, a pressurized distribution line, and control of the operating parameters of the distribution line. A cleaning device is provided in the known international patent application WO-A-2009/053782, which provides a rotating paper strip with an adhesive layer which contacts the lower surface of the printing screen to clean the printing, Instead of using cleaning techniques other than solvents. Feeding the paper strip from the Weier roller oiler and using the rewinding roller to collect and wind the paper strip, and a scraping element is disposed between the two rollers, the scraping element is matched with the cleaning paper strip to A determination of the contact pressure acts on the lower surface of the printing screen. It is an object of the invention to achieve a cleaning device for cleaning a device for screen printing one or more printed lines on a printing support plate using printed materials, in particular for removing excess or accumulated printed material on a screen printing network. The cleaning device can avoid the pollution caused by the use of the solvent to clean the printed materials, and is effective at the same time; the cleaning device is simple and economical. The Applicant has invented, measured, and applied the present invention to overcome the shortcomings of the current state of the art, and the <RTIgt; SUMMARY OF THE INVENTION The present month and its features are described in the separate items of the scope of the patent application, and the appended claims are intended to describe other features of the invention or variations of the main inventive concept. According to the above object 'cleaning device according to the invention for cleaning a screen printing screen in a screen printing apparatus' and usually a table of cleaning printing nets: the apparatus can be screen printed on a substrate by using a printing material An electric circuit is printed on a silicon-based wafer for manufacturing photovoltaic cells, for example, without limitation. According to the invention, the cleaning device comprises a first shaft, a second shaft and a strip, the strip can clean the printing screen and the strip is supported by the first shaft and the shaft cup; The first and second shafts can determine the rotational movement of the strip, usually along a determined path below the printing web, to facilitate the stripping/winding action of the strip to be removed from the printing screen. Printing paste. According to an embodiment, the first shaft and the second shaft are both mounted: and preferably a synchronous motor, which has the advantage of allowing full control of the strip, the upstream and downstream of the strip path. The speed of rotation. Alternatively, only the first shaft mount motor is used to recover the strip, and the 苐201113159 two-axis rod can be idle or freely rotated by the armor, and vice versa. The strip may be wound along a closed annular path between the first and second '"' glaze cups. Alternatively, the strip may have an open circular path. The strip is sent and the strip is recovered. It can be deployed along the second shaft and the first shaft. In this case, according to the specific aspect, it is idling or rotated by command. The second piece, the first shaft that is rotated by the command, can rewind the silver, which is made of a non-elastic or non-woven material. Because of this, the M. It will be extended and ensure that it has the best value in use... It is advantageous because it stays in the printing: the embodiment is also because it does not deform in nature and the length of the kiss is long or shrinks, so it can be accompanied by the sound-cleaning area. Width or amplitude - guarantee, break 'month ψ ^ five philosophies, thanks to the constant force of the fabric' D to obtain the fabric for constant use, thus 獾p < 、, 丨 彳 相互Thereby obtaining a constant contact surface. Another advantage is that when the inelasticity is slow, the speed of the strip" The speed at which the strip is made needs to be increased or decreased. Further, according to the present invention, the shaft, the circumference of the pressure roller;:, &
身介於壓力滾轴二I::::’使得MM 桿及第二軸桿之間的條片路經來二=介於第-軸 再者，該清潔…人 又置該壓力滾軸。 動該厂堅力滾㈣向元’該移動單元能移 選擇性地使該條片以一決 201113159 定接觸壓力來接觸該印刷網，該決定接觸壓力與將要執 行之清潔操作一致。 該具有旋轉壓力滾軸的實施例允許在不擦動的情況 下該印刷網上的校準壓力，且因而降低印刷網上的摩擦 力。該實施例亦讓所使用的織物具有均勻且正常的消 耗，亦即，降低織物磨損，因而延長上方印刷網的使用 壽命。該壓力滾軸的旋轉及其外表面本身的圓柱狀幾何 結構可使用來移動該清潔條片所需要的功率達到最佳 化，降低能量消耗。 此外，可朝向印刷網旋轉及移動之壓力滾軸及使用上 述非彈性織物的組合是有利的，因為此組合允許在印刷 網上執行均勻的清潔動作，亦避免織物滑動、變形或具 有非期望的張力。 根據本發明一實施例，用以製造該條片的織物是由第 一尼龍系絲線（nylon-based threads)構成的網所製成，且 利用第二聚酯系絲線（po丨yester_based thread〇將該每一 條第一尼龍系絲線纏繞成螺旋狀。此方式的優點在於該 織物不會脫出纖維、絲線、毛絲或其他絲物，且由於晶 圓通常要求避免所有污染，因此該織物是用以在晶圓： 絲網印刷導電線路之特殊應用中的最佳織物。此外，根 據此實施例的織物符合非彈性的期望要求。再者，所產 生的織物在清潔印刷網的動作中不會造成磨擦。 根據本發明，歸功於該移動單元的動作，壓力滾轴至 少具有第-操作狀態及第二非操作狀態，在第一操作狀 201113159 態中，該條片接觸印刷網用以清潔該印刷網，以及在第 二非操作狀態中，該條片脫離印刷網。 較佳地，該壓力滾軸至少部份是由彈性材料或彈性可 降服（elastic_yielding)材料所製成，例如橡膠或發泡橡 膠，用以緩衝或補償在印刷網上的織物接觸。此外，根 據接觸力量造成該麼力滾轴之變形亦能根據需求而改變 與印刷網接觸用來清潔的表面。 壓力滾軸的橡膠材料有助於決定料該織物的 期望摩擦力，以避免織物在旋轉過程中滑動。 根據一變化態樣，可 冑用不同材枓（例如’紙）來覆蓋 至^ 一。p份的壓力滾軸，該 餐i 科能吸收過量的印刷 膏或印刷膏中所含的溶劑。 根據一變化實施例，壓力滾軸安裝成可相對於其本身 的縱軸做空轉（fGtatabi / ' 鏟。/ u* v 且因條片之摩擦力而旋 以例子中’壓力滾軸能隨著第―轴桿 轴杯施加在條片上的旋轉移動而轉動。 戈第- 或者’該壓力滾軸設置成相對於本身之縱 7而旋轉，舉例來規利 接又〒 轉，且較佳二:二本身的自動馬達裝置來旋 早乂佳與該第-軸桿及該第二軸 該第一軸棵乃兮筮 馬動间步〇 軸才干及该第二軸桿安裳在位 滑動件（slider)i。 刷凋下方的一 該π動件能在一方向上移動，哕 放置平面平行 "冑方向與印刷網之 葉片之動作，用以在印刷網的整個二垂直橫越)該 下表面上執行清潔動 201113159 作相對於通常為水平放 潔條片的麼力滚轴不僅能在而5 ’具有相對清 向或遠離該印刷網，€ e上移動朝 而在印刷網下方做水平傳送移動…例子中移二:作 印刷設備移除該滑動件，了從該 的控制及維修。 τ…月潔條片或其他配件 卜A 了騎特定要求，#可 片的動作方向上是可移動的。 料製…葉 壓力滾軸本身旋轉的方 平^ 相對於上方印刷網的水 千移動運動一致。或者，a力滾轴以不尺 選擇其中-方向或另—古一 致的方向疑轉。 % ^ — 向有助於決定在印刷網上的f 強力清潔動作(旋轉方向 的更 (旋轉方向-致致）或力度較輕的清潔動作 根據一實施例態樣，將壓力滾轴 i4t ^ m c 弟—轴才干彼此相鄰 地叹置在㈣網下方，使得與壓力滚 2 +面相對於印刷網放置平面，呈實質平 仃或稍微傾斜。此方式不僅止是逐點定 ：：千 物條片定位成平面狀態以利於決用 以將織 表面。特別的a i 、、 ^、.同上之延伸清潔 衣卸特別的疋’相對於印刷網放 清潔表面有利;^創造出呈稍微傾斜的 導入自由導入區域，該自由 等入&域以漸進方式接觸由壓力 獲得較不粗㈣清㈣作，因而更加2撐的條片，而 根據該變化態樣之一特定例 2 及第二鈾俨且古杳Μ 特疋例中壓力滾軸 干、相等之直徑’屋力滚袖及第二轴桿 201113159 各自的縱相，其互相平行對齊且設置於一平面…平 面：：於印刷：放置平面是呈實質平行或稱微傾斜； :化方案提供將第一軸桿設置於壓力滾軸下方。此 種方式可獲得由兩個轴桿與 媸^ ^ 刀氓釉所形成的二角形結 構可使條片的移動最佳化且縮減體積。 另變化方案提供使該第—軸桿之縱軸對齊該壓力滚 抽之縱軸，亦即，筮 ± ,, P第一軸桿及壓力滾轴置於一橫斷平面 上’例如置於相對於該印刷網放置平面 稍微傾斜的平面上。 燹化態樣 • 該移動單元設有可調式致動 (adJustable_type aetuatiQn)，因而能在各情況下，根據需 求來界定該壓力滾軸抵靠該印刷網的接觸壓力。 較佳地，該清潔裝置包含致動裝置’該致動裝置能與 印刷網連接且能將印刷網移動朝向壓力滾軸。因此，既 然該印刷網可做高度上的移動，所以印刷網能接近位於 其下方的壓力滾軸，以配合該壓力滾軸接近印刷網時的 往復運動，用來進行清潔動作。 ' :此結合，本發明亦包含一感應構件，其能偵測且傳 t相應訊號’該相應訊號為在該印刷網及該愿力滾轴 ::復接近運動過程中該印刷網相對於該壓力滾轴的一 二定限制位置（determinate ⑴⑽）。如此有助於界 疋印刷網上的適當清潔力量，亦可較佳地根據所使用之 P刷網的彈性度來界定印刷網上適當的清潔力量。 根據本發明之解決方案的其他優點在於能提供可記憶 12 201113159 於系統控制器内的資料，以根據該些資料來控制及調整 後續操作步驟及/或後續操作週期。 【實施方式】 參閱附圖，根據本發明之清潔裝置1〇安裝在一絲網印 刷設備⑽之處理頭或印刷頭102的絲網印刷網或網印 遮罩12下方，該設備可用以在基材（例如，用於製造光 電電池的矽基晶® )上絲網印刷導電線路。 第1圖為基材處理設備或系統1〇〇的概要等視角圖， 該系統100能與本發明實施例㈣。在一實施例中，系 統100通常包含兩個輸入輸送器（inc〇ming 議vey〇r)111、一致動器組件⑽、複數個處理巢 — cessing nest)丨3丨、複㈣處_丨Q2、兩個輸出輸送 器（outgoing c〇nveyors)112及一系統控制器ι〇ι。輸入輸 送器⑴建構成平行處理結構，使得各個輸人輸送器^ 從入料裝置（例如’人料輸送器113)接收未處理的基材 150,並將每個未處理的基材15〇傳送至處理巢^中 該處理巢131與致動器組件1㈣合。此外，輸出輸送 器U2亦採平行式設計，使得各輸出輸送器能接收來自 處理巢⑶的已處理基材15〇，並且將各個已處理基材 15〇傳送至-基材移除裝置，例如，出料輸送器⑴。在 -實施例中’每個出料輪送胃114適用於傳送已處理基 材150通過一烤M 199,用以硬化透過處理頭⑻沉積 13 201113159 在基材150上的材料。 在一實施例中’基材i 50是微晶矽基材’用以在其上 製造太陽能電池。在另一實施例中，基材15〇是生胚陶 瓷基材（green tape ceramic substrate)或類似基材。 在本發明之一實施例中，系統丨〇 〇是網板印刷處理系 統，且處理頭102包含多個網板印刷構件，其配置以在 基材1 5 0上網板印刷一材料圖案層。在另一實施例中， 系統100是喷墨印刷系統，且處理頭丨〇2包含多個噴墨 印刷構件，其配置以在基材i 5 〇上沉積一材料圖案層。 在另貫施例中，系統1 00是一種在處理頭1 〇2中包含 材料移除構件的處理系統，例如包含雷射，其用以切除 或蝕刻基# 1 50的一或多個區域。在其他實施例中，系 統100可包含要求精確基材移動及定位的其他基材處理 模組’用以進行基材處理。 第2圖疋第1圖之系統丨〇 〇的概要平面圖。第1和2 圖說明系統1 00具有兩個處理巢丨3丨（位於「丨」'「3」位 置）’每個處理巢設置為皆能將已處理的基材15〇傳送至 輸出輸送H 112以及接收來自輸人輸送器ln的未處理 少材50因此，在系統100中，基材的移動通常是遵 檐第1和2圖中所繪示的「A」路徑。在此結構中，其他 兩個處理巢m(位於「2」、「4」位置）各自定位在處理頭 102下方’而能在位於各別處理I 131上的未處理基材 150上執行製程(例如’網板印刷、噴墨印刷或材料移除 等製程）。此種平行處理結構容許以最小的處理系統佔地 14 201113159 面積來獲得較大的處理容量。雖然所綠示的系統ι〇〇具 有兩個處理頭102及四個處理巢13ι， k在不偏離本發 日月範4的情況下，該系統100可能包含額外的處理頭ι〇2 及/或處理巢1 3 1。 在一實施例中’輸入輸送器1U及輸出輪送器HZ包 含至少-條帶116,其用以支#基材15G以及藉著使用 與系統控制器1〇1通訊的一致動器（未顯示）將基材15〇 輸送至系統100内的—期望位置。雖然第i # 2圖大體 上綠示-種雙條帶式的基材輸送系統，但在不偏離本發 明基本範圍的情況下’可使用其他形式的輪送機構來執 行相同的基材傳送與定位功能。 在一實施例中，系統100亦包含一檢測系統2〇〇，該 檢測系統200適用以在執行處理製程之前或之後尋找及 檢測基材150 »檢測系、统2⑽可包含 心如第…圖所示’該些攝影機12G設置用以= 位於裝載或卸載位置（「！」、「3」）十的基材^ 。檢測系 統2〇0通常包含至少—個攝影機12G(例如，CCD攝影機） 其他月匕尋找、檢測並將結果傳至系統控制器⑻的電 子構件°在—實施例中，檢測系、统2 0 0尋找輸人基材！ 5 0 -特徵”·。構的位置，並將檢測結果傳至系統控制器 10二’用於分析該基材的方向及位置，以於處理基材W 二幫助在處理頭102下方來精確定位基材150。在 實施例中，檢剩系統200檢測基材150，而得以從生 線移除知壞或因疏漏而未處理的基材。在一實施例 15 201113159 中，處理巢131可各自包含一燈或其他類似的光學輻射 裝置，用以照明位在處理巢上的基材丨5 〇 ,因而更便於 藉由檢測系統2 0 0來檢測基材。 在圖中概要繪不的系統控制器1〇1可幫助整體裝置 的控制與自動化，且系統控制器1〇1可包含中央處理單 元（cpu，未顯示）、記憶體（未顯示）及支援電路或1/〇(未 顯不）。CPU可為任意形式的電腦處理器，其可用來進行 工業設定以控制各種腔室製程及硬體（例如，輸送器、偵 測器、馬達、流體輸送硬體等），並監視該系統及腔室製 程（例如基材位置、製程時間、偵測器訊號等）。記憶體 連接至CPU，且可為一或多個目前可取得的記憶體，例 如位於m端或系統内（local)的隨機存取記憶體（RAM)、唯 讀記憶體（ROM)、軟碟、硬碟或其他形式的數位儲存器。 記憶體中可編碼及儲存軟體指令和數據，以用於指揮 CPU。支援電路亦連接至cpu，用以習知的方式來支援 處理器1援電路可包含快取裝置（cache)、電源供應器、 時鐘電路、輸入/輸出電路、子系統及諸如此類者。 在貫施例中，用於系統1 00中的兩個處理頭i 02可 為一般的網板印刷頭（可購自APplied Materiais Italia Μ) ’該些網板印刷頭適用以在網板印刷製程中於位置 J或4」之處理巢131上的基材丨5〇表面上以期望 圖案來/儿積材料。在—實施例中’處理頭㈤包含複數 個致動胃舉例來說’為與系統控制器101通訊的致動 °° 丨如，步進馬達或伺服馬達），且該些致動器用以 16 201113159 相對於待印基材150來調整置於處理頭1〇2内之網板印 刷遮罩（未顯示）的位置及/或角度方向。在一實施例 甲’網板印刷遮罩是—金屬片或金屬板，在該金屬板令 貫穿形成多個孔、狹縫或其他開孔以定義出一圖案以及 用以將網板印刷材料置於基材15〇的表面上。在一實施 例中’網板印刷材料可包括導電油墨或導電膏、介電油 墨或介電膏、摻雜膠、蝕刻膠、一或多種遮蔽材料或是 其他導電或介電性材料。通常，利用致動H 105以及系 統控制器101從檢測系統200收到的資訊來定位網板印 刷遮罩的方向’而以自動化方式使欲沉積在基# 150之 表面上的網板印刷圖案對準基材150。在一實施例中， 處理頭102適用於在寬度介於約125mm至156_且長 度介於約70_ι 156_ &太陽能電池基材上沉積含金 屬或含介電質之材料。通常，在絲網印刷製程的情況中， 在處理頭102内，印刷葉片Η沿箭帛F所示方向作用在 印刷網12上（為了方便僅緣示於第4圖中），以分散及印 刷及導電膏。箭頭F所示第—方向之所在平面與印刷網 =之放置平面平行。裝置1G包含-支撐滑動件16，該 滑動件16具有多個側壁18以界定出一内部容納座 (lnternal housing seating)26。 在容納座26内部安裝一第一重卷軸桿20及一第二餽 入軸柃22 ’該些軸桿可旋轉安裝在側壁1 8上且兩者分 別藉由馬達獨立驅動，以控制與軸桿相連之清潔條片21 的方疋轉’該清潔條片21是由織物所製成。 17 201113159 第-重卷轴桿20及第二餘入軸桿能控 沿著一決定路徑（通常在印刷網u下方）的旋轅片21 :較佳為鬆開/捲繞，以從印刷網12移除過量2動 貧。 里的印刷 特別是，在容納座26外部的_側壁& 一馬達23(第女褒一第 (第5圖）及第—馬達25 (第弟 別驅動第一輛煜川芬笙± 口亥些馬達分 釉桴20及第二輛桿22的旋轉。 因此使條片21沿著印刷 第二軸桿22之門的b 下方，丨於第—轴桿20及 忏22之間的一決定路徑(如第 久 來旋轉。 中箭碩S所示） 根據本發明—實施例，該路徑是 得條片21可順著人$ 衣狀路徑，使 "丨員者"於第-軸桿2〇及第 該封閉環狀路徑而捲繞。 則于22之間的 或者’條片21可順著介於第二轴桿 之間的一開访# & 〇第—軸桿20 ^放％狀路徑來延展。在此例子 例之一特定能姆 根據貫施 行疋態樣，該空轉或受命令而 能餽送該侔K 0 , 的第一軸桿22 4片2卜而接受命令而旋轉 能重卷及回收條片。 釉才于20則 根據本發明，1 _ 可使用彈性或非彈性材料 21。在一範彻由, 斤丨何杆所製成之條片 物材料。 ’、· 丨或無彈性的織 ]^根據本發明所使用的非彈性織 可延展的，且h 巧评注織物材料通常不 切向牵力# 且&佳為文到切向變形或 該非彈性織物材料具有最小彈性變形。 18 201113159 較佳地，製造條片21的織物是由尼龍網㈣。nmesh) 所製成’該尼龍網具有由聚自旨系絲線（P〇lyester_based threads)所纏繞成螺旋狀的線。例如，所使用的織物可為 在市面上販售之MiraWIPE®商品。 使用織物條片21允許清潔印刷網而無需使用溶劑，從 而避免溶劑損害印刷網背面處的印刷膏。 此外，纟於如此設計的條片21是不可延展的並且可保 證在使用中具有最佳怪定性，故使用非彈性織物之實施 例是有:i的，因為停留在印刷網12上的織物量總是相 同’且實質上不會變形、伸長或收縮亦能確保清潔區域 的寬度或幅度-致。再者’歸功於該織物的不變形能力， 吾等獲得該織物以怪定速度與印刷網21相互作用，從而 獲得值定的接觸表面。 當非彈性織物條片2 i的旋轉速度需要加快或減慢 時，發現到該條片的速度能即時做出與旋轉軸桿2〇和 22之速度相等的—致反應，因此使用非彈性材料之實施 例亦是有益的。 根據本發明一實施例，用以製造條片21的織物是由第 —尼龍系絲線（nylon-based threads)構成的網所製成，且 利用第二聚酯系絲線（p〇lyester_based threads)將該每一 條第一尼龍系絲線纏繞成螺旋狀。這麼做的優點在於該 織物不會脫出纖維、絲線、毛絲或其他絲物，由於晶圓 通常需要避免所有污染，因此該織物是用以在晶圓上絲 網印刷導電線路之特殊應用的最佳織物。此外，根據此 201113159 貫施例的織物可符合非彈性的期望要求。再者，所產生 的織物在清潔印刷網的動作中不會磨擦。 舉例來說，當欲清除的導電膏特別硬或具摩擦性以及 對表面的黏結特別頑強時，使用織物條片21的清潔裝置 ίο頗為有效。在此種情況中，其可能製造假性（faise)絲 網印刷，其僅能夠明分散之導電f中通t含有的溶劑 來沾溼該印刷網1 2，用丨v封α丄& e ^ 用以幫助軟化印刷膏的外皮以及促 進條片21的機械清潔動作。 如第3圖中之箭頭s所示，第一車由桿2〇及第二轴桿 22的旋轉可決定條片21 #整體旋轉動作，以用於隨後 印刷網12之機械性清潔動作。 因此，在印刷網12之表面附近(見第4及6圖），條片 Η的旋轉方向通常與印刷㈣12的水平移動方向相反。 h :後：中說明’條片21及印刷、網12亦可彼此反覆 罪以心接觸點’在決定接觸點後使條片21移動。 ’清潔裝置1〇亦包含-旋轉壓力滾軸24,該壓 力/袞軸2 4係沿著該條g ， '、片21的路徑設置在第一軸桿20及 第·一轴才干22之間，并 並且旋轉地支撐該條片21，該條片 21正切地行經該壓力滚轴 觸印刷網12之下矣^ 向便條片21接 面，而機械性地清潔印刷網12。 特別疋’壓力滾輛24本 而旋轉(見第5圖).本“繞其自身之旋轉縱軸X，，’ 根據一變化態樣，壓力 為摩擦力而隨著养“軸了為自由空轉’以及因 g田第—軸桿20及/或第二軸桿22迫 20 s4 201113159 使條片21的移動來轉動壓力滾軸24。 另'變化態樣提供利用馬達裝置（未顯示），例如步進 二達或伺服馬達命令壓力滾軸24旋轉，且較佳與該兩軸 干2〇及22的驅動同步。此方式的優點是 :著該條片21之路徑的上游及下游的條片21的旋轉速 又例如，可利用系統控制器J i來達成該同步動作。 此根據本發明之另-實施例’馬達驅動第-軸桿2 0以回 赫條片21 ’該第二軸桿22則因摩擦力而空轉或自由 旋轉，反之亦然。 控=，如第6圖中之箭頭Μ所示，藉著使用例如系統 ⑻錢壓力滾軸24選擇性地升高或降低，以使 '、片21接觸印刷網12。 如第4圖中所見，該壓力滾軸24至少具有與該 印刷網12接觸的一第一接 i 2 、狀心，以及脫離該印刷網 的=錢作中以連續線表*誠力滾㈣ 處；非操作狀態以及以虛線表 作狀態。 厪裏表不該壓力滾轴24處於操 適當=該壓力滾軸24向上移動，亦即朝向印刷網 械清Hi接觸印刷網12的下表面，以執行機 ::壓：，辑一調整壓力滾軸㈣ 壓力滚輪24本身; …水平移動:方Λ = 或者’壓力滾軸24能以 21 201113159 不一致的方向來旋轉。選擇其令-方向或另-方向以利 於決定在印刷網12上施用更強力的清潔動作（旋轉方向 不一致）或力度較輕的清潔動作（旋轉方向一致）。 具有旋轉塵力滾軸24的實施例可讓所使用的織物具 均勻且正常的消耗’亦即織物磨賴降低，因而延長上 f 12 #使$壽命°職力滾軸24的旋轉動作及 ' 纟身的圓柱狀幾何結構可使移動該清潔條片所 需要的功率相最佳化，而降消^ Μ轉及移_向印刷網12之屢力滚軸24與上述非 彈性織物的組合是具有優勢的’因為此組合允許在印刷 、上所執行的’月潔動作是均勻地，亦避免織物的滑 動、變形或具有非期望的張力。 在本發明之某些實施例中’可使用不同材料(例如，紙） L °卩伤的壓力滾軸24，該不同材料能吸收過 置的印刷膏或印刷膏中所含溶劑。 了利用合適的移動單元28來決定壓力滾軸Μ相對於 Ρ刷旧12的返離或接近的垂直運動。 3〇根據貫施例之一態樣’移動單元28包含兩個引導元件. 30，其位於該容納座26内部的兩側壁18上，且定位成 ^亥壓力滾軸24之旋轉車由的兩末端結合。在該兩個引導 2件3〇内部以可滑動方式容納滑動擋塊（sliding 〇邮2。每個滑動擋塊32連接至一相對滑動件η，該 :對滑動件31依次地連接至壓力滚軸24之軸桿末端， 以決定滑動件的移動。基於此目的，係設置線性致動 22 201113159 器34來移動各個相對滑動件3] m 或降低該厂堅力滾轴24。較佳地，唆=據需求來升高 是可以調整的，用以校正在印刷網：=:動作 根據本發L力於移動單 ·"的接觸壓力。 24提供第接— 的動作’為塵力滾轴 捉供弟一刼作狀態及第_ w 態中，條片2m, 狀態，在第-操作狀 在第P刷網12以清潔該印刷網12，以及 在第一非刼作狀態中 及 .^ Τ條片21脫離印刷網12。 系統控制器1〇1使壓力滾軸 步驟及後浐.主智 、移動與各種不同印刷 器34β、" 作同步’以及命令該相關的線性致動 m楚知道’為了向上移動壓力滾軸24，因此根據本發 明-變化態樣在容納座26 因此根據本發 # 30 ^ θ ^ 的—側邊上提供單一引導元 性致動器“。 動抬塊32、相對滑動件3〗及線 由於向上推擠條片21時 子怿片很脆弱，故壓力滾軸24 :好二部份是由柔軟材料所製成，例如橡膠或發泡橡 膠。如此可允許補償及，或緩衝介 21之間的接觸。 根據一實施例態樣，驻 ^稞裝置10包含致動裝置36(為了方 便，僅繪示於第4及6 in λ、 — t 圖中）’该致動裝置能決定印刷網 12相對於其下方條片Μ 之線性移動，如箭頭H所示之 上下移動或相反。 在一些實施例中，致動驶苗以λ ^ 裝置36之設計與第2圖中所示 之致動器105相同。 23 201113159 因此’此夠移動印刷網1 2的高度其有助於在清潔步驟 中"於該印刷網12與條片2〗之間的合作。較佳可利用 相同的系統控制器1〇1來控制致動裝置36的驅動，以決 定印刷網12及條片2 1較強或較弱的期望接觸壓力。可 根據所期望執行的清潔種類來決定印刷網1 2在條片2 ^ 上更強或較弱的壓力。 /據_實施例態樣’裝置1G包含—感應元件或感測 器，在在復接近的運動過程中，感應元件能偵測該印刷 網12相對於下方壓力滾軸24的位置。 在一些實施例中，感應元件可為連接至測力器(丨― cell)的壓力感應兀件或適合用於判斷壓力的其他裝置。 因此，感應元件也能用來界定該條片21上的印刷網12 的壓力。可利用系統控制器1〇1處理來自感應元件的訊 號，以控制致動元件36來決定印刷網12在該條片21上 的接觸壓力。 根據-變化態樣’感應元件包括觸針38 (第5及6圖） 或可偵測壓力的其他構件，其設置在印刷網12下方並且 以一決定高度來向上延伸。該高度是與在清潔過程中介 於該印刷網12和下方條片21之間的期望距離有關。在 此方案中’如附圖中所示範例，觸針38是沿著軸桿2〇、 22及壓力滾軸24而垂直設罟土九， 處。 置兩側…間的中央位置 利用感應元件（在此例子為觸 力有關之訊號’並將訊號傳至 針38)可測得與接觸及 系統控制器1 〇 i。 壓 24 201113159 當印刷網12接近條片21以進行清潔時，觸針38之上 末端與印刷網12的下表面抵觸。 "之 gg 4L Ο O ^ ., It 相對訊號， 觸針38將该相對訊號傳至系統控制器ι〇ι 35 1 m m &人w亥系統控制 裔i〇i因而中令該印刷網12朝向條片21 觸針38則做為發送使印 動停止 降運動之訊號的元件。 W21終止其往復升 可使用-或多個光電池做為感應元件來決定介於印刷 網12 /、條片21之間的位置’用以取代觸針38。、 在一些實施例中，觸針38或其他 ^ ^ m m 至刀砍應兀件能與光 電池併用，用以定義印刷網12在 咏月21上的之接觸愿 力以及印刷網12和條片2i的往復位置。 根據一變化實施例，放置一 和Μ平面上的第-站標 22及壓力滾軸24各自 的第一軸才干 合目具有相對旋轉軸χ，，及χ,，，， 一軸桿20的旋轉軸χ，則位於 冲一釉;f干22及壓力滚轴 24之旋轉軸X，，及χ’，，所在平面 ?? t'i n ^ ^ , J卜方。该些軸桿20與 22以及壓力滾軸24亦具有各自的旋轉軸Χ，、Χ，，、χ，，，， 該旋轉軸彼此平行且护勒# ρ …a 箭頭？所示之第-方向。在此 例子中，虽順著第3圖中之 _ 頭L所示方向從側邊觀看 時，該些軸桿20與22以及愚六、“ 側邊觀看 ψ & — & 滾軸24的幾何構造是設 置成二角形立體結構。 在本發明的一此督故 尸22 r… 壓力滾軸24及該第二軸 幹以被此相鄰的方式設置於該印刷網12下方，因此 使得相對於該印刷網12之放 24 ΑΨ ^ 千面而吕，與該壓力滾軸 μ及孩第一軸桿22 去 者之外表面正切的平面呈實質平 25 201113159 行或稍微傾斜。這允許蔣:敏 而有·二：物條片21定位在平面狀態， :利於決疋印刷網12上的延伸清潔表面 由滾軸衝程（roller stroke)所決定^ 疋藉 苗、τ, 决疋的相對於印刷網12之访 置平面而言呈稍微傾斜的 2〇。，伸可…… 最大傾斜度為 m.I ”其有利於創造出印刷網 由導入區域（free lead_in咖），該自由導 以漸進方式來接觸由壓力滾轴24所支樓 = 獲得較不粗㈣清潔動作，從而更加安全。# 21’而 根據一實施例態樣’裝置丨 以（為了方便，僅給_^ 匕3第水千移動裝置 便僅綠不於第3、4及5圖中）’為了 =至接觸印刷網12的整個下表面而清潔該下表面， 二=第：水平移動裝置料使滑動件心印刷網U 下方在才只越葉片14之動作的方& 如箭頭F所示)。動作的方向上移動的動作 特別是，歸功於移動裝置44，該滑動件16能在盘葉 ㈣ρ μ(箭頭f所示）實質垂直的方向上移 動，’而與第一方向實質垂直的方向則以箭頭G表示。 這樣亦允許從印刷頭中移除滑動件16及清潔裝置10， 以供進行例如維護、整修或更換之目的。活塞52可移 動’以藉著例如插入一接合座（未顯示）中而選擇性地夾 住滑動件16，該滑叙, γ , 月動件16位於印刷網12下方之工作位 置中或位於印刷網1 2牌 2體積外側之休止位置中。根據一 化態樣’可設置光電池，該些光電池產生位置訊號且該 訊號經由系統控制5§ , η 器101來處理’以命令該移動裝置44 26 201113159 及控制該滑動件丨6的實際位置。 有利地，根據另一變 移動裝置46，藉由第上樣，該裝置10包含第二水平 精由第—水平移動裝置46使滑動件16亦 可在第一方向D(盥第_ .τ ^ ^ 方向F平行）上移動’且該第二 水平移動裴置46亦設置在盘ρ 置在與印刷網1 2之放置平面成平 行的一平面上。在此衿 丁 七々 月况中，在滑動件1 ό的下方部分吱 有多個引導滾輪4Q，田、， 久 輪Μ ^沿著特別建構成軌道狀的支撐 引導件47來滑動，兮*捧又得 μ支撐引導件47安裝在位於滑動件 16下方的支撐平板45 上且在一方向上縱向 (longitudinally)延伸，兮士 a μ 甲°亥方向4買越印刷葉片14的第—工 作方向（箭頭F)。 彳< Τ於印刷頭外部從印刷網12 了方移除滑動 16,例如用以控制該條片2ι的狀況，或於任何時候 可輕易地進行維修。如此—來，甚至當電子元件之平板 二件正在工作期間，也能維修清潔裝置ι〇及更換條片 21，而無需中斷絲網印刷作業及製程循環週期。 :利地田文裝在印刷機器上的相連視覺控制系統(例 ❹閱國際申請案WO_A_2_/G53784號）觀查到印刷網 破裂或债測到任何印刷品質不佳的情況時，裝置ι〇會自 動啟動。然而’無疑地’即便有預設的時間期限，_ %作者認為有必要時，操作者亦能強制啟動該裝置10。 其瞭解到，可在不偏離本發明領域與範嘴之情況下， 2中所述清潔裝置1G做出修飾及/或添加部位，該清 潔裝置1〇用以清潔在印刷支撐件上進行絲網印刷的設 27 201113159 備。 亦瞭解到，文令雖已參照多個 明，& _ p 付疋實施例來說明本發 仁所屬技術領域中，孰来$ 清潔鞋罢w Y㉟…亥項技藝者必然能達成該 ’月為裝置的其他等效離描， ± - ^ . ΗΙ 〜、 、了用以清潔在印刷支撐件 上4、·周印刷之設備，該此 圍中所述之特徵，故皆有 專利範 護範轉所涵蓋。&為本案^專利範圍所界定之保 【圖式簡單說明】 >閱以上較佳實施例的說明，將&明& + & ^ 时此明白本發明之上述 特徵及其他特徵，且較 ^ 钗佳貫施例為參照附圖的非限制性 例，其中： 第圖疋處理系統的概要等角視圖，該系統能與根 據本發明實施例之裝置合併使用。 第2圖疋第1圖之處理系統的概要平面圖。 第3圖是根據本發明之清潔裝置的透視圖。 該清潔裝 第4圖為根據本發明之清潔裝置的正視圖 置連接絲網印刷網及相關印刷葉片。 、第5圖為根據本發明之清潔裝置的俯視平面圖，該清 潔裴置連接相關印刷葉片。 第6圖為根據本發明之清潔褒置的側視圖，該清潔裝 置連接相關印刷葉片。 為了便於瞭解，盡可能使用相同元件符號來標示該些 28 201113159 圖中共有的相同元件。無需進一步說明，便能預期一實 施例的元件與特徵可有利地併入其他實施例中。 【主要元件符號說明】 1 〇清潔裝置 12 印刷網 14葉片 16滑動件 18側壁 20第一軸桿 21條片 22 第二軸桿 23 第一馬達 24壓力滾軸 2 5 第二馬達 26容納座 28移動單元 30引導元件 3 1相對滑動件 32滑動擋塊 34線性致動器 36致動裝置 38感應元件/觸針 29 201113159 44第一水平移動裝置 45支撐平板 46第二水平移動裝置 47支撐引導件 49引導滾輪 52活塞 100設備/系統 10 1系統控制器 102 印刷頭/處理頭 105致動器 111輸入輸送器 112輸出輸送器 113入料輸送器 114出料輸送器 11 6條帶 120攝影機 13 1處理巢 140致動器組件 150基材 199烤爐 200檢測系統 30The pressure roller 2 I::::' causes the strip between the MM rod and the second shaft to pass through two = between the first and the second axis, and the cleaning person places the pressure roller again. The plant is forced to roll (4) to the unit. The mobile unit can selectively move the strip to contact the printing web with a contact pressure of 201113159, which determines the contact pressure to be consistent with the cleaning operation to be performed. The embodiment with a rotating pressure roller allows for calibrated pressure on the printing web without rubbing, and thus reduces friction on the printing web. This embodiment also allows for uniform and normal consumption of the fabric used, i.e., reduces fabric abrasion, thereby extending the useful life of the upper printing web. The rotation of the pressure roller and the cylindrical geometry of its outer surface itself optimizes the power required to move the cleaning strip, reducing energy consumption. Furthermore, it is advantageous to have a combination of a pressure roller that can be rotated and moved toward the printing web and a non-elastic fabric as described above, since this combination allows for a uniform cleaning action to be performed on the printing web, as well as avoiding slippage, deformation or undesired tension. According to an embodiment of the invention, the fabric used to make the strip is made of a mesh of first nylon-based threads and utilizes a second polyester thread (po丨yester_based thread〇) The first nylon yarn is wound into a spiral. The advantage of this method is that the fabric does not come off fibers, threads, filaments or other filaments, and since the wafer is generally required to avoid all contamination, the fabric is used. The best fabric in the special application of wafer: screen printed conductive lines. Furthermore, the fabric according to this embodiment meets the inelastic desired requirements. Furthermore, the resulting fabric does not act in cleaning the printing screen. According to the invention, due to the action of the mobile unit, the pressure roller has at least a first operating state and a second non-operating state, in the first operational state 201113159 state, the strip contacts the printing net for cleaning the The printing screen, and in the second inoperative state, the strip is detached from the printing web. Preferably, the pressure roller is at least partially elastic or elastic (elastic) _yielding) made of material, such as rubber or foamed rubber, to cushion or compensate for fabric contact on the printing web. In addition, the deformation of the force roller can also be changed according to the demand to contact with the printing net according to the contact force. The surface used for cleaning. The rubber material of the pressure roller helps to determine the desired friction of the fabric to prevent the fabric from sliding during the rotation. According to a variant, different materials can be used (eg 'paper') To cover the pressure roller of the p-part, the meal can absorb excess solvent or the solvent contained in the printing paste. According to a variant embodiment, the pressure roller is mounted in a longitudinal position relative to itself. The shaft is idling (fGtatabi / 'shovel. / u* v and is rotated by the friction of the strip. In the example, the pressure roller can rotate with the rotational movement of the first shaft cup on the strip. - or 'the pressure roller is arranged to rotate relative to its longitudinal length 7, for example, to adjust and rotate, and preferably two: two automatic motor devices to rotate the shaft and the first shaft and The second axis is the first The 兮筮 兮筮 动 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及The action of the direction and the blade of the printing net for performing the cleaning movement on the lower surface of the entire vertical traverse of the printing screen is not only possible but also 5' relative to the normally horizontal cleaning strip. With relatively clear or away from the printing net, move on e e and move horizontally under the printing net... Example shift 2: The printing device removes the slider from the control and maintenance. τ...month The strips or other accessories have a specific requirement for riding, and the direction of the action of the sheet is movable. Material system... Leaf The horizontal rotation of the pressure roller itself is consistent with the movement of the water in the upper printing net. Or, the force roller can be selected in a direction that does not measure the direction of the direction or the other direction. % ^ — to help determine the f-strong cleaning action on the printing web (more (rotation direction - causing) or lighter cleaning action in the direction of rotation according to an embodiment, the pressure roller i4t ^ mc The brother-axis is placed next to each other under the (4) net, so that it is substantially flat or slightly inclined with respect to the plane of the pressure roll 2+ with respect to the printing net. This way is not only fixed point by point:: thousand pieces Positioned in a flat state to facilitate the use of the weaving surface. The special ai, ^,., the same as the extension of the cleaning and unloading of the special 疋 'relative to the printing net to clean the surface is advantageous; ^ create a slightly inclined import free introduction The region, the free equal-in & field is progressively contacted by the pressure to obtain a strip that is less coarse (four) clear (four), and thus more supportive, and according to one of the variants, the specific example 2 and the second uranium and杳Μ In the special case, the pressure roller is dry, the equal diameter 'house rolling sleeve and the second shaft 201113159 are their longitudinal phases, which are aligned parallel to each other and set in a plane... Plane:: In printing: the placement plane is Substantially parallel The micro-tilt; the solution provides the first shaft to be placed under the pressure roller. This way, the two-axis structure formed by the two shafts and the 氓^^ 氓 氓 glaze can make the movement of the strip most. Further, the volume is reduced. The other variation provides that the longitudinal axis of the first shaft is aligned with the longitudinal axis of the pressure rolling, that is, 筮± , , P the first shaft and the pressure roller are placed in a transverse plane The upper part is placed, for example, on a plane that is slightly inclined with respect to the plane in which the printing web is placed. The morphing state • The moving unit is provided with an adjustable actuation (adJustable_type aetuatiQn), so that the pressure can be defined according to requirements in each case. Preferably, the cleaning device comprises a contact pressure of the printing screen. Preferably, the cleaning device comprises an actuating device that is connectable to the printing screen and that moves the printing web toward the pressure roller. The height is moved, so the printing net can approach the pressure roller located below it to match the reciprocating motion of the pressure roller when approaching the printing net for cleaning action. ': This combination also includes a sense a member capable of detecting and transmitting a corresponding signal 'the corresponding signal is a certain limit position of the printing net relative to the pressure roller during the printing movement and the retracting roller: (1) (10)). This helps to define the appropriate cleaning power on the printing web, and preferably defines the appropriate cleaning power on the printing web depending on the elasticity of the P-brush web used. Others in accordance with the solution of the present invention The utility model has the advantages that the data in the system controller can be memorized 12 to control and adjust the subsequent operation steps and/or the subsequent operation cycle according to the data. [Embodiment] Referring to the drawings, the cleaning device 1 according to the present invention is provided. The crucible is mounted under the screen printing screen of the screen printing apparatus (10) or the screen printing screen or screen printing mask 12 of the printing head 102, which can be used on a substrate (for example, a ruthenium base® for manufacturing photovoltaic cells). Screen printed conductive lines. 1 is a schematic perspective view of a substrate processing apparatus or system, and the system 100 can be combined with the embodiment (4) of the present invention. In one embodiment, system 100 typically includes two input conveyors 111, an actuator assembly (10), a plurality of processing nests - cessing nests 丨 3 丨, and a complex (four) _ 丨 Q2 Two outgoing conveyors (outgoing c〇nveyors) 112 and one system controller ι〇ι. The input conveyor (1) is constructed to form a parallel processing structure such that each of the input conveyors receives the unprocessed substrate 150 from the feeding device (e.g., the 'human conveyor 113') and transports each untreated substrate 15 The processing nest 131 is combined with the actuator assembly 1 (d) into the processing nest. In addition, the output conveyor U2 is also of a parallel design such that each output conveyor can receive the treated substrate 15〇 from the processing nest (3) and transfer each processed substrate 15〇 to the substrate removal device, for example , discharge conveyor (1). In the embodiment, each of the discharge wheel delivery stomachs 114 is adapted to convey the treated substrate 150 through a baking M 199 for hardening the material deposited on the substrate 150 through the processing head (8). In one embodiment, 'substrate i 50 is a microcrystalline substrate' for fabricating a solar cell thereon. In another embodiment, the substrate 15 is a green tape ceramic substrate or the like. In one embodiment of the invention, the system is a screen printing processing system, and the processing head 102 includes a plurality of screen printing members configured to print a pattern layer of material on the substrate 150. In another embodiment, system 100 is an inkjet printing system, and processing cartridge 2 includes a plurality of inkjet printing members configured to deposit a layer of material pattern on substrate i5. In still other embodiments, system 100 is a processing system that includes a material removal member in processing head 1 , 2, for example, including a laser that is used to cut or etch one or more regions of base #1 50. In other embodiments, system 100 can include other substrate processing modules that require precise substrate movement and positioning for substrate processing. Figure 2 is a schematic plan view of the system 丨〇 疋 of Figure 1. Figures 1 and 2 show that System 100 has two processing nests 3 (located at the "丨" '"3" position). Each processing nest is configured to transfer the processed substrate 15〇 to the output transport H. 112 and receiving the unprocessed material 50 from the input conveyor ln. Thus, in the system 100, the movement of the substrate is generally in accordance with the "A" path depicted in Figures 1 and 2. In this configuration, the other two processing nests m (located at the "2", "4" positions) are each positioned below the processing head 102' and can be executed on the unprocessed substrate 150 located on the respective processing I 131 ( For example, 'screen printing, inkjet printing or material removal processes. This parallel processing structure allows for a larger processing capacity with a minimum processing system footprint of 14 201113159. Although the green system ι has two processing heads 102 and four processing nests 13i, k may include additional processing heads ι〇2 and/or without departing from the present day and month. Or handle nest 1 3 1. In one embodiment, the 'input conveyor 1U and the output carrier HZ comprise at least a strip 116 for supporting the #substrate 15G and by using an actuator that communicates with the system controller 1〇1 (not shown) The substrate 15 is delivered to a desired location within the system 100. Although the i-# 2 diagram is substantially green-type double strip substrate transport system, other forms of the transfer mechanism can be used to perform the same substrate transfer without departing from the basic scope of the present invention. GPS. In one embodiment, system 100 also includes a detection system 2 that is adapted to seek and detect substrate 150 before or after performing a processing process. The detection system, system 2 (10) can include a heart as shown in the figure These cameras 12G are set to use the substrate ^ at the loading or unloading position ("!", "3") ten. The detection system 2〇0 typically includes at least one camera 12G (eg, a CCD camera). Other months to find, detect, and pass the results to the electronic components of the system controller (8). In the embodiment, the detection system, system 2 0 0 Find the input substrate! The position of the structure is transmitted to the system controller 10' for analyzing the direction and position of the substrate, so that the substrate W is processed to facilitate precise positioning under the processing head 102. Substrate 150. In an embodiment, the residual system 200 detects the substrate 150 to remove the substrate that is untreated or otherwise untreated from the green line. In an embodiment 15 201113159, the processing nests 131 can each Contains a lamp or other similar optical radiation device to illuminate the substrate 丨5 位 located on the processing nest, thus making it easier to detect the substrate by the detection system 2000. System control not outlined in the figure The device 1〇1 can help control and automate the whole device, and the system controller 101 can include a central processing unit (cpu, not shown), a memory (not shown), and a support circuit or 1/〇 (not shown). The CPU can be any type of computer processor that can be used for industrial settings to control various chamber processes and hardware (eg, conveyors, detectors, motors, fluid delivery hardware, etc.) and to monitor the system and Chamber process (eg substrate position) , process time, detector signal, etc.) The memory is connected to the CPU and can be one or more currently available memories, such as random access memory (RAM) located at the m-end or in the system (local). Read-only memory (ROM), floppy disk, hard disk, or other forms of digital storage. Software instructions and data can be encoded and stored in the memory for commanding the CPU. The support circuit is also connected to the CPU for learning Knowing ways to support the processor 1 circuit can include a cache, a power supply, a clock circuit, an input/output circuit, a subsystem, and the like. In the example, used in the system 100 The two processing heads i 02 can be general stencil print heads (available from Applied Materiais Italia Μ) 'the stencil print heads are suitable for processing the nest 131 in the screen printing process at position J or 4" The material is deposited on the surface of the substrate 以5〇 in a desired pattern. In the embodiment, the 'processing head (5) includes a plurality of actuation stomachs, for example, 'actuation for communication with the system controller 101, such as a stepper motor or a servo motor, and the actuators are used for 16 201113159 The position and/or angular orientation of the screen printing mask (not shown) placed in the processing head 1〇2 is adjusted relative to the substrate 150 to be printed. In one embodiment, a screen printing mask is a metal sheet or a metal sheet in which a plurality of holes, slits or other openings are formed to define a pattern and to serve the screen printing material. On the surface of the substrate 15〇. In one embodiment, the screen printing material may comprise a conductive ink or conductive paste, a dielectric ink or dielectric paste, a doping paste, an etchant, one or more masking materials, or other conductive or dielectric materials. Typically, the screen printing pattern pair to be deposited on the surface of the base #150 is automated in an automated manner by actuating the H 105 and the information received by the system controller 101 from the inspection system 200 to locate the direction of the screen printing mask. Quasi-substrate 150. In one embodiment, the processing head 102 is adapted to deposit a metal- or dielectric-containing material on a solar cell substrate having a width of between about 125 mm and 156 mm and a length of between about 70 mm and 156 Å. Generally, in the case of a screen printing process, in the processing head 102, the printing blade 作用 acts on the printing web 12 in the direction indicated by the arrow F (for convenience, only the edge is shown in Fig. 4) for dispersion and printing. And conductive paste. The plane in which the first direction is indicated by the arrow F is parallel to the plane of placement of the printing net. The device 1G includes a support slide 16 having a plurality of side walls 18 to define an internal housing seating 26. A first re-roller rod 20 and a second feed-in shaft 22' are mounted inside the accommodating seat 26. The shafts are rotatably mounted on the side wall 18 and are independently driven by a motor to control the shaft. The cleaning strip 21 of the attached cleaning strip 21 is made of fabric. 17 201113159 The first rewinding bar 20 and the second remaining reel can control the squeegee 21 along a determined path (usually below the printing screen u): preferably loosened/winded to the print web 12 Remove excess 2 moving poverty. In particular, in the outside of the accommodating seat 26, the _ side wall & a motor 23 (the first 褒一一 (figure 5) and the first motor 25 (the first brother drives the first 煜川芬笙± 口海The rotation of the motor glaze 20 and the second rod 22. Thus, the strip 21 is positioned along the bottom b of the gate of the second shaft 22, and a determined path between the first shaft 20 and the cymbal 22 (as shown in the long-term rotation. The middle arrow S shows) According to the invention - the embodiment, the path is that the strip 21 can follow the person's clothing path, so that "sportsman" 2〇 and the closed annular path is wound. Then between 22 or 'strip 21 can follow an opening between the second shaft # & 〇 first - shaft 20 ^ put The %-like path is extended. In one of the examples, the specific energy can be fed according to the execution state, and the idle or commanded can feed the first shaft 22 of the 侔K 0 , and accept the command. The rotating energy rewinds and recovers the strips. The glaze is only 20 according to the invention, 1 _ can use elastic or non-elastic material 21. The strip material made of a rod and a rod ', · 丨 or inelastic woven fabric ^) The inelastic woven fabric used in accordance with the present invention is extensible, and the woven fabric material is generally not tangentially biased and is preferably tangentially deformed or non- The elastic woven material has minimal elastic deformation. 18 201113159 Preferably, the fabric from which the strip 21 is made is made of nylon mesh (4). The nylon mesh has a entanglement of P〇lyester_based threads. A spiral-like thread. For example, the fabric used may be commercially available MiraWIPE® merchandise. The use of the fabric strip 21 allows the printing web to be cleaned without the use of a solvent, thereby preventing the solvent from damaging the printing paste on the back side of the printing web. Moreover, the strip 21 thus designed is non-extensible and ensures optimum ambiguity in use, so embodiments using non-elastic fabrics have: i because of the amount of fabric remaining on the printing web 12. Always the same 'and not substantially deformed, stretched or shrunk to ensure the width or amplitude of the clean area - and again' thanks to the non-deformability of the fabric, we get the fabric to blame The speed interacts with the printing web 21 to obtain a defined contact surface. When the rotational speed of the inelastic fabric strip 2 i needs to be increased or slowed, it is found that the speed of the strip can be instantly made with the rotating shaft 2 Embodiments in which the speed of the crucible and the 22 are equal, and thus the use of a non-elastic material are also advantageous. According to an embodiment of the invention, the fabric used to manufacture the strip 21 is made of nylon-based yarn (nylon-based). Threads are formed of nets, and each of the first nylon-like wires is wound into a spiral shape using a second polyester-based thread. The advantage of this is that the fabric does not come out of fibers, threads, filaments or other filaments. Since wafers usually need to avoid all contamination, the fabric is a special application for screen printing conductive traces on wafers. The best fabric. In addition, fabrics according to this 201113159 embodiment can meet the non-elastic requirements. Furthermore, the resulting fabric does not rub during the action of cleaning the printing web. For example, when the conductive paste to be removed is particularly hard or abrasive and the bonding to the surface is particularly tenacious, the cleaning device using the fabric strip 21 is quite effective. In this case, it is possible to manufacture a faise screen printing which can only wet the printed web 1 by the solvent contained in the dispersed conductive f, and seal the α 丄 & ^ Used to help soften the outer skin of the printing paste and to promote the mechanical cleaning action of the strip 21. As indicated by the arrow s in Fig. 3, the rotation of the rod 2〇 and the second shaft 22 of the first vehicle determines the overall rotation of the strip 21# for subsequent mechanical cleaning of the printing web 12. Thus, near the surface of the printing web 12 (see Figures 4 and 6), the direction of rotation of the strips is generally opposite to the horizontal movement of the printing (four) 12. h: after: the description that the strip 21 and the printing and web 12 can also be reversed from each other to the point of contact with the heart. After the contact point is determined, the strip 21 is moved. 'The cleaning device 1〇 also includes a rotary pressure roller 24 which is disposed along the path of the strip g, ', 21 between the first shaft 20 and the first shaft 22 And rotatably supporting the strip 21, the strip 21 is tangentially passed through the pressure roller to the bottom of the printing web 12 to the surface of the strip 21 to mechanically clean the printing web 12. In particular, the 'pressure roller' rotates 24 times (see Figure 5). This "about its own vertical axis of rotation X,," according to a variant, the pressure is friction and the shaft is free to idle. And the movement of the strip 21 to rotate the pressure roller 24 by the movement of the strip 21 and/or the second shaft 22 by 20 s4 201113159. Another 'variational aspect" provides for the rotation of the pressure roller 24 using a motor arrangement (not shown), such as a stepper or servo motor, and preferably synchronized with the drive of the two shafts 2 and 22. This method has the advantage that the rotational speed of the strip 21 upstream and downstream of the path of the strip 21 can be achieved, for example, by the system controller J i . According to another embodiment of the present invention, the motor drives the first shaft 20 to return the strip 21'. The second shaft 22 is idling or free to rotate by friction, and vice versa. Control =, as indicated by the arrow 中 in Fig. 6, is selectively raised or lowered by using, for example, the system (8) money pressure roller 24 so that the sheet 21 contacts the printing web 12. As seen in Fig. 4, the pressure roller 24 has at least a first contact i 2 in contact with the printing net 12, a centroid, and a detachment from the printing net = a continuous line table * a force roll (four) At the non-operational state and in the state of the dotted line.厪 表 该 压力 压力 压力 压力 压力 压力 = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = (iv) Pressure roller 24 itself; ... horizontal movement: square Λ = or 'pressure roller 24 can rotate in a direction inconsistent with 21 201113159. The order-orientation or the other-direction is chosen to facilitate the decision to apply a more aggressive cleaning action (inconsistent direction of rotation) or a less aggressive cleaning action (consistent direction of rotation) on the printing screen 12. The embodiment with the rotating dust roller 24 allows for a uniform and normal consumption of the fabric used, i.e., the fabric wear is reduced, thereby extending the rotation of the service roller 22 and the life of the employee. The cylindrical geometry of the body optimizes the power required to move the cleaning strip, and the combination of the repeating roller 24 and the non-elastic fabric that is reduced and transferred to the printing web 12 is It is advantageous 'because this combination allows the 'monthly cleaning action' performed on printing to be uniform, as well as avoiding slippage, deformation or undesired tension of the fabric. In some embodiments of the invention, a different material (e. g., paper) L° bruised pressure roller 24 can be used which absorbs the solvent contained in the existing printing paste or printing paste. The appropriate movement unit 28 is utilized to determine the return or near vertical movement of the pressure roller Μ relative to the licker 12 . 3. According to one aspect of the embodiment, the mobile unit 28 includes two guiding elements 30, which are located on the two side walls 18 inside the receiving seat 26, and are positioned as two rotating vehicles of the pressure roller 24 End binding. A sliding stopper is slidably received inside the two guiding members 3 (sliding slings 2). Each sliding stopper 32 is connected to a relative sliding member η, which is sequentially connected to the pressure roller 31. The end of the shaft of the shaft 24 is used to determine the movement of the slider. For this purpose, a linear actuation 22 201113159 34 is provided to move the respective relative slides 3] m or to lower the factory strength roller 24. Preferably,唆 = can be adjusted according to the demand, used to correct the contact pressure in the printing network: =: action according to the power of the mobile L · " 24 provide the first action - the dust roller In the state of the priest and the _w state, the strip 2m, the state, in the first-operating state in the first P-brush net 12 to clean the printing net 12, and in the first non-production state and .^ The rafter blade 21 is detached from the printing screen 12. The system controller 1 使1 makes the pressure roller step and the 浐. The main wisdom, the movement and the various printers 34β, " synchronize ' and command the relevant linear actuation m Chu Knowing that 'in order to move the pressure roller 24 upwards, therefore according to the invention - the variation is in the capacity The seat 26 thus provides a single guiding elementary actuator on the side of the present invention #30^θ^. "Moving the lifting block 32, the opposing sliding member 3" and the line is very thin due to the upward pushing of the strip 21 Vulnerable, so the pressure roller 24: the two parts are made of a soft material, such as rubber or foamed rubber. This allows for compensation and, or contact between the buffers 21. According to an embodiment, the station The 稞 device 10 includes an actuating device 36 (shown only in the 4th and 6th λ, -t diagrams for convenience) 'the actuating device can determine the linear movement of the printing web 12 relative to the strip Μ below it, Moving up or down as indicated by arrow H. In some embodiments, the actuation of the seedling is the same as the actuator 105 shown in Figure 2 with the λ^ device 36. 23 201113159 Therefore 'this is enough for mobile printing The height of the net 12 contributes to the cooperation between the printing web 12 and the strip 2 in the cleaning step. Preferably, the same system controller 101 is used to control the driving of the actuating device 36. To determine the desired contact pressure of the printing web 12 and the strip 21 is stronger or weaker. The type of cleaning desired to be performed determines the stronger or weaker pressure of the printing web 1 2 on the strip 2 ^. / According to the embodiment, the device 1G comprises - an inductive element or a sensor, in close proximity During the movement, the sensing element can detect the position of the printing web 12 relative to the lower pressure roller 24. In some embodiments, the sensing element can be a pressure sensing element connected to the dynamometer (丨-cell) or suitable Other means for determining pressure. Accordingly, the sensing element can also be used to define the pressure of the printing web 12 on the strip 21. The signal from the sensing element can be processed by the system controller 101 to control the actuating element 36 to determine the contact pressure of the printing web 12 on the strip 21. The sensing element comprises a stylus 38 (Figs. 5 and 6) or other member capable of detecting pressure disposed below the printing web 12 and extending upwardly at a determined height. This height is related to the desired distance between the printing web 12 and the underlying strip 21 during the cleaning process. In this embodiment, the stylus 38 is vertically disposed along the shafts 2, 22 and the pressure roller 24 as exemplified in the drawings. The central position between the two sides is measured by the sensing element (in this example, the contact-related signal 'and the signal is transmitted to the needle 38) to measure the contact and system controller 1 〇 i. Pressure 24 201113159 When the printing screen 12 approaches the strip 21 for cleaning, the upper end of the stylus 38 interferes with the lower surface of the printing web 12. "the gg 4L Ο O ^ ., It relative signal, the stylus 38 transmits the relative signal to the system controller ι〇ι 35 1 mm & the human system controls the i i, thus the printing network 12 The stylus 38 toward the strip 21 acts as an element for transmitting a signal that causes the imprint to stop moving. W21 terminates its reciprocating rise. It is possible to use - or a plurality of photovoltaic cells as sensing elements to determine the position between the printing web 12 / strip 21 to replace the stylus 38. In some embodiments, the stylus 38 or other ^^mm to knives can be used in conjunction with the photovoltaic cell to define the contact force of the printing web 12 on the moon 21 and the printing web 12 and the strip 2i. Reciprocating position. According to a variant embodiment, the first axis of each of the first station mark 22 and the pressure roller 24 placed on a plane of the heel and the second axis has a relative rotational axis ,, and χ,,,, the axis of rotation of the shaft 20 χ, it is located in the glaze; f dry 22 and the axis of rotation of the pressure roller 24, X, and χ ', where the plane? t'i n ^ ^, J Bu Fang. The shafts 20 and 22 and the pressure roller 24 also have respective rotation axes Χ, Χ, χ, χ,,, and the rotation axes are parallel to each other and the guard # ρ ... a arrow? The first direction shown. In this example, although viewed from the side in the direction indicated by the head L in Fig. 3, the shafts 20 and 22 and the "six side view" are used to view the ψ && The geometrical configuration is set to a two-dimensional three-dimensional structure. In the present invention, the pressure roller 24 and the second shaft are disposed adjacent to the printing net 12 in this adjacent manner, thereby making the relative The printing net 12 is placed 24 ΑΨ ^ 千面吕, which is substantially flat 25 201113159 lines or slightly inclined with the plane of the pressure roller μ and the first axis 22 of the child. Sensitive and two: the strip 21 is positioned in a planar state, which is advantageous for determining the extended cleaning surface on the printing web 12 by the roller stroke. The access level of the net 12 is slightly inclined by 2〇. The extension can be... The maximum inclination is mI”, which is beneficial to create a printing mesh from the lead-in area (free lead_in coffee), which is in progressive contact. The building supported by the pressure roller 24 = obtains a less coarse (four) cleaning action, from safer. #21' and according to an embodiment of the device 'device ( (for convenience, only _^ 匕 3 Digitary mobile device is only green is not in the 3rd, 4th and 5th drawings) 'for = to contact printing network The lower surface of the lower surface of the 12 is cleaned, and the second horizontal portion moves the material below the slider core U to the side of the blade 14 (as indicated by arrow F). The action of moving in the direction of the motion, in particular, thanks to the moving device 44, the slider 16 can be moved in a substantially vertical direction of the disk (4) ρ μ (indicated by arrow f), and the direction substantially perpendicular to the first direction is Indicated by the arrow G. This also allows the slide 16 and cleaning device 10 to be removed from the printhead for purposes such as maintenance, refurbishment or replacement. The piston 52 is movable 'to selectively clamp the slider 16 by, for example, being inserted into a joint (not shown), the slide, y, the lug 16 being located in the working position below the printing screen 12 or in printing The net 1 2 card 2 is in the rest position of the outside of the volume. Photocells can be provided according to a state in which the photocells generate a position signal and the signal is processed via system control 5 § , n η 101 to command the mobile device 44 26 201113159 and control the actual position of the slider 丨 6. Advantageously, according to another variable mobile device 46, by means of the first loading, the device 10 comprises a second horizontal fine by the first horizontal moving device 46 such that the slider 16 can also be in the first direction D (盥 _ .τ ^ ^ The direction F is moved up" and the second horizontal movement means 46 is also disposed on the plane of the disk ρ in parallel with the plane of placement of the printing web 12. In the seventh month of the Kenting Festival, a plurality of guide rollers 4Q are slid in the lower portion of the slider 1 ,, and the field, the long wheel Μ is slid along the rail-shaped support guide 47, 兮* The holding support member 47 is mounted on the support plate 45 located below the slider 16 and extends longitudinally in one direction, and the gentleman's a μ ° 亥 direction 4 buys the first working direction of the printing blade 14 ( Arrow F).彳 < The slide 16 is removed from the printing net 12 outside the print head, for example, to control the condition of the strip 2, or can be easily repaired at any time. In this way, even when the two pieces of the electronic component are in operation, the cleaning device ι and the strip 21 can be repaired without interrupting the screen printing operation and the process cycle. : The connected visual control system of Lidi Tianwen on the printing machine (see International Application No. WO_A_2_/G53784) observes that the printing network is broken or the debt is measured to any poor printing quality, the device will be Start automatically. However, 'undoubtedly' the operator can force the device 10 to be activated even if there is a predetermined time limit, _% of the author thinks it is necessary. It is understood that the cleaning device 1G can be modified and/or added without departing from the field of the invention, and the cleaning device 1 is used for cleaning the screen on the printing support. Printed design 27 201113159. I also understand that although the literary order has been referred to a number of Ming, & _ _ p 疋 疋 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施 实施For the other equivalent drawing of the device, ± - ^ . ΗΙ ~, , for cleaning the printing support on the 4, · week printing equipment, the features described in this circumference, so there are patents Fan Fan Covered by the transfer. & stipulations of the patent scope of the present invention [simplified description of the drawings] > The description of the preferred embodiment above, & Ming & + & ^ understand the above characteristics and other features of the present invention, More preferably, the preferred embodiment is a non-limiting example with reference to the accompanying drawings, wherein: a schematic isometric view of the processing system of the present invention, the system can be used in conjunction with a device in accordance with an embodiment of the present invention. Figure 2 is a schematic plan view of the processing system of Figure 1. Figure 3 is a perspective view of a cleaning device in accordance with the present invention. The cleaning apparatus Fig. 4 is a front view of the cleaning apparatus according to the present invention which is attached to the screen printing screen and associated printing blades. Figure 5 is a top plan view of a cleaning device in accordance with the present invention attached to associated printing blades. Figure 6 is a side elevational view of a cleaning device in accordance with the present invention attached to associated printing blades. For the sake of understanding, the same component symbols are used as much as possible to indicate the same components that are common to the figures in 2011. The elements and features of one embodiment may be advantageously incorporated into other embodiments without further elaboration. [Main component symbol description] 1 〇 cleaning device 12 printing net 14 blade 16 slider 18 side wall 20 first shaft 21 strip 22 second shaft 23 first motor 24 pressure roller 2 5 second motor 26 housing 28 Mobile unit 30 guide element 31 relative to slider 32 sliding stop 34 linear actuator 36 actuating device 38 sensing element / stylus 29 201113159 44 first horizontal moving device 45 supporting plate 46 second horizontal moving device 47 supporting guide 49 Guide Roller 52 Piston 100 Equipment/System 10 1 System Controller 102 Print Head/Processing Head 105 Actuator 111 Input Conveyor 112 Output Conveyor 113 Inlet Conveyor 114 Discharge Conveyor 11 6 Strips 120 Camera 13 1 Processing Nest 140 Actuator Assembly 150 Substrate 199 Oven 200 Detection System 30