TW201109671A - Probe - Google Patents

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Publication number
TW201109671A
TW201109671A TW98130445A TW98130445A TW201109671A TW 201109671 A TW201109671 A TW 201109671A TW 98130445 A TW98130445 A TW 98130445A TW 98130445 A TW98130445 A TW 98130445A TW 201109671 A TW201109671 A TW 201109671A
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Taiwan
Prior art keywords
tube
metal
conductive coil
insulating
probe
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Application number
TW98130445A
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Chinese (zh)
Inventor
Shen-Chun Li
Shou-Kuo Hsu
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Hon Hai Prec Ind Co Ltd
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Application filed by Hon Hai Prec Ind Co Ltd filed Critical Hon Hai Prec Ind Co Ltd
Priority to TW98130445A priority Critical patent/TW201109671A/en
Publication of TW201109671A publication Critical patent/TW201109671A/en

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Abstract

A probe includes a filter unit and a needle body. The needle body includes a tip portion and an abutting portion. The filter unit includes an inductive component, a capacitance component, and an insulating pipe. The inductive component includes a magnetic body and a conductive coil encircling outside the magnetic body. The capacitance component includes a metal outer pipe and a metal inner pipe received in and insulated from the metal outer pipe. The needle body and the inductive component are received in a receiving cavity of the insulating pipe, the tip portion extends out of the receiving cavity, and the abutting portion is connected to one end of the conductive coil. The metal inner pipe is positioned outside the insulating pipe, and a connected portion of the metal inner pipe is connected to the other end of the conductive coil.

Description

201109671 六、發明說明: 【發明所屬之技術領域】 [0001] 本發明係關於一種探針。 【先前技術】 [0002] 測試設備通常是透過探針接觸測試點,以對測試點輸出 的待測訊號進行測量。由於測試點設於電路板上,當探 針接觸測試點時,電路板上其他電子元件產生的高頻雜 訊及待測訊號自身攜帶的高頻噪音會透過探針傳輸給測 試設備,從而極大地影響了測試設備對待測訊號的測試 結果。 【發明内容】 [0003] 鑒於以上内容,有必要提供一種具有濾波功能的探針。 [0004] 一種探針,包括一濾波單元及一針體,該針體包括一尖 端部及一抵靠部,該濾波單元包括一電感性元件、一電 容性元件及一絕緣管,該電感性元件包括一磁性體及一 環繞在該磁性體外的導電線圈該導電線圈兩端分別設 有一第一接觸部及一第二接觸部,該電容性元件包括一 金屬内管及一套設在該金屬内管外且與所屬金屬内管絕 緣的金屬外管,該金屬内管的一端設有一接觸部,該絕 緣管包括一收容腔,該針體及電感性組件穿置於該絕緣 管的收容腔中,該針體的尖端部從該收容腔伸出,該針 體的抵靠部與該導電線圈的第一接觸部接觸,該金屬内 管套設在該絕緣管外,該金屬内管的接觸部與該導電線 圈的第二接觸部接觸。 [0005] 該探針透過裝設該電感性元件及該電容性元件來實現濾 098130445 表單編號A0101 第4頁/共17頁 0982052247-0 201109671 波功能,且結構簡單、便於拆卸與組裝,從而可在需要 時對該濾波單元進行元件的重組,以使該探針能滿足不 同的遽波需求》 【實施方式】 [0006] 請參閱1及圖2,本發明探針10的較佳實施方式包括一濾 波單元100及一針體2〇〇 〇該濾波單元1〇〇包括一電感性 元件120、一電容性元件丨6〇及一絕緣管18〇。 [0007] ❹ 該電感性元件120具有電感的特性,其包括一磁性體Kg 、一導電線圈124及一絕緣介質管128。該導電線圈124 的兩端分別設有兩接觸部125、126。在本實施方式中, 該磁性體122由磁性材料(如鐵、鈷、鎳等)製成,且呈 % 實心圓柱體狀。該導電線圈124具有彈性且呈圓形螺旋狀 ,該兩接觸部125、126為分別自該導電線圈124的兩端 向s玄導電線圈124的中心軸垂直延伸出的兩圓形導電片。 在其他實施方式中,該磁性體122可為中空或實心的其他 形狀(如長方體狀、三角柱狀等),該導電線圈124的螺 ❹ [0008] ;..:·:' ! Ϊ - ' 旋形狀可根據該磁性體12 2的形狀而進行相應調整。 該電容性元件160具有電容的特性,其包括一金屬内管 162、一金屬外管164及一絕緣介質管166。該金屬内管 162的一端設有一接觸部163,該金屬外管164的一端設 有一擋止部165。在本實施方式中,該金屬内管162作為 該電容性元件160的高電位部,該金屬外管164作為該電 容性元件160的低電位部,且該金屬内管162及該金屬外 管164均為中空圓柱體。該擋止部165為自該金屬外管 164—端的邊緣向該金屬外管164的中心轴垂直延伸出的 098130445 表單編號A0101 第5頁/共17頁 0982052247-0 201109671 一c形金屬擋片。該接觸部163為自該c形金屬緣的開口處 所對應的該金屬内管162—端的邊緣向該金屬内管162的 中心軸垂直延伸出的一圓形金屬片。該金屬内管162的内 表面上设有螺紋。在其他實施方式令,該金屬内管^62與 該金屬外管164的形狀及電位可根據實際需要而作相應調 整。 [0009] 該絕緣管180包括一收容腔181、一設於該收容腔181内 的頸縮部182及兩開口183、184。在本實施方式中,該 絕緣管18 0用於對該電感性元件12 〇及該電容性元件1 6 〇 進行電氣隔離,其為;.中空圓柱體,其内環半徑大於該 導電線圈124的半徑,其長度大於該攀感性.組件12〇的長 度。該絕緣管180外表面上靠近該:開口 184的一段區域内 設有螺紋,用於與該金屬内管162内表面上的螺紋相配合 ’以將該絕緣管18 0旋入該金屬内管16 2内,從而使該電 容性元件160螺旋鎖固在該絕緣管180上。該絕緣管18〇 的厚度大於該兩絕緣介質管128、166的厚度。該絕緣管 180及該兩絕緣介質管128、166均由玻璃纖維環氧化樹 脂(FR4)材料組成。 [0010] 該針體200可穿置入該絕緣管180的收容腔181,其包括 一尖端部210及設於尖端部210後端的一抵靠部220。該 尖端部210的外徑小於該開口 183的内徑以使該尖端部 210可以從開口 183伸出,該抵靠部220的外徑略大於該 開口 183的内徑,以使該針體200在受到該導電線圈124 彈力的作用下,不會脫離該絕緣管180。 [0011] 請參閱圖3及圖4,組裝時,該絕緣介質管128套設在該磁 098130445 表單編號A0101 第6頁/共17頁 0982052247-0 201109671 性體122上,該導電線圈124呈螺旋狀環繞在該絕緣介質 管12 8的外表面。該絕緣介質管16 6具有粘性且套設在該 金屬内管162外,該金屬外管164套設在該絕緣介質管 166外’並透過該絕緣介質管166與該金屬内管162粘和 在一起且又相互電氣隔離。將該針體200及該電感性組件 120自該開口 184穿置於該收容腔181内’並將該電容性 元件160螺旋鎖固在該絕緣管18〇上。該尖端部21〇從該 開口 183伸出’用於接觸一測試點(圖未示)。該抵靠部 ^ 220的底部與該接觸部125接觸,以實現該針體2〇〇與該 電感性元件120的電連接,且該抵靠部220由於受到該導 電線圈124彈力的作用而抵壓該頸縮部丨82 ^該接觸部 126與該接觸部163接觸,以實現該電感性元件12〇與該 電容性元件160的電連接’該擋止部165與該金屬内管 162及該絕緣管180的一端接觸,用於阻擋該金屬内管 162及該絕緣管180。 [0012] 請繼續參閱圖5 ’該濾波單;元1 〇 〇可等效為相互串聯的一 〇 電感L及一電容C,該電容C的一端接地,另一端與該電感 L的一端相連,該電感L另一端與一測試設備(圖未示) 相連。因此,該濾波單元1〇〇具有低通濾波器的特性。 [0013] 當該測试設備利用該探針1 〇對一電路板(圖未示)上一 測試點輸出的待測訊號進行測試時’該尖端部21〇接觸該 測試點’該待測訊號經該針體2〇〇傳輸到該濾波單元1〇〇 ’經该濾波單元1 〇 〇濾除高頻雜波後再傳輸給該測試設備 ,以使該測試設備對該待測訊號進行準確地測量。在本 實施方式中,由於該導電線圈124具有彈性,當該探針1〇 098130445 表單編號A0101 第7頁/共17頁 0982052247-0 201109671 與該電路板之間出現過度擠壓時,該導電線圈124可收縮 ’該尖端部210可向該收容腔181内移動,從而避免了因 壓力過大而導致的該尖端部210或該電路板的損壞。 [0014] [0015] 該探針10的濾波效果可透過改變該濾波器單元100中的每 一元件的參數來實現,例如,改變每一元件的材料、該 磁性體128的直徑大小、該導電線圈124的疏密、該兩絕 緣介質管128、166的厚度、該絕緣管180的厚度等都可 以改變該探針10的濾波效果。當需要替換或調整該濾波201109671 VI. Description of the Invention: TECHNICAL FIELD OF THE INVENTION [0001] The present invention relates to a probe. [Prior Art] [0002] The test equipment usually touches the test point through the probe to measure the signal to be tested outputted from the test point. Since the test point is set on the circuit board, when the probe contacts the test point, the high frequency noise generated by other electronic components on the circuit board and the high frequency noise carried by the signal to be tested are transmitted to the test device through the probe, thereby greatly The ground affects the test results of the test equipment to be tested. SUMMARY OF THE INVENTION [0003] In view of the above, it is necessary to provide a probe having a filtering function. [0004] A probe includes a filter unit and a needle body. The needle body includes a tip end portion and an abutting portion. The filter unit includes an inductive component, a capacitive component and an insulating tube. The inductive component The component includes a magnetic body and a conductive coil surrounding the magnetic body. The first and second contact portions are respectively disposed on the two ends of the conductive coil. The capacitive component includes a metal inner tube and a set of the metal. a metal outer tube outside the inner tube and insulated from the inner metal tube, the metal inner tube is provided with a contact portion at one end thereof, the insulating tube includes a receiving cavity, and the needle body and the inductive component are disposed in the receiving cavity of the insulating tube The tip end portion of the needle body protrudes from the receiving cavity, the abutting portion of the needle body is in contact with the first contact portion of the conductive coil, and the metal inner tube is sleeved outside the insulating tube, and the metal inner tube is The contact portion is in contact with the second contact portion of the conductive coil. [0005] The probe realizes the function of the filter 098130445 by the installation of the inductive component and the capacitive component, and has a simple structure, is easy to disassemble and assemble, and thus can be realized by the filter 098130445, the form number A0101, the fourth page, and the 17th page, the 0982052247-0 201109671 wave function. The filtering unit is reorganized as needed to enable the probe to meet different chopping requirements. [Embodiment] [0006] Referring to FIG. 1 and FIG. 2, a preferred embodiment of the probe 10 of the present invention includes A filtering unit 100 and a pin body 2 〇〇〇 include an inductive component 120, a capacitive component 丨6〇, and an insulating tube 18〇. [0007] The inductive component 120 has an inductive property including a magnetic body Kg, a conductive coil 124, and an insulating dielectric tube 128. Two ends of the conductive coil 124 are respectively provided with two contact portions 125, 126. In the present embodiment, the magnetic body 122 is made of a magnetic material (such as iron, cobalt, nickel, etc.) and has a solid cylindrical shape of %. The conductive coil 124 has an elastic and circular spiral shape, and the two contact portions 125 and 126 are two circular conductive sheets extending perpendicularly from opposite ends of the conductive coil 124 to the central axis of the s-shaped conductive coil 124. In other embodiments, the magnetic body 122 may be hollow or solid in other shapes (such as a rectangular parallelepiped shape, a triangular prism shape, etc.), and the conductive coil 124 has a thread [0008];..::: '! Ϊ - ' The shape can be adjusted accordingly according to the shape of the magnetic body 12 2 . The capacitive element 160 has a capacitive characteristic and includes a metal inner tube 162, a metal outer tube 164, and an insulating dielectric tube 166. One end of the metal inner tube 162 is provided with a contact portion 163, and one end of the metal outer tube 164 is provided with a stopper portion 165. In the present embodiment, the metal inner tube 162 serves as a high potential portion of the capacitive element 160, the metal outer tube 164 serves as a low potential portion of the capacitive element 160, and the metal inner tube 162 and the metal outer tube 164 They are all hollow cylinders. The stopper portion 165 extends perpendicularly from the edge of the metal outer tube 164 to the central axis of the metal outer tube 164. 098130445 Form No. A0101 Page 5 of 17 0982052247-0 201109671 A c-shaped metal blank. The contact portion 163 is a circular metal piece extending perpendicularly from the edge of the metal inner tube 162 at the opening of the c-shaped metal edge toward the central axis of the metal inner tube 162. The inner surface of the inner metal tube 162 is provided with a thread. In other embodiments, the shape and potential of the inner metal tube 62 and the outer metal tube 164 can be adjusted according to actual needs. The insulating tube 180 includes a receiving cavity 181, a necking portion 182 disposed in the receiving cavity 181, and two openings 183, 184. In the present embodiment, the insulating tube 18 is used for electrically isolating the inductive element 12 〇 and the capacitive element 16 〇 , which is a hollow cylinder having an inner ring radius larger than the conductive coil 124 The radius, the length of which is greater than the length of the climb. The length of the assembly is 12 inches. A portion of the outer surface of the insulating tube 180 adjacent to the opening 184 is provided with a thread for engaging with a thread on the inner surface of the inner metal tube 162 to screw the insulating tube 18 into the inner metal tube 16 2, so that the capacitive element 160 is screwed onto the insulating tube 180. The thickness of the insulating tube 18A is greater than the thickness of the two insulating medium tubes 128,166. The insulating tube 180 and the two insulating medium tubes 128, 166 are each composed of a glass fiber epoxidized resin (FR4) material. [0010] The needle body 200 can be inserted into the receiving cavity 181 of the insulating tube 180, and includes a tip end portion 210 and an abutting portion 220 disposed at the rear end of the tip end portion 210. The outer diameter of the tip end portion 210 is smaller than the inner diameter of the opening 183 such that the tip end portion 210 can protrude from the opening 183, and the outer diameter of the abutting portion 220 is slightly larger than the inner diameter of the opening 183, so that the needle body 200 The insulating tube 180 is not detached by the elastic force of the conductive coil 124. [0011] Referring to FIG. 3 and FIG. 4, when assembled, the insulating medium tube 128 is sleeved on the magnetic 098130445 Form No. A0101, page 6 / page 17 0982052247-0 201109671, and the conductive coil 124 is spiral. The outer surface of the insulating medium tube 12 8 is wound around. The insulating medium tube 16 6 is viscous and sleeved outside the metal inner tube 162. The metal outer tube 164 is sleeved outside the insulating medium tube 166 and is adhered to the metal inner tube 162 through the insulating medium tube 166. Together and electrically isolated from each other. The needle body 200 and the inductive component 120 are inserted into the receiving cavity 181 from the opening 184 and the capacitive component 160 is screwed onto the insulating tube 18〇. The tip end portion 21 is extended from the opening 183 for contacting a test point (not shown). The bottom of the abutting portion 220 is in contact with the contact portion 125 to achieve electrical connection between the needle body 2 and the inductive component 120, and the abutting portion 220 is resisted by the elastic force of the conductive coil 124. Pressing the neck portion 82 ^ the contact portion 126 is in contact with the contact portion 163 to achieve electrical connection between the inductive element 12 and the capacitive element 160. The stop portion 165 and the metal inner tube 162 and the One end of the insulating tube 180 is in contact for blocking the metal inner tube 162 and the insulating tube 180. [0012] Please continue to refer to FIG. 5 'the filter list; the element 1 〇〇 can be equivalent to a tantalum inductor L and a capacitor C connected in series with each other, one end of the capacitor C is grounded, and the other end is connected to one end of the inductor L. The other end of the inductor L is connected to a test device (not shown). Therefore, the filtering unit 1 has the characteristics of a low pass filter. [0013] When the test device uses the probe 1 to test a signal to be tested outputted from a test point on a circuit board (not shown), the tip portion 21 is in contact with the test point. After the needle body 2〇〇 is transmitted to the filtering unit 1〇〇, the high-frequency clutter is filtered out by the filtering unit 1 , and then transmitted to the testing device, so that the testing device accurately performs the signal to be tested. measuring. In the present embodiment, since the conductive coil 124 has elasticity, when the probe 1 〇 098130445 Form No. A0101 Page 7 / 17 page 0982052247-0 201109671 and the circuit board are excessively squeezed, the conductive coil The 124 can be contracted. The tip portion 210 can move into the receiving cavity 181, thereby avoiding damage to the tip portion 210 or the circuit board due to excessive pressure. [0015] The filtering effect of the probe 10 can be achieved by changing the parameters of each component in the filter unit 100, for example, changing the material of each component, the diameter of the magnetic body 128, and the conductive The density of the coils 124, the thickness of the two dielectric tubes 128, 166, the thickness of the insulating tube 180, and the like can all change the filtering effect of the probe 10. When you need to replace or adjust the filter

器單元100中的任一元件時,只需將該絕緣管18〇從該金 屬内管162中旋出,便可拆解該濾波單元1〇〇,並根據需 要重組該濾波單元100内的各元件,以產生不同的濾波效In any one of the components of the unit 100, the insulating unit 18〇 can be unscrewed from the metal inner tube 162, and the filtering unit 1〇〇 can be disassembled, and each of the filtering units 100 can be reorganized as needed. Components to produce different filtering effects

果。 眞定〆.—H 該探針10透過裝設該電感性元件120及該電容性元件16〇 來實現滤波功能,並利用該導電線圈1.2 4的彈性避免了測 試時因壓力過大而造成的損壞;立結構澤單、便於拆卸fruit.眞定〆.—H The probe 10 realizes the filtering function by installing the inductive component 120 and the capacitive component 16〇, and utilizes the elasticity of the conductive coil 1.2 4 to avoid damage caused by excessive pressure during testing. The structure is simple and easy to disassemble

與組裝,從而可在需要時球録據波單元100進行元件的重 組,以使該探針10能滿足不同的疼填需求。 [0016] 综上所述,本發明符合發明專利要件,爰依法提出專利 申請。惟,以上所述者僅為本發明之較佳實施例,舉凡 熟悉本案技藝之人士,在爰依本發明精神所作之等效修 飾或變化’皆應涵蓋於以下之申請專利範圍内。 【圖式簡單說明】 [0017] 圖1係本發明探針較佳實施方式的立體分解圖。 [0018] 圖2係圖1中絕緣管的剖視圖。 0982052247-0 098130445 表單編號A0101 第8頁/共17頁 201109671 [0019] 圖3係圖1的組裝圖。 [0020] 圖4係圖3的剖視圖。 [0021] 圖5係圖1中的濾波單元的等效電路圖。 【主要元件符號說明】 [0022] 探針:10 [0023] 濾波單元:100 [0024] 電感性元件:120 ® [0025] 磁性體:122 [0026] 導電線圈:124 [0027] 接觸部:125、126、163 [0028] 絕緣介質管:128、166 [0029] 電容性元件:160 [0030] :r'i j g'if-fi If 金屬内管:162 . ...r i c Θ i If Sfr. - ^ C 〇 W [0031] ."Λ ' 金屬外管:164 [0032] 擋止部:165 [0033] 絕緣管:180 [0034] 收容腔:181 [0035] 頸縮部:182 [0036] 開口 : 183、184 [0037] 針體:200 098130445 表單編號A0101 第9頁/共17頁 0982052247-0 201109671 [0038] 尖端部:210 [0039] 抵靠部:22 0And assembly, so that the ball recording unit 100 can perform the reassembly of the components when needed, so that the probe 10 can meet different pain filling requirements. [0016] In summary, the present invention complies with the requirements of the invention patent, and submits a patent application according to law. The above description is only the preferred embodiment of the present invention, and those skilled in the art will be able to devise equivalent modifications or variations in the spirit of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS [0017] FIG. 1 is an exploded perspective view of a preferred embodiment of a probe of the present invention. 2 is a cross-sectional view of the insulating tube of FIG. 1. 0982052247-0 098130445 Form No. A0101 Page 8 of 17 201109671 [0019] FIG. 3 is an assembled view of FIG. 4 is a cross-sectional view of FIG. 3. [0021] FIG. 5 is an equivalent circuit diagram of the filtering unit of FIG. 1. [Main Component Symbol Description] [0022] Probe: 10 [0023] Filter Unit: 100 [0024] Inductive Element: 120 ® [0025] Magnetic Body: 122 [0026] Conductive Coil: 124 [0027] Contact: 125 , 126, 163 [0028] Insulating medium tube: 128, 166 [0029] Capacitive element: 160 [0030] : r'i j g'if-fi If metal inner tube: 162 . ...ric Θ i If Sfr - ^ C 〇W [0031] ."Λ ' Metal outer tube: 164 [0032] Stop: 165 [0033] Insulation tube: 180 [0034] Containment chamber: 181 [0035] Necking: 182 [ 0036] Opening: 183, 184 [0037] Needle: 200 098130445 Form No. A0101 Page 9 of 17 0982052247-0 201109671 [0038] Tip: 210 [0039] Abutment: 22 0

[0040] 電感:L[0040] Inductance: L

[0041] 電容:C[0041] Capacitor: C

098130445 表單編號A0101 第10頁/共17頁 0982052247-0098130445 Form No. A0101 Page 10 of 17 0982052247-0

Claims (1)

201109671 七、申請專利範圍: 1 . 一種探針,包括一濾波單元及一針體,該針體包括一尖端 部及一抵靠部,該濾波單元包括一電感性元件、一電容性 元件及一絕緣管,該電感性元件包括一磁性體及一環繞在 該磁性體外的導電線圈,該導電線圈兩端分別設有一第一 接觸部及一第二接觸部,該電容性元件包括一金屬内管及 一套設在該金屬内管外且與所屬金屬内管絕緣的金屬外管 ,該金屬内管的一端設有一接觸部,該絕緣管包括一收容 〇 腔,該針體及電感性組件穿置於該絕緣管的收容腔中,該 針體的尖端部從該收容腔伸出,該針體的抵靠部與該導電 線圈的第一接觸部接觸,該金屬内管套設在該絕緣管外, 該金屬内管的接觸部與該導電線圈的第二接觸部接觸。 2 .如專利申請範圍第1項所述之探針,其中該磁性體與該導 電線圈之間設有絕緣介質。 3 .如專利申請範圍第2項所述之探針,其中該金屬外管與該 金屬内管之間透過設置絕緣介質進行絕緣,該磁性體與該 Q 導電線圈之間的絕緣介質、該金屬外管與該金屬内管之間 的絕緣介質以及該絕緣管均由玻璃纖維環氧化樹脂材料製 成。 4 .如專利申請範圍第1項所述之探針,其中該磁性體的材料 為鐵、鈷或鎳。 5. 如專利申請範圍第1項所述之探針,其中該導電線圈的第 一及第二接觸部為分別自該導電線圈的兩端向該導電線圈 的中心軸垂直延伸出的兩導電片。 6. 如專利申請範圍第1項所述之探針,其中該金屬内管的内 098130445 表單編號A0101 第11頁/共17頁 0982052247-0 201109671 表面上設有螺紋,該絕緣管在背離該抵靠部一端的外表面 上《又有螺紋1¾%緣官旋入該金屬内管,以使該電容性元 件鎖固在該絕緣管上。 .如專利申請範圍第1項所述之探針,其中該金屬内管的接 觸部為自該金屬内管的一端向該金屬内管的中心抽垂直延 伸出的一金屬片。 •如專利申請fe圍第7項所述之探針,其中該金屬外管的一 端設有-擔止部,該擋止部為自該金屬外管一端的邊緣向 該金屬外管的中心轴垂直延伸出的一c形金屬擔片,該撞 止部與該金屬内管及該絕緣管的一端接觸,用於阻擋該金 屬内管及該絕緣管,該金屬内嗜的接觸部:,為自該c形金屬 擋片的開口處所對應的該金屬:内管一端的邊緣向該金屬内 管的中心轴垂直延伸而成的金屬片。 .如專利申凊範圍第1項所述之探針,其中該導電線圈具有 彈性,該收容腔内設有一頸縮部,該頸縮部的内徑大於該 尖端部的外徑以使該尖端部從該收容腔伸虚,且該頸縮部 的内徑小於該抵靠部的外徑,該抵靠部在該導電線圈彈力 的作用下抵壓該頸縮部,該尖端部受到壓力將透過該抵靠 壓縮该導電線圈,以使該尖端部向該收容腔内移動。 098130445 表單編號Α0101 第12頁/共17頁 0982052247-0201109671 VII. Patent application scope: 1. A probe comprising a filtering unit and a needle body, the needle body comprising a tip end portion and an abutting portion, the filtering unit comprising an inductive component, a capacitive component and a An insulating tube, the inductive component comprises a magnetic body and a conductive coil surrounding the magnetic body, the first end of the conductive coil is respectively provided with a first contact portion and a second contact portion, and the capacitive element comprises a metal inner tube And a metal outer tube disposed outside the metal inner tube and insulated from the inner metal tube, the metal inner tube is provided with a contact portion at one end thereof, the insulating tube includes a receiving cavity, the needle body and the inductive component are worn Positioned in the receiving cavity of the insulating tube, the tip end portion of the needle body protrudes from the receiving cavity, the abutting portion of the needle body is in contact with the first contact portion of the conductive coil, and the metal inner tube is sleeved in the insulating Outside the tube, the contact portion of the metal inner tube is in contact with the second contact portion of the conductive coil. 2. The probe of claim 1, wherein an insulating medium is disposed between the magnetic body and the conductive coil. 3. The probe of claim 2, wherein the metal outer tube and the metal inner tube are insulated by providing an insulating medium, and the insulating medium between the magnetic body and the Q conductive coil, the metal The insulating medium between the outer tube and the inner metal tube and the insulating tube are both made of a glass fiber epoxidized resin material. 4. The probe of claim 1, wherein the magnetic material is iron, cobalt or nickel. 5. The probe of claim 1, wherein the first and second contact portions of the conductive coil are two conductive sheets extending perpendicularly from opposite ends of the conductive coil to a central axis of the conductive coil. . 6. The probe according to claim 1, wherein the metal inner tube has a thread 098130445, a form number A0101, a page 11 or a total of 17 pages 2092822247-0 201109671, and the insulating tube is deflected away from the surface. On the outer surface of one end of the abutment, a threaded 13⁄4% edge is screwed into the metal inner tube to lock the capacitive element to the insulating tube. The probe of claim 1, wherein the contact portion of the metal inner tube is a metal piece extending from an end of the inner metal tube to a center of the inner metal tube. The probe of claim 7, wherein one end of the metal outer tube is provided with a -butting portion from an edge of one end of the outer metal tube to a central axis of the outer metal tube a c-shaped metal support piece extending perpendicularly, the striker portion is in contact with the metal inner tube and one end of the insulating tube for blocking the metal inner tube and the insulating tube, and the metal inner contact portion: The metal corresponding to the opening of the c-shaped metal baffle: a metal piece extending from an edge of one end of the inner tube to a central axis of the inner metal tube. The probe of claim 1, wherein the conductive coil has elasticity, and the receiving cavity is provided with a necking portion, the inner diameter of the necking portion being larger than the outer diameter of the tip portion to make the tip end a portion extending from the receiving cavity, and an inner diameter of the necking portion is smaller than an outer diameter of the abutting portion, the abutting portion pressing the necking portion under the elastic force of the conductive coil, the tip portion being subjected to pressure The conductive coil is compressed by the abutment to move the tip end portion into the receiving cavity. 098130445 Form number Α0101 Page 12 of 17 0982052247-0
TW98130445A 2009-09-09 2009-09-09 Probe TW201109671A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI472771B (en) * 2012-11-08 2015-02-11 Winbond Electronics Corp Probe card and welding methond thereof
TWI474008B (en) * 2013-07-15 2015-02-21 Mpi Corp A signal path switching device and a probe card using a signal path switching device
TWI800573B (en) * 2017-12-21 2023-05-01 日商東京威力科創股份有限公司 Substrate support member, substrate processing device, and substrate transfer device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI472771B (en) * 2012-11-08 2015-02-11 Winbond Electronics Corp Probe card and welding methond thereof
TWI474008B (en) * 2013-07-15 2015-02-21 Mpi Corp A signal path switching device and a probe card using a signal path switching device
TWI800573B (en) * 2017-12-21 2023-05-01 日商東京威力科創股份有限公司 Substrate support member, substrate processing device, and substrate transfer device

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