201109259 四、指定代表圖： (一) 本案指定代表圖為：第（10)圖。 (二) 本代表圖之元件符號簡單說明： 6〜潔淨卡匣； β |上 口部； 基板出入用開 風扇·過濾器•單元（FFU); 10〜玻璃基板，· 么牧 15~升降運輸轰 16轉° (卡£移載用支樓座之支撐部）； 19〜中段滑軌j 22〜蓋體； 卡匣移載機構 2〇〜卡匣移載用支撐座 23a〜垂直板部； 23B~蓋單體； 26a~水平擺動臂； 3〇~基板位置檢出裝置 3 2〜偵知器。 23A〜蓋單體； 23c〜上下兩水平板部 26b~水平擺動臂； 31〜垂直支柱構件； ”若有化子式時’賴*最能顯示發徵的化: 無0 六、發明說明： 【發明所屬之技術領域】 種卡H ’將被使用於電視顯示器 且特別有闕於一種被稱做潔淨卡 本發明，係有闕於 之破璃基板等加以收納 ®之搬送裝置。 2 201109259 【先前技術】 收納有如上述玻璃基板之卡E，係暫時被保管在自動 倉庫之架體上，當對於玻璃基板實施各種處理時，藉由該 自動倉庫具有之行走天車，自架體被搬送到處理裝置附近 之玻璃基板搬出作業部，在此，玻璃基板，係自卡厘内， 藉由玻璃基板取出用機器人被取出，再供給到處理裝置。 而且被收納在卡匣内之玻璃基板，係必須避免接觸到被 污染過之之環境氣體，因此，使用在其内部空間能維持潔 淨環境之自動倉庫’但是’當係大規模之自動倉庫時，欲 使很大之内部空間全部皆維持潔淨環境，需要报大之設備 成本及維持成本，所以，開始活用被稱做潔淨卡㊣之物件， 前述潔淨切，係具有在卡匿本身，能使其内部空間維持 潔淨之功能。 立亦即’潔淨卡Ε ’係僅—側面係被當作基板出入用開 σ部而成開放之矩形箱型’在該開口部之相反側之側壁 =組裝有風扇·過濾器•單元（FFU)，前述風扇•過渡器· 2 π (FFU) ’係取入外部氣體而經由過濾器送入到卡匣内， 當破收納在自動倉庫之架體内時’通電到ffu而能使卡匿 内〔=持潔淨之環境氣體。但是’當藉由行走天車，使前 ::孑卡S在架體與玻璃基板搬出作業部或玻璃基板搬入 1之間搬送時’即使假設自該行走天車之升降運輸器 、通電到潔淨卡E之FFU，在卡£之搬送途中倉庫 内之環境氡體會自開放較大之基板出入用開口部進入，卡 昆内部空間之潔淨度會降低。其係與切是否裝備有卿， 201109259 或者，倉庫是否被維持潔淨之環境氣體無關地被， U ’最 好倉庫内之環境氣體，係在卡！之搬送中，不進入該卡 内。 先前，例如如專利文獻丨記載所述，係考慮到在卡匣 搬送裝置之卡匣支撐部處，事先設置將被搬送 卜加以 收納之潔淨盒。 【先行技術文獻】 【專利文獻】 【專利文獻1】日本特開2003-1 740 73號公報 【發明内容】 【發明所欲解決的課題】 在上述專利文獻1記載之構成中，被設於卡匿搬送麥 置之卡匣支撐部上之潔淨盒，係能收納卡匣之大型物件， 其係具有與先前潔淨卡匣之FFU同樣之機構，因此，卡匣 搬送裝置係成為大型且高價之物件。而且，潔淨卡匠本身 係存在有卡E出入之較大開口部’所以，在搬送途中，無 法完全防止外部氣體，進人潔淨盒内，進而進人被收納: 該潔淨盒内之卡匣内。 【用於解決課題的手段】 本發明，係能消除如上述之先前問題點而提案者，記 裁於專利中請範圍帛i項之本發明卡&搬送裝置，當賦予 下述實施形態之參照編號而表示時，係在升降運輸器Η 上’於該升降運輸器15上之退人位置，與進出橫向側邊之 4 201109259 進出位置之間，設有水平出退移動自如之卡£移載用支撐 座20’其特徵在於：在升降運輸器15上將切移載用 支撐座2。力口以水平出退移動自如地加以支撐之支撐部⑽ 台16)處，設有蓋體22，前述蓋體22，係將在前述卡匿移 載用支撐座20上被支撐，而被移載到升降運輸器a上之 “疋位置之卡匣6之基板出入用開口部6a加以關閉，前述 盍體22之構成，係設有基板位置檢出裝置3〇,前述基板 位置檢出裝置30,係自該蓋體22關閉之基板出入用開口 部6a，將卡匣6内之基板1〇之收納位置加以檢出。 s實施上述本發明時，如申請專利範圍第2項所示， 在前述蓋體22係安裝有基板位置檢出裝置3〇，前述基板 位置檢出裝置30，係自該蓋體22關閉之基板出入用開口 «f5 6a，將卡匣6内之基板1 〇之收納位置加以檢出。 又，當卡匣6，係在藉由卡匣移載用支撐座2〇，被往 升降運輪器1 5上移載時之移動方向後端側，具有基板出入 用開口部6a時，如申請專利範圍第3項所述，前述蓋體 2 2之構成’係在卡匣移載路徑外側之退避位置，與卡厘移 載路彳至内之關閉作用位置之間’移動自如。在此情形下， 如申請專利範圍第4項所述，蓋體22，係由左右一對之蓋 單體23A，23B所構成，前述左右一對之蓋單體23A，23B， 係在卡匣移載路徑兩側之退避位置，與卡匣移載路徑内之 關閉作用位置之間’移動自如，在關閉作用位置上之左右 對蓋單體23A，23B之構成，係相互鄰接而關閉卡匣6之 基板出入用開口部6a ’前述基板位置檢出裝置30，係可被 201109259 女裝在單側之蓋單體2 3 A。而且在此情形下，如申請專利 範圍第5項所述’左右一對之蓋單體23A, 23B，係在前述 支撲部（轉台16)上’於垂直支軸25a，2 5b之周圍，在退避 位置與關閉作用位置之間，水平擺動自如地被軸支，自關 閉作用位置往退避位置開動之各蓋單體23A, 23B之構成， 係位於被移載到升降運輸器丨5上之一定位置之卡匣6之兩 側相當位置。 又，如申請專利範圍第2項所示地，當使基板位置檢 出裝置30安裝在蓋體22時，如申請專利範圍第6項之記 載所示，基板位置檢出裝置30，係在當蓋體22於退避位 置〃關閉作用位置之間移動時，在與被移載到升降運輸器 1 5上之卡匣6不相干涉之後退位置，與當蓋體22在關閉 乍用位置時’接近卡g 6之基板出人用開口部^或進入其 中之則進位置之間，前進後退自如地被安裝在蓋體U上， 但是，如申請專利範圍第7項所示，基板位置檢出裝置3〇, 係也可以在當蓋體4〇力退避位置與關閉作用位置之間移 動時’在與被移㈣料運㈣15上之切6 * ，而且在蓋體40位於關閉作用位置時，係在自卡匣 土板出入用開口部6a ’能檢出卡匣6内之基板1 〇之位 置中’被固定於蓋體40。201109259 IV. Designated representative map: (1) The representative representative of the case is: (10). (2) A brief description of the symbol of the representative figure: 6~clean card 匣; β | upper mouth; open fan for filter in and out of the substrate • filter unit (FFU); 10~ glass substrate, · MU 15~ lifting transport Boom 16 rpm ° (card support for the transfer of the support block); 19 ~ middle slide rail j 22 ~ cover; cassette transfer mechanism 2 〇 ~ cassette transfer support seat 23a ~ vertical plate; 23B~ cover unit; 26a~ horizontal swing arm; 3〇~ substrate position detecting device 3 2~detector. 23A ~ cover unit; 23c ~ upper and lower horizontal plate portion 26b ~ horizontal swing arm; 31 ~ vertical strut member; "if there is a formula" Lai * can best show the levy: no 0, invention description: [Technical Field According to the Invention] The type of card H' will be used for a television display, and is particularly suitable for a device that is referred to as a clean card, and is a storage device that accommodates a glass substrate or the like. 2 201109259 [ Prior Art A card E containing the glass substrate as described above is temporarily stored in a frame of an automatic warehouse, and when various processes are performed on the glass substrate, the frame is transported by the traveling crane. The glass substrate is carried out in the vicinity of the processing device, and the glass substrate is taken out from the caliper by the glass substrate taking-out robot and then supplied to the processing device. The glass substrate stored in the cassette is attached. It is necessary to avoid exposure to contaminated ambient gases, so use an automated warehouse that maintains a clean environment in its interior space, but 'when it is a large-scale automated warehouse, In order to keep the large internal space in a clean environment, it is necessary to report the cost of equipment and maintenance costs. Therefore, the use of what is called a clean card is used. The above-mentioned clean cut is in the card itself and can be made inside. The space is kept clean. The "clean card" is only used for the side of the window. The side wall is opened as a rectangular box with the opening σ. The side wall on the opposite side of the opening is equipped with a fan. The filter unit (FFU), the fan/transition unit 2 π (FFU) 'takes in the outside air and feeds it into the cassette through the filter, and when it is stored in the rack of the automatic warehouse, it is energized to Ffu can make the inside of the card [= keep the clean atmosphere. But when you move the crane, the front:: Leica S is transported between the frame and the glass substrate carrying out the work unit or the glass substrate 1) Even if it is assumed that the lifter from the crane is powered up to the FFU of the clean card E, the environment inside the warehouse will be opened from the opening of the large substrate for access during the transfer of the card, and the interior of the Kakon will be cleaned. Degree will decrease Whether the system is equipped with Qing, 201109259 or whether the warehouse is maintained independently of the clean ambient gas, U's best environmental gas in the warehouse is not in the card during the transfer! For example, as described in the patent document, it is considered that a cleaning box for storing the cloth is provided in advance at the cassette supporting portion of the cassette conveying device. [Provisional Literature] [Patent Document] [Patent Document 1] [Problem to be Solved by the Invention] In the configuration described in Patent Document 1, the cleaning box provided on the cassette supporting portion of the card-transporting wheat unit is provided. It is a large-sized object that can accommodate a cassette, and has the same mechanism as the FFU of the previous clean cassette. Therefore, the cassette conveying device becomes a large and expensive item. In addition, the clean card maker has a large opening portion in which the card E is in and out. Therefore, during the transportation, the outside air cannot be completely prevented from entering the clean box, and then the person is accommodated: the inside of the clean box . [Means for Solving the Problem] The present invention is a card and an apparatus for carrying out the present invention, which can be eliminated from the above-mentioned problems as set forth in the patent, and is given to the following embodiment. When it is indicated by the reference number, it is placed on the elevating transporter ''s retreat position on the elevating transporter 15 and the entrance and exit position of the lateral side 4 201109259. The carrier support 20' is characterized in that the carrier support 2 is to be cut on the lift conveyor 15. The support portion (10) 16 is supported by the support portion (10) 16) which is movably supported by the horizontal movement, and the cover 22 is supported by the lock transfer support 20 and is transferred. The substrate opening/closing portion 6a of the cassette 6 of the crucible position on the elevating transporter a is closed, and the substrate position detecting device 3 is provided in the configuration of the cartridge 22, and the substrate position detecting device 30 is provided. The substrate insertion opening portion 6a that is closed by the lid body 22 is used to detect the storage position of the substrate 1 in the cassette 6. When the present invention is implemented, as shown in the second item of the patent application, The substrate position detecting device 3 is attached to the lid body 22, and the substrate position detecting device 30 is a substrate insertion opening «f5 6a closed from the lid body 22, and the substrate 1 in the cassette 6 is stored. In addition, the cassette 6 is provided with a substrate insertion opening portion at the rear end side in the moving direction when being transferred to the lift roller 15 by the cassette transfer support 2 At 6a, as described in item 3 of the patent application scope, the composition of the cover body 2 2 is attached to the card. The retracted position on the outer side of the transfer path is 'movable' between the closed position of the transfer path and the closed position. In this case, as described in item 4 of the patent application, the cover 22 is left and right. A pair of cover members 23A, 23B are formed, and the pair of right and left cover members 23A, 23B are located between the retracted positions on both sides of the cassette transfer path and the closed position in the cassette transfer path. In the case of the cover unit 23A, 23B, which is adjacent to the closing position, the substrate insertion opening portion 6a of the cassette 6 is closed adjacent to each other, and the substrate position detecting device 30 can be used by the 201109259 female. The cover unit 2 3 A is mounted on one side, and in this case, as described in the fifth paragraph of the patent application, the left and right pair of cover units 23A, 23B are attached to the aforementioned flap portion (turntable 16). 'After the vertical support shafts 25a, 2 5b, between the retracted position and the closed action position, the horizontal swing is freely pivoted, and the respective cover units 23A, 23B are actuated from the closed position to the retracted position. Located at the load that is transferred to the lift conveyor 丨5 When the substrate position detecting device 30 is attached to the lid 22 as shown in the second paragraph of the patent application, as shown in the sixth paragraph of the patent application, as shown in the second paragraph of the patent application. The substrate position detecting device 30, when moving between the retracted position and the closing position of the lid body 22, does not interfere with the cassette 6 that is transferred to the elevating transporter 15 and retreats the position, and When the lid body 22 is in the closed position, it is close to the boarding opening portion of the card g 6 or the entering position into which the card body 22 is inserted, and is moved forward and backward to be mounted on the lid body U, but as claimed in the patent application As shown in the seventh item of the range, the substrate position detecting device 3 can also be cut and cut 6* when it is moved between the retracted position and the closed position of the cover 4. When the lid body 40 is at the closing position, the lid body 40 is fixed to the lid body 40 at a position where the opening portion 6a' of the cassette opening and closing opening 6a' can be detected.
卜 UL p工杪戰用又撐座20 運輪态15上被移載時之移動方向前端側，具有基; ::口部6a之情形下，如申請專利範圍第8項所示 49,係被固定在被移載至升降運輸器15上時 6 201109259 ，之基板出入用開口部63相向。 禾乾圍第9項所示’前述支撐 又’如申請專 周圍旋轉自如之轉台！ 構成，係、以在垂直軸心 度旋轉，使卡匣移載 藉由則述轉台16之180 w欺用支撐座相斛 a 之行走路徑左右任音側， 、别述卡匣搬送裝置 【發明效果】暑也能水平出退移動。 當使用申請專利範圍筮 處理之卡基板1 述之本"之構成時， 關門而 用開口部以外之各側面係以壁材 關閉，而且即使是具有如 上所述FFU之所謂潔淨卡匣，也 係在將藉由卡匣移載用支撐 ^ ^ 破移載到升降運輸器上之 疋位置之忒卡匣之基板出入用開口部’以蓋體加以關閉 之狀態下可搬運’所以’即使係、並非在搬送前述卡匿時， 可稼動FFU之構成，在搬送途中，能防止被污染之外部氣 體，自基板出入用開口部進入卡匣内，而且，在與在升降 運輸器上之一定位置處，設置卡匣收納用之潔淨盒之先前 構成相比較下’在升降運輸器側僅設置蓋體，所以，假設 即使並用將蓋體加以開閉之驅動機構時，升降運輸器側之 構成係比較簡單，升降運輸器側變得大型化之程度較小， 能比較便宜地實施。 又，當使用申請專利範圍第2項所述之構成時，在以 前述蓋體將基板出入用開口部加以關閉之狀態下，搬送卡 匣時，藉由被安裝在前述蓋體之基板位置檢出裝置（地圖偵 知器），可取得被收納於卡匣内之基板之收納位置資訊（地 圖資訊），在與於搬出到基板搬出作業部後，藉由基板位置 201109259 檢出裝置來取得基板位置資訊之情形相比較下在該基板 =出作業部令，藉由基板取出用機器人，能縮短將基板自 卡E内取出為止之^唐王夢B主μ 之循環時間。而且，在將卡Μ之基板出入 用開口部加以關閉之蓋體處， 处女衷有基板位置檢出裝置， 所！，基板出入用開口部與將基板出入用開口部加以開閉 2盍體之外’係另外設置地圖偵知器用開口及將地圖偵知 益用開口加以開閉之筌 盍體而且，當與對於地圖偵知器用 開口’必須設置將地圖 圖偵4益加以出入之機構之情形相比 較下，能使裝置整體之構造及 子工市〗系統簡早化，而能便宜 地實施。 又’當使用申請專利範園笛Q ^上 寸π乾固第3項所述之構成時，前述 卡匣搬送裝置係對於將卡g 加以送出入之之架體卡匣收納 搶，能使卡匣之基板出入用π 用開口。卩，係在與卡匣搬送裝置 之具有行走通路之側相及夕本 卡匿收納艘深處側開口之方 向，將卡匣加以收納，所 與基板出入用開口部係在卡 匣搬送裝置之具有行走通路側 開口之方向下被收納之情形 相比較下，能比較容易傕 便卡匣内保持潔淨之環境氣體。而 且’當使該卡匣藉由卡！ψ较# m ^ 移載用支撐座，移載到卡匣搬送 裝置側之升降運輸器上時， 此以盖體將該卡匣之基板出入 用開口部加以關閉，能達成期望之目的。 在此情形下，當傕用由&卡 申δ月專利範圍第4項所述之構成 時，與以由1個蓋單體所構 再成蓋體’將卡匣之較大基板出 入用開口部加以開閉之愔形 ^相比較下，在退避位置與關閉 乍用位置之間移動之蓋單體 了以變小，移動蓋單體之機構 201109259 構成可以變容易，同時，開閉蓋體所需時間可 縮㈣環時間。而且，當使用申請專利範圍第 構成日守，只要使左右-對蓋單體，單純地在i轴周 擺動自如地被軸支即可，所以， 十 動機構也變得簡單。又，可以 .構造或其驅 ]平 』以使在退避位置之蓋單體，於 被移載到升降運輸器上一定位置之卡匿兩側相當位置上，、 轉向到沿著卡匣移載路徑之方向， 間整體之寬度變窄。 b |體開閉空 又，當使用申請專利範圍第6項所述之構成時，在以 盍體將切之基板出入用開口部加以關閉之狀態下，者夢 由基板位置檢出裝置來檢出基板位置時，能使該基板= 檢出裝置之位置，往卡E内伸入至必要深度。因此 位置檢出裝置，可以利用自上下方向將水平收納在卡ί内 之基板之水平板面加以檢出之型式之偵知器，而能確實實 知基板位置之檢出。 、 /另外，當使用申請專利範圍第7項所述之構成時無 須使基板位置檢出裝置相對於蓋體移動之機構或其控制系 統旦能容易且便宜地實施本發明。在此情形下，只要是若 干量時’可以使基板位置檢出裝置，自基板出入用開口部 進入到切内，所以’彳以利用自上下方向將上述基板之 欠平板面加以檢出之型式之^貞知器，即使假設基板位置檢 出裝置，係位於該種型式之偵知器無法利用之位置之情形 "、要利用將基板周緣之垂直端面加以檢出之型式之偵 知器即可。 9 201109259 當卡匣搬送裝署，a』 收納艙，使切之A板出 使卡&出人之架體之卡匡 行走通路之側上開：二用=部在切搬送襄置具有 能以申請專利範圍第^ £加以收納之情形下， ， 項所述之構成來實施本發明，無須 盍在退避位置與關閉作用位置之間移動 制系統，能非常便宜地實施本發明。 …、控 而且田使用中請專利範圍第9項所述之構成時可 以在卡Ε搬达裝置之行走路徑左右兩側配設卡匿收納架 體或者在該行走路徑單側配設卡厘收納架體，同時在 相反側配設却下卡㈣搬出基板之基μ㈣ 情形下’蓋體係與卡e移載用支樓座—體旋轉，所以，在 卡£移載用支#座係、自行走路徑之左右任意側接受切之 情形下HUI由該蓋體將前述何之基板出人用開口部 加以關閉’同時藉由將中請專利範圍帛2項所述之構成加 以組合，藉由設於該蓋體之基板位置檢出裝置，將卡匣内 之基板之位置加以檢出。 【實施方式】 當依據第1圖〜第11圖來說明本發明之第1實施例 時，如第1圖所示’本發明之卡匣搬送裝置1，係在2列 並設之架體2 A，2 B間之行走通路3中，被輔設於地面上之 支撐用導軌4支撐，沿著兩架體2A, 2B自走。在兩架體2A，2B 立體配設有卡匣收納艙7，卡匣收納艙7係收納潔淨卡匣 6，在單側之架體2A處，分別設有利用i個卡匣收納艙7 10 201109259 來構成之基板搬出作業部8及基板搬入作業部9,基板取 出用機器人裝置12係與基板收納用機器人裝置〗3並設， 基板取出用機器人裝置12，係自被搬出到基板搬出作業部 8之潔淨卡Ε 6M，將基板1〇 一塊一塊地取&，而搬入到 處理裝置1卜基板收納用機器人裝置13，係使被處理裝置 11處理過之已處理基板丨〇，一塊一塊地收納到在基板搬入 作業部9處待機之潔淨卡E 6内。而且，基板取出用機器 人裝置12及基板收納用機器人裝置13，係眾所周知之物 件，在圖面中，機器人裝置之圖示予以省略。 卡匠搬送裝置丨，係具有在行走方向前後一對之支柱 Η間升降之升降運輸器15，在升降運輸器15上，搭載有 於垂直軸心周圍正反轉自如之轉自16,在前述轉台16上 設有卡匿移載機構17,卡匿移載機構17,係用於使潔淨卡 ® 6在架體2Α，2β之卡匣收納艙7或基板搬出作業部8及 基板搬入作業部9間移載。 前述卡匿移載機構17,如第3圖、第4圖、第6圖及 第8圖所示’係由固定滑軌座18、中段滑軌座19、及卡昆 移載用支撐座20所構成’固定滑軌座18，係在在轉台Μ 相對於卡隨送裝置丄之行走方向，成直角橫向也被 …中段滑軌座19,係在前述固定滑軌座18上，相對 :卡匣搬达裝置i之打走方向，成直角橫向且僅能往單側 退移動自如地被支撐’卡匣移载 戰用支按座20，係在前述 ^軌座19上，與該中段滑軌座19之出退移動方向同 °且出退移動自如地被支撐’藉由與設於先前自動倉庫 11 201109259 採用之貨物搬入搬出用堆垛機 ^ ^ 降建輸态上之行走又子相 同之驅動機構，與相對於固定 山、A 月軌座18之中段滑執座19 出退移動相連動，而卡匣移載用 戟用支撐座20係相對於中段滑 軌座19出退移動，卡匣移栽用 ... 牙度Z0，係能在平面觀 看中’卡匣移載用支撐座2〇 # 係與固定滑軌座18重疊之退 入位置，與卡匣移載用支撐座2 係自固疋滑軌座18往橫 向完全離去之進出位置之間，水平出退移動。使 轉台16做⑽度旋轉，能使相對於切搬送褒41;走方 移載用支撐座2G出退移動方向，往左右相反方向 做改變。 上述構成之三段叉子形式丰 〆^ 式之卡匣移載機構17只不過 係一實例，其構成也可以係 …例如如先則引用過之專利文獻 1中之S己載’藉由在轉台16盥卡匣孩截 卞匣移載用支撐座20之間， 中介女裝之鏈接機構，使卡匣移載 戰用支撐座20相對於轉台 16出退移動自如地被支撐。 受疋，、要其構成係與下述蓋 體之開閉支撐機構不相干涉，卡匣 歹卞匣私載用支撐座20之出退 移動機構係可為任意構成。 當使用上述構成之卡E搬送裝置1時，藉由㈣Μ 搬送裝置1之行走、升降運輸器15之升降、及轉二16之 旋轉’能使卡㈣多載機構17與具有架體⑽之切收納 艎7内之任意卡£收納艘7、及相對於基板搬出作業部8 或基板搬入作業部9之卡匿移載位置相對應。另外，在各 卡匿㈣艙7、基板搬出作業部8及基板搬人作業部9處， 係配設有將潔淨卡E 6底部左右兩側邊加以支樓之左右一 12 201109259 y卡E支擇件21。而，當將被收納於卡匿收納艘7之 ’、爭卡匣6加以出庫時，如第8圖所示，係以比出庫對象 之卡匣收納艙7之卡匣支撐水平高度略低之水平高度使 卡E移載機構！ 7對該出庫對象之卡匠收納艙7對應停止 後，如先前眾所周知地，藉由實施將卡匣移載用支撐座2〇 之出退運動與升降運輸器15單位量之上昇運動加以组合 ㈣成之切取出動作，能使被收納在卡£收納搶7内之 潔淨卡E 6 ’移載到卡g搬送裝置i之升降運輸器^ 5上。 將被基板搬出作業部8或基板搬人作業部9支撑之潔淨卡 <卡匣搬送裝置1側移载，也是以與上述同樣之順 序來實施。 與上述相反地，當自卡匣搬送裝置1之升降運輸器15 t i使潔淨卡匣6入庫到空的卡匣收納艙7内_，係使支 。♦淨卡匣6之卡匣移載機構i 7，以比出庫對象之卡匣收 、讀7之卡£支#水平高度略高之水平高纟，使卡E移載 機構17對該入庫斜奐夕本广 ®收納搶7對應停止後，如先前 眾所周知地，藉由實施 下移載用支樓座20之出退運動 與升降運輸器15單位詈之· 里之下降運動，加以組合所構成之卡 Μ卸下動作，能使卡厣 多载用支稽座20上之潔淨卡匣6左 右兩側邊，移裁f丨丨 成 庫對象之卡匣收納艙7卡匣支撐件21 上0使潔淨卡匣6自卡厗珈、、， .、 卞匣搬达裝置1往被基板搬出作業部 8或基板搬入作業部Q狡恭 9移載之作業，也是以與上述同樣之 順序來實施。 潔淨卡匣6，如第n因μ 弟11圖所示，係使玻璃基板丨〇在水 13 201109259 平狀態下，成上下複數段地收納之箱型物件，正面之美板 出入用開口冑6a α外之各面，係被壁材關閉，在背面側 處，係設有將外部氣體取入而經由過濾器送至卡匣内之風 扇·過濾器•單元（FFU)6t^前述潔淨卡匣6，係在其基板 出入用開口部6a面向與架體2A，2B間之卡匣搬送裝置丄之 具有行走通路3側相反之側之方向’亦即，係以面 向具有行走通路6之側之方向，被收納在各架體MB之 卡匣收納艙7内。 在能使前述潔淨卡E 6,如上所述地在架體2a,2b之 卡匣收納艙7或基板搬出作業部8或基板搬入作業部9之 間移載之卡ϋ搬送裝置1，係有 π ι 刖述盍體，係將 在升降運輸器15上被支撐搬送之潔淨卡匠6之前述基板出 入㈣口部6a加以關閉。亦即，以卡昆移載用支樓座2〇 移載到升降運輸器15上一定位（ 疋彳立置C卡匣移載用支撐座2〇到 達退入位置時之位置）之潔淨卡 下I3Lb之基板出入用開口部 6a’係由相對於先前說明過之架體认26切收納搶7之 收納方向可知’在被移載到升降運輸器15上之-定位置時 之卡E移動方向後側，係往後 俊万開口，但疋，當該潔淨卡 E 6被移載到升降運輪琴 ψ m 料建u上之—定位置時，將前述基板 出入用開口部6a加以關閉之篆 y j又盍粗22，如第2圖〜第4圖 示，係設於在升降運輸器〗^卜^上r ^ 上支撐卡匣移載機構17之 锝台1 6上。 月'/述蓋體22 ’係由左古一斜+ # ππ 右對之盍早體23Α，23β、及盥 兩蛊單體23七23Β同時連動而開ρ 、 斯句開閉運動之驅動機構24所構 14 201109259 成。各蓋單體23A，23B，係分別藉由垂直支軸25a 25b，一 被轉台16軸支之水平擺動臂26a，26b之游動端處，固著 有外端底部，其係由將前述垂直支軸25a，25b當作中心之 圓弧形垂直板部23a、及自該圓弧形垂直板部23a上下兩 側緣’往具有垂直支軸2 5 a，2 5 b之側水平連設之上下兩水 平板部23b，23c所構成。前述左右一對之水平擺動臂 26a，26b，係自形成於轉台16與卡匣移載機構17固定滑軌 座18之間之空間内，延伸至外側。 驅動機構24之構成，係内建於轉台丨6，其係由透過 前述垂直支軸25a，25b分別與水平擺動臂26a 26b連動， 而且相互咬合之一對平齒輪27a，27b、及使與一邊平齒輪 27a相咬合之平齒輪28具備於輸出軸之馬達29所構成， 藉由稼動前述馬達29,能使兩水平擺動臂26a，26b相互連 動’而可在需要角度範圍内，正逆轉驅動。而I，藉由在 前f兩水平擺動臂26a，26b需要角度範圍内之正逆轉，被 f著支撐在，前述兩水平擺動臂26a，26b尖端之左右一對 蓋單體23A’23B’如第2圖、第6圖及第1〇A圖所示，係 卡昆移載機才冓17之打開到左右兩外側而退避之退避位 置與如第7圖及第丨〇B圖所示之關閉作用位置之間，對 與也同步水平擺動運動，前述關閉作用位置，係兩蓋單 體日23A，23B圓弧形垂直板部23a之垂直内端邊相互鄰接， 5 "兩尺平板部2外，23c之水平内側邊係相互鄰接。 /而且田更詳細說明時’當左右-對之蓋單冑23A，23B #位於第2圖 ' 第6圖及第圖所示之退避位置時，前 15 201109259 述圓弧形垂直柘。， 17之卡g移^ ，上所述，係位於卡匠移載機構 15上之艮Γ 20,自進出位置在與升降運輸器 20二二 間出退移動時，在該切移載用支撐座 支撐之e淨卡E 6之移動執跡’亦即， 載路徑之外側，而且兩蓋單體23α23β之上下兩水平板^ 23b，23c’係在平面觀看中，位於切移載機構”卡厘移 載用支樓座2 0之出退移動技僻冰相丨 外側，而且如第4圖假想線 及第u圖所示，係位於比被該卡£移載用支標座2〇支撐 之潔淨卡£ 6之上下兩面水平高度，少許離開上下兩㈣ 之位置。因此’以上述之順序，當潔淨卡自架體SUB 卡匣收納艙7内，移載到升降運輸器15上時，使左右一 之蓋單體23A’23B往左右打開’事先移動到第2圖、第6 圖及第10A圖所示之退避位署益+ ι避位置，蜡此，卡匣移載機構17之 出退移動卡ΙΕ移載用支撐座2〇，或在其上被支樓之潔淨卡 匣6，係與退避位置之蓋單體23Α，23β沒有干涉。 。當支撲潔淨切6之卡匿移載用支揮座升降運 輸器15上之退入位置，而其卜嫌*妙 具上破支柊之潔淨卡匣6係到達 升降運輸器15上之-定位置時，使驅動機構24之馬達Μ 正轉驅動，透過水平擺動臂26a，26b，使左右一對之單蓋 體23A，23B自退避位置至前述關閉作用位置關閉作動早= 果’如上所述’如第7圖及第⑽圖所示，兩蓋單體ΜΑ，咖 圓弧形垂直板#23a之垂直内端邊係相互鄰接，同時，上 下兩水平板部23b，23c之水平内側邊係相互鄰接。而兩蓋 單體23A，23B圓弧形垂直板冑23a與上下兩水平板部 16 201109259 23b，23c，係形成關閉潔淨卡£ 6之基板出入用開口部& 之蓋體空間。此時，兩蓋單體23A，23B圓弧形垂直板部2% 之垂直外端邊 '及上下兩水平板部23b23c之相互一直線 狀連續之水平側邊，係隔著間隙而外般在潔淨卡匠6之基 板出入用開口部6a外側。 在可如上作用之蓋體22處，係於前述單側之蓋單體 23A内側，安裝有基板位置檢出農置3〇,基板位置檢出裝 置3〇,係將潔淨卡E6内之玻璃基板1〇收納位置加以檢 出。前述基板位置檢出裝置3〇,係在垂直支柱構件31上， 於上下方向上間隔需要之間隔，安裝有檢出玻璃基板心 偵知器32’該垂直支柱構件31之構成，係如第⑽圖及 第11圖之實線所示，能在前進位置F與後退位置r之間移 動’前述前進位置F’係各偵知器32之尖端感知部，進入 至在冻冷卡S 6内之各段玻璃基板ig周邊部處，間隔適當 間隙而重疊之位置，前述後退…，係接近蓋單體m 之圓弧形垂直板部23a。具體說來，如第5A圖所示，例如 在蓋單體23A之下側水平板部23c上，在接近與蓋單體23β 下側水平板部23c相鄰接之水平内側邊之位置處，於與該 側邊平行鋪設之滑動導軌33處，使基板位置檢出裝 竭垂直支柱構件31)之下端，前後移動自如地被支撐， 沿者别迷滑動導執33使基板位置檢出裝置3〇(垂直支柱構 件31)前後往復移動之驅動機構，有使螺合貫穿„直支 柱構件31側母螺絲體3 4之q ζ 與滑動導軌33僅能 千订自轉地支承，使前述螺桿35設於正逆轉驅動之馬達 17 201109259 26上之螺桿式驅動機構’雖然省略圖示也可以利用液壓 缸之驅動機構等。 而且，在使基板位置檢出裝置3〇於前進位置F與後退 位置R之間往復移動之構成中，前述滑動導軌⑽並非必須 者。例如如第5B圖所示，也可以使基板位置檢出裝置3〇(垂 直支柱料31)之下端，固著在尖端，而且另一端部係利 用被垂直支轴37支承之水平擺動f 3δ。在此情形下，使 該水平擺動臂38前後往復擺動之驅動機構，有在使前述垂 f支軸37正逆轉驅動之馬達39之外，雖然省略圖示，但 是’也可以利用螺桿式驅動機構或使用液壓缸之驅動機構 :。又’滑動導軌33或水平擺動臂38,係也可以利用蓋 單體23A之上下兩水平板部23b23c而上下—對設置，以 使支樓基板位置檢出裝1 3G(垂直支柱構件31)之上下兩 端。 上所述，被安裝在單側之蓋單體23A内側之基板 置仏出裝置30之後退位置R，係、被設^成當蓋單體⑽ 退避位置與關閉作用位置間，開閉運動時，被移載到升 運輸器15上一定位晉夕·，含上j- n . 疋1立置之房'孕卡匣6，與位於後退位置只 之基板位置檢出裝置3G係不相互干涉，同時，當蓋單 23A在退避位置時，位於後退位置R上之基板位置檢出 置30’係被設定成位於伴隨卡㈣多載機構17卡匡移載; 支樓座20之出退移動之卡£移載路徑外側上。 當使用以上構成時，在使蓋體22兩蓋單體23A，2⑴ 開而在退避位置待機之狀態了，當藉由卡，移載機構17 18 201109259 使潔淨卡® 6自架體2A，2B+S收納艘7，取出至升降運 輸器15上之一定位置時，藉由蓋體22將該潔淨卡匣6之 基板出入用開口 # 6a加以關閉，同時，藉由具有該蓋體 22之基板位置檢出裝置3〇，能將被收納於潔淨卡匣6内之 玻璃基板1 0之收納位置資訊加以取得。亦即，當兩蓋單體 23A’23B在退避位置待機時，具有單側蓋單體23a之基板 位置檢出裝置30係在後退位置待機，當藉由驅動機構η 使前述兩蓋單體23A，23B關閉動作到關閉作用位置，而相 對於被移載到升降運輸器15上一定位置之潔淨卡厘6之移 载方向’使在後側往後方開口之基板出人用開口部h以兩 蓋單體23A，23B關閉時，使在後退位置Rji待機之基板位 置檢出裝置30移動至前進位置F為止。結果，基板位置檢 出裝置30各偵知器32之尖端感知部，係以需要量進入到 潔淨卡匣6内之各段基板收納艙内，各偵知器32之中，僅 與被收納於基板收納艙之玻璃基板1〇周邊部板面相向之 偵知益32，係輸出具有玻璃基板之〇N訊號，所以，自基 板位置檢出裝置30各偵知器32之ΟΝ/OFF之資訊，可以取 得月’J述冰，尹卡£ 6中之玻璃基板j 〇《收納位置資訊（地圖 數據）。 由前述基板位置檢出裝置3〇所致之潔淨卡匣6内之破 璃基板ίο收納位置資訊之取得，係在藉由蓋體22將潔淨 卡® 6基板出入用開口部6a加以關閉後基板位置檢出裝 置30自後退位置R切換到前進位置”結束不久時加以實 施’當取得必要f訊結束後，最好立刻使基板位置檢出裝 19 201109259 置30，自前進位置F回到後退位置R。被取得之玻璃基板 之收、’内位置資訊，係被傳送到基板取出用機器人裝置 12 ’前述基板取出用機器人裝置】2,係自被移載到基板搬 出作業部8之潔淨卡匣6内’將玻璃基板1〇 一塊一塊地取 出而达入處理褒置11。另外，藉由卡匿移載機構17而 =到升降運輸器15上一定位置’而且，藉由蓋體22 * 土板出入用開口部6a之潔淨卡£ 6，係藉由升降運輸 器15之升降運動與卡£搬送裝£1之行走被搬送至相對 I板搬出作業部8之移載位置。此時之潔淨切6,當 =具有基板搬出作業部8之架體2“目反側之 :::τ，前述基板出入用開…之開口方向，係 基相反…’所以，在 6之基板h用門"^ 18G以轉，事先使該潔淨卡S 乂 t 開P 6a轉向具有基板搬出作業部8之 二S’’蓋體22及開閉蓋體22之驅動機構24係設於轉 fa之蓋體：以’潔淨卡E 6及關閉其基板出入用開口部 之盘體22,係-體做18〇度轉向。 二::::::：1’將潔淨卡……_ 板出入用開。…蓋：二時’將關閉該潔淨…基 由驅動機構24而位_ 打開動作。亦即，將藉 以驅動機構24打開動作閉:用位置之兩蓋單體2物’ 之退避位置。直到此:二物移载路徑左右兩侧 退位置R，所以，在蓋體 ：出裝置30係正回到後 开1作動時，基板位置檢出裝 20 201109259 置30係與 - » jataa以之打開纟士束時 如上所述，將由卡ϋ移載機構17卡£移載用支^別’ 出退運動與升降運輸器15單位量之下降運動，所 ： 卡匣卸下動作加以實施，只要使在升降運輪器i 5上—— 置被支撐之潔淨卡“’搬出移載到基板搬出作：部二: 可。之後，如上所述’基板取出用機器人裝置12，係依^ 之前被給予之基板收納位置資訊(地圖數據），而被自動控 制’玻璃基板10,係自被移載到基板搬出作業部8之潔ς 卡匣6内，一塊一塊地被取出，而被送入下一段之處理裝 置 11。 ' 在處理裝置11處理完畢之玻璃基板1〇,係藉由基板 收納用機器人裝置13,自動被收納到在基板搬入作業部9 處待機之潔淨卡匣6内。當在該潔淨卡匣6内收納有既定 塊數之玻璃基板1 〇時，該潔淨卡匣6，係藉由卡匣搬送裝 置1，回到架體2Α，2Β之空的卡匣收納艙7内，或者，被 送出到其他搬送線。 接著，當參照第12圖〜第14圖來說明本發明之第2 貫施例時’構成此實施例蓋體40之左右一對蓋單體 41Α，41Β ’係在轉台丨6上，於離開左右外側之位置處，藉 由垂直支轴42a，42b，一端係水平擺動自如地被軸支之左 右一對水平擺動臂43a，43b尖端部處，固著有該蓋單體 41A，41B之外端部底面，藉此，在前述垂直支軸42a，42b 周圍’能水平開閉運動地被支撐。使前述兩蓋單體41 A, 41B 同時連動而開閉運動之驅動機構44，係内建於轉台16之 21 201109259 二:半t係由一對平齒輪46a’46b及馬達48所構成，前述 齒働’係透過前述垂直支軸似屬及鍵 ”專動機構42a，45b’分別與水平擺動#他，431)連動且 相互咬合’前述馬達48，係使與一邊之平齒輪恤相咬合 之千齒輪47具備在輸出軸’藉由稼動前述馬it 48,使兩 水平擺動臂43a 43b才日η ·击命· " 、、, ，4互連動，而在需要角度範圍内可正 逆轉驅動。而且，藉由扁針 錯由在刖述兩水平擺動臂43a，43b之 要角度範圍内之正逆轉，被固著 u考叉琛在削述兩水平擺動臂 3a，43b尖端之左右一對蓋單 了盍早體41A，41B，係在如第12圖 13圖所示之退避位置’與如第14圖所示之關閉作用 位置之間’對稱性地同步水平擺動運動。前述退避位置， 係往與卡昆移載機構17卡匿移載用支撐座2。之出退移動 相伴隨之卡匣移載路牿尤士 & aL ,,. 左右兩外側打開而退避。前述關閉 作用位置U蓋單體41A，41B在橫斷前述切移載路和 之方向上相互鄰接’而將被移載到升降運輸器15上一定位 置之潔淨卡E 6基板出入用開口部6a加以關閉。 此第2實施例之特徵，係使成為水平擺動臂43a，43b 旋轉中心之垂直支軸42a，42b之位置，比第i實施例中之 成為水平擺動臂26a’26b旋轉中心之垂直支軸253，挪之 位置，還要靠近卡IE移载路經之左右外側，而且靠近前方 (切移載用支撐錢之進出移動方向），藉此，能使構成 盍早體41A’41B之上下兩水平板部仍，…間之垂直板部 …之往前方之擴出可以減小，也能使基板位置檢出裝置 3〇固定在單側之蓋單體4U内端部内側。 22 201109259 ‘ 亦即’固定在單側之蓋單體41A内端部内側之基板位 置檢出裝置30 ’係當被切換到關閉作用位置之兩蓋單體 41A，41B，將被移载到升降運輸器15上一定位置之潔淨卡 匣6基板出入用開口部6a加以關閉時，偵知器μ尖端感 知部係進入基板出入用關D β 用開口部6a内，而能將被收納於潔淨 ” 6内之玻璃基板6之周邊部板面加以檢出，但是，使 盍卓體41A，41B自關閉作用你要 ,,. 關闭作用位置，切換到卡匣移載路徑左 右兩側之退避位置時，其虹 基板位置私出裝置30垂直支軸 仏，4213周圍之轉動軌跡，係通過被移載到升降運輸器15 上一定位置之潔淨卡匣6外側， j被固疋位置之基板位置檢 出之裝置30係與潔淨卡匣6 干# 破切換到卡匣 载路徑左右兩側之退避位置之兩蓋單體4 整體在卡匡移載路徑外側， 係… 徑約略平行。 -方向心'與該卡E移載路 接著’當參照第15圖〜第17圖來 施例時’在本實施例中，”打β U第3貫 j T 净卡匣6，係朝向第1 A SI % -之卡厘搬送裝置“亍走通路3,而…^第1A圖所不 開口之方a女 而在基板出入用開口部63 之方向’亦即，在與上述實施例相 在架體2A，2B之切收 肖’被收納 +上 固此’當升降運輪 之卡厘移載機構17卡£移载用支擇座 U 15上卜 UL p 杪 杪 又 又 20 20 20 20 20 20 20 20 20 :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: :: When it is transferred to the elevating transporter 15 6 201109259, the substrate access opening 63 faces each other. The above-mentioned support is shown in item 9 of Wokwei, and it is a turntable that rotates freely around the application! The configuration is such that the rotation of the vertical axis is performed, and the cassette is transferred by the left and right sides of the traveling path of the 180 w for the support table 斛 a, and the card transport device is invented. The effect] summer can also move back and forth horizontally. When the configuration of the card substrate 1 described in the patent application scope is used, the side surfaces other than the opening portion are closed by the wall material, and even the so-called clean cassette having the FFU as described above is used. It is possible to carry the "opening of the substrate" in the state where the cover is closed by the support of the cassette transfer support to the elevating transporter. When the transport is carried out, the FFU can be configured to prevent the contaminated external air from entering the cassette from the opening and exit opening of the substrate, and at a certain position on the lift conveyor. In the case where the previous configuration of the cleaning cartridge for the cassette is set, the cover is provided only on the side of the lift conveyor. Therefore, even if the drive mechanism for opening and closing the cover is used in combination, the configuration of the lifter side is compared. In simple terms, the side of the lift conveyor is made smaller and can be implemented relatively cheaply. Further, when the configuration described in the second aspect of the invention is used, the substrate is placed in the substrate position of the cover when the cassette is conveyed while the substrate is opened and closed by the lid. The device (map detector) can acquire the storage position information (map information) of the substrate stored in the cassette, and after the carrier is carried out to the substrate carrying operation unit, the substrate is obtained by the substrate position 201109259 detecting device. In the case of the position information, in the substrate=outlet operation unit, the substrate take-out robot can shorten the cycle time of the Tang Wang Meng B main μ until the substrate is taken out from the card E. Further, the virgin has a substrate position detecting device at the lid where the substrate of the cassette is opened and closed. In addition to the opening and closing of the substrate opening/closing portion and the opening and closing of the substrate opening/closing portion, the opening for the map detecting device and the opening and closing of the map detecting benefit opening are provided. In comparison with the case where the opening of the device is required to be provided with the mechanism for accessing the map map, the structure of the device as a whole and the system of the sub-work can be simplified, and can be implemented inexpensively. In addition, when the composition described in the third application of the patent application Fan Yuandi Q ^ 寸 干 dry solidification is used, the card transporting device is capable of storing and robbing the frame card into which the card g is fed and can be jammed. The substrate for 匣 is used for opening and closing with π.卩 将 卩 卩 卩 卩 卩 卩 卩 卩 卩 卩 卩 卩 卩 卩 卩 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有Compared with the case where it is accommodated in the direction in which the opening of the traveling passage is accommodated, it is relatively easy to keep the clean atmosphere in the cassette. And 'when the card is used to make the card! When the transfer holder is moved to the lift conveyor on the side of the cassette transport device, the lid body is closed by the cover member for opening and closing the substrate, and the desired purpose can be achieved. In this case, when the configuration described in item 4 of the & Kashen δ patent range is used, the larger substrate of the cassette is inserted into the cover body by the one cover unit. In the case where the opening portion is opened and closed, the cover that moves between the retracted position and the closed position is reduced in size, and the mechanism for moving the cover unit 201109259 can be easily formed, and the cover body can be opened and closed. It takes time to shrink (four) ring time. In addition, it is sufficient that the right-and-left-side cover unit is simply pivotally supported on the i-axis circumference so that the left-right-to-cover unit can be easily pivoted. Moreover, it is possible to construct or drive the flat so that the cover unit in the retracted position is transferred to a position on both sides of the card at a certain position on the lift conveyor, and is turned to move along the cassette. In the direction of the path, the width of the whole is narrowed. b. When the body is closed and closed, when the configuration described in the sixth paragraph of the patent application is used, the substrate is detected by the substrate position detecting device in a state in which the cut-out substrate opening and closing portion is closed by the carcass. At the position of the substrate, the position of the substrate = detection device can be extended into the card E to a necessary depth. Therefore, the position detecting device can detect the position of the substrate reliably by using a type of detecting device that detects the horizontal plate surface of the substrate horizontally stored in the card from the vertical direction. Further, when the configuration described in the seventh application of the patent application is used, the mechanism for moving the substrate position detecting device relative to the cover body or the control system thereof can be easily and inexpensively implemented. In this case, when the amount is a certain amount, the substrate position detecting device can be moved into the cut from the substrate opening/closing portion, so that the type of the underlying flat surface of the substrate is detected by the vertical direction. Even if the substrate position detecting device is assumed to be in a position that cannot be utilized by the type of detecting device, a type of detecting device that detects the vertical end surface of the peripheral edge of the substrate is used. can. 9 201109259 When the cassette is transported, a □ storage compartment, so that the A board is cut out and the card of the frame of the person is opened on the side of the walking path: the two parts are in the cutting and transporting unit. In the case where the patent application range is included, the present invention is embodied in the configuration described above, and it is not necessary to move the system between the retracted position and the closed action position, and the present invention can be implemented very inexpensively. When the structure described in the ninth patent range is used, the lock storage rack body may be disposed on the left and right sides of the travel path of the cassette transport device or the card storage may be arranged on one side of the travel path. At the same time, the frame is placed on the opposite side, but the card is removed. (4) The base of the substrate is moved out. (4) In the case of the cover system and the card e-shifting stand, the body rotates. Therefore, the card is transferred to the base. In the case where the left and right sides of the path are subjected to the cutting, the HUI is closed by the cover body by the cover body, and the combination is described in the above-mentioned patent scope, item 2, by The substrate position detecting device of the cover detects the position of the substrate in the cassette. [Embodiment] When the first embodiment of the present invention is described with reference to Figs. 1 to 11 , the card cassette transporting apparatus 1 of the present invention is a rack body 2 arranged in two rows. The travel path 3 between the A and 2 B is supported by the support rails 4 attached to the ground, and is self-propelled along the two frames 2A, 2B. In the two bodies 2A, 2B, a cassette storage compartment 7 is arranged in a three-dimensional manner, and the cassette storage compartment 7 is provided with a clean cassette 6 and a storage compartment 7 is provided in each of the frame 2A on one side. The substrate take-out operation unit 8 and the substrate carry-in operation unit 9 are configured in the form of a substrate, and the substrate take-out robot device 12 is provided in parallel with the substrate storage robot device 3, and the substrate take-out robot device 12 is carried out to the substrate carry-out operation unit. The cleaning card of 8 is 6M, and the substrate 1 is taken one by one, and is carried into the processing device 1 to the substrate storage robot 13 to process the processed substrate 处理 processed by the processing device 11 one by one. The ground is stored in the clean card E 6 that is waiting at the substrate loading operation unit 9. Further, the substrate take-out robot device 12 and the substrate storage robot device 13 are well-known objects, and the illustration of the robot device is omitted in the drawing. The card player transporting device 丨 is a lifting and lowering conveyor 15 that has a pair of struts between the front and the rear in the traveling direction, and is mounted on the hoisting and lowering device 15 so as to be reversible around the vertical axis. 16 is provided with a card transfer mechanism 17 and a card transfer mechanism 17 for attaching the clean card® 6 to the frame 2, 2β, the storage compartment 7, the substrate carrying operation unit 8, and the substrate loading operation unit 9. Transfer between. The card transfer mechanism 17 as shown in FIG. 3, FIG. 4, FIG. 6, and FIG. 8 is a fixed rail mount 18, a middle slide rail mount 19, and a kakun transfer support base 20. The fixed rail seat 18 is formed in the traveling direction of the turntable 相对 relative to the card carrying device, and is at right angles to the right side. The middle slide rail seat 19 is attached to the fixed rail seat 18, opposite: card打Removal device i is driven in the direction of the right angle, and can be supported at a right angle and can only be retracted to the single side. The card is used to transfer the battle support base 20, which is attached to the above-mentioned rail seat 19, and is slipped with the middle section. The retracting movement direction of the rail seat 19 is the same as that of the retreating and moving back and forth by the movement of the cargo loading and unloading stacker used in the previous automatic warehouse 11 201109259 The driving mechanism is connected to the retracting movement of the middle sliding seat 19 relative to the fixed mountain and the A lunar seat 18, and the cassette supporting support 20 is retracted relative to the middle sliding rail seat 19, Card 匣 transplanting... Tooth Z0, can be used in the plane view '匣 匣 匣 支撑 支撑 系 系 系 系 系 系 系The retracted position of the seat 18 overlaps with the insertion/removal support 2 of the cassette, and the horizontally retracted movement is made between the inward and outward positions in which the fixed rail seat 18 is completely separated from the lateral direction. When the turntable 16 is rotated at (10) degrees, it is possible to make a change in the moving direction with respect to the cutting conveyance 41 and the traveling transfer support 2G, and to change in the opposite direction. The three-stage fork form of the above-described three-stage fork type transfer mechanism 17 is merely an example, and its constitution may also be... for example, in the patent document 1 cited above, Between the 盥 匣 卞匣 卞匣 卞匣 卞匣 卞匣 卞匣 卞匣 卞匣 卞匣 卞匣 中介 中介 中介 中介 中介 中介 中介 中介 中介 中介 中介 中介 中介 中介 中介 中介 中介 中介 中介 中介 中介 中介 中介 中介 中介 中介 中介 中介 。 。 。 。 The structure of the card is not to interfere with the opening and closing support mechanism of the cover described below, and the retracting mechanism of the cassette support 20 can be configured arbitrarily. When the card E transport device 1 configured as described above is used, the (four) transport of the transport device 1, the elevating and lowering of the lifter 15 and the rotation of the turn 26 can enable the card (four) multi-load mechanism 17 and the frame (10) to be cut. Any of the cassettes 7 stored in the cassette 7 and the cassette 7 and the card transfer position of the substrate carrying unit 8 or the substrate carrying unit 9 correspond to each other. In addition, in each of the card (four) compartments 7, the substrate carrying-out operation unit 8, and the substrate carrying operation unit 9, a left and right sides of the bottom side of the clean card E 6 are provided with a left and right side 12 201109259 y card E branch Option 21. On the other hand, when it is stored in the card storage container 7 and the card is released, as shown in Fig. 8, it is slightly lower than the card support level of the card storage compartment 7 of the delivery object. The level of height makes the card E transfer mechanism! (7) After the stoppage of the card-storage storage compartment 7 of the object to be discharged is performed, as previously known, the movement of the retracting movement of the cassette-loading support base 2 and the lifting movement of the lifting conveyor 15 are combined (4) In the cutting operation, the cleaning card E 6 ' stored in the card storage 7 can be transferred to the lifting conveyor 5 of the card transporting device i. The cleaning card & the cassette transporting device 1 side supported by the substrate carrying-out operation unit 8 or the substrate carrying unit 9 are also transferred in the same order as described above. Contrary to the above, when the elevating transporter 15 t i from the cassette transporting device 1 causes the clean cassette 6 to be stored in the empty cassette storage compartment 7, it is supported. ♦ 匣 匣 之 之 匣 匣 匣 匣 匣 i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i i After the 对应 本 本 本 收纳 收纳 收纳 收纳 对应 对应 对应 对应 对应 对应 对应 对应 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳 收纳The card Μ 动作 动作 , , , Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ Μ The operation of transferring the cleaning cassette 6 from the cassette, the cassette, and the substrate carrying unit 8 to the substrate carrying unit 8 or the substrate carrying unit Q is performed in the same order as described above. . The clean cassette 6 is a box-shaped object that is placed in the upper and lower sections of the glass substrate in the flat state of the water 13 201109259 as shown in the figure of the nth, and the front opening and exit opening 胄6a α The outer surface is closed by the wall material, and at the back side, there is a fan/filter unit (FFU) that feeds the outside air into the cassette through the filter. 6t^ The aforementioned clean cassette 6 In the direction in which the substrate insertion opening portion 6a faces the side opposite to the side of the traveling path 3 of the cassette conveying device 与 between the frames 2A, 2B, that is, the direction facing the side having the traveling path 6 It is housed in the cassette storage compartment 7 of each frame MB. The cassette transport device 1 capable of transferring the clean card E 6 between the cassette storage compartment 7 of the racks 2a, 2b, or the substrate carrying-out operation unit 8 or the substrate loading operation unit 9 as described above is provided. The π ι 盍 盍 , , , , , , , , , , , , 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 That is, the clean card is transferred to the lift transporter 15 by the Kaqun transfer support base 2, and the position is fixed (the position where the C-clamp transfer support 2 is reached at the retracted position) The substrate opening/closing portion 6a' of the lower I3Lb is slid by the storage direction of the frame body 26 which has been described above, and the card E movement when the position is transferred to the elevating transporter 15 is known. The rear side of the direction is opened to the rear, but when the cleaning card E 6 is transferred to the fixed position of the lifting wheel, the substrate opening and closing opening 6a is closed. Then, yj is upset 22, as shown in Fig. 2 to Fig. 4, and is disposed on the platform 16 of the cassette transfer mechanism 17 on the lift conveyor. The month '/reported body 22' is composed of Zuoguyi slant + # ππ right 盍 盍 盍 盍 Α 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 23 Constructed 14 201109259 into. The cover units 23A, 23B are respectively fixed by the vertical support shafts 25a 25b, at the swimming end of the horizontal swing arms 26a, 26b supported by the turntable 16, and the bottom end of the outer end is fixed by the vertical The circular shaft-shaped vertical plate portion 23a as the center of the support shafts 25a, 25b and the upper and lower edges of the circular-arc vertical plate portion 23a are horizontally connected to the side having the vertical support shafts 2 5 a, 2 5 b The upper and lower horizontal plate portions 23b and 23c are formed. The pair of right and left horizontal swing arms 26a, 26b extend from the space formed between the turntable 16 and the cassette transfer mechanism 17 to the slide rail 18, and extend to the outside. The drive mechanism 24 is built into the turret 6 and is interlocked with the horizontal oscillating arms 26a, 26b through the vertical fulcrums 25a, 25b, respectively, and engages one of the pair of spur gears 27a, 27b and one side. The spur gear 28 that the spur gear 27a is engaged with is formed by the motor 29 of the output shaft. By the motor 29, the two horizontal oscillating arms 26a, 26b can be interlocked with each other, and the drive can be reversely reversed within a required angle range. And I, by the front f two horizontal swing arms 26a, 26b need to be positively reversed in the angular range, supported by f, the left and right pair of cover units 23A'23B' of the tips of the two horizontal swing arms 26a, 26b Fig. 2, Fig. 6, and Fig. 1A show the retracted position of the retraction of the Kaqin transfer machine 17 to the left and right sides and as shown in Fig. 7 and Fig. B. Between the closing action positions and the horizontal oscillating motion, the closing action position is adjacent to the vertical inner end sides of the arc-shaped vertical plate portions 23a of the two cover unit days 23A, 23B, 5 " two-foot flat portion 2, the horizontal inner sides of 23c are adjacent to each other. / When the field is described in more detail, 'When the left and right sides are closed, 23A, 23B # are located in the retracted position shown in Fig. 6 and Fig. 2, the first 15 201109259 is a circular arc vertical 柘. , the card of the 17 is shifted to ^, which is located on the card player transfer mechanism 15, and the self-entry position is moved forward and backward with the lifting and transporting device 20, and the cutting support is used. The support of the e-card E 6 mobile track 'that is, the outer side of the load path, and the two cover units 23α23β above the two horizontal plates ^ 23b, 23c' are in the plane view, located in the cutting transfer mechanism "card The shifting load of the support tower is shifted to the outside, and as shown in the imaginary line of Fig. 4 and the figure u, it is located at the support of the support for the card. The clean card is 6 above and below the level of the two sides, a little left from the top two (four) position. Therefore, in the above order, when the clean card is transferred from the shelf SUB card storage compartment 7 to the lift conveyor 15, The left and right cover units 23A'23B are opened to the left and right. 'Before moving to the retracted position of the second figure, the sixth figure, and the 10th figure, the position of the evacuation position + ι avoidance position, wax, the card transfer mechanism 17 Retracting the mobile card ΙΕ transfer support 2〇, or the clean cassette 6 on the branch, and the cover unit of the retracted position 23Α 23β has no interference. When the branch of the cleansing and cutting 6 is removed, the retracted position on the lifting and lowering transporter 15 is used, and the cleansing card 6 of the smashing and smashing When the position of the device 15 is fixed, the motor of the drive mechanism 24 is driven to rotate forward, and the horizontal swing arms 26a, 26b are passed through, so that the left and right single cover bodies 23A, 23B are closed from the retracted position to the closed position. = 'As described above', as shown in Fig. 7 and Fig. 10, the vertical inner end sides of the two cover unit ΜΑ, the coffee arc-shaped vertical plate #23a are adjacent to each other, and the upper and lower horizontal plate portions 23b, The horizontal inner side edges of the 23c are adjacent to each other, and the two cover units 23A, 23B, the circular arc-shaped vertical plate 胄 23a, and the upper and lower horizontal plate portions 16 201109259 23b, 23c form an opening for inserting and closing the substrate for cleaning the card 6 The cover space of the & at this time, the horizontal outer edge of the 2% of the circular-shaped vertical plate portion of the two cover units 23A, 23B and the horizontal side of the upper and lower horizontal plate portions 23b23c are continuous and horizontally separated. The outside of the opening portion 6a for the substrate of the cleaning card maker 6 is outside the gap. The lid body 22 which can be used as described above is attached to the inside of the one-side cover unit 23A, and the substrate position is detected, and the substrate position detecting device 3〇 is used to clean the glass substrate 1 in the clean card E6. The storage position is detected. The substrate position detecting device 3 is attached to the vertical pillar member 31 at intervals in the vertical direction, and the detection glass substrate heart detector 32' is attached to the vertical pillar member 31. The configuration is such that the front end position F of each of the detectors 32 can be moved between the forward position F and the retracted position r as indicated by the solid lines in the (10) and eleventh figures, and the The peripheral portion of each of the glass substrates ig in the freeze-cooling card S 6 is overlapped at a position with an appropriate gap, and the retreat is a circular arc-shaped vertical plate portion 23a close to the cover unit m. Specifically, as shown in Fig. 5A, for example, on the lower horizontal plate portion 23c of the cover unit 23A, at a position close to the horizontal inner side adjacent to the lower horizontal plate portion 23c of the cover unit 23β At the sliding guide 33 which is laid in parallel with the side, the substrate position is detected and the lower end of the vertical pillar member 31) is exhausted, and is supported by the front and rear movements freely, and the slide guide 33 is used to make the substrate position detecting device. 3驱动 (vertical pillar member 31) is a driving mechanism that reciprocates back and forth, and the screw Φ and the sliding guide 33 are rotatably supported by the sliding guide 33. The screw-type drive mechanism provided in the motor 17 of the forward-reverse drive 20111125926 can use the drive mechanism of the hydraulic cylinder, etc., and the substrate position detecting device 3 is placed at the forward position F and the retracted position R. In the configuration of the reciprocating movement, the slide rail (10) is not essential. For example, as shown in Fig. 5B, the lower end of the substrate position detecting device 3 (the vertical pillar 31) may be fixed to the tip end, and another One end The horizontal swing f 3δ supported by the vertical support shaft 37. In this case, the drive mechanism for reciprocating the horizontal swing arm 38 back and forth is provided with a motor 39 for driving the vertical support shaft 37 to be reversely driven, although omitted As shown, but 'the screw drive mechanism or the drive mechanism using the hydraulic cylinder can also be used: the slide guide 33 or the horizontal swing arm 38 can also be used up and down by the upper and lower horizontal plate portions 23b23c of the cover unit 23A. The arrangement is such that the upper and lower ends of the 1 3G (vertical pillar member 31) are detected at the position of the branch substrate. As described above, the substrate placed on the one side of the single-sided cover unit 23A is disposed at the retracted position of the substrate 30. R, the system is set to be between the retracted position and the closing position of the cover unit (10). When the opening and closing movement is performed, it is transferred to the lift conveyor 15 and positioned on the eve, including the j-n. The room 'pregnancy card 匣6 does not interfere with the substrate position detecting device 3G located at the retracted position, and when the cover sheet 23A is at the retracted position, the substrate position at the retracted position R is detected and set to 30' Is set to be located in the accompanying card (four) multi-load mechanism 17 card Transfer; the card of the extension and retraction of the support base 20 is on the outer side of the transfer path. When the above configuration is used, the cover body 22 and the cover unit 23A, 2(1) are opened and are in a standby state at the retracted position. By card, transfer mechanism 17 18 201109259 When the clean card® 6 is taken out from the frame 2A, 2B+S storage container 7 and taken out to a certain position on the lift conveyor 15, the clean cassette 6 is closed by the cover 22 The substrate entry/exit opening #6a is closed, and the substrate position detecting device 3 having the lid body 22 can acquire the storage position information of the glass substrate 10 stored in the clean cassette 6. That is, when the two cover units 23A'23B are in the retracted position, the substrate position detecting device 30 having the one side cover unit 23a stands by in the retracted position, and when the two cover units 23A are driven by the drive mechanism η, 23B closes the action to the closing action position, and the cover direction of the clean caliper 6 that is transferred to a certain position on the lift conveyor 15 is such that the base opening for the rear side is opened by the cover h When the cells 23A, 23B are closed, the base at the retreat position Rji is made to stand. Position detection means 30 is moved up to the forward position F. As a result, the tip sensing portions of the respective detectors 32 of the substrate position detecting device 30 enter the respective substrate storage compartments in the clean cassette 6 in a required amount, and each of the detectors 32 is only housed in The glass substrate 1 of the substrate storage compartment is opposite to the surface of the peripheral surface of the substrate, and the output of the glass substrate 1 is a 〇N signal having a glass substrate. Therefore, the information of the 侦/OFF of each detector 32 of the substrate position detecting device 30 is You can get the monthly 'J Shubing, Yinka £6 glass substrate j 〇 "Storage location information (map data). The storage substrate information in the clean cassette 6 caused by the substrate position detecting device 3 is obtained by closing the clean card® 6 substrate opening/closing portion 6a by the lid body 22 The position detecting device 30 is switched from the retracted position R to the forward position. When the end of the request is completed, it is preferable to immediately set the substrate position detecting device 19 201109259 to 30, and return to the retracted position from the forward position F. R. The received glass substrate and the 'inside position information are transmitted to the substrate take-out robot device 12', the substrate take-out robot device 2, which is a clean cassette that has been transferred to the substrate carry-out operation unit 8. 6: 'The glass substrate 1 is taken out one by one to reach the processing device 11. In addition, by the card transfer mechanism 17 = to a certain position on the lift conveyor 15 'and by the cover 22 * The cleaning card 6 of the opening and exiting opening portion 6a is transported to the transfer position of the I-plate carrying-out operation unit 8 by the lifting movement of the lifting and lowering conveyor 15 and the travel of the card-receiving device £1. Clean cut 6, when = In the frame 2 of the substrate carrying-out operation unit 8, "the opposite side of the mesh" is: τ, the opening direction of the substrate is opened and closed, and the base is reversed... Therefore, the substrate h of 6 is rotated by the door " The cleaning card S 乂t opening P 6a is forwarded to the second S'' cover 22 having the substrate carrying-out operation unit 8 and the drive mechanism 24 for opening and closing the cover 22 is attached to the cover of the transfer fa: the 'clean card E 6 And the disk body 22 which closes the opening/receiving part of the board|substrate, and the body-body turns 18 degree turns. Two:::::::1' will clean the card..._ board for access. ... cover: 2 o' will close the clean... base by the drive mechanism 24 _ open action. That is, the drive mechanism 24 is opened and closed: the retracted position of the cover unit 2 is used. Up to this point: the left and right sides of the two-object transfer path are retracted from position R. Therefore, when the cover body: the device 30 is being returned to the rear and the operation is started, the substrate position detecting device 20 201109259 is set with 30 series and - » jataa When the gentleman's beam is opened, as described above, the card transfer mechanism 17 is used to transfer the transfer movement and the movement of the lifter and the lifter by 15 units, and the card removal operation is carried out as long as On the lifter i 5 - the supported clean card "' carried out and transferred to the substrate for carrying out the work: Part 2: Yes. After that, as described above, the 'substrate take-out robot 12' The substrate storage position information (map data) is automatically controlled, and the glass substrate 10 is transferred from the cleaning cassette 6 of the substrate carrying operation unit 8, and is taken out one by one and sent to the next. The processing device 11 of the first section is mounted on the glass substrate 1 that has been processed by the processing device 11 by the substrate housing robot 13 and automatically stored in the clean cassette 6 that is in standby at the substrate loading unit 9. The clean cassette 6 contains a predetermined number of blocks When the glass substrate 1 is 〇, the clean cassette 6 is returned to the cassette storage compartment 7 in the empty space of the frame 2Α, 2Β by the cassette conveying device 1, or is sent to another conveyance line. When the second embodiment of the present invention is described with reference to Figs. 12 to 14 , the pair of right and left cover members 41 Α , 41 Β ' constituting the cover 40 of this embodiment are attached to the turntable 丨 6 to leave the left and right outer sides. At the position, at the tip end portion of the pair of left and right horizontal swing arms 43a, 43b, which are pivotally supported at one end by the vertical support shafts 42a, 42b, the end faces of the cover members 41A, 41B are fixed. Thereby, the periphery of the vertical support shafts 42a, 42b can be supported by horizontal opening and closing movements. The drive mechanism 44 for simultaneously opening and closing the two cover units 41 A, 41B is built in the turntable 16 201109259 2: The half t is composed of a pair of spur gears 46a'46b and a motor 48, and the shackles 'transmission through the aforementioned vertical fulcrums and keys" are respectively oscillated by the horizontal movements 42a, 45b', respectively. ) interlocking and interlocking with each other 'the aforementioned motor 48 is to bite the flat gear with one side The combination of the gears 47 is provided on the output shaft 'by arranging the aforementioned horses 48, so that the two horizontal oscillating arms 43a and 43b are connected to each other, and are connected in the required angle range. Reverse the drive. Moreover, by the flat needle misalignment being reversed within the desired angle range of the two horizontal oscillating arms 43a, 43b, the left and right pair of caps of the tips of the two horizontal oscillating arms 3a, 43b are fixed by the yoke The single early bodies 41A, 41B are symmetrically synchronized with the horizontal oscillating motion between the retracted position 'as shown in Fig. 12 and Fig. 13 and the closed action position as shown in Fig. 14. The retreat position is used to lock the transfer support 2 to the Kakun transfer mechanism 17. The movement of the card is accompanied by the card transfer path 牿尤士 & aL ,,. Both sides of the left and right open and retreat. The closing position U caps 41A, 41B are adjacent to each other in the direction of the cutting path and are moved to the cleaning card E 6 substrate opening/closing portion 6a at a predetermined position on the lifting conveyor 15. Close it. The second embodiment is characterized in that the position of the vertical fulcrums 42a, 42b which are the centers of rotation of the horizontal oscillating arms 43a, 43b is the vertical fulcrum 253 which becomes the center of rotation of the horizontal oscillating arms 26a' 26b in the i-th embodiment. , the position of the move, but also close to the left and right sides of the card IE transfer path, and close to the front (cutting the load to support the movement of the money in and out of the moving direction), thereby making it possible to form the upper two levels of the early body 41A'41B Further, the expansion of the vertical plate portion of the plate portion can be reduced, and the substrate position detecting device 3 can be fixed to the inner side of the inner end portion of the one-side cover unit 4U. 22 201109259 ' That is, the substrate position detecting device 30' fixed inside the inner end of the one-side cover unit 41A is the two cover units 41A, 41B that are switched to the closing action position, and will be transferred to the lift When the cleaned cassette 6 at a certain position on the transporter 15 is closed by the substrate opening/closing portion 6a, the detector μ tip sensing portion enters the opening portion 6a for the substrate access opening Dβ, and can be stored in the clean state. The peripheral surface of the glass substrate 6 in the 6 is detected, but the self-closing action of the cymbal 41A, 41B is required to be closed, and the position is closed to switch to the retracted position on the left and right sides of the cassette transfer path. When the rainbow substrate position is private, the device 30 is vertically supported, and the rotation track around 4213 is transferred to the outside of the clean cassette 6 at a certain position on the lift conveyor 15, and the substrate position of the j is fixed. The device 30 series and the clean cassette 6 dry # break the two cover units 4 which are switched to the retracted position on the left and right sides of the cassette loading path, and the whole is outside the cassette transfer path, and the diameter is approximately parallel. With the card E transfer path then 'when reference 15 to 17 in the example of the embodiment, in the present embodiment, the β U 3rd j T net card 6 is oriented toward the 1 A SI % - of the Kali transport device "walking path 3, However, in the direction of the opening/closing portion 63 of the substrate, which is not opened in the first drawing, that is, in the direction of the substrate 2A, 2B in the above-described embodiment, it is stored and fixed. 'When the lifting and transporting wheel of the Kay transfer mechanism 17 is stuck on the transfer seat U 15
之卡匣收納艙7,搬出潔 ’、尸體2A，2B 一定位置m山、卡 载到升降運輸器15上 之太a ^口部6a#以位於移動方 之方向，潔淨卡匿6移動到升降運輸器15上方向心 述潔淨卡匣6 i丨丨、查此政 所以，當前 卞E 6到4升降運輸器15上 疋仅罝時，在關閉前 23 201109259 “板出入用開口部6a之位置處’蓋體49係在相對於轉 台16位置被固定之狀態下被配設。 P透過支撐構件50被安裝在被固定於轉台16上 。卡匣移載機構丨7固定滑軌座〗8後端部（與卡匣移載用支 樓座別會進出移動之側相反之側）之蓋體49,係具有能關 、淨卡匣6之基板出入用開口部6a整體之尺寸之1塊板 狀物’在將前述潔淨卡匣6之基板出入用開口部h加以關 閉之側上’基板位置檢出裝置3〇係被直接固定。因此，被 卡臣移制支#座20支撐而被搬送到升降運輸^丨5側之 潔淨卡H 6，當到遠★女44- 1 r 連。玄升降運輸益1 5上一定位置時，蓋體 49係將該潔淨卡g a > | , 卞E 6之基板出入用開口部6a加以關閉， 同寺I板位置檢出裝置30之各偵知器32，係進入到潔 淨卡匠6内之各段基板收納搶内，成為能將該基板收納艙 内被支撐之玻璃基板10周邊部板面加以檢出之狀態。 而且’在上述各實施例中，基板位置檢出裝置30之偵 知器32，雖狄有佬用^ ，，、吏用自上下方向與在潔淨卡匣6内各段基 板收納艙内被支撐之玻璃基板1〇周邊部的水平板面相 向，能將該玻璃基& 10之周邊部板面加以檢出之偵知器 32’但是’也可以利用將破璃基板1()周緣之垂直端面加以 檢出之偵知器。在此情形下’當蓋體22,40,49將潔淨卡£ 6之基板出入用開口部6 ‘ 加以關閉時’基板位置檢出裝置 3(Μ貞知器之尖端感知部，係無須進入到與潔淨卡ε6内玻 璃基板10之周邊部板面相重疊之位置，藉由偵知器之能 力’即使自不進入潔淨卡s 6内之位置，也能取得内部之 201109259 玻璃基板l 〇之收納位置資訊。 而且’在第1實施例或帛2實施例中，ϋ由卡匣移載 機構17之卡匣移載用支撐座2〇，使潔淨卡匡6拉入至少 許超過升降運輪器15上—定位置之退入極限位置，之後， 當藉由切移載用支樓座2〇之前進移動，使潔淨卡£ “多 動到原來之一定位置，基板出入用開口部&能在位於移動 方向前端之方向下移動時，在將潔淨卡£ 6拉入前述退入 極限位置後之狀態下，使蓋體22,4〇關閉動作到關閉作用 位置為止，之後，藉由使前述退入極限位置上之潔淨卡匿 6回到-定位置，相對於在關閉作用位置待機之蓋體 22,40,接近移動之潔淨卡…板出入用開口部μ，係 被該蓋體22,40所關閉。 當使用上述構成時’在蓋體22,4〇關閉時，該蓋體 心〇或被安裝於該蓋體22,4〇之基板位置檢出裝置⑽之 構成，係能很容易不與潔淨卡E 6相干涉，又，即使不使 檢出裝置3。相對於蓋體22 4〇移動結果，能相 谷易地使基板位置檢出裝置3〇偵知器Μ之尖端感知 邛，進入潔淨卡匣6内之必要深度。 【產業上可利用性】 本發明之卡匣搬送裝置，係 ^ φ as 舌用作為將收納被使用 於電視顯示器之玻璃基板之潔潘 Φ田认 潔淨卡匿，自保管用架體取 出，用於使前述潔淨卡匣往基板搬 ^ m X u 作業部搬送之卡匣搬 L裝置’則述基板搬出作業部， 係用於將玻璃基板往處理 25 201109259 裝置送入， 玻璃基板之 尤，、犯活用作為在搬送中，能取得潔淨卡匣内 收納位置資訊之卡匣搬送裝置。 L圃式間皁說明】 第1圖〜第11圖係表示本發明第i實施例之圖面。 第1圖之A係表示利用卡昆搬送裝置之設備重要部位 之俯視圖；B係表示卡匿搬送裝置整體概略之側視圖。 第2圖係表示上述卡£搬送裝置中之升降運輸器上之 構成之橫剖面圖。 圓係表示上述升降運輸器上之構成之側視圖，其 省略前側之蓋體。 〃 ，第4圖係表示上述升降運輸器上之蓋體成打開狀態之 正視圖。 第5圖之A及B係表示使基板位置檢出裝置相對於蓋 體刚後移動之機構實例之俯視圆。 第6圖係表示上述卡£搬送裝置自單側架體取出卡昆 時之狀態之橫剖面圖。 第7圖係表示上述卡匣搬送裝置係以蓋體將自單側架 體取出之卡H之基板出人用開口部加以關閉之狀態之俯視 第8圖係第6圖之局部剖開側視圖。 第9圖係第7圖之側視圖。 第1〇圖之Α係表示卡匣被移載到升降運輪器上—定位 置上之狀態之放大局部橫剖面圖；β係在關閉蓋體之狀態 26 201109259 下之重要部位橫剖面圖。 要部位之 第11圖係將第9圖之狀態自相反側觀得之重 放大局部縱剖面圖。 第12圖〜第14圖係表示本發明第2實施例之圖面。 圖。第12圖係卡g移載用支撑座接受卡&之狀態之俯視The card storage compartment 7, moving out of the ', the body 2A, 2B a certain position m mountain, the card is carried to the lift conveyor 15 too a ^ mouth part 6a # in the direction of the moving side, clean card 6 moves to the lift In the direction of the transporter 15, the clean card 6i丨丨 is checked, and the current 卞E 6 to 4 lift transporter 15 is only 罝, before closing 23 201109259 "The position of the board entry and exit opening 6a" The cover body 49 is disposed in a state of being fixed with respect to the position of the turntable 16. The P transmission support member 50 is attached to the turntable 16. The cassette transfer mechanism 丨7 fixes the slide rail seat 8 The lid body 49 of the end portion (the side opposite to the side on which the card holder transfer holder is moved in and out of the side) is provided with a board having the size of the entire substrate opening/receiving opening portion 6a that can be closed and cleaned. The substrate 'the substrate position detecting device 3 is directly fixed on the side where the substrate opening/closing opening h of the clean cassette 6 is closed. Therefore, it is supported by the Kachen shifting support #20 and transported. To the clean transport H丨5 side of the clean card H 6, when to far ★ female 44- 1 r even. Xuan lift transport benefits 1 5 When the position is fixed, the cover 49 closes the substrate entry/exit opening portion 6a of the clean card ga > |, 卞E 6 , and the detectors 32 of the same I board position detecting device 30 enter the clean room. Each of the substrates in the card maker 6 is stored in a state in which the peripheral surface of the glass substrate 10 supported in the substrate storage compartment can be detected. Further, in the above embodiments, the substrate position detecting device The Detector 32 of the 30 is capable of facing the horizontal plate surface of the peripheral portion of the glass substrate 1 supported by the substrate storage compartment in the clean cassette 6 in the up-and-down direction, and can The detector 32' for detecting the peripheral surface of the glass base & 10 can be used as a detector for detecting the vertical end surface of the peripheral edge of the glass substrate 1 (in this case). When the cover 22, 40, 49 closes the substrate opening/closing portion 6' of the clean card, the substrate position detecting device 3 (the tip sensing portion of the device does not need to enter the clean card ε6) The position at which the peripheral surface of the glass substrate 10 overlaps, by the ability of the detector The position of the internal 201109259 glass substrate l can be obtained from the position in the clean card s 6. Moreover, in the first embodiment or the second embodiment, the card of the cassette transfer mechanism 17 is obtained.匣The transfer support 2〇 is pulled so that the clean cassette 6 is pulled slightly beyond the retraction limit position of the lifter 15 and then moved forward by cutting the carrier Move, so that the cleaning card is "moved to a certain position, the substrate opening/closing portion & can move in the direction of the front end in the moving direction, and after the cleaning card 6 is pulled into the aforementioned retracting limit position Then, the lids 22, 4 are closed until the closing position is actuated, and then the cover 22 that is in standby at the closing position is returned to the -position position by the clean-up 6 at the retracted limit position. 40, the cleaning card close to the movement... The opening/closing portion μ for the board is closed by the lids 22, 40. When the above-described configuration is used, when the lid body 22, 4 is closed, the lid body is placed or attached to the lid body 22, and the substrate position detecting device (10) is configured to be easily removed from the clean card. The E 6 phase interferes, and again, the detection device 3 is not made. As a result of the movement of the cover 22, the edge of the substrate position detecting device 3 can be easily sensed to enter the necessary depth in the clean cassette 6. [Industrial Applicability] The cassette transporting device of the present invention is used as a φ as tongue for cleaning and clogging a sanitary glass that is stored in a glass substrate for use in a television display, and is taken out from the storage frame. The substrate carrying operation unit for transferring the clean cassette to the substrate transport unit is used to feed the glass substrate to the processing unit 25 201109259, and the glass substrate is particularly The smuggling device is a card transport device that can obtain information on the storage position in the clean cassette during the transfer. Description of the L-type soap The first to the eleventh drawings show the drawings of the i-th embodiment of the present invention. In the first drawing, A is a plan view showing an important part of the device using the card-carrying device, and B is a side view showing the overall outline of the card-carrying device. Fig. 2 is a cross-sectional view showing the configuration of the elevating transporter in the above-described card transporting apparatus. The circle system shows a side view of the above-described structure of the lift conveyor, and the front side cover is omitted. 〃 , Fig. 4 is a front view showing the lid body on the above-mentioned lift conveyor in an open state. A and B of Fig. 5 show a plan view circle of an example of a mechanism for moving the substrate position detecting device to the rear of the cover. Fig. 6 is a cross-sectional view showing a state in which the above-described card transporting device is taken out from the one-side frame body. Fig. 7 is a partially cutaway side view showing a state in which the above-described cassette transporting device is in a state in which the lid of the card H taken out from the one-side frame is closed by the lid body. . Figure 9 is a side view of Figure 7. The 〇 of the first figure shows the enlarged cross-sectional view of the state in which the cassette is transferred to the elevator wheel--positioned state; the cross-sectional view of the important part of the β-system in the state of closing the cover 26 201109259. The eleventh figure of the desired portion is a magnified partial longitudinal sectional view of the state of Fig. 9 from the opposite side. 12 to 14 are views showing a second embodiment of the present invention. Figure. Figure 12 is a view of the state in which the card g transfer support accepts the card &
第13圖係表示蓋體打開狀‘態之重要部位之局部 面圖。 K 货 Ί 圖係表示以蓋體將被移載到升降運輸器上之卡 匠之基板出入用開口部加以關閉之狀態之重要部 在il而固_ °' ίκ 第15圖〜第丨7圖係表示本發明第3實施例之圖面。 第1 5圖係卡匣移載用支撐座接受卡匣之狀態之俯視 第16圖係卡匣移載用支撐座將卡匣拉入升降運輪器 上之狀態之重要部位側視圖。 ° 第17圖係表示藉由卡匣移載用支撐座，卡匣被 升降運於戰到 ’J抑上之一定位置後之狀態之重要部位局部縱 隱1。 y **· 【主要元件符號說明】 1〜卡匿搬送裝置； 2A，2B〜架體； 3〜仃走通路； 6〜潔淨卡匣； 6a〜基板出入用開口部； 27 201109259 6b~風扇.過濾器•單元（FFU); 7〜卡匣收納艙； 9〜基板搬入作業部· 8〜基板搬出作業部； 10〜玻璃基板； 11〜處理裝置； 12〜基板取出用機器人裝置； 13~•基板收納用機器人裝置； 15~升降運輸器； 16〜轉台（卡匣移載用支撐座之支撐部）； 17〜卡匣移載機構； 21〜卡匣支撐件； • 20〜卡E移載用支撐座； 22, 40, 49〜蓋體； 23八，233,41人，418~蓋單體； 23a，41a〜垂直板部； 23b, 23c，41b，41c〜上下兩水平板部· 24, 44〜驅動機構； 26a, 26b’38, 43a, 43b〜水平擺動臂· 29，36,39，48~馬達； 31〜垂直支柱構件； 33〜滑動導軌； 30〜基板位置檢出裝置； 3 2、偵知器； 〜螺桿。 28Fig. 13 is a partial plan view showing an important portion of the state in which the lid is opened. K Ί 表示 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要 重要The figure shows the drawing of the third embodiment of the present invention. Fig. 15 is a plan view showing a state in which the card holder transfer holder receives the cassette. Fig. 16 is a side view showing an important part of the state in which the cassette transfer support holder pulls the cassette into the lift wheel. ° Fig. 17 shows a portion of the important portion of the state in which the cassette is lifted and lowered to a certain position after the battle to the position where the card is moved by the cassette. y **· [Main component symbol description] 1 ~ card hiding device; 2A, 2B ~ frame; 3 ~ 仃 walking path; 6 ~ clean card 匣; 6a ~ substrate access opening; 27 201109259 6b ~ fan. Filter unit (FFU); 7~ cassette storage compartment; 9~ substrate loading operation unit 8~ substrate removal operation unit; 10~ glass substrate; 11~ processing device; 12~ substrate removal robot device; 13~• Robot for substrate storage; 15~lifting conveyor; 16~turning table (supporting part for cassette loading support); 17~ cassette transfer mechanism; 21~ cassette support; • 20~ card E transfer Supporting seat; 22, 40, 49~ cover; 23 eight, 233, 41, 418~ cover unit; 23a, 41a~ vertical plate; 23b, 23c, 41b, 41c~ upper and lower horizontal plate · 24 , 44 ~ drive mechanism; 26a, 26b'38, 43a, 43b ~ horizontal swing arm · 29, 36, 39, 48 ~ motor; 31 ~ vertical strut member; 33 ~ sliding guide; 30 ~ substrate position detection device; 2, the detective; ~ screw. 28