201100690 六、發明說明： 【發明所屬之技術領域】 [0001] 本發明涉及一種使多種氣體切換流通的供氣單元。 【先前技術】 [0002] 以往，用於半導體製造工序等中的供氣單元如專利文獻1 中所述。參照附第十一圖至十三對專利文獻1所述的供氣 單元進行說明。第十一圖是供氣單元的平面圖，第十二 圖是第十一圖中12-12線的剖面圖，第十三圖是第十一圖 中13-13線的剖面圖。 ❹ [0003] 在上述專利文獻1所示的供氣單元311中，在載氣輸入埠 321s和載氣輸出埠321e之間形成有1條載氣流路321，各 閥塊320A〜320D形成有連通處理氣體輸入埠322s和載氣 流路321的處理氣體流路322。 [0004] 各閥塊320A〜320D中，通過啟閉閥350在塊體335内對處 理氣體流路322和載氣流路卩21執行通斷操&。塊體335 的内部形成有倒“V”字型的:塊狀流路331，與閥室324連 〇 通的處理氣體流路322通過1閥讀^325與流路331連通。在 基塊340中形成有“V”字型的塊狀流路332並且各塊狀流 路332之間設置有間隔，閥塊320A〜320D的各塊狀流路 331與基塊340的塊狀流路332呈直列式而構成1條載氣流 路 321。 [〇〇〇5] 專利文獻1 :國際公開第2004/036099號 [0006] 但是，專利文獻1中，在與設有啟閉閥350的侧面部335a 垂直的側面部335c設有處理氣體輸入埠322s，因此，需 099121344 表單編號A0101 第3頁/共37頁 0992037596-0 201100690 要在閥塊320A〜320D的侧面確保配設處理氣體埠322s所 需的空間。在此，可以考慮將處理氣體流路322延伸至與 上述側面部335a平行的侧面部335b後使其開口，但是， 這種情況下會出現載氣流路321和處理氣體流路322A (用 雙點劃線表示）發生干擾的問題。因此，很難縮小閥塊 320A〜320D的寬度（第十三圖中左右方向的長度）或者 並行排列供氣單元311使其高度集成化。 [0007] 此外，專利文獻1中，各閥塊32〇A〜320D的塊狀流路331 與基塊340的塊狀流路332分別形成“V”字型並連接。但 是’以這種 V”字型加工形成較長的細流路並不容易。 【發明内容】 [0008] [0009] [0010] 本發明是鑒於以上問題而提出的，主要目的在於提供一 種能夠縮小設有多個啟閉閥的塊的寬度且易於製造的供 氣單元。 為了解決上述問題，採用以下方式。 本發明第一方面提供一種供象單元，其包括内部設有流 路的流路塊’所述流路包括主流路和多個分別與所述主 流路連通的副流路，對每一所述副流路設有啟閉闕，所 述啟閉閥阻斷或連通所對應的所述副流路和所述主流路 ，其特徵在於，所述流路塊形成為呈長條狀延伸的長方 體，包括閥搭載面和副流路開口面，並且所述閥搭載面 和所述副流路開口面是位於相反兩侧的面，所述闕搭載 面搭載有所述啟閉閥，所述副流路的開口設置於所述副 流路開口面，所述啟閉閥沿所述閥搭載面的長度方向呈 直列式排列，所述啟閉閥的各閥室設於所述閥搭載面’ 099121344 表單編號A0101 第4頁/共37頁 0992037596-0 201100690 所述副流路連通所述閥室的大致中央部分姐向背離所述 閥搭載面的方向延伸，所述副流路在所述副流路開口面 形成開口’所述主流路連接相鄰的所述啟閉閭的所述闕 室並包括側面流路，所述侧面流路設於所述流路塊中從 寬度方向夹持所述閥搭載面的兩側面的至少一個侧面’ 所述側面流路由沿著所述閥搭載面的長度方向延伸的槽 部和覆蓋所述槽部的槽開口的蓋部件構成。 [0011] ❹ 根據上述結構，副流路在所述流路塊的與所述閥搭載面 相反一側的副流路開口面形成開口，因此，無需在從寬 ... ... ... 度方向夾持搭載有啟蘭閥（閥室）的閥搭載面的兩側面 設置處理氣體的輸入埠。因此，能夠縮小設有多個啟閉 閥的流路塊的寬度。 [0012] 此外’在所述流路塊中，主流路包括設於從寬度方向夾 持所述閥搭載面的兩側面中的至少一個侧面並且沿所述 閥搭載面的長度方向延伸的側面流路，因此，能夠縮短 主流路中除側面流路以外的部分的長度。這裏，側面流 W ·» ,· I·· Τί. , Ο 路由沿所述閥搭戴面的長度方而延伸的槽部和覆蓋所述 槽部的槽開口的蓋部件構成，因此，即使侧面流路為細 長的流路也易於形成。因此，流路塊中易於形成主流路 ，進而易於製造供氣單元。此外，能將流路塊内部至流 路塊侧面（表面）的部分用作侧面流路，因此能在流路 塊内有效地配置流路。從而能夠縮小設有多個啟閉閥的 流路塊的寬度。 [0013] 099121344 本發明第二方面在於，在所述流路塊中’所述侧面流路 沿所述閥搭載面的長度方向交替地設於從寬度方向失持 〇992037596-〇 表單煸號Α0101 第5頁/共37頁 201100690 所述閥搭載面的兩側面中的一個侧面和另一個側面上， 因此，能夠避免關於閥搭載面的長度方向相鄰的側面流 路之間的干擾。因此，能夠延長主流路中易於形成的側 面流路的長度’並能夠進一步縮短除侧面流路以外的部 分的長度。 [0014] 本發明第三方面在於，在所述流路塊中，設於從寬度方 向爽持所述閥搭載面的兩侧面中的一個側面和另一個側 面並且關於所述閥搭載面的長度方向相鄰的所述侧面流 路具有在所述閥搭載面的長度方向上在設有所述閥室的 位置處相互重疊的部分，因此，能夠通過沿閥搭载面的 寬度方向延伸的流路並經由閥室連接這些重疊部分。從 而能夠縮短連接侧面流路和閥室的流路的長度，即，主 流路中除側面流路以外的部分的長度。 [0015] 本發明第四方面在於’所述側面流路只設於所述流路塊 中從寬度方向夾持所述閥搭載面的兩側面中的一個側面 ，所以形成侧面流路時無需將流路塊翻過來加工。從而 月匕夠提if}製造供氣單疋的操作性和加工性。 [0016] 本發明第五方面在於，所述主流路在夾持所述副流路和 所述閥室的連通部的位置處分別與同一個所述閥室連接 ，因此，閥室内流通的載氣（吹掃氣體）易於通過副流 路和閥室的連通部。即，從上游側的主流路流入閥室的 載氣易於通過副流路和閥室的連通部向下游側的主流路 呈直線式流通。因此，易於通超載氣運送從副流路向閥 室流通的處理氣體，並且，當處理氣體被阻斷時，能夠 通過吹掃氣體快速排出閥室内的處理氣體。 099121344 表單編號 A0101 第 6 頁/共 37 頁 0992037596-0 201100690 [0017] 如上所述’根據本發明的供氣單元，無需在從寬度方向 夾持設有啟閉閥（閥室）的閥搭載面的兩侧面設置處理 氣體的輸人槔，所以，如本發明第六方面㈣，具備多 個由本發明第-至第五任—方面所述的供氣單元，所述 供氣單元並行制使得錢度方向鱗所㈣搭載面的 兩側面相互抵接，由此，能夠縮小各供氣單元的寬度， 並能省略供氣單元之間的間I其結果，能使供氣裝置 實現高度集成化。 〇 [_本發明第七方面在於，在本伽第-至第五任-方面中 ’在所述流路塊中’從寬度方向夾持所述閥搭載面的兩 侧面中設有所述侧面流路的部分設置有加熱器，因此， 月b使侧面流路和加熱器靠近。因此，能料有效地對流通 於側面流路的氣體進行加熱。 [0019]本發明第八方面在於，具備多個由本發明第一至第五任 一方面所述的供氣單元’所述供氣單元並行排列使得從 寬度方向夾持所述閥#載面的兩侧面相互抵接，且加熱 〇 器被夾持在所述相鄰的供氣單元的所述側面之間，因此 ，能夠通過一個加熱器對相鄰的兩個供氣單元進行加熱 。此外，即使如本發明第二方面那樣，所述側面流路沿 著所述閥搭載面的長度方向交替地設於所述流路塊中從 寬度方向夾持所述閥搭載面的兩側面中的一個側面和另 一個側面上的情況下，由於對二個侧面均設置加熱器， 因此，也能夠有效地對流通於側面流路的氣體加熱。 【實施方式】 [0020] (第一實施方式） 099121344 表單編號A0101 第7頁/共37頁 0992037596-0 201100690 [0021] 以下，參照附圖對具體體現本發明的第一實施方式進行 說明。 [0022] 如第一圖所示’供氣裝置1〇包括多個相同結構的供氣單 元11。這些供氣單元n相互固定作為一個整體被一體 化。 [0023] 供氣單元丨丨包括形成為呈長條狀延伸的長方體的流路塊 20、及多個啟閉閥5〇 ( 5〇A) ^流路塊2〇的頂面2〇a (閥 搭載面）搭載有啟閉閥50。啟閉閥5〇沿頂面2〇3的長度方 向呈直列式排列。啟閉闕50大致呈圓柱狀。流路塊20的 頂面2 0 a的寬度與啟閉閥5 0的呈圓形的讀面的直徑基本相 等。此外’啟閉閥50處於流路塊20的項面20a的寬度範圍 之内即可’並不限於大致圓柱狀的形狀：，還可採用四方 柱狀等任意的形狀。 [0024] 在流路塊20的頂面2〇a的寬度方向上（與長度方向垂直相 交的方向），多個供良單元11的側面2〇c相互抵接《即， 多個供氣單元11並行排列使得在流4塊20中從寬度方向 夾持頂面20a的兩侧面20c相互抵接。因此，在疊加供氣 單元11的方向上，即，在流路塊20的頂面20a的寬度方向 上，各流路塊20之間沒有形成間隙。 [0025] 流路塊20的頂面20a的長度方向的一端部設有載氣（吹掃 氣體）的輸出埠29。設於與該輸出埠29相反一側的端部 的啟閉閥50A用於改變載氣的流通狀態，其他的啟閉閥50 改變各處理氣體的流通狀態。 [0026] 下面，同時參照第二圖、第三圖’以一個供氣單元11的 099121344 表單編號A0101 0992037596-0 201100690 [0027] Ο [0028] Ο [0029] [0030] 結構為代表對其進行說明。第二圖是第一圖中2-2線的剖 面圖，第三圖是第一圖中3-3線的剖面圖，圖中省略了閉 閥50。 流路塊20的内部設有整體上沿流路塊20的長度方向（了貝 面20a的長度方向）延伸的載氣流路21 (主流路）。載氣 流路21的下游側的端部連接有載氣的輸出埠29。在流路 塊20中，載氣流路21包括分別設於從寬度方向夾持頂面 20a的兩側面20c的侧面流路25。側面流路25沿頂面20a 的長度方向交替地設於該兩侧面20中的一個側面20c和另 一側面20c上。即，在流路塊20中，側面流路25沿頂面 20a的長度方向設置成鋸齒形。 流路塊2 0的内部設有多個分別與載氣流路;2:1連通的處理 氣體流路22 (副流路）。處理氣體流路22 (22A)在流路 塊20的底面20b (副流路開口面）形成開口。處理氣體流 路22在底面20b的寬度方向（第三圖的左右方向）的中央 形成開口。即，處理氣體流路22的開口部在流路塊2〇的 寬度方向上均等地設置。處瑾氣體流路22相對於頂面2〇a 及底面20b垂直地設置》 在流路塊20的底面20b，對每—處理氣體流路22設有呈長 條狀延伸的大致長方體的連接部件4〇。連接部件4〇通過 螺栓44固定於流路塊20。連接部件40的長度方向及寬度 方向分別與流路塊20的長度方向和寬度方向一致。連接 部件40的寬度被設定為與流路塊2〇的寬度相等。 連接部件40設有從其底面貫通頂面的直線形的導入流路 099121344 表單編號A0101 第9頁/共37頁 0992037596-0 201100690 42 (42A)。導入流路42設於連接部件4〇的長度方向的 中央，並設於連接部件4〇的寬度方向的中央。並且，各 導入流路42與流路塊2〇的各處理氣體流路22連接。即， 各導入流路42設於各處理氣體流路22的延長線上。該導 入流路42及處理氣體流路22的連接部通過密封墊密封。 導入流路42上游側的端部（連接部件4〇的底面）設有輸 入埠42s作為連接部件4〇的突出部❶導入流路42的輸入埠 42s與供應處理氣體的配管連接。此外，與啟閉閥5〇連接 的導入流路42A (實際為載氣流路）的輸入埠42s連接有 供應載氣（吹掃氣體）的配管。 [0031] 在流路塊中，上述側面流路25設於遠離底面20b的位置 處以避免與固定連接部件40的螺检44發生干擾。換言之 ，在流路塊20中側面流路25設於閥室24的附近。在流路 塊20中所有的側面流路25設置在距底面20b (頂面20a) 相等距離的位置上。 [0032] 在流路塊2〇的頂面20a ’沿瀹路塊20的長度方向（頂面 20a的長度方向）以預定間隔設有上述啟閉閥5〇的閥室24 。並且，上述各處理氣體流路22與各閥室24連通。即， 對每一處理氣體流路2 2設置有啟閉闊5 0。此外，相鄰的 啟閉閥50的閥室24通過上述載氣流路21連接。因此，各 處理氣體流路22通過各閥室24與載氣流路21連接。 [〇〇33] 閥室24設於流路塊20的寬度方向（流路塊20的頂面20a 的寬度方向）的中央。閥室24形成為大致圓形的凹部。 在且，與流路塊20的寬度方向的總長度大致一致地設置 閥室24，以縮小流路塊20的寬度。換言之，流路塊20的 nqqi„n44 表單編號 A010I 第 10 頁/共 37 頁 0992037596-0 201100690 [0034] Ο [0035] Ο [0036] 寬度被設為與閥室24的直徑大致相等或稍大。閥室24的 中央設有閥座24a ’該閥座24a與啟閉閥50的閥體51抵接 或脫離。閥座24a形成為大致圓環狀的突部。 如上所述，側面流路25沿頂面20a的長度方向交替地設於 流路塊2 0的兩侧面2 0 c中的一個侧面2 0 c和另一側面2 0 c 上。因此，在上游侧的載氣流路21和下游側的載氣流路 21連接同一閥室24的部分，能夠避免相鄰的側面流路25 彼此發生干擾。換言之，在上游側的侧面流路25和下游 侧的側面流路25僅設於一锻侧面20c的情況下，為使這些 側面流路2 5彼此不產星干擾，需要縮短側面流路25的長 度或使頂面20a到各側面流路25的距離不同。 閥室24的中央即由閥座24a包圍的部分連通有上述處理氣 體流路22 »處理氣體流路22向背離流路塊20的頂面20a 的方向延伸。處理氣韹流路22形成為直線狀，且具有圓 形的截面。在各處理氣體流路22中，與各閥室24連接的 連接部的附近比其他部分細，.即，與各闕室24連接的連 接部的附近的流路截面積比其他部分的流路截面積小。 因此’可通過減小閥座24a的直徑來縮小流路塊2〇的寬度 〇 啟閉閥50是電磁驅動式閥，通過對線圈52進行通電控制 來往復驅動閥體51。並且，通過使閥體51抵接和脫離設 於閥室24的閥座24a ’可以阻斷或連通上述處理氣體流路 22和閥室24。此外’啟閉閥50不限於電磁驅動式閥，還 可採用氣動式閥或壓電元件驅動式閥等任意形式的閥。 099121344 表單編號A0101 第U頁/共37頁 0992037596-0 201100690 [0037] 下面’參照第三圖、第四圖對載氣流路21的結構進行詳 細說明。第四圖是第三圖中4 - 4線的剖面圖，僅代表性地 對其中一部分進行了圖示。 [0038] 載氣流路21由上述侧面流路25和連接流路27構成。與側 面流路25相比，連接流路27非常短。 [0039] 如上所述，在流路塊20中，侧面流路25分別設於從寬度 方向夾持頂面20a的兩侧面20c、即垂直於頂面2〇a的側 面2 0 c。側面流路2 5由沿著流路塊2 0的長度方向延伸的槽 部25a和覆蓋槽部25a的槽闕0的蓋部件25構成。槽部 2 5 a是通過切削側面2 0 c的表面而形成的，其具有預定的 寬度及深度。蓋部件25b沿槽部25a延伸，通過焊接等方 式固定於流路塊2 0以使側面流路2 5中流通的氣體不會發 生洩漏。蓋部件25b的表面與流路塊20的侧面20c的表面 一致。因此，兩側面20c整體上形成為平面。因此，在並 行排列多個流路塊20使得侧面20c相互抵接的情況下，能 夠防止這些流路塊20之間私成間隱。 [0040] 對槽部25a進行設置使其不干擾處理氣體流路22，並且， 閥室24與槽部25a關於流路塊20的寬度方向形成有重叠部 分。並且，對槽部25a進行設置使得閥室24和槽部25a關 於流路塊20的長度方向（頂面20a的長度方向）形成有重 疊部分。並且，設於流路塊20的兩側面20c中的一個側面 20c和另一側面20c並且關於流路塊20的長度方向相鄰的 侧面流路25在流路塊20的長度方向上在設有閥室24的位 置處具有彼此重疊的重疊部分25d。因此，能夠通過沿流 路塊20的寬度方向（頂面20a的寬度方向）延伸的連接流 099121344 表單編號A0101 第12頁/共37頁 0992037596-0 201100690 路27並經由閥奮24將二個重疊部分25d連接。具體地，槽 部25a和閥室24通過垂直於頂面2〇a的連接流路27相互連 接°連接流路27具有大致圓形的截面，且被形成為具有 一定的直徑。 [0041] Ο 與同一閥室24連接的二個連接流路27、即上游側的載氣 流路21及下游侧的載氣流路2丨分別在夾持處理氣體流路 22和閥室24的連通部的位置處與闊室24連接。換言之， 上游側的連接流路27和閥室24的連通部、處理氣體流路 22和間室24的連通部、及下游側的連接流路27和閥室24 的連通部排列在直線丰^因此，從處理氣體流路22向閥 室24流通的處理氣體易於通超載氣進行輸送，該載氣從 上游侧的連接流路27流到閥室24並從閥室24向下游侧的 連接流路27流出。此外’在處理氣體被啟閉閥5〇隔斷的 情況下，從上游側的連接流路27向閥室24流通的載氣在 閥座24a的周圍流通並從閥室24向下游側的連接流路27流 出。因此，能夠防止處理殘留於氣體閥室24内。 Ο [0042] 在上述結構的供氣單元11+，多値處理氣體流路22中的 處理氣體流路22A被㈣載氣（吹掃氣體）的流路，該處 理氣體流㈣A設於供氣單切的長度方向上與載氣的輸 出淳29相反-㈣端部。並且，通過該處理氣體流路22A 所對應的啟關使載氣_和錢。對其他處理氣體 抓路22供給各處理氣體’並通過各自對應的關閥5〇使 各處理氣體_或連通。此外，通過並行_的供氣單 疋11構成供氣裝置1G，輯氣及處理氣體的流通狀態進 行整艘㈣。此外，還可以構成為：在載氣流路21中不 099121344 表單編號A0101 第13頁/共37頁 0992037596-0 201100690 流通載氣，而將其作為處理氣體及吹掃氣體的流路。 [0043] 以上詳述的本實施方式具有以下優點。 [0044] 在流路塊20中，處理氣體流路22在與頂面20a相反一側的 底面20b形成開口，其中，頂面20a搭載有啟閉閥50 (閥 室24)。因此，無需在垂直於頂面20a的側面20c設置處 理氣體的輸入埠。因此，能夠縮小設有多個啟閉閥50的 流路塊20的寬度。 [0045] 此外，在流路塊20中，載氣流路21包括側面流路25，側 面流路25設於從寬度方向夾持氣面20a的兩側面20c的至 少一個側面並且沿流路塊2 0 _長度方向（項面20a的長度 方向）延伸。因此，能夠縮短:載|流路21中除側面流路 25以外的部分即連接流路27的長度。這裏，側面流路25 由沿流路塊20的長度方向延伸的槽部25a和覆蓋槽部25a 的開口的蓋部件25b構成，因此，即使侧面流路25a是細 長的流路也易於形成。因此，易於在流路塊20中形成載 氣流路21，進而能夠易於製造供氣單元π。並且，能將 流路塊20的内部至流路塊的側面20c (表面）的部分用作 侧面流路25，所以能夠在流路塊20内有效地設置流路。 其結果，能夠縮小流路塊20的寬度。 [0046] 在流路塊20中，側面流路25沿流路塊20的長度方向交替 地設於從寬度方向夾持頂面20a的兩侧面20c中的一個側 面20c和另一側面20c上，因此能夠防止關於流路塊20的 長度方向相鄰的側面流路25之間相互干擾。從而，能夠 將載氣流路21中容易形成的部分即側面流路25設定為較 099121344 表單編號A0101 第14頁/共37頁 0992037596-0 201100690 [0047] Ο [0048] Ο [0049] 099121344 長的的長度，並將侧面流路2 5以外的部分即連接流路2 7 設定為較短的長度。 關於流路塊20的長度方向相鄰的側面流路25具有在流路 塊20的長度方向上設有閥室24的位置處彼此疊合的重疊 部分25d，因此能夠通過沿流路塊2〇的寬度方向（頂面 20a的寬度方向）延伸的流路並經由閥室24連接這些重疊 部分25d。因此，能夠縮短連接側面流路25和閥室24的連 接流路27的長度，即，載氣流路21中除側面流路25以外 部分的長度。 上游侧及下游側的載氣流路2 1在夾持處理氣體流路2 2和 閥室24的連通部的位置處分別與同一間室24相連接，因 此，閥室24内流通的載氣容易經過處理氣體流路22和閥 室24的連通部。即，從上游側的載氣流路以流入閥室以 的載氣·易於經由處理氣體流路22和閥室24的連通部向下 游側的載氣流路21呈直線式流通。因此，易於通超載氣 輸送從處理氣體流路22流入閥室24的處理氣體，並且’ 在處理氣想被阻隔時，能夠迅速;排出閥室Η内的處理氣 體。 本實施方式的供氣單元^巾，無需在與搭载有啟閉闕 ㈤室24)的頂面2〇a垂直的側面2〇c設置處理氣體的輸 入埠。此外，供氣裝置1〇包括多個供氣單元U，且供氣 單元11並行排列使得從寬度方向夾持頂面20a的兩側面 心相互抵接。因此，能夠縮小各供氣單元11的寬度，並 能夠省略供氣單元間I其、料，能夠使供氣 裝置10實現高度集成化。 表單編號A0101 第15頁/共37頁 0992037596-0 201100690 [0050] (第二實施方式） [0051] 以下，參照附圖對具體體現本發明的第二實施方式進行 說明，其中主要說明其與第一實施方式的不同點。第二 實施方式中，如第五圖所示，只在流路塊120的兩側面 120c中的一個側面120c設有側面流路125，這一點與第 一實施方式不同。此外，對與第一實施方式相同的部件 使用相同的符號標記，並省略其說明。 [0052] 供氣單元111包括形成為呈長條狀延伸的長方體的流路塊 120、多個輔助流路塊6〇、及多個啟閉闕50 ( 50A)。各 啟閉閥50通過各辅助流路塊6〇搭載於流路塊120的頂面。 輔助流路塊6 0及啟閉閥5 0沿流路塊12 0的頂面的長度方向 (流路塊120的長度方向）呈直歹〗式排列。 [0053] 輔助流路塊60形成為呈長條狀延伸的大致長方體。輔助 流路塊60固定於流路塊120的頂面。輔助流路塊60的長度 方向及寬度方向分別與流路塊120的長度方向及寬度方向 一致。輔助流路塊60的寬度被設定為與流路塊120的寬度 相等。上述啟閉閥50分別搭載於各备助流路塊60的頂面 120a (閥搭載面）。在流路塊12〇及辅助流路塊60被看 做流路塊整體時’各輔助流路塊6〇的各頂面120a可被看 做流路塊整體的頂面（閥搭載面）^流路塊整體的長度 方向及寬度方向分別與流路塊120的長度方向和寬度方向 一致。 [0054] 下面，同時參照第六圖，以一個供氣單元Hi的結構為代 表對其進行說明。此外，第六圖是第五圖中6-6線的刳面 099121344 表單編號A0101 第16頁/共37頁 0992037596-0 201100690 [0055] Ο [0056] 流路塊120的内部設有整體上在流路塊120的長度方向上 延伸的載氣流路121 (主流路）。載氣流路121下游側的 端部連接有載氣的輸出埠29。在流路塊120中’載氣流路 121包括側面流路125，僅在從寬度方向夾持頂面的兩側 面120C、即、與流路塊12〇的頂面（輔助流路塊的頂 面I20a)垂直的兩側面i2〇c中的一個侧面120c設有上述 側面流路125。侧面流路125沿流路塊120的長度方向延 伸。 Ο 流路塊120及輔助流路塊60的内部分別設有與載氣流路 121連通的處理氣體流路22及辅助處斑氣體流路62 (副流 路）。處理氣體流路22及輔助處理氣艎流路62呈直列式 連接，其連接部通過密封塾密封處理氣.體流路22的基 本結構與第一實施方式的處理氣體流路22相同’因此這 裏省略說明。辅助處理氣體流路62從輔助流路塊60的底 面朝向頂面呈直線狀延伸。輔助處理氣體流路62設於輔 助流路塊60的長度方向的中央位置，且設於輔助流路塊 60的寬度方向的中央位置。各輔助處理氣體流路62設於 各處理氣體流路22的延長線上。 [0057] 輔助流路塊60的頂面120a設有上述啟閉閥的閥室124。 閥室124的基本結構與第一實施方式的閥室24相同，因此 這裏省略其說明。並且，上述各輔助處理氣體流路62連 通各閥室124。即，對每一輔助處理氣體流路62 (處理氣 體流路22)設有啟閉閥5〇。處理氣體流路22通過輔助處 理氣體流路62連接閥室124。此外，相鄰的啟閉閥50的閥 099121344 表單編號A0101 第17頁/共37頁 0992037596-0 201100690 室124通過上述載氣流路121相互連接。因此，各處理氣 體流路22及輔助處理氣體流路62通過各閥室I24連接載氣 流路121。啟閉間50通過闕體51隔斷和連通輔助處理氣體 流路62 (處理氣體流路22)和閥室124。 [0058]如上所述，載氣流路121包括只設於流路塊120的兩側面 120c中的一個側面120c的側面流路125。侧面流路125沿 流路塊120的長度方向延伸。這裏，在上游側的側面流路 125和下游侧的側面流路125與同一閥室1 24連接的部分 中，將上述側面流路125彼此隔開設置以避免這些側面流 路125相互干擾。並且，這些側面流路125通過設於流路 塊120内部的連接流路127a、127b以及設於輔助流路塊 60内部的輔助連接流路67速接啟閉閥50的閥室124。輔 助連接流路67沿著流路塊120的長度方向並相對於輔助支 路塊60的底面斜向呈直線式延伸。即使在此情况 卜，由 於載氣流路121包括沿流路塊120的長度方向延伸 叩側面 流路125，因此也能夠防止輔助連接流路67的長声掩加 連接流路127b和輔助連接流路67的連接部通過密 — 'Sfc. -ίβ 封 [0059] 連接同一閥室124的二個輔助連接流路67、即I·、& 轉側的載 氣流路121及下游側的載氣流路121分別在夾持輔助處 氣體流路62和閥室124的連通部的位置與閥室124連接 因此，從輔助處理氣體流路62向閥室124流通的處王产 易於通超載氣進行輸送’其中，該載氣從上游匈 ^的輔助 連接流路67流入閥室124並從閥室124向下游侧的輔 接流路67流出。此外，在處理氣體被啟閉閥5〇隔斷時 099121344 表單編號Α0101 第18頁/共37頁 0992037596-0 201100690 [0060] [0061] [0062]Ο [0063] Ο [0064] 能夠防止處理氣體殘留於閥室124内。 下面’同時參照第七圖對侧面流路125及連接流路127a、 127b的結構進行詳細說明。第七圖是第六圖中7-7線的剖 面圖’以一個流路塊120為代表進行說明。 上述載氣流路121由侧面流路125、連接流路127a、127b 、及輔助連接流路67構成。連接流路127a、127b及輔助 連接流路6 7的長度小於侧面流路12 5的長度。 除了下述兩點之外，側面流路125的結構與第一實施方式 的側面流路25基本相同，即：側面流路125只設於流路塊 120的兩側面120c中的一個側面120c ;側面流路125比第 一實施方式的側面流路25短。側面流路125由沿流路塊 120的長度方向延伸的槽部125a、和覆蓋槽部125a的槽 開口的板狀蓋部件125b構成。 在流路塊120的長度方向上’在側面流路125的端部連通 有向流路塊120的寬度方向延伸鉍連接流路127a。連接流 路127a從其與側面流蹲125 (槽部125a)之間的連通部 直線式地延伸到流路塊120的寬度方向的中央。因此，可 在形成側面流路125的槽部125a之後從側面120c的方向 通過鑽孔器等形成連接流路127a。 在流路塊120的寬度方向的中央，連接流路i27a的端部與 上述連接流路127b的端部連通。該連接流路127b從其與 在流路塊120的寬度方向上延伸的連接流路i27a之間的連 通部向輔助流路塊60的方向呈直線式延伸並於流路塊120 的頂面形成開口。因此，可從流路塊120的上面的方向通 099121344 表單編號A0101 第19頁/共37頁 0992037596-0 201100690 過鑽孔器等形成連接流路127b。連接流路127b設置為垂 直於輔助流路塊60的頂面120a (流路塊120的底面120b )。並且’連接流路127b與設於輔助流路塊6〇的上述輔 助連接流路67連接。 [0065] 即使在上述結構的供氣單元111中，也能像第一實施方式 的供氣單元11同樣地對載氣及處理氣體的流通狀態進行 控制。 [0066] 以上詳述的本實施方式具有以下優點。下面，只對其不 同於第一實施方式的優點進行說明。 [0067] 側面流路1 25只設於流路塊1 2〇的兩側面1 2〇c中的一個側 面120c，因此，在形成側面流路丨25時無需將流路塊120 翻過來加工。因此，能夠提高製造供氣單元丨丨丨的操作性 和加工性。 [〇〇68]本發明不限於上述實施方式，例如還可如下實施。 : ； .. ... .：：：. ：：：-- ：： ...·： .· ： [0069]載氣流路1 21的上游側及下游側的端部也可以在流路塊 120的長度方向的端面形成開口。這種情況下，使處理氣 體從處理氣韹流路22A流入，啟閉閥隔斷或連通處理 氣體。此外，在供氣單元Π (111)之外另行設置用於改 變載氣的流通狀態的啟閉閥即可。 [0070] 第一實施方式的供氣單元11中，沿流路塊2〇的長度方向 交替地設於與搭載有啟閉閥5 〇的頂面2 〇 a垂直的二個側面 20c上的側面流路25，也可以不包括在流路塊2〇的長度方 向上在设有閥至24的位置處相互疊合的重疊部分25d。如 第八圖所示，即使疋這種結構，通過在流路塊2〇的寬度 099121344 表單編號A0101 第20頁/共37頁 0992037596-0 201100690 方向上適當地延長連接流路227，也能夠連接側面流路25 和閥室24。 [0071] 也可以如第九圖所示，在側面流路25只設於流路塊20的 兩側面20c中的一個侧面20c的結構中，通過連接流路 227連接側面流路25和閥室24而無需通過輔助流路塊60 [0072] Ο 通過閥室24 ( 124 )連接的載氣流路21 (121)在夾持處 理氣體流路22 (輔助處理氣體流路62)和閥室24 (124 )的連接部的位置處與#1室24 ( 124)連接，但本發明並 不限於這種配置夂也可採用載氣流路21 (121)只在一個 位置與各閥室24 (124)連通的結構。 [0073] Ο 如第十圖所示，也可以採用在與流路塊20的頂面20a垂直 的側面2 0 c中設有侧面流路2 5的部分設置加熱器7 0的結構 。這裏，加熱器70設於二個侧面20c的幾乎整個面上。根 據這種結構，侧面流路25和加熱器7〇靠近，因此能夠有 效地加熱流通於側面流路25的氣體。此外，也可以對應 於側面流路25，在二個側面2;0c上沿著流路塊20的長度方 向交替地設置加熱器70 ’其中，側面流路25沿著流路塊 20的長度方向交替地設於流路塊2〇的二個側面20c上。在 第二實施方式的流路塊1 2 0中，由於侧面流路12 5只設於 一個側面120c ’所以’也可以將加熱器只設於該設有側 面流路12 5的一個側面12 0 c。此外，如第十圖所示，可以 通過將加熱器70形成為沿流路塊2〇的長度方向延伸的薄 片狀或薄膜狀，防止供氣單元11的寬度增大。 099121344 表單編號A0101 第21頁/共37頁 0992037596-0 201100690 [0074] 還可 lv π 乂並仃狄置多個供氣單元u (in)使得流路塊20 ( I20)的兩側面2〇c ( i2〇c)相互抵接，且設置加熱器使 其破失持在相鄰的供氣單元11 (111)的側面20c (120c )之間。根據這種結構，可以通過一個加熱器來加熱相 鄰的兩個供氣單元π (111)。並且，即使如第一實施方 式的供氣單元11那樣’侧面流路25沿流路塊20的長度方 向父替地設於二個側面2〇0上，由於對二個侧面2〇c設置 加熱器，因而也能夠有效地加熱流通於側面流路2 5的氣 體。即，即使是側面流路25設於流路塊20的兩側面20c的 結構，也能通過與侧面流路25只設於一傭侧面20c的結構 相同數量的加熱器來加熱流通於侧面流路25的氣體。 [0075] 第一圖、第五圖中’還可以通過連接多個供氣單元11 ( 111)的輸出埠29來組合多個供氣單元11 (111)從而對 氣體的種類和流量進行控制。 【圖式簡單說明】 [0076] 第一圖是本發明第一實:施方式的供氣早元的平面圖。 [0077] 第二圖是第一圖中2 _ 2線的剖面圖。 [0078] 第三圖是第一圖中3-3線的剖面圖’僅圖示了流路塊。 [0079] 第四圖是第三圖中4 — 4線的剖面圖’僅代表性圖示了其中 一部分。 [0080] 第五圖是本發明第二實施方式的供氣單元的平面圖。 [0081] 第六圖是第五圖中6-6線的剖面圖。 [0082] 第七圖是第六圖中7-7線的剖面圖，僅代表性地圖示了一 099121344 表單煸號A0101 第22頁/共37頁 0992037596-0 201100690 [0083] 個流路塊。 第八圖是表示供氣單元的變形例的剖面圖。 [0084] 第九圖是表示流路塊的變形例的剖面圖。 [0085] 第十圖是表示流路塊的另一變形例的剖面圖。 [0086] 第十一圖是現有的供氣單元的平面圖。 [0087] 第十二圖是第十一圖中12-12線的剖面圖。 [0088] ❹ 第十三圖是第十一圖中13-13線的剖面圖。 【主要元件符號說明】 [0089] <習知> [0090] 311…供氣單元 [0091] 320A〜320D…閥塊 [0092] 321…載氣流路 [0093] 321s…載氣輸入埠 〇 [0094] 7 321e…載氣輸出埠 [0095] 322、322A…處理氣體流路 [0096] 322s…處理氣體輸入埠 [0097] 324…閥室 [0098] 325…閥孔 [0099] 331、332…塊狀流路 [0100] 335…塊體 099121344 表單編號A0101 第23頁/共37頁 0992037596-0 201100690 [0101] 3 4 0…基塊 [0102] 350…啟閉閥 [0103] 335a…啟閉閥的側面部 [0104] 3 3 5 b…平行的侧面部 [0105] 3 3 5 c…垂直的側面部 [0106] <本發明> [0107] 10…供氣裝置 [0108] 11…供氣單元 [0109] 20…流路塊 [0110] 20a…閥搭載面的頂面 [0111] 20b…副流路開口面的底面 [0112] 2 0 c…侧面 [0113] 21…主流路的載氣流路 [0114] 22 ( 22A)…處理氣體流路 [0115] 24…閥室 [0116] 24a…閥座 [0117] 25…側面流路 [0118] 25a…槽部 [0119] 25b…蓋部件 099121344 表單編號A0101 第24頁/共37頁 0992037596-0 201100690 [0120] 25d…重疊部分 [0121] 27···連接流路 [0122] 29…輸出埠 [0123] 40…連接部件 [0124] 42 ( 42A)…導入流路 [0125] 4 4…螺检 [0126] Ο 42s…輸入埠 [0127] 50 ( 50A)…啟閉閥 [0128] 51…閥體 [0129] 52…線圈 [0130] 6 0…輔助流路塊 [0131] 62…輔助處理氣體流路 [0132] G 67…輔助連接流路 [0133] 70…加熱器 [0134] 111…供氣單元 [0135] 120…流路塊 [0136] 120a…輔助流路塊的頂面 [0137] 120c…侧面 [0138] 121…載氣流路 099121344 表單編號A0101 第25頁/共37頁 0992037596-0 201100690 [0139] 124…閥室 [0140] 125…側面流路 [0141] 125a…槽部 [0142] 125b…蓋部件 [0143] 127a、127b…連接流路 [0144] 227…連接流路 099121344 表單編號A0101 第26頁/共37頁201100690 VI. Description of the Invention: [Technical Field of the Invention] [0001] The present invention relates to a gas supply unit that switches a plurality of gases to flow. [Prior Art] Conventionally, a gas supply unit used in a semiconductor manufacturing process or the like is as described in Patent Document 1. The gas supply unit described in Patent Document 1 will be described with reference to Figs. 11 to 13. The eleventh drawing is a plan view of the air supply unit, the twelfth drawing is a sectional view taken on line 12-12 in the eleventh drawing, and the thirteenth drawing is a sectional view taken on line 13-13 in the eleventh drawing. [0003] In the air supply unit 311 shown in the above Patent Document 1, a carrier gas flow path 321 is formed between the carrier gas input port 321s and the carrier gas output port 321e, and the valve blocks 320A to 320D are connected to each other. The process gas is supplied to the enthalpy 322s and the process gas flow path 322 of the carrier gas flow path 321 . In each of the valve blocks 320A to 320D, the process gas flow path 322 and the carrier gas flow path 21 are performed in the block 335 by the opening and closing valve 350. The inside of the block 335 is formed with an inverted "V" shape: a block flow path 331, and the process gas flow path 322 connected to the valve chamber 324 communicates with the flow path 331 through the 1-valve reading 325. A block-shaped flow path 332 of a "V" shape is formed in the base block 340, and a space is provided between each block flow path 332, and block flow paths 331 of the valve blocks 320A to 320D and a block shape of the base block 340 are formed. The flow path 332 is in an in-line type and constitutes one carrier gas flow path 321 . [Patent Document 1] International Publication No. 2004/036099 [0006] However, in Patent Document 1, a processing gas input is provided in a side surface portion 335c perpendicular to the side surface portion 335a where the opening and closing valve 350 is provided. 322s, therefore, need 099121344 Form No. A0101 Page 3 / Total 37 Page 0992037596-0 201100690 To ensure the space required for the processing gas 埠 322s on the side of the valve blocks 320A to 320D. Here, it is conceivable to extend the process gas flow path 322 to the side surface portion 335b parallel to the side surface portion 335a, and in this case, the carrier gas flow path 321 and the process gas flow path 322A (with double dots) The underline indicates the problem of interference. Therefore, it is difficult to reduce the width of the valve blocks 320A to 320D (the length in the left-right direction in the thirteenth drawing) or to arrange the gas supply unit 311 in parallel to be highly integrated. Further, in Patent Document 1, the block flow path 331 of each of the valve blocks 32A to 320D and the block flow path 332 of the base block 340 are formed in a "V" shape and connected to each other. However, it is not easy to form a long thin flow path by such a V shape. [0008] [0009] The present invention has been made in view of the above problems, and the main object is to provide a reduction A gas supply unit having a plurality of widths of the opening and closing valve and being easy to manufacture. In order to solve the above problems, the following aspect is adopted. The first aspect of the invention provides an image supply unit including a flow path block having a flow path therein The flow path includes a main flow path and a plurality of auxiliary flow paths respectively communicating with the main flow path, and each of the auxiliary flow paths is provided with an opening and closing port, and the opening and closing valve blocks or communicates with the corresponding device. The secondary flow path and the main flow path are characterized in that the flow path block is formed in a rectangular parallelepiped shape, and includes a valve mounting surface and a secondary flow path opening surface, and the valve mounting surface and the pair The flow path opening surface is a surface on the opposite sides, the opening and closing valve is mounted on the cymbal mounting surface, and the opening of the auxiliary flow path is provided on the opening surface of the auxiliary flow path, and the opening and closing valve is along the The length of the valve mounting surface is arranged in an in-line manner. Each valve chamber of the opening and closing valve is disposed on the valve mounting surface ' 099121344 Form No. A0101 Page 4 / Total 37 Page 0992037596-0 201100690 The secondary flow path communicates with the substantially central portion of the valve chamber a direction in which the valve mounting surface extends, the secondary flow path forming an opening in the opening surface of the secondary flow path. The main flow path connects the chamber of the adjacent opening and closing jaw and includes a side flow path, the side surface The flow path is provided in at least one side surface of the flow path block that sandwiches both side surfaces of the valve mounting surface in the width direction. The side surface flows through a groove portion and a covering portion that extend in the longitudinal direction of the valve mounting surface. According to the above configuration, the auxiliary flow path forms an opening in the opening surface of the auxiliary flow path on the side opposite to the valve mounting surface of the flow path block, so that it is not necessary In wide from . . . . . . . . . In the direction of the cylinder, the input side of the processing gas is placed on both sides of the valve mounting surface on which the Kailan valve (valve chamber) is mounted. Therefore, the width of the flow path block provided with the plurality of opening and closing valves can be reduced. [0012] Further, in the flow path block, the main flow path includes a side flow that is provided on at least one of both side faces that sandwich the valve mounting surface in the width direction and extends in the longitudinal direction of the valve mounting surface Therefore, the length of the portion other than the side flow path in the main flow path can be shortened. Here, the side flow W ·» ,· I·· Τί. Further, Ο is formed by a groove member extending along the length of the valve wearing surface and a cover member covering the groove opening of the groove portion. Therefore, even if the side flow path is a long flow path, it is easy to form. Therefore, it is easy to form a main flow path in the flow path block, and it is easy to manufacture the gas supply unit. Further, since the portion inside the flow path block to the side surface (surface) of the flow path block can be used as the side flow path, the flow path can be efficiently disposed in the flow path block. Thereby, the width of the flow path block provided with the plurality of opening and closing valves can be reduced. [0013] In a second aspect of the invention, in the flow path block, the side flow path is alternately disposed in the longitudinal direction of the valve mounting surface to be displaced from the width direction. 992037596-〇Form No. Α0101 Page 5 of 37 pages 201100690 One of the side faces and the other side face of the valve mounting surface, it is possible to avoid interference between the side flow paths adjacent to each other in the longitudinal direction of the valve mounting surface. Therefore, the length ' of the side flow path which is easily formed in the main flow path can be lengthened, and the length of the portion other than the side flow path can be further shortened. According to a third aspect of the present invention, in the flow path block, one side surface and the other side surface of the valve mounting surface are held in the width direction and the length of the valve mounting surface is The side flow passages adjacent to each other have a portion that overlaps each other at a position where the valve chamber is provided in the longitudinal direction of the valve mounting surface, and therefore can pass through a flow path extending in the width direction of the valve mounting surface. These overlapping portions are connected via a valve chamber. Therefore, the length of the flow path connecting the side flow path and the valve chamber, that is, the length of the portion other than the side flow path in the main flow path can be shortened. According to a fourth aspect of the present invention, the side flow path is provided only in one of the side surfaces of the flow path block that sandwiches the valve mounting surface from the width direction, so that it is not necessary to form a side flow path. The flow block is turned over and processed. Therefore, the moon has enough to make the operation and processing of the gas supply unit. According to a fifth aspect of the present invention, the main flow path is respectively connected to the same valve chamber at a position sandwiching the communication portion between the auxiliary flow path and the valve chamber, and therefore, the flow in the valve chamber is circulated. The gas (purge gas) easily passes through the communication portion of the secondary flow path and the valve chamber. In other words, the carrier gas flowing into the valve chamber from the upstream main flow path is easily distributed linearly to the downstream main flow path through the communication portion between the auxiliary flow path and the valve chamber. Therefore, it is easy to carry the process gas flowing from the sub-flow path to the valve chamber by the carrier gas, and when the process gas is blocked, the process gas in the valve chamber can be quickly discharged by the purge gas. 099121344 Form No. A0101 Page 6 of 37 0992037596-0 201100690 [0017] As described above, the air supply unit according to the present invention does not need to hold the valve mounting surface provided with the opening and closing valve (valve chamber) from the width direction. The two sides of the present invention are provided with the input of the process gas. Therefore, according to the sixth aspect (4) of the present invention, there are provided a plurality of gas supply units according to the first to fifth aspects of the present invention, and the gas supply unit is made in parallel to make money. (4) The two side faces of the mounting surface are in contact with each other, whereby the width of each air supply unit can be reduced, and the result of the space I between the air supply units can be omitted, and the air supply device can be highly integrated.第七[A seventh aspect of the present invention is to provide the side surface in the flow path block from the two sides of the flow path block that sandwich the valve mounting surface in the width direction from the present embodiment to the fifth aspect of the present invention. A portion of the flow path is provided with a heater, so the month b brings the side flow path and the heater closer. Therefore, it is possible to efficiently heat the gas flowing through the side flow path. An eighth aspect of the present invention is to provide a plurality of air supply units according to any one of the first to fifth aspects of the present invention, wherein the air supply units are arranged in parallel such that the valve surface of the valve is clamped from the width direction. The two sides abut each other, and the heating crucible is sandwiched between the side faces of the adjacent air supply unit, so that the adjacent two air supply units can be heated by one heater. Further, according to the second aspect of the present invention, the side flow path is alternately provided in the flow path block in the longitudinal direction of the valve mounting surface, and the both side surfaces of the valve mounting surface are sandwiched from the width direction. In the case of one side and the other side, since the heater is provided on both side surfaces, it is possible to efficiently heat the gas flowing through the side flow path. [Embodiment] [First Embodiment] 099121344 Form No. A0101 Page 7 of 37 0992037596-0 201100690 [0021] Hereinafter, a first embodiment embodying the present invention will be described with reference to the drawings. [0022] As shown in the first figure, the air supply device 1 includes a plurality of air supply units 11 of the same structure. These air supply units n are fixed to each other as a whole. [0023] The air supply unit 丨丨 includes a flow path block 20 formed in a rectangular parallelepiped shape, and a plurality of opening and closing valves 5〇(5〇A)^the top surface 2〇a of the flow path block 2〇 ( The valve mounting surface is equipped with an on-off valve 50. The opening and closing valves 5 are arranged in an in-line along the length of the top surface 2〇3. The opening and closing jaw 50 is substantially cylindrical. The width of the top surface 20 a of the flow path block 20 is substantially equal to the diameter of the circular read surface of the opening and closing valve 50. Further, the opening and closing valve 50 is not limited to the substantially cylindrical shape in the width range of the face 20a of the flow path block 20, and any shape such as a square column shape may be employed. [0024] In the width direction of the top surface 2〇a of the flow path block 20 (the direction perpendicular to the longitudinal direction), the side faces 2〇c of the plurality of good-good units 11 abut each other “ie, a plurality of gas supply units 11 is arranged in parallel so that the both side faces 20c of the top surface 20a are sandwiched from each other in the width direction block 20 in the width direction. Therefore, in the direction in which the air supply unit 11 is superimposed, that is, in the width direction of the top surface 20a of the flow path block 20, no gap is formed between the flow path blocks 20. [0025] An end portion of the top surface 20a of the flow path block 20 in the longitudinal direction is provided with an output port 29 of a carrier gas (purge gas). The on-off valve 50A provided at the end opposite to the output port 29 is for changing the flow state of the carrier gas, and the other on-off valves 50 change the flow state of each process gas. [0026] In the following, reference is made to the second figure and the third figure '099121344 with one gas supply unit 11 Form No. A0101 0992037596-0 201100690 [0027] [0028] [0030] The structure is represented by Description. The second drawing is a cross-sectional view taken along line 2-2 in the first drawing, and the third drawing is a cross-sectional view taken along line 3-3 in the first drawing, in which the closing valve 50 is omitted. The inside of the flow path block 20 is provided with a carrier gas flow path 21 (main flow path) extending in the longitudinal direction of the flow path block 20 (the longitudinal direction of the surface 20a). An output port 29 of a carrier gas is connected to an end portion on the downstream side of the carrier gas flow path 21. In the flow path block 20, the carrier gas flow path 21 includes side flow paths 25 which are respectively provided on both side faces 20c which sandwich the top surface 20a from the width direction. The side flow path 25 is alternately provided on one of the side faces 20c and the other side face 20c of the both side faces 20 along the longitudinal direction of the top face 20a. That is, in the flow path block 20, the side flow path 25 is provided in a zigzag shape along the longitudinal direction of the top surface 20a. Inside the flow path block 20, a plurality of processing gas flow paths 22 (secondary flow paths) respectively communicating with the carrier gas flow paths; 2:1 are provided. The processing gas flow path 22 (22A) forms an opening in the bottom surface 20b (the auxiliary flow path opening surface) of the flow path block 20. The processing gas flow path 22 forms an opening in the center of the width direction of the bottom surface 20b (the horizontal direction in the third drawing). In other words, the opening of the processing gas channel 22 is equally provided in the width direction of the channel block 2A. The gas flow path 22 is disposed perpendicularly to the top surface 2A and the bottom surface 20b. The bottom surface 20b of the flow path block 20 is provided with a substantially rectangular parallelepiped connecting member extending in a long strip shape for each of the processing gas flow paths 22. 4〇. The connecting member 4A is fixed to the flow path block 20 by bolts 44. The longitudinal direction and the width direction of the connecting member 40 coincide with the longitudinal direction and the width direction of the flow path block 20, respectively. The width of the connecting member 40 is set to be equal to the width of the flow path block 2''. The connecting member 40 is provided with a linear introduction flow path that penetrates the top surface from the bottom surface thereof. 099121344 Form No. A0101 Page 9 of 37 0992037596-0 201100690 42 (42A). The introduction flow path 42 is provided in the center of the longitudinal direction of the connection member 4A, and is provided in the center of the width direction of the connection member 4A. Further, each of the introduction flow paths 42 is connected to each of the processing gas flow paths 22 of the flow path block 2A. That is, each of the introduction channels 42 is provided on an extension line of each of the processing gas channels 22. The connection portion between the introduction flow path 42 and the processing gas flow path 22 is sealed by a gasket. The end portion of the upstream side of the introduction flow path 42 (the bottom surface of the connection member 4A) is provided with an input port 42s as a projection portion of the connection member 4A. The input port 42s of the introduction flow path 42 is connected to a pipe for supplying the processing gas. Further, a pipe for supplying a carrier gas (purge gas) is connected to an input port 42s of the introduction flow path 42A (actually a carrier gas flow path) connected to the opening and closing valve 5A. [0031] In the flow path block, the side flow path 25 is provided at a position away from the bottom surface 20b to avoid interference with the screw test 44 of the fixed connection member 40. In other words, in the flow path block 20, the side flow path 25 is provided in the vicinity of the valve chamber 24. All of the side flow paths 25 in the flow path block 20 are disposed at positions equidistant from the bottom surface 20b (top surface 20a). The valve chamber 24 of the above-described opening and closing valve 5A is provided at a predetermined interval along the longitudinal direction of the manifold block 20 (the longitudinal direction of the top surface 20a) in the top surface 20a' of the flow path block 2''. Further, each of the processing gas channels 22 communicates with each of the valve chambers 24. That is, each processing gas flow path 2 2 is provided with an opening and closing width 50. Further, the valve chambers 24 of the adjacent opening and closing valves 50 are connected by the above-described carrier gas flow path 21. Therefore, each of the processing gas channels 22 is connected to the carrier gas flow path 21 through the respective valve chambers 24. [〇〇33] The valve chamber 24 is provided at the center in the width direction of the flow path block 20 (the width direction of the top surface 20a of the flow path block 20). The valve chamber 24 is formed as a substantially circular recess. Further, the valve chamber 24 is provided to substantially coincide with the total length of the flow path block 20 in the width direction to narrow the width of the flow path block 20. In other words, nqqi „n44 of the flow path block 20 form number A010I page 10/37 pages 0992037596-0 201100690 Ο [0035] 宽度 [0036] The width is set to be substantially equal to or slightly larger than the diameter of the valve chamber 24. A valve seat 24a is formed at the center of the valve chamber 24. The valve seat 24a abuts or disengages from the valve body 51 of the opening and closing valve 50. The valve seat 24a is formed as a substantially annular projection. As described above, the side flow path 25 is alternately disposed on one side surface 20c and the other side surface 20c of both side faces 20c of the flow path block 20 along the length direction of the top surface 20a. Therefore, the carrier gas flow path 21 on the upstream side and The downstream side carrier gas flow path 21 is connected to the same valve chamber 24, and it is possible to prevent the adjacent side flow paths 25 from interfering with each other. In other words, the upstream side flow path 25 and the downstream side flow path 25 are provided only in one. In the case of the forged side surface 20c, in order to prevent the side flow channels 25 from interfering with each other, it is necessary to shorten the length of the side flow path 25 or to make the distance between the top surface 20a and each side flow path 25 different. The portion surrounded by the valve seat 24a communicates with the processing gas flow path 22 » the processing gas flow path 22 to the back The flow path block 20 extends in the direction of the top surface 20a. The process gas flow path 22 is formed in a linear shape and has a circular cross section. In each of the process gas flow paths 22, a connection portion connected to each valve chamber 24 is provided. Thinner than other parts, That is, the cross-sectional area of the flow path in the vicinity of the connecting portion connected to each of the cells 24 is smaller than the cross-sectional area of the flow path in the other portions. Therefore, the width of the flow path block 2〇 can be reduced by reducing the diameter of the valve seat 24a. The opening and closing valve 50 is an electromagnetically driven valve, and the valve body 51 is reciprocally driven by energizing the coil 52. Further, the process gas flow path 22 and the valve chamber 24 can be blocked or communicated by abutting and disengaging the valve body 51 from the valve seat 24a' provided in the valve chamber 24. Further, the opening and closing valve 50 is not limited to the electromagnetically driven valve, and any type of valve such as a pneumatic valve or a piezoelectric element driven valve may be employed. 099121344 Form No. A0101 Page U / Page 37 0992037596-0 201100690 [0037] The structure of the carrier gas flow path 21 will be described in detail below with reference to the third and fourth figures. The fourth figure is a cross-sectional view taken along line 4 - 4 of the third figure, and only a part of it is representatively shown. [0038] The carrier gas flow path 21 is composed of the side flow path 25 and the connection flow path 27. The connection flow path 27 is very short compared to the side flow path 25. As described above, in the flow path block 20, the side flow paths 25 are respectively provided on the side faces 20c which sandwich the top surface 20a from the width direction, that is, the side faces 20c which are perpendicular to the top surface 2A. The side flow path 25 is composed of a groove portion 25a extending in the longitudinal direction of the flow path block 20 and a cover member 25 covering the groove 0 of the groove portion 25a. The groove portion 2 5 a is formed by cutting the surface of the side surface 20 c, which has a predetermined width and depth. The lid member 25b extends along the groove portion 25a and is fixed to the flow path block 20 by welding or the like so that the gas flowing through the side flow path 25 does not leak. The surface of the cover member 25b coincides with the surface of the side surface 20c of the flow path block 20. Therefore, the both side faces 20c are formed as a whole as a whole. Therefore, in the case where the plurality of flow path blocks 20 are arranged in parallel so that the side faces 20c abut each other, it is possible to prevent the private flow between the flow path blocks 20 from being hidden. The groove portion 25a is disposed so as not to interfere with the process gas flow path 22, and the valve chamber 24 and the groove portion 25a are formed with overlapping portions with respect to the width direction of the flow path block 20. Further, the groove portion 25a is provided such that the valve chamber 24 and the groove portion 25a are formed with overlapping portions in the longitudinal direction of the flow path block 20 (the longitudinal direction of the top surface 20a). Further, one side surface 20c and the other side surface 20c of the both side faces 20c of the flow path block 20 are provided in the longitudinal direction of the flow path block 20 in the longitudinal direction of the flow path block 20 adjacent to the longitudinal direction of the flow path block 20. The position of the valve chamber 24 has overlapping portions 25d overlapping each other. Therefore, it is possible to pass the connection flow 099121344 extending in the width direction of the flow path block 20 (the width direction of the top surface 20a). Form No. A0101 Page 12/37 pages 0992037596-0 201100690 Road 27 and two overlaps via the valve Fen 24 Part 25d connected. Specifically, the groove portion 25a and the valve chamber 24 are connected to each other by a connecting flow path 27 perpendicular to the top surface 2A. The connecting flow path 27 has a substantially circular cross section and is formed to have a certain diameter. [0041] The two connection flow paths 27 connected to the same valve chamber 24, that is, the upstream carrier gas flow path 21 and the downstream side carrier gas flow path 2, respectively, are in communication with the processing gas flow path 22 and the valve chamber 24 The position of the part is connected to the wide room 24. In other words, the communication portion between the upstream connection channel 27 and the valve chamber 24, the communication portion between the processing gas channel 22 and the compartment 24, and the communication portion of the downstream connection channel 27 and the valve chamber 24 are arranged in a straight line. Therefore, the processing gas flowing from the processing gas channel 22 to the valve chamber 24 is easily transported by the carrier gas, and the carrier gas flows from the upstream connecting channel 27 to the valve chamber 24 and from the valve chamber 24 to the downstream side. Road 27 flows out. In the case where the process gas is shut off by the opening and closing valve 5, the carrier gas flowing from the upstream connection channel 27 to the valve chamber 24 flows around the valve seat 24a and flows from the valve chamber 24 to the downstream side. Road 27 flows out. Therefore, it is possible to prevent the treatment from remaining in the gas valve chamber 24. [0042] In the gas supply unit 11+ of the above configuration, the process gas flow path 22A in the multi-turn process gas flow path 22 is (iv) a flow path of a carrier gas (purge gas), and the process gas flow (four) A is set at the gas supply The length of the single cut is opposite to the output 淳29 of the carrier gas - (iv) end. Further, the carrier gas _ and money are caused by the opening and closing corresponding to the processing gas flow path 22A. Each of the process gas grips 22 is supplied with a respective process gas 'and the respective process gases are connected or connected by respective corresponding shut-off valves 5'. Further, the air supply unit 1G is constituted by the air supply unit 11 in parallel, and the flow state of the air and the processing gas is carried out in the entire ship (4). Further, it may be configured such that the carrier gas flow path 21 is not 099121344 Form No. A0101 Page 13/37 page 0992037596-0 201100690 The carrier gas is circulated as a flow path for the process gas and the purge gas. [0043] The present embodiment detailed above has the following advantages. In the flow path block 20, the processing gas flow path 22 is formed with an opening on the bottom surface 20b on the side opposite to the top surface 20a, and the top surface 20a is provided with an opening and closing valve 50 (valve chamber 24). Therefore, it is not necessary to provide an input port for treating the gas on the side surface 20c perpendicular to the top surface 20a. Therefore, the width of the flow path block 20 in which the plurality of on-off valves 50 are provided can be reduced. Further, in the flow path block 20, the carrier gas flow path 21 includes a side flow path 25 provided on at least one side surface of the both side faces 20c sandwiching the gas surface 20a from the width direction and along the flow path block 2 The 0 _ length direction (the length direction of the face 20a) extends. Therefore, the length of the connection flow path 27 which is a portion other than the side flow path 25 in the carrier|flow path 21 can be shortened. Here, since the side flow path 25 is composed of the groove portion 25a extending in the longitudinal direction of the flow path block 20 and the lid member 25b covering the opening of the groove portion 25a, the side flow path 25a is easily formed even if it is a long flow path. Therefore, it is easy to form the carrier gas flow path 21 in the flow path block 20, and it is possible to easily manufacture the gas supply unit π. Further, since the portion of the flow path block 20 to the side surface 20c (surface) of the flow path block can be used as the side flow path 25, the flow path can be efficiently provided in the flow path block 20. As a result, the width of the flow path block 20 can be reduced. [0046] In the flow path block 20, the side flow path 25 is alternately provided along one longitudinal direction of the flow path block 20 on one side surface 20c and the other side surface 20c of the both side faces 20c of the top surface 20a sandwiched in the width direction. Therefore, it is possible to prevent mutual interference between the side flow paths 25 adjacent to each other in the longitudinal direction of the flow path block 20. Therefore, the side flow path 25 which is a portion which is easily formed in the carrier gas flow path 21 can be set to be more than 099121344. Form No. A0101 Page 14 / Total 37 page 0992037596-0 201100690 [0047] Ο [0048] Ο [0049] 099121344 Long The length of the connecting flow path 2 7 other than the side flow path 25 is set to a shorter length. The side flow paths 25 adjacent to each other in the longitudinal direction of the flow path block 20 have overlapping portions 25d which are superposed on each other at a position where the valve chamber 24 is provided in the longitudinal direction of the flow path block 20, and thus can pass through the flow path block 2 The flow paths extending in the width direction (the width direction of the top surface 20a) are connected to the overlapping portions 25d via the valve chamber 24. Therefore, the length of the connecting flow path 27 connecting the side flow path 25 and the valve chamber 24, that is, the length of the portion other than the side flow path 25 of the carrier gas flow path 21 can be shortened. The carrier gas flow path 21 on the upstream side and the downstream side is connected to the same chamber 24 at a position sandwiching the communication portion between the processing gas channel 2 2 and the valve chamber 24, so that the carrier gas flowing in the valve chamber 24 is easy. It passes through the communication portion between the process gas flow path 22 and the valve chamber 24. In other words, the carrier gas flow path from the upstream side flows in a straight line manner through the carrier gas flow path 21 that flows into the valve chamber and easily flows downward through the communication portion between the process gas flow path 22 and the valve chamber 24. Therefore, it is easy to convey the process gas flowing into the valve chamber 24 from the process gas flow path 22 by the carrier gas, and when the process gas is desired to be blocked, the process gas in the valve chamber can be discharged quickly. In the air supply unit of the present embodiment, it is not necessary to provide the input enthalpy of the processing gas on the side surface 2〇c perpendicular to the top surface 2〇a on which the opening/closing 阙(5) chamber 24) is mounted. Further, the air supply means 1 includes a plurality of air supply units U, and the air supply units 11 are arranged in parallel such that the two side faces of the top surface 20a are abutted against each other in the width direction. Therefore, the width of each air supply unit 11 can be made small, and the air supply unit 1 can be omitted, and the air supply device 10 can be highly integrated. Form No. A0101 Page 15 of 37 0992037596-0 201100690 [Second Embodiment] [0012] Hereinafter, a second embodiment embodying the present invention will be described with reference to the accompanying drawings, mainly explaining The difference between an embodiment. In the second embodiment, as shown in Fig. 5, the side flow path 125 is provided only on one of the side faces 120c of the both side faces 120c of the flow path block 120, which is different from the first embodiment. The same components as those in the first embodiment are denoted by the same reference numerals, and their description will be omitted. The air supply unit 111 includes a flow path block 120 formed in a rectangular parallelepiped shape, a plurality of auxiliary flow path blocks 6A, and a plurality of opening and closing ports 50 (50A). Each of the opening and closing valves 50 is mounted on the top surface of the flow path block 120 through each of the auxiliary flow path blocks 6A. The auxiliary flow path block 60 and the opening and closing valve 50 are arranged in a straight line along the longitudinal direction of the top surface of the flow path block 120 (the longitudinal direction of the flow path block 120). [0053] The auxiliary flow path block 60 is formed in a substantially rectangular parallelepiped shape elongated in an elongated shape. The auxiliary flow path block 60 is fixed to the top surface of the flow path block 120. The longitudinal direction and the width direction of the auxiliary flow path block 60 coincide with the longitudinal direction and the width direction of the flow path block 120, respectively. The width of the auxiliary flow path block 60 is set to be equal to the width of the flow path block 120. The on-off valves 50 are mounted on the top surface 120a (valve mounting surface) of each of the spare flow path blocks 60, respectively. When the flow path block 12 and the auxiliary flow path block 60 are regarded as the entire flow path block, the top surfaces 120a of the respective auxiliary flow path blocks 6 can be regarded as the top surface (valve mounting surface) of the entire flow path block. The longitudinal direction and the width direction of the entire flow path block coincide with the longitudinal direction and the width direction of the flow path block 120, respectively. [0054] Hereinafter, while referring to the sixth drawing, the structure of one air supply unit Hi will be described as a representative. In addition, the sixth figure is the face of the 6-6 line in the fifth figure 099121344 Form No. A0101 Page 16 / Total 37 page 0992037596-0 201100690 [0055] [0056] The interior of the flow path block 120 is integrally provided The carrier gas flow path 121 (main flow path) extending in the longitudinal direction of the flow path block 120. An output port 29 of a carrier gas is connected to an end portion on the downstream side of the carrier gas flow path 121. In the flow path block 120, the carrier gas flow path 121 includes a side flow path 125, and only the side surfaces 120C of the top surface are sandwiched from the width direction, that is, the top surface of the flow path block 12 (the top surface of the auxiliary flow path block) One side surface 120c of the two vertical sides i2〇c of I20a) is provided with the above-described side flow path 125. The side flow path 125 extends in the longitudinal direction of the flow path block 120. Inside the turbulent flow path block 120 and the auxiliary flow path block 60, a processing gas flow path 22 and an auxiliary spot gas flow path 62 (secondary flow path) that communicate with the carrier gas flow path 121 are provided. The processing gas flow path 22 and the auxiliary processing gas flow path 62 are in-line connected, and the connecting portion seals the processing gas through the sealing port. The basic structure of the body flow path 22 is the same as that of the process gas flow path 22 of the first embodiment. Therefore, the description thereof is omitted here. The auxiliary process gas flow path 62 extends linearly from the bottom surface of the auxiliary flow path block 60 toward the top surface. The auxiliary processing gas flow path 62 is provided at the center position in the longitudinal direction of the auxiliary flow path block 60, and is provided at the center position in the width direction of the auxiliary flow path block 60. Each of the auxiliary process gas channels 62 is provided on an extension line of each process gas channel 22. [0057] The top surface 120a of the auxiliary flow path block 60 is provided with a valve chamber 124 of the above-described opening and closing valve. The basic structure of the valve chamber 124 is the same as that of the valve chamber 24 of the first embodiment, and therefore the description thereof is omitted here. Further, each of the auxiliary processing gas channels 62 communicates with each of the valve chambers 124. That is, the opening and closing valve 5 is provided for each of the auxiliary processing gas flow paths 62 (the processing gas flow path 22). The process gas flow path 22 is connected to the valve chamber 124 through the auxiliary process gas flow path 62. Further, the valve of the adjacent on-off valve 50 099121344 Form No. A0101 Page 17 of 37 0992037596-0 201100690 The chambers 124 are connected to each other by the above-described carrier gas flow path 121. Therefore, each of the processing gas flow path 22 and the auxiliary processing gas flow path 62 is connected to the carrier gas flow path 121 through each valve chamber I24. The opening and closing compartment 50 is partitioned and connected to the auxiliary process gas flow path 62 (process gas flow path 22) and the valve chamber 124 through the body 51. As described above, the carrier gas flow path 121 includes the side flow path 125 provided only on one of the side faces 120c of the flow path block 120. The side flow path 125 extends in the longitudinal direction of the flow path block 120. Here, in the portion where the upstream side flow path 125 and the downstream side flow path 125 are connected to the same valve chamber 146, the side flow paths 125 are spaced apart from each other to prevent the side flow paths 125 from interfering with each other. Further, the side flow path 125 is fast connected to the valve chamber 124 of the opening and closing valve 50 via the connection flow paths 127a and 127b provided inside the flow path block 120 and the auxiliary connection flow path 67 provided inside the auxiliary flow path block 60. The auxiliary connecting flow path 67 extends linearly in the longitudinal direction of the flow path block 120 and obliquely with respect to the bottom surface of the auxiliary branch block 60. Even in this case, since the carrier gas flow path 121 includes the side flow path 125 extending in the longitudinal direction of the flow path block 120, it is possible to prevent the long sound concealing connection flow path 127b and the auxiliary connection flow path of the auxiliary connection flow path 67. The connection of 67 passes through the dense - 'Sfc. - ίβ [0059] The two auxiliary connecting flow paths 67 connecting the same valve chamber 124, that is, the I·, & transfer side carrier gas flow path 121 and the downstream side carrier gas flow path 121 are respectively at the clamp auxiliary gas flow path The position of the communication portion between the 62 and the valve chamber 124 is connected to the valve chamber 124. Therefore, the portion of the communication portion from the auxiliary processing gas flow path 62 to the valve chamber 124 is easily transported by the excess carrier gas, wherein the carrier gas is from the upstream Hungarian The auxiliary connection flow path 67 flows into the valve chamber 124 and flows out from the valve chamber 124 to the auxiliary flow path 67 on the downstream side. In addition, when the process gas is blocked by the opening and closing valve 5〇 099121344 Form No. 1010101 Page 18/37 Page 0992037596-0 201100690 [0060] [0062] [0063] Ο [0064] Can prevent process gas residue In the valve chamber 124. Next, the configuration of the side flow path 125 and the connection flow paths 127a and 127b will be described in detail with reference to the seventh embodiment. The seventh drawing is a cross-sectional view taken along line 7-7 of the sixth drawing. The description will be made by taking one flow path block 120 as a representative. The carrier gas flow path 121 is composed of a side flow path 125, connection flow paths 127a and 127b, and an auxiliary connection flow path 67. The lengths of the connection flow paths 127a and 127b and the auxiliary connection flow path 607 are smaller than the length of the side flow path 125. The structure of the side flow path 125 is substantially the same as that of the side flow path 25 of the first embodiment except that the side flow path 125 is provided only on one side 120c of the two side faces 120c of the flow path block 120; The side flow path 125 is shorter than the side flow path 25 of the first embodiment. The side flow path 125 is composed of a groove portion 125a extending in the longitudinal direction of the flow path block 120 and a plate-shaped cover member 125b covering the groove opening of the groove portion 125a. In the longitudinal direction of the flow path block 120, the end portion of the side flow path 125 communicates with the connecting flow path 127a extending in the width direction of the flow path block 120. The connection flow path 127a linearly extends from the communication portion between the side flow path 125a (the groove portion 125a) to the center in the width direction of the flow path block 120. Therefore, the connection flow path 127a can be formed by a drill or the like from the direction of the side surface 120c after the groove portion 125a of the side flow path 125 is formed. At the center in the width direction of the flow path block 120, the end portion of the connection flow path i27a communicates with the end portion of the connection flow path 127b. The connection flow path 127b extends linearly from the communication portion between the connection flow path i27a extending in the width direction of the flow path block 120 toward the auxiliary flow path block 60 and forms on the top surface of the flow path block 120. Opening. Therefore, the connection flow path 127b can be formed from the upper direction of the flow path block 120 by way of a 099121344 form number A0101 page 19/37 page 0992037596-0 201100690. The connection flow path 127b is disposed to be perpendicular to the top surface 120a of the auxiliary flow path block 60 (the bottom surface 120b of the flow path block 120). Further, the connection flow path 127b is connected to the auxiliary connection flow path 67 provided in the auxiliary flow path block 6A. Even in the air supply unit 111 having the above configuration, the flow state of the carrier gas and the processing gas can be controlled in the same manner as the air supply unit 11 of the first embodiment. [0066] The present embodiment detailed above has the following advantages. Hereinafter, only the advantages different from those of the first embodiment will be described. Since the side flow path 1 25 is provided only on one of the side faces 120c of the flow path block 1 2〇, it is not necessary to turn over the flow path block 120 when the side flow path 25 is formed. Therefore, the operability and workability of manufacturing the gas supply unit 丨丨丨 can be improved. The present invention is not limited to the above embodiment, and can be implemented, for example, as follows. : ; . . . . . :::. :::-- :: . . . ·: . [0069] The end portions on the upstream side and the downstream side of the carrier gas flow path 1 21 may form an opening in the longitudinal end surface of the flow path block 120. In this case, the process gas is caused to flow from the process gas passage 22A, and the opening and closing valve is blocked or connected to the process gas. Further, an on-off valve for changing the flow state of the carrier gas may be separately provided in addition to the air supply unit 111 (111). In the air supply unit 11 of the first embodiment, the side faces of the flow path block 2 are alternately arranged on the side faces 20c perpendicular to the top surface 2 〇a on which the opening and closing valve 5 is mounted. The flow path 25 may not include the overlapping portion 25d which overlaps each other at the position where the valve to 24 is provided in the longitudinal direction of the flow path block 2''. As shown in the eighth figure, even in the case of this configuration, the connection flow path 227 can be appropriately extended by appropriately extending the connection flow path 227 in the direction of the width of the flow path block 2〇099121344, the form number A0101, the 20th page, and the total of the page 3992037596-0 201100690. Side flow path 25 and valve chamber 24. [0071] As shown in FIG. 9, in the configuration in which the side flow path 25 is provided only on one of the side faces 20c of the flow path block 20, the side flow path 25 and the valve chamber are connected by the connection flow path 227. 24 without passing through the auxiliary flow path block 60 [0072] 载 The carrier gas flow path 21 (121) connected through the valve chamber 24 (124) holds the process gas flow path 22 (the auxiliary process gas flow path 62) and the valve chamber 24 ( 124) is connected to the #1 chamber 24 (124) at the position of the connection portion, but the present invention is not limited to this configuration. The carrier gas flow path 21 (121) can also be used in only one position and each valve chamber 24 (124). Connected structure. [0073] As shown in the tenth diagram, a configuration in which the heater 70 is provided in a portion where the side flow path 25 is provided in the side surface 20c perpendicular to the top surface 20a of the flow path block 20 may be employed. Here, the heater 70 is provided on almost the entire surface of the two side faces 20c. According to this configuration, since the side flow path 25 and the heater 7 are close to each other, the gas flowing through the side flow path 25 can be efficiently heated. Further, a heater 70' may be alternately disposed along the longitudinal direction of the flow path block 20 on the two side faces 2; 0c corresponding to the side flow path 25, wherein the side flow path 25 is along the longitudinal direction of the flow path block 20. They are alternately disposed on the two side faces 20c of the flow path block 2''. In the flow path block 120 of the second embodiment, since the side flow path 125 is provided only on one side surface 120c', it is also possible to provide the heater only on one side surface 120 of the side flow path 12 5 . c. Further, as shown in the tenth diagram, the heater 70 can be formed into a sheet shape or a film shape extending in the longitudinal direction of the flow path block 2, thereby preventing the width of the air supply unit 11 from increasing. 099121344 Form No. A0101 Page 21 of 37 0992037596-0 201100690 [0074] A plurality of air supply units u (in) may also be placed lv π 乂 使得 such that both sides of the flow path block 20 ( I20 ) 2 〇 c (i2〇c) abut each other, and a heater is provided to be broken between the side faces 20c (120c) of the adjacent air supply units 11 (111). According to this configuration, the two adjacent gas supply units π (111) can be heated by one heater. Further, even if the side flow path 25 is provided on the two side faces 2〇0 along the longitudinal direction of the flow path block 20 as in the air supply unit 11 of the first embodiment, heating is applied to the two side faces 2〇c. Therefore, it is also possible to efficiently heat the gas flowing through the side flow path 25. In other words, even if the side flow path 25 is provided on both side faces 20c of the flow path block 20, it can be heated and circulated to the side flow path by the same number of heaters as the side flow path 25 provided only on the one side surface 20c. 25 gases. [0075] In the first and fifth figures, it is also possible to combine the plurality of gas supply units 11 (111) by connecting the output ports 29 of the plurality of gas supply units 11 (111) to control the kind and flow rate of the gas. BRIEF DESCRIPTION OF THE DRAWINGS [0076] The first figure is a plan view of the gas supply early element of the first embodiment of the present invention. [0077] The second figure is a cross-sectional view taken along line 2 _ 2 in the first figure. [0078] The third diagram is a cross-sectional view taken along line 3-3 in the first figure. Only the flow path block is illustrated. [0079] The fourth diagram is a cross-sectional view of the 4 - 4 line in the third figure, which is only representatively illustrated. [0080] FIG. 5 is a plan view of a gas supply unit according to a second embodiment of the present invention. [0081] The sixth drawing is a cross-sectional view taken along line 6-6 of the fifth drawing. 7 is a cross-sectional view taken along line 7-7 of the sixth figure, only representatively shows a 099121344 form nickname A0101 page 22 / total page 3792037596-0 201100690 [0083] flow block . The eighth drawing is a cross-sectional view showing a modification of the air supply unit. [0084] FIG. 9 is a cross-sectional view showing a modification of the flow path block. [0085] FIG. 10 is a cross-sectional view showing another modification of the flow path block. [0086] FIG. 11 is a plan view of a conventional air supply unit. [0087] Figure 12 is a cross-sectional view taken along line 12-12 of the eleventh figure. [0088] ❹ The thirteenth picture is a cross-sectional view taken along line 13-13 of the eleventh figure. [Main component symbol description] [0089] <Rather> [0090] 311...air supply unit [0091] 320A to 320D...valve block [0092] 321...carrier gas flow path [0093] 321s...carrier gas input port [0094] 7 321e...carrier gas output 322 [0095] 322, 322A... process gas flow path [0096] 322s... process gas input 埠 [0097] 324... valve chamber [0098] 325... valve hole [0099] 331, 332... block flow path [0100] 335 ...block 099121344 Form No. A0101 Page 23 / Total 37 Page 0992037596-0 201100690 [0101] 3 4 0...Base block [0102] 350...Open and close valve [0103] 335a... Side part of the on-off valve [0104] 3 3 5 b...parallel side sections [0105] 3 3 5 c...vertical side sections [0106] <The present invention> [0107] 10...air supply device [0108] 11...air supply unit [0109] 20...flow path block [0110] 20a...top surface of valve mounting surface [0111] 20b...sub flow path opening Bottom surface of the surface [0112] 2 0 c... side [0113] 21... carrier flow path of the main channel [0114] 22 (22A)... process gas flow path [0115] 24... valve chamber [0116] 24a... valve seat [0117 25... side flow path [0118] 25a... groove part [0119] 25b... cover part 099121344 form number A0101 page 24/total 37 page 0992037596-0 201100690 [0120] 25d...overlapping part [0121] 27···Connection Flow path [0122] 29... Output 埠 [0123] 40... Connection unit [0124] 42 (42A)...Import flow path [0125] 4 4... Thread check [0126] Ο 42s... Input 埠 [0127] 50 ( 50A) ...opening valve [0128] 51... valve body [0129] 52... coil [0130] 6 0... auxiliary flow path block [0131] 62... auxiliary processing gas flow path [0132] G 67... auxiliary connection flow path [0133] 70...heater[0134] 111...air supply unit [0135] 120...flow path block [0136] 120a...top surface of auxiliary flow path block [0137] 120c... side [0138] 121...carrier air flow path 099121344 Form No. A0101Page 25 of 37 0992037596-0 201100690 [0139] 124...Valve chamber [0140] 125... Side flow path [0141] 125a... Groove portion [0142] 125b... Cover member [0143] 127a, 127b... Connection flow path [0144] 227... Connection Flow Path 099121344 Form No. A0101 Page 26 of 37
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