TW201100685A - Pipeline with heating device - Google Patents

Abstract

An objective of this invention is to provide a pipeline with a heating device, in which a heater arrangement portion is of a simple configuration, and the interior of the pipeline can be efficiently heated, or efficiency of operation for arranging the heater portion in the pipeline can be enhanced. The pipeline is characterized in that it comprises: a tubular member 12, and a heating device arranged inside the tubular member 12, wherein the heating device 13 includes: a heater portion 51a; and a heat spreading portion 51c having a plurality of fins 24 arranged on a circumference of the heater portion 51a.

Description

201100685 J IV. Designated representative map: (1) The representative representative of the case is: (3). (2) A brief description of the symbol of the representative figure: 11~Flange; 1 la~ center ring sealing surface; 12~ piping (tubular part); 13~ heating device; 14~ wire; 15~ thermocouple; 21~ insulation 22~ sheath member; 23~ tubular member; 24~ fin; 51 a~heater portion; 51b~ unit; 51 c~diffusion portion; 101~pipe with heater. 5. If there is a chemical formula in this case, please disclose the chemical formula that best shows the characteristics of the invention: None. 6. Description of the Invention: [Technical Field to Which the Invention Is Ascribed] The present invention relates to a pipe having a heating device. Specifically, it is a switch that has a heating device for circulating a gas used in semiconductor manufacturing or the like or using a completed exhaust gas. [Prior Art] In the manufacture of semiconductors, it is an obligation to treat the etching, the formation of a film, and the like after the use of the detoxification device, and to decontaminate them. In this case, the exhaust gas is caused to flow from the etching device or the like to the pipe and sent to the detoxification device. At this time, the reaction product of the exhaust gas adheres to the inner wall of the pipe, which hinders the flow of the exhaust gas. In order to prevent this, the inside of the piping is raised to a temperature higher than a predetermined temperature, so that the reaction product of the exhaust gas does not adhere to the inner wall of the piping. About this method - kind of such as 帛! As shown in the figure, a ribbon heater 2 is wound around the outer surface of the pipe i, and the inside of the pipe 1 is heated from the outside of the pipe 1.

In the other way, as shown in Fig. 2, the pipe 3 of the structure of l is used, and the heater is introduced into the pipe 3 by the bent portion % of the pipe 3, and the inside of the pipe 3 is heated. [Summary of the Invention] [Problems to be Solved by the Invention] The method of screaming, stone grain, and smashing, and the method of stealing 2, respect/external heating, since the heating part is resin 劁σ 2 A , 疋 from J It is impossible to achieve the problem that the inside of the piping cannot be sufficiently heated by the 〇α. . Coffee, therefore 2060-10557-PF; Dwwang 3 201100685 There is also 'and in order to solve this problem, even if it is a little better, and the strip heater is wound at close intervals in all areas of the pipe, but the overlap is prohibited in... In the case of the ribbon heater 2, the strip-shaped heaters 2 are not overlapped with each other, and it is necessary to carefully wind the surface along the pipe 1, thereby deteriorating the work efficiency in the field construction. In the method of inserting the heater 4 into the pipe 3, the pipe 3 of the f-curved portion represented by the L-shaped structure is necessary, and the structure of the pipe 3 is complicated, or it is set. The location is limited, resulting in a problem that the entire area within the exhaust pipe cannot be sufficiently heated. The present invention is a hairline derived from the problem of the above-mentioned example, and provides a heating device having a heating device that has a simple structure and can efficiently heat the inside of the pipe, or can be heated. The efficiency of the work set by the device. According to the present invention, there is provided a pipe having a tubular member; and a dancing device 置于 placed on the inner side of the tubular member... Plus (four) set has a set:

A portion and a heat diffusing portion having a plurality of fins disposed around the heater 邛. B According to the present invention, since the heating skirt is disposed inside the pipe, Z heats the inside of the pipe with good efficiency. Also, because there is no need for

In the case of the strip heater, the heater is usually wound around the entire pipe, and the heater installation portion having the L: type structure pipe is not required, and the heater can be set as a single mechanism. 2060-10557-PF; Dwwang 4 201100685 Further, the 'heating device has a heater portion and a heat diffusing portion, and a plurality of fins are disposed around the diffusing portion, and the fins are close to the inner wall of the pipe (tubular member) or In contact with it, the heater portion can be easily placed in the interior of the pipe during assembly. Further, since the fins are mounted on the periphery of the heater portion, heat energy can be efficiently and widely released around the heater, and the temperature difference inside the pipe can be minimized.

Further, it is preferable that at least the heat generating portion of the heater portion has a rod shape, and the plurality of fins are disposed so as to be arranged in a circle around the heater portion with a space therebetween. The force yr, preferably the M/1 field, is formed by a plurality of reading groups arranged at intervals in the longitudinal direction of the adding portion, and one of the rotating groups is disposed in the heater portion. It is composed of a plurality of fins arranged in a circle and spaced apart from each other. The portion of the fin portion is the slope of the heating direction or the oblique direction with respect to the longitudinal direction of the heater portion. The airflow is caused by these fins. Thereby, the heat temperature H from the fins is blocked, so that the center portion to the circumference portion of the pipe can be made uniform. The 1 旳/dish distribution is further π. Preferably, the ruthenium-like surface of the 锉 平行 is parallel to the longitudinal direction of the entangled writing 4 or inclined with respect to the α 1 逯 direction. In addition, it is preferable that the upper side is inclined. The cylindrical member around the body portion and the disk 疋 π 构成 are composed of a plurality of pieces of Korean film which are heated by the above. Thereby, the above-mentioned compounding of the tubular member is heated, and the heat energy is transmitted to the entirety of the plurality of fins with a good efficiency of 2060-10557-PF; Dwwang 201100685. - In addition, the 'better case' is the heater portion. It is a heat-generating body at the center, an insulation surrounding the heat-generating body, and a rod formed of a sheath (a portion (5)) as a sheath. The end is sealed by the sheath member and the other end. Then, it is a material of the wire and the wire (4), whereby the work of attaching it to the pipe can be easily performed. Also, it is preferable that the pipe having the heating device is via the flange. It is possible to improve the efficiency of the installation work of the heater by attaching the piping to the other piping because the piping having the heating device can be installed in the necessary space. [Effect of the invention] As described above, according to the present invention, The structure of the heater setting portion is simple, and the piping inner tube can be heated with good efficiency, or the efficiency of the heater setting operation can be improved. [Embodiment] [Best Mode for Carrying Out the Invention] In the following, the embodiment of the present invention will be described with reference to the drawings. (First Embodiment) (Description of the configuration of a pipe having a heating benefit (heating device)) FIG. 3 is a view showing a first embodiment of the present invention. The configuration of the s with the heating device. The left side of the third figure is a view from the side of the pipe with the heater; the right side of the figure from the left side of the figure with the heater 2060-10557-PF; Dwwang ^ 201100685 The view of the right side of the official is seen in the past. The fourth (a) to 4 (c) are a plurality of support units constituting the diffusion portion of the piping having the heating device, and one unit is extracted therefrom. The figure shown, in which the 4 (b) is a side view of a unit, and the 4 (3) is a view from the left side of a unit of the 4th (b) figure, the 4th (the picture is from the The view of the past is seen from the right side of one of the units of the figure (b)

As shown in Fig. 3, the pipe 1〇1 having a heater is a pipe having a length of about 450 nm and a diameter of about 48 mm (a tubular member, a flange at both ends (a pipe connecting portion) u, and a pipe provided at a = The heating device 13 is configured. The diameter of the pipe 12 corresponding to the portion where the heating device 13 is disposed: if the cross-sectional area of the air flow passage can be ensured, the diameter of both ends of the item 12 is the same as in FIG. 3; In the case where it is necessary to ensure the cross-sectional area of the air flow passage: the diameter of the pipe 12 corresponding to the provision of the heating device 3 is larger than the diameter of the pipe 12 at both ends as shown in the figure 10 (in the center of the drawing). !3 is a shape of a pipe wall penetrating the pipe 12 on the side of the wire lead-in portion, and is a shape of a pipe wall that can be attached to the pipe: the straight portion is the pipe. The layout is much more than the heatable piping! The entire area of the 〇1 is illusory. In addition, the wire portion is in the state of extending the heater cover part of the heater body and is completely protected from the gas. , exported to the outside of the piping. As described later ( Item 2〇60-l〇557-PF; Dwwang 7 201100685 is a detailed description of the contact mask ring) through the flanges at both ends of the flange, Each of the pipes is attached to the other pipe by the pipes 101 and 11 having the heaters. The pipe u (flange) 11 is opposed to the flange of the other pipe, and has a sealing surface 11a for centering the center ring ( (The structure of the heating device) The heating device 13 is constituted by the heater portion 5ia and the expansion portion 51A as shown in Fig. 3, and the diffusion portion is provided to be in contact with or close to the inner wall of the pipe 12 to heat the crotch portion. 51a is held in the center of the pipe and does not hinder the gas passage. The diffuser 51c is excellent in corrosion resistance (four) of various types of emulsions used in semiconductor manufacturing, and is also a heat-dissipating material and a heat-transfer material. (Configuration of Heater Unit) The vertical heater portion 51a has a columnar shape as shown in Fig. 3. The heater portion 51a is made of an iron-chromium-aluminum wire (nickthal wire) 'nickel-chromium wire

UiChr〇mewire), a heating element at the center of the heating line (not shown in the figure due to being located inside the heater portion 51a), an insulator 21 covering the periphery of the heating element, or the like A cylindrical stainless steel sheath member 22 that covers the heat generating body and the periphery of the insulator 21 is formed. The insulator 21 covers all of the sides of the side surface including the heat generating body, and in Fig. 3, only the insulator exposed on the side is exposed. In Fig. 3, the sheath member 22 is not provided on the side, but it may be provided to cover at least the side. Further, the heater portion 51a has a pair of wires 将60-l〇557-PF for supplying electric power to the heat generating body; a wire 14 of Dwwang 8 201100685; and a thermocouple ΐ5 for temperature measurement. This kind of heater can heat up to 5 ί) ί) Τ ' work η ^ . , to 5U 〇 C or more, and has the characteristics of easily heating the exhaust gas to 1 〇 (rc ~ 4 〇〇 t. In the above-mentioned addition test, the device can be added to the "...", and the device itself is made of a resin-made double skin (insulator), and the upper limit of heat generation is a shoe, and a π-large heater is disposed outside the pipe, and only the case can be The internal temperature of the piping is raised to 6"(Down left). Under the temperature of the level, the gas product is not sufficiently prevented from being attached to the inner wall of the pipe. (Composition of the diffusing portion) The heat diffusing portion is as shown in Fig. 3. It is composed of a plurality of early rakes 51b having the same structure. One unit 51b is a cylindrical tubular member 23 and a single sheet provided in the tubular member 23 as shown in Figs. 4(a) to 4(4). The eight fins 24 of the side end portion are formed. The fins 24 of the human sheet form a fin group 52. The eight fins constituting the fin group 52 are at one end of the tubular member 23 at one end thereof. The circumference is arranged in a circle and is mounted at this end portion at equal intervals. The other end of the eight fins 24 is obliquely extended from the one end. The fins 24 adjacent to each other are disposed in such a manner that the gaps between the fins 24 are opened without hindering the flow of the gas. The developing surface of the Korean sheet is oriented toward the central axis of the tubular member 23 or relative to the tubular member. In the embodiment, the front end of the tab 51 of the unit 51b is close to the inner wall of the pipe 12, and is preferably in contact therewith. In this embodiment, the tubular member 23 is The eight fins are integrally formed. The integrated structure of the tubular member 23 and the eight fins 24 is produced in the following flow. That is, 'prepare a tubular member of appropriate length, 2060-10557-PF; Dwwang 9 201100685 The circumference of the end surface of the tubular member is set, etc. After the nicks are engraved into the eight lengths along the length of the tubular member, the score is from the inside to the outside along the score: 2: a fixed length of the unit 51b of the diffusing portion 51c. The excellent resistance to corrosion of various gases used in the manufacture, the stainless steel for the semiconductor heat transfer member, etc. The use of the unit 51b = component and insertion Heater unit 51a. Therefore, the heater portion can be: the heat energy of two: (2) ^ ^ ΰ 1 a is transmitted to the plurality of fins 24' with good efficiency, and the heat energy can be spread to the surroundings 24 well. The entire diffusion unit 51c is configured by sequentially inserting a plurality of units 51b constituting the diffusion unit 51c into the heater unit 5 via the tubular member 23. That is, the arrangement of the plurality of fin groups 52 is along the heater. The longitudinal direction of the portion 51a has a predetermined interval, and the surface of each of the fins is oriented obliquely toward the longitudinal direction of the heater bore 51a or obliquely upward and downward with respect to the longitudinal direction of the heater P 51a. tilt. In Fig. 3: The airflow flowing from the left side to the right side is inclined such that the upper portion of the fin is directed to the downstream direction of the gas "". In other words, the plurality of fins 24 are disposed so as to be opposed to each other facing the surface of the heater portion 51a, and are disposed around the adder 51a and spaced apart from each other in a circle. As shown in FIG. 3, the mutual arrangement of the plurality of fin groups 52 is a gap between the fins 24 of each fin group 52, and the gap can be along the heater portion 5la66 and the long side of the ji-, w The directions are arranged in the same position between adjacent fin groups 52, and may be arranged to be offset from each other. The tubular member 23 constituting one unit of the diffusing portion 51c and the eight pieces of 2〇60-i〇557-PF; Dwwang 忉 201100685 the key sheet 24 can also be used.

^ ^ 忒米I made. On the other hand, in the arrangement of the fins 24 of the diffusion portion U, ca can be made such that the development surface of the fin is inclined to the left and right sides of the heater portion 5 by 4, and θ 1 c is obliquely formed or mixed with various inclinations. The way to make it is also possible. In the case where the heating device 13 is installed in the pipe 12, the heater portion 疋/port is disposed in the central axis direction of the s 12 and is disposed in the large cymbal of the pipe 12 "P is the length of the heater portion 51a at the same time. The side direction is the same as the direction of the airflow when the U is placed in the pipe 12. Therefore, the gas of the B 101 having the '', is introduced along the longitudinal direction of the heater portion 51a. The flow is circulated between the fins 24 of the diffusing portion 5ic. At this time, the gas flowing therethrough is disturbed by the squeezing of the airflow in the direction of the airflow direction. The rolling atmosphere that is promoted by the heat of the sheet 24 is disturbed by the flow of the gas, or the circulating gas itself that is heated is disturbed, and the temperature distribution from the central portion of the distribution f1 to the periphery is adjusted. Further, this phenomenon is performed in the respective units in order to improve the temperature uniformity of the entire diffusing portion. (Effects) As described above, the use of the S 101 having the heater according to the first embodiment of the present invention is used. Since the heating device 13 is disposed at The inside of the pipe 12 can heat the inside of the pipe 12 with good efficiency. In addition, it is not necessary to wrap around the entire pipe as in the case of a strip heater, and it is not necessary to have a heater having a L-sub-structure pipe. In the installation portion, the heater installation portion can be a simple mechanism. In addition, the heater portion 51a can be set in such a manner that it can be brought to the middle portion of the pipe 12, 2060-10557-PF; Dwwang 11 201100685 It is possible to reduce heating unevenness from the central portion to the peripheral portion of the pipe 丨 2. Further, since the tubular member (2) of the diffusing portion 51c is composed of a heat transmitting member, the fin 24 is composed of a heat radiating member and is 2 In the periphery of the heater portion 51a, heat energy is transmitted to the periphery of the heater portion 51a with good efficiency, and heat energy is widely dispersed at the same time, and the temperature difference inside the pipe 12 can be reduced as much as possible. (Modified Example) Fig. 9(a) and Figs. 10(a) and 1(b) are cross-sectional views showing the configuration of a pipe having a heater according to a modification of the first embodiment. 3 identical symbol of the figure The element shown in Fig. 3 is the same as that shown in Fig. 3. The fin of the diffuser portion 51d in the pipe ma having the heater of Fig. 9(a) is provided on the tubular member 鳍 and the fin 2乜. The direction in which the surface is facing the airflow is the one shown in Fig. 3 (four), but the upper portion of the cymbal sheet 24a of the diffusing portion 51d is inclined toward the upstream side of the airflow, and the one shown in Fig. 3 The addition device 13 in the pipe mb having the heater in Fig. 10(a) is the same as that shown in Fig. 3 (four), but in the portion corresponding to the installation place of the heating device 13 It is larger than the diameter of the pipe 12a at both ends. This point is different from the one shown in the figure. This configuration is suitable for the case where it is necessary to ensure a larger cross-sectional area of the air flow path. In the pipe mc having the heater according to the first aspect (b), the fin 24a of the diffusing portion 5 Id is provided in the direction in which the tubular surface of the tubular member 23a and the fin 24a faces the airflow. The point is the same as that shown in Fig. 3 of the poor, but at 2060-10557-PFr Dwwa.ng 12 201100685, the upper part of the fin 24a of the diffusing portion 51d is inclined toward the upstream side of the airflow. The figures shown in Figure 3 are different. Further, the diameter of the pipe 1A corresponding to the portion where the heating device 13 is disposed is larger than the diameter of the pipe 12a at both ends, which is also different from that shown in Fig. 3. The material of the tubular member 23a and the fin 24a in the diffusing portion 51d is the same as that of the tubular member 23 and the fin 24 of the first embodiment, and stainless steel can be used. According to these configurations, the atmosphere heated by the heat energy of the fins 24 and 24a is disturbed by the flow of the gas, or the circulating gas itself which is heated is disturbed, and can be made from the piping 1〇la1 to 1〇lc. The temperature distribution from the center portion to the periphery of the peripheral portion is further uniformized. Further, this phenomenon is performed in order of each unit to increase the temperature uniformity from the central portion to the peripheral portion of the pipes 12 and 12a. (Description of the method of mounting the pipe with the heater) Referring to the third, fifth, sixth (a), sixth (b), seventh (a), and seventh (b), the above-mentioned heaters are provided. A method of attaching the pipe 1〇1 to the exhaust pipe will be described. Fig. 5 is a perspective view (1) showing a method of attaching a pipe having a heater according to the first embodiment of the present invention to an exhaust pipe. (a) and (b) are diagrams (Part 2) showing a method of ampouling a pipe having a heater according to the first embodiment of the present invention to another pipe, wherein FIG. 6(a) is a perspective view' Fig. 6(8) is a cross-sectional view taken along the line I-Ι of Fig. 6(a). Fig. 7(a) is a schematic view showing the arrangement of the heating pipe according to the first embodiment of the present invention. The vacuum pump 1〇6 of the engraving device is connected to the detoxification 2060-l〇557-PF; the example of the gas piping of the Dwwang 201100685 device 107; the 7th (8) is a cross-sectional view of the pipe provided with the heater. In the diagrams (4) and 6(b), the piping shown in Fig. 3 is used as the piping with the heater; in the seventh (a), 7 (b) In the figure, the piping i〇ib shown in Fig. 10(a) is used as the fitting with the teaching device. Μ ''' The detailed structure of the piping 1 〇1 b will be described later. First, as shown in Fig. 5, a pipe 1〇1 having a heater and an exhaust gas s 102 and 103 are prepared. In the pipe 1〇1 having a heater, the lead portion is taken out and has a heater. The configuration of the exhaust manifold 102 is a true second pump 106 connected to an apparatus for etching a harmful gas, and the exhaust pipe 103 is connected to a processing device 1〇7 for detoxifying harmful gases. The exhaust gas distribution ports 102 and 1 are separated by a distance corresponding to the length of the pipe ιοί having the heating device 3, and the exhaust pipe 1〇2 has the valve 31 and the end provided at the pipe 31. On the other hand, the exhaust pipe 103 has a pipe 33 and a flange 34 provided at an end of the pipe 33. Further, the flanges 32 and 34 are respectively connected to a pipe having a heater. The corresponding position of the center ring seal surface 1 la also has a center ring seal surface 32a, 34a. The exhaust pipe 1〇2 also The middle-ring cover 3 2 a is formed in the same manner as the center ring seal surface 34a, but is not covered by the flange 3 2 on the drawing surface. Next, the center rings 35 and 36 are prepared and set separately. The central ring sealing faces 32a, 34a of the exhaust pipe 102' 103. In each of the center ring sealing faces 1 la, 32a, 34a, 2060-10557-PF for accommodating the center rings 35, 36 are formed; Dwwari' 14 201100685 Groove 'but omitted in Figure 5. Next, 'the flanges of the both ends of the pipes 1〇1 having the heaters and the flanges 32 and J of the iron-discharging i pipes 102 and 103 are placed in an opposing manner so that they are already set. The center ring Μ and % in the state of the center ring surface are in contact with each other so as to be disposed on the center ring seal surface Ua of each flange u. Figure 6(a) shows the state at this time.

Ο Next, a 帛 6 (b) diagram showing the contact portions of the exhaust pipe 103 and the flanges 34 and 11 having the pipes of the heaters ι 〇 为 is represented as shown by the clamper (Clamper) 37 and the screw (not shown), the exhaust pipe 1〇2 is locked with the flanges 32 and u of the pipe 101 having the heater, and the contact between the two is more strongly fixed. The flanges 34 and u of the pipe 1Q1 having the heater are locked to more strongly secure the contact therebetween. By this, the inner rings 35 and 36 can maintain the airtightness inside the piping ι〇 and the exhaust pipes 102 and 030. In the above description, one of the pipes 101 having the heater is connected between the exhaust pipes 102 and 103, but the exhaust pipe, that is, the vacuum vent (four) 6 exhaust port from the scribe device or the like, to the detoxification device 1 In order to maintain the temperature in the piping at a suitable temperature or higher, it is preferable to provide a plurality of pipes 1〇1 having heaters. In this case, as shown in Fig. 7(a), first, the pipe 丨〇ib having the first heater is placed at the most upstream, that is, the exhaust port of the vacuum pump 1〇6, and then the first one. The portion of the heater that is not equipped with the g 101b is provided with a second heater. 0 such that # 'not all pipes require a heater. If the pipe is about 4m, a heater is installed, even if it is longer than 2〇60-l〇557-pF; Dwwang 201100685 is equipped with two to three heating. This has an effect of preventing the adhesion of the gas reaction product in the exhaust pipe as much as possible. Fig. 7(b) is a cross-sectional view showing the piping having the heater in the figure. In the figures f7(4) and 7(b), the component symbol "105" is an exhaust pipe representing the same pattern as the exhaust pipes 1〇2 and 1〇3, and the other component symbols are related to the 3rd, 5th, and 6th. (a), 6(b) The same figure represented by the same symbol "is the same component as shown in Figs. 3, 5, 6(a), 6(b). As described above, when the pipe m having the heater according to the first embodiment of the invention is used, the pipe 1〇1 having the heater can be attached to the exhaust pipe 1〇2, 1〇 via the flange u. 3. It is possible to simply set the tm with the heater to the necessary space, whereby the efficiency of the heater setting work can be improved. The pipe 101b having the heater shown in Fig. 1(a) has the same effect. (Second Embodiment) (Description of the configuration of the pipe having the heater (heating device)) Figs. 8(a) to 8(c) are views showing the configuration of the pipe 104 having the heater according to the second embodiment of the present invention. . Fig. 8(a) is a cross-sectional view of the pipe 1〇4. Fig. 8(b) is a side view seen from the right side shown in Fig. 8(a), which corresponds to the figure 8(a). A cross-sectional view of the I ΐ-π line; and Fig. 8(c) is a perspective view of the heating device 40. In the second embodiment, the difference from the first embodiment is the configuration of the heating device 40, particularly the diffusing portion 53b, which is not shown in Fig. 8(c). In the figures 8(a) to 8(c), the elements denoted by the same reference numerals as in Fig. 3 represent the same elements as those shown in Fig. 3. 2〇60-l〇557-PF; Dwwang 201100685 The following is a detailed description of the heating device. In particular, the configuration of the heat spreader unit (the configuration of the heating device) is the same as that of the heating unit 40, as shown in Fig. 8(4), and is not constituted by the heater portion 53a. The heater portion 53a is a skin, a θ 丄, a m Π 疋 疋 疋 41 41 from the inner center, and an insulation 42a surrounding the hair body 41 And a sheath-shaped object that covers the hairpin 41 and the insulator 42a, and a slightly rod-shaped object composed of the ^^/bovine 42b, the other end of which is received by the sheath member 42h, the noon 42b, noon 42b The other side is bent 9〇

As an introduction part of a wire and a thermocouple. X

The diffusing portion 53b is a cylindrical tubular member 43 that covers the periphery of the heater portion 53a by the frost 3gA, and is attached to the surface of the cylindrical member 43 by the cylindrical tubular member 43. The slice 44 is formed. 'The slice 4 is as shown in the figure 8(a) to 8(c), and the center of the '.,, & $ coffee extends radially if

(The position of the inner wall of the official member M2 is provided at equal intervals, and is disposed in the tubular member 43 J along the longitudinal direction of the tubular member 43. The sheet 44 is placed in the tubular member. The surface of the surface of the surface 43 is parallel to the longitudinal direction of the heater portion 53a. In the drawing, the fin 44 is parallel to the heating element 41, but it is also possible to dissipate heat. In addition, the diffusing portion 53b is integrally formed in the longitudinal direction, but may be divided into a plurality of portions as shown in the drawing. In consideration of the convenience of production, it is preferably a divided form. The tubular member 43 and the ore piece 44 of the portion 53b are the same as those of the first embodiment, 〇60-l〇557-PF; Dwwang 17 201100685', which is excellent in corrosion resistance using various gases used for semiconductor manufacturing, and The material of the heat dissipating material and the heat transfer material is, for example, stainless steel. As shown in Figs. 8(a) and 8(b), when the heating device 4 is placed in the pipe 12, the heater portion 53a is along The pipe 12 is disposed in the central axis direction and is disposed substantially in the pipe 12 At the same time, the longitudinal direction of the heater portion is the same as the direction of the airflow. The gas introduced into the pipe 104 having the heater flows in the longitudinal direction of the heater ??? Between the 44th, the diffusion between the fins of the diffusion portion is a diffusion chamber for forming thermal energy. (Effects) According to the piping 1〇4 having the heater according to the first embodiment, the eight fins 44 are spaced apart. It is disposed around the surface of the heater unit, and its development surface is parallel to the longitudinal direction of the heater portion 53a. Therefore, the air flow is not hindered, and the heating device 40 can be easily disposed inside the pipe 12. Therefore, the inside of the pipe 12 can be heated with good efficiency. Also, since it is not cloud|your political sheep; it needs to be wound around the entire pipe like a belt heater, and it does not need to be a crying machine. The addition of the sub-structure piping is set to 4, and the twisting can be used to make the addition and the state become a simple mechanism. Since the other composition 'has the first ^ 9, ΛΛ ^ π w implementation Morphologically related to heating The same configuration as f, and ^ ^ + ^ The same effect as the piping having the heater according to the first embodiment. (Modification of piping having a heater) Fig. 9(b) and ι〇(), 10 (0) shows a 2〇60-l〇557-PF of the second embodiment; Dwwang 18 201100685 * A cross-sectional view of a configuration of a pipe having a heater according to a modification. In the figure, with 8U) The elements denoted by the same reference numerals in Fig. 8(c) are the same elements as those shown in Figs. 8(a) to 8(c). In the piping 1〇4a with heaters in Fig. 9(b) It is the same as that shown in the eighth (a) to eighth (c), in the case where the diffusion tab 4 is provided in parallel with the direction in which the airflow is provided on the development surface 2 of the tubular member 43a and the fin. However, the fins 44a of the diffusing portion 53c are separated into a plurality of q along the airflow, and are arranged to be spaced apart from each other, and are different from the eighth to eighth (4). In the pipe 104b having a heater in Fig. 10(C), the heating device 4A is the same as that shown in the figure of f 8U) to 8 (c), and is the portion corresponding to the setting place of the heating device: 40. The diameter of the pipe (5) is larger than the diameter of the pipe 12a at both ends. In the pipe ii4c with the heater in the io (d) diagram in the diffuser

5, the fin "4a is disposed in the tubular member 仏, the fin "a development surface is arranged in parallel with the direction of the airflow - the point is the same as shown in the eighth (a) to 8 (c), but The B and J release sheets 44a of the diffusing portion 53 are separated into a plurality of airflows along the airflow, and are arranged at intervals therebetween, which is different from those shown in Figs. 8(a) to 8(c). In addition, the diameter of the pipe 12a of the blade which is placed in the installation place of the heating device 4A is larger than the diameter of the bearing 12a at both ends, and also in the eighth (a) to eighth (c) drawings. The show is different. The material of the tubular member 43a and the fin 44a in the diffusing portion is the same as that of the tubular member 43 and the fin of the second embodiment, and stainless steel can be used. In addition, the length and the length of the heater portion may be substantially 2〇60-l〇557-PF; Dwwang 19 201100685 is the same tubular member 4 3 a set to the female &&&& All of the fins 44a can also be lengthwise shorter than the length of the heater section / 4_4. The blade negative is the same. The element 43a is formed by inserting a plurality of units into the heater unit in order to form a unit by forming a plurality of fins 4 arranged in the tubular element 43a. According to these configurations, the atmosphere heated by the heat energy of the Korean film 44' 44a is disturbed by the flow of the gas, or the circulating gas itself which is heated is disturbed, and the center of the pipe 1〇4a]〇4c can be made. The temperature distribution from the portion to the peripheral portion is further uniformized. This phenomenon is also performed in each unit in order, and the temperature uniformity from the center of the tube 12 to the center of the heart is increased. The present invention has been described in detail by way of embodiments, but the scope of the invention is not limited by the specific examples shown in the above embodiments, and the above embodiments are not included in the scope of the present invention. Within the scope of the present invention. 3 For example, in the above embodiment, stainless steel is used as the diffusing portion.

The material of the tubular members 23, 23a, 43, 43a and the Y pieces 24, 24a, 44, 44a of 51c, 51d, 53b, 53c is not limited thereto, as long as it is corrosion resistant to the gas used for the manufacture of the two conductors. The metal material can be a semi-material if it is corrosion-resistant, and particularly heat-dissipating, heat-transfer and other properties of the material is better. Further, the surfaces of the fins 24 24a, 44, and 44a of the above-described diffusing portions 51c, 51d, 53b, and 53c are smooth, but the unevenness may be formed to increase the area of Table 2〇60-l〇557-PF; Dwwang_201100685, And improve its heat dissipation performance. Further, the plurality of fin groups 52 are regularly arranged along the longitudinal direction of the heater portion 51a with a predetermined interval, and the fins 24 of the fin group 52 are arranged around the heater portion 51a. The fins 24 may be randomly arranged around the heater portion 51a in one turn and at equal intervals. This modification is also applicable to the heating device wa of Figs. 9(a) and i(b). Further, the invention has a heater f which is applied to a part of the exhaust pipe, but can be used alone instead of the oven. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a side view showing a conventional example of a heating device. Fig. 2 is a side view showing other conventionally provided piping. Fig. 3 is a schematic view showing the configuration of a pipe of the crucible heating device according to the first embodiment of the present invention. 4(a) to 4(c) are diagrams showing a configuration of a support unit of a pipe having a heating device according to the first embodiment of the present invention, wherein "(8) is a side view, 4U) is from the 4th (b) The view is taken from the left side of the support unit of the figure, and the fourth (4) view is the view from the support unit of the 4th (1) figure. Figure 5 of the heart is a perspective view (one), ^ . ^ The invention is not shown In the first embodiment, a method in which a pipe of a heating device is attached to an exhaust pipe is provided. Figs. 6(a) and 6(b) are views showing a first embodiment of the present invention having 2060-10557-PF; Dwwang 21 201100685 Figure (2) of the method of installing the piping of the heating device to another piping, wherein the sixth (a) is a perspective view and the sixth (b) is a section along the line of the sixth (a) Fig. 7(a) is a schematic view showing a configuration in which a pipe having a heating device according to a first embodiment of the present invention is installed in a part of a gas distributor connected to an abatement device from an etching device, and a s 曰&gt; 双弟/Cb) A cross-sectional view of a pipe having a heater. Fig. 8(a) is a side view showing a second embodiment of the present invention The configuration of the piping with the heating device. 笙0/u, Hu, <constitution' Figure 8(b) is a sectional view along line 8(a) II-II; the eighth (, music iHc) diagram is The oblique view of the heating device. Fig. 9(a) and 9(b) are cross-sectional views of a spare stone and a row, showing the piping with the heating device related to the modified example of the actual transmission form of the present invention. 10(a) to 10(d) is a cross-sectional view showing a configuration of a piping having a steam negative heating device according to a modification of the aspect of the present invention. [Main component symbol Description] 1~ piping; 2 ~ strip heater; 3~ piping; 3a~bend; 4~heater; 11~ flange; 11a~ center ring sealing surface; 12~ piping (tubular part); 2060-10557 -pF;Dwwang 22 201100685 . 12 a~ piping; 13~ heating device; 13a~ heating device; 14~ wire; 15~ thermocouple (temperature measuring device); 21~insulation; 22~sheathing part; Shaped parts; M 23a ~ cylindrical parts; 24 ~ fins; 24a ~ fins; 31 ~ piping; 32 ~ flange; 32a ~ center ring sealing surface; 3 3 ~ Piping; ❹ 3 4~ flange; 34a~ center ring sealing surface; 35~ center ring; 3 6~ center ring; 37~ holder; 40~ heating device; 40a~ heating device; 41~ heating element; 42&amp;~Insulation; SOSO-lOSS'y-PF^Dwwang 23 201100685 42b~sheathing parts; 43~tubular parts; 43a~tubular parts; 44~ fins; 4 4a fins; 51 a ~heater parts; 51b to a diffusing unit; 51c to a diffusing portion; 51 d to a diffusing portion; 52 to a fin group; 53a to a heater portion; 5 3 b to a diffusing portion; 5 3 c to a diffusing portion; 101 to a pipe having a heater 101a~ piping with heater; 101b~ piping with heater; 101c~ piping with heater; 102~exhaust piping; 103~exhaust piping; 104~ piping with heater; 104a~ with heater Pipe; 104b~ pipe with heater; 104c~ pipe with heater; 1 0 5~ exhaust pipe; 2060-10557-PF/Dwwang 24 201100685 106~ vacuum pump for etching device; 107~ decontamination device .

2060-10557-PF; Dwwang 25

Claims (1)

201100685 VII. Patent application scope: ι_ A pipe having a heating device, comprising: a tubular member; and a heating device disposed on an inner side of the tubular member; wherein the heating device has: a heater portion; and a heat energy The diffusing portion has a plurality of fins disposed around the heater portion. 2. The pipe having the addition (9) as described in the scope of the application of the invention, wherein: at least the heat generating portion of the heater portion is in a rod shape; and the plurality of cymbals are disposed in the heater portion The circumference is arranged in a circle' and there is a gap between them. 3_ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ In one of the fin groups, one of the fin groups is arranged so as to be arranged in a circle around the heater portion with a space therebetween. 4. The device having the heating device as disclosed in the third aspect of the patent application is characterized in that the face of the fin is oriented toward the long side of the heater or toward the heater. The oblique direction of the long side of the cymbal. 5. The heating device according to the item 2 of the patent application scope is characterized in that the surface of the fin is parallel to the side or inclined with respect to the long side direction. The pipe having a heating device according to any one of claims 1 to 5, characterized in that the long side of the heating portion is 2060-l 557-PF; Dwwang 26 201100685. It is composed of a tubular member that covers the periphery of the heater portion and the plurality of fins attached to the tubular member. "7. The dispenser having a heating device as described in claim 1 is characterized in that the heater portion is covered by an insulator surrounding the heating element of the core portion. a candle, a cover, and a sheath member of the insulator and the insulator. J is a slightly rod-shaped object, 1 the sheath part of the package, the other end /, 鳊疋 到 码 码 疋 疋 疋 疋 at least A. The barrel of the lead wire lead-in portion 8. The pipe of the device of the patent application is characterized in that it has a flange at the end, a tube. In: the coronation wear &amp; eight ..., and the two tubes through the flange are installed in the other two 2060-10557-PF; Dwwang