TW201043976A - Coupled-line structure of the high-frequency capacitance tester and its test method - Google Patents

Abstract

The present invention relates to a coupled-line structure of the high-frequency capacitance tester and its test method, which covers a coupled-line group on a substrate, the coupled-line group is composed of a first coupled-line extending from a straight line and two second coupled-lines on the substrate and the same straight line, the first end of the first coupled-line is a signal input terminal, its second end a signal output terminal. The first end of each second coupled-lines is respectively grounded, the two ends of the two second coupled-lines face each other and have a gap for electrical connection with a capacitor under test, so that a measuring device can be used to measure a scattering parameter, and on the basis of the scattering parameter to compute the capacitance value of the capacitor under test that corresponds to the scattering parameter.

Description

201043976 VI. Description of the Invention: [Technical Field] The present invention relates to a high-frequency capacitance tester for a coupled line structure and a test method thereof, and more particularly to a method of coating a coupled line group on a substrate for electrical power to be tested The splicing device can measure a scattering parameter of the high-frequency capacitance tester by using a measuring device, and then obtain a capacitance value to be measured corresponding to the scattering parameter. [Prior Art] 基本 According to the 'Generally Known Capacitor', the basic structure is composed of two metal plates, and the middle interval is made up of insulating media. The size of the capacitance depends on the area of the metal piece, the spacing between the two plates, and The two plates (four) are f constants. The first capacitor with a record was invented by Ewald Georg von Kleist in 1745. The structure is a glass bottle with a metal film on the inner and outer layers. There is a metal rod inside, one end is connected with the inner metal film, and the other end is connected with a metal sphere. In January 1746, a Danish physicist, Masonbrook, also independently invented the structure very similar to 〇 = capacitance H, which was not widely known at the time. Since Masenbruck taught at Leiden University at the time, he was named Leiden, as in the reference (1). 'With the rapid development of modern communication systems' capacitors are widely used in high-frequency bypass, cross-connected capacitors and DC blocking (DC block) such as reference [2-3], etc., if combined with inductors, can sigh 30 For filtration. Leather goods such as references [4-6], or modulation circuits such as reference (7). In the widespread use of capacitors, the technology of measuring capacitance is becoming increasingly important. The specific method of witnessing the capacitance tester is as follows: using the LCR meter measurement, the principle is that the AC, the detonated towel field and the frequency of the exchange k number are given to the capacitor to be tested, and the current of the capacitor is calculated by the internal processing of the instrument. The capacitance value of the capacitor to be tested can be measured. m. This ship (3), such as & Plus 3 201043976, etc. proposed to increase the analog-to-digital number ((D), Digitai, 胤) circuit based on the transmission Schering bridge circuit, digital to analog (Digital t〇Anal〇g, Mc) circuit, Integrated circuit and automatic capacitance measurement method for personal computer [8]. p, Ar〇nMme et al. proposed three architectures' to use a basic RC series circuit, plus a diode and a switch, and to calculate the capacitance through the charge and discharge time of the capacitor, as described in reference (9). MA red fine touch is proposed on the unknown component, plus the electric view of the Wei surface, calculate the voltage or current on the component and the other difference 'can measure it'. The unknown component is an inductor or capacitor. Literature [10]. This paper proposes a new method for measuring high-frequency capacitance values using planar circuit structures and network analyzers. References [1] http://wikipedia.tw/ [2] D. Lacombe, J. Cohen, Octave-Band Microstrip DC Blocks (Short Papers), M IEEE Trans. Microwave Theory and Tech., Vol. 20, no 8, pp. 555-556, Aug. 1972.

[3] C.Y. Ho, “Analysis of DC Blocks Using Coupled Lines (Letters), " IEEE Trans. Microwave Theory and Techniques, Yol. 〇 23, no. 9, pp. 773-774, Sep. 1975.

[4] G. L. Matthaei, L. Young and E. T. T. Jones, Microwave Fi 1 ters, Impedanc-Matching Network, and Coupl ing Structures, Artech House, Debham, Mass., 1980.

[5] R. E. Collin, Foundations for Microwave Engineering, Second Edition, McGraw-Hill, N. Y., 1992.

[6] J. S. Hong, M. J. Lancaster, Microstrip Filters for RF/Microwave Applications, Wiley, N.Y., 2001.

[7] S. Sabaroff, “Impulse Excitation of a Cascade of Series Tuned Circuits, M Proceedings of the IRE, Vol. 32, no. 12, pp. 758-760, Dec. 1944. 4 201043976 -[8] M. Fonseca da Silva, A. Cruz Serra, "Capacitance measurement method, M IEEE AFRICON 4th AFRICON, Vol. 1, pp. 247-250, Sept. 1996.

[9] P. Aronhime, G. Cecil, “A new method of capacitance measurement, ** Proceedings of the 35th Midwest Symposium on Circuits and Systems, Vol. 1, pp. 718-721, Aug. 1992.

[10] MA Atmanand, VJ Kumar, VGK Murti, “A novel method of measurement of L and C,” IEEE Transactions on Instrumentation and Measurement, Yol. 44, no. 4, pp. 898-903, Aug. 1995. [11] E. Μ. T. Jones, “Coupled-Strip-Transmission-Line Filters and Directional Couplers,” IEEE Trans. Microwave Theory and Tech., vol. 4, pp. 75-81, Apr. 1956.

[12] G. I. Zysman and A. K. Johnson, “Coupled Transmission Line Networks in an Inhomogeneous Dielectric Medium,” IEEE Trans. Microwave Theory and Tech., vol. 17, pp. 753-759, Oct. 1969.

[13] Pozar, DM, Microwave Engineering, Second Edition, New York: Wiley, 1998. 〇 [Summary of the Invention] The main object of the present invention is to provide a high frequency capacitance tester for a wire structure and a test method thereof, mainly Using the planar circuit structure and the network analyzer to measure the high-frequency capacitance value, the actual circuit measurement and simulation results show that the analog value and the measured value are quite consistent, so the industry can be fully applied to the production line, thus having The structure is simple, convenient to design, quick and convenient to measure, and easy to manufacture to greatly reduce production costs. In order to achieve the above-mentioned effects, the technical means adopted by the present invention applies a coupling line group on a substrate, the first coupling line of the coupling line group extending from the straight line and the second coupling line of the two positions on the substrate and on the same 201043976 line. The second end of the input end is a u-wheel; the first end of the first end is a signal truncation, and the measuring device can measure the high-frequency electric two = connection = after calculation The value of the capacitance to be measured corresponding to the scattering parameter is obtained.俾 【 【 【 · · 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本The plane electric_structured oil path analyzer reaches the high-frequency capacitance value _ industry' and can be connected by the _---------------------------------------------------------------------------------------------------- The butterfly is analyzed according to the reference [11-12]_) and the Qilai analysis method (such as the reference (10)), so it has the characteristics of simple structure, convenient design and production, and the actual circuit measurement and simulation results show that The value is consistent with the system, so it can be applied to the surface.实施 · The present invention 2.1 implementation of the basic features of the present invention, as shown in Figure 5 and Annex II, the basic technical features of the present invention is a substrate (J 〇) is covered with a coupling line set (20), And the coupling line group (2〇) is composed of a first coupling line (21) extending in a straight line and a second matching line (22) on the same line (2) on the same line, for waiting The capacitor C is electrically connected. A measuring stud is connected to the conductive studs (216) (217) provided with external threads at the signal input end (210) and the signal output end (211) to measure the scattering parameters. The 6 201043976 scattering parameter calculates the corresponding capacitance value of the capacitor c to be tested. In order to facilitate the review of the present invention, the components of each of the components are detailed as follows. 2.2 Substrate 'The substrate (10) of the present invention is mainly used for the coupling line group. Referring to Figure 5 and Annex 2, (10), the invention of the 'Jiangcheng Gao_Jun Tester is continued. In a specific embodiment, The light wire group (20) is formed on the substrate ((8) on the substrate by printing or _)

(10) The plate used is a fr-4 steel double-sided panel, the substrate (10) has a thickness of 丨.6 mm, a relative dielectric constant of 4.3, and a substrate (10) size of 5. 2·3 Coupling line group, as shown in Figure 5 and Annex II, the light-weight wire group (2〇) of the present invention comprises a straight line-strand-light line (21) and two second stitching lines (22) The first engagement line (21) and the first-light connection line (22) have a first end and a second end, respectively, wherein the first end of the first-to-conversion line (2) is a signal input end (210)' The second end is - signal output end (2) 丨) ^ In addition, the second yoke first coupling line (22) is located on the same line of the substrate (1 〇), and is parallel with the first coupling line (21) and can In the position where the coupling is generated, the first end of each of the second coupling lines (22) is grounded respectively, and the second ends of the two second coupling lines (22) are opposite each other and have a gap (22〇), the gap ( 220) The capacitor c to be tested is placed, and the second end of the two second engagement wires (22) respectively supply the containers (the two ends of the two are used for electrical bonding, and can be measured by one measurement) The device takes a scattering parameter of the still-frequency capacitance tester, and according to the scattering parameter, the capacitance value to be measured corresponding to the scattering parameter can be obtained by calculation. Please refer to FIG. 5 for the standardized coupling group (2〇). In order to reduce the substrate (1〇) ruler 201043976 inch and make the even mode impedance of the wire group (20) 100 ohms, the odd mode impedance is 5 ohms, and then the signal input end (210) and the signal output end ( The characteristic impedance of 211) is 5 ohms for the purpose of improving the measurement accuracy. Furthermore, in the experimental example of the present invention, the line widths of the first coupling line and the second coupling line of the coupling line group (2〇) The distance between the first coupling line (21) and the second coupling line (22) is 0.43 mm, and the lengths of the first coupling line (21) and the second coupling line (22) are respectively 21.42 mm. The spacing of the second end of the first engagement line (22) is imm. Moreover, the first end and the second end of the first coupling line 21 (21) respectively have an outwardly enlarged trapezoidal section (212) (2ι3), And at the enlarged end, there is a rectangular section (214) (215), a rectangular section (214) is used as the signal input end (210), and another rectangular section (215) is used as the signal output end (211). The length of each of the rectangular segments (214) (215) is 2 mm, and each rectangular segment (214) (215) Line width 3.1mm. 2.4 Measuring device The specific embodiment of the measuring device of the present invention is a vector network analyzer. The vector network analyzer for measuring the germanium device is very commonly used to measure the radio frequency and microwave scattering parameters. The measurement tool is not further disclosed in the example of the figure. The vector network analyzer used in the present invention comprises an output port connected to the signal input terminal (210), and a signal output. The terminal (211) is connected to the receiving end of the signal connection, and the vector network analyzer outputs a measured signal from the output port to the second coupling line (22) via the first coupling line (21) and receives the signal. Receive signals to measure the scattering parameters. And the vector network analyzer is embedded in an electromagnetic simulation software IE3D. The LlneGauge will calculate the impedance and electrical length (Θ) of the line group (20) for the microstrip line structure 201043976 inch calculation. The circuit simulation is performed with the electromagnetic simulation software IE3D. The circuit simulation sets the 2GHz as the center frequency' and calculates the electrical length (Θ) of the coupling line group (2〇) with the quarter wavelength of the highest test frequency, and the electrical length ( Θ) is 90 degrees. The measuring device uses the impedance matrix of the coupled line group (20) and the odd and even mode analysis method to obtain the scattering parameter, and the line width and the line spacing of the coupled line group (2〇) are the even mode impedance (z〇e). The odd-mode impedance (Zoo), the relative dielectric constant of the circuit substrate (1〇), and the reflection coefficient of the signal output end (211) and the signal strength of the signal input end (21〇). According to Figure 1 (a) and Figure 5, the high-frequency capacitance tester of the present invention has left-right symmetry characteristics, and the circuit can be directly cut to perform odd and even mode analysis, as shown in the figure. - (6), (c).

Zw, Z〇e are the odd-mode and even-mode impedance of the light-bonded wire group (20) (Z〇e=l/YQe, Zoo=l/Y is smaller than the electrical length of the coupled wire group (20), and c is to be Measured capacitor. >Γ 2丨1 A 213 ζ丨/ X 一^21 Ζ22 223 224 h ^31 ^32 233 Ζ34 h ζ-ζ4! Ζ42 243 244_ Λ. First analyze the even mode circuit, as shown in Figure 1 (6) Show, the _ _ line impedance matrix, as shown in equation (1) 'for circuit analysis, you can observe the boundary condition is lH4 = (mVl = 0 〇Γ τ / 「 "7 π _ ^ (1) (2) ht road ' (four) _ ((10) Hexiang) Admittance moment analysis [11_13]' Observable boundary condition is 9. (3) 201043976 Ί: Yn Υη Υη Ά, ' X h ^ Υ22 ^3 Υ24 h Γ3» ^32 ^33 ^ η Λ_ /4. υ42 υ43 r44 Ά. After the boundary conditions are sorted, the overall odd-mode circuit input impedance can be obtained. &(4)>2C + K44 (4) After calculating the odd-mode and the damaging reactance , the anti-secret number of the phase-coupled mode, and re as shown below ❹ jcolC + Y44

Kzl±= r22〇^2c+rJ~r24r42~z〇 Z:n+ZQ j^2C + Y44 — Y^ic+YA4)-Y^+z〇 z

G

A 一 Z0 ^22 —Ζί2Ζ2〗 I : 22 After finishing, you can (4) Lai Zhi (4). And Fe are as shown in formula (5) and formula (6) (5) r _ i1 - Z〇Y22 ) 〇 a2C + YM) + Zny,, yr (ι+z0y22 Xj02c+y44) - zqy24y42

r - ZuZ^ ~^n^2\ ~ΖηΖΛ ZUZ22 ~Zl2Z2l -bZuZ0 The scattering parameter formula for reflection coefficient conversion [13] is as shown in equation (7) and equation (8) 丨\丨l=I(re + ro) 13⁄4 丨= jade ([-Γ〇) available scattering parameters | Sn | and 1S21 | expressions as shown in formula (9), formula (10), respectively, team 4 (M22 II21 medicine 2^zuz22 z12z21 +zuz0 {uzj^c^yzj^J ( 6) (7)(8) (9) (10) 201043976 丨知丨: 2 ^^-Ζ12Ζ21 -ZnZQ {l-Z0Y2Jja2C+Yu)+Z0Y24Y42 ^uz22~z12z2l+zuz0 (1+z0r22X/-6>2C+r44)-z0r24r42 Where z of the impedance matrix and the admittance matrix Y formula are as shown in equations (11)-(18) Zu = = Z22 : =Z44 = cote+ Z00 cote) (11) z, 2: = z21 : = z34 = Z43 = ~^(Zoe COt^-Z^COt^) (12) z]3: =z3 丨: = Z24 = z42 = -^ZoeC^-^〇〇CSCe) (13) zI4 : =241 = = z23 =( 4 CSC0 + Z.csc<9) (14) zY21 = ^33 = :^44 ~ + Y〇〇C〇X0) (15) = }21 = ^34 = :,43 = -j(YoecotO-Y00cote ) (16) ^,3 = = r3l = = -^42 = z^{Y〇e^&-Y〇〇CSC0) (17) Yu- :^23 = =3⁄4 = kY0e^e + Yoo^G (18) 肆· Circuit characteristics simulation analysis, as shown in Figure 2 (a), (b), first with high frequency simulation software Microwave Offi Ce simulation, set the circuit center frequency to 2GHz, the coupling line group (20) gas length 〇Θ is 90 ° 'freely given capacitance value <: 6.8, change the different odd and even model resistance Zoo, Zoe 'Observation of the changes, the results are shown in Figure 2 (4), (6). , Z〇e=l〇〇 (diamond mark Ο angle mark), Ζ〇〇=50Ω, Z〇e=200 (cross mark and mark), and can be observed from the figure, if the ultimate odd model impedance Zoo The smaller the 丨丨 resonance frequency will move to the high frequency; the larger the ultimate model impedance Zoe, the higher the |S2,| resonance frequency will move to the low frequency. The results show that changing the odd-even model impedances Zoo and Zoe does not have a significant impact on the circuit characteristics. Therefore, it is easier to achieve the odd-hard impedance of the A engraving machine Ζ^5()Ω, the couple impedance z is called 00 ^ 201043976 It can be seen from the simulation results that the structure has a rejection characteristic, so it is necessary to know that the dimension I is _re needs to be equal to Γ. And to. Can be deduced / (8) "cot'A-c. Slightly 2ZAc.吟 s2 + i)+c〇tfc+z^ Let the electrical length of the light-weighted wire be brought into the upper formula and then sorted to obtain the capacitance to be tested. ls21|Resonant frequency point relationship' is shown in equation (10). Where ^ is the propagation constant, (Μτγ/α, Λ is the wavelength)' f is the actual length of the coupled line group (2〇), and the meaning and / are respectively the center frequency of the bridge and the resonance frequency point of the heart, and fff is the ratio value. Cosf^ c= (VY-xl°3 ipF) riQs 27fsm-l(Z〇e+Z〇〇) (19)

Wo 7 Please refer to Figure 3 to set the circuit center frequency to 2GHz, odd and even model impedance ZM=5GD, Z〇e=lG (m and age line group (10)) electrical length <9 $ 9〇. After introducing the formula (19) of the above derivation, the numerical analysis software Matiab is used to calculate and calculate the edge map, and the relationship between the capacitance value to be measured and the IS"|resonant frequency point can be plotted, for example, when the capacitance value to be measured is 〇pF when 'IS' | resonance frequency point is 2GHz. When the frequency is 1 to 2 GHz, it changes linearly. When the frequency is less than 1 GHz, it changes exponentially. That is, when the value of the capacitor to be measured is large enough, the influence of the frequency of the |&| Smaller. It can be observed that when the voltage to be measured is large, the iSni resonance frequency point moves to the low frequency; on the contrary, if the capacitor c to be tested is small, the resonance frequency point moves to the high frequency. For the simulation and implementation results, please refer to Figure 4 (a), (b), the circuit simulation of the present invention is carried out using the electromagnetic simulation software 12 201043976 IE3D, given a center frequency of 2GHz 'odd, even model impedance Ζοο= 5〇Ω, z〇e=1 〇〇Ω, and the electrical length of the coupled line is 0°, and then simulate different capacitance values c to be 0·3pF (diamonds), 0.7pF (squares), 1. 5pF (2 angle mark), 3pF (cross mark and mark) and 6.8pF (star mark) five capacitance values, the change situation is shown in Figure 4 (a), (... can be observed when the capacitance value When C is 0.3, 0.7, 1.5, 3, and 6.8 pF, the 丨s21| resonance frequencies are 1. 513, 1·169, 0. 868, 0. 637, and 0.431 GHz, respectively. 5。 The substrate (1〇) material used for the circuit is FR 4 〇 double-sided, the thickness of the substrate (10) is 1. 6im 'relative dielectric constant is 4.3. Bring the above values into the electromagnetic Line Gauge 'includes the microstrip line structure size calculation in the simulation software IE3D'. Available in .3. lmm, W2=l. 36inni, W3=0. 43 coffee, LWinm, L2=2 ugly, L3=21. 42 , , input and rotation (31) The impedance is 5〇 ohm, the line width is Wi=3. 丨, any given length L=5 coffee 1 is convenient to make. The circuit structure is shown in Figure 5, the actual circuit is shown in Appendix 2, the circuit size is 5 It was moved (10) and measured with the vector network analyzer Anritsu-37269D. Please refer to Figure 6(a) and (6), where Figure 6(a)(b) shows the scattering parameters of the circuit 丨Sl1丨丨&1丨 actual measurement results, respectively measure the different capacitance values C to be 〇3pF (diamond type), 0.7PF (square (four), coffee (triangle), secret (cross and standard) and 6. 8.8, 1. 086, respectively, when the capacitance value c is 〇3 m 5, 3, and 6.8 pF, respectively. 〇· 833, 0 621 and 0.416 GHz. ^ * Please refer to Figure 7. The actual measurement and the _simulation comparison chart for changing the different capacitance values are quite high. The value is quite high. As shown in Table 13 201043976, when the capacitance to be measured is 〇·3pF, the resonance frequency points of the theoretical calculation, IE3D simulation, and actual measurement are 1.49, respectively, 1. 513, 1. 388 GHz. The capacitance errors of simulation and actual measurement, theory and actual measurement are respectively G.153, G._)K error percentages are 〇.51%, 〇·326%). When the capacitance to be measured is 〇. 7pF, the resonant frequency points of theoretical calculation, IE3D simulation, and actual measurement are 1.165, 1.169, 1.086 GHz, respectively. The simulated and measured, theoretical and measured capacitance errors are 0.194, G. · 153pK error percentage tb age 〇. 277%, 〇. 218%). When the capacitance to be measured is 1·5pF, the resonance frequency points of theoretical calculation, IE3D simulation and actual measurement 〇 are respectively 87. 87, 〇. 868, 〇. 833GHz, and the capacitance errors of simulation and actual measurement, theory and actual measurement are respectively The percentage error of 0.277 and 0.161pK is 〇. 185%, 0.107%). When the capacitance to be measured is 3pF, the resonance frequency points of theoretical calculation, IE3D simulation and actual measurement are 〇. 641, 〇·637, 〇·621GHz, respectively. The capacitance errors of simulation and actual measurement, theory and actual measurement are respectively 〇·2 〇 8, 0.221 pF (error percentages are 〇._%, 〇. 074%). When the capacitance to be measured is 6.8 pF, the resonance frequency points of theoretical calculation, IE3D simulation and actual measurement are respectively 〇. 437, 0.43 Bu 0· 416 GHz, and the capacitance errors of simulation and actual measurement, theory and 〇 measurement are respectively 725, 0. 726pF (the error percentages are 〇.1瞧, 0.107% respectively) 〇陆. Conclusion By the above technical features of the construction 'the invention can indeed use the planar circuit structure and the network analyzer for high-frequency capacitance values Measurement, after the actual circuit measurement and simulation results are not 'simulated value and measured value is quite consistent, so the industry can be fully applied to the production line, so it has a simple structure, convenient design, quick and convenient measurement and easy to make Significantly reduce production costs and other characteristics. The scope of the patents, the scope of the patents, and the versatile embodiments of the present invention are not intended to limit the invention, but other contents, characteristics and spirits of the following claims are included in this (4) Special ··. This issue has been in compliance with the requirements of the invention patent, and has filed an application in accordance with the law. I would like to ask the respective bureaus to approve the patents according to law and transfer the legal rights of the applicants. [Simple diagram of the diagram] Figure-(a) is a schematic diagram of the capacitor effect material circuit of the present invention. Figure 1 (b) is a schematic diagram of an even mode circuit of the present invention. Figure 1 (c) is a schematic diagram of the odd-mode circuit of the present invention, which is a graph of the difference between the odd (Z.), the even (4) mode impedance, and the Na'0 simulation scattering parameter ISu|. Fig. 1(b) is a diagram showing the scattering relationship of the odd (z..), even (z〇e) mode impedance, and mw〇 simulations of the present invention. The capacitance value of Figure 3 is close to the frequency of the 丨S2il spectral frequency (0.5 to 2 GHz). Figure (8) is a different capacitance value of the present invention; (excitation analog scattering parameter 丨% 丨 relationship diagram. Figure 4 (b) is a ffi3D simulated scattering parameter 不同 knowledge relationship diagram of different capacitance values of the present invention. Figure 5 high frequency capacitance test The circuit structure of the device is shown as a circle. Figure ', (a) is a relationship diagram of the actual measurement of the different capacitance values of the present invention. Figure /, (b) is the relationship between the actual measurement of the different capacitance values of the present invention. Figure 7 is a schematic diagram comparing the actual capacitance measurement and pressure 3〇 simulation of the present invention. Annex 1 capacitance difference and |S〗 i | Resonance frequency point relationship table. 15 201043976 Attachment 2 High-frequency capacitance tester [Main component symbol description] (C) Capacitor (10) Substrate (20) Coupling line group (21) First coupling line (210) Signal input terminal (211) Signal output terminal (212X213) Trapezoidal segment (214) (215 ) Rectangular section 216 (216X217) stud (22) Second coupling line (220) ❹ 16

Claims (1)

201043976 VII. Patent application scope: 1. A high-frequency capacitance tester with a coupled line structure, comprising a substrate and a coupling line group disposed on the substrate, wherein the coupling line group is composed of the following components: a first cross-line having a first end and a second end, the first end being a signal input end, the second end being a signal output end, and the second end being on the substrate and on a same line And a second coupling line parallel to the first coupling line and capable of generating a coupling function, each of the second coupling lines respectively having a first end and a second end, the first of each of the second coupling lines The second ends of the second coupling lines are respectively opposite to each other, and the gaps are provided for a capacitor to be tested, and the second ends of the second coupling lines are respectively provided by the capacitors The electrical connection is performed on the end; the tooth is measured by the measuring device being connected to the signal input end and the signal output end to measure the -scattering parameter 'and according to the scattering parameter series (4) Measure the capacitance of the capacitor. 2. The high frequency capacitance tester of claim 1, wherein the measuring device is a vector network analyzer comprising: a wheel connected to the signal input terminal And a receiving port connected to the signal output terminal of the signal output, wherein the vector network device outputs a measured-output signal to the second handle. In the line 'and receives the view number from the receiving port to measure the scattering parameter. A 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 4· 3 'View the vector network analyzer system, and then embedded in the vector network network instrument electromagnetic simulation software IE3D contains - the failure of the engagement line group resistance • 17 201043976 resistance and electrical length (θ) Perform microstrip line structure size calculation. 4. If you apply for the high-frequency capacitance tester for the third-party remuneration, the measurement device is based on the electromagnetic simulation soft dragon 3D. The circuit is set to the center frequency and the highest test solution. The electrical length (Θ) of the hybrid wire group is calculated by the wavelength-by-wavelength, and the electrical length (θ) is 9 degrees. 5. The high-frequency capacitor device as claimed in claiming the patent range, wherein the line width of the first-matching line and the second turning line of the turning line group are respectively l 36 faces, the first The length of the first chord line and the second shank line are 21.42 sides, and the second tangential line is The spacing of the second ends is imm. 6. The high frequency capacitance tester according to claim 1, wherein the first end of the first line of the first line and the second line of the scale have a trapezoidal section of the first conical line, and at the enlarged end Each has a rectangular section, one rectangular segment is used as the signal input end, and the other rectangular segment is used as the signal output end. 7. The high frequency capacitance fighter according to the patent application, wherein each of the ladder segments has a length of 2 mm, each of the lengths of the rectangular segments are respectively legs, and each of the rectangular segments The line width is 3. lmin. 8. If you apply for the high-frequency capacitors as described in the first-level syllabus, the signal input terminal and the remaining money are connected to each other for the purpose of screwing the measuring device. 9. The high __lang as described in the application for patent correction, wherein the measuring device is configured to use the wire-like shunting and tilting analysis method to convert the scattering parameters, the line of the coupling line group, and the odd-anti-resistance (3) . The circuit base 201043976 determines the relative dielectric constant of the board to adjust the anti-hard number of the magnetic output and the signal strength of the signal input. 10. The high frequency capacitance tester according to claim 9, wherein the even mode impedance is 1 mm, and the odd impedance of the output is 50 ohms. U. The high frequency capacitance tester of claim 1, wherein the two conjugate wires are formed on the circuit substrate by printing or etching. 12. A method for testing a high frequency capacitance of a coupled line structure, comprising the steps of: providing a set of coupled lines on a substrate, the first coupled line extending in a straight line and one bit being in the same straight line and the first a second coupling in which the coupling lines are parallel and capable of coupling, and the first portion of the coupling line has a first end and a second end, and the first end is a signal input end 'the second end is — Each of the second light-bonding lines has a first end and a second end, and the first ends of each of the second coupling lines are respectively grounded, and the second end of the first coupling line is respectively Having a gap therebetween; placing a capacitor to be tested in the gap, and electrically connecting the two ends of the capacitor to the second end of the two first light wires; and connecting the measuring device to the gap The signal input end and the signal output end measure the incident, ^. And calculating a capacitance value of the capacitor to be tested corresponding to the scattering parameter according to the scattering parameter. I. The high frequency capacitance test method according to claim 12, wherein the quantity, the device is a vector network analyzer, and includes a round connection with the signal input terminal淳, and a receiving port connected to the signal output terminal of the signal output terminal, the vector network 201043976 road analyzer is outputted by the output —-quantity two merging line, she __ private _ to the 14th The particle scattering parameter of the first class. The network analyzer's thickness of the circuit board is 1.6·6, which is relative to the 四(4) vector scales. It is purely in the vector===__%LineGauge_ each line of the impedance and the length of the wire (8). Microstrip line structure size calculation. 15. The high-frequency capacitance test method as described in claim 14 of the patent application, wherein the amount: the fine running kanlong _ er, the 槪 set to check the h frequency, and the quarter of the highest test frequency The wavelength is used to calculate the length (θ) of the electric milk of the age group, and the electrical length (Θ) is 9 degrees. 16. For the HF capacitor method described in the application _2, the handle. The line width of the first light-handed line and the second light-handed line of the line group are respectively nra, and the first coupling line and the second light-handed line have a distance of 0.43 mm, and the first----- The length of the double-sided splicing line is 21. The distance between the second ends of the second nip line is 1 mm. 17. The high frequency capacitance test method according to claim 12, wherein the first end and the second end of the first cross line respectively have an outwardly enlarged lion segment and an enlarged end Each has a rectangular segment, one rectangular segment is used as the signal input end, and the other rectangular segment is used as the signal output terminal. 18. The method of testing a high frequency capacitance according to the scope of claim π, wherein each of the trapezoidal segments has a length of 2 nmim each of which has a length of 5 coffees, and each of the rectangular segments The line width is 3. lmm. The high frequency capacitance test method according to claim 12 or 17, wherein the signal input end and the output end of the output are respectively connected with an external conductive t-stud for the The measuring device is screwed. 20. The high frequency capacitance testing method according to claim 12, wherein the measuring device determines the sputtering parameter by using an impedance matrix of the coupled line and an odd and even mode analysis method. The line width and the line spacing of the line group are determined by the even mode impedance (z〇e), the odd mode impedance (2〇〇), and the relative dielectric constant of the circuit substrate, thereby adjusting the reflection coefficient of the signal output end and the 0 signal input end. Signal strength. 21. The high frequency capacitance test method according to claim 20, wherein the even mode impedance is 100 ohms, the odd mode impedance is 5 ohms, and the characteristic impedance of the signal input end and the signal output end are both 50 ohms. twenty one