TW201037874A - Evaporator, coating installation, and method for use thereof - Google Patents

Abstract

An evaporator for applying vapor to a substrate at a coating rate, the evaporator comprising an evaporator tube (300, 310, 100) having a distribution pipe (100) with at least one nozzle outlet (110), and wherein the evaporator tube includes a pressure measurement device (10, 12), the pressure measurement device comprising an optical diaphragm gauge (10).

Description

201037874 VI. Description of the Invention: [Technical Field of the Invention] Embodiments relate to an evaporator, a coating apparatus, and a method for applying vapor to a substrate. In particular, embodiments relate to an evaporator having a measuring mechanism to measure the coating rate of the evaporator, a coating apparatus having such an evaporator, and a method for applying vapor to the substrate. [Prior Art] 蒸发 Evaporators are required in various technical fields. For example, organic vaporizers are an important tool for specific production types of organic light-emitting diodes (〇LEDs). OLEDs are a special type of light-emitting diode in which the radiation layer comprises a film of a specific organic compound. Such systems can be used in television screens, computer monitors, portable system screens, and the like. OLEDs can also be used for general space lighting. 〇LED displays have a larger range of colors, brightness and viewing angles than traditional LCD displays, because 〇LED pixels emit light directly and do not require a backlight. Therefore, OLED displays are more traditional than conventional lCD displays. Has much smaller energy consumption. In addition, the fact that OLEDs can be printed onto flexible substrates opens the door to new applications, such as rollable displays or even displays embedded in fabric. The properties of products made with evaporators are often affected by the thickness of the evaporated layer. For example, the functionality of a 〇LED is dependent on the coating thickness of the organic material. This thickness must be within a predetermined range. When manufacturing OLEDs in 201037874, it is important to control the coating rate of the coating of the organic material to be within a predetermined tolerance. In other words, the coating rate (also referred to as the deposition rate) of the evaporator (such as the organic vaporizer) must be completely controlled during the coating process. To achieve this goal, it is known that this technique uses a so-called quartz crystal microbalance or a quartz resonator to determine the coating rate. The measurement of the actual vibration frequency of these vibrating crystals allows the results of the actual coating rate. None, these crystals are also coated with material during the ..., coating process. Therefore, the crystals must be periodically replaced because the crystals can only withstand a limited amount of material coating "this reduces their usability, especially in large-scale production plants with very long maintenance life. In addition, in order to replace the vibrating crystals, it is necessary to intervene in the vacuum chamber. Regenerating the vacuum is time consuming and expensive. Alternatively, the art is known to analyze the deposited layer after deposition to determine the coating rate by Q. In this case, the feedback control of the deposition system is only feasible with a specific delay. In particular, the program causes one or more substrates to be coated with an over-range layer before the control can take corrective action. SUMMARY OF THE INVENTION In the foregoing, an evaporator according to claim 1 of the patent application, a coating apparatus as claimed in the first aspect of the patent application, and a vapor application as in claim 11 of the scope of claim 201037874 are provided. The method of going to the substrate. In one embodiment, an evaporator for applying vapor to a substrate at a coating rate is provided. The evaporator includes: an evaporator tube having a distribution tube containing at least one nozzle outlet; and wherein the evaporator tube includes a pressure measuring device including an optical diaphragm.

According to another embodiment, a coating apparatus for coating a substrate is provided. The coating apparatus includes at least one evaporator for applying vapor to a substrate at a coating rate. The evaporator includes: an evaporator tube having a distribution tube having at least one nozzle outlet; and the evaporation therein The tube includes a pressure measuring device that includes an optical diaphragm. According to a further embodiment, a method for applying vapor to a substrate is provided, the method comprising the steps of: using an "evaporator to provide a vapor" to apply a vapor to the substrate at a coating rate, the evaporator Including an evaporator tube having a distribution tube having at least one nozzle outlet and wherein the evaporator tube includes a pressure measuring device comprising an optical diaphragm meter; applying vapor to the substrate; And measuring the pressure of the vapor in the evaporator tube. Further features and details may be derived from the dependent items, the description and the drawings, and the embodiments are also directed to a device that implements the disclosed method and: implements the device components of the method steps. Further, an embodiment is: the device can be operated by this method or the device can be manufactured by the method of 201037874. The complex π, a, the manufacturing machine borrows the heart, the ^ u 匕 includes to implement the function of the device or to use the & D. The method of 卩 少 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此 此Other ways to execute. [Embodiment] In the following, the details of the embodiments of the present invention will be described in detail, and one or more examples of the embodiments are shown in the right cabinet. The examples are for illustrative purposes and do not limit the invention. The nozzles are not limited. In the following, examples and examples are described by vacuum deposition of an organic coating and an evaporator for applying organic vapor (also referred to herein as an organic vaporizer). Typically, embodiments of the evaporator include a vacuum compatible material, and the coating apparatus is a vacuum coating apparatus. Typical applications for the embodiments described herein are, for example, in the production of displays (such as LCDs, TFT displays and OLEDs), in the fabrication of solar wafers, and in the deposition of semiconductor components (e.g., deposition of organic coatings). In the following description of the drawings, the same element symbols are referred to as the same elements. Generally, only the differences of the individual embodiments are described. According to an embodiment, an evaporator for applying steam (also referred to herein as a gas or evaporating material) to a substrate at a coating rate is provided. The evaporator has an evaporator tube 'the evaporator tube has a distribution tube containing at least one nozzle outlet, and wherein the evaporator tube includes a pressure measuring device 201037874

The pressure measuring device includes an optical diaphragm gauge (ODG). ODG is also referred to herein as a sensor or 〇dG sensor. The evaporator may be a linear evaporation source having an elongated distribution tube as shown in Figures 1A and 1B. Alternatively, the evaporator of the embodiment described herein may be a regional evaporation source. The rate of the evaporator (also referred to herein as the rate of deposition or coating rate) is dependent on the pressure of the evaporating material that fills the evaporator tubes (e.g., the packing tubes). Does this pressure correspond to the vapor of the material? In, for example, a linear evaporation source, a homogeneous deposition rate is achieved by creating an external pressure above the tube in a tube (e.g., in a distribution tube). The pressure difference is related to the material flux from the source' and is therefore related to the deposition rate. The higher the pressure, the higher the rate. Typically, the tubes and/or distribution tubes have a high temperature (e.g., up to about 5 Torr for organic materials) to avoid condensation of the evaporating material. Also, if the pressure sensor used to measure the force of the adjacent evaporator or in the evaporator is too hot, this can affect or damage the evaporating material (if organic materials are used). Through the evaporator of the embodiment described herein, an optical diaphragm meter uses (iv) the amount of vaporized material evaporating material in the H tube. The optical diaphragm meter according to the present invention can be used for high temperature and/or high electromagnetic interference (Eiectro)

Magnetlc Interference (EMI) environment, and in addition can be widely rotted. Therefore, the dust force measuring device of the embodiment maintains the high temperature and other conditions in the evaporation core. Further, the pressure measuring device of the embodiment is not needled because the optical diaphragm does not require a high working temperature. Therefore, it is possible to perform reliable measurements in a convenient and convenient pressure measurement in the evaporator tube, for example during the evaporation of the organic 201037874 coating material, for example in the manufacture of OLED elements. The deposition rate control using the embodiments described herein is fast, does not substantially depend on the type of evaporation material, and is not limited to the measurement time. In particular, the deposition rate control using the embodiments described herein is - a direct pressure measurement - which is independent of the gas form or vapor form, while using direct pressure. Therefore, pressure measurements are not based on indirect gas properties (such as conductivity or ionization). Therefore, the gas conversion factor (which is independent of the gas) can be used for deposition control. The deposition rate measurement can be performed continuously for several days and weeks. The convenient structure and programming of the allowable deposition rate controller. Typically, the evaporator tubes of the examples are made of a vacuum compatible material such as stainless steel. In an evaporator according to some embodiments, the optical diaphragm meter includes a measuring portion that includes a diaphragm (also referred to herein as a diaphragm). In some embodiments, which may be combined with any of the other embodiments described herein, the membrane is at least one material selected from the group consisting of ceramic materials, A12〇3 materials, and sapphire Q stone type AhO3 materials. production. In some embodiments, it can be combined with any of the other embodiments described herein. The optical diaphragm gauge is adapted to optically measure the pressure dependent bend of the diaphragm. According to a further embodiment, which can be combined with any of the other embodiments described herein, the diaphragm of the optical spacer is provided between a measuring vacuum chamber and a reference vacuum chamber, or separates the two chambers . In one such embodiment, which may be combined with any of the other embodiments described herein, the reference vacuum chamber may be fluidly coupled to a process vacuum chamber (eg, a coating chamber) or may be a process vacuum chamber. (for example, a coating chamber 201037874 in which an evaporator is disposed in the process vacuum chamber for evaporation. Thereby, the pressure or vacuum in the processing chamber is total, "Ma. Each of the workers is Or providing a reference pressure or reference vacuum to operate the optical diaphragm. In a typical embodiment, the evaporator further includes an analyzer (also referred to herein as a controller) that is coupled to the dust measuring device (eg, by - Assets 接到 Received - Debt detector. Typically, the analyzer determines the coating rate based on information provided by the house strength measuring device. Also, typically, the analyzer can access a memory. Typical coating of vapor The rate-of-rate data can be stored in the memory. For example, the analyzer can include a personal computer, and the memory can be a hard disk drive of the personal computer or the like. The analyzer can have - an input unit (such as a keyboard or mouse) to allow the operator to influence the motion of the analyzer and the unit connected to the analyzer (eg, a controllable seat valve). The X' analyzer can have an output unit (such as a screen or The edge mapper' displays operational information (such as values received from the detector and/or calculations calculated from these values). The measured data values contain the data values stored in the memory and can be processed together ( For example, aligning) to determine the actual deposition rate. / In the method according to the embodiment, the J-degree step can be performed before applying the vapor to the substrate. Generally, the deposition rate in the evaporator tube is related to the force. The measurement is taken at the beginning of the coating. During the evaporation, a measure step can be repeated 'case h at a specific time interval or for a long time. Also, it is possible to measure during substrate coating. For example, coated substrate The coating thickness can be directly observed after the coating step and can be correlated to the pressure measured at the point in time when the individual substrates are coated. 201037874 1A A front view of the distribution tube 100 of the embodiment of the evaporator is shown. The distribution tube 100 of the evaporator comprises a plurality of nozzle outlets 11A. According to an embodiment, the diameter of the distribution tube is between 1 cm and 丨〇. Between the more typically between 4 cm and 6 cm. When the substrate is evaporated with an organic material, the pressure inside the distribution tube (which is greater than the external pressure) causes the organic vapor to face the substrate (not shown). The distribution tube is discharged. In the figure, the substrate is placed above the plane of the paper. In the method of coating the substrate, the organic vapor is applied to the substrate under vacuum pressure. The term "vacuum" means 10 -2 mbar and lower pressure. Typically, the nozzle outlets are shaped and arranged such that a vapor stream at a nozzle outlet and a vapor stream immediately adjacent the nozzle outlet overlap on the surface of the substrate for optimum Layer uniformity. The figure shows a side view of the evaporator of Figure 1A. In order to control the coating rate, the organic vapor evaporator according to Figs. 1A and (7) includes a measuring device 10 for obtaining a pressure tribute of the organic vapor enthalpy in the distribution pipe 1 . In this embodiment, the measuring device 1 is adapted to obtain pressure data of the organic vapor in the dispensing tube. Thus, the measuring device 10 can be provided to the wall of the distribution tube, for example the measuring device 10 can be placed in or filled in the opening of the wall of the distribution tube. In general, the distribution tube of the embodiment can be a hollow body having at least one nozzle outlet U0. Typically, the distribution tube 1 is coupled to a feed unit (e.g., crucible 300) for feeding organic vapor to the knife tube. In this embodiment, the distribution tube is connected to the hanging steel via a supply pipe 310. Typically the 'distribution officer' includes between 10 and 1 201037874 nozzle outlets' typically between 20 and 30. Typically, the diameter of the mouthpiece outlet is between 0.1 mm and 5 mm, especially between 1 mm and 2 mm. The shape of the distribution tube can be tubular or the like. In other embodiments, the distribution tube is a showerhead. The number of right nozzles and their individual opening areas are small compared to the total size/volume of the distribution tube, and the tube is considered to be a closed distribution tube. Thus, the pressure within the tube is more stable' and can lead to better coating process and pressure measurements.

The embodiment shown in Fig. 2 is similar to the embodiment shown in Figs. A and ib, and the differential pressure finding device 1G is located in the supply pipe 310 of the organic vaporizer. It is feasible to set a raft somewhere between the hanging steel and the distribution pipe. This is exemplarily shown in the embodiment of Fig. 2 where the valve 33 is positioned between the vertical portion of the supply tube and its horizontal portion. In the embodiment shown, the steel is connected to the distribution tube via a seat valve. The seat 330 can be controlled manually or automatically. For example, if the deposition of organic material is to be temporarily stopped, the seat valve can be completely closed. Typically, the seat valve can be controlled to control the density of organic materials in the organic vaporizer. That is, it is possible to use the inter-seat control: the coating rate of the organic vaporizer. Typically, the seat can be connected to the H and the < analyzer controls. It is also feasible to install more than one seat valve in the organic evaporator according to the embodiment. For example, one can be manually controlled and another valve can be controlled by the analyzer. The embodiment of the organic vaporizer is shown in which the pressure detecting device comprises an optical diaphragm meter of the embodiment described herein, for example, 201037874 near the hole of the pin 300 of the supply tube 310. - In the embodiment, the organic vaporizer comprises a crucible 300 and one or more supply tubes 310. Palladium 7 steel 3 〇〇 can be filled with organic materials in solid form or in liquid form. The steel is heated to the temperature at which the material partially changes its coalescence into a vapor. Ο

Typically the evaporator has a closed geometry. That is, the hole " 0 is the only opening of the vapor leaving the organic vaporizer. Since the organic vaporizer has a higher pressure than the external environment, the vapor can flow out of the distribution pipe to the substrate 32G. Typically, the pressure system within the closed geometry of the organic vapor evaporating crucible corresponds to the vapor pressure of the organic material. This pressure is typically in the range of 1 (T2 mbar range, for example about 2 x m 4 xi 〇 2 mb. Relatively, the pressure outside the organic vaporizer can be between about 1 G _ 4 mbar and 1 (Γ 7 mbar. Figure 4 is a coating device) A side view of one embodiment. Figure 4 shows an embodiment of an organic vaporizer within a coating chamber t 500, wherein the coating chamber 500 is typically operated by one or more vacuum pumps during operation (not shown) Evacuation Typically, the coating apparatus according to an embodiment includes a further processing chamber 'the process chambers before and/or after the organic vaporizer. Typically, embodiments The organic vaporizer is used as a vertical linear organic vaporizer. Typically, a plurality of substrates (four) are processed in-line. That is, the organic material is evaporated horizontally onto a vertically oriented substrate. Typically the 'substrate is continuously conveyed by an assembly line' having a plurality of different process chambers 12 201037874 chambers arranged in a column - in a typical embodiment, for a substrate, coated The time interval required for the overlay is Between 10 seconds and 4 minutes, more typically between 3 〇 and 90 seconds. The coating frequency refers to the number of substrates that can be applied within a specified time. According to the embodiments described herein The coating apparatus may include some organic vaporizers. The processing chamber of the coating apparatus may have varying degrees of true degree. Typically, the substrate to be coated is subjected to a process prior to entering the chamber for organic coating. Or a plurality of cleaning process steps. More typically, the substrate is coated with an inorganic layer after one or more organic layers. This is because the organic material is sensitive to oxygen. So in many embodiments The 'one cap layer will protect the organic material layer. Also, since the organic material is hardly etched in the wet chemical etching process, the substrate is usually covered by a mask during coating. Typically, the mask is aligned The substrate, typically, has a high local precision metal cover aligned to the substrate. The 'substrate is then coated. 〇According to the embodiments described herein, the pressure measuring device of the evaporator includes an optical diaphragm 10 In some real In the example, the optical diaphragm 1 is a vacuum measuring cell, which in one example comprises a first housing body 1 made of A 2 2 material and a diaphragm made of A 2 2 3 material. 2, the cymbal 2 is configured to be adjacent to the first housing body in a vacuum sealing manner to establish a reference vacuum chamber between the first housing body and the diaphragm. The vacuum measuring cell may include a second housing body 4, which is made of Al2〇3 material and is disposed in a vacuum sealing manner opposite to the diaphragm 2, thereby establishing a measuring vacuum chamber 26 between the second housing body and the diaphragm, 13th 201037874 a peripheral body includes I used the car to connect the sentence, and, in the case of the 真空5, the 腔5 from the vacuum chamber to the inside of the evaporator tube. An optical penetrating window 33 may be formed in the central area of the body outside the body of the outer scorpion, and may be in at least the central area of the diaphragm 5

The surface of the diaphragm facing the optically penetrating window is formed to be optically reflective. Referring to the outside of the vacuum chamber and opposite to the window 33 and at a distance from the window, a light feeding device (for example, one or more optical fibers 3b, 3, 7) can be disposed for feeding light into and out of the diaphragm 2 On the surface 31. It is also possible to provide a lens arrangement 35 between the light feed means 37, 37 and the window 33 (also referred to herein as an optical window) for optical connection to the surface 31 of the diaphragm 2 (for example a mirror or a mirror coating). ). Thereby, this configuration forms a measuring portion for determining the degree of flexibility of the diaphragm 2, for example, by using the Fabry_Perot interferometer principle to form a Fabry-Perot interferometer. In another embodiment, which may be combined with any of the other embodiments described herein, the pressure measuring device includes a plug, the optical diaphragm is disposed in the plug and the plug is mounted in an opening of the evaporator tube, thereby The measuring vacuum chamber of the optical diaphragm is connected to the interior of the evaporator tube, the plug system being optically composed of quartz and conical. An example of a pressure measuring device is shown in Fig. 5, which shows an optical diaphragm 10. 6A and 6B (as a further example of an embodiment), a pressure measuring device 12 is shown, which includes a plug 14'. The optical diaphragm 1 is disposed in the plug. As shown in the example of Fig. 6B, the 'optical diaphragm meter 10 is operatively provided within the plug 14 in an example. As shown in Fig. 6, a pressure measuring device 12 is provided for measuring the evaporator. The pressure inside the distribution tube 1〇〇. The plug 14 can be provided in the wall of the distribution tube or in an opening in the wall of the distribution tube such that the measurement vacuum chamber 26 of the optical diaphragm 10 can access the interior of the dispensing tube 100. The plug 14 can for example be made of quartz. In some examples, the plug 14 can be conical and centrally surround the optical diaphragm 10. The plug 14 is used to operatively mount the pressure measuring device 12 in, for example, a distribution tube as shown in Figure 1B. The conical configuration further permits the pressure measuring device 12 to be installed by pressing the pressure measuring device 12 into an opening of the evaporator tube (in this example, the opening ιοί of the distribution tube ® 100). The material of the plug 14 can be selected such that a vacuum tight seal can be provided between the plug 14 and the wall of the evaporator tube when the plug is pressed into the opening. Further, due to the plug 14, the pressure measuring device 12 can be easily replaced. In a further embodiment, which can be combined with any of the other embodiments described herein, the optical pickups 37, 37 of the optical diaphragm are connected to the analyzer of the evaporator. An example analyzer includes an interferometer, a minute calorimeter and a lamp' as shown in Fig. 7. Thereby, the light can be fed into and out of the optical diaphragm 1 and analyzed. An example of measuring a cell of a 0pticai diaphragm gauge (ODG) is made of Ah〇3 and its structure is substantially symmetrical about the membrane. This type of ODG measurement cell line is described and is shown in U.S. Patent No. 7,305,888, the disclosure of which is incorporated herein by reference. The first outer casing 1 is composed of a ceramic plate made of a bark 2 〇 3, which is closely adhered along its edge at a distance of about 2 μm to about 50 μm with respect to the diaphragm 2, thereby forming a reference vacuum chamber. 25. Typically, during the group period 15 201037874 Pottery board! The distance between the two surfaces and the diaphragm 2 is directly established by the sealing material 3, 3 between the edge of the diaphragm and the outer casing 1. In this way, it is possible to use a completely flat outer casing. In the same manner, a measuring vacuum chamber 26 is formed in the second outer casing * on the opposite diaphragm side. For the medium to be measured, the vacuum chamber 26 is accessible through an opening in the outer casing 4 via a port 5 . Ο

The seals 3, 3' on both sides of the diaphragm 2 define the distance of the casing, > previously described. The seal is constructed, for example, of a glass glue (8), wherein the glass glue can be easily manipulated and can be applied, for example, by screen printing. The pre-melting or sintering temperature of the glass glue is, for example, in the range of about 675 to about 715 c. Further, the sealing temperature is, for example, in the range of about to about °C. The seals 3, 3 can be made of a vacuum compatible material. The outer diameter of a typical measuring cell is from about 5 mm to about 5 mm (typically about 38 mm) and the free inner diaphragm diameter is from about 4 mm to about 45 mm (typically about 30 mm), The distance between the first and second outer casings is about 2 μηι to 50 μηι (typically about 12 to 35 μηιρ. In this example, the outer casing of the first peripheral 1 is about 2 to 1 mm, and the second outer casing 4 has the same thickness. The first outer casing 1 and the second outer casing 4 are usually made of a material having a coefficient of expansion similar to that of the diaphragm material used. A very suitable combination is a high purity alumina ceramic (purity > 96%, typically purity > 99.5) %), high-purity sapphai ceramics (aluminum with a purity greater than 99.9°/.), and sapphire (3叩1)11丨]^) (single-crystal high-purity oxidation Ming 'artificial stone). The inner region of the second outer casing 4 is typically a recess designed to have a depth of about 0.5 mm for the purpose of expanding the vacuum chamber 26. 16 201037874 On the reference vacuum side, the membrane 2 is coated with a reflective film to form a mirror coating 31. There are two coatings of the membrane 2 with the window or the first housing to establish a Fabry-Perot interference. Way of counting. The main concept of coatings that can be used in Fabry-Perot interferometers is described in detail in the literature (see Vaughan JM, The Fabry-Perot Interferometer,

Adam Hilger Bristol and Philadelphia, 2002). The two methods are shown in Figure 9. A major metal or dielectric system can be selected.

The metal coating can be protected by a dielectric coating for easier handling. The mirror, in one embodiment, is a metal mirror that is designed as a fully reflective film. The Mirror coating 31 can be applied by coating, printing, spraying or by deposition of a vacuum process. In one example, the mirror coating 31 contains primarily gold and is deposited by printing and has a thickness of from about 3 μm to about 1 μm. In some embodiments, an evaporation line 14 passes through the first outer casing. This configuration ensures that the measurement cell has an accurate function over a long period of time because of the reference to the vacuum chamber thereby providing a high quality vacuum with long-term stability. In the embodiment of Fig. 5, the evaporation line can connect the reference vacuum chamber 25 to a degassing chamber 13 provided with a degassing configuration (not shown in Fig. 5). A degasser should be provided after evacuation, which is typically configured to be small in size and located in the a-L and in communication with the reference vacuum chamber. This degasser ensures that the reference vacuum pressure is lower than the pressure to be measured, typically at least ten times lower. In order to avoid contamination of the internal measurement cell space, a type of deaerator that does not evaporate should be selected. According to another embodiment, which can be combined with any of the other embodiments of 17 201037874 described herein, the evaporation line 14 connects the reference vacuum chamber to a process vacuum chamber (eg, a coating chamber), the process vacuum chamber An evaporator 10 including 〇DG is provided in the chamber for evaporation. In this case, the evaporation line 14 can be connected to the process vacuum chamber instead of being connected to the degassing chamber 13 as shown in Fig. 5. Thus, the reference vacuum system within reference vacuum chamber 25 substantially corresponds to the pressure or vacuum in the process vacuum chamber. The 〇-shell body may be entirely made of a light-transmissive material or include a penetrating region forming an interposed optical window 33 at its center. An optical system is disposed directly or in a spaced apart manner behind the penetrating housing 1 or window 33 for coupling the Fabry_Per〇t interferometer to the reflective surface of the moving jaw to be able to depend on the pressure to be measured. The curvature of the diaphragm 2 was measured. The light and optical signals are fed from the interferometer to the measurement cell by at least one optical fiber 37, 37, and are fed from the measurement cell to the dry beta cell, through the inner surface of the outer casing i or reference The inner chamber window 33 is coated with an inner surface of the mirror relative to the diaphragm to partially penetrate the membrane, typically a half penetrating membrane. When the measurement cell is installed, this coating must endure hundreds of times. The support temperature of c. In some embodiments, sapphire is used as a penetration shell or window = this is due to optical behavior and achievable accuracy. However, this material is expensive, and the use of an insertion window 33 is relatively inexpensive, and the angle is adjusted and optimized for the measurement of good signal quality of the system. If the - insertion window π 33 is used, it must be sealed by a seal 32 wherein the seal 32 has the same type as the 201037874 seal 3, 3' used to seal the diaphragm 2. The sealing material may be composed of baked glass glue, wherein the baked glass glue is formed by heating the glue to several hundred °C. Figure 5 shows the measurement cell of the embodiment surrounded by a holder 28 and a heater. Thereby, the heater 30' chamber can be heated to a temperature higher than the condensation temperature of the substance involved in the vacuum process to be measured. Typically, the temperature of the cell is above the condensation temperature by at least 丨〇 °c. A typical temperature is in the range of 100C to 600C. The chemicals used are usually non-radically aggressive, and heating is an effective way to keep them away from sensitive parts of the measurement cell. These methods ensure that the cells operate to a high degree of accuracy and high reproducibility over a long period of time during which the process is performed. In a heated measurement cell configuration, it is important that the optical system, such as fiberglass, does not become too hot to be damaged and that the optical accuracy of the system is not adversely affected. As shown in Fig. 5, the problem is solved by arranging the fibers 37, 37' such that the connector is sufficiently farther away from the thermal measurement cell and the fiber temperature is below 100<>>C. For example, the fibers can be separated by a distance of a few centimeters from a holding member 28 (e.g., a stainless steel tube) to lower the temperature. In this case, a lens device (e.g., lens 35) is disposed between the fiber and housing i or window 33 for optimal coupling of the optical signal to the diaphragm. The entire measurement cell configuration can be protected by a cover 29 that is disposed around the entire measurement cell. In some examples, the measurement 淳5 and the measurement vacuum chamber 26 and its diaphragm 2 are not directly exposed to the evaporator tube, where there is a radical condition at the evaporator tube ^ in this case, 埠5 by a 19 201037874 The diaphragm chamber 42 (which has a protective plate 4 as a partition and is connected to the inside of the evaporating air tube.) The diaphragm attached to the flange of some embodiments can be. 1 Refractive optical light reference: =: The method is to manufacture. Manufacturing the diaphragm ~ less T has a hollow side of the part. _, the method is adhesion - small and thin, - two ways is: a method ... Μ board 31 to oxidize (four) on the film. Another method 疋 4 hair - gold mirror 31 m ^ ^ u, to the sapphire membrane (sapphire membrane) - chrome layer is placed 〇 between sapphire and gold to improve gold on sapphire Adhesion. - Pushing further method is applied to it, printed on it or sprayed on it. A super a "Electrical coating is used in a similar manner to replace the metal layer is placed on the diaphragm, seven soils Or; the enamel coating is placed on the top of the metal layer in a similar manner and is placed on the diaphragm In a further embodiment described herein, the middle gusset 2 (also referred to herein as the membrane 2) is typically made of sapphire. ^ In the example of sap, the sapphire is an early crystal oxide (αι2〇3;丨:i η丄人丄石石) has a clear crystal orientation. Therefore, many physical parameters depend on the direction. This material has the following properties: it can resist the process gases used in semiconductor engineering (such as I compounds ( Such as nf3, CH2F2, SF6, ', CHF3), vapor (such as cl2, then) and bromide (such as gas or water vapor). Because it is a single crystal, it has more than polycrystalline oxide a smoother surface. This allows for a smoother mirror surface. Furthermore, a 'smooth single crystal surface reduces the number of film nucleation sites on the surface which results in reduced film deposition on the process side of the diaphragm 2, and thus due to slower The diaphragm film accumulates stress causing less sensor drift. It has a high bending strength. This allows for a greater bendability with a thinner sheet 20 201037874 2 , thereby allowing the extension of the meter Amount range and greater accuracy in a very low pressure range. In some embodiments, the sapphire diaphragm 2 has a thickness of less than 1 50 μm. This can be used to achieve up to twice the bendability of α12〇3逹. • According to other embodiments, the diaphragm 2 is cut from the sapphire crystal such that the diaphragm is generally perpendicular to the C-axis (structure number 〇〇〇1). This orientation is to allow for greater desire to be perpendicular to the diaphragm ( Instead of being perpendicular to the diaphragm, the coefficient of thermal expansion is such that the choice of axial orientation results in increased thermal expansion in the vertical bend and higher sensor deflection as a function of temperature. Buckle. The sapphire diaphragm 2 of the example of the embodiment has a diameter of about 5 to 80 mm (typically about 5 40 mm), and a thickness of about 〇. 〇 4 to 0.76 mm (typical values are about 〇.〇7~ 1.〇mm) 'to avoid problems involving the lock. In the region of the mirror 31, the top and bottom planes should be parallel to 〇 5 mm or better, and have a surface roughness of N4 or Ra of 0.35 or better. 〇 In a further embodiment, a total reflection mirror can be used as the mirror 31. The mirror 31 on the reference vacuum side of the diaphragm 2 can be made of a precious metal (a gold alloy). A chrome layer can be added to improve the adhesion of gold to sapphire. The noble metal coating such as gold or silver has a sintering temperature of up to 85 ° C. A single chrome layer is sometimes sufficient. An alternative solution consists of a single or multiple layer dielectric mirror.疋 The first casing body 1 may be made of alumina ceramic or sapphire. The use of the base of the sapphire results in a coefficient of thermal expansion of the base and a match of the diaphragm. For cost reasons, it is possible to use a casing body made of alumina ceramics - 21 201037874. According to an example, a hole is drilled in the body of the casing, - a semi-transmissive mirror as a window 33 and an additional part of the optical fiber are mounted in the hole.

In your case, you can use a half-through mirror as a window 33' as shown in Figures 5, 8, and 9. A semi-transmissive mirror (also referred to herein as a semi-reflective mirror) is in some embodiments made of chrome that is vaporized over the clear sapphire window surface 34. The thickness of the chrome layer is, for example, about $claw. In order to further improve the protection of the chromium layer from oxidation, a protective pentoxide button (Ta2〇5) may be added to the top of the chrome layer as a protective layer. Prior to installation of the diaphragm, the sapphire window 33 can be attached to the housing body in the same manner as previously described (e.g., as a baked glass glue). The sensitivity of a good pressure measuring device can be achieved when the mirror 31 on the diaphragm 2 and the semi-transmissive mirror in the housing body i are "substantially or precisely parallel." In some instances, the maximum tolerated tilt [α] + [β] + (7) is 0.05 mrad as shown in Fig. 8. Thereby, substantial parallelism of the 〇DG cavity can be achieved. In some embodiments, a spacer 41 is mounted in front of the sensor head. And has at least two purposes, as shown in Fig. 5. First, it ensures that the sensitive diaphragm 2 does not involve direct light. The gas particles collide with the meter surface at least twice before reaching the diaphragm 2. Typically, it is easy to coagulate. The gas system is deposited on the surface of the separator before it condenses on the surface of the membrane. This reduces sensor deflection and extends the life of the sensor. The spacer is also used to plasma A gas that is converted to a low charge state (typically a neutral charge state). 22 201037874 One embodiment includes a dive-in-sensor. The 〇dg sensor concept can also be used in a rush Configuration (dive-in arraiigement), one of them An example is shown in Figure 10. In this embodiment, the sensor cell is not retracted from the interior of the evaporator tube. The sensor head can be directly mounted on the evaporator tubes 300, 310, 100 The flanges 4〇, 4〇, upper. The diaphragm and the sensor housing may be made of a corrosion resistant material. In some examples of embodiments, a multiplexed sensor head may be provided. Optical reading (optical read) -out) also allows multiple sensor heads to be read by a single 0 spectrometer. This is achieved by using individual fibers stacked in parallel at the entrance slit of the spectrometer, or by using branched fibers. Or a fiber switch is achieved. The sensor head can be located at the location of the evaporator and further at different locations of the evaporator, which is further vaporized and coated with the device. In some embodiments, some sense The detector heads 4 can be placed on the same flange 40, 40' to abut each other. This is shown in Fig. 10, which shows a flush sensor having a plurality of heads. Type to allow for redundancy, or can be of different types This covers overlapping or adjacent pressure ranges. This allows for the use of an evaporator with only one flange position while covering a larger range. When mounting the sensor 43 to a flange 4〇, 4 〇, when it is on, each sensor head can be applied to different pressure ranges by changing the diaphragm size. Thereby, the operator can measure the same and/or different ones while using only one turn of the evaporating air tube. Pressure range. This is a cost reduction because less time is required to install and less time to establish an interface between the sensors and their data trapping system. 23 201037874 According to an embodiment, a The method of applying vapor to a substrate comprises: using the evaporator of any of the preceding embodiments to provide vapor; applying vapor to the substrate; and measuring the pressure of the vapor within the evaporator tube. According to an embodiment, the evaporator includes an evaporator for applying vapor to the substrate at a coating rate, the evaporator including an evaporator tube having a distribution tube having at least one nozzle outlet, and Wherein the evaporator tube comprises a pressure measuring device comprising an optical diaphragm. The evaporator, coating apparatus and method of the embodiments described herein allow the deposition rate to be determined by a pressure measuring device in the evaporator tube. According to embodiments described herein, the pressure measuring device includes an optical diaphragm that is resistant to corrosion and/or can be used in high temperature and/or high Electromagnetic Interference (EMI) environments. According to an embodiment, there is provided an evaporator for applying vapor to a substrate at a coating rate, the evaporator comprising an evaporator tube having a distribution tube having at least one nozzle outlet, and wherein The evaporator tube includes a pressure measuring device including an optical diaphragm meter. In an embodiment, it can be combined with any of the other embodiments described herein. A pressure measuring device is provided in the evaporator tube. In an embodiment, which may be combined with any of the other embodiments described herein, the evaporator tube further includes a crucible and a supply pressure measuring device connecting the crucible and the distribution tube is provided at a source selected from the supply tube and In the component of the group of crucibles, β 24 201037874 In one embodiment, the dragon and j are combined with any of the other embodiments described herein; the millimeter is a vacuum measuring cell, and the vacuum measuring cell comprises: a first housing body made of Alas material; a diaphragm made of A material F is configured to be vacuum-sealed adjacent to the first housing body to establish a gap between the first housing body and the diaphragm Reference vacuum chamber; - a second housing body made of A material, which is provided in a true sealed manner opposite to the diaphragm, thereby being in the second housing

G (d) m $ established—measures a vacuum chamber; the second housing body includes a bore for connecting the measurement vacuum chamber to the interior of the evaporator tube, wherein an optical penetration window is formed in a central region of the first housing body And forming a surface of the diaphragm facing the optically penetrating window to be optically reflective in at least a central region of the diaphragm, and wherein a light feeding device is disposed opposite the window and at a distance from the window outside the vacuum chamber outer surface Feeding light into and out of the surface of the diaphragm #, and wherein a lens device is disposed between the optical fiber and the port for optically connecting to the surface of the medium such that the configuration forms a degree of flexibility for determining the diaphragm The measurement unit, for example, makes the Shaw Fabry_Perot interferometer principle. In a practical example, this configuration is formed as a Fabry-Perot interferometer. In an embodiment, which may be combined with any of the other embodiments described herein, the pressure measuring device comprises - a plug 'optical spacer meter is provided in the plug' and the plug is provided in an opening of the evaporator tube . In an embodiment, it may be constructed of quartz with any other embodiment described herein. In one embodiment, it can be plugged into a conical shape in conjunction with any of the other embodiments described herein. In a consistent embodiment, 'which may be combined with any of the other embodiments described herein, the pressure measuring device includes a plug, the optical diaphragm is provided in the plug' and the plug is provided in an opening of the evaporator tube such that The measuring vacuum chamber of the optical diaphragm is connected to the interior of the evaporator tube. In an embodiment, 'which can be combined with any of the other embodiments described herein', the diaphragm of the vacuum measuring cell is made of a sapphire type Al2?3 material. In an embodiment, which may be combined with any of the other embodiments described herein, the first housing body of the vacuum measurement cell is at least partially made of a sapphire type of Ah 3 material and the portion is placed in the central region Medium to form an optical penetration window. In an embodiment, which may be combined with any of the other embodiments described herein, the optically penetrating window is formed as a single interposer, the single interposer being made of sapphire and being vacuum sealed. A housing body. In an embodiment, it can be combined with any of the other embodiments described herein, the evaporator being an organic vaporizer for applying organic vapor to the substrate at a coating rate. According to a further embodiment, there is provided a coating apparatus for coating a substrate, the coating apparatus having a V-vapor evaporator for applying vapor to the substrate at a coating rate, the evaporator comprising an evaporator tube, the evaporator The evaporator tube has a distribution tube having at least one nozzle outlet, and wherein the evaporator tube includes a pressure measuring device comprising an optical 26 201037874 diaphragm meter. According to yet a further embodiment 'providing a method for applying vapor to a substrate', the method comprises: using an evaporator to provide vapor to apply vapor to the substrate at a coating rate, the evaporator comprising - an evaporator a tube having a distribution tube containing at least a nozzle outlet, and wherein the evaporator tube includes a pressure measuring device including an optical diaphragm meter; applying vapor to the substrate; and measuring the inside of the evaporator tube The pressure of the vapor. In the real example, it can be combined with any of the other embodiments described herein 'vapor is provided within the evaporator tube' and the pressure of the vapor is measured within the evaporator tube. In an embodiment, which may be combined with any of the other embodiments described herein, the provision of a vapor system includes the steps of producing a vapor by heating a material that is provided as a particulate material or line of material. In an actual column, which can be combined with any of the embodiments described herein, the method further includes the step of structuring the substrate by means of a mask. In an embodiment, which may be combined with any of the other embodiments described herein, the vapor is an organic vapor, and the method optionally further comprises the step of applying an inorganic cap coating to the substrate. In an embodiment, which may be combined with any of the other embodiments described herein, 'vapor is provided within the evaporator tube and the pressure of the vapor within the evaporator tube is adjusted between 2 x 10 -i 2 mbar # 4 x l 〇 -2 mbar . In an embodiment, which may be in conjunction with any of the other embodiments described herein, 27 201037874, the optical diaphragm includes a measuring portion including a diaphragm from a material selected from the group consisting of ceramic materials and Al2〇3 materials. And at least one material of the group consisting of sapphire-like AhO3 materials. In some embodiments, which may be combined with any of the other embodiments described herein, the optical spacer membrane is adapted to measure the flexibility of the diaphragm or diaphragm, respectively. The present invention is disclosed by way of example, and the invention may be utilized and utilized by those skilled in the art. Although the present invention has been described in terms of various specific embodiments, it will be understood by those skilled in the art that the present invention can be practiced with variations in the spirit and scope of the invention. In particular, the non-proprietary features of the examples and embodiments of the foregoing embodiments or variations thereof may be combined with each other. The patentable scope of the invention is defined by the scope of the claims, and may include other examples of those skilled in the art. Such other examples are also within the scope of the patent application. While the foregoing description is directed to the embodiments of the present invention, the invention may be construed as the scope of the invention, and the scope of the invention is determined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS The description of the present invention can be understood in detail by reference to the embodiments of the invention, which are briefly described in the foregoing. The drawings are directed to embodiments of the invention and are described below. Some of the foregoing embodiments will be described in more detail by reference to the accompanying drawings. 28 201037874 辻 In the following description of an exemplary embodiment, wherein: a 1A and 1B diagram shows an embodiment of an evaporator, ia Figure 1 is a front view of the evaporator tube of the evaporator and FIG. 1B is a side view of the evaporator; FIG. 2 is a view showing another embodiment of the evaporator; 4 is a cross-sectional side view showing an embodiment of a coating apparatus; FIG. 5 is a view showing a pressure measuring device of the embodiment described herein; and FIG. 6A is a view showing the evaporator shown in FIG. 1B. A partial cross-sectional view of the evaporator tube; an 实施β diagram showing an embodiment of the pressure measuring device of the evaporator shown in FIG. 6A; FIG. 7 is a pressure measuring device showing an embodiment; One of the pressure measuring devices of the embodiment refers to the vacuum chamber; FIG. 9 illustrates two ways of coating the window of the diaphragm and the optical diaphragm included in the embodiment; FIG. 10 shows the pressure measurement of the embodiment. One-piece configuration of the device (dive-in arrange Ment), which has multiple measurement heads. It will be appreciated that elements of an embodiment may be advantageously employed in other embodiments without further recitation. [Main component symbol description] 29 201037874

1 First housing body 2 Diaphragm (diaphragm) 3 ' 3 ' Sealing material 4 Second housing body 5 埠5, 埠10 Pressure measuring device (optical diaphragm meter) 12 Pressure measuring device (optical diaphragm meter) 13 Degassing chamber 14 Plug 25 Reference Vacuum Chamber 26 Measuring Vacuum Chamber 28 Holder 28, Holder 29 Cover 30 Heater 31 Surface (Mirror Coating) 32 Seal 33 Optical Penetration Window 34 Semi-Transmissive Mirror 35 Lens Device 37, 37' optical fiber 40 flange 40, flange 30 201037874 partition diaphragm chamber holding device distribution tube opening nozzle outlet steel supply pipe 基材 substrate valve coating chamber

Claims (1)

201037874 VII. Patent application scope: 1. 〇2. An evaporator for 9-, coating rate application #vapor to a coffin, comprising: a 4-tube tube having a distribution containing at least one nozzle outlet a tube; and the evaporation tube white _, 曰, ,, 赞β & includes a pressure measuring device 'The pressure measuring device includes an optical barrier meter. The evaporator of claim 1 wherein the pressure measuring device is provided in the distribution tube. 3. The evaporator of claim 1, wherein the evaporator further comprises a crucible and a supply tube connecting the crucible and the distribution tube, the pressure measuring device being provided at The supply pipe and the component of the group formed by the steel hanging. 4. The evaporator of claim 1, wherein the optical diaphragm is a vacuum measuring cell, the vacuum measuring cell comprising: a first-shell body made of Α1203 material; , which is made of Α1203 material, and is disposed in a vacuum sealed manner adjacent to the first outer casing body, thereby establishing a reference vacuum chamber between the first outer casing body and the diaphragm; The body is made of Α12ο3 material and is provided in a vacuum 32 201037874 sealed manner to establish a test between the diaphragm body and the diaphragm so as to be included in the second housing body, the measurement is true; The cavity is connected to the inside of the two outer casing tubes; to the evaporator connected to the evaporator, the middle of the first casing body penetrates the window, and in the diaphragm to the small middle... The buckle is in the center; the central region will face the surface of the diaphragm that penetrates the optical opening and the optical reflection of the outer surface of the reference vacuum chamber is 'together' to the outside and is opposite to the window and the distance from the window Configuration - light feeding device For illuminating onto the surface of the membrane 'and providing a lens arrangement between the optical fiber and the window for optically connecting to the surface of the membrane such that the configuration forms a A measuring portion of the degree of pipe curvature of the diaphragm. • ^ The evaporator of the patent scope S i, wherein the pressure measuring device comprises a plug - the optical diaphragm is provided in the plug, and the plug is provided in one of the evaporator tubes In the opening. The evaporator of claim 5, wherein the plug is made of quartz. 7. The evaporator of claim 5, wherein the plug is conical. 33 201037874 8. If you apply for a patent scope! The evaporator of the invention, wherein the optical diaphragm comprises a measuring portion, the measuring portion comprising a diaphragm, the diaphragm being composed of a group selected from the group consisting of ceramic materials, Α1ζ〇3 materials, and sapphire type αι2ο3 materials. Made of at least one material. 9. The evaporator of claim 2, wherein the optical diaphragm comprises a measuring portion, the measuring portion comprises a diaphragm, the diaphragm is selected from the group consisting of ceramic materials, Α 〇 2 〇 3 materials And at least one material of the group consisting of sapphire type Ah3 materials. 10. The evaporator of any one of claims 4-9, wherein the pressure measuring device comprises a plug, the optical diaphragm is provided in the plug, and the plug is provided in the evaporator tube An opening is formed such that the measuring vacuum chamber of the optical diaphragm is connected to the interior of the evaporator tube. The evaporator according to any one of claims 4-9, wherein the diaphragm of the vacuum measuring cell is made of a sapphire type Al2〇3 material. 12. The evaporator of any one of the preceding claims, wherein the optical penetration window is formed from at least one selected from the group consisting of: the vacuum measurement cell The first housing body is at least partially 34 201037874 formed of sapphire type Al2〇3 leaves and the side portions are placed in the central region to form an optically penetrating window; and the optically penetrating window is formed as a single-plug And a single insert is made of sapphire and is mounted to the first outer casing body in a straight manner. 13. The evaporator of the invention is the evaporator of any one of the organic vapor evaporators 1-9 to the substrate, the coating rate is applied to the organic vapor 14. A coating apparatus for coating a substrate with alpha, at least one evaporator of any one of the above-mentioned claims, wherein the at least one evaporator is used to apply vapor to a substrate at a coating rate. material. 15. The coating apparatus of claim 14, wherein the pressure measuring device comprises a plug - the optical diaphragm is provided in the plug and the plug is provided in the evaporator tube In the opening, the measuring vacuum chamber of the optical diaphragm is connected to the interior of the evaporator tube. 16. The coating apparatus of claim 14, wherein the optical penetration window is formed from at least one selected from the group consisting of: the first housing body of the vacuum measurement cell is At least a portion 35 201037874 is made of a sapphire type Al 2 〇 3 material, and the portion is placed in a central region to form an optical penetration window; and the optical penetration window is formed as a single interposer, the single insertion The cover is made of sapphire and is vacuum sealed to the first housing body. 17. The coating apparatus of claim 14, wherein the evaporator is an organic vaporizer for applying organic vapor to the substrate at a coating rate. 1 8. A method for applying vapor to a substrate, comprising: providing vapor using an evaporation thief to apply vapor to the substrate at a coating rate, the evaporator comprising an evaporator tube, the evaporation The tube has a distribution tube containing at least one nozzle outlet, and wherein the evaporator tube includes a pressure measuring device including an optical diaphragm meter; applying vapor to the substrate; and measuring vapor in the evaporator tube pressure. 19. The method of claim 18, wherein a vapor is provided in the evaporator tube, and a pressure of the vapor is measured in the evaporator tube. [20] The method of claim 18, wherein Optical spacer 36 201037874 Membrane meter 真空 a vacuum measurement tire Λ > . β to 'The vacuum measurement cell comprises: a first housing body, 11 which is made of barium 2〇3 material; a diaphragm, which consists of , 203 material, and is configured in a vacuum sealed manner to greet the first outer casing body adjacent to the flute, thereby establishing a reference vacuum chamber between the first outer casing body and the diaphragm; An external body is made of a material of Α2〇3 and is provided in a vacuum sealing manner opposite to the diaphragm so as to form a space between the second casing body and the diaphragm. J diffusely measures the vacuum chamber, the second housing body includes a crucible for connecting the vacuum chamber of the 古.. Forming an optically penetrating window in a central region of the body and forming a surface of the diaphragm facing the optically penetrating window in at least a central region of the diaphragm to be optically reflective, and wherein the reference vacuum chamber is outside the surface Opposite the window and disposed at a distance from the window, a light feeding device for feeding light into and out of the surface of the diaphragm, and wherein a lens device is disposed between the optical fiber and the window for optical The surface is attached to the diaphragm such that the configuration forms a measuring portion for determining the degree of flexibility of the diaphragm. The method of any one of clauses 18 to 20, wherein the providing the vapor system comprises the step of producing a vapor by heating a material provided as a granular material or a material line. 37. The method of any one of the claims, wherein the method of any of the following claims is included. At L Township, the substrate is structured by a mask. 23. The method of any of claims 18-2, wherein the vapor is an organic vapor, and the method optionally further comprises the step of applying an inorganic cap coating to the substrate. The method of any of the preceding claims, wherein the vapor is provided in the evaporator tube, and the pressure of the vapor in the evaporator tube is adjusted to be ><10 -12〇11)^ and 4xl〇_2mbar. The method of any one of the preceding claims, wherein the optical separator comprises a measuring portion, the measuring portion comprising a diaphragm selected from the group consisting of ceramic materials, gossip 2 〇3 material, and blue ◎ gem type of Ah 〇 3 material composed of at least - material to make 0 38