201036751 . 六、發明說明： 【發明所屬之技術領域】 本案是關於一種旋轉機構，特別是關於應用在探測用承載 台之旋轉機構。 【先前技術】 在LED、半導體等測試領域的測試機中，承載台係用於 承載LED、半導體等晶圓待測物，藉由在承載台進行—角度 〇 的旋轉，將藉由測試機的探針點觸晶圓待測物的接觸墊，進$ 測試晶圓待測物的電性。 一般習用的測試機是在承載台侧邊使用皮帶(belt)，藉由 馬達f動皮帶的方式’使得承載台產生一角度的旋轉。然而， 由於承載台必須要維持該角度，因此使用皮帶會有間隙密度的 問題，而影響承載台的旋轉精度’最後則是導致晶圓待測物的 - 電性測試不佳。 請參閱第1圖’其為台灣專利1302862所提出的一種習用 定位系統的上視示意圖。在第1圖中，定位系統丨主要是由第 一平台ίο、配置於第一平台ίο上的第二平台η、配置於第一 平台10上的螺桿12、以及連接第二平台u與螺桿12的遠★曰 13所構成。 杯 —在定位系統1中，第二平台11可沿著一預定路徑14而往 復移動，其中預定路徑14之延伸方向與螺桿12成一夾角。當 螺桿12轉動而使得連桿13移動時，便能夠帶動第二平台^ 沿著預定路徑14移動，藉以提高定位的精度。 口 曰然而，定位系統〗的缺點在於，當螺桿12轉動而使得 桿13移動時’螺桿12會產生非水平於螺桿12方向的施力， 因此’在個上料造成螺桿12的變形，進而影較位系統 3 201036751 1移動時的精度。 的I方面’請參閱第2圖，其為台灣專利1233847所提出 轉機，上視示意圖。在第2圖中， 才曰22疋、馬1 2〇、叉控於馬達的螺桿21、連接於螺桿21的連 ^及作^旋轉—小角度的方式而連接於連桿22的曲柄23、 以及作為_巾_讀纟24 _成。 得連’ #驅動騎％時’螺桿21轉動便可使 編柄23嘯工⑽旋轉，藉 桿21除了產^旱f移動的過程中，螺 螺r ?ι仏十於螺才21方向的施力，也會產生非水平於 ''干 向的施力’容易產生變形而影響到精度。 、 【發明内容】 告工要構思—種細在探_承載台之旋轉機構， 田工作台補時，螺桿不會受到侧向力量而影響精度。 機構根本?—方_—觀咖承載台之旋轉 接於該螺桿^、—、2找於該馬達哺朗—螺桿、-端固 -連桿n ^ 馳、—輪猶該滑塊的 ，固接於該承載台’其中當該馬達起動 根據上述構想，本荦另一 ^μ. 轉機構’包括:-馬達受^探測用承載台之旋 固接於該螺桿而於μ 馬達而轉動的—螺桿、一端 、/上⑺動的二滑塊、一端枢接於離該螺 端，；姑也4^ Γ柄—5亥曲柄利用一隅而固接於該連桿之另一 201036751 桿較遠之該滑塊的一遠 接於該連捍之另—姓 ^ 及曲柄，該曲柄利用一隅而固 其中當該馬達起動斤該西柄之另—隅係固接於該承載台， 滑動，使得該連桿相 動該等滑塊於該滑軌上 該曲柄及該承载台_^：^蚀的該滑塊樞轉，而使得 轉機“據案再-方面提出-種探測縣載台之旋 固接於_捍而於一 達而轉動的-螺桿、-端 Ο201036751. VI. Description of the Invention: [Technical Field to Be Invented] The present invention relates to a rotating mechanism, and more particularly to a rotating mechanism applied to a detecting carrier. [Prior Art] In a test machine for testing fields such as LEDs and semiconductors, the carrier is used to carry wafers, semiconductors, and the like, and the substrate is tested by the angle of the yoke. The probe touches the contact pad of the wafer to be tested, and the electrical property of the test object of the wafer is tested. A commonly used test machine uses a belt on the side of the stage to rotate the belt by the motor to cause the stage to rotate at an angle. However, since the stage must maintain this angle, the use of the belt has a problem of the gap density, which affects the rotation accuracy of the stage. Finally, the electrical test of the wafer to be tested is poor. Please refer to Fig. 1 which is a top plan view of a conventional positioning system proposed by Taiwan Patent No. 1302862. In Fig. 1, the positioning system 丨 is mainly composed of a first platform ίο, a second platform η disposed on the first platform ί, a screw 12 disposed on the first platform 10, and a second platform u and a screw 12 The far ★ 曰 13 is composed. Cup - In the positioning system 1, the second platform 11 is reciprocally movable along a predetermined path 14, wherein the predetermined path 14 extends at an angle to the screw 12. When the screw 12 is rotated to cause the link 13 to move, the second platform can be moved along the predetermined path 14 to improve the positioning accuracy. However, the disadvantage of the positioning system is that when the screw 12 is rotated to cause the rod 13 to move, the screw 12 will exert a non-horizontal force in the direction of the screw 12, so that the deformation of the screw 12 is caused by the feeding of the rod 12 Comparison system 3 201036751 1 Accuracy when moving. The aspect of I is referred to Figure 2, which is a transfer diagram of Taiwan Patent No. 1233847. In Fig. 2, the crank 22 of the connecting rod 22 is connected to the screw 21 of the motor, the screw 21 connected to the screw 21, and the rotation-small angle. And as _ towel _ read 纟 24 _ into. If you turn the '# drive ride %' screw 21 to rotate, the handle 23 can be twisted (10). In the process of moving the rod 21 in addition to the production of the drought, the screw is in the direction of the 21 Force, also produces non-horizontal 'drying force' that is prone to deformation and affects accuracy. [Summary of the Invention] The work is to be conceived. The fineness is in the exploration of the rotating mechanism of the carrying platform. When the field is used to make up the time, the screw will not be affected by the lateral force. The mechanism is fundamental?—Party _—the rotation of the viewing platform is connected to the screw ^, —, 2 to find the motor, the screw, the end-solid-link n ^ chi, the wheel is still the slider, solid Connected to the carrying platform 'where the motor is started according to the above concept, the other rotating mechanism' includes: - the motor is rotated by the detecting carrier to the screw and rotated by the μ motor - The screw, one end, and the upper (7) move two sliders, one end is pivotally connected to the screw end; the Gu 4^ Γ handle - 5 hai crank is fixed to the other of the 201036751 rods of the connecting rod by one cymbal One of the sliders is connected to the other one of the flail and the crank, and the crank is fixed by a cymbal. When the motor is activated, the cymbal is fixed to the carrying platform, and the slid is made. The connecting rods move the sliders on the sliding rail and the slider of the carrying platform _^:^ is pivoted, so that the turning machine is raised according to the case--the detection of the rotation of the county stage Screw-to-end 接
Q 桿較近之該、、典始沾=執上π動的—滑塊、一端柩接於離該螺 接於該連連==及—曲柄’該曲柄利用一隅而樞 其中當該馬達隅伽接於該承載台， 滑動，使得物純；推=等馳於該滑軌上 該曲柄及該承載台同較近的該滑塊枢轉，而使得 較=者，該連桿是以旋轉式關節而樞接於該滑塊。 較佳者，該曲柄是以旋轉式關節而樞接於該連桿。 處於ΐίί 3 ^塊槐雜上雜的距離而 載台轉機構是固設於—基台上，且該曲柄及該承 戰疋相對於該基台而同時旋轉該角度。 案件藉由下列圖式及詳細說明，俾得更深入之了解. 【實施方式】 -第二if i3 κ，其林案所提出探湖承載台之旋轉麵 由焉逵如佳只施例的上視示意圖。在第3圖中，旋轉機構3是 &而於轉31、—綱接於螺桿 34、以及曲4上α動的π塊32、—端樞接於滑塊32的連桿 柄％所構成’且旋轉機構3是固設於基台ST上。 5 201036751 其中’當馬達30動作時，螺产 =^’使物 34 ===== sr時旋轉上=的 柄35及承載台36相對於基的台; 樞接承載台36。由於曲柄35的另端繫 以料塊32移動使得連桿34樞轉將二柄^ 36 361 角度的範圍是指曲柄35及承載台36相對於滑2 月= 離L言;亦即’以滑塊32於滑軌33上滑動=離 的在=内及承載台36相對於基台st而同時旋轉 ，传、—提的是’螺桿31是經由未圖示出的-連軸哭 (Couplmg)而受控於於馬達3〇。該連軸器的_ 二 的轉轴、另—端則固接於螺桿31。在馬達3〇動作日f，'、由達^ 的轉軸帶動該連轴器，再由該連軸器帶動螺桿31轉動。*·、、 H此外，連桿34是以旋轉式關節而樞接於滑塊32，曲柄％ 疋以旋轉式關節而樞接於連桿34;也就 ；ri^ 36 ίΐ 轉^则时轉動’曲柄35與連桿34之間的關節亦會 與前述台灣專利^02802及12现7缺，本案使 ====向力砂會受關向力的鱗，因此不會Ϊ 201036751 μ請參閱第4圖’其為本案所提懒 較佳實施例的上視示意圖。3 旋轉機構 )月執33上多設置了一個滑塊幻，，、：圖之相異處在於，在 與32,連接成-個滑塊組。此舉可接件37將滑塊32 33上的滑動更為筆直，可大匕牛=吏=滑塊組(32、32，)在滑軌 載台36同時旋轉時的精度&升連桿34帶動曲柄35及承 Ο ❹ -第=:1===¾轉機; 來利Γ_滑塊32的連= 组之、ϊΐη32,時’滑塊32則扮演用來穩定滑塊 其可以減少螺桿31所錢桿34 _之嫘摔 側向反作用力所造成的螺桿31側向變形的機會。 綜上所述，本發明所提出的探測用承載台之旋轉機構的康 點在於，由於使用了曲柄、滑執與連桿的協同作動，其本身的 旋轉精度遠大於皮帶的旋轉精度及可靠度，所以不會因旋轉精 度的問題影響承載台的角度。 本案得由熟悉本技藝之人士任施匠思而為諸般修飾，然皆 不脫如附申請專利範圍所欲保護者。 201036751 【圖式簡單說明】 第1圖··台灣專利B02862所提出的一種習用定位系統的 上視示意圖。 第2圖··台灣專利1233847所提出的一種習用旋轉機構的 上視不意圖。 第3圖：本案所提出探測用承載台之旋轉機構一第一較佳 實施例的上視示意圖。 第4圖：本案所提出探測用承載台之旋轉機構一第二較佳 實施例的上視示意圖。 第5圖：本案所提出探測用承載台之旋轉機構一第三較佳 實施例的上視示意圖。 【主要元件符號說明】 1定位系統 10第一平台 11第二平台 12螺桿 13連桿 14預定路經 2旋轉機構 20馬達 21螺桿 22連桿 23曲柄 201036751 24工作台 3旋轉機構 30馬達 31螺桿 32、32’滑塊 33滑執 34連桿 35曲柄 36承載台 361旋轉中心 37連接件 ST基台 ❹ 9The Q-bar is closer to the stalk, the smear-stained slider, the slid-to-slider is attached to the splicing joint, the splicing is connected to the splicing, and the crank is pivoted. Connected to the carrier, sliding, so that the object is pure; push = equal to the crank and the slider and the slider are pivoted with the closer, so that the link is rotated The joint is pivotally connected to the slider. Preferably, the crank is pivotally connected to the link by a rotary joint. At the ΐίί 3 ^ block noisy distance and the stage rotating mechanism is fixed on the abutment, and the crank and the carrier are rotated simultaneously with respect to the base. The case is further understood by the following diagrams and detailed explanations. [Embodiment] - The second if i3 κ, the rotation surface of the lake-producing platform proposed by the forest case is exemplified by See the schematic. In Fig. 3, the rotating mechanism 3 is & and is formed by the rotation 31, the screw 34, and the π block 32 of the yoke 4, and the shank of the shank which is pivotally connected to the slider 32. 'And the rotating mechanism 3 is fixed to the base ST. 5 201036751 wherein "when the motor 30 is actuated, the screw 34 ===== sr rotates the upper handle 35 and the carrier 36 relative to the base; pivots the carrier 36. Since the other end of the crank 35 is moved by the block 32, the link 34 is pivoted to the extent that the angle of the two handles 36 36 361 means that the crank 35 and the carrying platform 36 are opposite to the sliding 2 month; The block 32 slides on the slide rail 33=in the distance== and the carrier table 36 rotates at the same time with respect to the base station st, and the “screw 31 is via the unillustrated-connected axis crying (Couplmg) It is controlled by the motor 3〇. The shaft and the other end of the coupling of the coupling are fixed to the screw 31. On the motor 3〇 operating day f, ', the coupling is driven by the rotating shaft of the motor, and the coupling 31 drives the screw 31 to rotate. *·, H In addition, the link 34 is pivotally connected to the slider 32 by a rotary joint, and the crank % 枢 is pivotally connected to the link 34 by a rotary joint; that is, ri^ 36 ίΐ 'The joint between the crank 35 and the connecting rod 34 will also be missing from the aforementioned Taiwan patents ^02802 and 12, and this case makes ==== the direction of the force sand will be the force of the scale, so it will not Ϊ 201036751 μ see the 4th Figure 2 is a top plan view of a preferred embodiment of the lazy embodiment of the present invention. 3 Rotating mechanism) A slider illusion is set on the monthly execution 33. The difference between the figures and the figure is that, in conjunction with 32, it is connected to a slider group. The splicing member 37 can make the sliding on the slider 32 33 more straight, and the yak=吏=slider group (32, 32,) can be rotated at the same time when the slide rail 36 rotates simultaneously. 34 drive crank 35 and bearing ❹ - the first =: 1 === 3⁄4 transfer; to the Γ _ slider 32 of the joint = 之 32 32, when the 'slider 32 is used to stabilize the slider it can reduce the screw 31 money rods 34 _ 嫘 嫘 侧 侧 侧 反 反 反 反 反 螺杆 螺杆 螺杆 螺杆 螺杆 螺杆 螺杆 螺杆 螺杆 螺杆 螺杆 螺杆In summary, the rotation mechanism of the detecting carrier of the present invention is based on the fact that the rotation accuracy of the crankshaft, the sliding handle and the connecting rod is much greater than the rotation precision and reliability of the belt. Therefore, the angle of the stage is not affected by the problem of the rotation accuracy. This case has been modified by people who are familiar with the art, but it is not intended to be protected by the scope of the patent application. 201036751 [Simple description of the drawing] Fig. 1 is a top view of a conventional positioning system proposed by Taiwan Patent B02862. Fig. 2 is a top view of a conventional rotating mechanism proposed by Taiwan Patent No. 1233847. Fig. 3 is a top plan view showing a first preferred embodiment of the rotating mechanism of the probe stage of the present invention. Fig. 4 is a top plan view showing a second preferred embodiment of the rotating mechanism of the probe stage of the present invention. Fig. 5 is a top plan view showing a third preferred embodiment of the rotating mechanism of the probe stage of the present invention. [Main component symbol description] 1 positioning system 10 first platform 11 second platform 12 screw 13 link 14 predetermined path 2 rotation mechanism 20 motor 21 screw 22 link 23 crank 201036751 24 table 3 rotating mechanism 30 motor 31 screw 32 , 32' slider 33 slip 34 link 35 crank 36 carrier 361 rotation center 37 connector ST abutment ❹ 9