CN106200012A - A kind of chirality superstructure using metal silicide - Google Patents
A kind of chirality superstructure using metal silicide Download PDFInfo
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- CN106200012A CN106200012A CN201610549770.0A CN201610549770A CN106200012A CN 106200012 A CN106200012 A CN 106200012A CN 201610549770 A CN201610549770 A CN 201610549770A CN 106200012 A CN106200012 A CN 106200012A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
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Abstract
The present invention relates to optical field, particularly relate to a kind of chirality superstructure.A kind of chirality superstructure using metal silicide in the present invention, including the upper silicide layer being sequentially provided with along light direction, dielectric layer, lower silicide layer and substrate layer;Upper silicide layer, dielectric layer and lower silicide layer have identical planar structure, described planar structure includes the cellular construction that multiple cycle is p, cellular construction is the rectangle composition of four centrosymmetric annulus and cross, the internal diameter of annulus is r1, the external diameter of annulus is r2, rectangular a length of l, rectangular wide m=r2 r1;Upper silicide layer 4 and lower silicide layer 2 thickness are t, and the thickness of dielectric layer 3 is d.As a example by NiSi, left, right-hand circularly polarized light transmission spectral line separately, creates the circular dichroism of about 0.42 and the ellipticity of 0.7, and SPA sudden phase anomalies occurs near magnetic resonance point, and the polarization created from 60 ° to 55 ° at resonance point rotates.
Description
Technical field
The present invention relates to optical field, particularly relate to a kind of chirality superstructure.
Background technology
In recent years, chirality superstructure has obtained paying close attention to widely and grinding due to its special electromagnetic property and optical characteristics
Study carefully.Compared with the chiral material in nature, the special nature of its abnormality, such as negative index, strong circular dichroism is with inclined
Shake rotation etc. so that it is become electromagnetism and the research topic of optical field forefront.Utilize the special optical of chirality superstructure
Character modulates the dissemination of light makes it can be widely applied to various optics.The such as circularly polarized light polarizer, perfect
Lens, circularly polarized light detector etc..So-called chirality refers to a kind of structure that the mirror image of a structure cannot coincide with itself
Feature.Compared to three-dimensional chirality superstructure, two dimension chirality superstructure has the simple advantage of structure.But the originally hands of two dimension
Property superstructure cannot compare favourably with three-dimensional at the optical activity obtained, the aspect such as circular dichroism.Rogacheva et al. carried later
Having gone out the two-dimentional chirality superstructure of bilayer, its huge optical activity makes it to mention in the same breath with three-dimensional super-structure.In this work
Under the inspiration made, the chiral structure of a lot of two dimensions is suggested in succession.It addition, the two-dimentional superstructure of multilamellar have also been obtained research.?
Closely, in order to obtain huge circular dichroism and polarization rotatory, the geometric parameter of two dimension superstructure is optimized.Result shows
Show that circular dichroism and the rotating maximum of polarization can not obtain simultaneously.Chirality superstructure before additionally, due to all uses expensive
Metal builds, and makes it can not match with existing semiconductor machining integrated technology, causes the extensive application of chirality superstructure
Limited.
Summary of the invention
In order to solve the deficiency that prior art exists, the invention provides a kind of chirality using metal silicide to build and surpass
Knot, by the optimization to silicide optical parametric, makes this structure can realize huge circular dichroism and polarization rotatory simultaneously.
A kind of chirality superstructure using metal silicide in the present invention, is sequentially provided with including along light direction
Upper silicide layer, dielectric layer, lower silicide layer and substrate layer;Upper silicide layer, dielectric layer and lower silicide layer have identical
Planar structure, described planar structure includes the cellular construction that multiple cycle is p, and cellular construction is four centrosymmetric annulus
Forming with the rectangle of cross, the internal diameter of annulus is r1, and the external diameter of annulus is r2, rectangular a length of l, rectangular width
m=r2-r1;Upper silicide layer 4 and lower silicide layer 2 thickness are t, and the thickness of dielectric layer 3 is d.
As preferably, t is in the range of 80 ~ 120nm, and d=0.6t, r are in the range of 80 ~ 120nm, the scope of r2=2.0*r1, l
It is 240 ~ 340nm, p=l2+2.0*r2+70nm.
As preferably, upper silicide layer 4 and two Drude model parameter ω p, ω τ of lower the used material of silicide layer 2
Present the trumpet type distribution that Open Side Down.Chirality superstructure shows good circular dichroism, and polarization rotates and extinction ratio.This
Bright beneficial effect: as a example by NiSi, left, right-hand circularly polarized light transmission spectral line separately, creates about 0.42 near magnetic resonance point
Circular dichroism and the ellipticity of 0.7, and there are SPA sudden phase anomalies, the polarization created from 60 ° to-55 ° at resonance point rotates.
Accompanying drawing explanation
Fig. 1 is a kind of chirality superstructure perspective view using metal silicide.
Fig. 2 is a kind of chirality superstructure structural representation using metal silicide.
Fig. 3 is a kind of chirality superstructure structural representation using metal silicide.
Labelling in figure: 1, substrate layer, 2, lower silicide layer, 3, dielectric layer, 4, upper silicide layer.
Detailed description of the invention
Below in conjunction with the accompanying drawings the present invention is described in further detail, but this should be interpreted as the above-mentioned theme of the present invention
Scope be only limitted to above-described embodiment.
As Figure 1-3, a kind of chirality superstructure using metal silicide, set successively including along light direction
Upper silicide layer 4, dielectric layer 3, lower silicide layer 2 and the substrate layer 1 having;Upper silicide layer 4, dielectric layer 3 and lower silicide layer 2
Having identical planar structure, described planar structure includes the cellular construction that multiple cycle is p, and cellular construction is four centers pair
The annulus claimed and the rectangle composition of cross, the internal diameter of annulus is r1, and the external diameter of annulus is r2, rectangular a length of l, long
Square wide m=r2-r1;Upper silicide layer 4 and lower silicide layer 2 thickness are t, and the thickness of dielectric layer 3 is d.As a example by NiSi,
A left side, right-hand circularly polarized light transmission spectral line separately, creates the circular dichroism of about 0.42 and the ellipse of 0.7 near magnetic resonance point
Rate, and there are SPA sudden phase anomalies, the polarization created from 60 ° to-55 ° at resonance point rotates.
As preferably, t is in the range of 80 ~ 120nm, and d=0.6t, r are in the range of 80 ~ 120nm, the scope of r2=2.0*r1, l
It is 240 ~ 340nm, p=l2+2.0*r2+70nm.
As preferably, upper silicide layer 4 and two Drude model parameter ω p, ω τ of lower the used material of silicide layer 2
Present the trumpet type distribution that Open Side Down.Chirality superstructure shows good circular dichroism, and polarization rotates and extinction ratio.
When parameter is following, it is distributed for trumpet type:
Circular dichroism (> 0.4): during ω p=2.5eV, ω τ scope (0.01eV-0.02eV)
During ω p=3V, ω τ scope (0.015eV-0.03eV)
During ω p=3.5eV, ω τ scope (0.02eV-0.05eV)
During ω p=4eV, ω τ scope (0.035eV-0.075eV)
During ω p=4.5eV, ω τ scope (0.045eV-0.1eV)
During ω p=5eV, ω τ scope (0.06eV-0.14eV)
During ω p=5.5eV, ω τ scope (0.075eV-0.17eV)
During ω p=6eV, ω τ scope (0.085eV-0.23eV)
During ω p=6.5eV, ω τ scope (0.1eV-0.285eV)
During ω p=7eV, ω τ scope (0.11eV-0.345eV)
Po-larization rotational angular (> 60 °): during ω p=3eV, ω τ scope (0.013eV-0.017eV)
During ω p=3.5eV, ω τ scope (0.025eV-0.033eV)
During ω p=4eV, ω τ scope (0.035eV-0.053eV)
During ω p=4.5eV, ω τ scope (0.05eV-0.075eV)
During ω p=5eV, ω τ scope (0.076eV-0.1eV)
During ω p=5.5eV, ω τ scope (0.09eV-0.125eV)
During ω p=6eV, ω τ scope (0.116eV-0.155eV)
During ω p=6.5eV, ω τ scope (0.14eV-0.185eV)
During ω p=7eV, ω τ scope (0.185eV-0.215eV)
Extinction ratio (> 100): during ω p=4.5eV, ω τ scope (0.06eV-0.07eV)
During ω p=5eV, ω τ scope (0.07eV-0.105eV)
During ω p=5.5eV, ω τ scope (0.09eV-0.13eV)
During ω p=6eV, ω τ scope (0.11eV-0.16eV)
During ω p=6.5eV, ω τ scope (0.135eV-0.185eV)
During ω p=7eV, ω τ scope (0.15eV-0.23eV)
The Drude model that Drude model is dielectric constant of metal in the present invention, for the common knowledge of this area.
Claims (3)
1. use a chirality superstructure for metal silicide, including the upper silicide being sequentially provided with along light direction
Layer, dielectric layer, lower silicide layer and substrate layer;It is characterized in that, upper silicide layer, dielectric layer and lower silicide layer have identical
Planar structure, described planar structure includes the cellular construction that multiple cycle is p, and cellular construction is four centrosymmetric annulus
Forming with the rectangle of cross, the internal diameter of annulus is r1, and the external diameter of annulus is r2, rectangular a length of l, rectangular width
m=r2-r1;Upper silicide layer 4 and lower silicide layer 2 thickness are t, and the thickness of dielectric layer 3 is d.
A kind of chirality superstructure using metal silicide the most according to claim 1, it is characterised in that t in the range of
80 ~ 120nm, d=0.6t, r are in the range of 80 ~ 120nm, and r2=2.0*r1, l are in the range of 240 ~ 340nm, p=l2+2.0*r2+
70nm。
A kind of chirality superstructure using metal silicide the most according to claim 1, it is characterised in that upper silicide layer
4 and two Drude model parameter ω p, ω τ of lower the used material of silicide layer 2 present the trumpet type distribution that Open Side Down.
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Cited By (7)
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CN106597578A (en) * | 2016-12-27 | 2017-04-26 | 南开大学 | Crescent windmill superstructure surface |
CN108801461A (en) * | 2018-06-20 | 2018-11-13 | 中国科学院上海光学精密机械研究所 | A kind of super surface circularly polarized light detecting element and preparation method thereof |
CN108878466A (en) * | 2018-06-15 | 2018-11-23 | 中国科学院上海光学精密机械研究所 | Full Stokes polarization imaging element and preparation method thereof |
CN108957614A (en) * | 2018-06-26 | 2018-12-07 | 南京理工大学 | The chiral asymmetric plane Meta Materials circular dichroism device of double-layer spiral line |
CN110609347A (en) * | 2018-06-14 | 2019-12-24 | 中国科学院物理研究所 | Preparation method for forming polarization rotator through nano paper-cut |
CN113533214A (en) * | 2021-07-14 | 2021-10-22 | 广东工业大学 | High-efficiency broadband circular polarization analyzer based on double-layer silicon rod array structure |
CN117894858A (en) * | 2024-03-15 | 2024-04-16 | 苏州大学 | Nano chiral structure, circularly polarized light electric detector and preparation method thereof |
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Cited By (12)
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CN106597578A (en) * | 2016-12-27 | 2017-04-26 | 南开大学 | Crescent windmill superstructure surface |
CN110609347A (en) * | 2018-06-14 | 2019-12-24 | 中国科学院物理研究所 | Preparation method for forming polarization rotator through nano paper-cut |
CN110609347B (en) * | 2018-06-14 | 2020-07-24 | 中国科学院物理研究所 | Preparation method for forming polarization rotator through nano paper-cut |
CN108878466A (en) * | 2018-06-15 | 2018-11-23 | 中国科学院上海光学精密机械研究所 | Full Stokes polarization imaging element and preparation method thereof |
CN108878466B (en) * | 2018-06-15 | 2021-09-07 | 中国科学院上海光学精密机械研究所 | Full Stokes polarization imaging element and preparation method thereof |
CN108801461A (en) * | 2018-06-20 | 2018-11-13 | 中国科学院上海光学精密机械研究所 | A kind of super surface circularly polarized light detecting element and preparation method thereof |
CN108801461B (en) * | 2018-06-20 | 2020-05-05 | 中国科学院上海光学精密机械研究所 | Super-surface circularly polarized light detection element and preparation method thereof |
CN108957614A (en) * | 2018-06-26 | 2018-12-07 | 南京理工大学 | The chiral asymmetric plane Meta Materials circular dichroism device of double-layer spiral line |
CN108957614B (en) * | 2018-06-26 | 2021-06-29 | 南京理工大学 | Double-layer spiral line chiral asymmetric plane metamaterial circular dichroism device |
CN113533214A (en) * | 2021-07-14 | 2021-10-22 | 广东工业大学 | High-efficiency broadband circular polarization analyzer based on double-layer silicon rod array structure |
CN117894858A (en) * | 2024-03-15 | 2024-04-16 | 苏州大学 | Nano chiral structure, circularly polarized light electric detector and preparation method thereof |
CN117894858B (en) * | 2024-03-15 | 2024-05-28 | 苏州大学 | Nano chiral structure, circularly polarized light electric detector and preparation method thereof |
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