CN106200012B - A kind of chiral superstructure using metal silicide - Google Patents
A kind of chiral superstructure using metal silicide Download PDFInfo
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- CN106200012B CN106200012B CN201610549770.0A CN201610549770A CN106200012B CN 106200012 B CN106200012 B CN 106200012B CN 201610549770 A CN201610549770 A CN 201610549770A CN 106200012 B CN106200012 B CN 106200012B
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- silicide layer
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- superstructure
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- 229910021332 silicide Inorganic materials 0.000 title claims abstract description 42
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 title claims abstract description 42
- 239000002184 metal Substances 0.000 title claims abstract description 12
- 230000001413 cellular effect Effects 0.000 claims abstract description 8
- 238000010276 construction Methods 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims abstract description 5
- 239000000463 material Substances 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 238000002983 circular dichroism Methods 0.000 abstract description 11
- 230000003287 optical effect Effects 0.000 abstract description 9
- 230000010287 polarization Effects 0.000 abstract description 7
- 229910005883 NiSi Inorganic materials 0.000 abstract description 3
- 230000003595 spectral effect Effects 0.000 abstract description 3
- -1 upper silicide layer Chemical compound 0.000 abstract 1
- 230000008033 biological extinction Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/0009—Materials therefor
- G02F1/0081—Electric or magnetic properties
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Polarising Elements (AREA)
Abstract
The present invention relates to optical field more particularly to a kind of chiral superstructures.One of present invention uses the chiral superstructure of metal silicide, including upper silicide layer, dielectric layer, lower silicide layer and the substrate layer being successively arranged along light incident direction；Upper silicide layer, dielectric layer and lower silicide layer planar structure having the same, the planar structure includes the cellular construction for being p in multiple periods, cellular construction is the rectangle composition of four centrosymmetric annulus and cross, the internal diameter of annulus is r1, the outer diameter of annulus is r2, rectangular a length of l, rectangular width m=r2-r1；Upper silicide layer 4 and lower silicide layer 2 with a thickness of t, dielectric layer 3 with a thickness of d.Left by taking NiSi as an example, right-hand circularly polarized light transmits spectral line and separates near magnetic resonance point, produces about 0.42 circular dichroism and 0.7 ellipticity, and SPA sudden phase anomalies occur, and produces the rotation of the polarization from 60 ° to -55 ° in resonance point.
Description
Technical field
The present invention relates to optical field more particularly to a kind of chiral superstructures.
Background technique
In recent years, chiral superstructure has been obtained extensive concern due to its special electromagnetic property and optical characteristics and ground
Study carefully.Compared with the chiral material in nature, unusual special nature, such as negative index, strong circular dichroism and partially
Vibration rotation etc., has become the research topic of electromagnetism and optical field forefront.Utilize the special optical of chiral superstructure
The dissemination that property carrys out modulation light allows to be widely used in various optical devices.Such as the circularly polarized light polarizer, it is perfect
Lens, circularly polarized light detector etc..So-called chirality refers to a kind of structure that the mirror image of a structure can not coincide with itself
Feature.Compared to three-dimensional chiral superstructure, two dimension chirality superstructure, which has, constructs simple advantage.But originally two-dimensional hand
Property superstructure in the optical activity of acquisition, circular dichroism etc. can not compare favourably with three-dimensional.Later Rogacheva et al. is mentioned
The chiral superstructure of double-deck two dimension is gone out, huge optical activity makes it to mention in the same breath with three-dimensional super-structure.In this work
Under the inspiration of work, many two-dimensional chiral structures are put forward one after another.In addition, the two-dimentional superstructure of multilayer is also studied.Most
Closely, in order to obtain huge circular dichroism and polarization rotatory, the geometric parameter of two-dimentional superstructure is optimized.As a result it shows
Showing circular dichroism and polarizing rotating maximum value to obtain simultaneously.Further, since it is pervious chirality superstructure all use it is expensive
Metal constructs, and prevents it from matching with existing semiconductor machining integrated technology, causes the extensive use of chiral superstructure
It is limited.
Summary of the invention
In order to solve the shortcomings of the prior art, the present invention provides a kind of chirality using metal silicide building is super
Knot enables the structure to realize huge circular dichroism and polarization rotatory simultaneously by the optimization to silicide optical parameter.
One of present invention uses the chiral superstructure of metal silicide, including is successively arranged along light incident direction
Upper silicide layer, dielectric layer, lower silicide layer and substrate layer；Upper silicide layer, dielectric layer and lower silicide layer have identical
Planar structure, the planar structure include multiple periods be p cellular construction, cellular construction be four centrosymmetric annulus
It is formed with the rectangle of cross, the internal diameter of annulus is r1, and the outer diameter of annulus is r2, rectangular a length of l, rectangular width
m=r2-r1；Upper silicide layer 4 and lower silicide layer 2 with a thickness of t, dielectric layer 3 with a thickness of d.
Preferably, the range of t is 80 ~ 120nm, the range of d=0.6t, r are 80 ~ 120nm, the range of r2=2.0*r1, l
For 240 ~ 340nm, p=l2+2.0*r2+70nm.
Preferably, two Drude model parameter ω p, ω τ of upper silicide layer 4 and the used material of lower silicide layer 2
The trumpet type distribution that Open Side Down is presented.Chiral superstructure shows good circular dichroism, polarization rotation and extinction ratio.This hair
Bright beneficial effect：Left by taking NiSi as an example, right-hand circularly polarized light transmits spectral line and separates near magnetic resonance point, produces about 0.42
Circular dichroism and 0.7 ellipticity, and SPA sudden phase anomalies occur, produce the rotation of the polarization from 60 ° to -55 ° in resonance point.
Detailed description of the invention
Fig. 1 is a kind of chiral superstructure schematic perspective view using metal silicide.
Fig. 2 is a kind of chiral superstructure structural schematic diagram using metal silicide.
Fig. 3 is a kind of chiral superstructure structural schematic diagram using metal silicide.
It is marked in figure：1, substrate layer, 2, lower silicide layer, 3, dielectric layer, 4, upper silicide layer.
Specific embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings, but this should not be interpreted as to above-mentioned theme of the invention
Range be only limitted to above-described embodiment.
As shown in Figure 1-3, a kind of chiral superstructure using metal silicide, including successively set along light incident direction
Upper silicide layer 4, dielectric layer 3, lower silicide layer 2 and the substrate layer 1 having；Upper silicide layer 4, dielectric layer 3 and lower silicide layer 2
Planar structure having the same, the planar structure include the cellular construction for being p in multiple periods, and cellular construction is four centers pair
The annulus of title and the rectangle composition of cross, the internal diameter of annulus are r1, and the outer diameter of annulus is r2, rectangular a length of l, length
Rectangular wide m=r2-r1；Upper silicide layer 4 and lower silicide layer 2 with a thickness of t, dielectric layer 3 with a thickness of d.By taking NiSi as an example,
A left side, right-hand circularly polarized light transmit spectral line and separate near magnetic resonance point, produce about 0.42 circular dichroism and 0.7 ellipse
Rate, and SPA sudden phase anomalies occur, the rotation of the polarization from 60 ° to -55 ° is produced in resonance point.
Preferably, the range of t is 80 ~ 120nm, the range of d=0.6t, r are 80 ~ 120nm, the range of r2=2.0*r1, l
For 240 ~ 340nm, p=l2+2.0*r2+70nm.
Preferably, two Drude model parameter ω p, ω τ of upper silicide layer 4 and the used material of lower silicide layer 2
The trumpet type distribution that Open Side Down is presented.Chiral superstructure shows good circular dichroism, polarization rotation and extinction ratio.
When parameter is following, it is distributed for trumpet type：
Circular dichroism（>0.4）:When ω p=2.5eV, ω τ range（0.01eV-0.02eV）
When ω p=3V, ω τ range（0.015eV-0.03eV）
When ω p=3.5eV, ω τ range（0.02eV-0.05eV）
When ω p=4eV, ω τ range（0.035eV-0.075eV）
When ω p=4.5eV, ω τ range（0.045eV-0.1eV）
When ω p=5eV, ω τ range（0.06eV-0.14eV）
When ω p=5.5eV, ω τ range（0.075eV-0.17eV）
When ω p=6eV, ω τ range（0.085eV-0.23eV）
When ω p=6.5eV, ω τ range（0.1eV-0.285eV）
When ω p=7eV, ω τ range（0.11eV-0.345eV）
Po-larization rotational angular（>60°）：When ω p=3eV, ω τ range（0.013eV-0.017eV）
When ω p=3.5eV, ω τ range（0.025eV-0.033eV）
When ω p=4eV, ω τ range（0.035eV-0.053eV）
When ω p=4.5eV, ω τ range（0.05eV-0.075eV）
When ω p=5eV, ω τ range（0.076eV-0.1eV）
When ω p=5.5eV, ω τ range（0.09eV-0.125eV）
When ω p=6eV, ω τ range（0.116eV-0.155eV）
When ω p=6.5eV, ω τ range（0.14eV-0.185eV）
When ω p=7eV, ω τ range（0.185eV-0.215eV）
Extinction ratio（>100）：When ω p=4.5eV, ω τ range（0.06eV-0.07eV）
When ω p=5eV, ω τ range（0.07eV-0.105eV）
When ω p=5.5eV, ω τ range（0.09eV-0.13eV）
When ω p=6eV, ω τ range（0.11eV-0.16eV）
When ω p=6.5eV, ω τ range（0.135eV-0.185eV）
When ω p=7eV, ω τ range（0.15eV-0.23eV）
Drude model in the present invention is the Drude model of dielectric constant of metal, is the common knowledge of this field.
Claims (1)
1. a kind of chiral superstructure using metal silicide, including the upper silicide being successively arranged along light incident direction
Layer, dielectric layer, lower silicide layer and substrate layer；Upper silicide layer, dielectric layer and lower silicide layer planar structure having the same,
The planar structure includes the cellular construction for being p in multiple periods, and cellular construction is four centrosymmetric annulus and cross
Rectangle composition, the internal diameter of annulus is r1, and the outer diameter of annulus is r2, rectangular a length of l, rectangular width m=r2-r1；On
Silicide layer 4 and lower silicide layer 2 with a thickness of t, dielectric layer 3 with a thickness of d, which is characterized in that upper silicide layer 4 and lower silicon
The trumpet type distribution that Open Side Down is presented in two Drude model parameter ω p, ω τ of the used material of compound layer 2.
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| CN106200012B true CN106200012B (en) | 2018-11-20 |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106597578B (en) * | 2016-12-27 | 2018-10-26 | 南开大学 | The windmill-shaped superstructure surface of crescent |
| CN110609347B (en) * | 2018-06-14 | 2020-07-24 | 中国科学院物理研究所 | Preparation method for forming polarization rotator through nano paper-cut |
| CN108878466B (en) * | 2018-06-15 | 2021-09-07 | 中国科学院上海光学精密机械研究所 | Full Stokes polarization imaging element and preparation method thereof |
| CN108801461B (en) * | 2018-06-20 | 2020-05-05 | 中国科学院上海光学精密机械研究所 | Super-surface circularly polarized light detection element and preparation method thereof |
| CN108957614B (en) * | 2018-06-26 | 2021-06-29 | 南京理工大学 | Double-layer spiral line chiral asymmetric plane metamaterial circular dichroism device |
| CN113533214A (en) * | 2021-07-14 | 2021-10-22 | 广东工业大学 | High-efficiency broadband circular polarization analyzer based on double-layer silicon rod array structure |
| CN117894858B (en) * | 2024-03-15 | 2024-05-28 | 苏州大学 | Nano chiral structure, circularly polarized light electric detector and preparation method thereof |
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| CN103018925A (en) * | 2012-12-13 | 2013-04-03 | 大连理工大学 | Artificial electromagnetic metamaterial with tunable circular dichroism based on topology/graphene material |
| CN105044814A (en) * | 2015-08-03 | 2015-11-11 | 欧阳征标 | Right-hand circularly-polarized conversion meta-material film |
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Patent Citations (2)
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| CN103018925A (en) * | 2012-12-13 | 2013-04-03 | 大连理工大学 | Artificial electromagnetic metamaterial with tunable circular dichroism based on topology/graphene material |
| CN105044814A (en) * | 2015-08-03 | 2015-11-11 | 欧阳征标 | Right-hand circularly-polarized conversion meta-material film |
Non-Patent Citations (5)
| Title |
|---|
| "Optical planar chiral metamaterial designs for strong circular dichroism and polarization rotation;Do-Hoon Kwon et al;《OPTICS EXPRESS》;20080804;第2-3章 * |
| Chiral metamaterials: enhancement and control of optical activity and circular dichroism;Sang Soon Oh;《Nano Convergence》;20151231;全文 * |
| Circular dichroism of planar chiral magnetic metamaterials;M. Decker et al;《 OPTICS LETTERS》;20070401;全文 * |
| Metamaterial with negative index due to chirality;E. Plum et al;《PHYSICAL REVIEW B》;20090112;全文 * |
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