TW201036093A - Chamber and manufacturing method therefor - Google Patents

Abstract

Disclosed is a chamber for which proper sealing properties can be favorably maintained and which has excellent installation workability. A vacuum chamber (1) that is one embodiment of the invention is provided with first and second main chamber bodies (10) and (20) and a sealing member (71). After the first and second main chamber bodies (10) and (20) have been joined to each other in the vacuum chamber (1) of said configuration, a seal (71a) is installed around said joint (J1), thus facilitating micro-adjustments of the joint position during joining of the main chamber bodies. By improving the installation workability of the sealing component, proper sealing properties can be maintained.

Description

201036093 VI. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a chamber for maintaining a vacuum inside or a vacuum container for a gas, and a method for manufacturing the same, and more specifically A system of a knife-cut structure composed of a combination of a plurality of chamber blocks and a method of manufacturing the same. [Prior Art] Ο 〇 处 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' On behalf of her, Cong Cong's in the tenth-generation is expected to constitute a fine-level job. Therefore, the production of the work chamber will be further advanced in the future. Therefore, the method of forming the chamber is in the vacuum processing device. Installation workability, manufacturing costs, etc. will become increasingly important. The large size of i will lead to problems in production cost, problems in setting u, two, and rotation. Therefore, it is known to solve the aforementioned problems by cutting the vacuum chamber structure. For example, The method discloses seven methods for manufacturing a large sealing member by a plurality of chambers, a body of the upper chamber, and a joint body formed on the flange portion of each of the chamber sheets. It is ensured that the inside is sealed, and the continent is between the flange portions which are joined to each other by a plurality of bolts. [PRIOR ART DOCUMENT] [Patent Document] 2006-137995 [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei 3/31 No. 201036093. SUMMARY OF THE INVENTION The object to be solved by the invention is that the chambers are joined to each other. ^ 1 member is suitably located between the flange portions, that is, when the joint surface of the w + flange portion is assembled for the groove for positioning the sealing member, the sealing member must be proud of the groove Tighten the bolts in the state of the groove. If the flange portions of both sides are overlapped, it is difficult to visually mount the position: therefore, it is necessary to properly seal the sealing member (5). Further, since the sealing member is interposed between the flange portions of both of them, it is difficult to perform the position of the cavity sheet, which may cause a problem of reduced assembly workability. In view of the foregoing, it is an object of the present invention to provide a chamber which is excellent in sealing properties and excellent in group secrets and a method of manufacturing the same. Means for Solving the Problem A chamber according to the present invention has a first and second chamber body, a first joint mechanism, and a first seal member. The first and second chamber bodies are formed by a polyhedral shape having a first open end portion, and the first joining mechanism is joined to each other by the first and second chamber bodies. A first joint portion is formed at the open end portion, and the first seal member is disposed around the first joint portion and seals the inside of the first and second chamber bodies. A chamber according to another aspect of the present invention includes a plurality of chamber bodies, a coupling mechanism, and a sealing member. 4/31 201036093 The plurality of chamber systems each have at least one open end portion that is joined to each other. The joint mechanism forms a plurality of joint portions by mutually joining the respective open end portions of the plurality of chamber bodies, the seal The member is mounted around each of the plurality of joint portions and seals the inside of the plurality of chamber bodies.

A manufacturing method of a chamber according to an aspect of the present invention includes a program in which the open end portions of the first chamber body and the second chamber body are mutually joined to each other, and the rear sealing member is configured to surround the respective open end portions. The boundary portions of the first and second chamber bodies are joined to each other. [Embodiment] -V. The chamber according to the present invention - the first to second chamber body, the first joint mechanism, and the first seal member. The first and second chambers are formed by the multi-faceted (four) shape of the first open end 4, respectively. The aforementioned first-joining mechanism is formed by mutually joining the first and second chamber bodies. The first opening member is attached to the periphery of the first joint portion and seals the inside of the first and second chamber bodies. In the chamber of the square and the moon, in the chamber of the first and second chamber bodies, the portion of the mating portion of the mating portion is closed, so that the sealing member can be lightly and purely bonded to the chamber body. Improve the mounting of the sealing member. The workability ' ensures proper sealing. Typically, the chamber is a vacuum chamber having an internal pressure lower than atmospheric pressure, but is not limited thereto, and is also a pressure chamber (positive pressure chamber to) which is pressurized to atmospheric pressure.刖 "- and the second chamber body is in the shape of a box having a space of 5/31 201036093 ^face shape" and forming the surface of the first port end is not particularly limited. The first joint mechanism includes a body. The joint member, the joint material, the joint loss and the like; the second chamber bolt, the riding member of the screw scale: the front piece includes, the aforementioned joint (four), etc., and typically also in the group of the chamber The device is also used for temporary retention of the chamber body. However, if the first joint member or the joint member (4) is joined, the joint portion is formed. The flanges are formed by the peripheral edges of the respective chamber bodies, and the open ends of the respective chamber bodies form the joint portion: the end faces of the flange portions are tight, and the flanges are tight. :_ Two used inside the inner side. In the case of the former, in order to describe the position of the bolts, the shape of the bolts can be maintained and sealed, and the shape of the sealing member is limited by the shape of the ring of the Q material. The sealing member may be attached to the inner peripheral side of the joint portion on the outer peripheral side. _颂 'However, however, the first joint portion and the groove of the sealing member may be added to the joint portion, thereby having a mounting operation for accommodating the first sealing member; 6/31 201036093 Sex. The groove may be a groove formed around the first joint portion by joining the first and second chamber bodies, thereby ensuring proper sealing of the joint portion. The aforementioned grooves may be additionally formed after the joining of the chamber body to replace the foregoing examples. The chamber may further include a fixing member, and the fixing member fixes the first sealing member around the first joint portion, thereby improving the fixing property of the first sealing member to the first joint portion, And to ensure a good seal. The first and second chamber bodies may also have second opening and end portions, respectively, and the second opening end is connected to the first opening end and mutually mutually engaged by the first engaging mechanism. In combination, at this time, the chamber further includes a chamber plate, and the chamber plate collectively covers the second opening end portions of the first and second chamber bodies. With such a configuration, the degree of freedom in designing the chamber body constituting the chamber can be improved, and the chamber body can be constructed in accordance with specifications, handleability, workability, and the like. The second open end portion may be located on the same plane as the first open end portion when the first joining mechanism is engaged, or may not be. In the above configuration, the first sealing member may have a first sealing portion attached to the periphery of the first joint portion, and a second sealing portion attached to each of the second opening ends. The aforementioned chamber plate. At this time, after the chamber bodies have been joined, the first sealing portion is installed around the first joint portion, and the chamber plate is joined to the second sealing portion along the second opening end. . The second chamber body may further have a third open end, 7/31 201036093, and the third open π end portion is opposite to the first open end, and the front = the second opening: the end In succession, the chamber further includes a third chamber body, a first engagement mechanism, and a second sealing member. The third chamber system is formed in a polyhedral shape having a first open end portion, and the second joint mechanism is formed by mutually joining the three open end portions of the second chamber body and the third chamber body. The open end has two joints. The number of the first-heap component is increased in the number of the first eight-dimensional chamber body, and by forming the first-and-two-joint joint, the cavities can be joined to the body by the same order as described above. The second receiving member m _ and the second sealing member may be configured in the same manner as the first joining mechanism and the [sealing member]. The third chamber body may further have a second open end portion, and the mouth end portion is connected to the second open end portion of the chamber body. The front portion may be configured to collectively cover the second opening π end portion of each of the first plates. L and the second chamber body. At this time, the first sealing member and the second sealing member may be configured by a sealing member, and the common sealing member is attached to the sealing portion'. The flute of the joint portion: ~=, the periphery of the second joint portion; and the third seal member 2' are disposed between the second open end portions and the chamber plate. Other embodiments, joint mechanisms, and sealing members of the present invention are described. The plurality of chambers have a plurality of open end portions, and the joint mechanism is formed by the respective open ends of the body of the 201006093 main body, and the plurality of joints are mounted on the respective chamber bodies of the plurality of joint portions. Internal. The door back and the name seal describe the plurality of cavities in the lunar cavity to the middle. After the plurality of chamber bodies have been mutually δ, the joint position of the sealing body when the sealing body is joined around the plurality of joint portions is the density of the sealing member. The mounting workability can be properly handled. Ο The manufacturing method of the chamber according to the present invention-embodiment is attached to the open end of each of the chamber body and the second chamber body.

The floor is installed so that the surrounding portion 6 passes through the respective opening peaks and is also connected to the boundary portion between the first and second chamber bodies. L is in the manufacturing method of the foregoing chamber, after the mutual connection ===, the '(four) member is installed to enclose the second chamber" so that the e position can be easily performed when the chamber body is joined The micro-can operation, in addition, by the design, can 'goodly ensure proper sealing. The pureness of the blog: the manufacturing method of the chamber can also be carried out step by step: in the installation of the above = seal After the member, the sealing member is twisted in the boundary portion 2 to improve the sealing property of the sealing member to the boundary portion. The embodiment of the present invention will be described below with reference to the drawings. 'The following is a description of the case where the chamber of the present invention is a straight cavity for a vacuum processing apparatus." The first embodiment shows a vacuum chamber i 9/31 according to the first embodiment of the present invention. The overall perspective view of the structure of 201036093, the second diagram is an exploded perspective view of the vacuum chamber 1, and the third diagram is a perspective view illustrating the manufacturing method of the vacuum chamber 1. The vacuum chamber 1 of the present embodiment has a width direction in the x-axis direction, a longitudinal direction in the γ-axis direction, and a height direction in the z-axis direction. The vacuum chamber 1 includes a first chamber body 10, a second chamber body 20, a sealing member 71, and a chamber plate 50. The first chamber body 10 and the second chamber body 20 are opposite in length direction. The body of the vacuum chamber 1 is formed by being joined to each other. Each of the chamber bodies 〇 and 20 is formed of a metal material such as stainless steel or aluminum alloy, and is formed into a polyhedral shape having space portions S1 and S2 therein by a processing such as press molding or welding. In the present embodiment, the chamber bodies 10 and 20 are each formed into a hexahedral shape in which the two end portions are opened. The first and second chamber bodies 10 and 20 respectively have open end portions 11 and 21 (first open end portions) that open in the γ-axis direction. The open end portion 11 forms one of the four side faces of the first chamber body ίο, and the open end portion 21 forms one of the four side faces of the second chamber body 20. The first chamber body 10 and the second chamber body 20 are integrated by mutually joining the respective opening steps 11. and 21. The opening ends η and 21 respectively have a protrusion toward the outer side, and the chamber bodies 1 and 20 are formed by mutually joining the flange portions. Each of the flange portions 11F, 21F has a plurality of threaded holes = 匕 and each of the threaded holes h11 and h21 is formed in the threaded and h21 threaded joints: - the joint portion of the joint (W) (4) 10/31 201036093

On the outer peripheral portion of the mouth Q [U1, a groove τ1 for accommodating the first rear sealing portion 71a of the sealing structure is formed. In each of the flange portions UF and 21F, the first portion to the main body 10 and 20, and the groove U is formed on the outer peripheral side of the screw hole groove in the groove around the joint portion η. The first and second chamber bodies 1G and 2G have open ends 12 and 22 toward the opening, respectively (the second open end: the upper surface of the first chamber body 1G is formed, and the σ end is opened 22^^_ is the upper surface of the chamber body 20. The open ends 12 and 22 are formed on the first body 10, and the two chamber bodies 2 are joined to each other when the two chambers are joined together. The chamber f 50 is joined to The chamber body 1〇 and 2〇 cover the opening ▲ end: 12, 22, thereby forming a joint portion J0 between the first and second chamber bodies 1〇, 20盥 chamber plate. The plurality of screws h12 and h22' are formed on the inner peripheral sides of the screw holes hl2 and h22, respectively, and are formed to receive the groove of the second sealing portion 71b of the sealing member 71. The groove τ is less than 22. The grooves Τ12 and Τ22 are connected by joining the chamber bodies 1〇, 2〇曰, and form an annular groove. The first chamber body 系 is tied to the open π end portion The opposite side has an opening 19, and the second chamber body 20 also has an opening 29 in the side wall surface opposite to the disk opening 21. The openings 、9, 29$ form a passage for transporting a substrate to be processed such as a semiconductor wafer = a glass substrate between the inside and the outside of the vacuum chamber 1. A plurality of threaded holes M3 and h23 are formed in the opening portion 19 and the garden, respectively, for connecting vacuum chambers such as a vacuum chamber or a vacuum chamber to a vacuum chamber or a valve such as a gate valve. The openings 19 and 29 may be omitted as needed, or may be sealed by a lid when the opening of one of the openings 19, 29 is not used. The chamber plate 50 has a flat plate shape formed of a metal material such as stainless steel or aluminum alloy, and the chamber plate 50 has a rectangular shape having substantially the same size as the upper surfaces of the chamber bodies 0 and 20 which are joined to each other. A plurality of threaded holes h5 are formed around the chamber plate 5, and the threaded holes h50 are formed when the cavity-to-plate 50 is engaged with the cavity to the body 1〇, 2〇, and the opening ends η, 22 The threaded holes hi2 and h22 are connected to each other. The sealing member 71 is formed by various elastic materials used for forming a vacuum seal, and has a first sealing portion 71a and a second sealing portion 71b. The cross-sectional shape of the first sealing portion 71a and the second sealing portion 71b is not particularly limited, and may be a circular shape or a square shape. In the present embodiment, the first sealing portion 71a and the first sealing portion 71b have an integral structure, but they may be formed by different members. The first seal portion 7U is formed in a plane parallel to the plane of the crucible, and is formed in an annular shape. The first seal portion 7la is attached to the first and second chamber bodies 1〇, 2〇, and is attached to the joint portion j1. The groove T], thereby sealing the joint portion η. The sealing portion 71b is formed in a ring shape in a plane parallel to the plane of the Χγ, and the sealing portion 71b is coupled to the first and second chamber bodies 1〇 and 2〇, and is respectively provided with the grooves T12 and T22. The joint J0 is sealed. The vacuum chamber i of the present embodiment includes a fixing member 6, and the solid member is used to fix the sealing member 71 (the first sealing #71a) already mounted on the joint portion J1 to the joint portion. . The fixing member 6 is formed by gripping the groove formed in the joint portion J1 by using the screw structure, and the U seal portion 71a is held by the groove τ1. H14 and h24 are bolted. In the present embodiment, the objective member 6 is constituted by a plurality of rectangular plates of 12/31 201036093, and is arranged at equal intervals along the outer peripheral portion of the joint portion η, but is not limited thereto. Therefore, the fixing member 6 can also be constituted by a long pure # corresponding to the length of each side of the joint portion; Next, a method of manufacturing the true embodiment of the present embodiment constructed as described above will be described. /Working First, the first chamber body 10 and the second chamber body 2 are joined. In this procedure, the first open end portions u, 21 of the chamber bodies 10 and 20 are opposed to each other and the flange portions 11F and 21F of both sides are combined. Further, the screw members H1 and h21 which are arranged to be mutually aligned are inserted into the bolt member B1, and the flange portions 11F and 21F of the both sides are joined to each other, whereby the joint portions are formed. The bolt member m is not limited to being screwed to the screw holes h11 and h21, and may be sandwiched between the flange portions 11F and 21F by using a nut member. ' > In the present case, since the flange portion lip and the flange portion 2if are not joined together with the sealing member, the sliding resistance between the flange portions n F and 2 j F can be reduced, and it is easy The fine adjustment of the joint position is performed, and the workability is improved because the assembly of the bolt member B1 is easy. Next, the first sealing portion 71a of the sealing member 71 is elastically deformed and attached to the groove T1 which has been formed on the outer peripheral portion of the joint portion J1. The groove T1 is formed simultaneously with the formation of the joint portion F1. Therefore, the groove T1 can be appropriately formed by appropriately forming the joint portion J1, whereby the first seal portion 71a is attached as described above. The groove τ ΐ can obtain a proper sealing effect of the joint portion ji. Here, since the bolt member B1 is disposed on the inner side of the vacuum chamber 1 in comparison with the mounting position of the first seal portion 71a, the bolt member B1 and the screw hole hib h21 may not be able to be used. Get the predetermined seal. In this case, in order to ensure the aforementioned sealing property, a method of winding the sealing tape around the bolt portion 13/31 201036093 B1 portion or mounting the sealing ring may be employed. The sealing tape and the sealing ring constitute a sealing portion capable of maintaining airtightness between the body of the nut and the body of the nut, and the second member of the sealing member 71 is formed in the cavity. The chamber body K) and the 2Q system are installed in the industry slot one. The second sealing portion (four) groove may be operated before or after the first sealing portion 71a and the ===, or may be simultaneously. 9 is installed as δ, and then the body 2 = tired, assisting, opening the opening k of the chamber plate 5_body 10 20, 2, 22, thereby forming the joint sealing portion 71b by losing into the chamber plate 5Q and ' Ensure the tightness of the joint J0. Between the bottles of 20 bottles η: the bolt member B3 'mounts the fixing member 6 around the joint portion η, in order to prevent misalignment of the first sealing portion 7U with respect to the joint portion η, and to ensure the sealing of the joint portion η . According to the above configuration, a vacuum chamber having a space portion is provided in the present embodiment. In the present embodiment, the direct medium is 1# Μ, the chamber body 10, and the second chamber body; the chamber is divided into the first chamber group and the monthly work. There are three to the board 50, so it is also possible to avoid the large-scale processing equipment. 2 It can also solve the problem of the reduction of the setting workability or the transportation. Large vacuum chamber. The lower eight τι 八 - again == this embodiment' has various advantages over the conventional split vacuum chamber. The fourth_display shows the construction of the vacuum chamber 1000 as a comparative example. The vacuum chamber of the comparative example includes a first chamber body 14/31 201036093 100, a second chamber body 200, a chamber plate 500, and a sealing member 15. The chamber body 100 and the second chamber body 200 are separated in the γ-axis direction, respectively, and have first opening ends U1 and phantoms that open in the Y-axis direction. The first and second chamber bodies 1 and 2 are such that the respective open end portions Hi face each other, and are joined by joining the flanges 111F and 121F by a plurality of bolt members. The sealing member 15 has a first sealing structure and a second sealing portion 15b. The first sealing portion 15a is attached to the second chamber body 100 when the first chamber body 100 is engaged with the second chamber body 200. The flange portion (10) is located between the flange portion (10) and the other flange portion 121F. ^The respective joint faces of the flanges 111F, 121F respectively form a groove V1 for accommodating the first sealing jaw 15a, and the chamber plate 5 is a plurality of screw members =: in the cavity, the bodies 100 and 200 respectively Above, the second open end portions 112, 122 covering the direction of the yaw axis are covered. At this time, the second sealing portion ISb of the sealing member 15 is attached to the grooves V21 and V22 which have been formed in the opening end portions U2, 122. In the vacuum chamber 1 of the comparative example of the above configuration, when the chamber body is rigidly joined to each other, the first sealing portion 15a must be appropriately positioned between the flange portions 111F and 121F. That is, since the groove for forming the sealing portion is formed on the joint surface of each of the flange portions (1) f and 121F, it is necessary to seal the groove to the body 100, 200. The portion 15a is fitted with the groove in the state of the groove ¥1. However, it is difficult to hunt the flanges of the two sides (ni) and 121F, and it is difficult to hunt the installation of the (4) part (5). Therefore, the work for properly sealing the seal 4 15a requires proficiency. Further, since the sealing jaw 15a is interposed between the flange portions 1UF and 12iF of both sides, it is difficult to finely adjust the positions of the chamber bodies 100 and 200. For this reason, the assembly workability is also reduced 15/31 201036093. The problem. On the other hand, in the vacuum chamber i of the present embodiment, after the chamber bodies 10 and 20 are joined to each other, the sealing portion 71a' is attached around the joint portion η, so that the chamber can be easily performed in the chamber. Micro-adjustment of the joint position at the time of joining of the main body 1〇 and 2〇. Further, according to the present embodiment, since the sealing portion 71a is provided after the formation of the joint portion;], the mounting workability of the sealing portion 7U can be greatly improved. In addition, as described above, the accuracy of the groove T1 formed on the outer peripheral side of the joint portion J1 can be improved by appropriately forming the joint portion, whereby the accuracy of the seal portion 71a can be improved, and On the other hand, in the above embodiment, the flange portions UF and 21F of the chamber bodies 10 and 20 are respectively formed by (1), and the chamber body 1〇, 2 can be formed. The crucible and the chamber plate 50 are configured to be freely detachable, and the decomposition operation of the vacuum chamber is easy. When it is lacking, it is limited to the configuration. For example, the weirs 11F, 21F may be joined by welding, or the flange portions 11p, the combination of ===, the use of clamps or various The agent, the clerk, specifically forms the joint J1. Further, the flange portions ιιρ may not be formed, and the opening ends U, 21 of the chamber bodies ίο, 20 may be directly joined. The joining member forming the joint portion II is not limited to the residue as an example. For example, a joining force suitable for the flange portion 1ΐρ and the pressing member may be used, and after the sealing portion 71a is installed, the joint is removed. Person == his joint mechanism (joint or joint material of bolts, etc.): In addition, the groove 16/31 201036093 formed in the outer peripheral surface of the joint portion is inferior: After the formation of the joint portion J1, the front and the seal portion 71a are formed on the outer peripheral portion thereof, and the slats, the θ clothes, and the cymbal plate are additionally provided on the outer surface of the joint portion J1. Applicable >j various configurations are also possible in the following other embodiments (second embodiment). : :: The vacuum chamber 2 according to the second embodiment of the present invention is shown. . In addition, in FIG. 47, the nucleus corresponding to the above-described first embodiment is denoted by the _ symbol, and the detailed description thereof will be omitted. The second has a first chamber - 1 chamber, chamber plate 52. (4) member 72 + chamber plate 51 and second cavity lirJ body 1 has an open end opening toward the axis of the shaft = first: opening end); and two open ends η Υ axis opening in the direction of the yaw axis Further, the second chamber body 2 has a squealing jaw portion 21 (first opening end portion) and a yaw shaft portion 22 and 23 (second opening end portion). The first chamber ugly january unit body 20 is mutually joined through the first sealing portion of the sealing member 72, the first and second chamber body Η), and the 51 plate 51 is transmitted through the sealing member The second sealing portion and the second chamber body 10, 20 are joined to the third sealing portion 72c of the second chamber plate "field member 72" by the second sealing portion. #八::3二Each of the chamber body 1〇, 2〇's open end portion 1 21 "knife" has flange portions 11f, 2if protruding in the X-axis direction through a plurality of bolt members to join the flange portions, and Connect 17/31 201036093 and the first chamber body 10, 20. The flange portions 11F, 21F form a chamber body

a joint portion (first joint portion), and a groove portion t1 formed at a peripheral portion of each of the flange portions 11F and 2]F ^ the joint surface, and the groove portion tl is formed to be formed when the joint portion is formed The groove of the sealing portion 72a. ^ and the second chamber body 1〇, 2〇 respective open end portions, 22 places ★ 'knife formed to accommodate the second sealing portion 72b of the groove D12, T22, 荨 乜 丁 12, 7 22 When the chamber bodies 1 and 20 are joined, they are combined to form a known groove. Similarly, the respective opening end portions 13'23 of the first and second chamber bodies ι, 2〇 are respectively formed with grooves for accommodating the third sealing portion 72c, and the grooves are attached to the chamber body] When 0 and 20 are joined, they form a ring groove. The sealing member 72 has a first sealing portion 72a, a second sealing portion 72b, and a third sealing portion 72c, and is integrally formed. The first sealing portion 72a is a second and third sealing portion 7, 72c that are connected to each other in an annular shape. The first chamber plate 51 is transmitted through the second sealing portion 72b and joined to the upper surfaces of the chamber bodies 1 and 2 by using a plurality of jaw members to cover the open ends ^12, 22. The second chamber plate 52 is passed through the third sealing portion 72c and joined to the underside of the chamber bodies 10, 20 using a plurality of bolt members to cover the open ends 13, 23. The vacuum chamber 2 of the present embodiment is in phase with the first embodiment described above. After the first and second chamber bodies have been joined to each other, the first and second chamber bodies are connected to each other, and then placed around the second &#J1. A sealing portion 72a is provided. In the installation of the sealing portion, the first lifting and sealing portion 72b is installed in the groove T12 of the opening end portions 12, 22, and the second sealing portion is provided at the opening end portions 13, 23 The aforementioned first and second chamber plates 51, 52 are coupled to the chamber bodies 10, 20. Further, the fixing member 6 is joined to the joint portion η, whereby the first seal portion 72a is held by the joint portion ji at 18/31 201036093. The vacuum chamber 2 of the present embodiment is manufactured as described above. According to this embodiment, the same operational effects as those of the first embodiment described above can be obtained. (Third Embodiment) Fig. 6 is an exploded perspective view showing the structure of a vacuum chamber 3 according to a third embodiment of the present invention. In the drawings, the same reference numerals are given to the parts corresponding to the first embodiment, and the detailed description thereof will be omitted. The vacuum chamber 3 of the present embodiment includes a first chamber body 1〇, a first L to a body 2〇, a third chamber body 3〇, a fourth chamber body 4〇, a sealing member 73, and a cavity. Room plate 5 〇. > + - , · The first and fourth chamber bodies 1〇, 4〇 have openings opening in the γ-axis direction: end turns 41, 41 (first open end); and the open end of Zhao Ganzhi toward the ζ axis Portions 12, 42 (second open end). The second and third chamber bodies 2〇, = have open ends 21, 31 that open in the direction of the x-axis (first open end)

Qp), opening end portions 22, 32 (second opening end portions) opening in the direction of the yaw axis; and opening end portions 24, 34 (third opening 〇 end portions) opposed to the opening end portions 21, 31. The first chamber body 1〇 and the second chamber body 2 are mutually coupled through the first sealing portion 73a of the sealing member, and the second chamber body 20 and the second chamber body 30 are transmitted through the sealing member 73. The second sealing portion 73b is joined to each other. The third chamber body 3 and the fourth chamber body 4 are mutually coupled to each other through the third sealing portion 73c of the sealing member 73. Further, the first to fourth months The bodies 10 to 40 and the chamber plate 51 are mutually joined by the fourth sealing portion 73d of the sealing member 73. ^The respective open ends 11, 21 of the first and second chamber bodies 10, 20 have flange portions UF, 21F, respectively, and are passed through a plurality of flange members 19/31 201036093 =, Xi 2 4, etc. The first portion and the second portion are joined by the portions uf and 2if (the first/n-th 11F, the second portion F forms the joint (four) and the joint portion of the chamber main bodies 1G and 20), and is joined to the flange portions 11F and 21F. A groove portion t1 is formed in the circumference of the surface, and the groove portion l is used for the joint portion. When formed, the groove for accommodating the first seal portion 73 & 4. The respective open ends 24, 3i of the second chamber bodies 20, 30 are two: 22:, and are passed through Fuchuan, ♦. ["24?, 31? and the second and third chamber body joints 4)' and the peripheral borings of the joint faces of the flange portions 24F, 31F are formed with the groove portion t2, 1 The t2 is used to form a groove for accommodating the second sealing portion 73b when the joint portion J2 is formed. ^ In the eight-inch s and the fourth chamber body 3〇' 4G each open end 34, 41 彖 Shao 3 Park, 41F and the third and fourth chamber body part sighs the third 3 Zhong, Xian system cavity The chamber body 30, 40 is joined to the circumference of the joint surface of each of the flange portions 34F and 41F. The groove portion t3 is formed in the joint portion j3. The groove of the third sealing portion 73c. 99, Π - to the fourth chamber body 1 〇 to 4 〇 each of the open end portion 12, the knife is formed to receive the fourth sealing portion 73d of the groove Τ 12, the sun 舻, Τ 42, the groove 12 Τ22, Τ32, Τ42 are formed in a chamber and sealed at the joint of 4 而 to form an annular groove. The member 73 has a first sealing portion 仏, a second sealing portion, a third portion, and a fourth sealing portion 73, and is integrally formed. The first seals #73& to 73C are formed to be coupled to the annular fourth seal portion 20/31 201036093 73d. Four sealing portions 73d, and using a plurality of screw inspections 10 to 40 to cover the open end

After the vacuum chambers 3 of the present embodiment have been joined to the first to the chamber bodies 10 to 4G, respectively, seals 73a to 73c are provided around the joint portions thereof. The fourth seal 73d is installed in the grooves T12, T22°, Τ32, Τ42 of the open end portions 12, 22, 32, 42 in the agricultural sealing portion 73a to the agricultural installation, and then the chamber plate 5Q is respectively Engaged in the chamber body (7) to 4〇. Further, the 'fixing member 6 is joined to the joint portion' to J4, respectively, whereby the first seal portion 73a is held by the joint portions j1 to j4. The vacuum chamber 3 of the present embodiment is manufactured according to the description of the month. In the present embodiment, when the chamber main body portion is divided into a plurality of three or more, the same operational effects as those of the first embodiment can be obtained. (Fourth embodiment)

The chamber plate 50 is joined to the chamber body 12, 22, 32, 42 through the first member. Fig. 7 is an exploded perspective view showing the configuration of the vacuum chamber 4 according to the fourth embodiment of the present invention. In the drawings, the same reference numerals are given to the parts corresponding to the second embodiment, and the detailed description thereof will be omitted. "In the vacuum chambers 1 to 3 of the above-described embodiments, the chamber body is divided in the X-axis direction, and the vacuum chamber 4 of the present embodiment is divided into the chamber body in the X-axis direction and the Y-axis direction, that is, The vacuum chamber 4 of the present embodiment includes a first chamber body 10A, a second chamber body 1B, a third chamber body 20A, a fourth chamber body 20B, a sealing member 74, and a first chamber plate. 51 and the second chamber plate 52. The first and second chamber bodies 10A, 20A respectively have flange portions 19AF, 19BF' joined in the X-axis direction, and the flange portions 19AF, 19BF are 21/31 201036093 The first chamber body unit 110 having the joint portion J4 is formed by being joined to each other by a plurality of bolt members. The seal portion for accommodating the seal member 74 is formed at the peripheral portion of the joint surface of the flange portions 19af and 19BF. The groove portion t4 of the portions dl and d2, and the first chamber body 1A and the second chamber body 10B are joined to each other, and the opening portion 19 is formed on one side surface of the first chamber body unit 11b. The first and second chamber bodies 1 and 〇Β are respectively provided along the circumference of the opening 19 The grooves T19A, T19B of the sealing portion 7 of the sealing member 74 are accommodated. The third and fourth chamber bodies 20A, 20B have flange portions 29AF, 29BF joined in the X-axis direction, respectively, and the flange portions 29AF, The 29BF is joined to each other by a plurality of bolt members, thereby constituting the second chamber body unit 120 having the joint portion J5. The peripheral portion of the joint faces of the flange portions 29AF and 29BF is formed to receive the seal member 74, respectively. The groove portion t: 5 of the sealing portions el, e2, and further, by mutually engaging the third chamber body 2A, the fourth chamber body 20B, the side surface of the second chamber portion 12() The opening portion 29. The second and fourth chamber bodies 2A, 2B are respectively provided with grooves (not shown) that accommodate the sealing portion % of the sealing member % along the periphery of the opening portion 29. The chamber body unit 110 has an opening end portion opened in the Y-axis direction called an opening-opening π end portion; and two opening end portions 12 and 13 (second opening end portion) that open in the z-axis direction. Similarly, The second chamber body unit 12 has an open end 21 (first open end) that opens toward the Y-vehicle; Two open end portions 22 and 23 (second open end portions) opening in the z-axis direction. The first cavity to the body unit 110 and the second chamber body unit 12 are permeable to each other through the sealing portion 74a of the sealing member 74 Ground engaging, the first and second chamber body units 110, 12 and the first chamber plate w are mutually joined by the sealing member % 22/31 201036093 sealing portion 74b, and again, the first and second chambers The chamber body units 11A, 120 and the second chamber plate 52 are mutually joined by the sealing portion 74c of the sealing member 74. The respective open end portions 11 and 21 of the first and second chamber body units 11A and 12b respectively have flange portions 11AF, 11BF, 21AF, and 21BF protruding in the X-axis direction, and are passed through a plurality of bolt members. The flange portions are joined to engage the first and second chamber body units 11A, 12B. The flange portions 11AF, 11BF, 21AF, 21BF form the chamber body units 11〇, 12〇

The joint portion of the crucible; 1 (the first joint portion)' is formed with a groove portion ti for forming a housing seal portion 74a at the peripheral edge portion of the joint surface of each flange portion. Groove. The respective opening ends 12, 22' of the first and second chamber body units 11G, 12G are respectively formed with grooves mm T22A, T22B' for receiving the sealing portion 74b, and the grooves are attached to the chamber body unit iiQ, The u◦ is joined to form an annular groove. Similarly, in the first and second chambers = the respective open ends 13, 23 are divided into 'male,. The grooves of 74e are f, and the grooves are combined to form an annular groove when the chamber body units 110, 12G are joined. The town- Ϊϋί?74 has a first sealing portion 74&, a second sealing portion 74b, a fourth sealing portion (1), d2, a fifth sealing portion..., 74e, °* formed to be mutually coupled to each other in a ring shape Three seals 4 74b ϋ four seals (1), 汜 封 seals ” connected to the ring of the sixth seal two two 7 correction, 74e2 system formed into the seventh seal part 74e of the material in the shape of the second brother, Masaki Connecting ring 23/31 201036093 The heading chamber plate 51 is joined to the end portion (4) of the chamber body unit through the sealing portion 74b' and using a plurality of bolt members. The second chamber plate 52 is a joint member and is joined to the chamber body. The unit = = with the cover end 13 , 23 r μ body ==: 'The first and second chambers have been assembled separately to each other. After the first and second 120 have been engaged 'After the joint portion, the yoke is disposed at the joint portion T4 I a series, and the groove portion t4 is attached to the joint portion J5. The seal portion el, e2 is the mouth end Qiu | Zhou _ ditch# The sealing portion 7 is provided in the grooves T12A, T12B, and T22 of the openings wu, 22 at the aforementioned grooves of the opening ends 13, 23, and then the two chambers f 51, 52 When the system is joined to the chamber body unit, the flange T19A side:: seal: % is a groove 2·τ19Β installed around the opening 19. The sealing portion 74e is a groove provided around the opening 29. ^ ' The fixed member 6 is joined to the joint portion η, whereby the seal portion 74a is held by the joint portion J1. The vacuum chamber 4 of the present embodiment is manufactured as described above. The second embodiment is in the chamber body. When the part is divided into a plurality of four or more, the same effect as the embodiment of the present invention can be obtained. The embodiments of the present invention have been described above. Of course, the present invention is not limited thereto, and various types can be made according to the technical idea of the present invention. For example, in the above embodiments, an example in which the present invention is applied to a vacuum chamber is described. (10) The present invention can also be applied to a pressure chamber in which the internal pressure is maintained at a pressure higher than the external pressure. Room (positive pressure chamber). 24/31 201036093 Further, in the above embodiment, the chamber system is formed by a schematic hexahedral shape, but alternatively, other polyhedral shapes such as an octahedral shape may be used instead. To form. It is not limited to the example in which the two chamber bodies are joined at one joint portion, and one joint portion may be formed by the open end portions of the chamber body of three or more. Further, the above embodiment is to install the sealing member. The outer peripheral portion of the joint portion of the chamber body, however, the sealing member may be installed at the inner peripheral portion of the joint portion. Such a configuration is advantageous when the present invention is applied to a positive pressure chamber. The first drawing shows a perspective view of the entire structure of the vacuum chamber according to the first embodiment of the present invention. The second drawing is an exploded perspective view of the vacuum chamber of the first figure. The third figure is a perspective view illustrating a method of manufacturing the vacuum chamber of the first figure. The fourth figure is an exploded perspective view of a conventional vacuum chamber of the comparative example. Figure 5 is an exploded perspective view of a vacuum chamber in accordance with a second embodiment of the present invention. Figure 6 is an exploded perspective view of a vacuum chamber in accordance with a third embodiment of the present invention. Figure 7 is an exploded perspective view of a vacuum chamber in accordance with a fourth embodiment of the present invention. [Main component symbol description] 1, 2, 3, 4, 1000 vacuum chamber 25/31 201036093 6 fixing member 10, 10A, 100 first chamber body 10B, 20, 200 second chamber body 11, 21, 31 , 41, 111, 121 open end (first open end) 11AF, 11BF, 11F, 19AF, 19BF, 21AF, 21BF, 21F, 24F, 29AF, 29BF, 31F, 34F, 41F, 111F, 121F flange 12, 13, 22, 23, 32, 42, 112, 122 open end (second open end) 15, 71, 72, 73, 74 sealing member 15a, 71a, 72a, 73a, 74a first sealing portion 15b , 71b, 72b, 73b, 74b second sealing portion 19, 29 opening portion 20A, 30 third chamber body 20B, 40 fourth chamber body 24' 34 open end portion (third open end portion) 50, 500 cavity Chamber plate 51 First chamber plate 52 Second chamber plate 72c, 73c, 74c Third sealing portion 73d, dl, d2 Fourth sealing portion 74d Six sealing portion 74e Seven sealing portion 110 First chamber body unit 120 Second chamber body unit B B2, B3 bolt member el, e2 fifth sealing portion 26/31 201036093 thread hn, hl2, hl3, hl4, h2 h22, h23, h24, h50 Hole JO, J4, J5 Joint portion J1 Joint portion (first joint portion) J2 Joint portion (second joint portion) J3 Joint portion (third joint portion) S, SI, S2 Space portion T22B, Tb T12, T12A, Trench t1, t2, t3, t4, t22

27/31

Claims (1)

201036093 VII. Patent application scope: 1. A chamber having: first and second chamber bodies, each having a polyhedral shape of a first open end; a first engaging mechanism, which is joined by each other Forming a first joint portion by each of the first opening ends of the first and second chamber bodies; and a first sealing member installed around the first joint portion and sealing the first and second portions The interior of the chamber body. 2. The chamber of claim 1, wherein the first joint portion has: a first joint surface formed at the first open end; and a second joint surface formed in the foregoing a first opening end portion facing the first joint surface, wherein the first joint mechanism is a plurality of joint members that penetrate the first joint surface and the second joint surface to make the first joint surface and the second joint surface The joint faces are joined to each other. 3. The chamber according to claim 2, wherein the first sealing member is disposed around the first joint portion on the outer peripheral side of the through position of the joint member. 4. The chamber of claim 3, wherein the binding member has a sealing portion, and the sealing portion maintains airtightness to the first chamber body and the second chamber body. 5. The chamber of claim 1, wherein the first engaging portion has a groove around the first sealing member for receiving the first sealing member. 6. The chamber of claim 5, wherein 28/31 201036093 the groove is a groove formed around the first joint portion by joining the first and second chamber bodies. 7. The chamber according to claim 1, further comprising: a fixing member, wherein the fixing member fixes the first sealing member around the first joint portion. 8. The chamber of claim 1, wherein the first and second chambers each have a second open end, and the second open end is connected to the first open end And combining with each other when the first engaging mechanism is engaged, and the chamber further includes a chamber plate, and the chamber plate collectively covers the second open end of the first and second chamber bodies . 9. The chamber of claim 8, wherein the first sealing member has: a first sealing portion attached to the periphery of the first joint portion; and a second sealing portion Provided between each of the second open end portions and the chamber plate. 10. The chamber of claim 8, wherein the second chamber body further has a third open end, and the third open end is opposite to the first open end, and The second open end is connected to each other, and the chamber further includes: a third chamber body having a polyhedral shape having a first open end; and a second engaging mechanism for mutually engaging the second chamber body The third opening end portion and the first opening end portion of the third chamber body form a second joint portion; and the second sealing member is disposed around the second joint portion. The chamber of claim 10, wherein the third chamber body further has a second open end, and the second open end is engaged by the second engaging mechanism And contacting the second open end of the second chamber body, wherein the chamber plate collectively covers the second opening of each of the first, second and third chamber bodies. 12. The chamber of claim 5, wherein the first sealing member and the second sealing member are formed by a common sealing member, and the common sealing member has: a portion installed around the first joint portion; a first seal portion 'attached to the periphery of the second joint portion; and a = seal portion for each of the second open D ends The chamber plate 13. a chamber having: a plurality I to a body each having at least one portion joined to each other; an engagement mechanism that mutually engages the aforementioned opening of each of the plurality of chamber bodies The plurality of joints are formed at the ends; and the profit seal member is mounted around each of the plurality of joint portions and seals the inside of the plurality of chamber bodies. 14. A method for manufacturing a seed chamber, which mutually engages an open end portion of a second chamber body of a first chamber body disk, and sets a sealed structure county to surround each opening The boundary portions of the first and second chamber bodies are joined to each other. 15. The method of manufacturing a chamber according to claim 14, further comprising: ', 〆, 30/31 201036093 a procedure for fixing the sealing member to the boundary portion after the sealing member is installed. 31/31