KR20100123885A

KR20100123885A - Chamber and manufacturing method therefor

Info

Publication number: KR20100123885A
Application number: KR1020107021587A
Authority: KR
Inventors: 다이스케 요시다
Original assignee: 가부시키가이샤 아루박
Priority date: 2009-02-06
Filing date: 2010-02-01
Publication date: 2010-11-25
Also published as: JP5158994B2; TW201036093A; WO2010089986A1; CN102007575A; JPWO2010089986A1

Abstract

The present invention provides a chamber capable of ensuring proper sealing properties and excellent in installation workability and a method of manufacturing the same.
The vacuum chamber 1 which concerns on one Embodiment of this invention is equipped with the 1st and 2nd chamber main bodies 10 and 20, and the sealing member 71. In the vacuum chamber 1 of the said structure, after the 1st and 2nd chamber main bodies 10 and 20 are mutually joined, the seal part 71a is attached to the circumference | surroundings of the junction part J1. Therefore, the fine adjustment work of the joining position at the time of joining of a chamber main body becomes easy. In addition, it is possible to secure appropriate sealing properties by improving the attachability of the sealing member.

Description

Chamber and its manufacturing method {CHAMBER AND MANUFACTURING METHOD THEREFOR}

The present invention relates to, for example, a chamber used as a vacuum container for maintaining an interior in a vacuum or a reduced pressure atmosphere, and a method of manufacturing the same. More specifically, a chamber having a divided structure comprising a combination of a plurality of chamber blocks, and a It relates to a manufacturing method.

As the substrate is enlarged, the vacuum chamber used for vacuum processing apparatuses, such as a film-forming apparatus and an etching apparatus, is also enlarged. For example, the dimension of the length and width of the glass substrate for flat panel displays is about 2850 mm x 250 mm in 10th generation, and is expected to be about 3200 mm x 700 mm in 11th generation. Therefore, since the vacuum chamber is also further enlarged in the future, the structure and manufacturing method of the chamber become more important in terms of installation workability of the vacuum processing apparatus, manufacturing cost, and the like.

The enlargement of the vacuum chamber causes a problem in manufacturing cost, a problem in installation workability, and a transport problem. For this reason, it is known that the vacuum chamber is divided into solutions to solve the above problems. For example, Patent Document 1 describes a method of manufacturing a large vacuum chamber by forming a main body of a vacuum chamber into a plurality of chamber pieces and joining flange portions formed on the joining surfaces of the respective chamber pieces to each other. . The vacuum chamber is secured inside by a seal member mounted between the flange portions joined together by a plurality of bolts.

Japanese Patent Laid-Open No. 2006-137995

In the vacuum chamber described in Patent Document 1, it is necessary to appropriately position the seal member between the flange portions when joining the respective chamber pieces to each other. That is, since the groove | channel for positioning a seal member is formed in the joining surface of each flange part, it is necessary to tighten a bolt firmly in the state which inserted the seal member in the said groove | channel at the time of assembly of a chamber piece. .

However, it is difficult to visually confirm the mounting position of a seal member, if both flange parts are repeated and put together, the work for attaching a seal member appropriately requires skill. Moreover, since the sealing member is pinched between both flange parts, it is difficult to fine-tune the position of a chamber piece, and this has the unfavorable aspect that attachment workability falls because of this.

In view of the above circumstances, an object of the present invention is to provide a chamber capable of securing appropriate sealing properties and excellent in installation workability and a method of manufacturing the same.

The chamber which concerns on one form of this invention is equipped with the 1st and 2nd chamber main body, a 1st bonding means, and a 1st sealing member.

The said 1st and 2nd chamber main body is formed in the polyhedron shape which has a 1st opening edge part, respectively. The said 1st joining means forms a 1st joining part by joining the said 1st opening edge part of each of the said 1st and 2nd chamber main body mutually. The first seal member is mounted around the first joining portion to seal the inside of the first and second chamber bodies.

A chamber according to another aspect of the present invention includes a plurality of chamber bodies, joining means, and a seal member.

The plurality of chamber bodies each have at least one opening end joined to each other. The said joining means forms a some junction part by joining the said opening edge part of each of the said several chamber main body mutually. The said seal member is attached to each circumference | surroundings of the said some junction part, and seals the inside of the said some chamber main body.

The manufacturing method of the chamber which concerns on one form of this invention includes the process of joining each opening edge part of a 1st chamber main body and a 2nd chamber main body mutually. The seal member is mounted to surround the boundary of the first and second chamber bodies joined to each other via the respective opening ends.

1 is a perspective view showing the overall configuration of a vacuum chamber according to a first embodiment of the present invention.
2 is an exploded perspective view of the vacuum chamber of FIG. 1.
3 is a perspective view illustrating a method of manufacturing the vacuum chamber of FIG. 1.
4 is an exploded perspective view of a conventional vacuum chamber according to a comparative example.
5 is an exploded perspective view of a vacuum chamber according to a second embodiment of the present invention.
6 is an exploded perspective view of a vacuum chamber according to a third embodiment of the present invention.
7 is an exploded perspective view of a vacuum chamber according to a fourth embodiment of the present invention.

The chamber which concerns on one Embodiment of this invention is equipped with the 1st and 2nd chamber main body, a 1st bonding means, and a 1st sealing member.

About the chamber of the said structure, after a 1st and 2nd chamber main body is joined together, a seal member (1st seal member) is attached to the circumference | surroundings of the junction part (1st junction part). Therefore, the fine adjustment work of the joining position at the time of joining of a chamber main body becomes easy. In addition, it is possible to secure appropriate sealing properties by improving the attachability of the sealing member.

The chamber is typically a vacuum chamber whose internal pressure is lower than atmospheric pressure, but is not limited thereto, and may be a pressure chamber (positive pressure chamber) whose internal pressure is higher than atmospheric pressure. The said 1st and 2nd chamber main body is a box-shaped polyhedron shape which has space inside, and the surface in which the said 1st opening edge part is formed is not specifically limited.

As said 1st bonding means, the bonding tool which joins a 1st and 2nd chamber main body mutually, a bonding material, a joining jig | tool, etc. are contained. The joining tools include fastening tools such as bolts, screws and clamp tools. The bonding material includes an adhesive, an adhesive tape, a welding material or beads formed by welding. Although the said joining jig is typically regarded as a positioning jig for temporarily fixing, it may be left unseparated even after assembly of the chamber. In the case where the first joining means is for temporarily fixing the chamber main body, the joining portion is fixed using various joining tools or joining materials after the sealing member is mounted.

The said 1st junction part is formed by joining the opening edge part of each chamber main body mutually. Typically, a flange part is formed around the opening edge part of each chamber main body, and the said junction part is formed by joining the cross sections of these flange parts mutually. In this case, as the joining means, for example, a plurality of lines of bolts that firmly tighten both flange portions can be used. The seal member may be attached to the outer circumferential side rather than the fastening position of the bolt, or may be attached to the inner circumferential side of the fastening position of the bolt. In the former case, in order to ensure the sealability at the tightening position of the bolt, a seal portion that holds airtightness with the chamber main body may be formed in the bolt.

The said 1st seal member is typically comprised by annular sealing members, such as a ring. The cross-sectional shape of the seal member is not particularly limited, and may be circular or polygonal. Although the said seal member is attached so that it may elastically adhere to the outer peripheral side of the said junction part, you may be attached to the inner peripheral side of the said junction part.

The said 1st junction part may have the groove | channel for accommodating the said 1st sealing member in the circumference | surroundings of the said 1st junction part. Thereby, attachment workability of the said seal member can be improved.

The said groove may join in the groove part formed around the said 1st junction part by joining the said 1st and 2nd chamber main body. Thereby, appropriate sealing property of a junction part can be ensured. Instead of the above example, the trench may be separately formed after the chamber body is joined.

The said chamber may further be equipped with the fixing member which fixes the said 1st sealing member to the circumference | surroundings of the said 1st bonding part. Thereby, it becomes possible to raise the fixability of the 1st sealing member with respect to a 1st junction part, and to ensure favorable sealability.

The said 1st and 2nd chamber main body may have the 2nd opening edge part which is continuous with the said 1st opening edge part, and mutually engages at the time of joining by the said 1st bonding means, respectively. In this case, the said chamber further has a chamber plate which coat | covers the said 2nd opening edge part of the said 1st and 2nd chamber main body in common.

By such a configuration, the degree of freedom in designing the chamber main body constituting the chamber can be increased, and the chamber main body can be configured in accordance with specifications, handleability, processability, and the like. The second opening end portion may or may not be located on the same plane as the first opening end portion at the time of bonding by the first bonding means.

In the above configuration, the first seal member may have a first seal portion to be mounted around the first joining portion, and a second seal portion to be mounted between the respective second opening ends and the chamber plate. .

In this case, after joining each chamber main body, a 1st seal part is attached to the circumference | surroundings of a 1st junction part. And the chamber plate is joined in the state which the 2nd seal part was attached along the 2nd opening edge part.

The second chamber main body may face the first opening end, and may further have a third opening end that is continuous with the second opening end. In this case, the said chamber further includes a 3rd chamber main body, 2nd bonding means, and a 2nd seal member.

The said 3rd chamber main body is formed in the polyhedron shape which has a 1st opening edge part. The second joining means forms a second joining portion by joining the third opening end of the second chamber body and the first opening end of the third chamber body to each other. The second seal member is mounted around the second joint portion.

Thus, even if the number of chamber main bodies increases, it is possible to join each chamber main body in the same procedure as the above-mentioned by forming the 2nd junction part same as a 1st junction part. The second joining means and the second seal member can be configured in the same manner as the first joining means and the first seal member.

The third chamber body may further have a second opening end portion that is continuous with the second opening end portion of the second chamber body at the time of bonding by the second bonding means. The said chamber plate may be comprised so that the said 2nd opening edge part of each of the said 1st, 2nd and 3rd chamber main body may be coat | covered in common.

In this case, the said 1st seal member and the said 2nd seal member can be comprised by a common seal member. This common seal member is mounted between a first seal portion mounted around the first joining portion, a second seal portion mounted around the second joining portion, and each of the second opening ends and the chamber plate. It has a 3rd seal part which becomes.

A chamber according to another embodiment of the present invention includes a plurality of chamber bodies, joining means, and a seal member.

In the chamber of the said structure, after a some chamber main body is joined to each other, a sealing member is attached around the some junction part. Therefore, the fine adjustment work of the joining position at the time of joining of a chamber main body becomes easy, and also the attachment workability of a seal member improves, and it becomes possible to ensure appropriate sealability favorably.

The manufacturing method of the chamber which concerns on one Embodiment of this invention includes the process of joining each opening edge part of a 1st chamber main body and a 2nd chamber main body mutually. The seal member is mounted to surround the boundary of the first and second chamber bodies joined to each other via the respective opening ends.

In the manufacturing method of the said chamber, after joining a 1st and 2nd chamber main body, a seal member is attached so that the boundary part of a 1st and 2nd chamber main body may be enclosed. Therefore, the fine adjustment work of the joining position at the time of joining of a chamber main body becomes easy, and also the attachment workability of a seal member improves, and it becomes possible to ensure appropriate sealability favorably.

The manufacturing method of the said chamber may further have the process of fixing the said seal member to the said boundary part after attachment of the said seal member. Thereby, it becomes possible to improve the fixability of the seal member with respect to the said boundary part, and to ensure favorable sealability.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described based on drawing. In each following embodiment, the case where the chamber which concerns on this invention is a vacuum chamber for vacuum processing apparatus is demonstrated as an example.

(1st embodiment)

BRIEF DESCRIPTION OF THE DRAWINGS It is an overall perspective view which shows the structure of the vacuum chamber 1 which concerns on 1st Embodiment of this invention. 2 is an exploded perspective view of the vacuum chamber 1. 3 is a perspective view illustrating a method of manufacturing the vacuum chamber 1.

The vacuum chamber 1 of this embodiment has a height direction in a width direction, a Y-axis direction, a longitudinal direction, and a Z-axis direction in an X-axis direction. The vacuum chamber 1 includes a first chamber body 10, a second chamber body 20, a seal member 71, and a chamber plate 50.

The 1st chamber main body 10 and the 2nd chamber main body 20 face each other along the longitudinal direction, and are joined together, and comprise the main body of the vacuum chamber 1. Each chamber main body 10, 20 is formed with metal materials, such as stainless steel and aluminum alloy, is formed in the polyhedron shape which has space parts S1 and S2 inside through the process of press molding, welding, etc. In this embodiment, the chamber main bodies 10 and 20 are each formed in the hexagonal shape which two ends open | release.

The 1st and 2nd chamber main bodies 10 and 20 have opening edge part 11 and 21 (1st opening edge part) opening in a Y-axis direction, respectively. The opening end 11 forms one side of four sides of the first chamber body 10. The opening end 21 forms one side of four sides of the second chamber body 20. The 1st chamber main body 10 and the 2nd chamber main body 20 are integrated by joining each opening edge part 11 and 21, mutually.

The opening ends 11 and 21 have flange parts 11F and 21F which protrude outside, respectively. Chamber main bodies 10 and 20 are integrated by joining each flange part 11F and 21F. Each flange part 11F, 21F has some screw hole h11 and h21, and each screw hole h11 and h21 is formed in the position mutually aligned at the time of joining. Bolt member B1 is screwed into the screw holes h11 and h21 As a result, both flange portions 11F and 21F are joined to each other. Thereby, the junction part J1 (1st junction part) of the 1st and 2nd chamber main bodies 10 and 20 is formed around the opening edge part 11 and 21. FIG.

The groove T1 for accommodating the 1st seal part 71a of the seal member 71 is formed in the outer peripheral part of the junction part J1. Notch groove t1 is formed in the outer peripheral part of the joining surface of each flange part 11F, 21F, and the 1st and 2nd chamber main bodies 10 and 20 are joined, and the groove T1 is circumferentially around the junction J1. Is composed. The groove part t1 is formed in the outer peripheral side rather than the formation position of the screw hole h11 and h21, respectively.

The 1st and 2nd chamber main bodies 10 and 20 have opening edge part 12 and 22 (second opening edge part) opening in a Z-axis direction, respectively. The opening end 12 forms the surface of the first chamber body 10. The opening end 22 forms the surface of the second chamber body 20. The opening ends 12 and 22 form one opening end which is continuous with each other when the first chamber body 10 and the second chamber body 20 are joined. The chamber plate 50 is joined to the chamber main bodies 10 and 20 so that the opening edge part 12 and 22 may be coat | covered. Thereby, the junction part J0 is formed between the 1st and 2nd chamber main bodies 10 and 20, and the chamber plate 50. As shown in FIG.

A plurality of screw holes h12 and h22 are formed around the opening ends 12 and 22, respectively. On the inner circumferential side of these screw holes h12 and h22, grooves T12 and T22 for accommodating the second seal portion 71b of the seal member 71 are formed, respectively. The grooves T12 and T22 are joined to the chamber bodies 10 and 20 so as to be continuous with each other to form one annular groove.

The first chamber main body 10 has an opening 19 on a side wall surface facing the opening end 11. Similarly, the second chamber main body 20 has an opening 29 at the side wall surface facing the opening end 21. These openings 19 and 29 form a passage for conveying a substrate to be processed such as a semiconductor wafer or a glass substrate between the inside and the outside of the vacuum chamber 1. In the circumference | surroundings of opening part 19, 29, the some screw hole h13 and h23 for connecting the said vacuum chamber 1 with other vacuum chambers, such as a vacuum conveyance chamber and a vacuum processing chamber, or a vacuum valve, such as a gate valve, are formed, respectively. One of these openings 19 and 29 may be omitted as necessary. Or when the other opening part is not used, you may seal with a cover.

The chamber plate 50 has a flat plate shape formed of metal material such as stainless steel or aluminum alloy. The chamber plate 50 has a rectangular shape of substantially the same size as the surfaces of the chamber bodies 10 and 20 joined to each other. In the circumference | surroundings of the chamber plate 50, at the time of joining with the chamber main bodies 10 and 20, the several screw hole h50 continuous with each screw hole h12 and h22 of the opening edge part 12 and 22 is formed.

The seal member 71 is formed of various elastic materials used as a vacuum seal and has a first seal portion 71a and a second seal portion 71b. The cross-sectional shape of the 1st seal part 71a and the 2nd seal part 71b is not specifically limited, Round shape may be sufficient as it and a rectangle may be sufficient as it. In the present embodiment, the first seal portion 71a and the second seal portion 71b have an integral structure, but may be formed of separate members, respectively.

The first seal portion 71a is formed in a ring shape in a plane parallel to the XZ plane. The 1st seal part 71a is attached to the groove | channel T1 around the junction part J1, and seals the junction part J1 after the joining of the 1st and 2nd chamber main bodies 10 and 20. FIG. The second seal portion 71b is formed in a ring shape in a plane parallel to the XY plane. The second seal part 71b is attached to the trenches T12 and T22 after the bonding of the first and second chamber main bodies 10 and 20, respectively, and seals the bonding portion J0.

The vacuum chamber 1 of this embodiment is equipped with the fixing member 6 for fixing the sealing member 71 (1st sealing part 71a) attached to the junction part J1 to the junction part J1. The fixing member 6 is attached so that the groove | channel T1 formed in the junction part J1 may be interposed using the bolt member B3, and the 1st seal part 71a is hold | maintained as the groove | channel T1. h14 and h24 are screw holes screwed together with the bolt member B3. In this embodiment, the fixing member 6 is comprised from several rectangular plate pieces, and is arrange | positioned at equal intervals along the outer peripheral part of the junction part J1. Not only this, but the fixing member 6 may be comprised from the board piece with long length corresponding to the length of each side of the junction part J1.

Next, the manufacturing method of the vacuum chamber 1 of this embodiment comprised as mentioned above is demonstrated.

First, the 1st chamber main body 10 and the 2nd chamber main body 20 are joined. In this step, the flange portions 11F and 21F of both of the chamber bodies 10 and 20 are faced to face the first opening end portions 11 and 21, respectively. Then, the flange members 11F and 21F are joined to each other by inserting the bolt member B1 into the screw holes h11 and h21 aligned with each other. Thereby, the junction part J1 is formed. The bolt member B1 is not limited to the configuration to be screwed into the screw holes h11 and h21, and the flange members 11F and 21F may be sandwiched between the nut members.

In this embodiment, since the flange part 11F and the flange part 21F are joined together without interposing a seal member, the sliding resistance between flange parts 11F and 21F falls, and fine adjustment of a joining position becomes easy. Thereby, assembling of the bolt member B1 becomes easy, and workability can be improved.

Next, the first seal portion 71a of the seal member 71 is elastically deformed and attached to the trench T1 formed in the outer peripheral portion of the joining portion J1. The groove T1 is formed simultaneously with the formation of the junction portion J1. Therefore, the junction part J1 is formed suitably and the trench T1 is also formed suitably. Thereby, it becomes possible to obtain the appropriate sealing effect of the junction part J1 only by attaching the 1st seal part 71a to the said groove T1.

Here, in order that the bolt member B1 is arrange | positioned inside the vacuum chamber 1 rather than the mounting position of the 1st seal part 71a, predetermined sealability may not be acquired between the bolt member B1 and screw holes h11 and h21. In this case, in order to ensure the said sealability, the method of winding a sealing tape in the screw part of the bolt member B1, or attaching a seal ring to the bolt member B1 (and nut member), etc. can be employ | adopted. The said seal tape and a seal ring comprise the seal part which maintains the airtightness between a bolt member and a chamber main body.

On the other hand, the 2nd seal part 71b of the seal member 71 is attached to the groove | channel T12 and T22 formed in the 2nd opening edge part 12 and 22 of the chamber main bodies 10 and 20. As shown in FIG. The attaching operation of the second seal portion 71b to the trenches T12 and T22 may be performed before or after the attaching operation of the first seal portion 71a to the trench T1 of the joining portion J1 or at the same time.

Subsequently, the chamber plate 50 is bonded to the opening ends 12 and 22 of the chamber main bodies 10 and 20 using the bolt member B2. Thereby, the junction part J0 is formed. The 2nd seal part 71b is pinched | interposed between the chamber plate 50 and the chamber main bodies 10 and 20, and the sealability of the junction part J0 is ensured.

Finally, the fixing member 6 is attached around the junction part J1 using the bolt member B3. This prevents the position shift of the 1st sealing part 71a with respect to the junction part J1, and ensures the sealability of the junction part J1.

As described above, the vacuum chamber 1 having the space S inside is manufactured.

In this embodiment, the vacuum chamber 1 is divided into three, the 1st chamber main body 10, the 2nd chamber main body 20, and the chamber plate 50, and is comprised. For this reason, even if the chamber size is enlarged, the increase in manufacturing cost by the enlargement of a processing equipment can be avoided, and the fall of installation workability and a transportation problem can also be eliminated. Thereby, the large vacuum chamber which can fully respond to the enlargement of a board | substrate size can be provided.

Moreover, according to this embodiment, it has various advantages compared with the conventional split vacuum chamber. The structure of the vacuum chamber 1000 of a conventional divided structure is shown as a comparative example in FIG.

The vacuum chamber 1000 which concerns on a comparative example is equipped with the 1st chamber main body 100, the 2nd chamber main body 200, the chamber plate 500, and the seal member 15. As shown in FIG. The 1st chamber main body 100 and the 2nd chamber main body 200 are divided in the Y-axis direction, and have the 1st opening edge part 111 and 121 which open in a Y-axis direction, respectively. The first and second chamber bodies 100 and 200 are joined by fastening the flange portions 111F and 121F with a plurality of lines of bolt members, with the respective opening ends 111 and 121 facing each other. The seal member 15 has an integral structure of the first seal portion 15a and the second seal portion 15b. The 1st seal part 15a is attached between the one flange part 111F and the other flange part 121F at the time of joining of the 1st chamber main body 100 and the chamber main body 200. FIG. The groove | channel V1 for accommodating 1st seal part 15a is formed in each joining surface of flange part 111F, 121F, respectively. The chamber plate 500 is joined to each surface of the chamber main bodies 100 and 200 using a plurality of lines of bolt members so as to cover the second opening end portions 112 and 122 opening in the Z-axis direction. At this time, the 2nd seal part 15b of the seal member 15 is attached to the groove | channels V21 and V22 formed in the joint surface of the opening edge part 112,122.

In the vacuum chamber 1000 which concerns on the comparative example of the said structure, when joining the chamber main bodies 100 and 200, it is necessary to appropriately position the 1st seal part 15a between each flange part 111F and 121F. That is, since the groove | channel V1 for positioning the seal | sticker part 15a is formed in the joining surface of each flange part 111F, 121F, at the time of assembly of the chamber main bodies 100 and 200, a bolt is inserted in the state which inserted the seal part 15a in the groove | channel V1. Need to tighten tight.

However, when both flange parts 111F and 121F are put together, it is difficult to visually confirm the mounting position of the seal part 15a, and therefore, the work for attaching the seal part 15a appropriately requires skill. Moreover, since the seal part 15a is interposed between both flange parts 111F and 121F, it is difficult to perform fine adjustment of the position of chamber main body 100, 200, and there exists also the incompatibility that mounting workability falls because of this.

On the other hand, in the vacuum chamber 1 of this embodiment, after the chamber main bodies 10 and 20 are mutually joined, the seal part 71a is attached to the circumference | surroundings of the junction part J1. Therefore, the fine adjustment work of the joining position at the time of joining of the chamber main bodies 10 and 20 becomes easy.

Moreover, according to this embodiment, since the sealing part 71a is attached after formation of the junction part J1, it becomes possible to remarkably improve the workability of attaching the sealing part 71a.

In addition, as described above, the junction portion J1 is appropriately formed, so that the accuracy of the trench T1 formed on the outer circumferential side of the junction portion J1 is improved. As a result, the mounting accuracy of the seal portion 71a is improved, and it is possible to secure appropriate sealability of the bonding portion J1.

In addition, in the above embodiment, the junction part J1 was formed by fastening each flange part 11F, 21F of the chamber main bodies 10 and 20 with the bolt member B1. Thereby, the chamber main body 10, 20, and the chamber plate 50 can be comprised by a detachable material, and the disassembly operation of the vacuum chamber 1 becomes easy. Of course, it is not limited to this structure, For example, you may join both flange parts 11F and 21F by welding. Alternatively, the joints J1 may be formed by using both flange portions 11F and 21F alone or in a suitable combination of clamp tools, various adhesives, adhesive tapes, and the like. Moreover, you may directly join the opening edge part 11, 21 of the chamber main bodies 10 and 20, without providing flange parts 11F and 21F.

The joining tool which forms joining part J1 is not limited to the example which remains as a final product. For example, after mounting the seal portion 71a using a joining jig suitable for joining the flange portions 11F and 21F, the joining jig is removed and joined to each flange portion by another joining means (bonding tool such as bolts or joining material). It is also possible.

Moreover, the seal part mounting groove T1 formed in the outer peripheral surface of the junction part J1 is not limited to the example formed simultaneously with formation of the junction part J1, as demonstrated above. For example, after formation of the junction part J1, you may provide the mounting groove of the seal part 71a in the outer peripheral part, or separately provide the sheet surface on which the seal part 71a is mounted.

The various structural examples mentioned above can be similarly applied also in the following other embodiment.

(2nd embodiment)

5 is an exploded perspective view showing the configuration of the vacuum chamber 2 according to the second embodiment of the present invention. The same code | symbol is attached | subjected about the part corresponding to 1st Embodiment mentioned above, and the detailed description is abbreviate | omitted.

The vacuum chamber 2 of this embodiment is equipped with the 1st chamber main body 10, the 2nd chamber main body 20, the seal member 72, the 1st chamber plate 51, and the 2nd chamber plate 52. As shown in FIG.

The first chamber main body 10 has an opening end 11 (first opening end) opening in the Y-axis direction and two opening ends 12 and 13 (second opening end) opening in the Z-axis direction. Similarly, the second chamber main body 20 has an opening end 21 (first opening end) opening in the Y-axis direction and two opening ends 22 and 23 (second opening end) opening in the Z-axis direction. The first chamber body 10 and the second chamber body 20 are joined to each other via a first seal portion 72a of the seal member 72. The first and second chamber bodies 10, 20 and the first chamber plate 51 are joined to each other via a second seal portion 72b of the seal member 72. The first and second chamber bodies 10, 20 and the second chamber plate 52 are joined to each other via a third seal portion 72c of the seal member 72.

Opening ends 11 and 21 of the first and second chamber bodies 10 and 20 respectively have flange portions 11F and 21F projecting in the X-axis direction, and these flange portions 11F and 21F are fastened through a plurality of lines of bolt members. By doing so, the first and second chamber bodies 10 and 20 are joined. The flange parts 11F and 21F form the junction part J1 (1st junction part) of the chamber main bodies 10 and 20. FIG. In the peripheral part of the joint surface of each flange part 11F, 21F, the groove part t1 for forming the groove which accommodates the seal part 72a at the time of formation of the junction part J1 is formed, respectively.

In each of the opening end portions 12 and 22 of the first and second chamber bodies 10 and 20, grooves T12 and T22 for accommodating the second seal portion 72b are formed, respectively. Such grooves T12 and T22 merge together at the joining of the chamber bodies 10 and 20 to form one annular groove. Similarly, grooves for accommodating the third seal portion 72c are formed at the opening ends 13 and 23 of the first and second chamber bodies 10 and 20, respectively, and these grooves are merged when the chamber bodies 10 and 20 are joined. The solution forms one annular ditch.

The seal member 72 has the 1st seal part 72a, the 2nd seal part 72b, and the 3rd seal part 72c, and is integrally formed, respectively. The first seal portion 72a is formed so as to connect the annular second and third seal portions 72b and 72c with each other.

The first chamber plate 51 is joined to the surfaces of the chamber bodies 10 and 20 by using a plurality of lines of bolt members so as to cover the opening ends 12 and 22 through the second seal portion 72b. The second chamber plate 52 is joined to the lower surfaces of the chamber bodies 10 and 20 by using a plurality of lines of bolt members so as to cover the opening ends 13 and 23 through the third seal portion 72c.

In the vacuum chamber 2 of this embodiment, like 1st Embodiment mentioned above, after joining 1st and 2nd chamber main bodies 10 and 20 mutually, the seal part 72a is attached to the circumference | surroundings of the junction part J1. At the time of attachment of the seal part 72a, the 2nd seal part 72b is attached to the groove | channel T12, T22 of opening edge part 12, 22, and the 3rd seal part 72c is attached to the said groove | channel of opening edge part 13, 23. As shown in FIG. Then, the 1st and 2nd chamber plates 51 and 52 are joined to the chamber main bodies 10 and 20, respectively. Moreover, the fixing member 6 is joined to the junction part J1, and the 1st seal part 72a is hold | maintained in the junction part J1.

As described above, the vacuum chamber 2 of the present embodiment is manufactured. According to the present embodiment, the same effects as in the above-described first embodiment can be obtained.

(Third embodiment)

6 is an exploded perspective view showing the configuration of a vacuum chamber 3 according to a third embodiment of the present invention. The same code | symbol is attached | subjected about the part corresponding to 1st Embodiment mentioned above, and the detailed description is abbreviate | omitted.

The vacuum chamber 3 of this embodiment is equipped with the 1st chamber main body 10, the 2nd chamber main body 20, the 3rd chamber main body 30, the 4th chamber main body 40, the seal member 73, and the chamber plate 50. As shown in FIG.

The 1st and 4th chamber main bodies 10 and 40 have the opening edge part 11 and 41 (1st opening edge part) opening in a Y-axis direction, and the opening edge part 12 and 42 (2nd opening edge part) opening in a Z-axis direction. The 2nd and 3rd chamber main bodies 20 and 30 are opening edge parts 21 and 31 (1st opening edge part) opening in a Y-axis direction, and opening edge parts 22 and 32 (2nd opening edge part) and an opening edge part which open in a Z-axis direction. It has opening ends 24, 34 (third opening end) facing 21, 31.

The first chamber main body 10 and the second chamber main body are joined to each other via the first seal portion 73a of the seal member 73. The second chamber main body 20 and the third chamber main body 30 are joined to each other via the second seal portion 73b of the seal member 73. The third chamber body 30 and the fourth chamber body 40 are joined to each other via a third seal portion 73c of the seal member 73. The first to fourth chamber bodies 10 to 40 and the chamber plate 51 are joined to each other via a fourth seal portion 73d of the seal member 73.

The opening end 11, 21 of each of the 1st and 2nd chamber main bodies 10 and 20 has flange parts 11F and 21F, respectively, and fastens these flange parts 11F and 21F through a plurality of lines of bolt members, The second chamber bodies 10 and 20 are joined. The flange parts 11F and 21F form the junction part J1 (1st junction part) of the chamber main bodies 10 and 20. FIG. In the peripheral part of the joint surface of each flange part 11F, 21F, the groove part t1 for forming the groove which accommodates the 1st seal part 73a at the time of formation of the junction part J1 is formed, respectively.

Each of the opening end portions 24 and 31 of the second and third chamber bodies 20 and 30 has flange portions 24F and 31F, respectively, and the flange portions 24F and 31F are fastened through a plurality of lines of bolt members. The third chamber bodies 20 and 30 are joined. Flange parts 24F and 31F form joining part J2 (2nd joining part) of chamber main body 20,30. In the peripheral part of the joint surface of each flange part 24F and 31F, the groove part t2 for forming the groove which accommodates the 2nd seal part 73b at the time of formation of the junction part J2 is formed, respectively.

The opening ends 34 and 41 of each of the third and fourth chamber bodies 30 and 40 have flange portions 34F and 41F, respectively, and the flange portions 34F and 41F are fastened through a plurality of lines of bolt members. The fourth chamber bodies 30 and 40 are joined. The flange parts 34F and 41F form the junction part J3 (third junction part) of the chamber main bodies 30 and 40. FIG. In the peripheral part of the joint surface of each flange part 34F, 41F, the groove part t3 for forming the groove which accommodates the 3rd seal part 73c at the time of formation of the junction part J3 is formed, respectively.

In each opening end part 12, 22, 32, 42 of the 1st-4th chamber main bodies 10-40, the groove | channel T12, T22, T32, T42 for accommodating 4th seal part 73d is formed, respectively. Such grooves T12, T22, T32, and T42 are united at the time of joining of the chamber main bodies 10 to 40 to form one annular groove.

The seal member 73 has the 1st seal part 73a, the 2nd seal part 73b, the 3rd seal part 73c, and the 4th seal part 73d, and is integrally formed, respectively. The first to third seal portions 73a to 73c are formed to be connected to the annular fourth seal portion 73d.

The chamber plate 50 is joined to the surface of the chamber main bodies 10-40 using the several bolt member through the 4th seal part 73d so that the opening edge part 12, 22, 32, 42 may be covered.

In the vacuum chamber 3 of this embodiment, after joining the 1st-4th chamber main bodies 10-40, respectively, the seal parts 73a-73c are attached to the circumference | surroundings of the joining parts J1-J3. At the time of attachment of the seal parts 73a to 73c, the fourth seal part 73d is attached to the grooves T12, T22, T32, and T42 of the opening ends 12, 22, 32, and 42. Thereafter, the chamber plate 50 is joined to the chamber main bodies 10-40, respectively. Moreover, the fixing member 6 is joined to junction part J1-J4, respectively, and 1st seal part 73a is hold | maintained in junction part J1-J4.

As described above, the vacuum chamber 3 of the present embodiment is manufactured. As in the present embodiment, even when the chamber main body is divided into a plurality of three or more, the same operation and effect as in the above-described first embodiment can be obtained.

(4th embodiment)

7 is an exploded perspective view showing the configuration of a vacuum chamber 4 according to a fourth embodiment of the present invention. The same code | symbol is attached | subjected about the part corresponding to 2nd Embodiment mentioned above, and the detailed description is abbreviate | omitted.

In the vacuum chambers 1 to 3 of the above-described embodiments, the chamber main body is divided in the X-axis direction, whereas in the vacuum chamber 4 of the present embodiment, the chamber main body is divided in the X-axis direction and the Y-axis direction. have. That is, the vacuum chamber 4 of this embodiment is the 1st chamber main body 10A, the 2nd chamber main body 10B, the 3rd chamber main body 20A, the 4th chamber main body 20B, the seal member 74, the 1st chamber plate 51, and the 2nd chamber plate 52. Equipped.

The 1st and 2nd chamber main bodies 10A and 20A have the flange part 19AF and 19WF respectively joined by the X-axis direction. When these flange parts 19AF and 19BF are joined together by the several line bolt member, the 1st chamber main body unit 110 which has the junction part J4 is comprised. The groove part t4 which accommodates the seal parts d1 and d2 of the seal member 74 is formed in the peripheral part of the joint surface of the flange parts 19AF and 19BF, respectively. In addition, the first chamber main body 10A and the first chamber main body 10B are joined to each other so that an opening portion 19 is formed in one side surface of the first chamber main body unit 110. The 1st and 2nd chamber main bodies 10A and 10B have the groove | channel T19A and T19B which accommodates the seal part 74d of the seal member 74 along the periphery of the opening part 19, respectively.

The 3rd and 4th chamber main bodies 20A, 20B have the flange part 29AF and 29BF joined by the X-axis direction, respectively. When these flange parts 29AF and 29BF are joined together by a plurality of lines of bolt members, the second chamber body unit 120 having the joining part J5 is configured. The groove part t5 which accommodates the seal parts e1 and e2 of the seal member 74 is formed in the peripheral part of the joint surface of the flange parts 29AF and 29BF, respectively. In addition, the third chamber main body 20A and the fourth chamber main body 20B are joined to each other, and an opening portion 29 is formed in one side surface of the second chamber main body unit 120. 3rd and 4th chamber main body 20A, 20B has the groove (not shown) in which the seal part 74e of the seal member 74 is accommodated along the circumference | surroundings of the opening part 29, respectively.

The first chamber body unit 110 has an opening end 11 (first opening end) opening in the Y-axis direction and two opening ends 12 and 13 (second opening end) opening in the Z-axis direction. Similarly, the second chamber main body unit 120 has an opening end 21 (first opening end) opening in the Y-axis direction and two opening ends 22 and 23 (second opening end) opening in the Z-axis direction. The first chamber body unit 110 and the second chamber body unit 120 are joined to each other via a seal portion 74a of the seal member 74. The first and second chamber body units 110 and 120 and the first chamber plate 51 are joined to each other via the seal portion 74b of the seal member 74. The first and second chamber body units 110 and 120 and the second chamber plate 52 are joined to each other via a seal portion 74c of the seal member 74.

Opening ends 11 and 21 of the first and second chamber body units 110 and 120 respectively have flange portions 11AF, 11BF, 21AF and 21BF which protrude in the X-axis direction, and these flange portions intervene through a plurality of lines of bolt members. The first and second chamber main body units 110 and 120 are joined by fastening. The flange portions 11AF, 11BF, 21AF, and 21BF form a joining portion J1 (first joining portion) of the chamber body units 110 and 120. In the peripheral part of the joint surface of each flange part, the groove part t1 for forming the groove which accommodates the seal part 74a at the time of formation of the junction part J1 is formed, respectively.

The openings 12, 22 of each of the first and second chamber body units 110, 120 are provided with grooves T12A, T12B, T22A, and T22B for accommodating the seal portion 74b, respectively. These grooves merge at the time of joining of the chamber main units 110 and 120 to form one annular groove. Similarly, grooves for accommodating the seal portion 74c are formed at the opening ends 13 and 23 of the first and second chamber body units 110 and 120, respectively. Unite to form one annular ditch.

The seal member 74 has the first seal portion 74a, the second seal portion 74b, the third seal portion 74c, the fourth seal portion d1, d2, the fifth seal portion e1, e2, the sixth seal portion 74d, and the seventh seal portion 74e, Each is formed integrally. The first seal portion 74a is formed so as to connect the annular second and third seal portions 74b and 74c with each other. The fourth seal portions d1 and d2 are formed to connect the sixth annular seal portion 74d to the second and third seal portions 74b and 74c. The fifth seal portions 74e1 and 74e2 are formed to connect the seventh annular seal portion 74e to the second and third seal portions 74b and 74c.

The first chamber plate 51 is joined to the surfaces of the chamber body units 110 and 120 by using a plurality of lines of bolt members so as to cover the opening ends 12 and 22. The second chamber plate 52 is joined to the lower ends of the chamber body units 110 and 120 by using a plurality of bolt members so as to cover the opening ends 13 and 23 through the seal portion 74c.

In this embodiment, after each of the first and second chamber body units 110 and 120 are assembled, the first and second chamber body units 110 and 120 are joined to each other. After joining the 1st and 2nd chamber main body units 110 and 120, the seal part 74a is attached around the junction part J1. Seal parts d1 and d2 are attached to the groove part t4 around the junction part J4, and seal parts e1 and e2 are attached to the groove part t5 around the junction part J5. The seal portion 74b is attached to the grooves T12A, T12B, T22A, and T22B of the opening ends 12 and 22, and the seal portion 74c is attached to the grooves of the opening ends 13 and 23. Thereafter, the first and second chamber plates 51 and 52 are joined to the chamber main body units 110 and 120, respectively. On the other hand, the seal portion 74d is attached to the trenches T19A and T19B around the opening 19, and the seal portion 74e is attached to the trench around the opening 29. And the fixing member 6 is joined to the junction part J1, and the seal part 74a is hold | maintained in the junction part J1.

As described above, the vacuum chamber 4 of the present embodiment is manufactured. As in the present embodiment, even when the chamber body portion is divided into a plurality of four or more, the same operation and effect as in the above-described first embodiment can be obtained.

As mentioned above, although embodiment of this invention was described, of course, this invention is not limited to this, A various deformation | transformation is possible for it based on the technical idea of this invention.

For example, in each of the embodiments described above, an example in which the present invention is applied to a vacuum chamber has been described. .

In addition, in the above embodiment, the chamber main body is formed in a substantially hexagonal shape, but may be formed in another polyhedral shape such as an octahedral shape instead. Moreover, it is not limited to the example in which two chamber main bodies are joined to one joining part, You may make one joining part be formed in the opening edge part of three or more chamber main bodies.

Moreover, although the seal member was attached to the outer peripheral part of the junction part of a chamber main body in the above embodiment, you may attach the said seal member to the inner peripheral part of a junction part. This configuration is advantageous when the present invention is applied to a positive pressure chamber.

1, 2, 3, 4 chambers
6 fixing member
10, 10A, 10B, 20, 20A, 20B, 30, 40 chamber body
11, 21, 31, 41 opening end (first opening end)
12, 13, 22, 23, 32, 42 opening end (second opening end)
24, 34 opening end (third opening end)
50, 51, 52 Chamber Plate
110, 120 chamber body unit
71, 72, 73, 74 seal member
J1, J2, J3, J4, J5 Joints
T1, T21, T22, T32, T42 Ditch

Claims

First and second chamber bodies having a polyhedron shape each having a first opening end portion,
First joining means for forming a first joining portion by joining the first opening ends of each of the first and second chamber bodies to each other;
A first seal member mounted around the first junction part to seal an interior of the first and second chamber bodies;
A chamber having a.

The method of claim 1,
The first junction portion,
A first joining surface formed at the first opening end;
A second joining surface formed at the second opening end portion and facing the first joining surface,
The said 1st joining means is a some fastening tool which penetrates a said 1st bonding surface and a said 2nd bonding surface, and joins the said 1st bonding surface and a 2nd bonding surface mutually.
chamber.

The method of claim 2,
The said 1st seal member is attached to the circumference | surroundings of the said 1st junction part on the outer peripheral side rather than the penetration position of the said fastening tool.
chamber.

The method of claim 3,
The fastening tool has a seal portion for maintaining airtightness to the first chamber body and the second chamber body.
chamber.

The method of claim 1,
The said 1st junction part has the groove | channel for accommodating the said 1st seal member in the circumference | surroundings.
chamber.

The method of claim 5,
The groove is a groove formed around the first joining portion by joining the first and second chamber bodies.
chamber.

The method of claim 1,
Further provided with a fixing member for fixing the first seal member around the first bonding portion
chamber.

The method of claim 1,
The first and second chamber bodies each have a second opening end that is continuous with the first opening end and is joined to each other at the time of joining by the first joining means,
The chamber further includes a chamber plate covering the second opening ends of the first and second chamber bodies in common.
chamber.

The method of claim 8,
The first seal member,
A first seal portion mounted around the first joining portion,
And a second seal portion mounted between each of the second opening ends and the chamber plate.
chamber.

The method of claim 8,
The second chamber main body further has a third opening end that faces the first opening end and is continuous with the second opening end.
The chamber,
A third chamber body having a polyhedron shape having a first opening end portion,
Second joining means for forming a second joining portion by joining the third opening end of the second chamber body and the first opening end of the third chamber body to each other;
Further provided with a 2nd sealing member mounted around the said 2nd junction part
chamber.

The method of claim 10,
The third chamber main body further has a second opening end continuous with the second opening end of the second chamber main body at the time of joining by the second joining means,
The chamber plate commonly covers the second opening end of each of the first, second and third chamber bodies.
chamber.

The method of claim 11,
The first seal member and the second seal member are made of a common seal member,
The common seal member,
A first seal portion mounted around the first joining portion,
A second seal portion mounted around the second joining portion,
And a third seal portion mounted between each of the second opening ends and the chamber plate.
chamber.

A plurality of chamber bodies each having at least one opening end joined to each other,
Joining means for forming a plurality of joining portions by joining the opening ends of the respective chamber bodies to each other;
A seal member mounted around each of the plurality of joining portions to seal an interior of the plurality of chamber bodies
A chamber having a.

Joining the opening ends of each of the first chamber body and the second chamber body to each other,
A seal member is mounted to surround a boundary of the first and second chamber bodies joined to each other via the respective opening ends;
Method of manufacturing the chamber.

The method of claim 14,
After mounting of the said seal member, the process of fixing the said seal member to the said boundary part further has
Method of manufacturing the chamber.