201035381 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種電解用電極，更詳細而言，爲關於 一種用於藉由電氣電鍍法製造電解銅箔等金屬箔之電解用 電極。 【先前技術】 〇 在藉由電氣電鑛之金屬箔的製造中，近年來有電解裝 置大電流化及大型化的傾向，就作爲不溶性電極使用之電 解用電極而言，能夠省空間化的曲面狀者習知以來就知道 。例如在專利文獻1中，係揭示根據利用螺栓將陽極板安 裝在殼體並使其彎撓而形成爲圓弧狀的構成，將該圓弧狀 的陽極板隔著間隔配置在可自由旋轉的圓筒型陰極周周， 利用介在電解液，能夠在陰極表面析出金屬箔。又在陽極 板與殼體之間介在接觸環，利用改變該接觸環的厚度，能 〇 夠調整陽極板與陰極之間隔。如此一來，能夠涵蓋整體將 陽極板與陰極之間隔保持一定，使電流密度均勻化，而圖 取析出的金屬薄膜之厚度均勻化。 但是，針對專利文獻1的構成，朝殼體之陽極板的安 裝係由於根據從對殼體而言爲與陽極板相反側插通螺栓加 以進行，爲了變更接觸環的厚度，因爲在殼體外側必須進 行螺栓的裝拆作業的同時，而且在殼體內側必須進行陽極 板的裝拆作業，因此造成作業繁雜的問題。 爲此’在專利文獻2中，係如第4圖所示’揭示在形 -5- 201035381 成爲圓弧狀的第1電極基體51內面側（與未圖示之陰極 對向側）介由中間材52、53配置圓弧狀的第2電極基體 54，利用螺栓從第1電極基體51內面側藉由螺栓55固定 第2電極基體54之構成。如第5圖所示，第2電極基體 54係爲多數配置在第1電極基體51內周面，可以介由第 1電極基體51從匯流條56對全部的第2電極基體54 —體 通電。根據專利文獻2，在進行中間材52、53的厚度調整 之情況，可以只在第1電極基體51內面側進行中間材5 2 、5 3的更換作業，而圖取作業性的提升》 然而’針對各個第1電極基體51而言要個別進行與 陰極的間隔調整’仍然會殘留在作業面的問題，在該點中 有進一步改良的空間。 (先前技術文獻） (專利文獻） 〔專利文獻1〕日本特公平6-47758號公報 〔專利文獻2〕日本特開平8-209396號公報 【發明內容】 (發明槪要） (發明所欲解決之課題） 因此’本發明係以提供易於使電解電流密度均勻化之 電解用電極爲目的。 (解決課題之手段） -6 - 201035381 本發明之前述目的，係作爲對可旋轉的陰極隔著間隔 配置的陽極之電解用電極使用者，藉由具備：剖面圓弧狀 的基體；及配置在該基體內面側的複數個電極板，構成爲 對前述各電極板能夠個別供電之電解用電極加以達成。 針對該電解用電極，在前述基體與前述電極板之間介 在絕緣性的彈性體爲佳。 又前述電極板係可以構成爲使朝外方突出的輪轂插通 〇 前述基體的貫穿孔，在與供電板之間介由絕緣性彈性體挾 持前述基體，利用由前述供電板的外面側在前述輪轂的頭 部螺鎖螺栓，而固定在前述基體。 (發明之效果） 根據本發明，能夠提供易於使電解電流密度均勻化的 電解用電極。 Ο 【實施方式】 (用以實施發明之形態） 以下’針對本發明之實施形態，參照添附圖面加以說 明。第1圖爲關於本發明一實施形態之電解用電極的剖面 圖’並顯示用來作爲電解槽的陽極之狀態。 如第1圖所示，電解用電極1係形成爲剖面圓弧狀， 在本實施形態中，將2個電解用電極1、1配置爲半圓狀 ’並兼作電解槽2的槽壁。在電解用電極！、1內側面係 將可驅動旋轉的圓筒狀陰極4以順著圓周方向間隙大約一 201035381 定的方式，隔著間隔加以配置。在電解槽2係介由設置在 相鄰的2個電解用電極1、1間的供液部2a能夠供給電解 液L，而被供給的電解液L係如箭頭所示方向通過電解用 電極1、1與陰極4之間，並從設置在電解槽2的左右兩 側之排出溝2b、2b朝外部排出。 第2圖爲擴大顯示電解用電極1要部之剖面圖，第3 圖爲將其更加擴大顯示之剖面圖。如第2及3圖所示’電 解用電極1係在剖面圓弧狀的基體10內側面（第1圖之 與陰極4面對側）配置複數個同樣是剖面圓弧狀的電極板 1 2加以構成。電極板1 2係使朝外方突出的輪轂1 2 a插穿 基體10的貫穿孔l〇a，並在電極板12與供電板16之間挾 持基體10，藉由從供電板16外面側（第1圖之與陰極4 的相反側）將螺栓1 8螺鎖在輪轂12a的頭部，而使電極 板1 2固定在基體1 〇。基體1 0係可以由例如鈦板加以構成 ，電極板1 2係可以成爲例如利用氧化銥等塗佈鈦板內面 側之不溶性電極。 在電極板12與基體10之間、以及在基體1〇與供電 板1 6之間係介在形成爲環狀的橡膠材料等具有絕緣性的 彈性體2 0、2 2。 各電極板12係以覆蓋基體10的內面整體之方式整列 配置，在各個之間則確保絕緣用的間隙S。在各電極板1 2 係介由連接在供電板16之由單芯電線構成的配線16a，能 夠朝箭頭所示方向供給電流，構成爲可以個別供電。 根據具有上述構成之電解用電極1，在各電極板12與 * 8 - 201035381 陰極4的電極間距離產生偏差而使電流密度不均勻的疑慮 之情況，不是如習知所示調整電極間距離’而是可以個別 調整供電至各電極板12的電流値。具體而言’藉由在測 定的電極間距離爲小時將供電電流値變大，一方面在電極 間距離爲大時將供電電流値變小，能夠使陰極的電流密度 分布均勻化，並且只要利用供電電流値的調整，就能夠易 於使析出金屬的厚度均勻化。電極間距離與供電電流値係 如上述所示，由於有相反比例的關係，因此藉由將對應電 極間距離的供電電流値預先表格化或數式化，可以更易於 決定每個電極板1 2的供電電流値。 又利用在基體1 〇與電極板1 2之間介在絕緣性彈性體 20之狀態，由於電極板12爲固定在基體1〇，因此能夠確 定防止貯留在電解槽2之電解液L的漏出，而且能夠確保 基體1 〇與電極板1 2之間的電氣絕緣。 再者，藉由在基體1 0與供電板1 6之間也介在彈性體 〇 22，可以達介由供電板16之對電極板12的穩定供電，藉 由供電電流値的調整可以確實控制電流密度。 【圖式簡單說明】 第1圖係爲關於本發明一實施形態之電解用電極的剖 面圖。 第2圖係爲擴大顯示第1圖所示之電解用電極要部的 剖面圖。 第3圖係爲更擴大顯示第1圖所示之電解用電極要部 -9 - 201035381 的剖面圖 第4 第t 之立體圈 【主要另 1 ： 10 ： 10a 12 ： 12a 16 ： 18: 20、 圖係爲習知電解電極的要部剖面圖。 圖係爲顯示第4圖所示之電解用電極的整體構成 i件符號說明】 電解用電極 基體 :貫穿孔 電極板 :輪轂 供電板 螺栓 22 :彈性體 -10-[Technical Field] The present invention relates to an electrode for electrolysis, and more particularly to an electrode for electrolysis for producing a metal foil such as an electrolytic copper foil by an electroplating method. [Prior Art] In the production of metal foils for electric ore, in recent years, there has been a tendency for large-current and large-scale electrolysis devices to be used, and it is possible to save space for surfaces of electrolysis electrodes used as insoluble electrodes. The known person has known since. For example, Patent Document 1 discloses a configuration in which an anode plate is attached to a casing by a bolt and bent in an arc shape, and the arc-shaped anode plate is rotatably disposed at intervals. On the circumference of the cylindrical cathode, a metal foil can be deposited on the surface of the cathode by interposing the electrolyte. Further, a contact ring is interposed between the anode plate and the casing, and by changing the thickness of the contact ring, the interval between the anode plate and the cathode can be adjusted. In this way, it is possible to cover the gap between the anode plate and the cathode as a whole, to uniformize the current density, and to uniformize the thickness of the deposited metal film. However, in the configuration of Patent Document 1, the mounting of the anode plate toward the casing is performed by inserting the bolt from the opposite side of the casing from the anode plate, in order to change the thickness of the contact ring, because it is outside the casing. At the same time that the bolts must be attached and detached, and the anode plate must be attached and detached inside the casing, the work is complicated. For this reason, in the patent document 2, as shown in FIG. 4, it is revealed that the inner surface side (the opposite side to the cathode (not shown)) of the first electrode substrate 51 having an arc shape in the shape of -5 - 201035381 is interposed. The intermediate members 52 and 53 are provided with a second electrode base 54 having an arc shape, and the second electrode base 54 is fixed by bolts 55 from the inner surface side of the first electrode base 51 by bolts. As shown in Fig. 5, the second electrode base member 54 is disposed on the inner peripheral surface of the first electrode base member 51, and all of the second electrode base members 54 can be electrically connected from the bus bar 56 via the first electrode base member 51. According to Patent Document 2, when the thickness of the intermediate members 52 and 53 is adjusted, the replacement of the intermediate members 5 2 and 5 3 can be performed only on the inner surface side of the first electrode base 51, and the workability is improved. The problem that the interval adjustment between the cathode and the cathode is performed separately for each of the first electrode substrates 51 remains on the work surface, and there is room for further improvement at this point. (Patent Document 1) [Patent Document 1] Japanese Patent Publication No. Hei 6-47758 (Patent Document 2) Japanese Laid-Open Patent Publication No. Hei No. 8-209396 (Summary of the Invention) (Inventive Summary) [Problem] Therefore, the present invention has an object of providing an electrode for electrolysis which is easy to make the electrolysis current density uniform. (Means for Solving the Problem) -6 - 201035381 The above-described object of the present invention is to provide a substrate for electrolysis for an anode in which a rotatable cathode is interposed, and a base body having a circular arc shape; The plurality of electrode plates on the surface side of the substrate are configured to achieve an electrode for electrolysis in which the respective electrode plates can be individually supplied with power. It is preferable that the electrode for electrolysis has an insulating elastomer interposed between the substrate and the electrode plate. Further, the electrode plate may be configured such that a hub protruding outwardly is inserted through the through hole of the base body, and the base body is held between the power supply plate via an insulating elastic body, and the outer surface side of the power supply plate is used The head of the hub is screwed to the bolt and fixed to the aforementioned base body. (Effect of the Invention) According to the present invention, it is possible to provide an electrode for electrolysis which is easy to make the electrolysis current density uniform. [Embodiment] (Embodiment for carrying out the invention) Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings. Fig. 1 is a cross-sectional view showing an electrode for electrolysis according to an embodiment of the present invention and showing a state of being used as an anode of an electrolytic cell. As shown in Fig. 1, the electrode for electrolysis 1 is formed in a circular arc shape. In the present embodiment, the two electrolysis electrodes 1 and 1 are arranged in a semicircular shape and serve as a groove wall of the electrolytic cell 2. Electrode for electrolysis! The inner side of the inner side is disposed such that the cylindrical cathode 4 that can be driven to rotate is disposed at intervals along the circumferential gap of approximately 201035381. In the electrolytic cell 2, the electrolytic solution L can be supplied through the liquid supply portion 2a provided between the adjacent two electrolysis electrodes 1 and 1, and the supplied electrolytic solution L passes through the electrolysis electrode 1 in the direction indicated by the arrow. Between 1 and the cathode 4, the discharge grooves 2b and 2b provided on the left and right sides of the electrolytic cell 2 are discharged to the outside. Fig. 2 is a cross-sectional view showing an enlarged main portion of the electrode 1 for electrolysis, and Fig. 3 is a cross-sectional view showing the enlarged portion thereof. As shown in Figs. 2 and 3, the electrode 1 for electrolysis is provided with a plurality of electrode plates 1 2 having the same arc shape in cross section on the inner side surface of the base body 10 having an arcuate cross section (the side facing the cathode 4 in Fig. 1). Make up. The electrode plate 1 2 is such that the hub 1 2 a protruding outwardly is inserted through the through hole 10a of the base 10, and the base 10 is held between the electrode plate 12 and the power supply plate 16 by the outer side of the power supply plate 16 ( The opposite side of the cathode 4 of Fig. 1 is screwed to the head of the hub 12a, and the electrode plate 12 is fixed to the base 1'. The base 10 may be made of, for example, a titanium plate, and the electrode plate 12 may be, for example, an insoluble electrode coated on the inner surface side of the titanium plate with ruthenium oxide or the like. Between the electrode plate 12 and the base 10, and between the base 1〇 and the power supply plate 16, an insulating elastic body 20, 2 such as a rubber material formed in a ring shape is interposed. Each of the electrode plates 12 is arranged in a line so as to cover the entire inner surface of the base 10, and a gap S for insulation is secured between the electrodes. In each of the electrode plates 12, a wiring 16a composed of a single-core electric wire connected to the power supply plate 16 can supply a current in a direction indicated by an arrow, and can be individually supplied with power. According to the electrode for electrolysis 1 having the above-described configuration, the distance between the electrodes of the electrode plates 12 and the electrodes 4 of *8 - 201035381 varies and the current density is not uniform, and the distance between the electrodes is not adjusted as shown in the prior art. Instead, the current 供电 supplied to each electrode plate 12 can be individually adjusted. Specifically, 'the supply current 値 is increased by the distance between the electrodes measured, and the supply current 値 is made smaller when the distance between the electrodes is large, so that the current density distribution of the cathode can be made uniform, and only By adjusting the supply current 値, the thickness of the precipitated metal can be easily made uniform. Since the distance between the electrodes and the supply current are as described above, since there is an inverse proportional relationship, it is easier to determine each electrode plate 1 2 by pre-formatting or digitizing the supply current 对应 corresponding to the distance between the electrodes. The supply current is 値. Further, in the state in which the insulating elastic body 20 is interposed between the base 1 〇 and the electrode plate 12, since the electrode plate 12 is fixed to the base 1 〇, it is possible to secure leakage prevention of the electrolytic solution L stored in the electrolytic cell 2, and Electrical insulation between the substrate 1 and the electrode plate 12 can be ensured. Furthermore, by interposing the elastic body 22 between the substrate 10 and the power supply board 16, the stable power supply to the opposite electrode plate 12 of the power supply board 16 can be achieved, and the current can be surely controlled by the adjustment of the supply current 値. density. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing an electrode for electrolysis according to an embodiment of the present invention. Fig. 2 is a cross-sectional view showing an enlarged main portion of the electrode for electrolysis shown in Fig. 1. Fig. 3 is a perspective view showing the fourth embodiment of the electrolysis electrode portion -9 - 201035381 shown in Fig. 1 (mainly another 1: 10 : 10a 12 : 12a 16: 18: 20, The figure is a cross-sectional view of a main part of a conventional electrolytic electrode. The figure shows the overall configuration of the electrode for electrolysis shown in Fig. 4. Description of the symbol: Electrode electrode Base: Through-hole Electrode plate: Hub Power supply plate Bolt 22: Elastomer -10-