TW201035377A - Aluminum-graphite complex, heat radiating component using the same and LED luminescent member - Google Patents

Aluminum-graphite complex, heat radiating component using the same and LED luminescent member Download PDF

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TW201035377A
TW201035377A TW99101577A TW99101577A TW201035377A TW 201035377 A TW201035377 A TW 201035377A TW 99101577 A TW99101577 A TW 99101577A TW 99101577 A TW99101577 A TW 99101577A TW 201035377 A TW201035377 A TW 201035377A
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aluminum
graphite
plate
composite
isotropic
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TW99101577A
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TWI486486B (en
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Hideki Hirotsuru
Satoshi Higuma
Shinya Narita
Yoshihiko Tsujimura
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Denki Kagaku Kogyo Kk
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    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/51Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
    • C04B41/515Other specific metals
    • C04B41/5155Aluminium
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81Coating or impregnation
    • C04B41/85Coating or impregnation with inorganic materials
    • C04B41/88Metals
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C21/00Alloys based on aluminium
    • C22C21/02Alloys based on aluminium with silicon as the next major constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/64Heat extraction or cooling elements
    • H01L33/641Heat extraction or cooling elements characterized by the materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2933/00Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
    • H01L2933/0008Processes
    • H01L2933/0033Processes relating to semiconductor body packages
    • H01L2933/0075Processes relating to semiconductor body packages relating to heat extraction or cooling elements

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Metallurgy (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Led Device Packages (AREA)

Abstract

Provided is a method for manufacturing aluminum-graphite complex, which comprises the following steps sequentially: (l) an isotropic graphite material is processed into a plate with a thickness of 0.5 to 3 mm, wherein the isotropic graphite material has a thermo conductivity of 25 DEG C of 100 to 200 W/mK, maximum/minimum of thermo conductivity on the orthogonal three directions is 1 to 1.3, a thermo expansion coefficient of 25 to 150 DEG C of 2x10<SP>-6</SP> to 5x10<SP>-6</SP>/K, maximum/minimum of thermo expansion coefficient on the orthogonal three directions is 1 to 1.3 and a porous ratio of 10 to 20 vo1%; (2) the plate consisted of isotropic graphite material is laminated with inserting mold-release plate and pressed with an assembly torque of 1 to 50 Nm, wherein the assembly torque is on a vertical direction to a plate surface of the isotropic graphite material; and (3) 70% or more of porous of the isotropic graphite material is immersed with aluminum alloy and aluminum alloy layers are installed onto the two main surfaces of the plate isotropic graphite material, wherein the immersion is proceeded by pressure immersing aluminum alloy containing 3 to 20 mass% of silicon with a pressure of 20 Mpa or more with casting forging method.

Description

201035377 •六、發明說’明: 【發明所屬之技術領域】 本發明係關於一種鋁-石墨複合物、使用它之散熱組件 及LED發光構件。 【先前技術】 近幾年,作爲可輕量、薄型化及省電力化的照明、發光 裝置,發光二極體(以下稱爲LED)受人囑目。LED元件係使 正向電流流到半導體的pn接合,就會發光的元件,係使用 〇201035377 • VI. Invention: [Technical Field] The present invention relates to an aluminum-graphite composite, a heat dissipating component using the same, and an LED lighting member. [Prior Art] In recent years, as a light-emitting, thin-film, and power-saving lighting and light-emitting device, a light-emitting diode (hereinafter referred to as LED) has attracted attention. The LED element is a component that causes a forward current to flow to the pn junction of the semiconductor, and the component that emits light is used.

Ga As、GaN等的III-V族半導體結晶所製造。隨著半導體 的磊晶成長技術與發光元件製程技術的進步,已開發出轉 換效率優良的LED,在各種領域被廣泛使用。 LED元件係由使III - V族半導體結晶磊晶成長於單晶成 長基板上的P型層與η型層及爲兩者所夾的光活性層所構 成。一般係使GaN等的III 一 V族半導體結晶磊晶成長於單 晶藍寶石等的成長基板上後,形成電極等,形成LED發光 Q 元件(專利文獻1)。 近幾年’ LED元件的發光效率的改善快速進展,發熱量 伴隨LED的高亮度化而增加。因此,若不採取充分的散熱 對策’ LED的可靠性就會降低。具體而言,伴隨LED元件 溫度的上升’會產生亮度降低及元件壽命降低的問題。因 此’爲了提筒LED封裝體的散熱性,而在安裝LED的基板 部分使用銅或鋁等的熱傳導率高的金屬材料。在只是基板 散熱不夠的情況下,作爲散熱對策,有時會進一步使用金 201035377 屬製的散熱器(heat sink)。 對於LED元件應用於照明用途,LED的高輸出化、大型 化更加進展。一般LED元件係利用焊錫等接合於基板而使 用。若LED元件與基板材料的熱膨脹率不同,則會在接合 層產生應力,最壞的情況,有時會發生LED元件的破壞等, 可靠性顯著降低。 爲了對應於伴隨LED的高輸出化、大型化的發熱量增 加’作爲熱傳導率高、熱膨脹係數小的材料,已知使陶瓷It is produced by a III-V semiconductor crystal such as Ga As or GaN. With the advancement of semiconductor epitaxial growth technology and light-emitting device process technology, LEDs with excellent conversion efficiency have been developed and are widely used in various fields. The LED element is composed of a P-type layer and an n-type layer which are epitaxially grown on the single crystal growth substrate of the III-V semiconductor crystal, and a photoactive layer sandwiched therebetween. In general, a III-V semiconductor crystal such as GaN is epitaxially grown on a growth substrate such as a single crystal sapphire, and an electrode or the like is formed to form an LED light-emitting Q element (Patent Document 1). In recent years, the improvement in luminous efficiency of LED elements has progressed rapidly, and the amount of heat generation has increased with the increase in luminance of LEDs. Therefore, if sufficient heat dissipation measures are not taken, the reliability of the LED will decrease. Specifically, as the temperature of the LED element rises, there is a problem that the brightness is lowered and the life of the element is lowered. Therefore, in order to improve the heat dissipation of the LED package, a metal material having a high thermal conductivity such as copper or aluminum is used for the substrate portion on which the LED is mounted. In the case where the substrate is not sufficiently heat-dissipated, a heat sink made of gold 201035377 may be further used as a countermeasure against heat dissipation. For LED components to be used for lighting applications, LEDs have become more advanced in output and size. Generally, LED elements are bonded to a substrate by soldering or the like. When the thermal expansion coefficient of the LED element and the substrate material are different, stress is generated in the bonding layer, and in the worst case, destruction of the LED element may occur, and reliability is remarkably lowered. It is known to make ceramics as a material having a high thermal conductivity and a small thermal expansion coefficient in response to an increase in the amount of heat generated by the increase in output and the increase in the size of the LED.

CI 粒子與金屬鋁複合化的金屬基複合材料(專利文獻2)。例如 使碳化矽與鋁複合化的金屬基複合材料,在特性方面滿足 上述特性,但爲難加工性材料’作爲LED用基板使用時, 有高價的課題。因此’作爲加工性比較優良的金屬基複合 材料’正在硏究使石墨與鋁複合化的金屬基複合材料(專利 文獻3)。 由銘與石墨構成的金屬基複合材料,當初被開發作爲滑 〇 動構件。爲了使特性提高’正在進行在高溫、高壓下,使 石墨材料浸漬銘合金,改善特性的硏究(專利文獻4)。 [專利文獻1]特開2005 — 1 1 7006號公報 [專利文獻2]日本專利第346835 8號 [專利文獻3]日本專利第3 673436號 [專利文獻4]特開平5 - 3 3 7 63 0號公報 【發明內容】 要使鋁-石墨複合物的熱傳導特性提高,使用結晶性高 201035377 的焦炭系石墨材料作爲石墨材料有效。然而,焦炭系石墨 材料的材料的各向異性強,與鋁複合化所得到的鋁一石墨 複合物亦在特性上產生各向異性。LED發光構件的基板材 料除了熱傳導率或熱膨脹率的特性以外,作爲構件的均勻 性很重要。過度地使用有各向異性的材料的情況,有發生 翹曲等’或者最壞的情況,發生LED元件破壞的課題。 熱傳導率等的特性優良的鋁一石墨複合物適合以澆鑄鍛 0 造法製造。然而’在澆鑄锻造法中使用的材料高價,所以 將使用澆鑄锻造法而如一般所製造的鋁一石墨複合物用作 LED發光構件用的基板的情況,有LED發光構件變得高價 的課題。 LED發光構件除了使用的基板材料以外,發光構件全體 的散熱對策非常重要。因此,除了使用散熱特性優良的基 板材料以外,若用於搭載LED的電路部分的絕緣材料的特 性及厚度等的形狀不適當,則有作爲led發光構件而得不 〇 到充分的特性的課題。 本發明係鑑於上述狀況所完成者,其目的係提供一種散 熱特性及可靠性優良的led發光構件及構成它的散熱組 件。 本發明爲了達成上述目的而專心硏究的結果,得到以下 見解:將各向同性石墨材料加工成板狀後,經由脫模板層 積複數片’以澆鑄鍛造法與鋁合金複合化,藉此可有效地 製作熱傳導率、熱膨脹率、強度特性優良的板狀的各向同 201035377 性鋁-石墨複合物。再者,得到以下見解而完成本發明: 藉由使基板材料、絕緣材料及電路結構適性化’可得到散 熱特性及可靠性優良的led發光構件。 即,本發明係以依次經過下述步驟爲特徵的鋁-石墨複 合物之製造方法: (1)將溫度25 °C的熱傳導率爲100〜200 W/ mK、正交 的3方向的熱傳導率的最大値/最小値爲1〜1.3、溫度25 °C〜150°C的熱膨脹係數爲2xl0—6〜5xlO_6/K、正交的3 方向的熱膨脹係數的最大値/最小値爲1〜1.3、及氣孔率 爲10〜20體積%的各向同性石墨材料加工成板厚0.5〜 3mm的板狀的步驟。 (2) 將板狀的各向同性石墨材料以脫模板夾入而層積, 並以垂直方向的安裝力矩相對於各向同性石墨材料的板面 爲1〜50Nm的方式加壓的步驟。A metal matrix composite in which CI particles are combined with metal aluminum (Patent Document 2). For example, a metal matrix composite material in which tantalum carbide and aluminum are composited satisfies the above characteristics in terms of characteristics, but when it is used as a substrate for LEDs, it is a problem of high cost. Therefore, metal-based composite materials in which graphite and aluminum are composited are being studied as a metal-based composite material having excellent workability (Patent Document 3). A metal matrix composite composed of Ming and graphite was originally developed as a sliding member. In order to improve the characteristics, the graphite material is impregnated with a high-temperature and high-pressure alloy, and the properties are improved (Patent Document 4). [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. [Brief Description of the Invention] In order to improve the heat conduction characteristics of the aluminum-graphite composite, it is effective to use a coke-based graphite material having a high crystallinity of 201035377 as a graphite material. However, the material of the coke-based graphite material is highly anisotropic, and the aluminum-graphite composite obtained by composite with aluminum also exhibits anisotropy in characteristics. In addition to the characteristics of thermal conductivity or thermal expansion coefficient, the base material of the LED light-emitting member is important as uniformity of the member. When an anisotropic material is excessively used, there is a problem that warpage or the like occurs, or the worst case occurs, and the LED element is broken. An aluminum-graphite composite excellent in characteristics such as thermal conductivity is suitably produced by a cast forging method. However, the material used in the casting forging method is expensive, and therefore, when the aluminum-graphite composite which is generally produced by the casting forging method is used as a substrate for an LED light-emitting member, there is a problem that the LED light-emitting member becomes expensive. In addition to the substrate material used, the LED light-emitting member is very important for heat dissipation measures of the entire light-emitting member. Therefore, in addition to the use of a substrate material having excellent heat dissipation characteristics, if the shape and thickness of the insulating material for the circuit portion on which the LED is mounted are not appropriate, there is a problem that the LED light-emitting member does not have sufficient characteristics. The present invention has been made in view of the above circumstances, and an object thereof is to provide a LED light-emitting member excellent in heat dissipation characteristics and reliability and a heat dissipation member constituting the same. In order to achieve the above object, the present invention has obtained the following findings: after processing an isotropic graphite material into a plate shape, a plurality of sheets are laminated via a stripping plate to be composited with an aluminum alloy by a casting forging method. A plate-shaped, respectively, 201035377 aluminum-graphite composite having excellent thermal conductivity, thermal expansion coefficient, and strength characteristics is efficiently produced. Further, the present invention has been completed by the following findings: By optimizing the substrate material, the insulating material, and the circuit structure, a led light-emitting member excellent in heat dissipation characteristics and reliability can be obtained. That is, the present invention is a method for producing an aluminum-graphite composite characterized by the following steps: (1) thermal conductivity at a temperature of 25 ° C of 100 to 200 W/mK and orthogonal three directions The maximum 値/min 値 is 1 to 1.3, the thermal expansion coefficient at a temperature of 25 ° C to 150 ° C is 2×10 −6 to 5×10 −6 /K, and the maximum 値/min 値 of the thermal expansion coefficient in the orthogonal three directions is 1 to 1.3. And the step of processing the isotropic graphite material having a porosity of 10 to 20% by volume into a plate having a thickness of 0.5 to 3 mm. (2) A step of laminating a plate-shaped isotropic graphite material by laminating from a stencil and pressing it in a vertical direction with respect to a plate surface of the isotropic graphite material of 1 to 50 Nm.

(3) 藉由澆鑄锻造法,將含有矽3〜20質量%的鋁合金 以20MPa以上的壓力加壓浸漬,使各向同性石墨材料的氣^ 孔的70%以上以鋁合金浸漬,並在板狀各向同性石墨材_ 的兩主面上設置平均厚度爲10〜300/zm的鋁合金層的步_ 驟。 此外,本發明係以在上述鋁-石墨複合物之製造方$ 中,更包含鋁合金層的去除步驟爲特徵的鋁-石墨複合_ 之製造方法。再者,係各向同性石墨材料爲焦炭系石墨@ 鋁一石墨複合物。 再者,本發明係以表面粗糙度(Ra )爲〇. 1〜3 /z m、&amp; 201035377 ‘ 度25°C的熱傳導率爲150〜300W/mK、正交的3方向 傳導率的最大値/最小値爲1〜1.3、溫度25 t〜150〇C 膨脹係數爲4x10— 6〜7·5χ10-6/Κ、正交的3方向的熱 係數的最大値/最小値爲1〜1.3、及3點彎曲強度爲 150MPa爲特徵的鋁-石墨複合物。 此外’本發明係以在板狀的鋁-石墨複合物上施行 形狀加工而成爲特徵的散熱組件。此外,係以在板狀 一石墨複合物的表面形成鍍敷層而成爲特徵的散熱組 0 再者,本發明係以在鋁-石墨複合物之一主面或兩 上’經由絕緣層形成金屬電路而成爲特徵的散熱組件 以在鋁-石墨複合物之一主面或兩主面上,經由活性 接合材料層形成金屬電路而成爲特徵的散熱組件。此 係以在該散熱組件上搭載LED裸晶片及/或LED封裝 特徵的LED發光構件。 本發明之鋁-石墨複合物具有高熱傳導、低熱膨脹 強度的優良特性。此外’因使用各向同性石墨材料, q 特性的各向異性小,適合作爲LED發光構件及用於它 熱組件。此外,本發明係使LED發光構件之散熱構造 化,而提供一種發光特性及可靠性優良的LED發光構 【實施方式】 實施發明之形態 以下,就本發明之LED發光構件及用於它的銘一石 合物之一實施形態進行說明。 構成鋁-石墨複合物1的石墨材料,係溫度25 的 導率爲100〜200W/ mK ’且正交的3方向的熱傳導率 的熱 的熱 膨脹 50〜 孔等 的鋁 ί牛。 主面 ,及 金屬 外, 體爲 、高 故各 之散 適性 件。 墨複 熱傳 的最 201035377(3) The aluminum alloy containing 〜3 to 20% by mass is impregnated with a pressure of 20 MPa or more by a casting forging method, and 70% or more of the pores of the isotropic graphite material are impregnated with an aluminum alloy, and A step of providing an aluminum alloy layer having an average thickness of 10 to 300 / zm on both main faces of the plate-like isotropic graphite material _. Further, the present invention is a method for producing an aluminum-graphite composite which is characterized by a step of removing the aluminum alloy layer in the above-mentioned aluminum-graphite composite. Further, the isotropic graphite material is a coke-based graphite@aluminum-graphite composite. Furthermore, the present invention has a surface roughness (Ra) of 〇. 1 to 3 /zm, &amp; 201035377 'degree of 25 ° C thermal conductivity of 150 to 300 W / mK, orthogonal three-direction conductivity maximum 値/minimum 値 is 1 to 1.3, temperature 25 t~150 〇C, expansion coefficient is 4x10-6~7·5χ10-6/Κ, and the maximum 値/min 値 of the thermal coefficient in the orthogonal three directions is 1 to 1.3, and An aluminum-graphite composite characterized by a 3-point bending strength of 150 MPa. Further, the present invention is a heat dissipating member characterized by performing shape processing on a plate-shaped aluminum-graphite composite. Further, the heat dissipation group is characterized by forming a plating layer on the surface of the plate-like graphite composite. Further, the present invention forms a metal via the insulating layer on one or both of the main faces of the aluminum-graphite composite. A heat dissipating component characterized by a circuit is a heat dissipating component characterized by forming a metal circuit via a layer of active bonding material on one main surface or both main surfaces of the aluminum-graphite composite. This is an LED light-emitting member in which LED bare chips and/or LED package features are mounted on the heat sink assembly. The aluminum-graphite composite of the present invention has excellent characteristics of high heat conduction and low thermal expansion strength. In addition, due to the use of an isotropic graphite material, the anisotropy of the q characteristic is small, and it is suitable as an LED light-emitting member and for its thermal component. Further, the present invention provides a light-emitting structure of an LED light-emitting member, and provides an LED light-emitting structure excellent in light-emitting characteristics and reliability. [Embodiment] Embodiments of the invention Hereinafter, the LED light-emitting member of the present invention and the same for the same are provided. An embodiment of a stone compound will be described. The graphite material constituting the aluminum-graphite composite 1 is a thermal conductivity of 50 to 200 W/mK' at a temperature of 25 to 200 W/mK' and an orthogonal thermal conductivity of three directions. On the main surface, and outside the metal, the body is a high-performance part. The most popular heat transfer of the ink

_ 大値/最小値爲1〜1.3,溫度25 °C〜15(TC的熱膨脹係數爲 2xl(T6〜5xl0_6/K,且正交的3方向的熱膨脹係數的最大 値/最小値爲1〜1.3,氣孔率爲1〇〜20體積%的各向同性 石墨材料。在本說明書中,所謂「正交的3方向」,係對於 塊(block)狀的各向同性石墨材料的各主面垂直的3方向(縱 方向、橫方向、高度方向)。爲了滿足鋁-石墨複合物1作 爲LED發光構件的基板材料所要求的特性,石墨材料需要 p 具有上述特性。 ‘I 將各向同性石墨材料加工成板厚〇_5〜3mm的板狀後,將 複數片以脫模板夾住而層積’以鐵板等夾住兩側,利用螺 釘、螺母’以垂直方向的安裝力矩相對於各向同性石墨材 料的板面爲1〜50Nm的方式夾入而製作層積體。再者,在 本說明書中,所謂「板狀」’係總稱具有平行或大致平行的 2主面的形狀者’其主面可爲圓板形狀、橢圓形狀、三角 形等的形狀。 〇 使各向同性石墨材料與鋁合金複合化的方法,係將各向 同性石墨材料與銘合金加熱到鋁合金的熔點以上後,加壓 浸漬的澆鑄鍛造法適合。將層積體加熱到鋁合金的熔點以 上的溫度後,加壓浸漬鋁合金金屬溶液,藉此可得到具有 適合LED發光構件的特性的鋁—石墨複合物1。 各向同性石墨材料的溫度25t的熱傳導率爲1〇〇〜2〇〇w /mK,且正交的3方向的熱傳導率的最大値/最小値爲】 〜1_3。若各向同性石墨材料的熱傳導率小於i〇〇w/工尺, 201035377 則所得到的鋁—石墨複合物丨的熱傳導率變低,用作LED 發光構件的基板材料時,散熱特性不足,並不理想。關於 上限,雖無特性上的限制,但若熱傳導率超過200W/ mK, 則材料本身變得高價,特性的各向異性變強,並不理想。 此外’若各向同性石墨材料的正交的3方向的熱傳導率的 最大値/最小値超過1.3,則散熱特性的各向異性變得過 大’用作LED發光構件的基板材料時,會發生LED元件的 〇 溫度過度地上升等的問題,並不理想。 各向同性石墨材料的溫度25 t〜150°C的熱膨脹係數爲2 xl(T6〜5xl(T6/K’且正交的3方向的熱膨脹係數的最大 値/最小値爲1〜1.3。若各向同性石墨材料的溫度25 t〜 1 5 0 °C的熱膨脹係數小於2 X 1 〇 — 6 / K或超過5 X 1 0 _ 6 / K,則 所得到的鋁-石墨複合物1與LED元件的熱膨脹係數之差 變得過大’會發生LED元件的壽命降低,有時LED元件破 壞等的問題’並不理想。再者,若各向同性石墨材料的溫 Ο 度25 °c〜150 °c的正交的3方向的熱膨脹係數的最大値/ 最小値超過1.3,則所得到的鋁一石墨複合物1的熱膨脹係 數的各向異性變得過大。LED元件發光時,不均勻的應力 會施加於LED元件,會發生LED元件的壽命降低,有時 LED元件破壞等的問題,並不理想。 再者’各向同性石墨材料的氣孔率爲10〜20體積%。若 氣孔率小於1 0體積% ’則加壓浸漬鋁合金之際,無法在氣 孔部分充分浸漬鋁合金’所得到的鋁一石墨複合物1的熱_ Large 値 / minimum 値 is 1 ~ 1.3, temperature 25 ° C ~ 15 (TC thermal expansion coefficient is 2xl (T6 ~ 5xl0_6 / K, and the maximum 値 / minimum 値 of the orthogonal three-direction thermal expansion coefficient is 1 ~ 1.3 The isotropic graphite material having a porosity of from 1 to 20% by volume. In the present specification, the "orthogonal three directions" are perpendicular to the main faces of the block-shaped isotropic graphite material. 3 directions (longitudinal direction, lateral direction, height direction). In order to satisfy the characteristics required for the aluminum-graphite composite 1 as a substrate material of the LED light-emitting member, the graphite material needs to have the above characteristics. 'I Process an isotropic graphite material After the plate is thicker than _5~3mm, the plurality of pieces are clamped by the stripper and stacked. The sides are clamped by iron plates, etc., and the mounting torque in the vertical direction is compared with the isotropic by the screw and the nut'. In the present specification, the "plate shape" is collectively referred to as a shape having two principal faces which are parallel or substantially parallel, and the main body of the graphite material is sandwiched in a manner of 1 to 50 Nm. The surface can be a circular plate shape, an elliptical shape, a triangle, or the like The method of combining the isotropic graphite material with the aluminum alloy is to heat the isotropic graphite material and the alloy to the melting point of the aluminum alloy, and then the pressure-impregnated casting forging method is suitable. After the temperature above the melting point of the aluminum alloy, the aluminum alloy metal solution is impregnated under pressure, whereby the aluminum-graphite composite 1 having characteristics suitable for the LED light-emitting member can be obtained. The thermal conductivity of the isotropic graphite material at a temperature of 25 t is 1 〇〇~2〇〇w /mK, and the maximum 値/min 値 of the thermal conductivity in the orthogonal three directions is 〜1_3. If the thermal conductivity of the isotropic graphite material is less than i〇〇w/tool, 201035377 When the obtained aluminum-graphite composite crucible has a low thermal conductivity and is used as a substrate material for an LED light-emitting member, heat dissipation characteristics are insufficient, which is not preferable. The upper limit is not limited in characteristics, but if the thermal conductivity exceeds 200 W/ mK, the material itself becomes expensive, and the anisotropy of the characteristic becomes strong, which is not ideal. In addition, the maximum 値/min 値 of the thermal conductivity in the orthogonal three directions of the isotropic graphite material exceeds 1.3. When the anisotropy of the heat dissipation characteristics is too large, when the substrate material used as the LED light-emitting member is used, the temperature of the LED element is excessively increased, which is not preferable. The temperature of the isotropic graphite material is 25 t~ The coefficient of thermal expansion at 150 ° C is 2 xl (T6~5xl (T6/K' and the maximum 値/min 値 of the thermal expansion coefficient in the three directions orthogonal to each other is 1 to 1.3. If the temperature of the isotropic graphite material is 25 t~1 If the coefficient of thermal expansion at 50 °C is less than 2 X 1 〇 - 6 / K or exceeds 5 X 1 0 _ 6 / K, the difference between the thermal expansion coefficients of the obtained aluminum-graphite composite 1 and the LED element becomes too large. The problem that the life of the LED element is lowered and the LED element is broken is not preferable. Further, if the maximum 値/min 値 of the thermal expansion coefficient of the orthogonal three directions in the isotropic graphite material is from 25 ° C to 150 ° C exceeds 1.3, the thermal expansion of the obtained aluminum-graphite composite 1 is obtained. The anisotropy of the coefficient becomes too large. When the LED element emits light, uneven stress is applied to the LED element, and the life of the LED element is lowered, and the LED element may be broken or the like, which is not preferable. Further, the porosity of the isotropic graphite material is 10 to 20% by volume. If the porosity is less than 10% by volume, the heat of the aluminum-graphite composite 1 obtained by sufficiently impregnating the aluminum alloy in the pore portion when the aluminum alloy is impregnated under pressure is applied.

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201035377 傳導率特性降低’並不理想。此外,若氣孔率超過20 %,則所得到的鋁-石墨複合物1中的銘合金的含有 多’其結果’銘-石墨複合物1的熱膨脹係數變大, 理想。作爲各向同性石墨材料的原料,由熱傳導率之 以焦灰系石墨爲原料’形成流體靜壓後,石墨化所得 各向同性石墨材料適合。 將具有上述特性的各向同性石墨材料加工成板厚 3mm的板狀後使用。由於廉價地提供最後所得到的 鋁-石墨複合物1’所以需要也將原料的各向同性石 所得到的鋁-石墨複合物1的加工放在心上,最有 作板狀的銘一石墨複合物1。特別是在加壓浸漬法方 如何有效地製作錦-石墨複合物1很重要。將加工 的各向同性石墨材料分別以脫模板夾住,並將此層 片後作爲長方體形狀的塊體(層積體)加壓浸漬,藉 成效率化。實用上,板狀的各向同性石墨材料的一 面積爲100〜2500cm2適合。板狀的各向同性石墨材 主面的面積小於1 00cm2時,1次複合化所得到的錨 複合物1的體積小’所得到的板狀的鋁一石墨複合 每單iu體積的成本變筒。另一方面’若板狀的各向 墨材料的面積超過2 5 00cm2,則複合化所使用的設備 常咼價’並且鋁-石墨複合物1的翹曲會變大。處 低’並且電路形成等變得困難,板狀的鋁一石墨複 的每單位體積的成本變高,並不理想。 體積 量變 並不 點, 到的 0.5〜 :狀的 墨及 :地製 面, ,板狀 :複數 ;可達 :面的 :的一 石墨 1的 I性石 〖得非 Η生降 r物1 -11- 201035377 爲了使預定厚度的均句鋁合金層形成於鋁一石墨複合物 1的表面’最好以板狀的各向同性石墨材料的表面起伏爲 5 00 # m以下,較好爲ι〇〇 β m以下的方式加工。若板狀的 各向同性石墨材料的表面起伏超過5 〇〇/zm,則鋁一石墨複 合物1表面的鋁合金層厚度的偏差變大,並不理想。另一 方面’藉由去除鋁-石墨複合物1表面的鋁合金層,雖可 改善鋁合金層厚度的偏差的問題,但鋁合金層的厚度厚時 ^ 或銘一石墨複合物1的翹曲大時,去除該鋁合金層需要費 用’並且加工後的鋁一石墨複合物1的厚度降低,最後加 工後所得到的板狀的鋁-石墨複合物丨的每單位體積的成 本變高,並不理想。 板狀的各向同性石墨材料的板厚爲了與鋁一石墨複合物 1的板厚大致同等,0_5〜3 mm較好,更好爲1〜2mm。若板 狀的各向R性石墨材料的板厚小於〇.5mm,則將銘-石墨 複合物1用作LED元件搭載用基板材料時,熱容量不足, 〇 LED元件的溫度會瞬間上升,並不理想。另一方面,若板 厚超過3mm’則鋁-石墨複合物1的厚度方向的熱阻增加, LED元件的溫度會上升,並不理想。 板狀的各向同性石墨材料以塗有脫模劑的脫模板分別夾 住,將此層積而形成一個塊體(層積體)。由澆鑄锻造法的 浸漬效率之點,以脫模板夾住的各向同性石墨材料的層積 片數,最好層積體的各邊長度爲同等程度。就層積厚度而 言,以板狀的各向同性石墨材料的外周長度的1/8〜1/2 -12- 201035377 左右適合。層積此各向同性石墨材料而形成一個塊體之 際’以垂直方向的安裝力矩相對於各向同性石墨材料的板 面爲1〜50Nm的方式,以脫模板夾入而層積。層積方法並 不特別限定’例如可列舉下述方法:將各向同性石墨材料 以塗有脫模劑的不銹鋼製的脫模板夾住層積後,在兩側配 置鐵製的板’用螺栓連結後以預定安裝力矩緊固,而形成 一個塊體。關於適當的安裝力矩,雖因使用的各向同性石 墨材料的強度、厚度、面積、片數而不同,但若安裝力矩 C) 小於1 N m ’則有時鋁-石墨複合物1表面的鋁合金層的厚 度會變厚,或者厚度差會變得過大。另一方面,若安裝力 矩超過5ONm,則緊固時有各向同性石墨材料破損等的問 題,並不理想。 其次,將此層積體以溫度600〜750 °C,在大氣氣氛或氮 氣氛下加熱後,配置於高壓容器內。爲了防止層積體的溫 度降低,盡量快速地供給加熱到熔點以上的鋁合金的金屬 Q 溶液,並以20MPa以上的壓力加壓,使其浸漬於石墨成形 體的空隙中。再者,有時也以去除浸漬時的變形的目的, 進行浸漬品的退火(anneal)處理。層積時使用的脫模板,由 脫模性之面,有時會塗布石墨、氮化硼、氧化鋁等脫模劑 而使用。特別是在不銹鋼製的脫模板上塗布氧化鋁等後, 塗布石墨脫模劑的脫模板,脫模性佳,很理想。另一方面, 去除板狀的鋁一石墨複合物1表面的鋁合金層的情況,作 爲脫模板,除了上述脫模板以外,亦可使用石墨片材或未 -13- 201035377 塗布脫模劑的金屬材料。 若層積體的加熱溫度小於溫度600°C,則鋁合金的複合化 不充分,鋁-石墨複合物1的熱傳導率等的特性降低,並 不理想。另一方面,若加熱溫度超過750°C,則與鋁合金的 複合化時,產生低熱傳導率的碳化鋁,鋁-石墨複合物1 的熱傳導率降低,並不理想。再者,若浸漬時的壓力小於 2 0MPa,則鋁合金的複合化不充分,鋁-石墨複合物1的熱 傳導率降低,並不理想。更好的浸漬壓力爲50MPa以上。 〇 鋁-石墨複合物1中的鋁合金最好含有矽3〜20質量 %。若含矽量超過20質量%,則鋁合金的熱傳導率降低, 並不理想。另一方面,若含矽量小於3質量%,則熔化的 鋁合金的熔流變差,浸漬時鋁合金無法充分滲透到各向同 性石墨材料的空隙內,並不理想。關於鋁合金中的鋁、矽 以外的金屬成分,若爲特性不過度地變化的範圍,則不特 別限制,若爲鎂,則可含有到3質量%左右。 Ο 雖然在鋁-石墨複合物1表面形成鋁合金層,但較好的 平均厚度爲10〜300/z m,更好爲10〜100// m。鋁合金層亦 可硏磨加工鋁一石墨複合物1表面而調整成預定的厚度。 銘合金層適合在表面施行鍍敷處理。若平均厚度小於10/z m’則有時會發生鋁一石墨複合物1部分露出,成爲鍍敷不 足’或者鍍敷密合性降低等的問題。另一方面,若平均厚 度超過30〇#111,則鋁一石墨複合物1的熱膨脹係數變得過 大’並不理想。此外,若鋁合金層的平均厚度超過3〇〇/zm, -14- 201035377 或者兩主面的鋁合金層的平均厚度差極端地變得過大,則 鋁-石墨複合物1的翹曲變大,處理性降低,並且其後的 電路形成等變得困難,並不理想》 有時會去除鋁-石墨複合物1表面的鋁合金層,而在鋁 -石墨複合物1露出的狀態下使用。去除鋁合金層的方法 並不特別限定’例如可列舉銑床等的機械加工、磨光機、 帶式磨削機、噴砂機的去除。此外,亦可用鹼液、酸液等 蝕刻鋁-石墨複合物1表面的鋁合金層,以去除鋁合金 〇 層。再者,亦可部分地去除鋁-石墨複合物1表面的鋁合 金層,以改善板狀的鋁-石墨複合物1的平面度。 鋁一石墨複合物1係以鋁合金浸漬各向同性石墨材料的 氣孔的70%以上。若未以鋁合金浸漬的氣孔超過30%,則 鋁-石墨複合物1的熱傳導率降低,並不理想。 鋁-石墨複合物1係溫度25 °C的熱傳導率爲150〜3 00 W /mK’且正交的3方向的熱傳導率的最大値/最小値爲1 Q 〜1.3。若溫度25°C的熱傳導率小於150W/ mK,則用作LED 發光構件的基板材料時,散熱特性不足,並不理想。關於 上限,雖無特性上的限制,但材料本身變得高價,特性的 各向異性變強’並不理想。此外,若正交的3方向的熱傳 導率的最大値/最小値超過1 3,則散熱特性的各向異性變 得過大,用作LED發光構件的基板材料時,有 LED元件 的溫度過度地上升等的問題,並不理想。 鋁一石墨複合物1係溫度25 °C〜150°C的熱膨脹係數爲4 -15- 201035377 ' xlO— 6〜7·5χ1(Γ6/Κ,且正交的3方向的熱膨脹係數 大値/最小値爲1〜1. 3。若溫度2 5 °C〜1 5 0 °C的熱膨脹 小於4χ1(Γ δ / K,或者超過7.5xl(T 6 / K,則鋁—石墨 物1與LED元件的熱膨脹係數之差變得過大,會發生 元件的壽命降低,有時LED元件破壞等的問題,並不理 再者,若溫度25 °C〜150°C的正交的3方向的熱膨脹係 最大値/最小値超過1.3,則鋁-石墨複合物1的熱膨 數的各向異性變得過大,LED元件發光時,不均勻的 〇 _ 會施加於LED元件,會發生LED元件的壽命降低, LED元件破壞等的問題,並不理想。 鋁—石墨複合物1的3點彎曲強度爲50〜15 OMPa。 點彎曲強度小於50MPa,則有時會在處理時發生崩碎 此情況,由於鋁-石墨複合物1爲導電性材料,所以 爲絕緣不良等的原因,並不理想。此外,用螺釘固定 熱器或殼體上使用時,有時會在緊固時發生崩碎等, Q 理想。關於3點彎曲強度的上限,雖無特性上的限制 要形成鋁-石墨複合物1的3點彎曲強度超過15 OMPa 強度,需要添加其他的陶瓷粒子或添加熱傳導特性差 合(mosaic)石墨等。有時鋁-石墨複合物1的熱傳導率 低,並不理想。再者,將LED發光構件用於汽車等移 器用的照明用途時,若強度不充分,則會因振動等而 崩碎或破損等,並不理想。 板狀的鋁-石墨複合物1的表面粗糙度(Ra)較好;! 的最 係數 複合 LED 想。 數的 脹係 應力 有時 若3 等。 會成 在散 並不 ,但 的高 的嵌 會降 動機 發生 I 0.1 16 - 201035377 〜3ym,更好爲0·1〜2/zm。若表面粗糙度(Ra) A m ’則用作LED發光構件的基板材料時,得不到 層4或LED元件接合之際的密合強度,並且低熱傳 緣層4的厚度變厚,散熱特性降低,並不理想。另一 關於表面粗糙度(Ra )的下限,雖無特性面的限制 使Ra成爲小於〇.lMm,需要加工板狀的鋁—石墨複 表面,成本變高,並不理想。 ^ 將搭載有LED元件的基板用作LED發光構件的情 Ο 散熱性之面,大多經由散熱潤滑油或散熱片材等而 金屬製的散熱器或殻體等使用。在此種使用形態下 確保接合面的密合性,而採用將搭載有LED元件的 螺釘固定在金屬製的散熱器或殻體等上面的方法。 材料上形成孔,將搭載有LED元件的基板用螺釘固 熟器或殻體等上面,藉此可使兩者的密合性提高, 接合部分的可靠性提高。鋁-石墨複合物1因加 〇 良,故可用通常的鑽頭等進行孔加工。此外,利用 工或水流噴射(water jet)加工,甚至沖壓(press)加工 形成孔。關於孔的形狀,若爲可用螺釘固定的形狀 也可以是U字形狀等。 LED發光構件係將LED元件接合於由板狀的鋁-合物1構成的基板。接合方法一般使用高熱傳導性 或錫焊等。由熱傳導性之面,不經由熱傳導率低的 4而直接錫焊於基板材料上較好。然而,鋁-石墨 超過3 與絕緣 導的絕 方面, ,但要 合物1 況,由 接合於 ,爲了 基板用 在基板 定在散 並可使 工性優 雷射加 ,亦可 即可, 石墨複 黏接劑 絕緣層 複合材 -17- 201035377 ' 料1無法直接錫焊,所以在鋁-石墨複合物1的表面形成 鍍敷層。鍍敷層的形成方法並不特別限定,可用電鑛或無 電鍍形成。鍍敷的材質可採用鎳、銅、金、錫等,亦可使 用此等的複合鍍敷。關於鍍敷厚度,若爲可確保基材的鋁 -石墨複合物1與鍍敷層的密合性及焊錫潤濕性的範圍, 則由熱傳導之面,盡量薄者較好,一般爲1〜5/zm。 LED發光構件的LED元件也可以是連裸晶片也被封裝化 ^ 的構造。此外,在鋁-石墨複合物1之一主面或兩主面形 成有金屬電路3的散熱組件與LED元件接觸的部分已進行 或未進行電氣絕緣處置均可。此處,在本說明書中,所謂 「散熱組件」,係放射從LED元件產生之熱的構件的總稱, 例如係指在由鋁-石墨複合物1構成的基板之一主面或兩 主面上任意形成有金屬電路3者。 第1圖及第3圖中顯示LED元件與散熱組件接觸的部分 未進行電氣絕緣處置的情況的一實施形態。係在板狀的鋁 〇 -石墨複合物1之一主面或兩主面上經由絕緣層4或活性 金屬接合材料層7而形成金屬電路3,並且在金屬電路3 表面或鋁-石墨複合物1上直接利用硬焊法等配置LED元 件(LED晶片2)的構造。 形成於鋁-石墨複合物1之一主面或兩主面上的絕緣層 4,係以耐熱性樹脂與無機塡充物爲主要成分的硬化性樹脂 組成物,並且硬化後的熱傳導率爲1W/ mK以上較好。作 爲耐熱樹脂,例如可使用環氧樹脂、矽樹脂、聚醯胺樹脂、 -18- 201035377 ' .丙烯酸樹脂等。耐熱樹脂的使用比例爲10〜40容量%,若 小於1 〇容量% ’則絕緣層組成物的黏度上升,作業性降 低’另一方面’若超過40容量%,則絕緣層4的熱傳導性 降低,並不理想。 板狀的鋁-石墨複合物1與LED元件的熱膨脹係數之差 大的情況’爲了鬆驰加熱周期所造成的接合部分的疲勞, 硬化後的樹脂組成物的儲存彈性模數在300K爲1 5000MPa 以下較好。此情況’硬化性樹脂組成物藉由組合(1)以環氧 〇 樹脂爲主體的樹脂、(2)具有聚醚骨架,並在主鏈的末端具 有一級胺基的硬化劑、及(3)無機塡充劑,可提供應力鬆弛 性、電氣絕緣性、散熱性、耐熱性、耐濕性優良的硬化物。 環氧樹脂可使用雙酚F型環氧樹脂或雙酚a型環氧樹脂等 的通用環氧樹脂。若使選自具有雙環戊二烯骨架的環氧樹 脂、具有萘骨架的環氧樹脂、具有聯苯骨架的環氧樹脂及 具有酚醛清漆骨架的環氧樹脂的一種以上含有全環氧樹脂 〇 中10質量%以上’則應力鬆弛性與耐濕性的平衡更加提 高。具有酚醛清漆骨架的代表性環氧樹脂中,有酚系酚醛 清漆型環氧樹脂或甲酚酚醛清漆型環氧樹脂,但亦可使用 兼具雙環戊二烯骨架、萘骨架或聯苯骨架與酚醛清漆骨架 的環氧樹脂。作爲環氧樹脂,也可以單獨使用具有上述骨 架的環氧樹脂。此外’也可以以環氧樹脂爲主體,作爲其 他樹脂’調配酚醛樹脂 '聚醯亞胺樹脂等熱硬化性樹脂或 苯氧樹脂、丙烯酸橡膠、丙烯腈一丁二烯橡膠等高分子量 -19- 201035377 樹脂。若考慮應力鬆弛性、電氣絕緣性、耐熱性、耐濕性 的平衡,則上述高分子量樹脂的調配量相對於與環氧樹脂 的合計量,爲30質量%以下較好。 爲了降低硬化後的樹脂組成物的儲存彈性模數,硬化劑 使用具有聚醚骨架,並在主鏈的末端具有一級胺基的硬化 劑。可與其他硬化劑倂用。若倂用芳族胺系硬化劑,則可 更加適合應力鬆驰性、電氣絕緣性、耐濕性等的平衡。作 爲芳族胺系硬化劑,可使用二胺基二苯甲烷、二胺基二苯 〇 砸、間苯二胺等。也可以進一步倂用酚系酚醛清漆樹脂等 的硬化劑。 作爲無機塡充物,例如可列舉氧化鋁(鋁土)、氧化矽、 氧化鎂等的氧化物陶瓷' 氮化鋁、氮化矽、氮化硼等的氮 化物陶瓷及碳化物陶瓷等。硬化性樹脂組成物中的無機塡 充物的比例爲無機塡充物18〜27容量%。若是此範圍以 外’則有樹脂組成物黏度的上升,熱傳導率的降低,並不 〇 理想。無機塡充物係最大粒子直徑1 00 # m以下、最小粒子 直徑0.05#m以上的球狀粒子較好。再者,含有5〇〜75質 量%粒子直徑5〜50/zm的粒子,含有25〜5〇質量%粒子 直徑0 · 2〜1 · 5 /z m的粒子更好。 絕緣層4按照需要,亦可使用矽烷系偶合劑、鈦酸鹽系 偶合劑、穩定劑、硬化促進劑等。 作爲金屬電路3的材料,可列舉銅箔、鋁箔、銅一鋁複 合箱、銅_鎳-鋁複合箱等。 -20- 201035377 作爲在板狀的鋁-石墨複合物1上 金屬電路3的手法,例如可列舉以下 等方法’將爲絕緣層4的硬化性樹脂 於鋁-石墨複合物1上,加熱成爲半 屬箔,再加熱成爲大致完全硬化狀態 絕緣層4加工成半硬化狀態的片狀, 金屬箔一起一體化的方法。關於電路 ^ 無特別限制’但預先在金屬箔上的預 使其加熱或紫外線(U V)硬化後,利用 液與硫酸的混合物等的蝕刻溶液,藉 第2圖中顯示LED元件與散熱組件 氣絕緣處置的情況的一實施形態。第 -石墨複合物1之一主面或兩主面上 金屬電路3,並且在led元件(LED晶 連接突起6而以層間連接的構造。 〇 或者如第3圖所示,以在板狀的鋁 Ϊ面及/或兩主面上經由活性金屬接 電路3而成爲特徵的散熱構造較好。 在第2圖中,作爲金屬電路3的材 可以與第1圖所示的情況同樣。作焉 而以層間連接,形成層間連接構造的 石墨複合物1上形成層間連接突起6 連接金屬電路3與層間連接突起6的 經由絕緣層4而形成 手法。利用絲網印刷 組成物漿料圖案印刷 硬化狀態後,貼合金 的方法,或者預先將 利用熱壓裝置使其和 的圖案形成方法,雖 定處塗布抗蝕油墨, 氯化銅、過氧化氫溶 由蝕刻形成較好。 接觸的部分已進行電 2圖顯示在板狀的鋁 經由絕緣層4而形成 片2)的下部經由層間 一石墨複合物1之一 合材料層7形成金屬 科、絕緣層4的材料, 丨經由層間連接突起6 方法,在板狀的鋁— 的方法,若爲可導電 方法,則什麼都可以, -21 - 201035377 ' 例如可列舉利用金屬鍍敷形成的方法、利用導電性糊形成 的方法等。作爲在具有此層間連接突起6的狀態下使絕緣 層4形成的手法,有以下手法:將使絕緣層4組成物成爲 漿料狀者在層間連接突起6的周圍及上部,利用絲網印刷 等方法塡充,加熱成爲半硬化狀態後,將金屬箔貼合於此, 再利用加熱成爲大致完全硬化狀態後,利用蝕刻等去除該 層間連接突起6上部的金屬電路,並利用雷射加工等去除 絕緣層組成物的方法,或者預先將絕緣層組成物加工成半 〇 硬化狀態的片狀,利用熱壓裝置,使其和金屬箔一起一體 化,形成在與層間連接突起6對應的位置具有凸部,並在 表面形成有金屬層的層積體,去除此層積體的凸部,而使 層間連接突起6露出等的手法。 在第3圖中,作爲金屬電路3的材料,可使用單體A1製、 或者ΑΙ—Si合金、Al—Si_Mg合金、Al— Mg_Mn等的單 體A1合金製。 〇 作爲構成活性金屬接合材料層7的材料,可使用Al- Si 系或Al~Ge系的合金或者Al— Cu—Mg系合金,特別是A1 — Cu— Mg系合金較好。首先,是因爲A〗—Cu— Mg系合金 相較於Al— Si系、Al— Ge系、Al— Si— (}e系或者此等中 加有Mg之系’與陶瓷系素材的接合條件的容許幅度寬廣, 不是真空中亦可接合’所以生產性優良的接合成爲可能。 即’在Al-Si系或Al— Ge系方面,若不比較大量地添加 S1或Ge,則熔點不降低,但若大量地添加,則產生變硬且 -22- 201035377 變脆的問題。爲了不使此種問題發生,例如在A1 - Si系合 金方面,若將Si的比例降到5%,則熔點成爲615°C ’即 使進行加壓,在620 °C以下的溫度的接合也困難。相對於 此,在Al— Cu — Mg系合金方面,即使將Cu的比例降到4 %左右,亦適當地採取加壓等的手段,藉此在600°C左右的 接合也可能,接合條件的容許幅度變寬。 其次,是因爲Al— Cu — Mg系合金相較於Si或Ge,Cu 或Mg容易均勻地擴散於A1中,所以會產生局部的熔化, ❹ 或者擠出多餘的接合材料而難以產生邊緣鼓出,在短時間 比較穩定的接合成爲可能。 所使用的Al— Cu—Mg系合金,Al、Cu、Mg的三成分合 金不用說,也可以含有其以外的成分。例如,除了 Al、Cu、 Mg 以外,也可以含有 Zn、In、Μη、Cr、Ti、Bi、B、Fe 等 的成分合計5重量%左右以下。201035377 Reduced conductivity characteristics is not ideal. In addition, when the porosity is more than 20%, the content of the alloy in the obtained aluminum-graphite composite 1 is large, and the thermal expansion coefficient of the graphite composite 1 is increased. As a raw material of the isotropic graphite material, a hydrostatically formed coke-based graphite is used as a raw material to form a hydrostatic pressure, and the isotropic graphite material obtained by graphitization is suitable. The isotropic graphite material having the above characteristics was processed into a plate having a thickness of 3 mm and used. Since the finally obtained aluminum-graphite composite 1' is provided inexpensively, it is necessary to also process the aluminum-graphite composite 1 obtained from the isotropic stone of the raw material, and the most slab-shaped Ming-graphite composite Matter 1. In particular, it is important to efficiently produce the brocade-graphite composite 1 in a pressure impregnation method. The processed isotropic graphite material is sandwiched by a stripper, and the layer is then impregnated as a rectangular parallelepiped block (laminate) to increase efficiency. Practically, an area of the plate-like isotropic graphite material is suitable for 100 to 2500 cm 2 . When the area of the main surface of the plate-like isotropic graphite material is less than 100 cm2, the volume of the anchor composite 1 obtained by one-time compounding is small, and the obtained sheet-shaped aluminum-graphite composite has a cost per single iu volume. . On the other hand, if the area of the plate-shaped ink material exceeds 2 500 cm 2 , the equipment used for the composite is often priced and the warpage of the aluminum-graphite composite 1 becomes large. It is difficult to form a lower portion, and circuit formation and the like become difficult, and the cost per unit volume of the plate-shaped aluminum-graphite complex becomes high, which is not preferable. The amount of volume does not change, to the 0.5~: ink and: ground surface, plate shape: plural; up to: surface: a graphite 1 I stone 〖得非Η生降物1 - 11- 201035377 In order to form a uniform thickness of the uniform aluminum alloy layer on the surface of the aluminum-graphite composite 1, it is preferable that the surface of the plate-like isotropic graphite material has an undulation of 500 Å or less, preferably ι〇 Processing in a manner less than 〇β m. If the surface of the plate-like isotropic graphite material undulates more than 5 Å/zm, the variation in the thickness of the aluminum alloy layer on the surface of the aluminum-graphite composite 1 becomes large, which is not preferable. On the other hand, by removing the aluminum alloy layer on the surface of the aluminum-graphite composite 1, although the problem of variation in the thickness of the aluminum alloy layer can be improved, the thickness of the aluminum alloy layer is thick or the warpage of the first graphite composite 1 is When the time is large, the removal of the aluminum alloy layer requires a cost and the thickness of the processed aluminum-graphite composite 1 is lowered, and the cost per unit volume of the plate-shaped aluminum-graphite composite obtained after the final processing becomes high, and not ideal. The thickness of the plate-like isotropic graphite material is substantially the same as the thickness of the aluminum-graphite composite 1, and is preferably 0_5 to 3 mm, more preferably 1 to 2 mm. When the thickness of the plate-shaped R-shaped graphite material is less than 〇5 mm, when the in-graphite composite 1 is used as a substrate material for mounting an LED element, the heat capacity is insufficient, and the temperature of the 〇LED element rises instantaneously, and does not ideal. On the other hand, when the thickness exceeds 3 mm', the thermal resistance in the thickness direction of the aluminum-graphite composite 1 increases, and the temperature of the LED element rises, which is not preferable. The plate-like isotropic graphite material is sandwiched by a release plate coated with a release agent, and this is laminated to form a block (laminate). From the point of impregnation efficiency of the casting forging method, the number of laminated sheets of the isotropic graphite material sandwiched by the die plate is preferably the same as the length of each side of the laminate. In terms of the laminated thickness, it is suitable for about 1/8 to 1/2 -12 to 201035377 of the outer peripheral length of the plate-like isotropic graphite material. When the isotropic graphite material is laminated to form a block, the mounting torque in the vertical direction is 1 to 50 Nm with respect to the surface of the isotropic graphite material, and the laminate is sandwiched and laminated. The lamination method is not particularly limited. For example, a method in which an isotropic graphite material is laminated on a release sheet made of a stainless steel coated with a release agent, and a plate made of iron is disposed on both sides. After joining, it is fastened with a predetermined mounting torque to form a block. The appropriate mounting torque varies depending on the strength, thickness, area, and number of sheets of the isotropic graphite material used. However, if the mounting torque C) is less than 1 N m ', the aluminum on the surface of the aluminum-graphite composite 1 may be present. The thickness of the alloy layer may become thicker, or the difference in thickness may become excessive. On the other hand, if the mounting torque exceeds 5 ONm, there is a problem that the isotropic graphite material is broken during fastening, which is not preferable. Next, the laminate is heated in an air atmosphere or a nitrogen atmosphere at a temperature of 600 to 750 ° C, and then placed in a high pressure vessel. In order to prevent the temperature of the laminate from decreasing, the metal Q solution of the aluminum alloy heated to a melting point or higher is supplied as quickly as possible, and is pressurized at a pressure of 20 MPa or more to be immersed in the voids of the graphite molded body. Further, the anneal treatment of the immersion product may be performed for the purpose of removing deformation during immersion. The release template used for lamination may be applied to a release agent, such as a release agent such as graphite, boron nitride or alumina. In particular, after coating alumina or the like on a stripper plate made of stainless steel, it is preferable to apply a stripping agent for a graphite release agent and have good mold release property. On the other hand, in the case of removing the aluminum alloy layer on the surface of the plate-shaped aluminum-graphite composite 1, as the stripping template, in addition to the above-mentioned stripping template, a graphite sheet or a metal which is not coated with a releasing agent may be used. material. When the heating temperature of the laminate is less than the temperature of 600 °C, the composite of the aluminum alloy is insufficient, and the characteristics such as the thermal conductivity of the aluminum-graphite composite 1 are not preferable. On the other hand, when the heating temperature exceeds 750 ° C, aluminum carbide having a low thermal conductivity is produced in combination with the aluminum alloy, and the thermal conductivity of the aluminum-graphite composite 1 is lowered, which is not preferable. In addition, when the pressure at the time of immersion is less than 20 MPa, the composite of the aluminum alloy is insufficient, and the thermal conductivity of the aluminum-graphite composite 1 is lowered, which is not preferable. A better impregnation pressure is 50 MPa or more. The aluminum alloy in the aluminum-graphite composite 1 preferably contains 〜3 to 20% by mass. When the amount of niobium contained exceeds 20% by mass, the thermal conductivity of the aluminum alloy is lowered, which is not preferable. On the other hand, when the amount of niobium contained is less than 3% by mass, the melt flow of the molten aluminum alloy is deteriorated, and the aluminum alloy does not sufficiently penetrate into the voids of the isotropic graphite material during the impregnation, which is not preferable. The metal component other than aluminum or lanthanum in the aluminum alloy is not particularly limited as long as it does not excessively change its characteristics. If it is magnesium, it may be contained in an amount of about 3% by mass. Although an aluminum alloy layer is formed on the surface of the aluminum-graphite composite 1, the average thickness is preferably from 10 to 300 / z m, more preferably from 10 to 100 / m. The aluminum alloy layer can also be honed to the surface of the aluminum-graphite composite 1 to be adjusted to a predetermined thickness. The alloy layer is suitable for plating on the surface. When the average thickness is less than 10/z m', the aluminum-graphite composite 1 may be partially exposed, which may cause problems such as insufficient plating or a decrease in plating adhesion. On the other hand, if the average thickness exceeds 30 〇 #111, the coefficient of thermal expansion of the aluminum-graphite composite 1 becomes too large, which is not preferable. Further, if the average thickness of the aluminum alloy layer exceeds 3 〇〇/zm, -14-201035377, or the average thickness difference of the aluminum alloy layers of the two main faces is extremely excessively large, the warpage of the aluminum-graphite composite 1 becomes large. The handleability is lowered, and subsequent circuit formation and the like become difficult, and it is not preferable to remove the aluminum alloy layer on the surface of the aluminum-graphite composite 1 and use it in a state where the aluminum-graphite composite 1 is exposed. The method of removing the aluminum alloy layer is not particularly limited. For example, machining such as a milling machine, a sander, a belt grinder, and a sand blasting machine can be cited. Further, the aluminum alloy layer on the surface of the aluminum-graphite composite 1 may be etched with an alkali solution, an acid solution or the like to remove the aluminum alloy ruthenium layer. Further, the aluminum alloy layer on the surface of the aluminum-graphite composite 1 may be partially removed to improve the flatness of the plate-like aluminum-graphite composite 1. The aluminum-graphite composite 1 is 70% or more of the pores of the isotropic graphite material impregnated with the aluminum alloy. If the pores not impregnated with the aluminum alloy exceed 30%, the thermal conductivity of the aluminum-graphite composite 1 is lowered, which is not preferable. The aluminum-graphite composite 1 has a thermal conductivity of 150 to 300 W / mK' at a temperature of 25 ° C and a maximum 値 / minimum 热 of a thermal conductivity in three orthogonal directions of 1 Q to 1.3. When the thermal conductivity at a temperature of 25 ° C is less than 150 W/mK, when it is used as a substrate material of an LED light-emitting member, heat dissipation characteristics are insufficient, which is not preferable. Regarding the upper limit, although there is no limitation in characteristics, the material itself becomes expensive, and the anisotropy of the characteristic becomes strong, which is not preferable. In addition, when the maximum 値/min 値 of the thermal conductivity in the three orthogonal directions exceeds 13 , the anisotropy of the heat dissipation characteristics becomes excessively large, and when the substrate material used as the LED light-emitting member is used, the temperature of the LED element excessively rises. The problem is not ideal. The thermal expansion coefficient of aluminum-graphite composite 1 series temperature from 25 °C to 150 °C is 4 -15- 201035377 ' xlO-6~7·5χ1 (Γ6/Κ, and the thermal expansion coefficient of the orthogonal three directions is larger/minimum値 is 1~1. 3. If the temperature is 2 5 °C~1 5 0 °C, the thermal expansion is less than 4χ1 (Γ δ / K, or more than 7.5xl (T 6 / K, then aluminum-graphite 1 and LED components The difference in thermal expansion coefficient becomes too large, and the life of the device is lowered, and the LED element may be broken. In other cases, the thermal expansion in the three directions orthogonal to the temperature of 25 ° C to 150 ° C is the maximum. When the minimum 値 exceeds 1.3, the anisotropy of the thermal expansion number of the aluminum-graphite composite 1 becomes excessively large, and when the LED element emits light, uneven 〇_ is applied to the LED element, and the life of the LED element is lowered. The problem of component destruction, etc. is not ideal. The aluminum-graphite composite 1 has a 3-point bending strength of 50 to 15 OMPa. When the point bending strength is less than 50 MPa, it may sometimes collapse during processing due to aluminum-graphite. Since the composite 1 is a conductive material, it is not preferable because of insulation failure, etc. Further, it is fixed by screws. When it is used on a device or a casing, it sometimes breaks during fastening, etc. Q is ideal. Regarding the upper limit of the three-point bending strength, the three-point bending strength of the aluminum-graphite composite 1 is formed without limitation of properties. When the strength exceeds 15 OMPa, it is necessary to add other ceramic particles or to add thermal conductivity characteristics (mosaic graphite), etc. The aluminum-graphite composite 1 may have a low thermal conductivity, which is not preferable. Further, the LED light-emitting member is used for a car. In the case of illumination for use in an equalizer, if the strength is insufficient, it may be broken or broken due to vibration or the like, which is not preferable. The surface roughness (Ra) of the plate-shaped aluminum-graphite composite 1 is good; The most coefficient composite LED I want. The number of inflation stress sometimes is 3, etc. It will not be scattered, but the high embedded motion will occur I 0.1 16 - 201035377 ~ 3ym, preferably 0·1 ~ 2 / Zm. When the surface roughness (Ra) A m ' is used as the substrate material of the LED light-emitting member, the adhesion strength at the time of bonding of the layer 4 or the LED element is not obtained, and the thickness of the low heat edge layer 4 is thickened. Reduced heat dissipation characteristics, not ideal. Another about surface roughness The lower limit of (Ra) does not have a characteristic surface limitation, so that Ra becomes less than 〇.lMm, and it is necessary to process a plate-shaped aluminum-graphite complex surface, which is expensive, and is not preferable. ^ A substrate on which an LED element is mounted is used as an LED In the case of the light-emitting member, the heat-dissipating surface is often used by a metal heat sink or a casing such as a heat-dissipating lubricating oil or a heat-dissipating sheet. In this type of use, the adhesion of the joint surface is ensured. A method in which a screw having an LED element is fixed to a metal heat sink or a casing or the like. A hole is formed in the material, and the substrate on which the LED element is mounted is mounted on a screw holder or a casing, whereby the adhesion between the two can be improved, and the reliability of the joint portion can be improved. Since the aluminum-graphite composite 1 is well-added, it can be processed by a usual drill or the like. In addition, holes are formed by work or water jet processing, or even press processing. The shape of the hole may be a U shape or the like if it is a shape that can be fixed by a screw. The LED light-emitting member bonds the LED element to a substrate composed of a plate-shaped aluminum compound 1. The bonding method generally uses high thermal conductivity or soldering or the like. It is preferred that the surface of the thermal conductivity is directly soldered to the substrate material without passing through the thermal conductivity 4 which is low. However, aluminum-graphite exceeds 3 and the insulating guide is the most important, but the compound 1 is bonded, and the substrate is used for the substrate to be dispersed and the workability is excellent, or graphite can be used. Re-bonding Insulation Layer Composite -17- 201035377 'Material 1 cannot be directly soldered, so a plating layer is formed on the surface of the aluminum-graphite composite 1. The method of forming the plating layer is not particularly limited and may be formed by electrowinning or electroless plating. The plating material may be nickel, copper, gold, tin, or the like, and such composite plating may be used. Regarding the plating thickness, in order to ensure the adhesion between the aluminum-graphite composite 1 of the substrate and the plating layer and the solder wettability, the surface to be thermally conductive is preferably as thin as possible, generally 1~ 5/zm. The LED element of the LED light-emitting member may also be a structure in which the bare wafer is also packaged. Further, the portion of the main surface of the aluminum-graphite composite 1 or the heat dissipating member in which the metal circuits 3 are formed in contact with the LED element may or may not be electrically insulated. Here, in the present specification, the term "heat dissipating component" is a generic term for a member that radiates heat generated from an LED element, and is, for example, a main surface or two main surfaces of a substrate composed of an aluminum-graphite composite 1. Any of the metal circuits 3 is formed arbitrarily. Fig. 1 and Fig. 3 show an embodiment in which the portion where the LED element is in contact with the heat dissipating unit is not electrically insulated. Forming the metal circuit 3 via the insulating layer 4 or the active metal bonding material layer 7 on one main surface or both main surfaces of the plate-shaped aluminum bismuth-graphite composite 1, and on the surface of the metal circuit 3 or the aluminum-graphite composite The structure of the LED element (LED wafer 2) is directly disposed by a brazing method or the like. The insulating layer 4 formed on one main surface or both main surfaces of the aluminum-graphite composite 1 is a curable resin composition mainly composed of a heat resistant resin and an inorganic chelating material, and has a thermal conductivity of 1 W after hardening. / mK is better. As the heat resistant resin, for example, an epoxy resin, a enamel resin, a polyamide resin, -18-201035377', an acrylic resin, or the like can be used. The heat-resistant resin is used in a proportion of 10 to 40% by volume. When the amount is less than 1% by volume, the viscosity of the insulating layer composition is increased, and the workability is lowered. On the other hand, if it exceeds 40% by volume, the thermal conductivity of the insulating layer 4 is lowered. Not ideal. The difference between the thermal expansion coefficient of the plate-shaped aluminum-graphite composite 1 and the LED element is large. 'In order to relax the fatigue of the joint portion caused by the heating cycle, the storage elastic modulus of the cured resin composition is 1 5000 MPa at 300K. The following is better. In this case, the curable resin composition is a combination of (1) a resin mainly composed of an epoxy resin, (2) a hardener having a polyether skeleton and having a primary amine group at the terminal of the main chain, and (3) The inorganic chelating agent can provide a cured product excellent in stress relaxation property, electrical insulation property, heat dissipation property, heat resistance, and moisture resistance. As the epoxy resin, a general-purpose epoxy resin such as a bisphenol F-type epoxy resin or a bisphenol a-type epoxy resin can be used. When one or more epoxy resins selected from the group consisting of an epoxy resin having a dicyclopentadiene skeleton, an epoxy resin having a naphthalene skeleton, an epoxy resin having a biphenyl skeleton, and an epoxy resin having a novolac skeleton are contained in an all-epoxy resin When the amount is 10% by mass or more, the balance between the stress relaxation property and the moisture resistance is further improved. A representative epoxy resin having a novolak skeleton may be a phenol novolak type epoxy resin or a cresol novolak type epoxy resin, but a dicyclopentadiene skeleton, a naphthalene skeleton or a biphenyl skeleton may be used together with Epoxy resin for the novolak skeleton. As the epoxy resin, an epoxy resin having the above-described skeleton may be used alone. In addition, it is also possible to use epoxy resin as the main component, and to use other resins as a thermosetting resin such as a phenolic resin, a polyimide resin, or a high molecular weight -19- such as a phenoxy resin, an acrylic rubber or an acrylonitrile-butadiene rubber. 201035377 Resin. When the balance of the stress relaxation property, the electrical insulating property, the heat resistance, and the moisture resistance is considered, the amount of the high molecular weight resin is preferably 30% by mass or less based on the total amount of the epoxy resin. In order to reduce the storage elastic modulus of the resin composition after hardening, the hardener uses a hardener having a polyether skeleton and having a primary amine group at the end of the main chain. Can be used with other hardeners. When an aromatic amine-based curing agent is used, it is more suitable for balance of stress relaxation property, electrical insulation property, moisture resistance, and the like. As the aromatic amine-based curing agent, diaminodiphenylmethane, diaminodibenzoquinone, m-phenylenediamine or the like can be used. Further, a curing agent such as a phenol novolak resin may be further used. Examples of the inorganic cerium include oxide ceramics such as alumina (aluminum), cerium oxide, and magnesium oxide, and nitride ceramics such as aluminum nitride, tantalum nitride, and boron nitride, and carbide ceramics. The ratio of the inorganic cerium in the curable resin composition is 18 to 27% by volume of the inorganic cerium. If it is outside this range, the viscosity of the resin composition increases, and the thermal conductivity decreases, which is not preferable. The inorganic chelating system is preferably a spherical particle having a maximum particle diameter of 100 Å or less and a minimum particle diameter of 0.05 #m or more. Further, particles containing 5 to 75 mass% of particles having a particle diameter of 5 to 50/zm, preferably containing 25 to 5 % by mass of particles having a diameter of 0 · 2 to 1 · 5 /z m are more preferable. As the insulating layer 4, a decane coupling agent, a titanate coupling agent, a stabilizer, a curing accelerator, or the like can be used as needed. Examples of the material of the metal circuit 3 include a copper foil, an aluminum foil, a copper-aluminum composite box, and a copper-nickel-aluminum composite box. -20-201035377 As a method of the metal circuit 3 on the plate-shaped aluminum-graphite composite 1, for example, the following method can be used to heat the curable resin of the insulating layer 4 on the aluminum-graphite composite 1 and heat it to a half. It is a foil and is heated to a substantially completely hardened state. The insulating layer 4 is processed into a sheet shape in a semi-hardened state, and the metal foil is integrated together. Regarding the circuit ^, there is no particular limitation 'but before the metal foil is preheated or ultraviolet (UV) hardened, an etching solution such as a mixture of liquid and sulfuric acid is used, and the LED element and the heat dissipating component are insulated from the air in the second figure. An embodiment of the situation of disposal. One of the main surfaces of the first-graphite composite 1 or the metal circuits 3 on both main faces, and in the structure of the LED elements (the LED crystals are connected to the protrusions 6 and connected by layers. 〇 or as shown in Fig. 3, in a plate shape It is preferable that the aluminum crucible surface and/or the two main surfaces are characterized by a heat dissipation structure via the active metal connection circuit 3. In the second drawing, the material of the metal circuit 3 can be the same as that shown in Fig. 1. On the other hand, the inter-layer connection protrusions 6 are formed on the graphite composite 1 having the interlayer connection structure, and the metal circuit 3 and the interlayer connection protrusions 6 are connected via the insulating layer 4. The screen-printing composition paste pattern is used to print the hardened state. After that, the method of attaching the alloy or the pattern forming method by using a hot press device in advance, although the resist ink is applied, the copper chloride and the hydrogen peroxide solution are preferably formed by etching. The contact portion is electrically charged. 2 is a view showing a material of a metal substrate and an insulating layer 4 formed in a lower portion of a sheet-like aluminum via a insulating layer 4 to form a sheet 2) via a layer of a composite material 7 of a graphite-composite composite layer 1, and via a layer connecting protrusion 6 Method, the plate-shaped aluminum - a method, if the method to be conductive, then nothing can be, -21--201035377 'include, for example, using the method of forming a metal plating, a method using a conductive paste or the like is formed. As a method of forming the insulating layer 4 in a state in which the interlayer connection protrusions 6 are formed, there is a method in which the composition of the insulating layer 4 is made into a slurry, and the periphery and the upper portion of the interlayer connection protrusions 6 are used, and screen printing or the like is used. After the method is immersed and heated to a semi-hardened state, the metal foil is bonded thereto, and after heating to a substantially completely cured state, the metal circuit of the upper portion of the interlayer connection protrusion 6 is removed by etching or the like, and is removed by laser processing or the like. The method of forming the insulating layer composition, or processing the insulating layer composition into a sheet shape in a semi-〇 hardened state in advance, and integrating it with the metal foil by a hot press device to form a convex portion at a position corresponding to the interlayer connection protrusion 6 In the part, a laminate having a metal layer is formed on the surface, and the convex portion of the laminate is removed, and the interlayer connection protrusion 6 is exposed. In Fig. 3, as the material of the metal circuit 3, a monolithic A1 alloy such as a monomer A1 or a bismuth-Si alloy, an Al-Si_Mg alloy, or an Al-Mg_Mn can be used. 〇 As the material constituting the active metal bonding material layer 7, an Al-Si-based or Al-Ge-based alloy or an Al-Cu-Mg-based alloy can be used, and in particular, an A1-Cu-M-based alloy is preferable. First, it is because A is a bonding condition between a Cu-Mg-based alloy and an Al-Si-based, Al-Ge-based, Al-Si- (}e-based or Mg-added one) and ceramic materials. The allowable range is wide, and it is not possible to bond in a vacuum. Therefore, it is possible to bond with excellent productivity. That is, in the case of Al-Si or Al-Ge, if S1 or Ge is not added in a large amount, the melting point is not lowered. However, if it is added in a large amount, it becomes hard and the problem of -22-201035377 becomes brittle. In order not to cause such a problem, for example, in the case of the A1 - Si alloy, if the ratio of Si is reduced to 5%, the melting point becomes It is difficult to join at a temperature of 620 ° C or lower at 615 ° C. In contrast, in the case of an Al—Cu—M-based alloy, even if the ratio of Cu is reduced to about 4%, it is appropriately taken. By means of pressurization or the like, it is possible to join at about 600 ° C, and the allowable range of the bonding conditions is widened. Secondly, since the Al—Cu—M-based alloy is more uniform than Cu or Mg, Cu or Mg is more uniform. Diffusion in A1, so it will produce local melting, ❹ or extrude excess It is difficult to produce edge bulging due to the combination of materials, and it is possible to form a relatively stable joint in a short time. The Al-Cu-Mg-based alloy to be used, the three-component alloy of Al, Cu, and Mg, need not be included, and may contain other components. For example, in addition to Al, Cu, and Mg, the total content of components such as Zn, In, Μη, Cr, Ti, Bi, B, and Fe may be about 5% by weight or less.

Al — Cu — Mg系合金中的Cu的比例爲2〜6重量%較好。 Q 若小於2重量%,則接合溫度變高,接近A1的熔點,而若 超過6重量%,則接合後的接合材料的擴散部分變得特別 硬’有電路基板的可靠性降低之虞。最好爲丨.5〜5重量%。 另一方面’關於Mg,藉由少量添加,接合狀態成爲良好。 此推測是因爲A1表面的氧化物層的去除效果或氮化鋁基 板表面與接合材料的潤濕性改善效果。Mg的比例最好爲 0.1〜2重量%。若小於〇丨重量%,則添加效果不顯著, 若超過2重量%,則給與…或八丨合金的硬度不良影響, -23- 201035377 並且有時會在接合時大量揮發而造成爐作業的阻礙。特別 好爲0.3〜1.5重量%。 如列舉所使用的接合材料的市售品的一例,則以A丨中含 有4重量%左右的Cu與0.5重量%左右的Mg的2018合 金,甚至含有0.5重量%左右的Μη等的2017合金爲首, 以及 2001、 2005、 2007、 2014、 2024、 2030、 2034、 2036、 2048、 2090、 2117、 2124、 2214、 2218、 2224、 2324、 7050 等。 Θ 接合溫度爲560〜630 °C,可適用相當廣大範圍,但適當 範圍卻因接合材料的組成而不同。在添加有Zn或in等的 低熔點成分’或者Cu或Mg等的含有量比較多的情況下, 即使600°C以下,亦可充分接合。若接合溫度超過63(TC, 則在接合時容易產生焊接缺陷(電路所產生的蛀孔現象), 並不理想。 加熱接合時,在相對於鋁-石墨複合物1的板面垂直的 〇 方向以10〜lOOkgf/cm2,特別是15〜80kgf/ cm2加壓較 好。作爲加壓方法,可使用放置重錘的夾具藉由機械地加 壓而進行。加壓最好於至少接合開始的溫度,例如使用95.7 % A1 - 4% Cu - 0.3% Mg合金箔以610°C接合的情況,保持 在此壓力內到5 8 0 °C。 在散熱組件方面,在板狀的銘-石墨複合物1之一主面 及/或兩主面上形成金屬電路3,例如A1系電路。Al-Cu - Mg系合金的接合材料,雖然層積於板狀的鋁-石墨複合 -24- 201035377 • 物1與構成金屬電路3的A1系電路圖案、A1系電 金屬板之間而使其揷入’但若預先與此等複合化 使用。 散熱組件藉由使用Al—Cu- Mg系合金作爲構 屬接合材料層7的接合材料,可顯著提高其生產 由之一是接合並不限定於真空爐。真空爐本來高 連續化困難,若是分批(batch)爐,則容積效率差 型爐’則容易產生溫度分布,不能期望高收獲率 Θ 相對於此,若使用Al— Cu — Mg系合金以取代先丨 Si系或A1 - Ge系合金的接合材料,則即使不是真 可在N2、H2、惰性氣體及此等的混合氣體的低氧 合’所以爐構造簡單,連續化也容易。藉由連續 溫度分布等的製品的偏差要因減低,並可製造良 質穩定的製品。 使用A1系電路形成用金屬板作爲構成金屬電路 〇 而製造散熱組件之際,以A1系電路形成用金屬板 銘一石墨複合物1彼此相鄰的方式層積而加熱較 开彡成用金屬板的熱膨脹係數大於板狀的 複合物1 ’所以使因接合後的冷卻而板狀的鋁-物1側成爲凸形的變形減輕。此係利用A1爲塑性 的材·料·之點’爲了避免A1材料彼此的黏接,按照 可以使間隔材料挿入。 實施例 路形成用 ,則容易 成活性金 性。其理 價,並且 。若是大 的生產。 W 之 A1 -空下,亦 氣氛下接 化,可使 率佳、品 3的構件 與板狀的 好。因爲 銘一石墨 石墨複合 變形容易 需要,也 -25- 201035377 ' (實施例1、2) 實施例1係將體積密度1.83g/ cm3的各向同性石墨材料 (東海碳公司製造:G347),實施例2係將體積密度1.89g/ cm3的各向同性石墨材料(東海碳公司製造:G45 8)加工成 200mmx200mmxl.5mm的板狀。此外,作爲脫模板,在200 x200x0.6mm的不銹鋼板上塗布氧化鋁溶液(日產化學公司 製造:氧化鋁溶液200)後,以溫度35CTC進行1小時的加 熱處理,再塗布石墨脫模劑。其次,將板狀的各向同性石 〇 墨材料及特性評估用的200x200x25mm的各向同性石墨材 料以脫模板夾住,層積70片後,在兩側配置1 2mm厚度的 鐵板,並以M10的螺栓8支連結,以面方向的安裝力矩爲 20Nm的方式,用扭力扳手緊固而形成層積體。所得到的層 積體以電爐在氮氣氛下,以溫度65 0 °C預熱1小時後,收進 已預先加熱的內徑300mmx300mmx300mmH的沖壓模內,注 入含矽12質量%的鋁合金的金屬溶液,以lOOMPa的壓力 Q 加壓20分鐘,使各向同性石墨材料浸漬鋁合金。其次,冷 卻到室溫後,用濕式帶鋸機切斷鋁合金與脫模板的境界部 分及鐵板部分,剝下夾著的脫模板,得到200mmx200mmx 1.6mm的鋁一石墨複合物。爲了去除浸漬時的變形,所得 到的複合物以溫度50(TC進行了 2小時的退火處理。 由在實施例1及2使用的各向同性石墨材料,利用磨削 加工製作了正交的3方向的熱膨脹係數測量用試驗物(3x3x 20mm)及熱傳導率測量用試驗物(25mmx25mmxlmm)。使用 -26- 201035377 ' 各試驗物’以熱膨脹計(精工電子工業公司製造;TMA300) 測量溫度25 °C〜150°C的熱膨脹係數’以雷射閃光(laser flash)法(理學電機公司製造;LF/TCM - 8510B)測量25°C 的熱傳導率。表1中顯示其結果。各向同性石墨材料的氣 孔率係使用石墨的理論密度:2.2g/ cm3 ’自以阿基米德 (Archimedes)法測量的體積密度算出。 【表1】 體積密度 (g/cm3) 氣孔率 (%) 熱傳導率(W/mK) 熱膨脹係數(ΧΚΓ6/Κ) 平均値 最大/最小 平均値 最大/最小 實施例1 1.8 3 17 12 0 1. 1 4. 2 1. 2 實施例2 1.89 1 4 16 0 1. 1 3. 9 1. 2 註解1:熱傳導率與熱膨脹係數的平均値爲正交的3方向 的値的平均値 註解2:熱傳導率與熱膨脹係數的最大/最小爲正交的3 方向的最大値與最小値之比 其次,由所得到的鋁一石墨複合物,利用磨削加工製作 〇 正交的3方向的熱膨脹係數測量用試驗物(3x3x20mm)、熱 傳導率測量用試驗物(25 mm x25 mm X 1mm)及強度試驗物 (3mmx4mmx40mm),使用各試驗物,以熱膨脹計(精工電子 工業公司製造;TMA300)測量溫度25°C〜150°C的熱膨脹係 數,以雷射閃光(laser flash)法(理學電機公司製造;LF/ TCM - 85 1 0B)測量25 °C的熱傳導率及測量3點彎曲強度(依 據JIS — R1601)。此外,以阿基米德(Archimedes)法測量試 驗物的體積密度,算出各向同性石墨材料的氣孔的浸漬率。 -27- 201035377 【表2】 體積密度 (g/cm3) 浸漬率 (%) 彎曲強度 (MPa) 熱傳導率(W/mK) 熱膨脹係數(X10VK〉 平均値 最大/最小 平均値 最大/最小 實施例1 2. 2 2 8 3 8 5 18 5 1 . 1 7. 4 1. 1 實施例2 2. 2 1 8 1 8 0 2 0 0 1. 1 4. 3 1. 1 註解1:熱傳導率與熱膨脹係數的平均値爲正交的3方向 的値的平均値 註解2:熱傳導率與熱膨脹係數的最大/最小爲正交的3 0 方向的最大値與最小値之比 關於實施例1的板狀的鋁-石墨複合物,以卡尺測量板 厚,以表面粗糙度計測量切斷加工面的表面粗糙度(Ra) 後,利用機械加工沿著各樣品的對角線進行切斷,等間隔 地測量1 0點藉由切斷而露出的一方主面的鋁合金層的對 角線方向的厚度,基於測量値對於板面算出垂直方向的厚 度的平均。表3中顯示其結果。另一方面,實施例2的板 狀的鋁一石墨複合物,係使用塗有#120的SiC磨粒的砂 〇 帶,以濕式砂帶硏磨機去除兩主面的鋁合金層後,測量板 厚及表面粗糙度(Ra)。表3中顯示結果。 【表3】 平均A1層厚度 板厚 Ra (jum) (mm) (μ m) 實施例1 7 0 1. 6 0. 5 實施例2 — 1 . 4 1. 5 (LED發光構件之製造例) (1)以通用混合攪拌機混合雙酚F型環氧樹脂(埃比科特 -28- 201035377 ' (Epikote)807 :環氧當量=173、殼牌石油環氧股份有限公 司製造)1 00質量份作爲環氧樹脂、矽烷偶合劑、v -縮水 甘油氧基丙基甲基二乙氧基矽烷(AZ-6165:日本優尼卡 (Unicar)股份有限公司製造)5質量份、平均粒徑5.2/zm的 氧化鋁(AS — 50:昭和電工股份有限公司製造)300質量份作 爲無機塡充物、平均粒子直徑1.2/zm的球狀氧化鋁(AKP - 15 :住友化學股份有限公司製造)200質量份,並對此調 配、混合聚氧丙嫌胺(杰法明(Ieffamine)D- 400:德士古化 〇 工公司製造)25 質量份、聚氧丙烯胺(杰法明 (Jeffamine)D2000:德士古(Texaco)化工公司製造)20質量份 作爲硬化劑。 (2)以硬化後的絕緣黏接層的厚度在前述板狀的鋁-石 墨複合物上成爲100 的方式,塗布上述混合物,使其預 硬化成半熔(B stage)狀態,用層合機貼合厚度35 y m的電 解銅箔,其後進行 80°C x2hrs + 150°C x3hrs後固化(after Q cure),製作有絕緣黏接層的附帶銅箔的複合物。再蝕刻銅 箔,形成有墊部的所希望的電路,製成鋁-石墨複合物電 路基板。其次,在特定的電路上以絲網塗布白色抗焊劑 (PSR4000 — LEW1 :太陽油墨公司製造)後,使其UV(紫外線) 硬化。再以Ag糊使未絕緣的LED晶片(1mm2)黏接於電解銅 箔露出部分上,得到如第1圖所示的LED發光構件。此外, 利用C〇2雷射去除所希望地方的絕緣層露出部分,以Ag糊 使已絕緣的LED晶片(1mm2)黏接於該部分上,得到如第3 -29- 201035377 ' 圖所示的構造的LED發光構件。 (實施例3、4) (LED發光構件之製造例) (1) 在以實施例1及2所得到的板狀的鋁-石墨複合物 上,利用電解鍍敷使3 5〆m厚的銅層形成於複合物的單面 全體。藉由以蝕刻去除所希望地方以外的銅層,製成附帶 銅凸起的鋁一石墨複合物。此外,另一方面,以通用混合 攪拌機混合雙酚F型環氧樹脂(埃比科特(EP1kote)807 :環 〇 氧當量=173、殻牌石油環氧股份有限公司製造)1 00質量份 作爲環氧樹脂、矽烷偶合劑、v -縮水甘油氧基丙基甲基 二乙氧基矽烷(AZ-6165:日本優尼卡股份有限公司製造)5 質量份、平均粒徑5 /z m的氧化鋁(AS — 50 :昭和電工股份 有限公司製造)500質量份作爲無機塡充物,並對此添加混 合聚氧丙烯胺(杰法明(Jeffamine)D— 400 :德士古化工公司 製造)45質量份作爲硬化劑。以厚度成爲100/z m的方式塗 Q 布於35 vm厚的銅層上,形成半熔(B stage)狀態,製成附 帶樹脂的銅箔。 (2) 層積前述附帶銅凸起的鋁-石墨複合物與附帶樹脂 的銅箔,以1 80°C進行加熱沖壓,使其一體化。以蝕刻去除 在銅凸起上成爲凸狀態之處的銅箔,再以C〇2雷射去除絕 緣層(半熔(B stage)片材的硬化部分),製成如第2圖所示的 附帶銅凸起的鋁-石墨複合物電路基板。其次,在特定的 電路上以絲網塗布白色抗焊劑(PSR4000 — LEW1 :太陽油墨 -30- 201035377 公司製造)後,使其UV(紫外線)硬化。以#200的硏磨紙從 上述銅凸起上的電路面去除絕緣層的殘留物,以#800的硏 磨紙平滑地加工表面。以Ag糊使已絕緣的LED晶片(1mm2) 黏接於此表面上。第2圖中顯示構造。 (實施例5、6) (LED發光構件之製造例) 將以實施例1、2所得到的板狀的鋁-石墨複合物;95 % Al—4%Cu — l%Mg的組成,由厚度〇.3mm的合金構成的接 〇 合材料;及0.4mm厚的A1電路依此順序層積,作爲1組, 經由間隔物,重疊1 0組而層積。將此從爐外以油壓式的單 軸加壓裝置,經由碳製的推桿,一面在與由鋁-石墨複合 物構成的基板面垂直的方向以500MPa的壓力加壓,一面在 4xl0_3Pa的真空中(分批爐)以610°C進行10分鐘加熱,使 其接合,製成鋁一石墨複合物電路基板。其次,在特定的 電路上以絲網塗布白色抗焊劑(PSR4000 — LEW1 :太陽油墨 〇 公司製造)後’使其υν(紫外線)硬化。再以Ag糊使已絕緣 的LED晶片(1 mm2)黏接於A1電路上,得到如第1圖所示的 LED發光構件。 (實施例7〜13、比較例1) 將表4所示的各種各向同性石墨材料(實施例7〜13)及擠 出石墨材料(比較例1)加工成2 0 0 mmxl50mmxl.5mm 的形 狀’除了將脫模板的形狀變更爲200mmxl50mmx0.6mm以 外,與實施例1同樣,製作了鋁-石墨複合物。所得到的 -31- 201035377 鋁-石墨複合物與實施例1同樣’實施了特性評估。表5、 6中顯示結果》 【表4】 體積密度 氣孔率 熱傳導率(W/mK) 熱膨膜係數(Xl〇-f’/K〉 (g/cm3) (%) 平均値 最大/最小 平均値 最大/最小 實施例7 1. 7 6 2 0 115 1. 2 4. 5 1. 2 實施例8 1 . 9 8 10 110 1 . 1 3. 0 1. 1 實施例9 1.78 1 9 10 0 1 . 1 4. 0 1. 1 實施例1 0 1.83 17 2 0 0 1 . 1 2. 0 1. 3 實施例1 1 1.89 14 13 0 1. 3 3. 5 1. 2 實施例1 2 1.96 11 110 1. 1 2. 5 1. 2 實施例1 3 1.83 17 10 0 1. 1 4. 9 1 . 2 比較例1 1 . 7 B 2 0 16 0 1 . 7 4. 7 1. 6The ratio of Cu in the Al—Cu—M-based alloy is preferably 2 to 6 wt%. When the amount is less than 2% by weight, the bonding temperature becomes high and approaches the melting point of A1. When the amount is more than 6% by weight, the diffusion portion of the bonding material after bonding becomes particularly hard, and the reliability of the circuit board is lowered. It is preferably 丨5 to 5% by weight. On the other hand, regarding Mg, the bonding state is good by a small amount of addition. This is presumed to be due to the effect of removing the oxide layer on the surface of A1 or the wettability of the surface of the aluminum nitride substrate and the bonding material. The proportion of Mg is preferably from 0.1 to 2% by weight. If it is less than 〇丨% by weight, the effect of addition is not significant, and if it exceeds 2% by weight, the hardness of the alloy or the erbium alloy is adversely affected, -23-201035377 and sometimes a large amount of volatilization at the time of joining causes furnace operation. Obstruction. It is particularly preferably from 0.3 to 1.5% by weight. An example of a commercially available product of a bonding material to be used is a 2018 alloy containing about 4% by weight of Cu and about 0.5% by weight of Mg in A丨, and even a 2017 alloy containing about 0.5% by weight of Μη. First, and 2001, 2005, 2007, 2014, 2024, 2030, 2034, 2036, 2048, 2090, 2117, 2124, 2214, 2218, 2224, 2324, 7050, and the like.接合 The bonding temperature is 560 to 630 °C, which is suitable for a wide range, but the proper range differs depending on the composition of the bonding material. When the content of the low-melting component Zn or Zn or the like to which Zn or in is added is relatively large, the bonding can be sufficiently performed even at 600 ° C or lower. When the bonding temperature exceeds 63 (TC, soldering defects (boring phenomenon due to the circuit) are likely to occur at the time of bonding, which is not preferable. In the case of heating bonding, the direction perpendicular to the plane of the aluminum-graphite composite 1 is perpendicular. It is preferably pressurized at 10 to 100 kgf/cm2, particularly 15 to 80 kgf/cm2. As a pressurizing method, it can be carried out by mechanical pressing using a jig for placing a weight. The pressurization is preferably at least the temperature at which the joining starts. For example, using a 95.7 % A1 - 4% Cu - 0.3% Mg alloy foil at 610 ° C, it is maintained at this pressure to 580 ° C. In terms of heat dissipation components, the plate-shaped Ming-graphite composite A metal circuit 3 is formed on one main surface and/or both main surfaces, for example, an A1 system circuit. A bonding material of an Al-Cu-Mg alloy is laminated on a plate-shaped aluminum-graphite composite-24-201035377. 1 is interposed between the A1 type circuit pattern constituting the metal circuit 3 and the A1 type electric metal plate. However, it is used in combination with the above. The heat dissipating component is formed by using an Al-Cu-Mg alloy. The bonding material of the bonding material layer 7 can significantly improve the production thereof by one of them The vacuum furnace is not limited to a vacuum furnace. The vacuum furnace is inherently difficult to be highly continuous. In the case of a batch furnace, the volumetric efficiency furnace is prone to temperature distribution, and high yield cannot be expected. In contrast, if Al is used, When a Cu-Mg-based alloy is used as a bonding material for a bismuth Si-based or an A1-Ge-based alloy, the furnace structure is simple and continuous even if it is not in the N2, H2, inert gas, or a mixed gas of these. It is also easy to reduce the variation of the product such as the continuous temperature distribution, and it is possible to manufacture a product which is stable and stable. The A1 system is formed by using a metal plate for forming a circuit as a metal circuit to manufacture a heat dissipating component. By laminating a metal plate in which the graphite composites 1 are adjacent to each other, the aluminum alloy having a thermal expansion coefficient larger than that of the plate-like composite 1' is heated. The deformation of the convex shape on the one side is reduced. This is a point in which the material A1 is made of plastic. In order to avoid the adhesion of the A1 materials, the spacer material can be inserted in accordance with the embodiment. , it is easy to become active gold. Its valence, and if it is a large production. W A1 - empty, but also under the atmosphere, can make the rate is good, the components of the product 3 and the shape of the plate. Because Ming Yi Graphite-graphite composite deformation is easily required, and also -25-201035377' (Examples 1 and 2) Example 1 is an isotropic graphite material having a bulk density of 1.83 g/cm 3 (manufactured by Tokai Carbon Co., Ltd.: G347), and Example 2 An isotropic graphite material (manufactured by Tokai Carbon Co., Ltd.: G45 8) having a bulk density of 1.89 g/cm 3 was processed into a plate shape of 200 mm x 200 mm x 1.5 mm. Further, as a stripping plate, an alumina solution (manufactured by Nissan Chemical Co., Ltd.: alumina solution 200) was applied to a stainless steel plate of 200 x 200 x 0.6 mm, and then heat-treated at a temperature of 35 CTC for 1 hour, and then a graphite release agent was applied. Next, a plate-shaped isotropic stone ink material and a 200x200x25mm isotropic graphite material for evaluation of properties were sandwiched by a stripper. After laminating 70 sheets, an iron plate having a thickness of 12 mm was placed on both sides, and The bolts of the M10 are connected to each other in a manner of 20 Nm in the surface direction, and are fastened with a torque wrench to form a laminate. The obtained laminate was preheated in an electric furnace under a nitrogen atmosphere at a temperature of 65 ° C for 1 hour, and then placed in a pre-heated inner diameter of 300 mm x 300 mm x 300 mmH in a stamping die to inject a metal containing 12% by mass of an aluminum alloy. The solution was pressurized at a pressure Q of 100 MPa for 20 minutes to impregnate the aluminum alloy with the isotropic graphite material. Next, after cooling to room temperature, the boundary portion and the iron plate portion of the aluminum alloy and the stripper were cut by a wet band saw, and the stripped template was peeled off to obtain an aluminum-graphite composite of 200 mm x 200 mm x 1.6 mm. In order to remove the deformation at the time of immersion, the obtained composite was annealed at a temperature of 50 (TC for 2 hours. From the isotropic graphite materials used in Examples 1 and 2, orthogonal 3 was produced by grinding. Test material for thermal expansion coefficient measurement in direction (3x3x 20mm) and test material for thermal conductivity measurement (25mmx25mmxlmm). Use -26- 201035377 'Each test substance' to measure temperature 25 °C with thermal expansion meter (manufactured by Seiko Instruments Inc.; TMA300) The thermal expansion coefficient of ~150 ° C was measured by a laser flash method (manufactured by Rigaku Electric Co., Ltd.; LF/TCM - 8510B) to measure the thermal conductivity at 25 ° C. The results are shown in Table 1. Isotropic graphite materials The porosity was calculated using the theoretical density of graphite: 2.2 g/cm3' from the bulk density measured by the Archimedes method [Table 1] Bulk density (g/cm3) Porosity (%) Thermal conductivity (W) /mK) Thermal expansion coefficient (ΧΚΓ6/Κ) Average 値Maximum/Minimum average値Maximum/minimum Example 1 1.8 3 17 12 0 1. 1 4. 2 1. 2 Example 2 1.89 1 4 16 0 1. 1 3. 9 1. 2 Note 1: Thermal conductivity and thermal expansion coefficient The average 値 is the average of the three directions of 値 in the orthogonal 値 Note 2: the ratio of the maximum 最小 to the minimum 3 in the three directions in which the thermal conductivity is the largest/minimum of the thermal expansion coefficient is the second, and the obtained aluminum-graphite composite The test object (3x3x20mm) for thermal expansion coefficient measurement in the three directions orthogonal to the 〇, the test material for thermal conductivity measurement (25 mm x 25 mm X 1 mm), and the strength test object (3 mm x 4 mm x 40 mm) were produced by grinding, and each test substance was used. Measuring the thermal expansion coefficient at a temperature of 25 ° C to 150 ° C by a thermal expansion meter (manufactured by Seiko Instruments Inc.; TMA300), measured by laser flash (manufactured by Rigaku Electric Co., Ltd.; LF/ TCM - 85 1 0B) The thermal conductivity at 25 ° C and the measurement of the three-point bending strength (according to JIS - R1601). In addition, the bulk density of the test material was measured by the Archimedes method to calculate the impregnation rate of the pores of the isotropic graphite material. 27- 201035377 [Table 2] Bulk Density (g/cm3) Impregnation Rate (%) Bending Strength (MPa) Thermal Conductivity (W/mK) Thermal Expansion Coefficient (X10VK> Average 値 Maximum/Minimum Average 値 Maximum/Minimum Example 1 2 . 2 2 8 3 8 5 18 5 1 . 1 7. 4 1. 1 Example 2 2. 2 1 8 1 8 0 2 0 0 1. 1 4. 3 1. 1 Note 1: Average of thermal conductivity and thermal expansion coefficient The average 値 of the 3 of the orthogonal three directions is 2: the ratio of the maximum 値 to the minimum 3 in the 30 direction in which the thermal conductivity is the largest/minimum of the thermal expansion coefficient. The plate-like aluminum-graphite composite of Example 1 The thickness of the material was measured with a caliper, and the surface roughness (Ra) of the cut surface was measured by a surface roughness meter, and then cut along the diagonal of each sample by mechanical processing, and 10 points were measured at equal intervals. The thickness in the diagonal direction of the aluminum alloy layer of the one main surface exposed by the cutting is calculated based on the average thickness of the plate surface calculated in the vertical direction. The results are shown in Table 3. On the other hand, the plate-shaped aluminum-graphite composite of Example 2 was obtained by using a sand sling tape coated with SiC abrasive grains of #120, and removing the aluminum alloy layers of the two main faces by a wet belt honing machine. The thickness and surface roughness (Ra) were measured. The results are shown in Table 3. [Table 3] Average A1 layer thickness plate thickness Ra (jum) (mm) (μm) Example 1 7 0 1. 6 0. 5 Example 2 - 1 . 4 1. 5 (Production example of LED light-emitting member) (1) Mixing bisphenol F-type epoxy resin (Epikote 807: epoxy equivalent = 173, manufactured by Shell Petroleum Epoxy Co., Ltd.) with 100 parts by weight as a general-purpose mixer Epoxy resin, decane coupling agent, v-glycidoxypropylmethyldiethoxy decane (AZ-6165: manufactured by Unica, Japan) 5 parts by mass, average particle diameter 5.2/zm Alumina (AS-50: manufactured by Showa Denko Co., Ltd.) 300 parts by mass of spherical alumina (AKP-15: manufactured by Sumitomo Chemical Co., Ltd.) as an inorganic ruthenium having an average particle diameter of 1.2/zm And blending and mixing polyoxypropylene amide (Ieffamine D-400: manufactured by Texaco Chemical Co., Ltd.) 25 parts by mass, polyoxypropylene amine (Jeffamine D2000: German) 20 parts by mass of Texaco Chemical Co., Ltd. as a hardener. (2) coating the mixture so that it is pre-hardened into a B-stage state so that the thickness of the insulative adhesive layer after hardening becomes 100 on the plate-shaped aluminum-graphite composite, using a laminator The electrolytic copper foil having a thickness of 35 μm was bonded, followed by 80 ° C x 2 hrs + 150 ° C x 3 hrs post-curing (after Q cure) to prepare a copper foil-containing composite having an insulating adhesive layer. The copper foil is etched again to form a desired circuit having a pad portion to form an aluminum-graphite composite circuit substrate. Next, after applying a white solder resist (PSR4000 - LEW1: manufactured by Sun Ink Co., Ltd.) to a specific circuit, the UV (ultraviolet) is hardened. Further, an uninsulated LED chip (1 mm2) was adhered to the exposed portion of the electrolytic copper foil with an Ag paste to obtain an LED light-emitting member as shown in Fig. 1. In addition, the C 〇 2 laser is used to remove the exposed portion of the insulating layer at the desired place, and the insulated LED chip (1 mm 2 ) is adhered to the portion by the Ag paste to obtain the image as shown in FIG. 3-29-201035377'. Constructed LED lighting member. (Examples 3 and 4) (Production Example of LED Light-Emitting Member) (1) On a plate-shaped aluminum-graphite composite obtained in Examples 1 and 2, copper having a thickness of 35 μm was electrolytically plated. The layer is formed on one side of the composite. An aluminum-graphite composite with copper bumps is formed by etching away the copper layer other than the desired place by etching. In addition, on the other hand, 100 parts of bisphenol F-type epoxy resin (EP1kote 807: cyclic oxime equivalent = 173, manufactured by Shell Petroleum Epoxy Co., Ltd.) was mixed with a general-purpose mixer. Epoxy resin, decane coupling agent, v-glycidoxypropylmethyldiethoxy decane (AZ-6165: manufactured by Japan Unika Co., Ltd.) 5 parts by mass, alumina having an average particle diameter of 5 /zm (AS-50: manufactured by Showa Denko Co., Ltd.) 500 parts by mass as an inorganic ruthenium, and a mixed polyoxypropyleneamine (Jeffamine D-400: manufactured by Texaco Chemical Co., Ltd.) was added. Serve as a hardener. The coating was applied to a copper layer of 35 vm thick in a thickness of 100/z m to form a B stage state, and a copper foil with resin was formed. (2) The aluminum-graphite composite with copper bumps and the copper foil with resin attached were laminated and heated at 180 °C to be integrated. The copper foil where the copper bumps are convex is removed by etching, and the insulating layer (hardened portion of the B-stage sheet) is removed by a C〇2 laser to form a pattern as shown in FIG. Aluminum-graphite composite circuit board with copper bumps. Next, after applying a white solder resist (PSR4000 - LEW1: manufactured by Sun Ink -30-201035377) to a specific circuit, the UV (ultraviolet) is hardened. The residue of the insulating layer was removed from the circuit surface on the copper bump by #200 honing paper, and the surface was smoothly processed with #800 honing paper. The insulated LED chip (1 mm2) was adhered to the surface with an Ag paste. The structure is shown in Figure 2. (Examples 5 and 6) (Production Example of LED Light-Emitting Member) The composition of the plate-like aluminum-graphite composite obtained in Examples 1 and 2; 95% Al-4% Cu-1% Mg was used. 〇. 3mm alloy conjugate material; and 0.4mm thick A1 circuit in this order, as a group, through the spacers, overlapping 10 groups and stacked. This was pressurized from a pressure-type uniaxial pressurizing device outside the furnace by a pressure of 500 MPa in a direction perpendicular to the surface of the substrate made of the aluminum-graphite composite via a carbon pusher, at 4x10_3Pa. The aluminum-graphite composite circuit substrate was prepared by heating in a vacuum (batch furnace) at 610 ° C for 10 minutes and bonding. Next, a white solder resist (PSR4000 - LEW1: manufactured by Sun Ink Co., Ltd.) was screen-coated on a specific circuit to make it υν (ultraviolet) hardened. The insulated LED chip (1 mm2) was adhered to the A1 circuit by Ag paste to obtain an LED light-emitting member as shown in Fig. 1. (Examples 7 to 13 and Comparative Example 1) Various isotropic graphite materials (Examples 7 to 13) and extruded graphite materials (Comparative Example 1) shown in Table 4 were processed into a shape of 2 0 0 mm x 150 mm x 1.5 mm. In the same manner as in Example 1, except that the shape of the stripper was changed to 200 mm x 150 mm x 0.6 mm, an aluminum-graphite composite was produced. The obtained -31-201035377 aluminum-graphite composite was evaluated in the same manner as in Example 1. Table 5, 6 shows the results [Table 4] Bulk density Porosity thermal conductivity (W / mK) Thermal expansion coefficient (Xl 〇 - f ' / K > (g / cm3) (%) Average 値 maximum / minimum average値Max/Minimum Example 7 1. 7 6 2 0 115 1. 2 4. 5 1. 2 Example 8 1 . 9 8 10 110 1 . 1 3. 0 1. 1 Example 9 1.78 1 9 10 0 1 1 4. 0 1. 1 Example 1 0 1.83 17 2 0 0 1 . 1 2. 0 1. 3 Example 1 1 1.89 14 13 0 1. 3 3. 5 1. 2 Example 1 2 1.96 11 110 1. 1 2. 5 1. 2 Example 1 3 1.83 17 10 0 1. 1 4. 9 1 . 2 Comparative Example 1 1 . 7 B 2 0 16 0 1 . 7 4. 7 1. 6

註解1 :熱傳導率與熱膨脹係數的平均値爲正交的3方向 的値的平均値 註解2:熱傳導率與熱膨脹係數的最大/最小爲正交的3 方向的最大値與最小値之比 【表5】 體積密度 (g/cra3) 浸漬率 (%) 彎曲強度 (MPa) 熱傳導率(W/mK) 熱膨膜係數(X10_6/K) 平均値 最大/最小 平均値 最大/最小 實施例7 2. 2 3 8 5 8 0 16 0 1. 1 7. 4 1. 1 實施例8 2.2 1 8 1 9 5 17 5 1 . 2 6. 2 1. 1 實施例9 2. 2 2 8 3 7 5 16 5 1. 2 6. 4 1 . 1 實施例10 2. 2 2 8 4 6 0 2 5 0 1.05 5. 3 1 . 1 實施例11 2. 2 2 8 5 9 0 19 5 1.05 6. 7 1.05 實施例12 2.2 1 8 2 13 5 15 0 1 . 1 5. 8 1. 1 實施例13 2. 19 7 6 10 0 18 0 1. 0 5 7. 3 1.05 比較例1 2. 2 5 9 0 2 5 2 5 5 1. 7 8. 0 1. 6 -32- 201035377 註解1:熱傳導率與熱膨脹係數的平均値爲正交的3方向 的値的平均値 註解2:熱傳導率與熱膨脹係數的最大/最小爲正交的3 方向的最大値與最小値之比 【表6】 平均A1層厚度 (μπι) 板厚 (mm) Ra (,α m) 實施例7 6 5 1. 6 0. 5 實施例8 7 0 1. 6 0. 4 實施例9 7 5 1. 6 0. 5 實施例1 0 6 0 1 . 6 0. δ 實施例1 1 6 5 1. 6 0. 4 實施例1 2 7 0 1. 6 0. 5 實施例1 3 7 5 1. 6 0. 5 比較例1 9 0 1. 6 0. 6 (實施例1 4〜1 7 ) 將實施例1的各向同性石墨材料加工成外形形狀爲 ^ 200mm X 200mm後,將板厚加工成 0.5mm(實施例 14)、 1.0mm(實施例 15)、2.0mm(實施例 16)、2.9mm(實施例 17) 後,與實施例1同樣,製作了鋁一石墨複合物。所得到的 鋁-石墨複合物與實施例1同樣,實施了特性評估。表7、 8中顯示結果。 -33- 201035377 【表7】 體積密度 浸漬率 彎曲強度 熱傳導率(W/mK) 熱膨脹係數(X10VK) (g/.cm3) (%) (MPa) 平均値 最大/最小 平均値 最大/最小 實施例14 2· 2 1 8 1 7 5 17 5 1 . 1 7. 3 1. 1 實施例15 2. 2 2 8 3 7 5 18 0 1. 1 7. 3 1. 1 實施例16 2. 2 2 8 3 8 0 18 5 1 . 1 7. 4 1. 1 實施例17 2. 2 1 8 1 8 0 18 5 1. 1 7. 3 1. 1 註解1:熱傳導率與熱膨脹係數的平均値爲正交的3方向 的値的平均値 0 註解2:熱傳導率與熱膨脹係數的最大/最小爲正交的3 方向的最大値與最小値之比 【表8】 平均A1層厚度 (/zm) 板厚 (mm) Ra (β m) 實施例1 4 8 0 0. 6 0. 6 實施例1 5 7 5 1. 1 0. 5 實施例1 6 7 5 2. 1 0. 5 實施例1 7 6 5 3. 0 0. 4Note 1: The average 値 of the three directions in which the average 値 of the thermal conductivity and the thermal expansion coefficient are orthogonal 値 Note 2: The ratio of the maximum 値 to the minimum 3 in the three directions in which the thermal conductivity is the maximum/minimum of the thermal expansion coefficient. 5] Bulk density (g/cra3) Impregnation rate (%) Bending strength (MPa) Thermal conductivity (W/mK) Thermal expansion coefficient (X10_6/K) Average 値 maximum/minimum average 値 maximum/minimum Example 7 2. 2 3 8 5 8 0 16 0 1. 1 7. 4 1. 1 Example 8 2.2 1 8 1 9 5 17 5 1 . 2 6. 2 1. 1 Example 9 2. 2 2 8 3 7 5 16 5 1. 2 6. 4 1 . 1 Example 10 2. 2 2 8 4 6 0 2 5 0 1.05 5. 3 1 . 1 Example 11 2. 2 2 8 5 9 0 19 5 1.05 6. 7 1.05 Example 12 2.2 1 8 2 13 5 15 0 1 . 1 5. 8 1. 1 Example 13 2. 19 7 6 10 0 18 0 1. 0 5 7. 3 1.05 Comparative Example 1 2. 2 5 9 0 2 5 2 5 5 1. 7 8. 0 1. 6 -32- 201035377 Note 1: The average 値 of the thermal conductivity and the coefficient of thermal expansion is the average of the three directions of 値. Note 2: The maximum/minimum of thermal conductivity and thermal expansion coefficient is The ratio of the maximum 値 to the minimum 正交 in the orthogonal 3 directions [Table 6] Average A1 layer thickness (μπι) plate thickness ( Mm) Ra (,α m) Example 7 6 5 1. 6 0. 5 Example 8 7 0 1. 6 0. 4 Example 9 7 5 1. 6 0. 5 Example 1 0 6 0 1 . 0. δ Example 1 1 6 5 1. 6 0. 4 Example 1 2 7 0 1. 6 0. 5 Example 1 3 7 5 1. 6 0. 5 Comparative Example 1 9 0 1. 6 0. 6 (Example 1 4 to 1 7) After the isotropic graphite material of Example 1 was processed into an outer shape of 200 mm × 200 mm, the sheet thickness was processed to 0.5 mm (Example 14) and 1.0 mm (Example 15). After 2.0 mm (Example 16) and 2.9 mm (Example 17), an aluminum-graphite composite was produced in the same manner as in Example 1. The obtained aluminum-graphite composite was subjected to characteristic evaluation in the same manner as in Example 1. The results are shown in Tables 7 and 8. -33- 201035377 [Table 7] Bulk Density Impregnation Rate Bending Strength Thermal Conductivity (W/mK) Thermal Expansion Coefficient (X10VK) (g/.cm3) (%) (MPa) Average 値 Maximum/Minimum Average 値 Maximum/Minimum Example 14 2· 2 1 8 1 7 5 17 5 1 . 1 7. 3 1. 1 Example 15 2. 2 2 8 3 7 5 18 0 1. 1 7. 3 1. 1 Example 16 2. 2 2 8 3 8 0 18 5 1 . 1 7. 4 1. 1 Example 17 2. 2 1 8 1 8 0 18 5 1. 1 7. 3 1. 1 Note 1: The average 値 of thermal conductivity and thermal expansion coefficient is orthogonal Average 値0 of the 3-direction 注0 Note 2: The ratio of the maximum 値 to the minimum 3 in the 3 directions in which the thermal conductivity is the maximum/minimum of the thermal expansion coefficient [Table 8] Average A1 layer thickness (/zm) Plate thickness ( Mm) Ra (β m) Example 1 4 8 0 0. 6 0. 6 Example 1 5 7 5 1. 1 0. 5 Example 1 6 7 5 2. 1 0. 5 Example 1 7 6 5 3 . 0 0. 4

(實施例1 8〜2 4、比較例2〜6) 與實施例1同樣製作層積體後,除了表9所示的條件以 外,與實施例1同樣,使各向同性石墨材料浸漬鋁合金’ 製作了鋁-石墨複合物。爲了去除浸漬時的變形,所得到 的複合物以溫度50(TC進行2小時的退火處理後,以與實施 例1同樣的手法實施了評估。表1 〇中顯示結果。比較例5 係脫模後的板狀的鋁-石墨複合物表面的鋁合金層的厚度 -34- 201035377 不均勻變大,鋁-石墨複合物大幅彎曲。比較例6係在脫 模後的板狀的鋁一石墨複合物上確認到帶有鋁合金的裂 縫。 【表9】 安裝力矩 (Nm) 鋁合金 預熱氣氛 預熱溫度 (0〇 浸漬壓力 (MPa) 實施例18 20 AH 2%Si 大氣氣氛 650 100 實施例19 20 AI-12%S\ 氮氣氛 650 20 實施例20 20 AI-12%Si 氮氣氛 650 50 實施例21 20 AI-12%Si 氡氣氛 600 100 實施例22 20 AI-3%Si 氮氣氛 750 100 實施例23 20 AI-20%Si 氮氣氱 650 100 實施例24 20 Αμΐ2%3Ι-3%Μβ 氮氣氛 650 100 比較例2 20 AI-12%Si 500 100 比較例3 20 AI-12%Si 大氣氣氛 850 100 比較例4 20 AI-12%Si 氮氣氛 650 5 比較例5 0.5 AI-12%Si 氮氣氛 650 100 比較例6 100 AM2%Si 氮氣氛 650 100(Examples 1 to 8 and Comparative Examples 2 to 6) After the laminate was produced in the same manner as in Example 1, except that the conditions shown in Table 9 were used, the isotropic graphite material was impregnated with aluminum alloy in the same manner as in Example 1. ' An aluminum-graphite composite was produced. In order to remove the deformation at the time of immersion, the obtained composite was subjected to an annealing treatment at a temperature of 50 (TC for 2 hours), and the evaluation was carried out in the same manner as in Example 1. The results are shown in Table 1. The comparative example 5 was released. The thickness of the aluminum alloy layer on the surface of the plate-shaped aluminum-graphite composite-34-201035377 becomes uneven, and the aluminum-graphite composite is greatly bent. Comparative Example 6 is a plate-shaped aluminum-graphite composite after demolding The crack with aluminum alloy was confirmed on the object. [Table 9] Mounting torque (Nm) Preheating temperature of aluminum alloy preheating atmosphere (0 〇 impregnation pressure (MPa) Example 18 20 AH 2% Si atmosphere 650 100 Example 19 20 AI-12% S\ Nitrogen atmosphere 650 20 Example 20 20 AI-12% Si Nitrogen atmosphere 650 50 Example 21 20 AI-12% Si 氡 atmosphere 600 100 Example 22 20 AI-3% Si Nitrogen atmosphere 750 100 Example 23 20 AI-20% Si Niobium 氱 650 100 Example 24 20 Αμΐ 2% 3Ι-3% Μβ Nitrogen atmosphere 650 100 Comparative Example 2 20 AI-12% Si 500 100 Comparative Example 3 20 AI-12% Si atmosphere Atmosphere 850 100 Comparative Example 4 20 AI-12% Si Nitrogen atmosphere 650 5 Comparative Example 5 0.5 AI-12% Si Nitrogen atmosphere 650 100 Comparison 6 100 AM2% Si nitrogen atmosphere 650100

G -35- 201035377 L衣丄〇】 广'·Ν &lt;ρ X 敏 B Ezr? 蔬 最大/最小 T— T— T— τ*&quot;· CM CM T&quot;&quot; CNJ t— τ™ τ— 平均値 CO T— 卜* CO 00 ϊ&lt; 令· &lt;Ώ &lt;d CO K CO CM cd T&quot; CO 卜: CO 熱傳導率(W/mK) 最大/最小 1— T— Τ- 1 τ— Ί— t— r— τ·&quot; 平均値 170 ΙΟ ΙΟ 卜 LT3 o CO o CNI o o CO ΙΟ to r^. τ— 彎曲強度 (MPa) ΙΟ 卜 LO ο 00 ΙΟ LO 00 g § LO CO o LO LO 浸漬率 (%) T— C0 σ&gt; CO CD C〇 寸 c〇 〇 CO CO CO § CO 體積密度 (g/cm3) 2.21 2.20 2.21 2.21 2.22 2.23 2.22 CO cq 2.18 2.16 2.22 2.20 I實施例18 I實施例19 丨實施例20 I實施例21 1實施例22 丨實施例23 丨實施例24 C\l m u CO m ϋ pair 3 ΙΛ AJ ς〇 -36- 201035377 註解1:熱傳導率與熱膨脹係數的平均値爲正交的3方向 的値的平均値 註解2:熱傳導率與熱膨脹係數的最大/最小爲正交的3 方向的最大値與最小値之比 (實施例25〜28) 實施例2 5係作爲脫模板,使用不塗布脫模材料的鐵板, 實施例26係使用在不銹鋼板上塗有石墨脫模材料的脫模 板,實施例27係使用在不銹鋼扳上塗有氮化硼的脫模板, 〇 實施例2 8係作爲脫模板,使用厚度0.2 m m的石墨片材,除 此之外,與實施例1同樣,使各向同性石墨材料浸漬鋁合 金,製作了鋁一石墨複合物。爲了去除浸漬時的變形,所 得到的複合物以溫度5 00°C進行2小時的退火處理後,以與 實施例1同樣的手法實施了評估。表11及表12中顯示其 結果。實施例25係複合化後,板狀的鋁-石墨複合物的脫 模困難,脫模後的表面粗糙顯著。此外,實施例28係複合 〇 化後的板狀的鋁-石墨複合物可以脫模’但脫模後的表面 的鋁合金層的厚度不均勻大。因此’實施例25及實施例28 以與實施例2同樣的手法實施了表面的鋁合金層的去除。 【表11】 體積密度 (g/cm3) 浸漬率 (%) 鸳曲強度 (MPa) 熱傳導率(W/mK) 熱膨脹係數(X10VK) 平均値 最大/最小 平均値 最大/最小 實施例25 2. 2 1 8 1 8 0 1 B 0 1. 1 7. 3 1. 1 實施例26 2. 2 2 8 4 8 5 18 5 1. 1 7. 3 1. 1 實施例27 2.2 2 8 4 8 0 18 0 1. 1 7. 4 1. 1 實施例28 2.2 1 8 1 7 5 17 5 1 . 1 7. 3 1. 1 -37- 201035377 註解1:熱傳導率與熱膨脹係數的平均値爲正交的3方向 的値的平均値 註解2:熱傳導率與熱膨脹係數的最大/最小爲正交的3 方向的最大値與最小値之比 【表12】 平均A1層厚度 板厚 Ra (μ m) (mm) (w m) 實施例2 5 — 1. 4 1. 4 實施例2 6 7 0 1. 5 0. 6 實施例2 7 7 δ 1. 5 0. 7 實施例2 8 — 1. 4 1. 5 (實施例29、30) 用水超音波清洗實施例1的板狀的鋁-石墨複合物 (200mmx200mmxl.6mm)後,進行膜厚:3&quot;m的非電解Ni 一 P鍍敷處理。實施例29係非電解Ni_P鍍敷後,進行膜 厚:1/im的非電解Ni— B鍍敷,實施例30係非電解Ni— P 鍍敷後’進行膜厚:lym的非電解Au鑛敷,在銘一石墨 複合物的表面形成鍍敷層。所得到的鍍敷品無肉眼可確認 的針孔’爲良好。此外,在鍍敷面塗布助熔劑(flux)後,浸 漬於鉛/錫的共晶焊料中。鍍敷面的9 9 %以上以焊錫濕潤。 以與實施例1同樣的手法’對於未絕緣的LED晶片,得 到如第1圖所示的LED發光構件。此外,以Ag糊使已絕 緣的LED晶片(1mm2)黏接’得到如第3圖所示的LED發光 構件。再者’以與實施例5同樣的手法,以Ag糊使已絕緣 -38- 201035377 的LED晶片(imm2)黏接,得到如第2圖所示的LED發光構 件。 【圖式簡單說明】 第1圖係顯示本發明之一實施形態的LED發光構件之構 造圖。 第2圖係顯示本發明之一實施形態的LED發光構件之構 造圖。 第3圖係顯示本發明之一實施形態的LED發光構件之構 造圖。 【主要元件符號說明】 1 鋁-石墨複合物 2 LED晶片 3 金屬電路 4 絕緣層 5 抗焊劑 〇 6 層間連接突起 7 活性金屬接合材料層 -39-G -35- 201035377 L 丄〇 丄〇 广 广 广 广 广 广 广 广 广 广 广 ρ ρ E E E E E E E E E E E E E E E E E E E E E E E E E E E E E E E E E E E E E E E E E E E E E E E Average 値CO T— 卜* CO 00 ϊ&lt; 令· &lt;Ώ &lt;d CO K CO CM cd T&quot; CO Bu: CO Thermal conductivity (W/mK) Maximum/minimum 1—T— Τ- 1 τ— Ί — t — r — τ·&quot; Average 値170 ΙΟ ΙΟ LT3 o CO o CNI oo CO ΙΟ to r^. τ—Bending strength (MPa) ΙΟ LO LO ο 00 ΙΟ LO 00 g § LO CO o LO LO Impregnation Rate (%) T - C0 σ &gt; CO CD C〇 inch c〇〇CO CO CO § CO Bulk density (g/cm3) 2.21 2.20 2.21 2.21 2.22 2.23 2.22 CO cq 2.18 2.16 2.22 2.20 I Example 18 I Example 19丨Example 20 I Example 21 1 Example 22 丨 Example 23 丨 Example 24 C\lmu CO m ϋ pair 3 ΙΛ AJ ς〇-36- 201035377 Note 1: The average 値 of thermal conductivity and thermal expansion coefficient is orthogonal The average 値 of the three directions of 値2: the ratio of the maximum 値 to the minimum 3 in the three directions in which the thermal conductivity is the largest/minimum of the thermal expansion coefficient (Examples 25 to 28) Example 2 For stripping the template, an iron plate not coated with a release material was used, and in Example 26, a stripper plate coated with a graphite release material on a stainless steel plate was used, and in Example 27, a stripper plate coated with boron nitride on a stainless steel plate was used. Example 2 An aluminum-graphite composite was produced by impregnating an isotropic graphite material with an aluminum alloy in the same manner as in Example 1 except that a graphite sheet having a thickness of 0.2 mm was used as the stripper. In order to remove the deformation at the time of immersion, the obtained composite was annealed at a temperature of 500 ° C for 2 hours, and then evaluated in the same manner as in Example 1. The results are shown in Tables 11 and 12. In Example 25, after compositing, the plate-shaped aluminum-graphite composite was difficult to release, and the surface roughness after demolding was remarkable. Further, in Example 28, the plate-shaped aluminum-graphite composite after the composite enthalpy was released, but the thickness of the aluminum alloy layer on the surface after demolding was not uniform. Therefore, in Example 25 and Example 28, the removal of the aluminum alloy layer on the surface was carried out in the same manner as in Example 2. [Table 11] Bulk Density (g/cm3) Impregnation Rate (%) Flexural Strength (MPa) Thermal Conductivity (W/mK) Thermal Expansion Coefficient (X10VK) Average 値 Maximum/Minimum Average 値 Maximum/Minimum Example 25 2. 2 1 8 1 8 0 1 B 0 1. 1 7. 3 1. 1 Example 26 2. 2 2 8 4 8 5 18 5 1. 1 7. 3 1. 1 Example 27 2.2 2 8 4 8 0 18 0 1. 1 7. 4 1. 1 Example 28 2.2 1 8 1 7 5 17 5 1 . 1 7. 3 1. 1 -37- 201035377 Note 1: The average 値 of thermal conductivity and thermal expansion coefficient are orthogonal to 3 directions The average 値 of the 値 2: the ratio of the maximum 最小 to the minimum 3 in the 3 directions orthogonal to the maximum/minimum of the thermal conductivity and the coefficient of thermal expansion [Table 12] Average A1 layer thickness Ra (μ m) (mm) ( Wm) Example 2 5 - 1. 4 1. 4 Example 2 6 7 0 1. 5 0. 6 Example 2 7 7 δ 1. 5 0. 7 Example 2 8 - 1. 4 1. 5 (Implementation Examples 29 and 30) After the plate-shaped aluminum-graphite composite of Example 1 (200 mm x 200 mm x 1.6 mm) was washed with water ultrasonic waves, an electroless Ni-P plating treatment having a film thickness of 3 &quot; m was performed. In Example 29, after electroless Ni-P plating, electroless Ni-B plating was performed with a film thickness of 1/im, and Example 30 was subjected to electroless Ni-P plating, and the film thickness: lym non-electrolytic Au was performed. Applying, a plating layer is formed on the surface of the Ming-graphite composite. The obtained plating product had no pinholes ** which were confirmed by the naked eye. Further, after applying a flux to the plating surface, it is immersed in a lead/tin eutectic solder. More than 99% of the plated surface is wetted with solder. In the same manner as in the first embodiment, an LED light-emitting member as shown in Fig. 1 was obtained for the uninsulated LED wafer. Further, the LED chip (1 mm2) which was insulated by Ag paste was bonded to obtain an LED light-emitting member as shown in Fig. 3. Further, in the same manner as in Example 5, the LED wafer (imm2) insulated with -38 - 201035377 was adhered by Ag paste to obtain an LED light-emitting member as shown in Fig. 2. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing the configuration of an LED light-emitting member according to an embodiment of the present invention. Fig. 2 is a view showing the construction of an LED light-emitting member according to an embodiment of the present invention. Fig. 3 is a view showing the construction of an LED light-emitting member according to an embodiment of the present invention. [Main component symbol description] 1 Aluminum-graphite composite 2 LED chip 3 Metal circuit 4 Insulation layer 5 Solder resist 〇 6 Interlayer connection bumps 7 Active metal bonding material layer -39-

Claims (1)

201035377 - 七、申請專利範圍: 1. 一種鋁一石墨複合物之製造方法,其係依次包含下述步 驟(1 )〜(3 ): (1 )將溫度25°C的熱傳導率爲100〜200W/ mK、正 交的3方向的熱傳導率的最大値/最小値爲1〜1.3、溫 度25°C〜150°C的熱膨脹係數爲2xl0_6〜5χ1(Γ6/Κ、正 交的3方向的熱膨脹係數的最大値/最小値爲1〜1.3、 0 及氣孔率爲10〜20體積%的各向同性石墨材料加工成 板厚0.5〜3mm的板狀的步驟、 (2 )將板狀的各向同性石墨材料以脫模板夾入而層 積’並以垂直方向的安裝力矩相對於各向同性石墨材料 的板面爲1〜50Nm的方式加壓的步驟、 (3)藉由澆鑄锻造法,將含有矽3〜20質量%的鋁合 金以2 0 Μ P a以上的壓力加壓浸漬,使各向同性石墨材料 的氣孔的7 0 %以上以鋁合金浸漬,並在板狀各向同性石 Q 墨材料的兩主面上設置平均厚度爲10〜300//m的鋁合 金層的步驟。 2. 如申請專利範圍第丨項之鋁一石墨複合物之製造方法, 其中更包含設於板狀各向同性石墨材料的兩主面上的鋁 合金層的去除步驟。 3. 如申請專利範圍第丨或2項之鋁一石墨複合物之製造方 法’其中各向同性石墨材料係以焦炭系石墨爲原料。 4_一種鋁—石墨複合物,其係表面粗糙度(Ra)爲ο」〜3 # m、溫度25。(:的熱傳導率爲15〇〜3〇〇W/mK、正交的3 •40- 201035377 方向的熱傳導率的最大値/最小値爲1〜1.3、溫度25 °C 〜150°C的熱膨脹係數爲4χ1(Γ6〜7.5xl0_6/K、正交的3 方向的熱膨脹係數的最大値/最小値爲1〜1·3、及3點 彎曲強度爲50〜150MPa。 5. 如申請專利範圍第4項之鋁-石墨複合物,其係施行孔 等形狀加工而成。 6. 如申請專利範圍第4或5項之鋁-石墨複合物,其中在 表面形成鍍敷層而成。 f) 7 · —種散熱組件,其係在如申請專利範圍第4至6項中任 一項的鋁-石墨複合物之一主面或兩主面上,經由絕緣 層形成金屬電路而成。 8 _ —種散熱組件’其係在如申請專利範圍第4至6項中任 一項的鋁-石墨複合物之一主面或兩主面上,經由活性 金屬接合材料層形成金屬電路而成。 9 _ 一種LED發光構件,其係在如申請專利範圍第7或8項 之散熱組件上搭載LED裸晶片及/或LED封裝體而成。 ❹ -41 -201035377 - VII. Patent application scope: 1. A method for manufacturing an aluminum-graphite composite, which comprises the following steps (1) to (3) in sequence: (1) a thermal conductivity of a temperature of 25 ° C of 100 to 200 W / mK, the maximum 値/min 値 of the thermal conductivity in the three directions orthogonal to each other is 1 to 1.3, and the thermal expansion coefficient at a temperature of 25 ° C to 150 ° C is 2×10 0 to 6 χ 1 (Γ6/Κ, orthogonal thermal expansion coefficient in three directions) The maximum 値/min 値 is 1~1.3, 0 and the isotropic graphite material having a porosity of 10 to 20% by volume is processed into a plate shape having a plate thickness of 0.5 to 3 mm, and (2) the plate isotropic The step of depositing the graphite material by the delamination and laminating 'the mounting torque in the vertical direction with respect to the plate surface of the isotropic graphite material is 1 to 50 Nm, and (3) by the casting forging method,矽3 to 20% by mass of the aluminum alloy is impregnated with a pressure of 20 Μ P a or more, so that 70% or more of the pores of the isotropic graphite material are impregnated with an aluminum alloy, and in a plate-like isotropic stone Q ink A step of providing an aluminum alloy layer having an average thickness of 10 to 300 / / m on both main faces of the material. The method for producing an aluminum-graphite composite according to the ninth aspect of the invention, further comprising the step of removing the aluminum alloy layer disposed on the two main faces of the plate-like isotropic graphite material. 3. If the application scope is 丨 or 2 The method for producing aluminum-graphite composites wherein the isotropic graphite material is made of coke-based graphite. 4_ An aluminum-graphite composite having a surface roughness (Ra) of ο"~3 #m, Temperature 25. (: The thermal conductivity is 15 〇 ~ 3 〇〇 W / mK, the orthogonal 3 • 40 - 201035377 direction of the thermal conductivity of the maximum 値 / minimum 値 is 1 ~ 1.3, temperature 25 ° C ~ 150 ° C The coefficient of thermal expansion is 4χ1 (Γ6~7.5xl0_6/K, the maximum 値/min 値 of the thermal expansion coefficient in the orthogonal three directions is 1~1·3, and the bending strength at 3 points is 50~150 MPa. 5. The aluminum-graphite composite of the fourth aspect is formed by performing a shape such as a hole. 6. The aluminum-graphite composite according to claim 4 or 5, wherein a plating layer is formed on the surface. 7 - a heat dissipating component, which is an aluminum as in any one of claims 4 to 6 - One of the main faces or the two main faces of the graphite composite is formed by forming a metal circuit via an insulating layer. 8 _ - A heat dissipating component 'Aluminum-graphite according to any one of claims 4 to 6 One of the main surface or the two main surfaces of the composite is formed by forming a metal circuit through the active metal bonding material layer. 9 _ An LED light-emitting member which is mounted on the heat-dissipating component of the seventh or eighth aspect of the patent application Wafer and / or LED package. ❹ -41 -
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