TW201030349A - System and method for testing an electrostatic chuck - Google Patents

Abstract

The present invention provides a reliable, non-invasive, electrical test method for predicting satisfactory performance of electrostatic chucks (ESCs). In accordance with an aspect of the present invention, a parameter, e.g., impedance, of an ESC is measured over a frequency band to generate a parameter functions. This parameter function may be used to establish predetermined acceptable limits of the parameter within the frequency band.

Description

201030349 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a test system and method for an electrostatic chuck. [Prior Art] An electrostatic chuck (ESC) is necessary for a precision semiconductor wafer process. Current chucks can be divided into two main categories, each with its specific strengths and weaknesses. ~

The dielectric in polyimine ESC (PESC) is a strong insulator, so most of the applied voltage drop across the dielectric produces a Coulomb clamping force. Unfortunately, the PESC working surface is extremely sensitive to scratches. Furthermore, pESC is susceptible to microparticle embedding which can cause arcing between the backside of the wafer and the copper electrode on the PESC. Furthermore, PESC cannot be used at high temperatures. Because of the high temperature operation, water vesicles of moisture are spread throughout the polyimide layer. Partially Conducted Ceramic ESC (CESC) requires a fixed current to achieve sufficient clamping force. Therefore CESC has a large leakage current and f is a larger power supply than PESC. The current-dependent clamping force (known as the johnsen_Rahbek effect) is small compared to the Coulomb force in pESC. 00 CESC with anodically polarized alumina (Ab〇3) (commonly available as an early-polar device) is extremely sensitive to moisture. Furthermore, in some bipolar ESCs, the anode is used as an ESC insulating layer. However, arcing and anodic polarization defects lead to early failure of such ESCs. , Miscellaneous Oxidation _ has been used as a butterfly application for some (3) crimes. The alternatives help control the resistivity in the Johnsen_RahbekESc resistivity range. However, grain boundary erosion (grain b〇undajy sweetness (4)) on the glass phase changes the surface roughness and thus increases the electrical resistivity. In addition, the rough ceramic surface will lead to the invading of the ceramic-filament surface during the waferless automatic cleaning of the Judah (the resistance in the Taulun 通常 usually causes the impedance of the Tao to change from the Johnson_Rahbeck type impedance to the library electric circle. Purity Tao [Oxygen He) has been widely used as an interface on the ESC 201030349

^electric puck layer}. It has been used as a unipolar or bipolar Esc. It is used as a Coulomb ESC due to the south resistance f. The sinter is called a high-purity oxidation (such as a purity of 99.7% or more). High) can be used as the CESC (using sintered aluminum nitride (aiN) dielectric) recently adopted by ESCT. The resistivity of ceramic materials is temperature dependent and more variable than pESC. A1N has good thermal conductivity. Therefore, it has been used for high temperature ESCs that operate for more than 20 generations. In most cases, there is a mesa surface pattern to control the Esc contact area with the wafer surface. The main problem is that f%, just other and other fluorine-based gases will produce A1F3 particles when used in the cavity. Curtain 3 is the main micro-pattern of the butterfly chamber. Since A1N resistivity depends on the operating temperature (such as j〇 hnsen_Rahbek ESc), it is very important to select the suitable type of A1N to maintain the usable resistivity and the high-density capture-plasma-impedance. The disaster recovery depends on the end user needs and installation equipment, PESC or CESC One will satisfactorily support (clamp) and release (solution Clamping. In general, no matter which ESC 'ESC capacitor and resistivity are used, the two key parameters of the ESC function. Figure 1 illustrates a plan view of a conventional bipolar electrostatic chuck (Esc) 100. Esc 1〇 The crucible has a top surface 102 and a mounting protrusion 1〇4. The ESC 100 includes a first electrode 1〇6 and a second electrode 108. The first electrode 1〇6 includes an inner electrode portion 11〇 and an outer electrode portion 112. A cross-sectional view of the ESC of the χ-χχ. As shown in Fig. 2, the esc 1 〇〇 includes a rear surface, or a substrate, 114. A mounting hole (not shown) on the upper mounting protrusion 104 allows the ESC1 〇〇 to be mounted on The system is in operation, applying a first voltage difference between the first electrode 106 and the second electrode 110. The voltage difference generates an electric field that is used to attract and support the wafer for processing. When the process is complete, at the first electrode 106 And applying a second voltage difference (releasing the voltage) to the second electrode 108 to release the wafer. ^. Although briefly stated above, the voltage control (whether single or multi-pole) on the conventional ESC is critical. Many of the parameters of the voltage controlled ESC are therefore also critical for 201030349. Unrestricted The numbers include: resistance, capacitance, impedance, and frequency phase offset. Furthermore, the parameters of the individual sections of the ESC can be further analyzed, rather than analyzing the parameters of the overall disk. Non-limiting examples include from one electrode to the other. The specific parameters of the measured pair are measured from one of the electrodes on the top surface to the substrate (polar to substrate). One

Figure 3 illustrates a prior art technique for measuring ESC 100 parameters. Here, the ship's test terminals 312, 308, and 310' can accommodate the respective measurements of the characteristics of the substrate 114, the first electrode 1〇6, and the second electrode 108. The conventional measuring device 3〇2 includes a first terminal 304 and a second terminal 306. In this example, the characteristics of the conventional measuring device 3〇2 ES ESCKK between two points. As shown, the first terminal 3〇4 can be connected to J or the measurement terminal, and the second terminal 3〇6 can be connected to the measurement terminal 312 or the detection terminal 31〇. In this manner, the characteristics of the drain 106 can be measured using the pole pair ίί, when the first terminal 304 is connected to the measurement terminal 3〇8 and when the second terminal 384 is measured. Similarly, when the first terminal 3〇4 is connected to the measurement terminal • the first editor 306 is connected to the measurement terminal 310, the characteristics of the first electrode 106 and the second can be measured using the pole-to-pole measurement. Similarly, when the first terminal 312 and when the second terminal 306 is connected to the measuring terminal 310 f 'the characteristic of the electrode (10) can be measured by the base amount. In the conventional technique, the conventional measuring device 302 measures the resistance of the first electrode 106 from the pole to the base, the resistance of the pole to the base r, and the pair of poles. The first pole - the electrode and the second electricity, when r. Similarly, when the conventional measuring device 302 is capable of measuring the bottom of the bottom of the energy measuring device, the capacitance of the first electrode 106 from the pole pair substrate, the capacitance of the pole pair S, and the first electrode of the pole pair pole are measured. 106 and the second electric second mine = the inductance of the electrode 1 〇 6 of the electrode, the inductance of the slanting electrode from the pole to the base, and the first electrode 106 and the second electrode 108 ^ 3 从 from the pole opposite pole 2 When measuring the impedance of the energy, it is used for the impedance of the electrode of the substrate, the impedance of the electrode 1〇6, the impedance of the electrode 5 from the pole to the base, the impedance of the electrode 108, and the polarity of the electrode from the pole to the pole. When the conventional measuring device 302 measures the energy of the 22 base: ί can be the base of the base - the electrode gamma = 2 (four) the opposite of the pole - the second simple way). It is not shown or said that there are many other types of habits, and it is most important to know that the technology I is in the frequency of the system and the two important concepts of Sr. Therefore, before shipping to the customer, the ESC system can be used; - The quality assurance test does not determine whether the number of ages is not within the predetermined acceptable turnover, and the 18 cases of the system include: the measured resistance is greater than or equal to the post and less than or equal to r ω; ϋϊΪΪΐί, etc. is equal to good; The measured impedance is greater than the equal ^ΖιΩ ω 2 and the measured frequency. The offset is greater than or equal to % and less than or equal to • Ι^ί^ where the manufacturer supplies the current or voltage to the terminal at a predetermined frequency (eg, in the system) Characteristics (such as the resistance measured by the 0hmmeter) The pre-wire _, _ ding is acceptable in the acceptance of W. ^ The example in Table 1 below will be in several ESCs (p/n718 _纲523_28 ti f 3·478 5ι] 3·777 device (Ser. No.) __1 Capacitance (nF) and Dihui · Resistivity (Megohms) D19469 3.726 3.829 ~ D17303 3.777 3.244 ~ D18469 3.725 3.829 ~~ D17424 — 3.640 2.672 ~ D17697 3.478 2.267 ~~ Table 1 201030349 Small electricity should pay attention to the fact that these devices are considered as sturdy. The maximum allowable miscellaneousness of the wire, or the second device is close to having too ί, =, and lower. (4) Visual inspection clearly indicates

ESC = trap (cracks, deep to traces, residual particles) is immediately replaced with appropriate. When the apricot ESC is satisfactorily executed, it is difficult to isolate the cause. System: II. The current state of the art does not provide ====, and the birth defect. The conventional characteristic test, that is, the fine C filament order, or the fine and non-invasive method is called the suitability of the ESC for the initial [invention]

There is a parameter in which the ESC band is included in the parameter of the ESC. The shape of the pre-d boundary 'and the rate within the pin band ====== the kind of f, using the single frequency function parameter, in the fresh _ generating parameters 敝 she knows the lower limit and the table (4) the real miscellaneous ' Use the seeding, fine in the single-frequency = limit and the known lower limit of the parameters of the single-word to establish the limit of the electrostatic chuck parameters. The method consists of using the parameter 3 to determine the upper limit of the mesh and the acceptable lower limit of the parameter based on the standard deviation of the set number. The difference between the number of 駄4 and the difference in the number of parameters is available. The method of arranging the 75 parts of the wire in the town description is not indicated. 尬 The range of the record is special. [Embodiment] The implementation of the invention is now mixed with the 4_15. Figure 4 illustrates an exemplary technique for the parameters of the fine c 100. The method is different, and the method of FIG. 4 includes a frequency measuring library - a conventional measuring device 302 of scorpion and ^fi. The frequency response analyzer 曰 ‘ :〇2 τ is measured at two points. Characteristics. The second terminal 406 can be connected to the measuring method, when the first terminal 4〇4 is connected to the measuring terminal 308 and when the second terminal lightning pole 106 Ϊί detecting the terminal 312> The pole-to-base measurement can be used to measure the first day of the whistle. Similarly, when the first terminal 404 is connected to the measurement terminal 308 and connected to the measurement terminal 310, the characteristics of the first electrode 106 and the second electrode 108 can be measured using the pole-to-pole measurement. Similarly, when the first terminal 4=4 is connected to the measuring electrode 312 and when the second terminal 406 is connected to the measuring terminal 31〇, the pole-to-substrate measurement can be utilized to measure the characteristics of the second electrode 1〇8. Because of the same conventional measurement device 302$ as the method illustrated in Figure 3, frequency response analyzer 402 measures characteristics over a frequency band in accordance with an embodiment of the present invention. In other words, in the white method, any particular characteristic - whether it is impedance, resistance, capacitance, etc., / and whether it is measured from pole to pole, substrate to substrate, surface, etc. - is on a single frequency Measurement. In accordance with an embodiment of the present invention, any particular characteristic can be measured on 201030349 in a frequency band. Figure 5 will be described in more detail below. , the map of the ship's impedance, which is the use of fresh response analyzer

The frequency response analyzer is moved at the lowest frequency 』 two = 疋 frequency, measuring impedance. The user can mosquito a specific frequency band and can encode the frequency at which |esc J can be used. Furthermore, the frequency response is divided into the impedance of point 5G2. Point 5G2

508 is the last impedance 对于 for the last frequency //. · Point 506 vs. t, the g quotient may refer to Figure 3 at this frequency amount H. According to the actual implementation of the present invention, the reading of the ESC can be compared; the manufacturer can = ίί^±σ, the 瓣 瓣 (4) === 阻 $3 ί w The predetermined acceptable deviation ± σ can be used to generate Accept the acceptance deviation ± σ &

The acceptable impedance function is in the example of the ESC measured by the measurement element 312 to the measurement terminal 312. With respect to Figure 5, the slope of the line 51G is linear. In other shipments:: number: ==. The one that obtains the slope - the other party that establishes the acceptable boundary of the ESC parameter in accordance with an embodiment of the present invention 201030349 J includes measuring the Esc known to be a complex number. Figure 8, for example, w describes /. In the figure, the portion 8〇2 of the line 510 has an upper limit of the line 8〇4 and a lower limit of =806. The complex line corresponds to an impedance function of a complex number of ESCs that are known to be acceptable but have a slightly higher impedance to the line 510, while line 806 f# should be known to be acceptable but have an ESC corresponding to the line. 51〇^ The impedance function of the complex ESC of the low impedance. The line 802, the complex line 804, and the complex line 8〇6 can then be accepted by the mean value function plus the standard deviation. For example, as shown by © t ^, the upper boundary 9〇2 and the lower boundary 9〇4 are generated by using the line 8〇2, the plural line and the predetermined standard of the line coffee. In this example, the mean function of the line, the complex line 804, and the complex line 806 is assumed. Thus, line 9〇2 is the upper bound of the acceptable resistance of the ESC measured from measurement terminal 31G to measurement terminal 312, and line 904 will be the ESC measured from measurement terminal 31 to measurement terminal 312. The boundary below the acceptable impedance function.可接受 An acceptable boundary for the ESC parameter is established, and the embodiment L of the present invention can be recorded to test the ESC (whether new or used) to determine if it is still acceptable. The ESC will be tested with reference to FIG. An exemplary method of acceptability. Figure 10 is a logic diagram of an exemplary procedure for testing the acceptability of Esc in accordance with the present invention. The program 1000 starts _〇2 and determines the parameter to be measured =1004). For purposes of discussion, assuming that the parameter to be measured is an impedance, the frequency response analyzer 402 is used to measure the ESC measurement terminal 312 from the used measurement terminal 31 of the ESC. Once the parameters to be measured are determined, the frequency response analyzer 4〇2 scans a frequency band and measures the corresponding impedance. Figure n shows the impedance function of the used Esc, and the impedance function of ESCUK), which is known as the connectable= graph. The impedance function measured by the used Esc is different as shown in the figure; v 510 'which is the impedance function measured by the ESC 100. Similar to the diagram discussed above, the frequency response analyzer 402 measures the impedance within a predetermined frequency band having an initial frequency and a final frequency. The measurement will now be described with reference to Figure u. The difference between the impedance function 510 of the impedance function leg fish measurement. ', 10 201030349 Similar to Figure 7 of the above discussion, Figure 12 contains acceptable upper and lower limits for the establishment of the impedance function of the measurement. Specifically, line 702 The upper boundary of the acceptable impedance function of the ESC measured from the measurement terminal 31 to the measurement terminal 312, and the line 7〇4 is acceptable for the ESC measured from the measurement terminal 310 to the measurement terminal 312. The boundary below the impedance function.

In this example, the measured impedance function 1102 includes a first portion 12A2, a second portion 1204, and a third portion 1206. The first portion 12〇2 and the third portion 12〇6 are both within the range of 702 and 704 and thus can be considered acceptable. However, the portion below the 12 〇 4 f line 704 is thus considered unacceptable. Again, the slope of portion 1204 is significantly different from the slope of line 51 and is therefore considered unacceptable. Portion 1208 of portion 1202 (which extends from impedance B measured at frequency /β to impedance Ζ0 measured at frequency )) is located in lines 702 and 704, but has a slope that is distinct from squid green . Ground, part of the _6 is fine. In the frequency of the frequency > line

Hi ϋ2" extends to the impedance measured at frequency 细 with a significantly different slope from i. Thus, although the measured impedances within portions 1208 and 1210 are acceptable 'but the rate of change in impedance within the relative frequency band may increase (considering stability).

Once the parameters are measured, in this sample towel, the impedance function of the ESC from the measurement terminal 310 is negligible, and the ESC is judged whether the ESC is the quotation of the lion. The ESC is in the phase 1204, = 4 shots on the point 1212 of the online gift. In accordance with the present invention, it is inferred that the ESC is unacceptable in accordance with the slope of the line 1102 that is partially subjected to the ESC 100$ and essentially the splicing of the line 510. Again, according to section 04 below line 704, the ESC can be inferred to be unacceptable. The difference may be the deviation of the size of the measured parameter or the bias of the rate of change of the parameter: in either of the Isc or the possible problem, the non-limiting example package is at least a complete failure in the eighth; the pressure, which causes In the ESC test, the special iLcHt barrier. Further, according to the present invention, the user can determine that the measured is 2 = 5: acceptable, but in the other - band

J Figure 12, the user can determine that the ESC being tested is acceptable from frequency A 11 201030349 to frequency and from frequency to frequency 々. As such, it can be used in a more restricted manner, rather than discarding the ESC of the test. Returning to Fig. 10, if the ESC of the test is judged to be unacceptable, it is discarded (S1010). If the test esc is judged to be acceptable, the user may desire to further test the parameters (S1012). The above-described exemplary embodiment of the present invention with reference to Figures 4-12 is directed to a bipolar ESC in which the measured parameter is the resistance from the measurement terminal 31 〇 to the measurement terminal 312. Of course, other parameters can be measured. ❹ Figure 13 is a diagram showing the impedance function of Figure 7 and the capacitance function 1302. The capacitance of the ESC 1〇〇 is measured from the measurement terminal 310 to the measurement terminal 312 and measured from the initial frequency Λ to the final frequency. The figure also clarifies the acceptable upper limit of the capacitance function ^ 1 ^) 4 and the lower limit of the capacitance function 脳. These acceptable boundaries can be determined in a number of ways, as discussed in the previous embodiments of the description. ...back to Figure 10, if the new parameter is to be measured (sl 〇〇 4), such as the capacitance shown in Figure 13, the capacitance function is compared with the acceptable upper limit 13G4 and the acceptable lower limit i (similar to The above method of impedance). The "other parameters" of step ES of Figure 1 of the ESC example can be measured from ==. For example, no parameter can be the impedance from the measurement terminal 31 〇 I i . So 'the new measurement will be the pole-to-pole impedance. Measured by the frequency of the terminal 310 to the measuring terminal 312, and the impedance slope of the line 510 and the line = 510 and 1402 of the impedance of the Conggang measured from the initial Similarly, the impedance of line 1 is slightly lower than the impedance of line 510.

In other embodiments, the new measurement of the same parameter (steps from the ESC, the same ring j) I for phase 15 illustrates line 510, line 1502, and line 15〇4. Green: the second layer of brothers under the degree). The final frequency (four) of the graph, the terminal, the measurement terminal 312 amount ==== is measured by the second temperature 4 (where 4>• measured 12 201030349 measuring terminal 31G to the measuring terminal 312, And measured from the initial rate of 6 and measured from the third temperature _ (four), the ESC electric field is used to clamp, support and release the clamping wafer to re-number the number of y, which will be described in more detail below. The capacitance is determined by the frequency response analyzer to measure the capacitance, with 312 曰 曰, 3 丨 #7 罨 罨 如图 as shown in Figure 16. In the figure, the resistor 1602 is equivalent to the total electricity between the measuring terminal 312 The tantalum capacitor 1_ is equivalent to 22:! f〇 and the total capacitance between the measurement terminals 312. Because the resistor 1602 is the king of the measurement (measured from the measurement terminal 310 to the measurement terminal 312). The basic circuit theory is derived as follows: z= -ML· JR2x〇 where R2+x〇2 " r2+xc

Xc = l/((〇C) » and; in c let the impedance 'measured in ohms (〇hm)' ω is the driving frequency measurement of the input signal. ', , 4, measured by the method of the law" And R is the resistance, in ohms (Ohm)

100 Know the impedance function, and use the frequency response analyzer 402 to measure the ESC Naifu reward shop, can determine the upper and lower limits of the acceptability of the upper valley and the resistance (for example, the wave that has been determined by the amount of Ese _ (four) Thin _=^====############################################################################################################# It is noted that the Bode phase diagram 1702 maintains a stable slope between l〇g2 and l〇g4 on Figure 13 201030349. Thus, here, it represents ESC1. The stable clamp should be maintained. Support: and support The above exemplary embodiment includes a test for bipolar ESC. Day = ESC of the type of trial. Further, according to the present invention, any number of measurements, from different summer measurements or positions Any number of temperatures can be used for the measurement. The method is modified by & ESC for specific wafer production equipment, based on safety, selected test equipment, and appropriate proprietary processes. The acceptance of the ESC of each of the different types/models/series ^ Before the whip, 'Mu: ίϊ; after the 'Every ESC is tested' measurement will be added to its record until ί is not read, - _ ❹ two leaks = teach many do and change possible The exemplary embodiments described above are selected from the explanation of the present invention and the principles of the actual implementation thereof, and various modifications and subtractive techniques are available to those skilled in the art. The specific use of the present invention is set forth in the accompanying drawings, and the accompanying drawings illustrate the exemplary embodiments of the present invention. In the illustration: ^ = a plan view of a conventional bipolar Esc; a cross-section of a conventional bipolar Esc®; a conventional technique for measuring the parameters of an esc; An exemplary technique for measuring the ESC parameters of the implementation mode 14 201030349 Figure 5 is a graph of the impedance impedance, which is the frequency function of the ESC; = 制造 the manufacturer's selection tolerance of the parameter measured at the frequency of the quotient; An exemplary method for measuring the tolerance of the upper yarn; As the frequency of Mo should be in a plurality of mechanical

Allowing the implementation of the mode to establish the quantity flow on the -frequency band = _ according to the (4) of the real hybrid state of the age of the method of measuring the impedance function of the two; the above =, (10) conversion system is superimposed on The impedance wire of the explanatory object 13 and the exemplary embodiment: FIG. 14 is an impedance function and the number of the exemplary measurement with the impedance function of FIG. 5 and the embodiment according to the present invention. Figure ^. Impedance" i / number and in the schematic diagram of the -rc circuit & Figure 17 is the logarithmic function of the thief her offset material _ graphics. [Main component symbol description] 100 ESC 102 top surface 104 mounting protrusion 106 first electrode 108 second electrode 110 inner electrode portion 112 outer electrode portion 15 201030349 114 substrate 302 conventional measuring device 304 first terminal 306 second terminal 308 Measuring terminal 310 Measuring terminal 312 Measuring terminal 402 Frequency response analyzer 404 First terminal 406 Second terminal 502 Point 504 Point 506 Point 508 Point 510 Line 702 Line 704 Line 802 Part 804 Line 806 Line 902 Upper boundary 904 Lower boundary 1000 Program 1102 Impedance Function 1202 Part 1 1204 Part 2 1206 Part 3 1208 Part 1210 Part 1212 Point 201030349 1302 Capacitor Function 1304 Upper Limit - 1306 Lower Limit 1402 Line 1502 Line 1504 Line 1602 Resistance 1604 Capacitance 1702 Bode Phase Diagram φ 1704 Impedance Diagram S1002 starts S1004 to determine parameter S1006 scan S1008 acceptable? S1010 discards the new parameters of S1012? S1014 stopped

Claims (1)

201030349 VII. Patent application scope: 1. A test method for an electrostatic chuck, the electrostatic chuck having one and including at least an electrode, the method comprising: a stomach % surface and a back surface and establishing the static electricity in a - band range The parameters of the chuck are made in the frequency band, and the static electricity is determined by the acceptance limit. (4) The object is measured by the static electricity. 3. The method of applying the static axis of the second axis of the patent axis, wherein The at least-electrode comprises a first electrode and a second electrode, and wherein the measuring resistor comprises measuring the electric energy between the first electrode and the second electrode. 4. If the application is correct, the static electricity of the second item is A test method for a chuck, wherein the measuring resistor comprises measuring the resistance between the towel and the towel. = The test method for applying the static and private disk of item 1, the first parameter of the cap measuring the static pen chuck includes the measuring capacitance. Q 6. The method of claim 4, wherein the pole comprises a first electrode and a second electrode, and wherein the direct measuring power comprises measuring the first electrode and the second electrode Capacitance between. A method of testing an electrostatic seam of 5, wherein the measuring capacitance comprises measuring a capacitance between the rear surface and the at least one pole. The test method of the electrostatic chuck of nn. 1 wherein the first parameter of the static central disk comprises the measured impedance. # 18 201030349 Patented 8th slave electrostatic seam test method, the first electrode and the second electrode are included, and the resistance between the first electrode and the second electrode is 8 & The static electricity of the job, the measured impedance of the towel includes measuring the impedance between the rear surface and the at least one of the electrodes. ❹ ❹ '1. II Shen, the static electricity of the special item i. The parameter of the electrostatic chuck. In the frequency band, the measurement is performed in the frequency range. The first parameter of the electrostatic cooling plate of the item i of the patent application scope includes the test method of the electrostatic seam of the measuring method 12th item. 1 towel in the continuous band I measured the static electricity to find the parameter contains the parameter of the electrostatic chuck. Brother--in the county, the measurement can be more complicated, _ in the single frequency method ° '4 · · single-fresh, the known lower limit of the parameter, the party measures the electrostatic chuck in the frequency band a function of the parameter of the spring I; the parameter produces a slope of the parameter function within the frequency range within the range of the frequency π; the known upper limit and slope of the parameter at the single-frequency is used to generate the The acceptable upper limit of the parameter, and the number of the magic number of the 19 201030349 slope: in the birth of the single parameter - number = I5. If the patent application scope 帛 M item to establish the static loss I number: the method of measuring the static The parameter package, the measurement of electricity: the method in which, the range ◎ the parameters of the fresh _ system hybrid chuck. And in the first, the degree of acceptance in the (four) parameter, the new limit, the known upper limit of the single frequency number, and the known lower limit of the parameter in the transfer-resolving parameter, the parameter is repeated several times to obtain the The function produces an average function of the parameter; ❹ the standard deviation of the predetermined number of the parameters of the parameter; the acceptable number of standard silk red numbers for the number of m = Shen: secondary school: the resistance of the acceptable range , the capacitance and the impedance of at least the -^ green chuck, the parameter includes the measurement of the electrical capacitance of the built-in electrostatic seam parameter can be & bounded _ ί method /, in the f frequency range 1 measured the electrostatic chuck of the parameter Included in the -, - the parameter and at the second temperature ' 20