201028574 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種則開式晶圓盒，特別是一種配置有充 氣閥之前開式晶圓盒。 【先前技術】 目前在半導體廠中，關於晶圓、光罩的儲運裝置大多採 用由惠普公司所提出的標準式介面（SMIF)系統，此SMIF系 • 統已於美國專利第4532970號及第4534389號中揭露。SMIF 系統之目的係要確保晶圓、光罩在輸送和儲藏過程中，晶圓、 光罩周圍的氣體基本上相對於晶圓、光罩是靜止的，且無塵 室中的微粒亦不致於進入緊鄰晶圓、光罩的環境中。^ —因此，在SMIF系統中使用的輸送容器，冑具備良好的氣 岔效果，以避免外在環境的氣體或微粒進入輸送容器。而在 實務上，例如：200mm晶圓盒或3〇〇mm晶圓盒，為了防止 ^圓表面發生氧化或產生有機污染，則會進一步將氮氣、鈍 • 氣或已經去除水分（1%以下）的乾氣體等氣體充入晶圓盒中。 有蓉於此，在上述晶圓盒中會配置至少一充氣閥，以確保氣 體順利填充並防止晶B細的填充氣體外泡。 4參閱第1圖所示’係揭露於美國專利第7,2〇1 276號中 之曰曰圓盒所使用的充氣閥。此充氣閥係包括一圓筒1〇〇，圓 筒1〇〇内部設有一鴨嘴式閥體1〇1，其主要是由兩片具彈性 的瓣膜102所組成；因此，當進行充氣時，氣體會在瓣膜1〇2 外施壓造成瓣膜102之間的隙縫1〇3撐開，使氣體順利進入 曰曰圓盒内。而當停止充氣或當晶圓盒内部壓力逐漸増大時， 瓣膜102之間的隙縫103便恢復成閉合狀態，以維持氣體在 4 201028574 晶圓盒内部。上述充氣閥雖結構看似簡單，但瓣膜102的設 計及使用的材料掌握不易。當材料剛性太大時，瓣膜102不 易產生形變，造成瓣膜102之間的隙縫103太小，以至於無 法在短時間内將晶圓盒充滿氣體。而當材料剛性太小時，瓣 膜102則無法完全地將隙縫103閉合，容易造成洩氣的發生。 【發明内容】 依據先前技術之晶圓盒其充氣閥容易洩氣、無法有效率 的將晶圓盒充滿氣體，本發明之一主要目的在於提供一種充 氣閥於晶圓盒，此充氣閥可在短時間内將晶圓盒充滿氣體， 以節省充氣所需的時間。 本發明之另一主要目的在於提供一種充氣閥於晶圓盒， 充氣閥能長時間將氣體保持於晶圓盒内，可防止晶圓盒内的 氣體外洩。 本發明之再一主要目的在於提供一種充氣閥於晶圓盒， 充氣閥具有良好的氣密效果，能避免在充氣的過程中，晶圓 盒外部的氣體或環境的氣體伴隨進入晶圓盒内。 為達上述之各項目的，本發明揭露一種充氣閥，主要包 括一固定本體、一充氣頭、一彈性元件及一閥蓋。固定本體 係具有一外周面且在外周面上緣形成一頂面，而在頂面的中 心及外周面的下緣分別具有上開口及下開口。充氣頭包括一 基座及一由基座的中心向上突起的中空筒狀部，其中，中空 筒狀部係位於固定本體的上開口中且中空筒狀部的周壁設 有一出氣孔。彈性元係環設於充氣頭之中空筒狀部四周且位 於固定本體其頂面及充氣頭其基座之間。閥蓋係配置於充氣 頭的中空筒狀部上方，因此，當充氣頭在一往上的外力抵持 下時，充氣頭會在上開口中由一第一位置移動到一第二位置 5 201028574 並壓縮彈性元件，上述第一位置係指閥蓋抵壓著固定本體之 頂面，而第二位置係指閥蓋與頂面形成一間隙且充氣頭的出 氣孔與間隙相通。 此外，本發明亦包含一配置有上述充氣閥之晶圓盒，由 於上述充氣閥處於關閉時，即處於第一位置時，其彈性元件 能提供一力量使閥蓋抵壓著固定本體的頂面，所以，能長時 間將氣體保持於晶圓盒内，有效的避免氣體外洩。 【實施方式】 為使本發明所運用之技術内容、發明目的及其達成之 功效有更完整且清楚的揭露，茲於下詳細說明之，並請一併 參閱所揭之圖示及圖號： 首先，請參閱第2圖所示，係本發明之一種配置有充氣 閥之晶圓盒其示意圖。此晶圓盒係一前開式晶圓盒，包括一 盒體10及一門體20。盒體10内部設有複數個插槽11以水 平容置複數個晶圓，且在盒體10的一側面具有一開口 12可 供晶圓的載出及載入。門體20則具有一個外表面21及一個 内表面22，門體20是藉由内表面22與盒體10的開口 12 相結合，以保護盒體10内部的複數個晶圓。此外，在盒體 10或門體20上至少具有一貫通孔30,以配置一充氣閥40。 一般而言，充氣閥40係配置於盒體10的底部10B，因此， 當晶圓盒置於一承載介面(load port)上時，一供氣喷嘴可從承 載介面中伸出並經由貫通孔30内的充氣閥40對晶圓盒進行 充氣。上述供氣喷嘴所提供或喷出的氣體係以氮氣、鈍性氣 體或乾氣體為主，但不特別限定。 而如第3圖所示，係本發明之晶圓盒其充氣閥之爆炸 圖。充氣閥40主要包括一固定本體41、一充氣頭42、一彈 6 201028574 性元件44、一閥蓋43及一下蓋45。固定本體41係一中空 的筒狀結構，其具有一外周面411且在外周面411的上緣形 成一頂面412，在頂面412的中心及外周面411的下緣分別 具有一上開口 413及一下開口 414。充氣頭42係設置於固定 本體41的内部，其包括一基座421及一由基座421的中心 向上突起的中空筒狀部422。上述充氣頭42係先以一彈性元 件44，環設於中空筒狀部422四周後，將中空筒狀部422 由固定本體41其下開口 414的下端放入上開口 413中並隨 即將一閥蓋43組裝或配置於中空筒狀部422的上方。最後， ^ 將下蓋45組裝於固定本體41其外周面411的下緣，以形成 充氣閥40。 接著，請參閱第4圖，上述下蓋45係一平板狀結構， 在其中央處具有一限制孔451。限制孔451係用以容納充氣 頭42的基座421，以避免充氣頭42其基座421在固定本體 41的内部左右搖晃。而在限制孔451的外圍進一步設有複數 個結合孔洞452,可和固定本體41其外周面411下緣的扣勾 415相結合。 〇 而如第5A圖所示，充氣頭42的中空筒狀部422具有至 少一出氣孔4221且在頂端形成一 T形的結合柱423，此結 合柱423具有一呈幾何形狀的上表面4231。而在閥蓋43的 下表面亦具有一與上述幾何形狀相符之孔洞431，孔洞431 則向上延伸並形成一平台432。因此，當結合柱423穿過閥 蓋43下表面的孔洞431並順時針旋轉約九十度後可卡固於 平台432上的突點433與側壁434之間，使中空筒狀部422 與閥蓋43結合成一體（如第5B圖）。當然，上述中空筒狀部 422與閥蓋43其結合方式除係利用旋轉卡固方式外，亦可以 7 201028574 係在中空筒狀部422的頂端形成一 I形的結合柱423 (如第6 圖），此結合柱423的外表面設有螺紋4232以利用此螺紋 4232與閥蓋43相對應的螺紋435互相螺合或固定成一體。 其次，請參閱第7圖，係第3圖之充氣閥40其配置於 晶圓盒内之剖視圖。當充氣閥40其固定本體41、充氣頭42、 閥蓋43、彈性元件44及下蓋45組合成一體時，充氣頭42 及彈性元件44係位於固定本體41與下蓋45形成之容置空 間内。彈性元件44具有一環狀結構441且在環狀結構441 的下緣與複數個彈性瓣442 —端連接，複數個彈性瓣442其 ^ 另一端則共同連接一圓環443。上述圓環443可供充氣頭42 其中空筒狀部422通過，且中空筒狀部422進一步置於固定 本體的上開口 413中。而由於閥蓋43與中空筒狀部422係 螺合或組裝成一體的，所以，閥蓋43係抵壓著固定本體41 的頂面412,以避免晶圓盒内的氣體經由閥蓋43與頂面412 間的縫隙而進入上開口 413或固定本體41内部。上述閥蓋 43其下表面或用以與頂面412相接觸的表面可進一步包覆 有一層橡膠墊，以利用此橡膠墊抵壓頂面412，並達到較佳 # 的氣密效果。此外，頂面412亦可以進一步設有一環狀凹槽， 且在環狀凹槽内嵌有一氣密件，例如：圓形環（O-ring)，使 閥蓋43與頂面412間有更佳的氣密。而如圖所示，由於充 氣頭42的基座421係置於下蓋45的限制孔451中，因此， 充氣頭42可在下蓋45的限制孔451、彈性元件44的圓環 443及固定本體41的上開口 413中上下移動而避免在固定本 體41的内部左右搖晃。 接著，請參閱第8圖所示，係本發明之晶圓盒在充氣時， 充氣閥之剖視圖。當供氣喷嘴50往上抵持充氣頭42時，彈 8 201028574 • 性元件44及其彈性瓣442係呈一壓縮狀態且充氣頭42係由 第一位置（如第7圖）往上移動到第二位置（如第8圖）。此時， 閥蓋43下表面與固定本體41其頂面412形成一間隙G且間 隙G與充氣頭42的出氣孔4221相通。而由於充氣頭42的 基座421下緣設有一進氣口 424，因此，供氣喷嘴50其氣體 可依序經由充氣頭42之進氣口 424、出氣孔4221及間隙G 而進入晶圓盒内部。而當晶圓盒完成充氣時，供氣喷嘴50 係往下收回以停止其抵持充氣頭42;此時，原本呈壓縮的彈 0 性元件44便可發揮作用，將充氣頭42往下推使閥蓋43下 表面與固定本體41其頂面412重新形成氣密，以防止晶圓 盒内的氣體外洩。 接著，請參考第9圖及第10圖，在充氣頭42其基座421 的外周面底端可以進一步配置或套設一圓形環（0-ring)46， 圓形環46其與基座421底端相對的地方具有凹槽461，以利 用此凹槽461卡入於基座421底端。上述圓形環的目的主要 係避免在充氣的過程中，晶圓盒外部的氣體或環境的氣體伴 隨進入晶圓盒内。如第10圖所示，供氣喷嘴50係固定於承 φ 載介面60上，而不是可以從承載介面60中活動或伸出的形式。 因此，當晶圓盒一放到承載介面60上時，晶圓盒其貫通孔30 内的充氣閥40便立即打開，承載介面60上的供氣喷嘴50可 以馬上進行充氣，以節省充氣所需時間。而當晶圓盒一離開 承載介面60時，彈性元件44可將充氣頭42往下推使閥蓋43 與固定本體41其頂面412形成氣密。 當然，本發明除係配置有充氣閥40之晶圓盒外，亦可 以係充氣閥40本身，充氣閥40其最佳實施例係包括固定本 體41、充氣頭42、閥蓋43、彈性元件44及下蓋45 ;但， 9 201028574 充氣閥40缺少下蓋45也是可以使充氣頭42往返於上下兩 個不同位置並達到充氣的功效。因此，本發明之充氣閥40 係可以係僅包含固定本體41、充氣頭42、閥蓋43及彈性元 件44即可。 雖然本發明以前述之較佳實施例揭露如上，然其並非用 以限定本發明，任何熟習相像技藝者，在不脫離本發明之精 神和範圍内，當可作些許之更動與潤飾，因此本發明之專利 保護範圍須視本說明書所附之申請專利範圍所界定者為準。 【圖式簡單說明】 第1圖係先前技術之晶圓盒其充氣閥之示意圖； 第2圖係本發明之一種配置有充氣閥之晶圓盒其示意圖； 第3圖係本發明之晶圓盒其充氣閥之爆炸圖； 第4圖係本發明之晶圓盒其充氣閥之仰視圖； 第5A圖及第5B圖 係第3圖之充氣閥其充氣頭與閥蓋結 合前後之示意圖； 第6圖係充氣閥其充氣頭與閥蓋結合之另一形式； 第7圖係第3圖之充氣閥其配置於晶圓盒内之剖視圖； 第8圖係本發明之晶圓盒在充氣時，充氣閥之剖視圖； 第9圖係本發明之充氣閥其充氣頭底端進一步配置一圓形 環之示意圖；及 第10圖係配置有第9圖之充氣閥之晶圓盒，於承載介面上 充氣之剖視圖。 【主要元件符號說明】 10 盒體 10 201028574 底部 插槽 開口 門體 外表面 内表面 貫通孔 充氣閥 固定本體 外周面 頂面 上開口 下開口 扣勾 充氣頭 基座 中空筒狀部 出氣孔 結合柱 上表面 11 201028574 螺紋 進氣口 閥蓋 孔洞 平台 突點 側壁 ❿ 螺紋 彈性元件 環狀結構 彈性瓣 圓環 下蓋 限制孔 結合孔洞 圓形環 凹槽 供氣喷嘴 承載介面201028574 VI. Description of the Invention: [Technical Field] The present invention relates to an open wafer cassette, and more particularly to an open wafer cassette prior to being equipped with a charge valve. [Prior Art] At present, in the semiconductor factory, most of the storage and transportation devices for wafers and reticles use the standard interface (SMIF) system proposed by Hewlett-Packard Co., Ltd., which is based on US Patent No. 4532970 and Revealed in 4534389. The purpose of the SMIF system is to ensure that the wafer, the reticle during the transport and storage process, the gas around the wafer and the reticle is substantially stationary relative to the wafer, the reticle, and the particles in the clean room are not Enter the environment next to the wafer and reticle. ^—Therefore, the transport container used in the SMIF system has a good gas venting effect to prevent gases or particles from the external environment from entering the transport container. In practice, for example, a 200mm wafer cassette or a 3mm wafer cassette, in order to prevent oxidation or organic contamination of the round surface, nitrogen, blunt gas or water has been removed (less than 1%). Gas such as dry gas is charged into the wafer cassette. In this case, at least one inflation valve is disposed in the above-mentioned wafer cassette to ensure smooth filling of the gas and prevent the fine filling gas of the crystal B from being bubbled. 4 Referring to Fig. 1, the inflation valve used in the round box disclosed in U.S. Patent No. 7,2,1276. The inflation valve system comprises a cylinder 1〇〇, and the inside of the cylinder 1 is provided with a duckbill valve body 1〇1, which is mainly composed of two elastic valves 102; therefore, when inflated, the gas will be Applying pressure outside the valve 1〇2 causes the gap 1〇3 between the valves 102 to open, allowing the gas to smoothly enter the dome. When the inflation is stopped or when the internal pressure of the wafer cassette is gradually increased, the gap 103 between the valves 102 is restored to a closed state to maintain the gas inside the 4 201028574 wafer cassette. Although the above-described inflation valve has a simple structure, the design of the valve 102 and the materials used are difficult to grasp. When the material is too rigid, the valve 102 is less prone to deformation, causing the gap 103 between the valves 102 to be too small to fill the wafer cassette with gas in a short time. When the rigidity of the material is too small, the valve 102 cannot completely close the slit 103, which is liable to cause deflation. SUMMARY OF THE INVENTION According to the prior art wafer cassette, the inflation valve is easily deflated, and the wafer cassette cannot be filled with gas efficiently. One of the main objects of the present invention is to provide an inflation valve in a wafer cassette, which can be short The wafer cassette is filled with gas during the time to save time required for inflation. Another main object of the present invention is to provide an inflation valve in a wafer cassette. The inflation valve can hold the gas in the wafer cassette for a long time, and the gas inside the wafer cassette can be prevented from leaking out. Another main object of the present invention is to provide an inflation valve in a wafer cassette. The inflation valve has a good airtight effect, and can prevent gas or environmental gas outside the wafer cassette from entering the wafer cassette during inflation. . In order to achieve the above objects, the present invention discloses an inflation valve, which mainly comprises a fixing body, an inflation head, an elastic member and a valve cover. The fixed body has an outer peripheral surface and a top surface is formed on the outer peripheral surface, and the upper and lower openings are respectively formed at the center of the top surface and the lower edge of the outer peripheral surface. The inflation head includes a base and a hollow cylindrical portion projecting upward from the center of the base, wherein the hollow cylindrical portion is located in the upper opening of the fixed body and the peripheral wall of the hollow cylindrical portion is provided with an air outlet. The elastic element ring is disposed around the hollow cylindrical portion of the inflator head and is located between the top surface of the fixed body and the base of the inflating head. The bonnet is disposed above the hollow cylindrical portion of the inflation head, so that when the inflation head is pressed against an upward external force, the inflation head moves from a first position to a second position in the upper opening 5 201028574 And compressing the elastic member, the first position means that the valve cover is pressed against the top surface of the fixed body, and the second position means that the valve cover forms a gap with the top surface and the air outlet of the inflation head communicates with the gap. In addition, the present invention also includes a wafer cassette configured with the above-mentioned inflation valve. When the inflation valve is closed, that is, in the first position, the elastic member can provide a force to press the valve cover against the top surface of the fixed body. Therefore, the gas can be kept in the wafer cassette for a long time, and the gas leakage can be effectively avoided. [Embodiment] For a more complete and clear disclosure of the technical content, the object of the invention and the effects thereof achieved by the present invention, the following detailed description is provided, and the illustrated figures and drawings are also referred to: First, referring to Fig. 2, there is shown a schematic view of a wafer cassette equipped with an inflation valve of the present invention. The wafer cassette is a front open wafer cassette comprising a casing 10 and a door 20. A plurality of slots 11 are disposed inside the casing 10 to horizontally accommodate a plurality of wafers, and an opening 12 is provided on one side of the casing 10 for loading and loading of the wafer. The door body 20 has an outer surface 21 and an inner surface 22 which are joined to the opening 12 of the casing 10 by the inner surface 22 to protect a plurality of wafers inside the casing 10. Further, at least one through hole 30 is formed in the casing 10 or the door body 20 to configure an inflation valve 40. In general, the inflation valve 40 is disposed at the bottom 10B of the casing 10, so that when the wafer cassette is placed on a load port, a gas supply nozzle can protrude from the bearing interface and pass through the through hole. The inflation valve 40 within 30 inflates the wafer cassette. The gas system supplied or ejected by the gas supply nozzle is mainly nitrogen gas, a passive gas or a dry gas, but is not particularly limited. As shown in Fig. 3, it is an exploded view of the inflation valve of the wafer cassette of the present invention. The inflation valve 40 mainly includes a fixed body 41, an inflation head 42, a bullet 6 201028574, a valve cover 43 and a lower cover 45. The fixed body 41 is a hollow cylindrical structure having an outer peripheral surface 411 and forming a top surface 412 on the upper edge of the outer peripheral surface 411, and an upper opening 413 at the center of the top surface 412 and the lower edge of the outer peripheral surface 411, respectively. And the opening 414. The inflator 42 is disposed inside the fixed body 41 and includes a base 421 and a hollow cylindrical portion 422 which protrudes upward from the center of the base 421. The inflating head 42 is first disposed with an elastic member 44 around the hollow cylindrical portion 422, and the hollow cylindrical portion 422 is placed in the upper opening 413 from the lower end of the lower opening 414 of the fixing body 41 and a valve is immediately applied. The cover 43 is assembled or disposed above the hollow cylindrical portion 422. Finally, the lower cover 45 is assembled to the lower edge of the outer peripheral surface 411 of the fixed body 41 to form the inflation valve 40. Next, referring to Fig. 4, the lower cover 45 is a flat plate structure having a restricting hole 451 at the center thereof. The restricting hole 451 is for accommodating the base 421 of the inflation head 42 to prevent the base 421 of the inflation head 42 from being shaken left and right inside the fixed body 41. Further, a plurality of coupling holes 452 are further provided on the outer periphery of the restriction hole 451 to be coupled with the hook 415 of the lower edge of the outer peripheral surface 411 of the fixed body 41. 〇 As shown in Fig. 5A, the hollow cylindrical portion 422 of the inflation head 42 has at least one air outlet 4221 and a T-shaped coupling post 423 is formed at the top end, and the bonding post 423 has a geometric upper surface 4231. On the lower surface of the bonnet 43, there is also a hole 431 corresponding to the above-mentioned geometry, and the hole 431 extends upward and forms a platform 432. Therefore, when the binding post 423 passes through the hole 431 of the lower surface of the valve cover 43 and rotates clockwise about ninety degrees, it can be clamped between the protrusion 433 on the platform 432 and the side wall 434, so that the hollow cylindrical portion 422 and the valve The cover 43 is integrated into one (as shown in Fig. 5B). Of course, the hollow tubular portion 422 and the valve cover 43 can be combined with the bonnet 43 by means of a rotational fastening method. Further, an 2010-shaped coupling post 423 can be formed at the top end of the hollow cylindrical portion 422 (as shown in FIG. 6). The outer surface of the binding post 423 is provided with a thread 4232 to be screwed or fixed integrally with the thread 435 corresponding to the valve cover 43 by the thread 4232. Next, referring to Fig. 7, a sectional view of the inflation valve 40 of Fig. 3 disposed in the wafer cassette. When the inflation valve 40 has its fixed body 41, the inflation head 42, the valve cover 43, the elastic member 44 and the lower cover 45 integrated, the inflation head 42 and the elastic member 44 are located in the accommodating space formed by the fixed body 41 and the lower cover 45. Inside. The elastic member 44 has an annular structure 441 and is connected to the ends of the plurality of elastic lobes 442 at the lower edge of the annular structure 441. The other ends of the elastic lobes 442 are connected to a ring 443. The above-mentioned ring 443 is available for the inflation head 42 through which the hollow cylindrical portion 422 passes, and the hollow cylindrical portion 422 is further placed in the upper opening 413 of the fixed body. Since the valve cover 43 is screwed or assembled integrally with the hollow cylindrical portion 422, the valve cover 43 presses against the top surface 412 of the fixed body 41 to prevent gas in the wafer cassette from passing through the valve cover 43. The gap between the top surfaces 412 enters the upper opening 413 or the inside of the fixed body 41. The lower surface of the valve cover 43 or the surface for contacting the top surface 412 may be further covered with a rubber pad to press the top surface 412 with the rubber pad to achieve a better airtight effect. In addition, the top surface 412 may further be provided with an annular groove, and a gas-tight member, such as a circular ring (O-ring), is embedded in the annular groove to make the valve cover 43 and the top surface 412 better. Airtight. As shown in the figure, since the base 421 of the inflation head 42 is placed in the restriction hole 451 of the lower cover 45, the inflation head 42 can be in the restriction hole 451 of the lower cover 45, the ring 443 of the elastic member 44, and the fixed body. The upper opening 413 of 41 moves up and down to avoid shaking left and right inside the fixed body 41. Next, referring to Fig. 8, there is shown a cross-sectional view of the inflation valve when the wafer cassette of the present invention is inflated. When the air supply nozzle 50 abuts against the inflation head 42, the spring 8 201028574 • the sexual element 44 and its elastic 442 are in a compressed state and the inflation head 42 is moved upward from the first position (as shown in FIG. 7 ) to The second position (as in Figure 8). At this time, the lower surface of the valve cover 43 forms a gap G with the top surface 412 of the fixed body 41, and the gap G communicates with the air outlet 4221 of the inflator 42. Since the lower edge of the base 421 of the inflating head 42 is provided with an air inlet 424, the gas of the air supply nozzle 50 can sequentially enter the wafer cassette through the air inlet 424, the air outlet 4221 and the gap G of the air inflating head 42. internal. When the wafer cassette is inflated, the air supply nozzle 50 is retracted downward to stop its abutment against the inflation head 42; at this time, the originally compressed elastic element 44 can function to push the inflation head 42 downward. The lower surface of the bonnet 43 and the top surface 412 of the fixed body 41 are re-sealed to prevent gas leakage inside the wafer cassette. Next, referring to FIG. 9 and FIG. 10, a circular ring (0-ring) 46, which is connected to the base, may be further disposed or sleeved at the bottom end of the outer peripheral surface of the base 421 of the inflator 42. The opposite end of the 421 has a recess 461 to be engaged with the bottom end of the base 421 by the recess 461. The purpose of the above-mentioned circular ring is to prevent the gas or environmental gas outside the wafer cassette from entering the wafer cassette during the inflation process. As shown in Fig. 10, the air supply nozzle 50 is fixed to the bearing surface 60 of the bearing φ, rather than being movable or extended from the carrier interface 60. Therefore, when the wafer cassette is placed on the carrying interface 60, the inflation valve 40 in the through-hole 30 of the wafer cassette is immediately opened, and the air supply nozzle 50 on the bearing interface 60 can be immediately inflated to save the inflation. time. When the wafer cassette leaves the load bearing interface 60, the elastic member 44 can push the inflation head 42 downward to make the valve cover 43 and the top surface 412 of the fixed body 41 airtight. Of course, the present invention may be an inflation valve 40 itself, in addition to the wafer cassette configured with the inflation valve 40. The preferred embodiment of the inflation valve 40 includes a fixed body 41, an inflation head 42, a valve cover 43, and an elastic member 44. And the lower cover 45; however, 9 201028574 The lack of the lower cover 45 of the inflation valve 40 also enables the inflation head 42 to travel up and down two different positions and achieve inflation. Therefore, the inflation valve 40 of the present invention may include only the fixed body 41, the inflation head 42, the valve cover 43, and the elastic member 44. While the present invention has been described above in terms of the preferred embodiments thereof, it is not intended to limit the invention, and the invention may be modified and modified without departing from the spirit and scope of the invention. The patent protection scope of the invention is subject to the definition of the scope of the patent application attached to the specification. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view of a gas cartridge of a prior art wafer cassette; FIG. 2 is a schematic view of a wafer cassette equipped with an inflation valve of the present invention; FIG. 3 is a wafer of the present invention FIG. 4 is a bottom view of the inflation valve of the wafer cassette of the present invention; FIGS. 5A and 5B are schematic views of the inflation valve of the gas valve of FIG. 3 before and after the combination of the inflation head and the valve cover; Figure 6 is another form of the inflation valve in which the inflation head is combined with the valve cover; Figure 7 is a cross-sectional view of the inflation valve of Figure 3 disposed in the wafer cassette; Figure 8 is a view of the wafer cassette of the present invention inflated Figure 9 is a cross-sectional view of the inflation valve; Figure 9 is a schematic view of the inflation valve of the present invention further configured with a circular ring at the bottom end of the inflation head; and Figure 10 is a wafer cassette configured with the inflation valve of Figure 9 for carrying A cross-sectional view of the inflation on the interface. [Main component symbol description] 10 Box body 10 201028574 Bottom slot opening door External surface Inner surface Through hole Inflator valve fixing External body peripheral surface Top opening Lower opening hook Inflator head Base hollow cylindrical part Venting hole Combined column upper surface 11 201028574 Threaded inlet bonnet hole platform protrusion side wall 螺纹 Threaded elastic element annular structure elastic valve ring lower cover restriction hole joint hole circular ring groove air supply nozzle bearing interface