1238804 五、發明說明（1) 【發明所屬之技術領域】 本發明為提供一種傳送盒之填充裝置改良，^ I F系統所使用之傳送盒内的填充裝 設y…道…空通道的一端為設 充轧官於充氣過程中，可有效的減少摩擦的產生， 效的防止細屑的產生，並利用橡膠或塑膠一體成死 可有效的降低成本並利於加工，且使加工成本下障 【先前技術】 、按，當進入二十一世紀，人類生活已經進入了 代的f域中，現今許多人類生活周遭的物品、用具 位化向科技產品取而代之，不僅帶給人們許多方便 時得以享受高科技的文明進步成果，而在數位化的 ，大夕數電器、物品、用具都會與數位科技有關係 科技I C晶片進行操控，以達到自動化的迅速、確 的，所以在人類生活在數位科技領域之中，則必須 步的數位知識、技術來控制各種高科技產物，例如 電視衫音设備、大樓中央管理、汽車、飛機等 衣舍住、行的相關產品、用具；其中高科技1 C晶 相^ f要的組成元件，所以有人宣稱1 C晶片為產 二因為1C晶片是由極精密的積體電路組成，其製 7罩在無塵室的環境中使用高精密度的機台 圓f行密度的積層作業來完成，其機台廠房等 本疋ΐ⑦向昂的，因此在製造晶圓的過程中，產品 以決定間半導體工廠獲利與否，因此致力於提高 指S Μ 裝置内 部，使 進而有 製成， 數位時 均以數 ’也同 時代中 或以高 實之目 以更進 :電腦 等食、 片係為 業之米 造過程 對碎晶 製造成 良率可 產品的1238804 V. Description of the invention (1) [Technical field to which the invention belongs] The present invention provides an improvement of a filling device for a transfer box. The filling device in the transfer box used by the IF system is provided with y ... channels ... The filling and rolling officer can effectively reduce the generation of friction during the inflation process, effectively prevent the generation of fine chips, and use rubber or plastic as a whole to effectively reduce costs and facilitate processing, and make processing costs lower. [Previous technology ] When you enter the 21st century, human life has entered the domain of f. Many of the objects and utensils around human life are now replaced by technological products, which not only brings people a lot of convenience when they can enjoy high technology. The achievements of civilization and progress, and in the digital, Daxi digital appliances, articles, appliances will be related to digital technology. IC chips are controlled to achieve rapid and accurate automation. Therefore, human beings live in the field of digital technology. Digital knowledge and technology must be followed to control various high-tech products, such as TV shirt audio equipment, building central management, Cars, airplanes, and other related products and appliances; among them, high-tech 1 C crystal phase ^ f required components, so some people claim that 1 C chip is produced because 1C chip is composed of extremely precise integrated circuits The manufacturing of the 7 hood is completed in a clean room environment using a high-precision lamination of f rows of rows. The machine building and other facilities are inherently expensive, so in the process of manufacturing wafers, The products are used to determine the profitability of the semiconductor factory. Therefore, we are committed to improving the inside of the MEMS device so that it is further made. When it is digital, it is also numbered. It is also used for modern or high-end purposes: computers and other food. , The film system is the industry's rice production process
1238804 五、發明說明（2) 良率是每一間半導體工廠經營者最重要的課題。 在—種由惠普公司所提出之S Μ Ϊ F系統已於盖ra击 利”，532，9 7 0 號及第 4，5 3 4，38 = 有所況明。s Μ I F系統之目的係為減少半晶體製之 運過程中所受之微粒通量。可局部達成此一目的之 ^ 括：在儲運過程中以機械方式確保晶圓周圍之氣態暂^ 例如空氣或氮氣）基本上係相對於晶圓而固定不过 周圍環境中之微粒不致進入緊鄰晶圓之環境中，而s ^ F系統可利用一少量、無微粒之氣體，為物件提佴一 之環境，職體之運動、氣流方向及外部污染物均受』： 來罩送中透一，所且槽而置簧 盒光傳圖於有c Β ，缺，位彈 送止用由並置簧置動由D 之用 傳防習，，設彈裝移藉管前利 用以為}1為 j 充2體氣氣係 採體係二ΑΒ有填Β氣充充時 會氣，C孔置設入槽將出為用 都性示圖透裝套推缺再抽復使 ，惰所作有充為D使，時恢於 罩填圖動置填Β管Β力畢而Β 光充十及設而置氣置復完力置 或内、}為，裝充裝回填復裝 圓盒九 一 ΑΒ充將充有充回充 晶送第C盒置填先填具當之填 壞傳閱圖罩裝且為動而，C述 破於參作光充，，推形内簧上 免且請動之填2時並變Α彈然 避，，之用 一00氣，性盒由， 了罩損時習有槽充内彈送藉態 為光毀體，設缺A1生傳會狀 ，或而氣出穿及盒B產至B合 而圓化填看内1送槽C填置閉 然晶氧充楚1B傳凹簧充裝一 送生於清A槽對之彈2充成 輸產盒可孔凹當設使B填並 12388041238804 V. Description of Invention (2) Yield is the most important issue for every semiconductor factory operator. In a kind of S Μ Ϊ F system proposed by Hewlett-Packard company has been hitting profit ", No. 532, 97 0 and No. 4, 5 3 4, 38 = The situation is clear. The purpose of s IF system is In order to reduce the flux of particulates during the transportation of semi-crystalline products, this can be partially achieved ^ including mechanically ensuring the temporary gaseous state around the wafer during storage and transportation ^ such as air or nitrogen) basically Relative to the wafer, it is fixed but the particles in the surrounding environment will not enter the environment immediately adjacent to the wafer. The s ^ F system can use a small amount of particulate-free gas to improve the environment for the object, the movement of the body, the airflow. Both the direction and external pollutants are affected by the following: To cover and send to the first one, so the optical transmission of the spring box is placed in the slot with c Β. It is assumed that before the ammunition loading and borrowing pipe is used,} 1 is used for filling, and the two-body gas system is used for gas filling. The two ΑΒ filling gas will be filled when the gas is filled. Install the cover to push the gap and then re-use, the inertia is filled with D, and it will return to the cover map to move and fill the B tube. The air refilling is completed, or the inner,} is, filling, filling, refilling, and refilling the round box. Jiuyi ΑB, filling the refilling crystal, sending the C box, filling it first, filling it with the circulation chart, and At the same time, the description of C is broken in the light charge of the reference, and the push-type inner spring is free. Please fill it at 2 o'clock and change to A to avoid it. Use a gas of 00. The sex box is used. The state of sending and borrowing in the tank is light-destructed, and there is a lack of A1 biomechanism, or the gas out of the box and the production of boxes B to B will be rounded and filled. 1B transfer concave spring filled with a bullet delivered in the A slot pair of Qing 2 filled into a delivery box can be recessed when set to fill B 1238804
Si二2官D來產生移動，而將氣體充填J 透孔A1及填充裝置β產生極) =擦接觸過程產生細屑，而細肩會隨著; J :送盒Α内的潔淨度，並因此污染傳送逢 危害到整個晶圓生產中的品質和良率，且说 時相當的繁雜，使加工成本大幅上升。 上述習用傳送盒之填充裝置的設置，因 缺失而於使用時產生重大的危害及影響，即 從事此行業者所急欲改善之方向所在。 是以’要如何解決上述習用之問題與缺 此行業之相關廠商所亟欲研究改善之方向所 【發明内容】 故，發明人有鑑於上述之問題與缺失， 料，經由多方評估及考量，並以從事於此行 經驗，經由不斷試作及修改，始設計出此種 裝置改良發明專利誕生者。 本發明之主要目的乃在於，利用填充裝 空通道及開合部，使充氣管可藉由開合部而 充填氣體，且當充氣管抽出時該開合部會自 夕摩擦的產生，進而有效的防止細屑的產生 本發明之次要目的乃在於，利用橡膠或 製成，可有效的降低成本並利於加工，使加 【實施方式】 為達成上述目的及功效，本發明所採 ^光罩A内，但 &的摩擦，容易 >氣動作而破壞 :A内的光罩而 種作法於組裝 結構設計上的 為本發明人與 失，即為從事 在者。 乃搜集相關資 業累積之多年 傳送盒之填充 置所設置之中 伸入傳送盒内 行閉合，以減 塑膠一體成形 工成本下降。 用之技術手段及 1238804 五、發明說明（4) 其構造，茲繪圖 功能如下，俾利 請參閱第一 剖面圖，由圖中 有中空通道3 1 3 2 ，且開合部 組成，並於遠離 ’而填充裝置3 請參閱第三 之立體分解圖及 清楚得知，本發 所設置之透孔2 卡固於透孔2 1 利用蓋體1所設 成具有保持氣密 就本發明之 完全暸解。 、二圖所示 可清楚看出 ，而中空通 3 2為由複 開合部3 2 之外緣為具 、四圖所示 組裝於傳送 明於組裝時 1，並使填 内緣，再將 置之扣持件 性效果。 較佳實施例詳加說明其特徵與 ，係為本發明 本發明之填充 道3 1的一端 數具彈 之另一 有卡摯 ，係為 盒後之 係先將 充裝置 蓋體1 1 2扣 性位移 端設置 部3 3 本發明 立體外 填充裝 3所設 覆蓋於 盒於座 之立體 裝置3 為設置 的活頁 有導引 〇 組裝於 觀圖， 置3置 置之卡 座體2 體2下 外觀圖及 内係設置 有開合部 3 2 1所 斜面3 4 傳送盒前 由圖中可 入座體2 摯部3 3 上方，並 方使之形 請參閱第五、六、七圖所示，係為本發明於充填氣體 時之動作剖面圖（一）、動作剖面圖（二）及動作剖面圖 (三），由圖中可清楚看出，本發明於充填氣體時&先二 充氣管4置入填充裝置3所設置之中空通道3 1内，且因 導引斜面3 4之设置可使充氣管4可更加順利的插入，再 利用充氣管4前端頂開開合部3 2所設置之活頁3 2工， 使活頁3 2 1產生^性位移而具有回復力，再將氣體充填 至蓋體1所設置之容置空間1 1内，待充填完畢後將充氣 管4抽出，此時該開合部3 2所設置活頁3 2 1會依回復Si 2 and D are used to generate movement, and the gas is filled with J through-hole A1 and the filling device β generates the pole) = fine debris is generated during the rubbing contact, and the fine shoulders will follow; J: the cleanliness in the box A, and Therefore, the contamination transmission jeopardizes the quality and yield of the entire wafer production, and it is quite complicated, which greatly increases the processing cost. Due to the lack of the above-mentioned filling device of the conventional transfer box, there will be significant hazards and impacts during use, which is the direction for those who are eager to improve in this industry. It is based on 'how to solve the above-mentioned conventional problems and the direction that the related manufacturers lacking in this industry are eager to study and improve. [Inventive Content] Therefore, in view of the above-mentioned problems and shortcomings, the inventor is expected to evaluate and consider through multiple parties, and Based on the experience in this line, through continuous trials and modifications, this device was designed to improve the invention patent. The main purpose of the present invention is to use the filling and emptying channel and the opening and closing part so that the inflation tube can be filled with gas through the opening and closing part, and the opening and closing part will produce friction from the night and night when the inflation tube is withdrawn, and thus effective. The secondary purpose of the present invention is to prevent the production of fine chips. The secondary purpose of the present invention is to use rubber or make it to effectively reduce costs and facilitate processing. [Embodiment] In order to achieve the above-mentioned object and effect, the photomask used in the present invention In A, but the friction of & is easy to be damaged by aerodynamic action: The photomask in A is designed by the inventor and the designer of the assembly structure, that is, the person in charge. It is collected from the accumulation of related assets for many years. The filling box of the conveying box is set in the conveying box and closed to reduce the cost of the integrated plastic molding. Technical means used and 1238804 V. Description of the invention (4) The structure and drawing function are as follows. Please refer to the first cross-sectional view for convenience. It consists of a hollow channel 3 1 3 2 in the figure, and is opened and closed. 'And the filling device 3 Please refer to the third perspective exploded view and it is clear that the through hole 2 provided in the present invention is fixed to the through hole 2 1 The cover 1 is used to have a complete understanding of the present invention. . It can be clearly seen in the two pictures, and the hollow communication 3 2 is formed by the outer edge of the reopening and closing part 3 2. The four pictures are assembled in the conveyer at the time of assembly 1, and the inner edge is filled. Place the effect of holding parts. The preferred embodiment details its characteristics and is the filling track 31 of the present invention. The other end has a number of bullets and the other has a card. After the box, the charging device cover 1 1 2 is buckled first. Displacement end setting portion 3 3 The three-dimensional outer filling device 3 of the present invention is provided with a three-dimensional device covering the box and seat. The loose leaf guide is provided. Assembled in the view, and the three-positioned card seat body 2 is arranged under the body 2. The figure and the inner system are provided with the opening and closing section 3 2 1 and the inclined surface 3 4 before the transfer box can be seated in the figure 2 above the center 3 3, and the shape is shown in Figures 5, 6, and 7. It is the action section view (1), the action section view (2), and the action section view (3) of the present invention when it is filled with gas. It can be clearly seen from the figure that the present invention & It is placed in the hollow passage 31 provided by the filling device 3, and due to the setting of the guide slope 34, the inflatable tube 4 can be inserted more smoothly, and then the opening and closing portion 32 provided by the front end of the inflatable tube 4 is used. The loose-leaf 3 2 works to make the loose-leaf 3 2 1 produce a displacement and have a restoring force, and then fill the gas Into the accommodating space 1 1 provided in the cover 1, and after the filling is completed, the inflatable tube 4 is pulled out. At this time, the loose leaf 3 2 1 set in the opening and closing portion 3 2 will respond according to the reply.
1238804 五、發明說明（5) 力而恢復原狀。 請參閱第八圖 ’由圖中可清楚看 1為可使用其外形 時為利用充氣管4 端部4 1與導引斜 力來打開開合部3 再者，本發明 所製成，而有效的 擠將填充裝置3卡 加快生產速度。 又，本發明填 氣管4可更加容易 是以，本發明 技術關鍵在於： (一） 本發明為利 開合部3 2 光罩盒内充 3 2會自行 (二） 本發明為利 製成，而有 力推擠將填 降低組裝卫 (三） 本發明為利 所示，係為本發明再一實施例之剖面圖 出，本發明所使用之充氣管4之端部4 相同於導引斜面34,而欲作充氣動作 所設之端部41貼平導引斜面=動： 面3 4呈密合狀態’再利用氣體 2所設置活頁321達到充填的：果症 之填充裝置3可為橡膠或塑膠一體成形 降低成本，且組裝時可直接利用硬力推 入透孔2 1内，進而有效的降低裝工時 充裝置3為設置有導引斜面3 4 ，使充 的插入中空通道31内。 傳送盒之填充裝置改良為可改善習用之 用填充裝置3所設置之中空通道31及 ’使充氣管4可藉由開合部3 2而伸入 填氣體，且當充氣管4抽出時該開合部 閉合，以減少摩擦的產生。 用橡膠或塑膠將填充裝置3 —體成形所 效的降低成本，且組裝時可直接利用硬 充裝置3卡入透孔2 1内，進而有效的 時加快生產速度。 用填充裝置3所設置之導引斜面34 ， ΜΊ1 第9頁 12388041238804 V. Description of the invention (5) Force to restore the original state. Please refer to the eighth figure. It can be clearly seen from the figure that 1 is the use of the outer tube 4 when the outer shape can be used. The end 4 1 and the guide oblique force are used to open the opening and closing portion 3. Furthermore, the present invention is effective The squeeze will fill the device with 3 cards to speed up production. In addition, the gas-filling tube 4 of the present invention can be made easier. The technical key of the present invention lies in: (1) the present invention is to open and close the part 3 2 and the photomask box is filled 3 2 (2) the present invention is made for profit, The forceful pushing will lower the filling assembly (3). The present invention is beneficial, and is a cross-sectional view of another embodiment of the present invention. The end portion 4 of the inflatable tube 4 used in the present invention is the same as the guide slope. 34, and the end 41 set for inflating action is flat guide bevel = moving: surface 3 4 is in a close state 'recycling leaf 321 set by gas 2 is filled: fruit filling device 3 can be rubber Or plastic integral molding reduces the cost, and can be directly pushed into the through hole 21 with hard force during assembly, thereby effectively reducing the installation time. The charging device 3 is provided with a guide slope 3 4 so that the charging is inserted into the hollow channel 31 . The filling device of the transfer box is improved to improve the conventional hollow channel 31 and the filling device 3, so that the inflation tube 4 can extend into the filling gas through the opening and closing portion 32, and the opening of the inflation tube 4 when the inflation tube 4 is withdrawn The joint is closed to reduce friction. Using rubber or plastic to reduce the cost of forming the filling device 3 in one body, and can be directly used in the through hole 21 by using the hard charging device 3 during assembly, thereby speeding up production when it is effective. With the guide bevel 34 provided by the filling device 3, ΜΊ1 page 9 1238804
五、發明說明（6) 綜上 有顯著之 剎要件， 陣發明人V. Description of the invention (6) In summary, there are significant essentials.
使充氣=4可更加容易的插入中空通道3 1内。 上述詳細說明為針對本發明一種較佳之玎行實施例說 明而已，惟該實施例並非用以限定本發明之申請專利範圍 ，凡其它未脫離本發明所揭示之技藝精神下所完成之均等 變化與修飾變更’均應包含於本發明所涵蓋之專利範圍中 戶斤述，本發明傳 功效增進’誠符 袭依法提出申請 &争苦發明，倘 #明人定當竭力 送盒之填充裝置 合新穎性、創作 ’盼審委早曰 若鈞局有任何 配合，實感德便 改良於使用時具 性及進步性之專 賜准本案，以保 稽疑，請不吝來 1238804 圖式簡單說明 【圖式簡單說明】 第一圖 係為本發明之立體外觀圖。 第二圖 係為本發明之剖面圖。Making inflation = 4 makes it easier to insert into the hollow channel 31. The above detailed description is for the purpose of describing a preferred embodiment of the present invention, but this embodiment is not intended to limit the scope of patent application of the present invention. All other equivalent changes and modifications made without departing from the spirit of the technology disclosed by the present invention "Modification and modification" should be included in the patent scope covered by the present invention, and the present invention has an "effect improvement effect" sincere application according to law & struggling for invention, if # 明人 定 当 strive to send the filling device of the box is novel "Sex, creation" I hope the jury said that if there is any cooperation with the Bureau, the real sense of morality will be improved in the use of the special and progressive nature of this case, in order to ensure suspicion, please come to 1238804 Brief description] The first figure is a three-dimensional appearance view of the present invention. The second figure is a sectional view of the present invention.
第三圖 係為本發明組裝於傳送盒前之立體分解圖。 第四圖 係為本發明組裝於傳送盒後之立體外觀圖。 第五圖 係為本發明於充填氣體時之動作剖面圖（一）。 第六圖 係為本發明於充填氣體時之動作剖面圖（二）。 第七圖 係為本發明於充填氣體時之動作剖面圖（三）。 第八圖 係為本發明再一實施例之剖面圖。 第九圖 係為習用傳送盒於充填氣體時之動作圖（一）。 第十圖 係為習用傳送盒於充填氣體時之動作圖（二）。 【元件符號說明】 1 、蓋體 1 1 、容置空間 1 2 、扣持件The third figure is an exploded perspective view of the present invention assembled before the transfer box. The fourth figure is a perspective view of the present invention after being assembled in a transfer box. The fifth figure is a sectional view (a) of the operation of the present invention when the gas is filled. The sixth figure is a sectional view (b) of the operation of the present invention when the gas is filled. The seventh figure is a sectional view (c) of the operation of the present invention when the gas is filled. The eighth figure is a sectional view of still another embodiment of the present invention. The ninth picture is the action diagram (1) of the conventional transfer box when it is filled with gas. The tenth picture is the action diagram (2) of the conventional transfer box when it is filled with gas. [Description of component symbols] 1, cover 1 1, accommodating space 1 2, holding parts
2、座體 2 1、透孔 3 、填充裝置 31、中空通道 33、卡摯部 3 2 、開合部 3 4、導引斜面2. Base 2 1. Through hole 3, Filling device 31, Hollow channel 33, Card center 3 2, Opening and closing part 3 4, Guide slope
第11頁 1238804 圖式簡單說明 3 2 1 、活頁 4、充氣管 4 1、端部 A、傳送盒 A 1、透孔 B、填充裝置 B 1 、凹槽 B 2、缺槽 C、彈簧 D、充氣管 llliiiiPage 111238804 Brief description of the drawings 3 2 1 、 Loose leaf 4 、 Inflatable tube 4 1 、 End A 、 Transfer box A 1 、 Through hole B 、 Filling device B 1 、 Groove B 2 、 Notch C 、 Spring D 、 Inflatable tube llliiii