201026160 四、指定代表圖： (一）本案指定代表圖為：第（1)圖。 (一）本代表圖之元件符號簡單說明： 1〜放電電極； 2〜離子反射部； 1〇〜基板； 20〜高電壓產生電路； W〜除電對象物。 五、本案若有化學式時，請揭示最能顯示發明特徵的化學式： 無0 六、發明說明： 【發明所屬之技術領域】 本發明係關於電暈放電型離子產生器，對除電對象物 有效率地供給因電暈放電在放電電極（射極）的周圍產生的 正或負離子。 【先前技術】 電暈放電型離子產生器中，由於放電電極（射極）的周 圍產生的正或負離子附著於支持放電電極的絕緣性外殼， 對於除電對象物有時不能充分供給產生的離子。已知專利 文件1、專利文件2等，其中記載以解決上述問題為目的 的電暈放電型離子產生器。 201026160 專利文件1中記載的離子產生器，在放電電極的下方 配置環狀的接地電極的同時’上述接地電極的更下方設置 著一對電場形成用電極，上述的一對電場形成用電極間藉 由施加交替電場’可以有效率地往除電對象物方向搬送通 過接地電極中心的離子。 又，專利文件2中記載的離子產生器，其中放電電極 對置於中•“轴上的噴嘴形離子產生器的内部供給壓縮空 氣，藉此將會往除電對象物方向有效率地搬送放電電極周 圍產生的離子。 [專利文件1]特開平5_3649〇號公報（段落[〇〇32]〜 [0037]、第1圖、第2圖等） [專利文件2]專利第3686944號公報（段落[〇〇1〇]〜 [0023]、第1圖〜第3圖等） 【發明内容】201026160 IV. Designated representative map: (1) The representative representative of the case is: (1). (1) A brief description of the component symbols of this representative figure: 1~discharge electrode; 2~ion reflection part; 1〇~substrate; 20~high voltage generation circuit; W~electric elimination object. 5. If there is a chemical formula in this case, please disclose the chemical formula that best shows the characteristics of the invention: No. 6. Description of the invention: [Technical field of the invention] The present invention relates to a corona discharge type ion generator, which is effective for removing electricity. The ground is supplied with positive or negative ions generated by the corona discharge around the discharge electrode (emitter). [Prior Art] In the corona discharge type ion generator, positive or negative ions generated around the discharge electrode (emitter) adhere to the insulating case supporting the discharge electrode, and the generated ions may not be sufficiently supplied to the object to be removed. Patent Document 1, Patent Document 2, and the like are known, and a corona discharge type ion generator for solving the above problems is described. In the ion generator described in Patent Document 1, a ring-shaped ground electrode is disposed under the discharge electrode, and a pair of electric field forming electrodes are disposed below the ground electrode, and the pair of electric field forming electrodes are borrowed between the electrodes. By applying an alternating electric field', ions passing through the center of the ground electrode can be efficiently transported in the direction of the object to be removed. Further, in the ion generator described in Patent Document 2, the discharge electrode is supplied with compressed air to the inside of the nozzle-shaped ion generator on the "shaft", whereby the discharge electrode is efficiently transported in the direction of the object to be removed. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei 5_3649 (paragraph [〇〇32] to [0037], Fig. 1, Fig. 2, etc.) [Patent Document 2] Patent No. 3686944 (paragraph [ 〇〇1〇]~[0023], 1st to 3rd, etc.) [Summary of the Invention]
[發明欲解決的課題] 1文件1所e載的習知技術t，接地電極以外設置 場形成用電極’由料些電場形成用電極間必須施 加父流電屢，增加零件數的同時，產生電氣電路結構變得 複雜的問題。 b得燹仵 I刊又仵2所記載的習知技術 空氣至喷嘴的配管結構等導致高成本等的問題。 二發明的解決課題係根據極簡單且低成本的構 ^ h供電暈放電型離子產生器，往除電 Γ承电對象物方向有效 3 201026160 率地移動放電電極周圍產生的離子並提高除電效率。 [用於解決課題的手段] 為了解決上述課題，根據申請專利範圍第^發明的 電暈放電型離子產生器，對除電對象物供給因電暈放電在 放電電極周圍產生的離子而進行除電，其中，具有與上述 放電電極電氣連接的離子反射部’對該離子反射部施加與 上述放電電極同極性的電壓而產生電場，藉此往上述除電 對象物方向移動上述離子。 根據申請專利範圍第2項的發明，申請專利範固第1 項所述的電暈放電型離子產生器中’上述離子反射部的上 述除電對象物側表面的曲率半徑比上述放電電極的前端部 的曲率半徑大得多。 根據申請專利範圍第3項的發明，申請專利範圍第1 項所述的電暈放電型離子產生器中’上述離子反射部的上 述除電對象物側表面形成例如像半球面的曲面。 根據申請專利範圍第4項的發明，申請專利範圍第i 至3項中任—項所述的電暈放電型離子產生器+，包括從 上述放電電極周圍往上述除電對象物方向供給清淨空氣的 裝置。 [發明效果] 根據本發明，由於離子反射部形成的電場作用，促進 產生離子往除電對象物方向移動。因此，可以提高除電效 率及縮短除電時間。 又，藉由併用往上述除電對象物方向供給清淨空氣的 201026160 裝置，可以得到更顯1著的除電效果 又’與習知技術相較 本提供。 由於構造極簡單 ，可以以低成 【實施方式】 以下’依照圖示說明本發明的實施例。 首先’第1圖係顯示本發明第-實施例的主要部的概[Problem to be Solved by the Invention] In the conventional technique t described in the document 1, the field-forming electrode is provided in addition to the ground electrode, and the parent electric current must be applied between the electrodes for forming the electric field, and the number of parts is increased. The problem of the electrical circuit structure becomes complicated. b. The conventional technique described in the second and second publications has a problem of high cost and the like due to the piping structure of the air to the nozzle. The solution to the second invention is based on the extremely simple and low-cost configuration of the hd-discharge type ion generator, which is effective in removing the ions generated around the discharge electrode and improving the efficiency of the charge removal. [Means for Solving the Problems] In order to solve the above problems, according to the corona discharge type ion generator of the invention of the second aspect of the invention, the ions to be generated by the corona discharge around the discharge electrode are supplied to the object to be neutralized, and the electricity is removed. An ion reflecting portion that is electrically connected to the discharge electrode is configured to apply a voltage having the same polarity as the discharge electrode to the ion reflecting portion to generate an electric field, thereby moving the ion in the direction of the object to be removed. According to the invention of the second aspect of the invention, in the corona discharge type ion generator according to the first aspect of the invention, the radius of curvature of the surface of the ion-removing object side of the ion reflecting portion is larger than the tip end portion of the discharge electrode The radius of curvature is much larger. According to the invention of claim 3, in the corona discharge type ion generator according to the first aspect of the invention, the surface of the ion-removing portion of the ion-reflecting portion is formed into a curved surface such as a hemispherical surface. According to the invention of claim 4, the corona discharge type ion generator+ according to any one of the items of the present invention, comprising the supply of clean air from the periphery of the discharge electrode to the direction of the object to be neutralized Device. [Effect of the Invention] According to the present invention, the action of the electric field formed by the ion reflecting portion promotes the movement of ions in the direction of the object to be removed. Therefore, it is possible to improve the efficiency of removing electricity and shortening the time of removing electricity. Further, by using the 201026160 device in which the clean air is supplied in the direction of the above-described static elimination object, a more remarkable power-removing effect can be obtained, which is provided in comparison with the prior art. Since the structure is extremely simple, it can be made low. [Embodiment] Hereinafter, embodiments of the present invention will be described in accordance with the drawings. First, the first figure shows an outline of the main part of the first embodiment of the present invention.
略構成m @巾，1G係設置於例如無塵室的天 的電暈放電型離子產生器的外殼基板，此基板ig中，在垂 直方向安裝放電電極卜上述基板1G以塑膠等的絕緣材料 形成》 又’圖示放電電極i安裝至基板1G的構造始終是概念 性的，圖中雖未顯示，放電電極i以電極支撐物維持，從 基板10自由裝卸此電極支撐物的安裝構造也可以。由於這 些具體的安裝構造並非本發明的主旨，在此省略說明。、 在此，電暈放電型離子產生器為所謂的交流型時，由 於放電電極1與對向設置的接地電極（未圖示）之間的高電 壓產生電路20施加交流的高電壓，放電電極1的周圍空氣 離子化。 二、 又，2係導電體形成的平板狀的離子反射部，此離子 反射部2與放電電極丨電氣連接。例如，放電電極丨緊連 設置於離子反射部2中心部的通孔並貫通，或藉由放電電 極1與離子反射部2以導線連接，可以電氣連接兩構件卜 201026160 又，w係顯示使用離子產生器中心帶電電荷而藉此除 電的玻璃基板等的除電對象物。 其次，第2圖係用以說明此實施例的作用圖。 現在，如第2(a)圖所示，從高電壓產生電路2〇施加 正電壓至放電電極，放電電極i的周圍產生正離子。 同時’因為也施加正電壓至與放電電们電氣連接的離子 反射部2,由於離子反射部2形成的電場E的作用，放電 電極1周圍的正離子沿著電場E迅速往下方移動。於是， 對於存在放電電極丨下方的除電對象物w，可以供給正離 子。 又如第2(b)圖所示，從高電壓產生電路2〇施加負 電壓至放電電，放電電極！的周圍產生負離子。同 時，因為也施加負電壓至離子反射部2，由於離子反射部2 形成的電場JE的作用’纟電電Si周圍的負離子迅速往電 場E的反方向移動。於是，此時，對於存在放電電極1下 方的除電對象物W’也可以供給負離子 如上述，根據此實施例，由於離子反射部2反射放電 電極1周圍產生的正或負離子而達成往除電對象物$方向 搬送的作用，產生的離子不會附著至基板10等可以使2 部分的產生離子到達除電對象物w並促進除電。 第3圖係第2圖的放大說明圖，用以說明離子反射呷 2的下端部兩側的曲率半徑b與放電電極丨的前° 部)的曲率半徑Re之間的關係。 *(下端 離子反射部2側的曲率半徑rr在放電電極丨侧 J曲率 201026160 半徑Re以下時（Rr< _ =)，離子反射部2的下端部兩侧電場 集中，周圍產生離子’…方面，由於放電電 的電場變弱’恐怕變得不能充分產生離子。 二此，如第3圖所示同離子反射部2的下端部兩 二:：著除電對象物w側的離子反射部2的表面端部的曲 ^半控Rr最好形成比放電電極i的前端部的曲率半徑^大 得多。The m @巾, 1G is a casing substrate of a corona discharge type ion generator installed on a clean room, for example, in which a discharge electrode is mounted in a vertical direction, and the substrate 1G is formed of an insulating material such as plastic. Further, the structure in which the discharge electrode i is attached to the substrate 1G is always conceptual. Although not shown in the drawing, the discharge electrode i may be held by the electrode support, and the mounting structure of the electrode support may be detachably attached from the substrate 10. Since these specific mounting configurations are not the gist of the present invention, the description is omitted here. Here, when the corona discharge type ion generator is of the so-called alternating current type, a high voltage of an alternating current is applied to the high voltage generating circuit 20 between the discharge electrode 1 and the oppositely disposed ground electrode (not shown), and the discharge electrode The surrounding air of 1 is ionized. Further, a plate-shaped ion reflecting portion formed of a 2-series conductor, the ion reflecting portion 2 is electrically connected to the discharge electrode 。. For example, the discharge electrode 丨 is closely connected to the through hole provided in the central portion of the ion reflection portion 2 and penetrates, or the discharge electrode 1 and the ion reflection portion 2 are connected by wires, and the two members can be electrically connected. 201026160 Further, the w system shows the use of ions. An object to be removed, such as a glass substrate, by which electric charges are charged in the center of the generator. Next, Fig. 2 is a view for explaining the action diagram of this embodiment. Now, as shown in Fig. 2(a), a positive voltage is applied from the high voltage generating circuit 2 to the discharge electrode, and positive ions are generated around the discharge electrode i. At the same time, since a positive voltage is applied to the ion reflection portion 2 electrically connected to the discharge electric power, the positive ions around the discharge electrode 1 rapidly move downward along the electric field E due to the action of the electric field E formed by the ion reflection portion 2. Then, a positive ion can be supplied to the object to be removed w which is present under the discharge electrode. Further, as shown in Fig. 2(b), a negative voltage is applied from the high voltage generating circuit 2 to discharge electric power, and the discharge electrode is discharged! Negative ions are generated around. At the same time, since a negative voltage is also applied to the ion reflecting portion 2, the negative electrode around the electric Si is rapidly moved in the opposite direction of the electric field E due to the action of the electric field JE formed by the ion reflecting portion 2. In this case, the negative ion can be supplied to the object to be removed W' under the discharge electrode 1 as described above. According to this embodiment, the ion reflection unit 2 reflects the positive or negative ions generated around the discharge electrode 1 to achieve the object to be removed. In the direction of the transport, the generated ions do not adhere to the substrate 10 or the like, and the generated ions of the two portions can reach the object to be removed w and promote the static elimination. Fig. 3 is an enlarged explanatory view of Fig. 2 for explaining the relationship between the radius of curvature b of both sides of the lower end portion of the ion reflection 呷 2 and the radius of curvature Re of the front portion of the discharge electrode 。. * (When the radius of curvature rr on the side of the lower end ion reflecting portion 2 is equal to or less than the radius Re of the 201026160 radius of the discharge electrode 丨J (Rr < _ =), the electric field is concentrated on both sides of the lower end portion of the ion reflecting portion 2, and ions are generated around ... The electric field of the discharge electric power is weakened. I am afraid that the ions are not sufficiently generated. The second end of the same ion reflecting portion 2 is shown in Fig. 3: the surface of the ion reflecting portion 2 on the side of the de-energized object w The half-controlled Rr of the end portion is preferably formed to be much larger than the radius of curvature ^ of the front end portion of the discharge electrode i.
藉此’放電電極1的前端部電場集中，並可以有效 地產生離子。 其次’第4圖係本發明第二實施例的主要部的概略沣 構圖。 °° 此實施例中，導電體形成的離子反射部2A形成中空的 半球狀，由於此半徑方向緊連放電電極丨並貫通離子反 射部2A與放電電極丨電氣連接。 此實施例中’由於對離子反射部2A也施加與放電電極 1同極性的電壓，根據與第一實施例同樣的電場作用，可 以往除電對象物W方向搬送放電電極1周圍的離子。 特別是’由於離子反射部2A的除電對象物W側的表面 形狀為半球面狀，因為全體表面中離子反射部2八側的曲率 半控Rr比放電電極1的前端部的曲率半徑Re大得多，電場 不會集中在離子反射部2A侧’可能從放電電極1產生大量 的離子。 又’離子反射部2A的除電對象物W侧的表面，不只是 半球面地形成球面一部分的曲面，也可以形成楕圓球面的 7 201026160 -部分的曲面。不論是其中任一，只要離子反射部2a的除 電對象物η則的表面曲率半徑Rr比放電電極i的前端部的 曲率半徑Re大得多即可。 又，離子反射部2A不必非中空不可，實心的(裏面塞 滿）部材也可以。 其人第5圖係本發明第三實施例的主要部的概略社 構圖。 、此實施例中’導電體形成的離子反射部形成中空的 ，球狀的同時，安裝貫通外殼基iq並連通離子反射部 ^外的空氣供給管3，經由空氣供給管3從外部的屢縮 夺工乳至離子反射部2B的内部，使此清淨命 =通氣口 2a往除電對象物？方向送風。又，4係用以; 氧連接離子反射部2B與放電電極i的導線。 此實施例中’由於對離子反射部2β也施加與放電電極 可：性的電壓’根據與第-、二實施例同樣的電場作用， 離：。效率地往除電對象物W方向供給放電電極1周圍的 同時目為從外部供給的清淨空氣經由通氣口 2a往除 對象物W方向輪送，將更有助於離子 接 高除電效果。 』以更提 為曲=:二2a的離子反射部2"端部如圖示 半徑大得多。 最好比放電電極1的前端部的曲率 又離子反射部2B的除電對象物w側的表面，當然與 201026160 上述相同不限於半球面，只要曲率半徑夠大的曲面即可。 第6圖係本實施例的效果說明圖，使用具有離子反射 部2B的離子產生器，用於以電荷板監視器3〇測定供給清 淨空氣時的除電時間的裝置結構圖。 第6圖中，半球狀的離子反射部2B的曲率半徑（離子 反射部2B的半徑）1^為5mm(毫米），放電電極i前端部的 曲率半徑RE為〇. lmm，放電電極i前端部從離子反射部 _ 下端部開始的突出長度| 5韻，從放電電極i前端部到電 荷板監視器30的帶電板31的距離為5〇cm(公分），對放電 電極1的施加電壓為AC5kV(交流電5千伏特），清淨空氣 的送風速度為〇. 3米/秒，測定帶電板31的電壓在正側從 + 1000V到+l〇〇v ’在負侧從_1〇〇〇¥到_1〇〇v，衰減的時間， 正負都是約5秒。 對此，與上述同樣的條件，使用沒有離子反射部只有 放電電極的習知離子產生器，供給清淨空氣時，從+ ι〇〇〇ν •到+1〇〇V，從-1000V到_100V’衰減的時間，正負都是約7 秒。 ^果，根據本實施例，了解由於離子反射部的作用， 促進離子的搬送，大幅縮短除電時間。 【圖式簡單說明】 [第1圖]係顯示本發明第—實施例的主要部的概略構 成圖； [第2 ( a )、2 (b)圖]係第一實施例的作用說明圖； 201026160 要部的楙略構 要部的概略構 [第3圖]係第2圖的放大說明圖； [第4圖]係顯示本發明第二實施例的主 成圖； [第5圖]係顯示本發明第三實施例的主 成圖；以及 [第6圖]係第三實施例的效果說明圖。 【主要元件符號說明】 1〜 '放電電極； 2〜 '離子反射部； 2a- 〜通氣口； 2A 〜離子反射部； 2B 〜離子反射部； 3〜 '空氣供給管； 4〜 -導線； 10 〜外殼基板； 20 〜高電壓產生電路； 30 〜電荷板監視器； 31 〜帶電板； E- /電場； Rr 〜曲率半徑； Re， 〜曲率半徑； w- <除電對象物。Thereby, the electric field of the front end portion of the discharge electrode 1 is concentrated, and ions can be efficiently generated. Next, Fig. 4 is a schematic diagram of the main part of the second embodiment of the present invention. °° In this embodiment, the ion reflecting portion 2A formed of the electric conductor is formed in a hollow hemispherical shape, and is electrically connected to the discharge electrode 贯通 through the ion reflecting portion 2A in this radial direction. In the present embodiment, a voltage having the same polarity as that of the discharge electrode 1 is applied to the ion reflecting portion 2A, and the ions around the discharge electrode 1 can be transported in the direction of the conventional object T in accordance with the electric field action similar to that of the first embodiment. In particular, the surface shape of the ion-removing object W on the side of the ion-reflecting portion 2A is hemispherical, and the curvature half radius Rr of the ion-reflecting portion 2 on the entire surface is larger than the radius of curvature Re of the tip end portion of the discharge electrode 1 Many, the electric field is not concentrated on the side of the ion reflecting portion 2A', and a large amount of ions may be generated from the discharge electrode 1. Further, the surface of the ion reflecting portion 2A on the side of the object to be removed W is not only a curved surface in which a part of the spherical surface is formed by a hemispherical surface, but also a curved surface of a portion of the spheroidal surface 7 201026160 -. In any case, the surface curvature radius Rr of the ion-receiving portion 2a of the ion reflecting portion 2a may be much larger than the radius of curvature Re of the tip end portion of the discharge electrode i. Further, the ion reflecting portion 2A does not have to be hollow, and a solid (filled inside) member may be used. Fig. 5 is a schematic diagram showing the main part of a third embodiment of the present invention. In this embodiment, the ion reflecting portion formed of the conductor is formed in a hollow shape, and is attached to the air supply tube 3 that penetrates the outer casing base iq and communicates with the ion reflecting portion, and is externally contracted via the air supply pipe 3. The working milk is transferred to the inside of the ion reflecting portion 2B, and the cleansing life = the vent 2a is removed to the object to be removed. Directional air supply. Further, 4 is used for oxygen-connecting the wires of the ion reflecting portion 2B and the discharge electrode i. In this embodiment, the voltage applied to the ion reflecting portion 2? is also applied to the discharge electrode, and the electric field is the same as that of the first and second embodiments. It is efficiently supplied to the periphery of the discharge electrode 1 in the direction of the object to be removed W, and the clean air supplied from the outside is circulated in the direction of the object W through the vent 2a, which contributes more to the high ion-eliminating effect of the ion. In addition, the ion reflection portion 2" of the second 2a is much larger in radius as shown in the figure. It is preferable that the curvature of the tip end portion of the discharge electrode 1 and the surface of the ion-reflecting portion 2B on the side of the object to be removed w are not limited to the hemispherical surface as in the case of 201026160, and the curved surface having a sufficiently large radius of curvature may be used. Fig. 6 is a view showing the effect of the present embodiment, using an ion generator having an ion reflecting portion 2B, and a device configuration diagram for measuring the static elimination time when the clean air is supplied by the charge plate monitor 3'. In Fig. 6, the radius of curvature of the hemispherical ion reflecting portion 2B (the radius of the ion reflecting portion 2B) is 5 mm (mm), and the radius of curvature RE of the tip end portion of the discharge electrode i is 〇. lmm, the front end portion of the discharge electrode i The protruding length from the ion reflecting portion _ lower end portion is 5 〇cm (cm) from the tip end portion of the discharge electrode i to the charging plate 31 of the charge plate monitor 30, and the applied voltage to the discharge electrode 1 is AC5kV. (AC 5 kV), the air supply speed of the clean air is 〇. 3 m / s, and the voltage of the charged plate 31 is measured from + 1000 V to +l 〇〇 v on the positive side. _1〇〇v, the decay time, both positive and negative are about 5 seconds. On the other hand, with the same conditions as described above, a conventional ion generator having no ion reflection portion and only a discharge electrode is used, from + ι〇〇〇ν • to +1 〇〇V, from -1000 V to _100 V when supplying clean air. 'Attenuation time, both positive and negative are about 7 seconds. According to the present embodiment, it is understood that the ion transfer is promoted by the action of the ion reflecting portion, and the static elimination time is greatly shortened. BRIEF DESCRIPTION OF THE DRAWINGS [Fig. 1] is a schematic configuration diagram showing a main part of a first embodiment of the present invention; [2nd (a) and 2 (b)] is an operation explanatory view of the first embodiment; 201026160 The schematic structure of the main part of the main part [Fig. 3] is an enlarged explanatory view of Fig. 2; [Fig. 4] shows the main form of the second embodiment of the present invention; [Fig. 5] The main drawing of the third embodiment of the present invention is shown; and [Fig. 6] is an explanatory view of the effect of the third embodiment. [Description of main component symbols] 1~ 'Discharge electrode; 2~ 'Ion reflection part; 2a-~ vent; 2A~Ion reflection part; 2B~Ion reflection part; 3~ 'Air supply tube; 4~-wire; 10 ~ Shell substrate; 20 ~ high voltage generating circuit; 30 ~ charge board monitor; 31 ~ charged board; E- / electric field; Rr ~ radius of curvature; Re, ~ radius of curvature; w- <