TW201019061A - A temperature control device - Google Patents

Abstract

A temperature control device that controls the temperature of a controlled object at a desired level by circulating a fluid in a temperature adjustment unit arranged in the vicinity of the controlled object, comprising: a heating pathway that heats and circulates the fluid in the temperature adjustment unit, a cooling pathway that cools and circulates the fluid in the temperature adjustment unit, a bypass pathway that circulates the fluid in the temperature adjustment unit without passing the fluid through the heating pathway and the cooling pathway, an adjustment means that adjusts a flow ratio of the fluid that is supplied from the heating pathway, cooling pathway, and bypass pathway to the temperature adjustment unit, and a flow means that flows the fluid in order to circulate the fluid, and wherein a heating unit for heating the fluid is arranged in the heating pathway, and the flow means is disposed downstream from the heating unit along at least one of the pathways for circulating the fluid.

Description

201019061 VI. Description of the Invention: [Technical Field] [0001] The present invention relates to a temperature control device that predictably controls the temperature of the above-mentioned control object by circulating a fluid in a temperature regulating portion disposed in the vicinity of the controlled object. Prior Art [0002] Fig. 12 shows such a temperature control device. As shown in the figure, the fluid in the storage box 100 is sucked by the pump 102 and discharged to the side of the heating portion 1〇4. The heating unit 104 has a heater or the like to heat the fluid output to the temperature adjustment unit 1〇6. The flow of the temperature adjustment unit 1 (m is output to the cooling unit 108. The output of the hub case can be cooled by the cooling unit 108. Ί ?:: In such a configuration, it is supplied to the temperature adjustment unit 1〇6 by adjustment. The temperature of the fluid controls the temperature of the controlled object supported by the thermostat 1〇6. Here, the temperature of the member to be heated is not caused by the cold portion of the member, and the heating portion 104 On the other hand, when it is desired to lower the temperature of the controlled object, the cold bee portion 1 〇 8 performs f丄 cooling on the fluid and the heating portion 104 does not heat the fluid. In addition to the one shown in the twelfth aspect, the conventional temperature control device is described in the following Patent Document 1. [5] [Patent Document 1] However, in the above temperature control device, it takes a long time to change the temperature of the controlled object to the expected temperature. That is, when it is desired to lower the 098138159 form of the controlled object. No. A0101 Page 5 of 57 Page 0992065455-0 201019061 Temperature It is necessary to start the cooling of the cooling portion 108 while stopping the heating of the heating portion 104. However, even after the heating of the heating portion 1〇4 is stopped, the high-temperature fluid is rotated from the heating portion 104 for a while due to the residual heat. Even if the cooling of the cooling unit 108 is started, it takes time before the fluid is actually cooled, and it takes a longer time to reduce the degree of the fluid in the tank 1 . Therefore, the temperature adjustment unit 106 cannot be quickly changed. The temperature inside, and further, the temperature of the controlled object cannot be quickly changed. SUMMARY OF THE INVENTION [0007] The present invention has been made to solve the above problems, and an object thereof is to provide a temperature control device: The device can cause the $control# to quickly follow the expected temperature by controlling the temperature of the object to be controlled by the tempering portion disposed near the object to be controlled. According to a first aspect of the present invention, there is provided a temperature control apparatus which is expected to circulate a fluid in a temperature regulating portion disposed in the vicinity of a controlled object. • J |· f : Control Office Temperature controlled object,: ;; ^ which the temperature control means comprises: a heating passage 'altar into the stream and the fluid barrier in the body plus the adjustment

a temperature loop, a cooling passage that cools the fluid and loops the fluid at the temperature regulating portion; and a bypass passage that loops the fluid at the temperature regulating portion without passing through the heating passage and The cooling passage; an adjusting device 'adjusts a flow ratio of a fluid supplied from the heating passage, the cooling passage, and the bypass passage to the temperature regulating portion, and the flow device 'makes the flow The helium flows to circulate the fluid, and the heating passage is provided with a heating portion for heating the fluid, the flow device being disposed on a downstream side of the heating portion in a loop path of the fluid. 098138159 Form No. A0101 Page 6 of 57 0982065455-0 201019061 [0009] [0010] In the first aspect, 'the fourth part of the 'the heating passage, the cold portion passage, and the bypass passage are supplied to the fourth portion. The flow ratio can quickly change the temperature of the fluid supplied to the coffee temperature portion. Further, since the flow device is provided on the downstream side of the heating portion, the portion of the heating portion heated by the heating portion can be suppressed from increasing the influence of the attraction force of the flow device convection 2, so that the above-described heating can also be reduced. Part of the required pressure resistance. Further, the flow path area of the confluence portion in which the heating fin, the cooling passage, and the bypass passage are merged with each other may be controlled to be equal to or less than the sum of the flow path areas of the upstream passages, or may be smaller than the total teeth W 〇, . [0011] φ [0012] The second aspect of the present invention is characterized in that the adjusting device includes a flow regulating umbrella, and the binding device adjusts a flow rate of the power supplied from the heating passage to the temperature regulating portion, and the The flow rate adjusting device is disposed on the upstream side of the heating portion. In the above two aspects, 'the effect of reducing the pressure of the portion heated by the heating portion in the shouting repair by the means for adjusting the supply from the heating passage to the above-described adjustment in the flap adjustment is well avoided. interference. A third aspect of the invention is characterized in that in the first or second aspect, the fluid circulation path is provided with a volume change absorbing device capable of absorbing the fluid due to temperature The volume changes. [0013] When the fluid volume is temperature dependent, a change in the temperature of the fluid will cause a change in volume' so the loop of the fluid may be disturbed. For this 098138159 form number A0101 page 7 / total page 57 0982065455-0 201019061 circle [0014], due to the volume change in the third aspect mentioned above, even if the volume of the flow Zhao has changed, it is very good In addition, the volume change is upstream of the device. Preferably, the flow is provided in the above-mentioned flow [0015] The fourth aspect of the present invention is characterized in that, in any one of the first to third aspects, the heating passage and the cooling passage are provided with an outflow passage The effluent passage _ the seasoning causes the stream to flow to the downstream side of the stream. The fluid will generate a temperature gradient from the heating path and the cooling passage: "H· to the tune of the flow of the other part of the flow [to talk about the impact, so that the temperature of the temperature control part will follow the desired temperature may be long Timed. In the fourth aspect described above, there is an outflow path, so that the heating path, the cooling, the temperature gradient can be well suppressed, and the temperature of the temperature adjustment unit can be more quickly followed; Further, the fourth aspect of the present invention may have the following features:

When it is forbidden, after the release, the heating side temperature detecting means for detecting the temperature is not provided in the heat path, and the cooling side temperature detecting means for detecting the temperature is provided in the cooling path. At this time, since the above-described outflow passage is provided, it is possible to satisfactorily suppress the influence of the temperature gradient by the detection means being prohibited from flowing from the heating passage and the cooling passage to the temperature regulating portion. A fifth aspect of the invention is characterized in that in any one of the above first to fourth aspects, the flow is from the heating passage and the bypass passage 098138159 Form No. A0101 Page 8 of 57 page 0982054555 -0 [0018] 20100061 [0020] References to the use of the time passage in the temperature adjustment section, and the use of the bypass from the cold bypass and the material feeder (4) The pathways include a common pathway. In five aspects, fluid is supplied from the heating path and the bypass path to the enthalpy. _From the cooling material and the material supply temperature adjustment section, β uses a common bypass path. The structure of the temperature control device can be simplified compared to the respective bypass paths of the road. The six aspects are characterized in that: in the above-mentioned first to fifth aspects, the fascinating device is said to be "..." with "intrusion temperature control [0021] [0022] [0023] [0024] 098138159 The target value is called the operation point. The feature of the seventh aspect of the present invention is as follows: in the above-mentioned first mouth = description of the adjustment =: the measurement of the measured value: the measured value feedback control is the target _ ^8 * # '" In the seventh aspect described above, the eighth aspect of the invention is characterized in that the adjustment means is a high-precision money target value. U is characterized in that the adjustment means is for the heating, and the seventh is described. In one aspect, the secrets of the path path are adjusted, but the amount of deviation of the device packet value is converted into the detected value. With the main unit 04^...., π up to the heating path, the cooling path, a total of 57 pages, the form number Α 0101, 0982065455-0 201019061 [0025] [0028] [0028] [0029] and the bypass The secret surface of each material is difficult to make. In the above eighth aspect, 'because of the degree of deviation of the detected value of the transformed skirt from the target value By simply adjusting, the amount of the above three (four) can be quantized (operated) based on the quantized amount. Flow path area of the path Further, preferably, the transform means is 'relative to the above deviation when the detected value is larger than the target value The change in the degree changes the flow path area of the cooling passage (bypass path). When the detected value is smaller than the target value, the change in the degree of deviation changes the area of the path of the heating path and the bypass path. Further, the feature of the ninth aspect of the invention In the following: in the eighth aspect of the kite, the operating device operates the adjustment device from the target period, and the detection value of the bypass path temperature detecting device for detecting the opening is opened. Controlling the temperature of the fluid near the temperature control portion to replace the feedback control. , :; « : 4-- % i % | When the target value changes, in order to arbitrarily reduce the temperature of the measurement r 1 , % jf quickly follow the target 隹 'The need to increase the benefit of this feedback control. Therefore, when the gain of the control is increased, the amount of change in the detected value that varies up and down the target value will become larger. In the feedback control, the 'response improvement and the suppression of the variation amount are mutually contradictory relations. For this, since the above-mentioned ninth aspect is 'in the predetermined period from the change of the target value', the open-loop control is performed. In place of the feedback control, the responsiveness at the time when the target value is changed can be improved even if the feedback control is set to suppress the amount of fluctuation in which the detected value fluctuates above and below the target value. The tenth aspect of the present invention is characterized in that in the ninth aspect described above When 〇〇098138159 Form No. A0101 10th Buy/Total 57 Page 0982065455-0 201019061 When the fluid temperature in the bypass passage is higher than the target value, the passage from the bypass passage during the predetermined period is The flow rate ratio of the flow path of the cooling passage supplied to the temperature control unit is operated to perform open loop control, and when the fluid temperature in the bypass passage is lower than the target value, the passage is performed within the predetermined period. The flow rate ratio of the fluid supplied from the bypass passage and the heating passage to the temperature regulating portion is operated to perform open loop control [0030]

In the above tenth aspect, when the temperature of the fluid in the bypass passage is higher than the target value, the flow passage area of the bypass passage and the cooling passage is operated, and the energy can be reduced as compared with the case where the heating passage is also used. Consumption. In addition, when the bypass passage 涔翕 'flow temperature is lower than abundance, the flow path area of the bypass passage and the serge heating path is operated, and the S can be lowered compared with the case where the cooling passage is also used. Energy consumption amount stated target value [0031] The eleventh aspect of the present invention is characterized in that in the above first to tenth aspects

In any of the following, a transition time system is further included, and the transition period target value setting means changes the target value in comparison with the said reference to the target value in the case of a change in the temperature of the ___ temperature. [0032] In order to change the temperature of the temperature adjustment unit from the target value since the target value is changed, since the temperature of the temperature adjustment unit needs to be changed by the temperature-controlled fluid, a response delay is generated when the target value is followed, and in order to change Since the temperature of the controlled object 'heat energy exchange between the controlled object and the temperature control part after the temperature of the temperature control part has changed, the response delay of the temperature change of the controlled object becomes more significant. Therefore, in the eleventh aspect described above, when the actual request changes, the target value can be changed by a larger change than the required 9 form number A0101, page 11 / 57 page 0982054555-0 201019061. The temperature of the temperature control unit, the controlled object, and the like are quickly changed to the required temperature. According to a twelfth aspect of the present invention, in the any one of the ninth to eleventh aspects, further comprising an open loop control adaptive support device, wherein the open loop control adaptive support device outputs a signal Urging external selection of any one of a plurality of options for at least one of a gain of the open loop control, a duration of the open loop control, and a setting of a target value at the open loop control, and according to the selected value The temperature control is performed. [0034] In the open loop control, the optimum settings of the gain, the duration kick, and the target value are all dependent on the controlled object. Therefore, in the temperature control device I, it is pre-determined to set these parameters, and there is a possibility that the controlled object is properly opened and closed. For this point, in the above "Twelve squares ^ ^, because of the * open loop control adaptive support skirt, it is possible to reduce the amount of labor when the user of the temperature control device adapts these parameters according to the controlled argument [0035] The characteristics of the thirteenth aspect of the present invention:: to the above sixth to tenth; aspects of the above-mentioned information in the steady state of the situation of the light of the 43⁄4 secret and expected but pass (four) 〇 The flow path area adjusted by the adjusting device becomes 〇Ο [0036] When the flow boat is prohibited from flowing from the heating passage, the cooling passage, etc. to the temperature regulating portion, a temperature gradient is generated on the downstream side of the adjusting device. Since the temperature of the fluid flowing to the temperature regulating portion is affected by the temperature gradient, the time required for the temperature to follow the desired temperature can be long. In this regard, in the thirteenth aspect, the temperature regulating portion When the temperature is in a steady state, it is good to suppress the flow rate of the fluid adjusted by the above-mentioned regulating device of the above-mentioned heating path and cooling 098138159 Form No. A0101 Page 12/57 page 0982065455-0 201019061 path becomes zero. The temperature gradient further makes it possible to more quickly follow the temperature of the temperature control portion to the desired temperature. [0037] Further, the thirteenth aspect of the invention may have the following feature: the heating side temperature detection for detecting the temperature thereof is provided in the heating passage In the apparatus, the cooling side temperature detecting means for detecting the temperature is provided in the cooling passage. At this time, by prohibiting the flow of the fluid from the heating passage, the cooling passage, or the like to the temperature regulating portion, the detecting means can be satisfactorily suppressed from being subjected to the temperature ladder. [0038] The influence of degree. According to the feature of the fourteenth aspect of the present invention, the temperature of the controlled object is controlled in the vicinity of the controlled object.

The apparatus is configured to include a heating passage that heats the fluid and loops the fluid at the temperature regulating portion; a cooling passage that cools the fluid and causes the fluid to be in the reference [0039] The temperature adjustment unit loops; the bypass passage 'the temperature adjustment unit loops without passing through the heating passages; the road is adjusted; the adjustment device is provided to the heating passages; The flow ratio of the fluid in the temperature control unit is adjusted. 098138159 In the fourteenth aspect described above, the temperature of the fluid supplied to the temperature control unit can be quickly changed by adjusting the flow rate ratio of the fluid supplied to the temperature control unit via the heating passage, the cooling passage, and the bypass passage. Further, in the fourteenth aspect described above, at least one of the contents described in the second to thirteenth aspects may be further increased. Further, the flow path of the confluent portion where the heating passage, the cooling passage, and the bypass passage merge with each other may be equal to or less than the sum of the flow passage areas of the upstream passages. Form No. Α0101 Page 13 of 57 0982065455-0 201019061 [Embodiment j [0040] (First Embodiment) [Effects of the present invention and the temperature-controlled weaving (four) embodiment will be described. [0042] The first figure shows that the overall configuration of the temperature control device according to the present embodiment is 0. [0043] The figure control device shown in the figure is used in, for example, the field of biotechnology or the chemical industry. In the process of manufacturing, manufacturing, biological chemistry, semiconductor manufacturing, or precision machine manufacturing. The temperature control unit has a temperature control. The control member is placed under the quilt (4) and exchanged with the controlled object at the request portion. The liquid supply medium (for liquid energy exchange capable of heat exchange) is preferably provided. The temperature medium)) the flow path (the m part 11), so that the soil can pass the φ teaching degree, although the temperature adjustment plate is adjusted 1〇❹1^44] the fluid flowing in the temperature regulating plate 1〇 passes through the return path 16 is supplied to the branching unit 18. The cooling passage 20, the bypass passage 3A, and the heating passage 4'' are connected to the branch portion 18. The cooling passage 20 is a passage that cools the fluid flowing from the branch portion 18 and flows out to the header portion 12. A cooling portion 22 is provided in the cooling passage 20 to cover a portion of the cooling passage 20. The cooling unit 22 cools the fluid flowing in from the branching portion 18. Specifically, the weir portion 22 is provided with a flow for cooling to a predetermined temperature. In addition, the object to be controlled is the chemical substance to be tested, the semiconductor piece, the precision machine, etc. - 098138159 Form No. A0101 Page 14 of 57 0982065455-0 201019061 [0047] [0048] On the other hand, the passage of the body (water, oil, refrigerant, etc.) flows through the fluid to make the cooling passage The fluid within 20 is cooled. The cooling passage 2 has a curved passage structure between the upstream end portion and the downstream end portion of the cooling portion 22, thereby expanding the volume in the cooling passage 20 in the cooling portion 22. Further, instead of the curved structure, for example, the volume in the cooling unit 22 may be enlarged by enlarging the flow path area only in the cooling unit 22. In the above, "upstream," and "downstream" refer to the rear and front of the flow direction with reference to the flow direction of the fluid, respectively. [0046] Further, in the cooling passage 2, the upstream side of the cooling portion 22 is provided continuously. Cooling for adjusting the flow path area in the cooling passage 2; the face piano 4. In addition, in the cooling passage 20, the temperature of the cooling of the cooling unit 22 is more than the cooling temperature: & The flow rate of the fluid in the flow rate of 20 or the flow rate of the flow rate of the flow meter a is different. The flow path area of the cooling passage 20 is substantially constant. The flow path of the bypass passage is called the flow passage portion 12 as it is. To the temperature regulating portion u flow (four) passage 4, the bypass upstream side is provided with a bypass chamber 34 for continuously adjusting the flow passage area in the bypass passage. Then, further downstream of the bypass valve 34 in the bypass paste The side is provided with a detection bypass material (10) (10) (4) temperature material path 36, and a bypass flow path 38 for detecting the bypass flow path 3. The amount of fluid inside the bypass flow meter 38. or the heat accumulation stream is a pair of people flowing from the branch portion 18 (4) Heat up and make it 098138159 Form No. A0101 Page 15 / Total 57 Page 0992065 455-0 201019061 The passage that flows out to the confluence portion 12. The heating portion 4G is provided with a heating portion "to cover the portion thereof. The heating unit 42 heats the fluid flowing in from the branching portion 而5, and the heating unit 42 is provided with a passage for flowing a fluid (water, oil, heat medium, or the like) heated to a predetermined temperature, thereby causing the heating passage 40 to pass through the fluid. The fluid inside is heated. The heating passage 40 has a curved flow path structure between the upstream end portion and the downstream end portion of the heating portion 42, thereby enlarging the volume in the heating passage 40 in the heating portion 42. Further, instead of the 5H curved structure, for example, the volume in the heating portion 42 may be enlarged by enlarging the flow path area only in the heating portion 42. [0050] Further, in the heating passage 40, the heating portion 42 is provided on the upstream side. Continuously adjusting the heating path: the flow path in 4〇, then heating the temperature sensor 4δ in the heating path 40 in the heating path 40, and the temperature sensing sensor 4δ in the heating path 40, and the detecting heating path 40 Flow meter for heating the flow rate or volume flow of the fluid inside

[0051] 48. . | , I | ij. 显 rl - 萧纤•^晷® sΓ II 围 ^ ί _ 『 € € In addition, the heating passage 40 is preferably on the downstream side of the dance part 42. Its flow "9. Emirates I Si *!»# | « :惠:' The road area is roughly constant Office

[0052] 098138159 The cooling passage 20, the bypass passage 30, and the heating passage 40 are connected by a confluence portion 12 located at a downstream position thereof. Here, the flow path area in the confluence portion 12, and the flow path area between the confluence portion 12 and the temperature adjustment portion 11 are preferably such that the cooling passage 20, the bypass passage 30, and the heating passage are not reduced in the range of the fluid flow rate. The flow path area of 40 is compared, and it is not expanded as much as possible. In other words, the flow path area between the bus portion 12 and the bus portion 12 and the temperature adjustment portion 11 is preferably set so as not to reduce the flow rate of the fluid flowing out from the cooling valve 24, the bypass valve 34, and the heating valve 44 as much as possible. To be able to suppress fluid form number A0101 due to its volume. Page 16 of 57 page 0982065455-0 201019061 [0053]

[0054] 098138159 stranded. 5倍以下。 The flow path area of the flow path 12, and the flow path area of the cooling passage 20, the bypass passage 30, and the heating passage 40 is set to 1.5 times or less. achieve. Between the above-described confluence portion 12 and the temperature adjustment portion 11, a pump 14 as a flow means is provided to circulate the fluid to flow the fluid. Here, the pump 14 may be, for example, a diaphragm pump, a vortex pump, a cascade pump (force only y - F technique > 7°), or the like. Further, a regulator 13 is connected to the passage between the bus portion 12 and the pump 14. The regulator 13 includes a container filled with a fluid. Although this container is filled with a fluid, it has a void in its upper portion and is filled with a gas. Therefore, even if the volume of the fluid changes due to a change in temperature, the change can be absorbed by the gas as the compressive fluid. Thus, by this, the fluid flow can be prevented from being hindered by the change in the volume of the fluid while the regulator 13 has the breath. The valve 13a inhales the gas when the pressure of the gas in the container becomes equal to or higher than a predetermined pressure, and inhales the gas when the pressure of the gas in the container becomes lower than a predetermined pressure lower than the predetermined pressure. The figure schematically shows '..Ϊ - 〇 r* f- ^r'-ί; It is actually preferable that the breathing valve 13a includes a pair of check valves, and the breathing valve is configured to include a diaphragm valve or the like. Further, the traveling direction of the connecting passage connecting the fluid flow path between the header portion 12 and the temperature regulating portion 11 and the regulator 13 is preferably substantially perpendicular to the flow direction of the fluid from the manifold portion 12 to the temperature regulating portion 11. Further, the flow path area of the above-described connecting passage is preferably equal to or smaller than the flow path area of the fluid circulation line between the confluent portion 12 and the temperature regulating portion 11. A supply temperature sensor 51 that detects the temperature of the fluid supplied to the temperature adjustment unit 11 is provided between the bus portion 12 and the temperature adjustment unit 11. That is, the supply temperature sensor 51 detects the temperature of the fluid in and/or near the temperature adjustment portion 11. Form No. A0101 Page 17 of 57 0982065455-0 201019061 On the other hand, the control device 50 passes the cooling valve 24 and the bypass valve 34 by the required value (required temperature Tr) according to the temperature of the controlled object. The heating valve 44 is operated to adjust the temperature of the fluid in the temperature regulating portion 11, thereby indirectly controlling the temperature of the controlled object on the temperature regulating plate 1A. At this time, the control device 50 appropriately refers to the cooling temperature sensor 26, the bypass temperature sensor %, the heating temperature sensor 46, the cooling flow meter 28, the bypass flow meter 38, and the heating flow meter. 48. The detection value of the supply temperature sensor 51 or the like 00 [0056] Further, the control device 50 includes a driving unit for swaying the cooling cymbal 24, the bypass valve 34, and the heating chamber 44, and The detection of various detection devices calculates the above-mentioned confession: ♦ 铋 4 Wen number calculation unit. This arithmetic unit can be dedicated or can be equipped with a microcomputer. In addition, it is also possible to have a versatile personal computer and software for performing calculations. One 1

Q

[0057] According to the temperature control device described above, the temperature change in the temperature control unit 11 rapidly cools the temperature of the fluid in the passage 20 to the required temperature T r to the temperature of the fluid in the range of *¢13⁄4 g 4 0 as the required temperature Tr In the above range, regardless of the required temperature Tr, the temperature in the temperature control portion 11 can be quickly changed to the desired temperature by adjusting the flow rate of the fluid from the cooling passage 20, the bypass passage 30, and the heating passage 40. [0058 Further, the temperature control device can reduce the amount of energy consumption when the temperature in the temperature control portion 11 is maintained by the bypass passage. This is explained below. 098138159 Form No. A0101 Page 18 of 57 0982065455-0 201019061 [0059] [0060] [0062] [0063] [0066] [0067] [0068] [0068] 098138159 4〇 ( °c) =10

3 ( °C ) X 0982065455-0 Now, it is assumed that the fluid circulating in the temperature adjustment portion 11 is water, the temperature in the cooling passage 20 is 10 ° C, and the temperature in the heating passage 40 is 7 ° C, and the temperature adjustment portion The flow rate of the fluid flowing in the inside of the tempering portion 11 is "20 L/min". In addition, it is assumed that the detected value Td of the supply temperature sensor 51 is controlled to "40 ° C" to achieve a steady state, and the fluid flowing out from the temperature regulating portion 11 The temperature rises to "43 ° C". In this case, temperature control can be performed by causing the fluid in the cooling passage 20 and the bypass passage 30 to flow to the temperature adjustment portion 11 without using the fluid in the heating passage 40. The energy consumption at this time was examined. Now, if the flow rate of the fluid flowing out from the cooling passage 20 to the temperature regulating portion 11 is "Wa", the following expression holds. 20 (L/min) X (20-Wa) Thus, Wa and "1.81/minute" For this reason, the energy consumption consumed in the cooling unit 22 is deducted as tnfeiiecfyci'·

Qa=(43 —1〇) XUX 6〇; (potential +/ 860 : transform coefficient)=4.lkW Office " Conversely 'the energy consumption of the cooling unit 22 without the configuration of the bypass path 3G The energy consumption amount Qc of Qa and heating portion 42 is as follows.

Qa= (43-l〇)x 10(L#)X 6〇(seconds)+ 86〇 and 23 kW QC= (7〇_43)X 10(L/min)x 6〇(seconds) 十860% 19 kff Therefore, the 'energy secret' is 42 kw, which is 10 times larger than the large form number A0101 on page 19 with a bypass pass. Next, the temperature control performed by the control device 50 according to the present embodiment details the processing procedure of the feedback control in the processing performed by the control device 5Q. Here, the reason control means 50 is repeatedly executed, for example, at a predetermined cycle. [0070] In the processing of this series, it is first determined in step S1 that it is open loop control. This processing is processing for judging whether or not the execution condition of the feedback control is established. Here, the open loop (four) is performed under the conditions described later, and the feedback control is not executed at this time. [0071] In step S10, the negative judgment is made as the inspection key supplied to the temperature sensor 51, and is calculated in (4) S14 for feeding back the detected value Td to the control operation amount rib. In Eph, the target value Tt is a value determined based on the required temperature Tr, and the wire requires temperature in the feedback control. The basic operation is based on the deviation of the detection = Td relative to the target value Tt to dismantle the calculation surface: 黉. Specifically, in the present embodiment, the quotient MB is calculated by detecting, ♦ reading, and the value of the Tt "" (proportional integral differential) operation.

Next, in step 16, the basic operation 4Μβ is converted into the respective operation amounts (opening degrees Va, Vb, Vc) of the cooling chamber μ, the bypass valve 34, and the heating valve 44. The relationship shown in the third figure is used here. Here, the opening degree Va of the cooling chamber 24 monotonously decreases as the basic operation amount MB increases less than 〇, and becomes 〇 when the basic operation amount 〇 is 〇 or more. This setting is to achieve the detection value Td than the target value of 11; the higher the flow rate of the cooling passage 2〇 is increased, and the detection value is the target value h to 098138159. Form number A0101 Page 20/57 pages 0982065455-0 201019061 ❿ [0073 ]

The cooling passage 20 is not used when it is down. Further, the opening degree of the heating valve 44. In the case where the basic operation amount MB is greater than 0, the monotonous increase is increased with the increase of the basic operation amount s. 'When the basic operation amount MB is 0 or less, it becomes "〇, _ _°° 疋疋 in order to achieve the detection value Td ratio When the target value Tt is lower, the flow rate of the heating passage 40 is increased, and when the detected value Td is equal to or higher than the target value, the heating passage 40 is not used. Further, the opening degree Vb of the bypass valve 34 deviates from 0 with the basic operation amount. In the third diagram, it is preferable to set each opening degree in such a manner that the total flow rate flowing out from the three paths does not change in accordance with the value of the basic operation amount. The Tongsen detection value Td and the target value are the difference Δ.· Β _W The single PID (proportional integral differential * ' can be set for the cooling valve 24, the side-off, the valve operation (quantity _:.__). The operation amount MB valve 44 three [0074] ❿ When the process of step S16 of the second figure is completed, the cooling off 24, the bypass valve 34, and the fine valve are operated in step si8. In the case where the processing in step 10 is completed or the processing of step sl8 is completed: / temporary processing Thus, by using the feedback control, the detected value Td can be made to follow the target value Tt with high precision. However, in order to improve the responsiveness of the detected value Td with respect to the change of the target value Tt by the feedback control, it is required to increase the gain of the feedback control. On the other hand, if the gain is increased, the fluctuation amount of the detected value Td fluctuates up and down the target value Tt becomes larger. Thus, in the feedback control, the responsiveness to the change of the target value Tt is increased, and the detected value Td is varied. The reduction is the relationship between each other (bab, only 7). Therefore, in the case of reducing the amount of variation, the responsiveness will be sacrificed. The fourth figure shows the target value Ding Xuan 098138159 Form No. 1010101 Page 21 / Total 57 pages 0982065455-0 201019061 The detection value Td& the change of the temperature of the controlled object when the feedback control is used. [0076] As shown in the figure, the response delay is generated before the detected value Td becomes the target value Tt, and is It takes a longer time before the temperature of the controlled object follows the target value. This is because 'in order to change the temperature of the controlled object, the temperature of the temperature regulating portion 11 must be changed. The heat exchange between the plate 10 and the temperature regulating portion 使 causes the temperature of the temperature regulating plate 10 to change, thereby generating heat energy exchange between the temperature regulating plate 1〇 and the controlled object. Therefore, since the amount of variation of the detected value is reduced Since the feedback control is set, it is difficult to quickly trace the temperature of the controlled object to the target value Tt β by the feedback control. In the present embodiment, in the case where the required temperature Tr changes, the two bad controls are adopted. At this time, 'the change with the required temperature Tr temporarily changes.

[0078] The fifth diagram does not show the sequence of the setting process of the target value "in the transition period" according to the present embodiment. This processing is repeated in a predetermined cycle by the sequel. „„ • ' :3⁄4 ϊ; i ί, Ά “ --7 ^ . Production t I In this series of processing, the first 4 in the step, the thorn 2 〇 judge the bias control

Whether the line flag is on. Here, the offset control execution flag is a flag for performing offset control for temporarily increasing the target value Tt. Then, in the case of disconnection, the process moves to step S22. In step S22, it is determined whether or not the absolute value of the change amount ΔΤγ of the required temperature Tr is equal to or greater than the threshold value α. This processing is used to judge whether or not the state in which the temperature of the controlled object cannot quickly follow the required change by the feedback control shown in the second figure before. Then, in a case where it is determined that the absolute value of the amount of change ATr of the required temperature Tr is equal to or greater than the threshold α, the bias control execution flag is turned off in step S24, and the offset 098138159 is started. Form number Α0101 Page 22 of 57 Page 0982065455-0 201019061 [0079] Φ [0080]

[0081] A timing operation that controls the time to perform timing. In the case where the above-described processing of step S24 is completed, or when an affirmative determination is made in step S20, it is judged in step S26 whether or not the amount of change ΔΤγ is larger than 〇. This processing is a process of judging whether or not a request for raising the temperature has occurred. Then, if the amount of change ΔΤι· is judged to be greater than 0, the process proceeds to step S28. In step S28, the target value Tt is set to a value obtained by subtracting a predetermined deviation value from the temperature of the fluid in the heating path 40. Here, the closer the target value Tt is to the temperature in the heating passage 40, the faster the temperature of the controlled object can be raised. However, the control cannot be performed in the case where the target value Tt is higher than the temperature of the heating passage 40. Thus, by circulating the fluid in the heating path 40, the hot side, the temperature in the path '40. Therefore, the target value Tt is set to the inner temperature low deviation value /8. On the other hand, if it is determined in step S26 that the amount of change ΔΤι· is 0 or less, 'in step S30_, the dirty_cooling path 20 The temperature of the fluid inside the high deviation value Τ h the setting of the offset value T and the setting of the above-described deviation value /3 The setting of the target value Tt by the processing of steps S28 and S30 continues in the offset duration Tbi (step S32). Then, when the offset duration Tbi has elapsed, the target value Tt is changed to the required temperature Td in step S34. In addition, the bias control execution flag is turned off and the timing operation for timing the offset control time is ended. Further, in the case where the processing of step S34 is completed, or the negative judgment is obtained in steps S22 and S32, the series of processing is temporarily ended. 098138159 Form nickname A0101 Page 23 of 57 0982065455-0 201019061 [0082] [0085] [0085] The sixth figure shows the processing sequence of the temperature control of the transition period according to the present embodiment. Here, the reason control device 50 is repeatedly executed, for example, at a predetermined cycle. In this series of processing, first, in step S40, it is judged whether or not the open-loop control flag as a flag for performing the open-loop control is turned on. Then, if the open loop control flag is not turned on, the process proceeds to step S42. In step S42, it is determined whether or not the absolute value of the change amount of the target value Tt is equal to or greater than the threshold value ε. When it is determined that the absolute value of the amount of change ATt of the target value Tt is equal to or greater than the threshold e, in step S44, the open-loop control flag as a flag for performing the open-loop control is turned on, and the open loop is started. The control time is counted as follows: "When the processing of step S44 is completed, or if it is known in step S4 () that the determination is affirmative, the process proceeds to step S46. In step S46, it is judged whether or not the target value Tt is higher than the temperature of the fluid in the bypass passage 30 detected by the bypass temperature sensor 36. It is judged to use the bypass I! I C+ only 1L; IJ: The bypass passage 30 and the heating passage are used to perform the opening and closing process using the bypass passage 3〇 and the cooling passage 2〇. Then, if it is determined that the target temperature Tt is higher than the rogue temperature Tb in the bypass passage 30, the process proceeds to step S48. The open loop control is performed using the bypass passage 30 and the heating passage 40 in step S48. That is, if the target temperature Tt is higher than the fluid temperature Tb in the bypass passage 30, the use of the cooling passage 20 can only cause waste of energy, and therefore the bypass passage 3 and the heating passage 40 are used for open loop control. Specifically, the temperature Tc of the heating temperature sensor 46, the flow rate Fc of the heating flow meter 48, the temperature Tb of the bypass temperature sensor 36, and the flow rate Fb of the bypass flow meter 38 are used to heat the form. No. A0101, page 24, page 57, 201019061 The valve 44 and the bypass valve 34 are operated such that the temperature of the fluid supplied to the temperature adjustment unit 11 becomes the target value Tt. Specifically, the heating valve 44 and the bypass valve 34 are operated to establish the following equation. [0087] ❹

Tt X (Fc + Fb) = Tc x Fc + Tb x Fb On the other hand, if it is determined in step S46 that the target temperature Tt is equal to or lower than the fluid temperature Tb in the bypass path 3A, the process proceeds to step S5. The bypass path 30 and the cooling path 2 使用 are used in step S50 to perform open loop control. That is, if the target temperature Tt is the temperature of the fluid in the bypass passage 30 "below", then the use of the heating passage 4Q can only cause waste of energy, so the bypass passage 30 and the cooling passage 2〇5| (4) The temperature damper 2 6 Θ the flow rate Fa of the meter 28 and the temperature sensing for the bypass; |36 the flow rate Fb of the two bypass flow meter 38 operates the cooling valve 24 and the bypass valve 34 so that The temperature of the fluid supplied to the temperature adjustment unit 11 is changed to a target value. In other words, the following equation is established for the cold portion valve 44 and the bypass valve. ❸[0088] [0089]

Tt X (Fa + Fb) = Ta x When the processing of steps S48 and S50 described above is completed, the process proceeds to step S52. It is judged in step S52 whether or not the predetermined period has elapsed. 1) Here, the predetermined period Top determines the time during which the open loop control continues. In the present embodiment, the predetermined period Top is set to be longer than the offset duration Tbi to avoid shifting to the feedback control within the offset duration Tbi set by the processing shown in the previous fifth diagram. Then, when it is determined that the predetermined period τ 〇 ρ has elapsed, the open loop control flag is turned off in step S54, and the open loop control is ended 098138159 Form No. Α0101 Page 25 / Total 57 Page 0982065455-0 201019061 Timing action for timing. [0095] In addition, in the case where the processing of step S54 is completed or in the case where a negative determination is obtained in steps S42' to S52, the series is temporarily terminated. deal with. The seventh figure shows the temperature control state when the processes of the sixth and fifth figures are used in combination. As shown in the figure, the temperature of the controlled object can be quickly followed by the target value Tt as compared with the case shown in the fourth figure. According to the embodiment described in detail above, the following effects can be obtained

(1) The temperature-controlled front mounting device of the present embodiment #: heating the flow raft and looping it to the rotation of the temperature portion 11 by 4 @ each fluid is cooled and looped to the adjustment portion 11 The heating passage 40 and the cooling passage 2 circulate the fluid to the bypass passage 3〇 of the temperature adjustment unit 11, and the heating passages 44 are cooled by the respective passage areas of the heating passage 40, the cooling passage 20, and the bypass passage 30. Valve 24 and bypass valve 34 » lif 111' | Thus, in the expected control of the controlled object Pipo Temple, the temperature of the controlled J Λ f 》Jn * l . object can be quickly chased: Every 1 degree. ’

v/tf:: (2) A pump 14 is provided in the heating passage 4' on the downstream side of the heating portion 42 for heating the fluid. Thereby, the influence of the pump 14 on the fluid attractive force can suppress the pressure rise of the heating passage 40 located in the heating portion 42. Therefore, the withstand voltage required for the heating passage 40 in the heating portion 42 can be reduced. (3) The heating valve 44 is provided on the upstream side of the heating unit 42. Thus, the effect of the pump 14 to lower the pressure of the heating passage 4 located in the heating portion 42 can be prevented from being disturbed by the heating valve 44. 098138159 Form No. A0101 Page 26 of 57 0982065455-0 201019061 [0096] (4) The regulator 14 is provided upstream of the pump 14 with a function of absorbing the volume change function of the fluid caused by the temperature as a volume change absorption means. Even if the fluid volume changes, the loop of the flow can be well maintained. (5) The pump 14 is provided on the downstream side of the manifold 12, whereby the fluid can be circulated well by the single pump 14 via the cooling passage 20, the bypass passage 3〇, and the heating passage 4〇. (4) (4) When the bypass passage 30 used when the (four) passage 4〇 and the bypass passage 30 are supplied to the temperature adjustment unit 11 and the fluid are supplied from the cooling passage 2〇 and the bypass passage 30 to the temperature adjustment unit U are used. The bypass path is shared. When the &'s temperature is 11 and the fluid is passed from the cooling passage to the temperature control unit 11, the bypass of (4) can be used. The structure of the temperature control device can be simplified by using the respective bypass passages.闺(7) The detection-feedback control detected by the supply temperature sensor 51 that detects the _temperature in the vicinity of the temperature adjustment unit η enables the detection value Td to follow the target with high precision.

% /fflCG

[〇 (8) In the above feedback control, the basic operation surface that deviates from the measured value Td and the target value (four) is converted into the heating material 4D, the cooling passage 20, and the bypass flow path area operation amount (opening degree) ν& , ^,

Vc). Thus, the flow path area of the above three paths can be adjusted (operated) in accordance with a single basic operation amount MB. [Just (1) The predetermined period of time from the change of the target value Tt, the temperature of the fluid in the vicinity of the temperature control unit 11 is opened and closed based on the detected value of the temperature sensing (4) for bypass detection of the temperature of the bypass passage 30. _system. 098138159 Form No. A0101 Page 27/Total 100' Ά 0982065455-0 201019061 Therefore, even if the feedback control is suppressed in order to suppress the fluctuation of the detected value Td in the target up and down, it is possible to improve the response when the target value Tt changes. [0102] () In the case where the temperature of the fluid in the bypass passage 30 is higher than the target value, 'opening f control by operating the flow passage area of the bypass paste and the cold feed path 2Q, in the bypass When the temperature of the fluid in the passage 3 () is lower than the target value, the open loop control is performed to a target value by operating the flow passage area of the bypass passage 3G and the heating passage 40. Thereby, as much as possible [0103] [0105] [0106] The energy > energy consumption can be reduced and the loop control can be performed. (11) When the temperature is adjusted to the temperature of the temperature control value 11, the target value is made larger than the required change so that the temperature adjustment unit 11 and the controlled temperature are more rapidly adjusted. (Second Embodiment) Next, a second example will be described with reference to the drawings in which the differences from the first embodiment are focused. c·. „,: 卜Ί The eighth diagram shows the overall configuration of the Tandu control device according to the present embodiment. As shown in the figure, in the present embodiment, the cooling passage 2 is cooled.

An outflow passage 60 that bypasses the cooling valve 24 to flow a fluid is connected between the upstream and downstream of the valve 24. Further, in the heating passage 40, between the upstream and downstream of the heating valve 44, an outflow passage 62 through which the heating crucible 44 flows the fluid is connected. [0107] These outflow passages 60, 62 are all sufficiently smaller than the flow passage area of the cooling passage 20 and the heating passage 4''. This is because when the cooling valve 24 or the heating valve 44 is closed, the outflow passage 60'62 enables the fluid to be finely cooled from the 098138159 form number A0101 page 28/57 page 0982065455-0 201019061 passage 20 or heating path The upstream side of 40 flows to the downstream side.

[0108] That is, when the fluid is prohibited from flowing out from the heating passage 40 or the cooling passage 2 to the temperature regulating portion 11, the heating portion 42 or the cooling portion 22 and the vicinity of the converging portion 12 in the heating passage 40 or the cooling passage 2? A temperature gradient is created between them. Therefore, the time required for the temperature of the temperature regulating portion 追 to follow the expected temperature is prolonged after the prohibition is just released because the temperature of the fluid flowing out to the temperature regulating portion is affected by the temperature gradient. Further, in this case, since the temperature of the cooling temperature sensor 26 or the heating temperature sensor 46 is affected by this temperature gradient', the detected temperature will deviate from the temperature in the cooling portion 22 in the cooling passage 20. Or the temperature in the heating portion 42 in the heating passage 4〇. Therefore, there is also the controllability of open-loop control when it is possible to change. On the other hand, in the present embodiment, by having the outflow passages 6A, 62, the temperature gradient of the heating passage 40 or _ can be appropriately suppressed when the heating valve 44 or the cooling valve 24 is in the closed state. Further, it is possible to make the temperature of the temperature adjustment unit 11 and predict the temperature. [0110] According to the present embodiment described above, in addition to the effects (1) to (11) of the first embodiment, it is possible to obtain The following effects. (12) The outflow passages 60 and 62 that bypass the cooling valve 24 and the heating valve 44 are provided. Thereby, the temperature control at the time when the beam value is changed can be more appropriately performed. (Third Embodiment) [0113] Hereinafter, a third embodiment will be described focusing on differences from the first embodiment with reference to the attached circle. 098138159 Form No. A0101 Page 29/57 Page 0992065455-0 201019061 [01114] [0116] [0118] [0120] [0120] 098138159 Form No. A0101 The basic operation amount involved in the implementation The relationship between the cooling valve 24, the bypass valve 34λ^, and the opening degrees Va, Vb, and Vc of the heating valve 44. As shown in the figure, in the present embodiment, the opening degree Vc of the cooling valve 24 (four) 44 is set so that they do not become constant, and the opening degree Va of the state # cold portion valve 24 is less than 0 in the basic operation amount MB. As the basic operation amount MB increases, the monotonous decrease is the minimum opening degree (> ◦) in the case where the basic operation amount MBSG or more. In addition, the opening degree Vc of the heating valve 44 monotonously increases as the basic operation amount MB increases in the case where the basic operation amount is larger than 〇, and is the minimum opening degree when the basic operation amount Ο is 0 or less (> 〇 ). Therefore, it is not necessary to have the outflowing wheat crucible: 62, which can be controlled by the temperature in the fluid flow portion from the bypass passage 30, and the cooling valve 24 or the heating chamber during stabilization can be stabilized. The temperature gradient on the upstream side of 44. According to the present embodiment described above, in addition to the effects (1) to (11) of the first embodiment, the following effects are obtained. (13) The opening of the cooling valve 24 is set. The degree Va and the opening degree Vc of the heating valve 44 are such that they do not become fully closed. Thus, the temperature gradient of the upstream side of the cooling valve 24 or the heating valve 44 can be suppressed, and the temperature regulating unit 11 can be further The temperature is rapidly followed by the expected temperature. (Fourth Embodiment) A fourth embodiment will be described below with reference to the drawings 'with a difference from the first embodiment.' In the above-described first embodiment, 'when the target value Tt changes When the temperature near the temperature control unit 11 is controlled by the open loop on page 30/57, the temperature of the controlled object quickly follows the expected value. The control gain of the open loop control, the offset duration ΤΐΜ, The optimal value of the top period of the open loop control for the predetermined period depends on the temperature regulating plate 10 or the controlled object. On the other hand, when the controlled object is changed by using the test, the parameters are manually changed, thereby adapting to this. of Therefore, in the present embodiment, the adaptive support function is built on the control device 5A. The tenth diagram shows the processing procedure of the adaptive support according to the present embodiment. 5 Example e [0121] If it is repeatedly executed in a predetermined cycle. In this series of processes, 'Firstly, in step S7, it is judged whether it is an adaptive mode for performing the above-described open-loop control, for example, in controlling the cold 50. The operation unit performs the function for instructing the current ▲ mode. It is only necessary to judge the presence or absence of the test mode. Then, when it is determined to be the test mode, the offset duration is set in step S72.

The candidate for Tbi is displayed in the user's visually-friendly device. The controlled object of #/. '.L. 1^. /J. - * * I ^ Γ' is assumed to be preset in the range of U1 $ axe [0122] in step S74. It is judged whether there is an input of the offset duration Tbi. This processing is processing for judging whether the user has selected one of the offset duration Tbi candidates. Then, when it is determined that the user has selected a specific candidate (step S74: YES), the temperature control is started using the selected candidate in step S76. Then, at the end of the temperature control, in step S78, the user visually recognizes whether or not the user decides the offset duration Tbi. Then, when it is indicated by the meaning of the user's rotation (step S80: No), the preparation * update execution 098138159 Form No. A0101 Page 31 / Total 57 page 0982065455-0 201019061 Processing of the above steps S72 to S78 . [0129] In contrast, one of the candidates that have been selected up to then is input as a final offset by the user. In the case of the instruction of the time Tbi (step S80: YES), the offset duration Tbi is stored in step S82. In addition, when the process of step S82 is completed or when it is judged as negative in step S70, the series of processes are temporarily terminated, according to the above-described embodiment, except for the above-described first embodiment ( In addition to the effects of 1) to (11), the following effects can be obtained. (14) An open-loop control adaptive support function for causing the user to select one of a plurality of options for the offset duration Tbi and perform temperature control based on the selected value is included. Thereby, it is possible to reduce the labor force when the user of the temperature control device adapts the open-loop control according to the controlled object. (Other Embodiments) Further, each of the above embodiments may be implemented as follows. The second and third embodiments may be modified by the above-described fourth embodiment from the modification of the first embodiment. In the fourth embodiment described above, the adaptive parameter at the time of performing the open-loop control adaptive support is used as the offset duration Tbi, but the present invention is not limited thereto. For example, the duration of the open loop control (predetermined period Top) can also be used as an adaptive parameter. Further, for example, the setting of the target value (offset value, T) in the bias control shown in the fifth figure may be used as the adaptive parameter. Further, a plurality of these parameters may be used as the adaptive parameter 098138159. Form No. A0101, page 32/57 pages 0982 (201019061) In the fourth embodiment described above, support is provided to enable the user to be charged. The object selects an appropriate adaptive parameter, but the adaptive method is not limited thereto. For example, when the initial value is arbitrarily set for each of the offset duration Tbi, the predetermined period Top, and the deviation value and the r parameter, temperature control is performed. 'Monitoring the temperature of the controlled object (or the temperature of the temperature regulating plate 10), when the delay time following the target value is not within the allowable range, performing a process of automatically changing at least one of the above parameters" The ground is adaptive to the open loop control so that the [0131] delay time following the target value is within the allowable range, labor force. In each of the above embodiments, and because of the numeracy:

The fluid temperature detection value τ d upstream of the temperature adjustment unit 回 is fed back and controlled to the target value T t . For example, the flow temperature detection value feedback in the temperature adjustment unit U may be controlled to φ [0132] target value Tt. Further, for example, it is also possible to control the fluid temperature detection value feedback control in the above-described respective embodiments. In the above embodiments, the pump 14 and the regulator 13 are disposed downstream of the dam junction unit 12. For example, respective pumps and regulators may be provided in the cooling passage 2, the bypass passage 30, and the heating passage 40, respectively. In this case, for example, for the bypass passage 30, the pump and the regulator may be provided on the upstream side of the bypass valve 34. Further, for example, for the cooling passage 2, a pump and a regulator may be provided between the cooling portion 22 and the cooling valve 24. Further, in the cooling passage 20, a pump and a regulator may be provided on the upstream side of the cooling valve 24. Even in this case, by providing the pump downstream of the heating portion 42 of the heating passage 4, the pressure rise of the heating passage 40 can be suppressed, and the heating passage 40 can be lowered by the form number A0101, page 33/57, 0982065455-0, 201019061. The required pressure resistance. [0133] In each of the above embodiments, the cooling passage 2A, the bypass passage 30, and the heating passage 4 are not limited to being joined at one place. For example, after the cooling passage 20 and the bypass passage 3 are merged, the cooling passage 20 may be merged with the heating passage 40 downstream. Even in this case, it is preferable to minimize the flow path area of the confluence portion so as not to reduce the flow velocity of the fluid flowing in through the heating passage 4, the cooling passage 20, and the bypass passage 3 as much as possible. The flow velocity of the fluid referred to herein means the flow velocity of the flow in the flow direction. [0134]

The method of converting the basic operation amount MB into the operation manure of the cooling valve 24, the bypass valve 34, and the heating valve 44 is not the same as that of the third and ninth drawings. In the third diagram and the ninth, the amount of change in the temperature difference Δ between the target value T t and the detected value Td, the bypass valve 34, and the heating valve 44 are changed, but Not limited to this, for example, it is also possible to change all the amounts of operation. In addition, in the first

In the three figures and the ninth hour cooling, the operation amount of the heating chamber 44 is the number of the temperature difference Δ, but it is not limited to this. The relationship between the variation of the wide door opening amount is nonlinear. In particular, it is preferable to use the above-described respective manipulation amounts as a nonlinear function of the temperature difference Δ. [0135] 098138159 In the third embodiment, the cooling valve 24 and the heating valve 44 are prohibited regardless of the basic operation amount MB. It becomes fully closed, but it is not limited to this. It is also possible to prohibit the cooling valve 24 and the heating valve 44 from being fully closed only when the basic operation amount MB is in the vicinity of 〇. That is, before the required temperature Tr is changed, since the detected value Td follows the target value Tt and the detected value Td becomes a steady state, it is possible to prevent the form number A0101 only in this case, page 34/total 57 π 0982065455-0 I201019061 The change of the target value Tt is such that the cooling valve 24 and the heating valve 44 are in the fully closed state only when the basic operation amount MB is in the vicinity of zero. Further, at this time, preferably, in the case where the basic operation amount MB is less than 0, the amount of change in the operation amount of the valve 24 is made larger than the amount of change in the operation amount of the heating valve 44, and the basic operation amount MB is larger than In the case of 0, the amount of change in the amount of operation of the heating valve 44 is made smaller than the amount of change in the amount of operation of the cooling valve 24. [0136] In each of the above embodiments, the reservation of the continuous open loop control is independently set

The period Top and the offset duration Tbi, but not limited to this, can make them consistent. [0137] The feedback control is not limited to the PID control <jN as well as / is the f I control or J control. Here, for example, in the configuration in which the open loop control is performed in the transition period in which the target value is changed as described above, the purpose of the feedback control is to accurately match the detected value Td with the target value Tt in JL at all times, and

As much as possible, the detected value Td feedback control is made effective for the target edge based on the cumulative value indicating the amount of the detected value Td and the target value T?t as much as possible. [0138] The open loop control is not limited to that exemplified in the above embodiment. For example, the flow rates of the cooling valve 24, the bypass valve 34, and the heating valve 44 (opening degrees Va, Vb, Vc) and the basic operation amount can be grasped by the relationship shown in the first figure and opened. control. Specifically, when the temperature of the fluid in the bypass passage 30 is higher than the target value Tt, the opening degree of the cooling valve 24 and the bypass valve 3〇 is set with reference to the opening ratio shown in the third figure. In the case where the temperature of the fluid in the bypass passage 30 is lower than the target value Tt&, the heating interval 098138159 is set with reference to the opening ratio shown in the third figure. Form No. A0101 Page 35/57-page 0982065455-0 201019061 The position of the coffee. When there is a ship, the fluid flowing in the bypass path, and the target value Η, the temperature Tux of the 4G and the temperature Tb of the bypass path 3G are used on the basis of the set target value plus, the heating path 40 and the bypass path 3G are used. The required flow ratio is (Tt-Tb): (Tc - therefore 'in the third diagram, by using the ratio of (Tt-Tb): (Tc Tt) to the basic manipulated amount 〇 "〇,, The opening degree Vc of the heating chamber 44 and the opening degree Vb of the bypass boring 34 at the dividing point of dividing the green of the largest one are easy to perform open loop control. In particular, according to this, even the valve There is no linear relationship between the opening and the flow. The tenth system shown in the third figure reflects the opening of the non-linear system between the opening of the door and the flow. In particular, through this hand. Since the flow meter is immersed in the (four) towel, it is difficult to maintain reliability over a long period of time in the entire temperature range between the heating temperature and the temperature of the fluid in the cooling passage 20, and therefore, it is preferable to simply use the flow meter without using a flow meter. Open loop control.:;v! p〖丨.r, f" Ί [0139]

In addition, the ρ degree ratio of the rugged f of the third graph may not be used. For example, in the case where the fluid temperature in the bypass passage 30 is higher than the target value: according to the fluid temperature in the cooling passage 20 relative to the target value The opening degree of the cooling valve 24 and the bypass valve 30 is set by the ratio of the difference of Tt and the difference of the target value Tt with respect to the fluid temperature in the bypass passage 30. Similarly, the difference between the fluid temperature in the bypass passage 30 and the target value Tt and the target value Τΐ relative to the fluid in the heating passage 40 can be made in the case where the fluid temperature in the bypass passage 30 is lower than the target value h. The opening ratio of the heating crucible 44 and the bypass valve 30 is set in proportion to the difference in temperature. Thus, the valve opening degree can be set between the valve opening degree and the flow rate 098138159 Form No. Α0101 Page 36/57 page 0982065455-0 201019061 Assuming a linear relationship. [0140] It is not limited to the feedback control, and only the open loop control illustrated in steps S48 and S50 of the sixth diagram may be performed. Further, regardless of whether or not the target value has changed e, the basic operation amount determined by the open loop control exemplified by steps S48, S50 of the sixth diagram can be corrected by the feedback control to calculate the final basic operation amount MB. Further, conversely, feedback control can be performed only regardless of whether or not the target value has changed. Even in this case, when the required temperature Td is changed, the above-described bias control which makes the target value Tt larger than the required temperature Td is effective. That is, in the feedback control, although the response delay is lowered and the detected value Td is decreased, the change in the target value Tt is

A trade-off relationship, but it can reduce the response delay by comparing it with the benefit of -i; control increases the above-mentioned changes and can reduce the response delay. Further, when the target value becomes large, a process of temporarily increasing the gain of the feedback control can be performed. Thus φ [_ , which achieves a reduction in response delay and is compatible with both % low net Inie lectua changes.乂*·--strict wProperty feedback control is not limited to the amount of operation for converting the required amount (the basic control U value Td with respect to the target value Tt amount MB) into the cooling valve 24, the bypass valve 34, and the heating valve 44. Come on. For example, the amount of operation of the cooling valve 24, the bypass valve 34, and the heating valve 44 may be individually set based on the degree of deviation between the target value Tt and the detected value Td. However, in this case, preferably, when the target value Tt is higher than the detection value Td, only the operation amount of the bypass valve 34 and the cooling valve 24 is changed; the target value Tt is lower than the detection value. In the case of the value Td, only the operation amount of the bypass valve 34 and the heating valve 44 is changed. 098138159 Form No. A0101 Page 37/57 Page 0992065455-0 201019061 [0142] 3〇It Bu fluid-passage 4g and bypass path supply both the bypass of the coffee temperature part (4) and the fluid (1) The material 3G is used for sharing on both sides, but it is not limited to this. For example, when the fluid is supplied to the coffee temperature unit u from the passage (4) and the bypass passage (4), the bypass used by the bypass can be used to supply the heat supply unit. A part of the bypass bypass can share H as a separate path. Even in this case, the effects of (7) to (1) of the previous P embodiment can be obtained. () ❹ [0144] The gastric volume change absorption device is configured such that the TMμ material is set to evacuate the fluid into the container: the liquid is filled with gas (4). For example, it is also possible to change from a structure in which the liquid is filled in the container without gaps and the body (4) of the container is variable depending on the force applied to the wall by the fluid. This _ can also be the same component of the case 100 as shown in the twelfth figure. ^ / 1 iJftiCCi In the above embodiments, the pair of cooling passages 20 and bypass passages (10)

The adjustment means "the flow rate of the fluid supplied to the temperature regulation plate (i) by the heating passage 40 is adjusted by the cooling (4) 24, the bypass passage 34, and the heating valve 44, but is not limited thereto. For example, an adjustment device capable of adjusting the flow path area stepwise may be employed. Further, for example, a plurality of these passages may be provided, and a valve for opening and closing the two operations is provided in each of the passages, and the number of passages for supplying the fluid to the temperature adjustment portion 10 is used as the operation amount. Further, a plurality of passages may be provided and the respective passages may be connected to the cooling unit 22, the heating 098138159, the form number A0101, the 38th page, the 57th page, the 0982065455-0, the 201019061 portion 42, and the downstream side of the branching portion 18. . Further, as shown in FIG. 11, the cooling passage 2, the bypass passage, and the heating passage 40 may each be provided with a pump 70' 72, respectively. 4. Adjust the flow ratio by operating its discharge capacity separately. The eleventh diagram shows an example in which the regulator 76 is provided between the spring 7 and the cooling portion 22, and the upstream side of the pump 72 has an adjuster 78. The regulator 80 is provided between the pump 74 and the heating portion 42. Here, the pumps 70, 72, and 74 can be filled with any pump that can be operated with a discharge type such as a flow type or a volumetric type. However, if it is configured to stop the pumps 70, 72, 74 so that

When the discharge amount is zero, the fluid does not leak from the upstream side to the downstream side, and the discharge amount can be controlled well from zero to a positive value. In addition, the amount of tearing can be reduced by the valve at the discharge port of the pump. In addition, as long as the pump is stopped, the upper side of the pump is leaked to the downstream side of the pump, and the effect of the third embodiment is obtained. 1 [0146]

Further, the temperature regulating plate 10 is not limited to, for example, a disk shape. Moreover, the plate-shaped member that can support the controlled object under the temperature adjustment portion can also directly contact the plurality of sides of the controlled object to control the temperature thereof. BRIEF DESCRIPTION OF THE DRAWINGS [0147] The first diagram is a diagram showing the entire structure of the temperature control skirt according to the first embodiment. [0148] The second flowchart is a flowchart showing the processing procedure of the feedback control according to the first embodiment. [0149] The third diagram is a diagram showing an operation amount setting method of a cooling valve, a bypass 阙 098138159, a form number A0101, a 39th page, a 57th page, a 0982065455-0-0 201019061, and a heating valve according to the first embodiment. [0150] The fourth diagram is a time chart showing the temperature transition of the controlled object or the like when the temperature control is performed only by the feedback control in the first embodiment. The fifth diagram is a flowchart showing the procedure of setting the target value in the first embodiment. The sixth diagram is a flowchart showing the processing procedure of the open loop control in the first embodiment. [0153] The seventh diagram is a time chart showing the temperature transition of the controlled object or the like in the case where the above-described open loop control is used in combination. [ Fig. 8] Fig. 8 is a view showing the overall configuration of a temperature control device according to a second embodiment. [Fig. 9] Fig. 9 is a view showing an operation amount setting method of a cooling valve, a bypass valve, and a heating valve according to the third embodiment. [0156] The tenth diagram is a flowchart showing the procedure of the adaptive support processing of the open loop control according to the fourth embodiment. [ Fig. 11] Fig. 11 is a view showing the overall configuration of a temperature control device according to a modification of each of the above embodiments. [Twelfth] FIG. 12 is a view showing a configuration of a conventional temperature control device. [Description of Main Element Symbols] [0159] < Conventional > [0160] Storage Box 100 [0161] Pump 102 098138159 Form No. A0101 Page 40 / Total 57 Page 0992065455-0 201019061 [0162] Heating Section 104 [0163] Temperature adjustment unit 106 [0164] Cooling unit 108 [0165] <The present invention> [0166] Temperature regulation plate 10 [0167] Temperature adjustment portion 11 [0168] Confluence portion 12 ® [0169] Regulator 13 [0170] r; Breathing Valve 13a [0171] Pump 14 [0172] Return Path 16 [0173] Divergence 18 11 ^ 1 %-^y : 4 1 1 %J %J 1 [0174] Cooling Path 20 [ 0175] Cooling unit 22 [0176] Cooling valve 24 [0177] Cooling temperature sensor 26 [0178] Cooling flow meter 28 [0179] Bypass passage 30 [0180] Bypass valve 34 098138159 Form No. A0101 Page 41 of 57 0982065455-0 201019061 [0181] Bypass Temperature Sensor 36 [0182] Bypass Flowmeter 38 [0183] Heating Path 40 [0184] Heating Section 42 [0185] Heating Valve 44 [0186] Heating Temperature Sensor 46 [0187] Heating Flow Meter 48 [0188] Control Device 50 [0189] Supply Temperature Sensor 51 [0190] Outflow Path 60 [0191] Outflow Path 62 [0192] Pump 70 , 72, 74 [0193] Regulators 76, 78, 80

098138159 Form No. A0101 Page 42 of 57 0982065455-0

Claims (1)

201019061 VII. Patent application scope: • A temperature control device for predicting the temperature of the controlled object by circulating a fluid in a temperature regulating portion disposed near the controlled object, the temperature control device comprising: a heating passage Heating the fluid and circulating the fluid at the temperature regulating portion, the cooling passage 'cooling the fluid and looping the fluid at the temperature regulating portion; ❿ 旁路 bypass passage 'making the fluid Looping in the temperature regulating portion without passing through the heating passage and the cooling passage; adjusting means for providing a flow screen from the heating passage and the bypass passage; and flowing Means for flowing the fluid in a ring, the heating passage being provided with a heating portion 'for heating the fluid, the flow device being disposed downstream of the reading and heating in the loop path of the fluid side. The package temperature control device according to claim 1 includes a flow regulating device, the flow rate of the fluid supplied from the heating passage to the enthalpy portion and the flow rate adjustment The rupture is provided on the upstream side of the heating portion. 3. The temperature control device according to claim 1, wherein a volume change absorbing means is provided in a loop path of the fluid, and the volume change absorbing shock is capable of absorbing a volume change of the fluid due to temperature. 4. The temperature control device according to claim 1, wherein 'the heating passage and the cooling passage are provided with an outflow passage, the outflow passage bypassing the adjusting device to cause the fluid to flow from an upstream side thereof to Downstream side. A temperature control device according to claim i, wherein fluid is supplied from the heating passage and the bypass passage to the temperature control portion, 098138159. The bypass passage used at the time and the bypass passage used when the fluid is supplied from the cooling passage and the bypass passage to the temperature control portion include a common passage. The temperature control device according to claim 1, further comprising an operation device that operates the adjustment device to control a fluid temperature in the vicinity of the temperature control portion to a target value. The temperature control device according to claim 6, wherein 'further includes a supply temperature detecting means for detecting a temperature of a fluid in the vicinity of the temperature regulating portion, the operating means supplies the supply; and the detected value of the temperature detecting means is fed back Control is wrapped around the target value; • Temperature control as described in claim 7: The adjustment device is a device that adjusts the area of each channel of the heating path, the cold, and the bypass path. The operation device includes a conversion device that converts an amount based on a degree of deviation of the detected value from the target value into a heating path, and a flow path area operation amount of each of the bypass paths. ΓΚ). As described in claim 7, the temperature control device operates the predetermined time period from the change of the target value, and operates the adjusting device to detect the bypass path temperature according to the temperature of the bypass path. The detected value of the device is open-loop controlled to control the temperature of the fluid in the vicinity of the temperature regulating portion instead of the feedback control. 10. The temperature control device of claim 9, wherein the bypass passage and the cooling are passed during the predetermined period when the fluid temperature in the bypass passage 098138159 is higher than the target value The flow rate of the fluid supplied to the temperature regulating portion is operated to perform open loop control, and the fluid temperature of the form number Α0101, page 44/57 pages 0982065455-0 201019061 in the bypass passage is lower than the target At the time of the value, the open loop control is performed by operating the flow ratio of the fluid supplied from the bypass passage and the heating passage to the temperature regulating portion during the predetermined period. 11. The temperature control device according to claim 9, further comprising an open loop control adaptive support device 'the open loop control adaptive support device output signal to urge external gain for the open loop control, the opening One of a plurality of options is selected by one of the duration of the loop control and the setting of the target value at the time of the open loop control, and the temperature control is performed based on the selected value. ❹12. The temperature control device according to claim 6, wherein the transition target value setting is further included, and the transitional beer is marked with a change in temperature related to the temperature of the temperature control unit. The required change more makes the target value change. The temperature control device according to claim 6, wherein the operation device prohibits the heating of the passage 14 and the cooling in a case where the temperature of the temperature adjustment portion is in a stable state. Through the routing, the adjustment *casting area becomes 〇. The temperature control according to claim 2, further comprising: operating the device as the device monitoring device operates to control the temperature of the fluid in the vicinity of the temperature control portion to a target value; and supplying the temperature detecting device The supply temperature detecting means performs (four) on the flow m in the vicinity of the temperature control unit, and the operation device controls the detection value feedback of the supply temperature detecting means to the target value. The temperature control device according to claim 14, wherein the adjusting device is a device that adjusts an area of each of the heating passage, the cooling passage, and the bypass passage, and the operating device includes a transformation Device, 2 098138159 15 . Table straw SfeA_ ^ 45 I/* 57 ΐ 0982065455-0 201019061 The conversion device converts the flow based on the detected value and the amount of deviation of the heating path and the cold binary value Road griffin. The passage and the bypass passage each of the temperature control devices 16 17 18 wherein the operating device is predetermined from the change of the 2 value, and the adjusting device is operated to calculate the temperature of the material. The detected value of the material temperature detecting means opens and closes the temperature of the fluid in the vicinity of the temperature regulating portion to replace the feedback control. The temperature control device of claim 3, further comprising: the device 'the operating device pair' is installed to supply the temperature of the fluid near the temperature control portion to the temperature detecting device, the supply; ^4. The temperature of the flow rate in the vicinity of the temperature control unit is detected. The detection value of the supply temperature detecting means is controlled as the target value. The temperature control device according to claim 17, wherein The adjusting device is a device for adjusting the flow path area of the pure road and the engraved path, and includes a conversion device, wherein the conversion device converts the amount based on the degree of deviation of the detection target value into the The temperature control device of the heating passage, the cooling passage, and the bypass passage, respectively. The temperature control device according to claim 17, wherein the operation device passes the predetermined period of time after the change of the target value Actuating the adjusting device to open-loop control the temperature of the fluid in the vicinity of the temperature regulating portion according to the detected value of the bypass path temperature detecting device that detects the temperature of the bypass passage The feedback control. 098138159 Form No. A0101 Page 46 of 57 0982065455-0