TW201017150A - Thin film optical inspection apparatus - Google Patents

Abstract

A thin film optical inspection apparatus suitable for inspecting a thin film sample is provided, wherein the thin film optical inspection apparatus includes at least a multi-wavelength light source, a dispersion-collimation module, a multi-channel polarization rotation module, a multi-channel phase retardation module, a convergent-collimation module, a polarization module and an imaging spectrograph. The multi-wavelength light source provides a light beam with multiple wave bands to the dispersion-collimation module suitable for splitting the light beam to multiple sub light beams corresponding to the wave bands. The multi-channel polarization rotation module is suitable for modulating the polarized azimuth of the sub light beams respectively. The multi-channel phase retardation module is suitable for modulation the phase retardation or the phase retarded azimuth of the sub light beams respectively. The convergent-collimation module is suitable for integrating the sub light beams to an convergent beam which is incident to the thin film sample. The polarization module is suitable for modulating the transmission of the integrated beam with different polarized types, and the imaging spectrograph is suitable for receiving the convergent beam to form a multi-wavelength image.

Description

201017150 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD The present invention relates to a thin film optical inspection apparatus. [Prior Art] Thin film process inspection in flat display H, semiconductor, printed circuit board and It plays a very important role in major science and technology industries such as biomaterials science. As the film process is multi-layered, the pattern is miniaturized, and the conventional use of white light reflection ~ image method for online defect detection gradually encounters a bottleneck. Due to the transparent conduction and the detection of metal electrodes (such as IT〇, Cr) by white light, the reflected signal is not too weak or too full, which often makes it difficult to effectively improve the contrast between detection and measurement. This is disclosed in Japanese Patent No. 1263〇41 by MiCronics, Inc. in Taiwan, which uses a white light source and a half mirror to obtain a reflected image. The device is simple in structure, but it is difficult to provide high-contrast images in the face of multi-layer films or different materials with similar surfaces. Later, although there were methods such as fluorescent images or polarized images, attempts were made to improve the detection contrast. However, for multilayer transparent films, multilayer metal films, and films with similar reflectance, it is still impossible to distinguish 'multi-film analysis, high image pair ratio. Quickly check the need. * This technique is disclosed in the US Patent No. 6940604 filed by LG Corporation of the United States, which uses the rotation of a filter and a polarizer to obtain a polarized reflection image at different wavelengths (two wavelengths). Compared with Japan's Micr〇nics, South Korea's LG has more adjustable parameters, so it can be compared with the shirt. However, since the wavelength modulated by the filter winding cannot be connected to 201017150 and the contrast of the multilayer transparent film or the multilayer metal film is still low, it is still difficult to perform continuous multi-wavelength image contrast detection on the complex film layer. Different from the above-mentioned technology, the use of thin film products to change the degree of polarization of incident light is a new choice. In recent years, the imaging ellipsometry developed by this principle has metal reflective removal and transparent film high image contrast. And so on, so the application has considerable potential in the detection of thin film patterned films. BRIEF DESCRIPTION OF THE DRAWINGS Figures 1A to 1B are schematic diagrams of conventional detection devices utilizing image ellipsometry techniques, and are disclosed in U.S. Patent No. 5,332,052, issued to the European Society of. Referring to Fig. 1A, the detecting device 100 is for detecting a film product 50' wherein the film product 50 includes a substrate 52 and a multilayer film 54 (only a single layer is illustrated) and the film 54 has a specific thickness and material. The detecting device 100 includes a light source 110, a polarizer 12 〇, a phase retarder 130, an analyzer 140, and a sensor 150, wherein the light source 11 发出The beam 112 passes through the beta polarizer 120, the phase retarder 130, the thin film 54 of the thin tantalum article 50, and the analyzer 140, and finally the intensity of the beam 112 is sensed by the sensor 15〇, and the polarizer 120 is The analyzers 140 are polarizing plates of adjustable azimuth angles. • In response to the above, when the light beam 112 passes through the film 54, the phase changes due to the material (refractive index) and thickness of the film 54. By fixing the azimuth angle C of the phase retarder 130 with the phase delay amount & and adjusting the azimuth angle ρ of the polarizer 12 and the azimuth angle A of the analyzer, the final intensity of the beam U2 can be changed. In the prior art, the beam 112 is transmitted through the multi-filter 16 被 through the 201017150 band of light. In any single-band, the azimuth angle P of the hit m and the azimuth angle A of the analyzer 140 can be appropriately adjusted to change the intensity of the first beam 12 from the darkest to the brightest. The arrangement of the detecting device 1A in Fig. 1B' Fig. 1B is the same as that of the film. The difference is only in the film product 5, and the thickness of the film 56 is different from that of the film 54 of Fig. 1A. In the same band of light beam "2, simultaneously adjust the azimuth angle p of the polarizer 12〇 and the azimuth angle A of the analyzer 14〇 to increase the intensity difference of the beams 112, 112 as much as possible, thereby The contrast detected. When the band of the beam is sequentially changed, and the parameters are adjusted under the beams 112, 112' having the specific band λ to produce the maximum contrast, then the band χ, the azimuth angle ρ of the polarizer 120, and the analyzer are “ο The azimuth angle a is a preferred parameter for simultaneously detecting the films 54, 56. In the case of a film product (not shown) having both films 54, 56, when the film 54, 56 of the thin film product is to be tested for flaws ( Including the defect defect, the film thickness is too thick or too thin, the refractive index of the film layer, etc., the optical scanning of each region of the film product is performed with the preferred parameters described above. If the sensor 150 receives When the light intensity is predetermined to be bright or dark, the film 54 and 56 of the region are formed well; otherwise, if the light intensity reflected by some regions is not predetermined or dark, There is a manufacturing flaw in the area. Referring again to Figure 1A, there are 4 adjustable parameters available for the polarizer 120-phase retarder 130-film product 50_ analyzer 140 Adjusting the intensity of the beam 112. These tunable parameters The azimuth angle P of the polarizer 120, the azimuth angle c of the phase retarder 130, the phase delay amount of the phase delay 2010 130, and the azimuth angle A of the analyzer 140. In the tuning parameters, two of the adjustable parameters can be fixed, and the other two adjustable parameters can be adjusted to change the intensity of the beam 112 from full to full dark. In the conventional art, due to the polarizer 120 The azimuth angle P is relatively easy to adjust with the azimuth angle A of the analyzer 140. Therefore, most of the two parameters are used. [Explanation] The thin film optical detecting device of the present embodiment is suitable for detecting according to the present technology. The film optical inspection device comprises a multi-wavelength light source, a dispersion-collimation module, a multi-channel polarization rotation module, and a multi-channel Multi-channel phase retardation module, convergent-collimation module, polarization module, and image spectrometer (^屻叩spe) The multi-wavelength light source is adapted to provide a beam to the split collimation module, and the beam has a plurality of wavelength bands. The spectroscopic collimation module is adapted to split the beam into a plurality of sub-beams, and the sub-beams respectively have corresponding bands. The multi-channel polarization rotation module adjusts the azimuth of the polarization of the sub-beams, and the multi-channel phase delay module adjusts the phase delay amount of the sub-beams or the azimuth of the phase=delay. The light combining collimation module is adapted to combine these sub-beams into a poly. The integrated beam is incident on the film product, and the polarization module is adapted to limit the penetration of different polarization states of the polymeric beam, and the light is suitable for receiving the multi-wavelength image of the polymeric filament. ^光"曰仪201017150: According to the present technology, a thin film optical detecting device of another embodiment is adapted to detect a film product, the film optical detecting device comprising a multi-wavelength light source, a polarization module, a beam splitting collimating module Multi-channel phase delay module, multi-channel polarization rotation module, combined light collimation module and image spectrometer. Multi-wavelength light source is suitable for incident film products after providing beam to polarized module, 'and split collimation mode The group is adapted to divide the beam into a plurality of sub-beams, and the sub-beams respectively have corresponding bands. The multi-channel phase delay module is corresponding to adjusting the phase delay amount of the sub-beams or the azimuth of the phase delay, and the multi-pass The channel polarization rotation module is adapted to adjust the azimuth of the polarization of the secondary beams. The light combining alignment module is adapted to combine the secondary beams into a combined beam and then incident on the image spectrometer for imaging. To enable the above features and features of the present invention It is to be understood that the embodiments are described in detail below with reference to the accompanying drawings. FIG. 2A is a technique according to the present invention. FIG. 2B is a partial detailed schematic view of FIG. 2a. Referring to FIGS. 2A and 2B, the thin film optical detecting device 2 is adapted to detect the film making time 60 and is used to determine The preferred detection parameters are that a film of a plurality of different materials and thicknesses is deposited on the substrate 62 of the film product (the standard is not marked), and the preferred detection parameters are such that the film of different materials and thicknesses can be obtained. f expansion, the beam can produce the maximum contrast, in order to confirm whether these films have the production of enamel. In addition, the substrate 62 of the film product 6 () can also have different materials and transmittance. The above-mentioned thin film optical detecting device 200 includes a multi-wavelength light source 11 201017150 210, a spectroscopic collimating module 220, a multi-channel polarization rotating module 23, a multi-channel phase delay mode 240, a combined light collimating module 250, and a partial The polarization mode ^2 and the image spectrometer 270. The multi-wavelength source 210 is adapted to generate a beam 212, and the beam 212 is a beam having a plurality of wavelength bands, and the bands are particularly in the visible light range, such as 400 nm to 750 n. In this embodiment, the multi-wavelength light source 210 can be a multi-wavelength laser, but the multi-wavelength light source 21 can also be a broadband halogen light source, a flash light source, a multi-wavelength gas lamp, or other suitable light source. 212 is incident on the spectroscopic collimation module 220 for splitting and collimating, and splits the beam 212 into a plurality of parallel sub-beams 214 (as shown in FIG. 2B), wherein the sub-beams 214 can each have a single band, That is, the sub-beams 214 are different wavelengths of light. In this embodiment, the spectroscopic collimating module 220 includes a first grating 222 and a first collimating mirror 224, wherein when the beam 212 is incident on the first grating 222, different wavelengths of light The sub-beams 214 in a plurality of different directions are decomposed into a plurality of different directions and incident on the first collimating mirror 224, and the first collimating mirror 224 re-aligns the directions of the sub-beams 214 to make them parallel. status. In the present embodiment, the first grating 222 may be a diffraction type spectroscopic grating or a holographic spectroscopic grating, and the first collimating mirror 224 may be a lenticular lens. Of course, possible implementations of the present technology do not limit the types of first grating 222 and first collimating mirror 224. Furthermore, the first grating 222 of this embodiment may also be replaced by a prism, which is a sub-beam 214 that splits the beam 212 into different bands by using the difference in refractive index. However, in terms of experimental results, the spectroscopic effect of the grating is superior to that of the lens. Referring to FIG. 2A and FIG. 2B again, these sub-beams 214 will be rotated by 23G through a multi-12 201017150 channel to respectively determine the azimuth angle p of the starting money, that is, the multi-channel polarization rotating module 230 is used for the polarizing. function. The multi-channel polarization rotation module 230 has a plurality of channels (shown in a plurality of small squares in the drawing), and the sub-beams 214 pass through the channels to change the respective polarization states. In this embodiment, the multi-channel polarization rotation module 23 can be a multi-channel microelectromechanical polarization rotator (Multi_Channd mems)

Potozaticm R0tat0r), in which a micro-polarizer is disposed in each channel, and the square angle P of the sub-beams 214 is separately adjusted by a microelectromechanical structure. In this way, the secondary beams 214 are respectively provided with different orientations. Of course, the multi-channel polarization rotation module 23 can also be a digital micro mirror element (DMD;). Similarly to the foregoing, then these sub-beams 214 X pass through the multi-channel phase delay mode, group 240, and the respective phase delay amounts 5c are determined. In the foregoing four adjustable parameters, the present embodiment is the azimuth angle C of the fixed phase retarder, and correspondingly adjusts the phase delay amount & of the phase retarder, respectively, so the multi-channel phase delay module 240 can be multi-channel Liquid crystal phase variable retarder. ❿ By adjusting the rotation angle of the liquid crystal molecules in each channel by voltage, respectively, the phase delay amount §c of these sub-beams can be appropriately delayed. In this way, the sub-beam 214 has the azimuth angle c of the same phase delay, and the phase delay amount δο information with different phase delays. Of course, the implementation of the present invention does not limit the type of the multi-channel phase delay module 24, and the multi-channel phase delay module 240 can also be a multi-channel MEMS phase retarder or other suitable phase. Delayer. It should be noted that in the multi-channel polarization rotation module 2 3 〇 and the multi-channel phase delay module 240 of the present embodiment, there are 128 channels. In other words, 13 201017150 says that there are 128 sub-beams 214 corresponding to each of these channels. In the visible light band of 400 to 750 nm, the bandwidth of each sub-beam 214 band is about 2 nm. In turn, the secondary beams 214 are combined by the combined light collimation module 250 to form a polymeric beam 216 for incident on the film article 60. The light split collimation module 220 may include a second grating 252 and a second collimating mirror 254 'where the combining function of the second grating 252 and the second collimating mirror 254 is opposite to the first The grating 222 and the first collimating mirror 224 are used for splitting power. Therefore, the second grating 252 and the second collimating mirror 254 are disposed relative to the first grating 222 and the first collimating mirror 224, respectively, wherein the second collimating mirror 254 is the sub-beam 214 concentrated on the second grating 252. The second grating 252 synthesizes the secondary beam 214 into a converged beam 216. In the above, the second grating 252 and the second collimating mirror 254 can be of the same type as the first grating 222 and the first collimating mirror 224, and will not be described again. 3 is a perspective view of a polymeric beam incident film article in accordance with an embodiment of the present invention, wherein the cross section of the polymeric beam 216 is elongated. Referring to FIG. 3 and FIG. 2B, in the embodiment, the first collimating mirror 224 and the first collimating mirror 254 can be cylindrical collimating mirrors at the same time. In this way, the sub-beams 214 change the shape of the cross-section through the first collimating mirror 224 and the second collimating mirror 254, and then, after the light is combined, a cross-section of the polymer beam 216 is generated. . Of course, embodiments of the present technology do not limit the shape of the focused beam 216 or the manner in which the polymeric beam 216 is adjusted. In addition, the polymeric beam 216 will illuminate the regions of the webs 64, 66 of the film article 60, wherein the webs 64, 66 can have different materials or thicknesses to alter the polarization state of the polymeric beam 216.

In this embodiment, the polymerized light beam 216 passes through the polarization module 260' after being reflected by the film product 60, and the polarization module 260 is used for detecting the polarization to limit the different polarization states of the polymer beam 216. The amount of penetration. The polarization module 260 can be a Glan-Thomson, a thin film polarizer or other suitable polarizing element. Embodiments of the present invention do not limit the polymeric beam 216 from being reflected by the film article 60, and the polymeric beam 216 may also pass through the film article 60 in other embodiments and will be described in detail below. Moreover, for clarity, the polymeric beam 216' passing through the polarization mode and after 260 is otherwise indicated by a different reference. So far, each band χ of the aggregated beam 216' has a different azimuth angle 起, 2. the same phase delay azimuth c, 3. different vengeance delay amount 5c., 4. the same direction of detection The information about the corners and the films 64, 66 is expressed as a Jones matrix as follows:

X— cos2 A cos/4 sin >4 >,〇' iSc e~ Λ” cos 3 sin 沁 sin2 A L〇厂” cos-+/sin-cos2C Isin^sm2C I sin—sin 2C where fe]

C〇s ~-- /sin-cos 2C

cosP smP

[£,] (1) ^ is the electric field state of the beam 212 and the converged beam 216, respectively, and can convert the light intensity of the converging beam 216,

cosP

sinP

Cos— + / sin—cos2C /sin—sin 1C 2 2 2 /sin—sin 2C cos— - i sin ~ cos 2C

Cos2/i cos .4 sin/4 IcosAsmA sin2 A 1 is a polarization matrix phase delay matrix and a deviation matrix, respectively, and a reflection coefficient matrix of 66. Rp means that the film 64 or the thin mode is fixed in the embodiment, the azimuth angle of the fixed detection Α = π / 4 (that is, the azimuth angle θ with the phase delay 并 0, and the deviation of the green ρ :) delay amount &, can listen to the hybrid beam 216, the light intensity of each segment is 0 15 201017150, the aggregate beam 216, the person (four) image light, showing multiple wavelengths. Appropriate adjustment of the azimuth p and phase delay δ c can obtain a better ratio of ellipsometric images and obtain better detection parameters. * As a sample of film products, 6 〇 can have a variety of films of different materials or thickness (only in the figure; ^ show film 64, 66 ), and the irradiated area of the polymeric beam covers a portion of the film. Thus, the image formed by the image spectrometer is extended in two dimensions, one of which is the spatial axial direction, that is, the distribution of the different light film regions irradiated by the polymeric beam. The other is the intensity distribution of the reflected light at different wavelengths in the spectral axis, that is, the different film regions. Figure 4A is a simulation of the image of the incident beam spectrometer of the aggregated beam 216 of Figure 3, and for clarity of illustration, Figure 4A is only An image showing portions of the corresponding film 64, 66, and 4B shows the spectrum corresponding to FIG. 4A, wherein the horizontal axis is the distribution of wavelengths, and the vertical axis is the light intensity of the converged light beam 216. Please refer to FIG. 4A 'for the corresponding image films 64, 66 to the image area, The parameters corresponding to each band are adjusted separately, so that the film 64 region is the extinction region, that is, the image corresponding to the film 64 is completely dark. Under this parameter, the image corresponding to the film © 66 will have light leakage, and the film 64 The converging beam 216' of 66 has a different intensity on the charge coupled device (CCD) to produce contrast. In this embodiment, the film 64 is, for example, tantalum nitride (Si3N4) having a thickness of 400 nm, and the film 66 is further laminated with indium having a thickness of 200 nm. Tin oxide (ITO) • Transparent conductive film. ' Referring again to Figures 4A to 4B, when the beam of the film 64 region is in an extinction state, the light intensity of the beam corresponding to the film 66 has a local high point in each of the two bands ( The center wavelengths of the two bands are 427 nm and 584 nm. The light beam of the film 66 201017150 corresponding to the center wavelength of 427 nm has a large light intensity, and the extinction state of the film 64. The maximum contrast is produced, so the corresponding parameters (p, C, δ c, A) at this time can be preferred detection parameters. When the film 64, 66 of the film product is to be tested for flaws (including insufficient thickness or When the film is too thin, the refractive index variation of the film layer, etc.), each of the regions of the film product can be optically scanned using the preferred detection parameters described above, which has been previously described in detail and will not be described again. ❹ ❹ As described above, in the case of 128 channels of this embodiment, it is a secondary beam that simultaneously generates 128 different bands with different polarization information, and images in an image spectrometer. The corresponding detection parameters of the special film are found by correspondingly adjusting the parameters corresponding to each band. The technique of the present invention can quickly adjust the better detection parameters and obtain a better contrast image. In addition, the bandwidth of the band can be only about 2 nm, so that the film can eliminate the unnecessary light leakage caused by the bandwidth in the extinction area, so that the contrast and fineness of the second school. However, the number of the solid wires of the invention (4) is the number of channels, and the number of channels is more, and (4) the experiment of the lifting test is further = the embodiment of the present invention has a spatial axial extension in addition to the spectral axis. Expose multiple films at once (refer to Figure 3). Therefore, in the practice of the present invention, two of the films of the two regions are separated, and the preferred (four) parameters for the film are determined by the foregoing method. ~> Two The present invention can use the spectroscopic method to divide the multi-wavelength light source into multiple sub-beams of different polarization information and simultaneously detect it, and the V has = and has high precision. As mentioned above, in the 4 shadows C, Sc, Α), the two parameters can be adjusted to adjust the light intensity to the gP-like 201017150 state, so in the 1. polarization state 2. phase delay state 3. in the detection state There are only two devices that require multiple channel settings' and the other does not limit the settings for multiple channels. Of course, the implementation of the present invention does not limit the three devices to be multi-channel devices. Referring to the above, please refer to FIGS. 2A and 2B. In other embodiments in which the parameters Ρ, C are adjusted by the fixed parameters Sc and ,, the multi-channel phase delay module 240 can be a multi-channel MEMS phase retarder (Multi). - Channel Micro-Device Phase Retarder), in which each channel is provided with a % wave plate of β azimuth angle C (the wave plate corresponding to different bands is also different), and these % waves are separately adjusted by the MEMS system The azimuth angle C of the plates causes the sub-beams 214 to have azimuth C information of different phase delays, respectively. The embodiment is further described with the fixed parameter C and the parameter Ρ, and the multi-channel polarization rotating module 230 is a multi-channel microelectromechanical polarization rotator. Although the microelectromechanical system can finely adjust the azimuth P of the polarizer, one of the embodiments of the present invention can adjust the azimuth P of the polarizer by adjusting the phase delay. ® In view of the above, in optical theory, a specific linear polarization state can be rotated to a linear polarization state of any azimuth by appropriately arranging two quarter-wave plates with an adjustable phase delay amount. 2C is a partial detailed schematic view of one embodiment of the present invention, and FIG. 2C differs from FIG. 2B only in that the components of the multi-channel polarization rotary module are different. Referring to FIG. 2C, the multi-channel polarization rotating module 230 of the embodiment includes a first polarizer 232, a first % wave plate 234, a multi-channel liquid crystal phase variable retarder 236, and a second % wave. The plate 238, in this embodiment, the sub-beams 214 are sequentially passed through the first polarizer 232, the first % wave plate 234, the multi-201017150 channel liquid crystal phase variable retarder 236, and the second % wave plate 238. And, the first % wave plate 234 and the first one chopper plate 238' are % wave plates suitable for multiple wavelengths. • The first polarizer 232 determines the azimuth of the polarization of the secondary beam 214, and by adjusting the multi-channel liquid crystal phase variable retarder 236, the phase delay amount is used to rotate the secondary beam 214 to an azimuth angle p of any deflection. In addition, the multi-channel liquid crystal phase variable retarder 263 can be in the same form as the multi-channel liquid crystal phase variable retarder 242 of the multi-channel liquid crystal phase delay module 240, or the multi-channel liquid crystal phase variable retarder 236 It can also be replaced by a multi-channel MEMS phase retarder. Incidentally, in order to accurately measure, the first quarter wave plate 234 and the second % wave plate 238 may be replaced with a multi-channel % wave plate, and the multi-channel quarter wave plate may be used. The % wave plates in each channel correspond to a specific band. In the embodiment of Fig. 2C, the parameters P, Sc are adjusted in such a manner that the phase delay amount is changed by changing the rotation angle of the liquid crystal molecules, thereby modulating the parameter p, for example. This eliminates the need for mechanical rotation of the polarizing element to further increase the speed. Referring to FIG. 2A again, in order to further improve the accuracy of the focus, the thin film optical detecting device 200 of the embodiment may further include a first focusing mirror 28 and a second focusing mirror 290, wherein the first focusing mirror 2 8〇 and the second focusing mirror 290 are respectively disposed on the optical path of the converged light beam 216. The first focusing mirror 280 is disposed between the combined light collimating module 250 and the film product 60' and the second focusing mirror 29 is It is disposed between the film product 60 and the polarization module 260. The first focusing mirror 280 can accurately converge the converging beam 216 onto a specific area of the film product 60, and the second focusing mirror 290 collects the reflected 201017150 polymer beam 216 and then enters the polarization module 260. The function of the first focusing mirror 280 and the second focusing mirror 290 can be easily understood by those skilled in the art, and will not be described again. The film product 60 of the foregoing embodiment measures the ellipsometric image in a reflective manner, but one of the embodiments of the present technology can also measure the ellipsometric image in a penetrating manner, and an embodiment will be further described below. Graphical description. Figure 5 is a schematic illustration of a thin film optical inspection apparatus in accordance with another embodiment of the present technology. Referring to Fig. 5, the thin film optical detecting device 500 of the present embodiment is similar to the thin film optical detecting device 200 of Fig. 2A, and the difference is only different in the manner of measurement. In the present embodiment, the polymeric beam 216 is through the film article 60 and the rear incident polarization module 260. In the foregoing embodiment, the polymeric beam 216 is reflected by the film product 60 and is incident on the polarization module 260. 6 In any way, the polymeric beam 216 will be polarized by the film products 60, 60', and the preferred detection parameters can be determined by appropriately adjusting the parameters (p, c, § c, A). It should be noted that the embodiment of the present invention does not limit the types of measurable film products. For example, the measurable film product of the present invention may be a liquid crystal display substrate, an electropolymer display substrate, or a crystal. Round substrate or other suitable film product for measurement. The invention can divide the multi-wavelength light source into multiple sub-beams with different polarization information and simultaneously detect them by means of splitting, and adjust two parameters in four parameters (Ρ, C, Sc, A). The light intensity is adjusted to the extinction state, so in 1. the biasing state 2. the phase delay state 3. In the detection state, only two devices may require multiple channels, and the following embodiments will be further illustrated. Circle 6 is a schematic illustration of a thin film optical inspection 20 201017150 apparatus in accordance with another embodiment of the present technology. Referring to Fig. 6, the thin film optical detecting device 600 of the present embodiment is similar to the thin film optical detecting device 2 of Fig. 2A except that the polarizing state and the detecting state are adjusted in this embodiment. However, in order to avoid mixing, some components will be redefined by ordinal and label, but the ordinal is only used for convenience and does not have substantial meaning. In the above, the thin film optical detecting device 000 includes a multi-wavelength light source 210, a first light collimating module 620a, a first multi-channel polarizing rotating module 630, a first combined light collimating module 65A, and a phase delay module 64. The second multi-channel polarization alignment module 620b, the second multi-channel polarization rotation module 660, the second light-collimation alignment module 650a, and the image spectrometer 27A, wherein the first multi-channel polarization rotation module 630 And the second multi-channel polarization rotating module 66 〇 is used for the deviation and the detection of the deviation. According to FIG. 2A and the foregoing, the 'multi-channel polarization rotation module 630 and the second multi-channel polarization rotation module 66 〇 can correspond to the multi-channel polarization rotation module 230, and the first spectroscopic standard The direct mode button 62a and the second beam split collimation module 620b can correspond to the aforementioned beam split collimation module 22, and the first merged light collimation module 65A and the second light collimation module 650a Corresponding to the foregoing: The second light combining collimating module 250. Those skilled in the art can easily understand and not be confused by the ordinal number. Referring to FIG. 6 again, in detail, the light beam 212 emitted by the multi-wavelength light source 21〇 is divided into a plurality of first light beams 614 with different wave segments by the first beam split collimation module 62〇a. The first light beams 614, after passing through the channels of the first multi-channel polarization rotating module 630, respectively have azimuth p information of different polarizations. Then, the first light beams 614 are combined by the first light combining collimation module 65A to form a first polymer beam 616. 201017150 is the same: the phase delay module 640 will have the incident azimuth angle c and the phase delay amount 5c information, and then the wave plate phase ^60 °. In this embodiment, the phase delay module 640 can The bit delay, liquid crystal phase retarder or secret Soleil phase, t 'and phase delay residual _ does not have a multi-channel structure. The module 640 is additionally provided with a multi-channel structure, and the embodiment of the present invention can be configured to configure the phase delay module (10) in the first frame.

= between the polarization rotation module (4) and the first-combination light collimation module 65Ga (the Fan-Phase phase delay module _ and the first-light-collimation alignment module (10) a), but may not be interchanged. The first polymeric beam 616, after being reflected by the film product 60, is divided into a plurality of second light beams having different wavelength bands by a second j-light collimating mode, group 62Gb, wherein the second secondary light beams 618 The band will correspond to the band of the first light '614. The second beam 618 will have a different azimuth angle A ^ 不同 after passing through the second multi-channel polarization cyclone module. Then, the second sub-beams 618 are combined by the second combined collimation mode _ 650b to form a second converged beam 619. Finally, the second aggregated beam 619 is incident on the image spectrometer 27 to be a spectral image, by adjusting the orientation of the polarization in each channel of the first multi-channel polarization rotation module 63 and the second multi-channel polarization rotation module 660. The angle (that is, the adjustment parameter P, A) ' can synchronously change the spectral image of the image spectrometer 27 so that the spectral image of the specific film region exhibits the extinction state. The spectral image of the specific film region exhibits a non-dull state, thereby obtaining a better The number of measurements is measured and a better contrast image is measured. Similar explanations have been previously described and will not be repeated here. ' 22 201017150 A thin film optical inspection m, diagram according to another embodiment of the present technology. Referring to FIG. 7, the thin film optical detecting device of the present embodiment is similar to the thin optical detecting device of the 丨θ6, and the difference is only: [疋 adjust the phase delay state and the detection state. However, to avoid mixing. The 卩" component will redefine the ordinal and label. In the above, the thin film optical detecting device 700 includes a multi-wavelength light source 210, a polarization module 73, a first split collimation module 6, a multi-channel phase delay module 240, and a first-collimation collimation module. a, a second split collimation module 62沘, a multi-channel polarization rotation module 76〇, a second junction photo module 650a, and an image spectrometer 27〇, wherein the polarization module 73〇 and the channel channel The rotation module 760 is used for the polarization and the detection, respectively, and the polarization module 730 can correspond to the polarization module 26A in FIG. 2A, and the multi-channel polarization rotation module 760 corresponds to FIG. 2A. The multi-channel polarization rotation module 230. In detail, the light beam 212 emitted by the multi-wavelength light source: 210 will have the same azimuth angle p information after passing through the polarization module 730, and then divided into multiple channels by the first beam split collimation module 620a. The first primary beam 614 with different bands, and the first secondary beams 6丨4 will adjust the phase delay information after passing through the multi-channel phase delay module 240. Similarly, if the channel phase delay module 240 is a multi-channel liquid crystal phase variable retarder gas is a multi-channel MEMS phase retarder, the multi-channel phase delay module 240 night is used to adjust the first beam 614. The phase delay amount is 5c. Then, the first beam 614 is combined by the first combining collimation module 650a to form a first converging beam 616 to be incident on the film article 60. In the present embodiment, δ, after being reflected by the film product 60, the first polymerized light beam 616 is split into a plurality of second light beams with a different wavelength of 23.201017150 by the light splitting collimation module 620b. The bands of these second beams will correspond to the bands of the first beam 614. The second beam 618 will have azimuth A information for different detections after passing through the channels of the multi-channel polarization rotation module 76. Then, the second sub-beams 618 are combined by the second combining light collimating module 650b to form a second converging beam 619. Finally, the second aggregated beam 619 is incident on the image spectrometer 270 to image 'by adjusting the settings of each channel in the multi-channel polarization rotation module 760 and the multi-channel phase delay module 240 (ie, adjusting parameter a and parameter § c or ❿ C) 'The image of the image spectrometer 270 can be changed synchronously so that the spectral image of the specific film area is in an extinction state, thereby obtaining better detection parameters. Similar explanations have been previously described and will not be repeated here. In the embodiment, the phase delay state and the state of the detection state are adjusted, e, in order to reduce the inconvenience in the alignment of the splitting and combining light, one of the embodiments of the present technology can adjust the position of the multi-channel phase delay module 240 to omit A group of photosynthetic light modules. The embodiments will be further described below in conjunction with the drawings. Figure 8 is an illustration of a thin film optical detection beta device in accordance with another embodiment of the present technology. Referring to Fig. 8, the thin film optical detecting device 800 of the present embodiment is similar to the thin film optical detecting device 2 of Fig. 2, and the difference is only that the embodiment adjusts the delay state of the citrus position and the quality of the texture. However, to avoid, the section; ^ will redefine the label from. Paste 1 is connected to the above, the thin film optical detecting device _ includes a multi-wavelength light source secondary module, a split collimation module 220, a multi-channel phase delay 杈, and 240, a multi-channel polarization rotary mode 86 〇, a light level Direct 辗 group 25 〇 and image spectrometer 270, wherein the polarization module 8 port 3 freckle multi-channel polarization 24 201017150 rotation module 860 is used for polarization and detection, respectively, and can correspond to Figure 2A The polarization module 260 and the multi-channel polarization rotation module 230. In detail, the light beam 212 emitted by the multi-wavelength light source 210 will have the same azimuth angle P information after passing through the polarization module 830, and will be incident on the incident film product 60. In this embodiment, the light beam 212 reflected by the film product 60 is divided into a plurality of sub-beams 214 having different wavelength bands by the spectroscopic collimation module 220, and the sub-beams 214 are passing through the multi-channel phase delay module. After the 240 channel, it will adjust the information of its phase delay. ❹ Similarly, if the multi-channel phase delay module 240 is a multi-channel liquid crystal phase variable retarder or a multi-channel microelectromechanical phase retarder, the multi-channel phase delay module 240 is used to adjust the secondary beam 214. The amount of phase delay. After passing through the multi-channel polarization rotation module 860, the secondary beam 214 will have different azimuth A information for different detection. Then, the secondary beams 214 are combined by the combined light collimation module 250 to form a polymer beam 216 and incident on the image spectrometer 270 as a spectral image. By adjusting the settings of each of the multi-channel polarization rotation module 860 and the multi-channel phase delay module 240 (ie, adjusting the parameter A and the parameter jc or C), the image of the image spectrometer 270 can be synchronously changed. The spectral image of a particular film region is rendered in an extinction state to provide better detection parameters. • The structure similar to the previous 'present embodiment can be expressed as follows: (2) X 'cos1 A cos/sinJ iA cos humiliation + i'sin.cos2C isin-sin2C z & 2 2 cos ^ sin ^ Sin2 A i sinsin 2C cos — - / sin—cos 2C L 1 2 2 叮cos corpse ^vjsinP where the relevant parameters in equation (2) can be compared to equation (1), and equation (2) is the opposite formula [£,] (2) 25 201017150 cos — + i sin—cos 1C /sin—sin 2C /sin — sin 2C cos — — i sin —· c〇s2C and λ 0′ L° rs] Two items (1) In the concept of adjusting the multi-channel phase 240 in this embodiment, the phase delay module in FIG. 6 can also be between the film product 60 and the second beam splitting module 62%, or the second magnetic group 620b. Between the second multi-channel polarization rotating module 66〇. Familiar with this, the artist can adjust the relative position of the aforementioned members according to this concept, but it is within the scope of the present invention. In summary, the film=® detecting device according to the present invention has at least the following features: First, the light beam is split into a plurality of single sub-beams by means of grating splitting and the (four) sub-beams are polarized with different polarizations. The phase information ^ through the film 'following the image spectrometer directly read these sub-beams reflected by the thin product or through the strength of the film product, you can get the multi-wavelength ellipses. θ m ^ 2, by adjusting any two parameters of the four parameters (P, c, 5c, A), to the ellipsometric image of the extinction state in a specific film region, the better detection parameters in the visible range can be determined. The ellipsometric image between the extinction area of the film and the non-dull area forms a maximum image contrast. Third, the band width of the sub-beam is very narrow, so that the town can avoid the situation of additional light leakage in the second and non-extinction areas, so as to greatly improve the accuracy of the experiment. Although the technology of the present invention has been disclosed in the above embodiments, it is not limited to the invention, and any person skilled in the art can make some changes and refinements without departing from the spirit and scope of #明=月, Therefore, the scope of the protection of the wood is determined by the rate defined in the attached patent application. 26 201017150 [Simple Description of the Drawings] Figs. 1A to 1B are schematic views of a conventional detecting device using image ellipsometry. 2A is a schematic diagram of a thin film optical detecting apparatus according to an embodiment of the present technology. 2B is a partial detailed schematic view of FIG. 2A. Figure 2C is a partial detailed illustration of another embodiment of the present technology. 3 is a perspective view of a polymeric beam incident film article in accordance with an embodiment of the present technology. Figure 4A is a simulation of the imaging of the converged beam incident image spectrometer of Figure 3. FIG. 4B illustrates a spectrum corresponding to FIG. 4A. 5 to 8 are schematic views of a thin film optical detecting apparatus according to various aspects of the present technology. _ [Main component symbol description] 50, 50', 60, 60': film products. 52, 62: substrate 54, 56, 64, 66: film 100: detecting device 110: light source 112, 112': light beam 120: Polarizer 27 201017150 130 : Phase retarder 140 : analyzer 150 : sensor 160 : multi-filter 200 , 500 , 600 , 700 , 800 : thin film optical detecting device 210 : multi-wavelength light source 212 : light beam 214 : Secondary beam ❿ 216, 216': polymeric beam 220: split collimation module 222: first grating 224: first collimating mirror 230, 230': multi-channel polarization rotating module 232': first polarizing plate 234 ': first % wave plate 236': multi-channel liquid crystal phase variable retarder ❹ 238': second % wave plate 240: multi-channel phase delay module 250: combined light collimation module 252: second grating 254: Second collimating mirror '260: Polarization module 270: Image spectrometer 280: First focusing mirror 290: Second focusing mirror 28 201017150 614: First beam 616: First converging beam 618: Second beam 619 The second polymer beam 620a: the first beam split collimation module 620b: the second beam split collimation module 630: the first multi-channel pole Rotary module 640: phase delay module ❹ 650a: first combined light collimation module 650b: second combined light collimation module 660: second multi-channel polarization rotating module 730, 830: polarized module 760, 860: Multi-channel polarization rotation module

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Claims (1)

201017150 X. Patent application scope: 1. A thin film optical detecting device suitable for detecting a film product, the film optical detecting device comprising: a multi-wavelength light source 'suitable for providing a light beam, and the light beam has a plurality of wavelength bands; The collimating module is adapted to divide the beam into a plurality of sub-beams, and the sub-beams respectively have corresponding bands; a multi-channel polarization rotating module respectively adjusts azimuths of the sub-beams a multi-channel phase delay module respectively corresponding to adjusting a phase delay amount of the sub-beams or an azimuth of the phase delay; a combined light collimation module adapted to combine the sub-beams into a converged beam and then incident The film product; a polarization module adapted to detect the amount of penetration of the polymeric beam; and an image spectrometer adapted to receive the spectral image of the aggregated beam. 2. The thin film optical detecting device of claim 1, wherein the multi-channel phase delay module is a multi-channel liquid crystal phase variable retarder or a multi-channel microelectromechanical phase retarder. 3. The thin film optical detecting device according to claim 1, wherein the multi-channel polarization rotating module is a multi-channel microelectromechanical polarizing rotator. 4. The thin film optical detecting device according to claim 1, wherein the multi-channel polarization rotating module comprises: a first polarizing plate; a first % wave plate; 30 201017150 an f channel liquid crystal phase Variable retarder; and - plate '(d) some: the under-beam is the slice, the -1⁄4 wave plate, the multi-channel channel = through the first polarization 2) / 4 wave plate. 4 target variable delay II and the fifth. The scope of the invention is as follows: wherein the spectroscopic collimating module comprises: a gully optical detecting device, and the ❹-:-grating is adapted to divide the beam into The secondary light-first collimating mirrors are adapted to bundle the secondary beams and polarize the rotating module. The beam collimates directly into the multi-channel 6. As described in claim 5, the 'this: the second gate or the hologram=set', wherein the package J: her package I, the m (four) device, a second collimation mirror Suitable for aggregating the sub-beams; and a second grating adapted to combine the sub-beams into the polymerization center = the optical detection device described in claim 7 of the patent scope, , '" The first grating is a diffractive spectroscopic grating or a holographic spectroscopic grating. 9. The thin film optical detecting device according to claim 1, wherein the polarizing charm is a __ soup# Glan_Th_〇n or a film polarizer. 10. The thin film optical detecting device of claim 1, wherein the multi-wavelength light source is a broadband gull light source, a flash light source, a multi-wavelength laser or a multi-wavelength gas lamp. The thin film optical detecting device according to claim 1, wherein the film product is a liquid crystal display substrate, a plasma display substrate or a 31 201017150 wafer substrate. 12. The thin film optical detecting device of claim 1, wherein the split collimation module comprises: a splitter ' adapted to split the beam into the sub-beams; and a collimating mirror The sub-beams are collimated into the multi-channel polarization rotating module. 13. A thin film optical detecting device adapted to detect a film product, the thin film optical detecting device comprising: a solar wavelength source adapted to provide a light beam having a plurality of wavelength bands; a polarization module adapted to Deviating the azimuth of the polarization of the beam, and the beam passes through the polarization module and enters the film product; the beam split collimation module is adapted to divide the true beam into a plurality of sub-beams, and the second beam Each has a corresponding band; ❹ phase delay 22, Γ delay module: respectively adjust the azimuth of the phase delay 篁 or 疋 phase delay of the sub-beams; vibration = track polarization module 'respectively adjust The secondary beam splitting beam 2 light collimating module is adapted to combine the sub-beams into a convergent light-image spectrometer, which is connected (4) to form a spectrum. 14. A thin film optical detecting device, suitable for optical inspection of a thin film comprising: '4_品' the band y multi-wavelength light source, suitable for providing a light beam, and the light beam having a plurality of 32 201017150 straight to the polarizing The azimuth of the polarization of the beam; the beam, and the first - owing & is adapted to divide the beam into a plurality of first time - η: respectively having corresponding bands; multi-channel phase delay module, bundle The phase delay amount or the phase delay of the first-order pupil-feed: #2 collimation module is adapted to combine the first-order beams into a first poly-δ beam and then enter the thin tantalum product; a knife-light collimation module adapted to divide the first converged beam into a plurality of second-order beams' and the second-order beams respectively have bands corresponding to the first-order beams; - multi-channel polarization Shooting, respectively corresponding to the azimuth of the second beam polarization; - the second light collimating module 'suitable to combine the second beam into a second polymer beam; and an image spectrometer, Suitable for receiving the second aggregated beam as a spectral image. 15. A thin film optical detecting device adapted to detect a film product, the 薄膜 film optical detecting device comprising: a multi-wavelength light source adapted to provide a light beam having a multi-turn band; a first split collimating mode The group is adapted to divide the beam into a plurality of first-time beams, and the first beams respectively have corresponding bands; • a first multi-channel polarization rotation module, respectively adjusting the first beams Polarization azimuth; a first light combining collimating module adapted to combine the first beams into a first converging beam; 33 201017150 a phase delay module adapted to adjust a phase delay of the first converging beam a first or a plurality of I a second beam, wherein the second beams respectively have a band corresponding to the first beams; and a second multi-channel polarization rotation module respectively adjusts azimuths of the polarizations of the second beams A second engagement ❹ light collimating module, adapted to the plurality of second sub-beam into a second polymerization combined beam; and an imaging spectrometer, adapted to receive the second light beam as a polymerization spectral image. 16. The thin film optical inspection apparatus of claim 1, wherein the first focusing lens and the second focusing mirror are disposed on the optical path of the concentrated beam. 17. The thin film optical detecting device of claim 14, wherein the first optical focusing mirror and the second focusing mirror are disposed on the optical path of the first 聚合 polymeric beam. 34