TW201016463A - Multilayer paper substrate for chip-type electronic component storage mount, and method of producing same - Google Patents

Abstract

The present invention provides a multilayer paper substrate for a storage mount, which is capable of improving the precision of cavity formation, and preventing delamination caused by bending stress and the generation of paper dust during cavity formation. A multilayer paper substrate 1 for a cup-type electronic component storage mount according to the present invention includes pulp fibers and inorganic fillers derived from waste paper within a layer 20, not within the top surface layer 10, wherein the combined proportion of the pulp fibers and inorganic fillers derived from waste paper is within a range from 5 to 70% by mass, the ash content is within a range from 1 to 15% by mass, and the inorganic fillers have a mass average particle size of less than 50 μ m and contains inorganic filler particles having a particle size of 50 μ m or greater in a proportion of less than 40% by mass.

Description

[Technical Field] The present invention relates to a multi-layer paper substrate for manufacturing a wafer-type electronic component storage base paper containing paper-type electronic components and a method of manufacturing the same. [Prior Art] A wafer-type electronic component storage base paper (hereinafter, abbreviated as "storage base paper") used as a carrier for a wafer-type electronic component is usually embossed by making a paper substrate for storing a liner paper into a belt shape. Manufactured by processing or perforating to form a cavity. The storage bottom paper is used in the following manner. That is, in the accommodating base paper obtained by embossing the paper substrate, the wafer type electronic component is directly filled into the cavity, and in the accommodating bottom paper obtained by the puncturing, the bottom cover tape is attached to the back side (bottom side). After the bottom surface is set, the wafer type electronic component is filled into the cavity. Then, the top cover tape is then attached to the surface (top side), wound on a cassette reel and shipped. Then, the user peels off the top cover tape, takes out the wafer type electronic component filled in the cavity, and mounts it to the printed substrate. ;x is used in the above manner, so the requirements for accommodating the backing paper do not adversely affect the quality of the filled wafer type electronic parts as follows; the surface has smoothness to be well adhered to the cover tape; The roll of the disk, for the bending stress, etc., causes interlayer peeling or bottom paper breakage; the formation of the die for inserting the chip type electronic component is good, and can be less. The wear of the parts and the molds used to form the cavities. It is especially important that the cavities are formed with good precision. That is, in the process of forming a cavity by using a punching machine or an embossing machine in the process of forming a cavity by a punching machine or an embossing machine, it is easy to get stuck in the wafer type when the inner wall surface of the cavity is not sharp (in the correct size). Electronic parts. Therefore, there is a problem when the wafer manufacturer fills the wafer type electronic component or when the manufacturer removes the wafer type electronic component. In order to improve the accuracy of the formation of the cavity, it is also possible to use a method of re-grinding the mold or making a new mold. However, the operability is lowered due to loss of time and yield, and the cost is increased. Further, in order to improve the accuracy of forming the cavity, the method of improving the mold itself to improve the wear of the mold is employed, but it is also required to improve the storage base paper for accommodating the wafer type electronic parts. For example, in Patent Documents j and 2, there is disclosed a method of adjusting the density of paper containing the bottom paper to improve the formability of the cavity. In Patent Document 3, a method of adjusting the elongation at break in the longitudinal direction and the transverse direction of the paper in the bottom paper to adjust the cavity formation property is disclosed. Patent Document 4 discloses a method of adjusting the ash content of the bottom paper to improve the cavity formation property. However, the wafer type electronic component housed in the cavity is becoming increasingly miniaturized. Actually, even in the method disclosed in Patent Document 4, the accuracy of forming the cavity is insufficient. Further, in the methods disclosed in Patent Documents 丨 to 4, the occurrence of interlayer peeling due to bending stress or the generation of paper powder when forming a cavity is not sufficiently solved. - [Patent Document 1] [Patent Document 1] Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. Hei. JP-A-2003-95320 [Patent Document 4] JP-A-2006-143227 SUMMARY OF INVENTION [Problems to be Solved by the Invention] An object of the present invention is to provide a multi-layer paper for accommodating a base paper. The substrate and the method of manufacturing the same can prevent the mold from being worn when the cavity of the wafer-type electronic component is accommodated by punching or embossing, thereby improving the accuracy of forming the cavity, and preventing the interlayer caused by the bending stress The generation of paper powder when peeling off and forming a cavity. [Means for Solving the Problem] The present inventors have studied the raw materials used for accommodating a multi-ply paper base material for a base paper. In particular, pulp fibers and inorganic fillers have been studied. As a result, it has been found that the use of pulp fibers derived from waste paper and inorganic filler materials derived from waste paper, and in particular, the ratio of the ratio of the pulp fibers to the inorganic filler to the inorganic filler, whereby the problem of the present invention can be solved. Then, based on this finding, further research was conducted to invent the following multi-layer paper substrate for accommodating a base paper and a method for producing the same. That is, the present invention includes the following invention.多层] A multi-layer paper substrate for a wafer-type electronic component storage base paper, which comprises: a pulp fiber and an inorganic filler derived from waste paper in a layer other than the surface layer, and a pulp fiber and an inorganic filler derived from waste paper; The total content ratio of U1273.doc 6 - 201016463 is 5 to 70 mass% (%) 'ash is 丨 15 15% by mass (%), and the mass average particle diameter of the above inorganic filler is less than 5 〇 μιη, and The range of 40% by mass or more (%) includes an inorganic filler having a particle diameter of 5 μm or more. [2] The multi-layer paper substrate for a wafer type electronic component storage base paper according to [1], wherein the ash is 1 to 10% by mass, and the mass average particle diameter of the inorganic filler is less than 5 〇μιη, and less than 30 The percentage of the percentage (%) in the mass contains an inorganic filler having a particle diameter of 5 Å or more. [3] The multi-layer paper substrate for a wafer type electronic component storage base paper according to [1] or [2], wherein all of the pulp fibers contained in the layer other than the surface layer have a ratio of microfibers having a length of 0.2 mm or less. More than 2% of fiber length distribution. Wherein, the fiber length distribution is measured by the pulp fiber length test method in the optical automatic measurement method regulated by JApAN ΤΑρρι N〇52, and the fiber length of the test sample is determined by the pulp disintegration method of JIS P8220. And it is obtained from the number basis. [4] A method for producing a multi-layer paper substrate for a wafer type electronic component storage base paper, comprising: a manufacturing step of manufacturing waste paper from a waste paper comprising a pulp fiber and an inorganic filler; and a papermaking step of papermaking a multi-ply paper substrate using fresh pulp and waste paper pulp; in the waste paper pulp manufacturing step, waste paper containing 5 mass% (%) or more of 141273.doc 201016463 as an inorganic filler material of ash After the disintegration treatment, after the dust removal treatment, the dispersion treatment is performed so that the mass average particle diameter of the inorganic filler is less than 50 μm, and the content of the inorganic filler contained in the inorganic filler is 5 μm or more. 4% by mass (%); In the papermaking step, the above-mentioned waste paper pulp is used for papermaking of a layer other than the surface layer. [5] The method for producing a multilayer paper substrate for a wafer type electronic component storage liner according to [4], wherein a disperser or a heating disperser is used in the above dispersion treatment. [Effects of the Invention] The multi-layer paper substrate ' according to the present invention can prevent the mold from being worn when the cavity of the wafer-type electronic component is accommodated by punching or embossing, thereby improving the accuracy of forming the cavity. Further, the multi-ply paper substrate according to the present invention can prevent the occurrence of paper powder when the interlayer is peeled off by bending stress and the cavity is formed. According to the method for producing a multilayer paper substrate of the present invention, the multilayer paper substrate as described above can be easily produced. [Embodiment] (Multilayer paper substrate for wafer-type electronic component storage base paper) The embodiment of the multi-layer paper substrate for a wafer-type electronic component storage base paper of the present invention (hereinafter referred to as "multi-layer paper substrate") is carried out. Description. The multi-layer paper substrate of the present embodiment is a multi-layer paper substrate obtained by paper-making a fresh pulp and waste paper pulp as a papermaking raw material, as shown in FIG. 1 , which comprises a surface layer 10 and a middle layer 21 and a bottom layer 22 The bottom layer 20. Here, Table 141273.doc 201016463 Layer 1 is followed by a side outer layer of the top cover tape, and the bottom layer 22 is attached to the side opposite the side of the side of the top cover tape. &, it is better to have the middle layer of the layer 2! The surface layer 1G and the bottom layer may be a layer.

[Fresh pulp J In the present invention, the term "fresh pulp" refers to pulp obtained by using wood or non-wood plants as raw materials. Fresh paper for plant as a material does not contain inorganic fillers.

Examples of the fresh pulp include bleached chemical pulp (10) KP (Nadelholz Bkhed heart), LBKP (Laubholz Bleached Kraft pulp), unbleached chemical pulp (NUKP (Nadelh〇lz) UnMeached Κγ^

Mp 'coniferous unbleached kraft paper poly), LUKp (Laubh〇lz

Kraft Pulp' broadleaf unbleached kraft paper, etc.), mechanical pulp, non-wood fiber paper, etc. In the middle, it is better to bleach chemical pulp from the viewpoint of being easy to express strength and not being colored (white). [Waste Paper Pulp] In the current month, the term “waste paper pulp” refers to the pulp obtained by regenerating waste paper. Here, as the waste paper, for example, white high-quality paper, checkered paper, etc., which have been used once but have a small number of printed portions, cards, high-quality paper printed with ink, high-quality paper printed with color, and blueprints are listed. Printed materials such as art paper, or high-quality waste paper that has been used, such as paper, printing coated paper, beverage packaging, office paper, etc., which can be used as printed paper. Hard paper • Printed or colored 141273.doc 201016463 Medium-quality paper, printed or colored cardboard, medium-sized waste paper, newspapers, magazines, miscellaneous paper, etc., medium-sized waste paper, colorless kraft paper • colorless Kraft paper damaged paper • Kraft paper empty bags • Kraft paper such as cardboard is waste paper. Among these waste papers, from the viewpoint of the ink content of the waste paper from the multi-ply paper substrate being reduced, it is preferable that the paper having a small portion is printed. The waste paper pulp is preferably an uncolored one such as a pulverized pulp of unprinted waste paper or a deinked waste paper pulp which has been subjected to deinking treatment to remove the ink portion. If the cavity in which the electronic component is received is colored, the image processing towel of the inspection step after the component is stored or after the component is taken out is erroneously recognized as a component. The waste paper pulp which uses waste paper as a raw material usually contains an inorganic filler. Here, the inorganic filler is derived from the filler added in the waste paper and the pigment in the coating layer. [Surface] Normally, after the wafer-type electronic component is housed in the cavity in the storage liner, the top cover tape is adhered, and the end user tape is peeled off by the end user to take out the wafer-type electronic component. Therefore, it is required that (4) the surface layer 10 of the multi-ply paper substrate 1 for the backing paper has high adhesion to the top cover tape and has a moderate peeling property. Therefore, it is preferred to use only fresh paper containing no inorganic filler material as suitable. The fresh pulp of the surface layer 10 is, for example, bleached chemical pulp, but is not limited thereto. The Canadian standard freeness of the whole pulp fiber constituting the surface layer 10 is preferably 300 to 560 ml. More preferably, the thickness of the paper is 〇〇 141 〇〇 141 141 141 141 141 141 141 141 141 141 273 2010. When the amount is more than ml, the reduction in the pulp yield and the loss due to the high density can be prevented. If the Canadian standard freeness of the whole pulp fiber is 560 ml or less, the interlayer strength can be further improved. In order to prevent the peeling property of the top cover tape and the generation of fine hair, it is also possible to include an internal additive in the surface layer 1 for other purposes. Examples of the internal additive include a rosin-based sizing agent, a stupid ethylene-maleic acid copolymer resin, a styrene-acrylic copolymer resin, a styrene-olefin copolymer resin, and an allyl ketene. A sizing agent, a paper strength enhancer, a water filter yield improver, a water resistance agent, an antifoaming agent, and the like are added to natural and synthetic papermaking materials such as a polymer and an alkenyl succinic anhydride. Further, it may also contain a cationic polymer such as a cationized starch, a cationized polyacrylamide, a polyethyleneimine, a polyamine polyamine epoxide, a cationic modified guar gum, or a cationically modified polyvinyl alcohol. . In view of further preventing interlayer peeling, it is preferred to contain an amphoteric polyacrylamide paper strength enhancer having a molecular weight of 2,000,000 or more. The amphoteric polyacrylamide paper strength enhancer can be adsorbed to the pulp fiber through the aluminum in the anion portion, and can be self-adsorbed in the cationic portion, and is not easily affected by the pH change caused by the waste paper and/or the filler, and can stably strengthen the fiber. Combination. Further, if the molecular weight of the amphoteric polyacrylamide paper strength enhancer is 2,000,000 or more, interlayer peeling can be sufficiently prevented. It is preferable that the content ratio of the amphoteric polyacrylamide paper strength enhancer is 0.5 to 5.0% by mass (%) when the pulp fiber is 100% by mass (%). If the addition amount of the amphoteric polyacrylamide paper strength enhancer is 0.5 mass 141273.doc 201016463 percentage (%) or more, the paper strength enhancement effect can be fully exerted. However, even if the added amount exceeds 5. 〇 mass percentage (%), since the paper strength enhancement effect has reached the top point, it only causes the cost to become high. [t bottom layer] Each layer constituting the middle layer 20 may be obtained by papermaking using the same papermaking materials for all layers, or may be obtained by using different papermaking materials for papermaking. As described below, the intermediate layer 21 is different from the preferred structure of the underlayer 22. Therefore, it is preferable that the intermediate layer 21 and the underlayer 22 are obtained by papermaking using different papermaking materials. The pulp in the papermaking raw material of the middle layer 20 contains waste paper pulp. By the waste paper pulp contained in the raw material of the middle layer 20, the multilayer paper substrate as a whole satisfies the following conditions. The content ratio of the waste paper pulp fiber and the inorganic filler which are obtained by the following formula to the multilayer paper base 1 is 5 to 7 Å by mass. It is preferred that the total content of the waste paper pulp fiber and the inorganic filler is 10 to 50% by mass (%). Ιι=(Μ1/Ν1)χ 1〇〇(〇/0) Here, the ratio of the content of the waste paper pulp fiber and the inorganic filler to the multilayer paper substrate 1 is the total content of the ruthenium base layer 20 In the waste paper money. The combination of fiber and inorganic filler material + temporary county χ γ # Π "<. Punching quality, Νι is the dry and dry quality of the multi-layer paper substrate 1. Waste paper pulp fibers and inorganic filler materials are occupied by multi-layer paper substrates. 4 to 3 ratio is less than 5 f percentage (%), then the cavity formation accuracy reduction force exceeds 70 mass% (five), then there is not only the interfiber junction 141273.doc •12- 201016463 becomes too weak to cause interlayer peeling The possibility, and it becomes easy to produce paper powder. The higher the proportion of the waste paper pulp which forms the middle layer 2〇, and the higher the mass ratio of the bottom layer 20 in the multilayer paper substrate 1, the waste paper pulp fiber and the inorganic filler material in the multilayer paper substrate 1 The total content ratio of the total is taken up. The ash content is 1 to 15% by mass (%)', preferably 1 to 1% by mass (%). Here, the ash is a sample obtained by calcining a sample of the multilayer paper base material 1 at 525 ° C in accordance with JIS P 8251, and having the following formula.

Pi = (Pi / Qi) xl 〇〇 (%) Here, 'β! is the ash, the mass of the residue after calcination, and the dry solid mass of the multilayer paper substrate 1 before the satin burning. If the ash content is less than 1 mass% (%), the wear of the mold cannot be prevented. If it exceeds 15 mass% (%), the interlayer strength may be lowered or paper powder may be easily generated. Further, the 'ash' corresponds to the amount of the inorganic filler. The φ ash is derived from the waste paper pulp, so it can be adjusted by the proportion of the waste paper pulp and the proportion of the inorganic filler contained in the waste paper for obtaining waste paper pulp. The inorganic filler has a mass average particle diameter of less than 50 μηη, preferably less than 4 μ μ〇1. Since the mass average particle diameter of the inorganic filler is less than 50 μm, the inorganic filler is easily moved when the mold for forming the cavity contacts, and thus the wear of the mold can be prevented. Further, the content ratio of the inorganic filler having a particle diameter of 50 μm or more in the inorganic filler is less than 40 mass% &% with respect to the total mass percentage (%) of the entire inorganic filler 141273.doc -13· 201016463. /, ratio (/.)' is preferably less than 3 〇 mass percent (%) of the best 疋〇 mass percentage (%). The inorganic filler having a particle size of above has a high probability of coming into contact with the mold when forming a cavity for accommodating the wafer type electronic component. Therefore, the larger inorganic filler material having a particle diameter of 50 μm or more or more in mass percentage (%) or more contains a mold which is easily worn. In order to make the particle size distribution of the inorganic filler material as described above, the processing conditions (e.g., dispersion time, shearing efficiency, processing temperature, etc.) of the dispersion treatment described below can be appropriately adjusted. For example, the longer the dispersion time, the higher the shearing efficiency, the smaller the mass average particle diameter, and the smaller the content ratio of the inorganic filler having a particle diameter of 5 Å or more. The particle size in the present invention means the longest length of each inorganic filler in the image obtained by the cross section of the electron microscope. For example, in the case where the inorganic filler is in the form of a rod, the particle diameter in the present invention is the length thereof, and in the case of an elliptical shape, its long diameter. The content ratio of the inorganic filler having a mass average particle diameter and a particle diameter of 50 μm or more was determined as follows. First, as shown in Table 1, the inorganic filler having a particle diameter of 5 μm or more and less than 250 μm is classified into any one of the particle sizes (A). The intermediate particle diameter of the particle diameter of the upper limit in the interval i and the particle diameter of the lower limit is Bi. Further, the particle size range of the interval i is such that the ratio of the number of the inorganic fillers to the total number of the inorganic fillers having a particle diameter of 5 μη or more and less than 250 μm is the number ratio Ci. Here, the total amount of the inorganic filler having a particle diameter of 5 μm or more and 250 μηι is 1 〇〇 by mass. The inorganic filler having a particle diameter of less than 5 μη does not affect the wear of the mold. Further, in the case of the presence of an inorganic filler having a particle diameter of 250 μm or more, the interval i is increased as in the case of including the maximum diameter. Next, the mass ratio Di of the section i is obtained from [number 1]. Then, the mass average particle diameter was determined from [number 2]. The content ratio of the inorganic filler having a particle diameter of 50 μm or more was determined from [Number 3]. [Table 1]

(A) (Β) (C) (D) Interval i Number of ratios in the middle of the particle size interval i (%) Mass ratio (%) (μιη) Particle size (μιη) Example 1 Example 2 Example 1 Example 2 1 5 or more And less than 10 7.5 16.5 31.9 0.6 3.1 2 10 or more and less than 20 15 35.9 24.2 5.2 9.5 3 20 or more and less than 30 25 21.4 19.8 8.5 21,6 4 30 or more and less than 40 35 14.6 15.4 11.4 32.9 5 40 or more And less than 50 45 3.9 7.7 5.0 27.2 6 50 or more and less than 60 55 1.9 1.1 3.8 5.8 7 60 or more and less than 70 65 1.9 0.0 5.3 0.0 8 70 or more and less than 80 75 1.0 0.0 3.5 0.0 9 80 or more Full 90 85 0.0 0.0 0.0 0.0 10 90 or more and less than 100 95 0.0 0.0 0.0 0.0 11 100 or more and less than 110 105 0.0 0.0 0.0 0.0 12 110 or more and less than 120 115 0.0 0.0 0.0 0.0 13 120 or more and less than 130 125 0.0 0.0 0.0 0.0 14 130 or more and less than 140 135 0.0 0.0 0.0 0.0 15 140 or more and less than 150 145 1.0 0.0 13.1 0.0 16 150 or more and less than 160 155 1.0 0.0 14.9 0.0 17 160 or more and less than 170 165 0.0 0.0 0.0 0.0 18 170 or more and less than 180 175 0.0 0.0 0.0 0.0 19 180 or more and less than 190 185 0.0 0.0 0.0 0.0 20 190 or more Less than 200 195 0.0 0.0 0.0 0.0 21 200 or more and less than 210 205 0.0 0.0 0.0 0.0 22 210 or more and less than 220 215 1.0 0.0 28.7 0.0 23 220 or more and less than 230 225 0.0 0.0 0.0 0.0 24 230 or more and less than 240 235 0.0 0.0 0.0 0.0 25 240 or more and less than 250 245 0.0 0.0 0.0 0.0 Total 100.0 100.0 100.0 100.0 Mass average particle diameter (um) 121.2 34.0 Content ratio of inorganic filler with particle diameter of 50 nm or more (%) 69.2 5.8 [Number 1] Mass ratio (Di) = k(Bi2xCi) xlOO (%) t(Bi2xCi) 15- 141273.doc 201016463 [Number 2] Mass average particle diameter = t (x D, ·) (μιη) i= l [Number 3] Content ratio of inorganic fillers with a particle size of 50 μm or more = Di (%) i = 6 Furthermore, in [Number 1], the reason for using Bi 2 is derived from waste paper. The inorganic filler material, especially the inorganic filler material derived from the coating layer of the coated paper, is mostly in the form of a thin flat plate. Further, in the present invention, the average particle diameter of the inorganic filler is not determined as appropriate based on the number of reasons. That is, even if the amount of the inorganic filler having a small particle diameter is large, if there are a small number of inorganic fillers having a particle diameter exceeding 100 μm, the probability of the mold cutting off the larger particles is also high. Easy to cause wear of the mold. Preferably, all of the pulp fibers contained in the middle layer 20 have a fiber length distribution in which the ratio of the ultrafine fibers having a length of 0.2 mm or less is 20% or more. The fiber length distribution in the present invention is determined by the pulp fiber length test method in the optical automatic measurement method specified by JAPAN TAPPI No. 52, and the fiber length of the test sample which is disintegrated by the pulp disintegration method of JIS P 8220 is measured. And the fiber length distribution obtained from the number basis. If the proportion of the ultrafine fibers having a length of 0.2 mm or less is 20% or more, the bonding strength of the fibers having a length exceeding 〇. 2 mm can be increased, and the cavity formation property becomes higher. Further, it is preferred that the ratio of the ultrafine fibers of 0.2 mm or less is 70% or less. When the ratio of the ultrafine fibers is 70% or less, the filtration of the pulp fibers is inhibited, so that papermaking is easy. 141273.doc -16- 201016463 To adjust the proportion of ultrafine fibers with a length of 0.2 mm or less, the ratio of the waste paper pulp to the middle layer 20 can be adjusted. Specifically, the higher the proportion of the waste paper pulp = the blending ratio, the higher the proportion of fibers having a length of 〇 2 mm or less. Further, after the waste paper pulp is obtained from the waste paper, the following beating treatment can be carried out to adjust. The Canadian standard freeness of the pulp fibers constituting the middle layer 20 is preferably 250 to 500 nU, more preferably 250 to 450 m. <underlayer> The bottom layer 22 is preferably a small amount of inorganic filler. More preferably, it is completely free of inorganic filler materials. However, it is also possible to use the same papermaking material as the middle layer 2 as the papermaking material of the bottom layer 22. In order to reduce the content of the inorganic filler material, it is preferred that the waste paper pulp of the bottom layer 22 is contained in a small amount, and more preferably, it is completely free of waste paper pulp. When the content of the inorganic filler of the right underlayer 22 is small, the surface smoothness of the underlayer 22 can be improved. Since there is a case where the bottom cover tape is attached to the bottom layer 22, the surface smoothness is high, and the adhesion is good. <Middle layer> The preferred mid-layer 21 as a whole satisfies the following conditions. If the following conditions are satisfied, the conditions of the above-mentioned middle and lower layers can be easily satisfied. The content ratio of the waste paper pulp fiber to the inorganic filler in the intermediate layer 21 is preferably from 5 to 8 % by mass (%), preferably from 10 to 60% by mass (%). . A2=(M2/N2)xl〇〇(%) Here, the content ratio of the waste paper pulp fiber in the middle layer 21 of the α2 system and the inorganic filler material H1273.doc •17· 201016463, the waste in the middle layer 21 of the Μ2 system The total mass of the paper pulp fiber and the inorganic filler, and the dry solid mass of the middle layer 21 of the A system. The higher the blending ratio of the waste paper pulp forming the intermediate layer 21, the higher the content ratio of the total amount of the waste paper pulp fibers and the inorganic filler in the intermediate layer 21. The ash component of the middle layer 21 is preferably 2 〇 to 2 〇 mass percent (%). Here, the ash of the middle layer 21 is obtained by calcining at 525 °C in accordance with JIS ρ 8251, taking the intermediate layer 21 as a sample, and obtaining the value obtained by the following formula. P2 = (P2 / Q2) x1 〇〇 (%) Here, β2 is the ash of the middle layer 21, P2 is the mass of the residue after the smoldering, and Q2 is the dry solid mass of the layer 21 before the calcination. The ash of the middle layer 21 can be adjusted by the ratio of the waste paper pulp of the middle layer 21 and the ratio of the inorganic filler contained in the waste paper for obtaining waste paper pulp. It is preferred that all of the pulp fibers contained in the middle layer 21 have a fiber length distribution in which the ratio of the ultrafine fibers having a length of 0.2 mm or less is 2% or more, and it is more preferable that the proportion of the ultrafine fibers is 25 to 5 %. Fiber length distribution. In order to adjust the ratio of the ultrafine fibers having a length of 0.2 mm or less contained in the intermediate layer 21, the blending ratio of the waste paper pulp forming the intermediate layer 21 can be adjusted. Specifically, the higher the proportion of δ 'waste paper paper, the higher the proportion of fibers with a length of 〇 2 mm or less. [Effects] Most of the fresh pulp fibers are relatively hard, the fiber length is long, and the profile is close to a perfect circle. On the other hand, in the waste paper pulp fiber which is recycled from waste paper by pulping and disintegration of paper, 141273.doc 201016463 pulp, drying, and inhibition of m ^ . A ^ short. The drug treatment and mechanical treatment in the Dansheng step and the fiber-waste waste paper pulp fiber contain more short fibers. The short fibers serve to enhance the intersection of the network and the fibers of the coarser fibers such as the new fibers, and the multi-ply paper substrate of the present invention comprising the waste paper pulp fibers. When the 吟 mold is in contact, it prevents the coarser fibers from leaving each other. The inorganic filler material derived from waste paper can hinder the bonding of the fibers to each other (4) The inter-dimensional bonding force becomes small. Therefore, the stress on the mold during the punching or pressing of the cavity is reduced, and the wear is prevented. However, only a larger inorganic filler material will cause stress on the mold. Therefore, in the present invention, by specifically specifying the mass average particle diameter and the particle diameter distribution of the inorganic filler, the stress on the mold is surely reduced to prevent abrasion. Thus, in the multi-ply paper substrate of the present invention, the coarser fibers are bonded to each other even when the cavity is formed, and the wear of the mold is prevented. Therefore, the sharpness of the inner wall of the cavity is highly accurate. Further, the fibers are strongly bonded to each other, so that peeling due to bending stress can be prevented. (Manufacturing Method of Multilayer Paper Substrate) The method for producing a multi-ply paper substrate of the present invention comprises: a waste paper forming step of producing waste paper pulp containing pulp fibers and inorganic filler from waste paper; and using fresh pulp and waste Papermaking step of paper pulp on papermaking of multi-layer paper substrates. [Waste Paper Pulp Manufacturing Step] In the waste paper pulp manufacturing step, the waste paper is subjected to disintegration treatment, and after the dust removal 141273.doc -19-201016463 is treated, the dispersion treatment is performed. Here, as the waste paper, the inorganic filler in the waste paper can be effectively utilized, so that it is preferable to use an inorganic filler containing 5 mass% or more, and it is preferable to use an inorganic filler containing 7 mass% or more. Material. Further, in view of the effective use of the waste paper pulp fiber, it is preferred that the inorganic filler in the waste paper is 40% by mass or less. The disintegration treatment is a process in which waste paper is disintegrated into a slurry form, and a disintegrator called a pulper is usually used. As the beater, for example, a low-concentration beater which is treated at 3 to 5 mass% (%) is treated with 5 to 18 mass% (%), and the twister is '18 to 25 mass% ( %) High-concentration beating for treatment as a low-concentration beater' is exemplified as a rotor (the smashing wing is attached to the bottom or inner wall of the groove. As a medium-sized beater, with the above-mentioned low concentration (four) Similarly, the domain (4) is added, and the broken _ is the shape of the transverse drum. As a high-concentration beater, the kneading and paddle-making machine of the slotted mixed-wing wing can be cited. In addition, the addition of the waste paper is difficult to disintegrate. # &amp ; Use a defibrating machine. When disintegrating, it can be assisted in addition to the disintegrating machine: Dust processing is a process of removing foreign matter other than pulp fibers and inorganic fillers. 'Use a cleaner that removes foreign matter, screen.' , =11 _-' removes the foreign matter of the sand or metal t from the pulp fiber by the principle of centrifugal separation. As the screen, for example, 141273.doc -20 can be used to form the opening with a specific opening π area. . 201016463 Hole or slit basket In order to improve the processing efficiency, it is preferable to rotate or vibrate the basket or to rotate the rotor. Also, as the screen, a Jansson screen or a flat plate screen which removes a large foreign matter can be used. The inorganic filler is dispersed such that the inorganic filler has a mass average particle diameter of less than 50 μm, and the inorganic filler having a particle diameter of 5 Å or more accounts for less than 4% by mass of the inorganic filler. (%). In the dispersion treatment, not only the inorganic filler may be dispersed, but also the residual ink may be reduced. A large amount of magazine waste paper containing coated paper having a pigment-containing coating is used, and the disintegration process is not When it can be sufficiently dispersed (especially when the coating is thick), the inorganic filler may remain as a relatively large block. The block may not be removed even by dust removal, but may be contained in waste paper. In the pulp, when the multi-ply paper substrate obtained by using the waste paper pulp containing the larger inorganic filler material is subjected to punching or embossing, the wear of the mold may be accelerated. However, even if waste paper containing a large amount of coated paper is used, it is only necessary to disperse the inorganic filler in the dispersion treatment to an inorganic filler having an average particle diameter of less than 5 μm, and having a particle diameter of 5 μm or more. When the content ratio of the inorganic filler is less than 4% by mass (%), the wear of the mold can be prevented. As the machine that can be used in the dispersion treatment, for example, a finisher (Finer), ConiFiner, TopFiner, and coniDisc can be cited. , fine crusher, Conical flaker, P〇werFiner and other disintegrators, lapping machine double disc lapping machine, beating machine special free machine, kneading machine, disperser, disperser, 141273.doc -21 - 201016463 Heating disperser (heating and dispersing equipment), mixing and dispersing machine such as NEW TAIZEN. Among these, a disperser or a heating disperser is preferred. When the disperser or the heat disperser is used for the treatment, even if the solid concentration is a concentration of 25 mass % (/〇) or more, the freeness is not extremely lowered, and the inorganic filler can be efficiently changed. fine. Dispersion treatment when treated by a disperser or a heated disperser

The rate is increased, so it is preferred to heat to 80 to 120 Torr C by means of a steam heater. The machine used in the dispersion treatment is a case where the treated waste paper pulp passes through a disc-type heating disperser between two discs, and the flexibility becomes high and it is easy to disperse. Therefore, heating is preferred. Further, it is preferable that the gap between the two discs is an appropriate range. The smaller the gap, the higher the dispersion efficiency, but if it is too small, the processing efficiency is lowered, and there is a tendency to cause an overload. By the above disintegration treatment, dust removal treatment and dispersion treatment, the waste is constituted

Paper pulp fibers are (10). χ, the fillers and pigments in the waste paper are fine. For example, a larger block of the pigment is broken into tens to hundreds of smaller particles. It is preferable to perform deinking by a flotation device or the like in the case of using the printed waste paper before the dispersion treatment. deal with. In the crack after the deinking treatment, the ash may be dispersed in the same manner as the residual ink portion. Therefore, it is preferred to carry out the dispersion treatment after the concentration of the solid matter is 1 () to 35 f. 141273.doc -22- 201016463 It is preferred to carry out the pulp cleaning treatment after the dispersion treatment. If the pulp washing treatment is carried out, the ash content in the waste paper can be easily lowered. Specifically, when the pulp washing treatment is carried out together with the dispersion treatment, even if a large amount of waste paper having a ash content of more than 25% by mass (%) is used, the ash content of the waste paper pulp can be easily adjusted to 0.7 to 25 mass%. (%). Therefore, the ash component of the middle base layer 20 can be easily made 2.0 to 20 mass% (%) in the multilayer paper substrate i in which the intermediate layer 20 is formed using the waste paper pulp. Examples of the machine that can be used in the paper cleaning process include a dnt washing machine, a simplified washing machine, a falling washing machine, a BALIUS PRIT, a filter, a DP Cosmo, a GAP washer, and the like. The lower the solid content concentration, the higher the removal efficiency of the ash in the pulp cleaning treatment. Therefore, it is preferred to dilute the dispersion-treated pulp slurry before the pulp cleaning treatment. Preferably, the pulp slurry is diluted prior to or during the pulp cleaning step. [Papering Step] 9 In the papermaking step, the waste paper pulp is used for papermaking of the middle and bottom layers. The papermaking of the surface layer uses only fresh pulp. Preferably, the papermaking of the bottom layer 22 uses only fresh pulp, but the waste paper pulp can also be used after mixing. Further, in order to improve the adhesion to the cover tape or for other purposes, the various internal additives may be contained in the papermaking raw materials of the respective layers as needed. The basis weight of the multilayer paper substrate can be appropriately selected depending on the size of the wafer type electronic component housed in the cavity, and is usually 200 to 1000 g/m2. As a papermaking method, it is preferable to use 141273.doc -23-201016463 3~10 layers for the purpose of easy handling. As a paper machine used for multi-layer papermaking, for example, a rotary net multi-layer paper machine, a rotary net short jie net combination paper machine, a short net multi-layer paper machine, a long net multi-layer paper machine, and the like can be cited. For the touch of the South and the top cover tape, the bottom of the urea, the temperature of the spit # you can pick up the tape and prevent the generation of fine hair, can also be applied to the surface of the multi-layer paper substrate 1 on the surface or back of the bamboo or Contains a surface treatment agent. Examples of the surface treatment agent include polyvinyl alcohol, temple powder, polyacrylamide, acrylic resin, styrene-butadiene copolymer resin, styrene-isoprene copolymer resin, polyester resin, and ethylene. Vinyl acetate copolymer resin, vinyl acetate, vinyl alcohol copolymer resin, amine ester resin, and the like. Further, as the surface treatment agent, a styrene-maleic acid copolymer resin or an olefin-maleic acid copolymer resin can also be used. When a styrene-maleic acid copolymer resin having a hydrophilic group (carboxyl group) or an olefin-maleic acid copolymer resin is applied, not only surface coating but also a carboxyl group may form a hydrogen bond with the pulp fiber. Crosslink the fibers. Therefore, the interfiber bonding can be further improved. By increasing the bonding between the fibers, the resistance when the top cover tape or the bottom cover tape is peeled off is increased, the peel strength is made stronger, and the generation of fine hair can be further prevented. As a mechanism for coating or impregnating the surface treatment agent on the surface or the back surface of the multilayer paper substrate 1, for example, a bar coater, a knife coater, an air knife coater, a bar coater, or a door roll coater can be used. Or a coating machine such as a roll coater such as a size press or a calender coater or a biller coater (Bill-blade coater). Among these, the surface treatment agent can be easily penetrated deep by nip, and therefore, a size press or a calender coater is preferred. 141273.doc -24- 201016463 The coating amount of the surface treatment agent is preferably 〇 w 1 g/m 2 ' in terms of dry coating amount, more preferably G·6 to U coffee 2 . When the surface treatment agent is applied in a dry coating amount of (U g / m 2 or more, the generation of fine hair or paper powder can be sufficiently suppressed, and if the dry coating amount is U g / m 2 or less, the coating is performed. The adhesive force to the top cover tape can be sufficiently ensured. [Effects and Effects] In the method for producing the multilayer paper substrate 1, the multilayer paper substrate 1 is produced by using short paper fibers of waste paper. The method obtained in the "paper substrate 1" prevents the coarser pulp fibers from being separated from each other when the cavity is formed, and the bonding strength of the fibers to each other is reduced by the inorganic filler material derived from the waste paper. It can prevent the wear of the mold and improve the formation precision of the mold.

Moreover, according to the present invention, the inorganic filler material (filler, pigment P) of waste paper can be effectively utilized.

[Examples] Hereinafter, the present invention will be described in detail based on examples, but the present invention is not limited to the following examples. Further, the numerical values indicating the blending, concentration, etc. are the values of the mass basis of the solid matter or the active ingredient. [Manufacture of waste paper pulp] &lt;Manufacturing method of waste paper pulp A&gt; 泮J used a beater to disintegrate miscellaneous waste paper (ash content: 20.3%), and after passing through a dust removing device (cleaner and screen), The deinking agent was added by diluting with water until the solid content concentration was 1%, and deinking treatment was carried out by a flotation device. 141273.doc -25- 201016463 Then, it was concentrated by a tilt extractor and a screw pressure dehydrator until the solid concentration was about 30%. Then, using a disc-type heating and dispersing device (KRIMA manufactured by Selwood Co., Ltd.), the dispersion treatment was carried out under the condition that the gap between the discs was 〇.2 mm and the temperature was 110 °C, and then the water was diluted while passing through the pulp. A washing machine (DNT washing machine: manufactured by Aikawa Iron Works) was used to obtain waste paper pulp A containing pulp fibers and inorganic filler materials. The ash of the waste paper pulp A was measured and found to be 7.3%. &lt;Manufacturing method of waste paper pulp B&gt; The paper waste paper (ash is 33.2%) is disintegrated by a beater, and after passing through a dust removing device (cleaner and screen), a tilt extractor and a screw pressure dehydrator are utilized. Concentrate until the solids concentration is about 30%. Then, a disc type heat dispersing device (KRIMA manufactured by Selw〇〇d Co., Ltd.) was used, and the gap between the discs was 〇 2 mm and the temperature was j丨〇. The dispersion paper was subjected to a dispersion treatment, and further, while being diluted with water, a waste paper pulp B containing pulp fibers and an inorganic filler was obtained by a pulp washing machine (DNT washing machine: manufactured by Aikawa Iron Works). The ash content of the waste paper pulp B was measured and found to be 23.5%. &lt;Manufacturing method of waste paper pulp C&gt; The magazine waste paper (ash is divided into 2〇3%) is disintegrated by a beater, and after passing through a dust removing device (cleaner and screen), it is diluted with water to a solidity of 1 As far as % is concerned, a deinking agent is added, and a deinking treatment is performed by a flotation device. Then, it was concentrated by a tilt extractor until the solid concentration was 5%. Then, through the double disc lapping machine (DDR, d〇uMe I 142273.doc -26 201016463 times, the freeness is reduced from 3 58 ml to 1 87 ml, and the waste containing pulp fibers and inorganic filler is obtained. Paper pulp C. The ash content of the waste paper pulp C was measured and found to be 16.8%. &lt;Manufacturing method of waste paper pulp D&gt; The waste paper of the drawing paper (ash content: 33.2%) was disintegrated by a beater. After the dust removing device (cleaner and screen), the free paper is reduced from 358 ml to 330 ml by a double disc lapping machine to obtain a waste paper pulp D containing pulp fibers and inorganic filler. The ash of the paper pulp D was measured and found to be 29.1%. &lt;Manufacturing method of waste paper pulp E&gt; The magazine waste paper (ash content: 20.3%) was disintegrated by a beater, and passed through a dust removing device (cleaner and screen) Thereafter, the mixture was diluted with water until the solid content concentration was 1%, a deinking agent was added, and a deinking treatment was performed by a flotation device. Then, it was concentrated by a tilt extractor and a screw pressure dehydrator until the solid concentration was about 15%. , using disc type heating The dispersing equipment (KRIMA manufactured by Selwood Co., Ltd.) was dispersed in a disc with a gap of 1. 〇mm and a temperature of 7 (TC), and further diluted with water while passing through a pulp washing machine (DNT washing machine: Aikawa Iron Works) The waste paper pulp E containing the pulp fiber and the inorganic filler material was obtained. The ash content of the waste paper pulp e was measured and found to be 7.5%. &lt;Manufacturing method of waste paper pulp F&gt; Magazine waste paper using a beater (Gray is 20.3%) Disintegrated, after passing through the dust removal device (cleaner and screen), dilute with water until the solid concentration is 丨0/〇 is 141273.doc •27- 201016463, add deinking agent, use flotation The deinking treatment was carried out. Then, the β was concentrated by a tilt extractor and a screw pressure dehydrator until the solid concentration was about 30%. Then, it was dispersed by a disperser (manufactured by Aikawa Tiewei, TL1 type), and further diluted with water. On one side, a paper-based cleaning machine (dnt washing machine: manufactured by Aikawa Iron Works) was used to obtain a waste paper package containing pulp fibers and inorganic fillers. The ash of the waste paper pulp F was measured and found to be 7.3. % <Manufacturing method of waste paper pulp G> Using a beater to disperse the printed waste paper (ash ash 3 3%), after passing through a dust removing device (cleaner and screen), dilute with water to a solid matter At a concentration of 1%, a deinking agent was added, and a deinking treatment was carried out by a flotation device. Then, the concentration was adjusted to about 30% by a tilt extractor and a screw pressure dehydrator. Then, a disperser (Aikawa Iron) was used. The TL1 type was subjected to a dispersion treatment, and further, while being diluted with water, a waste paper pulp G containing pulp fibers and an inorganic filler was obtained by a pulp washing machine (DNT washing machine: manufactured by Aikawa Iron Works). The ash content of the waste paper pulp G was measured and found to be 18.8%. &lt;Manufacturing method of waste paper pulp&gt; The magazine waste paper (ash content: 20.3%) was disintegrated by a beater, and after passing through a dust removing device (cleaner and screen), it was diluted with water to a solid concentration of 1 〇/〇. Up to now, a deinking agent was added, and a deinking process was performed by a flotation device. Then, use a tilted extractor to concentrate to a solid concentration of about 5% for 141273.doc -28· 201016463. Then, the double disc lapping machine was subjected to two treatments to reduce the freeness from 358 ml to 232 ml to obtain a waste paper pulp containing pulp fibers and an inorganic filler. The ash content of the waste paper pulp was measured and found to be 16.6%. &lt;Manufacturing method of waste paper pulp I&gt; The magazine waste paper (ash content: 20.3%) was disintegrated by a beater, and after passing through a dust removing device (cleaner and screen), the water was released to a solid concentration of 1%. ®, add deinking agent, and perform deinking treatment with a flotation device. Then, it was concentrated by a tilt extractor to a solid concentration of about 5%. Then, the double disc refiner was subjected to two treatments to reduce the freeness from 358 ml to 274 ml, and a waste paper pulp I containing pulp fibers and an inorganic filler was obtained. The ash content of the waste paper pulp was measured and found to be 16.7%. 〈 <Manufacturing method of waste paper pulp J> The paper waste paper (ash is divided into 33 2%) is disintegrated by a beater, and passed through a dust removing device (cleaner and screen). Then, it was concentrated by a tilt extractor and a screw pressure dehydrator until the solid content concentration was about 30%. Then, 'using a disc-type heating and dispersing device (KRIMA, manufactured by Selw〇〇d Co., Ltd.), 'with a gap of 〇·2 mm at a disc and a knife at a temperature of 11 (TC under the condition of TC) Waste paper pulp J with an inorganic filler material. The ash content of the waste paper pulp J was measured and found to be 30.3%. 141273.doc •29· 201016463 [Manufacturing of a multilayer paper substrate] <Example 1> Using a double disc The lapping machine combines NBKP: 30%, LBKP: 70% and mixes it into CSF (Canadian standard freeness) 460 ml to obtain a pulp slurry for surface layer formation. NBKP is used by a double disc lapping machine: 10%, LBKP: 60%, waste paper pulp A: 30% mixed beating, prepared into CSF (Canadian Standard Freeness) 410 m to obtain pulp slurry for intermediate layer formation. LBKP was beaten separately by a double disc lapping machine. 470 ml of CSF (Canadian Standard Freeness) was prepared to obtain a pulp slurry for forming an underlayer. To each pulp slurry, 2.0% of aluminum sulfate was added to 100% of the solids of the pulp slurry. Further, relative to the pulp The solid content of the slurry is added by 〇〇% 0.50% of Size pine N-lll (a rosin emulsion sizing agent manufactured by Arakawa Chemical Industries Co., Ltd.) as a sizing agent. Further, it is added as a paper strength with respect to the solid content of the pulp slurry of 100%. P〇lyStroI1 1250 (amphoteric polyacrylic acid amide-based paper strength enhancer, molecular weight 3 million) made by abandoned 5-layer papermaking machine The surface layer (1 layer) is 100 g/m2, the middle layer is (3 layers), 6 〇〇g/m2, and the bottom layer (1 layer) is 100 g/m2'. Further, the saponification degree is 88 by the size of the size press. The polyvinyl alcohol having a % by ear and a degree of polymerization of 1 使 was applied to a dry coating amount of 1.0 g/m 2 . Then, it was smoothed by a mechanical calender to have a basis weight of 800 g/m 2 and a thickness of 〇. 95 mm multilayer paper substrate. 141273.doc 201016463 &lt;Example 2&gt; As a raw material for the intermediate layer forming pulp slurry, NBKP: 10%, LBKP: 20%, waste paper pulp B: 70% instead of NBKP: 10% was used. A basal weight of 800 g/m 2 was produced in the same manner as in Example 1 except that LBKP: 60% and waste paper pulp A: 30%. A multilayer paper substrate of 0.95 mm. &lt;Example 3&gt; 1 As a raw material for the pulp slurry for intermediate layer formation, NBKP: 10%, LBKP: 40%, waste paper pulp C: 50% instead of NBKP: 10%, A multilayer paper substrate having a basis weight of 800 g/m 2 and a thickness of 0.95 mm was produced in the same manner as in Example 1 except that the LBKP was 60% and the waste paper pulp A was 30%. <Example 4> As a raw material for the pulp slurry for intermediate layer formation, NBKP: 10%, LBKP: 75%, waste paper pulp F: 15% instead of NBKP: 10%, LBKP: 60%, waste paper pulp A: 30 was used. A multilayer paper substrate having a basis weight of 800 g/m 2 and a thickness of 0.95 mm was produced in the same manner as in Example 1 except for the above. <Example 5> As a raw material for the pulp slurry for intermediate layer formation, NBKP: 10%, LBKP: 30%, waste paper pulp G: 60% instead of NBKP: 10%, • LBKP: 60%, waste paper pulp A: A multilayer paper substrate having a basis weight of 800 g/m 2 and a thickness of 0.95 mm was produced in the same manner as in Example 1 except for 30%. &lt;Example 6&gt; As a raw material of the pulp slurry for intermediate layer formation, NBKP: 10% and LBKP: 10°/ were used. Waste paper pulp G: 80% instead of NBKP: 10%, LBKP: 60%, waste paper pulp A: 30%, used as the base paper, 141273.doc -31 · 201016463 LBKP ·· 50%, waste paper pulp G: 50% instead of LBKP: 100%, a multilayer paper substrate having a basis weight of 800 g/m 2 and a thickness of 0.95 mm was produced in the same manner as in Example 1. &lt;Example 7&gt; As a raw material for the pulp slurry for intermediate layer formation, NBKP: 10%, LBKP: 40%, waste paper pulp G: 50% instead of NBKP: 10%, LBKP: 60%, waste paper pulp A: 30%, a base weight of 800 g/m2 and a thickness of 0.95 mm were produced in the same manner as in Example 1 except that LBKP: 50%, waste paper pulp G: 50% was used instead of LBKP: 100%. Multi-layer paper substrate. <Example 8> As a raw material for the pulp slurry for intermediate layer formation, NBKP: 10%, LBKP: 40%, waste paper pulp Η ·· 50% instead of NBKP ·· 10%, LBKP ··60%, waste paper pulp A multilayer paper substrate having a basis weight of 800 g/m 2 and a thickness of 0.95 mm was produced in the same manner as in Example 1 except that 30% of A·· was used. &lt;Comparative Example 1 &gt; As a raw material for the pulp slurry for intermediate layer formation, NBKP: 10%, LBKP: 90% was used instead of NBKP: 10%, LBKP: 60%, and waste paper pulp A: 30%, and In Example 1, a multilayer paper substrate having a basis weight of 800 g/m 2 and a thickness of 0.95 mm was produced in the same manner. <Comparative Example 2> As the raw material for the pulp slurry for intermediate layer formation, the same was used as in Example 1 except that the waste paper pulp A: 100% was used instead of NBKP: 10%, LBKP: 60%, and waste paper pulp A: 30%. A multilayer paper substrate having a basis weight of 800 g/m 2 and a thickness of 141273.doc -32 - 201016463 0.9 5 mm was produced. &lt;Comparative Example 3 &gt; As a raw material for the intermediate layer-forming pulp slurry, waste paper pulp D: 100% was used instead of NBKP: 10%, LBKP: 60%, and waste paper pulp A: 30%, and the examples were 1 A multilayer paper substrate having a basis weight of 800 g/m 2 and a thickness of 0.95 mm was produced in the same manner. <Comparative Example 4> As a raw material for the pulp slurry for intermediate layer formation, NBKP: 10%, LBKP: 40%, waste paper pulp E: 50% instead of NBKP: 10%, LBKP: 60%, and waste paper pulp A: 30 were used. A multilayer paper substrate having a basis weight of 800 g/m 2 and a thickness of 0.95 mm was produced in the same manner as in Example 1 except for the above. <Comparative Example 5 &gt; As a raw material for the pulp slurry for intermediate layer formation, NBKP: 10%, LBKP: 40%, waste paper pulp I: 50% instead of NBKP: 10%, LBKP: 60%, waste paper pulp A: A multilayer paper substrate having a basis weight of 800 g/m 2 and a thickness of 0.95 mm was produced in the same manner as in Example 1 except for the above. <Comparative Example 6> As a raw material for the pulp slurry for intermediate layer formation, NBKP: 10%, LBKP: 20%, waste paper pulp J: 70% instead of NBKP: 10%, LBKP: 60%, and waste paper pulp A: 30 were used. A multilayer paper substrate having a basis weight of 800 g/m 2 and a thickness of 0.95 mm was produced in the same manner as in Example 1 except for the above. [Composition of Multilayer Paper Substrate] With respect to the multilayer paper substrates of Examples 1 to 8 and Comparative Examples 1 to 6, the ash, middle layer and bottom layer of waste paper pulp of waste paper pulp were obtained by the following method 141273.doc -33- 201016463 rate, waste paper pulp preparation ratio of multi-layer paper substrate, ash content of multi-layer paper substrate, mass average particle diameter of inorganic filler, content ratio of inorganic filler having particle diameter of 5 〇μηη or more, medium-bottom layer The proportion of the fine fibers is summarized in Table 2. &lt;Measurement of ash&gt; The ash of the waste paper pulp and the multi-ply paper base material was obtained by calcining the sample at 525 ° C according to JIS ρ 825 并 and measuring the mass of the residue, and the following formula was used. P = (P / Q) x l 〇〇 (%) Here, β is ash, P is the mass of the residue after calcination, and Q is the mass of the dried solid before calcination. &lt;Method for determining the distribution ratio of waste paper pulp of the middle layer, the bottom layer and the multilayer paper substrate&gt; The distribution ratio of the waste paper pulp is determined by the following formula. α=(Μ/Ν)χ100(%) Here, the blending ratio of α-based waste paper pulp,] is the dry solids quality of the waste paper pulp used. The dry solid mass of all pulps used in the system. Further, the ratio of the waste paper pulp blending ratio of the multi-ply paper base material to the total ratio of the waste paper pulp fibers and the inorganic filler to the multi-ply paper base material is substantially the same. &lt;Method for determining the content ratio of the inorganic filler having a mass average particle diameter of 5 Å or more and an inorganic filler; &gt; Using a scanning electron microscope (Hitachi mgh_Techn〇1〇gies)

Manufacture &amp; Service Co., Ltd. S3600N) continuously photographs a 0.95 mm x 10 mm section of a cross-section of a multi-ply paper substrate, and extracts more than 5 μm of inorganic filler material from the image. Then, according to the above 141273.doc •34· 201016463, more than 5 inorganic fillers are more than loo. Then, the mass average particle diameter was determined from the above-mentioned number 2, and the content ratio of the inorganic filler having a particle diameter of 50 μm or more was determined from the above-mentioned number 3. &lt;Measurement of the ratio of the ultrafine fibers in the middle layer&gt; The ratio of the ultrafine fibers in the middle layer is the disintegration of the bottom layer in the multilayer paper substrate by the standard method using an artificial disintegrator, and using Kaj aani The fiber length distribution measuring machine "Fiber Lab" manufactured by the company measures the fiber length distribution and obtains it. The number of fibers was determined to be 1 or more. Furthermore, the middle and bottom layers take the following approach. The strip-shaped multi-ply paper substrate divided into 8 mm width was immersed in tap water for a day and night to sufficiently wet the paper, and the surface layer of the i layer was peeled off and separated to take the middle layer. 141273.doc -35- 201016463 &lt;N&lt; ratio of micro-weaving dimension in the middle layer (%) cn vS m inch·inch m Ο divination VO vq Pi 卜σί $ 00 cs 00 m inch 钵Ϊ 5 ^ i -Mii 04 ΐτί inch fW rs 00 &lt;N ο 卜ν〇CN m 00 cs 00 inch 00 1 inch σ\ V-&gt; ^±Β οο ο; CN cs »〇cn TH 1—Η cn ΓΛ 00 mm VO m ON 00 jn I v〇oo m 灰 ash (%) of multilayer paper substrate 1 _1 VC ΓΛ ri VO *η 00 Os O) os vd ΓΛ 00 00 cs 00 oi inch v 〇ΟΟ in multi-layer paper substrate Waste paper pulp blending rate (%) »Ti &lt;Ν &lt;Ν »r&gt;&lt;N *Λ »r&gt; Pi rn JO ΓΛ v〇VO 00 Ο VQ jn ΙΛ K Ρί &lt;N »η V ^ «?铋w Ο O o Ο ο 沄o Ο ooo Ο ο VWS? «?鲧U -δ- ^ 沄osg 沄Ο o H o ο Waste paper ash (%) rn &lt;N 00 ψ-^ ΓΛ c4 CN| »—· ri (N lt (N &lt;N v〇vd I rn On &lt;N •η 卜 Dispersion Treatment Method Heating Dispersion Interval 0.2 mm Heating Dispersion Clearance 0_2 mm DDR 2 Stage Treatment Disperser Disperser Disperser DDR 2 segment processing 1 heating dispersion gap 0.2 mm DDR 1 segment Heating dispersion gap 1.0 mm DDR 2 stage treatment heating dispersion gap 0.2 mm &lt; CQ u Uh Ο O o X &lt; Q ω IH Example 1| Example 2 Example 3 1 Example 4| 1 Example 5| Example 6| |Example 7| Example 8 Comparative Example 1 Comparative Example 2 Comparative Example 3 Comparative Example 4 Comparative Example 5 Comparative Example 6 -36-141273.doc 201016463 [Evaluation of Multilayer Paper Substrate] For the above Example 1~ 8 and Comparative Examples 1 to 6 A multilayer paper base material was produced, and the mold abrasion property, the Z-axis strength, the cavity formation precision, and the paper powder generation prevention property were evaluated by the following methods. Table 3 shows the evaluation results. The measurement and evaluation are carried out after the pre-treatment, which is prepared according to JIS P 8111 to a temperature of 23 ° C ± 1 ° C and a relative humidity of 50% ± 2%. status. &lt;Mold wear evaluation&gt; Using a ACP5〇5s type puncher manufactured by JAPAN AUTOMATIC MACHINE Co., a multi-ply paper base material which was formed into a strip-shaped unformed cavity of 8 mm width was selected according to JIS C 0806-3 2 mm intervals are continuously punched at 3 million locations to form a cavity. At this time, a new mold after polishing was used as a mold. Further, the shape of the cavity was such that the length in the width direction was 112 mm, and the length in the flow direction was 0.62 mm. Then, the section of the 3 million hair cavity was observed with a magnifying glass, and the condition of fine hair generation was examined, and the wear of the mold was evaluated based on the state of the fine hair. The grade of visual evaluation is as follows. 'If it is grade 1, 2, it is the level available for practical use. Grade 1: No fine hair is observed at all (almost no mold wear). Grade 2: 1 to 3 fine hairs (very small mold wear) were observed at a width of 1.12 mm. Grade 3: 4 to 1 fine roots (slightly worn) were observed at a width of 1.12 mm. Grade 4: 11 to 20 fine hairs were observed at a width of 1.12 mm (respectively 141273.doc -37- 201016463 mold wear). Grade 5: More than 20 fine hairs were observed at a width of 1.12 mm (the mold was severely worn and needs to be ground or replaced). &lt;Measurement of Z-Axis Strength&gt; The Z-axis strength was measured in accordance with the TAPPI Practical Test Method UM584. When the z-axis strength is 200 N/(25 mm) 2 or more, even if the storage backing paper is wound around the reel, bending stress is generated, and interlayer peeling is less likely to occur. &lt;Evaluation of Cavity Formation Accuracy&gt; The cavity of 2 times before the 3 millionth punching of the above-mentioned &lt;mold wear evaluation&gt; was photographed from the surface side by a stereomicroscope. Fig. 2 shows an example of a photograph taken. The black portion of the photograph is a cavity with a surface layer surrounding the bottom paper. For the photograph of each cavity, the narrowest length of the flow direction was measured, and the accuracy of cavity formation was evaluated. The longer the narrowest length of the flow direction of the cavity, the lower the height of the concavity and the higher the accuracy of cavity formation. Here, the narrowest length of the flow direction of the cavity is as shown in Fig. 3, which is a pattern of the photograph of Fig. 2, which is the most prominent portion of the inner wall faces 30, 30 of the cavity opposite to each other in the direction perpendicular to the flow direction. 31 is a length b parallel to the flow direction of each other. The price is as follows. Evaluation of ◎, 〇, △ is a practical level available. Sweat price ◎: The average value of the narrowest length b of the flow direction of the cavity (4) 〇) is 〇·5 8 mm or more. The price is 平均值: the average value of the narrowest long 〇 of the flow direction of the cavity (η, 〇.56mm or more and less than 58.58mm. 141273.d« -38· 201016463 Evaluation △: the flow direction of the cavity The average value of the narrow length b (n=20) is 0.5 4 mm or more and less than 0 · 5 6 mm. Evaluation x: The average value of the narrowest length b of the flow direction of the cavity (n=20) is less than 0.54 Mm. &lt;paper powder production prevention evaluation method&gt;

Take the bottom paper of 1000 m before the 3 millionth punching in the above-mentioned <Mold Wear Evaluation>. With the TWA6601 manufactured by Tokyo Welles Co., the top cover tape was not pasted and the parts of the cavity were inserted, and the storage backing paper was unwound at a speed of 2400 beats/min. After the film was taken out, the state of occurrence of the paper powder and the state of fiber detachment in the cavity were visually evaluated. The evaluation is as follows. Evaluate the level of practical use of ◎, 〇, and △. Evaluation ◎: Almost no paper powder was produced. Evaluation 〇: Paper powder is rarely produced. Evaluation Δ: Paper powder was slightly generated. Evaluation X: A large amount of paper powder was produced. [table 3]

Mold wear evaluation Z-axis strength N/(25 mm) 2 Cavity formation accuracy evaluation Paper powder generation prevention evaluation Example 1 Level 1 320 ◎ ◎ Example 2 Level 2 240 ◎ 〇 Example 3 Level 2 295 ◎ ◎ Example 4 Grade 1 325 〇 ◎ Example 5 Grade 2 273 ◎ 〇 Example 6 Grade 2 215 ◎ 〇 Example 7 Grade 2 281 ◎ 〇 Example 8 Grade 2 275 ◎ ◎ Comparative Example 1 Grade 3 358 Δ 〇 Comparative Example 2 Grade 2 195 Δ Δ Comparative Example 3 Grade 5 120 〇X 141273.doc -39- 201016463 Comparative Example 4 Grade 4 273 〇Δ Comparative Example 5 Grade 3 235 〇△ Comparative Example 6 Grade 2 193 〇Δ Multi-layer paper made from waste paper pulp The base material is such that the inorganic filler has a mass average particle diameter of less than 50 μm and the inorganic filler having a particle diameter of 50 μm or more is less than 40%, and the waste paper pulp preparation ratio of the multilayer paper substrate is 5 to 5. 70% (that is, the ratio of the total amount of the waste paper pulp fiber and the inorganic filler to the multi-layer paper substrate is 5 to 70%), and the ash is divided into 1 to 15% in the examples 1 to 8' The wear of the mold is prevented. Further, the strength of the boring shaft and the formation accuracy of the cavity are high, and the generation of paper powder is also prevented. On the other hand, in Comparative Example 1 in which a multi-ply paper substrate was produced without using waste paper pulp, the mold was easily worn and the cavity formation precision was low. In the comparative example 2 in which the waste paper pulp was used in the multi-ply paper pulp, the precision of the cavity formation and the strength of the two-axis were low, and paper powder generation was also observed. . When the mass average particle diameter of the inorganic filler is 5 Å or more, the content ratio of the inorganic filler having a particle diameter of 50 μη! or more is 4% by weight or more, and the mold is easily worn in Comparative Example 3 where the knives are 15/〇. The strength of the boring shaft and the formation of the cavity are low, and the paper powder is easily generated. The content ratio of the inorganic filler having a particle diameter of 50 μm or more was 4% by weight, and the mold of Comparative Example 4 was easy to wear, the cavity formation precision and the enthalpy strength were low, and paper powder was easily generated. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing an embodiment of a multi-ply paper base material for accommodating bottom paper of the present invention; 141273.doc 201016463 Fig. 2 is a photograph example of a cavity photographed when evaluating the accuracy of cavity formation. And Figure 3 is a diagram of the pattern of Figure 2 being modeled. [Main component symbol description] 1 Multi-layer paper substrate 10 Surface layer 20 Middle layer 21 Middle layer 22 Bottom layer 141273.doc -41 -

Claims (1)

201016463 VII. Patent Application Range: 1 · A multi-layer paper substrate for wafer type electronic parts storage base paper, which is characterized in that: a pulp fiber and an inorganic filler material derived from waste paper are contained in a layer other than the surface layer, The content ratio of the pulp fiber derived from the waste paper to the inorganic filler is 5 to 70% by mass (%), the ash is 丨 15 15% by mass (%), and the mass average particle diameter of the above inorganic filler is less than 5 〇. Μηη, and an inorganic filler having a particle diameter of 50 μm or more is contained in a range of less than 40% by mass (%). 2. The multi-layer paper substrate for a wafer-type electronic component storage base paper of the present invention, wherein the ash is divided into 1 to 10 mass% (%), and the mass average particle diameter of the inorganic filler is less than 50 μm, and is less than The range of 30 mass% (%) includes an inorganic filler having a particle diameter of 5 〇 (four) or more. ~ 3. The wafer of the item 1 or 2 is also a multi-layer paper substrate for the electronic component storage base paper, wherein all the pulp fibers contained in the layer and the layer of the layer have a length of 〇.2 ugly. The following ratio of the fine fibers is a fiber length distribution of 20% or more, wherein 'the fiber length distribution is free from the 丨田丄' 1) using the optical fiber length in the optical automatic measurement method prescribed by JAPAN TAPPI No. 52 The test method was measured for the length of the fiber 141273.doc 201016463, which was obtained by the method of the silver smashing and disintegrating method of JIS P8220, and the fiber length distribution was determined by the number basis. A method for producing a multi-ply paper substrate for a base paper, comprising: a waste paper pulp manufacturing step of producing waste paper pulp comprising pulp fibers and inorganic true charge materials from waste paper; and using a fresh pulp and waste paper pulp for the multi-layer paper a papermaking step of papermaking of a substrate; in the waste paper pulp manufacturing step, the waste paper containing 5 mass% (%) or more of the inorganic filler as a gray knife is disintegrated After the dust removal treatment is performed, the dispersion treatment is performed so that the mass average particle diameter of the inorganic filler is less than 50 μm, and the content of the inorganic filler having a particle diameter of 50 μm or more contained in the inorganic filler is less than 4 〇. Percentage of mass (%); in the papermaking step, the waste paper pulp is used for papermaking of a layer other than the surface layer. 5. A method for producing a multi-layer paper substrate for a wafer type electronic component storage base paper according to the item 4, In the above dispersion treatment, a disperser or a heating disperser is used. 141273.doc