201015613 六、發明說明： 【發明所屬之技術領域】 本發明是關於被使用於紫外線照射處理的準分子燈裝 置，尤其是關於具備測定從準分子燈所放射的紫外線的光 感測器的準分子燈裝置。 【先前技術】 φ 近年來，例如在液晶顯示面板的玻璃基板依紫外線照 射所致的洗淨工序等，使用者具備放射波長200nm以下的 真空紫外光，例如172nm的真空紫外光的準分子燈的準分 子燈裝置。在此些準分子燈裝置中，真空紫外光在空氣中 會衰減之故，因而在成爲筐體的開口部的半導體基板或液 晶基板等的工件所成的被照射物與準分子燈之間，設置石 英玻璃所成的窗材，經窗材而將真空紫外光照射在被照射 物。然而，石英玻璃所成的窗材是高價格之故，因而如專 ❹ 利文獻1所示地，拆除石英玻璃所成的窗材，而採用接近 被照射物與準分子燈的構造。 一方面，準分子燈是藉由隨著經過其使用時間的劣化 ，所照射的真空紫外光的強度會徐徐地降低。當所照射的 真空紫外光的強度降低，則洗淨被照射物的表面的能力也 會降低。所以，隨時測定來自準分子燈的真空紫外光的強 度，使得強度不會降低成所定値以下的方式，進行提昇燈 輸入的反饋控制，或是強度無法輸出至所定値以上時，則 必須更換準分子燈。 -5- 201015613 在專利文獻1所述的準分子燈裝置，記載著設置檢測 出來自準分子燈的真空紫外光的強度的光感測器。該光感 測器是例如將1 72nm的紫外線以螢光體變換成可視光，並 以光電二極體檢測出可視光而變換電性訊號俾得到輸出。 第7圖是表示對於專利文獻1所述的準分子燈101的 長邊方向沿著垂直方向的準分子燈裝置100的槪略構成的 斷面圖，第8圖是表示圖示於第7圖的準分子燈101的構 成的立體圖。 如第8圖所示地，具備長方體的放電容器102的準分 子燈101，是對於燈的長邊方向垂直方向的斷面爲長方形 ，而在放電容器102的上下兩面沿著放電容器102的長邊 方向延伸的方式設有外部電極103，104。在該例子中，設 於上面的一方的外部電極103是被構成板.狀，而設於下面 的另一方的外部電極104是被構成網狀。又，在放電容器 102的上面，設有相對於光感測器105的板狀地所構成的 外部電極103的一部分被削除的開口部106。 如第7圖所示地，準分子燈101是網狀地所構成的外 部電極104相對於被照射物W的方式，設置複數支，例 如圖示地設置3支於準分子燈裝置100的筐體107的內部 。筐體107是被構成一面被開口的箱狀，而被照射物W 被搬運至與其開口面平行的方向。在相對於筐體107的上 述開口面的一面，設有測定來自準分子燈101的真空紫外 光的光感測器105所導出入的貫通孔108，該貫通孔108 是光感測器105被導入出之故，因而設於相對於準分子燈 -6- 201015613 101的開口部106的位置。 從筐體107的貫通孔108所導出入的光感測器105, 設有：從準分子燈101照射著真空紫外光的螢光體109, 及檢測出藉由螢光體109被變換的可視光的光電二極體 110。光感測器105是欲檢測出來自準分子燈101的真空 紫外光時，則藉由氣缸111從筐體107的貫通孔108被導 入至筐體107的內部，朝準分子燈1〇1的開口部1〇6移動 φ —定量而被近接。近接於開口部106的光感測器105是將 真空紫外光藉由螢光體109變換成可視光，而藉由光電二 極體110檢測出可視光。光感測器105是藉由氣缸111， 再經貫通孔108而被導出至筐體107的外部。該光感測器 105的導出入，是藉由被連接於光感測器105的氣缸111 所進行。 專利文獻1 :日本特開2004-97986號公報 • 【發明內容】 但是，該準分子燈裝置100是筐體107的一面被開放 之故，因而筐體107的內部成爲大氣狀態。所以，點燈準 分子燈101時，藉由準分子燈101所照射的真空紫外光與 大氣中的氧氣進行反應之故，因而大氣中的氧氣濃度會變 動。一方面，隨著利用未予圖示的搬運機構的被照射物W 的搬運，筐體107的內部是發生氧氣濃度有變動的大氣的 對流C。所以，藉由該對流C，使得光感測器105與準分 子燈101之間的氧氣濃度會變動，而從準分子燈101所放 201015613 射的真空紫外光的氧氣所致的吸收量會變動，藉由光感測 器105所檢測出的真空紫外光的氧氣所致的吸收量會變動 如此地，在筐體107下方所開口的準分子燈裝置100 中，藉由被照射物w被搬運，無法將筐體107內部的氧 氣濃度作成均勻，而準分子燈1〇1與近接於此的光感測器 105之間的氧氣濃度，及準分子燈101與被照射物W之間 的氧氣濃度不會相同。所以，依據藉由光感測器105所檢 測出的真空紫外光的強度，進行控制準分子燈1 01的輸入 時，則有所定値以上的真空紫外光被照射於被照射物W， 或是所定値以下的真空紫外光被照射，而對於被照射物W 無法均勻地照射真空紫外光。 本發明的目的是鑑於上述的問題是，提供一種具備以 簡便構造抑制依氧氣濃度變動的大氣對流所致的紫外線的 測定値變動的光感測器的準分子燈裝置。 本發明是爲了解決上述的課題，採用如下的手段。 第1手段是一種準分子燈裝置，具有：準分子燈，及 測定從該準分子燈所放射的紫外準分子光的光感測器，及 至少收納上述準分子燈與上述光感測器的筐體的準分子燈 裝置’其特徵爲：上述光感測器是具有：具備光電二極體 與螢光體的光監測器部，及具有開放於該光監測器部側與 上述準分子燈側的開口，而上述準分子燈側的開口被近接 配置於上述準分子燈的筒狀部，及連結上述光監測器部與 上述筒狀部的基台部，上述筒狀部是具有：內徑從上述基 -8- 201015613 台部側朝上述準分子燈側被漸次小徑化部的漸次小徑化部 ，及形成於比該漸次小徑化部還要接近於上述準分子燈的 最小內徑部，及內徑從該最小內徑部朝上述準分子燈側被 漸次大徑化的漸次大徑化部，上述基台部是具有將被導入 於上述筒狀部的惰性氣體予以導入的氣體導入口，測定上 述紫外準分子光時，將從上述氣體導入口所導入的惰性氣 體經上述筒狀部內，從上述筒狀部的上述準分子燈側的上 φ 述開口被放出。 第2手段是在第1手段中，以上述光監測器部的光入 射測的開口周緣與上述筒狀部的最小內徑部內緣所規定的 上述光監測器部的光攝取角度，是比上述筒狀部的上述準 分子燈側的上述開口端領域的漸次大徑化部的內周面的開 口角度還要小，爲其特徵的準分子燈裝置。 第3手段是在第1手段或第2手段中，上述筒狀部是 陶瓷構件，爲其特徵的準分子燈裝置。 • 第4手段是在第1手段至第3手段中任一手段中，在 上述基台部的上述氣體導入口與上述筒狀部之間，形成有 氣體壓調整空間，爲其特徵的準分子燈裝置。 依據如申請專利範圍第1項所述的發明，從氣體導入 口導入惰性氣體時，則氣體的流動經筒狀部內的最小內徑 部，增加流速，而從筒狀部開口朝準分子燈放出成擴展至 開口周圍之故，因而可提供一種具備抑制依氧氣濃度變動 的大氣對流所致的紫外線的測定値變動的光感測器的準分 子燈裝置。 -9- 201015613 依照如申請專利範圍第2項所述的發明，將以光感測 器的光監測器部的開口周緣與筒狀部的最小內徑部內緣所 規定的光監測器部的光攝取角度，作成比筒狀部的開口端 領域的內周面的開口角度還要小之故，因而不會受到存在 於筒狀部的開口近旁的氧氣濃度所變動的大氣紊流所致的 影響而可測定從燈所放射的紫外線。 ❿ 依照如申請專利範圍第3項所述的發明，筒狀部是陶 瓷構件之故，因而可將惰性氣體充分接近於燈的電極部。 依照如申請專利範圍第4項所述的發明，形成有氣體 壓調整空間之故，可將朝準分子燈而從筒狀部開口所放出 的惰性氣體的壓力作成均勻。 。的 態1 形置 施裝 實燈 一子 的分 明準 發的 本明 明發 說的 行態 進形 圖施 6 實 第本。 至示圖 圖表面 1 1 是斷 式第圖的 方用 1 成 施使第構 實體 ί 全 如同圖所示地，該準分子燈裝置1是具有：準分子燈 2，及具備測定從準分子燈2所放射的紫外準分子光的筒 狀部31，基台部32及光監測器部33的光感測器3，及至 少收納準分子燈2與光感測器3的筐體4。又，準分子燈 2的詳細構成是與表示於第8圖者大約同樣之故，因而省 略說明。又，準分子燈2是並不被限定於斷面短形形狀爲 四方形式的光感測器，而雙重管型式的準分子燈也可以。 又，在斷面矩形形狀的四方形式的準分子燈，電極是相對 -10- 201015613 的電極部是網目狀電極也可以。 第2圖是表示將圖示於第1圖的所導入的惰性氣體的 流動的狀況予以表示的光感測器3的詳細的構成的斷面圖 ，第3圖是表示將圖示於第1圖的光監測器部33的光攝 取角度石與筒狀部31的開口端領域的漸次大徑化部315 的內周面之開口角度α之關係予以表示的光感測器3的詳 細構成的斷面圖。 φ 如此些圖所示地，光感測器3是具有：具備光電二極 體3 3 1與螢光體3 3 2的光監測器部3 3，及具有分別開放於 基台部3 2側與準分子燈2側的開口 3 1 1，3 1 2，準分子燈 2側的開口 312近接配置於準分子燈2的筒狀部31，及連 結光監測器部33與筒狀部31的基台部32。又，筒狀部 3 1是具有：內徑從基台部32側朝準分子燈2側被漸次小 徑化部的漸次小徑化部3 1 3，及形成於比漸次小徑化部 313還要接近準分子燈2的最小內徑部314，及內徑從最 小內徑部314朝準分子澄2側被漸次大徑化的漸次大徑化 部315。又，在基台部32，有將流出至筒狀部32的開口 311的惰性氣體予以導入的氣體導入口 321，在氣體導入 口 321與筒狀部31之間形成有氣體壓調整空間322。光感 測器3是在光電二極體33 1與螢光體332之間，具備例如 僅透射將氙準分子光172nm的光以螢光體332變換成可視 光的如色彩玻璃濾色片333的濾色片地可以。又，筒狀部 31是陶瓷製，例舉一例爲塊滑石較佳。但是並不限定於塊 滑石者，其他也可使用氧化鋁或氮化矽等。紫外準分子光 201015613 是將從氣體導入口 321所導入的惰性氣體經基台部32的 氣體壓調整空間3 22內，一面從筒狀部31的準分子燈2 側的開口部312放出一面進行測定。 如第2圖所示地，筒狀部31是具有其內徑從光感測 器3側朝準分子燈2側被渐次小徑化的漸次小徑化部3 1 3 ，又在此漸次小徑化部3 1 3還位於接近準分子燈2的位置 具有最小內徑部314，又，從最小內徑部314朝準分子燈 2側被漸次大徑化的漸次大徑化部315，而筒狀部31與光 監測器部33是利用基台部32被連結。從基台部32的氣 體導入口 321所導入的氮氣體等的惰性氣體，是藉由比氣 體導入口 321還要大徑的氣體壓調整空間3 22，氣體壓被 均勻地調整。氣體壓被調整的惰性氣體是通過筒狀部31 內的漸次小徑化部313之後，爲了通過最小內徑部314, 其流速會增大，而從筒狀部31的開口 312朝準分子燈2 放出成擴展至開口 312周圍。 又，如第3圖所示地，光監測器部33是具有光電二 極體331與螢光體332，而在螢光體332的下方設有準分 子光攝取用的開口 334。此以光監測器部33的開口 334周 緣（fl ’ f2)與筒狀部31的最小內徑部314內緣（nl，n2)所 規定的光監測器部33的光攝取角度/3，筒狀部31的開口 312端領域的渐次大徑化部315內周面的開口角度α者作 成較大。亦即，在通過光感測器3的筒狀部31中心而垂 直於筒狀部31的徑方向的斷面，將光攝取角度^作成連 結筒狀部31的最小內徑部314的一方內緣點nl與從內緣 201015613 點nl觀看的光監測器部33的開口 334周緣上的一方最遠 點fl的線分，及連結最小內徑部314的另一方內緣點ri2 與從內緣點n2觀看的光監測器部33的開口 3 34周緣上的 另一方最遠點f2的線分的交線所作的90度以下的內角， 而將開口角度α作爲筒狀部31的開口 312端領域的渐次 大徑化部315內周面的開口角度時，則在光攝取角度；8< 開□角度α的關係。若在該關係下，則不會受到存在於筒 φ 狀部31的開口 312近旁的氧氣濃度的變動的大氣紊流所 致的影響而成爲可確實地測定從準分子燈2所放射的紫外 線。 第4圖是表示作爲習知技術的比較例的筒狀部5與本 發明的筒狀部31的對比的圖式。第4(a)圖是本發明的筒 狀部5的斷面圖，第4(b)圖是本發明的筒狀部31的斷面 圖。 第4(a)圖所示地，在習知技術的直線型式的筒狀部5 中，從筒狀部5的內周面52經開口 51延長上會捲入含有 筒狀部5的周圍的氧氣的氣體。所以，在以光監測器部33 開口 334周緣與筒狀部5的開口 51所規定的光監測器部 33的光攝取角度Θ內會進入含有氧氣的空氣，而無法精度 優異地測定來自準分子燈2的紫外準分子光。 對於此，如第4(b)圖所示地，在本發明的筒狀部31， 含有筒狀部31周圍的氧氣的氣體，是會捲入從筒狀部31 的漸次大徑化部315的內周面經開口 312的延長上，亦即 捲入於開口角度α內，惟在光攝取角度点<開口角度α的 -13- 201015613 關係之故，因而不會捲入在光攝取角度Θ內。其結果，精 度優異地可測定來自準分子燈2的紫外準分子光。 第5圖是表示圖示於第2圖（第3圖）的筒狀部31與圖 示不同的各種形狀例的筒狀部31A〜31D的構成的斷面圖 〇 第5(a)圖至第5(d)圖是與表示於第2圖的筒狀部31 同樣地，在光攝取角度石<開口角度α的關係並沒有變化 。但是，在第5(a)圖的筒狀部31Α中，漸次小徑化部 赢 © 31 3Α與漸次大徑化部31 5Α的斷面分別朝筒狀部31Α的中 心部平滑地形成成爲多少彎曲。藉此，容易地可流通流進 筒狀部31Α內的惰性氣體。又，在第5(b)圖的筒狀部31Β 中，漸次小徑化部3 13Β與漸次大徑化部3 1 5Β的斷面分別 朝從筒狀部31Β的中心部遠離的方向形成多少彎曲。藉此 ，可將藉由漸次小徑化部3 1 3 Β所形的氣體壓調整空間作 成寬廣。又，在第5(c)圖的筒狀部31C中，漸次小徑化部 313C與漸次大徑化部315C的斷面分別形成階段狀。這時 @ 候，形成漸次小徑化部313C及漸次大徑化部315C之際， 具有不需要製作特別的加工工模就可進行加工的優點。又 ，在第5(d)圖的筒狀部31D中，將形成於漸次小徑化部 313D與漸次大徑化部315D之間的最小內徑部314D的斷 面形成同一內徑所成直線狀。這時候，在陶瓷的切削加工 中’成形筒狀部31D的內面之際，實現所定的內徑尺寸的 切削成爲容易，而精度優異地可製造筒狀部31D。 以下，針對於使用本發明的筒狀部的準分子燈裝置與 -14- 201015613 使用習知技術的筒狀部的準分子燈裝置之比較實驗加以說 明。 使用於實驗的本發明的準分子燈裝置的光感測器3, 是具有具如第4(b)圖所示的形狀的筒狀部31，筒狀部31 內面的最小內徑部314(nl與n2之間）是φ l〇mm，筒狀部 31的開口 312的漸次大徑部315的開口角度α比準分子燈 33的光攝取角度/3還要大’準分子燈33側的開口 311的 φ 開口徑是Φ 16mm，準分子燈的開口 312的開口徑是Ψ 13mm，而筒狀部31的長度是35mm。 對於此，使用於實驗的習知技術的準分子燈裝置的光 感測器，是僅筒狀部的形狀與本發明的光感測器3不相同 ，具有具如第4(a)圖所示的形狀的筒狀部5,筒狀部5的 內周面52是具有10mm的均勻內徑，因此，光監測器部 33側的開口 51的開口徑及準分子燈2側的開口 53的開口 徑如是Φ 10mm，而筒狀部5的長度是35mm。 # 又，使用於實驗的本發明及習知技術的準分子燈2都 是氙氣準分子放電燈，燈構成是與表示於第8圖者同樣。 又，使用於實驗的本發明的光監測器部33及習知技 術的光監測器部33都是如第2圖（第3圖）所示地，具備紫 外可視變換的螢光體332與色彩玻璃濾色片333與光電二 極體3 3 1者。 測定紫外準分子光，是將來自準分子燈2的172nm的 波長的紫外光以光監測器部33的螢光體3 32變換成可視 光而以光電二極體33 1受光，藉由輸出的電流値檢測出作 -15- 201015613 爲波長172nm的光強度的換算値者。 在測定之際，流在本發明的筒狀部31及習知技術的 筒狀部5內的氮氣體量，是在〇 Ι/min至5 Ι/min的範圍內 分別階段地變化，且將本發明的準分子燈表面與筒狀部31 的開口 3 1 2間的距離（稱爲間隙）及習知技術的準分子燈表 面與筒狀部5的開口 53間的距離（稱爲間隙）變更爲1.5mm 及5.5mm的兩種類進行測定。 第6圖是表示測定結果的圖表，橫軸是流在筒狀部內 的每一單位時間的氮氣體量（Ι/min)，縱軸是表示藉由光電 二極體所檢測出的檢測量（mA)。 如同圖所示地，在本發明的準分子燈裝置中，將筒狀 部3 1的最小內徑部（縮小）314作爲φ l〇mm，將間隙變更 爲1.5mm及5.5mm的兩種，在任何情形，即使將氮氣體 量變更爲0 Ι/min至5 Ι/min進行測定，也可知紫外線檢測 量是幾乎不變地可得到。 一方面，在習知技術的準分子燈裝置中，將筒狀部5 的內周面52作爲φ l〇mm的均句內徑，將間隙變更成 1.5mm及5_5min的兩種’任何情形都將氮氣體量變更爲〇 Ι/min至5 Ι/min進行測定，則可知紫外線檢測量是間隙大 的情形比間隙小的情形還要小。此爲，可能爲存在燈近旁 的大氣（氧氣）與從筒狀部5所放出的氮氣體無法避免在筒 狀部5的開口 53附近產生渦流的情形，該渦流會給予到 達至先監測器部33的紫外線量有所影響。 亦即’在本發明的準分子燈裝置的筒狀部31的開口 -16- 201015613 312附近，即使產生依渦流所致的真空紫外光的吸收，筒 狀部31的開口 312端領域的內周面的開口角度α者比以 光監測器部33的開口 3 34周緣（fl，f2)與筒狀部31的最 小內徑部314內緣（ηΐ，ιι2)所規定的光監測器部33的光攝 取角度/5還要大之故，因而可能對到達至光監測器部33 的線量不會受到影響，而與從習知技術的筒狀部5的開口 53所攝取的紫外線量會產生相差者。 • 又，在本發明的準分子燈裝置中，與習知技術的準分 子燈裝置相比較，可知即使減少流動的氮氣流量也可良好 地檢測出紫外線。又，依照本發明的準分子燈裝置，即使 從準分子燈2隔離光感測器3,也在抑制依氧氣濃度的變 動的大氣對流所致的紫外線的測定値變動的狀態下也可測 定紫外準分子光。 【圖式簡單說明】 Φ 第1圖是表示本發明的準分子燈裝置1的全體構成的 斷面圖。 第2圖是表示將圖示於第1圖的所導入的惰性氣體的 流動的狀況予以表示的光感測器3的詳細的構成的斷面圖 〇 第3圖是表示將圖示於第丨圖的光監測器部33的光 攝取角度/3與筒狀部31的開口端領域的漸次大徑化部315 的內周面之開口角度α之關係予以表示的光感測器3的詳 細構成的斷面圖。 -17- 201015613 第4(a)圖與第4(b)圖是表示作爲習知技術的比較例的 筒狀部5與本發明的筒狀部31的對比的圖式。 第5(a)圖至第5(d)圖是表示將與圖示於第2圖（第3 圖）的筒狀部31不相同的各種的形狀例予以表示的筒狀部 31A至31D的構成的斷面圖。 第6圖是表示將作爲習知技術的比較例的筒狀部與本 發明的筒狀部予以比較實驗時的測定結果的圖表。 第7圖是表示專利文獻1所述的對於準分子燈101的 長度方向沿著垂直方向的準分子燈裝置100的槪略構成的 斷面圖。 第8圖是轰示圖示於第7圖的準分子燈101的構成的 立體圖。 【主要元件符號說明】 1 :準分子燈裝置 2 :準分子燈 3 :光感測器 31 :筒狀部 3 1 1，312 :開口 3 1 3 :漸次小徑化部 3 1 4 :最小內徑部 315 :漸次大徑部 32 :基台部 321 :氣體導入口 201015613 3 22 :氣體壓調整空間 3 3 :光監測器部 331 :光電二極體 3 32 :螢光體 3 33 :色彩玻璃濾色片 334 :開口 4 :筐體 5 ·同狀 5 1 :開口 52 :內周面 31A :筒狀部 3 1 3 A :漸次小徑化部 315A :漸次大徑化部 31B :筒狀部 3 13B :漸次小徑化部 φ 3 1 5 B :漸次大徑化部 3 1 C :筒狀部 3 1 3 C ·‘漸次小徑化部 3 1 5 C :漸次大徑化部 31D :筒狀部 3 1 3D :漸次小徑化部 3 15D :漸次大徑化部 -19201015613 VI. TECHNOLOGICAL FIELD OF THE INVENTION [Technical Field] The present invention relates to an excimer lamp device used for ultraviolet irradiation treatment, and more particularly to an excimer having a photosensor for measuring ultraviolet rays emitted from an excimer lamp. Light device. [Prior Art] φ In recent years, for example, in the cleaning process by ultraviolet irradiation of a glass substrate of a liquid crystal display panel, the user includes a vacuum ultraviolet light having a wavelength of 200 nm or less, for example, a vacuum ultraviolet light of 172 nm. Excimer lamp device. In the excimer lamp device, the vacuum ultraviolet light is attenuated in the air, and thus between the object to be irradiated and the excimer lamp formed by the workpiece such as the semiconductor substrate or the liquid crystal substrate which is the opening of the casing, A window material made of quartz glass is placed, and vacuum ultraviolet light is irradiated onto the object to be irradiated through the window material. However, the window material made of quartz glass is expensive, and as shown in the document 1, the window material made of quartz glass is removed, and the structure close to the object to be irradiated and the excimer lamp is employed. On the one hand, the excimer lamp is slowly lowered in intensity of the vacuum ultraviolet light irradiated by the deterioration of its use time. When the intensity of the irradiated vacuum ultraviolet light is lowered, the ability to wash the surface of the irradiated object is also lowered. Therefore, the intensity of the vacuum ultraviolet light from the excimer lamp can be measured at any time so that the intensity does not decrease to a value below the predetermined value, and the feedback control of the input of the boosting lamp is performed, or when the intensity cannot be output to the predetermined level or more, the standard must be replaced. Molecular lamp. -5-201015613 The excimer lamp device described in Patent Document 1 describes a photosensor in which the intensity of vacuum ultraviolet light from an excimer lamp is detected. In the photosensor, for example, ultraviolet light of 172 nm is converted into visible light by a phosphor, and visible light is detected by a photodiode, and an electrical signal is converted to obtain an output. Fig. 7 is a cross-sectional view showing a schematic configuration of the excimer lamp device 100 in the longitudinal direction of the excimer lamp 101 described in Patent Document 1, and Fig. 8 is a view showing Fig. 7 A perspective view of the configuration of the excimer lamp 101. As shown in Fig. 8, the excimer lamp 101 having the rectangular parallelepiped discharge vessel 102 has a rectangular cross section perpendicular to the longitudinal direction of the lamp, and the length of the discharge vessel 102 along the upper and lower surfaces of the discharge vessel 102. External electrodes 103, 104 are provided in such a manner as to extend in the lateral direction. In this example, the outer electrode 103 provided on the upper surface is formed in a plate shape, and the other outer electrode 104 provided on the lower surface is formed in a mesh shape. Further, on the upper surface of the discharge vessel 102, an opening portion 106 in which a part of the external electrode 103 formed in a plate shape with respect to the photosensor 105 is removed is provided. As shown in Fig. 7, the excimer lamp 101 is provided with a plurality of meshes of the external electrode 104 formed in a mesh shape with respect to the object W to be irradiated, and for example, three baskets of the excimer lamp device 100 are provided as shown in the figure. The interior of the body 107. The casing 107 is in the shape of a box in which one side is opened, and the object to be irradiated W is conveyed in a direction parallel to the opening surface. A through hole 108 for measuring the vacuum ultraviolet light from the excimer lamp 101 is provided on one surface of the opening surface of the casing 107, and the through hole 108 is the photo sensor 105. The introduction is performed, and thus is set at a position relative to the opening 106 of the excimer lamp-6-201015613 101. The photo sensor 105 that is led out from the through hole 108 of the casing 107 is provided with a phosphor 109 that irradiates vacuum ultraviolet light from the excimer lamp 101, and detects that the phosphor 109 is converted by the phosphor 109. Light photodiode 110. When the vacuum sensor 105 detects the vacuum ultraviolet light from the excimer lamp 101, it is introduced into the casing 107 from the through hole 108 of the casing 107 by the cylinder 111, and is directed to the excimer lamp 1〇1. The opening portion 1〇6 moves φ—quantitatively and is closely connected. The photo sensor 105 that is adjacent to the opening 106 converts the vacuum ultraviolet light into visible light by the phosphor 109, and the visible light is detected by the photodiode 110. The photo sensor 105 is led out to the outside of the casing 107 via the through hole 108 via the cylinder 111. The derivation of the photo sensor 105 is performed by the cylinder 111 connected to the photo sensor 105. However, in the excimer lamp device 100, since one surface of the casing 107 is opened, the inside of the casing 107 is in an atmospheric state. Therefore, when the quasi-molecular lamp 101 is turned on, the vacuum ultraviolet light irradiated by the excimer lamp 101 reacts with oxygen in the atmosphere, so that the oxygen concentration in the atmosphere changes. On the other hand, the inside of the casing 107 is a convection C of the atmosphere in which the oxygen concentration fluctuates, as the object to be irradiated W is transported by the transport mechanism (not shown). Therefore, by the convection C, the oxygen concentration between the photo sensor 105 and the excimer lamp 101 fluctuates, and the absorption amount of the vacuum ultraviolet light emitted from the excimer lamp 101 in 201015613 changes. The amount of absorption by the oxygen of the vacuum ultraviolet light detected by the photo sensor 105 fluctuates as described above, and the excimer lamp device 100 opened under the casing 107 is carried by the irradiated object w. The oxygen concentration inside the casing 107 cannot be made uniform, and the oxygen concentration between the excimer lamp 1〇1 and the photosensor 105 adjacent thereto, and the oxygen between the excimer lamp 101 and the irradiated object W cannot be made uniform. The concentration will not be the same. Therefore, when the input of the control excimer lamp 101 is controlled according to the intensity of the vacuum ultraviolet light detected by the photo sensor 105, the vacuum ultraviolet light having a predetermined thickness or more is irradiated onto the irradiated object W, or The vacuum ultraviolet light below the predetermined temperature is irradiated, and the vacuum ultraviolet light cannot be uniformly irradiated to the irradiated object W. In view of the above problems, an object of the present invention is to provide an excimer lamp device including a photosensor that suppresses fluctuations in ultraviolet rays due to atmospheric convection due to fluctuations in oxygen concentration. In order to solve the above problems, the present invention employs the following means. The first means is an excimer lamp device comprising: an excimer lamp; and a photosensor for measuring ultraviolet excimer light emitted from the excimer lamp, and at least accommodating the excimer lamp and the photo sensor The excimer lamp device of the housing is characterized in that the photo sensor has a photo monitor unit including a photodiode and a phosphor, and has an optical monitor unit side and the excimer lamp a side opening, wherein the opening on the excimer lamp side is disposed adjacent to the cylindrical portion of the excimer lamp, and a base portion connecting the photo monitor portion and the tubular portion, wherein the tubular portion has an inner portion a diameter from the base -8-201015613, the progressively smaller diameter portion of the progressively smaller diameter portion toward the excimer lamp side, and a minimum of the excimer lamp formed closer to the progressively smaller diameter portion The inner diameter portion and the progressively larger diameter portion whose inner diameter is gradually increased from the minimum inner diameter portion toward the excimer lamp side, and the base portion has the inert gas introduced into the tubular portion. Gas inlet, measuring the purple In the case of external excimer light, the inert gas introduced from the gas introduction port is discharged from the upper portion of the tubular portion on the side of the excimer lamp through the cylindrical portion. In the second aspect, in the first means, the light pick-up angle of the light monitor portion defined by the light entrance of the light monitor portion and the inner edge of the smallest inner diameter portion of the tubular portion is higher than The excimer lamp device of the inner peripheral surface of the progressively larger diameter portion of the open end region of the cylindrical portion on the side of the excimer lamp is smaller. According to a third aspect, in the first means or the second means, the cylindrical portion is a ceramic member and an excimer lamp device characterized by the same. In the fourth aspect, in any one of the first to third means, a gas pressure adjustment space is formed between the gas introduction port and the cylindrical portion of the base portion, and an excimer characterized by the same Light device. According to the invention of claim 1, when the inert gas is introduced from the gas introduction port, the gas flows through the smallest inner diameter portion in the cylindrical portion to increase the flow velocity, and is discharged from the cylindrical portion opening toward the excimer lamp. Since it expands to the periphery of the opening, it is possible to provide an excimer lamp device including a photosensor that suppresses fluctuations in ultraviolet rays due to atmospheric convection due to fluctuations in oxygen concentration. -9-201015613 According to the invention of claim 2, the light of the optical monitor portion defined by the opening periphery of the photodetector portion of the photosensor and the innermost edge of the smallest inner diameter portion of the tubular portion Since the angle of intake is smaller than the opening angle of the inner peripheral surface of the open end region of the tubular portion, it is not affected by atmospheric turbulence which varies in the oxygen concentration in the vicinity of the opening of the tubular portion. The ultraviolet rays emitted from the lamps can be measured. According to the invention as recited in claim 3, the cylindrical portion is a ceramic member, so that the inert gas can be sufficiently brought close to the electrode portion of the lamp. According to the invention as recited in claim 4, the gas pressure adjustment space is formed, and the pressure of the inert gas discharged from the opening of the tubular portion toward the excimer lamp can be made uniform. . The state 1 shape is applied to the real lamp, and the sub-state is the same as the one. To the surface of the diagram 1 1 is the diagram of the broken diagram, and the first embodiment is made as shown in the figure, the excimer lamp device 1 has: an excimer lamp 2, and has a measurement excimer The cylindrical portion 31 of the ultraviolet excimer light emitted from the lamp 2, the photodetector 3 of the base portion 32 and the photo monitor portion 33, and the casing 4 for accommodating at least the excimer lamp 2 and the photo sensor 3. Further, the detailed configuration of the excimer lamp 2 is approximately the same as that shown in Fig. 8, and therefore the description will be omitted. Further, the excimer lamp 2 is not limited to a photo sensor having a rectangular cross-sectional shape, and a double tube type excimer lamp may be used. Further, in the quasi-molecular lamp of the square shape having a rectangular cross section, the electrode may be a mesh electrode with respect to the electrode portion of -10-201015613. FIG. 2 is a cross-sectional view showing a detailed configuration of the photosensor 3 showing the flow of the introduced inert gas shown in FIG. 1, and FIG. 3 is a view showing the first The detailed configuration of the photosensor 3 showing the relationship between the light-intake angle of the light monitor portion 33 and the opening angle α of the inner peripheral surface of the progressively larger diameter portion 315 of the open end region of the tubular portion 31 Sectional view. φ As shown in the figures, the photo sensor 3 has a photo monitor unit 33 including a photodiode 33 1 and a phosphor 3 3 2 , and has a side open to the base portion 3 2 The opening 312 on the side of the excimer lamp 2 is disposed adjacent to the opening 31 of the excimer lamp 2 in the cylindrical portion 31 of the excimer lamp 2, and the optical monitor portion 33 and the cylindrical portion 31 are connected to the opening 31 of the excimer lamp 2 side. Abutment portion 32. In addition, the tubular portion 31 has a gradually smaller diameter portion 3 1 3 whose inner diameter is gradually reduced from the base portion 32 side toward the excimer lamp 2 side, and is formed in the specific smaller diameter reducing portion 313. It is also closer to the minimum inner diameter portion 314 of the excimer lamp 2, and the progressively larger diameter portion 315 whose inner diameter is gradually increased from the minimum inner diameter portion 314 toward the excimer 2 side. Further, in the base portion 32, a gas introduction port 321 is formed between the gas introduction port 321 and the tubular portion 31, and a gas introduction port 321 for introducing an inert gas which flows out to the opening 311 of the tubular portion 32 is formed. The photo sensor 3 is provided between the photodiode 33 1 and the phosphor 332, for example, a color glass filter 333 that transmits only light of 172 nm of the collimated light to the visible light by the phosphor 332. The color filter can be. Further, the tubular portion 31 is made of ceramic, and an example is preferably a block talc. However, it is not limited to those of the block talc, and other materials such as alumina or tantalum nitride may be used. In the ultraviolet gas excimer light 201015613, the inert gas introduced from the gas introduction port 321 is discharged from the opening 312 of the excimer lamp 2 side of the tubular portion 31 through the gas pressure adjusting space 3 22 of the base portion 32. Determination. As shown in Fig. 2, the tubular portion 31 has a gradually smaller diameter portion 3 1 3 whose inner diameter is gradually reduced from the photosensor 3 side toward the excimer lamp 2 side, and is gradually smaller. The radializing portion 313 is also located at a position close to the excimer lamp 2, and has a minimum inner diameter portion 314, and a progressively larger diameter portion 315 which is gradually increased in diameter from the minimum inner diameter portion 314 toward the excimer lamp 2 side. The tubular portion 31 and the photo monitor portion 33 are coupled by the base portion 32. The inert gas such as a nitrogen gas introduced from the gas introduction port 321 of the base portion 32 is a gas pressure adjustment space 3 22 having a larger diameter than the gas introduction port 321, and the gas pressure is uniformly adjusted. After the inert gas whose gas pressure is adjusted passes through the gradually smaller diameter portion 313 in the tubular portion 31, the flow velocity thereof increases in order to pass the minimum inner diameter portion 314, and the opening 312 of the cylindrical portion 31 faces the excimer lamp. 2 Release to expand around the opening 312. Further, as shown in Fig. 3, the photo monitor unit 33 includes a photodiode 331 and a phosphor 332, and an opening 334 for quasi-molecular light pickup is provided below the phosphor 332. The light pickup angle of the light monitor portion 33 defined by the periphery of the opening 334 of the light monitor portion 33 (fl 'f2) and the inner edge (nl, n2) of the minimum inner diameter portion 314 of the tubular portion 31 is 3 The opening angle α of the inner peripheral surface of the gradually increasing diameter portion 315 of the opening 312 end of the shape portion 31 is made larger. In other words, the light intake angle is formed in one of the smallest inner diameter portions 314 of the tubular portion 31 by the cross section perpendicular to the radial direction of the tubular portion 31 passing through the center of the tubular portion 31 of the photosensor 3. The edge point n1 is a line from the farthest point fl of the periphery of the opening 334 of the light monitor portion 33 viewed from the inner edge 201015613 point nl, and the other inner edge point ri2 connecting the minimum inner diameter portion 314 and the inner edge An internal angle of 90 degrees or less made by the intersection of the line points of the other farthest point f2 on the periphery of the opening 3 34 of the light monitor portion 33 viewed from the point n2, and the opening angle α is the opening 312 of the cylindrical portion 31. In the case of the opening angle of the inner peripheral surface of the progressively larger diameter portion 315 of the end field, the relationship between the light pickup angle and the opening angle α is 8< In this relationship, the ultraviolet ray which is emitted from the excimer lamp 2 can be reliably measured without being affected by the atmospheric turbulence of the fluctuation of the oxygen concentration in the vicinity of the opening 312 of the cylindrical φ-shaped portion 31. Fig. 4 is a view showing a comparison between the tubular portion 5 as a comparative example of the prior art and the tubular portion 31 of the present invention. Fig. 4(a) is a cross-sectional view of the tubular portion 5 of the present invention, and Fig. 4(b) is a cross-sectional view of the tubular portion 31 of the present invention. As shown in Fig. 4(a), in the linear tubular portion 5 of the prior art, the inner peripheral surface 52 of the tubular portion 5 is extended by the opening 51 and is wound around the cylindrical portion 5. Oxygen gas. Therefore, air containing oxygen gas enters the light pickup angle Θ of the optical monitor unit 33 defined by the periphery of the opening 334 of the optical monitor unit 33 and the opening 51 of the tubular portion 5, and the measurement from the excimer cannot be performed with high precision. UV excimer light from lamp 2. In the tubular portion 31 of the present invention, as shown in FIG. 4(b), the gas containing the oxygen around the tubular portion 31 is entangled in the progressively larger diameter portion 315 from the tubular portion 31. The inner circumferential surface is elongated in the opening angle 312, that is, it is involved in the opening angle α, but at the light absorption angle point <the opening angle α is -13 - 201015613 relationship, so it is not involved in the light absorption angle Inside. As a result, the ultraviolet excimer light from the excimer lamp 2 can be measured with excellent precision. Fig. 5 is a cross-sectional view showing the configuration of the cylindrical portions 31A to 31D of the various shapes of the cylindrical portion 31 shown in Fig. 2 (Fig. 3), and Fig. 5(a) to In the fifth (d) diagram, similarly to the tubular portion 31 shown in Fig. 2, the relationship between the light intake angle stone <opening angle α does not change. However, in the tubular portion 31 of the fifth (a) diagram, the cross-section of the progressively smaller diameter portion and the progressively larger diameter portion 31 5Α are formed smoothly toward the central portion of the tubular portion 31Α. bending. Thereby, the inert gas flowing into the cylindrical portion 31 can be easily circulated. Further, in the tubular portion 31 of the fifth embodiment, the number of the gradually smaller diameter portion 3 13 Β and the progressively larger diameter portion 3 1 5 朝 is formed away from the central portion of the tubular portion 31 分别. bending. Thereby, the gas pressure adjustment space formed by the progressively smaller diameter portion 3 1 3 Β can be made wider. Further, in the tubular portion 31C of the fifth embodiment (c), the cross-sections of the progressively smaller diameter portion 313C and the progressively larger diameter portion 315C are formed in a stepped shape. At this time, when the progressively smaller diameter portion 313C and the progressively larger diameter portion 315C are formed, there is an advantage that processing can be performed without producing a special processing tool. Further, in the tubular portion 31D of the fifth (d), the section of the minimum inner diameter portion 314D formed between the progressively smaller diameter portion 313D and the progressively larger diameter portion 315D is formed into a straight line having the same inner diameter. shape. At this time, in the cutting process of the ceramics, when the inner surface of the tubular portion 31D is formed, it is easy to achieve a predetermined inner diameter, and the cylindrical portion 31D can be manufactured with excellent precision. Hereinafter, a comparative experiment using an excimer lamp device using the tubular portion of the present invention and an excimer lamp device using a tubular portion of the prior art will be described. The photosensor 3 of the excimer lamp device of the present invention used in the experiment has a cylindrical portion 31 having a shape as shown in Fig. 4(b), and a minimum inner diameter portion 314 on the inner surface of the cylindrical portion 31. (between nl and n2) is φ l〇mm, and the opening angle α of the progressively large diameter portion 315 of the opening 312 of the tubular portion 31 is larger than the light pickup angle /3 of the excimer lamp 33. The opening diameter of the opening 311 is Φ 16 mm, the opening diameter of the opening 312 of the excimer lamp is Ψ 13 mm, and the length of the cylindrical portion 31 is 35 mm. In this regard, the photosensor of the excimer lamp device of the prior art used in the experiment has a shape in which only the cylindrical portion is different from the photosensor 3 of the present invention, and has a shape as shown in Fig. 4(a). In the tubular portion 5 of the shape shown, the inner peripheral surface 52 of the tubular portion 5 has a uniform inner diameter of 10 mm. Therefore, the opening diameter of the opening 51 on the side of the photodetector portion 33 and the opening 53 on the excimer lamp 2 side The opening diameter is Φ 10 mm, and the length of the cylindrical portion 5 is 35 mm. Further, the excimer lamp 2 of the present invention and the prior art used in the experiment are all Xenon excimer discharge lamps, and the lamp configuration is the same as that shown in Fig. 8. Further, the optical monitor unit 33 of the present invention used in the experiment and the optical monitor unit 33 of the prior art are all provided with a UV-visible phosphor 332 and color as shown in Fig. 2 (Fig. 3). The glass filter 333 and the photodiode 3 3 1 are used. The ultraviolet excimer light is measured by converting the ultraviolet light having a wavelength of 172 nm from the excimer lamp 2 into visible light by the phosphor 3 32 of the photo monitor unit 33, and receiving the light by the photodiode 33 1 by outputting The current 値 is detected as -15-201015613 as a conversion of the light intensity at a wavelength of 172 nm. At the time of measurement, the amount of the nitrogen gas flowing in the tubular portion 31 of the present invention and the tubular portion 5 of the prior art is changed stepwise in the range of 〇Ι/min to 5 Ι/min, respectively. The distance between the surface of the excimer lamp of the present invention and the opening 3 1 2 of the tubular portion 31 (referred to as a gap) and the distance between the surface of the excimer lamp of the prior art and the opening 53 of the tubular portion 5 (referred to as a gap) The measurement was changed to two types of 1.5 mm and 5.5 mm. Fig. 6 is a graph showing the measurement results, in which the horizontal axis represents the amount of nitrogen gas per unit time (Ι/min) flowing in the cylindrical portion, and the vertical axis represents the amount of detection detected by the photodiode ( mA). As shown in the figure, in the excimer lamp device of the present invention, the minimum inner diameter portion (reduction) 314 of the tubular portion 31 is φ l 〇 mm, and the gap is changed to two types of 1.5 mm and 5.5 mm. In any case, even if the amount of nitrogen gas was changed from 0 Ι/min to 5 Ι/min, it was found that the amount of ultraviolet ray detected was almost constant. On the other hand, in the excimer lamp device of the prior art, the inner peripheral surface 52 of the tubular portion 5 is defined as the average inner diameter of φ l 〇 mm, and the gap is changed to 1.5 mm and 5 _ 5 min. When the amount of nitrogen gas was changed from 〇Ι/min to 5 Ι/min, it was found that the amount of ultraviolet ray detection was smaller than the case where the gap was small. Therefore, it may be that the atmosphere (oxygen) in the vicinity of the lamp and the nitrogen gas discharged from the tubular portion 5 cannot avoid the occurrence of eddy currents in the vicinity of the opening 53 of the cylindrical portion 5, and the eddy current is given to the first monitor portion. The amount of ultraviolet light in 33 has an effect. That is, in the vicinity of the opening-16-201015613 312 of the cylindrical portion 31 of the excimer lamp device of the present invention, even if the absorption of the vacuum ultraviolet light by the eddy current is generated, the inner periphery of the opening 312 end region of the cylindrical portion 31 is formed. The opening angle α of the surface is larger than the circumference of the opening 3 34 of the light monitor portion 33 (fl, f2) and the inner edge (ηΐ, ι2) of the minimum inner diameter portion 314 of the tubular portion 31. The light pickup angle /5 is larger, and thus it is possible that the amount of the line reaching the light monitor portion 33 is not affected, and the amount of ultraviolet rays taken from the opening 53 of the tubular portion 5 of the prior art is different. By. Further, in the excimer lamp device of the present invention, it is understood that the ultraviolet rays can be satisfactorily detected even when the flow rate of the flowing nitrogen gas is reduced as compared with the conventional quasi-molecular lamp device. Further, according to the excimer lamp device of the present invention, even when the photosensor 3 is isolated from the excimer lamp 2, the ultraviolet ray can be measured in a state where the measurement of the ultraviolet ray due to the convection of the convection due to the fluctuation of the oxygen concentration is suppressed. Excimer light. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing the overall configuration of an excimer lamp device 1 of the present invention. FIG. 2 is a cross-sectional view showing a detailed configuration of the photosensor 3 showing the flow of the introduced inert gas shown in FIG. 1 . FIG. 3 is a view showing the third diagram. Detailed configuration of the photosensor 3 showing the relationship between the light pickup angle /3 of the light monitor portion 33 of the figure and the opening angle ? of the inner peripheral surface of the progressively larger diameter portion 315 of the open end region of the tubular portion 31 Sectional view. -17-201015613 Figs. 4(a) and 4(b) are views showing a comparison between the tubular portion 5 as a comparative example of the prior art and the tubular portion 31 of the present invention. 5(a) to 5(d) are views showing cylindrical portions 31A to 31D which are different from the cylindrical shape 31 shown in Fig. 2 (Fig. 3). A sectional view of the composition. Fig. 6 is a graph showing the measurement results when a cylindrical portion of a comparative example of the prior art is compared with the tubular portion of the present invention. Fig. 7 is a cross-sectional view showing a schematic configuration of the excimer lamp device 100 in the longitudinal direction of the excimer lamp 101 as described in Patent Document 1. Fig. 8 is a perspective view showing the structure of the excimer lamp 101 shown in Fig. 7. [Description of main component symbols] 1 : Excimer lamp device 2 : Excimer lamp 3 : Photo sensor 31 : Cylindrical portion 3 1 1,312 : Opening 3 1 3 : Progressive small diameter portion 3 1 4 : Minimum inner Diameter portion 315 : Progressive large diameter portion 32 : Base portion 321 : Gas introduction port 201015613 3 22 : Gas pressure adjustment space 3 3 : Light monitor portion 331 : Photodiode 3 32 : Phosphor 3 3 : Color glass Color filter 334: opening 4: housing 5 • same shape 5 1 : opening 52 : inner peripheral surface 31A : cylindrical portion 3 1 3 A : progressively smaller diameter portion 315A : progressively larger diameter portion 31B : cylindrical portion 3 13B : progressively smaller diameter portion φ 3 1 5 B : progressively larger diameter portion 3 1 C : tubular portion 3 1 3 C · 'gradually smaller diameter portion 3 1 5 C : progressively larger diameter portion 31D : tube 3rd 3D: progressively smaller diameter section 3 15D: progressively larger diameter section-19