201011281 « :六、發明說明： 【發明所屬之技術領域】 本發明係涉及一個物件的檢測裝置與方法，更具體而 言，本發明係涉及檢測物件孔洞内部表面的一個裝置與方 法。 【先前技術】 按，許多製造商都會定期檢測所製造之產品，此為典 型的品質管制措施，用來鑑別瑕疵產品，進而控制所製造 產品的品質。 許多產品必須檢測其内部表面，例如螺孔等。一般而 言，傳統的孔洞檢測方法系運用攝影機捕捉孔洞内部表面 ，攝影機與受檢測產品通常必須相對轉動，以期能夠獲得 内部表面完整的視界。 許多個案中，攝影機與受檢測產品通常必須相對轉動 360° ，是以當攝影機與受檢測產品完成360°轉動後，攝影 ® 機能夠捕捉受檢測產品内部表面完整的影像，然後利用所 捕捉受檢測產品内部表面的影像鑑別產品可能的瑕疵。 然而傳統孔洞檢測方法必須使攝影機與受檢測產品相 對轉動，是一種極為耗費時間檢測方法。 又，因為傳統檢測方法必須讓攝影機環繞著受檢測產 品轉動，因此必須設計一個轉動機制，建置此一轉動機制 所費不貲，是一種極為耗費成本的檢測方法。同時因為轉 動機制會產生振動，也會影響傳統檢測方法影像獲得之品 201011281 , 又，執行傳統孔洞檢/ 廑，導致傳統孔祠檢挪 ’系、4並不具傷足夠之聚焦深 時也會影響影像品質，並產斤捕捉影像產生失焦問題，同 像之校準容易造成影像解析^影，失真問題。因為失真影 不易檢測，也不易檟取尺二不佳之結果，是以失真影像 惟，傳統孔洞檢測系統第 a)所示，係為一光學系統_ '圖所示，如第6圖（ 個中心袖線606轉動的=包括安裝在沿著— 攝影機602與一個光風 （未顯不）上的一部 示）將光學模組6〇4務氧= 個轉動工作台（未顯. 在該三個不同位置捕捉物件6〇8的：:置、2、3,並 1、影像2與影像3…個照明器：=象’也就是影像 據檢測目的及受檢測物件，可配置更用來照明物件；依 得更多影像；隨後—具控制器_執：：：捕捉位置以獲 ’以鑑別各個影像之瑕疯，並將受檢測：：：影像之檢測 施比對，或與使用者所設 > 數/、標準様板實 件608的良窥。 ；此&實施比較，以決定物 又如第7圖所示，係顯示另一個傳 統中轉動的是物件_，而非光學模組'·_、·、^0，該系 7〇〇通常用來檢測中、小型尺寸與重量 ，該傳統系統 空間或=等限制因素無法轉動光學模是因為 。在該傳統糸、紙700巾，轉動物件_， 兄下採 生如第7圖所示傳統系統之效果。 利用：述傳統系統_貞·，捕捉數 為几長’同時控制器⑽必需處理數個影像，:: 則依據不同預先設定時間間隔捕 而先學模組 7圖所示傳統“_之影像 間極 201011281 檢測所需的影像。此外前述傳統系統必須利用一個馬達與 編碼器模組612轉動光學模組604或物件608 ，所費不貲 。光學模組604與物件608轉動資訊則回饋到控制器610 ，以利在適切觸發預設點觸發攝影機602 。 因此有必要開發一個孔洞内部表面檢測方法，該方法 無需轉動受檢測物件，並透過檢測孔洞整個内部表面單一 影像，即能快速獲致最佳的結果。 • 有鑑於此，發明人本於多年從事相關產品之製造開發 與設計經驗，針對上述之目標，詳加設計與審慎評估後， 終得一確具實用性之本發明。 【發明内容】 本發明之主要目的，係在提供一種檢測方法，其所欲 解決之問題點，係針對本發明實施例包括無須轉動受檢測 物件的情況下，檢測孔洞内部表面。 φ 該檢測方法包括將一個照明光線指向一個孔洞，該孔 洞具備兩端，同時兩端之間有一内部表面。該檢測方法同 時也包括接收經過一個鏡頭總成並反射自該内部表面的光 線，該鏡頭總成具備一個景深，該景深至少延伸至該孔洞 兩端。該檢測方法進一步包括捕捉一個影像平面内部表面 的二維影像（flat image)，該内部表面沿著該二維影像充分 聚焦，同時執行影像處理，以利檢測該二維影像，進而檢 測該孔洞内部表面。 依據本發明一個第二實施例，此處揭露一種檢測裝 5 201011281 指向一 表面。 部表面 ’該鏡 端。該 影像平 影像充 該二維 物件孔 驟12， ，以及 自該孔 時包括 一個二 示該孔 ’該步 由光學 驟18， 孔洞内 :置，該檢測裝置包括一個照明器，該照明器將光線 個孔洞，該孔洞具備兩端，同時兩端之間有一内部 該檢測裝置包括一個鏡頭總成，以接收反射自該内 的光線，並將該内部表面投射（imaging)成二維影像 頭總成具備一個景深，該景深至少延伸至該孔洞兩 檢測裝置進一步包括一個影像捕捉設備，以利捕捉 面上内部表面之二維影像。該内部表面沿著該二維 分聚焦，同時一個處理器執行影像處理，以利檢測 0 影像，進而檢測該孔洞内部表面。 【實施方式】 請參閱第1圖係依據本發明一個實施例，顯示 洞檢測方法10的一個流程圖。該方法10包括一個步 該步驟12將照明光線指向該孔洞，該孔洞具備兩端 延伸至該孔洞兩端的一個内部表面。 該方法10包括一個步驟14，該步驟14可將反射 • 洞内部表面的光線導向一個鏡頭總成；該方法10同 一個步驟15，該步驟15可將該孔洞内部表面投射成 維環狀影像（flat ring image)，該二維環狀影像可顯 洞内部表面完整細節；該方法10也包括一個步驟16 驟16可捕捉二維環狀影像，同時將該二維環狀影像 形式轉換成數位形式；該方法10進一步包括一個步 該步驟18處理並檢測該二維環狀影像，進而檢測該 部表面。 依據本發明一個實施例，此處說明一種檢測裝置100 ，請參閱第2圖。該裝置100包括一個或多個照明光源10 104 201011281 ;2 ，以利將照明光束103指向一個孔洞104 ，該孔洞 係屬圓柱型孔洞，該孔洞104係形成於一個物件106 ，正如同某一製造產品上的一個通孔。本發明此一實 中，運用該照明光源102將光線指向該孔洞104 。該 104具備一個第一端點108 ，一個第二端點110 ，以 個内部表面112 ，該内部表面112延伸於該第一端點 與該第二端點110之間；該第一端點108與該第二端 0相較，該第一端點108比較接近該裝置100 :該孔 ® 4可以是一個通孔，也可以是一個盲孔（blind hole); ，該照明光源102用來提供該通孔或該盲孔之照明。 該照明光源102提供白色、彩色或單色光線以照 孔洞104 。該照明光源102範例如螢光燈管與白色、 或單色發光二極體，或是來自太陽之自然光線。如果 洞104為一通孔，可行的方式是以背景燈光指向該第 點110 ，反之如果該孔洞104為一盲孔，可行的方式 照明指向該第一端點10δ 。 該裝置100也包括一個鏡頭總成116 ，如第2圖 ，照明光束反射自該孔洞104該内部表面112 ，並指 鏡頭總成116 。可行的方式是該鏡頭總成116應配置 孔洞104該第一端點108直上。 第3圖係為第2圖所示該鏡頭總成116 —個完整 ，同時第3圖也顯示穿過該鏡頭總成116光線117的 。更具體而言，第3圖所示該鏡頭總成116包括複數 ，也就是一個第一鏡頭118 、一個第二鏡頭120 、一 之上 施例 孔洞 及一 108 點11 洞10 同理 明該 彩色 該孔 二端 是將 所示 向該 在該 圖示 路徑 鏡頭 個第 201011281 ;三鏡頭122 、一個第四鏡頭124與一個第五鏡頭126 。或 者該等複數鏡頭可由稜鏡取代之，以達到相同的光學效果 。可行的方式是該第一至第五鏡頭118 、 120 、 122 > 12 4 > 126中，每一鏡頭沿著該鏡頭總成116 —個中心軸線 128配置，可行的方式是該中心軸線128與第2圖所示該 孔洞104縱軸重合。 以下將說明鏡頭總成設計的一個範例。該第一至第五 鏡頭118 、 120 、 122 、 124 、 126中，每一鏡頭規格尺 ❿ 寸及該鏡頭總成116型態模組如附表一： 表面 半徑 (mm) 厚度 (ran) 直徑 (nm) 鏡頭 型態 附註 1 6.0 5.1 5.4 N-LAF21 第一鏡頭 2 -6. 0 0.4 5.4 - 空間 3 5.2 4.0 5.4 N-LAF21 第二鏡頭 4 -20.0 0.2 5.4 - 空間 5 5.T 5.2 5.4 F-SILICA 第三鏡頭 6 -4.1 0.9 5.4 - 空間 7 ~88- 8 ____________5.0 5.4 N-psk3 第四鏡頭 8 -6. 1 0.2 5.4 - 空間 9 inf 4.0 0.6 - 鏡徑 10 14.5 1.5 6.0 N-SF11 第五鏡頭 11 3.8 4.0 6.0 N-LAK34 第五1鏡頭 12 -10.5 8.8 6.0 — 空間 附表一 可對該鏡頭總成116實施型態模組，以利檢測具備較 大尺寸範圍的孔洞，例如直徑範圍8圆至16 mm、深度範_圍 8画至16 _的孔洞。本發明這一實施例中，該鏡頭總成11 6有效焦長大約為5. 7 mm ，該鏡頭總成116可提供該孔洞 104内部表面112高品質影像。 201011281 該鏡頭總成 r . 、t 具備一個圓柱型視界（cylindrical field of vlew)與—個 刑旦― 征型景深（cylindrical depth of view)，該圓柱 坦厅、沬至少在哕 气决_ μ札洞104該兩端點108 、 110之間延伸； δ亥鏡碩總成116 —個- 將讀圓柱型孔洞104内部表面112投射成 一維J展狀影像134 。 參閱第2圖丑* 像捕捉設備13〇 〃、苐3圖，該裝置100進一步包括一個影 鲁 像134 ，今& &，例如一部攝影機，以捕捉該二維環狀影 線丨28配置；唁&挺設備I30沿著該鏡頭總成116中心軸 示）配置於該：：：捕捉設· 13° -個影像積測器（未顯 洞叫兩個端116 一個影像平面132之上，該孔 134在該影像平面132㈣之間内部表面112之環狀影像 兩個端點108 、 ]1〇 >上形成，更具體而言，該孔洞104 2 =部表自112與該影像平面132 …可行的方式是該裝置1QQ肖_# 以利處理影像及辟- 未…員不）連結 ,51 像顯不該内部表面112之俨肿！ & , 例如第4圖係节雷俨 之衣狀衫像134 ’ :果影像，例如-個電腦“，心=所顯示-個 °所捕捉的-個通孔影更呈體而：營幕顯示該裝置丨〇 該孔洞m π n ® 119 '、 5 ，該結果影像闡釋 震丨Aj $表面Μ 一個瑕 。 300或刮痕的聚焦影像 更進一步—個範例， 的+ 第圖係在該顯示工具上所顯示 個具有螺帽螺紋通孔結果 上所，·.、員不 螺帽螺紋清楚g§ _ + W象，更具體而言，某些 、'，，，月楚”、、員不出瑕疵部份400 。兮奘罢！ nn 暫時間内，精砣β 4裝置1卯能夠在短 円槓確鑑別该瑕疵部份4〇 圖所 不该一維壤狀影像134 201011281 ·. 可行的方式是逯過一個、重 設備（未顯示），執行兮孔3用軟體應用系統的影 業。該影像處理設僑可偵\洞104内部表面⑴之檢 色，進而偵測並鑑纖該等亥孔洞表面諸如螺帽螺紋 顯示工具上配置指示器設锖色之瑕疵。可行的方式是 是否出現瑕疵。 ，以指出該孔洞104内部 此外，透過處理第 裝置100可確認該孔洞1〇4 红 Φ 之螺紋間距Α。更具體而一内部表面112所形成内部 相對應於任何徑向内AR碑° ，該内部螺紋的螺紋間距201011281 « : 6. Description of the Invention: [Technical Field] The present invention relates to an apparatus and method for detecting an object, and more particularly to an apparatus and method for detecting the inner surface of an object hole. [Prior Art] According to many manufacturers, the manufactured products are regularly inspected. This is a typical quality control measure used to identify defective products and control the quality of the products manufactured. Many products must detect their internal surfaces, such as screw holes. In general, the traditional method of hole detection uses a camera to capture the inner surface of the hole. The camera and the product to be tested usually have to be rotated relative to each other in order to obtain a complete view of the inner surface. In many cases, the camera and the tested product usually have to be rotated 360° relative to each other. After the camera and the tested product complete 360° rotation, the camera can capture the complete image of the internal surface of the tested product and then use the captured detection. Image identification of the internal surface of the product may be awkward. However, the conventional hole detection method must rotate the camera relative to the product to be tested, which is an extremely time-consuming detection method. Moreover, since the conventional detection method has to rotate the camera around the product to be tested, it is necessary to design a rotation mechanism, and it is an extremely costly detection method to construct the rotation mechanism. At the same time, because the rotation mechanism will generate vibration, it will also affect the products obtained by the traditional detection method image 201011281, and perform the traditional hole inspection/廑, which will cause the traditional hole detection to be carried out, and the 4 is not hurt enough to have a deep focus. Image quality, and the production of the image captures the out-of-focus problem. The calibration of the same image is likely to cause image resolution, distortion, and distortion. Because the distortion shadow is not easy to detect, it is not easy to capture the result of the ruler 2, which is a distorted image. The traditional hole detection system shown in the a) is an optical system _ ', as shown in Figure 6, as shown in Figure 6 The rotation of the sleeve 606 = including a portion of the display along the camera 602 and a light wind (not shown), the optical module 6 〇 4 oxygen = a rotating table (not shown. In the three Capturing objects of different positions 6〇8::, 2, 3, and 1, image 2 and image 3... illuminators: = like 'is the image for detection purposes and detected objects, configurable to illuminate objects More images; follow-up with controller_::: capture position to get 'to identify each image's madness, and will be tested::: image detection is compared, or set with the user > number /, a good look at the standard seesaw 608. This & implementation comparison, as shown in Figure 7, shows another traditional rotation of the object _, not the optical module '·_,·,^0, the system 7〇〇 is usually used to detect medium and small size and weight, the pass The system space or = and other constraints can not rotate the optical mode because in the traditional enamel, paper 700 towel, rotating object _, brother under the effect of the traditional system shown in Figure 7. Use: The traditional system _ 贞 · The number of captures is a few long. At the same time, the controller (10) must process several images, and:: According to different preset time intervals, the image of the traditional "image inter-polar pole 201011281" detected by the module 7 is first learned. In addition, the foregoing conventional system must use a motor and encoder module 612 to rotate the optical module 604 or the object 608, which is costly. The optical module 604 and the object 608 rotation information are fed back to the controller 610 to facilitate triggering the preset. The point triggers the camera 602. Therefore, it is necessary to develop a method for detecting the internal surface of the hole, which can quickly obtain the best result without rotating the object to be detected and detecting a single image of the entire inner surface of the hole. After years of experience in manufacturing development and design of related products, the company has made a detailed design and careful evaluation for the above objectives. SUMMARY OF THE INVENTION The present invention is directed to providing a detection method, and the problem to be solved is to detect the inside of a hole without rotating the object to be detected, in accordance with an embodiment of the present invention. Surface φ The detection method involves directing an illumination light to a hole having two ends with an internal surface between the ends. The detection method also includes receiving light that passes through a lens assembly and is reflected from the inner surface. The lens assembly has a depth of field extending at least to both ends of the hole. The detecting method further includes capturing a flat image of an inner surface of the image plane, the inner surface being sufficiently focused along the two-dimensional image At the same time, image processing is performed to detect the two-dimensional image, thereby detecting the inner surface of the hole. According to a second embodiment of the present invention, a detection device 5 201011281 is pointed to a surface. Surface ‘the end of the mirror. The image flat image is filled with the two-dimensional object hole 12, and includes a second hole from the hole. The step is performed by the optical step 18, and the hole is disposed. The detecting device includes an illuminator, and the illuminator will The light has a hole having two ends and an inner portion between the two ends. The detecting device includes a lens assembly for receiving light reflected from the inner surface and projecting the inner surface into a two-dimensional image head. The camera has a depth of field that extends at least to the hole. The two detecting devices further include an image capturing device for capturing a two-dimensional image of the inner surface of the surface. The inner surface is focused along the two-dimensional portion, and a processor performs image processing to detect the 0 image and thereby detect the inner surface of the hole. [Embodiment] Please refer to Fig. 1 for a flow chart showing a method 10 for detecting a hole according to an embodiment of the present invention. The method 10 includes a step of directing illumination light toward the aperture, the aperture having an inner surface extending at both ends to the ends of the aperture. The method 10 includes a step 14 of directing the light from the interior surface of the reflection hole to a lens assembly; the method 10 is the same as step 15 which projects the inner surface of the hole into a circular image ( Flat ring image), the two-dimensional annular image can show the complete details of the inner surface of the hole; the method 10 also includes a step 16 to capture the two-dimensional annular image and convert the two-dimensional annular image form into a digital form. The method 10 further includes a step of processing and detecting the two-dimensional annular image to detect the surface of the portion. In accordance with an embodiment of the present invention, a detection device 100 is described herein, see FIG. The apparatus 100 includes one or more illumination sources 10 104 201011281; 2 to direct the illumination beam 103 to a hole 104, which is a cylindrical hole formed in an object 106, just like a certain manufacturing A through hole in the product. In this embodiment of the invention, the illumination source 102 is used to direct light to the aperture 104. The 104 has a first end point 108, a second end point 110, and an inner surface 112 extending between the first end point and the second end point 110; the first end point 108 Compared with the second end 0, the first end point 108 is relatively close to the device 100: the hole ® 4 may be a through hole or a blind hole; the illumination source 102 is used to provide The through hole or the illumination of the blind hole. The illumination source 102 provides white, colored or monochromatic light to illuminate the aperture 104. The illumination source 102 is, for example, a fluorescent tube with a white, or monochromatic LED, or natural light from the sun. If the hole 104 is a through hole, it is possible to point the point 110 to the background light, and if the hole 104 is a blind hole, the illumination is directed to the first end point 10δ. The apparatus 100 also includes a lens assembly 116, as shown in Fig. 2, the illumination beam is reflected from the inner surface 112 of the aperture 104 and refers to the lens assembly 116. It is possible that the lens assembly 116 should be configured with the first end 108 of the hole 104 straight up. Figure 3 is a complete representation of the lens assembly 116 shown in Figure 2, while Figure 3 also shows the light 117 passing through the lens assembly 116. More specifically, the lens assembly 116 shown in FIG. 3 includes a plurality of, that is, a first lens 118, a second lens 120, an upper embodiment hole, and a 108 point 11 hole 10. The two ends of the hole are shown in the illustrated path lens number 201011281; three lenses 122, a fourth lens 124 and a fifth lens 126. Or these multiple lenses can be replaced by 稜鏡 to achieve the same optical effect. It is possible that the first to fifth lenses 118, 120, 122 > 12 4 > 126, each lens is disposed along the lens assembly 116 - a central axis 128, the feasible way is the central axis 128 It coincides with the longitudinal axis of the hole 104 shown in FIG. An example of the lens assembly design will be described below. In the first to fifth lenses 118, 120, 122, 124, and 126, each lens size and the lens assembly 116 type module are as shown in the attached table: surface radius (mm) thickness (ran) diameter (nm) Lens type note 1 6.0 5.1 5.4 N-LAF21 First lens 2 -6. 0 0.4 5.4 - Space 3 5.2 4.0 5.4 N-LAF21 Second lens 4 -20.0 0.2 5.4 - Space 5 5.T 5.2 5.4 F -SILICA Third lens 6 -4.1 0.9 5.4 - Space 7 ~88- 8 ____________5.0 5.4 N-psk3 Fourth lens 8 -6. 1 0.2 5.4 - Space 9 inf 4.0 0.6 - Mirror diameter 10 14.5 1.5 6.0 N-SF11 Fifth lens 11 3.8 4.0 6.0 N-LAK34 Fifth lens 12 -10.5 8.8 6.0 — Space Schedule 1 can implement a pattern module for the lens assembly 116 to facilitate the detection of holes with a larger size range, such as diameter Holes ranging from 8 to 16 mm and depths from 8 to 16 _. In this embodiment of the present invention, the lens assembly 116 has an effective focal length of about 5.7 mm, and the lens assembly 116 provides a high quality image of the inner surface 112 of the hole 104. 201011281 The lens assembly r . , t has a cylindrical field of vlew and a criminal depth of view, which is at least in the air. The hole 104 extends between the two ends 108, 110; the δ ray mirror assembly 116 - the inner surface 112 of the read cylindrical hole 104 is projected into a one-dimensional J-shaped image 134. Referring to Figure 2, the image capture device 13A, 苐3, the device 100 further includes a shadow image 134, present &&&&&&&&&&&&&&&&&&&&&&&&&Configuration; 唁 & device I30 along the center axis of the lens assembly 116) is configured in the::: capture setting · 13 ° - an image accumulator (not shown the two ends 116 an image plane 132 The hole 134 is formed on the two end points 108, 1 〇 > of the annular image of the inner surface 112 between the image planes 132 (four), and more specifically, the hole 104 2 = the portion from 112 and the image Plane 132 ... the feasible way is that the device 1QQ Xiao _# to handle the image and the - - not ... not the link, 51 like the internal surface 112 bloated! & , for example, Figure 4 is the Thunder's blouse like 134 ': fruit image, for example - a computer", heart = displayed - a ° captured by a through hole shadow is more body: Display the device 丨〇 the hole m π n ® 119 ', 5, the result image illustrates the shock Aj $ surface Μ a 瑕 300 or scratched focused image further — an example, the + picture is in the display The tool has a threaded through hole on the tool. The result is that the nut is not screwed. g§ _ + W, more specifically, some, ',,, Yue Chu, The part 400 is out. Oh! Nn For the time being, the fine 砣β 4 device 1卯 can identify the 瑕疵 part of the 円 〇 〇 134 134 134 134 134 201011281 ·. The feasible way is to smash one, heavy equipment (not Display), perform the filming of the boring 3 with the software application system. The image processing is used to detect the color of the inner surface (1) of the hole 104, and to detect and diagnose the surface of the hole such as the nut thread display tool. The feasible way is whether there is a flaw. In order to indicate the inside of the hole 104, in addition, the thread pitch Α of the hole 1〇4 red Φ can be confirmed by the processing device 100. More specifically, the inner portion formed by the inner surface 112 corresponds to any radially inner AR monument, and the thread pitch of the inner thread
°丨4螺紋Μ A . 的母—螺旋半徑必之公式 處理 測作 等特 在該 表面 ，該 螺紋 A與 如下 P,= Λ -R -bd 在 這 '— 公式中 R〇 \ 内 部表 面 112所形 成 螺 旋 該 二維 環 狀 影像134 螺 旋 該 裝 置 100進 步 能 onding wires) 或是半 導 體 晶 被 置入 該 裝 置100 梘 界 中 孔 洞檢 測 方 法10類 似 0 以 前 述 方式， 依 據 本 檢 測的 — 個 裝置與 方 法 0 雖然 此 處 僅揭露 本 發 明 ? 本.領 域 專 業人士 應 當 瞭 變 化與 / 或 修訂， 以 利 運 ，+lj k + b(R0 - R,、 6與々為常數，』·為該孔洞 累紋的數值，允與心/係沿著 螺紋之半徑。 夠檢測鮮墊（bond pads)、接合 片間介面之瑕疵，該半導體 以利檢測前述瑕疲，其方 發明一個實施例，此處說明 以解決前述傳統檢測方法之 一些實施例，但依據本發明 解，此處所揭露之發明仍有 用於各種不同尺寸與高度孔 104 徑向 線（b 晶片 式與 孔洞 缺失 内容 許多 洞之 10 201011281 檢測作業，而該等變化與修訂仍不脫離本發明的範疇 神。 上述實施例所揭示者係藉以具體說明本發明，且 雖透過特定的術語進行說明，當不能以此限定本發明 利範圍；熟' 悉此項技術領域之人士當可在瞭解本發明 神與原則後對其進行變更與修改而達到等效之目的， 等變更與修改，皆應涵蓋於如后所述之申請專利範圍 定範疇中。 與精 文中 之專 之精 而此 所界°丨4 Μ Μ A. The mother-helical radius must be calculated on the surface, the thread A and the following P, = Λ -R -bd in this '- formula R 〇 \ internal surface 112 Forming a spiral of the two-dimensional annular image 134 spiraling the device 100 to enable wires or semiconductor crystals being placed into the device 100. The hole detection method 10 is similar to 0. In the foregoing manner, the device and method according to the detection 0 Although only the present invention is disclosed herein, the professionals in the field should change and/or revise, for luck, +lj k + b (R0 - R, 6 and 々 are constant, 』· for the hole The value of the core/system is along the radius of the thread. It is sufficient to detect the bonding pads and the interface between the inter-chips, and the semiconductor is used to detect the aforementioned fatigue, and an embodiment is invented herein. Some embodiments of the aforementioned conventional detection methods are addressed, but in accordance with the present invention, the invention disclosed herein is still applicable to a variety of different sizes and height apertures 104. To the line (b wafer type and hole missing content 10, 201011281 inspection operations, and such changes and revisions remain without departing from the scope of the invention. The above embodiments disclose the invention by way of specific The terminology is used to describe the scope of the invention, and it is to be understood that those skilled in the art can change and modify the invention and the principles of the invention to achieve the equivalent purpose. Modifications should be covered in the scope of the patent application scope as described later.
參 11 201011281 【圖式簡單說明】 第1圖：本發明孔洞檢測方法之流程圖。 第2圖：本發明顯示孔洞檢測裝置之剖面視圖。 第3圖：承第2圖之鏡頭總成剖面視圖。 第4圖：承第2圖之裝置運用背景照明所捕捉到通孔之影 像示意圖。 第5圖：承第2圖之運用背景照明所捕捉到具備螺帽槽通 孔之影像示意圖。 • 第6圖：先前技術所使用系統之圖示一。 第7圖：先前技術所使用系統之圖示二。 【主要元件符號說明】 10 12、14、15、16、18 10 0 10 2 10 4 10 6 10 8 110 方法 步驟 檢測裝置 照明光源 φ 照明光束 物件 117 118 1 2 0 第一端點 第二端點 内部表面 鏡頭總成 光線 第一鏡頭 第二鏡頭 12 201011281 第三鏡頭 122 第四鏡頭 124 第五鏡頭 126 中心軸線 128 影像捕捉設備 130 二維環狀影像 134 瑕疵 3 0 0 瑕疵部份 400Reference 11 201011281 [Simple description of the drawing] Fig. 1 is a flow chart of the hole detecting method of the present invention. Fig. 2 is a cross-sectional view showing the hole detecting device of the present invention. Figure 3: Sectional view of the lens assembly in Figure 2. Figure 4: The image of the through hole captured by the device in Figure 2 using background illumination. Figure 5: Schematic diagram of the image with the nut slot through the hole captured by the background illumination in Figure 2. • Figure 6: Illustration 1 of the system used in the prior art. Figure 7: Graphic 2 of the system used in the prior art. [Main component symbol description] 10 12, 14, 15, 16, 18 10 0 10 2 10 4 10 6 10 8 110 Method step detection device illumination source φ illumination beam object 117 118 1 2 0 first endpoint second endpoint Internal surface lens assembly light First lens Second lens 12 201011281 Third lens 122 Fourth lens 124 Fifth lens 126 Center axis 128 Image capture device 130 Two-dimensional ring image 134 瑕疵3 0 0 瑕疵 Part 400
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