201006678 六、發明說明 【發明所屬之技術領域】 本發明係關於墨水的吐出方法，其詳細爲有關利用具 備塡充有墨水之液室、使液室内的壓力變化之壓力產生元 件、及設在液室之噴嘴的頭，從噴嘴吐出墨水之墨水的吐 出方法。 _ 【先前技術】 過去一向利用真空蒸鍍法或濺鍍法等，在基板全面使 金屬膜成膜後，藉由光微影法將塗佈膜進行加工成所期望 的圖案。但是，光微影法除了工程煩雜以外，此外有極爲 浪費使用之金屬材料的問題。 相對於此，也藉由噴墨法進行在基板上塗佈金靥墨水 (例如，參照專利文獻1)。根據此方法，可將具有所期 望的圖案之塗佈膜直接形成在基板上。因而，相較於上述 Φ 方法，不僅可以縮短工程，而且可以減少浪費使用之金屬 墨水。 作爲噴墨塗佈裝置，眾知有藉由壓電元件等壓力產生 元件控制墨水的吐出之裝置。該裝置中，頭係大多具有複 數之各個噴嘴和壓力產生元件。壓力產生元件係利用藉由 在電極間施加脈衝電壓的方式所產生的機械性偏斜而使墨 水吐出。各噴嘴被分成複數區段，進一步在各區段内被分 割成驅動區塊。然後，依各驅動區塊分時驅動壓力產生元 件。 -5- 201006678 然而，於設在頭的噴嘴，會有起因於製造時的尺寸不 均等之個體差別。因此，從各噴嘴吐出之墨水量不均等’ 使噴嘴間產生不均。又’墨水的吐出速度亦有不均’而因 噴嘴使墨水對基板的著彈位置產生差異。墨水的吐出量有 不均時，著彈在基板上的墨水滴徑將產生不均而形成濃度 斑點。又，墨水的著彈位置有不均時’造成塗佈膜圖案精 度降低之結果。 但是，若要製造將各噴嘴之不均抑制到沒有問題的程 度，則會使產品良率極端地降低。又，即始製造當初之不 均很小，有時在反覆動作中也會因某些原因而有不均變大 的情形。 因此，必須調整墨水的吐出量和吐出速度使該等在噴 嘴間形成均等。在使用壓力產生元件的噴墨塗佈裝置中， 係藉由調整施加電壓的方式使吐出量和吐出速度形成均等 。即，在壓力產生元件施加電壓時，係以與電場大小成比 例地快速變化其形狀。因此，藉由改變施加在壓力產生元 件的電壓大小或電壓波形的方式，改變墨水的吐出量或吐 出速度，可使該等形成均等（參照專利文獻2)。 〔先行技術文獻〕 〔專利文獻〕 〔專利文獻1〕日本特開昭59-75205號公報 〔專利文獻2〕日本特開2005-502447號公報 【發明內容】 -6 - 201006678 在具有上述複數噴嘴的頭，具有可在基板等對象物以 高速塗佈墨水之優點。具有該頭的噴墨塗佈裝置中，噴嘴 係分割成複數區塊，依各區塊分時驅動預定數之噴嘴。一 般而言，沿著噴嘴排列的方向，從邊端起順序地從複數噴 嘴吐出墨水。 但是，噴嘴數變多時，鄰接的噴嘴彼此間隔變近，因 此噴嘴間產生干涉（Crpss talk:串擾），因此墨水的吐 ^ 出狀態發生變化。這種干涉因以複數噴嘴單位沿噴嘴的排 列方向順序使墨水吐出的方式而變得顯著。與複數噴嘴内 之干涉不同地，另外在複數噴嘴間也產生干涉之故。 然而，在噴嘴間的干涉程度，係根據形成在對象物上 的塗佈圖案而異。其係根據當塗佈圖案相異時，各噴嘴之 吐出周期、或施加在壓力產生元件的電壓之驅動波形在噴 嘴間的相位差變化。但是，以往係使各噴嘴中的墨水之吐 出量或吐出速度形成均等，因此當調整施加在壓力產生元 φ 件的電壓時，採用調整用之塗佈時機。因此，以實際之塗 佈時機塗佈時，會有加上噴嘴間之新的干涉作用，而無法 形成所期望的圖案之問題。 本發明係鑑於這些問題而發明者。即’本發明之目的 在於提供墨水的吐出方法，其係可以利用具有複數噴嘴的 頭，以所期望的圖案進行塗佈。 本發明之其他目的及優點應可從以下記載明暸。 【實施方式】 201006678 本發明係一種墨水的吐出方法，其係利用具備塡充有 墨水之液室、使前述液室内的壓力變化之壓力產生元件、 及設在前述液室之噴嘴的頭，自前述噴嘴吐出前述墨水之 墨水的吐出方法，其特徴爲： 前述頭具備複數前述噴嘴， 具有以下工程：以和對於實際塗佈圖案相同的條件吐 出墨水的方式，使各噴嘴變化施加在前述壓力產生元件的 電壓之驅動波形，以使來自各噴嘴的墨水的吐出量和吐出 速度至少一方形成均等。 本發明中，前述工程係針對從同一噴嘴吐出的複數墨 水滴求出吐出量和吐出速度之平均値，使該等平均値在各 噴嘴間形成均等的工程爲佳。 本發明中，在前述噴嘴所吐出的墨水滴，與前述墨水 滴的吐出時機同步地照射發光之照明光，利用攝影機拍攝 前述墨水滴，根據所得之圖像求出前述吐出量及前述吐出 速度至少一方。 本發明中，前述複數噴嘴各自的吐出係以具有時間差 的方式進行。 根據本發明’由於以和對於實際塗佈圖案相同的條件 吐出墨水的方式，使各噴嘴變化施加在壓力產生元件的電 壓之驅動波形，以使來自各噴嘴的墨水的吐出量和吐出速 度至少一方形成均等’因此具有複數噴嘴的頭亦可以所期 望的圖案進行塗佈。 本實施形態的噴墨塗佈裝置中，頭係具備塡充有墨水 -8- 201006678 之液室、設在該液室用於吐出墨水之噴嘴、及使液室内的 壓力變化之壓力產生元件。其中’作爲壓力產生元件可舉 出壓電元件等。在壓力產生元件施加電壓時，液室内的壓 力變化使液滴從噴嘴吐出。此外，頭之數量爲1個或2個 以上皆可。 本實施形態中，噴嘴和壓力產生元件係各自以2以上 之數量被設在頭。壓力產生元件係利用藉由在電極間施加 _ 脈衝電壓的方式所產生的機械性偏斜，使墨水吐出之元件 9 。各噴嘴被分成複數區段，進一步在各區段内被分割成驅 動區塊。然後，依各驅動區塊分時驅動壓力產生元件。 本實施形態中，可沿著噴嘴排列的方向，以從邊端起 順序地從複數噴嘴吐出墨水的方式進行驅動。藉此，可縮 短塗佈所需要的時間並使驅動電路簡單化。 噴墨塗佈裝置具有控制裝置，用於調整施加在壓力產 生元件的電壓之驅動波形。該控制裝置可將驅動波形朝電 φ 壓方向和時間方向2個方向調整。此外，控制裝置亦可以 是將驅動波形僅朝電壓方向或時間方向之任一方調整者。 又，噴墨塗佈裝置具有吐出狀態觀測裝置。該裝置係 觀測從噴嘴吐出的墨水滴之吐出狀態之手段。換言之，其 係以與實際塗佈相同的條件，亦即使各噴嘴的吐出周期、 或施加在壓力產生元件的電壓之驅動波形在噴嘴間的相位 差’相同於對實際塗佈圖案的條件，觀測吐出狀態之手段 〇 吐出狀態觀測裝置係可對噴嘴所吐出的墨水滴，與墨 -9 - 201006678 水滴的吐出時機同步地照射發光之照明光，利用攝影機拍 攝墨水滴，根據所得之圖像求出吐出量及吐出速度。其中 ，可使用頻閃觀測器作爲照明光光源，可使用CCD攝影 機作爲攝影機。 第1圖（a)及（b)係本實施形態中的噴墨塗佈裝置 之部分構成圖之一例。第1圖（a)係對於墨水的滴下方 向，從垂直方向所見之圖，第1圖（b)係從噴嘴的方向 所見之圖。此外，第1圖（b)中，省略控制裝置及各構 成構件間連接的一部分。第1圖（a)及（b)中，1係頭 ，雖無詳細圖示，但具備塡充有墨水之液室、使液室内的 壓力變化之壓力產生元件、及設在液室之噴嘴。噴嘴係設 有2個以上之數量，從該等噴嘴將液室内的墨水吐出。（ 第1圖例中，設有3個噴嘴13、14、15)。又，2係吐出 狀態觀測裝置，具備照射光之頻閃觀測器3、接收來自頻 閃觀測器3的光以拍攝墨水滴之CCD攝影機4、及取得墨 水吐出速度之吐出速度取得部5。 如上述地，從噴嘴 13、14、15吐出的墨水之吐出量 有不均時，著彈在基板等對象物上的墨水滴徑會產生不均 而形成濃度斑點。又，墨水的吐出速度有不均時，會在墨 水的著彈位置產生不均。因而，在真正進行塗佈之前，必 須將吐出量或吐出速度調整成形成均等。 本實施形態中，係以和對於實際塗佈圖案相同的條件 ，亦即以與真正塗佈相同的條件吐出墨水，進行吐出量或 吐出速度之調整。調整係藉由控制裝置進行，具體而言係 -10- 201006678 藉由 DPN ( Drive Per Nozzle :驅動各噴嘴）修正而進行 。即，依各噴嘴求出吐出量和吐出速度並與目標値比較， 利用從吐出量及吐出速度和驅動波形之各關係預先求出的 修正係數，將各噴嘴調整成各電壓之驅動波形，使該等成 爲目標値。 上述調整係藉由改變驅動壓力產生元件的脈衝電壓之 大小或時間幅而進行。其中，在噴嘴數少的情形下，藉由 _ 使吐出速度均等化的方式，亦可使吐出量均等化。但是， 噴嘴數變多時，即使使吐出速度均等化仍無法謀求吐出量 均等化。因此，在噴嘴數多的情形下，首先將吐出量調整 成形成均等，接著將吐出速度調整成形成均等。如此地， 藉由2階段調整的方式，即可以高精確度控制墨水的吐出 量和吐出速度。 墨水的吐出量調整，具體而言係藉由將施加在壓力產 生元件的電壓之驅動波形變化成電壓方向而進行。例如可 φ 以如下述方式進行。 以和對於實際塗佈圖案相同的條件吐出墨水’利用吐 出狀態觀測裝置2拍攝從噴嘴13、14、15吐出之墨水滴 。此時，使頻閃觀測器3與墨水滴之吐出同步地發光’利 用CCD攝影機4拍攝飛翔的墨水滴。根據所得之圖像比 較吐出量，在控制裝置6變化各噴嘴13、14、15的驅動 波形，使噴嘴13、14、15各自的吐出量形成均等。若預 先求出墨水滴的大小和吐出量之關係，便可從噴嘴13、14 、15均等地吐出所期望的吐出量之墨水。 -11 - 201006678 此外，與利用頻閃観測器之上述方法不同地，藉由調 査從噴嘴吐出的墨水滴著彈到對象物之基板等之後的墨水 滴徑，也可以得知吐出量。具體而言，係於基板上以和對 於實際塗佈圖案相同的條件吐出墨水。然後，比較從各噴 嘴吐出的墨水滴徑，利用控制裝置使驅動波形變化成電壓 方向，使該等墨水滴徑均等地形成所期望之大小。若預先 求出滴徑和吐出量之關係，便可以從各噴嘴均等地吐出所 期望的吐出量之墨水。但是，墨水滴徑會受到基板表面狀 態之影響，因此以上述拍攝圖像求出的方法爲佳。 接著，對於形成均等吐出量之墨水滴，使吐出速度形 成均等。具體而言，係藉由使施加在壓力產生元件的電壓 之驅動波形變化成時間方向而進行。例如可藉由下述方式 進行。 以和對於實際塗佈圖案相同的條件吐出墨水，利用吐 出狀態觀測裝置2在不同時機拍攝2次從噴嘴13、14、15 吐出之墨水滴。具體而言，將與施加在壓力產生元件的電 壓之驅動脈衝同步的頻閃觀測器3閃動2次，藉由CCD 攝影機4拍攝飛翔的墨水滴。接著，在吐出速度取得部5 從所得圖像求出墨水滴之位置，從該位置和拍攝時機之間 隔求出墨水的吐出速度。將此資訊傳送到控制裝置6之後 ，在控制裝置6比較從噴嘴13、14、15吐出之墨水的吐 出速度。然後，爲了使該等形成均等，藉由控制裝置6改 變各噴嘴13、14、15之驅動波形。 此外，與利用頻閃觀測器之上述方法不同地，藉由調 -12- 201006678 査從噴嘴吐出的墨水滴著彈到對象物之基板等之位置，也 可以得知吐出量。若吐出速度快則從噴嘴著彈在遠的位置 ，另一方面若吐出速度慢則從噴嘴著彈在近的位置之故。 本實施形態中，藉由此方法比較吐出速度亦可。但是，著 彈位置有時會受到基板表面狀態之影響，因此由上述拍攝 圖像求出的方法爲佳。[Technical Field] The present invention relates to a method for discharging ink, and in particular to a pressure generating element that uses a liquid chamber filled with ink to change a pressure in a liquid chamber, and a liquid-providing device The head of the nozzle of the chamber, the method of discharging the ink from the nozzle. [Prior Art] In the past, a vacuum film deposition method, a sputtering method, or the like was used to form a film into a desired pattern by photolithography. However, in addition to complicated work, the photolithography method has a problem of extremely wasted metal materials. On the other hand, the gold ruthenium ink is applied onto the substrate by an inkjet method (for example, see Patent Document 1). According to this method, a coating film having a desired pattern can be directly formed on a substrate. Therefore, compared with the above Φ method, not only the engineering can be shortened, but also the metal ink which is wasted is reduced. As the inkjet coating device, there is known a device for controlling the ejection of ink by a pressure generating element such as a piezoelectric element. In this device, the head system mostly has a plurality of individual nozzles and pressure generating elements. The pressure generating element discharges the ink by mechanical deflection caused by applying a pulse voltage between the electrodes. Each nozzle is divided into a plurality of sections which are further divided into drive sections in each section. Then, the pressure generating element is driven in a time-division manner according to each driving block. -5- 201006678 However, in the nozzles provided at the head, there are individual differences due to dimensional irregularities at the time of manufacture. Therefore, the amount of ink discharged from each nozzle is not uniform, and unevenness occurs between the nozzles. Further, the ejection speed of the ink is also uneven, and the position of the ink on the substrate is different due to the nozzle. When the amount of ink discharged is uneven, the droplet diameter of the ink on the substrate will be uneven to form a concentration spot. Further, when the position of the ink is uneven, the result is that the pattern of the coating film is lowered. However, if the degree of unevenness of each nozzle is suppressed to a level where there is no problem, the yield of the product is extremely lowered. Moreover, the initial insufficiency is small at the beginning, and sometimes there is a case where the unevenness becomes large for some reasons in the repeated action. Therefore, it is necessary to adjust the discharge amount of the ink and the discharge speed so that the bubbles are equalized between the nozzles. In an inkjet coating apparatus using a pressure generating element, the discharge amount and the discharge speed are equalized by adjusting the applied voltage. That is, when a voltage is applied to the pressure generating element, its shape is rapidly changed in proportion to the magnitude of the electric field. Therefore, the amount of discharge or the discharge speed of the ink can be changed by changing the magnitude of the voltage or the voltage waveform applied to the pressure generating element, and the formation can be uniform (see Patent Document 2). [Patent Document 1] [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei 59-75205 (Patent Document 2) JP-A-2005-502447 [Summary of Invention] -6 - 201006678 In the above-described plural nozzle The head has the advantage that the ink can be applied at a high speed on an object such as a substrate. In the ink jet coating apparatus having the head, the nozzle is divided into a plurality of blocks, and a predetermined number of nozzles are driven in a time division manner in accordance with each block. In general, ink is sequentially ejected from a plurality of nozzles from the side edges in the direction in which the nozzles are arranged. However, when the number of nozzles is increased, the adjacent nozzles are spaced apart from each other, and interference (Crpss talk) occurs between the nozzles, so that the discharge state of the ink changes. This interference becomes remarkable by the manner in which the plurality of nozzle units sequentially discharge the ink in the direction in which the nozzles are arranged. Different from the interference in the plurality of nozzles, interference also occurs between the plurality of nozzles. However, the degree of interference between the nozzles varies depending on the coating pattern formed on the object. This is a change in the phase difference between the nozzles in the discharge period of each nozzle or the voltage applied to the pressure generating element when the coating patterns are different. However, conventionally, the discharge amount or the discharge speed of the ink in each nozzle is made uniform. Therefore, when the voltage applied to the pressure generating element is adjusted, the coating timing for adjustment is employed. Therefore, when the actual coating timing is applied, there is a new interference between the nozzles, and the problem of the desired pattern cannot be formed. The present invention has been invented in view of these problems. That is, the object of the present invention is to provide a method of discharging ink by coating a desired pattern using a head having a plurality of nozzles. Other objects and advantages of the present invention will be apparent from the following description. [Embodiment] 201006678 The present invention relates to a method for discharging ink, which comprises a pressure generating element having a liquid chamber filled with ink, a pressure generating unit in the liquid chamber, and a nozzle provided in the liquid chamber. The method of discharging the ink of the ink by the nozzle is characterized in that the head includes a plurality of the nozzles, and the nozzle is provided to discharge the ink in the same manner as the actual application pattern, and the nozzle is changed to apply the pressure. The driving waveform of the voltage of the element is such that at least one of the discharge amount of the ink from each nozzle and the discharge speed are equalized. In the present invention, it is preferable that the above-mentioned engineering system obtains the average enthalpy of the discharge amount and the discharge speed for the plurality of ink droplets discharged from the same nozzle, and it is preferable that the average enthalpy is formed between the nozzles. In the present invention, the ink droplets ejected from the nozzles are irradiated with the illumination light emitted in synchronization with the ejection timing of the ink droplets, and the ink droplets are imaged by a camera, and the discharge amount and the discharge speed are determined based on the obtained image. One party. In the present invention, the discharge of each of the plurality of nozzles is performed with a time difference. According to the present invention, the driving waveform of the voltage applied to the pressure generating element is changed by the nozzle so that the ink is discharged under the same conditions as the actual coating pattern, so that the discharge amount and the discharge speed of the ink from each nozzle are at least one. The formation of equal 'thus' heads with multiple nozzles can also be applied in the desired pattern. In the inkjet coating device of the present embodiment, the head system includes a liquid chamber filled with ink -8-201006678, a nozzle for discharging ink in the liquid chamber, and a pressure generating element for changing the pressure in the liquid chamber. Here, as the pressure generating element, a piezoelectric element or the like can be cited. When a voltage is applied to the pressure generating element, the pressure change in the liquid chamber causes the liquid droplets to be discharged from the nozzle. In addition, the number of the heads may be one or two or more. In the present embodiment, each of the nozzle and the pressure generating element is provided in the head in an amount of two or more. The pressure generating element is an element 9 that ejects ink by mechanical deflection caused by applying a _ pulse voltage between electrodes. Each nozzle is divided into a plurality of sections and further divided into drive blocks in each section. Then, the pressure generating elements are driven in a time-division manner according to each driving block. In the present embodiment, it is possible to drive the ink from the plurality of nozzles in order from the side end in the direction in which the nozzles are arranged. Thereby, the time required for coating can be shortened and the drive circuit can be simplified. The ink jet coating device has control means for adjusting a driving waveform of a voltage applied to the pressure generating member. The control device adjusts the drive waveform in two directions of the electric φ pressure direction and the time direction. Further, the control means may adjust the drive waveform only to either the voltage direction or the time direction. Further, the inkjet coating device has a discharge state observation device. This device is a means for observing the discharge state of the ink droplets ejected from the nozzles. In other words, it is the same condition as the actual coating, and even if the discharge period of each nozzle or the driving waveform of the voltage applied to the pressure generating element is the same as the phase difference between the nozzles, the observation is made on the condition of the actual coating pattern. In the discharge state, the ink droplets emitted from the nozzles can illuminate the illumination light in synchronization with the discharge timing of the ink -9 - 201006678 water droplets, and the ink droplets are captured by the camera, and the image is obtained from the image obtained. The amount of spit and the speed of spit. Among them, a stroboscopic observer can be used as the illumination light source, and a CCD camera can be used as the camera. Fig. 1 (a) and (b) are diagrams showing an example of a partial configuration of an ink jet coating apparatus in the present embodiment. Fig. 1(a) is a view seen from the vertical direction with respect to the downward direction of the ink droplet, and Fig. 1(b) is a view seen from the direction of the nozzle. Further, in Fig. 1(b), a part of the connection between the control device and each of the constituent members is omitted. In the first drawing (a) and (b), the first-stage head, although not shown in detail, has a liquid chamber filled with ink, a pressure generating element that changes the pressure in the liquid chamber, and a nozzle provided in the liquid chamber. . The number of nozzles is two or more, and the ink in the liquid chamber is discharged from the nozzles. (In the first example, three nozzles 13, 14, and 15 are provided). Further, the two-stage discharge state observation device includes a stroboscopic observer 3 that emits light, a CCD camera 4 that receives light from the stroboscopic observer 3 to take ink droplets, and a discharge speed acquisition unit 5 that acquires the ink discharge speed. As described above, when the discharge amount of the ink discharged from the nozzles 13, 14, and 15 is uneven, the ink droplet diameter on the object such as the substrate is unevenly formed to form a density spot. Further, when the discharge speed of the ink is uneven, unevenness occurs at the position where the ink is moved. Therefore, it is necessary to adjust the discharge amount or the discharge speed to be equalized before the coating is actually performed. In the present embodiment, the ink is discharged under the same conditions as the actual application pattern, i.e., the ink is discharged under the same conditions as the actual coating, and the discharge amount or the discharge speed is adjusted. The adjustment is performed by the control device, specifically -10-201006678 by DPN (Drive Per Nozzle). In other words, the discharge amount and the discharge speed are obtained for each nozzle, and compared with the target ,, the nozzles are adjusted to the drive waveforms of the respective voltages by the correction coefficient obtained in advance from the relationship between the discharge amount, the discharge speed, and the drive waveform. These are the targets. The above adjustment is performed by changing the magnitude or time frame of the pulse voltage of the driving pressure generating element. However, when the number of nozzles is small, the discharge amount can be equalized by averaging the discharge speed. However, when the number of nozzles is increased, even if the discharge speed is equalized, the discharge amount cannot be equalized. Therefore, in the case where the number of nozzles is large, the discharge amount is first adjusted to form uniformity, and then the discharge speed is adjusted to form uniformity. Thus, the discharge amount and the discharge speed of the ink can be controlled with high precision by the two-stage adjustment method. The discharge amount adjustment of the ink is specifically performed by changing the drive waveform of the voltage applied to the pressure generating element to the voltage direction. For example, φ can be performed as follows. The ink is ejected under the same conditions as the actual application pattern. The ink droplets ejected from the nozzles 13, 14, and 15 are imaged by the discharge state observation device 2. At this time, the stroboscopic projector 3 is caused to emit light in synchronization with the discharge of the ink droplets. The flying ink droplets are taken by the CCD camera 4. Based on the obtained image, the discharge amount of each of the nozzles 13, 14, 15 is changed by the control device 6, so that the discharge amounts of the nozzles 13, 14, and 15 are equalized. When the relationship between the size of the ink droplets and the discharge amount is obtained in advance, the ink of the desired discharge amount can be uniformly discharged from the nozzles 13, 14, and 15. -11 - 201006678 In addition to the above method using the stroboscopic detector, the amount of discharge can be known by investigating the droplet diameter of the ink droplet ejected from the nozzle to the substrate or the like of the object. Specifically, the ink is discharged on the substrate under the same conditions as the actual coating pattern. Then, the ink droplet diameters ejected from the respective nozzles are compared, and the drive waveform is changed to the voltage direction by the control device, so that the droplet diameters are uniformly formed to a desired size. When the relationship between the droplet diameter and the discharge amount is obtained in advance, it is possible to uniformly discharge the ink of a desired discharge amount from each nozzle. However, since the ink droplet diameter is affected by the surface state of the substrate, the method of obtaining the above-described captured image is preferred. Next, the discharge speed is equalized for the ink droplets forming the equal discharge amount. Specifically, it is performed by changing the driving waveform of the voltage applied to the pressure generating element to the time direction. For example, it can be carried out in the following manner. The ink is ejected under the same conditions as the actual application pattern, and the ink droplets ejected from the nozzles 13, 14, 15 are taken twice by the discharge state observation device 2 at different timings. Specifically, the strobe 3 synchronized with the driving pulse applied to the voltage of the pressure generating element is flashed twice, and the flying ink droplets are taken by the CCD camera 4. Then, the discharge speed obtaining unit 5 obtains the position of the ink droplet from the obtained image, and obtains the discharge speed of the ink from the position and the photographing timing. After transmitting this information to the control device 6, the control device 6 compares the discharge speeds of the ink discharged from the nozzles 13, 14, and 15. Then, in order to make the formation uniform, the driving waveforms of the respective nozzles 13, 14, 15 are changed by the control device 6. Further, unlike the above method using the stroboscopic observer, the amount of discharge can be known by checking the position of the ink droplet ejected from the nozzle to the substrate of the object or the like by adjusting -12-201006678. If the discharge speed is fast, it will be moved from the nozzle to a far position. On the other hand, if the discharge speed is slow, the nozzle will be in a close position. In the present embodiment, the discharge speed may be compared by this method. However, since the position of the projectile is sometimes affected by the state of the surface of the substrate, the method of obtaining the above-described captured image is preferable.
第2圖係以模型方式顯示基板和頭之圖，11表示頭、 12表示基板。又，該圖中，箭頭表示頭11移動的方向。 此外，基板和頭相對地移動亦可，於頭被固定的狀態下將 基板朝與箭頭反方向移亦可。 第2圖係顯示對於實際塗佈圖案時的頭和圖案之位置 關係。第2圖中，101表示從噴嘴13吐出的墨水應著彈之 位置。此例中’3滴墨水著彈而構成1個圖案102’藉由 頭11移動的方式，朝箭頭方向順序形成相同的圖案。同 樣地，103表示從噴嘴14吐出的墨水應著彈之位置，3滴 墨水著彈而形成圖案1〇4。又’ 105表示從噴嘴15吐出的 墨水應著彈之位匱’ 3滴墨水著彈而形成圖案106° 第3圖係顯示以往的調整方法中之施加在壓力產生元 件的脈衝波形之圖，各以（a )對應於第1圖之噴嘴1 3、 (b)對應於第1圖之噴嘴14、（c)對應於第1圖之噴嘴 15。此外，該等圖式中，各以橫軸表示時間、縱軸表示電 壓。 以往的噴墨塗佈裝置之調整方法中，如第3圖（a)〜 (c)所示，針對噴嘴13、14、15，在相同的時機施加了 -13- 201006678 脈衝波形（參照專利文獻2的第20圖及段落0052 ) °但 是，若考慮到噴嘴間之干涉，則針對噴嘴13、14、15在 相同的時機施加了脈衝波形一事’並不能消除塗佈斑點。 第4圖係顯示本實施形態中的脈衝波形之圖’各以（ a)對應於第2圖之噴嘴13、（b)對應於第2圖之噴嘴 14、（c)對應於第2圖之噴嘴15。如該圖所示’脈衝波 形在噴嘴間相位偏移。其係因實際塗佈中’爲了配合圖案 的傾斜度而將頭傾斜地配置之故。將此時之時機用於作爲 第1圖中的調整用。如此地以藉由複數噴嘴之各吐出具有 時間差而進行的方式，考慮到對應實際塗佈圖案之噴嘴間 的干涉，並可使墨水的吐出量和吐出速度均等化。即，藉 由各個地調整第4圖（a)〜（c)之各脈衝波形時機、脈 衝波形的電壓方向之調整、電壓施加時間、脈衝波形之上 升及/或下降的方式，可謀求吐出量之均等化或吐出速度 之均等化。此外，如上述地，該等操作係藉由控制裝置6 進行。又，不須使吐出量和吐出速度兩方均等，使任一方 均等的情形下也可獲得本發明之效果。 本實施形態中，爲了取得吐出速度而拍攝飛翔的墨水 滴時，考慮到脈衝波形之相位差，而使頻閃觀測器閃爍， 進行利用CCD攝影機之拍攝。即，噴嘴間的脈衝波形有 預定之相位差，因此拍攝從某噴嘴吐出的墨水滴之後，拍 攝從其他噴嘴吐出的墨水滴時，使輸入到頻閃觀測器的觸 發訊號，僅偏離從塗佈圖案計算出的相位差份。藉此，形 成可經常地以CCD攝影機拍攝從各噴嘴吐出的墨水滴。 201006678 此外，嚴格地說來，在同一噴嘴内亦可在各墨水滴產 生不同的吐出狀態。在這種情形下，在同一噴嘴内將輸入 到頻閃觀測器的觸發訊號僅偏離對應於塗佈圖案的相位差 份，針對複數墨水滴求出吐出量和吐出速度之平均値，使 該等平均値在各噴嘴間形成均等爲佳。藉由這種方式，可 以更高的精確度控制墨水的吐出狀態。 如上述，以和對於實際塗佈圖案相同的條件，即藉由 Φ 以和真正塗佈相同的條件吐出墨水，進行吐出量或吐出速 度之調整的方式，可進行考慮到對應於實際塗佈圖案之噴 嘴間的干涉之調整。因而，即使是噴嘴數多的頭，亦可減 少塗佈斑點而形成所期望的圖案。 此外，本發明並非受限定於上述實施形態者，可在不 脫離本發明之宗旨的範圍内進行各種變形並實施。 例如，上述實施形態中，調整從各噴嘴吐出之墨水的 吐出量後，調整吐出速度。但是，本發明並非受限於此者 φ ’調整吐出速度後調整吐出量亦可。於該情形下，各調整 可以與上述同樣的方法進行。 【圖式簡單說明】 第1圖（a)及（b)係本實施形態中的噴墨塗佈裝置 之一部分構成圖。 第2圖係顯示本實施形態中，基板和頭之對應關係之 模型圖。 第3圖（a)〜（c)係以往的調整方法中施加在壓力 -15- 201006678 產生元件的脈衝波形之一例。 第4圖（a ) ~ ( c )係本實施形態之脈衝波形之一例 【主要元件符號說明】 1、1 1 :頭 2 :吐出狀態觀測裝置 3 :頻閃觀測器 4 : CC D攝影機 5 :吐出速度取得部 6 :控制裝置 12 :基板 1 3 ' 1 4、1 5 :噴嘴 參 -16-Fig. 2 is a diagram showing a substrate and a head in a model manner, 11 is a head, and 12 is a substrate. Further, in the figure, an arrow indicates the direction in which the head 11 moves. Further, the substrate and the head may be relatively moved, and the substrate may be moved in the opposite direction to the arrow in a state where the head is fixed. Fig. 2 shows the positional relationship of the head and the pattern when the pattern is actually applied. In Fig. 2, reference numeral 101 denotes a position at which the ink discharged from the nozzle 13 should be shot. In this example, 'three drops of ink are projected to form one pattern 102', and the same pattern is sequentially formed in the direction of the arrow by the movement of the head 11. Similarly, 103 indicates that the ink ejected from the nozzle 14 is to be shot, and three drops of ink are projected to form the pattern 1〇4. Further, '105 indicates that the ink ejected from the nozzle 15 should be in the position of the bomb 匮' 3 drops of ink to form a pattern 106°. Fig. 3 is a view showing a pulse waveform applied to the pressure generating element in the conventional adjustment method, each of which (a) corresponds to the nozzle 13 of Fig. 1, (b) corresponds to the nozzle 14 of Fig. 1, and (c) corresponds to the nozzle 15 of Fig. 1. Further, in the drawings, the horizontal axis represents time and the vertical axis represents voltage. In the adjustment method of the conventional inkjet coating apparatus, as shown in FIGS. 3(a) to 3(c), a pulse waveform of -13 - 201006678 is applied to the nozzles 13, 14, and 15 at the same timing (refer to the patent document). Fig. 20 and paragraph 0052 of 2) However, in consideration of the interference between the nozzles, the application of the pulse waveform to the nozzles 13, 14, 15 at the same timing does not eliminate the coating spot. Fig. 4 is a view showing a pulse waveform in the present embodiment, wherein (a) corresponds to the nozzle 13 of Fig. 2, (b) corresponds to the nozzle 14 of Fig. 2, and (c) corresponds to the second figure. Nozzle 15. As shown in the figure, the pulse waveform is phase-shifted between the nozzles. This is because the head is inclined in order to match the inclination of the pattern in the actual application. The timing at this time is used as the adjustment in Fig. 1. In such a manner, by the time difference between the discharges of the plurality of nozzles, the interference between the nozzles corresponding to the actual application pattern is considered, and the discharge amount of the ink and the discharge speed can be made equal. In other words, the amount of discharge can be adjusted by adjusting the timing of each pulse waveform in FIGS. 4(a) to 4(c), the adjustment of the voltage direction of the pulse waveform, the voltage application time, and the rise and/or fall of the pulse waveform. Equalization or equalization of the discharge speed. Moreover, as described above, these operations are performed by the control device 6. Further, the effect of the present invention can be obtained without equalizing both the discharge amount and the discharge speed, and even if either one is equal. In the present embodiment, in order to capture the flying ink droplets in order to obtain the ejection speed, the stroboscopic device is flickered in consideration of the phase difference of the pulse waveform, and imaging by the CCD camera is performed. In other words, since the pulse waveform between the nozzles has a predetermined phase difference, when the ink droplets ejected from a certain nozzle are taken and the ink droplets ejected from the other nozzles are taken, the trigger signal input to the stroboscopic device is shifted only from the coating. The phase difference calculated by the pattern. Thereby, it is possible to frequently take ink droplets ejected from the respective nozzles by a CCD camera. 201006678 In addition, strictly speaking, different ejection states can be generated in each ink droplet in the same nozzle. In this case, the trigger signal input to the stroboscopic observer is deviated from the phase difference portion corresponding to the coating pattern in the same nozzle, and the average 値 of the discharge amount and the discharge speed is obtained for the plurality of ink droplets. The average enthalpy is preferably equalized between the nozzles. In this way, the discharge state of the ink can be controlled with higher precision. As described above, the same conditions as for the actual coating pattern, that is, the ejection of the ink under the same conditions as the actual coating, and the adjustment of the discharge amount or the discharge speed can be performed in consideration of the actual coating pattern. The adjustment of the interference between the nozzles. Therefore, even if the number of nozzles is large, the coating spot can be reduced to form a desired pattern. The present invention is not limited to the embodiments described above, and various modifications may be made without departing from the spirit and scope of the invention. For example, in the above embodiment, after the discharge amount of the ink discharged from each nozzle is adjusted, the discharge speed is adjusted. However, the present invention is not limited to this, and it is also possible to adjust the discharge amount after adjusting the discharge speed. In this case, each adjustment can be performed in the same manner as described above. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 (a) and (b) are views showing a part of the configuration of an ink jet application apparatus in the present embodiment. Fig. 2 is a model diagram showing the correspondence relationship between the substrate and the head in the present embodiment. Fig. 3 (a) to (c) are examples of pulse waveforms applied to the elements of the pressure -15-201006678 in the conventional adjustment method. Fig. 4(a) to (c) are examples of pulse waveforms of the present embodiment [Description of main component symbols] 1. 1 1 : Head 2: Discharge state observation device 3: Stroboscope 4: CC D camera 5: Discharge speed acquisition unit 6: Control device 12: Substrate 1 3 ' 1 4, 1 5 : Nozzle reference-16-