201003347 六、發明說明： 【發明所屬之技術領域】 本發明是關於，具備有•固定的複數站部、在這些站 部之間搬運貨物的行走車、以及在站部與行走車之間移載 貨物的移載手段，之搬運系統，尤其是不具有讓行走車行 走的軌道的搬運系統，關於在正確的移載位置或/及以正 確的移載姿勢來移載貨物的搬運系統。而且關於在上述搬 運系統所使用的行走車。 【先前技術】 例如，在自動倉庫等將貨物搬入或搬出這樣的搬運系 統的情況，是採用如下述的步驟。（1 )貨物載置於站部 。（2 )對於以自主行走的方式到達該站部附近的行走車 來移載上述貨物。（3)行走車以自主行走的方式將上述 貨物搬運到其他站部。（4 )行走車到達其他站部來移載 貨物。 如上述，在搬運系統中行走車自主行走的情況，爲了 讓行走車本身辨識出在倉庫全體中的行走車的位置，會在 倉庫分散狀地設置有顯示位置的指標。而當行走車行走於 指標與指標之間時，使用行走車本身所具有的編碼器來辨 識本身的位置。 於是當行走車從一個站部移動到另一個站部時，行走 車，以上述指標修正編碼器的偏差，而正確地在另一個站 部附近停止。而在另一個站部與行走車之間移載貨物。 -4- 201003347 可是，當搬運系統是以顯示裝置用的玻璃基板等爲貨 物來進行搬運時，在站部與行走車之間需要以更正確的位 置或/及更正確的姿勢來移載玻璃基板。因此，這種搬運 系統所採用的行走車，在行走基台上具備有：相對於行走 基台朝γ方向（從行走車朝向站部的方向）、χ方向（與 Υ方向交叉，在水平面內的方向）、β方向（旋轉方向） 移動的載置台。並且該行走車具備有：相較於行走車所具 備的編碼器能夠更精密地將與站部之間的位置或/及姿勢 加以測定的測定手段。如上述的搬運系統，根據測定系統 的測定結果使載置台正確地移動，能將玻璃基板以正確的 位置、正確的姿勢在站部與行走車之間進行移載（參考專 利文獻1 )。 [專利文獻1 ]日本特開2000- 1 944 1 8號公報 【發明內容】 [發明欲解決的課題] 在習知的搬運系統’爲了測定站部與行走車的姿勢關 係，需要具備有複數的感應器。而且爲了測定站部與行走 車的相對位置關係，更需要其他感應器。 本案發明，鑑於上述課題’其目的要提供一種搬運系 統，能以單數的測距手段來測定站部與行走車的姿勢關係 ’能以正確的姿勢達成移載。並且要提供一種搬運系統’ 能以上述測距手段測定站部與行走車的相對位置關係’能 在正確的位置達成移載。 -5- 201003347 [用以解決課題的手段] 爲了解決上述課題，本發明的搬運系統’是具備有： 站部、以目標姿勢在站部附近的目標位置停止的行走車、 以及用來在站部與行走車之間移載貨物的移載手段，之搬 運系統，是具備有：設置在上述站部與上述行走車的其中 一方，用來測定上述站部與上述行走車的距離的測距手段 、設置在上述站部與上述行走車的另一方，成爲上述測距 手段的測距對象的第一測距部及第二測距部、從上述測距 手段取得與上述第一測距部的第一距離，使上述行走車朝 預定方向行走預定距離，從上述測距手段取得與上述第二 測距部的第二距離的控制部、根據所取得的上述第一距離 與上述第二距離來計算出上述行走車從上述目標姿勢起算 的傾斜度也就是傾斜値的計算部、以及根據所算出的上述 傾斜値來決定上述移載手段的移載條件的移載條件決定部 〇 藉此，以單數的測距手段就能取得從到達目標位置的 行走車的目標姿勢起算的傾斜度也就是傾斜値。而能以正 確的姿勢在站部與行走車之間進行移載。 並且具備有：設置在上述站部與上述行走車的另一方 ’當使上述行走車朝上述預定方向移動時，其與上述測距 手段的距離漸漸變化的第三測距部；則上述控制部會又從 上述測距手段取得與上述第三測距部的第三距離，上述計 算部，根據所測定的上述第一距離或上述第二距離與上述 -6- 201003347 第三距離，計算出從上述目標位置起算的偏差也就是偏差 値，上述移載條件決定部，根據所計算出的上述偏差値， 來決定上述移載手段的移載條件。 藉此，以單數的測距手段，就能取得行走車相對於站 部的姿勢與位置，而能更正確地移載貨物。 上述控制部，一邊使上述行走車行走一邊來取得上述 第一距離與上述第二距離。 藉此，能夠在同時間進行行走車的移動與取得傾斜値 ，而能夠縮短貨物的搬運時間。因爲不需要反覆進行減速 及加速，所以不會因爲慣性讓行走距離產生誤差，也能夠 避免因爲後衝力等導致誤差。 上述控制部，將上述第一測距部與上述第二測距部連 結的線、與將上述行走車與上述目標位置連結的線爲平行 ，在當上述行走車與上述目標位置的距離爲臨界値的時間 點使上述行走車減速，上述第一測距部與上述第二測距部 配置在上述行走車的減速位置與目標位置之間較佳。 藉此，以較低的速度進行測距，所以能確保較高的輸 送精確度。 [發明效果] 藉由本發明，以單數的測距手段則可測定行走車相對 於站部的姿勢或/及位置，則能以正確的姿勢或/及在正確 的位置來進行站部與行走車之間的貨物移載。 201003347 【實施方式】 接著，參考圖面來說明本發明的實施方式。 第1圖是示意性地顯示實施方式也就是搬運系統的一 部分的立體圖。 如該圖所示’搬運系統100’是使用行走車140來將 作爲貨物的玻璃基板200進行搬運，使用移載手段170在 站部1 1 〇與行走車1 40之間將貨物移載的系統。具備有： 測距手段（沒有圖示） '第—測距部1 1 1、第二測距部 1 1 2、及第三測距部1 1 3。在行走車1 4 0所行走的地板面， 安裝有指標1 0 1。在本實施方式的情況，移載手段1 70是 分別具備於站部1 1 〇與行走車1 4 0。 第2圖是行走車的顯示圖’ （a)是俯視圖，（b)是 下視圖。 如該圖（a)所示，行走車14〇，在上部設置有移載手 段170的一部分也就是載置台171，是將載置於載置台 1 7 1上的玻璃基板200自主性地進行搬運的裝置。而且搭 載有電子計算機丨5〇。在行走車140的角落部安裝有測距 手段141。而如該圖（b)所示，行走車140，是在底面安 裝有兩個驅動輪142與四個輔助輪143。 測距手段1 4 1 ’是用來將與第一測距部1丨！、第二測 距部Π 2、第三測距部1 1 3的距離進行測定的裝置。本實 施方式的情況’作爲測距手段1 4 1是採用使用雷射光的反 射型的雷射測距感應器。雷射測距感應器，其指向性高， 所以藉由將雷射測距感應器固定於行走車1 40，則能將相 -8 - 201003347 對於行走車1 4 0位於預定方向的物體、與雷射測距 的距離正確地加以測定。即使在一邊使行走車1 4 0 邊進行測定的情況，越能將與雷射測距感應器的距 測定的部位看作一點，則測距所需要的時間越短。 了正確地測定行走車1 4 0的姿勢或/及位置，適合 射測距感應器作爲測距手段1 4 1。該圖中破線箭頭 測距手段1 4 1的測距方向。 作爲測距手段1 4 1，不只是雷射測距感應器， 是將臂部伸展，使其與第一測距部1 1 1等接觸，來 離的裝置。除此之外，還有利用超音波所進行的測 等’測距方式並沒有限定。在使用分離的兩個機器 該機器間的距離的情況，發送關於距離的資料方面 發明是作爲測距手段1 4 1。 驅動輪142，是爲了讓行走車140行走而與驅 沒有圖示）連接而繞著水平軸旋轉驅動的車輪，分 在行走車140的寬度方向的兩端部。驅動輪142, 轉動台144而安裝於行走車140，該轉動台144是 驅動輪142繞著垂直軸轉動。而兩個驅動輪142, 獨立而可繞著垂直軸轉動。藉由以上的方式，藉由 驅動輪1 42作成同一直線狀或平行，則可使行走車 所需要的方向直直前進。 藉由將兩個驅動輪142配置在交叉的方向，則 於所需要的曲率的路線上。 驅動輪142與轉動台144設置有編碼器，藉由 感應器 行走一 離予以 所以爲 採用雷 是表不 也可以 測定距 距方式 來測定 關於本 動源（ 別設置 圍繞著 用來使 是相互 將兩個 140朝 可行走 該編碼 -9- 201003347 器則能將行走車140的移動距離與移動方向予以輸出。 輔助輪143，是可讓行走車14〇行走且將行走車140 維持爲水平的車輪，是安裝在行走車140的下面的四個角 落附近。輔助輪143，是並沒有與驅動源連接而能追隨行 走車1 40的行走狀況旋轉的車輪。 載置台171，是構成移載手段170的其中一個元件， 是用來載置玻璃基板2 0 0的台部。載置台1 7 1，可轉動地 安裝於行走車1 40，而能以根據所取得的訊號的角度，來 相對於行走車1 4 0轉動。 第3圖是顯示電子計算機的功能構造的方塊圖。 該圖所示的電子計算機150，具備有：運算裝置、記 憶裝置、介面；是根據在記憶裝置所儲存的程式及資料， 能進行運算及機器控制等的電腦。作爲處理功能，是具備 有：控制部1 5 1、運算部1 52、移載條件決定部1 53、發訊 部 1 5 4。 控制部1 5 1，是能從外部機器取得訊號，來控制外部 機器的處理部。在本實施方式的情況，控制部1 5 1，能從 測距手段1 4 1取得關於距離的資料。而控制部1 5 1，會控 制驅動輪1 42使行走車1 4〇行走，並且可根據來自驅動輪 編碼器1 4 5的訊號來取得行走車1 4 0的行走距離。控制部 151 ’會驅動轉動台144並且將來自轉動台編碼器146的 訊號回饋來控制驅動輪1 4 2的轉動角度。藉此，則可使行 走車140朝向預定方向。 上述控制部1 5 1，可依上述記載順序來執行：從測距 -10- 201003347 手段1 4 1取得關於距離的資料（第一距離）的步驟、使行 走車1 4 0朝預定預定行走預定距離的步驟、之後再次從測 距手段141取得關於距離的資料（第二距離）的步驟。並 且’控制部〗5 1，能以上述記載順序執行：在取得第二距 離之後，使行走車1 40朝預定預定行走預定距離的步驟、 從測距手段1 4 1取得關於距離的資料（第三距離）的步驟 〇 計算部1 52，是根據以控制部1 5 1所取得的第一距離 '第二距離；以及從取得第一距離到取得第二距離期間行 走車1 40的行走距離（預先決定），來計算出從行走車 1 40的目標姿勢（後述）起算的傾斜度也就是傾斜値的處 理部。 計算部1 5 2，是也能根據第一距離、或第二距離與第 Ξ距離’來計算出從目標位置（後述）起算的偏差也就是 偏差値的處理部。 移載條件決定部1 53，是根據以計算部1 52所計算出 @結果’來決定移載手段1 70的移載條件（例如使載置台 1 7 1相對於行走車1 40轉動幾度、使移載爪1 72 (後述） 移動幾毫米、或使移載爪172突出幾毫米來進行移載）的 處理部。 發訊部1 54，是將以移載條件決定部1 5 3所決定的移 載條件發訊到移載手段1 7 0的處理部。 第4圖是顯示站部的俯視圖。 如該圖（a)所示，站部110，是在上部設置有移載手 -11 - 201003347 段170的一部分也就是移載爪172，是將載置於移載爪 172上的玻璃基板200予以載置的設備。站部1 10，在側 面安裝有目標板1 1 4，該目標板1 1 4具備有：第一測距部 1 1 1、第二測距部1 1 2與第三測距部1 1 3。在站部1 1 〇上面 ，鋪設有：與安裝著目標板1 1 4的側面平行的軌道1 1 5。 站部110，爲了將行走車140與貨物也就是玻璃基板 進行移載，是暫時用來保管（載置）玻璃基板20 0的區域 或場所，其具體的形狀等並沒有特別限定。 目標板1 1 4，是將其中一端部斜切而形成第三測距部 1 1 3的板狀的構件，是成爲測距手段1 4 1的測距對象的構 件。目標板1 1 4，具有：能將從測距手段1 4 1照射過來的 雷射光充分反射的表面。目標板1 1 4的除了第三測距部 1 1 3以外的部分’相對向的面分別平行，交叉的面垂直地 交叉。於是當將目標板1 1 4的其中一面（以下記爲「安裝 面」）沿著站部1 1 〇的側面安裝時，則與安裝面平行的面 (以下§3爲「反射面」）會與站部1 1 0的側面平行。 在目標板114的反射面設置有第一測距部in與第二 測距部1 1 2。可是，第一測距部1 1 1以及第二測距部n 2 的位置，是讓測距手段1 4 1測距的位置，由於是藉由控制 部1 5 1以軟體方式所決定，所以並不能具體限定區域。 移載爪172，是構成移載手段170的其中一個元件， 是用來載置玻璃基板2 00的裝置。移載爪ι72,是對於鋪 設在站部1〗0上面的軌道1 1 5進行安裝，在根據所取得的 訊號的位置可沿著軌道1 1 5移動。移載爪i 7 2，在載置著 -12- 201003347 玻璃基板2 0 0的狀態可相對於軌道1 1 5垂直出沒，在使移 載爪1 7 2突出的狀態可使最上面部上下移動。於是，在載 置著玻璃基板2 00的狀態使移載爪1 72突出，將玻璃基板 2 00配置在行走車Μ0側的載置台171的上方，藉由使移 載爪1 72的最上面部下降，則可將玻璃基板200從站部 1 1 〇側移載到行走車1 40側。如果進行與上述相反的步驟 的話，則也可將玻璃基板200從行走車1 4〇側移載到站部 1 1 0 側。 第5圖是搬運系統的行走車的位置與姿勢的測定步驟 的顯示圖，（a )〜（e )是以時間的經過順序顯示。 在以該圖所不的破線所描繪的矩形，是顯示行走車 1 4 0應到達的目標位置、及目標姿勢。 如該圖（a )所示，將第一測距部U 1與上述第二測 距部1 1 2連結的線、與將行走車1 40與目標位置連結的線 爲平行，在當行走車14〇與目標位置的距離成爲臨界値的 時間點，控制部1 5 1 ’使行走車1 4 0減速到預定的速度（ 微速行走速度），使行走車14〇朝向目標位置筆直地行走 。可是’藉由驅動輪編碼器145或轉動台編碼器146的精 確度等’行走車140，越要滿足所需要的移載精度，越不 容易朝正確方向行走正確距離。 接著，如該圖（b )所示，一旦控制部1 5 1判斷行走 車1 4 0已到達預定位置，則控制部1 5 1，從測距手段1 4 1 取得第一距離。 接著，如該圖（c)所示，控制部151，使行走車140 -13- 201003347 朝至今相同方向行走預先給予的距離。然後，控制部1 5 1 ，從測距手段1 4 1取得第二距離。行走車1 40行走的距離 ，也可從驅動輪編碼器1 45取得，也可根據來自驅動輪編 碼器1 45的資料統計算出行走車1 40的速度，藉由從取得 第一距離到取得第二距離爲止的時間來界定。 藉由上述，根據第一距離與第二距離、與期間行走車 140的行走距離，藉由計算部152來算出，行走車140相 對於目標板114的反射面的姿勢、也就是從目標姿勢起算 的傾斜度也就是傾斜値。 並沒有限定具體的計算方法。例如，如果假設行走車 1 40的行進方向與測距手段1 4 1的測距方向爲垂直的話， 則將行走車1 40的行走距離當作分母，將第一距離與第二 距離的差分當作分子，則能算出傾斜値。 接著，如該圖（d )所示，控制部1 5 1，使行走車140 朝至今相同方向行走預先給予的距離。然後控制部1 5 1從 測距手段1 4 1取得第三距離。 從控制部1 5 1所取得的第三距離，是第三測距部1 1 3 與測距手段1 4 1的距離，成爲相對於反射面傾斜的面與測 距手段141的距離。於是根據第二距離（或第一距離）與 第三距離的差分、與傾斜面相對於反射面的角度，藉由計 算部1 5 2來計算出，與行走車1 4 0相對於目標板1 1 4的反 射面平行的方向（該圖（e )中X方向）的位置關係，也 就是與目標位置的偏差値。 接著，取得藉由計算部1 5 2所算出的傾斜値及偏差値 -14 - 201003347 ’移載條件決定部1 5 3決定移載條件。該移載條件，是使 移載爪172沿著軌道115移動的距離、使移載爪172突出 (該圖中y方向）的距離、以及使載置台171相對於行走 車140轉動的轉動角度。 然後發訊部1 5 4會將移載條件發送到移載爪丨7 2與載 置台1 71。 取得移載條件的移載爪172與載置台171，如該圖（e )所示’以合乎移載條件的方式沿著軌道1 1 5滑動，相對 於行走車140轉動。 然後根據移載條件進行玻璃基板2 0 0的移載。 藉由以上的構造及步驟，則可使用單數的測距手段 1 4 1來計算出行走車1 40相對於目標姿勢的傾斜値、及相 對於目標位置的偏差値。藉此，則可使搬運系統1 00的成 本降低，尤其是使行走車1 4 0的成本降低。 在上述實施方式，雖然是在使行走車140行走的狀態 來取得第一距離與第二距離，而本發明，也包含使行走車 1 40停止來取得第一距離或/及第二距離的情況。 第一測距部1 1 1與第二測距部1 1 2雖然存在於同一面 內，而並不限定於此。只要可事先掌握第一測距部1 1 1與 第二測距部1 1 2的位置關係，則可使用該位置關係來計算 出行走車140的姿勢。 如第6圖所示，移載手段170，也可設置在站部110 或行走車140的其中一方。在該圖所示的移載手段170， 也可藉由吸引方式來懸吊保持玻璃基板200，能使玻璃基 -15- 201003347 板200在水平面內移動，也可使玻璃基板200轉動。 [產業上的可利用性] 本發明可利用於自動倉庫或半導體製造工廠、顯示器 製造工廠等。 【圖式簡單說明】 第1圖是示意性地顯示實施方式也就是搬運系統的一 部分的立體圖。 第2圖是行走車的顯示圖’ （a)是俯視圖’ （b)是 下視圖。 第3圖是顯示電子計算機的功能構造的方塊圖。 第4圖是顯示站部的俯視圖。 第5圖是搬運系統的行走車的位置與姿勢的測定步驟 的顯示圖，（a )〜（e )是以時間的經過順序顯示。 第6圖是搬運系統的其他實施方式的顯示圖。 【主要元件符號說明】 1 〇 〇 :搬運系統 1 〇 1 :指標 1 1 0 :站部 m :第一測距部 1 1 2 :第二測距部 1 1 3 :第三測距部 -16- 201003347 1 1 4 :目標板 1 1 5 :軌道 1 4 0 :行走車 1 4 1 :測距手段 1 4 2 :驅動輪 143 :輔助輪 1 4 4 :轉動台 1 4 5 :驅動輪編碼器 1 4 6 ·轉動台編碼器 1 5 0 :電子計算機 1 5 1 :控制部 152 :計算部 1 5 3 :移載條件決定部 1 5 4 :發訊部 1 7 0 :移載手段 171 :載置台 172 :移載爪 2 0 〇 :玻璃基板 -17 -201003347 VI. Description of the Invention: [Technical Field] The present invention relates to a fixed station having a fixed number, a traveling vehicle that carries goods between the stations, and a transfer between the station and the traveling vehicle The transport system of the cargo, the transport system, in particular, the transport system that does not have a rail for walking the vehicle, and the transport system that transfers the cargo at the correct transfer position or/and in the correct transfer posture. Furthermore, it is related to the traveling vehicle used in the above transport system. [Prior Art] For example, in the case of transporting a cargo such as an automated warehouse or the like, the following steps are employed. (1) The goods are placed at the station. (2) The goods are transferred to the traveling vehicle near the station portion by autonomous walking. (3) The traveling vehicle transports the above goods to other stations in autonomous manner. (4) The walking vehicle arrives at other stations to transfer the goods. As described above, in the case where the traveling vehicle autonomously travels in the transport system, in order to allow the traveling vehicle itself to recognize the position of the traveling vehicle in the entire warehouse, an indicator of the display position is dispersed in the warehouse. When the walking vehicle walks between the indicator and the indicator, the encoder of the traveling vehicle itself is used to identify its position. Then, when the traveling vehicle moves from one station to another, the traveling vehicle corrects the deviation of the encoder with the above-mentioned index, and stops correctly near the other station. And the goods are transferred between another station and the walking car. -4- 201003347 However, when the transport system is transported as a glass substrate for a display device, it is necessary to transfer the glass at a more accurate position and/or a more correct posture between the station and the traveling vehicle. Substrate. Therefore, the traveling vehicle used in such a transportation system is provided on the traveling base in the γ direction (direction from the traveling vehicle toward the station) and the χ direction (crossing with the Υ direction in the horizontal plane) The direction in which the direction is shifted in the β direction (rotation direction). Further, the traveling vehicle is provided with a measuring means capable of measuring the position and/or posture between the station portion more accurately than the encoder provided in the traveling vehicle. In the above-described conveyance system, the mounting table is accurately moved according to the measurement result of the measurement system, and the glass substrate can be transferred between the station and the traveling vehicle at the correct position and in the correct posture (refer to Patent Document 1). [Patent Document 1] Japanese Laid-Open Patent Publication No. 2000- 1 944 No. 1-8. [Problem to be Solved by the Invention] In the conventional transportation system, in order to measure the posture relationship between the station portion and the traveling vehicle, it is necessary to have a plurality of sensor. Moreover, in order to determine the relative positional relationship between the station and the traveling vehicle, other sensors are required. According to the present invention, in view of the above object, it is an object of the invention to provide a transport system capable of measuring the posture relationship between a station portion and a traveling vehicle by a single number ranging means, and the transfer can be achieved in a correct posture. Further, it is desirable to provide a transport system that can measure the relative positional relationship between the station and the traveling vehicle by the above-described distance measuring means to achieve the transfer at the correct position. -5-201003347 [Means for Solving the Problems] In order to solve the above problems, the transport system of the present invention includes a station unit, a traveling vehicle that stops at a target position near the station portion in a target posture, and a station for use at the station. The transport system for transferring goods between the mobile unit and the traveling vehicle includes: one of the station unit and the traveling vehicle, and a distance measuring unit for measuring the distance between the station unit and the traveling vehicle. And a first distance measuring unit and a second distance measuring unit that are to be measured by the distance measuring means, and the first distance measuring unit is obtained from the distance measuring means and the first distance measuring unit a first distance, wherein the traveling vehicle travels a predetermined distance in a predetermined direction, and a control unit that obtains a second distance from the second distance measuring unit from the distance measuring means, according to the obtained first distance and the second distance Calculating the inclination of the traveling vehicle from the target posture, that is, the calculation unit of the inclination 、, and determining the transfer line of the transfer means based on the calculated tilt 値A transfer condition determination unit whereby the square, a ranging means to be able to get a single number from the starting of the vehicle reaches the target traveling position of the target is inclined posture inclination Zhi. It can be transferred between the station and the traveling vehicle in the correct posture. Further, the present invention includes: a third distance measuring unit provided on the other of the station unit and the other traveling vehicle, when the traveling vehicle moves in the predetermined direction, and the distance from the distance measuring means is gradually changed; And obtaining a third distance from the third distance measuring unit from the distance measuring means, wherein the calculating unit calculates the slave distance based on the measured first distance or the second distance and the third distance of the -6-201003347 The deviation from the target position is the deviation 値, and the transfer condition determination unit determines the transfer condition of the transfer means based on the calculated deviation 値. Thereby, the posture and position of the traveling vehicle with respect to the station can be obtained by the singular distance measuring means, and the cargo can be more accurately transferred. The control unit acquires the first distance and the second distance while walking the traveling vehicle. Thereby, it is possible to carry out the movement of the traveling vehicle and the inclination of the traveling vehicle at the same time, and it is possible to shorten the transportation time of the cargo. Since there is no need to repeatedly decelerate and accelerate, there is no error in the walking distance due to inertia, and errors due to backlash and the like can be avoided. The control unit is configured such that a line connecting the first distance measuring unit and the second distance measuring unit is parallel to a line connecting the traveling vehicle and the target position, and a distance between the traveling vehicle and the target position is critical The traveling time of the traveling vehicle is decelerated, and the first distance measuring unit and the second distance measuring unit are preferably disposed between the deceleration position of the traveling vehicle and the target position. Thereby, the distance measurement is performed at a lower speed, so that high transmission accuracy can be ensured. [Effect of the Invention] According to the present invention, the posture and/or the position of the traveling vehicle with respect to the station portion can be measured by the singular distance measuring means, and the station portion and the traveling vehicle can be performed in the correct posture or/and at the correct position. Transfer of goods between. [Embodiment] Next, an embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view schematically showing a part of an embodiment, that is, a handling system. As shown in the figure, the "transport system 100" is a system that transports the glass substrate 200 as a cargo using the traveling vehicle 140, and transfers the cargo between the station portion 1 1 and the traveling vehicle 1 40 using the transfer means 170. . There are: a distance measuring means (not shown) 'the first measuring unit 1 1 1 , the second distance measuring unit 1 1 2, and the third distance measuring unit 1 1 3 . On the floor surface where the traveling vehicle 140 is walking, the index 1 0 1 is installed. In the case of the present embodiment, the transfer means 1 70 is provided in the station unit 1 1 〇 and the traveling vehicle 1 40, respectively. Fig. 2 is a view showing a traveling vehicle' (a) is a plan view and (b) is a bottom view. As shown in the figure (a), the traveling vehicle 14 is provided with a part of the transfer means 170, that is, the mounting table 171, and the glass substrate 200 placed on the mounting table 171 is transported autonomously. s installation. And it is equipped with a computer 丨5〇. A distance measuring means 141 is attached to a corner portion of the traveling vehicle 140. As shown in the figure (b), the traveling vehicle 140 is provided with two driving wheels 142 and four auxiliary wheels 143 on the bottom surface. The distance measuring means 1 4 1 ' is used to be 1 with the first distance measuring unit! And a device for measuring the distance between the second distance measuring unit 2 and the third distance measuring unit 1 1 3 . In the case of the present embodiment, as the distance measuring means 141, a reflection type laser ranging sensor using laser light is used. The laser ranging sensor has high directivity, so by fixing the laser ranging sensor to the traveling vehicle 1 40, the phase -8 - 201003347 can be used for the object in the predetermined direction of the traveling vehicle 140. The distance of the laser ranging is correctly measured. Even when the traveling vehicle 1400 is measured, the portion of the distance measurement with the laser ranging sensor can be regarded as a point, and the time required for the distance measurement is shorter. The posture and/or position of the traveling vehicle 140 is accurately measured, and it is suitable for the distance measuring sensor as the distance measuring means 1 41. In this figure, the broken line arrow is the distance measuring direction of the distance measuring means 1 4 1 . As the distance measuring means 141, not only the laser ranging sensor but also a device for extending the arm portion to be in contact with the first distance measuring portion 1 1 1 or the like. In addition to this, there is no limitation on the measurement by the ultrasonic wave. In the case of using separate machines, the distance between the machines, the data on the distance is transmitted. The invention is used as a distance measuring means 1 1 1. The drive wheels 142 are wheels that are rotatably driven around the horizontal axis in order to allow the traveling vehicle 140 to travel, and are connected to the horizontal axis, and are divided into both end portions in the width direction of the traveling vehicle 140. The drive wheel 142, the turntable 144, is mounted to the traveling vehicle 140, which is the drive wheel 142 that rotates about a vertical axis. The two drive wheels 142 are independently rotatable about a vertical axis. According to the above manner, the driving wheels 1 42 are formed in the same straight line or in parallel, so that the direction required by the traveling vehicle can be made straight forward. By arranging the two drive wheels 142 in the direction of intersection, on the route of the desired curvature. The driving wheel 142 and the rotating table 144 are provided with an encoder, and the sensor is used to walk away. Therefore, it is possible to measure the distance by using the lightning meter to determine the distance source (the setting is around to make each other The two 140 can walk the code -9-201003347 to output the moving distance and moving direction of the traveling vehicle 140. The auxiliary wheel 143 is a wheel that allows the traveling vehicle 14 to walk and maintain the traveling vehicle 140 horizontally. The auxiliary wheel 143 is mounted on the lower side of the lower side of the traveling vehicle 140. The auxiliary wheel 143 is a wheel that is connected to the driving source and can follow the traveling state of the traveling vehicle 140. The mounting table 171 constitutes the transfer means 170. One of the components is a table for mounting the glass substrate 2000. The mounting table 171 is rotatably attached to the traveling vehicle 140, and can be moved relative to the walking signal according to the angle of the obtained signal. Fig. 3 is a block diagram showing the functional structure of the electronic computer. The electronic computer 150 shown in the figure includes: an arithmetic unit, a memory device, and an interface; The program and the data stored in the device are computers that can perform calculations, machine control, etc. The processing function includes a control unit 151, a calculation unit 152, a transfer condition determination unit 153, and a communication unit 15 4. The control unit 151 is a processing unit that can acquire an external device to control an external device. In the case of the present embodiment, the control unit 151 can acquire data on the distance from the distance measuring means 1 1 1 . The control unit 151 controls the driving wheel 1 42 to drive the traveling vehicle 1 4 , and can obtain the walking distance of the traveling vehicle 1 400 according to the signal from the driving wheel encoder 1 4 5 . The control unit 151 ' The rotary table 144 is driven and the signal from the rotary table encoder 146 is fed back to control the rotation angle of the drive wheel 14 4 . Thereby, the traveling vehicle 140 can be oriented in a predetermined direction. The control unit 15 1 can be operated as described above. The order of execution is performed: a step of obtaining a data on the distance (first distance) from the distance measurement-10-201003347 means 1 4 1 , a step of causing the traveling vehicle 1 400 to travel a predetermined distance toward a predetermined distance, and then again from the distance measuring means 141 get about The step of the distance data (second distance) and the 'control unit' 5 1 can be executed in the order described above: after the second distance is obtained, the step of walking the traveling vehicle 1 40 to a predetermined predetermined distance, from the distance measurement The step 141 of calculating the distance data (the third distance) by the means 1 4 1 is based on the first distance 'the second distance acquired by the control unit 151 and the second distance from the first distance to the acquisition The traveling distance of the traveling vehicle 1 40 during the two-way period (determined in advance) is used to calculate a processing unit that is inclined from the target posture (described later) of the traveling vehicle 1 40. The calculation unit 152 is a processing unit that can calculate the deviation from the target position (described later), that is, the deviation 根据, based on the first distance or the second distance and the second distance ′. The transfer condition determining unit 1 539 determines the transfer condition of the transfer device 1 70 based on the @ result ' calculated by the calculation unit 152 (for example, the stage 17 1 is rotated by a few degrees with respect to the traveling vehicle 140, A processing unit that transfers the claws 1 72 (described later) by a few millimeters or by projecting the transfer claws 172 by a few millimeters to perform the transfer. The transmitting unit 1 54, is a processing unit that transmits the transfer condition determined by the transfer condition determining unit 153 to the transfer means 170. Fig. 4 is a plan view showing the station portion. As shown in the figure (a), the station portion 110 is provided with a part of the transfer hand -11 - 201003347 segment 170 at the upper portion, that is, the transfer claw 172, which is the glass substrate 200 placed on the transfer claw 172. Equipment to be placed. The station unit 1 10 is mounted on the side with a target board 1 1 4, and the target board 1 1 4 is provided with a first distance measuring unit 1 1 1 , a second distance measuring unit 1 1 2 and a third distance measuring unit 1 1 3 . On the station portion 1 1 〇, a track 1 15 which is parallel to the side on which the target plate 1 14 is mounted is laid. The station unit 110 is a region or a place for temporarily storing (mounting) the glass substrate 20 in order to transfer the traveling vehicle 140 and the cargo, that is, the glass substrate. The specific shape and the like are not particularly limited. The target plate 141 is a plate-shaped member in which one end portion is chamfered to form the third distance measuring portion 1 1 3, and is a member to be a distance measuring target of the distance measuring means 14 1 . The target plate 1 14 has a surface that can sufficiently reflect the laser light irradiated from the distance measuring means 14 1 . The faces of the target plates 1 14 other than the third distance measuring portion 1 1 3 are parallel to each other, and the intersecting faces vertically intersect. Then, when one of the target plates 1 14 (hereinafter referred to as "mounting surface") is mounted along the side surface of the station portion 1 1 , the surface parallel to the mounting surface (hereinafter § 3 is a "reflecting surface") will It is parallel to the side of the station portion 110. The first distance measuring portion in and the second distance measuring portion 1 1 2 are provided on the reflecting surface of the target plate 114. However, the positions of the first distance measuring unit 1 1 1 and the second distance measuring unit n 2 are positions at which the distance measuring means 14 1 is distanced, and since the control unit 1 51 is determined by the software, it is determined by the software. It is not possible to specifically define the area. The transfer claw 172 is one of the elements constituting the transfer means 170 and is a means for placing the glass substrate 200. The transfer claw ι72 is attached to the rail 1 15 which is laid on the upper portion of the station portion "0", and is movable along the rail 1 15 at the position based on the acquired signal. The transfer claw i 7 2 can be vertically protruded with respect to the track 1 1 5 in a state in which the -12-201003347 glass substrate is placed, and the uppermost face can be moved up and down in a state where the transfer claws 172 are protruded. . Then, the transfer claws 1 72 are protruded in a state in which the glass substrate 200 is placed, and the glass substrate 200 is placed above the mounting table 171 on the side of the traveling vehicle Μ 0, and the uppermost face of the transfer claws 1 72 is placed. When descending, the glass substrate 200 can be transferred from the side of the station portion 1 1 to the side of the traveling vehicle 1 40. If the reverse of the above steps is performed, the glass substrate 200 can be transferred from the side of the traveling vehicle 1 to the side of the station portion 110. Fig. 5 is a view showing a procedure for measuring the position and posture of the traveling vehicle of the transport system, and (a) to (e) are displayed in order of time. The rectangle drawn by the broken line in the figure is a target position at which the traveling vehicle 1404 arrives, and a target posture. As shown in the figure (a), the line connecting the first distance measuring unit U 1 and the second distance measuring unit 1 1 2 is parallel to the line connecting the traveling vehicle 1 40 to the target position. When the distance from the target position becomes a critical point, the control unit 1 5 1 ' decelerates the traveling vehicle 1 40 to a predetermined speed (slight running speed), and causes the traveling vehicle 14 笔 to travel straight toward the target position. However, the traveling vehicle 140 by the accuracy of the drive wheel encoder 145 or the rotary table encoder 146, etc., must satisfy the required transfer accuracy, and it is less likely to travel the correct distance in the correct direction. Next, as shown in the figure (b), when the control unit 151 determines that the traveling vehicle 1 400 has reached the predetermined position, the control unit 153 obtains the first distance from the distance measuring means 1 4 1 . Next, as shown in (c) of the figure, the control unit 151 causes the traveling vehicle 140 - 13 - 201003347 to travel in the same direction so far as to travel a predetermined distance. Then, the control unit 1 5 1 acquires the second distance from the distance measuring means 1 4 1 . The distance traveled by the traveling vehicle 1 40 may also be obtained from the drive wheel encoder 145, or the speed of the traveling vehicle 1 40 may be calculated based on the data from the drive wheel encoder 145, by obtaining the first distance to obtain the first The time between the two distances is defined. As described above, based on the first distance and the second distance and the travel distance of the traveling vehicle 140, the calculation unit 152 calculates that the posture of the traveling vehicle 140 with respect to the reflecting surface of the target plate 114, that is, from the target posture. The inclination is also the tilt 値. There is no specific calculation method. For example, if it is assumed that the traveling direction of the traveling vehicle 1 40 is perpendicular to the ranging direction of the ranging means 1 4 1 , the walking distance of the traveling vehicle 1 40 is regarded as a denominator, and the difference between the first distance and the second distance is As a molecule, you can calculate the tilt 値. Next, as shown in the diagram (d), the control unit 155 allows the traveling vehicle 140 to travel in the same direction as before to travel in the same distance. Then, the control unit 151 obtains the third distance from the distance measuring means 1 4 1 . The third distance obtained from the control unit 151 is the distance between the third distance measuring unit 1 1 3 and the distance measuring means 14 1 , and becomes the distance between the surface inclined with respect to the reflecting surface and the distance measuring means 141. Then, based on the difference between the second distance (or the first distance) and the third distance, and the angle of the inclined surface with respect to the reflecting surface, the calculation unit 1 52 calculates that the traveling vehicle 1 40 is opposite to the target board 1 1 The positional relationship of the direction in which the reflecting faces of 4 are parallel (the X direction in the figure (e)), that is, the deviation from the target position 値. Next, the inclination 値 and the deviation 値 -14 - 201003347 ' calculated by the calculation unit 152 are obtained. The transfer condition determination unit 153 determines the transfer condition. The transfer condition is a distance at which the transfer claw 172 moves along the rail 115, a distance at which the transfer claw 172 protrudes (in the y direction in the drawing), and a rotation angle at which the mounting table 171 is rotated with respect to the traveling vehicle 140. The transmitting unit 154 then transmits the transfer condition to the transfer pawl 7 2 and the mounting table 71. The transfer claw 172 and the mounting table 171 which have obtained the transfer condition are slid along the rail 1 15 as shown in Fig. (e), and are rotated with respect to the traveling vehicle 140 so as to conform to the transfer condition. The transfer of the glass substrate 2000 is then carried out according to the transfer conditions. With the above construction and steps, the singular distance measuring means 1 4 1 can be used to calculate the inclination 行走 of the traveling vehicle 1 40 with respect to the target posture and the deviation 値 with respect to the target position. Thereby, the cost of the transport system 100 can be reduced, and in particular, the cost of the traveling vehicle 140 can be reduced. In the above embodiment, the first distance and the second distance are obtained while the traveling vehicle 140 is traveling. The present invention also includes the case where the traveling vehicle 1 40 is stopped to obtain the first distance or/and the second distance. . The first distance measuring unit 1 1 1 and the second distance measuring unit 1 1 2 are present in the same plane, and are not limited thereto. As long as the positional relationship between the first distance measuring unit 1 1 1 and the second distance measuring unit 1 1 2 can be grasped in advance, the positional relationship can be used to calculate the posture of the traveling vehicle 140. As shown in Fig. 6, the transfer means 170 may be provided in one of the station portion 110 or the traveling vehicle 140. In the transfer means 170 shown in the figure, the glass substrate 200 can be suspended by the suction method, and the glass substrate -15-201003347 plate 200 can be moved in the horizontal plane, and the glass substrate 200 can be rotated. [Industrial Applicability] The present invention can be utilized in an automatic warehouse, a semiconductor manufacturing factory, a display manufacturing factory, or the like. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view schematically showing a part of an embodiment, that is, a transport system. Fig. 2 is a view showing the traveling vehicle's (a) is a plan view' (b) is a bottom view. Fig. 3 is a block diagram showing the functional configuration of an electronic computer. Fig. 4 is a plan view showing the station portion. Fig. 5 is a view showing a procedure for measuring the position and posture of the traveling vehicle of the transport system, and (a) to (e) are displayed in order of time. Figure 6 is a display diagram of another embodiment of the transport system. [Description of main component symbols] 1 〇〇: Handling system 1 〇1: Index 1 1 0 : Station part m: First distance measuring unit 1 1 2 : Second distance measuring unit 1 1 3 : Third distance measuring unit -16 - 201003347 1 1 4 : Target board 1 1 5 : Track 1 4 0 : Walking vehicle 1 4 1 : Distance measuring means 1 4 2 : Drive wheel 143 : Auxiliary wheel 1 4 4 : Turntable 1 4 5 : Drive wheel encoder 1 4 6 · Rotary stage encoder 1 5 0 : electronic computer 1 5 1 : control unit 152 : calculation unit 1 5 3 : transfer condition determination unit 1 5 4 : transmission unit 1 7 0 : transfer means 171 : Setting 172: Transfer claw 2 0 〇: Glass substrate -17 -