201001456 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種磁性元件。 【先前技術】 隨著半導體製程技術的進步，許多的主動元件以及類比元件 係可應用於積體電路（intergrated circuit，1C )中，其中被動元件係 包含一電阻、一儲能元件或—磁性元件等。 請參照圖1A所示，習知的磁性元件丨例如為一電感，其係包 各線圈11，其中，線圈11係可為一螺旋狀線圈（Spiral c〇il)。 於此，使用者當可依據磁性元件丨的設計需求，而調整線圈η的 圈數。於習知技術中，線圈u之材f係可為金屬材質。 請參照圖1B所示， 由圖1B中，可得知線启 圖1B係為圖ία中A-A線的部分剖面圖。201001456 IX. Description of the Invention: TECHNICAL FIELD OF THE INVENTION The present invention relates to a magnetic element. [Prior Art] With the advancement of semiconductor process technology, many active components and analog components can be applied to an integrated circuit (1C), wherein the passive component includes a resistor, an energy storage component, or a magnetic component. Wait. Referring to FIG. 1A, the conventional magnetic component 丨 is, for example, an inductor that is wrapped around each of the coils 11, wherein the coil 11 can be a spiral coil. Here, the user can adjust the number of turns of the coil η according to the design requirements of the magnetic element 丨. In the prior art, the material f of the coil u can be made of a metal material. Referring to Fig. 1B, it can be seen from Fig. 1B that the line diagram 1B is a partial cross-sectional view taken along line A-A of Fig.
路中的空間限制，所增加的金屬 '先電感器的效能，且由於磁性元 201001456 件1之基板通常係為石夕基板，而其具導電性，因而產生額外的能 量損失’進而影響雜元件1的效能。因此，如何提供-種能夠 提高品質因數之磁性元件，實屬當前重要課題之一。 【發明内容】 一種能夠提高品質因 有鑑於上述課題，本發明之目的為提供 數之磁性元件。 為達上述目的，依據本發明之磁性树，其係包含一基板、 -第-金屬線圈層以及-第二金屬線圈層。其中，第—金屬線圈 層設置於基板之-表面上。第二金屬線圈層與第—金屬線圈層相 對設置，並位於該第-金屬線圈層之上。第二金屬線圈層之一外 側繞線之至少一轉折處具有一切角部。 承上所述，因依據本發明之磁性元件係藉由在第二金屬線圈 層之轉折處形成切角部’以減少金屬線圈層與其他導電部分及石夕 基板的柄合效應，而能夠提高磁性元件之品質因數。 【實施方式】 以下將參照相關圖式，說明依據本發明較佳實施例之磁性元 件。 請參照圖2A及圖2B所示，其中，圖2A係為本發明較佳實 施例之磁性元件2的上視圖，圖2B係為圖2A中B_B線的剖面圖。 於本實施例中，磁性元件2係可為一差動式電感器（differemial inductor)或一對稱型電感器（symmetricaiinductor)，其係可應用 201001456 於平衡至非平衡轉換器（balance to unbalance converter, Baiun ) 或一變壓器（transformer )。 磁性元件2係包含一第一金屬線圈層21、一第二金屬線圈層 22以及一基板23。其中，基板23例如係為一石夕基板，且在本實 施例中，第一金屬線圈層21係設置於基板23之一表面231上， 並位於弟一金屬線圈層22以及基板23之間。 第一金屬線圈層22具有一外侧繞線、一中間繞線以及一内側 繞線。其中，外側繞線係指第二金屬線圈層22最外側的線圈，内 侧繞線係指第二金屬線圈層22最内側的線圈，中間繞線係指第二 金屬線圈層22位於外侧繞線與内側繞線之間的線圈。於本實施例 中，外側繞線以及内側繞線之至少一轉折處具有一切角部24，而 中間繞線則不具切角部。 當一電流流入第二金屬線圈層22時，電流在第二金屬線圈層 22外側繞線的轉角處係集中於其轉折處内側。此時，流經第二金 屬線圈層22之外側繞線之轉折處外侧的電流相對較少。又，第二 金屬線圈層22之轉折處外側係至少與基板23形成一寄生電容。 因此，為提高雜元件2的品質_⑽及減少寄生電容，本發明 係在苐一金屬線圈層22之轉折處形成一切角部24。 而在第二金屬線圈層22之中間繞線部分，則因相鄰繞線圈間 之電流相吸斥現象’使得電流不會集中於轉折處⑽，因此在中 間繞線不具有切角部，以避免導體戴面積減少，造成損耗而降低 201001456 磁性元件2之品質因素。 在第一金屬線圈層22之内彻短合A 線，電流集中於轉折處内側。此時其係類似於外側繞 屬繞線間之寄生電容，係可使用切角部24=外側與其相鄰金 邻八，第二金屬、軸層22如包含複數轉折處，而 ^-金屬線圈層21的材f係包含—低電阻係 2線圈層22係可為—重佈線層，其材質係包含—低電阻係t …切角部24係可呈—幾何形狀，其中，幾何形狀係可包含一多 g正方形、一二角形及其組合所構成的形狀，且幾何形狀 之至少-邊係可為-孤形形及其組合所構成的形狀。於 本實施例中，灿部24細包含由2個四邊形卿成的L形 說明。 如圖2A戶斤示—，L形具有一第一延伸方向山及與第—延伸方向 山約呈垂直之-第二延伸方向d2。於本實施例中，第二金屬線圈 層22具有一線覓L】’ L形於第一延伸方向屮具有一第—♦产l 以及一第一寬度，L形於第二延伸方向4具有—第二長产匕2 以及-第二寬度L5。於實施上，第—長度L2及第二長度^係可 大於、等於或小於第二金屬線圈層22之線寬Li，而第—寬度^ 以及第二寬度L5係可小於或等於第二金屬線圈層22之線寬l。 201001456 而切角部24之實施態樣還可例如為圖3A中之切角部24a的態樣 或為圖3B中之之切角部24b的態樣。其中圖3B所示之切角部24b 為一正方形，且其邊長等於第二金屬線圈層22之線寬Li。當然其 亦可包含如上所述之幾何形狀的組合，於此並不加以限制。 如圖2A及圖2B所示，第一金屬線圈層21係與第二金屬線 圈層22相對設置’並藉由在一介電層25之一通孔251中填入導 電材料而使第一金屬線圈層21與第二金屬線圈層22產生電性連 接。 再者，請再參照圖2A所示，於本實施例中，磁性元件2係以 對稱型電感器為例，因此其亦具有二端子％卜262，其係可分別 由第一金屬線圈層21或由第二金屬線圈層22延伸，以將電流輸 入磁性元件2並形成通路。 另外’熟知此-技藝者，當可將上述至少兩個磁性元件2以 相互繞設财狀置，㈣成—雜触，其射騎衡 衡變壓器或一般變壓器。 綜上所述，目依據本發明之雜元件其賴縣第二 線圈層之轉折處形成切角部減 生電容 作特性 屬線圈層與其他導電部分 或石夕基板触合效應，觀降低雜合效應所產生之寄 I以提南磁性元件之品質因數，使磁性元件具有較佳的操 以上所述僅為舉例性， 而非為_性者。任何未脫離本發明 9 201001456 之精神與料，而對其進行之等效修改更，均應包 之申請專利範圍中。 、交附 【圖式簡單說明】 圖1A至圖1B為顯示習知磁性元件之一示意圖； 圖2A至圖2B為顯示依據本發明較佳實施例之一種磁性元件 之示意圖；以及 圖3A至圖3B為顯示依據本發明較佳實施例之一種磁性元件 之實施態樣圖。 【主要元件符號說明】 1、2 :磁性元件 11 :線圈 21 :第一金屬線圈層 22 :第二金屬線圈層 23 :基板 231 :表面 24、24a、24b :切角部 25 ·介電層 251 :通孔 261、262 :端子 di :第一延伸方向 201001456 :第二延伸方向 :線寬 、L4 :長度 L0、L3、L5 :寬度The space limitation in the road, the added efficiency of the metal's first inductor, and because the substrate of the magnetic element 201001456 is usually a stone substrate, which is electrically conductive, thus generating additional energy loss' and thus affecting the components. 1 performance. Therefore, how to provide a magnetic component capable of improving the quality factor is one of the current important topics. SUMMARY OF THE INVENTION In view of the above problems, it is an object of the present invention to provide a magnetic element. To achieve the above object, a magnetic tree according to the present invention comprises a substrate, a -metal coil layer and a second metal coil layer. The first metal coil layer is disposed on the surface of the substrate. The second metal coil layer is disposed opposite to the first metal coil layer and is located above the first metal coil layer. At least one turn of the outer winding of one of the second metal coil layers has all corners. As described above, the magnetic element according to the present invention can be improved by forming a chamfered portion at the turn of the second metal coil layer to reduce the tangential effect of the metal coil layer and other conductive portions and the Asahi substrate. The quality factor of the magnetic component. [Embodiment] Hereinafter, a magnetic element according to a preferred embodiment of the present invention will be described with reference to the related drawings. 2A and 2B, wherein Fig. 2A is a top view of a magnetic element 2 of a preferred embodiment of the present invention, and Fig. 2B is a cross-sectional view taken along line B-B of Fig. 2A. In this embodiment, the magnetic component 2 can be a differential inductor or a symmetric ainductor, which can be applied to a balance to unbalance converter (201001456). Baiun ) or a transformer (transformer). The magnetic element 2 includes a first metal coil layer 21, a second metal coil layer 22, and a substrate 23. The substrate 23 is, for example, a stone substrate, and in the embodiment, the first metal coil layer 21 is disposed on one surface 231 of the substrate 23 and located between the metal coil layer 22 and the substrate 23. The first metal coil layer 22 has an outer winding, an intermediate winding, and an inner winding. Wherein, the outer winding refers to the outermost coil of the second metal coil layer 22, the inner winding refers to the innermost coil of the second metal coil layer 22, and the intermediate winding refers to the outer winding of the second metal coil layer 22 The coil between the inner windings. In this embodiment, at least one of the outer winding and the inner winding has all corners 24, and the intermediate winding has no chamfers. When a current flows into the second metal coil layer 22, the current is concentrated on the inner side of the corner of the winding at the outer side of the second metal coil layer 22. At this time, the current flowing outside the corner of the winding of the outer side of the second metal coil layer 22 is relatively small. Further, the outer side of the turning portion of the second metal coil layer 22 forms at least a parasitic capacitance with the substrate 23. Therefore, in order to improve the quality _(10) of the impurity element 2 and to reduce the parasitic capacitance, the present invention forms all the corner portions 24 at the turn of the first metal coil layer 22. On the other hand, in the middle winding portion of the second metal coil layer 22, the current does not concentrate on the turning point (10) due to the current absorbing phenomenon between the adjacent coils, so that the intermediate winding does not have a chamfered portion, so that Avoid reducing the wearing area of the conductor, causing loss and reducing the quality factor of the 201001456 magnetic component 2. The A line is completely shortened within the first metal coil layer 22, and current is concentrated inside the corner. At this time, it is similar to the parasitic capacitance between the outer windings, and the chamfered portion 24=the outer side and the adjacent gold neighboring eighth can be used. The second metal and the shaft layer 22 include a plurality of turning points, and the ^-metal coil The material f of the layer 21 includes a low-resistance system 2, and the coil layer 22 can be a redistribution layer, and the material thereof includes a low-resistance system t. The corner-cut portion 24 can be in a geometric shape, wherein the geometry can be The shape consists of a plurality of squares, a square, and a combination thereof, and at least the edge of the geometric shape may be a shape formed by a -form shape and a combination thereof. In the present embodiment, the can portion 24 includes an L-shaped description of two quadrangular shapes. As shown in Fig. 2A, the L-shape has a first extension direction mountain and a second extension direction d2 which is perpendicular to the first extension direction mountain. In this embodiment, the second metal coil layer 22 has a line 觅L]' L shape has a first-order and a first width in the first extending direction ,, and the L-shaped has a first-wide width in the second extending direction 4 The second long 匕 2 and the second width L5. In practice, the first length L2 and the second length may be greater than, equal to, or less than the line width Li of the second metal coil layer 22, and the first width ^ and the second width L5 may be less than or equal to the second metal coil. The line width of layer 22 is l. 201001456 The embodiment of the chamfered portion 24 may also be, for example, the aspect of the chamfered portion 24a in Fig. 3A or the chamfered portion 24b in Fig. 3B. The chamfered portion 24b shown in FIG. 3B is a square, and its side length is equal to the line width Li of the second metal coil layer 22. Of course, it may also comprise a combination of geometric shapes as described above, which is not limited herein. As shown in FIG. 2A and FIG. 2B, the first metal coil layer 21 is disposed opposite to the second metal coil layer 22 and the first metal coil is made by filling a conductive material in a through hole 251 of a dielectric layer 25. The layer 21 is electrically connected to the second metal coil layer 22. Furthermore, please refer to FIG. 2A again. In the present embodiment, the magnetic element 2 is exemplified by a symmetrical inductor, so it also has two terminals 262, which can be respectively composed of the first metal coil layer 21. Or extending from the second metal coil layer 22 to input current into the magnetic element 2 and form a via. Further, it is known to those skilled in the art that when the at least two magnetic elements 2 are placed around each other, (4) become a miscellaneous contact, which is mounted on a transformer or a general transformer. In summary, according to the hybrid component of the present invention, the corner portion of the second coil layer of Lai County forms a chamfered portion reducing capacitance as a characteristic coil layer and other conductive portions or a stone substrate, thereby reducing the heterozygosity. The effect produced by the effect is to give the quality factor of the magnetic element of the south, so that the magnetic element has better operation. The above description is merely exemplary, not sex. Any changes without departing from the spirit and material of the present invention may be included in the scope of the patent application. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1A to FIG. 1B are schematic diagrams showing a conventional magnetic component; FIG. 2A to FIG. 2B are schematic diagrams showing a magnetic component according to a preferred embodiment of the present invention; and FIG. 3A to FIG. 3B is a view showing an embodiment of a magnetic element in accordance with a preferred embodiment of the present invention. [Main component symbol description] 1, 2: Magnetic element 11: Coil 21: First metal coil layer 22: Second metal coil layer 23: Substrate 231: Surface 24, 24a, 24b: Chamfered portion 25 · Dielectric layer 251 : through holes 261, 262: terminal di: first extension direction 201001456: second extension direction: line width, L4: length L0, L3, L5: width