TWI462126B - Spiral inductor structure - Google Patents
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- TWI462126B TWI462126B TW101150891A TW101150891A TWI462126B TW I462126 B TWI462126 B TW I462126B TW 101150891 A TW101150891 A TW 101150891A TW 101150891 A TW101150891 A TW 101150891A TW I462126 B TWI462126 B TW I462126B
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Description
本發明有關於電感結構,且特別是有關於螺旋電感結構。The present invention relates to inductive structures, and more particularly to helical inductive structures.
電感器是射頻電路(RF circuit)中一個重要的組成元件。目前,許多的手持式無線設備(例如:智慧型手機、平板電腦等)均大量使用電感元件,品質因子(quality factor;Q值)是電感器的一個重要參數。以無線充電技術為例,Q值的高低對於傳輸的效率與傳輸距離皆有很大的影響。另外,當將電感器應用在阻抗匹配時,就必須確保電感器有一定的Q值,以減少路徑上的損失。因此,如何改善電感器的Q值是目前亟待解決的課題。Inductors are an important component of RF circuits. At present, many handheld wireless devices (such as smart phones, tablets, etc.) use a large number of inductive components, and the quality factor (Q value) is an important parameter of the inductor. Taking wireless charging technology as an example, the Q value has a great influence on the transmission efficiency and transmission distance. In addition, when the inductor is applied to impedance matching, it is necessary to ensure that the inductor has a certain Q value to reduce the loss on the path. Therefore, how to improve the Q value of the inductor is an urgent problem to be solved.
本發明一實施例提供一種螺旋電感結構,包括:一線圈,由一線段所組成,線段具有彼此間隔排列的多個擴大部以及多個連接部,其中各擴大部的線寬大於各連接部的線寬,線圈包括:一外圈;以及一第一內圈,第一內圈與外圈共平面,外圈與第一內圈相連並圍繞第一內圈,其中位於外圈的擴大部相鄰於位於第一內圈的連接部,且位於外圈的連接部相鄰於位於第一內圈的擴大部。An embodiment of the present invention provides a spiral inductor structure, including: a coil composed of a line segment having a plurality of enlarged portions and a plurality of connecting portions spaced apart from each other, wherein a line width of each enlarged portion is greater than that of each connecting portion The line width, the coil includes: an outer ring; and a first inner ring, the first inner ring is coplanar with the outer ring, the outer ring is connected to the first inner ring and surrounds the first inner ring, wherein the enlarged portion of the outer ring Adjacent to the connecting portion located at the first inner ring, and the connecting portion at the outer ring is adjacent to the enlarged portion located at the first inner ring.
以下將詳細說明本發明實施例之製作與使用方式。然應注意的是,本發明提供許多可供應用的發明概念,其可以多種特定型式實施。文中所舉例討論之特定實施例僅為製造與使用本發明之特定方式,非用以限制本發明之範圍。此外,在不同實施例中可能使用重複的標號或標示。這些重複僅為了簡單清楚地敘述本發明,不代表所討論之不同實施例及/或結構之間具有任何關連性。再者,當述及一第一材料層位於一第二材料層上或之上時,包括第一材料層與第二材料層直接接觸或間隔有一或更多其他材料層之情形。在圖式中,實施例之形狀或是厚度可能擴大,以簡化或是突顯其特徵。再者,圖中未繪示或描述之元件,可為所屬技術領域中具有通常知識者所知的任意形式。The manner of making and using the embodiments of the present invention will be described in detail below. It should be noted, however, that the present invention provides many inventive concepts that can be applied in various specific forms. The specific embodiments discussed herein are merely illustrative of specific ways of making and using the invention, and are not intended to limit the scope of the invention. Moreover, repeated numbers or labels may be used in different embodiments. These repetitions are merely for the purpose of simplicity and clarity of the invention and are not to be construed as a limitation of the various embodiments and/or structures discussed. Furthermore, when a first material layer is referred to or on a second material layer, the first material layer is in direct contact with or separated from the second material layer by one or more other material layers. In the drawings, the shape or thickness of the embodiments may be enlarged to simplify or highlight the features. Furthermore, elements not shown or described in the figures may be in any form known to those of ordinary skill in the art.
第1圖繪示本發明一實施例之螺旋電感結構的上視圖。請參照第1圖,本實施例之螺旋電感結構10包括一線圈100,線圈100係由一線段所組成,線段具有彼此間隔排列的多個擴大部110a、110b、110c以及多個連接部120a、120b、120c。詳細而言,各連接部120a、120b、120c連接於兩相鄰的擴大部110a、110b、110c之間,以串連彼此間隔排列的擴大部110a、110b、110c。1 is a top view of a spiral inductor structure in accordance with an embodiment of the present invention. Referring to FIG. 1 , the spiral inductor structure 10 of the present embodiment includes a coil 100. The coil 100 is composed of a line segment having a plurality of enlarged portions 110a, 110b, 110c and a plurality of connecting portions 120a spaced from each other. 120b, 120c. Specifically, each of the connecting portions 120a, 120b, and 120c is connected between the adjacent enlarged portions 110a, 110b, and 110c, and the enlarged portions 110a, 110b, and 110c are arranged in series.
各擴大部110a、110b、110c的線寬W1大於各連接部120a、120b、120c的線寬W2。在一實施例中,各擴大部110a、110b、110c的線寬W1與各連接部120a、120b、120c的線寬W2的比值大於1且小於5。在一實施例中,各擴大部110a、110b、110c的線寬W1與各連接部120a、120b、120c的線寬W2的比值大於1且小於1.5。The line width W1 of each of the enlarged portions 110a, 110b, and 110c is larger than the line width W2 of each of the connecting portions 120a, 120b, and 120c. In one embodiment, the ratio of the line width W1 of each of the enlarged portions 110a, 110b, and 110c to the line width W2 of each of the connecting portions 120a, 120b, and 120c is greater than 1 and less than 5. In one embodiment, the ratio of the line width W1 of each of the enlarged portions 110a, 110b, and 110c to the line width W2 of each of the connecting portions 120a, 120b, and 120c is greater than 1 and less than 1.5.
線圈100包括一外圈130以及一第一內圈140,外圈130與第一內圈140共平面,其中外圈130與第一內圈140相連並圍繞第一內圈140。位於外圈130的擴大部110a相鄰於位於第一內圈140的連接部120b,且位於外圈130的連接部120a相鄰於位於第一內圈140的擴大部110b。The coil 100 includes an outer ring 130 and a first inner ring 140. The outer ring 130 is coplanar with the first inner ring 140, wherein the outer ring 130 is coupled to the first inner ring 140 and surrounds the first inner ring 140. The enlarged portion 110a located at the outer ring 130 is adjacent to the connecting portion 120b at the first inner ring 140, and the connecting portion 120a at the outer ring 130 is adjacent to the enlarged portion 110b at the first inner ring 140.
在一實施例中,線圈100可更包括一第二內圈150,第二內圈150與第一內圈140共平面,第一內圈140與第二內圈150相連並圍繞第二內圈150。位於第一內圈140的連接部120b係夾在(或介於)位於外圈130的擴大部110a以及位於第二內圈150的擴大部110c之間,且位於第一內圈140的擴大部110b係夾在位於外圈130的連接部120a以及位於第二內圈150的連接部120c之間。值得注意的是,線圈100的形狀除了如圖1所示,為具有四邊的矩形外,也可為任意的多邊形、圓形、或是橢圓形等,本領域具通常知識者可依據需求自行變換。In an embodiment, the coil 100 may further include a second inner ring 150, the second inner ring 150 is coplanar with the first inner ring 140, and the first inner ring 140 is connected to the second inner ring 150 and surrounds the second inner ring. 150. The connecting portion 120b located at the first inner ring 140 is sandwiched (or interposed) between the enlarged portion 110a of the outer ring 130 and the enlarged portion 110c of the second inner ring 150, and is located at an enlarged portion of the first inner ring 140. The 110b is sandwiched between the connecting portion 120a of the outer ring 130 and the connecting portion 120c of the second inner ring 150. It should be noted that the shape of the coil 100 is not limited to a rectangle having four sides as shown in FIG. 1 , and may be any polygon, circle, or ellipse, etc., and those skilled in the art can change according to requirements. .
擴大部110a的長度L1例如約為外圈130之周長的1/32至1/8。以圖1所示的具有四邊的矩形為例,擴大部110a的長度L1例如為外圈130的寬度W3的1/8至1/2,擴大部110b的長度L2例如約為第一內圈140的寬度W4的1/8至1/2。The length L1 of the enlarged portion 110a is, for example, about 1/32 to 1/8 of the circumference of the outer ring 130. Taking the rectangular shape having four sides as shown in FIG. 1 as an example, the length L1 of the enlarged portion 110a is, for example, 1/8 to 1/2 of the width W3 of the outer ring 130, and the length L2 of the enlarged portion 110b is, for example, about the first inner ring 140. The width of W4 is 1/8 to 1/2.
在一實施例中,位於同一圈的多個擴大部的長度大體上相等,且位於不同圈的擴大部的長度彼此不同。舉例來說,如第1圖所示,位於外圈130的多個擴大部110a的長度L1大體上相等,但不同於位於第一內圈140的擴大部110b的長度L2、以及位於第二內圈150的擴大部110c的 長度L3。又或者是,位於第一內圈140的多個擴大部110b的長度L2大體上相等,但不同於擴大部110a、110c的長度L1、L3。在一實施例中,位於第一內圈140的擴大部110b的長度L2小於位於外圈130的擴大部110a的長度L1。在本實施例中,位於愈內圈的擴大部的長度愈小,位於愈外圈的擴大部的長度愈大。In an embodiment, the lengths of the plurality of enlarged portions located on the same circle are substantially equal, and the lengths of the enlarged portions located at different turns are different from each other. For example, as shown in FIG. 1, the lengths L1 of the plurality of enlarged portions 110a located in the outer ring 130 are substantially equal, but different from the length L2 of the enlarged portion 110b of the first inner ring 140 and located within the second The enlarged portion 110c of the circle 150 Length L3. Alternatively, the lengths L2 of the plurality of enlarged portions 110b located in the first inner ring 140 are substantially equal, but different from the lengths L1, L3 of the enlarged portions 110a, 110c. In an embodiment, the length L2 of the enlarged portion 110b of the first inner ring 140 is smaller than the length L1 of the enlarged portion 110a of the outer ring 130. In the present embodiment, the smaller the length of the enlarged portion located in the inner ring, the larger the length of the enlarged portion located in the outer ring.
在一實施例中,位於同一圈的多個連接部的長度大體上相等,且位於不同圈的連接部的長度彼此不同。舉例來說,如第1圖所示,位於外圈130的多個連接部120a的長度A1大體上相等,但不同於位於第一內圈140的連接部120b的長度A2。又或者是,位於第一內圈140的多個連接部120b的長度A2大體上相等,但不同於位於第二內圈150的連接部120c的長度A3。在一實施例中,位於第一內圈140的連接部120b的長度A2小於位於外圈130的多個連接部120a的長度A1。在本實施例中,位於愈內圈的連接部的長度愈小,位於愈外圈的連接部的長度愈大。In an embodiment, the lengths of the plurality of connecting portions located on the same circle are substantially equal, and the lengths of the connecting portions located at different turns are different from each other. For example, as shown in FIG. 1, the lengths A1 of the plurality of connecting portions 120a located in the outer ring 130 are substantially equal, but different from the length A2 of the connecting portion 120b located at the first inner ring 140. Still alternatively, the lengths A2 of the plurality of connecting portions 120b located in the first inner ring 140 are substantially equal, but different from the length A3 of the connecting portion 120c located in the second inner ring 150. In an embodiment, the length A2 of the connecting portion 120b located at the first inner ring 140 is smaller than the length A1 of the plurality of connecting portions 120a located at the outer ring 130. In the present embodiment, the smaller the length of the connecting portion located in the inner ring, the larger the length of the connecting portion located in the outer ring.
擴大部110a(或110b、110c)的長度L1(或L2、L3)與連接部120a(或120b、120c)的長度A1(或A2、A3)的比值約為0.1至2。在一實施例中,擴大部110a(或110b、110c)的長度L1(或L2、L3)與連接部120a(或120b、120c)的長度A1(或A2、A3)的比值約為0.1至1。The ratio of the length L1 (or L2, L3) of the enlarged portion 110a (or 110b, 110c) to the length A1 (or A2, A3) of the connecting portion 120a (or 120b, 120c) is about 0.1 to 2. In an embodiment, the ratio of the length L1 (or L2, L3) of the enlarged portion 110a (or 110b, 110c) to the length A1 (or A2, A3) of the connecting portion 120a (or 120b, 120c) is about 0.1 to 1 .
值得注意的是,雖然本實施例的螺旋電感結構10只包括三圈(外圈130、第一內圈140、第二內圈150),但不限於此,可將本實施例之概念應用到更多圈的螺旋電感結構中。It should be noted that although the spiral inductor structure 10 of the embodiment includes only three turns (the outer ring 130, the first inner ring 140, and the second inner ring 150), the present invention is not limited thereto, and the concept of the embodiment can be applied to More circles in the spiral inductor structure.
此外,在另一實施例中(如第2圖所示),擴大部110a、110b、110c的長度L1、L2、L3可選擇性地大抵相等。Further, in another embodiment (as shown in Fig. 2), the lengths L1, L2, L3 of the enlarged portions 110a, 110b, 110c may be selectively equal to each other.
請再次參照第1圖,位於外圈130的擴大部110a以及與其相鄰且位於第一內圈140的連接部120b之間的最小間距D1例如約為大於0且小於擴大部110a(或110b、110c)的線寬W1與連接部120a(或120b、120c)的線寬W2的差值。在一實施例中,最小間距D1係大於0且小於線寬W1、W2差值的二分之一,亦即。Referring again to FIG. 1, the minimum distance D1 between the enlarged portion 110a of the outer ring 130 and the connecting portion 120b adjacent thereto and located at the first inner ring 140 is, for example, greater than 0 and smaller than the enlarged portion 110a (or 110b, The difference between the line width W1 of 110c) and the line width W2 of the connecting portion 120a (or 120b, 120c). In an embodiment, the minimum spacing D1 is greater than 0 and less than one-half of the difference between the line widths W1 and W2. ,that is .
值得注意的是,由於本實施例的線圈100具有多個線寬較大的擴大部110a、110b、110c,因此,可增加部分線圈100的線寬,進而降低線圈100的整體電阻以及歐姆損耗。此外,本實施例使線寬較大的擴大部(例如:110a)橫向相鄰於(位於一相鄰圈且)線寬較小的連接部(例如:120b)。如此一來,可使不同圈之間保持適當的間距,以有效降低線圈100的鄰近效應,進而提昇線圈100的Q值。It is to be noted that since the coil 100 of the present embodiment has a plurality of enlarged portions 110a, 110b, 110c having a large line width, the line width of the partial coil 100 can be increased, thereby reducing the overall resistance and ohmic loss of the coil 100. Further, the present embodiment makes the enlarged portion (for example, 110a) having a larger line width laterally adjacent to the connecting portion (for example, 120b) having a smaller line width (located in an adjacent circle). In this way, an appropriate spacing between the different turns can be maintained to effectively reduce the proximity effect of the coil 100, thereby increasing the Q value of the coil 100.
位於外圈130的擴大部110a與位於第一內圈140的擴大部110b之間的最小間距D2例如大於0且小於擴大部110a(或110b、110c)的線寬W1與連接部120a(或120b、120c)的線寬W2的差值。在一實施例中,間距D2係大於0且小於線寬W1、W2之差值的二分之一。The minimum distance D2 between the enlarged portion 110a of the outer ring 130 and the enlarged portion 110b of the first inner ring 140 is, for example, greater than 0 and smaller than the line width W1 of the enlarged portion 110a (or 110b, 110c) and the connecting portion 120a (or 120b) , 120c) The difference in line width W2. In one embodiment, the spacing D2 is greater than zero and less than one-half of the difference between the line widths W1, W2.
在一實施例中,擴大部110a、110b、110c以及連接部120a、120b、120c係為一體成形的結構。線圈100的材質係為導電材料,包括非磁性金屬、非磁性金屬合金、磁性金屬、磁性金屬合金、摻雜的多晶矽、複晶矽化物導電材料、以及前述材料之疊層。在一實施例中,擴大部110a、 110b、110c的形狀例如為正方形、長方形、八角形、圓形、或是其他適合的形狀。In one embodiment, the enlarged portions 110a, 110b, 110c and the connecting portions 120a, 120b, 120c are integrally formed. The material of the coil 100 is a conductive material, including a non-magnetic metal, a non-magnetic metal alloy, a magnetic metal, a magnetic metal alloy, a doped polysilicon, a polycrystalline telluride conductive material, and a laminate of the foregoing materials. In an embodiment, the enlarged portion 110a, The shape of 110b, 110c is, for example, a square, a rectangle, an octagon, a circle, or other suitable shape.
在一實施例中,螺旋電感結構10更包括一基板200,且線圈100配置於基板200上。基板200例如為一絕緣基板或是一半導體基板。詳細而言,基板200可包括一基底與一位於基板上的絕緣層(未繪示),線圈100係位於絕緣層上,且線圈100的一端部E係貫穿絕緣層而延伸至絕緣層與基板之間。In one embodiment, the spiral inductor structure 10 further includes a substrate 200 , and the coil 100 is disposed on the substrate 200 . The substrate 200 is, for example, an insulating substrate or a semiconductor substrate. In detail, the substrate 200 may include a substrate and an insulating layer (not shown) on the substrate, the coil 100 is located on the insulating layer, and one end portion E of the coil 100 extends through the insulating layer to the insulating layer and the substrate. between.
綜上所述,由於本發明的線圈具有多個線寬較大的擴大部,故可有效降低線圈的整體電阻以及歐姆損耗。此外,由於本發明使線寬較大的擴大部橫向相鄰於(位於一相鄰圈且)線寬較小的連接部,故可使不同圈之間保持適當的間距,而有效降低線圈的鄰近效應,進而提昇線圈的Q值。As described above, since the coil of the present invention has a plurality of enlarged portions having a large line width, the overall resistance of the coil and the ohmic loss can be effectively reduced. In addition, since the enlarged portion having a large line width is laterally adjacent to the connecting portion having a small line width (located in an adjacent circle), the present invention can maintain an appropriate spacing between the different circles, thereby effectively reducing the coil. The proximity effect, which in turn increases the Q of the coil.
本發明雖以較佳實施例揭露如上,然其並非用以限定本發明的範圍,任何所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可做些許的更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。The present invention has been disclosed in the above preferred embodiments, and is not intended to limit the scope of the present invention. Any one of ordinary skill in the art can make a few changes without departing from the spirit and scope of the invention. The scope of protection of the present invention is therefore defined by the scope of the appended claims.
10‧‧‧螺旋電感結構10‧‧‧Spiral Inductor Structure
100‧‧‧線圈100‧‧‧ coil
110a、110b、110c‧‧‧擴大部110a, 110b, 110c‧‧
120a、120b、120c‧‧‧連接部120a, 120b, 120c‧‧‧ Connections
130‧‧‧外圈130‧‧‧Outer ring
140‧‧‧第一內圈140‧‧‧First inner circle
150‧‧‧第二內圈150‧‧‧Second inner circle
200‧‧‧基板200‧‧‧Substrate
A1、A2、A3、L1、L2、L3‧‧‧長度A1, A2, A3, L1, L2, L3‧‧‧ length
D1、D2‧‧‧最小間距D1, D2‧‧‧ minimum spacing
E‧‧‧端部E‧‧‧End
W1、W2‧‧‧線寬W1, W2‧‧‧ line width
W3、W4‧‧‧寬度W3, W4‧‧‧ width
第1圖繪示本發明一實施例之螺旋電感結構的上視圖。1 is a top view of a spiral inductor structure in accordance with an embodiment of the present invention.
第2圖繪示本發明另一實施例之螺旋電感結構的上視圖。2 is a top view of a spiral inductor structure according to another embodiment of the present invention.
10‧‧‧螺旋電感結構10‧‧‧Spiral Inductor Structure
100‧‧‧線圈100‧‧‧ coil
110a、110b、110c‧‧‧擴大部110a, 110b, 110c‧‧
120a、120b、120c‧‧‧連接部120a, 120b, 120c‧‧‧ Connections
130‧‧‧外圈130‧‧‧Outer ring
140‧‧‧第一內圈140‧‧‧First inner circle
150‧‧‧第二內圈150‧‧‧Second inner circle
200‧‧‧基板200‧‧‧Substrate
A1、A2、A3、L1、L2、L3‧‧‧長度A1, A2, A3, L1, L2, L3‧‧‧ length
D1、D2‧‧‧最小間距D1, D2‧‧‧ minimum spacing
E‧‧‧端部E‧‧‧End
W1、W2‧‧‧線寬W1, W2‧‧‧ line width
W3、W4‧‧‧寬度W3, W4‧‧‧ width
Claims (13)
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Application Number | Priority Date | Filing Date | Title |
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TW101150891A TWI462126B (en) | 2012-12-28 | 2012-12-28 | Spiral inductor structure |
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Application Number | Priority Date | Filing Date | Title |
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TW101150891A TWI462126B (en) | 2012-12-28 | 2012-12-28 | Spiral inductor structure |
Publications (2)
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TW201426774A TW201426774A (en) | 2014-07-01 |
TWI462126B true TWI462126B (en) | 2014-11-21 |
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TW101150891A TWI462126B (en) | 2012-12-28 | 2012-12-28 | Spiral inductor structure |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI481012B (en) * | 2011-01-31 | 2015-04-11 | Globalfoundries Us Inc | Dram cell based on conductive nanochannel plate |
Citations (1)
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TW201112283A (en) * | 2009-09-29 | 2011-04-01 | Murata Manufacturing Co | Multilayer coil device |
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Patent Citations (1)
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TW201112283A (en) * | 2009-09-29 | 2011-04-01 | Murata Manufacturing Co | Multilayer coil device |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI481012B (en) * | 2011-01-31 | 2015-04-11 | Globalfoundries Us Inc | Dram cell based on conductive nanochannel plate |
US9006906B2 (en) | 2011-01-31 | 2015-04-14 | Globalfoundries Inc. | DRAM cell based on conductive nanochannel plate |
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TW201426774A (en) | 2014-07-01 |
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