201000374 四、指定代表圖： (一）本案指定代表圖 一 仏闺两.第（9)圖 (一）本代表圖之元 1干付唬間早說明： 1〜基板； 2〜基板收納容器·， 51〜收納體； 52〜基板支持部； 53〜支持用旋轉軸； 54〜連動用旋轉軸； 56〜矩形框架； 5 7〜支持框； 5 8〜收納側連結裝置； 6 5〜從動旋轉體。201000374 IV. Designated representative map: (1) The representative representative of the case is shown in Figure 1. (9) Figure (1) The representative figure of the figure 1 is the first payment: 1~substrate; 2~substrate storage container· , 51 to the receiving body; 52 to the substrate supporting portion; 53 to support the rotating shaft; 54 to the interlocking rotating shaft; 56 to the rectangular frame; 5 7 to the support frame; 5 8 to the storage side connecting device; 6 5 to the follower Rotating body.
五、本案若有化學式時，請揭示最能顯示發 無。 明特徵的化學式： 六、發明說明： 【發明所屬之技術領域】 本發明係有關於-種基板收納容器，在基板收納用的 收納體上，在上下方向上並排設置有使基板自由出入地支 持载置的複數個基板支持部，上述基板支持部於基板出入 方向上並排設置而形成複數個轴狀的支持用旋轉體，該等 支持用旋轉體可繞沿著與基板出入方向正交或略正交的收 7〇37-l〇461-pF；Chentf 2 .201000374 納體橫寬度方向的軸心旋轉，以沿著基板出入方向延伸狀 態下配置的軸狀的連動用旋轉體藉由繞著沿其長度方向的 軸’“疋轉而分別使上述基板支持部中的複數個上述支持用 旋轉體旋轉，而與該等複數個支持用旋轉體分別連動連結。 【先前技術】 相關的基板收納容器為收納液晶顯示器或電漿顯示器 的玻璃基板等的基板時所使用的容器，其構造藉由分別載 置支持設置於上下方向的複數個基板支持部的基板，在堆 積狀態下可收納複數的基板。 又，該基板收納容器的連動旋轉體對應於複數個基板 支持部而設置成複數個，在對應於複數個基板支持部的其 中之一而使基板出入的情況下，使對應於該基板支持部的 連動用旋轉體旋轉，使連動連結於該連動用旋轉體的複數 個支持用旋轉體旋轉，藉此形成對應於出入對象的基板支 持部而使基板出入，可對應於複數個基板支持部以不同順 序使基板出入。 然後’在此種基板收納容器中，在習知技術中，用於 對應於複數個基板支持部個別地旋轉驅動複數個設置的連 動用旋轉體的驅動裝置’在連動連結於連動用旋轉體中的 基板出入方向的端部的狀態下’安裝於基板收納用的收納 體’當對應於複數個基板支持部的其中之一而使基板出入 的情況下’藉由驅動裝置旋轉驅動對應於該基板支持部的 連動用旋轉體’藉此’形成對應於出入對象的基板支持部 7037-10461-PF；Chentf 3 201000374 而使基板出入（例如，參照文獻丨）。 [專利文獻1]特開2005-0 1 521 1號公報 【發明内容】 [發明所欲解決的問題] 然而’在上述的習知的基板收納容器中，由於基板收 納用的收納體具備分別驅動複數個連動用旋轉體的複數個 , 驅動裝置，會導致該基板收納容器的重量化。 於此’為了達到基板收納容器的輕量化，在連動用旋 轉體中的基板進出方向的端部設置從動齒輪，對應於基板 支持部而進行基板的出入作業的作業區域上設置驅動齒輪 與旋轉驅動該驅動齒輪的驅動裝置，在對應於複數個基板 支持部的其中之一而使基板進出的情況下，雖然考慮到使 驅動齒輪嚙合於一從動齒輪，該從動齒輪係設於對應於該 基板支持部而設置的連動用旋轉體的端部，由驅動裝置使 1 驅動齒輪旋轉，藉此使與該驅動齒輪唾合的從動齒輪旋 轉使軸狀的連動用方疋轉體旋轉，使複數個支持用旋轉體 旋轉，對於取出對象的基板支持部使基板進出的構造，藉 由驅動齒輪與從動齒輪的嚙合，容易產生塵埃的不利因素。 有鑑於此，本發明的目的為提供一種可達到輕量化同 時可抑制塵埃的產生的基板收納容器。 [解決問題的手段] 本發明的基板收納容器在基板收納用的收納體上，在 上下方向上並排設置有使基板自由進出地支持載置的複數 7〇37-l〇461-PF;Chentf 4 201000374 個基板支持部，上述基板支持部於基板進出方向上並排設 置而形成複數個軸狀的支持用旋轉體，該等支持用旋轉體 可繞沿著與基板出入方向正交或略正交的收納體橫寬度方 向的軸心旋轉，以沿著基板進出方向延伸狀態下配置的軸 狀的連動用旋轉體藉由繞著沿其長度方向的轴心旋轉而分 別使上述基板支持部中的複數個上述支持用旋轉體旋轉， 而與該等複數個支持用旋轉體分別連動連結，其第一特徵 構造為在上述連動用旋轉體令的基板進出方向的端部設有 磁氣式的從動旋轉體。 即，由於在連動用旋轉體的基板進出方向的端部上設 有磁氣式的從動旋轉體，用磁氣式的旋轉驅動使該磁氣式 的從動旋轉體旋轉，藉此使連動用旋轉體旋轉，藉由使複 數個支持用旋轉體旋轉，可對應於基板支持部使基板進出。 更進一步地說，進行對應於基板支持部而使基板進出 的作業的作業區域中設有旋轉驅動的磁氣式驅動旋轉體， 當對應於複數個基板支持部的其中之一而使基板進出時， 使磁氣式的驅動旋轉體接近一磁氣式的從動旋轉體，該磁 氣式的從動旋轉體係設於對應於進出對象的基板支持部的 連動用旋轉體的端部，藉由使磁氣式驅動旋轉體驅動旋 轉’由磁氣式的驅動旋轉體的磁氣以非接觸的方式使磁氣 式的從動旋轉體旋轉，然後，藉由該旋轉使連動用旋轉體 旋轉，使複數個支持用旋轉體旋轉，對應於取出對象的基 板支持部使基板進出。 然後’使用這種磁氣式的從動旋轉以非接觸的方式使 7037-10461-PF;Ghentf 5 201000374 磁氣式的驅動旋轉體做旋轉驅動’因此不會產生塵埃，使 基板支持部的複數個支持用旋轉體旋轉，而使基板進 又，在基板收納容器令，為了進行連動用旋轉體t驅 動，在連動用旋轉體中的基板進出方向的端部設有磁氣式 的從動旋轉體，由於磁氣式的從動旋轉體為重量輕的構 造’可達到基板收納容器的輕量化。 因此，提供一種基板收納容器，可達到輕量化同時可 抑制塵埃的產生。 本發明的基板收納容器的第二特徵構造為在第一特徵 構造中，上述支持用旋轉體，其兩端部由上述收納體可旋 轉地支持的狀態下設置。 即，由於支持用旋轉體設置成其兩端部由收納體可旋 料支持的狀態，在支持兩端的狀態下，穩定性佳且承受 大荷重地支持著支㈣旋轉體，因此近年來的大型化的基 板也綠實地由基板支持部所載置支持。 因此，可提供一種由基板支持部確實地載置支持大型 基板的基板收納容器。 、本發明的基板收納容器的第三特徵構造為在第二特徵 構中_L述從動方疋轉體為比上述連動用旋轉體還大直捏 的圓盤狀以同極性的二種磁極形成部分在不同極性交互 配置的狀態下，沿著圓周方向排列的狀態下形A，對應於 上述複數個基板的支持部的複數個連動用旋轉體，在鄰接 ;下方向的元件於上述收納體橫寬方向上連動連結於與 上述支持用紋轉體不同的一側的端部的狀態下，分開地配 7〇37-l〇461-PF;Chentf 6 201000374 • 置於上述收納體橫寬方向的兩侧。 即，從動旋轉體為比上述連動用旋轉體還大直徑的圓 盤狀且不同極性的二種磁極形成部分在不同極性交互配置 的狀態下，沿著圓周方向排列的狀態下形成，由於此種構 造的從動旋轉體比連動用旋轉體直徑大的圓盤狀，因此可 接受大面積的磁力’而且，由於其大直徑容易以小的力矩 驅動’結果可確實地旋轉驅動由磁力驅動連動用旋轉體的 元件。 ί '然後，由於對應於複數個基板支持部的複數個連動用 旋轉體’在上下方向上鄰接的基板支持部於上述收納體橫 寬方向上連動連結於與上述支持用旋轉體不同的一侧的端 部的狀態下，分開地配置於上述收納體橫寬方向的兩側， 因此即便使於上下方向上鄰接的基板支持部在上下方向上 靠近，也可避免設於連動用旋轉體的從動用旋轉體彼此干 涉，在上下方向上鄰接的基板支持部在上下方向上靠近的 狀態下，由於可增加相同高度的收納體在上下方向上排列 的基板支持部的數量，因此可有效地收納基板。又，由於 複數個連動旋轉體分開地設於收納體橫寬方向的兩側，基 板收納容器的收納體橫寬方向的重量平衡良好。 因此，提供一種基板收納容器，可確實地驅動連動用 旋轉體，同時可效率佳地收納基板，此外在收納體橫寬方 向上的重量平衡良好。 本發明的基板收納容器的第四特徵構造為在第二特徵 構造中，上述從動旋轉體為比上述連動用旋轉體還大直徑 7037-104 61-PF;Chentf 7 201000374 的圓盤狀且不同極性的二種磁極形成部分在不同極性交互 配置的狀態下，沿著圓周方向排列的狀態下形成，對應於 上述複數個基板支持部的複數個連動用旋轉體，在上述收 納體橫寬方向上’在連動連結於上述支持用旋轉體相同側 的端部的狀態下，且在上下方向鄰接的基板支持部位於與 上述收納體橫寬方向的位置而配置成前後交互的狀態下， 集中配置於上述收納體橫寬方向的一邊側。 即’從動旋轉體為比上述連動用旋轉體還大直徑的圓 盤狀且不同極性的二種磁極形成部分在不同極性交互配置 的狀態下，沿著圓周方向排列的狀態下形成，由於此種構 造的從動旋轉體比連動用旋轉體直徑大的圓盤狀，因此可 接受大面積的磁力，而且，由於其大直徑容易以小的力矩 驅動，結果可確實地旋轉驅動由磁力驅動連動用旋轉體的 元件。 然後，由於對應於複數個基板支持部的複數個連動用 方疋轉體’在上述收納體橫寬方向上，在連動連結於上述支 持用旋轉體相同側的端部的狀態下，且在上下方向鄰接的 基板支持部位於與上述收納體橫寬方向的位置而配置成前 後交互的狀態下，集中配置於上述收納體橫寬方向的一邊 側，因此即便使於上下方向上鄰接的基板支持部在上下方 向上靠近，也可避免設於連動用旋轉體的從動用旋轉體彼 此干涉，在上下方向上鄰接的基板支持部在上下方向上靠 近的狀態下，由於可增加相同高度的收納體在上下方向上 排列的基板支持部的數量，因此可有效地收納基板。 7037-10461-PF;Chentf 8 201000374 因此’提供一種基板收納容器，可確實地驅動連動用 旋轉體，同時可效率佳地收納基板。 本發明的基板收納容器的第五特徵構造為在第一〜第 四的特徵構造中，構成上述複數個基板支持部的上述複數 個支持用旋轉體的複數組，在上下方向上鄰接的基板支持 #的複數個支持用旋轉體中排列順序相同的元件位於在上 述基板出入方向不同的位置的狀態下，配置成前後交互的 狀態。 即’由於構成上述複數個基板支持部的上述複數個支 持用旋轉體的複數組，在上下方向上鄰接的基板支持部的 複數個支持用方疋轉體中排列順序相同的元件位於在上述基 板出入方向不同的位置的狀態下，配置成前後交互的狀 態，因此即便在上下方向上鄰接的基板支持部於上下方向 上靠近，也可避免對應於在上下方向上鄰接的基板支持部 中的複數個支持用旋轉體連動連結連動用旋轉軸的連結裝 置彼此干涉，設置成在上下方向上鄰接的基板支持部在上 下方向上靠近的狀態下，由於可增加相同高度的收納體在 上下方向上排列的基板支持部的數量，因此可有效地收納 基板。 因此提供一種可有效地收納基板的基板收納容器。 本發明的基板收納容器的第六特徵構造為在第—第 五特徵構造的其中之一，上述連動用旋轉體相對於上述旋 轉體以磁氣式的連接裝置連動連結。 即，提供一種基板收納容器，連動用旋轉體由於對應 7037-10461-PF;Chentf 9 201000374 於支持用旋轉體以磁氣式的連結裝置連動連結，可抑制連 動用旋轉體與支持用旋轉體連動連結所造成的塵埃的產 生，而更進一步地抑制塵埃的產生。 【實施方式】 以下，根據圖式說明本發明的實施形態 [第一實施形態] 如第1圖所示’基板處理設備包括具有收納基板收納 容器2的複數個收納部4的收納架5、在收納部4與基板 進出部6之間搬運基板收納容器2的倉儲起重機8、將基 板1載置搬運至對基板1進行處理的基板處理裝置（未圖示） 的搬運輸送器3、在位於基板進出部6的基板收納容器2 與搬運滾子3之間搬運基板1的做為基板搬運裝置的基板 搬運台車7。 土 '即，基板收納容器2在成為矩形的玻璃基板的基板工 於上下方向上相隔間隔而排列的狀態下，保持複數片而形 成。 -佼’基板搬運台車7以及倉儲起重機8由圖外的控 的=置控制而作動’由倉儲起重冑8將取出或收納基板1 的基板收納容器2從收納部4搬運至基板 板1的取出或收納完畢的基板收 搬運至收納部4,控制倉儲起…：作 =進出部6 板搬運台車7沾从1 又’控制基 運口皁7的作動，使得從位於基板 納容器2取屮邛6的基板收 一片片地搬運至搬運輪送器3且經從 7〇37-i〇46l-PP;Chentf 1〇 201000374 基板處理裝置3接收的基板一片片地收納於為在基板進出 部6的基板收納容器2。 如第2圖所示’在物品處理設備上，設有在無塵空間 1 3中將淨化空氣從天花板通風至地面的混流式淨化空氣通 八展置2 3 ’在s亥混流式的無塵空間13内’配備有搬運滾 子3、收納架5、基板搬運台車7以及倉儲起重機8。 對淨化空氣通風裝置2 3做說明，如第4圖所示，淨化 空軋通風裝置23中，無塵空間13的地面部係由多孔狀的 格栅地面1 4所形成，無塵空間13的天花板由HEPA過濾器 等所構成的空氣過濾器15形成之同時，形成格栅地板14 、下方側的吸氣至1 6與形成於空氣過濾器1 5的上方側的 腔體室Π &具備通風風扇18及預遽器21的循環路μ連 通’由通風風们8將無塵空間13的空氣通過格柵地面Η 及吸氣室16而吸氣至循環路19之同時，被吸入的空氣通 過預據器2卜腔體室17以及空氣過據器15成為淨化空氣 2而Λ:入無塵空間13内’無塵空間13内的空氣預遽器 、s门 孑化邊循裱，淨化空氣從天花板 :::…形成。然後，比通風風扇18還靠近上游側的 流路2G連接於循環路19，比通風風扇 Γ側的排氣流路22連接於循環路19，由淨化空氣通; 衣置23循環的無塵空間13 ’、 而形成。 3内的項的-部份與外氣交換 如第2圓及第3圖所示，收纟 V . ^ A 叹肩糸5係設於格柵地面14 上在收納架5上設有縱橫排列的複數個& & J復數個收納部4，收納 7〇37-l〇461-PF;Chentf u 201000374 • 6架5所具備的複數個收納部4中的-部份成為基板進出部 如第2圖及第4圖所示，對應於最下段的收納部*中 的基板處理裝置3的收納部4成為基板進出部6，由基板 搬運台車7對位於基板進出部6的基板收納容器2通二二 納架5的背面側而可取出及收納基板1。 即，在基板進出部6設有用於載置支持基板收納容器 〆 2的固定支持台24。 〇 i 如第1圖〜第3圖所示，倉儲起重機8包括沿著二根 沿著橫寬方向設於收納架5前方的行走軌道25的行走台車 26、由立設於行走台車26的一對升降柱27可升降地導引 支持的升降台28、以及由升降台28所支持的收納部*與 本身之間可移載基板收納容器2的又式的物品移載裝置 29 ’藉由行走台車26的行走、升降台28的升降移動以及 移載裝置2 9的作動，在做為基板進出部6的收納部與 、 其他的收納部4之間搬運基板收納容器2而形成。 如第1圖及第2圖所示，基板搬運台車7包括沿著在 收洎架5的後方沿著架橫寬方向設置的二根導軌3丨行走的 台車本體32、以及由立設於台車本體32的導軌3()可升降 地支持的基板搬運輸送器33,藉由台車本體32的行走、 基板搬運輸送器33的升降移動及作動，在位於基板進出部 6的基板收納容器2與搬運輸送器3之間搬運基板工。 接著，對基板單運輪送器33做說明。如第5圖所示， 基板搬運輸送器33包括可繞著沿台車前後寬度方向的轴 7〇37-l〇461-pF;chentf .201000374 芯旋轉且由電動馬達34旋轉驅動的藤動用旋轉軸Μ 於台車橫寬方向而可繞著沿台車前 、没 1又見及万向的站γ奸 的複數個搬運用旋轉軸36、隨著 〜疋轉 μ 〇 勒用凝轉軸35的綠舾 繞者沿台車横寬方向的軸怒旋轉且藉由該旋轉而： =搬運用旋轉軸36旋轉而分別連動連結於驅動用旋轉 轴35及複數個搬運用旋轉軸36的連動輪出用旋轉抽打轉 以及隨著驅動用旋轉軸35料轉而繞著沿台車橫寬方向 _旋轉而連動連結於驅動用旋轉車甴35的輸出用旋轉 軸38。X ’連動輸出用旋轉軸”與輸出用旋轉軸3 同兩度配置。 即，所謂台車前後寬度方向係指沿著基板搬運台車1 的灯走方向，所謂台車橫寬方向係指與抬出前後寬度方向 正交或略正交的台車橫寬方向且為基板搬運輸送$ Μ載 置搬運基板1的方向。X，對應於基板搬運台車7在與基 板進出部6之間應傳遞或接受基!的基板進出部6的: 置上為停止狀態下，台車橫寬方向與基板進出方向為相同 方向，台車前後寬度方向與收納體橫寬方向為相同方向。 驅動用旋轉軸35及複數個搬運用旋轉軸36係在個別 沿著台車前後寬度方向延伸的狀態下配置，其兩端部在沿 著台車橫寬方向延伸的狀態下配置的一對輸送器框架39 可旋轉地支持著。又，連動輸出用旋轉軸37在沿著台車橫 寬方向延伸的狀態下配置，由—對輸送器框架39的一邊可 旋轉地支持於其外側，輸出用旋轉軸38在沿著台車橫寬方 向延伸的狀態下配置而由一對輸送器框架39的另一邊可 7037-10461-PF;Chentf 13 201000374 旋轉地支持於外侧。 如第6圖及第7圖所示， ^ 〇, 運動輪出用旋轉軸37對於驅 動用叙轉軸35以磁氣式的連動 ^ % nr & 遷動輪出側連結裝置41在非接 觸狀態下連動連結，複數個搬 接 Α ± 逆用凝轉軸36對於連動輪出 用奴轉軸37磁氣式的搬運輸出 能H“士 “ ㈣出側連結裝置42在非接觸狀 〜、下連動連，，、σ，輸出用旋轉轴3 8 荷W 對於驅動用旋轉軸35以 磁氣式的輪出侧連結裝置43在非接觸狀態下連動連結。 第6圖帛8圓所不，在複數個搬運用旋轉軸36的 個別的台車前後貧戶：方a & 見度丨肖# 一側端部上設有磁氣式的搬運 側從動％轉體4 7，在連動於φ田絲。 牡連動輸出用轉軸37中的複數個搬運 側從動旋轉體4 7的也I &丨a $ , 的個別位置上，對應於搬運側從動旋轉體 47而在分離至其下方的处 、 的狀先'下且在上下方向重疊的狀態 下，设有磁氣式的搬運側驅動旋轉體46，以該等複數個搬 運側驅動旋轉體46與複數個搬運侧從動旋轉體Ο構成搬 運側連接手段42。 又，在驅動用旋轉軸35中的台車前後寬度方向的一側 端。卩，叹有磁氣式的連動輸出側驅動旋轉體44，在對應於 連動輸出用％轉軸37中的連動輸出側驅動旋轉體的位 置上，對於連動輸出側驅動旋轉體44在分離至其上方的狀 態下且在上下方向重疊的狀態下設有搬運側驅動旋轉體46 的其中之一，以該等連動輸出側驅動旋轉體44與搬運側驅 動旋轉體46構成連動輸出側連結裝置41。又，設於連動 輸出用旋轉軸37的複數個搬運側驅動旋轉體的其中之 一，兼用於由連動輸出側驅動旋轉體44所旋轉的連動輸出 7037-10461-PF;Chentf 14 201000374 側從動旋轉體。 又，在驅動用旋轉軸35中的台車前後寬度方向的另— 側端部設有磁氣式的輸出側驅動旋轉體48，在對應於輪出 用旋轉轴38中的輸出側驅動旋轉體48的位置上，對於輪 出側驅動旋轉體48而分離至其上方且在上下方向上重& 的狀癌下设置磁氣式的輸出側從動旋轉體4 9，以該等於出 側驅動旋轉體48與輸出側從動旋轉體49構成輸出側連結 裝置43。 然後，如第12圖所示，連動輸出侧驅動旋轉體、 搬運側驅動旋轉體46、搬運側從動旋轉體47、輸出側驅動 旋轉體48以及個別的輸出側從動旋轉體49為比其所設置 的旋轉軸的直徑還大的圓筒狀且不同極性的二種磁極形成 部分（S極的磁極形成部分與N極的磁極形成部分）在不同 的極性的磁極在外周面交互地配置的狀態下且螺旋狀地沿 著圓周方向配置的狀態下構成。 >即，藉由基板搬運輸送器33由電動馬達34使驅動用 旋轉軸35旋轉驅動’由該驅動用旋轉軸35與連動輸出側 連結裳置4BX非接觸的方式使連動連結的連動輸出用旋 轉軸37旋轉以及由輸出側連結裝置㈡以非接觸方式連動 :結的輸出用旋轉1^ 38旋轉，並由連動輸出用旋轉轴37 運==連接裝置42卩非接觸方式連動連結的複數個搬 運用旋轉軸36旋轉而形成。 7〇37-l〇46l-PF;chentf 201000374 下’載置支持基板1 ’藉由複數個搬運用旋轉軸36旋轉， 而載置搬運基板1。 連動輪出用旋轉軸37及輪出用旋轉軸38争台車橫寬 方向的基板收納容器2存在的一側的端部上設有磁氣式的 驅動旋轉體64。 該磁氣式的驅動旋轉體64為比其所設置的旋轉軸的 直仏還大的圓盤狀且不同極性的二種磁極形成部分（s極的 磁極形成部分與N極的磁極形成部分）在不同的極性的磁 極在外周面交互地配置的狀態下在平坦的圓形的外面沿著 圓周方向排列。 接著’針對基板收納容器2做說明。 第9圖弟11圖所示，在基板收納用的收納體51 上，使基板1可任意進出地載置支持的複數個基板支持部 、；上下方向排列，上述基板支持部5 2使複數個軸狀的 做為支持用旋轉體的支持用旋轉軸53排列於基板的進出 方向而形成，支持用旋轉轴53係繞著沿與基板進出方向正 交或略正交的收納體橫寬方向的軸芯旋轉，沿基板進出方 向而延伸的狀態下所配置的軸狀的做為連動用旋轉體的連 動用㈣轴54與該等複數個支持用旋轉軸53分別連動連 結，藉由繞沿其長度方向的軸芯旋轉，而使上述基板支持 部52中的複數個上述支持用旋轉軸53分別旋轉。 上述支持用旋轉軸53在沿著收納體橫寬方向而延伸 的狀態下配置，其兩端部在由上述收納體51可 的狀態下設置。 、 7〇37-l〇461-PF;Chentf 16 201000374 、基板收納用的收納體51包括上下一對的矩形框架％ 以及=於上下-對的矩形框帛56之間的基板支持部設置 Z的複數個支持框57。«個支持框57中每個支持框57 ，其上端部連結於上側的矩形框架56且下端部連結於下 側的矩形框牟而、;，L卜π七^ 木而/口上下方向延伸的狀態下配置，與收納體 Η中的支持用旋轉軸53具相4 λ 、内體 、相同數1的支持框架5 7排列於 基板進出方向。 支持用疑轉軸53在其兩端部由支持框架Μ可旋轉地 支持的狀⑮下’於基板進出方向設置複數個，設於基板進 出方向的複數個支持用旋轉車由53的組合在上下方向上$ 置複數組。 又 由排列於基板進出方向的複數個支持用旋轉軸 53的組合構成—個基板支持部52，藉由複數組的支持用旋 轉軸53於上下方向設置，複數個基板支持部μ於上下 向排列。 即各組中的複數個支持用旋轉軸53分別由不同的支 持框架57可旋轉地支持著，與在複數個基板支持部52中 、進出方向上排列順序相同而分別由相同的支持框芊 57所支持。 木 從複數個基板支持部52中，從下方算起第奇數段的基 ，支持邠52相對於從下方算起第偶數段的基板支持部 ’在基板進出方向偏移的狀態下設置，藉此構成上述複 數個基板支持部52的上述複數個支持用旋轉軸53的複數 会目_ ，方\ "ΤΓ Ht- > ，、 Q上鄰接的基板支持部52的複數個支持用旋 7037-l〇461-PF；Chentf 1η 201000374 =二中的上述基板進出方向上，以排列順序相同者位於 二基板進出方向上不同的位置上的形態，配 交 互的狀態。 乂 連動用旋轉軸54係對應於複數個基板支持部52 *置 複數個，對應於該等上述複數個基板支持部52的複數ς連 動用旋轉軸54中，於上下方向鄰接者在上述收納體橫寬方 向中在連動連結於上述支持用旋轉軸 疋将釉W的不同側的端部 的狀態下，在上述收容體橫寬方向的兩側分開設置。 複數個基板支持部52中，對應於從下方算起的第奇數 段的基板支料52而設置的第奇數段料連動用旋轉轴 54由設於收納體橫寬方向的—側的複數個支持框架π可 旋轉地支持於外侧’並連動連結於複數個支持用旋轉軸Μ 的每個收納體橫寬方向的一側端部…對應於從下方算 起的第偶數段的基板支持部52而μ里 才| 而设置的第偶數段用的連 動用旋轉車由54由設於收納體橫寬方向的另一側的複數個 支持框架57可旋轉地支持於外側，並連動連結於複數個支 持用旋轉軸53的每個收納體橫寬方向的另一側端部。 上述連動用旋轉軸54對於上述支㈣旋轉軸53以做 為磁氣式的連結裝置的收納側連結裝置58做連動連結。 複數個支持用旋轉軸53的每個支持用旋轉軸53中收 納體橫寬方向的-側端部或另_側端部上設有磁氣式的收 納側從動旋轉ϋ 59,對應於連動用旋轉軸54中的收納側 從動旋轉體59的位置上，相對於收納側從動旋轉體59而 分離至下方的狀態下且於上下方向上重疊的狀態下，設置 18 7037-10461-PF；Ghentf 201000374 磁氣式的收納側驅動旋轉體6G，以該等收_從動旋轉體 59與收納側驅動旋轉體60構成收納側連接裝置58。 然後，如第圖所示’每個收納側從動旋轉體⑼及 收納側驅動旋韓f# β。1 ± 一連動輸出側驅動旋轉體44相同， 其為比其所設置的旋轉軸的直徑還大的圓筒狀且不同極性 的二種磁極形成部分(S極的磁極形成部分與Ν極的磁極形 成。P刀）形成不同的極性的磁極在外周面交互地排列的狀 態下且螺旋狀地沿著圓周方向排列的狀態。 在基板收納容器2中的第奇數段用的連動用旋轉軸54 料基板搬運輸送器33中的連動㈣用旋轉軸37，由磁 孔式的側連接裝置62可連動連結地構成，第偶數段用的 連動用旋轉軸5 4對於在其把始《·.富认.y 耵於在基板搬運輸送器33中的輸出用旋 轉軸38 ’由磁氣式的另一側連接裝置63而形成可連結。 連動用旋轉軸54中的基板進出方向的基板搬 運台車存在側的端部，設有磁氣式的從動旋轉體65,由設 於連動輸出用旋轉軸37的驅動旋轉體“與設於第奇數段 用的連動料轉軸54的從㈣轉體65構成—側的連接裝 置62,由設於輸出用旋轉軸38的驅動旋轉體“盘 偶數段用的連動用旋轉軸54的從動旋轉體 連結裝置63。 磁氣式的從動旋轉體65與驅動旋轉體64相同，其為 直徑比上述連動⑽轉軸54大的圓盤狀且不同極性的二 種磁極形成部分（5極的磁極形成部分與_的磁極形成部 分）形成不同的極性的磁極在交互排列的狀態下形成在平 7〇37-l〇461-PF;Chentf 19 201000374 坦的圓形的外面沿著圓周方向排列的狀態。 即，複數個從動旋轉體65的每個從動旋轉體65，於 上下方向鄰接者與收納體橫寬方向上—部份重疊的狀態下 設置。 j後將基板收納容器2移載至收納架5的基板進出 部6’在使基板搬運台纟7停止於對應於基板進出部6的 位置的狀態下’藉由使基板搬運輸送器33升降移動，使設 於連動輸出用旋轉軸37的二個驅動旋轉體64的其十之任 一與設於基板收㈣器2的複數個從動旋轉㈣的其中之 :靠近’連動輸出旋轉軸37與複數個第奇數段料連動用 旋轉軸54的其中之—形成連動連結，或者是輸出用旋轉轴 38構成與複數個第偶數段用的連動用旋㈣54的其中之 ▲即’設於連動輸出用旋轉軸37的驅動用旋轉體64與 设於輸出用旋轉軸38的驅動旋轉體64設置成 設於複數個連動用旋轉軸54的複數间又 J伋數個伙動旋轉體65由於 收納體中的收納體橫寬方向的一側與另-側交互且個別的 高度不同地設置，連動輸出用旋轉軸37在與複數個第奇數 段用的連動用旋轉轴54的其中之任—連動連結的狀雄 y，輸出錢轉軸38成為未與複數”偶數段料連㈣ 凝轉軸54的其中之-的狀態，輸出用旋轉轴心 ==的連動用旋轉…其中之—連動連結的 d下，連動輸出用旋轉軸37成為不與複數個第奇數段用 的連動用旋轉軸54的其中之一連動連結的狀態，形成與一 7〇37-l〇461-PF;Chentf 20 .201000374 63的其令之一連接 側的連接裝置62及另一側的連接裝置 而形成雙方並非同時連接。 然後’基板收納容器2在連動用旋轉軸54的1中之一 與基板搬運輸送器33的連動輸出 ±击±丄〇〇* 叫疋轉軸37或輸出用旋 轉軸38連動連結的狀態下， ^ 〇r7 田由電動馬達34使連動輸出 用奴轉軸37及輸出用旋轉軸38 _ ^ ^ 轉時，形成與連動輸出 用方疋轉軸3 7由一側的連接裝置? 、 咬使衣置62以非接觸的形態連動連 結或與輸出用旋轉軸38以另一側 W運接裝置63以非接觸的 形態連動連結的-根連㈣旋轉軸54旋轉，與該連動用旋 轉軸54由收納側連接裝置58以非接觸形態連動連結的複 數個支持用旋轉軸53旋轉。 羔後，基板支持部52在由分別設於複數個支持用旋轉 軸53的複數個支持用環狀體…a持的狀態下，形成載置 支持基板1的構造，藉由複數個搬運用旋轉軸％旋轉，形 成載置支持基板1的構造。 即，如第13圖所示，將基板收納容器2 ^的基板進出部6,使基板搬運台車7停止於對應基板= 4 6的位置，在此狀態下，藉由使基板搬運輸送器Μ升降 移動，與成為基板搬運輸送器33與基板收納容器2中的基 板進出對象的一基板支持部52做連動連結，藉由使設於基 板搬運輸送器33的電動馬達34正反地驅動，基板搬運輸 送器33中的複數個搬運用旋轉軸36以及基板進出對象的 基板支持部52中的複數個支持用旋轉軸53正反地旋轉， 藉此將基板1 一片片地從基板收納容器2取出至基板搬運 7〇37-l〇461-PF；chentf 21 201000374 輸送器33上，又，從基板搬運輸送器33將基板丨一片片 地收納於基板收納容器2中。 [第二實施形態] 以下，根據圖式說明本發明的第二實施形態該第二 實施形態除了基板搬運輸送器33以及基板收納$器2的構 不同以外自於與上述的第一實施开》態相同，對於與第 -實施形態相同的元件或具有相同作用的元件，給予相同 ㈣號而省略其說明，主要是說明與第一實施形態不同的 構造。 針對基板搬運輸送器33做說明，如第14圖及第15圖 所不’輸出用旋轉軸38係由在沿著台車前後寬度方向延伸 的狀態下所配置的一對輪送器框架39的其中之一，在比連 動輸出用旋轉軸37還外側地可旋轉地被支持。 然後，在對應於輸出用旋轉軸38中的連動輸出側驅動 旋轉體44的位置上’相對於連動輸出側驅動旋轉體“分 離至其上方的狀態下且於上下方向重疊的狀態下，設有磁 氣式的輸出側從動旋轉體49’該驅動輸出側驅動旋轉體44 與輸出側從動旋轉體49構成輸出侧連接裝置铛。 對基板收納容器2做說明，如第16圖及第17圖所示， 對應於上述複數個基板支持部52的複數個連動用旋轉轴 54’在上述收納體橫寬方向上連動連結於上述支持用旋轉 轴53的相同側的端部的狀態下且在上下方向上鄰接者於 上述收納體橫寬方向上的不同位置地前後交互配置的狀態 下，集中配置於上述收容體橫寬方向的一側。 7037-10461-PF;Chentf 22 201000374 複數個基板支持部52中，從下方算起，對應於第奇數 段的基板支持部52而設置的第奇數段用的連動用旋轉車由 54係由設於收納體橫寬方向的一側的複數個支持框57可 旋轉地支持於其外側，連動連結於複數個支持用旋轉抽53 中的每個支持用旋轉軸53中的收納體橫寬方向的—側端 部，又，從下方算起，對應於第偶數段的基板支持部52的 第偶數段用的連動用旋轉軸54由設於收納體橫寬方向的 一側的複數個支持框57可旋轉地支持於比第奇數段用的 連動用旋轉軸54還外侧，連動連結於複數個支持用旋轉軸 53的每個支持用旋轉軸53中的收納體橫寬方向的一側端 部。 [其他的實施形態] (1)在上述第一實施形態中，對應於複數個基板支持部 52的複數個連動用旋轉軸54,相對於複數個基板支持部 52的上下方向上鄰接者在收納體橫寬方向上在連動連結於 支持用旋轉軸5 3不同側的端部的狀態下，分開地配置於收 谷體橫寬方向的兩側，在上述第二實施形態中，對應於複 數個基板支持部52的複數個連動用旋轉軸54，在收納體 才頁寬*方向上’在連動連結於支持用旋轉軸53相同側的端部 的狀態下且在上下方向上鄰接者為收納體橫寬方向上位於 不同位置地前後交互配置的狀態下，集中配置於收容體橫 見方向的—側，但是對應於複數個基板支持部52的複數個 連動用旋轉軸54’在收納體橫寬方向上，在連動連結於支 持用知：轉軸5 3相同側的端部的狀態下且在上下方向上鄰 7〇37-l〇46l-PF;Chentf 201000374 接者為收納體橫寬方向上位於相同位置地配置成一列的狀 態下’集中配置於收容體橫寬方向的一側。 又’在上述的實施形態中’雖然將對應於複數個基板 支持《卩52的複數個連動用旋轉軸54在收容體橫寬方向的 兩側分開配置或前後交互地配置而排成兩列，但是排成三 列以上亦可。 (2) 在上述第一及第二實施形態中，構成複數個基板支 持部52的複數個在支持用旋轉軸53的複數組，在上下方 向上鄰接者在基板支持部52的複數個支持用旋轉軸53中 的基板進出方向上使排列順序相同者位於基板進出方向上 不同的位置的狀態下，前後交互地配置，但構成複數個基 板支持部52的複數個支持用旋轉軸53的複數組，在上下 方向上鄰接的基板支持部52的複數個支持用旋轉軸53中 的基板進出方向上使排列順序相同者在基板進出方向上位 於相同的位置的狀‘態下，在上下方向上配置成—列。又， 排成三列以上亦可。 (3) 在上述第一及第二實施形態中’雖然將連動用旋轉 軸54連動連結於支㈣旋轉軸㈤的連接裝置為磁氣式的 連接裝置58,但連動用旋轉軸54連動連結於支持用旋轉 軸53的連接裝置為齒輪咬合的齒輪式的連接裝置亦可。 (4) 在上述第一及第二實施形態中，支持用旋轉體 雖然其兩端部由收納體51可旋轉地支持的狀態下設置，作 支持用旋轉體53，其一端部由收納體51可旋轉地支持 狀態下設置亦可。 、、 7〇37-l〇461-PF；Chentf 24 201000374 (5)在上述第一及第二實施形態中，雖然基板搬運裳置 為具備台車本體32與基板搬運輸送器33的基板搬運台車 7 ’但基板搬運裝置具備固定於地面的固定框架以及相對於 該固定框架而可升降地設置的基板搬運輸送器的構造亦 可 〇 【圖式簡單說明】 第1圖為基板處理設備的平面圖。 第2圖為基板處理設備的正視圖。 第3圖為基板處理設備的側視圖。 第4圖為基板搬運輸送器與基板收納容器的立體圖。 第5圖為基板搬運輸送器的立體圖。 第6圖為基板搬運輸送器的橫斷正視圖。 第7圖（a)(b)為基板搬運輸送器與基板收納容器在一 側連動連結的狀態的圖。 第8圖（a)(b)為基板搬運輸送器與基板收納容器在另 一側連動連結的狀態的圖。 ° 第9圖為基板收納容器的立體圖。 第10圖為基板收納容器的正視圖。 第11圖為基板收納容器的側視圖。 第12圖為連動連結旋轉軸的概略圖。 第13圖（a)(b)為表示搬運基板的狀態的作用圖。 第14圖為第二實施形態的基板搬運輸迸器 P W情斷正 7037-10461-PF;Chentf 25 201000374 第15圖表示第二實施形態的基板搬運輪送器與基板 收納容器連動連結的狀態。 第16圖為第二實施形態的基板收納容器的正視圖。 第17圖為第二實施形態的基板收納容器的側視圖。 【主要元件符號說明】 1〜基板； 2〜基板收納容器； 3〜搬運輸送器； 4〜收納部； 5〜收納架； 6〜 基板進出部； 7〜 基板搬運台車； 8〜 倉儲起重機； 13- -無塵空間； 14- 、格柵地面； 15, -空氣過濾器； 16〜吸氣室； 17, -腔體室； 18- -通風風扇； 19- -循環路； 20- 。外氣取入流路； 21- -預渡器； 23- -淨化空氣通風裝置； 7037-10461-PF;Chentf 26 201000374 - 2 5〜行走軌道； 2 6〜行走台車； 27〜升降柱； 28〜升降台； 29〜物品移載裝置； 31〜導軌； 32〜台車本體； 33〜基板搬運輸送器； 34〜電動馬達； 3 5〜驅動用旋轉轴； 3 6〜搬運用旋轉軸； 36a〜搬運用環； 37〜連動輸出用旋轉轴； 38〜輸出用旋轉軸； 39〜輸送器框架； # 41〜連動輸出側連結裝置； i 42〜搬運側連接手段； 44〜連動輸出側驅動旋轉體； 4 6〜搬運側驅動旋轉體； 47〜搬運側從動旋轉體； 48〜輸出側驅動旋轉體； 49〜輸出側從動旋轉體； 64〜磁氣式的驅動旋轉體； 51〜收納體； 7037-10461-PF;Chentf 2Ί .201000374 52〜 基板支持部； 53〜 支持用旋轉軸； 5 3a^ -支持用環狀體； 5 4〜 連動用旋轉軸； 5 6〜 矩形框架； 57〜 支持框； 58〜 收納側連結裝置； 5 9〜 收納側從動旋轉體； 6 0〜 收納側驅動旋轉體； 62〜 連接裝置； 63〜 連接裝置； 6 4〜 驅動旋轉體； 65〜 從動旋轉體。 \ 7037-10461-PF;Chentf 285. If there is a chemical formula in this case, please reveal the best display. The chemical formula of the present invention is as follows: (Technical Fields of the Invention) The present invention relates to a substrate storage container in which a support for freely entering and exiting a substrate is arranged side by side in a storage body for housing storage. a plurality of substrate supporting portions on which the substrate supporting portions are arranged side by side in the substrate entrance and exit direction to form a plurality of shaft-shaped supporting rotating bodies, and the supporting rotating bodies can be wound orthogonally or slightly in the direction in and out of the substrate Orthogonally received 7〇37-l〇461-pF; Chentf 2 . 201000374 The rotation of the axis in the lateral direction of the body is performed, and the shaft-shaped interlocking rotating body disposed in the state in which the substrate extends in the direction in which the substrate is extended in the substrate is rotated by the axis along the longitudinal direction thereof. When the plurality of support rotating bodies are rotated, the plurality of supporting rotating bodies are connected to each other. [Prior Art] When the related substrate storage container is a substrate such as a glass substrate that houses a liquid crystal display or a plasma display The container to be used has a substrate on which a plurality of substrate supporting portions provided in the vertical direction are supported, and a plurality of substrates can be accommodated in a stacked state. The interlocking rotating body of the substrate storage container corresponds to a plurality of substrates. The support unit is provided in a plurality of pieces, and when the substrate is taken in and out corresponding to one of the plurality of substrate supporting portions, the interlocking rotating body corresponding to the substrate supporting portion is rotated to be linked to the interlocking rotation. The plurality of support rotating bodies of the body are rotated, thereby forming a substrate supporting portion corresponding to the entry and exit object to allow the substrate to enter and exit The substrate can be moved in and out in a different order in response to the plurality of substrate supporting portions. Then, in such a substrate storage container, in the prior art, the interlocking for individually driving a plurality of settings corresponding to the plurality of substrate supporting portions is used. In the state in which the driving device of the rotating body is connected to the end portion of the interlocking rotating body in the substrate entrance and exit direction, the mounting body for mounting the substrate is configured to correspond to one of the plurality of substrate supporting portions. In the case of access, the rotary body corresponding to the substrate supporting portion is rotationally driven by the driving device to thereby form the substrate supporting portion 7070- 1461-PF corresponding to the entry and exit; Chentf 3 201000374 to allow the substrate to enter and exit (for example, [Patent Document 1] JP-A-2005-0 1 521 1 SUMMARY OF THE INVENTION [Problems to be Solved by the Invention] However, in the above-described conventional substrate storage container, for substrate storage The storage body is provided with a plurality of driving units for driving a plurality of interlocking rotating bodies, and the driving device causes the weight of the substrate storage container to be reduced. In order to reduce the weight of the substrate storage container, a driven gear is provided at an end portion of the interlocking rotating body in the substrate feeding direction, and a driving gear is provided on the working area for performing the substrate receiving operation in accordance with the substrate supporting portion, and the driving is rotationally driven. In the case of driving the gear, when the substrate is moved in and out corresponding to one of the plurality of substrate supporting portions, the driven gear is provided to correspond to the substrate support in consideration of engaging the driving gear to a driven gear. The end portion of the interlocking rotating body provided in the portion is rotated by the driving device by the driving device, whereby the driven gear that is sprinkled with the driving gear is rotated to rotate the shaft-shaped interlocking rotating body to a plurality of The rotation of the rotating body is supported, and the structure in which the substrate supporting portion of the object to be taken out and the substrate is moved in and out is easily caused by the meshing of the driving gear and the driven gear. In view of the above, an object of the present invention is to provide a substrate storage container which can reduce the generation of dust while suppressing the occurrence of dust. [Means for Solving the Problem] In the substrate storage container of the present invention, a plurality of 7〇37-l〇461-PF which supports the mounting of the substrate in the vertical direction are arranged side by side in the storage body for the substrate storage; In the 201000374 substrate supporting portions, the substrate supporting portions are arranged side by side in the substrate feeding direction to form a plurality of shaft-shaped supporting rotating bodies, and the supporting rotating bodies can be wound orthogonally or orthogonally to the substrate entering and exiting direction. In the axial direction of the storage body in the lateral direction, the shaft-shaped interlocking rotating body disposed in the state in which the substrate is extended in the substrate extending direction is rotated around the axis along the longitudinal direction thereof to cause the plural in the substrate supporting portion Each of the plurality of supporting rotating bodies is coupled to the plurality of supporting rotating bodies, and the first characteristic structure is provided with a magnetic-type follower at an end portion of the substrate for moving in and out of the interlocking rotating body. Rotating body. In other words, a magnetic-type driven rotating body is provided at an end portion of the interlocking rotating body in the board feeding direction, and the magnetic-type driven rotating body is rotated by a magnetic-type rotary driving, thereby interlocking By rotating the rotating body, by rotating a plurality of supporting rotating bodies, the substrate can be moved in and out corresponding to the substrate supporting portion. Further, a magnetic-type driving rotating body that is rotationally driven is provided in a work area in which a work for moving in and out of the substrate is performed in accordance with the substrate supporting portion, and when the substrate is moved in and out corresponding to one of the plurality of substrate supporting portions a magnetic-type driving rotating body is disposed close to a magnetic-type driven rotating body, and the magnetic-type driven rotating system is provided at an end portion of the interlocking rotating body corresponding to the substrate supporting portion of the object to be accessed. The magnetic gas-driven rotating body is driven to rotate. The magnetic gas driven by the magnetic-type driving rotating body rotates the magnetic-type driven rotating body in a non-contact manner, and then the interlocking rotating body is rotated by the rotation. The plurality of supporting rotating bodies are rotated, and the substrate is guided in and out corresponding to the substrate supporting portion to be taken out. Then 'Using this magnetic-type driven rotation to make the 7037- 1461-PF; Ghentf 5 201000374 magnetic-type driving rotating body to be rotationally driven' in a non-contact manner, therefore, no dust is generated, and the substrate support portion is plural In the substrate storage container, the support rotating body is rotated, and in order to drive the interlocking rotating body t, a magnetic-type driven rotation is provided at the end portion of the interlocking rotating body in the substrate feeding direction. In the body, since the magnetic-type driven rotating body has a lightweight structure, the weight of the substrate storage container can be reduced. Therefore, a substrate storage container is provided which can reduce the weight and suppress the generation of dust. According to a second aspect of the present invention, in the first feature structure, the support rotating body is provided in a state in which both end portions are rotatably supported by the storage body. In other words, since the supporting rotating body is provided in a state in which both end portions thereof are supported by the charging body in a state where the receiving body is supported by the rotating body, the supporting (four) rotating body is supported in a state in which both ends are supported, and the bearing is supported by a large load. The substrate is also green and supported by the substrate support unit. Therefore, it is possible to provide a substrate storage container in which a large-sized substrate is supported by the substrate supporting portion. The third characteristic structure of the substrate storage container according to the present invention is that, in the second characteristic structure, the slave side turn body is a disk shape which is larger than the interlocking rotary body and has two polarities of the same polarity. The forming portion is arranged in a state in which the polarities are alternately arranged, and the shape A is arranged in the circumferential direction, and the plurality of interlocking rotating bodies corresponding to the support portions of the plurality of substrates are adjacent to each other; and the lower facing member is in the receiving body. In a state where the end portion of the side different from the support wrap is connected in the lateral direction, 7〇37-l〇461-PF is separately provided; Chentf 6 201000374 • is placed in the lateral direction of the storage body On both sides. In other words, the driven rotating body is formed in a disk shape having a larger diameter than the interlocking rotating body, and the two types of magnetic pole forming portions having different polarities are arranged in a state in which the polarities are alternately arranged, and are arranged in the circumferential direction. The driven rotating body of the structure has a larger disk shape than the rotating body of the interlocking body, and thus can accept a large-area magnetic force 'and, because its large diameter is easily driven with a small torque', the result can be surely rotated and driven by the magnetic force. Use the components of the rotating body. In addition, the substrate supporting portion adjacent to the plurality of interlocking rotating bodies 'in the vertical direction of the plurality of substrate supporting portions is connected to the side different from the supporting rotating body in the lateral direction of the receiving body In the state of the end portion, the two sides of the accommodating rotating body can be avoided even if the substrate supporting portions adjacent to each other in the vertical direction are close to each other in the vertical direction. In the state in which the substrate supporting portions adjacent to each other in the vertical direction are close to each other in the vertical direction, the number of the substrate supporting portions arranged in the vertical direction can be increased, so that the substrate can be efficiently accommodated. . Further, since a plurality of interlocking rotating bodies are provided separately on both sides in the lateral direction of the storage body, the weight balance of the storage body of the substrate storage container in the lateral direction is good. Therefore, a substrate storage container is provided, which can reliably drive the interlocking rotating body, and can efficiently accommodate the substrate, and has a good weight balance in the lateral direction of the storage body. According to a fourth aspect of the present invention, in the second feature structure, the driven rotating body is larger than the interlocking rotating body by a diameter of 7037-104 61-PF; and the Centt 7 201000374 is disc-shaped and different. The two magnetic pole forming portions of the polarity are formed in a state in which the polarities are alternately arranged, and are arranged in the circumferential direction, and the plurality of interlocking rotating bodies corresponding to the plurality of substrate supporting portions are in the lateral direction of the receiving body. In a state in which the substrate supporting portions adjacent to each other in the vertical direction are disposed in a state in which the substrate supporting portions adjacent to each other in the horizontal direction are disposed in a state in which they are connected to each other in the state in which they are connected to the end portions of the supporting rotating body, they are collectively disposed. One side of the storage body in the lateral direction. In other words, the driven rotating body is formed in a state in which the two types of magnetic pole forming portions having a larger diameter than the interlocking rotating body and having different polarities are arranged in different polarities, and are arranged in the circumferential direction. The driven rotating body of the structure has a disk shape larger than the diameter of the interlocking rotating body, so that a large-area magnetic force can be accepted, and since the large diameter thereof is easily driven with a small torque, the rotational driving can be surely driven by the magnetic force. Use the components of the rotating body. Then, a plurality of interlocking square slewing bodies ′ corresponding to the plurality of substrate supporting portions are in a state in which the end portions of the supporting rotating body are interlocked in the lateral direction of the accommodating body, and are in the upper and lower sides. The substrate supporting portions that are adjacent to each other are disposed in the horizontal direction of the storage body in a state in which they are disposed in the lateral direction of the storage body, and are disposed on one side in the lateral direction of the storage body. Therefore, the substrate supporting portion adjacent to the vertical direction is provided. In the up-and-down direction, it is possible to prevent the driven rotating bodies provided in the interlocking rotating body from interfering with each other, and in the state in which the substrate supporting portions adjacent to each other in the vertical direction are close to each other in the vertical direction, the storage body of the same height can be increased. Since the number of the substrate supporting portions arranged in the vertical direction can effectively accommodate the substrate. 7037-10461-PF; Chentf 8 201000374 Therefore, a substrate storage container is provided which can reliably drive the interlocking rotating body and can efficiently accommodate the substrate. According to a fifth aspect of the present invention, in the first to fourth features, the plurality of supporting rotating bodies of the plurality of substrate supporting portions are arranged in a plurality of arrays, and the adjacent substrate supports in the vertical direction. In the plurality of support rotating bodies, the elements having the same arrangement order are placed in a state in which the substrates are different from each other in the direction in which the substrates are moved in and out. In other words, the plurality of supporting rotating bodies in the substrate supporting portion adjacent to each other in the vertical direction are located on the substrate in the plurality of supporting rotating bodies in the substrate supporting portion in the vertical direction. In a state in which the entrance and exit directions are different from each other, the state in which the substrate support portions are adjacent to each other in the vertical direction can avoid the plural in the substrate support portion adjacent to each other in the vertical direction. The supporting devices for supporting the rotating shafts for the interlocking rotation of the supporting body interfere with each other, and are arranged such that the substrate supporting portions adjacent to each other in the vertical direction are arranged in the vertical direction, and the storage bodies of the same height can be arranged in the vertical direction. The number of substrate support portions can effectively accommodate the substrate. Therefore, a substrate storage container capable of efficiently accommodating a substrate is provided. A sixth feature of the substrate storage container of the present invention is one of the first to fifth characteristic structures, and the interlocking rotating body is coupled to the rotating body by a magnetic gas type connecting device. In other words, a substrate storage container is provided, and the interlocking rotating body is interlocked with the supporting rotating body by the magnetic rotating coupling device in the support rotating body by the corresponding transmissive 707-10461-PF and the Chentf 9 201000374; The generation of dust caused by the connection further suppresses the generation of dust. [Embodiment] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. [First Embodiment] As shown in Fig. 1, the substrate processing apparatus includes a storage rack 5 having a plurality of storage portions 4 for housing the substrate storage container 2, The storage crane 8 that transports the substrate storage container 2 between the storage unit 4 and the substrate entrance and exit unit 6, and the transport conveyor 3 that transports the substrate 1 to the substrate processing apparatus (not shown) that processes the substrate 1 is located on the substrate. The substrate conveyance cart 7 as the substrate conveyance device that transports the substrate 1 between the substrate storage container 2 of the inlet and outlet portion 6 and the conveyance roller 3 . In the state in which the substrate of the rectangular glass substrate is arranged at intervals in the vertical direction, the substrate storage container 2 is formed by holding a plurality of sheets. - 佼 'The substrate transporting carriage 7 and the storage crane 8 are operated by the control of the outside of the control unit. The storage unit 2 for taking out or accommodating the substrate 1 is transported from the storage unit 4 to the substrate board 1 by the storage lifting hoist 8 The substrate that has been taken out or stored is transported to the storage unit 4, and the storage is controlled. The following is the operation of the storage unit. The substrate of the crucible 6 is conveyed one by one to the conveyance roller 3, and the substrate received from the 7〇37-i〇46l-PP; the Chentf 1〇201000374 substrate processing apparatus 3 is accommodated in one piece in the substrate entrance and exit portion 6 Substrate storage container 2. As shown in Fig. 2, on the article handling equipment, there is a mixed-flow purified air that ventilates the purified air from the ceiling to the ground in the clean space 13 and is provided with 2 3 'in the shai mixed flow type. The space 13 is provided with a transport roller 3, a storage rack 5, a substrate transporting cart 7, and a storage crane 8. The purifying air ventilating device 23 will be described. As shown in Fig. 4, in the purifying air-rolling ventilating device 23, the ground portion of the dust-free space 13 is formed by the porous grille floor 14 and the dust-free space 13 The ceiling is formed of an air filter 15 composed of a HEPA filter or the like, and the grill floor 14 is formed, and the lower side suction is 16 and the cavity chamber formed on the upper side of the air filter 15 is provided. The circulation path μ of the ventilation fan 18 and the pretensioner 21 is communicated by the ventilation air 8 through the grille floor Η and the suction chamber 16 to inhale the air to the circulation path 19 while being sucked in. The air conditioner 2 is cleaned by the pre-former 2 cavity chamber 17 and the air conditioner 15, and is immersed in the dust-free space 13 in the air-free space, and the s-gate is circulated and purified. The air is formed from the ceiling:::... Then, the flow path 2G closer to the upstream side than the ventilation fan 18 is connected to the circulation path 19, and the exhaust flow path 22 on the side of the ventilation fan is connected to the circulation path 19, and the purified air is passed through; 13 ', and formed. The part of the item in 3 is exchanged with the outside air as shown in the second circle and the third figure. ^ A Sighing shoulders 5 are provided on the grille floor 14 and are provided with a plurality of longitudinally and horizontally arranged storage compartments 5, and a plurality of storage sections 4 for storing 7〇37-l〇461-PF; Chentf u 201000374 • The portion of the plurality of storage units 4 provided in the five racks 5 is the substrate inlet and outlet portion as shown in Figs. 2 and 4, and corresponds to the storage portion of the substrate processing apparatus 3 in the storage unit* of the lowermost stage. 4 is the substrate entrance and exit portion 6, and the substrate transporting carriage 7 can take out and store the substrate 1 on the back side of the substrate storage container 2 located in the substrate feeding portion 6 through the second and second frames 5. That is, the substrate inlet and outlet portion 6 is provided with a fixing support 24 for placing the support substrate storage container 〆 2 . 〇i As shown in FIGS. 1 to 3, the storage crane 8 includes a traveling carriage 26 that is provided along the traveling rail 25 that is disposed in front of the storage rack 5 in the lateral direction, and one that is erected on the traveling vehicle 26. The lifting platform 28 that supports the lifting and lowering of the lifting column 27 and the storage device for supporting the storage unit* supported by the lifting table 28 and the substrate transfer container 29 that can transfer the substrate storage container 2 by itself The traveling of the carriage 26, the lifting and lowering movement of the lifting table 28, and the operation of the transfer device 29 are formed by transporting the substrate storage container 2 between the storage portion of the substrate inlet and outlet portion 6 and the other storage portion 4. As shown in FIGS. 1 and 2, the substrate transporting carriage 7 includes a trolley body 32 that travels along two rails 3 that are disposed along the lateral direction of the racker at the rear of the yoke 5, and is erected on the trolley. The substrate conveyance conveyor 33 supported by the guide rails 3 of the main body 32 is supported by the traveling of the carriage main body 32, the lifting movement and movement of the substrate conveyance conveyor 33, and the substrate storage container 2 and the conveyance at the substrate entrance and exit portion 6 The substrate is transported between the conveyors 3. Next, the substrate single transporter 33 will be described. As shown in Fig. 5, the substrate handling conveyor 33 includes an axis 7〇37-l〇461-pF;chentf which can be wound around the front and rear width directions of the carriage. 201000374 The rotation axis of the ratchet that is rotated by the electric motor and driven by the electric motor 34 is circumscribing the direction of the width of the trolley, and it is possible to wrap around a plurality of conveyance rotary shafts 36 along the front of the trolley, and the stations that are not seen and universal. The 舾 μ 〇 用 用 用 用 用 用 用 用 用 用 用 用 用 用 用 用 舾 舾 舾 舾 舾 舾 舾 舾 舾 舾 舾 舾 舾 舾 舾 舾 舾 舾 舾 舾 = = = = = = = = = = = = = = The rotary rotation of the interlocking rotation of the plurality of conveyance rotary shafts 36 and the rotation shaft for output that is coupled to the drive rotary ram 35 in the lateral direction of the carriage as the drive rotary shaft 35 rotates 38. The X' interlocking output rotation axis is arranged two degrees with the output rotation axis 3. That is, the front and rear width direction of the carriage refers to the direction of the lamp along the substrate conveyance carriage 1, and the so-called horizontal width direction of the carriage is before and after the lifting. The direction in which the width direction is orthogonal or slightly orthogonal to the lateral direction of the carriage is the direction in which the substrate conveyance transports the substrate 1 to be transported. X corresponds to the transfer and reception of the substrate transport carriage 7 between the substrate and the substrate 6; In the case where the substrate is in the stopped state, the lateral direction of the carriage is the same as the direction in which the substrate is moved in and out, and the width direction of the front and rear of the carriage is the same direction as the lateral direction of the storage body. The rotation shaft 35 for driving and the plurality of conveyances are used. The rotating shaft 36 is disposed in a state of being individually extended in the front-rear width direction of the carriage, and the pair of conveyor frames 39 disposed at both end portions thereof in a state of extending in the lateral direction of the carriage are rotatably supported. The output rotation shaft 37 is disposed in a state of extending along the lateral direction of the carriage, and is rotatably supported on one side of the conveyor frame 39, and the output rotation shaft 38 is along The vehicle is disposed in a state in which the vehicle is extended in the lateral direction, and is supported by the other side of the pair of conveyor frames 39, 7307- 1461-PF; and the Chentf 13 201000374 is rotatably supported on the outside. As shown in FIGS. 6 and 7, ^ 〇, The moving wheel rotation shaft 37 is magnetically coupled to the driving shaft 35. The moving wheel side connecting device 41 is interlocked in a non-contact state, and the plurality of moving joints Α the reverse condensing shaft 36 For the interlocking rotation slave shaft 37 magnetic air type conveying output energy H "shi" (four) the outlet side coupling device 42 in the non-contact type ~, the lower linkage, σ, the output rotation shaft 3 8 load W for the drive The rotating shaft 35 is connected in a non-contact state by the magnetic-type wheel-side connecting device 43. The sixth drawing is not shown in the figure, and the individual trolleys of the plurality of conveying rotating shafts 36 are in front of the poor: square a &; see 丨 # # 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁4 7 also in the individual position of I & 丨a $ , corresponding to the moving side driven rotating body 47, a magnetic-type conveyance-side drive rotating body 46 is provided in a state in which the lower portion is separated from the lower portion and is vertically overlapped, and the rotary body 46 and the plural are driven by the plurality of conveyance sides. The transport-side driven rotating body Ο constitutes the transport-side connecting means 42. Further, in the drive rotating shaft 35, the side end in the front-rear width direction of the carriage is smashed, and the magnetic-type interlocking output side drives the rotating body 44. In the position corresponding to the interlocking output side drive rotating body in the interlocking output %-axis 37, the transport-side drive is provided in a state in which the interlocking output-side drive rotor 44 is separated from the upper side and overlapped in the up-and-down direction. One of the rotating bodies 46 constitutes the interlocking output side coupling device 41 by the interlocking output side driving rotating body 44 and the conveying side driving rotating body 46. Further, one of the plurality of conveyance side drive rotating bodies provided in the interlocking output rotation shaft 37 is also used for the interlocking output 7037- 1461-PF rotated by the interlocking output side driving rotary body 44; and the Chentf 14 201000374 side slave Rotating body. Further, a magnetic-type output-side drive rotor 48 is provided at the other end portion in the front-rear width direction of the carriage in the drive rotary shaft 35, and the rotary body 48 is driven on the output side corresponding to the wheel-out rotary shaft 38. In the position of the wheel-side driving rotary body 48, the magnetic-type output-side driven rotating body 4 9 is disposed under the cancer which is separated above and in the vertical direction and is equal to the output side. The body 48 and the output side driven rotating body 49 constitute an output side coupling device 43. Then, as shown in Fig. 12, the interlocking output side drive rotor, the transport side drive rotor 46, the transport side driven rotor 47, the output side drive rotor 48, and the individual output side driven rotor 49 are The two magnetic pole forming portions (the magnetic pole forming portions of the S pole and the magnetic pole forming portions of the N pole) having a large diameter and a different polarity of the rotating shaft provided are alternately arranged on the outer peripheral surface of the magnetic poles of different polarities. It is configured in a state of being spirally arranged in the circumferential direction. > In other words, the driving rotary shaft 35 is rotationally driven by the electric motor 34 by the electric motor 34. The interlocking output is linked by the driving rotating shaft 35 and the interlocking output side connecting skirt 4BX. The rotation shaft 37 rotates and is interlocked by the output side coupling device (2) in a non-contact manner: the output of the knot is rotated by rotation 1^38, and is driven by the interlocking output rotary shaft 37 == the connecting device 42 is connected in a non-contact manner. The conveyance rotation shaft 36 is formed to rotate. 7〇37-l〇46l-PF;chentf 201000374 The lower mounting substrate 1' is placed on the transport substrate 1 by rotating a plurality of transport rotating shafts 36. A magnetic-type driving rotor 64 is provided at an end portion of the substrate storage container 2 in which the rotating shaft 37 and the rotating shaft 38 for the rotation of the wheel are in the direction in which the wheel is wide. The magnetic gas type driving rotary body 64 is a disk-shaped and magnetically polarized two magnetic pole forming portions (the magnetic pole forming portion of the s pole and the magnetic pole forming portion of the N pole) which are larger than the straight axis of the rotating shaft provided thereto. The magnetic poles of different polarities are arranged in the circumferential direction on the outer side of the flat circular shape in a state in which the outer peripheral surfaces are alternately arranged. Next, the substrate storage container 2 will be described. In the accommodating body 51 for accommodating the substrate, a plurality of substrate supporting portions for supporting the substrate 1 are placed in the accommodating body 51 for accommodating the substrate, and the substrate supporting portions 52 are arranged in the vertical direction. The shaft-shaped supporting rotating shaft 53 is arranged in the feeding direction of the substrate, and the supporting rotating shaft 53 is wound around the horizontal direction of the receiving body which is orthogonal or slightly orthogonal to the substrate feeding direction. The shaft core is rotated, and the shaft-shaped interlocking body (4) shaft 54 disposed in the state in which the shaft core rotates in the extending direction of the substrate is connected to the plurality of supporting rotating shafts 53 in a row, and is wound around the shaft. The shaft core in the longitudinal direction is rotated, and the plurality of support rotation shafts 53 in the substrate supporting portion 52 are respectively rotated. The support rotation shaft 53 is disposed in a state of extending along the lateral direction of the storage body, and both end portions thereof are provided in a state in which the storage body 51 is slidable. 7〇37-l〇461-PF; Chentf 16 201000374, the storage body 51 for substrate storage includes a pair of upper and lower rectangular frames % and = Z is arranged in the substrate support portion between the upper and lower rectangular frames 帛 56 A plurality of support boxes 57. Each of the support frames 57 has a support frame 57, the upper end portion of which is connected to the upper rectangular frame 56, and the lower end portion is connected to the lower side of the rectangular frame, and the lower end portion is connected to the lower side of the rectangular frame. In the state of being disposed, the support frame 57 having the phase 4 λ and the inner body and the same number 1 in the support body rotating shaft 53 is arranged in the substrate entrance and exit direction. A plurality of support rotating shafts 53 are provided in a direction in which the support frame is rotatably supported at both end portions, and a plurality of supporting rotating vehicles are provided in the substrate feeding direction by a combination of 53 in the up and down direction. On top of the array. Further, a plurality of supporting rotating shafts 53 arranged in the substrate feeding direction are combined to form a plurality of substrate supporting portions 52 which are arranged in the vertical direction by a plurality of supporting rotating shafts 53, and a plurality of substrate supporting portions μ are arranged in the vertical direction. . That is, the plurality of support rotation shafts 53 in each group are rotatably supported by the different support frames 57, and are arranged in the same order in the entry and exit directions in the plurality of substrate support portions 52, respectively, and are respectively supported by the same support frame 57. Supported. In the plurality of substrate supporting portions 52, the base of the odd-numbered stages is counted from below, and the support 邠52 is provided in a state in which the substrate support portion 'the lower end of the substrate support portion is shifted in the substrate feeding direction. The plurality of support rotation shafts 53 constituting the plurality of substrate support portions 52 are plural, and the plurality of support rotations 7037 of the adjacent substrate support portions 52 on the Q-- l〇461-PF; Chentf 1η 201000374 = the above-mentioned substrate in the direction in which the substrate is in the same direction, and the same order of arrangement is located at different positions in the direction in which the two substrates enter and exit, and the state of interaction is matched. The plurality of substrate supporting portions 52 are provided in plurality, and the plurality of substrate supporting portions 52 corresponding to the plurality of substrate supporting portions 52 are adjacent to the receiving body in the vertical direction. In the horizontal direction, the end portions on the different sides of the glaze W are connected to each other in the state in which the supporting rotation shafts are connected to each other in the lateral direction, and are provided separately on both sides in the lateral direction of the housing. In the plurality of substrate supporting portions 52, the odd-numbered material-feeding rotating shafts 54 provided corresponding to the odd-numbered substrate support 52 from the lower side are supported by a plurality of sides provided on the side in the lateral direction of the storage body. The frame π is rotatably supported on the outer side and interlocked with one end of each of the plurality of supporting rotating shafts 横 in the lateral direction of the receiving body, corresponding to the even-numbered substrate supporting portion 52 from the lower side. The inter-rotation car for the even-numbered segment is rotatably supported on the outer side by a plurality of support frames 57 provided on the other side in the lateral direction of the storage body, and is coupled to a plurality of supports in series. The other end portion in the lateral direction of each of the housings of the rotary shaft 53 is used. The interlocking rotary shaft 54 is connected to the storage-side coupling device 58 as a magnetic-type coupling device to the branch (four) rotary shaft 53 in a linked manner. Each of the plurality of support rotary shafts 53 is provided with a magnetic-type storage-side driven rotary ϋ 59 on the side end portion or the other end portion of the support body in the lateral direction of the storage body, corresponding to the interlocking 18 7037-10461-PF is provided in a state where the storage-side driven rotor 59 in the rotary shaft 54 is separated from the storage-side driven rotor 59 in a state of being separated from the lower side in the vertical direction. Ghentf 201000374 The magnetic-type storage-side drive rotating body 6G constitutes the storage-side connecting device 58 by the receiving/rotating rotating body 59 and the housing-side driving rotating body 60. Then, as shown in the figure, 'each of the storage side driven rotating bodies (9) and the storage side drive the rotation of the Korean f#β. 1 ± one interlocking output side drive rotating body 44 is the same, which is a cylindrical and different polarity two magnetic pole forming portions larger than the diameter of the rotating shaft provided (the magnetic pole forming portion of the S pole and the magnetic pole of the drain pole) A P-knife is formed in a state in which magnetic poles of different polarities are arranged in a state in which the outer peripheral surfaces are alternately arranged and spirally arranged in the circumferential direction. The interlocking rotary shaft 54 for the odd-numbered stages in the substrate storage container 2 is connected to the interlocking (four) rotation axis 37 in the substrate transfer conveyor 33, and the magnetic-type side connection device 62 can be connected in series, and the even-numbered segments are formed. The linkage used for the rotation axis 5 4 for the beginning of its ". Rich. The output rotation shaft 38' in the substrate conveyance conveyor 33 is formed to be connectable by the magnetic gas type other side connection means 63. The end portion of the substrate transporting carriage on the substrate axis in the direction in which the rotating shaft 54 is moved in and out is provided with a magnetic-type driven rotating body 65, and is provided by the driving rotating body provided in the interlocking output rotating shaft 37. The connecting device 62 of the interlocking rotating shaft 54 for the odd-numbered section, which is formed by the (fourth) rotating body 65, is driven by the output rotating shaft 38, and the driven rotating body of the interlocking rotating shaft 54 for the number of stages of the disk Linking device 63. The magnetic-type driven rotating body 65 is the same as the driving rotating body 64, and is a disk-shaped and different-polarity magnetic pole forming portion having a larger diameter than the interlocking (10) rotating shaft 54 (the magnetic pole forming portion of the 5 pole and the magnetic pole of _) The magnetic poles forming the portions are formed in a state in which the magnetic poles of different polarities are arranged in a state of being arranged in a state in which the outer circumference of the circular shape of the flat surface is arranged in the circumferential direction. In other words, each of the driven rotating bodies 65 of the plurality of driven rotating bodies 65 is disposed in a state in which the adjacent members in the vertical direction overlap with the storage body in the lateral direction. After the substrate storage container 2 is transferred to the substrate loading and unloading portion 6' of the storage rack 5, the substrate transporting conveyor 33 is moved up and down in a state where the substrate transporting table 7 is stopped at a position corresponding to the substrate feeding portion 6. And one of the ten driving rotating bodies 64 provided in the interlocking output rotating shaft 37 and one of the plurality of driven rotating parts (four) provided in the substrate receiving and closing device 4: close to the 'linked output rotating shaft 37 and The plurality of odd-numbered segments of the rotary shaft 54 are interlocked to form a linked connection, or the output rotary shaft 38 and the plurality of even-numbered segments are used for the interlocking rotary (four) 54. The driving rotor 64 of the rotating shaft 37 and the driving rotor 64 provided on the output rotating shaft 38 are provided between the plurality of interlocking rotating shafts 54 and the number of the plurality of engaging rotating bodies 65. One side of the storage body in the lateral direction is alternately disposed on the other side and the height is different, and the interlocking output rotation shaft 37 is interlocked with any one of the plurality of odd-numbered rotation axes 54.雄雄, output money The shaft 38 is in a state in which it is not connected to the plural "even-numbered sections" (four) of the condensing shaft 54, and the output rotation axis == is used for the interlocking rotation. Among them, the interlocking output shaft d becomes the interlocking output rotation shaft 37. A state in which one of the interlocking rotary shafts 54 for a plurality of odd-numbered segments is not coupled with each other is formed in a state of 7〇37-l〇461-PF; One of the 201000374 63 is connected to the connecting device 62 on the side and the connecting device on the other side, so that the two sides are not connected at the same time. Then, the substrate storage container 2 is in a state in which one of the interlocking rotation shafts 54 of the one of the interlocking rotation shafts 54 and the substrate conveyance conveyor 33 is interlocked with the rotation axis 37 or the output rotation shaft 38. When the electric motor 34 rotates the interlocking output slave rotation shaft 37 and the output rotation shaft 38 _ ^ ^ by the electric motor 34, the connection device for the interlocking output side rotation shaft 37 is formed by one side, and the clothes holder 62 is bitten. The non-contact form is connected in series or the root-to-root (four) rotating shaft 54 that is connected to the output rotating shaft 38 in a non-contact manner with the other side W transporting device 63, and the interlocking rotating shaft 54 is connected to the storage side. The device 58 rotates in a plurality of support rotation shafts 53 that are linked in a non-contact manner. In the state in which the substrate support portion 52 is held by a plurality of support annular bodies ...a provided in the plurality of support rotary shafts 53, the substrate support portion 52 is formed to have a structure in which the support substrate 1 is placed, and a plurality of conveyance rotations are formed. The shaft % is rotated to form a structure in which the support substrate 1 is placed. In other words, as shown in Fig. 13, the substrate transporting unit 6 of the substrate storage container 2 is stopped, and the substrate transporting carriage 7 is stopped at the position corresponding to the substrate = 46. In this state, the substrate transporting conveyor is lifted and lowered. The substrate transport unit 33 is connected to a substrate support unit 52 that serves as a substrate to and from the substrate storage container 2, and the electric motor 34 provided on the substrate transport conveyor 33 is driven forward and backward to transport the substrate. The plurality of conveyance rotary shafts 36 of the conveyor 33 and the plurality of support rotary shafts 53 of the substrate support portion 52 of the substrate are rotated forward and backward, thereby taking the substrate 1 one by one from the substrate storage container 2 to the substrate storage container 2 Substrate conveyance 7〇37-l〇461-PF;chentf 21 201000374 The conveyer 33 is further accommodated in the substrate storage container 2 in one piece from the substrate conveyance conveyor 33. [Second Embodiment] Hereinafter, a second embodiment of the present invention will be described with reference to the drawings. The second embodiment is different from the first embodiment described above except for the difference in the configuration of the substrate transport conveyor 33 and the substrate storage unit 2. The same elements as those of the first embodiment or the elements having the same functions are given the same reference numerals (4), and the description thereof is omitted, and the structure different from the first embodiment will be mainly described. In the case of the substrate transport conveyor 33, as shown in Figs. 14 and 15, the output rotary shaft 38 is a pair of the carriage frames 39 arranged in a state of extending in the front-rear width direction of the carriage. One of them is rotatably supported outside the interlocking output rotation shaft 37. Then, in a state in which the rotary body 44 is driven to be separated from the interlocking output side drive rotating body at a position corresponding to the interlocking output side of the output rotary shaft 38, and is overlapped in the vertical direction, The magnetic-type output-side driven rotating body 49' constitutes an output-side connecting device 驱动 with the driving-side driven rotating body 44 and the output-side driven rotating body 49. The substrate storage container 2 will be described as shown in Figs. 16 and 17 As shown in the figure, a plurality of interlocking rotation shafts 54' corresponding to the plurality of substrate support portions 52 are connected to the same side end portions of the support rotation shaft 53 in the lateral direction of the storage body. The adjacent members in the vertical direction are disposed in a state in which the storage body is alternately disposed at different positions in the lateral direction of the storage body, and are collectively disposed on one side in the lateral direction of the container. 7037-10461-PF; Chentf 22 201000374 Multiple substrate support In the portion 52, the interlocking rotating car for the odd-numbered segment provided corresponding to the odd-numbered segment of the substrate supporting portion 52 is 54-way from the side in the lateral direction of the housing. A plurality of support frames 57 are rotatably supported on the outer side thereof, and are coupled to the side end portion of the lateral direction of the storage body in each of the plurality of support rotary blades 53 and are calculated from below. The interlocking rotary shaft 54 for the even-numbered segment of the substrate support portion 52 corresponding to the even-numbered segment is rotatably supported by the plurality of support frames 57 provided on one side in the lateral direction of the storage body for the odd-numbered segment The interlocking rotation shaft 54 is also externally coupled to one end portion of the support rotation shaft 53 of the plurality of support rotation shafts 53 in the lateral direction of the storage body. [Other Embodiments] (1) In the above-described first embodiment, the plurality of interlocking rotary shafts 54 corresponding to the plurality of substrate supporting portions 52 are connected to each other in the lateral direction of the storage body with respect to the upper and lower sides of the plurality of substrate supporting portions 52. In the state in which the end portions on the different sides of the rotating shaft 5 3 are disposed separately on both sides in the lateral direction of the receiving body, in the second embodiment, a plurality of interlocking rotations corresponding to the plurality of substrate supporting portions 52 are provided. Axis 54, in the collection In the state in which the body page width * direction is connected to the end portion on the same side of the support rotation shaft 53 in the interlocking direction, and the adjacent persons in the vertical direction are placed in different positions in the horizontal direction of the storage body, the state is alternately arranged. The plurality of interlocking rotary shafts 54' corresponding to the plurality of substrate support portions 52 are collectively disposed in the lateral direction of the storage body, and are connected to each other in the support direction: the rotation shaft 5 3 is the same. In the state of the end portion of the side and in the up-and-down direction, it is adjacent to 7〇37-l〇46l-PF; and the Chentf 201000374 is placed in a row in a state in which the storage body is disposed at the same position in the lateral direction of the storage body. In the above-described embodiment, the plurality of interlocking rotary shafts 54 for supporting the plurality of substrates are disposed separately on both sides in the lateral direction of the housing or interactively. It is arranged in two columns, but it can be arranged in three or more columns. (2) In the above-described first and second embodiments, a plurality of the plurality of substrate supporting portions 52 constituting the plurality of substrate supporting portions 52 are supported by the plurality of supporting rotating shafts 53 and are supported by the substrate supporting portion 52 in the vertical direction. In the state in which the order of the substrates in the rotating shaft 53 is the same in the substrate in the boarding and exiting direction, the arrays are alternately arranged one after another, but a plurality of complementary rotating shafts 53 of the plurality of substrate supporting portions 52 are arranged. In the substrate feeding direction of the plurality of supporting rotating shafts 53 of the substrate supporting portion 52 adjacent to each other in the vertical direction, the arrangement order is the same in the substrate in the direction in which the substrate is in the same position, and is arranged in the vertical direction. In a row. Also, it is also possible to arrange in three or more columns. (3) In the first and second embodiments, the connecting device that connects the interlocking rotary shaft 54 to the branch (four) rotating shaft (f) is a magnetic air type connecting device 58, but the interlocking rotary shaft 54 is interlocked with A gear type connecting device that supports the rotation shaft 53 may be a gear-type coupling device. (4) In the above-described first and second embodiments, the supporting rotating body is provided in a state in which both ends are rotatably supported by the housing 51, and the supporting rotating body 53 is provided at one end by the housing 51. It can also be set in a rotatable support state. 7〇37-l〇461-PF; Chentf 24 201000374 (5) In the first and second embodiments described above, the substrate transporter is placed on the substrate transporting carriage 7 including the cart body 32 and the substrate transport conveyor 33. 'But the board|substrate conveyance apparatus has the structure of the fixed-frame fixed to the floor, and the board|substrate conveyance conveyor which can be raised and raised with respect to this fixed-frame, and [FIG. Figure 2 is a front elevational view of the substrate processing apparatus. Figure 3 is a side view of the substrate processing apparatus. Fig. 4 is a perspective view of the substrate transport conveyor and the substrate storage container. Fig. 5 is a perspective view of the substrate transport conveyor. Figure 6 is a cross-sectional elevational view of the substrate handling conveyor. Fig. 7 (a) and (b) are views showing a state in which the substrate conveyance conveyor and the substrate storage container are linked to each other in a side. Fig. 8 (a) and (b) are views showing a state in which the substrate conveyance conveyor and the substrate storage container are linked to each other in the other side. ° Fig. 9 is a perspective view of the substrate storage container. Fig. 10 is a front view of the substrate storage container. Fig. 11 is a side view of the substrate storage container. Fig. 12 is a schematic view showing the interlocking rotation shaft. Fig. 13 (a) and (b) are action diagrams showing a state in which a substrate is transported. Fig. 14 is a view showing a state in which the substrate transfer conveyor of the second embodiment is connected to the substrate storage container in a state in which the substrate transfer conveyor of the second embodiment is 7037-10461-PF; Fig. 16 is a front elevational view showing the substrate storage container of the second embodiment. Fig. 17 is a side view of the substrate storage container of the second embodiment. [Description of main component symbols] 1 to substrate; 2 to substrate storage container; 3 to transport conveyor; 4 to storage unit; 5 to storage rack; 6 to substrate access unit; 7 to substrate transport trolley; 8 to storage crane; - - clean space; 14-, grille floor; 15, - air filter; 16 ~ suction chamber; 17, - chamber chamber; 18 - - ventilation fan; 19 - - circulation road; 20-. External air intake flow path; 21--pre-router; 23--purified air ventilation device; 7037-10461-PF; Chentf 26 201000374 - 2 5~ walking track; 2 6~ walking trolley; 27~ lifting column; Lifting table; 29~ article transfer device; 31~ guide rail; 32~ trolley body; 33~ substrate transport conveyor; 34~ electric motor; 3 5~ drive rotary shaft; 3 6~ transport rotary shaft; 36a~ Application ring; 37~ linkage output rotation shaft; 38~ output rotation shaft; 39~ conveyor frame; #41~ linkage output side connection device; i 42~ conveyance side connection means; 44~ linkage output side drive rotation body; 4 6 to the transport side drive rotating body; 47 to the transport side driven rotating body; 48 to the output side drive rotating body; 49 to the output side driven rotating body; 64 to the magnetic type driving rotating body; 51 to the receiving body; 7037-10461-PF; Chentf 2Ί. 201000374 52~ Substrate support; 53~ Support rotary shaft; 5 3a^ - Support ring; 5 4~ Rotary shaft for linkage; 5 6~ Rectangular frame; 57~ Support frame; 58~ Storage side coupling device; 5 9~ accommodating side driven rotating body; 6 0~ accommodating side driving rotating body; 62~ connecting device; 63~ connecting device; 6 4~ driving rotating body; 65~ driven rotating body. \ 7037-10461-PF; Chentf 28