TW200951476A - A vibration sensor and a system to isolate vibrations - Google Patents

A vibration sensor and a system to isolate vibrations

Info

Publication number
TW200951476A
TW200951476A TW098116080A TW98116080A TW200951476A TW 200951476 A TW200951476 A TW 200951476A TW 098116080 A TW098116080 A TW 098116080A TW 98116080 A TW98116080 A TW 98116080A TW 200951476 A TW200951476 A TW 200951476A
Authority
TW
Taiwan
Prior art keywords
vibration sensor
isolate vibrations
base
resilient element
reference mass
Prior art date
Application number
TW098116080A
Other languages
English (en)
Inventor
Petrus Rufus Fraanje
Niek Rijnveld
Den Dool Teunis Cornelis Van
Original Assignee
Tno
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tno filed Critical Tno
Publication of TW200951476A publication Critical patent/TW200951476A/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F7/00—Vibration-dampers; Shock-absorbers
    • F16F7/10—Vibration-dampers; Shock-absorbers using inertia effect
    • F16F7/1005—Vibration-dampers; Shock-absorbers using inertia effect characterised by active control of the mass

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Vibration Prevention Devices (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
TW098116080A 2008-05-15 2009-05-15 A vibration sensor and a system to isolate vibrations TW200951476A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP08156276A EP2119938A1 (en) 2008-05-15 2008-05-15 A vibration sensor and a system to isolate vibrations.

Publications (1)

Publication Number Publication Date
TW200951476A true TW200951476A (en) 2009-12-16

Family

ID=40010556

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098116080A TW200951476A (en) 2008-05-15 2009-05-15 A vibration sensor and a system to isolate vibrations

Country Status (4)

Country Link
US (1) US20110126630A1 (zh)
EP (2) EP2119938A1 (zh)
TW (1) TW200951476A (zh)
WO (1) WO2009139628A1 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI447997B (zh) * 2010-12-16 2014-08-01 Nat Applied Res Laboratories 衰減器
TWI670924B (zh) * 2018-07-02 2019-09-01 義守大學 振動控制系統

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2075484A1 (en) * 2007-12-31 2009-07-01 Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO An active vibration isolation system having an inertial reference mass
EP2261530A1 (en) * 2009-06-12 2010-12-15 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO An active vibration isolation and damping system
US8640545B2 (en) * 2009-10-05 2014-02-04 Pcb Piezotronics, Inc. Vibration sensor with mechanical isolation member
EP2668485A1 (en) * 2011-01-30 2013-12-04 Aquarius Spectrum Ltd. Method and system for leak detection in a pipe network
DE102013201081A1 (de) * 2013-01-24 2014-03-13 Carl Zeiss Smt Gmbh Vorrichtung zur Lagerung eines optischen Bauelements
WO2017178943A1 (es) * 2016-04-13 2017-10-19 Universidad Eafit Dispositivo de aislamiento sísmico para estructuras esbeltas

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US5750897A (en) * 1995-06-14 1998-05-12 Canon Kabushiki Kaisha Active anti-vibration apparatus and method of manufacturing the same
US6392741B1 (en) * 1995-09-05 2002-05-21 Nikon Corporation Projection exposure apparatus having active vibration isolator and method of controlling vibration by the active vibration isolator
US5931441A (en) * 1996-02-29 1999-08-03 Nikon Corporation Method of isolating vibration in exposure apparatus
JPH09326362A (ja) * 1996-04-05 1997-12-16 Nikon Corp 除振装置及び露光装置
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JPH1089403A (ja) * 1996-09-10 1998-04-07 Nikon Corp 防振装置
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US5979242A (en) * 1998-04-20 1999-11-09 Hobbs Engineering Corporation Multi-level vibration test system having controllable vibration attributes
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JP4416250B2 (ja) * 2000-02-09 2010-02-17 キヤノン株式会社 アクティブ除振装置及び露光装置
JP2001297960A (ja) * 2000-04-11 2001-10-26 Nikon Corp ステージ装置および露光装置
US6570298B2 (en) * 2000-05-09 2003-05-27 Tokkyokiki Co., Ltd. Vibration control device and driving method thereof
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DE10043128C2 (de) * 2000-08-31 2003-05-08 Univ Hannover Tilgervorrichtung zur Absorption einer unerwünschten Erregung
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JP3902942B2 (ja) * 2001-11-13 2007-04-11 キヤノン株式会社 除振装置及びその制御方法、並びに該除振装置を有する露光装置
US20040100007A1 (en) * 2002-11-21 2004-05-27 Nikon Corporation Vibration damping devices and methods
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EP1711724A1 (en) 2004-01-26 2006-10-18 Koninklijke Philips Electronics N.V. Actuator arrangement for active vibration isolation using a payload as an inertial reference mass
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EP1865220B1 (de) * 2006-06-10 2014-03-19 Integrated Dynamics Engineering GmbH Aktives Schwingungsisolationssystem mit verbesserter Wirkung gegen seismische Schwingungen
TWI467099B (zh) * 2009-12-04 2015-01-01 Fu Cheng Wang 一種雙層平台減震裝置及其減震的方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI447997B (zh) * 2010-12-16 2014-08-01 Nat Applied Res Laboratories 衰減器
TWI670924B (zh) * 2018-07-02 2019-09-01 義守大學 振動控制系統
US10598688B2 (en) 2018-07-02 2020-03-24 I-Shou University Oscillation control system and oscillation control method

Also Published As

Publication number Publication date
EP2119938A1 (en) 2009-11-18
EP2286110A1 (en) 2011-02-23
EP2286110B1 (en) 2013-10-16
US20110126630A1 (en) 2011-06-02
WO2009139628A1 (en) 2009-11-19

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