TW200951388A - Heat treatment apparatus - Google Patents

Heat treatment apparatus

Info

Publication number
TW200951388A
TW200951388A TW98107005A TW98107005A TW200951388A TW 200951388 A TW200951388 A TW 200951388A TW 98107005 A TW98107005 A TW 98107005A TW 98107005 A TW98107005 A TW 98107005A TW 200951388 A TW200951388 A TW 200951388A
Authority
TW
Taiwan
Prior art keywords
air
heat treatment
treatment apparatus
supply system
exhaust system
Prior art date
Application number
TW98107005A
Other languages
Chinese (zh)
Inventor
Kenji Ashida
Kenji Kuwata
Original Assignee
Espec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Espec Corp filed Critical Espec Corp
Publication of TW200951388A publication Critical patent/TW200951388A/en

Links

Landscapes

  • Furnace Details (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)

Abstract

The invention provides a heat treatment apparatus capable of suppressing heat treatment chamber pollution by sublimate generated from heat treatment of heated object and cooling the generation gas. The heat treatment apparatus comprises a heat treatment chamber, a separation slot, an air exhaust system, an air supply system and a wind delivery device portion. The air exhaust system and the air supply system are connected to the separation slot through independent systems. By operating the blower of the air delivery device through the heat treatment apparatus, air is introduced into the separation slot to generate a swirl through the air exhaust system and the air supply system, and the high temperature air is cooled by mixing the high temperature air from the air exhaust system and the low temperature air supply system, thus the generation air in the high temperature air sublimates and the sublimate is recovered.
TW98107005A 2008-03-28 2009-03-04 Heat treatment apparatus TW200951388A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008086816A JP2009236471A (en) 2008-03-28 2008-03-28 Heat treatment device

Publications (1)

Publication Number Publication Date
TW200951388A true TW200951388A (en) 2009-12-16

Family

ID=41193007

Family Applications (1)

Application Number Title Priority Date Filing Date
TW98107005A TW200951388A (en) 2008-03-28 2009-03-04 Heat treatment apparatus

Country Status (3)

Country Link
JP (1) JP2009236471A (en)
CN (1) CN101545727A (en)
TW (1) TW200951388A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101310242B1 (en) * 2012-04-25 2013-09-24 (주)옥산아이엠티 Exhaust system of heat treatment apparatus for producing cathode active meterial for secondary lithium ion battery
JP6804309B2 (en) * 2017-01-12 2020-12-23 東京エレクトロン株式会社 Heat treatment equipment and temperature control method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2971771B2 (en) * 1995-01-23 1999-11-08 タバイエスペック株式会社 Heat treatment equipment with sublimate removal function
JP2005049058A (en) * 2003-07-31 2005-02-24 Koyo Thermo System Kk Heat treatment equipment
JP2006198463A (en) * 2005-01-18 2006-08-03 Jfe Steel Kk Cooling apparatus of gas depositing solid
JP4372806B2 (en) * 2006-07-13 2009-11-25 エスペック株式会社 Heat treatment equipment

Also Published As

Publication number Publication date
CN101545727A (en) 2009-09-30
JP2009236471A (en) 2009-10-15

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