200944773 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種藉由音圈民、去& 固定於其上之受檢體施加振動的丨及 【先前技術】 Φ 警 八相先Γ ΐ泛利用記载於日本特開第2_-219196號 么報之裝置樣之電動型振動測試 (例如上下方向）對工作台及固定於ί/、在&疋方向 振動。電動型振動測試裝置係將安農；固 移動部的可移動線圈配置於直流磁場中。電沒泣二^了 動線圈時，對可移動線圈施加作用於線圈轴二：： =力。藉由該勞侖兹力可使可移動部移動於可 : 的軸方向（音圈馬達）。因為勞衫力之大小與施2 可移動線圈之電流的大小成正比，所以藉由對可:； 圈供給變動電流’可使勞料力之大小周期性動線 使工作台以父流電流之頻率振動。電而 ，系藉由供給至可移動線圈之變動電 =作==且對可移動線圈施4 行振動測Ϊ別疋數百〜數千赫兹以上之高頻率下Ϊ 荷重置中，需要產生與- 台及受檢體浮起:H了於使可移動部、工作 靜何重（亦即與可移動部及受檢體之 200944773 重量平衡的靜荷重）、以及用於使可移動部振動之變動 荷重的合成量。為了產生此種勞侖茲力，需要將對應於 靜荷重之直流成分與對應於變動荷重之交流成分這兩 者的合成量的電流施加於可移動線圈。 如前述，電動型振動測試裝置適於高頻下之振動測 試。需要在高頻下振動測試的受檢體，有引擎架及引擎 用之防振橡膠等。因為係在增加了引擎之荷重的狀態下 使用此種受檢體，所以最好在施加一定之靜荷重的狀態 ❹ 下進行振動測試。為了在電動型振動測試裝置對受檢體 施加靜荷重，例如為從上按壓工作台上之受檢體以施加 靜荷重的構成等。 如此，對受檢體邊施加大的靜荷重邊進行振動測試 時，除了可移動部、工作台及受檢體之重量外，亦需要 以勞命茲力支撐前述靜荷重。因而，邊將大的靜荷重施 加於受檢體邊進行振動測試時，需要增大流入可移動線 圈之電流的直流成分。為了實現此種構成，需要複雜且 大型之電源電路，又，可移動線圈亦是需要大型化以承 ® 受大電流。亦即，在電動型振動測試裝置中，對受檢體 邊施加靜荷重邊施加振動時，振動測試裝置之尺寸、重 量及耗電遠比受檢體之尺寸及振動的振幅大。因而，藉 由電動型振動測試裝置對受檢體邊施加靜荷重邊進行 振動測試並不切實際，且事實上不可能。 【發明内容】 本發明係為了解決前述問題而形成，其目的為提供 200944773 一種電動型振動測試裝置，其電源電路及可移動線圈無 須大型化’可對受檢體邊施加靜荷重邊實施振動測試。 本發明之實施形態的電動型振動測試裝置具有：空 氣彈簧’其係從固定部之下方支撐測試裝置之可移動 部；及反作用力板，其係安裝於固定部，以將受檢體夾 在與測試裝置之工作台之間。宜進一步具有空氣壓控制 手段’其係控制空氣彈簧内之空氣壓。又，電動型振動 測試裝置進一步具有荷重計測手段，其係計測施加於受 檢體之荷重，空氣壓控制手段依據荷重計測手段之計測 結果，而控制空氣彈簧内之空氣壓。 如此，在本發明之實施形態中，可藉由以空氣彈簧 在可移動部上施加向上之荷重，而在工作台與反作用力 板之間，於受檢體上施加壓縮靜荷重。因此，依據本發 明之實施形態，電源電路及可移動線圈無須大型化，可 實現一種在受檢體上邊施加靜荷重邊實施振動測試之 電動型振動測試裝置。又，可藉由控制空氣彈簧内之办 氣壓，而調整施加於受檢體之靜荷重的大小。又，因^ 係依據荷重計測手段之計測結果調整空氣彈簧内之^ 氣壓，所以可將希望大小之靜荷重正確地施力:於受ς 體。 再者’在本發明之實施形態的電動型振動測試裝置 中，空氣壓控制手段進-步具有：空_，其係與空氣 ，簧連接’並且比其容積充分大；空氣源，其係供給空 氣到空氣槽；及調節手段’其係設於空氣源與空氣槽之 間。 200944773 調節手段具有··電動氣體調節器（electr〇 pneumatic regulator) ’其係將輸入口連接於空氣源侧；及精密調節 器，，係將輸入口連接於空氣源側，並且將輸出口連接 於空氣槽；藉由電動氣體調節器之輸出口的空氣壓，而 控制精密調節器之輸出口的空氣壓。 ’、 ^ 如此，在本發明之實施形態中，因為將大容量之空 氣槽連接於空氣彈簧，所以，即使空氣彈簧之容積有若 干，化’其變化量對空氣彈簧與空氣槽之合併容積而言 非常小。因此’即使以音圈馬達使可移動部振動，空氣 彈簧之内壓幾乎不變化，而可將一定之靜荷重持續施加 於受檢體。又，電動氣體調節器係可從電腦等之電子機 器輕易地控制輸出口之空氣壓，另外，精密調節器即使 大流量之空氣從輸入口流入輸出口時，仍可依據輸入於 引導口（pilot port)之空氣壓而精密地控制輸出口之空氣 壓。因此，如本發明之實施形態，即使是大流量，仍可 使該空氣壓成為精密地控制空氣壓力之精密調節器的 輸出口之壓力’藉此精密地控制空氣槽及空氣彈簧内之 空氣壓。 又’更宜為在電動氣體調節器及精密調節器之輸入 口與空氣源之間設置前段調節器，其用於將輸入於電動 氣體調節器及精密調節器之輸入口的空氣壓力概略保 持一定。 又，較佳為，線性引導器具有··軌條，其係固定於 可移動部與固定部之一方；及活動塊(runner block)，其 係固定於另一方’並且與軌條卡合，而可沿著執條移 200944773 動；活動塊具有：凹部，其係包園轨 部中沿著活動塊之移動方向而形成.厂，屢，其係在凹 成於活動塊之内部，以與前述溝形虑避開路徑，其係形 而與溝在移動方向之兩端連繫；閉迴路之方式， 封閉迴路中循環並且位於溝時，與軌^滾珠、，其係在 成時，可使活動塊不致晃動且順利二二接。為此種構 即，可使工作台順利地振動。 /σ者執條移動。亦200944773 VI. Description of the Invention: [Technical Field] The present invention relates to a method of applying vibration by a voice coil, a subject to which a subject is attached, and a prior art Φ 警 八 Γ The electric vibration test (for example, the vertical direction) of the device described in Japanese Patent Laid-Open No. 2_-219196 is used to vibrate the table and the λ/Motor. The electric vibration test device is configured to arrange the movable coil of the solid moving portion in a DC magnetic field. When the coil is turned on, the movable coil is applied to the coil shaft 2:: = force. By the Lorentz force, the movable portion can be moved in the axial direction (voice coil motor). Because the size of the pull-up force is proportional to the magnitude of the current of the movable coil, the supply of the variable current by the coil can be used to periodically move the force of the work force to make the workbench with the parent current. Frequency vibration. Electric, by the variable current supplied to the movable coil = = = and 4 vibrations are applied to the movable coil, and the load is reset at a high frequency of several hundred to several kilohertz or more. - The table and the object are floated: H is used to make the movable part, work hard (that is, the static load balance with the weight of the movable part and the subject's 200944773), and to vibrate the movable part The amount of synthesis of the varying load. In order to generate such a Lorentz force, it is necessary to apply a current corresponding to the combined amount of the DC component of the static load and the AC component corresponding to the variable load to the movable coil. As described above, the electric vibration tester is suitable for vibration test at high frequencies. The subject to be vibrated at high frequency, the engine frame and the anti-vibration rubber for the engine. Since the test object is used in a state where the load of the engine is increased, it is preferable to perform the vibration test under a state in which a certain static load is applied. In order to apply a static load to the subject in the electric vibration test apparatus, for example, a configuration in which a static load is applied by pressing the subject on the table from above is applied. As described above, when the vibration test is performed while applying a large static load to the subject, in addition to the weight of the movable portion, the table, and the subject, it is necessary to support the static load by the labor force. Therefore, when a large static load is applied to the subject for vibration test, it is necessary to increase the DC component of the current flowing into the movable coil. In order to realize such a configuration, a complicated and large power supply circuit is required, and the movable coil also needs to be enlarged to receive a large current. That is, in the electric vibration test apparatus, when vibration is applied while applying a static load to the subject, the size, weight, and power consumption of the vibration test apparatus are much larger than the magnitude of the subject and the amplitude of the vibration. Therefore, it is impractical to perform a vibration test by applying a static load to the object by the electric vibration tester, and it is practically impossible. SUMMARY OF THE INVENTION The present invention has been made to solve the aforementioned problems, and an object thereof is to provide an electric vibration test apparatus of 200944773, in which a power supply circuit and a movable coil are not required to be enlarged, and a vibration test can be performed while applying a static load to a subject. . An electric vibration test apparatus according to an embodiment of the present invention includes: an air spring that supports a movable portion of the test device from below the fixed portion; and a reaction force plate that is attached to the fixed portion to sandwich the object Between the workbench and the test device. It is preferable to further have an air pressure control means 'which controls the air pressure in the air spring. Further, the electric vibration test apparatus further includes load measuring means for measuring the load applied to the subject, and the air pressure control means controls the air pressure in the air spring based on the measurement result of the load measuring means. As described above, in the embodiment of the present invention, the compressive static load can be applied to the subject between the table and the reaction force plate by applying an upward load to the movable portion by the air spring. Therefore, according to the embodiment of the present invention, the power supply circuit and the movable coil are not required to be enlarged, and an electric vibration test apparatus for performing vibration test while applying a static load on the object can be realized. Further, the magnitude of the static load applied to the subject can be adjusted by controlling the air pressure in the air spring. Further, since the pressure in the air spring is adjusted according to the measurement result of the load measuring means, the static load of the desired size can be accurately applied to the receiving body. Further, in the electric vibration test apparatus according to the embodiment of the present invention, the air pressure control means further includes: empty _, which is connected to the air and the spring, and is sufficiently larger than the volume thereof; the air source is supplied The air to the air tank; and the adjusting means ' is disposed between the air source and the air tank. 200944773 The adjustment means has an electric gas regulator (electr〇pneumatic regulator) 'which connects the input port to the air source side; and a precision regulator that connects the input port to the air source side and connects the output port to The air tank controls the air pressure at the output of the precision regulator by the air pressure at the output of the electric gas regulator. Thus, in the embodiment of the present invention, since the large-capacity air groove is connected to the air spring, even if the volume of the air spring is plural, the amount of change is the combined volume of the air spring and the air groove. The words are very small. Therefore, even if the movable portion is vibrated by the voice coil motor, the internal pressure of the air spring hardly changes, and a certain static load can be continuously applied to the subject. Moreover, the electric gas regulator can easily control the air pressure of the output port from an electronic device such as a computer, and the precision regulator can be input to the pilot port even if a large flow of air flows from the input port to the output port (pilot) The air pressure of the port) precisely controls the air pressure at the output port. Therefore, according to the embodiment of the present invention, even at a large flow rate, the air pressure can be made to be the pressure of the output port of the precision regulator that precisely controls the air pressure, thereby precisely controlling the air pressure in the air tank and the air spring. . Moreover, it is more preferable to provide a front stage regulator between the input port of the electric gas regulator and the precision regulator and the air source, which is used to roughly maintain the air pressure input to the input ports of the electric gas regulator and the precision regulator. . Further, preferably, the linear guide has a rail which is fixed to one of the movable portion and the fixed portion, and a runner block which is fixed to the other side and engages with the rail. And can move along the implementation of the 200944773 movement; the movable block has: a concave portion, which is formed in the direction of the movement of the movable block in the rail portion of the package. The factory is repeatedly recessed into the inside of the movable block to The groove shape avoiding path is connected to the groove at both ends of the moving direction; in the closed circuit manner, when the closed circuit circulates and is located in the groove, the ball is formed, and the system is at the time of completion. Make the active block not shake and smoothly connect. For this configuration, the table can be smoothly vibrated. The /σ person moves the bar. also
分別μα μ 成有四個封閉迴路，且 刀別配置於四個封閉迴路中之二個封閉 且 珠相對活動塊之徑向方向具有概略±45产 2之滾 =置於其他二個封閉迴路之溝的滚“對=動： =反徑向方向具有概略±45度之接觸角。為此種二成 為2動塊分別在徑向方向、反徑向方向及橫方向可承 又荷重，即使前述方向之大荷重從方螺紋經由滾子施 ^於居動塊’活動塊仍减破損’又，可沿著軌 $移動。X ’線性引導器宜具有複數個由執條及活動塊 成之組’這些由軌條與活動塊構成之組概略等間隔地 配置於將工作台之中心作為中心的圓周上。 【實施方式】 以下’就本發明之實施形態，使用圖式詳細作說 明。第一圖及第二圖係分別顯示本實施形態之電動型振 動測試裝置的前視圖及俯視圖。又，第三圖係第二圖之 I_I剖面圖。 如第一圖所示，本實施形態之電動型振動測試I置 7 200944773 上丹有固定 方向之可移^部^ β Τ疋# 1G，與驅動於固定部垂直 台31。在卫作々。在可移動部20之上端固定有工作 择i蕃说二1之上固定有工件保持槿侏32 ,力铉 工 工There are four closed loops respectively, μα μ, and the cutters are arranged in two closed loops, and the beads are in the radial direction of the movable block with a rough ±45 production 2 roll = placed in the other two closed loops The groove of the groove is “pair=moving:=the reverse radial direction has a contact angle of ±45 degrees. In general, the two moving blocks can bear the load in the radial direction, the reverse radial direction and the transverse direction, even if the above The large load in the direction is applied from the square thread to the moving block via the roller, and the movable block is still damaged. It can be moved along the rail $. The X' linear guide should have a plurality of groups of active and active blocks. The above-described group of the rails and the movable blocks are arranged at equal intervals on the circumference centering on the center of the table. [Embodiment] Hereinafter, an embodiment of the present invention will be described in detail using the drawings. The front view and the plan view of the electric vibration test apparatus according to the present embodiment are respectively shown in the figure and the second drawing. The third drawing is a cross-sectional view of the I_I of the second figure. As shown in the first figure, the electric type of the present embodiment. Vibration test I set 7 20094477 3 Shangdan has a fixed direction of the movable part ^ β Τ疋 # 1G, and is driven to the fixed part of the vertical stage 31. In the Wei Zuo. At the upper end of the movable part 20 is fixed with a working choice i Fan said two 1 Fixed workpiece holding 槿侏32, strong workman
件保持構件i 之上圓疋有工件保持構件32 ,在該 件保持構件上固定有工件（受檢體）W 。亦即，在 〇 ❿ 部20相對固;^女裝工件W，其次，藉由使可移動 工件保持構件往返運動，可使工件W振動。另外， 工件W之尺寸係拆裝自由地固定於工作台31，可依 32。 、及種類而適宜選擇適切之工件保持構件 藉由轴14而有強固地固定於基座B之框架1卜與 示，可移動部2:於該框架11的筒狀體12。如第三圖所 在筒=之下部收納於該筒狀體12之内部。 反作用力框架13 ϋ㈣定有用於從上按壓工件W的 ϋ 固定於M狀體12之底板…；焊接於 吐c之上’且伸展於垂直方向的一對側板13a ;及 以衡接該-對侧板13a之各個上端的方式，而焊接於侧 板13a之反作用力板13b。如第一圖所示在側板i3a 之底面狀有間隔物34，而藉由該間隔物34與工件保 持構件32夾著工件w。又，在間隔物34之下部安裝有 測力器（load cell)33，藉此，可計測施加於工件w之垂 直方向的壓縮荷重。間隔物34拆裝自由地固定於反作 用力板13b’並可依工件w之尺寸及種類而適宜地選擇 適切之間隔物34。 其次，就用於將可移動部20驅動於垂直方向的機 8 200944773 構說明於下。如第三圖所示，可移動部20具有漸縮 筒（tapered cylinder)形狀之可移動框架22，與固定於可 移動框架22之上端的頂板21。在頂板21之上，藉由> 數個桿(bar)26而固定工作台31。 货 在可移動框架22之下端’藉由可移動線圈保持構 件27而安裝有可移動線圈51。可移動線圈51與可移動 框架22概略同轴地配置。 又’在固定部10之筒狀體12的内部設有與筒狀體 12同軸地形成之圓筒形狀的内侧磁極15。内侧磁極 之外徑比可移動線圈51之内徑小’可移動線圈51配置 於内側磁極15之外周面與筒狀體12之内周面之間。 在筒狀體12之内周面設有凹部12a，在該凹部12a 之内部安裝有固定線圈52。在此，筒狀體12及内側磁 極15均由磁性材料而形成’直流電流流入固定線圈μ 時，可在可移動線圈51之半徑方向發生磁場。 在該狀態下’電流流入可移動線圈51時，在可移 動線圈51之軸方向，亦即在垂直方向發生勞命兹力， 可將可移動部20驅動於垂直方向。在本實施形態之電 動型振動測試聢置1中，對可移動線圈51供給^含交 流成分之電流’使可移動部20在垂直方向往返運動， 並使工作台31上之工件W沿著垂直方向而振動。 在本實施形態中，藉由空氣彈簧61從下支撐可移 動部20及工件W。空氣彈簧61收納於内侧磁極15之 中。又，藉由從空氣彈簧61之上端往垂直上方伸展的 連結桿23而連結空氣彈簧61與可移動框架22。如第三 200944773 圖所示，連結桿23通過可移動框架22之中，而到達可 移動框架22之上端，並藉由伸展於半徑方向之複數支 樑24，而連結可移動框架22之内周面與連結桿23。 另外，符號25係支撐連結桿23不使其傾倒的軸承。 在本實施形態中，使用空氣彈簧61係為了從下支 撐可移動部20，並將可移動部20維持在指定高度。進 一步，工件W夾在空氣彈簧61與反作用力板13b之間， 可藉由使空氣彈簧61之内壓上昇，在工件W上施加垂 © 直方向之壓縮荷重。為了該目的，本實施形態中，可控 制空氣彈簧61之内壓，亦即可控制空氣彈簧61施加於 工件W的荷重。 就用於控制空氣彈簧61之内壓的機構說明於下。 第四圖係顯示本實施形態中之内壓控制機構60的氣壓 迴路。如第四圖所示，空氣彈簧61從壓縮機等空氣源S 供給空氣，在空氣源S與空氣彈簧61之間設有過濾器 調節器62、精密調節器65及空氣槽66。 過濾器調節器62從空氣源S供給之空氣中除去塵 ® 埃及水分等，並且調整從其輸出口排出之空氣的壓力。 在過濾器調節器62之輸出口連接著氣壓開關63、 電動氣體調節器64及精密調節器65。電動氣體調節器 64係可依來自控制器2 (後述）之控制而調整輸出壓的 調節器。電動氣體調節器64之輸出口連接於精密調節 器65之引導口。亦即，電動氣體調節器64之輸出口成 為藉由精密調節器65之引導口而閉塞的狀態，其間之 管路的空氣不流入，而僅將靜壓施加於精密調節器65 200944773 之引導口。 精密調節器65可藉由輸入於引導口之空氣控制内 部之閥門，以精密地調整其輸出口之壓力與引導口之壓 力一致。又，因為可以較小之壓力驅動精密調節器65 之閥門，所以引導口被施加過濾器調節器62之出口壓 作為背麼。精密調節器65之輸出口連接於空氣槽66。 精密調節器65即使於空氣從輸入口流入輸出口 時，仍可將輸出口之靜壓精密地控制成引導口之壓力。 ❿ 因此，藉由將空氣不致從輸入口流入輸出口之電動氣體 調節器64的輸出口連接於精密調節器65之引導口，可 將空氣槽66及空氣彈簧61之内壓精密地控制成希望的 壓力。而後，藉由控制提供給空氣彈簧61之内壓，可 對工件W施加希望之壓縮靜荷重。而後，在該狀態下， 藉由使直流電流流入固定線圈52 (第三圖），且使交流 電流流入可移動線圈51，可邊施加靜荷重邊使工件W 振動。 在此，使工件W振動時，與可移動部20連結之空 ® 氣彈簧61的容積亦變動。但是，因為空氣彈簧61連接 有對空氣彈簧61來說容積充分大的空氣槽66，所以即 使空氣彈簧61之容積有若干變動，空氣彈簧61之内壓 幾乎不變化，而可對工件W持續施加概略一定之靜荷 〇 又，氣壓開關63係用於檢測過濾器調節器62之出 口壓是否為指定之設定壓以下的開關。過濾器調節器62 之出口壓係設定壓以下時，氣壓開關63接通，而傳送 11 200944773 信號至控制器2 (後述）。在氣壓開關63為接通的狀況 下，可能由於空氣源S之出口壓降低或是配管發生空^ 洩漏等原因，而使過濾器調節器62之出口壓降低 無法確保空氣彈簧61之内壓充分地高。因而，控制器2 檢測出在使工件W振動中氣壓開關63係接通時，^ 器2強制性停止工件W之振動。 二A workpiece holding member 32 is rounded on the member holding member i, and a workpiece (subject) W is fixed to the member holding member. That is, the dam portion 20 is relatively solid; the galvanic workpiece W, and secondly, the workpiece W is vibrated by reciprocating the movable workpiece holding member. Further, the size of the workpiece W is detachably fixed to the table 31, and can be 32. And the type of workpiece holding member suitable for the type is appropriately fixed to the frame 1 of the base B by the shaft 14, and the movable portion 2 is formed on the cylindrical body 12 of the frame 11. The cylinder = lower portion is housed inside the cylindrical body 12 as shown in the third figure. The reaction force frame 13 四 (4) is provided with a crucible for pressing the workpiece W from above, and is fixed to the bottom plate of the M-shaped body 12; a pair of side plates 13a welded to the top of the spout c and extending in the vertical direction; The respective upper ends of the side plates 13a are welded to the reaction force plates 13b of the side plates 13a. As shown in the first figure, a spacer 34 is formed on the bottom surface of the side plate i3a, and the workpiece w is sandwiched by the spacer 34 and the workpiece holding member 32. Further, a load cell 33 is attached to the lower portion of the spacer 34, whereby the compression load applied to the vertical direction of the workpiece w can be measured. The spacer 34 is detachably fixed to the reaction force plate 13b' and the spacers 34 are appropriately selected depending on the size and type of the workpiece w. Next, the machine 8 200944773 for driving the movable portion 20 in the vertical direction will be described below. As shown in the third figure, the movable portion 20 has a movable cylinder 22 in the shape of a tapered cylinder, and a top plate 21 fixed to the upper end of the movable frame 22. Above the top plate 21, the table 31 is fixed by > a plurality of bars 26. The movable coil 51 is mounted at the lower end of the movable frame 22 by the movable coil holding member 27. The movable coil 51 is disposed substantially coaxially with the movable frame 22. Further, inside the cylindrical body 12 of the fixing portion 10, a cylindrical inner magnetic pole 15 formed coaxially with the tubular body 12 is provided. The outer diameter of the inner magnetic pole is smaller than the inner diameter of the movable coil 51. The movable coil 51 is disposed between the outer circumferential surface of the inner magnetic pole 15 and the inner circumferential surface of the cylindrical body 12. A concave portion 12a is provided on the inner circumferential surface of the cylindrical body 12, and a fixed coil 52 is attached to the inside of the concave portion 12a. Here, both the tubular body 12 and the inner magnetic pole 15 are formed of a magnetic material. When a direct current flows into the fixed coil μ, a magnetic field can be generated in the radial direction of the movable coil 51. When the current flows into the movable coil 51 in this state, the armor force is generated in the axial direction of the movable coil 51, that is, in the vertical direction, and the movable portion 20 can be driven in the vertical direction. In the electric vibration test device 1 of the present embodiment, the current of the alternating current component is supplied to the movable coil 51, so that the movable portion 20 reciprocates in the vertical direction, and the workpiece W on the table 31 is vertically aligned. Vibration in the direction. In the present embodiment, the movable portion 20 and the workpiece W are supported from below by the air spring 61. The air spring 61 is housed in the inner magnetic pole 15. Further, the air spring 61 and the movable frame 22 are coupled by a connecting rod 23 extending upward from the upper end of the air spring 61. As shown in the third 200944773 diagram, the connecting rod 23 passes through the movable frame 22 to reach the upper end of the movable frame 22, and is coupled to the inner circumference of the movable frame 22 by a plurality of beams 24 extending in the radial direction. Face and connecting rod 23. Further, reference numeral 25 is a bearing that supports the connecting rod 23 from being tilted. In the present embodiment, the air spring 61 is used to support the movable portion 20 from the lower side, and the movable portion 20 is maintained at a predetermined height. Further, the workpiece W is sandwiched between the air spring 61 and the reaction force plate 13b, and the compression load in the vertical direction can be applied to the workpiece W by raising the internal pressure of the air spring 61. For this purpose, in the present embodiment, the internal pressure of the air spring 61 can be controlled, and the load applied to the workpiece W by the air spring 61 can be controlled. The mechanism for controlling the internal pressure of the air spring 61 will be described below. The fourth diagram shows the air pressure circuit of the internal pressure control mechanism 60 in the present embodiment. As shown in the fourth figure, the air spring 61 supplies air from an air source S such as a compressor, and a filter regulator 62, a precision adjuster 65, and an air tank 66 are provided between the air source S and the air spring 61. The filter regulator 62 removes dust, Egyptian moisture, and the like from the air supplied from the air source S, and adjusts the pressure of the air discharged from the outlet thereof. A gas pressure switch 63, an electric gas regulator 64, and a precision adjuster 65 are connected to the output port of the filter regulator 62. The electric gas regulator 64 is a regulator that adjusts the output pressure in accordance with control from the controller 2 (described later). The output of the electric gas regulator 64 is connected to the pilot port of the precision regulator 65. That is, the output port of the electric gas regulator 64 is in a state of being closed by the guide port of the precision adjuster 65, and the air in the line therebetween does not flow, and only the static pressure is applied to the guide port of the precision adjuster 65 200944773. . The precision adjuster 65 can control the inner valve by the air input to the pilot port to precisely adjust the pressure of the output port to coincide with the pressure of the pilot port. Further, since the valve of the precision adjuster 65 can be driven with a small pressure, the guide port is applied with the outlet pressure of the filter regulator 62 as a back. The output of the precision regulator 65 is connected to the air groove 66. The precision regulator 65 can precisely control the static pressure of the output port to the pressure of the pilot port even when air flows from the input port to the output port. Therefore, the internal pressure of the air groove 66 and the air spring 61 can be precisely controlled to be desired by connecting the output port of the electric gas regulator 64 that does not flow the air from the input port to the output port to the guide port of the precision adjuster 65. pressure. Then, by controlling the internal pressure supplied to the air spring 61, the desired compressive static load can be applied to the workpiece W. Then, in this state, by flowing a direct current into the fixed coil 52 (third diagram) and causing an alternating current to flow into the movable coil 51, the workpiece W can be vibrated while applying a static load. Here, when the workpiece W is vibrated, the volume of the empty gas spring 61 connected to the movable portion 20 also fluctuates. However, since the air spring 61 is connected to the air groove 66 having a sufficiently large volume to the air spring 61, even if the volume of the air spring 61 is somewhat changed, the internal pressure of the air spring 61 hardly changes, and the workpiece W can be continuously applied. The air pressure switch 63 is used to detect whether or not the outlet pressure of the filter regulator 62 is equal to or lower than a predetermined set pressure. When the outlet pressure of the filter regulator 62 is below the set pressure, the gas pressure switch 63 is turned on, and the signal of 2009 2009773 is transmitted to the controller 2 (described later). In the case where the air pressure switch 63 is turned on, the outlet pressure of the filter regulator 62 may be lowered due to a decrease in the outlet pressure of the air source S or a leak of the piping, etc., and the internal pressure of the air spring 61 may not be sufficiently ensured. The ground is high. Therefore, the controller 2 detects that the vibration of the workpiece W is forcibly stopped when the gas pressure switch 63 is turned on while the workpiece W is being vibrated. two
其次’就本實施形態之電動型振動測試裝置1的控 制作說明。第七圖係本實施形態之電動型振動測試裝^ 1的方塊圖。如第八圖所示，電動型振動測試裂置1具 有.控制器2、電源3及放大器4。電源3供給直流^ 至固疋線圈52，而使可移動線圈51之周圍產生直节 磁場。又，放大器4從電源3接受電力之供給，產生= 流電流，並將其供給至可移動線圈51。控制器2可控制 放大二4,從放大器4輸出具希望之振幅及頻率的交流 人，如刚述，耩由測力器33計測工件w之荷重， 依據測力器33之計測結果’反饋控制電動氣 64之輸出π侧的壓力。藉由該反饋控制可將 荷重施加於辑W。又’控制11 2依據設於工 之加速度感測器35 (第三圖）的檢測結果，玎 制卫作台之位移、速度、加速度振幅。另外’亦 相位移或速度之其他感測器，來取代加速度感 决 J *3 5。 12 200944773 w而受到大= 即使從空氣彈簧61經由工件 苹13需重仍不致移位或變形。因*，反作用力框 在由反作用^高之強度及剛性。因而’如第一圖所示’ 架13之側板i3a與反作用力板別所形 焊接補強Μ#由底板i3c與側板i3a所形成之角落分別 烊接補強用肋條13d及13e。Next, the control of the electric vibration test apparatus 1 of the present embodiment will be described. The seventh drawing is a block diagram of the electric vibration test device 1 of the present embodiment. As shown in the eighth figure, the electric vibration test split has a controller 2, a power source 3, and an amplifier 4. The power source 3 supplies a direct current to the solid coil 52, and a straight magnetic field is generated around the movable coil 51. Further, the amplifier 4 receives the supply of electric power from the power source 3, generates a =current current, and supplies it to the movable coil 51. The controller 2 can control the amplification 2, and output the AC person with the desired amplitude and frequency from the amplifier 4. As described, the load of the workpiece w is measured by the load cell 33, and the feedback result is based on the measurement result of the load cell 33. The pressure on the output side of the electric air 64 is π. The load can be applied to the set W by the feedback control. Further, the control 11 2 measures the displacement, velocity, and acceleration amplitude of the guard station based on the detection result of the acceleration sensor 35 (third diagram) provided in the work. In addition, other sensors that are also phase shifted or speed replace the acceleration sense J *3 5. 12 200944773 w and is large = even if it is heavy from the air spring 61 via the workpiece, it will not be displaced or deformed. Because of *, the reaction force is framed by the reaction ^ high strength and rigidity. Therefore, as shown in the first figure, the side plate i3a of the frame 13 and the reaction force plate-shaped welding reinforcement Μ# are respectively joined to the reinforcing ribs 13d and 13e by the corners formed by the bottom plate i3c and the side plate i3a.
而六2:知形態中’如前述’因為藉由空氣彈簧61 ° 20上施加較大之荷重，所以工作台31係 藉由線性引導機構40引導，使工作台31不致傾倒，且 可順利地在垂直方向移動。就線性引導機構4〇於以下 說明。 如第一圖至第三圖所示，線性引導機構4〇具有固 定於固定部10之筒狀體12上面的框架部41。框架部 41係以L字狀組合以螺栓固定於筒狀體12的底板41 b 與侧板41a而焊接成的構件。又，為了使框架部41之剛 性及強度提高，而在由底板41b與側板41a形成之角落 形成肋條41c ° 又，線性引導機構40進一步具有：固定於側板41a 並伸展於垂直方向的執條44 ;及藉由活動塊安襞構件 42而固定於工作台31的活動塊46。活動塊46與軌條 44卡合，與活動塊46成為一體之工作台31可沿著軌條 44而順利地移動。 另外，在本實施形態中’如第二圖所示’在將垂直 方向作為中心之圓周上，約每90度設有一個由框架部 41、執條44及活動塊46構成之組，合計設有四組，藉 13 200944773 由該四組可從四個方向引導工作台31。 其次’就本實施形態之線性引導機構40的軌條44 及活動塊46 (第二圖）的構成，使用圖式詳細地說明。 第五圖係在垂直於軌條44之長軸方向的一面（亦即水 平面）切斷軌條44及活動塊46晝出之剖面圖。第六圖 係第五圖之II — II剖面圖。如第五圖及第六圖所示，在 活動塊46以包圍軌條44之方式而形成有凹部，在該凹 部形成有延伸於軌條44之軸方向的四條溝46a、46a’。 在該溝46a、46a’中收納許多不銹鋼製的滚珠46b。在軌 條44中’在與活動塊46之溝46a、46a’相對的位置分 別設有溝44a、44a’，滚珠46b夾在溝46a與溝44a ’或 是溝46a’與溝44a’之間。溝46a、46a，、44a、44a，之剖 面形狀係圓弧狀，其曲率半徑與滾珠46b之半徑概略相 等。因而，滚珠46b係在幾乎無游隙之狀態下密合於溝 46a、46a’、44a、44a’。 在活動塊46之内部，設置與溝46a各自概略平行的 四條滾珠避開路徑46c、46c’。如第六圖所示，溝46a 與避開路徑46c在各自之兩端藉由u字形路徑46d而連 接，並藉由溝46a、溝44a、避開路徑46c及U字形路 徑46d而形成用於使滚珠46b循環之循環路徑。亦可藉 由溝46a’、溝44a，及避開路徑46c，而形成同樣之循環路 徑。 因而’活動塊46相對執條44移動時，許多滾珠46b 係邊在溝46a、46a，、44a、44a，中轉動邊在循環路徑中 循環。因而’即使在執條軸方向以外之方向有施加大荷 14 200944773 重，由於可以許多滚珠支撐活動塊，並且藉由滾珠4% 轉動，使執條軸方向之阻力保持小，因此可使活動塊46 相對執條44順利地移動。另外，避開路徑46c及U字 形路徑46d之内徑比滾珠46b之直徑稍大。因而，產生 於避開路杻46c及U字形路徑46d與滚珠46b之間的摩 擦力極小，藉此不致妨礙滾珠46b之循環。 如圖示，夾在溝46a與44a間之二列滾珠461)之 ㊉成接觸角概略為士45。之正面組合型的角接觸球轴承 (Angular Contact Ball Bearing)。此時所謂接觸角，係涛 46a胃及44a與滾珠46b接觸之各接觸點的連線相對線性 ^丨導器之徑向方向（係從活動塊朝向執條之方向，且為 第五圖中之下方向）所形成的角度。如此形成之角接觸 球轴承可支撐反徑向方向（從軌條朝向活動塊之方向， 且為第五圖中之上方向）及橫方向（與徑向方向及活動 塊之進退方向兩者正交之方向，且為第五圖中之左右 向）的荷重。 © 同樣地’夾在溝46a，與4如，間之二列滾珠46b之列 形成接觸角（溝46a，及44a，與滾珠46b接觸之各接觸點 的連線相對線性引導器之反徑向方向所形成的角度）概 略為±45。之正面組合型的角接觸球軸承。該角接觸球軸 承可支撐徑向方向及橫方向的荷重。 又，分別夾在溝46a與44a之一方（圖中左侧）以 ，溝46a，與44a，之一方（圖中左侧）的二列滚珠4沾之 歹1 ’亦是形成正面組合型之角接觸球軸承。同樣地，分 別夾在溝46a與44a之另一方（圖中右侧）以及溝46a， 15 200944773 與44a’之另一方（圖中右侧）的二列滾珠46b之列，亦 是形成正面組合型之角接觸球軸承。 如此，在本實施形態中，對分別作用於徑向方向、 反徑向方向及橫方向之荷重是由具有許多滾珠46b之正 面組合型的角接觸球軸承來支撐，因而可充分支撐施加 於軌條軸方向以外之方向的大荷重。 【圖式簡單說明】 ® 第一圖係本發明之實施形態的電動型振動測試裝 置之前視圖。 第二圖係本發明之實施形態的電動型振動測試裝 置之俯視圖。 第三圖係第二圖之1一1剖面圖。 第四圖係顯示本發明之實施形態的電動型振動測 試裝置之内壓控制機構的氣壓迴路。 第五圖係在本發明之實施形態的電動型振動測試 裝置中，將活動塊及執條在垂直於執條之長軸方向的一 胃 個面切斷畫出之剖面圖。 第六圖係第五圖之II —II剖面圖。 第七圖係本發明之實施形態的電動型振動測試裝 置之方塊圖。 【主要元件符號說明】 1 電動型振動測試裝置 3 電源 2 控制器 4 放大器 16 200944773 10 固定部 40 線性引導機構 11 框架 41 框架部 12 筒狀體 41a 侧板 12a 凹部 41b 底板 13 反作用力框架 41c 肋條 13a 側板 42 活動塊安裝構件 13b 反作用力板 44 軌條 13c 底板 44a 溝 13d 補強用肋條 44a， 溝 13e 補強用肋條 46 活動塊 14 轴 46a 溝 15 内側磁極 46a， 溝 20 可移動部 46b 滾珠 21 頂板 46c 滚珠避開路徑 22 可移動框架 46c， 滾珠避開路徑 23 連結桿 46d U字形路徑 24 樑 51 可移動線圈 25 軸承 52 固定線圈 26 桿 60 内壓控制機構 27 可移動線圈保持構件 61 空氣彈簧 31 工作台 62 過濾器調節器 32 工件保持構件 63 氣壓開關 33 測力器 64 電動氣體調節器 34 間隔物 65 精密調節器 35 加速度感測器 66 空氣槽 17 200944773 工件And in the sixth form: in the known form, as described above, since a large load is applied by the air spring 61 ° 20, the table 31 is guided by the linear guiding mechanism 40, so that the table 31 is not dumped, and can be smoothly performed. Move in the vertical direction. The linear guide mechanism 4 is explained below. As shown in the first to third figures, the linear guide mechanism 4A has a frame portion 41 fixed to the upper surface of the cylindrical body 12 of the fixed portion 10. The frame portion 41 is a member that is welded and fixed to the bottom plate 41b of the tubular body 12 and the side plate 41a in an L shape. Further, in order to increase the rigidity and strength of the frame portion 41, the rib 41c is formed at a corner formed by the bottom plate 41b and the side plate 41a. The linear guide mechanism 40 further has a bar 44 fixed to the side plate 41a and extending in the vertical direction. And a movable block 46 fixed to the table 31 by the movable block ampoule member 42. The movable block 46 is engaged with the rails 44, and the table 31 integrated with the movable block 46 can be smoothly moved along the rails 44. Further, in the present embodiment, as shown in Fig. 2, a group consisting of the frame portion 41, the bar 44 and the movable block 46 is provided at approximately 90 degrees on the circumference centering on the vertical direction, and the total is set. There are four groups, borrowing 13 200944773 from which the four groups can guide the workbench 31 from four directions. Next, the configuration of the rail 44 and the movable block 46 (second diagram) of the linear guide mechanism 40 of the present embodiment will be described in detail using the drawings. The fifth drawing is a cross-sectional view of the cutting rail 44 and the movable block 46 which are cut off on one side (i.e., the horizontal plane) perpendicular to the long axis direction of the rail 44. The sixth figure is a sectional view of II - II of the fifth figure. As shown in the fifth and sixth figures, the movable block 46 is formed with a recessed portion so as to surround the rail 44, and four recesses 46a and 46a' extending in the axial direction of the rail 44 are formed in the recessed portion. A plurality of stainless steel balls 46b are housed in the grooves 46a and 46a'. In the rail 44, a groove 44a, 44a' is provided at a position opposite to the groove 46a, 46a' of the movable block 46, and the ball 46b is sandwiched between the groove 46a and the groove 44a' or between the groove 46a' and the groove 44a'. . The grooves 46a, 46a, 44a, 44a have a circular arc shape, and the radius of curvature is substantially equal to the radius of the balls 46b. Therefore, the balls 46b are in close contact with the grooves 46a, 46a', 44a, 44a' in a state where there is almost no play. Inside the movable block 46, four ball avoiding paths 46c and 46c' which are substantially parallel to the grooves 46a are provided. As shown in the sixth figure, the groove 46a and the avoidance path 46c are connected at their respective ends by a U-shaped path 46d, and are formed by the groove 46a, the groove 44a, the avoidance path 46c, and the U-shaped path 46d. A circulation path that circulates the ball 46b. The same circulation path can be formed by the groove 46a', the groove 44a, and the avoidance path 46c. Thus, when the movable block 46 moves relative to the bar 44, a plurality of balls 46b are looped in the grooves 46a, 46a, 44a, 44a, and the rotating side circulates in the circulation path. Therefore, even if a large load 14 200944773 is applied in the direction other than the direction of the shaft, since many balls can support the movable block, and the ball is rotated by 4%, the resistance in the direction of the shaft is kept small, so that the movable block can be made. 46 The relative movement 44 moves smoothly. Further, the inner diameter of the avoidance path 46c and the U-shaped path 46d is slightly larger than the diameter of the ball 46b. Therefore, the frictional force generated between the avoidance path 46c and the U-shaped path 46d and the ball 46b is extremely small, thereby preventing the circulation of the balls 46b from being hindered. As shown, the ten-contact angle of the two rows of balls 461) sandwiched between the grooves 46a and 44a is roughly 45. The front combined angular contact ball bearing (Angular Contact Ball Bearing). At this time, the contact angle, the line connecting the contact points of the stomach 46a and the 44a with the ball 46b is relatively linear to the radial direction of the guide (from the moving block toward the strip, and in the fifth figure) The angle formed by the downward direction). The angular contact ball bearing thus formed can support the reverse radial direction (from the direction of the rail toward the movable block and in the upper direction of the fifth figure) and the lateral direction (both with the radial direction and the advancing and retracting direction of the movable block) The direction of intersection, and the load in the left and right directions in the fifth figure. © Similarly, 'clamped in the groove 46a, and 4, for example, the column of the two rows of balls 46b form a contact angle (the grooves 46a, and 44a, the line connecting the contact points with the ball 46b is opposite to the radial direction of the linear guide) The angle formed by the direction is roughly ±45. The front combined angular contact ball bearing. The angular contact ball bearing supports the load in the radial direction and the lateral direction. Further, each of the grooves 46a and 44a (on the left side in the drawing) is sandwiched by the two rows of balls 4 of one of the grooves 46a and 44a (the left side in the figure), and the front side combination type is also formed. Angular contact ball bearings. Similarly, the two rows of balls 46b sandwiched between the other side of the grooves 46a and 44a (the right side in the drawing) and the other side of the grooves 46a, 15 200944773 and 44a' (the right side in the figure) are also formed into a front combination. Type angular contact ball bearings. As described above, in the present embodiment, the load acting on the radial direction, the reverse radial direction, and the lateral direction, respectively, is supported by the angular contact ball bearing having the front combined type of a plurality of balls 46b, so that the support can be sufficiently applied to the rail. Large load in directions other than the direction of the strip axis. BRIEF DESCRIPTION OF THE DRAWINGS The first drawing is a front view of an electric vibration test apparatus according to an embodiment of the present invention. The second drawing is a plan view of an electric vibration test apparatus according to an embodiment of the present invention. The third figure is a sectional view of the first figure 1-1. Fig. 4 is a view showing a pneumatic circuit of an internal pressure control mechanism of the electric vibration measuring device according to the embodiment of the present invention. In the electric vibration test apparatus according to the embodiment of the present invention, a cross-sectional view in which the movable block and the blade are cut in a stomach plane perpendicular to the longitudinal direction of the blade is shown. The sixth figure is a sectional view of II-II of the fifth figure. Figure 7 is a block diagram of an electric vibration test apparatus according to an embodiment of the present invention. [Main component symbol description] 1 Electric vibration test device 3 Power supply 2 Controller 4 Amplifier 16 200944773 10 Fixing portion 40 Linear guide mechanism 11 Frame 41 Frame portion 12 Cylindrical body 41a Side plate 12a Concave portion 41b Base plate 13 Reaction force frame 41c Rib 13a side plate 42 movable block mounting member 13b reaction force plate 44 rail 13c bottom plate 44a groove 13d reinforcing rib 44a, groove 13e reinforcing rib 46 movable block 14 shaft 46a groove 15 inner magnetic pole 46a, groove 20 movable portion 46b ball 21 top plate 46c Ball avoidance path 22 Movable frame 46c, Ball avoidance path 23 Connecting rod 46d U-shaped path 24 Beam 51 Removable coil 25 Bearing 52 Fixed coil 26 Rod 60 Internal pressure control mechanism 27 Removable coil holding member 61 Air spring 31 Table 62 Filter Regulator 32 Workpiece Holder 63 Pneumatic Switch 33 Force Measurer 64 Electric Gas Regulator 34 Spacer 65 Precision Regulator 35 Acceleration Sensor 66 Air Slot 17 200944773 Workpiece
B 基座 W S 空氣源B base W S air source
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