200944657 » 九、發明說明： 【發明所屬之技術領域】 本案係關於-種流體輸送裝置’尤指—種適用於微系 浦結構之多流道流體輸送裝置。 【先前技術】 ^目前於各領域中無論是醫藥、電腦科技、列印、能源 ❹ 等工業，產品均朝精緻化及微小化方向發展，其中微泵 浦、噴霧器、喷墨頭、工業列印裝置等產品所包含之流體 輸送結構為其關鍵技術，是以，如何藉創新結構突破其技 術瓶頸’為發展之重要内容。 ^ 請參閱第一圖，其係為習知微泵浦結構之結構示意 圖，習知微泵浦結構1〇係由閥體座u、閥體蓋體12、閥 體薄膜13、微致動器14及蓋體15所組成，其中，閥體薄 膜13係包含入口閥門結構131及出口閥門結構132，閥體 座11包含入口通道111及出口通道112、閥體蓋體12與 微致動器14間定義形成一壓力腔室】23，閥體薄膜13設 置在閥體座11與閥體蓋體12之間。 當一電壓作用在微致動器14的上下兩極時，會產生 一電場，使得微致動器14在此電場之作用下產生彎曲， 當微致動器14朝箭號X所指之方向向上彎曲變形，將使 得壓力腔室123之體積增加，因而產生一吸力，使閥體薄 膜13之入口閥門結構131開啟，使液體可自閥體座丨丨上 % 6 200944657 之入口通道111被吸取進來，並流經閥體薄膜13之入口 閥門結構131及閥體蓋體12上之入口閥片通道121而流 入壓力腔室123内，反之當微致動器14因電場方向改變 而朝箭號X之反方向向下彎曲變形時，則會壓縮壓力腔室 123之體積’使得壓力腔室123對内部之流體產生一推力， 並使閥體薄膜13之入口閥門結構m、出口闕門結構132 承受一向下推力，而出口閥門結構132將開啟，並使液體 ❹ ❿ 由壓力腔室123經由閥體蓋體12上之出口闕門通道122、 閥體薄膜13之出口閥門結構132,而從閥體座u之出口 通道m流出流體輸送裝置1G彳，因而完成流體之傳輸 過程。 s雖然習知微栗浦結構1G能夠達到輪送流體的功能， 但是其係使用單一壓力腔室配合單一流通管道、單一進出 對的閥門結構設計，若使用習知微㈣結構⑺ 同液體之不同比例的混合時，需先藉由兩個泵 =…不同❹m取㈣拌混合，然後才將 傳送至微泵浦結構10進扞户 ^ 一,0 進仃仙·體輸送的方式，或是僅使用 個泵浦，但疋必須要搭配外接之流 實施方式將會增加整個泵浦系統的複較 的 道流=送;:發知技術缺失之多流 5為目别迫切需要解決之問題。 【發明内容】 本案之 的在於提供—種多流道流體輸送裝 7 200944657 置，俾解決以習知微泵浦結構進行兩種不同液體之不同比 例的混合，需先藉由兩個泵浦依照不同比例汲取再攪拌混 合，或是僅使用一個泵浦，但是必須要搭配外接之流量調 節閥門，將增加整個泵浦系統的複雜度等缺點。 為達上述目的，本案之一較廣義實施樣態為提供一種 多流道流體輸送裝置，用以傳送流體，其係包含：閥體座， 其係具有至少一出口通道及至少一入口通道；閥體蓋體， 其與閥體座相互堆疊結合；閥體薄膜，其係設置於閥體座 ❿ 及閥體蓋體之間，且具有二個以上閥門結構，該等閥門結 構係同厚度及同材料製成；複數個暫存室，設置於閥體薄 膜與閥體蓋體之間，以及於閥體薄膜與閥體座之間；以及 振動裝置，其週邊係固設於閥體蓋體。 【實施方式】 體現本案特徵與優點的一些典型實施例將在後段的 〇 說明中詳細敘述。應理解的是本案能夠在不同的態樣上具 有各種的變化，其皆不脫離本案的範圍，且其中的說明及 圖示在本質上係當作說明之用，而非用以限制本案。 本案之多流道流體輸送裝置主要係藉由單一壓力腔 室及致動器配合多個流通管道、多個進出口及其多個閥門 結構之配置概念，能夠在不增加整體尺寸下，使流量及揚 程大為增加，非常適合用於流量及揚程需求相對較高之應 - 用場合。 8 200944657 200944657 Ο 鲁 °月 > 閱第一圖（a ) ’其係本案較佳實施例之多流道流 體輸送褒置之分解結構示意圖，如圖所示，本實施例之多 流道流體輸送裝置20係由閥體座21、閥體蓋體22、閥體 薄膜23、致動裝置24及蓋體25所組成，閥體蓋體22及 致動裝置24之間形成-壓力腔室225(如第二圖（c)所 不）’主要用來儲存流體，多流道流體輸送裝置20之組裝 方式係將閥體薄膜23設置於閥體座21及閥體蓋體22之 二亚使閥體薄膜23與閥體座21及閥體蓋體22相對應 ，置’且在閥體薄膜23與閥體蓋體22之間形成第一暫存 至’而在閥體薄獏23與閥體座21之間形成第二暫存室， 並且於閥體蓋體22上之相對應位置更設置有致動裝置 24致動裝置24係由一振動薄膜241以及一致動器242 、'且裝而成’用以驅動多流道流體輸送裝置2〇之作動，最 後再將蓋體25設置於致動裝置24之上方，&其係依序 ㈣體座21、_薄膜23、閥體蓋體22、致動襄置24及 蓋體25相對應堆疊設置，以完成多流道流體輸送襄置 之組裝（如第二圖（e)所示）。 HI座21及閥體蓋體22係為本案多流道流體 J 導引流體進出之主要結構，請再泉閱第二 圖⑴並配合第二圖⑷’其中第二圖㈤係為第二^ (a)所不之閱體座的背面結構示意圖，如所 示，間想座^具有人Q通道211a、211b二(d= ::置=並不以此為限’多流道流趙輪送裝置： 通道及出口通道的數量可分別為至少一個 9 200944657 以上，流體係可由外界輸入，經由入口流道211a、211b ’ 分別傳送至閥體座21之開口 213a、213b，並且，於本實 施例中，閥體薄膜23及閥體座21之間所形成的第二暫存 室即為圖中所示之出口暫存腔20a、215b’但不以此為 限，其係由閥體座21於與出口流道212a、212b相對應之 位置產生部分凹陷而形成’並分別與出σ流道212a、212b 相連通，該出口暫存腔215a、215t>係用以暫時儲存流體， 並使流體由出口暫存腔215a、215b經由開口 214a、214b ❹ 而輸送至出口通道212a、212b流出。以及’在閥體座21 上更具有複數個凹槽結構，用以供一密封環26(如第三圖 (a)及第四圖（a)所示）設置於其上’於本實施例中，閥 體座21係具有環繞開口 213a、213b週邊之凹槽216a、 216b，及環繞於出口暫存腔215a、215b週邊之凹槽217a、 217b。 請參閱第二圖（c)並配合第二圖（a)，其中第二圖（c) 係為第二圖（a)所示之閥體蓋體之背面結構示意圖，如 φ 圖所示，閥體蓋座22係具有一上表面220及一下表面 221，以及在閥體蓋座22上亦具有貫穿上表面220至下表 面221之入口閥門通道222a、222b及出口閥門通道223a、 223b，且該入口閥門通道222a、222b係分別設置於與閥 體座21之開口 213a、213b相對應之位置，而出口閥門通 道223a、223b則分別設置於與閥體座21之出口暫存腔 215a、215b内之開口 214a、214b相對應之位置，並且， 於本實施例中’閥體薄膜23及闕體蓋體22之間所形成之 200944657 複數個第一暫存室即為圖中所示之入口暫存腔224a、 224b，且不以此為限，其係由閥體蓋體22之下表面221 於與入口閥門通道222a、222b相對應之位置產生部份凹 陷而形成，且其係連通於入口閥門通道222a、222b。 請再參閱第二圖（c)，如圖所示，閥體蓋體22之上表 面220係部份凹陷，以形成一壓力腔室225，其係與致動 裝置24之致動器242相對應設置，壓力腔室225係經由 入口閥門通道222a、222b分別連通於入口暫存腔224a、 © 224b，並同時與出口閥門通道223a、223b相連通，因此， 當致動器242受電壓致動使致動裝置24上凸變形，造成 壓力腔室225之體積膨脹而產生負壓差，可使流體經入口 閥門通道222a、222b流至壓力腔室225内，其後，當施 加於致動器242的電場方向改變後，致動器242將使致動 裝置24下凹變形壓力腔室225收縮而體積減小，使壓力 腔室225與外界產生正壓力差，促使流體由出口閥門通道 223a、223b流出壓力腔室225之外，於此同時，同樣有部 ❹ 分流體會流入入口閥門通道222a、222b及入口暫存室 224a、224b内，然而由於此時的入口閥門結構231a、 231b(如第三圖（c)及第四圖（c)所示）係為使受壓而關閉 的狀態，故該流體不會通過入口閥片2313a、2313b而產 生倒流的現象，至於暫時儲存於入口暫存腔224a、224b 内之流體，則於致動器242再受電壓致動，重複使致動裝 置24再上凸變形而增加壓力腔室225體積時，再由入口 暫存腔224a、224b經至入口閥門通道222a、222b而流入 11 200944657 壓力腔室225内，以進行流體的輸送。 另外，閥體蓋體22上同樣具有複數個凹槽結構’以 本實施例為例，在閥體蓋座22之上表面220係具有環繞 壓力腔室225而設置之凹槽226 ’其係供一密封環28(如 第三圖（a)及第四圖（a)所示）設置於其中’而在下表面 221上則具有環繞設置於入口暫存腔22如、224b之凹槽 227a、227b，以及環繞設置於出口閥門通道223a、223b 之凹槽228a、228b，同樣地’上述凹槽結構係用以供一密 ❿ 封環27(如第三圖（a)及第四圖（a)所示）設置於其中。 請參閱第二圖（d)並配合第二圖（a)，其中第二圖（d) 係為第二圖（a)所示之閥體薄膜之結構示意圖，如圖所 示，閥體薄膜23主要係以傳統加工、或黃光蝕刻、或雷 射加工、或電鑄加工、或放電加工等方式製出，且為一厚 度實質上相同之薄片結構，其上係具有複數個鏤空閥開 關，包含第一閥開關以及第二閥開關，於本實施例中，第 ©—閥開關係為入口閥門結構231a、231b，而第二閥開關係 為出口閥門結構232a、232b ’但並不以此為限，多流道流 體輸送裝置20所設置之入口閥門結構及出口閥門結構的 數量分別為至少一個以上，其中，入口閥門結構231a、231b 係分別具有入口閥片2313a、2313b以及複數個環繞入口 閥片2313a、2313b週邊而設置之鏤空孔洞2312a、2312b， 另外’在孔洞2312a、2312b之間更分別具有與入口閥片 2313a、2313b相連接之延伸部2311a、2311b，當閥體薄 膜23承受一自壓力腔室225傳遞而來之應力時，如第三 12 200944657 圖（c)及第四圖（c)所示，入口閥門結構231a、231b係整 個平貼於閥體座21之上’此時入口閥片2313a、2313b會 緊靠凹槽216a、216b上密封環26突出部分，而密封住閥 體座21上之開口 213a、213b，且其外圍的鏤空孔洞 2312a、2312b及延伸部2311a、2311b則順勢浮貼於閥體 座21之上，故因此入口閥門結構231a、231b之關閉作用， 使流體無法流出。 而當閥體薄膜23受到壓力腔室225體積增加而產生 ❹ 之吸力作用下，由於設置於閥體座21之凹槽216a、216b 内的密封環26已提供入口閥門結構231a、231b —預力 (Preforce)，因而入口閥片2313a、2313b可藉由延伸部 2311a、2311b的支撐而產生更大之預蓋緊效果，以防止逆 流，當因壓力腔室225之負壓而使入口閥門結構231a、231b 產生位移（如第三圖（b)及第四圖（b)所示），此時，流體 則可經由鏤空之孔洞2312a、2312b由閥體座21流至閥體 蓋體22之入口暫存腔224a、224b，並經由入口暫存腔224 ❿ a、224b及入口閥門通道222a、222b傳送至壓力腔室225 内，如此一來，入口閥門結構231a、231b即可因應壓力 腔室225產生之正負壓力差而迅速的開啟或關閉，以控制 流體之進出，並使流體不會回流至閥體座21上。 同樣地，位於同一閥體薄膜23上的另一閥門結構則 為出口閥門結構232a、232b，其中之出口閥片2323a、 2323b、延伸部 2321a、2321b 以及孔洞 2322a、2322b 之 作動方式均與入口閥門結構231a、231b相同，因而不再 13 200944657 贅述，惟出口閥門結構232a、232b週邊之密封環27設置 方向係與入口閥門結構231a、231b之密封環26反向設 置，因而當壓力腔室225壓縮而產生一推力時，設置於閥 體蓋體22之凹槽228a、228b内的密封環27將提供出口 閥門結構232a、232b —預力（Preforce)，使得出口閥片 2323a、2323b可藉由延伸部2321a、2321b之支撐而產生 更大之預蓋緊效果，以防止逆流（如第三圖（b)及第四圖 (b)所示），當因壓力腔室225之正壓而使出口閥門結構 ❹ 232a、232b產生向上位移，此時，流體則可經由鏤空之孔 洞2322a、2322b由壓力腔室225經閥體蓋體22而流至閥 體座21之出口暫存腔215a、215b内，並可經由開口 214a、 214b及出口流道212a、212b排出，如此一來，則可經由 出口閥門結構232a、232b開啟之機制，將流體自壓力腔 室225内洩出，以達到流體輸送之功能（如第三圖（c)及 第四圖（c)所示）。 _ 請參閱第三圖（a)及第四圖（a)，其係分別為第二圖 參 (e)所示之多流道流體輸送裝置之未作動狀態之A-A及 B-B剖面結構示意圖，於本實施例中，所有的密封環2 6、 27、28其材質可為可耐化性佳之橡膠材料，但不以此為 限，其中，設置於閥體座21上環繞開口 213a、231b之凹 槽216a、216b内的密封環26可為一圓環結構，其厚度係 大於凹槽216a、216b深度，使得設置於凹槽216a、216b 内之密封環26係部分凸出於閥體座21之表面構成一微凸 結構，因而使得貼合設置於閥體座21上之閥體薄膜23之 200944657 入口閥門結構231a、231b之入口閥片2313a、2313b因密 封環26之微凸結構而形成一向上隆起，而閥體薄膜23之 其餘部分係與閥體蓋體22相抵頂，如此微凸結構對入口 閥門結構231 a、231 b頂推而產生一預力（Preforce)作用， 有助於產生更大之預蓋緊效果，以防止逆流，且由於密封 環26向上隆起之微凸結構係位於閥體薄膜23之入口閥門 結構231a、231b處，故使入口閥門結構231a、231b在未 作動時使入口閥片2313a、2313b與閥體座21之表面間具 © 有一間隙，同樣地，當密封環27設置於環繞出口閥門通 道223a、223b之凹槽228a、228b内時，由於其密封環27 係設置於閥體蓋體22之下表面221，因而該密封環27係 使閥體薄膜23之出口閥門結構232a、232b凸出而形成一 向下隆起於閥體蓋體22之微凸結構，此微凸結構僅其方 向與形成於入口閥門結構231a、231b之微凸結構係為反 向設置，然而其功能均與前述相同，因而不再贅述。 至於其餘分別設置於凹槽結構217a，217b、227a，227b 及226内之密封環26、27及28，主要用來分別使閥體座 21與閥體薄膜23、閥體薄膜23與閥體蓋體22以及閥體 蓋體22與致動裝置24之間緊密貼合時，防止流體外洩。 當然，上述之微凸結構除了使用凹槽及密封環來搭配 形成外，於一些實施例中，閥體座21及閥體蓋體22之微 凸結構亦可採用半導體製程，例如：黃光蝕刻或鍍膜或電 鑄技術，直接在閥體座21及閥體蓋體22上形成。 請同時參閱第三圖（a)〜（c)以及第四圖（a)〜 15 200944657 (c)’如圖所示’當蓋體25、致動裝置24、閥體蓋體22、 閥體薄膜23、密封環26、27、28以及閥體座21彼此對應 組裝設置後，閥體座21上之開口 213a、213b係分別與閥 體薄膜23上之入口閥門結構231a、231b以及閥體蓋體22 上之入口閥門通道222a、222b相對應，且閥體座21上之 開口 214a、214b則與閥體薄膜23上之出口閥片結構 232a、232b以及閥體蓋體22上之出口閥門通道223a、223b 相對應，並且，由於密封環26設置於凹槽216a、216b内， ❿ 使得閥體薄膜23之入口閥門結構231a、231b微凸起於閥 體座21之上，並藉由位於凹槽216a、216b内之密封環26 頂觸閥體薄膜23而產生一預力（Preforce)作用，使得入 口閥門結構231a、231b在未作動時則與閥體座21之表面 形成一間隙，同樣地，出口閥門結構232a、232b亦藉由 將密封環27設至於凹槽228a、228b中的相同方式與閥體 蓋體22之下表面221形成一間隙。 當以一電壓驅動致動器242時，致動裝置24產生彎 ❹ 曲變形，如第三圖（b)及第四圖（b)所示’致動裝置24 係朝箭號b所指之方向向下彎曲變形，使得壓力腔室225 之體積增加’因而產生一吸力’使閥體薄膜23之入口閥 門結構231a、231b、出口閥門結構232a、232b均承受一 向下之拉力’並使已具有一預力之入口閥門結構231a、 231b之入口閥片2313a、2313b迅速開啟（如第三圖（b)及 第四圖（b)所示），使液體可大量地自閥體座21上之入 口通道211a及211b被吸取進來，並流經閥體座21上之 16 200944657 開口 213a、213b、閥體薄膜23上之入口閥門結構231a、 231b之孔洞2312a、2312b、閥體蓋體22上之入口暫存腔 224a、224b、以及入口閥片通道222a、222b而流入壓力 腔室225之内，此時，由於閥體薄膜23之入口閥門結構 231a、231b、出口閥門結構232a、232b承受該向下拉力， 故位於另一端之出口閥門結構232a、232b係因該向下拉 力使得位於閥體薄膜23上之出口閥片2323a、2323b密封 住出口閥門通道223a、223b，而使得出口閥門結構232a、 ® 232b關閉。 當致動裝置24因電場方向改變而如第三圖（c)及第四 圖（c)所示之箭號a向上彎曲變形時，則會壓縮壓力腔 室225之體積，使得壓力腔室225對内部之流體產生一推 力，並使閥體薄膜23之入口閥門結構231a、231b、出口 閥門結構232a、232b承受一向上推力，此時’設置於凹 槽228a、228b内之密封環27上出口閥門結構232a、232b 的出口閥片2323a、2323b其可迅速開啟（如第二圖（0)及 _ 第四圖（c)所示），並使液體瞬間大量宣洩，由壓力腔室 225經由閥體蓋體22上之出口閥鬥通道223a、223b、閥 體薄膜23上之出口閥門結構232a、232b之孔洞2322a、 2322b、閥體座21上之出口暫存腔2l5a、215b、開口 214a、 214b及出口通道212a、212b而流出多流道流體輸送裝置 20之外，因而完成流體之傳輸過輥。 同樣地，此時由於入口閥門結構231a、231b係承受 該向上之推力，因而使得入口閥片2313a、2313b岔封住 17 200944657 開口 213a、213b，因而關閉入口閥門結構231a、231b， 使得流體不逆流，並且，藉由入口閥門結構231a、231b 及出口閥門結構232a、232b配合設置於閥體座21及閥體 蓋體22上之凹槽216a、216b以及凹槽228a、228b内的 密封環26、27之設計，可使流體於傳送過程中不會產生 回流的情形，達到高效率之傳輸，且本案多流道流體輸送 裝置於尺寸大小不變之閥體薄膜上設置多個入口閥門結 構及出口閥門結構，以及於閥體座上設置不同多個入口通 ❹ 道及出口通道，可形成多個流通管道以進行兩種不同流體 之混合及分流輸出。 本案多流道流體輸送裝置可藉由將閥體薄膜上所設 置入口閥門結構及出口閥門結構的配置進行變化，以因應 不同流體之混合及/或分流輸出，請參閱第五圖（a )〜 (e)，其係為本案多流道流體輸送裝置所包含之閥體薄膜 之多種實施例之結構示意圖，如圖所示，本案多流道流體 輸送裝置之閥體薄膜可選擇配置二進二出的混合及分流 ❿ 閥門結構（如第五圖（a)所示）、三進一出的混合閥門結 構配置（如第五圖（b)所示）、一進三出的分流閥門結構 配置（如第五圖（c)所示）、一進四出的分流閥門結構配 置（如第五圖（d)所示）或是四進一出的混合閥門結構 配置（如第五圖（e)所示），但本案多流道流體輸送裝置 之閥體薄膜的進出閥門結構的配置方式並不以此為限，只 要是閥體薄膜的進出閥門結構的配置方式可達到多流道 以進行流體之混合及/或分流輸出的功效均為本案所保護 18 200944657 之範圍。 _ 本案之多流道流體輸送裝置之閥體薄膜的入口閥門 結構及出口閥門結構的實施態樣並不僅侷限於第二圖（a) 及第二圖（d)所示之入口閥門結構231a、231b及出口閥 門結構232a、232b的型態，亦可使用具有相同厚度，相 同材料，不同剛性特性的閥門結構，其中，閥門結構的剛 性取決於閥門結構的外觀型態、所包含之延伸部的寬度及 數量，並配合控制致動裝置之震動頻率來調整進行分流或 ❹ 混合流體的比例，請參閱第六圖（a)〜（e)，其係為本 案較佳實施例之閥門結構之結構示意圖，如第六圖（a) 所示，閥門結構61具有閥片611、環繞閥片611週邊而設 置之鏤空孔洞612，以及在孔洞612之間更分別具有與閥 片611相連接之延伸部613，於本實施例中閥片611為一 圓形結構，孔洞612的數量為3，至於，延伸部613的數 量可為3且其形狀可呈現切線型態，但閥片611的形狀、 孔洞612以及延伸部613的數量及形狀並不以此為限。 請再參閱第六圖（b)，於一些實施例中，閥門結構62 同樣具有閥片621、環繞閥片621週邊而設置之鏤空孔洞 622，以及在孔洞622之間更分別具有與閥片621相連接 之延伸部623，於本實施例中閥片621為一圓形結構，孔 洞622的數量可為4，至於，延伸部623的數量為4且其 形狀可呈現直線型態，但上述閥片621形狀、孔洞622以 及延伸部623的數量及形狀並不以此為限。 請再參閱第六圖（c)，於一些實施例中，閥門結構63 19 200944657 同樣具有閥片631、孔洞632以及延伸部633，至於閥片 631、孔洞632以及延伸部633之間的連接關係係於上述 相同，因此不在述贅述，於本實施例中，閥片6 31為一圓 形結構，孔洞632的數量可為4，至於，延伸部633的數 量為4且其形狀可呈現長S形型態，但閥片631形狀、孔 洞632以及延伸部633的數量及形狀並不以此為限。 請再參閱第六圖（d)，於一些實施例中，閥門結構64 同樣具有閥片641、孔洞642以及延伸部643，至於閥片 ❹ 641、孔洞642以及延伸部643之間的連接關係係於上述 相同，因此不在述贅述，於本實施例中，閥片641為一圓 形結構，孔洞642的數量可為5，至於，延伸部643的數 量為5且其形狀可呈現短S形型態，但閥片641、孔洞642 以及延伸部643的數量及形狀並不以此為限。 請再參閱第六圖（e)，於一些實施例中，閥門結構65 同樣具有閥片651、孔洞652以及延伸部653，至於閥片 651、孔洞652以及延伸部653之間的連接關係係於上述 相同，因此不在述贅述，於本實施例中，閥片651為一類 似圓形結構且其周圍具有齒狀結構6511，孔洞652的數量 可為3，至於，延伸部653的數量為3且其形狀可呈現切 線型態，但閥片651形狀、孔洞652以及延伸部653的數 量及形狀並不以此為限。 當然，本案之多流道流體輸送裝置之閥體薄膜上所適 用之閥門結構的實施態樣並不僅限於第六圖（a)〜（e) 所揭露的型態，亦可由其它的變化，只要是使用具有相同 20 200944657 厚度，相同材料，但是剛性不同的閥門結構均為本案所保 護之範圍。 本案多流道流體輸送裝置之閥體薄膜上可藉由配置 第六圖（a)〜（e)所示之閥門結構及其變化型態，利用 不同剛性設計之閥門結構組合，因其鬆緊度不同造成在相 同艙體壓力下產生不同閥門開度，造成不同比例之液體混 合。並且，亦可透過適當流體管道與進出口閥門結構配 置，進行流體分流並分配至不同容器中，至於分配所需比 © 例亦可透過前述之不同剛性閥門結構設置來達成。 閥體薄膜的配置方式亦可以以相同剛性設計之兩個 以上出口閥門結構搭配不同剛性之兩入口閥門結構，可使 本案之多流道流體輸送裝置達到進行兩種不同液體之不 同比例的混合功效。 請參閱第七圖，其係為第一圖所示之單一壓力腔室配 合單一出入口閥門結構與第二圖（a)所示之單一壓力腔 室配合複數個出入口閥門結構之流量比對數據圖，本實驗 數據係使用第六圖（d)所示之閥門結構，對致動裝置之 驅動電壓（Driving voltage)為250Vpp，致動器的直徑 (PZT diameter)為 22 mm，致動器的厚度（PZT thickness ) 為 0.20mm，振動薄膜厚度（Diaphragm thickness)為 0. 15mm，閥門結構之閥片厚度（valve thickness )為 0.025mm，閥門結構之延伸部寬度（valve arm width)為 0. 4mm，如第七圖所示，其中箭頭A所指係代表本案第二 圖（a)所示之單一壓力腔室配合複數個出入口閥門結構 21 200944657 之多流道流體輸送裝置的流量波形圖，箭頭B所指係代表 第一圖所示之單一壓力腔室配合單一出入口閥門結構之 流體輸送裝置的流量波形圖，由圖式可知，於相同頻率 (Frequency, Hz)下本案可達到的流量（Flow rate)與 習知技術相較確實可大幅度的提升流量。 綜上所述，本案之多流道流體輸送裝置係適用於微泵 浦結構，主要由閥體座、閥體薄膜、閥體蓋體、振動薄膜 及致動器堆疊而成，藉由單一壓力腔室及致動器配合多個 ❿ 流通管道、多個進出口及其多個閥門結構之配置概念，能 夠在不增加整體尺寸下，使流量及揚程大為增加，非常適 合用於流量及揚程需求相對較高之應用場合； 另外，本案之多流道流體輸送裝置之閥體薄膜所具有 二個以上閥門結構係同厚度及同材料製成，藉由不同剛性 設計之閥門組合，因其鬆緊度不同造成在相同艙體壓力下 產生不同閥門開度，造成不同比例之液體混合。並且，亦 可透過適當流體管道與閥門結構配置，進行流體分流並分 配至不同容器中，至於分配所需比例亦可透過前述之不同 剛性閥門設置來達成。是以，本案之多流道流體輸送裝置 極具產業之價值，爰依法提出申請。 本案得由熟知此技術之人士任施匠思而為諸般修 飾，然皆不脫如附申請專利範圍所欲保護者。 22 200944657 【圖式簡單說明】 第一圖.其係為習知微果浦結構之結構示意圖。 第二圖（a):其係為本案較佳實施例之多流道流體輸送裝 置之分解結構示意圖。 第二圖（b):其係為第二圖（a)所示之閥體座的背面結 構示意圖。 第二圖（c):其係為第二圖所示之閥體蓋體之背面 結構不意圖。 ❺第—圖⑷：其係為第二圖（a)所示之閥體薄膜之結構 示意圖。 第一圖（e):其係為第二圖之組裝結構示意圖。 第三圖（a):其係為第二圖（e)所示之多流道流體輸送 ^置之未作動狀態之A-A剖面結構示意圖。 第一圖（b).其係為第三圖（a)之壓力腔室膨脹狀態示 意圖。 ❹第—圖（c).其係為第三圖（b)之壓力腔室壓縮狀態示 意圖。 ^四圖（a).其係為第二圖（e)所示之多流道流體輸送 、置之未作動狀態之B_B剖面結構示意圖。 ^ =圖（b):其係為第四圖（a)之壓力腔室膨脹狀態示 思圖。 2圖其係為第四圖⑴之壓力腔室壓縮狀態示 忍圖。 圖（a)〜（e).其係為本案多流道流體輸送裝置所 23 200944657 包含之閥體薄膜之多種實施例之結構示意圖。 ' 第六圖（a)〜（e)，其係為本案較佳實施例之閥門結構 之結構示意圖。 第七圖：其係為第一圖所示之單一壓力腔室配合單一出入 口閥門結構與第二圖（a)所示之單一壓力腔室配合複數 個出入口閥門結構之流量比對數據圖。200944657 » Nine, invention description: [Technical field to which the invention pertains] The present invention relates to a fluid delivery device, particularly a multi-channel fluid delivery device suitable for use in a micro-system structure. [Prior Art] ^In the fields of medicine, computer technology, printing, energy and other industries, the products are developing in the direction of refinement and miniaturization, among which micro-pumps, sprayers, inkjet heads, industrial printing The fluid transport structure contained in products such as devices is its key technology, so how to break through its technical bottleneck by innovative structure is an important part of development. ^ Please refer to the first figure, which is a schematic structural view of a conventional micro-pump structure. The conventional micro-pump structure 1 is composed of a valve body seat u, a valve body cover 12, a valve body film 13, and a microactuator. 14 and a cover body 15, wherein the valve body film 13 comprises an inlet valve structure 131 and an outlet valve structure 132. The valve body seat 11 includes an inlet passage 111 and an outlet passage 112, a valve body cover 12 and a microactuator 14. The valve body film 13 is disposed between the valve body seat 11 and the valve body cover 12. When a voltage is applied to the upper and lower poles of the microactuator 14, an electric field is generated, causing the microactuator 14 to bend under the action of the electric field, as the microactuator 14 is directed upward in the direction indicated by the arrow X. The bending deformation will increase the volume of the pressure chamber 123, thereby generating a suction force to open the inlet valve structure 131 of the valve body film 13, so that the liquid can be sucked in from the inlet passage 111 of the valve body seat. And flowing through the inlet valve structure 131 of the valve body film 13 and the inlet valve passage 121 on the valve body cover 12 to flow into the pressure chamber 123, and vice versa when the microactuator 14 changes direction due to the direction of the electric field. When the reverse direction is bent downward, the volume of the pressure chamber 123 is compressed, so that the pressure chamber 123 generates a thrust to the internal fluid, and the inlet valve structure m and the outlet gate structure 132 of the valve body film 13 are subjected to A downward thrust, and the outlet valve structure 132 will open, and the liquid ❹ ❿ from the pressure chamber 123 via the outlet valve passage 122 on the valve body cover 12, the outlet valve structure 132 of the valve body membrane 13, and the valve body Exit of u The passage m flows out of the fluid delivery device 1G, thus completing the fluid transfer process. s Although the conventional Li Lipu structure 1G can achieve the function of the circulating fluid, it uses a single pressure chamber with a single flow pipe, a single inlet and outlet valve structure design, if using the conventional micro (four) structure (7) different from the liquid When the ratio is mixed, it needs to be mixed by two pumps =... different ❹m (4), and then transferred to the micro-pump structure 10 into the household, 0 into the body, or only The use of a pump, but must be combined with the external flow implementation will increase the total flow of the entire pump system = send;: the lack of knowledge of the lack of flow 5 is an urgent need to solve the problem. SUMMARY OF THE INVENTION The present invention provides a multi-channel fluid transport device 7 200944657, which solves the mixing of different ratios of two different liquids by a conventional micro-pump structure, which is firstly required by two pumps. Mixing and mixing in different proportions, or using only one pump, but with an external flow regulating valve, will increase the complexity of the entire pumping system. In order to achieve the above object, a broader aspect of the present invention provides a multi-channel fluid transport device for transporting a fluid, comprising: a valve body seat having at least one outlet passage and at least one inlet passage; a valve The body cover body is stacked with the valve body seat; the valve body film is disposed between the valve body seat and the valve body cover body, and has two or more valve structures, and the valve structures are the same thickness and the same The material is made up; a plurality of temporary storage chambers are disposed between the valve body film and the valve body cover body, and between the valve body film and the valve body seat; and the vibration device is fixed to the valve body cover body. [Embodiment] Some exemplary embodiments embodying the features and advantages of the present invention will be described in detail in the description of the latter paragraph. It is to be understood that the present invention is capable of various modifications in the various aspects of the present invention, and the description and illustration are in the nature of The multi-channel fluid conveying device of the present invention mainly adopts a configuration concept of a plurality of flow pipes, a plurality of inlet pipes and a plurality of valve structures thereof by a single pressure chamber and an actuator, and can make the flow rate without increasing the overall size. And the lift is greatly increased, which is very suitable for the occasions where the flow and head demand are relatively high. 8 200944657 200944657 Ο 鲁°月> Read the first figure (a) ' is a schematic exploded view of the multi-channel fluid transport device of the preferred embodiment of the present invention, as shown in the figure, the multi-channel fluid of the present embodiment The conveying device 20 is composed of a valve body seat 21, a valve body cover 22, a valve body film 23, an actuating device 24 and a cover body 25. A pressure chamber 225 is formed between the valve body cover 22 and the actuating device 24. (as shown in the second figure (c)) 'mainly used for storing fluids, the multi-channel fluid delivery device 20 is assembled in such a manner that the valve body film 23 is disposed in the valve body seat 21 and the valve body cover 22. The valve body film 23 corresponds to the valve body seat 21 and the valve body cover 22, and is disposed between the valve body film 23 and the valve body cover 22 to be temporarily stored in the valve body 23 and the valve body. A second temporary storage chamber is formed between the body seats 21, and the corresponding position on the valve body cover 22 is further provided with an actuating device 24. The actuating device 24 is composed of a vibrating membrane 241 and an actuator 242, and Actuating to drive the multi-channel fluid delivery device 2, and finally placing the cover 25 above the actuation device 24, & Step (4) body seat 21, _ film 23, valve body cover 22, actuating device 24 and cover body 25 are correspondingly stacked to complete the assembly of the multi-channel fluid transport device (as shown in the second figure (e) Shown). The HI seat 21 and the valve body cover 22 are the main structures for guiding the fluid into and out of the multi-channel fluid J. Please refer to the second figure (1) and cooperate with the second figure (4). The second figure (5) is the second ^ (a) Schematic diagram of the back structure of the reading body, as shown in the figure, there is a human Q channel 211a, 211b two (d = :: set = not limited to this - multi-flow flow Zhao wheel The feeding device: the number of the passages and the outlet passages may be at least one of 9 200944657 or more, respectively, and the flow system may be input from the outside, and respectively transmitted to the openings 213a, 213b of the valve body seat 21 via the inlet flow passages 211a, 211b', and in the present embodiment In the example, the second temporary storage chamber formed between the valve body film 23 and the valve body seat 21 is the outlet temporary storage chamber 20a, 215b' shown in the drawing, but not limited thereto, which is composed of a valve body seat. 21 is partially recessed at a position corresponding to the outlet flow passages 212a, 212b to form 'and communicates with the sigma flow passages 212a, 212b, respectively, for temporarily storing the fluid and The fluid is delivered to the outlet passages 212a, 21 by the outlet temporary chambers 215a, 215b via the openings 214a, 214b 2b flows out and 'has a plurality of groove structures on the valve body seat 21 for a sealing ring 26 (as shown in the third figure (a) and the fourth figure (a)) to be disposed thereon In this embodiment, the valve body seat 21 has grooves 216a and 216b surrounding the periphery of the openings 213a and 213b, and grooves 217a and 217b surrounding the periphery of the outlet temporary storage chambers 215a and 215b. Please refer to the second figure (c). And the second figure (a), wherein the second figure (c) is a schematic view of the back structure of the valve body cover shown in the second figure (a), as shown in the figure φ, the valve body cover 22 has a The upper surface 220 and the lower surface 221, and the valve body cover 22 also have inlet valve passages 222a, 222b and outlet valve passages 223a, 223b extending through the upper surface 220 to the lower surface 221, and the inlet valve passages 222a, 222b are They are respectively disposed at positions corresponding to the openings 213a, 213b of the valve body seat 21, and the outlet valve passages 223a, 223b are respectively disposed corresponding to the openings 214a, 214b in the outlet temporary chambers 215a, 215b of the valve body seat 21, respectively. And the position between the valve body film 23 and the body cover 22 in this embodiment 200944657 The plurality of first temporary storage chambers are the inlet temporary storage chambers 224a, 224b shown in the figure, and are not limited thereto, and are connected to the inlet valve passage 222a by the lower surface 221 of the valve body cover 22, The corresponding position of 222b is partially recessed and is connected to the inlet valve passages 222a, 222b. Please refer to the second figure (c), as shown, the upper surface 220 of the valve body cover 22 is The recesses are formed to form a pressure chamber 225 corresponding to the actuator 242 of the actuator 24, and the pressure chamber 225 is communicated to the inlet chamber 224a, 224b via the inlet valve passages 222a, 222b, respectively. And simultaneously communicating with the outlet valve passages 223a, 223b, therefore, when the actuator 242 is actuated by the voltage to cause the actuator 24 to be convexly deformed, causing the volume of the pressure chamber 225 to expand to generate a negative pressure difference, the fluid can be made Flow through the inlet valve passages 222a, 222b into the pressure chamber 225, after which the actuator 242 will cause the actuator 24 to contract the deformation pressure chamber 225 when the direction of the electric field applied to the actuator 242 is changed. The volume is reduced, causing the pressure chamber 225 to generate The positive pressure differential causes fluid to flow out of the pressure chamber 225 from the outlet valve passages 223a, 223b, while at the same time, some of the splitting fluid will flow into the inlet valve passages 222a, 222b and the inlet temporary chambers 224a, 224b, however At this time, the inlet valve structures 231a and 231b (as shown in the third (c) and fourth (c) drawings) are in a state of being closed by pressure, so that the fluid does not pass through the inlet valve pieces 2313a and 2313b. The phenomenon of backflow is generated. As for the fluid temporarily stored in the inlet temporary storage chambers 224a, 224b, the actuator 242 is again actuated by the voltage, and the actuator 24 is repeatedly deformed again to increase the volume of the pressure chamber 225. Then, the inlet temporary storage chambers 224a, 224b pass through the inlet valve passages 222a, 222b into the 11200944657 pressure chamber 225 for fluid delivery. In addition, the valve body cover 22 also has a plurality of groove structures. In the embodiment, the upper surface 220 of the valve body cover 22 has a groove 226 provided around the pressure chamber 225. A seal ring 28 (shown in Figures 3(a) and 4(a)) is disposed therein, and on the lower surface 221 has grooves 227a, 227b disposed around the inlet temporary chamber 22, such as 224b. And surrounding the grooves 228a, 228b disposed in the outlet valve passages 223a, 223b, and similarly, the groove structure is used to provide a sealing ring 27 (such as the third figure (a) and the fourth figure (a) Shown in it). Please refer to the second figure (d) and cooperate with the second figure (a), wherein the second figure (d) is the structural diagram of the valve body film shown in the second figure (a), as shown in the figure, the valve body film 23 is mainly produced by conventional processing, or yellow light etching, or laser processing, or electroforming processing, or electric discharge machining, and is a sheet structure having substantially the same thickness, and has a plurality of hollow valve switches thereon. The first valve switch and the second valve switch are included. In the present embodiment, the first valve opening relationship is the inlet valve structure 231a, 231b, and the second valve opening relationship is the outlet valve structure 232a, 232b 'but not To this end, the number of the inlet valve structure and the outlet valve structure provided by the multi-channel fluid delivery device 20 is at least one or more, wherein the inlet valve structures 231a, 231b have inlet valve plates 2313a, 2313b and a plurality of surrounding valves, respectively. Hollow holes 2312a, 2312b provided around the inlet valve pieces 2313a, 2313b, and further having extensions 2311a, 2311b connected to the inlet valve pieces 2313a, 2313b between the holes 2312a, 2312b, respectively, when the valve body is thin 23, when subjected to a stress transmitted from the pressure chamber 225, as shown in the third 12 200944657 (c) and the fourth (c), the inlet valve structures 231a, 231b are entirely flat against the valve body seat 21. At this time, the inlet valve pieces 2313a, 2313b abut against the protruding portions of the sealing ring 26 on the grooves 216a, 216b, and seal the openings 213a, 213b on the valve body seat 21, and the hollow holes 2312a, 2312b and extensions at the periphery thereof The portions 2311a and 2311b are floated on the valve body seat 21, so that the inlet valve structures 231a and 231b are closed to prevent the fluid from flowing out. When the valve body film 23 is subjected to the suction of the pressure chamber 225 to increase the volume, the seal ring 26 disposed in the recesses 216a, 216b of the valve body seat 21 has provided the inlet valve structure 231a, 231b. (Preforce), thus the inlet valve plates 2313a, 2313b can be made to have a greater pre-tightening effect by the support of the extensions 2311a, 2311b to prevent backflow, when the inlet valve structure 231a is caused by the negative pressure of the pressure chamber 225. 231b generates displacement (as shown in the third figure (b) and the fourth figure (b)). At this time, the fluid can flow from the valve body seat 21 to the inlet of the valve body cover 22 via the hollow holes 2312a, 2312b. The temporary chambers 224a, 224b are transferred to the pressure chamber 225 via the inlet chambers 224a, 224b and the inlet valve passages 222a, 222b, such that the inlet valve structures 231a, 231b can accommodate the pressure chamber 225 The positive and negative pressure differences are generated and quickly turned on or off to control the ingress and egress of fluid and prevent fluid from flowing back to the valve body seat 21. Similarly, another valve structure located on the same valve body film 23 is the outlet valve structure 232a, 232b, wherein the outlet valve plates 2323a, 2323b, the extension portions 2321a, 2321b, and the holes 2322a, 2322b are operated in the same manner as the inlet valve. The structures 231a, 231b are identical and thus are no longer described in detail in the 2009, 2009, 657, except that the seal ring 27 around the outlet valve structures 232a, 232b is disposed in a direction opposite the seal ring 26 of the inlet valve structures 231a, 231b, thus compressing the pressure chamber 225 When a thrust is generated, the seal ring 27 disposed in the recess 228a, 228b of the valve body cover 22 will provide the outlet valve structure 232a, 232b - Preforce, such that the outlet valve plates 2323a, 2323b can be extended The support of portions 2321a, 2321b produces a greater pre-covering effect to prevent backflow (as shown in Figures 3(b) and 4(b)), when the pressure is due to the positive pressure of the pressure chamber 225 The valve structure ❹ 232a, 232b is displaced upwardly. At this time, the fluid can flow from the pressure chamber 225 through the valve body cover 22 to the outlet temporary chambers 215a, 215b of the valve body seat 21 via the hollow holes 2322a, 2322b. And can be discharged through the openings 214a, 214b and the outlet flow channels 212a, 212b, such that the fluid can be drained from the pressure chamber 225 via the opening mechanism of the outlet valve structures 232a, 232b to achieve fluid delivery. Functions (as shown in Figure 3 (c) and Figure 4 (c)). _ Refer to the third figure (a) and the fourth figure (a), which are schematic diagrams of the AA and BB cross-sectional structures of the multi-channel fluid delivery device shown in the second figure (e), respectively. In this embodiment, all of the sealing rings 26, 27, and 28 are made of a rubber material which is excellent in chemical resistance, but is not limited thereto, and is disposed on the valve body seat 21 to surround the openings 213a and 231b. The seal ring 26 in the grooves 216a, 216b may be a ring structure having a thickness greater than the depth of the grooves 216a, 216b such that the seal ring 26 disposed in the grooves 216a, 216b protrudes from the valve body seat 21 The surface constitutes a micro-convex structure, so that the inlet valve pieces 2313a, 2313b of the 200944657 inlet valve structure 231a, 231b of the valve body film 23 disposed on the valve body seat 21 form an upward direction due to the micro-convex structure of the sealing ring 26. The ridge is raised, and the rest of the valve body film 23 abuts against the valve body cover 22, so that the micro-convex structure pushes the inlet valve structure 231 a, 231 b to generate a pre-force effect, which helps to generate more Large pre-tightening effect to prevent backflow, and due to the sealing ring 26 The upper raised micro-convex structure is located at the inlet valve structures 231a, 231b of the valve body film 23, so that the inlet valve structures 231a, 231b have the inlet valve plates 2313a, 2313b and the surface of the valve body seat 21 when not in operation © There is a gap, and similarly, when the seal ring 27 is disposed in the recesses 228a, 228b surrounding the outlet valve passages 223a, 223b, since the seal ring 27 is disposed on the lower surface 221 of the valve body cover 22, the seal ring The 27 system causes the outlet valve structures 232a, 232b of the valve body film 23 to project to form a micro-convex structure that bulges downwardly from the valve body cover 22, the micro-convex structure being only in the direction of the inlet valve structure 231a, 231b. The convex structure is set in the reverse direction, however, its functions are the same as those described above, and thus will not be described again. The remaining seal rings 26, 27 and 28 respectively disposed in the groove structures 217a, 217b, 227a, 227b and 226 are mainly used to respectively form the valve body seat 21 and the valve body film 23, the valve body film 23 and the valve body cover. When the body 22 and the valve body cover 22 are in close contact with the actuating device 24, fluid leakage is prevented. Of course, the above-mentioned micro-convex structure is formed by using a groove and a sealing ring. In some embodiments, the micro-convex structure of the valve body 21 and the valve body cover 22 can also be a semiconductor process, for example, yellow etching. Or coating or electroforming technology is formed directly on the valve body seat 21 and the valve body cover 22. Please also refer to the third figure (a) to (c) and the fourth figure (a) to 15 200944657 (c) 'As shown in the figure 'When the cover 25, the actuating device 24, the valve body cover 22, the valve body After the film 23, the seal rings 26, 27, 28 and the valve body seat 21 are assembled correspondingly to each other, the openings 213a, 213b on the valve body seat 21 are respectively connected to the inlet valve structures 231a, 231b and the valve body cover on the valve body film 23. The inlet valve passages 222a, 222b on the body 22 correspond, and the openings 214a, 214b in the valve body seat 21 and the outlet valve plate structures 232a, 232b on the valve body membrane 23 and the outlet valve passage on the valve body cover 22 223a, 223b correspond, and since the seal ring 26 is disposed in the recesses 216a, 216b, the inlet valve structure 231a, 231b of the valve body membrane 23 is slightly raised above the valve body seat 21, and is located in the recess The sealing ring 26 in the grooves 216a, 216b touches the valve body film 23 to generate a pre-force effect, so that the inlet valve structures 231a, 231b form a gap with the surface of the valve body seat 21 when not actuated, similarly The outlet valve structures 232a, 232b are also provided by the sealing ring 27 to the recesses 228a, 22 The same manner as in 8b forms a gap with the lower surface 221 of the valve body cover 22. When the actuator 242 is driven by a voltage, the actuating device 24 generates a bending deformation, as shown in the third figure (b) and the fourth figure (b), the actuator device 24 is directed to the arrow b. The direction is bent downwardly, causing the volume of the pressure chamber 225 to increase 'and thus generate a suction' such that the inlet valve structures 231a, 231b of the valve body membrane 23, the outlet valve structures 232a, 232b are subjected to a downward pulling force 'and have The inlet valve plates 2313a, 2313b of the inlet valve structures 231a, 231b of a pre-force are rapidly opened (as shown in the third figure (b) and the fourth figure (b)), so that the liquid can be largely from the valve body seat 21. The inlet passages 211a and 211b are sucked in and flow through the openings 16213, 213b of the valve body seat 21, the holes 2312a, 2312b of the inlet valve structures 231a, 231b on the valve body film 23, and the valve body cover 22 The inlet temporary chambers 224a, 224b and the inlet valve passages 222a, 222b flow into the pressure chamber 225. At this time, the inlet valve structures 231a, 231b and the outlet valve structures 232a, 232b of the valve body film 23 are subjected to the direction. Pull-down force, so the outlet valve at the other end The structure 232a, 232b is such that the outlet valve plates 2323a, 2323b on the valve body film 23 seal the outlet valve passages 223a, 223b due to the downward pulling force, so that the outlet valve structures 232a, ® 232b are closed. When the actuating device 24 is bent upwardly as the arrow a shown in the third (c) and fourth (c) directions is changed due to the change of the electric field direction, the volume of the pressure chamber 225 is compressed, so that the pressure chamber 225 A thrust is generated to the internal fluid, and the inlet valve structures 231a, 231b and the outlet valve structures 232a, 232b of the valve body membrane 23 are subjected to an upward thrust, and at this time, the outlet ring 27 is disposed at the outlet of the groove 228a, 228b. The outlet valve plates 2323a, 2323b of the valve structures 232a, 232b can be quickly opened (as shown in the second figure (0) and the fourth figure (c)), and the liquid is instantaneously vented in a large amount, from the pressure chamber 225 via the valve The outlet valve body passages 223a, 223b on the body cover 22, the holes 2322a, 2322b of the outlet valve structures 232a, 232b on the valve body film 23, the outlet temporary chambers 2515, 215b, the openings 214a, 214b on the valve body seat 21. The outlet passages 212a, 212b exit the multi-channel fluid delivery device 20, thereby completing the transfer of the fluid through the rollers. Similarly, at this time, since the inlet valve structures 231a, 231b are subjected to the upward thrust, the inlet valve pieces 2313a, 2313b are sealed to the 17 200944657 openings 213a, 213b, thereby closing the inlet valve structures 231a, 231b so that the fluid does not flow backwards. And the inlet valve structure 231a, 231b and the outlet valve structure 232a, 232b cooperate with the groove 216a, 216b disposed on the valve body seat 21 and the valve body cover 22, and the seal ring 26 in the groove 228a, 228b, The design of 27 can make the fluid flow without returning during the conveying process, and achieve high efficiency transmission. In this case, the multi-channel fluid conveying device is provided with a plurality of inlet valve structures and outlets on the valve body film of constant size. The valve structure, as well as the plurality of inlet passages and outlet passages on the valve body seat, can form a plurality of flow conduits for mixing and splitting the two different fluids. The multi-channel fluid transfer device of the present invention can be changed by mixing the arrangement of the inlet valve structure and the outlet valve structure provided on the valve body film to respond to the mixing and/or shunting output of different fluids, please refer to the fifth figure (a)~ (e), which is a schematic structural view of various embodiments of the valve body film included in the multi-channel fluid transport device of the present invention. As shown in the figure, the valve body film of the multi-channel fluid transport device of the present invention can be configured in two or two. Mixing and diverting valve structure (as shown in Figure 5 (a)), three-in-one-out mixing valve structure configuration (as shown in Figure 5 (b)), one-in and three-out split valve structure configuration ( As shown in Figure 5 (c), the configuration of the diverter valve in one in and four out (as shown in Figure 5 (d)) or the configuration of the mixing valve in four in and out (as shown in Figure 5 (e) Show), but the arrangement of the inlet and outlet valve structure of the valve body film of the multi-channel fluid conveying device of the present invention is not limited thereto, as long as the valve body membrane inlet and outlet valve structure is arranged in a manner to achieve multiple flow paths for fluid Mixing and / or splitting The effectiveness of both the scope of the case 18,200,944,657 protected. The embodiment of the inlet valve structure and the outlet valve structure of the valve body film of the multi-channel fluid transfer device of the present invention is not limited to the inlet valve structure 231a shown in the second (a) and second (d), The shape of the 231b and the outlet valve structures 232a, 232b may also be a valve structure having the same thickness, the same material, and different rigidity characteristics, wherein the rigidity of the valve structure depends on the appearance of the valve structure and the extension of the valve structure. Width and number, and adjusting the ratio of the vibration frequency of the actuating device to adjust the proportion of the split or enthalpy mixed fluid, please refer to the sixth figure (a) to (e), which is the structure of the valve structure of the preferred embodiment of the present invention. As shown in the sixth diagram (a), the valve structure 61 has a valve piece 611, a hollow hole 612 disposed around the periphery of the valve piece 611, and an extension portion respectively connected to the valve piece 611 between the holes 612. 613, in the embodiment, the valve piece 611 has a circular structure, and the number of the holes 612 is 3. As for the number of the extending portions 613, the shape of the extending portion 613 can be 3, and the shape thereof can assume a tangential shape, but the shape of the valve piece 611, The number and shape of the holes 612 and the extensions 613 are not limited thereto. Referring again to FIG. 6(b), in some embodiments, the valve structure 62 also has a valve plate 621, a hollow hole 622 disposed around the periphery of the valve plate 621, and a valve plate 621 between the holes 622. In the embodiment, the valve piece 621 has a circular structure, and the number of the holes 622 can be 4. As for the number of the extending portions 623 is 4 and the shape thereof can be linear, the above valve The number and shape of the shape of the piece 621, the hole 622, and the extending portion 623 are not limited thereto. Referring to FIG. 6(c) again, in some embodiments, the valve structure 63 19 200944657 also has a valve plate 631, a hole 632 and an extension 633 for the connection between the valve piece 631, the hole 632 and the extension 633. In the present embodiment, the valve piece 631 is a circular structure, and the number of the holes 632 can be four. As for the number of the extending portions 633 is 4 and the shape can be long S The shape, but the shape and shape of the valve piece 631, the hole 632 and the extension 633 are not limited thereto. Referring again to the sixth diagram (d), in some embodiments, the valve structure 64 also has a valve plate 641, a bore 642 and an extension 643. The connection between the valve flap 641, the bore 642 and the extension 643 is The same as above, therefore, the description is not described herein. In the present embodiment, the valve piece 641 has a circular structure, and the number of the holes 642 can be 5. As for the number of the extending portions 643 is 5 and the shape can be short S-shaped. However, the number and shape of the valve piece 641, the hole 642 and the extending portion 643 are not limited thereto. Referring again to FIG. 6(e), in some embodiments, the valve structure 65 also has a valve plate 651, a hole 652, and an extension 653. The connection between the valve plate 651, the hole 652, and the extension 653 is tied to The same applies to the above description. Therefore, in the present embodiment, the valve piece 651 has a circular structure and has a toothed structure 6511 around it. The number of the holes 652 can be three, and the number of the extensions 653 is three. The shape may take a tangential shape, but the shape and shape of the valve plate 651, the hole 652, and the extension 653 are not limited thereto. Of course, the embodiment of the valve structure applied to the valve body film of the multi-channel fluid transport device of the present invention is not limited to the type disclosed in the sixth figure (a) to (e), and may be changed by other It is the same as the thickness of the same 20 200944657, the same material, but the rigidity of the valve structure is protected by the scope of this case. In the valve body film of the multi-channel fluid conveying device of the present invention, the valve structure shown in the sixth figure (a) to (e) and its variation type can be used, and the valve structure combination of different rigid designs is utilized, because of the tightness thereof. Different causes different valve opening under the same cabin pressure, resulting in different proportions of liquid mixing. Moreover, the fluid can be shunted and distributed to different containers through proper fluid piping and inlet and outlet valve configurations. The ratio of the required distribution can also be achieved by the different rigid valve structure settings described above. The valve body film can also be arranged in two or more outlet valve structures of the same rigid design with two rigid inlet valve structures, so that the multi-channel fluid conveying device of the present invention can achieve the mixing effect of different ratios of two different liquids. . Please refer to the seventh figure, which is the flow ratio comparison data of the single pressure chamber with the single inlet and outlet valve structure shown in the first figure and the single pressure chamber shown in the second figure (a). The experimental data is based on the valve structure shown in the sixth diagram (d). The driving voltage for the actuator is 250 Vpp, the diameter of the actuator is 22 mm, and the thickness of the actuator. 4mm, the valve body width of the valve is 0. 4mm, the valve structure has a valve thickness of 0. 4mm, the valve structure has a valve thickness of 0. 4mm, As shown in the seventh figure, the arrow A indicates the flow waveform of the multi-channel fluid conveying device of the single pressure chamber shown in the second figure (a) of the present case and the plurality of inlet and outlet valve structures 21 200944657, arrow B The flow chart of the fluid delivery device with a single pressure chamber and a single inlet and outlet valve structure shown in the first figure is shown in the figure. At the same frequency (Frequency, Hz), the case can be The flow rate achieved can actually increase the flow rate significantly compared with the conventional technology. In summary, the multi-channel fluid delivery device of the present invention is suitable for a micro-pump structure, which is mainly composed of a valve body seat, a valve body film, a valve body cover body, a vibration film and an actuator, and is formed by a single pressure. The chamber and the actuator cooperate with a plurality of 流通 flow pipes, a plurality of inlets and outlets, and a plurality of valve structure configurations, which can greatly increase the flow rate and the lift without increasing the overall size, and are very suitable for flow and lift. In the application where the demand is relatively high; in addition, the valve body film of the multi-channel fluid conveying device of the present invention has two or more valve structures which are made of the same thickness and the same material, and the valve combination of different rigid designs is tight. Different degrees result in different valve opening under the same cabin pressure, resulting in different proportions of liquid mixing. Also, the fluid can be shunted and dispensed into different containers through proper fluid piping and valve configuration. The required ratio can also be achieved through the different rigid valve settings described above. Therefore, the multi-channel fluid conveying device in this case is of great industrial value and is submitted in accordance with the law. This case has been modified by people who are familiar with the technology, but it is not intended to be protected by the scope of the patent application. 22 200944657 [Simple description of the diagram] The first figure is a schematic diagram of the structure of the conventional micro-Pu. Fig. 2(a) is a schematic exploded view of the multi-channel fluid transporting device of the preferred embodiment of the present invention. Fig. 2(b) is a schematic view showing the structure of the back surface of the valve body seat shown in Fig. 2(a). Fig. 2(c): This is not intended to be the rear structure of the valve body cover shown in Fig. 2. ❺第图(4): This is a schematic view of the structure of the valve body film shown in the second figure (a). First figure (e): It is a schematic diagram of the assembled structure of the second figure. Fig. 3(a) is a schematic view showing the structure of the A-A cross section in the unactuated state of the multi-channel fluid transport shown in Fig. 2(e). The first figure (b) is a schematic view of the pressure chamber expansion state of the third figure (a). ❹第图(c). This is the pressure chamber compression state of the third figure (b). ^4 (a). It is a schematic diagram of the B_B cross-sectional structure of the multi-channel fluid transport and the unactuated state shown in the second diagram (e). ^ = Figure (b): This is the pressure chamber expansion state diagram of the fourth diagram (a). 2 is a pressure chamber compression state diagram of the fourth figure (1). Figures (a) to (e) are structural schematic views of various embodiments of the valve body film included in the multi-channel fluid transfer device of the present invention. Fig. 6(a) to (e) are structural schematic views of the valve structure of the preferred embodiment of the present invention. Figure 7 is a flow rate comparison data diagram of a single pressure chamber with a single inlet and outlet valve structure as shown in the first figure and a single pressure chamber shown in Fig. 2(a) with a plurality of inlet and outlet valve structures.
❾ 【主要元件符號說明】 微泵浦結構：10 閥體座：11、21 入 口通道：111、211a、211b 出 口通道：112、212a、212b 閥體蓋體:12、22 壓力腔室：123、225 閥體薄膜：13、23 微致動器：14 多流道流體輸送裝置:2〇 蓋體：15、25 致動裝置:24 振動薄膜:241 致動器：242 齒狀結構:6511 出口暫存腔：215a、215b 上表面：220 下表面：221 入口暫存腔：224a、224b 入 口閥片：2313a、2313b 出 口閥片：2323a、2323b 方向：a、b、x 密封環:26、27、28 入口閥門結構：231a、231b 出口閥門結構：232a、232b 入口閥門通道：221 出口閥門通道：222 壓力腔室：226 密封環：26、27、28 入口閥片：2313 出口閥片：2323 24 200944657❾ [Main component symbol description] Micro-pump structure: 10 valve body seat: 11, 21 inlet channel: 111, 211a, 211b outlet channel: 112, 212a, 212b valve body cover: 12, 22 pressure chamber: 123, 225 Body film: 13, 23 Microactuator: 14 Multi-channel fluid delivery device: 2〇 Cover: 15, 25 Actuator: 24 Vibrating membrane: 241 Actuator: 242 Toothed structure: 6511 Export Storage chamber: 215a, 215b Upper surface: 220 Lower surface: 221 Entrance temporary storage chamber: 224a, 224b Inlet valve plate: 2313a, 2313b Outlet valve plate: 2323a, 2323b Direction: a, b, x Sealing ring: 26, 27, 28 inlet valve structure: 231a, 231b outlet valve structure: 232a, 232b inlet valve passage: 221 outlet valve passage: 222 pressure chamber: 226 seal ring: 26, 27, 28 inlet valve: 2313 outlet valve: 2323 24 200944657
開口 ： 213a、213b 、214a、214b 入口閥片通道:121、222a、222b 出口閥門通道:122、223a、223b 出口閥門結構:132、232a、232b 入口閥門結構:131、231a、231b 凹槽：216a、216b、217a、217b、226、227a、227b、 228a ' 228b 延伸部：2311a、2311b、2321a、2321b 閥門結構:61、62、63、64、65 閥片：611、621、631、641、651 孔洞：2312a、2312b、2322a、2322b、612、622、632、 642、652 延伸部：613、623、633、643、653 25Opening: 213a, 213b, 214a, 214b inlet valve channel: 121, 222a, 222b outlet valve channel: 122, 223a, 223b outlet valve structure: 132, 232a, 232b inlet valve structure: 131, 231a, 231b groove: 216a , 216b, 217a, 217b, 226, 227a, 227b, 228a '228b Extension: 2311a, 2311b, 2321a, 2321b Valve structure: 61, 62, 63, 64, 65 Valves: 611, 621, 631, 641, 651 Holes: 2312a, 2312b, 2322a, 2322b, 612, 622, 632, 642, 652 Extensions: 613, 623, 633, 643, 653 25