TW200943406A - Semiconductor element manufacturing method - Google Patents
Semiconductor element manufacturing methodInfo
- Publication number
- TW200943406A TW200943406A TW097151669A TW97151669A TW200943406A TW 200943406 A TW200943406 A TW 200943406A TW 097151669 A TW097151669 A TW 097151669A TW 97151669 A TW97151669 A TW 97151669A TW 200943406 A TW200943406 A TW 200943406A
- Authority
- TW
- Taiwan
- Prior art keywords
- base film
- bore holes
- pickup
- onto
- cut
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/146—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the fluid stream containing a liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Dicing (AREA)
- Adhesive Tapes (AREA)
- Laser Beam Processing (AREA)
Abstract
It is possible to provide a semiconductor element manufacturing method which can preferably perform a pickup step as a next step while performing a high-quality water jet laser dicing process. The method includes: a step [A] for bonding an object to be cut (for example, one side of the object) onto an adhesion sheet for a water jet laser dicing formed by an adhesive layer layered on a base film having bore holes and subjecting the object to a water jet laser dicing process; a step [B1] for bonding a pickup tape formed by an adhesive layer layered on a base film having no bore holes, onto the base film of the adhesion sheet having bore holes; or a step [B2] for transferring the other side of the object to be cut and subjected to the dicing process, onto the pickup tape formed by layering an adhesive layer on the base film having no bore holes; and a step [C] for feeding the object to be cut to the pickup step.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008002814A JP2009164502A (en) | 2008-01-10 | 2008-01-10 | Semiconductor element manufacturing method |
JP2008002812A JP2009164501A (en) | 2008-01-10 | 2008-01-10 | Method for manufacturing semiconductor element |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200943406A true TW200943406A (en) | 2009-10-16 |
Family
ID=40853052
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW097151669A TW200943406A (en) | 2008-01-10 | 2008-12-31 | Semiconductor element manufacturing method |
Country Status (2)
Country | Link |
---|---|
TW (1) | TW200943406A (en) |
WO (1) | WO2009087930A1 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI582209B (en) * | 2013-02-08 | 2017-05-11 | Nitto Denko Corp | Adhesive tape |
TWI595069B (en) * | 2013-02-08 | 2017-08-11 | Nitto Denko Corp | Adhesive tape |
CN107756518A (en) * | 2017-11-07 | 2018-03-06 | 上海御渡半导体科技有限公司 | A kind of circuit board punch mechanism with clamping device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11043409B2 (en) | 2018-03-05 | 2021-06-22 | Infineon Technologies Ag | Method of forming contacts to an embedded semiconductor die and related semiconductor packages |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4128843B2 (en) * | 2002-10-16 | 2008-07-30 | 古河電気工業株式会社 | Semiconductor chip manufacturing method |
TWI284580B (en) * | 2002-11-05 | 2007-08-01 | New Wave Res | Method and apparatus for cutting devices from substrates |
JP2005167042A (en) * | 2003-12-04 | 2005-06-23 | Furukawa Electric Co Ltd:The | Adhesive tape for fixing semiconductor wafer |
JP4505789B2 (en) * | 2004-02-10 | 2010-07-21 | 株式会社東京精密 | Chip manufacturing method |
-
2008
- 2008-12-26 WO PCT/JP2008/073756 patent/WO2009087930A1/en active Application Filing
- 2008-12-31 TW TW097151669A patent/TW200943406A/en unknown
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI582209B (en) * | 2013-02-08 | 2017-05-11 | Nitto Denko Corp | Adhesive tape |
TWI595069B (en) * | 2013-02-08 | 2017-08-11 | Nitto Denko Corp | Adhesive tape |
CN107756518A (en) * | 2017-11-07 | 2018-03-06 | 上海御渡半导体科技有限公司 | A kind of circuit board punch mechanism with clamping device |
Also Published As
Publication number | Publication date |
---|---|
WO2009087930A1 (en) | 2009-07-16 |
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