TW200942746A - System and methods for conservation of exhaust heat energy - Google Patents

System and methods for conservation of exhaust heat energy

Info

Publication number
TW200942746A
TW200942746A TW98103574A TW98103574A TW200942746A TW 200942746 A TW200942746 A TW 200942746A TW 98103574 A TW98103574 A TW 98103574A TW 98103574 A TW98103574 A TW 98103574A TW 200942746 A TW200942746 A TW 200942746A
Authority
TW
Taiwan
Prior art keywords
methods
conservation
heat energy
exhaust heat
conduits
Prior art date
Application number
TW98103574A
Other languages
English (en)
Inventor
Phil Chandler
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of TW200942746A publication Critical patent/TW200942746A/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L59/00—Thermal insulation in general
    • F16L59/14—Arrangements for the insulation of pipes or pipe systems
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/1919—Control of temperature characterised by the use of electric means characterised by the type of controller
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6416—With heating or cooling of the system
    • Y10T137/6443—With burner
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6416—With heating or cooling of the system
    • Y10T137/6579—Circulating fluid in heat exchange relationship

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
TW98103574A 2008-02-04 2009-02-04 System and methods for conservation of exhaust heat energy TW200942746A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US2612608P 2008-02-04 2008-02-04

Publications (1)

Publication Number Publication Date
TW200942746A true TW200942746A (en) 2009-10-16

Family

ID=40937895

Family Applications (1)

Application Number Title Priority Date Filing Date
TW98103574A TW200942746A (en) 2008-02-04 2009-02-04 System and methods for conservation of exhaust heat energy

Country Status (5)

Country Link
US (1) US20090200008A1 (zh)
KR (1) KR20100129287A (zh)
CN (1) CN101939817A (zh)
TW (1) TW200942746A (zh)
WO (1) WO2009100083A2 (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0505674D0 (en) * 2005-03-22 2005-04-27 Boc Group Plc Trap device
KR101314187B1 (ko) * 2012-02-17 2013-10-04 주식회사 글로벌스탠다드테크놀로지 스크러버 장비의 에너지 저감용 제어 장치 및 그 방법과 시스템

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10220909A (ja) * 1996-12-03 1998-08-21 Komatsu Ltd 流体温度制御装置
JP2001126988A (ja) * 1999-10-22 2001-05-11 Seiko Epson Corp 半導体製造装置
KR100420216B1 (ko) * 2000-12-27 2004-03-04 이후근 세라믹 관을 이용하여 가스 스크러버 연소로의 부식을억제하는 방법
US7090001B2 (en) * 2003-01-31 2006-08-15 Cooligy, Inc. Optimized multiple heat pipe blocks for electronics cooling
KR20060071670A (ko) * 2004-12-22 2006-06-27 삼성전자주식회사 히팅 재킷을 갖는 반도체 소자 제조 장치

Also Published As

Publication number Publication date
WO2009100083A2 (en) 2009-08-13
US20090200008A1 (en) 2009-08-13
CN101939817A (zh) 2011-01-05
WO2009100083A3 (en) 2009-10-08
KR20100129287A (ko) 2010-12-08

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