TW200942476A - Float-type conveying device and float-type conveying method - Google Patents

Float-type conveying device and float-type conveying method

Info

Publication number
TW200942476A
TW200942476A TW098108445A TW98108445A TW200942476A TW 200942476 A TW200942476 A TW 200942476A TW 098108445 A TW098108445 A TW 098108445A TW 98108445 A TW98108445 A TW 98108445A TW 200942476 A TW200942476 A TW 200942476A
Authority
TW
Taiwan
Prior art keywords
articles
float
type conveying
conveying path
conveying device
Prior art date
Application number
TW098108445A
Other languages
Chinese (zh)
Inventor
Ryosuke Tahara
Hideaki Nakanishi
Akira Maeda
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of TW200942476A publication Critical patent/TW200942476A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Non-Mechanical Conveyors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The constitution of this invention is the installation of a plurality of floating units along the conveying path of articles for floating the articles. The magnetic field is imposed to the conductive layer installed at the articles via coils for imposing a driving force to the articles to convey the articles along the conveying path. The effect of this invention is that it can float the articles in a non-contact manner and can easily control the direction (orientation) and position at the left/right directions of the articles.
TW098108445A 2008-03-17 2009-03-16 Float-type conveying device and float-type conveying method TW200942476A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008067666A JP2009220956A (en) 2008-03-17 2008-03-17 Floating conveyance device and floating conveyance method

Publications (1)

Publication Number Publication Date
TW200942476A true TW200942476A (en) 2009-10-16

Family

ID=41121375

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098108445A TW200942476A (en) 2008-03-17 2009-03-16 Float-type conveying device and float-type conveying method

Country Status (4)

Country Link
JP (1) JP2009220956A (en)
KR (1) KR20090099457A (en)
CN (1) CN101537932A (en)
TW (1) TW200942476A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI728125B (en) * 2016-06-08 2021-05-21 美商康寧公司 Laminating apparatus

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6654886B2 (en) * 2015-12-17 2020-02-26 株式会社三協システム Transfer device
CN105883420B (en) * 2016-04-22 2018-01-09 京东方科技集团股份有限公司 A kind of base plate transfer device
CN106044243B (en) * 2016-07-08 2019-06-04 佛山格尼斯磁悬浮技术有限公司 Panel vertical conveyor
DE102018129732A1 (en) * 2018-11-26 2020-05-28 Beckhoff Automation Gmbh Device and method for avoiding a collision when driving at least two movers on a drive surface
DE102018129727A1 (en) 2018-11-26 2020-05-28 Beckhoff Automation Gmbh Device and method for avoiding a collision when driving at least two movers on a drive surface

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6366023A (en) * 1986-09-04 1988-03-24 Hitachi Kiden Kogyo Ltd Conveying device
JPH0270618A (en) * 1988-09-06 1990-03-09 Nippon Sharyo Seizo Kaisha Ltd Air floating carrying device
JP3894071B2 (en) * 2002-08-09 2007-03-14 株式会社豊田自動織機 Method for removing electricity from plate-like member, load receiving device and load receiving device
JP2005239356A (en) * 2004-02-26 2005-09-08 Toshiba Corp Substrate conveying and transferring device
JP4580860B2 (en) * 2005-11-02 2010-11-17 大日本印刷株式会社 Deposition equipment
JP5047545B2 (en) * 2006-06-30 2012-10-10 株式会社妙徳 Levitation transport unit
JP4940814B2 (en) * 2006-07-31 2012-05-30 大日本印刷株式会社 Plate tray

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI728125B (en) * 2016-06-08 2021-05-21 美商康寧公司 Laminating apparatus

Also Published As

Publication number Publication date
KR20090099457A (en) 2009-09-22
JP2009220956A (en) 2009-10-01
CN101537932A (en) 2009-09-23

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