200938729 九、發明說明： 【發明所屬之技術領域】 本案係關於一種大流量流體輸送裝置，尤指一種適用 於微幫浦結構之大流量流體輸送裝置。 【先前技術】 目則於各領域中無論是醫藥、電腦科技、列印、能源 ❹等工業’產品均朝精緻化及微小化方向發展，其中微幫 浦嘴霧器、喷墨頭、工業列印裝置等產品所包含之流體 輸送結構為其關鍵技術’是以，如何藉創新結構突破其技 術瓶頸，為發展之重要内容。 请參閱第一圖A ’其係為習知微幫浦結構於未作動時 之、構示意圖，習知微幫浦結構丨〇係包含入口通道、 微致動器15、傳動塊14、隔層膜12、麼縮室1U、基板 ❹u:及出口通道16，其中基板n與隔層膜12間係定義形 成一壓縮室111，主要用來錄存液體，將因隔層膜12之形 變影響而使㈣縮室m之趙積受到改變。 當一電壓作用在微致動器15的上下兩極時，會產生 電場，使得微致動器15在此電場之作用下產生彎曲而 向隔層膜12及壓縮室11丨方向移動，由於微致動器15係 °又置於傳動塊14上，因此傳動塊14能將微致動器15所 推力傳遞至隔層膜12，使得隔層膜12也跟著被擠 廢變形，即如第一圖B所千，、六_日 r如弟圖13所不，液體即可依圖中箭號又之方 200938729 • 向流動，使由入口通道13流入後儲存於壓縮室111内的液 • 體受擠壓，而經由出口通道16流向其他預先設定之空間， . 以達到供給流體的目的。 , 請再參閱第二圖，其係為第一圖A所示之微幫浦結構 之俯視圖，如圖所示，當微幫浦結構10作動時流體之輸 送方向係如圖中標號Y之箭頭方向所示，入口擴流器17 係為兩端開口大小不同之錐狀結構，開口較大之一端係與 入口流道191相連接，而以開口較小之一端與微壓縮室111 ® 連接，同時，連接壓縮室111及出口流道192之擴流器18 係與入口擴流器17同向設置，其係以開口較大的一端連 接於壓縮室111，而以開口較小的一端與出口流道192相 連接，由於連接於壓縮室111兩端之入口擴流器17及出口 擴流器18係為同方向設置，故可利用擴流器兩方向流阻 不同之特性，及壓縮室111體積之漲縮使流體產生單方向 之淨流率，以使流體可自入口流道191經由入口擴流器17 Φ 流入壓縮室111内，再由出口擴流器18經出口流道192 流出。 此種無實體閥門之微幫浦結構10容易產生流體大量 回流的狀況，所以爲促使流率增加，壓縮室111需要有較 大的壓縮比，以產生足夠的腔壓，故需要耗費較高的成本 在致動器15上。 - 因此，如何發展一種可改善上述習知技術缺失之大流 量流體輸送裝置，實為目前迫切需要解決之問題。 7 200938729 【發明内容】 » 本案之主要目的在於提供一種大流量流體輸送裝 置，俾解決習知技術之微幫浦結構於流體的傳送過程中易 * 產生流體回流之現象。 為達上述目的，本案之較廣義實施態樣為提供一種大 流量流體輸送裝置’用以傳送流體，其係包含：閥體座， 其係具有至少一密封環；閥體蓋體，其係設置於閥體座 ❹ 上’且具有至少一密封環；閥體薄膜，其係設置於閥體座 及閥體蓋體之間，並具有至少一個閥開關結構，閥開關結 構係分別具有閥片、複數個孔洞以及複數個延伸部；以及 致動裝置，其係包含致動器以及振動薄膜，振動薄膜於未 作動狀態時，係與閥體蓋體分離，以定義形成壓力腔室； 其中，當施以操作頻率大於30Hz於該致動裝置之該致動 器上，致動裝置將致使壓力腔室體積改變，進而驅動閥開 關結構之啟閉作用，以使流經壓力腔室之流體係達到 ❹ 6〇ml/min以上的大流量傳輸。 【實施方式】 體現本案特徵與優點的一些典型實施例將在後段的 說明中詳細敘述。應理解的是本案能夠在不同的態樣上具 。 有各種的變化，其皆不脫離本案的範圍，且其中的說明及 ， 圖示在本質上係當作說明之用，而非用以限制本案。 請參閱第三圖，其係為本案第一較佳實施例之流體輸 200938729 • 送裝置之結構示意圖，如圖所示，本案之流體輸送裝置20 • 可適用於醫藥生技、電腦科技、列印或是能源等工業，且 • 可輸送氣體或是液體，但不以此為限，流體輸送裝置20 主要係由閥體座21、閥體蓋體22、閥體薄膜23、複數個 • 暫存室、致動裝置24及蓋體25所組成，其中閥體座21、 閥體蓋體22、閥體薄膜23係形成一流體閥座201，且在 閥體蓋體22及致動裝置24之間形成一壓力腔室226，主 要用來儲存流體。 ® 該流體輸送裝置20之組裝方式係將閥體薄膜23設置 於閥體座21及閥體蓋體22之間，並使閥體薄膜23與閥 體座21及閥體蓋體22相對應設置，且在閥體薄膜23與 閥體蓋體22之間形成一第一暫存室，而在閥體薄膜23與 閥體座21之間形成一第二暫存室，並且於閥體蓋體22上 之相對應位置更設置有致動裝置24，致動裝置24係由一 振動薄膜241以及一致動器242組裝而成，用以驅動流體 ^ 輸送裝置20之作動，最後，再將蓋體25設置於致動裝置 24之上方，故其係依序將閥體座21、閥體薄膜23、閥體 蓋體22、致動裝置24及蓋體25相對應堆疊設置，以完成 流體輸送裝置20之組裝。 其中，閥體座21及閥體蓋體22係為本案流體輸送裝 置20中導引流體進出之主要結構，請參閱第四圖並配合 、 第三圖，其中第四圖係為第三圖所示之閥體座的侧面結構 * 示意屬，如圖所示，閥體座21係具有一個入口流道211 以及一個出口流道212，流體係可由外界輸入，經由入口 200938729 ' 流道211傳送至閥體座21上表面2l〇之一開口 213,並且’ • 於本實施例中，閥體薄膜23及閥體座21之間所形成的第 - 二暫存室即為圖中所示之出口暫存腔215,但不以此為 , 限，其係由閥體座21之上表面210於與出口流道212相 對應之位置產生部分凹陷而形成’並與出口流道212相連 通，該出口暫存腔215係用以暫時儲存流體，旅使該流體 由出口暫存腔215經由一開口 214而輸送至出口通道 212，再流出閥體座21之外。以及，在閥體座21上更具 © 有複數個凹槽結構，用以供一密封環26(如第七圖A所示） 設置於其上，於本實施例中’閥體座21係具有環繞開口 213週邊之凹槽216、218 ’及環繞於出口暫存腔215週 邊之凹槽217。 請參閱第五圖A並配合第三圖，其中第五圖A係為第 三圖所示之閥體蓋體之背面結構示意圖，如圖所示，閥體 蓋座22係具有一上表面220及一下表面228,以及在閥體 蓋座22上亦具有貫穿上表面22〇至下表面228之入口閥 ϋ 門通道221及出口閥門通道222，且該入口閥門通道221 係設置於與閥體座21之開口 213相對應之位置，而出口 閥門通道222則設置於與閥體座21之出口暫存腔215内 之開口 214相對應之位置，並且，於本實施例中，閥體薄 膜23及閥體蓋體22之間所形成之第一暫存室即為圖中所 示之入口暫存腔223，且不以此為限，其係由閥體蓋體22 之下表面228於與入口閥門通道221相對應之位置產生部 份凹陷而形成，且其係連通於入口閥門通道221。 200938729 ' 請參閱第五圖B，其係為第五圖A之剖面結構示意 * 圖，如圖所示，閥體蓋體22之上表面220係部份凹陷， • 以形成一壓力腔室226，其係與致動裝置24之致動器242 相對應設置，壓力腔室226係經由入口閥門通道221連通 於入口暫存腔223，並同時與出口閥門通道222相連通， 因此，當致動器242受電壓致動使致動裝置24上凸變形， 造成壓力腔室226之體積膨脹而產生負壓差，可使流體經 入口閥門通道221流至壓力腔室226内，其後，當施加於 ❹ 致動器242的電場方向改變後，致動器242將使致動裝置 24下凹變形壓力腔室226收縮而體積減小，使壓力腔室 226與外界產生正壓力差，促使流體由出口閥門通道222 流出壓力腔室226之外，於此同時，同樣有部分流雜會流 入入口闊門通道221及入口暫存室223内，然而由於此時 的入口閥門結構231(如第六圖C所示）係為使受壓而關閉 的狀態’故該流體不會通過入口閥片231而產生倒流的現 ❹ 象’至於暫時儲存於入口暫存腔223内之流體，則於致動 器242再文電壓致動，重複使致動裝置24再上凸變形而 增加壓力腔室226體積時，再由入口暫存腔223經炱入口 閥門通道221而流入壓力腔室226内’以進行流體的輸送。 另外，閥體蓋體22上同樣具有複數個凹槽结構，以 本實施例為例，在閥體蓋座22之上表面22〇係具有環繞 . 壓力腔室226而設置之凹槽227，而在下表面228上則具 有環繞设置於入口暫存腔223之凹槽224、環繞設J於出 口閥門通道222之凹槽225以及凹槽229，同樣地，上述 11 200938729 • 凹槽結構係用以供一密封環27(如第七圖A所示）設置於其 • 中〇 - 請參閱第六圖A並配合第三圖，其中第六圖A係為第 . 三圖所示之閥體薄膜之結構示意圖，如圖所示，閥體薄膜 23主要係以傳統加工、或黃光蝕刻、或雷射加工、或電鑄 加工、或放電加工等方式製出，且為一厚度實質上相同之 薄片結構，其上係具有複數個鏤空閥開關，包含第一閥開 關以及第二閥開關，於本實施例中，第一閥開關係為入口 ® 閥門結構231，而第二閥開關係為出口閥門結構232，其 中，入口閥門結構231係具有入口閥片2313以及複數個 環繞入口閥片2313週邊而設置之鏤空孔洞2312，另外， 在孔洞2312之間更具有與入口閥片2313相連接之延伸部 2311，當間體薄膜23承受一自壓力腔室226傳遞而來向 下之應力時，如第七圖C所示，入口閥門結構231係整個 向下平貼於閥體座21之上，此時入口閥片2313會緊靠凹 ^ 槽216上密封環26突出部分，而密封住閥體座21上之開 口 213，且其外圍的鏤空孔洞2312及延伸部2311則順勢 浮貼於閥體座21之上，故因此入口閥門結構231之關閉 作用，使流體無法流出。 而當閥體薄膜23受到壓力腔室226體積增加而產生 之吸力作用下，由於設置於閥體座21之凹槽216内的密 . 封環26已提供入口閥門結構231 —預力（Preforce)，因而 • 入口閥片2313可藉由延伸部2311的支撐而產生更大之預 蓋緊效果，以防止逆流，當因壓力腔室226之負壓而使入 12 200938729 - 口闕門結構231往上產生位移（如第六圖B所示），此時， • 流體則可經由鏤空之孔洞2312由閥體座21流至閥體蓋體 • 22之入口暫存腔223 ’並經由入口暫存腔223及入口闕門 . 通道221傳送至壓力腔室226内，如此一來，入口間門結 構231即可因應壓力腔室226產生之正負壓力差而迅速的 開啟或關閉，以控制流體之進出，並使流體不會回流至閥 體座21上。 同樣地，位於同一閥體薄膜23上的另一閥門結構則 ® 為出口閥門結構232’其中之出口閥片2323、延伸部2321 以及孔洞2322之作動方式均與入口閥門結構231相同， 因而不再贅述’惟出口閥門結構232週邊之密封環26設 置方向係與入口閥門結構231之密封環27反向設置，如 第六圖C所示，因而當壓力腔室226壓縮而產生一推力 時’設置於閥體蓋體22之凹槽225内的密封環27將提供 出口閥門結構232 —預力（Preforce),使得出口閥片2323 ❹ 可藉由延伸部2321之支撐而產生更大之預蓋緊效果，以 防止逆流’當因壓力腔室226之正壓而使出口闕門結構232 往下產生位移，此時’流體則可經由鏤空之孔洞2322由 壓力腔室226經閥體蓋體22而流至閥體座21之出口暫存 腔215内’並可經由開口 214及出口流道212排出，如此 一來，則可經由出口閥門結構232開啟之機制，將流體自 壓力腔室226内洩出，以達到流體輸送之功能。 • 請參閱第七圖A，其係為本案較佳實施例之流體輸送 裝置之未作動狀態示意圖，於本實施例中，所有的凹槽結 13 200938729 ' 構216、217、218分別設置密封環26 ’而凹槽224、225、 • 229内亦分別設置密封環27 ’其材質係為可耐化性佳之橡 . 膝材料，且不以此為限’其中’設置於閥體座21上環繞 開口 213之凹槽216内的密封環可為一圓環結構，其厚度 姍 係大於凹槽216深度，使得設置於凹槽216内之密封環26 係部分凸出於閥體座21之上表面210構成一微凸結構， 因而使得貼合設置於閥體座21上之閥體薄膜23之入口閥 門結構231之入口閥片2313因密封環26之微凸結構而形 ❹ 成一向上隆起，而閥體薄膜23之其餘部分係與閥體蓋體 22相抵頂’如此微Λ結構對入口間門231頂推而產生一預 力（Preforce)作用’有助於產生更大之預蓋緊效果，以防止 逆流’且由於密封環26向上隆起之微凸結構係位於閥體 薄膜23之入口閥門結構231處，故使入口閥門結構231 在未作動時使入口間片2313與閥體座21之上表面210之 間具有一間隙，同樣地，當密封環27設置於環繞出口閥 ❹門通道222之凹槽225内時，由於其密封環27係設置於 閥體蓋體22之下表面228，因而該密封環27係使閥體薄 膜23之出口閥門結構向下凸出而形成一向下隆起於閥體 蓋體22之微凸結構，此微凸結構僅其方向與形成於入口 閥門結構231之微凸結構係為反向設置，然而其功能均與 前述相同，因而不再贅述。至於其餘分別設置於凹槽結構 -217、218及224、229以及227内之密封環26、27及28， 主要用來分別使閥體座21與閥體薄膜23、閥體薄膜23與 閥體蓋體22以及閥體蓋體22與致動裝置24之間緊密貼 200938729 ' 合時，防止流體外洩。 當然，上述之微凸結構除了使用凹槽及密封環來搭配 - 形成外，於一些實施例中，闊體座21及閥體蓋體22之微 . 凸結構亦可採用半導體製程，例如：黃光蝕刻或鍍膜或電 鑄技術，直接在閥體座21及閥體蓋體22上形成。 請同時參閱第七圖A、B、C，如圖所示，當蓋體25、 致動裝置24、閥體蓋體22、閥體薄膜23、密封環26以及 閥體座21彼此對應組裝設置後，閥體座21上之開口 213 ❹ 係與閥體薄膜23上之入口閥門結構231以及閥體蓋體22 上之入口閥門通道221相對應，且閥體座21上之開口 214 則與閥體薄膜23上之出口閥片232以及閥體蓋體22上之 出口閥門通道222相對應，並且，由於密封環26設置於 凹槽216内，使得閥體薄膜23之入口閥門結構231微凸 起於閥體座21之上，並藉由位於凹槽216内之密封環26 頂觸閥體薄膜23而產生一預力（(Preforce)作用，使得入口 ^ 閥門結構231在未作動時則與閥體座21之上表面210形 成一間隙，同樣地，出口閥門結構232亦藉由將密封環27 設至於凹槽225中的相同方式與閥體蓋體22之下表面228 形成一間隙。 當以一電壓驅動致動器242時，致動裝置24產生彎 曲變形，如第七圖B所示，致動裝置24係朝箭號a所指 . 之方向向上彎曲變形，使得壓力腔室226之體積增加，因 而產生一吸力，使閥體薄膜23之入口閥門結構231、出口 閥門結構232承受一向上之拉力，並使已具有一預力 15 200938729200938729 IX. INSTRUCTIONS: [Technical field to which the invention pertains] This case relates to a large-flow fluid delivery device, and more particularly to a large-flow fluid delivery device suitable for a micro-pump structure. [Prior Art] In all fields, whether it is pharmaceutical, computer technology, printing, energy and other industrial products, the products are developing in the direction of refinement and miniaturization. Among them, micro-purchon nozzles, inkjet heads, industrial columns The fluid transport structure contained in products such as printing devices is its key technology. Therefore, how to break through its technical bottlenecks through innovative structures is an important part of development. Please refer to the first figure A' which is a schematic diagram of the conventional micro-pull structure when it is not actuated. The conventional micro-pull structure system includes an inlet channel, a microactuator 15, a transmission block 14, and a compartment. The film 12, the squeezing chamber 1U, the substrate ❹u: and the outlet channel 16 define a compression chamber 111 between the substrate n and the interlayer film 12, mainly for recording liquid, which will be affected by the deformation of the interlayer film 12. The Zhao product of the (4) contraction chamber m was changed. When a voltage is applied to the upper and lower poles of the microactuator 15, an electric field is generated, causing the microactuator 15 to bend under the action of the electric field to move toward the interlayer film 12 and the compression chamber 11 , due to the slight The actuator 15 is again placed on the transmission block 14, so that the transmission block 14 can transmit the thrust of the microactuator 15 to the interlayer film 12, so that the interlayer film 12 is also deformed by being squeezed, that is, as shown in the first figure. B is thousands, and six _day r is as shown in Figure 13. The liquid can flow according to the arrow in the figure. 200938729 • Flow, so that the liquid that is stored in the compression chamber 111 after flowing in through the inlet channel 13 is subjected to Squeeze and flow through the outlet passage 16 to other pre-set spaces for the purpose of supplying fluid. Please refer to the second figure, which is a top view of the micro-push structure shown in FIG. A. As shown in the figure, when the micro-push structure 10 is actuated, the direction of fluid transport is indicated by the arrow Y in the figure. In the direction indicated, the inlet diffuser 17 is a tapered structure having different opening sizes at both ends, one end of the larger opening is connected to the inlet flow passage 191, and one end of the smaller opening is connected to the micro compression chamber 111 ® . At the same time, the diffuser 18 connecting the compression chamber 111 and the outlet flow passage 192 is disposed in the same direction as the inlet diffuser 17, and is connected to the compression chamber 111 with a larger opening, and has a smaller opening and an outlet. The flow passages 192 are connected to each other. Since the inlet diffuser 17 and the outlet diffuser 18 connected to both ends of the compression chamber 111 are disposed in the same direction, the flow resistance of the diffuser can be utilized in different directions, and the compression chamber 111 can be utilized. The volumetric expansion causes the fluid to produce a unidirectional net flow rate such that fluid can flow from the inlet flow passage 191 into the compression chamber 111 via the inlet diffuser 17 Φ and out of the outlet flow passage 192 through the outlet flow passage 192. Such a micro-pump structure 10 without a physical valve is prone to a large amount of fluid backflow. Therefore, in order to increase the flow rate, the compression chamber 111 needs to have a large compression ratio to generate sufficient cavity pressure, so that it is expensive. The cost is on the actuator 15. - Therefore, how to develop a large-flow fluid transport device that can improve the above-mentioned conventional techniques is an urgent problem to be solved. 7 200938729 [Summary of the Invention] The main purpose of the present invention is to provide a high-flow fluid delivery device that solves the problem of the flow of fluid in the micro-pump structure of the prior art during fluid transfer. In order to achieve the above object, a broader aspect of the present invention provides a high-flow fluid delivery device for transferring a fluid, comprising: a valve body having at least one sealing ring; and a valve body cover And at least one sealing ring; the valve body film is disposed between the valve body seat and the valve body cover body, and has at least one valve switch structure, the valve switch structure respectively has a valve piece, a plurality of holes and a plurality of extensions; and an actuating device comprising an actuator and a vibrating membrane, the vibrating membrane being separated from the valve body cover when in an unactuated state to define a pressure chamber; wherein, Applying an operating frequency greater than 30 Hz to the actuator of the actuating device, the actuating device will cause a change in the volume of the pressure chamber, thereby driving the opening and closing of the valve switch structure to achieve a flow system through the pressure chamber大 Large flow transmission above 6〇ml/min. [Embodiment] Some exemplary embodiments embodying the features and advantages of the present invention will be described in detail in the following description. It should be understood that the case can be found in different aspects. There are various changes that do not depart from the scope of the present invention, and the descriptions and illustrations therein are used for illustrative purposes, and are not intended to limit the case. Please refer to the third figure, which is a structural diagram of the fluid delivery 200938729 of the first preferred embodiment of the present invention. As shown in the figure, the fluid delivery device 20 of the present invention can be applied to medical technology, computer technology, and columns. Printing or energy industries, and • can deliver gas or liquid, but not limited to this, the fluid delivery device 20 is mainly composed of the valve body seat 21, the valve body cover 22, the valve body film 23, and a plurality of The storage chamber, the actuating device 24 and the cover body 25 are formed, wherein the valve body seat 21, the valve body cover body 22 and the valve body film 23 form a fluid valve seat 201, and the valve body cover body 22 and the actuating device 24 A pressure chamber 226 is formed between them for storing fluid. The assembly of the fluid delivery device 20 is such that the valve body film 23 is disposed between the valve body seat 21 and the valve body cover 22, and the valve body film 23 is disposed corresponding to the valve body seat 21 and the valve body cover 22. And forming a first temporary storage chamber between the valve body film 23 and the valve body cover 22, and forming a second temporary storage chamber between the valve body film 23 and the valve body seat 21, and the valve body cover body The corresponding position on the 22 is further provided with an actuating device 24 which is assembled by a vibrating membrane 241 and an actuator 242 for driving the fluid transport device 20, and finally, the cover 25 It is disposed above the actuating device 24, so that the valve body seat 21, the valve body film 23, the valve body cover 22, the actuating device 24 and the cover body 25 are sequentially stacked correspondingly to complete the fluid transport device 20 Assembly. The valve body seat 21 and the valve body cover 22 are the main structures for guiding fluid in and out of the fluid transport device 20 of the present invention. Please refer to the fourth figure and cooperate with the third figure, wherein the fourth figure is the third figure. The side structure of the valve body seat is shown as a schematic representation. As shown, the valve body seat 21 has an inlet flow path 211 and an outlet flow path 212. The flow system can be input from the outside and transmitted to the flow path 211 via the inlet 200938729. An opening 213 of the upper surface 21 of the valve body seat 21, and in the present embodiment, the second temporary chamber formed between the valve body film 23 and the valve body seat 21 is the outlet shown in the drawing. The temporary cavity 215, but not limited thereto, is partially recessed by the upper surface 210 of the valve body seat 21 at a position corresponding to the outlet flow path 212 to form and communicate with the outlet flow channel 212. The outlet temporary storage chamber 215 is for temporarily storing the fluid, and the fluid is transported from the outlet temporary storage chamber 215 to the outlet passage 212 via an opening 214, and then flows out of the valve body seat 21. And, on the valve body seat 21, there are a plurality of groove structures for a sealing ring 26 (as shown in FIG. 7A) to be disposed thereon. In the embodiment, the valve body seat 21 is There are grooves 216, 218' surrounding the periphery of the opening 213 and a groove 217 surrounding the periphery of the outlet temporary cavity 215. Please refer to FIG. 5A and FIG. 3 , wherein FIG. 5A is a schematic structural view of the back surface of the valve body cover shown in FIG. 3 . As shown, the valve body cover 22 has an upper surface 220 . And the lower surface 228, and the valve body cover 22 also has an inlet valve door passage 221 and an outlet valve passage 222 extending through the upper surface 22A to the lower surface 228, and the inlet valve passage 221 is disposed at the valve body seat The opening 213 of the 21 corresponds to the position, and the outlet valve passage 222 is disposed at a position corresponding to the opening 214 in the outlet temporary chamber 215 of the valve body seat 21, and, in the embodiment, the valve body film 23 and The first temporary storage chamber formed between the valve body cover 22 is the inlet temporary storage chamber 223 shown in the drawing, and is not limited thereto, and is formed by the lower surface 228 of the valve body cover 22 and the inlet. The corresponding position of the valve passage 221 is partially recessed and communicated with the inlet valve passage 221. 200938729 ' Please refer to the fifth figure B, which is a sectional view of the fifth figure A. As shown, the upper surface 220 of the valve body cover 22 is partially recessed, to form a pressure chamber 226. Corresponding to the actuator 242 of the actuating device 24, the pressure chamber 226 communicates with the inlet temporary chamber 223 via the inlet valve passage 221 and simultaneously communicates with the outlet valve passage 222, thus, when actuated The actuator 242 is biased by the voltage to cause the actuator 24 to be convexly deformed, causing the volume of the pressure chamber 226 to expand to generate a negative pressure difference, allowing fluid to flow through the inlet valve passage 221 into the pressure chamber 226, and thereafter, when applied After the direction of the electric field of the actuator 242 is changed, the actuator 242 will contract the lower deformation pressure chamber 226 of the actuating device 24 to reduce the volume, causing the pressure chamber 226 to generate a positive pressure difference from the outside, thereby promoting the fluid The outlet valve passage 222 flows out of the pressure chamber 226. At the same time, some of the flow impurities also flow into the inlet wide door passage 221 and the inlet temporary storage chamber 223, however, due to the inlet valve structure 231 at this time (as shown in the sixth figure) C is shown to be pressed The state of the fluid so that the fluid does not flow back through the inlet valve plate 231, as for the fluid temporarily stored in the inlet temporary chamber 223, is then actuated at the actuator 242 to repeat the actuation. When the device 24 is again convexly deformed to increase the volume of the pressure chamber 226, the inlet temporary chamber 223 flows into the pressure chamber 226 through the inlet valve passage 221 to perform fluid transportation. In addition, the valve body cover 22 also has a plurality of groove structures. In the embodiment, the upper surface 22 of the valve body cover 22 has a groove 227 disposed around the pressure chamber 226. On the lower surface 228, there is a groove 224 disposed around the inlet temporary storage chamber 223, a groove 225 surrounding the outlet valve passage 222, and a groove 229. Similarly, the above-mentioned 11 200938729 • groove structure is used for A seal ring 27 (shown in Figure 7A) is placed in the middle of it - see Figure 6 and in conjunction with the third figure, where the sixth figure A is the valve body film shown in Figure 3. Schematic diagram, as shown in the figure, the valve body film 23 is mainly produced by conventional processing, or yellow light etching, or laser processing, or electroforming processing, or electric discharge machining, and is a sheet having substantially the same thickness. The structure has a plurality of hollow valve switches including a first valve switch and a second valve switch. In this embodiment, the first valve opening relationship is an inlet® valve structure 231, and the second valve opening relationship is an outlet valve. Structure 232, wherein the inlet valve structure 231 is attached The inlet valve piece 2313 and a plurality of hollow holes 2312 disposed around the periphery of the inlet valve piece 2313, and further having an extension portion 2311 connected to the inlet valve piece 2313 between the holes 2312, when the interlayer film 23 is subjected to a self-pressure chamber When the chamber 226 transmits downward stress, as shown in FIG. 7C, the inlet valve structure 231 is entirely flatly attached to the valve body seat 21, and the inlet valve piece 2313 is sealed against the recess 216. The ring 26 protrudes from the opening 213 of the valve body seat 21, and the hollow hole 2312 and the extension portion 2311 of the outer periphery thereof are floated on the valve body seat 21, so that the closing of the inlet valve structure 231, Keep the fluid out of the flow. When the valve body film 23 is subjected to the suction generated by the volume increase of the pressure chamber 226, the seal ring 26 provided in the groove 216 of the valve body seat 21 has provided the inlet valve structure 231 - Preforce. Therefore, the inlet valve piece 2313 can generate a larger pre-covering effect by the support of the extension portion 2311 to prevent backflow, and when the pressure is negative due to the pressure chamber 226, the 12:38738729-mouth door structure 231 is The displacement is generated (as shown in Figure 6B). At this time, the fluid can flow from the valve body seat 21 to the inlet temporary chamber 223' of the valve body cover 22 through the hollow hole 2312 and temporarily stored through the inlet. The chamber 221 is transferred into the pressure chamber 226, so that the inlet door structure 231 can be quickly opened or closed in response to the positive and negative pressure difference generated by the pressure chamber 226 to control the flow in and out of the fluid. And the fluid does not flow back to the valve body seat 21. Similarly, the other valve structure on the same valve body film 23 is the outlet valve structure 232', wherein the outlet valve piece 2323, the extension portion 2321, and the hole 2322 are operated in the same manner as the inlet valve structure 231, and thus no longer The sealing ring 26 around the outlet valve structure 232 is disposed in a direction opposite to the sealing ring 27 of the inlet valve structure 231, as shown in FIG. 6C, thus setting when the pressure chamber 226 is compressed to generate a thrust. The seal ring 27 in the recess 225 of the valve body cover 22 will provide an outlet valve structure 232 - Preforce, such that the outlet valve piece 2323 can be produced by the extension of the extension 2321 to create a greater pre-tightening Effect to prevent backflow 'When the outlet door structure 232 is displaced downward due to the positive pressure of the pressure chamber 226, the fluid can be passed from the pressure chamber 226 through the valve body cover 22 via the hollowed hole 2322. Flowing into the outlet temporary chamber 215 of the valve body seat ' can be discharged through the opening 214 and the outlet flow passage 212, so that the fluid can be drained from the pressure chamber 226 via the mechanism of opening the outlet valve structure 232. Out In order to achieve delivery of the functional fluid. Please refer to FIG. 7A, which is a schematic diagram of the unactuated state of the fluid delivery device of the preferred embodiment of the present invention. In this embodiment, all the groove junctions 13 200938729 'structures 216, 217, 218 are respectively provided with sealing rings. 26' and the grooves 224, 225, and 229 are also respectively provided with a sealing ring 27' which is made of a rubber material which is excellent in chemical resistance, and is not limited thereto, and is disposed on the valve body seat 21 The seal ring in the recess 216 of the opening 213 may be a ring structure having a thickness 姗 greater than the depth of the recess 216 such that the seal ring 26 disposed in the recess 216 protrudes from the upper surface of the valve body seat 21. The 210 forms a micro-convex structure, so that the inlet valve piece 2313 of the inlet valve structure 231 of the valve body film 23 disposed on the valve body seat 21 is shaped like an upward bulge due to the micro-convex structure of the seal ring 26, and the valve The remaining portion of the body film 23 is abutted against the valve body cover 22 so that the micro-twisted structure pushes the inlet door 231 to produce a pre-force effect, which contributes to a greater pre-tightening effect. Prevent backflow' and because the seal ring 26 is uplifted The convex structure is located at the inlet valve structure 231 of the valve body film 23, so that the inlet valve structure 231 has a gap between the inlet piece 2313 and the upper surface 210 of the valve body seat 21 when not in operation, and similarly, when sealing When the ring 27 is disposed in the groove 225 surrounding the outlet valve door passage 222, since the seal ring 27 is disposed on the lower surface 228 of the valve body cover 22, the seal ring 27 is the outlet valve of the valve body film 23. The structure protrudes downward to form a micro-convex structure that bulges downwardly from the valve body cover 22. The micro-convex structure is only disposed opposite to the micro-convex structure formed in the inlet valve structure 231, but its function is The foregoing is the same and thus will not be described again. The remaining seal rings 26, 27 and 28 respectively disposed in the groove structures -217, 218 and 224, 229 and 227 are mainly used to respectively form the valve body seat 21 and the valve body film 23, the valve body film 23 and the valve body. The lid body 22 and the valve body cover 22 and the actuating device 24 are closely attached to the 200938729' to prevent fluid leakage. Of course, the above-mentioned micro-convex structure is formed by using a groove and a sealing ring. In some embodiments, the micro-frame 21 and the valve body cover 22 may also be formed by a semiconductor process, for example, yellow. Photoetching or coating or electroforming techniques are formed directly on the valve body seat 21 and the valve body cover 22. Please refer to FIG. 7A, B, and C at the same time. As shown in the figure, when the cover body 25, the actuating device 24, the valve body cover 22, the valve body film 23, the seal ring 26 and the valve body seat 21 are assembled correspondingly with each other, Thereafter, the opening 213 of the valve body seat 21 corresponds to the inlet valve structure 231 on the valve body membrane 23 and the inlet valve passage 221 on the valve body cover 22, and the opening 214 on the valve body seat 21 is connected to the valve The outlet valve piece 232 on the body film 23 and the outlet valve passage 222 on the valve body cover 22 correspond to each other, and since the seal ring 26 is disposed in the groove 216, the inlet valve structure 231 of the valve body film 23 is slightly convex. Above the valve body seat 21, a pre-force force is generated by the seal ring 26 located in the recess 216 contacting the valve body film 23, so that the inlet valve structure 231 is in contact with the valve when it is not actuated. The upper surface 210 of the body seat 21 forms a gap. Similarly, the outlet valve structure 232 also forms a gap with the lower surface 228 of the valve body cover 22 in the same manner as the seal ring 27 is disposed in the recess 225. When a voltage drives the actuator 242, the actuating device 24 produces a bending deformation, such as As shown in Fig. B, the actuating device 24 is bent upwardly in the direction indicated by the arrow a, so that the volume of the pressure chamber 226 is increased, thereby generating a suction force, and the inlet valve structure 231 and the outlet valve of the valve body film 23 are formed. The structure 232 is subjected to an upward pulling force and has a pre-stress 15 200938729
(Preforce)之入口閥門結構231之入口閥片2313迅速開啟 (如第六圖B所示），使液體可大量地自閥體座21上之入口 通道211被吸取進來，並流經閥體座21上之開口 213、閥 體薄膜23上之入口閥門結構231之孔洞2312、闕體蓋體 22上之入口暫存腔223、入口閥片通道221而流入廢力腔 室226之内，此時，由於閥體薄膜23之入口閥門結構231、 出口閥門結構232承受該向上拉力，故位於另一端之出口 閥門結構232係因該向上拉力使得位於閥體薄膜23上之 出口闊片2323密封住出口閥門通道222 ’而使得出口閥門 結構232關閉，因而流體逆流。 當致動裝置24因電場方向改變而如第七圖C所示之 箭號b向下彎曲變形時，則會壓縮壓力腔室226之體積， 使得壓力腔室226對内部之流體產生一推力’並使間體薄 膜23之入口閥門詰耩231、出口閥結構232承受一向下 推力，此時，設置於凹槽225内之密封環27上出口間門 結構232的出口閥片2323其可迅速開啟（如第六圖〇所 示），並使液體瞬間大量宣沒’由壓力腔室226經由闕體蓋 體22上之出口闕fl通道222、闕體薄膜23上之出口間門 結構232之孔洞230、閥體座21上之出口暫存腔215、 開口 2M及出口通道212而流出流體輸送裝置2〇之外’ 因而完成流體之傳_過程’同樣地，此時由於人口闕門結 構23i係承受該向卞之推力’因而使得入口閥片2313密 封住開口 213,因而關閉入口閥門結構231，使得流體不 逆流，並且，藉由A口間門結構231及出口闕門結構232 16 200938729 配c» ”又置於閥體座21及閥體蓋體22上之凹槽216、225 内的岔封環26、27之設計，可使流體於傳送過程中不會 產生回流的情形，達到高效率之傳輸。 • 本案之流體輸送裝置之閥體薄膜的入口閥門結構及 出口閥門結構的實施態樣並不僅侷限於第三圖及第六圖A 所示之入口閥門結構231及出口閥門結構232的型態，亦 可使用具有相同厚度，相同材料，但是剛性不同的閥門結 構’其中，閥門結構的剛性取決於閥門結構的外觀型態、 所包含之延伸部的寬度及數量，並配合控制致動裝置24 之震動頻率來調整流體的流量，請參閱第八圖A〜E，其 係為本案較佳實施例之閥門結構之結構示意圖，如第八圖 A所示’閥門結構81具有閥片811、環繞閥片811週邊而 設置之鐘空孔洞812 ’以及在孔洞812之間更分別具有與 閥片811相連接之延伸部813，於本實施例中閥片gw為 一圓形結構，孔洞812的數量可為3，至於，延伸部813 ❹ 的數量為3且其形狀可呈現直線型態，但上述閥片811形 狀、孔洞812以及延伸部813的數量及形狀並不以此為限。 請再參閱第八圖B ’於一些實施例中，閥門結構82 同樣具有閥片821、孔洞822以及延伸部823，至於閥片 821、孔洞822以及延伸部823之間的連接關係係於上述 相同，因此不在述贅述，於本實施例中，閥片821為一圓 - 形結構，孔洞822的數量可為3 ’至於’延伸部823的數 量為3且其形狀可呈現切線型態，但閥片821形狀、孔洞 822以及延伸部823的數量及形狀並不以此為限。 17 200938729 請再參閱第八圖C，於一些實施例中，閥門結構83 同樣具有閥片831、孔洞832以及延伸部833，至於閥片 - 831、孔洞832以及延伸部833之間的連接關係係於上述 相同’因此不在述贅述，於本實施例中，閥片831為一圓 形結構，孔洞832的數量可為4，至於，延伸部833的數 量為4且其形狀可呈現S形型態，但閥片831、孔洞832 以及延伸部833的數量及形狀並不以此為限。 請再參閱第八圖D，於一些實施例中，閥門結構84 ® 同樣具有閥片841、孔洞842以及延伸部843，至於閥片 841、孔洞842以及延伸部843之間的連接關係係於上述 相同，因此不在述贅述，於本實施例中，閥片841為一類 似圓形結構且其周圍具有齒狀結構8411，孔洞842的數量 可為3，至於，延伸部843的數量為3且其形狀可呈現直 線型態，但閥片841形狀、孔洞842以及延伸部843的數 量及形狀並不以此為限。 ❾ 請再參閱第八圖E，於一些實施例中，閥門結構85 同樣具有閥片851、孔洞852以及延伸部853 ’至於閥片 851、孔洞852以及延伸部853之間的連接關係係於上述 相同’因此不在述贅述，於本實施例中，閥片851為一類 似圓形結構且其周園具有齒狀結構8511，孔洞852的數量 可為3，至於，延伸部853的數量為3且其形狀可呈現切 * 線型態，但閥片851形狀、孔洞852以及延伸部853的數 - 量及形狀並不以此為限。 當然，本案之流體輸送裝置之閥體薄膜上所適用之閥 18 200938729 門結構的實施態樣並不僅限於第八圖A〜E所揭露 - 態，亦可由其它的變化，只要是使用具有相同厚度， . 材料]旦是剛性不同的閥門結構均為本案所保護之範^同 致動裝置24内之致動器242係為一壓電板，可採。 高壓電係數之锆鈦酸鉛（PZT)系列的壓電粉末製造而成用 其中致動器242的厚度可介於loo# m至5〇〇私m之間， 佳厚度為150/zm至250#m，楊氏係數係為100至15〇Gp 且不以此為限。而致動器242的材質可為一單層金屬所= 成或是可為金屬材料上貼附一層高分子材料所構成之 層結構。 $ 而貼附致動器242之振動薄膜241之厚度可為1〇〇 至300 #m ’較佳厚度為looem至250//m，亦可為1〇u 至200/zm ’較佳厚度為20/ζιη至l〇0//m，其揚氏係數^ 介於60〜300Gpa。振動薄膜241其材質可為一單層金屬研 構成’例如不銹鋼材料，其揚氏係數係為24〇Gpa，厚度可 ❹介於30"m至80//m ’或是200//m至250/zm，例如銅， 其揚氏係數係為lOOGpa ’厚度係介於30私m至80私m，或 是200/zm至250#m，且不以此為限。 另外，於本實施例中’閥體座21以及閥體蓋體22 之材質係可採用熱塑性塑朦材料，例如聚碳酸g旨樹醋 (Polycarbonate PC)、聚諷（Polysulfone, PSF)、ABS 樹 脂（Acrylonitrile Butadiene Styrene)、縱性低密度聚 乙烯（LLDPE)、低密度聚乙烯（LDPE)、高密度聚乙烯 (HDPE)、聚丙稀（PP)、聚苯硫喊（p〇iyphenylene 19 200938729 • Sulfide，PPS)、對位性聚笨乙烯（SPS)、聚苯醚（pp〇)、聚 • 縮醛（？〇1即〇6七31’？011〇、聚對苯二甲酸二丁酯（四7)、聚 • 偏氟乙烯（PVDF)、乙烯四氟乙烯共聚物（ETFE)、環狀烯烴 聚合物（C0C)等熱塑性塑膠材料，但不以此為限。 於本實施例中，閥體蓋體22之壓力腔室226之深度 係介於10//m至30〇em之間，直徑可介於1〇〜3〇_或是 3〜20mm之間，且不以此為限。 而閥體薄膜23可以傳統加工或黃光蝕刻或雷射加工 或電鑄加工或放電加工等方式製出，其材質可為任何耐化 性佳之有機高分子材料或金屬，當閥體薄膜23採用該高 分子材料，其彈性係數為2〜20 Gpa ’例如聚亞醯胺 (Polyimide, PI)，其彈性係數，即揚氏係數（E值）可為 l〇GPa’當閥體薄膜23採用金屬材料時，例如鋁鋁合金、 鎳、鎳合金、銅、銅合金或不鏽鋼等金屬材料，其揚氏係 數係為2〜240GPa。至於閥體薄膜23之厚度係為一致，且 參可介於5〇#m’最佳者為，其揚 氏係數可為2~240GPa。另外，於本實施例巾，閥體薄膜 23所包含之入口閥門結構231及出口閥門結構232的延伸 部2311、2321的數量必須大於2、寬度可介於1〇〜5叫 二、形狀可為如第八圖A〜E所示之直線型態、切線型態或 疋S形型態，但不以此為限，且延伸部Μ。、Μ。所在 . 位置之兩同心圓的直徑範圍，其内徑/外徑範圍可為： 2:m/3_、2. 2_/3. 5mm、3mm/5_、— ' 4麵/7咖或 疋4mm/8min，但不以此為限。至於，入口閥片2313及出口 20 200938729 • 閥片2323的直徑長度範園可介於2〜4mm。 • 於一些實施例中，爲了因應流速可達到一般1〜 • 60ml/min的流量流體傳輪需求，可於致動裝置24之致動 • 器242上施予大於5Hz的操作頻率，並配合以下條件： 致動器242之厚度約為i〇〇"m至500//Π1之剛性特 性，較佳厚度為150 v m至250 # m ,楊氏係數約為 100-150GPa，至於材料可為單層金屬或是由金屬材料與高 分子材料所構成之雙層結構。 ® 以及振動薄膜241之厚度為1〇〇wm至3〇〇//m之間， 較佳厚度為100/zm至250/zm，楊氏係數為60_3〇〇Gpa， 其材質可為一單層金屬所構成，例如不銹鋼材料，其楊氏 係數係為240Gpa，厚度係介於2〇〇#m至25〇#m，例如銅 金屬材料，其楊氏係數係為l〇〇Gpa，厚度係介於 至250 //m，但不以此為限。 該壓力腔室226之深度係介於1〇//]11至3〇〇//111之間， ❿直徑介於1〇~30则1之間。閥體座21以及閥體蓋體22之材 質係可採用熱塑性塑膠材料，且閥體蓋體22之整體厚度 係一致。 間體薄膜23上之入口閥門結構加、出口闕門結構 232之厚度為’„^50/^，較佳厚度為21"m至卿m, 揚氏係數為2〜240Gpa，可為高分子材料或金屬材料，闕體 •薄膜23採用該高分子材料，其彈性係數為2〜2〇 Gpa，例 •如聚亞醯胺（Polyimide，PI) ’其彈性係數為⑽阳，間體 薄膜23亦可採用金屬材料，例如銘、紹合金錄、錄合 21 200938729 金、銅、銅合金或不錄鋼等金屬材料，其楊氏係數係為 2〜240Gpa 〇 以及，閥體薄膜23所包含之入口閥門結構231及出 口閥門結構232的延伸部2311、2321的數量必須大於2、 寬度可介於10〜500// m、形狀可為如第八圖a〜E所示之 直線型態、切線型態或是S形型態，但不以此為限，且延 伸部2311、2321所在位置之兩同心圓的直徑範圍，其内 0 Ο 徑/外徑範圍可為：2mm/3mm、2. 2mm/3. 5mm、3mm/5mm、 4mm/6mm、4mm/7mm或是4mm/8mm，但不以此為限。至於， 入口閥片2313及出口閥片2323的直徑大小範圍可介於2 〜4_。該閥體薄膜23的預力作用結構為密封環。 由上述致動器242、振動薄膜241、壓力腔室2邡及 閥體薄膜23等相關參數條件搭配，貝,】可驅動間趙薄膜23 之入口閥門結構231及出口閥門結構232進行啟閉作用， 骚使流體進行單向流動，並使流經壓力腔室挪的流體能 達到每分鐘的流量輪出，錢得將韻吸入流體 輸送裝置内部之吸力可小於驗a，而將 裝置内部推出的壓力可小於5〇kPa„ 於一些實施例中，爲了因岸流妹 认各法θ> 應/爪逮可達到大於60ml/min ., ^ 、致動裴置24之致動器242 上施予大於30Hz的操作頻率，並配合 致動器242之厚度約盍lnn, 卜條仟· 、·為100 /z m至5〇〇以m之剛性特 性，較佳厚度為l50/z 特 1ΛΛ 1c.nr - ^ M m ’楊氏係數約為 100-150Gpa，至於材料可▲ ^ ”、早層金屬或是由金屬材料與高 22 200938729 ’分子材料所構成之雙層結構。 以及振動薄膜241之厚度為1 ^至300 // m之間， 較佳厚度為100//m至250#m，揚氏係數為6〇_3〇〇GPa， 其材質可為一單層金屬所構成，例如不銹鋼材料，其楊氏 係數係為240Gpa ’厚度係介於2〇〇以m至250// m，例如銅 金屬材料，其揚氏係數係為l〇〇Gpa，厚度係介於2〇〇//m 至250//m，但不以此為限。 該壓力腔室226之深度係介於i〇/zm至3〇〇em之間， 直徑介於10~30mm之間。閥體座21以及閥體蓋體22之材 質係可採用熱塑性塑膠材料，且閥體蓋體22之整體厚度 係一致。 閥體薄膜23上之入口閥門結構231、出口閥門結構 232之厚度為i〇#m至50//m，較佳厚度為^以^至如以 楊氏係數為2〜240GPa’可為高分子材料或 薄膜23採用該高分子材料，其彈性係數為 如聚亞醢胺（Polyimide，PI),其彈性 〇 Gpa例 金、銅 2~240Gpa 薄膜23亦可採用金屬材料，例如鋁鉋^ l〇GPa，閥體 金、錮、銅合金或不鏽鋼等金屬材科合金、鎳、鎳合 沿。 ’其楊氏係數係為 以及 ，阀菔溽膜23所包含之入Q閥 口閥門結構232的延伸部2311、2321 1結構231及出 寬度可介於10〜500_、形狀可為如=量必須大於2、 且延 其内 直線型態、切線型態或是s形型態，值^圖A〜E所示之 伸部2311、2321所在位罟夕忐π、_ 以此為限 所在位置之兩W圓的直徑範圍 23 200938729 徑/外徑乾圍可為：2mm/3mm、2. 2mm/3. 5mm、3min/5min、 4mm/6mm、4mm/7mm或是4mm/8mm，但不以此為限。至於， - 入口閥片2313及出口閥片2323的直徑大小範圍可介於2 〜4mm。該閥體薄膜23的預力作用結構為密封環。 由上述致動器242、振動薄膜241、壓力腔室226及 閥體薄膜23等相關參數條件搭配，則可驅動閥體薄膜23 之入口閥門結構231及出口閥門結構232進行啟閉作用， 驅使流體進行單向流動，並使流經壓力腔室226的流體能 ❿ 達到每分鐘6〇ml以上的大流量輸出，並使得將流體吸入 流體輸送裝置内部之吸力可大於2〇kPa，而將流體由流體 輸送裝置内部推出的壓力可大於3〇kPa。 於一些實施例中’爲了因應流速小於1 ml/miη的微液 滴流量流體傳輸需求，可於致動裝置24之致動器242上 施予小於20Hz的操作頻率，並配合以下條件： 致動器242之厚度約為100/zm至500#m之剛性特 ❹性，較佳厚度為150以m至250 // m ,揚氏係數約為 100-150Gpa，至於材料可為單層金屬或是由金屬材料與高 分子材料所構成之雙層結構。 以及振動薄膜241之厚度為i〇//m至2〇〇#m之間， 較佳厚度為20私111至10〇)Wm，楊氏係數為6〇 3〇〇Gpa，其 材質可為單層金屬所構成’例如不錄鋼材料，其楊氏係 數係為240Gpa ’厚度係介於go # m至以m，例如銅金屬 .材料’其楊氏係數係為！⑽Gpa，厚度係介於 30 # m 至 80 ，但不以此為限。 24 200938729 該屋力腔室226之深度係介於l〇Aln至300//m之間， 直徑介於3〜20mm之間。閥體座21以及閱體蓋體22 B ’ 質係可採用熱塑性塑膠材料’且闊體蓋體22之整體$柯 係一致。 厚度 間體薄膜23上之入口閥門結構231、出口閥門結 232之厚度為ιορ至5〇//m，較佳厚度為21輝至4〇 揚氏係數為2〜240Gpa，可為高分子材料或金屬材料， ❸ 薄膜23採用該高分子材料，其彈性係數為2 2〇 ， 如聚亞醯胺（Polyimide，PI)，其彈性係數為1〇Gpa，間^ 薄膜23亦可採用金屬材料，例如銘、銘合金、鎳、錄人 金、銅、銅合金或不鏽鋼等金屬材料，其揚氏係數係2 2〜240Gpa。 馬 以及，閥體薄膜23所包含之入口閥門結構231及出 口閥門結構232的延伸部2311、2321的數量必須大於2、 寬度可介於10〜500//m、形狀可為如第八圖A〜E所示之 ❹直線型態、切線型態或是S形型態，但不以此為限，且延 伸部2311、2321所在位置之兩同心圓的直徑範圍，其内 徑/外控範圍可為：2mm/3mm、2· 2mm/3. 5咖、3_/5腿、 4mm/6mm、4mm/7mm或是4mm/8mm，但不以此為限。至於， 入口閥片2313及出口閥片2323的直徑大小範圍可介於2 〜4匪。該閥體薄膜23的預力作用結構可為密封環，或是 -採用半導體製程，例如：黃光蝕刻或鍍膜或電鑄技術，直 接在閥體座21及閥體蓋體22上所形成之微凸結構。 由上述致動器242、振動薄膜241、壓力腔室226及 25 200938729 閥體薄膜23等相關參數條件搭配，則可驅動閥體薄膜23 - 之入口閥鬥結構231及出口閥門結構232進行啟閉作用， . 驅使流體進行單向流動，並使流經壓力腔室226的流體能 達到每分鐘丨ml的微液滴流量輸出，並使得將流體吸入流 體輸送裝寰内部之吸力可小於2〇kPa，而將流體由流體輸 送裝置内部推出的壓力可小於30kPa。 综上所述，本案之流體傳輸裝置20可經由致動裝置 24之驅動，且閥體薄膜23及其上一體成形之入口閥門結 © 構231可配合設置於閥體座21之凹槽216内的軟性密封 環26，使入口閥門結構231開啟而將流體輸送至壓力腔室 226，再因致動裝置24改變壓力腔室226之體積，因而使 出口閥門結構232配合設置於閥體蓋體22上之凹槽225 内之軟性密封環27而開啟，以使流體輸送至壓力腔室226 之外，由於壓力腔室226於體積漲縮的瞬間可產生流體吸 力與推力，配合閥體薄膜23上之閥門結構其迅速的開合 ❿ 反應，使得故可使流體達到一般流量、大流量或是微液滴 之傳輸，並有效阻擋流體之逆流。 綜上所述，本案之流體輸送裝置係適用於微幫浦結 構，主要由閥體座、閥體薄膜、閥體蓋體、振動薄膜及致 動器堆疊而成，其係藉由致動裝置之壓電致動，使得壓力 腔室之體積改變，進而開啟或關閉成形於同一閥體薄膜上 之入口 /出口閭門錄構’配合軟性密封環及設置於閥體座 或閥體蓋體上之四槽’而進行流體之輸送’由於本案之流 體輸送裝置係4輸送乳體及流體’不僅有極佳之流率與輸 26 200938729 出壓力，可於初始狀態自我汲取液體，更具有高精度控制 - 性，且因其可輸送氣體，因此於流體輸送過程更可排除氣 泡，以達到高效率之傳輸。 另外，藉由控制致動裝置之致動器上施予的操作頻 率，並搭配其它組件的不同條件，即可使得流體輸送裝置 可因應需求達到一般流量、大流量或是微液滴之傳輸。 是以，本案之大流量流體輸送裝置極具產業之價值， 爰依法提出申請。 @ 本案得由熟習此技術之人士任施匠思而為諸般修 飾，然皆不脫如附申請專利範圍所欲保護者。 _ 27 200938729 - 【圖式簡單說明】 . 第一圖A:其係為習知微幫浦結構於未作動時之結構示意圖。 第一圖B:其係為第一圖A於作動時之結構示意圖。 第二圖：其係為第一圖A所示之微幫浦結構之俯視圖。 第三圖：其係為本案第一較佳實施例之流體輸送裝置之結構 示意圖。 第四圖：其係為第三圖所示之閥體座侧面結構示意圖。 ® 第五圖A:其係為第三圖所示之閥體蓋體之背面結構示意圖。 第五圖B:其係為第五圖A之剖面結構示意圖。 第六圖：其係為第三圖所示之閥體薄膜結構示意圖。 第七圖A:其係為本案較佳實施例之流體輸送裝置之未作動 狀態示意圖。 第七圖B:其係為第七圖A之壓力腔室膨脹狀態示意圖。 第七圖C:其係為第七圖B之壓力腔室壓縮狀態示意圖。 _ 第八圖A〜E:其係為本案較佳實施例之閥門結構之結構示 意圖。 【主要元件符號說明】 微幫浦結構：10 壓縮室：m 入口通道：13 微致動器：15 基板：11 隔層膜：12 傳動塊：14 出口通道：16 28 200938729The inlet valve plate 2313 of the inlet valve structure 231 of the (Preforce) is rapidly opened (as shown in FIG. 6B), so that a large amount of liquid can be sucked in from the inlet passage 211 on the valve body seat 21 and flow through the valve body seat. The opening 213 on the 21, the hole 2312 of the inlet valve structure 231 on the valve body film 23, the inlet temporary cavity 223 on the body cover 22, and the inlet valve passage 221 flow into the waste chamber 226. Since the inlet valve structure 231 of the valve body film 23 and the outlet valve structure 232 are subjected to the upward pulling force, the outlet valve structure 232 at the other end is sealed by the outlet strip 2323 located on the valve body film 23 due to the upward pulling force. The valve passage 222' closes the outlet valve structure 232 so that the fluid flows countercurrently. When the actuating device 24 is bent downwardly as the arrow b shown in FIG. C is changed due to the change of the electric field direction, the volume of the pressure chamber 226 is compressed, so that the pressure chamber 226 generates a thrust to the internal fluid. The inlet valve 231 and the outlet valve structure 232 of the interlayer film 23 are subjected to a downward thrust. At this time, the outlet valve piece 2323 of the outlet door structure 232 disposed on the seal ring 27 in the recess 225 can be quickly opened. (as shown in Figure 6), and the liquid is instantaneously declared in abundance. 'The pressure chamber 226 passes through the outlet 阙fl channel 222 on the body cover 22, and the hole in the outlet door structure 232 on the body film 23. 230. The outlet temporary chamber 215, the opening 2M and the outlet passage 212 on the valve body seat 21 flow out of the fluid delivery device 2', thus completing the fluid transmission process. Similarly, at this time, due to the demographic structure 23i Sustaining the thrust of the yaw' thus causes the inlet valve piece 2313 to seal the opening 213, thereby closing the inlet valve structure 231 so that the fluid does not flow backwards, and by the A-port door structure 231 and the exit door structure 232 16 200938729 » "Placed on the valve again The design of the dam seal rings 26, 27 in the recesses 216, 225 of the seat 21 and the valve body cover 22 allows the fluid to be recirculated during transport without the need for recirculation to achieve high efficiency transmission. The embodiment of the inlet valve structure and the outlet valve structure of the valve body film of the conveying device is not limited to the types of the inlet valve structure 231 and the outlet valve structure 232 shown in the third and sixth figures A, and may also be used. A valve structure of the same thickness, the same material, but different rigidity. The rigidity of the valve structure depends on the appearance of the valve structure, the width and number of extensions included, and is adjusted in accordance with the vibration frequency of the control actuator 24. For the flow rate of the fluid, please refer to the eighth embodiment A to E, which is a schematic structural view of the valve structure of the preferred embodiment of the present invention. As shown in FIG. 8A, the valve structure 81 has a valve piece 811 and a periphery around the valve piece 811. The bell hole 812 ′ and the extension 813 are respectively connected to the valve 811 . In the embodiment, the valve piece gw has a circular structure, and the number of the holes 812 can be 3, as for the number of extensions 813 ❹ 3 and the shape thereof can be linear, but the shape and shape of the valve piece 811, the hole 812 and the extension 813 are not limited thereto. FIG. 8B. In some embodiments, the valve structure 82 also has a valve plate 821, a hole 822, and an extension portion 823. The connection relationship between the valve piece 821, the hole 822, and the extension portion 823 is the same as above, and thus is not described. As described above, in the present embodiment, the valve piece 821 has a circular-shaped structure, and the number of the holes 822 can be 3'. As for the number of the extension portions 823 is 3 and the shape thereof can exhibit a tangential shape, the shape of the valve piece 821 and the hole are formed. The number and shape of the 822 and the extension portion 823 are not limited thereto. 17 200938729 Referring again to FIG. 8C, in some embodiments, the valve structure 83 also has a valve plate 831, a hole 832, and an extension 833. The connection between the valve piece 831, the hole 832, and the extension 833 is In the above description, the valve piece 831 has a circular structure, and the number of the holes 832 can be 4, and the number of the extending portions 833 is 4 and the shape thereof can assume an S-shaped shape. However, the number and shape of the valve piece 831, the hole 832, and the extending portion 833 are not limited thereto. Referring again to FIG. 8D, in some embodiments, the valve structure 84® also has a valve plate 841, a hole 842, and an extension 843. The connection between the valve piece 841, the hole 842, and the extension 843 is as described above. In the present embodiment, the valve piece 841 has a circular structure and has a toothed structure 8411 around it. The number of the holes 842 can be three, and the number of the extensions 843 is three and The shape may assume a straight line shape, but the number and shape of the valve piece 841 shape, the hole 842, and the extension portion 843 are not limited thereto. ❾ Referring again to FIG. 8E, in some embodiments, the valve structure 85 also has a valve piece 851, a hole 852, and an extension 853'. The connection relationship between the valve piece 851, the hole 852, and the extension 853 is as described above. In the present embodiment, the valve piece 851 has a circular structure and has a toothed structure 8511. The number of the holes 852 can be three, and the number of the extensions 853 is three. The shape may take a tangential shape, but the shape of the valve piece 851, the hole 852, and the number and shape of the extension 853 are not limited thereto. Of course, the valve 18 200938729 applicable to the valve body film of the fluid delivery device of the present invention is not limited to the state disclosed in the eighth embodiment A to E, and may be changed by other variations as long as the same thickness is used. The material is a rigid valve structure that is protected by the present invention. The actuator 242 in the actuator 24 is a piezoelectric plate that can be used. The piezoelectric powder of the high piezoelectric coefficient lead zirconate titanate (PZT) series is manufactured in which the thickness of the actuator 242 can be between loo#m and 5〇〇, and the thickness is 150/zm to 250#m, Young's coefficient is 100 to 15 〇 Gp and is not limited to this. The material of the actuator 242 may be a single layer of metal or a layer structure formed by attaching a layer of polymer material to the metal material. And the thickness of the vibrating film 241 attached to the actuator 242 may be from 1 300 to 300 #m', preferably from looem to 250//m, or from 1 〇u to 200/zm. 20/ζιη to l〇0//m, its Young's coefficient ^ is between 60~300Gpa. The vibrating film 241 may be made of a single layer of metal, such as a stainless steel material, having a Young's modulus of 24 〇 Gpa and a thickness of between 30 "m to 80//m' or 200//m to 250. /zm, such as copper, whose Young's coefficient is lOOGpa 'thickness is between 30 private m and 80 private m, or 200/zm to 250#m, and is not limited thereto. In addition, in the present embodiment, the material of the valve body seat 21 and the valve body cover 22 may be a thermoplastic plastic material such as polycarbonate PC, Polysulfone (PSF), ABS resin. Acrylonitrile Butadiene Styrene, LLDPE, LDPE, HDPE, PP, PTS (p〇iyphenylene 19 200938729 • Sulfide , PPS), para-polystyrene (SPS), polyphenylene ether (pp〇), poly-acetal (?〇1 ie 〇6 7 31'?011〇, polybutylene terephthalate (four 7), thermoplastic polymer materials such as polyvinylidene fluoride (PVDF), ethylene tetrafluoroethylene copolymer (ETFE), cyclic olefin polymer (C0C), etc., but not limited thereto. In this embodiment, the valve body The depth of the pressure chamber 226 of the cover 22 is between 10//m and 30 〇em, and the diameter may be between 1 〇 3 〇 or 3 〜 20 mm, and is not limited thereto. The valve body film 23 can be produced by conventional processing or yellow etching or laser processing or electroforming or electric discharge machining, and the material thereof can be any The organic polymer material or metal having good chemical resistance, when the valve body film 23 is made of the polymer material, has a modulus of elasticity of 2 to 20 Gpa, for example, polyimide (PI), and its modulus of elasticity, that is, Young's modulus. (E value) may be l〇GPa' When the valve body film 23 is made of a metal material, for example, a metal material such as aluminum aluminum alloy, nickel, nickel alloy, copper, copper alloy or stainless steel, and the Young's modulus is 2 to 240 GPa. The thickness of the valve body film 23 is uniform, and the parameter can be between 5 〇 #m', and the Young's modulus can be 2 to 240 GPa. In addition, in the embodiment, the valve body film 23 is included. The number of extensions 2311, 2321 of the inlet valve structure 231 and the outlet valve structure 232 must be greater than 2, the width may be between 1 and 5, and the shape may be a straight line as shown in the eighth diagram A to E. Tangential or 疋S-shaped, but not limited to this, and the extension of the Μ., Μ. where the diameter of the two concentric circles, the inner diameter / outer diameter range can be: 2: m / 3_, 2. 2_/3. 5mm, 3mm/5_, — '4 faces / 7 coffee or 疋 4mm / 8min, but not limited to this. As for the entrance Sheet 2313 and outlet 20 200938729 • The diameter of the valve plate 2323 can be between 2 and 4 mm. • In some embodiments, in order to achieve a flow rate of 1 to 60 ml/min in response to the flow rate, it is possible to An actuation frequency of greater than 5 Hz is applied to the actuator 242 of the actuator 24 in conjunction with the following conditions: The thickness of the actuator 242 is approximately i 〇〇 " m to 500 / / Π 1 rigid characteristics, preferably thickness The range is from 150 vm to 250 #m, and the Young's modulus is about 100-150 GPa. The material may be a single layer of metal or a two-layer structure composed of a metal material and a polymer material. The thickness of the ® and the vibration film 241 is between 1 〇〇 wm and 3 〇〇 / / m, preferably from 100 / zm to 250 / zm, and the Young's modulus is 60 _ 3 〇〇 Gpa, and the material can be a single layer. The metal is composed of, for example, a stainless steel material having a Young's modulus of 240 GPa and a thickness of 2 〇〇#m to 25 〇#m, such as a copper metal material, the Young's coefficient is l〇〇Gpa, and the thickness is Up to 250 //m, but not limited to this. The depth of the pressure chamber 226 is between 1 〇//] 11 to 3 〇〇//111, and the diameter of the ❿ is between 1 〇 and 30 。. The material of the valve body seat 21 and the valve body cover 22 can be made of a thermoplastic plastic material, and the overall thickness of the valve body cover 22 is uniform. The thickness of the inlet valve structure plus and the exit gate structure 232 on the interlayer film 23 is '„^50/^, preferably the thickness is 21" m to Qing m, the Young's coefficient is 2 to 240 GPa, and may be a polymer material. Or metal material, carcass and film 23 using the polymer material, the modulus of elasticity is 2~2〇Gpa, for example, such as polyimide (PI), its elastic coefficient is (10) yang, and the interlayer film 23 is also Metal materials such as Ming, Shao alloy record, record 21 200938729 gold, copper, copper alloy or non-recorded steel metal materials, the Young's coefficient is 2~240Gpa 〇 and the inlet of the valve body film 23 is used. The number of extensions 2311, 2321 of the valve structure 231 and the outlet valve structure 232 must be greater than 2, the width may be between 10 and 500 / / m, and the shape may be a linear type or a tangent type as shown in the eighth diagrams a to E. The state of the Ο / / 231 231 231 231 231 231 231 231 231 231 231 231 231 231 231 231 231 231 231 231 231 231 231 231 231 231 231 231 231 231 231 231 231 231 231 231 /3. 5mm, 3mm/5mm, 4mm/6mm, 4mm/7mm or 4mm/8mm, but not limited to this. As for the inlet valve The diameter of the piece 2313 and the outlet valve piece 2323 may range from 2 to 4 mm. The pre-action structure of the valve body film 23 is a sealing ring. The actuator 242, the diaphragm 241, the pressure chamber 2, and the valve The body film 23 and other related parameter conditions are matched, and the inlet valve structure 231 and the outlet valve structure 232 of the driving film 23 can be opened and closed to make the fluid flow in one direction and flow through the pressure chamber. The fluid can reach the flow per minute, the suction of the money into the fluid delivery device can be less than the a, and the pressure inside the device can be less than 5 kPa. In some embodiments, in order to The method θ> should be greater than 60 ml/min., ^, the actuator 242 of the actuation device 24 is applied with an operating frequency greater than 30 Hz, and the thickness of the actuator 242 is approximately 盍lnn,卜条仟··· is a rigid characteristic of 100 /zm to 5〇〇m, preferably thickness l50/z special 1ΛΛ 1c.nr - ^ M m 'Young's coefficient is about 100-150Gpa, as for material ▲ ^", early layer metal or made of metal material with high 22 200938729 'Molecular material The two-layer structure is formed, and the thickness of the vibrating film 241 is between 1 ^ and 300 // m, preferably between 100//m and 250 #m, and the Young's coefficient is 6〇_3〇〇GPa. The material can be composed of a single layer of metal, such as stainless steel, with a Young's modulus of 240 Gpa. The thickness is between 2 and 250 m/m. For example, copper metal, the Young's coefficient is l〇. 〇Gpa, the thickness is between 2〇〇//m and 250//m, but not limited to this. The pressure chamber 226 has a depth between i〇/zm and 3〇〇em and a diameter of between 10 and 30 mm. The material of the valve body seat 21 and the valve body cover 22 can be made of a thermoplastic plastic material, and the overall thickness of the valve body cover 22 is uniform. The inlet valve structure 231 and the outlet valve structure 232 on the valve body film 23 have a thickness of i 〇 #m to 50//m, preferably a thickness of ^^ to a polymer such as a Young's modulus of 2 to 240 GPa'. The material or film 23 is made of the polymer material, and has a modulus of elasticity such as polyimide (PI), and the elastic 〇Gpa case gold and copper 2~240 Gpa film 23 can also be made of a metal material, such as aluminum planing. GPa, metal alloys such as valve body gold, tantalum, copper alloy or stainless steel, nickel and nickel. 'The Young's coefficient is the same as the extension 2311, 2321 of the valve valve structure 232 included in the valve diaphragm 23, and the structure 231 and the width may be between 10 and 500 _, and the shape may be such as If the value is greater than 2, and the linear type, tangential type or s-shaped type is extended, the values of the extensions 2311 and 2321 shown in Figures A to E are located at 罟 忐 π, _ Diameter range of two W circles 23 200938729 The diameter/outer diameter dry circumference can be: 2mm/3mm, 2. 2mm/3. 5mm, 3min/5min, 4mm/6mm, 4mm/7mm or 4mm/8mm, but not Limited. As for the - the inlet valve piece 2313 and the outlet valve piece 2323 may have a diameter ranging from 2 to 4 mm. The pre-action structure of the valve body film 23 is a seal ring. By the combination of the above-mentioned actuator 242, the diaphragm 241, the pressure chamber 226 and the valve body film 23, the inlet valve structure 231 and the outlet valve structure 232 of the valve body film 23 can be driven to open and close, and the fluid is driven. One-way flow is performed, and the fluid flowing through the pressure chamber 226 can reach a large flow output of more than 6 〇ml per minute, and the suction force for drawing the fluid into the fluid delivery device can be greater than 2 kPa, and the fluid is The pressure introduced inside the fluid delivery device can be greater than 3 kPa. In some embodiments, the operating frequency of less than 20 Hz can be applied to the actuator 242 of the actuator 24 in response to a microdroplet flow fluid delivery requirement at a flow rate of less than 1 ml/mi η, in conjunction with the following conditions: The thickness of the 242 is about 100/zm to 500#m, preferably 150 to m to 250 // m, and the Young's coefficient is about 100-150 Gpa. The material can be a single layer of metal or A two-layer structure composed of a metal material and a polymer material. And the thickness of the vibrating film 241 is between i 〇 / / m to 2 〇〇 # m, preferably 20 private 111 to 10 〇) Wm, Young's coefficient is 6 〇 3 〇〇 Gpa, the material can be single The layer metal constitutes 'for example, no steel material, the Young's coefficient is 240Gpa' thickness system is between go #m to m, such as copper metal. The material's Young's coefficient is! (10) Gpa, the thickness is between 30 # m and 80, but not limited to this. 24 200938729 The depth of the house chamber 226 is between 1 〇 Aln and 300 / / m, and the diameter is between 3 and 20 mm. The valve body seat 21 and the body cover 22 B ' can be made of a thermoplastic plastic material and the entire body cover 22 is uniform. The inlet valve structure 231 and the outlet valve junction 232 on the thickness interlayer film 23 have a thickness of ιορ to 5 〇//m, preferably a thickness of 21 GW to 4 〇, and a coefficient of 2 to 240 GPa, which may be a polymer material or The metal material, ❸ film 23 is made of the polymer material, and has a modulus of elasticity of 2 2 〇, such as polyimide (PI), and its modulus of elasticity is 1 〇 Gpa, and the film 23 can also be made of a metal material, for example, Metal materials such as Ming, Ming alloy, nickel, gold, copper, copper alloy or stainless steel have a Young's modulus of 2 2 to 240 GPa. The number of the extensions 2311, 2321 of the inlet valve structure 231 and the outlet valve structure 232 included in the valve body film 23 must be greater than 2, the width may be 10 to 500 / / m, and the shape may be as shown in the eighth figure A. ~E indicates a straight line type, a tangential type or an S-shaped type, but not limited thereto, and the diameter range of the concentric circles of the positions where the extending portions 2311 and 2321 are located, the inner diameter/outer control range Can be: 2mm / 3mm, 2 · 2mm / 3. 5 coffee, 3_/5 legs, 4mm / 6mm, 4mm / 7mm or 4mm / 8mm, but not limited to this. As for the inlet valve piece 2313 and the outlet valve piece 2323, the diameter may range from 2 to 4 inches. The pre-acting structure of the valve body film 23 may be a sealing ring or a semiconductor process such as yellow etching or coating or electroforming, directly formed on the valve body seat 21 and the valve body cover 22. Micro convex structure. By the above-mentioned actuator 242, diaphragm 241, pressure chamber 226 and 25 200938729 valve body film 23 and other related parameter conditions, the inlet valve body structure 231 and the outlet valve structure 232 of the valve body film 23 can be driven to open and close. Acting, driving the fluid in a one-way flow, and allowing the fluid flowing through the pressure chamber 226 to reach a microdroplet flow output of 丨ml per minute, and allowing the suction of the fluid into the fluid delivery device to be less than 2 kPa. The pressure at which the fluid is pushed out of the interior of the fluid delivery device can be less than 30 kPa. In summary, the fluid transfer device 20 of the present invention can be driven by the actuating device 24, and the valve body film 23 and the integrally formed inlet valve structure 231 can be fitted into the recess 216 of the valve body seat 21. The soft seal ring 26 opens the inlet valve structure 231 to deliver fluid to the pressure chamber 226, and the actuator device 24 changes the volume of the pressure chamber 226, thereby causing the outlet valve structure 232 to be cooperatively disposed on the valve body cover 22 The soft seal ring 27 in the upper groove 225 is opened to allow the fluid to be transported outside the pressure chamber 226. Since the pressure chamber 226 can generate fluid suction and thrust at the moment of volume expansion, the valve body film 23 is fitted. The valve structure has a rapid opening and closing reaction, so that the fluid can be transported to a general flow rate, a large flow rate or a micro-droplet, and effectively blocks the reverse flow of the fluid. In summary, the fluid conveying device of the present invention is applicable to a micro-pump structure, which is mainly composed of a valve body seat, a valve body film, a valve body cover body, a vibration film and an actuator, which are driven by the actuating device. The piezoelectric actuation causes the volume of the pressure chamber to change, thereby opening or closing the inlet/outlet gate structure formed on the same valve body film to fit the soft sealing ring and the valve body seat or the valve body cover. The four tanks' for the transport of fluids 'Because the fluid transport device 4 of this case transports the milk and fluid' not only has excellent flow rate and pressure, but also can extract liquid in the initial state, and has higher precision. Control-ability, and because it can transport gas, it can eliminate bubbles in the fluid transport process to achieve high efficiency transmission. In addition, by controlling the frequency of operation imparted to the actuator of the actuator, and in conjunction with the different conditions of other components, the fluid delivery device can be delivered to a typical flow rate, large flow rate, or microdroplet in response to demand. Therefore, the large-flow fluid delivery device in this case is of great industrial value and is submitted in accordance with the law. @ This case can be modified by people who are familiar with this technology, but they are all protected by the scope of the patent application. _ 27 200938729 - [Simple description of the diagram] Figure A: This is a schematic diagram of the structure of the conventional micro-pull structure when it is not actuated. First figure B: It is a schematic diagram of the structure of the first figure A when it is actuated. Second figure: It is a top view of the micro-push structure shown in the first figure A. Fig. 3 is a schematic view showing the structure of the fluid transporting device of the first preferred embodiment of the present invention. Figure 4: It is a schematic view of the side structure of the valve body seat shown in the third figure. ® Figure 5A: This is a schematic view of the back side of the valve body cover shown in the third figure. Figure 5B is a schematic cross-sectional view of the fifth Figure A. Figure 6: It is a schematic diagram of the structure of the valve body film shown in the third figure. Figure 7A is a schematic view of the unactuated state of the fluid delivery device of the preferred embodiment of the present invention. Figure 7B is a schematic view showing the state of expansion of the pressure chamber of Figure 7A. Figure 7C is a schematic view showing the compression state of the pressure chamber of Figure 7B. _ Eighth Figures A to E: This is a schematic view of the structure of the valve structure of the preferred embodiment of the present invention. [Main component symbol description] Micro-pull structure: 10 Compression chamber: m Inlet channel: 13 Microactuator: 15 Substrate: 11 Interlayer film: 12 Transmission block: 14 Exit channel: 16 28 200938729
❹ 入口擴流器：17 出口擴流器：18 流動方向：X、Y 方向：a、b 流體輸送裝置：20 流體閥座：201 閥體座：21 閥體蓋體：22 閥體薄膜：23 致動裝置：24 蓋體：25 振動薄膜：241 致動器：M2 入口流道：191、211 出口流道：192、212 開口 ： 213、214 上表面：210、220 出口暫存腔：215 下表面· 228 入口暫存腔：223 入口閥門通道：221 出口閥門通道：222 凹槽：216、217、218 、224、225、227、229 壓力腔室：226 密封環：26、27、28 入口閥門結構：231 出口閥門結構：232 入口閥片· 2313 出口閥片：2323 閥門結構：81、82、83、孔洞：2312、2322 84 閥片：811、821、831 > 841 ' 851 孔洞：812、822、832 、842 、 852 延伸部：2311、2321、 813 、 823 、 833 、 843 、 853 齒狀結構：8411、8511 29入口 Inlet diffuser: 17 Outlet diffuser: 18 Flow direction: X, Y direction: a, b Fluid delivery device: 20 Fluid seat: 201 Body seat: 21 Body cover: 22 Body film: 23 Actuator: 24 Cover: 25 Vibrating membrane: 241 Actuator: M2 Inlet runner: 191, 211 Outlet runner: 192, 212 Opening: 213, 214 Upper surface: 210, 220 Exit temporary chamber: 215 under Surface · 228 inlet chamber: 223 inlet valve channel: 221 outlet valve channel: 222 groove: 216, 217, 218, 224, 225, 227, 229 pressure chamber: 226 seal ring: 26, 27, 28 inlet valve Structure: 231 Outlet valve structure: 232 inlet valve · 2313 outlet valve: 2323 Valve structure: 81, 82, 83, hole: 2312, 2322 84 Valve: 811, 821, 831 > 841 ' 851 Hole: 812, 822, 832, 842, 852 extensions: 2311, 2321, 813, 823, 833, 843, 853 Toothed structure: 8411, 8511 29