TWI337943B - Fluid transmission device - Google Patents

Description

337943 IX. Description of the invention: ' [Technical field to which the invention pertains] t - The present invention relates to a fluid delivery device, and more particularly to a fluid delivery device suitable for a micro-push structure. 'm 【Previous technology】 At present, in various fields, such as medicine, computer technology, printing, energy*, etc., the products are developing in the direction of refinement and miniaturization, among which micro-pull, sprayer, inkjet head, The fluid transport structure contained in products such as industrial printing devices is its key technology. It is how to break through its technical bottleneck with innovative structure and is an important part of development. Please refer to FIG. 1A , which is a schematic diagram of a conventional micro-pull structure when it is not actuated. The conventional micro-pull structure 10 includes an inlet channel 13 , a microactuator 15 , a transmission block , and a barrier film . 12. The compression chamber 111, the substrate φ 11 and the outlet channel 16, wherein a compression chamber 111 is defined between the substrate 11 and the interlayer film 12, and is mainly used for storing liquid, and the compression chamber is affected by the deformation of the interlayer film 12. The volume of 111 has been changed. When a voltage is applied to the upper and lower poles of the microactuator 15, an electric field is generated, causing the microactuator 15 to bend under the action of the electric field to move toward the interlayer film 12 and the compression chamber 111 due to the micro The actuator 15 is disposed on the transmission block 14, so that the transmission block 14 can transmit the thrust generated by the microactuator 15 to the interlayer film 12, so that the interlayer film 12 is also pressed and deformed, that is, As shown in the figure, the liquid can flow in the direction of the arrow X 1 1337943 in the figure, so that the liquid stored in the compression chamber 111 after flowing in through the inlet passage 13 is squeezed, and flows to the other through the outlet passage 16. Pre-set space, • to achieve the purpose of supplying fluid. Please refer to the second figure, which is the top view of the micro-pump structure shown in the first figure A. As shown in the figure, when the micro-pull structure is operated, the direction of fluid transport is as shown in the figure. As indicated by the direction of the arrow Y, the inlet diffuser 17 is a tapered structure having different opening sizes at both ends, and one of the larger openings is connected to the φ inlet flow passage 191, and one end of the smaller opening and the micro compression chamber 111, at the same time, the diffuser 18 connecting the compression chamber Π1 and the outlet flow passage 192 is disposed in the same direction as the inlet diffuser 17, and is connected to the compression chamber 111 with a larger opening, and has a smaller opening. One end is connected to the outlet flow channel 192, and since the inlet diffuser 17 and the outlet diffuser 18 connected to both ends of the compression chamber 111 are disposed in the same direction, different characteristics of the flow resistance of the diffuser in both directions can be utilized, and The volumetric expansion of the compression chamber 111 causes the fluid to produce a unidirectional net flow rate such that fluid can flow from the inlet flow passage 191 through the inlet diffuser 17 into the compression chamber 111 and from the outlet diffuser 18 through the outlet flow passage. 192 out. Such a micro-pump structure 10 without a physical valve is prone to generate a large amount of fluid backflow. Therefore, in order to increase the flow rate, the compression chamber Π1 needs to have a large compression ratio to generate sufficient cavity pressure, so that it is expensive. The cost is on the actuator 15. Therefore, how to develop a fluid delivery device that can improve the above-mentioned conventional techniques is an urgent problem to be solved. 7 1337943 SUMMARY OF THE INVENTION The main purpose of the present invention is to provide a fluid transport device that solves the problem that the micro-push structure of the prior art is susceptible to fluid-flow during fluid transport. In order to achieve the above object, a broader embodiment of the present invention provides a fluid delivery device for transferring fluid, comprising: a valve body seat having an outlet passage and an inlet passage; and a valve body cover, the system is provided On the valve body seat (); the valve body film has substantially the same thickness and is disposed between the valve body seat and the valve body cover body, and has a first valve structure and a second valve structure, the first valve structure and The second valve structure has a valve piece, a plurality of holes and a plurality of extensions, a plurality of holes are arranged around the periphery of the valve piece, and the plurality of extensions are connected with the valve piece and disposed between the plurality of holes; The storage chamber is disposed between the valve body film and the valve body cover body, and between the valve body film and the valve body seat; the vibration film is fixed on the valve body cover body, and the vibration film is in an unactuated state. Separating from the valve body cover to form a pressure chamber; and an actuator connected to the vibrating membrane; wherein, when an operating frequency greater than 5 Hz is applied to the actuator of the actuating device, Actuator will cause Force chamber volume changes, which in turn drives a transmission flow switching valve opening and closing action of the structure, so that flow through the system has reached pressure chambers ilk 1~60ml / min ^ a. [Embodiment] Some exemplary embodiments embodying the features and advantages of the present invention will be described in detail in the later paragraph 8 1337943~. It is to be understood that the present invention is capable of various modifications in the various aspects of the present invention, and the description and the illustration thereof are used in the nature of the description and are not intended to limit the present invention. Please refer to the third figure, which is a schematic structural view of the fluid delivery device of the first preferred embodiment of the present invention. As shown in the figure, the fluid delivery device 20 of the present invention can be applied to medical technology, computer technology, and printing. Or an energy industry, and can transport gas or liquid, but not limited thereto, the fluid delivery device 20 φ is mainly composed of a valve body seat 21, a valve body cover 22, a valve body film 23, and a plurality of temporary storage rooms. The actuating device 24 and the cover body 25 are formed, wherein the valve body seat 21, the valve body cover body 22 and the valve body film 23 form a fluid valve seat 201, and between the valve body cover body 22 and the actuating device 24 A pressure chamber 226 is formed primarily for storing fluid. The fluid delivery device 20 is assembled in such a manner that the valve body film 23 is disposed between the valve body seat 21 and the valve body cover 22, and the wide body film 23 is disposed corresponding to the valve body seat 21 and the valve body cover 22. And forming a first temporary storage chamber between the valve body film 23 and the valve body cover 22, and forming a second temporary storage chamber between the valve body film 23 and the valve body seat 21, and the valve body cover The corresponding position on the body 22 is further provided with an actuating device 24, which is assembled by a vibrating membrane 241 and an actuator 242 for driving the fluid transporting device 20, and finally, the cover body 25 is used. It is disposed above the actuating device 24, so that the valve body seat 21, the valve body film 23, the valve body cover 22, the actuating device 24 and the cover body 25 are sequentially stacked correspondingly to complete the fluid transport device 20 Assembly. Wherein, the valve body seat 21 and the valve body cover body 22 are under the suction force of the fluid conveying device 9 1337943, and the sealing ring 26 disposed in the groove 216 of the valve body seat 21 has provided the inlet valve structure 231. (Preforce), thus, the inlet valve piece 2313 can be made to have a larger pre-covering effect by the support of the extension portion 2311 to prevent backflow, and the inlet valve structure 231 is upward due to the negative pressure of the pressure chamber 226. A displacement is generated (as shown in FIG. 6B). At this time, the fluid can flow from the valve body seat 21 to the inlet temporary storage chamber 223 of the valve body cover 22 via the hollow hole 2312, and through the inlet temporary storage chamber 223 and The inlet valve φ passage 221 is transferred into the pressure chamber 226, so that the inlet valve structure 231 can be quickly opened or closed in response to the positive and negative pressure difference generated by the pressure chamber 226 to control fluid in and out and prevent fluid from flowing. It will return to the valve body seat 21. Similarly, the other valve structure on the same valve body film 23 is the outlet valve structure 232, wherein the outlet valve piece 2323, the extension portion 2321, and the hole 2322 are operated in the same manner as the inlet valve structure 231, and thus will not be described again. However, the seal ring 20 around the outlet valve structure 232 is disposed opposite to the seal ring 27 of the inlet valve structure 231, as shown in FIG. 6C, so that when the pressure chamber 226 is compressed to generate a thrust, The seal ring 27 disposed within the recess 225 of the valve body cover 22 will provide an outlet valve structure 232 - Preforce, such that the outlet valve 2323 can be produced by the extension of the extension 2321 to create a greater pre-tightening The effect is to prevent backflow. When the outlet valve structure 232 is displaced downward due to the positive pressure of the pressure chamber 226, the fluid can flow from the pressure chamber 226 through the valve body cover 22 via the hollow hole 2322. The outlet cavity 215 of the valve body seat 21 can be discharged through the opening 214 and the outlet flow channel 212, so that 13 1337943 thus completes the fluid transfer process, and likewise, at this time, the inlet valve structure 231 is Due to the downward thrust, the inlet valve piece 2313 is sealed to the opening 213, thereby closing the inlet valve structure 231 so that the fluid does not flow backward, and is disposed in the valve body seat 21 by the inlet valve structure 231 and the outlet valve structure 232. And the design of the seal rings 26, 27 in the grooves 216, 225 on the valve body cover 22 allows the fluid to be reflowed during transport to achieve high efficiency transmission.

The embodiment of the inlet valve structure and the outlet valve structure of the valve body film of the fluid delivery device of the present invention is not limited to the types of the inlet valve structure 231 and the outlet valve structure 232 shown in the third and sixth figures A, A valve structure having the same thickness, the same material, but different rigidity may be used, wherein the rigidity of the valve structure depends on the appearance of the valve structure, the width and number of extensions included, and the vibration of the control actuator 24 The frequency is used to adjust the flow rate of the fluid. Please refer to FIG. 8A to FIG. 8A, which are structural diagrams of the valve structure of the preferred embodiment of the present invention. As shown in FIG. 8A, the valve structure 81 has a valve piece 811 and a surrounding valve piece. The venting hole 812 is provided in the periphery of the 811, and the extending portion 813 is connected to the valve piece 811. The valve piece 811 has a circular structure, and the number of the holes 812 can be 3. The number of the extending portions 813 is 3 and the shape thereof can be linear. However, the shape and shape of the valve piece 811, the holes 812, and the extending portion 813 are not limited thereto. Referring to FIG. 8 again, in some embodiments, the valve structure 82 also has a valve plate 821, a hole 822, and an extension portion 823. The connection relationship between the valve piece 821, the hole 822, and the extension portion 823 is as follows. 1337943 is the same, so it is not described in the above description. In the embodiment, the valve piece 821 has a circular structure, and the number of the holes 822 can be 3. As for the number of the extending portions 823 is 3 and the shape thereof can be tangential, but The number and shape of the valve piece 821 shape, the hole 822, and the extension portion 823 are not limited thereto.

Referring to FIG. 8 again, in some embodiments, the valve structure 83 also has a valve 831, a hole 832, and an extension 833. The connection relationship between the valve piece 831, the hole 832, and the extension 833 is the same as above. Therefore, in the present embodiment, the valve piece 831 has a circular structure, and the number of the holes 832 can be 4. As for the number of the extending portions 833 is 4 and the shape thereof can be S-shaped, the valve piece The number and shape of the 831, the hole 832, and the extension 833 are not limited thereto. Referring to FIG. 8 again, in some embodiments, the valve structure 84 also has a valve piece 841, a hole 842, and an extension 843. The connection relationship between the valve piece 841, the hole 842, and the extension 843 is the same as described above. Therefore, in the present embodiment, the valve piece 841 has a circular structure and has a toothed structure 8411 around it. The number of the holes 842 can be three. As for the number of the extending portions 843, the shape is three. The linear shape may be present, but the number and shape of the valve piece 841 shape, the hole 842, and the extension portion 843 are not limited thereto. Referring to FIG. 8 again, in some embodiments, the valve structure 85 also has a valve piece 851, a hole 852, and an extension portion 853. The connection relationship between the valve piece 851, the hole 852, and the extension portion 853 is the same as described above. Therefore, in the present embodiment, the valve piece 851 has a circular structure and has a toothed structure 8511 around it. The number B37943 of the holes 852 may be 3, and the number of the extensions 853 is 3 and The outer shape of the shape is now tangential, but the shape and shape of the valve piece 851, the hole 852, and the extension 853 are not limited thereto. Of course, the embodiment of the valve structure applied to the valve body film of the fluid delivery device of the present invention is not limited to the state disclosed in the eighth diagrams a to e, and may be changed by other variations as long as the use has the same thickness. The structure of the valve, but the valve structure with different rigidity is the gl of the case. The actuator 242 in the actuating device 24 is made of a piezoelectric plate, < a piezoelectric powder of the high-voltage electric coefficient lead-lead titanate (PZT) series, wherein the thickness of the actuator 242 can be Between 1〇〇" m to 5〇〇#m, the preferred thickness is 150"m to 25〇#m, and the Young's coefficient is 1〇〇 to i5〇GPa' and is not limited thereto. The material of the actuator 242 may be a single layer of metal or a double layer structure in which a layer of polymer material is attached to the metal material. The thickness of the vibrating film 241 attached to the actuator 242 may be from 1 〇〇/zm to 300//m'. The thickness is preferably from ^ to 250/zm, and may also be from 10# m to 200 //m. Preferably, the thickness is from 2 〇//in to 100 #m, and the Young's modulus can be between 60 and 300 GPa. The vibrating film 241 may be made of a single layer of metal, such as a stainless steel material, having a Young's modulus of 240 GPa, a thickness of 30/zm to 80/zm, or 200 "m to 250//m'. For example, copper has a Young's modulus of l〇〇Gpa, a thickness of 30/zm to 80/zm, or 200#m to 250/m, and is not limited thereto. In addition, in the embodiment, the material of the valve body seat 21 and the valve body cover 22 can be made of a thermoplastic plastic material, such as polycarbonate resin 337943 - (Polycarbonate PC), Polysulfone (PSF), ABS. Acrylonitrile Butadiene Styrene, LLDPE, LDPE, HDPE, 'HDPE, PP, Polyphenylene Sulfide ), para-polystyrene (SPS), polyphenylene ether (PP0), polyacetal (P0M), polybutylene terephthalate (PBT), polyvinylidene fluoride (PVDF), ethylene four Thermoplastic plastic materials such as fluoroethylene copolymer (ETFE) and cyclic olefin polymer (C0C), but not limited to this. In this embodiment, the pressure chamber 226 of the valve body cover 22 has a depth of between 10/zra and 300//in, and the diameter may be between 1〇30mm or 3~2〇mm. And not limited to this. The valve body film 23 can be produced by conventional processing or yellow silver engraving or laser processing or electroforming processing or electric discharge machining, and the material thereof can be any organic polymer material or metal resistant to chemical properties, when the valve body film 23 is used. The polymer material has a modulus of elasticity of 2 to 20 GPa, for example, polyimide (PI), and its modulus of elasticity, that is, the Young's modulus (e value) can be 10 GPa' when the valve body film 23 is made of a metal material. In the case of a metal material such as aluminum, aluminum alloy, nickel, alloy, copper, copper alloy or stainless steel, the Young's modulus is 2 to 240 GPa. As for the thickness of the valve body film 23, the 玎 is between 10//m and 50//ra', and the optimum is 21 to 40/m, and the Young's modulus can be 2 to 240 GPa. In addition, in the present embodiment, the number of the extensions 2311, 2321 of the inlet valve structure 231 and the outlet valve structure 232 included in the valve body film 23 must be greater than 2, the width may be between ~ m, and the shape may be as the eighth The linear type, tangent type or 20 1337943 ' shown in Figs. A to E is an s-shaped type, but not limited thereto, and the diameter range of the concentric circles of the positions where the extending portions 2311 and 2321 are located, the inner diameter thereof The outer diameter range can be: 2mm/3mm, 2. 2min/3. 5mm, 3mm/5mm, 4mm/6mm, 4mm/7mm or 4. It is 4mm/8mm, but not limited to this. As for the inlet valve piece 2313 and the outlet valve piece 2323, the diameter may range from 2 to 4 mm. In some embodiments, the operating frequency of greater than 5 Hz can be applied to the actuating φ 242 of the actuating device 24 in order to achieve a flow rate of fluid delivery of typically 1 to 60 ml/min in response to the flow rate, in conjunction with the following conditions: The thickness of the actuator 242 is about 1 〇〇 to 500 / zm, preferably 150 + 500 m to 250 / zm, and the Young's modulus is about 100 - 150 GPa. The material may be a single layer of metal or A two-layer structure composed of a metal material and a polymer material. And the thickness of the vibrating film 241 is between 300#^, preferably from 100om to 250/m, and the Young's coefficient is 6〇-3〇〇GPa, and the material thereof can be composed of a single layer of metal, such as stainless steel. The material has a Young's coefficient of 240 Gpa and a thickness of between 200 lm and 250 " m. For example, a copper metal material has a Young's modulus of 100 MPa and a thickness of between 200 // in to 250. m, but not limited to this. The pressure chamber 226 has a depth between 1 〇//m and 3 〇〇#m and a diameter between 10 and 30 mm. The material of the valve body seat 21 and the body cover 22 can be made of a thermoplastic plastic material and the overall thickness of the valve body cover 22 is uniform. The inlet valve structure 231 and the outlet valve structure 232 on the valve body film 23 have a thickness of 1 〇//in to 50/zm, preferably a thickness of 21 to ^4 to 4 m, and a Young's modulus of 2 to 240 Gpa. 'It can be a polymer material or a metal material. The valve body film 23 is made of the polymer material and has a modulus of elasticity of 2 to 2 Å Gpa, such as polyimide (Pi), and its modulus of elasticity is i 〇 Gpa, valve The bulk film 23 may also be made of a metal material such as aluminum, aluminum alloy, nickel, nickel alloy, copper, copper alloy or stainless steel, and has a Young's modulus of 2 to 240 GPa 〇 and an inlet included in the valve body film 23. The number of extensions 2311, 2321 of the valve structure 231 and the outlet valve structure 232 must be greater than 2, the width may be between 10 and 500 //m, and the shape may be a linear type or a tangent type as shown in the eighth diagrams a to E. The state of the internal control/outer diameter can be: 2mm/3mm, 2. 2mm/3, and the range of the concentric circle of the position of the extensions 2311, 2321. 5mm, 3mm/5mm, 4mm/6mm, 4mm/7mm or 4mm/8mm, but not limited to this. As for the inlet valve piece 2313 and the outlet valve piece 2323, the diameter may range from 2 to 4 mm. The pre-action structure of the valve body film 23 is a seal ring. By the combination of the above-mentioned actuator 242, the diaphragm 241, the pressure chamber 226 and the valve body film 23, the inlet valve structure 231 and the outlet valve structure 232 of the valve body film 23 can be driven to open and close, and the fluid is driven. One-way flow is performed, and the fluid flowing through the pressure chamber 226 can reach a flow output of 1 to 60 ml per minute, and the suction force for drawing the fluid into the fluid delivery device can be less than 2 kPa, and the fluid is supplied by the fluid delivery device. The internal pressure can be less than 50 kPa. In some embodiments, in order to achieve a high flow rate fluid delivery requirement of greater than 60 ml/min in response to flow rates, an operating frequency greater than 30 Hz can be applied to actuator 242 22 1337943 of actuator 24 in conjunction with the following conditions: The thickness of the actuator 242 is about 100//m to 500 //m. The thickness is preferably 150 // m to 250 // m, and the Young's coefficient is about 100-150 Gpa. The material can be a single layer of metal. Or a two-layer structure composed of a metal material and a polymer material. And the thickness of the vibration film 241 is between 100 μm and 300 // m,

Preferably, the thickness is from 100//m to 250/zm, and the Young's modulus is 60-300 GPa. The material may be composed of a single layer of metal. For example, the material is not recorded, and the Young's coefficient is 240 GPa, and the thickness is between 200 // m to 250 /Z m, such as copper metal, with a Young's modulus of lOOGpa and a thickness of 200ym to 250 // m, but not limited to this. The pressure chamber 226 has a depth between 10//m and 300 am and a diameter between 10 and 30 mm. The material of the valve body seat 21 and the valve body cover 22 can be made of a thermoplastic plastic material, and the overall thickness of the valve body cover 22 is uniform.

The inlet valve structure 231 and the outlet valve structure 232 on the valve body film 23 have a thickness of 10/m to 50/m, preferably a thickness of 21; tzin to 40/m, and a Young's modulus of 2 to 240 GPa. For the polymer material or the metal material, the valve body film 23 is made of the polymer material, and has an elastic modulus of 2 to 20 GPa, for example, polyimide (PI), and its modulus of elasticity is 10 GPa, and the valve body film 23 can also be used. A metal material such as aluminum, aluminum alloy, nickel, nickel alloy, copper, copper alloy or stainless steel is used, and the Young's modulus is 2 to 240 GPa and the inlet valve structure 231 and the valve body film 23 are included. 23 1337943 'The number of extensions 2311, 2321 of the port valve structure 232 must be greater than 2; the width may be between 10 and 500 Am, and the shape may be a straight type, a tangent type as shown in the eighth figure A to E or The sigmoidal shape, but not limited to this, and the diameter of the two concentric circles of the position of the extensions 2311, 2321, the inner diameter / outer diameter of the circumference can be 2mm / 3mm, 2. 2mm / 3. 5mm, 3mm/5mm, 4mm/6mm, 4mm/7mm or 4mm/8mm, but not limited to this. As a result, the inlet valve piece 2313 and the outlet valve piece 2323 may have a diameter ranging from 2 φ to 4 mnM. The pre-action structure of the valve body film 23 is a seal ring. By the combination of the above-mentioned actuator 242, the diaphragm 241, the pressure chamber 226 and the valve body film 23, the inlet valve structure 231 and the outlet valve structure 232 of the valve body film 23 can be driven to open and close, and the fluid is driven. Performing a one-way flow' and allowing the fluid flowing through the pressure chamber 226 to reach a high flow output of more than 60 ml per minute, and allowing the suction of the fluid into the fluid delivery device to be greater than 2 kPa, and the fluid from the fluid delivery device The internal pressure can be greater than 3 kPa. In some embodiments, the operating frequency of less than 20 Hz can be applied to the actuator 242 of the actuator 24 in response to the need for a microdroplet flow fluid delivery rate of less than 1 ml/miri, in conjunction with the following conditions: The thickness of the 242 is about 100#m to 500//m. The preferred thickness is 15 〇 to ra to 250 // m, and the Young's modulus is about 100-150 Gpa. The material can be a single layer of metal or A two-layer structure composed of a metal material and a polymer material. And the thickness of the vibrating film 241 is between 10 nm and 200/zm, preferably 20//m to 10 〇//ηι, and the Young's coefficient is 60-300 GPa, and the material of the 24 1337943 material can be composed of a single layer of metal. For example, stainless steel material, the Young's coefficient is 240GPa, and the thickness is between 30"m to 8〇"m. The second copper metal material has a Young's coefficient of lOOGpa and a thickness of 3〇#m to 8 〇々ηι 'but not limited to this. The pressure chamber 226 has a depth of between 10//111 and 3〇〇//111, a diameter of 3, between the faces, the seat 21 and the valve body cover Body 22

The thermoplastic system may be made of a thermoplastic material, and the overall thickness of the valve body cover 22 is a thickness of the inlet valve structure 231 and the outlet valve structure 232 on the spray film 23 of 1 〇//„1 to 50#1„, The thickness is about 2~240Gpa, and the polymer can be made of polymer material or metal material. The polymer body material is made of 2~2〇Gpa, such as polyimide (PI). ), the elastic modulus is 1〇Gpa, and the valve body film 23 can also be made of a metal material such as aluminum, aluminum alloy, recorded, recorded gold, copper, copper alloy or stainless steel, and the Young's coefficient is 2 ~240Gpa. The number of the extensions 2311 and 2321 of the inlet valve structure 231 and the outlet valve structure 232 included in the valve body film 23 must be greater than 2, the width may be 10 to 500 jt/m, and the shape may be as shown in the eighth diagram a to E. The linear type, the tangential type or the S-shaped type shown, but not limited thereto, and the diameter range of the two concentric circles of the position where the extending portions 2311, 2321 are located, the inner diameter/outer diameter range may be: 2mm/3mm, 2. 2mm/3. 5mm, 3mm/5mm, 4mm/6mm, 4mm/7mm or 4mm/8mm, but not limited to this. The inlet valve piece 2313 and the outlet valve piece 2323 may have a diameter ranging from 2 25 1337943 to 4 mm °. The pre-action structure of the valve body film 23 may be a sealing ring or a semiconductor process such as yellow etching or The coating or electroforming technology directly forms a micro-convex structure formed on the valve body seat 21 and the valve body cover 22.

By the combination of the above-mentioned actuator 242, the diaphragm 241, the pressure chamber 226 and the valve body film 23, the inlet valve structure 231 and the outlet valve structure 232 of the valve body film 23 can be driven to open and close, and the fluid is driven. One-way flow is performed, and the fluid flowing through the pressure chamber 226 can reach a microdroplet flow output of 1 ml per minute, and the suction force for drawing the fluid into the fluid delivery device can be less than 20 kPa, and the fluid is supplied from the inside of the fluid delivery device. The pressure introduced can be less than 30 kPa.

In summary, the fluid transfer device 20 of the present invention can be driven by the actuating device 24, and the valve body film 23 and the integrally formed inlet valve structure 231 can cooperate with the softness disposed in the groove 216 of the valve body seat 21. The seal ring 26 opens the inlet valve structure 231 to deliver fluid to the pressure chamber 226, and the actuator device 24 changes the volume of the pressure chamber 226, thereby causing the outlet valve structure 232 to fit over the valve body cover 22. The soft seal ring 27 in the recess 225 is opened to allow fluid to be delivered outside the pressure chamber 226. Since the pressure chamber 226 can generate fluid suction and thrust at the moment of volume expansion, the valve on the valve body film 23 is engaged. The rapid opening and closing reaction of the structure allows the fluid to reach a general flow rate, a large flow rate or the transmission of micro droplets, and effectively blocks the countercurrent of the fluid. In summary, the fluid conveying device of the present invention is suitable for the micro-pump structure, which is mainly composed of a valve body seat, a valve body film, a valve body cover body, a vibration film and a stack of 26 1337943. The piezoelectric actuation of the actuating device changes the volume of the pressure chamber, thereby opening or closing the inlet/outlet valve structure formed on the same valve body film, with the soft sealing ring and the valve body seat - or the valve body The groove on the cover body and the fluid is transported. Since the flow device of the present invention can transport gas and fluid, not only has excellent flow rate and output pressure, but also self-capture liquid in the initial state, and more High-precision controllability, and because it can transport gas, it can eliminate gas φ bubbles during fluid transport to achieve high-efficiency transmission. In addition, by controlling the frequency of operation imparted to the actuator of the actuator, and in conjunction with the different conditions of other components, the fluid delivery device can be delivered to a typical flow rate, large flow rate, or microdroplet in response to demand. Therefore, the fluid delivery device of this case is of great industrial value and is submitted in accordance with the law. This case has been modified by people who are familiar with the technology, but it is not intended to be protected by the scope of the patent application. 27 1337943 [Simple description of the diagram] Figure A: This is a schematic diagram of the structure of the conventional micro-pull structure when it is not actuated. The first figure B is a schematic diagram of the structure of the first figure A when it is actuated. Second picture: It is a top view of the micro-push structure shown in the first figure A. Fig. 3 is a schematic view showing the structure of the fluid transporting device of the first preferred embodiment of the present invention. φ Fourth figure: It is a schematic view of the side structure of the valve body seat shown in the third figure. Fig. 5A is a schematic view showing the structure of the back surface of the valve body cover shown in the third figure. Figure 5B is a schematic cross-sectional view of the fifth Figure A. Figure 6: It is a schematic diagram of the structure of the valve body film shown in the third figure. Figure 7A is a schematic view of the unactuated state of the fluid delivery device of the preferred embodiment of the present invention. Figure 7B is a schematic view showing the state of expansion of the pressure chamber of Figure 7A. Figure 7C is a schematic view showing the compression state of the pressure chamber of Figure 7B. φ Eighth Figures A to E: This is a schematic view of the structure of the valve structure of the preferred embodiment of the present invention. Substrate: 11 Interlayer film: 12 Transmission block: 14 Outlet channel: 16 Outlet diffuser: 18 [Main component symbol description] Micro-pull structure: 10 Compression chamber: 111 Inlet channel: 13 Microactuator: 15 Inlet expansion Flow device: 17 28 1337943

Flow direction. X, Y Fluid delivery: 20 Body seat: 21 Body film: 23 Cover: 25 Actuator: 242 Outlet runner: 192, 212 Upper surface: 210, 220 Lower surface: 228 Inlet valve passage : 221 Groove: 216, 217, 218, Pressure chamber: 226 Inlet valve structure: 231 Inlet valve: 2313 Wide door structure: 81, 82, 83 84 Direction: a, b Fluid seat: 201 Body cover : 22 Actuating device: 24 Vibrating membrane: 241 Inlet runner: 191, 211 Opening: 213, 214 Outlet chamber: 215 Inlet chamber: 223 Outlet valve channel: 222 224, 225, 227, 229 Sealing ring: 26, 27, 28 Exit valve structure: 232 Exit valve: 2323, hole: 2312, 2322 Broad film: 81 Bu 82 Bu 83 Bu 84 Bu 851 Hole: 812, 822, 832, 842, 852 Extension: 231 Bu 232 813, 823, 833, 843, 853 Toothed structure: 8411, 8511 29

Claims (1)

1337943, 10, the scope of application for patents: * 1. A fluid delivery device for delivering a fluid comprising: a valve body seat having an outlet passage and an inlet passage; 'a valve body cover, The valve body is disposed on the valve body seat; '/ a valve body film having substantially the same thickness and disposed between the valve body seat and the valve body cover body, and having a first valve structure and a first The second valve structure, the first valve structure and the second valve structure respectively have a φ valve piece, a plurality of holes and a plurality of extensions, the plurality of holes are arranged around the periphery of the valve piece, and the plurality of extensions are a valve plate is connected between the plurality of holes; a plurality of temporary storage chambers are disposed between the valve body film and the valve body cover, and between the valve body film and the valve body seat; a film, the periphery of which is fixed to the valve body cover body, and in the unactuated state, the vibration film is separated from the valve body cover body to define a pressure chamber; and an actuator, Vibrating film connection; When the operating frequency is greater than 5 Hz on the actuator of the actuating device, the actuating device will cause the pressure chamber to change in volume, thereby driving the opening and closing of the valve switch structure to flow through the pressure The flow system of the chamber reaches a flow rate of 1 to 60 ml/min. 2. The fluid delivery device of claim 1, wherein the fluid comprises a gas and a liquid. 3. The fluid delivery device of claim 1, wherein the vibrating membrane is a copper metal having an optimum thickness of from 200/zm to 250/m and a Young's modulus of 100 GPa. 4. The fluid delivery device of claim 1, wherein the vibrating membrane is a stainless steel material having an optimum thickness of 20 〇 em to 250 +/- m and a Young's modulus of 240 GPa. 5. The fluid delivery device of claim 1, wherein the number of extensions is greater than two. The fluid delivery device of claim 1, wherein the extension has a width of 1 〇 " m to 500 " m. 7. The fluid delivery device of claim 1, wherein the valve has a diameter ranging from 2 mm to 4 mm. 8. The fluid delivery device of claim 1, wherein the concentric circle diameter ratio of the position of the valve piece is: 2. 2 mm / 3. 5 mm, 3 mm / 5 mm, 4 mm / 6 mm, 4 mm /7mm or 4mm/8mm. 9. The fluid delivery device of claim 1, wherein the suction of the % fluid into the interior of the fluid delivery device is less than 20 kPa. 10. The fluid delivery device of claim 1, wherein the pressure of the fluid from the interior of the fluid delivery device is less than 50 kPa. 11. The fluid delivery device of claim 1, wherein the valve plate is substantially circular in configuration. 12. The fluid delivery device of claim 1, wherein the 'the valve piece comprises a toothed structure. 13. The fluid delivery device of claim 1, wherein the extension is substantially tangential. 31 1337943 'The actuator thickness is 100 "m to 500//m. 24. The fluid delivery device of claim 1, wherein the actuator has an optimum thickness of 150; / m to 250 " m. The fluid delivery device of claim 1, wherein the actuator has a Young's modulus of 100 to 150 GPa. The fluid delivery device of claim 1, wherein the vibrating film is a single-layer metal structure or a two-layer structure in which a metal material and a polymer material are bonded together. 27. The fluid delivery device of claim 1, wherein the thickness of the vibrating membrane is l〇〇#m to 300" m. 28. The fluid delivery device of claim 1, wherein the vibrating membrane has an optimum thickness of from 1 〇〇//m to 250" m. 29. The fluid delivery device of claim 1, wherein the pressure chamber has a depth of from 10/m to 300/m and a diameter of from 10 mm to 30 mm. The fluid delivery device of claim 1, wherein the valve body seat and the valve body cover are made of a thermoplastic material. 31. A fluid delivery device for delivering a fluid, comprising: a valve body seat having an outlet passage and an inlet passage; a valve body cover disposed on the valve body seat; a valve body film having substantially the same thickness and disposed between the valve body and the valve body cover, and having a first valve structure and a second valve structure, the first valve structure and the The second valve structure has a valve piece, a plurality of holes and a plurality of extensions, and the plurality of holes 33 333373 are disposed around the periphery of the valve piece, and the plurality of extensions are connected to the valve piece and disposed in the plurality of holes a plurality of temporary storage chambers disposed between the valve body film and the valve body cover body, and between the valve body film and the valve body seat; a vibrating membrane, the periphery of which is fixed to the valve The body cover body is separated from the valve body cover body in an unactuated state to define a pressure chamber having a depth of 10 to 300 / / m and a diameter of l 〇 mm Up to 30mm; and an actuator, which is associated with a moving film connection; wherein, when the operating frequency is greater than 5 Hz on the actuator of the actuating device, the actuating device will cause the pressure chamber to change in volume, thereby driving the opening and closing of the valve switch structure, The flow system flowing through the pressure chamber is conveyed at a flow rate of 1 to 60 ml/min. 32. A fluid delivery device for delivering a fluid, comprising: a valve body seat having an outlet passage and an inlet passage; a valve body cover disposed on the valve body seat; a valve body film having substantially the same thickness and disposed between the valve body seat and the valve body cover body, and having a first valve structure and a second valve structure, the first valve structure and the first valve structure The two valve structures respectively have a valve piece, a plurality of holes and a plurality of extensions, the plurality of holes are arranged around the periphery of the valve piece, and the plurality of extensions are connected to the valve piece and disposed between the plurality of holes; a plurality of temporary storage chambers disposed between the valve body film and the valve body cover, and between the valve body film and the valve body seat; 34 1337943 a vibrating membrane, the periphery of which is fixed to the valve body a cover body, in an unactuated state, the vibrating membrane is separated from the valve body cover to define a pressure chamber, the suction force of the fluid being sucked into the pressure chamber is less than 20 kPa, and the fluid is pressurized by the pressure chamber Internally introduced pressure Is less than 50 kPa; and an actuator connected to the vibrating membrane; a plurality of sealing rings respectively disposed in the groove of the valve body seat and the valve body cover, and the sealing ring portion protrudes from The recess is configured to apply a pre-force to the valve body film; wherein when the operating frequency is greater than 5 Hz on the actuator of the actuating device, the actuating device will cause the pressure chamber to change in volume, The opening and closing action of the valve switch structure is further driven to enable the flow system flowing through the pressure chamber to achieve a flow rate of 1 to 60 ml/min. 35