TW200936921A - Air-operated valve diagnostic method and air-operated valve diagnostic device - Google Patents

Abstract

To confirm an operation state of an air-operated valve arranged in a manufacturing device. This air-operated valve diagnostic method is provided for confirming the operation state of the air-operated valve 10 arranged in the manufacturing device, and comprises a first process of storing its pressure change by measuring pressure of fluid sucked-exhausted from an exhaust port 8 of the air-operated valve 10 when supplying or exhausting the operation fluid to or from an operation port 7 of the air-operated valve 10 by arranging the air-operated valve in the manufacturing device, a second process of storing its pressure change by measuring pressure of the fluid sucked-exhausted from the exhaust port 8 of the air-operated valve 10 when supplying the operation fluid to the operation port 7 of the air-operated valve 10 after repetitive operation of the air-operated valve 10, and a third process of confirming a change in the operation state of the air-operated valve 10 by comparing the pressure change measured by the first process with the pressure change measured by the second process.

Description

200936921 IX. Description of the Invention: [Technical Field] The present invention relates to a diagnostic device for a pneumatically actuated valve in an operating state of a pneumatically actuated valve. In order to confirm the diagnostic method and gas that is placed in the manufacturing device, the valve is operated. [Prior Art] When the liquid valve is malfunctioning in the production line, the liquid valve must be stopped. In order to prevent the damage caused by the replacement of liquid helium, parts must be replaced regularly. (4) 阙, because you do not like metal parts, in many cases where there is no right μ # valve, the use of the exhaust port, etc. 'in the valve body of the county a", (four) to drive the two gas to the valve body External valve body. In the patent specification #, the drive air is discharged to the closed state... The valve body that is discharged to the outside of the valve body by the valve body is rolled, and the pneumatic valve is used to explain. ❾ 'Life diagnosis in the maintenance of the liquid valve, there is a tendency to go to the liquid. The difference in p leakage is determined by the detection department to check whether the liquid leaks. In the special offer and special offer 2, remember A liquid valve for detecting a leaking portion of the chemical liquid is provided. Here, a flow regulating valve which is very close to the patent document 1 of the present invention is disclosed in the body 22 of the flow regulating valve 20 . At the j-hole 44 of the side surface, a detecting and absorbing head 46 to which a detecting portion (pressure detector) is connected is screwed. The passage 52 penetrating in the axial direction of the detecting head 46 is formed through the connecting portion. a communication path on the side of the body 24 and formed on

2097-10151-PF 200936921 The third port of the body 24 is connected to the inside of the valve body 22. That is, the fluid is transmitted through the third port 51 to the communication path 5, and the check valve 48 is displaced toward the debtor plug 46. Further, the flow system inside the passage 52 is pressed toward the lock nut 42 side by the displacement of the check valve. At this time, the pressure detecting device detects the pressure change waveform generated by the fluid flow. Thereby, it is possible to confirm the intrusion of fluid through the passage. [Patent Document 1] Japanese Laid-Open Patent Publication No. 2004-176828 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2004-01 9792 (A problem to be solved by the Invention) However, in the invention described in Patent Document 1, only It is difficult to know that it is limited to the detection of the liquid medicine from the diaphragm U, and the fault or fault condition (the wear caused by the opening and closing action of the medium, the 0-ring expansion caused by the gas permeating the liquid) . In fact, when grasping the fault condition of the valve body, it is necessary to remove the valve body from the manufacturing device and investigate it. Therefore, there is a problem that the replacement time is not known, and the valve body is excessively replaced to cause an increase in cost 'or' until the failure has not been replaced. Because of the above problems, it is desirable to have a method of diagnosing the residual life of the malfunction as a function of the operation of the pneumatic valve as the liquid valve in the life diagnosis of the liquid valve. The present invention has been made in order to solve the above problems, and an object thereof is to provide a motion diagnosis in maintenance of a pneumatic actuator. [Means for solving problems]

2097-10151-PF 6 200936921 In order to achieve the above object, a diagnostic method for a pneumatic actuating valve and a diagnostic device for a pneumatic actuating valve for confirming an operating state of a pneumatically actuated valve of a manufacturing apparatus according to the present invention have the following Composition. (1) A method for diagnosing a pneumatic actuating valve for confirming an operating state of a pneumatically actuated valve disposed in a manufacturing apparatus, characterized in that: in the first step, when the pneumatic actuating valve is provided in the manufacturing device, When the operating fluid is supplied to the operation port of the pneumatic actuating valve, or when the operating fluid is discharged, the fluid pressure that is sucked and discharged from the exhaust port of the pneumatic actuating valve is applied.

: "Recognize its pressure change; 帛 2 process, when the operating pressure is supplied to the operation port of the pneumatic actuating valve after repeating the operation of the pneumatic actuating valve, or when the operating fluid is discharged, the pneumatic actuating valve The pressure of the fluid discharged from the exhaust port is measured, and the pressure change is memorized. In the third step, the pressure change measured in the first step is compared with the pressure change measured in the second step, and the air pressure is compared. Confirm the change in the operating state of the actuated valve. Here, the pressure change waveform may be used, and a value such as a peak value and a pressure change rate may be used. (2) A method for diagnosing a pneumatic actuating valve according to (1), wherein the month of the pneumatic actuating valve is wide, and the pressure is changed, and the change in the operating state of the pneumatic actuating valve is used to determine whether A diagnosing device for replacing the air pressure () air pressure actuating valve for monitoring the operating state of the pneumatic actuating valve disposed in the system, and confirming the change in the operating state of the pneumatic actuating valve, characterized in that: Control mechanism, 2〇97-i〇i5i-pp 200936921 Supplying the operating fluid to the front, "Operating port"; opening and closing mechanism, feeding the gripper to the aforementioned pneumatic mechanism, Jiang Baizhen. +, * Or sputum ; ; ; ; ; 测定 测定 ; 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 氧 氧 氧 氧 氧 氧 氧 氧 氧 氧 氧 氧 氧 氧 氧 氧 氧 氧 氧 氧 氧 氧The sensation is as follows: If the pressure actuating valve is set after the above-mentioned manufacturing, the force change: the first pressure change is compared with the dynamic change of the movable bamboo to confirm the change of the gas-operating state. i Start the valve in the second: species: the diagnostic device installed in the pneumatic actuator of (3), 1 just before the air pressure actuated valve system, compare /, the change of the air pressure to read the action state, come = by the action valve.疋 No replacement, the air pressure (5) - is described in (3) or (in the case, the aforementioned memory mechanism, can distinguish: =? = the pressure of the valve, the measured pressure will be changed = The communication mechanism. 乂 己 己 且 且 且 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明阙The diagnosis valve is installed in the manufacturing plant, so that after the liquid is filled into the pipe, when the % fluid is sent into the pneumatic actuating valve, the pressure is adjusted to "n° 4" by the pressure reducing valve. The operating fluid is judged by the dragon, for example, MPa 6 MPa. The pressure of the sleeve is before the inlet of the operating port, and the solenoid valve V is closed.

2097-10151-PF 8 200936921 The operating fluid is delivered to the operating port at a predetermined timing. The operating fluid that enters from the operation , enters the human operating chamber and causes the air pressure to actuate. When the plug rises, the air in the exhaust chamber is compressed, and the pressure of the air discharged from the exhaust port through the exhaust port is measured by a jade pressure picker. The pressure change waveform to be measured is stored in the memory in the control unit as a (four) J pressure change waveform. That is, the first force change waveform is a pressure change waveform measured after the pneumatic actuating valve is attached to the manufacturing apparatus. Then, when the pneumatic actuating valve is repeatedly used, for example, when maintenance is performed for several consecutive uses, the operating fluid is sent to the operating port of the human-operated valve. When the s operating fluid is delivered, the pressure is adjusted by the pressure reducing valve to Q 6 MPa of the same pressure at the time of measuring the second pressure change waveform. The adjusted operating fluid is stopped by a solenoid valve before entering the operating port. The solenoid valve delivers the operating fluid in both order. The operating fluid that enters from operation d enters the operating chamber and causes the piston in the pneumatic actuating valve to slam. By the rise of the piston, the air in the exhaust chamber is compressed and discharged through the exhaust port. The pressure of the air discharged from the exhaust port is measured by a second pressure detector. The loaded Lily change waveform is regarded as the 帛2 pressure change waveform and is stored in the memory in the control unit. The air pressure actuating valve is installed in the manufacturing device, and the pressure change waveform stored in the memory is measured after the chemical liquid is filled in the pipe, and is measured in the memory when the pneumatic actuating valve is repeatedly used. The second pressure change waveform is compared with the CPU to confirm whether there is no abnormality in the pneumatic actuated valve. Moreover, when there is an abnormality, the air pressure is actuated to be replaced.

2097-10151-PF 9

200936921 * If 'the i-a force change waveform is compared with the 2/1 force change wave', it is regarded as a measurement error when it has a difference of about 5%. When the difference is 10% or more and 20% or less, it is used as a warning. When the difference is more than %, it is regarded as an abnormal state. It can be judged whether there is an abnormality and the pneumatic actuating valve can be replaced before the malfunction. Because of A, it is possible to eliminate the situation in which the pneumatic actuating valve is replaced when the replacement time is not reached, and the frequency of replacement of the pneumatic actuating valve is reduced, so that the cost of the pneumatic actuating valve can be reduced. For example, when the valve opening speed in the initial state is different from the valve opening degree at the current time point by #10% or more, it can be judged that the activity I 13 "4 turbulence: has been lowered. In this case, there is a possibility that the spring is corroded, the piston rod is bitten, or the rubber 0-ring is inflated, so the pneumatic actuating valve needs to be replaced. In addition, the rate of change of the maximum exhaust port pressure and the exhaust port pressure in the initial state is compared with the change rate of the maximum exhaust port pressure and the exhaust port pressure at the current time point, and when there is a difference of 1% or more, An empty leak has occurred inside the actuator unit. In this case, it is presumed that the 〇-ring has generated wear. Therefore, the pneumatic actuating valve needs to be replaced. In addition, the maximum vent pressure and valve opening speed in the initial state are compared with the maximum vent pressure and valve opening speed at the current time. When there is a difference of 丨0% or more, it can be judged that the piston is malfunctioning and the valve cannot be Fully open, or 'have a bite. In this case, it is presumed that the 0-ring is inflated, the grease is used up, or the spring is corroded, so the pneumatic actuating valve needs to be replaced. In this way, 'the faulty pneumatic actuating valve is found and replaced during maintenance. Therefore, it can be replaced before the air pressure is actuated and the valve fails. 2097-1O151-PF 10 200936921 Again, the pneumatic actuating valve does not need to be replaced. Replace and continue to use. By stopping this, it is possible to prevent the manufacturing device from stopping or the production line due to the malfunction of the pneumatic actuating valve by grasping the premise of the operation of the pneumatic actuating valve—±丄 when the pneumatic actuating valve is diagnosed, when the input port is removed When the output port is used, all the piping in the production line must be cleaned, and the time and cost of poetry washing will be many. Here, when the present invention is used, it is not necessary to remove the input port and the output port of the pneumatic actuator body from the manufacturing apparatus, and it is possible to measure only by returning the operating fluid tube, so that it can be measured without complicated procedures, and There is no need to clean the inside of the piping, so it can reduce costs. Regarding the action and effect of the present invention, although the case where the operating fluid is supplied to the operation port has been described, the same action and effect can be obtained by discharging the operating fluid from the operation port. [Embodiment] (First Embodiment) Next, a diagnosis method of a pneumatically actuated valve provided in a manufacturing apparatus of the present invention and a diagnostic accumulation of a pneumatic actuating valve will be described with reference to the drawings. Fig. 1 is a block diagram showing the construction of a pneumatic actuator diagnostic apparatus. Fig. 2 is a cross-sectional view showing the structure of a pneumatic actuator valve to be diagnosed. Fig. 3 is a block diagram showing the control unit of the pneumatic actuated valve diagnostic device. Fig. 4 is a view showing the appearance of the fixed device 40 using the air pressure actuating break test at the air pressure actuating valve diagnosis 2097-10151-PF 11 200936921. The configuration of the diagnostic method of the pneumatic actuation valve and the pneumatic actuation valve of the pneumatic actuator according to the manufacturing apparatus will be described with reference to Fig. 1. The control unit 1 is connected to the i-th pressure detector 2, the second pressure detector 3, the electromagnetic valve 5, and the AC outlet 9. Power is available from the AC outlet 9. The control unit 1 controls the first pressure detector 2, the second pressure detector 3, and the solenoid valve 5. The control method can be explained by the block diagram of Fig. 3 below. The pressure reducing valve 6 is connected to the solenoid valve $ © through the operation port side air pipe i 1B. The operation port side air pipe 丄u system extending from the solenoid valve 5 can be connected to the operation port 7 of the air pressure actuating valve 1 。. The internal structure of the pneumatic actuating valve is illustrated by the cross-sectional view of the pneumatic actuating valve 1 in Fig. 2. Pneumatic actuation valve 1 排气 Exhaust port 8 is connected to the 压力 pressure detector 2 through the exhaust port side air pipe i 2 . The second pressure detector 3 is connected in the middle of the operation port side air piping ua that connects the electromagnetic valve 5 and the operation port 7. The DC power source 4 is connected to the first pressure detector 2, the second pressure detector 3, the solenoid valve 5, and the AC outlet 9. ❿ and Fig. 2 are sectional views showing the pneumatic actuating valve 1 作为 as a diagnosis target. The pneumatic actuating valve 10' is composed of an actuator portion 23 and a body 24. An input port I? and an output port a are formed in the body 24. An operation port 7 and an exhaust port 8 are formed in the actuator portion 23. The left end of the operation port 7 is in communication with the operation room 22. Further, the left end portion of the exhaust port 8 communicates with the exhaust chamber 21. Inside the actuator portion 23, the piston 13 having a substantially cylindrical shape is slidably held in the vertical direction. By the piston 13 is divided

2097-10151-PF 12 200936921 and exhaust to 21. In the largest outer peripheral part of the piston 〖3, 2 〇. A second type is attached to a central portion of the lower portion of the piston 13. Fig. 3 is a block diagram showing the control unit 1. (4) t control Γ 1 contains discussion, job 32 and memory 33. The control unit 1 is connected to a first anti-throttle magnetic device 2, a second pressure extractor 3, a solenoid valve 5, and an AC outlet 9.

The sheet 糸 indicates a front view of the pneumatic actuation valve diagnostic measuring device 4 。. s In the upper portion of the pneumatic valve actuation diagnosis device 4G, the lower portion of the liquid helium surface 41 has a numeric key 42. At the upper end of the 4G of the diagnostic test device, there is a connection to the first! The connection terminal 43 of the pressure cooker 2 and the connection terminal connected to the second pressure detector 3 are provided. The identification number 45 of the pneumatic actuating valve and the expiration time 46 are displayed in the upper left portion of the liquid crystal screen 41. The pressure waveform data 47 is displayed in the lower right portion. Next, a description will be given of a description of the air pressure operation for arranging the arrangement in the manufacturing apparatus to be partitioned into the operation chamber 2 2 and the 10th type ring 25 is attached. The diagnosis method of the pneumatic actuating valve in the operating state of the valve and the function of the diagnostic device of the pneumatic actuating valve. The life diagnosis is carried out with a pneumatic actuation valve diagnostic device, mainly for the operation of the person in charge of the production line during maintenance. At the beginning, the measurement of the pressure on the exhaust port side was carried out after the manufacturing apparatus was assembled in the factory. In the state in which the chemical liquid is filled in the pipe after assembly, the opening and closing speed of the valve body is slowed, so it is necessary to measure it after assembly. The operation port side air pipe 11A and the exhaust port side air pipe 12 are attached to the operation port 7 and the exhaust port 8 of the actuator unit 23. At this time, the wheel inlet I? 2097-10151-PF 13 200936921 and the output port 18 can be circulated with liquid medicine from 18, Λ J at the input port 17 and the output port stop production line, at the unloading port 2 and the outlet port (4) It must be stopped, there will be problems because the degree of cleanliness will be lowered because of the smell in the official, and it will take time and cost to clean again. The body 24 is incorporated in accordance with the present invention. The pneumatic actuator is not removed by the manufacturing apparatus and the cost of cleaning is not required. ❹ ❹ After measuring the pressure of the pneumatic actuator 10 to actuate the body 24, the change of the production line =, 'In the women's clothing received the fourth figure gas repeatedly actuated valve diagnostic test;,: 吏: = connect..., installed in the connection _ moving valve == operating port side air pipe 11 Α; connecting terminal 43 of the operating port 7 is installed in the connection of the exhaust port force sensor 2 connected to the exhaust gas π 8 and allowing the operating fluid to flow to the operation == tube 12. When the fluid is operated, the operating fluid will flow to the gas repeatedly: piping... When the fluid is flowing, the valve 10 is viewed. The flow of the second pressure detector 3, one of which is not shown to make it a predetermined force (for example, "liver:): valve 6 often, when the operation port side force is not a fixed center _ The KONE change waveform and the second pressure change waveform are also compared with the first repeated side of the force. The force is a predetermined pressure, and the force is the difference: the operation is constant. System, maneuvering to achieve the pressure to reach the predetermined pressure, the liquid crystal picture 41 in the air pressure is displayed as a curve, 9 the measuring device 40 is used to operate the fluid.

2097-1015J-PF 14 200936921 The identification number 45 of the valve ίο and the date and time 46 are displayed on the LCD screen 41. After the operating fluid is passed through the pressure reducing valve 6 to reach a predetermined pressure, the operating fluid in the operation port side air pipe 11 is exhausted. Further, again, the operating fluid of a predetermined pressure is caused to flow to the operation port side air pipe u. The operating fluid is sent to the operation port side 7 through the solenoid valve 5 through the operation port side air pipe 11A. Electromagnetic (5) 5, the operating fluid is supplied to the operating port at a predetermined timing. 7 ° ❹ In order to supply the operating fluid, the measuring switch 48 of the pneumatic actuating valve diagnostic measuring device 40 of Fig. 4 is (10). When it is 0N, the solenoid valve 5 is opened at a predetermined timing. The operation flow system is supplied to the operation port 7 through the operation port side line pipe nA. The operating flow system entering from the operating port enters the operating flow system that is operated to 22 and pushes the piston j 3 upward. When pushed up, the air in the exhaust chamber 21 will be shrunk. The air compressed in the exhaust chamber 21 is forced out from the exhaust port 8. The pressure extractor 2' measures the pressure from the discharge port side of the &# gas from the exhaust port 8 through the exhaust port side air pipe 12, and stores the pressure change waveform data in the memory 33. . Will be the first pressure detector? B n m gas pressure is used as the second pressure change wave: the air measured by the second pressure detector 3 is stored in the control unit i and the f 1 force change waveform, the curve shown in Fig. 5 . Memory; 3: Department II. Specifically, it becomes the first first migration force change waveform. Because: "Memory all air pressure between 10

Poor, number! ·The pressure change waveform is also there; the action of each system has the parameter 2097-10151-PF 15 200936921 Next, the description will be performed after the manufacturing device is installed, for example, after tens of thousands of operations, the air pressure actuating valve 10 is measured. The case of the second pressure change waveform. The operation port 7 and the exhaust port 8 are removed from the manufacturing apparatus, and the air port 11 and the exhaust port side air pipe 12 are attached to the operation port side. At this time, the input port 17 and the output port 18 may not be removed from the manufacturing apparatus. When the input port 17 and the output port 18 are filled with the chemical liquid, when the wheel inlet 1 and the output port (4) are removed, the production line must be stopped 10. When the pipe is unloaded, the pipe will be contaminated and the degree of cleaning will be lowered. Because of the time of washing again, it is a matter of time and cost. Here, as described in the present invention, when the input port 17 and the output port of the body 24 of the air pressure actuating valve 10 are removed from the apparatus, the 6k can be measured and the 疋% can be measured without difficulty. Measure 'and' because it does not need to be cleaned, so it can reduce costs. In order to measure the second pressure change waveform of the air pressure actuating valve 1 (), after the pressure: the moving valve H) of the main body 24, the maintenance line of the production line is responsible for the connection terminal 44 of the transport valve of the pneumatic actuating valve diagnostic measuring device of Fig. 4, installed in Connected to the pneumatic actuating valve 1n force detector 3 medium slave, seven & actuating valve 1 〇 operating port 7 operating port side air pipe 11A; making connection to the i th pressure detector 2 terminal 34, installed in the connection The exhaust port 8 is connected to the reed port side and is also provided with the operating fluid flowing to the operating port side. The operating fluid is adjusted to the pressure reducing valve 6 -s. Flow 0 birds). Usually, when it is not the predetermined pressure H and the U force (for example, if the pressure change waveform and the second pressure change waveform are to be compared with each other, the force is determined to be a predetermined pressure, and the difference is determined by the method. In this case, the I force is determined by measuring the 3 m force variation waveform of the first force.

2097^]〇15]-PF 16 200936921 The memory of the control unit 1 is stored in the memory of the control unit 1 in advance, and the error within 5% of the predetermined pressure stored in the measurement of the first pressure change waveform is taken as Wai. Since the predetermined pressure of the first pressure change waveform also has an error, when the first pressure change waveform is completely based on 〇 6 MPa, the error is increased when the predetermined pressure at the time of measuring the second pressure change waveform is taken into consideration. Whether or not the predetermined pressure is reached is displayed on the liquid crystal screen 41 at the beginning of the pneumatic actuation valve diagnostic measuring device. Further, the identification number 45 and the date and time 46 of the air pressure actuating valve 10 through which the operating fluid is circulated are displayed on the liquid crystal face 41. In the present embodiment, although the predetermined pressure is regarded as 0.6 MPa, the predetermined force can be set at any f 〇 5 〇 or 〇 . 4 MPa in accordance with the force of the supply operating fluid in the factory. Although the decompression 阙 6' system can be reduced, it is 'the pressure cannot be increased. As shown in Fig. 5, the pressure on the operation port side continues until the pressure is constant.操作 胄 胄 ( (4) 6 The operating fluid of a predetermined pressure is sent to the operation port side 7 through the electromagnetic vent 5 and then through the operation port side air pipe 11A. The solenoid valve 5' is supplied with the operating fluid to the operating port 7 to supply the operating fluid. The air pressure actuating valve diagnostic measuring device 4 of Fig. 4 determines that the switch 48 is at the predetermined timing (10). When it becomes (10), the solenoid valve is opened, and the operating flow system is supplied to the operation π through the operation port side air pipe iu. The operation flow system from the operation α 7 enters the operation flow system into the operation flow system of operation 22 The piston 13 is pushed up. When living

When pushed upward, the air in the exhaust chamber 21 is compressed. The compressed air in the exhaust chamber 2097-10151-PF 17 200936921 21 is extruded from the exhaust port 8. The V' which is discharged by the first pressure Fukuichi gas pipe 12 is measured from the exhaust port side 8 through the exhaust port side air < the exhaust gas side pressure of the second gas, and the #m士变化 waveform data is recorded /i H Force protection is hidden in memory 33. The first pressure hexa-4 full knife finder 2 and the second pressure finder 3 are used as the second pressure ^ 〇 _ , and the second 燹 燹 波形 waveform. Moreover, the second pressure change waveform,

It is hidden in the memory 33 + in the control unit 1. The memory 33 is a second pressure change waveform of all the pneumatic pressure actuating valves 10. Because the air pressure: has a stagger, the second pressure change waveform also differs. The second pressure change waveform in the exhaust port 8 is compared with the first pressure change waveform by the CPU 31. The pressure waveform of the operation port side pressure and the exhaust port side pressure of the first pressure change waveform is shown in Fig. 5. The change of the pressure on the exhaust port side is to pay attention to the pressure on the side of the exhaust port, so the Η is enlarged to the 7th figure to show the waveform of the pressure change in the exhaust port of the 6th (A) figure, which shows how to compare Pressure waveform data. In the 6th (A) diagram, the 7th axis of the axis represents time. P on the vertical axis indicates the exhaust port pressure. The Pa system represents the maximum pressure and the time in the Ta system Pa. The Tb system has a predetermined time difference from leaving Ta. The pressure at the time of Pb Tb"k represents the pressure change waveform of the exhaust port. Specifically, k = ( Pb-Pa) / ( Tb-Ta). The estimated state can be determined by the change of Pa, Pa/Ta, and k of the second pressure change waveform as compared with the first pressure change waveforms pa, Pa/Ta, and k. The Pa system indicates the maximum pressure of the exhaust port, the Pa/Ta system indicates the valve opening degree, and the k system indicates the change in the pressure at the exhaust port. Since it is judged that a large number of 2097-10151-pf 18 200936921 valve bodies "data" the first pressure change waveform and the second pressure change waveform, it is easier to compare, and therefore it takes less time. Moreover, this data can be used to determine an abnormality or a warning, and as a result, the diagnosis can be performed more easily and smoothly. For example, 'the data of the i-th pressure change waveform and the second pressure change waveform are compared, and the difference of about 5% is taken as the measurement error. Used as a warning when the difference is greater than 10% and less than 20%. When the difference is greater than 2〇%, it is treated as an abnormal state. Moreover, when the difference is more than 5% and less than 10%, although it is still usable, it is necessary to pay attention and pay attention next time, or perform an additional check before the next maintenance. In the sixth (B) diagram, pa is the maximum pressure at the exhaust port. When the difference between the Pa of the second pressure change waveform and the i-th pressure change waveform is 1% or more, it is estimated that the piston 13 is malfunctioning or the actuator portion is leaking. In the sixth (B) diagram, the pa/Ta system indicates the valve opening speed. The current time point Pa/Ta of the change pressure is estimated to be lower than the difference of Pa/Ta of the first pressure change waveform by more than 10%. In the sixth (b) diagram, k is the exhaust port pressure change rate. When there is a difference between k of the second pressure change waveform and k of the first pressure change waveform, it is estimated that there is air leakage in the actuator portion. The types of the second pressure change waveforms are specifically shown in Fig. 8, Fig. 9, Fig. 10, and Fig. 11. When the second pressure change waveform is measured, the pressure on the exhaust port side is expressed as the exhaust port pressure in the initial state of Fig. 7, corresponding to the Tal of Ta, and the Tbl of the corresponding Tb 'corresponds to the pa of the Pa' corresponding to the Pb of the pb. , and the first pressure change. 2097-10151-PF 19 200936921 When the difference between the waveforms is less than 5%, as shown in Fig. 2, it can be determined that there is no abnormality in the pneumatic actuator. ^ Next, when measuring the pressure on the exhaust port side, as shown in Fig. 8, when the Pa2/Ta2 corresponding to Pa/Ta and the corresponding initial state Pa/Ta are greater than 10%, such as g 12 As shown, after comparing the pressure change data, it can be judged that the actuation performance of the piston 13 is decreasing. It can be speculated that the following three points have been generated. First, it can be considered that the second 〇 ring 10 25 has expanded and the sliding resistance of the piston 13 has increased because of the permeated liquid. Second, since the spring 14 has been corroded, the action of the spring 14 being compressed is considered to be slow. Third, since the grease has been used up, it is considered that the sliding resistance of the piston 13 has increased. If the above three points are not treated, the pneumatic actuating valve will not be able to perform the established capacity. Therefore, the pneumatic actuating valve must be replaced. Then, when the pressure on the exhaust port side is measured, as shown in Fig. 9, the measurement level is exceeded. Therefore, the portion corresponding to the initial state Pal/Tal is in the ninth ,, and Pa cannot be measured. Therefore, compared with the initial state, there may be a difference of 1% or more. Moreover, since it is impossible to measure Pa, it is impossible to measure 疋k. As shown in Fig. 12, after comparing with the pressure waveform data, the difference between the sum and k may be larger than 丨, so when compared with the initial state, sometimes There will be more than 10% difference. As a result, since the first 〇-shaped ring 2〇 has been worn out, the 〇-shaped ring has no effect of sealing, and therefore, it is considered that air leakage has occurred inside the actuator unit 23. Therefore, the pneumatic actuating valve 10 is replaced. Next, when the pressure on the exhaust port side is measured, as shown in Fig. 1, when the Pa4 corresponding to Pa and the Pal in the initial state of Pa are greater than 10%, the difference is greater than 10%.

2097-10151-PF 20 200936921 is different, and the Pa4/Ta4 system corresponding to Pa/Ta has a difference of more than 1%% from the Pal/Tal corresponding to the initial state Pa/Ta, as shown in Fig. 12, in the control pressure After the waveform data, it can be judged that the actuation performance has been lowered. As shown in Fig. 12, after comparing the pressure waveform data, it can be judged that the valve cannot be completely opened due to malfunction. As a result, the 20th type ring 25 is swollen by the permeated chemical liquid, and it is considered that the piston 13 is prevented from rising smoothly. Also, since the spring 14 has been corroded, it is considered to hinder a smooth rise. Also, since the grease has been used up, it can be considered that it will hinder the smooth rise. Therefore, the air pressure actuating valve 10 must be replaced. Next, when the pressure on the exhaust port side is measured, as shown in Fig. 11, as shown in Fig. 11, when the Pa5 system corresponding to Pa has a difference larger than ίο% from the corresponding initial state Pa, and corresponding to Pa/ When the Pa5/Ta5 system of Ta has a difference of more than 10% from the Pal/Tai corresponding to the initial state Pa/Ta, as shown in Fig. 12, after the pressure waveform data is compared, it can be judged that the actuation performance has been lowered. As shown in Fig. 12, after comparing the pressure waveform data, it can be judged that it cannot be completely opened due to seizure. As a result, since the foreign matter is mixed into the actuator portion 23, a resistance is generated when the piston 13 rises, and it is considered that the piston 13 is prevented from rising smoothly. Further, since the spring 14 has been corroded, a resistance rises in the piston 13 by a large amount, and it is considered that the piston 丨3 is prevented from rising smoothly. Moreover, since the grease has been used up, resistance is generated when the piston i 3 rises, which is considered to hinder the piston 13; Therefore, the pneumatic actuating valve 10 must be replaced. In the first embodiment, it has been described that when the operating fluid is supplied to the pneumatic actuating valve, the change in the air pressure to be discharged is measured.

2097-10151-PF

❹ 200936921 The same diagnosis can be performed by measuring the pressure change of the air to be discharged from the air operated valve row (4). The figure shows a comparison of the pressure waveform data in the exhaust port 8 when the operating fluid is discharged. Figure 13 corresponds to Figure 6. The point at which the valve opening speed is replaced by the closing valve speed Pc/Td differs only. The nth figure shows a schematic diagram of the force waveform when exhausting. The figure corresponds to Figure 12. Although the detailed description is omitted, when the operating fluid is discharged, that is, the (four) (four) gas σ 8 a force waveform, the operation diagnosis of the gas M actuating valve can be performed in the same manner as the supply of the operating fluid. In the above, it is judged whether or not the abnormality can be fully activated in the state in which the money actuating valve 1{) is fully moved, thereby making it possible to change the gas before the accident. Thereby, by grasping the premise that the dust actuating valve is malfunctioning, it is possible to prevent the manufacturing apparatus from being stopped or the production line from being stopped due to the malfunction of the pneumatic actuating valve. In addition, it is possible to eliminate the situation in which the pneumatic actuating valve is replaced when the replacement time is not reached, and the frequency of replacement of the pneumatic actuating valve is reduced, so that the cost of replacing the pneumatic actuating valve can be reduced. In addition, when diagnosing the pneumatic actuating valve, when the input port and the output port are removed, all the pipes in the production line must be cleaned, and the time and cost for washing will be reported. Here, when the present invention is used, it is not necessary to remove the input port and the output port of the gas-mousing valve body from the manufacturing device, and only the operating fluid can be loaded with the pipe body, so that the process can be carried out without complicated procedures. There is no need to clean the inside of the piping, so it can reduce costs. (Second Embodiment) * 2097-10151-PF 22 200936921

❹ The memory disk 33 in the control unit i is previously stored in the identification disk of the air pressure actuating valve ίο and the pressure change waveform measured. And, in response to the request from the person in charge of the maintenance, the data can be recovered by transferring the 4b data to the personal computer. The accumulated data is the expensive data that the manufacturer usually needs to experiment with tens of thousands of times. The data does not require self-testing, and the manufacturer can obtain data in the usual use results of the user of the present invention, so that the cost of implementing the experiment can be reduced. Data can be obtained from all users of the present invention, so that more data can be obtained than self-experiment, which is a very effective organization for collecting data. (1) As described in detail above, when the air pressure actuating valve diagnosis method for confirming the operating state of the air pressure actuating valve 10 of the present embodiment is used, it is an operation for confirming the air pressure actuating valve 10 disposed in the manufacturing apparatus. The state air pressure valve diagnostic method is characterized in that: in the i-th step, when the air pressure actuating valve 1 is placed in the manufacturing device to supply the operating fluid to the operation port 7 of the air pressure actuating valve 10, or when the operating fluid is discharged The fluid pressure from the pneumatic actuating valve 1 〇 exhaust port 8 is measured and the pressure change is memorized; the second step 'when the pneumatic actuating valve is repeatedly operated, the operating fluid is supplied to the pneumatic actuating valve When the operation port 7 of 10 is operated, or when the operation of the 々IL body is performed, the fluid pressure that is sucked and discharged from the air priming valve 1 〇 exhaust port 8 is measured, and the pressure change is memorized; and the third step is The pressure change measured in the first step is compared with the pressure change measured in the second step, and the change in the operating state of the pneumatic actuating valve 1 加以 is confirmed; therefore, by grasping the pneumatic actuating valve 1〇Before the malfunction, it is possible to prevent the manufacturing device from stopping or the production line stop due to the malfunction of the air pressure. 2097-10151-pf 23 200936921 Stop 0 and 'When the pneumatic pressure valve 10 is diagnosed, when the input port and output are removed At the time of the mouth, it is necessary to wash the time, so the time for the cleaning will be reported. Here, when the present invention is used, it is not necessary to remove the input port of the valve body from the manufacturing device = the output port is removed from the manufacturing device, and only the pipe body for the operating fluid can be measured, so that it can be measured without complicated procedures. Moreover, there is no need to clean the inside of the piping, so the cost can be reduced. (2) In the air pressure actuating valve diagnostic method described in (1), the air pressure actuating valve liquid valve determines whether the air pressure actuating valve 10 needs to be replaced by a change in the operating state of the air pressure actuating 10 by comparing the pressure changes, so that ' By grasping the premise that the pneumatic actuating valve 1G is malfunctioning, it is possible to prevent the manufacturing device from being stopped or stopped due to the malfunction of the pneumatic actuating valve. Further, when the air pressure actuating valve 10 is diagnosed, when the input port and the output D are removed, 'there must be washed, so the time for paying the bill' is also a lot of cost for washing. Here, when the original material is produced, the input port and the output port of the (4) U actuating valve body are self-manufactured, but the pipe can only be called back to the operating fluid, so that it can be measured without complicated performance. There is no need to wash the interior' so it can reduce costs. (7) Further, it is used to monitor the air pressure operation of the manufacturing device, and the operation state of the air pressure reading 10 is changed.

Si: has: a pressure control mechanism that supplies the operating fluid to the operating port 7; an opening and closing mechanism that causes the operation to flow to the operation of the gas house actuation valve 1G σ7 or exhaust; the 岐 mechanism, the 2097-10151-PF 24 200936921 vent 8 The fluid pressure of the discharge is added, and the measured value measured by the measuring mechanism, the hidden body gland # M m ^ is recorded, and the confirmation mechanism is set, and the pneumatic actuating valve 1 〇 is set to 锢, 生佑要婶 之 盆 又 又 又 又 又 又 又 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆 盆Therefore, by the slap in the air, the valve is not operative, and the manufacturing device is stopped or the production line is stopped due to the malfunction of the pneumatic actuating valve. In addition, when the valve is diagnosed, the input port and the output port are removed: this takes a very f time, and the cost for cleaning is much higher. And the output ΓίΓInvention, it is not necessary to remove the input port of the gas M valve body. cost. There is no need to clean the pipe: 4) Moreover, in the pneumatic actuator valve diagnostic device described in (3), the pneumatic actuating valve 10 is a liquid valve, and the pressure is changed by the pressure change + ..Ίη ^ ^ Actuate the paper state change to determine whether it is necessary to replace the air pressure actuating valve 10, and the helium gas gripping valve is dead before the actuating valve is actuated, and can be prevented in advance. 3, etc. The manufacturing device is stopped or the production line is stopped. When the pneumatic pressure actuating valve 10 is diagnosed, when the population is removed, it is necessary. The net is very time consuming, and the cost for washing is much higher. When the present invention is used in this case, there is no such thing as a name. (4) "The input port τ of the valve body is pressed from the manufacturing device, and only the pipe body for the operating fluid can be tested." Therefore, it can be measured without complicated procedures. Moreover, there is no need to clean the piping

2097-10151-PF 25 200936921 Internal 'So it can reduce costs. (5) And 'the 'memory mechanism' in the pneumatic actuated valve diagnostic device described in (3) or (4) is capable of distinguishing whether or not the pneumatic actuating valve 10 that has been determined to be replaced is used, and the measured pressure change is applied. Memory, and has a communication mechanism', so it is possible to recover the accumulated data, which can reduce the cost of implementing the experiment. Further, since data can be obtained from all users of the present invention, it is possible to obtain more data than self-experiment, which is a very effective mechanism for collecting data. Further, the present invention is not limited to the above embodiment, and can be applied to various applications. For example, the operating fluid is not limited to air, and nitrogen gas may also be used. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a block diagram showing the configuration of a pneumatic actuator valve diagnostic device. 10 Fig. 2 is a cross-sectional view showing the structure of a pneumatic actuator valve to be diagnosed. Fig. 3 is a block diagram showing a control unit of the pneumatic actuated valve diagnostic device. Fig. 4 is an external view of a pneumatic pressure actuating valve diagnostic measuring device 40 which is diagnosed by a pneumatic actuated valve. Figure 5 shows the operating port pressure and exhaust port pressure. Fig. 6 (A) and (B) are views showing a comparison of pressure waveform data. Fig. 7 is a view showing a ninth pressure change waveform of the pressure on the exhaust port side. .

2097-10151-PF 26 200936921 2 Pressure change waveform (1) 2 Pressure change waveform (2) 2 Pressure change waveform (3) Fig. 8 is a view showing the pressure on the exhaust port side. Fig. 9 is a view showing the first stage of the pressure on the exhaust port side. Fig. 10 is a schematic view showing the pressure on the 4-port side. Ang's demonstration. The figure shows the second pressure change waveform of the pressure on the exhaust port side (4) Fig. 12 is a schematic view showing the comparison of the wave force waveform. Fig. 13 (A) and (B) are views showing a comparison of pressure waveform data in the exhaust port 8 when the operating fluid is discharged. Figure 14 is a diagram showing the exhaust gas when the operating fluid is not discharged. A schematic diagram of the pressure waveform in 8 . [Description of main components] 1 Control unit 2 1st pressure detector 3 2nd pressure detector 5 Solenoid valve 6 Pressure reducing valve 7 Operation port 8 Exhaust port 9 AC socket 1 〇 Pneumatic actuating valve 2〇97-ΐ 〇ΐ5Γ-ρρ 27

Claims (1)

200936921 X. Application for patents: 1. A kind of air pressure to operate and recognize & amp Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ Ψ The operation state of the external enthalpy (the gas should be activated) is characterized in that: the step of providing the pneumatic actuating valve to the manufacturing device to supply the fine fluid to the front f > When the operation port is operated or the operating fluid is discharged, the fluid pressure that is sucked and discharged from the ventilating valve of the nipple is measured, and the pressure change is memorized; the second step 'when the air pressure is repeatedly operated 阙Thereafter, the operation = body is supplied to the operation port of the pneumatic pressure actuating valve, or the operating fluid is discharged, and the fluid pressure sucked from the exhaust port of the pneumatic actuating valve is measured, and the pressure change is memorized; In the third step, the pressure change measured in the above-described step is compared with the pressure change measured in the second step, and the pneumatic actuating valve is operated. To confirm the change of state. Law 2. If you apply for a patent scope! In the diagnosis valve of the pneumatic actuating valve, the pneumatic actuating valve is a liquid valve that compares the pressure change, and determines whether to replace the pneumatic actuating valve by the change of the operating state of the pneumatic actuating valve. 3. A diagnostic device for a pneumatic actuating valve for monitoring a working state of a pneumatic actuating valve disposed in a manufacturing device, and confirming a change in an operating state of the pneumatic actuating valve, characterized by having: 2097-10151-PF 28 200936921 The pressure control mechanism supplies the operating fluid to the operating port of the pneumatic actuating valve; the opening and closing mechanism port or the exhausting gas; and the operation of supplying the operating fluid to the pneumatic actuating valve by the fluid discharged from the exhaust port of the pneumatic actuating valve The mechanical force is measured; the measurement result measured by the above-mentioned measuring mechanism is recorded in the memory mechanism; and the correct-kissing mechanism 'will make the above-mentioned air pressure operation set in the above-mentioned manufacturing and be measured and memorized in the second part of the aforementioned 兮 夏 夏 夏The pressure changes to H, and changes in the state after it is measured. In comparison, the disc is recognized by the above-mentioned air pressure actuating action, and the gas pressure actuating valve described in item 3 of the patent scope is in the middle of the diagnosis, and the gas valve is a liquid valve, and the pressure is changed by the pressure. Actuate the valve to determine whether to replace the air pressure (4) I. Severe shoes, please refer to the diagnosis of the pneumatic actuating valve described in the third or fourth patent range &δ; * * * * * * * * * * * * * * * * * mechanism. Will ~ change its pressure change' and have 2097-1015 l-pp 29