200936922 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種液體自動供給裝置中的閥開閉計數 方法，適合用來判斷被設於液體供給用的配管上的電磁閥 或經由電磁閥而被驅動的空氣驅動閥的檢查或壽命時期。 【先前技術】 例如，在半導體製造、平面顯示器製造設備中，為了 效率良好地進行各種的液處理（利用液體進行處理），而配 設有液體自動供給裝置，用以將液體從液體貯藏部供給至 複數的供給點’亦即各製程的處理部。此液體自動供給裝 置’具備：接續液體貯藏部與各處理部之配管、用以將液 趙貯藏部内的液體移送至配管中之泵或加壓手段、附設於 配管上之開閉閥、以及控制各開閉閥之控制裝置。另外， 開閉閥除了電磁閥以外，如移送對象的液體具有酸、鹼性 的腐钱性時’採用空氣驅動閥與電磁閥的組合，該電磁閥 是用以將閥切換用壓縮氣體供給至該空氣驅動閥。 但疋，以上的液體自動供給裝置中，除了定期保養之 外，係日夜連續運轉，且伴隨處理的複雜化，供給點的個 數增加，一旦發生問題時，必須停止裝置整體來進行修理， 因此想要預先防範問題發生。與閥相關的問題，可舉例如 因漏液容^造成被害擴大。作為對策，可考慮關經年變 化亦即預測檢查、壽命時期，例如若為電磁間，則如專 利文獻1所揭示般地，使用附計數機能的電磁閥，計數電 200936922 磁閥的開閉次數，而猎知兮/ 而付知該當電磁閥的檢查、壽命時期 以便加以對應處理。 [專利文獻1]日本專利公報特許第2599782號 【發明内容】 • [發明所欲解決的問題] 但是，針對目前運轉中的液體自動供給裝置，不要說 ❹是使用t的空氣驅動閥，連電磁閥亦幾乎未具有計數機 能，因而無法判斷或預測檢查、壽命的時期。另外，交換 全部的使用中的空氣驅動闕、電磁閱，從停止運轉的觀點 來看，實際上係不可能。又，亦有於上述控制裝置中，内 裝计數電磁閥的開閉次數的程式者，但若於控制裝置中重 新安裝如此的程式，除了控制裝置的長期停止之外，亦有 對控制裝置本身的運轉造成不良影響的可能性而較不佳。 對此，本發明的目的係針對在運轉中的液體自動供給 e 裝置中所使用的空氣驅動閥、電磁閥，作成不用交換、或 是停止運轉這些的閥，即可計數該電磁閥的開閉次數，例 如利用在預定時間内計數所得的累積開閉次數，可準確地 判斷空氣驅動閥、電磁閥的檢查或壽命時期。 [解決問通所用的技術手段] 為了達成上述目的’申請專利範圍第i項的發明，係 一種液體自動供給裝置中的閥開閉計數方法，被適用於將 液體貯藏部與處理部之間’經由配管以及上述液體貯藏部 側或/及上述處理部侧的空氣驅動閥而接續在一起，且從 4 200936922 藉由控制裝置而被控制的電磁閥，供給壓縮氣體至上述空 氣驅動閥這樣的液體自動供給裝置，其特徵為：具有被配 置成可之後附加在用以接續上述控制裝置與上述電磁閥的 配線上之非接觸型直流電流感測器、以及計數上述直流電 流感測器的檢測信號之計數器，上述計數器計數上述檢測 信號’作為上述電磁閥的累積開閉次數而表示出來。 申請專利範圍第2項的發明’係一種液體自動供給裝 置中的閥開閉計數方法，被適用於將液體貯藏部與處理部 之間’經由配管以及上述液體貯藏部側或/及該處理部侧 的電磁閥而接績在一起，且藉由控制裝置來控制上述電磁 閥這樣的液體自動供給裝置，其特徵為：具有被配置成可 之後附加在用以接續上述控制裝置與上述電磁閥的配線上 之非接觸型直流電流感測器、以及計數上述直流電流感測 器的檢測信號之計數器，上述計數器計數上述檢測信號， 作為上述電磁閥的累積開閉次數而表示出來。 以上的各發明中，直流電流感測器，係被配置成可之 後附加在用以接續控制裝置與電磁閥（的螺線管）的配線 上，例如其構成為：當電流從控制裝置通過配線而流至電 磁閥時’便會檢測出其通電狀態，並將其作成預定的電壓 信號等而加以輸出。計數器可為與直流電流感測器作成一 體型者、亦可為個別構成者。通常具有計數部及表示部， 以計數部計數直流電流感測器的檢測信號，並將對應其計 數的汁數值作為電磁閥的累積開閉次數而表示於表示部。 藉此’各發明，例如其次的中請專利範圍帛3項般地，有 200936922 益於判斷液體自動供給褒置中所使 間的壽命時期等。又，專利文獻〗、驅動間、電磁 的電磁間的情況，係藉由向螺線;:::::::數機能 作，與電磁間的動作同步地進行計數電的反覆動 發明的情況係明顯地與專利文獻"目異，是=:本案各 直流電流感測器的檢測信號與 ：1接觸型 得電磁閥的開閉動作次數㈣统.=相计數器，來獲 為可對既存的計測部，之後::二此系統的辦法’成 之後附加计數閥開閉的方法。 圍第請專利範圍第3項的發明，係如申請專利範 m項所述的液體自動供給裝置令的間開閉計數方 、：、中藉由上述計數器於預定時間内計數所得的上述電 磁閥的累積開閉次數、以及從上述液體自動供給 =算起的總計時間，算出從上述電磁閥或以該電磁間驅 、的上述空氣驅動_始使用算起的推測累積開閉次數， 並利用該推測累積開閉次數，來判斷上述電磁間或/及上 Φ 述空氣驅動閥的檢查、壽命時期。此發明係注目於在此種 的=體自動供給裝置運轉中，該電磁閥與以該電磁閥驅動 的空氣驅動閥的開閉頻率有一定的態樣或週期而完成改 良。 [功效] 申請專利範圍第1項的發明，係具有電磁閥與空氣驅 動閱的組合’適用於處理腐蝕性的液體時的態樣。相對於 此’申請專利範圍第2項的發明係省略空氣驅動閥，適用 於處理清水等的非腐蝕性液體時的態樣。各發明中，即使 200936922 液體自動供給裝置於動作中，只要在用以接續控制裝置與 電磁閥的配線上，之後附加直流電流感測器，當電流經由 配線而從控制裝置向電磁閥流通，便會檢測出其通電狀 態，並經由計數器計數該檢測信號，將其作為電磁閥的累 積開閉次數而表示出來。因此，各發明中，例如，即使運 轉中的液體自動供給裝置未使用附計數機能的電磁閥，利 用電磁閥的累積開閉次數，亦可準確地判斷該電磁闕或是 以該電磁閥驅動的空氣驅動閥的檢查、壽命時期等。 t請專利|&圍第3項的發明，係特定第3圖例示的較 佳的判斷方法，若將計數器於預定時間t内計數所得的電 磁閥的累積開閉次數設為a、從液體自動供給裝置開始使 用算起的總計時間為τ’則例如根據（A==axT/t)的數學 式’算出從電磁閥或以該電磁閥驅動的空氣驅動闕開始使 用算起的推測累積開閉次數A。而且，通常係將：於A加 ，安全或預備次數α而得的危險開閉次數Ai;以及達到製 φ *規格所規定的該電磁閥或以該電磁閥ϋ動的空氣驅動闊 的檢—時期的開閉次數、或是達到壽命時期的開閉次數 X’加以比較，因此’此發明中，可簡單且準確地判斷電磁 閥、空氣驅動閥的檢查時期、壽命時期。 【實施方式】 (第1圖〜第3圖的說明） 第1圖係模式地表示適用本發明的液體自動供給裝 置。該圖的液體自動供认獎番总办 動併、·σ衷置係假定為半導體製造設備 200936922 等，具備：收容液體的藥液槽1;對半導體基板等的工作 件進行液處理之複數的處理槽2;可連通地將藥液槽丨與 各處理槽2接續之配管3 ;分別設於配管3的一部分之藥 液槽1側的空氣驅動閥4與閥切換用的電磁閥5、各處理 槽2側的空氣驅動閥4與閥切換用的電磁閥5;控制液體 自動供給裝置整體（包含各電磁閥5)之控制裝置7;接續各 電磁閥5與控制裝置7之配線6a〜6c;被配置於各配線上 之直流電流感測器8 ;以及接績於各直流電流感測器g上 β 之計數器9。又，符號13係設於配管3的上流側之過濾器。 在此，藥液槽1，收容過氧化氫、硫酸等的液體，其具 有：被配置成貫通槽上蓋且從槽上延伸至下側之插入管 10、以及設於槽上蓋的未圖示的氣體導入部等。藥液槽1 中，氮氣等的壓縮氣體11經由上述氣體導入部而被導入槽 内，於是槽内藉由該壓縮氣體u而持續地被加壓。又，如 此的加壓手段係用以將藥液槽丨内的液體向配管3侧移 送，但是也可以取代此種方式，亦可藉由泵將藥液槽1内 的液體向配管3側移送。 各處理槽2係供給點，雖僅簡便地圖示二個，但實際 上係設置十i四十個如此多數的處理槽。各處理槽係作成 具備汁量手段之各式各樣大小的槽形狀，是分別獨立或連 續地液處理工作件（以液體對工作件進行處理）之處。另 外，各處理槽2皆經由下述的空氣驅動間4而與配管3接 續，且具有檢測槽内液體的液位之未圖示的液面感測器。 各液面感測器’經由未圖式的配線，接續至控制裝置7的 200936922 對應部，例如，當槽内的液體隨著廢液而減少肖，向控制 裝置7傳送供給新的液體之液體要求用的信號，當槽内的 液體達預定值時，向控制裝置7傳送供给停止用的信號。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a valve opening and closing counting method in a liquid automatic supply device, which is suitable for determining a solenoid valve provided on a pipe for liquid supply or via a solenoid valve. The inspection or life of the driven air driven valve. [Prior Art] For example, in a semiconductor manufacturing and flat panel display manufacturing apparatus, in order to perform various liquid processing (processing by liquid) efficiently, a liquid automatic supply device for supplying liquid from a liquid storage portion is provided. The supply point to the plural is the processing unit of each process. The liquid automatic supply device 301 includes: a pipe connecting the liquid storage unit and each of the processing units, a pump or a pressurizing means for transferring the liquid in the liquid storage unit to the pipe, an opening and closing valve attached to the pipe, and each of the control Control device for opening and closing valves. Further, in addition to the solenoid valve, the opening and closing valve, when the liquid to be transferred has acidity and alkaline rot, is a combination of an air driven valve and a solenoid valve for supplying the valve switching compressed gas to the valve. Air driven valve. However, in the liquid automatic supply device described above, in addition to regular maintenance, the system operates continuously day and night, and the number of supply points increases as the processing becomes complicated. When a problem occurs, the entire device must be stopped for repair. I want to prevent problems from happening in advance. The problem associated with the valve is, for example, that the damage is caused by the leakage of the liquid. As a countermeasure, it is possible to consider the change of the menstrual period, that is, the prediction test and the life period. For example, if it is an electromagnetic room, as disclosed in Patent Document 1, the number of times of opening and closing of the 200936922 magnetic valve is counted using a solenoid valve with a counting function. And the hunter knows / and knows the inspection and life of the solenoid valve in order to deal with it. [Patent Document 1] Japanese Patent Publication No. 2597782 [Draft] [Problems to be Solved by the Invention] However, in view of the automatic liquid supply device currently in operation, it is not necessary to use an air driven valve of t, and electromagnetic The valve also has almost no counting function, so it is impossible to judge or predict the period of inspection and life. In addition, it is virtually impossible to exchange all of the air-driven 阙 and electromagnetic reading in use from the viewpoint of stopping operation. Further, in the above control device, there is a program in which the number of opening and closing of the counting solenoid valve is built in. However, if such a program is reinstalled in the control device, in addition to the long-term stop of the control device, there is also a control device itself. The possibility of adverse effects caused by the operation is poor. On the other hand, the object of the present invention is to count the number of times the solenoid valve is opened and closed, for the air-driven valve and the solenoid valve used in the liquid automatic supply e-device during operation, and the valve is not exchanged or stopped. For example, by counting the number of accumulated opening and closing times obtained by counting within a predetermined time, the inspection of the air-driven valve and the solenoid valve or the life period can be accurately determined. [Technical means for solving the problem] In order to achieve the above object, the invention of claim i is a valve opening and closing counting method in a liquid automatic supply device, which is applied to "via a liquid storage portion and a processing portion" The piping and the air storage valve side of the liquid storage unit side and/or the processing unit side are connected together, and the liquid is automatically supplied from the electromagnetic valve controlled by the control device from 4 200936922 to the air driven valve. a supply device having a non-contact type DC current sensor configured to be attached to a wiring for connecting the control device and the solenoid valve, and a counter for counting a detection signal of the DC current sensor, The counter counter counts the detection signal 'shown as the cumulative number of opening and closing of the solenoid valve. The invention of claim 2 is a valve opening and closing counting method in a liquid automatic supply device, which is applied to the side of the liquid storage unit and the treatment unit via the piping and the liquid storage unit side and/or the treatment unit side. The solenoid valve is connected together, and the liquid automatic supply device such as the solenoid valve is controlled by a control device, and has a wiring configured to be attached to the wiring for connecting the control device and the solenoid valve The non-contact type DC current sensor and a counter for counting the detection signals of the DC current sensor, wherein the counter counts the detection signal and is displayed as the cumulative number of opening and closing of the solenoid valve. In the above inventions, the DC current sensor is configured to be subsequently attached to the wiring for connecting the control device and the solenoid of the solenoid valve, for example, when the current is passed from the control device through the wiring. When it flows to the solenoid valve, it will detect its energization state and output it as a predetermined voltage signal. The counter can be either a one-piece type with a DC current sensor or an individual component. Usually, the counting unit and the display unit are provided, and the detection signal of the DC current sensor is counted by the counting unit, and the juice value corresponding to the count is displayed on the display unit as the cumulative number of opening and closing of the electromagnetic valve. According to the invention, for example, the second patent application scope is as follows: 200936922 is advantageous for judging the life period of the liquid automatic supply device. In addition, in the case of the patent document, the drive room, and the electromagnetic electromagnetic system, the invention is performed by the spiral;::::::: The system is obviously different from the patent literature. It is =: the detection signal of each DC current sensor in this case is: 1 the number of opening and closing operations of the contact type solenoid valve (4) unified. = phase counter, which is available as an existing The measurement department, after:: The method of the second system is to add the method of opening and closing the counting valve. The invention according to the third aspect of the patent application is the opening/closing counting side of the liquid automatic supply device according to the application of the invention, wherein: the solenoid valve is counted by the counter for a predetermined time. The cumulative number of times of opening and closing and the total time from the automatic liquid supply of the liquid are calculated, and the estimated cumulative number of opening and closing times from the electromagnetic valve or the air drive start using the electromagnetic drive is calculated, and the estimated cumulative opening and closing is performed by the estimation. The number of times is used to determine the inspection and life of the above-mentioned electromagnetic chamber or/and upper Φ air-driven valve. This invention is directed to the improvement of the opening and closing frequency of the air actuated valve driven by the electromagnetic valve in a certain manner or period in the operation of the automatic body supply device. [Efficacy] The invention of claim 1 is a combination of a solenoid valve and an air drive, which is suitable for treating corrosive liquids. The invention of the second aspect of the patent application section omits the air-driven valve and is suitable for the case of treating a non-corrosive liquid such as clean water. In each of the inventions, even if the automatic liquid supply device of 200936922 is in operation, a DC current sensor is added to the wiring for connecting the control device and the electromagnetic valve, and when the current flows from the control device to the solenoid valve via the wiring, The energization state is detected, and the detection signal is counted by a counter and expressed as the cumulative number of opening and closing of the solenoid valve. Therefore, in each of the inventions, for example, even if the liquid automatic supply device in operation does not use the solenoid valve with the counting function, the electromagnetic enthalpy or the air driven by the electromagnetic valve can be accurately determined by the cumulative number of opening and closing of the electromagnetic valve. The inspection of the drive valve, the life period, and the like. The invention of the third invention is a preferred determination method exemplified in the third drawing. If the counter is counted within a predetermined time t, the cumulative number of opening and closing times of the solenoid valve is set to a, and the liquid is automatically When the total time from the start of use of the supply device is τ', for example, the estimated cumulative opening and closing times from the start of use of the electromagnetic valve or the air driven 驱动 driven by the electromagnetic valve are calculated according to the mathematical formula '(A==axT/t) A. Moreover, it is usually the number of dangerous opening and closing times Ai obtained by adding A, safety or preliminary number α, and the time during which the electromagnetic valve specified by the φ* specification or the air driven by the electromagnetic valve is driven wide. The number of times of opening and closing or the number of opening and closing times X' of the life span is compared. Therefore, in the present invention, the inspection period and the life period of the solenoid valve and the air driven valve can be easily and accurately determined. [Embodiment] (Description of Figs. 1 to 3) Fig. 1 schematically shows a liquid automatic supply device to which the present invention is applied. In the figure, the liquid automatic confession of the general manager of the liquid crystal is assumed to be a semiconductor manufacturing equipment 200936922, etc., and includes a liquid medicine tank 1 for storing a liquid, and a plurality of processing for liquid processing of a workpiece such as a semiconductor substrate. a tank 2; a pipe 3 for continuously connecting the chemical tanks to the respective treatment tanks 2; an air-driven valve 4 provided on a portion of the chemical tank 1 of the piping 3, and a solenoid valve 5 for valve switching, and each treatment The air-driven valve 4 on the side of the tank 2 and the solenoid valve 5 for valve switching; the control device 7 for controlling the entire liquid automatic supply device (including each solenoid valve 5); the wirings 6a to 6c connecting the solenoid valves 5 and the control device 7; A DC current sensor 8 disposed on each of the wirings; and a counter 9 that is connected to β on each of the DC current sensors g. Further, reference numeral 13 is a filter provided on the upstream side of the pipe 3. Here, the chemical solution tank 1 contains a liquid such as hydrogen peroxide or sulfuric acid, and has an insertion tube 10 that is disposed to penetrate the upper lid of the tank and extends from the groove to the lower side, and an unillustrated portion that is provided on the upper lid of the tank. a gas introduction unit or the like. In the chemical solution tank 1, a compressed gas 11 such as nitrogen gas is introduced into the tank through the gas introduction portion, so that the compressed gas u is continuously pressurized in the tank. Further, such a pressurizing means is for transferring the liquid in the chemical solution tank to the side of the pipe 3, but instead of this, the liquid in the chemical solution tank 1 may be transferred to the side of the pipe 3 by a pump. . Each of the processing tanks 2 is a supply point, and only two of them are simply illustrated. However, in practice, a plurality of such processing tanks are provided. Each of the treatment tanks is formed into a tank shape of various sizes having a juice amount, and is a separate or continuous liquid treatment work piece (processing of the workpiece by liquid). Further, each of the processing tanks 2 is connected to the pipe 3 via the air driving chamber 4 described below, and has a liquid level sensor (not shown) for detecting the liquid level of the liquid in the tank. Each liquid level sensor 'connects to the corresponding portion of 200936922 of the control device 7 via a wiring of a non-pattern, for example, when the liquid in the tank is reduced with the waste liquid, the liquid supplied to the control device 7 is supplied with a new liquid. The required signal transmits a signal for supply stop to the control device 7 when the liquid in the tank reaches a predetermined value.
配管3係由串聯配置的共通配管^、以及對於共通配 管3a並聯配置的專用配管3b所構成。亦即，共通配管 其一端接續於插人管H)的上端’而另—端則沿著各處理槽 2地配置。專用配管3b是由對應處理槽的個數之複數根所 構成’分別接續共通配管3a與各處理槽2。 各空氣驅動閥4,係閥構造之中，藉由從各電磁閥5 供給的壓縮空氣而從閉閥切換至開閥的型式。具體而言， 例如具備：將上流側通路與下流側通路，經由閥座側開口 部而接績之本體部；相對;^該本體部，經由桿等，使間塞 作往復運動來使閥座側開口部開閉之隔膜式操作部；以及 連設於該操作部的壓力室。當壓力室的内部壓力因壓縮空 氣的供給而增大時，間塞經由桿等向一方移動而成為開 閥，相反地，當壓力室的内部壓力減少時，閥塞經由桿等 向另一方移動而成為閉閥的構成。又，位於共通配管3a 上的空氣驅動閥4，係被構成：作為用以調整闊開度的調 整閥。 電磁閥5係應用電磁石的吸引力來開閉閥，具備：相 對於已捲繞有導電性線圈的螺線管S，被設成固定的固定 鐵心與被設成可移動的可動鐵心；以及連動於可動鐵心而 位移的心軸（spo〇1)等的閥機構。此電磁閥5,是藉由通電 至螺線管’於固定鐵心產生電磁力，於是可動鐵心被吸引 200936922 向固定鐵心側的構造。具體地，例如是三埠的單動式單螺 線管，使用常閉型時，螺線管未通電而消磁時，壓縮空氣 用供給埠關閉，其他二槔（汽缸埠與排氣埠）係連接在一 起，螺線管通電而激磁時，供給埠與汽缸埠連接排氣埠 關閉。另外，各電磁閥5中，用以供給壓縮氣體（空氣） 12的配管14a〜14c接續至供給埠，用以供給壓縮氣體（空 氣）12至空氣驅動閥4的各加壓室之配管15a〜15c接續 至，飞缸埠。又，實際上，各壓縮氣體12係由相同壓縮氣體 © 源供給〇 另外，各電磁閥5的螺線管S，係對於控制裝置7的電 氣供給部，以配線6a〜6c接續。而且，控制裝置7，係在 例如基於來自上述的液面感測器的信號，供給新的液體至 對應的處理槽2時，經由配線6a〜6c通電至對應的電磁閥 5。 以上的配線6a〜6c中，如第2圖所示，非接觸型的直 φ 流電流感測器8係被配置成可裝卸或之後附加。各直流電 流感測器8具有計數器9，用以計數該檢測信號，來表示 該當電磁閥的累積開閉次數。在此，各直流電流感測器8 係習知者，是當電流在鉗夾後的對應配線6a〜6c上流動 時，會輪出預定的電壓信號的型式。該直流電流感測器8, 其本體部8a具有分割部8b，在分割部8b分離的狀態下， 將配線6a〜6c的對應部分配置於本體部8a的鉗夾部之 後，將分割部8b裝設於本體部8a，便可將該當配線的對 應部分鉗失於本體部8a的鉗夹部與分割部8b的鉗夾部之 10 200936922 間。 另外，各直流電流感測器8，係經由設於本體部8a的 引線（lead wire)8c，接績至對應的計數器9。各計數器9 具有表示部9a，計數直流電流感測器8的檢測信號（是配 線6a〜6c被通電時所檢測出的檢測信號，電磁閥會被切換 為開閥的狀態），並於表示部9a表示該當電磁閥的累積開 閉次數。符號9b係開關。又，直流電流感測器8的原理係 與例如日本專利公開公報特開2003-302423號中記載的構 成幾乎相同。計數器9只要是可計數直流電流感測器8的 檢測信號（上述的電壓信號），並依次表示於表示部9a 上的構成即可。 (判斷方法） 第3圖係表示利用以上的電磁閥的開閉計數方法所得 的累積開閉次數，判斷該電磁閥、空氣驅動閥等的檢查、 鲁 壽命時期的順序例。在此，此例中，對於運轉中的液體自 動供給裝置，假定為之後附加本發明的直流電流感測器8 與計數器9的情況。另外，用於液體自動供給裝置的電磁 閥5，依製造廠的閥規格，螺線管s 一次通電時開閉次數 設為一的情況下’區分為至檢查時期為止的開閉次數為 Y、至壽命時期為止的開閉次數為X。 在步驟ST1中，上述各直流電流感測器8，當電流在各 配線6a〜6c流動時，將其檢測信號傳送至對應的計數器 9。在步驟ST2中，各計數器9計數來自對應的直流電流感 200936922 測器8的檢測信號，計數於預定時間t所得的檢測信號， 而於表不部9a表不該電磁閥的累積開始次數a。又，在此 的預定時間t係從安裝直流電流感測器時算起的時間、或 者是使用後的預定範圍的時間之任一者皆可。The pipe 3 is composed of a common pipe arranged in series and a dedicated pipe 3b arranged in parallel with the common pipe 3a. That is, the common pipe has one end connected to the upper end ' of the insertion pipe H) and the other end is disposed along each of the processing grooves 2. The dedicated piping 3b is constituted by a plurality of corresponding number of processing tanks', and the common piping 3a and each processing tank 2 are respectively connected. Each of the air-driven valves 4 is a valve-type structure that is switched from a closed valve to a valve-opened state by compressed air supplied from each solenoid valve 5. Specifically, for example, the body portion that connects the upstream side passage and the downstream side passage through the valve seat side opening portion is provided; and the main body portion reciprocates the intermediate plug via a rod or the like to cause the valve seat a diaphragm type operation portion that opens and closes the side opening portion; and a pressure chamber that is connected to the operation portion. When the internal pressure of the pressure chamber is increased by the supply of the compressed air, the intermediate plug moves to one side via the rod or the like to open the valve. Conversely, when the internal pressure of the pressure chamber decreases, the valve plug moves to the other via the rod or the like. It becomes the composition of the closed valve. Further, the air-driven valve 4 located on the common pipe 3a is configured as a regulating valve for adjusting the wide opening. The solenoid valve 5 is an open/close valve that applies an attractive force of an electromagnet, and includes a fixed iron core that is fixed to the solenoid S around which the conductive coil is wound, and a movable iron core that is movable; and A valve mechanism such as a spindle (spo〇1) that is displaced by a movable iron core. The solenoid valve 5 is electromagnetically energized by the energization to the solenoid 'on the fixed iron core, so that the movable iron core is attracted to the structure of the fixed iron core side of 200936922. Specifically, for example, a single-acting single solenoid of three turns, when the normally closed type is used, when the solenoid is deenergized without being energized, the compressed air is closed by the supply port, and the other two (cylinder bore and exhaust port) are When connected together, when the solenoid is energized and energized, the supply port is connected to the cylinder port and the exhaust port is closed. Further, in each of the solenoid valves 5, the pipes 14a to 14c for supplying the compressed gas (air) 12 are connected to the supply port, and the pipes 15a to 15 for supplying the compressed gas (air) 12 to the respective pressurizing chambers of the air actuating valve 4 are provided. 15c continues to the fly cylinder. Further, in actuality, each of the compressed gas 12 is supplied from the same compressed gas source 〇. Further, the solenoid S of each solenoid valve 5 is connected to the electric power supply unit of the control device 7 by the wirings 6a to 6c. Further, when the new liquid is supplied to the corresponding processing tank 2 based on, for example, a signal from the liquid level sensor described above, the control device 7 is energized to the corresponding electromagnetic valve 5 via the wirings 6a to 6c. In the above wirings 6a to 6c, as shown in Fig. 2, the non-contact type direct current current sensor 8 is arranged to be detachable or attached. Each of the direct current influenza detectors 8 has a counter 9 for counting the detection signals to indicate the cumulative number of opening and closing of the solenoid valves. Here, each of the DC current sensors 8 is a type in which a predetermined voltage signal is rotated when current flows on the corresponding wirings 6a to 6c after clamping. In the DC current sensor 8, the main body portion 8a has a divided portion 8b. When the divided portion 8b is separated, the corresponding portion of the wirings 6a to 6c is placed in the nip portion of the main body portion 8a, and the divided portion 8b is mounted. In the main body portion 8a, the corresponding portion of the wiring can be clamped between the clamping portion of the main body portion 8a and the clamping portion of the dividing portion 8b 10 200936922. Further, each of the DC current sensors 8 is connected to the corresponding counter 9 via a lead wire 8c provided in the main body portion 8a. Each of the counters 9 includes a display unit 9a that counts a detection signal of the DC current sensor 8 (a detection signal detected when the wirings 6a to 6c are energized, and the solenoid valve is switched to a valve opening state), and is displayed on the display portion 9a. Indicates the cumulative number of opening and closing of the solenoid valve. Symbol 9b is a switch. Further, the principle of the DC current sensor 8 is almost the same as that described in, for example, Japanese Laid-Open Patent Publication No. 2003-302423. The counter 9 may be a configuration in which the detection signal (the above-described voltage signal) of the DC current sensor 8 can be counted and displayed on the display unit 9a in order. (Determination method) Fig. 3 shows an example of the sequence of the inspection and the life of the electromagnetic valve and the air-driven valve by the number of times of the cumulative opening and closing obtained by the above-described opening and closing counting method of the electromagnetic valve. Here, in this example, the case where the DC current sensor 8 of the present invention and the counter 9 are added to the liquid automatic supply device in operation is assumed. In addition, when the number of times of opening and closing of the solenoid s when the solenoid s is energized once is set to one according to the valve specification of the manufacturer, the number of opening and closing times up to the inspection period is Y, and the life is The number of opening and closing times up to the time is X. In step ST1, each of the DC current sensors 8 transmits a detection signal to the corresponding counter 9 when current flows through the respective wirings 6a to 6c. In step ST2, each counter 9 counts the detection signal from the corresponding DC current sense 200936922 detector 8, counts the detection signal obtained at the predetermined time t, and indicates the cumulative number of starts a of the solenoid valve in the header portion 9a. Further, the predetermined time t here may be any one of the time from the time when the DC current sensor is mounted or the time after the predetermined range is used.
在步驟ST3中，若將從該當液體自動供給裝置開始使 用時算起的總計時間設為T，則由（A= axT/t )的數學式， 算出從上述電磁閥8開始使用算起的推測累積開閉次數 A。在步驟ST4中，將安全次數或預備式數α加進所得到的 推測累積開閉次數Α中而算出危險開閉次數A1 ^ 在步驟ST5中，比較上述危險開閉次數M與達到該當 電磁閥8或空氣驅動閥4的製品規格所規定的壽命時期的 開閉次數X。而且，在此構造中，危險開閉次數ai與壽命 用開閉次數X相較，若是相同或較大時，則先停止裝置整 體或全部的電磁閥，然後交換該當電磁閥或/及以該電磁 閥驅動的空氣驅動閥。當然地，在步驟ST5中，也可以設 成.以達到該當電磁閥8或空氣驅動閥4的製品規格所規 Μ檢查_的_次數γ’取代開閉次數χ’與上述危險 開閉次數Α1比較，來判斷檢查時期。 接的判斷方法’係注目於在此種的液體自動供給 閲相变中㈣磁閥與以該電磁閥驅動的空氣驅動閥的丨 'H的態樣或週期而完成。其優點係即使是運^ :的液體自動供給裝置’也能適用本發明之閥開閉計數: 氣媒f單且準確地判斷電磁閥或/及以該電磁閥驅動的3 間的檢查時期、壽命時期。而且，判斷方法，例； 12 200936922 即使是使用了多數個電磁閥8與空氣驅動閥4的裝置構 造，若有一組以上的直流電流感測器8與計數器9，則藉 由將其依序拆卸，使用於相異的電磁閥，即可判斷全部的 電磁閥8或/及以該電磁閥驅動的空氣驅動閥4的檢杳時 期、壽命時期。換言之’此判斷方法’是判斷電磁閥8的 檢查時期、壽命時期’或是類推適用其判斷結果於空氣驅 動閥4的構成。 e (第4圖的說明） 第4圖係表示第1圖所示的液體自動供給裝置的形態 的變化例。此變化例中，與上述形態作用上相同部件或部 位標C相同符號而省略重複的說明。此變化例中，相對於 上述形態，變更以下兩點：省略空氣驅動閥，於配管3附 設電磁閥18的構成；以及以共通的計數器9Α來計數各直 電流感測器8的檢測信號或是作為累積開閉次數來表 ❹ 示。 亦即，第4圖的電磁閥18,係由常閉式的二埠閥或三 埠閥（三埠閥時，例如阻塞其一埠，以二埠閥的狀態來使 用）所構成，在消磁（未通電）時成為閉閥狀態，而在激 磁（通電）時成為開閥狀態。另外，電磁閥18係設於配管 3中的共通配管3a的上流側以及專用配管3b上。而且， 控制裝置7A，係例如基於設於上述各處理槽2側的液面感 測器的仏號，供給新的液體至對應的處理槽2時，經由配 線16a〜16c通電至對應的電磁閥18。 13 200936922 非接觸型的直流電流感測器8，係可裝卸或之後附加地 配置於上述的配線16a〜16c上。各直流電流感測器8，若 檢測出電流在甜夾後的對應的配線16a〜16c上流動時則 以電壓信號經由配線17a〜17c而傳送至設於控制裝置7 側的計數器9A。計數器9A計數其檢測信號，作為該電磁 閥的累積開閉次數而表示出來。 又，本發明並非被限制於以上的形態與變化例只要 滿足申請專利範圍所特定的要件即可，其細部可參照=上 的具體例作各種變化、進展。 【圖式簡單說明】 第1圖係模式地表示適用本發 明的自動液體供給裝置 的構成圖。 第2圖係表示第1圖的電流撿測感測器與計數 成圖 器的構 的 置 ® 第3圖係表示利用本發明來_電磁閥的交換時期 步驟例的圓。 第4圓係模式地表示第1圖所 间w不的液體自動供給裝 的形態的變化例的構成圖。 200936922 【主要元件符號說明】 1:藥液槽（液體貯藏部） 2 :處理槽（處理部） 3 :配管 3a :共通配管 3b ··專用配管 4 :空氣驅動閥 5 :電磁閥 6 a〜6 c :配線 7 :控制裝置 8 :直流電流感測器 8a :本體部 8b :分割部 8c :引線 9 :計數器 9a :表示部 9b :開關 9A :計數器 10 :插入管 11 :壓縮氣體（氮氣） 12 :壓縮氣體（空氣） 13 :過濾器 14a〜14c :配管 15a〜15c :配管 16a〜16c:配線 17a〜17c:配線 18 :電磁閥 15In step ST3, when the total time from the start of use of the liquid automatic supply device is T, the estimation from the start of use of the electromagnetic valve 8 is calculated from the mathematical expression of (A = axT/t). The number of opening and closing times A is accumulated. In step ST4, the safety number or the preliminary number α is added to the obtained estimated cumulative opening and closing times 而 to calculate the number of dangerous opening and closing times A1. In step ST5, the dangerous opening and closing times M are compared with the arrival of the solenoid valve 8 or the air. The number of opening and closing times X of the service life specified by the product specifications of the drive valve 4 is driven. Further, in this configuration, the number of dangerous opening and closing times ai is compared with the number of opening and closing times X of the life, and if it is the same or larger, the solenoid valve of the whole or all of the apparatus is stopped first, and then the solenoid valve or/and the solenoid valve are exchanged. Driven air driven valve. Of course, in step ST5, it is also possible to set the number of times γ' of the inspection of the solenoid valve 8 or the air-driven valve 4 to be compared with the number of times of opening and closing χ1. To judge the inspection period. The method of judging the connection is focused on the state or cycle of the 阀 'H of the magnetic valve and the air-driven valve driven by the solenoid valve in the liquid automatic supply phase change. The advantage is that the valve opening and closing count of the present invention can be applied even in the liquid automatic supply device of the present invention: the gas medium f and the electromagnetic valve or/and the inspection period and life of the three valves driven by the electromagnetic valve are accurately and uniquely determined. period. Further, the determination method, for example; 12 200936922 Even if a plurality of solenoid valves 8 and air-driven valves 4 are used, if there are more than one group of DC current sensors 8 and counters 9, by sequentially disassembling them, By using the different solenoid valves, it is possible to determine the inspection period and the life period of all the solenoid valves 8 or/and the air-driven valves 4 driven by the solenoid valves. In other words, the "determination method" is a configuration for judging the inspection period of the electromagnetic valve 8, the life period, or the analogy of the result of the determination in the air-driven valve 4. e (Description of Fig. 4) Fig. 4 is a view showing a modification of the form of the automatic liquid supply device shown in Fig. 1. In the above-described embodiment, the same components as those in the above-described embodiments are denoted by the same reference numerals, and the description thereof will not be repeated. In the above-described embodiment, the following two points are changed: the air-driven valve is omitted, the electromagnetic valve 18 is attached to the pipe 3, and the detection signal of each of the direct current sensors 8 is counted by the common counter 9A or It is indicated as the cumulative number of opening and closing. That is, the solenoid valve 18 of Fig. 4 is composed of a normally closed two-way valve or a three-turn valve (for example, when the three-turn valve is blocked, for example, it is used in the state of a two-turn valve), and demagnetized ( When it is not energized, it is in a closed state, and when it is energized (energized), it is in an open state. Further, the solenoid valve 18 is provided on the upstream side of the common pipe 3a in the pipe 3 and on the dedicated pipe 3b. Further, the control device 7A supplies a new liquid to the corresponding processing tank 2 based on the nickname of the liquid level sensor provided on each of the processing tanks 2, for example, and is energized to the corresponding solenoid valve via the wirings 16a to 16c. 18. 13 200936922 The non-contact type DC current sensor 8 is detachably or later attached to the above-described wirings 16a to 16c. When the DC current sensor 8 detects that a current flows through the corresponding wirings 16a to 16c after the sweet clip, the voltage signal is transmitted to the counter 9A provided on the control unit 7 side via the wirings 17a to 17c. The counter 9A counts its detection signal and displays it as the cumulative number of opening and closing of the solenoid valve. Further, the present invention is not limited to the above-described embodiments and modifications, and as long as the requirements specified in the scope of the patent application are satisfied, the details can be changed and progressed with reference to the specific example of the above. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view schematically showing the configuration of an automatic liquid supply device to which the present invention is applied. Fig. 2 is a view showing the configuration of the current sensing sensor and the counting patterner of Fig. 1 : Fig. 3 is a view showing a circle of an example of the exchange period of the solenoid valve by the present invention. The fourth circle system schematically shows a configuration diagram of a variation of the form of the liquid automatic supply device in the first drawing. 200936922 [Description of main component symbols] 1: Chemical solution tank (liquid storage unit) 2 : Treatment tank (treatment unit) 3 : Piping 3a : Common piping 3b · Special piping 4 : Air driven valve 5 : Solenoid valve 6 a to 6 c: Wiring 7: Control device 8: DC current sensor 8a: Main body portion 8b: Division portion 8c: Lead 9: Counter 9a: Display portion 9b: Switch 9A: Counter 10: Insertion tube 11: Compressed gas (nitrogen) 12: Compressed gas (air) 13: Filters 14a to 14c: Pipings 15a to 15c: Pipings 16a to 16c: Wirings 17a to 17c: Wiring 18: Solenoid valve 15