JP5693393B2 - Flow-through cell type measuring apparatus and method for determining failure of electromagnetic switching valve of the apparatus - Google Patents

Flow-through cell type measuring apparatus and method for determining failure of electromagnetic switching valve of the apparatus Download PDF

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JP5693393B2
JP5693393B2 JP2011135650A JP2011135650A JP5693393B2 JP 5693393 B2 JP5693393 B2 JP 5693393B2 JP 2011135650 A JP2011135650 A JP 2011135650A JP 2011135650 A JP2011135650 A JP 2011135650A JP 5693393 B2 JP5693393 B2 JP 5693393B2
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良太 嶽
良太 嶽
田中 俊
俊 田中
友海 水谷
友海 水谷
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Ulvac Inc
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Description

本発明は、溶液中の物質検知又は測定に使用されるフロースルーセル式測定装置及び同装置の電磁開閉バルブの故障判定方法に関する。   The present invention relates to a flow-through cell type measuring apparatus used for detecting or measuring a substance in a solution, and a failure determination method for an electromagnetic on-off valve of the apparatus.

従来、フロースルーセル式測定装置は、例えば、特許文献1に開示がされているように、複数の容器に収容された溶液を電磁弁を切り換えてフロースルーセルへ移送するように構成されている。
上記構成の場合、異物が溶液に混入してバルブが噛み込み所望の制御が行えない状態で測定を継続してしまうという問題があった。また、異常があるバルブを特定するために、装置からバルブを取り出さなければならないという問題があった。特に、検出素子が圧電素子である場合、流路の異常によって管内圧力が正常でなくなり、この異常が大きく計測値に影響を与えてしまう問題があった。
Conventionally, as disclosed in Patent Document 1, for example, a flow-through cell type measuring apparatus is configured to transfer a solution contained in a plurality of containers to a flow-through cell by switching electromagnetic valves. .
In the case of the above configuration, there is a problem that the measurement is continued in a state where the foreign matter is mixed in the solution and the valve is bitten and the desired control cannot be performed. In addition, there is a problem that the valve must be taken out from the apparatus in order to identify the valve having an abnormality. In particular, when the detection element is a piezoelectric element, there is a problem that the pressure in the tube is not normal due to an abnormality in the flow path, and this abnormality greatly affects the measurement value.

特開平11−183479号公報Japanese Patent Laid-Open No. 11-183479

そこで、本発明は、フロースルーセル式の測定装置におけるバルブの異常の判定を、装置を分解することなく行うことが可能なフロースルーセル式測定装置及び同装置の電磁開閉バルブの故障判定方法を提供することを目的とする。   Therefore, the present invention provides a flow-through cell type measuring apparatus capable of determining a valve abnormality in a flow-through cell type measuring apparatus without disassembling the apparatus, and a failure determining method for an electromagnetic switching valve of the apparatus. The purpose is to provide.

本発明のフロースルーセル式測定装置は、請求項1記載の通り、ポンプから送られる溶液を電磁開閉バルブを介してフロースルーセルにより測定を行うフロースルーセル式測定装置であって、前記ポンプと流量計と前記フロースルーセルと廃液容器とが上流側から順に設けられ、前記流量計と前記廃液容器との間は、第1の電磁開閉バルブと第2の電磁開閉バルブとを上流側から順に備えた流路と、第3の電磁開閉バルブと第4の電磁開閉バルブとを上流側から順に備えた流路とで並列に接続され、前記第1の電磁開閉バルブと前記第2の電磁開閉バルブとの間と、前記第3の電磁開閉バルブと前記第4の電磁開閉バルブとの間とは、第5の電磁開閉バルブと前記フロースルーセルとを上流側から順に備えた流路で接続され、前記ポンプから送液される溶液の速度は、ポンプ制御手段に送液速度の指示値を入力することにより制御され、前記電磁開閉バルブは、バルブ制御手段により開閉を制御され、前記ポンプ制御手段に入力される送液速度の指示値及び前記バルブ制御手段に入力される前記電磁開閉バルブの開閉についての指示値と、前記流量計で計測される溶液速度とを比較し、前記電磁開閉バルブの故障判定を行う故障判定手段を備えたことを特徴とする。
請求項2記載の本発明は、請求項1記載の発明において、前記フロースルーセルには、検出素子として圧電素子を備えることを特徴とする。
また、本発明のフロースルーセル式測定装置の電磁開閉バルブの故障判定方法は、請求項3に記載の通り、ポンプから送られる溶液を電磁開閉バルブを介してフロースルーセルにより測定を行うフロースルーセル式測定装置の前記電磁開閉バルブの故障判定方法であって、前記ポンプと流量計と前記フロースルーセルと廃液容器とが上流側から順に設けられ、前記流量計と前記廃液容器との間は、第1の電磁開閉バルブと第2の電磁開閉バルブとを上流側から順に備えた流路と、第3の電磁開閉バルブと第4の電磁開閉バルブとを上流側から順に備えた流路とで並列に接続され、前記第1の電磁開閉バルブと前記第2の電磁開閉バルブとの間と、前記第3の電磁開閉バルブと前記第4の電磁開閉バルブとの間とは、第5の電磁開閉バルブと前記フロースルーセルとを上流側から順に備えた流路で接続され、前記ポンプから送液される溶液の速度は、ポンプ制御手段に送液速度の指示値を入力することにより制御され、前記電磁開閉バルブは、バルブ制御手段により開閉を制御され、前記ポンプ制御手段に入力される送液速度の指示値及び前記バルブ制御手段に入力される前記電磁開閉バルブの開閉についての指示値と、前記流量計で計測される溶液速度とを比較し、前記電磁開閉バルブの故障判定を故障判定手段により行い、前記故障判定手段による判定を測定開始前に行うようにしたことを特徴とする。
The flow-through cell type measuring apparatus of the present invention is a flow-through cell type measuring apparatus for measuring a solution sent from a pump by a flow-through cell via an electromagnetic on-off valve, as described in claim 1, A flow meter, the flow-through cell, and a waste liquid container are provided in order from the upstream side. Between the flow meter and the waste liquid container, a first electromagnetic open / close valve and a second electromagnetic open / close valve are sequentially provided from the upstream side. The first electromagnetic opening / closing valve and the second electromagnetic opening / closing are connected in parallel by a flow path provided, and a flow path including a third electromagnetic opening / closing valve and a fourth electromagnetic opening / closing valve in order from the upstream side. Between the valve and between the third electromagnetic opening and closing valve and the fourth electromagnetic opening and closing valve, a fifth electromagnetic opening and closing valve and the flow through cell are connected by a flow path provided in order from the upstream side. It is, from the pump Rate of the solution to be a liquid is controlled by inputting an indication of the feed rate to the pump control unit, the electromagnetic switch valve, feeding a controlled opening and closing by the valve control means is input to said pump control means A failure for comparing the indicated value of the liquid speed and the indicated value for opening and closing of the electromagnetic opening / closing valve input to the valve control means with the solution speed measured by the flow meter to determine the failure of the electromagnetic opening / closing valve A determination means is provided.
According to a second aspect of the present invention, in the first aspect of the invention, the flow-through cell includes a piezoelectric element as a detection element.
Further, the failure determination method of the electromagnetic on-off valve of the flow-through cell measuring machine of the present invention, the flow performs measurement street, the flow-through cell via the solution electromagnetic switch valve the sent from pump according to claim 3 through A failure determination method for the electromagnetic on-off valve of a cell type measuring device, wherein the pump, a flow meter, the flow-through cell, and a waste liquid container are provided in this order from the upstream side, and between the flow meter and the waste liquid container A flow path provided with a first electromagnetic open / close valve and a second electromagnetic open / close valve in order from the upstream side; a flow path provided with a third electromagnetic open / close valve and a fourth electromagnetic open / close valve in order from the upstream side; Are connected in parallel, and between the first electromagnetic switching valve and the second electromagnetic switching valve, and between the third electromagnetic switching valve and the fourth electromagnetic switching valve, Electromagnetic switching valve and front Is connected to a flow-through cell in a flow path provided in this order from the upstream side, the rate of the solution being fed from the pump is controlled by inputting an indication of the feed rate to the pump control means, the electromagnetic switching The valve is controlled to open and close by the valve control means, the instruction value of the liquid feeding speed inputted to the pump control means, the instruction value about the opening and closing of the electromagnetic on-off valve inputted to the valve control means, and the flow meter in comparison with a solution velocity to be measured, the performed by the failure determining means for failure determination of the electromagnetic on-off valves, you characterized in that to perform the determination by the failure determination means before the measurement starts.

本発明によれば、不具合のあるバルブを特定してバルブを交換するだけで済むので、装置を分解して不具合のあるバルブを特定する場合と比べて作業時間を短縮することができる。不具合のあるバルブの特定は、時間を要さないので、通常の測定前等に簡単に行うことができ、結果として長期に亘って円滑な測定が可能となる。
また、不具合のあるバルブを特定することで、バルブに異常がある状態で測定を継続することを回避することが可能となる。更に、製造過程において、この判定方法を用いれば、不具合製品の市場流出防止を容易にかつ確実に実施できる。
また、本発明によれば、バルブの上流側に設けられた流量計による計測により不具合のバルブの特定が可能となるので、各バルブについて個々に確認する必要がなく、バルブの個数が増えた場合に特に有効なものとなる。
According to the present invention, since it is only necessary to identify a defective valve and replace the valve, the working time can be reduced as compared with the case where the defective valve is identified by disassembling the apparatus. Identification of a defective valve does not require time, so it can be easily performed before normal measurement or the like, and as a result, smooth measurement can be performed over a long period of time.
Further, by identifying a defective valve, it is possible to avoid continuing measurement in a state where the valve is abnormal. Further, if this determination method is used in the manufacturing process, it is possible to easily and surely prevent the outflow of defective products.
In addition, according to the present invention, it is possible to identify a defective valve by measuring with a flow meter provided upstream of the valve, so there is no need to check each valve individually, and the number of valves increases. It is particularly effective for

本実施の形態のフロースルーセル式測定装置の構成を示す説明図Explanatory drawing which shows the structure of the flow-through cell type measuring apparatus of this Embodiment

以下、本発明の実施の形態を図面を参照して説明する。図1は、本実施の形態のフロースルーセル式測定装置の構成を示す説明図である。
同装置は、フロースルー式のセル4を備え、セル4に対して上流側から順にポンプ2及び流量計3を備えている。流量計3とセル4との間の流路及びセル4と廃液容器側5との間の流路とは、それぞれ並列となるように分岐されており、各流路に電磁開閉式バルブ9,10,11,12を備えている。また、電磁開閉式バルブ10を備えた流路と、電磁開閉式バルブ12を備えた流路との間に、セル4へ向かう流路が設けられており、この流路のセル4の上流側に電磁開閉式バルブ13を設けている。
尚、ポンプ2は、溶液の供給の有無乃至は吐出流量等を制御するためポンプ制御手段6により制御され、電磁開閉式バルブ9〜13は、バルブ制御手段7により開閉が制御される。
図示した回路の構成において、ポンプ2は、検査溶液を収容した容器1からフロースルー式のセル4に溶液を圧送し、測定が終了した検査溶液は、セル4の下流側に接続された廃液容器5に収容される。
尚、ポンプ制御手段6及びバルブ制御手段7となる装置は公知のものを利用することができ、図示しないが、各制御手段6,7への制御を行うための入力手段により、制御すべき値が入力される。
Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is an explanatory diagram showing the configuration of the flow-through cell type measuring apparatus of the present embodiment.
The apparatus includes a flow-through cell 4, and includes a pump 2 and a flow meter 3 in order from the upstream side with respect to the cell 4. The flow path between the flow meter 3 and the cell 4 and the flow path between the cell 4 and the waste liquid container side 5 are branched so as to be parallel to each other. 10, 11 and 12 are provided. Further, a flow path toward the cell 4 is provided between the flow path provided with the electromagnetic open / close valve 10 and the flow path provided with the electromagnetic open / close valve 12. Is provided with an electromagnetic open / close valve 13.
The pump 2 is controlled by the pump control means 6 in order to control the supply / non-supply of the solution or the discharge flow rate, and the opening / closing of the electromagnetic open / close valves 9 to 13 is controlled by the valve control means 7.
In the circuit configuration shown in the drawing, the pump 2 pumps the solution from the container 1 containing the test solution to the flow-through cell 4, and the test solution whose measurement is completed is a waste liquid container connected to the downstream side of the cell 4. 5 is accommodated.
Note that known devices can be used as the pump control means 6 and the valve control means 7, and although not shown, values to be controlled by input means for controlling the control means 6 and 7 are shown. Is entered.

次に、説明した測定装置のバルブ故障判定の動作についてバルブ11で代表して説明する。
まず、バルブ9,10,13を開き、バルブ11,12を閉じた状態でポンプ2により検査溶液を送液し、流量計3により計測した流速が0であることが故障バルブ推定手段8に送られ、バルブ11,12が閉状態であることが確認できる。続いて、バルブ11を開き、ポンプ2から検査溶液を送液し、流量計3により計測した流速が0でないことが故障バルブ推定手段8に送られ、バルブ11の閉状態から開状態に動作することが確認できる。引き続き、バルブ11を閉じ、ポンプ2により検査溶液を送液し、流量計3により測定された流速が0であることが故障バルブ推定手段8に送られ、バルブ9の開状態から閉状態に動作することが確認できる。
上記の作動により、故障バルブ推定手段8は、バルブ11の開閉動作が正常に行われていると判断する。
このような判断の方法については、特に制限はないが、予め、各バルブ9〜13の少なくとも何れかが開閉動作を正常に行う場合の流量計3の値を測定及び記録しておき、確認を行いたいバルブ9〜13が正常でない場合の流量計3の値を測定して、正常値と測定値とを故障バルブ推定手段8により比較するようにすれば効率的である。
尚、故障バルブ推定手段8については、上記した比較演算をするための手段と、その結果を表示するための表示手段とを備える必要があり、例えば、パソコン等により実装可能である。
Next, the valve failure determination operation of the measuring apparatus described above will be described using the valve 11 as a representative.
First, the test solution is sent by the pump 2 with the valves 9, 10, 13 opened and the valves 11, 12 closed, and the fact that the flow rate measured by the flow meter 3 is 0 is sent to the failure valve estimation means 8. It can be confirmed that the valves 11 and 12 are closed. Subsequently, the valve 11 is opened, the test solution is sent from the pump 2, and the fact that the flow rate measured by the flow meter 3 is not 0 is sent to the failure valve estimation means 8, and the valve 11 operates from the closed state to the open state. I can confirm that. Subsequently, the valve 11 is closed, the test solution is sent by the pump 2, and the fact that the flow rate measured by the flow meter 3 is 0 is sent to the failure valve estimation means 8, and the valve 9 operates from the open state to the closed state. It can be confirmed.
By the above operation, the failure valve estimation means 8 determines that the opening / closing operation of the valve 11 is normally performed.
The determination method is not particularly limited, but the value of the flow meter 3 when at least one of the valves 9 to 13 normally performs the opening / closing operation is measured and recorded in advance for confirmation. It is efficient to measure the value of the flow meter 3 when the valves 9 to 13 to be performed are not normal and compare the normal value and the measured value by the failure valve estimation means 8.
The failure valve estimation means 8 needs to be provided with means for performing the above-described comparison operation and display means for displaying the result, and can be implemented by a personal computer, for example.

また、上記故障バルブ推定手段による判定は、実際の測定前に行うようにすることが好ましい。バルブ9〜13の異常を測定前に装置を分解せずに判定することができ、次の測定作業を迅速に行うことができるからである。   Further, the determination by the failure valve estimation means is preferably performed before actual measurement. This is because the abnormality of the valves 9 to 13 can be determined without disassembling the apparatus before measurement, and the next measurement operation can be performed quickly.

尚、本発明に使用する流量計3については特に制限はないが、例えば、マスフローメーター等を使用することができる。   In addition, although there is no restriction | limiting in particular about the flowmeter 3 used for this invention, For example, a mass flow meter etc. can be used.

1 検査溶液を収容した容器
2 ポンプ
3 流量計
4 フロースルー式のセル
5 廃液容器
6 ポンプ制御手段
7 バルブ制御手段
8 故障バルブ推定手段
9,10,11,12,13 バルブ
DESCRIPTION OF SYMBOLS 1 Container which accommodated test solution 2 Pump 3 Flow meter 4 Flow-through cell 5 Waste liquid container 6 Pump control means 7 Valve control means 8 Failure valve estimation means 9, 10, 11, 12, 13 Valve

Claims (3)

ポンプから送られる溶液を電磁開閉バルブを介してフロースルーセルにより測定を行うフロースルーセル式測定装置であって、
前記ポンプと流量計と前記フロースルーセルと廃液容器とが上流側から順に設けられ、
前記流量計と前記廃液容器との間は、第1の電磁開閉バルブと第2の電磁開閉バルブとを上流側から順に備えた流路と、第3の電磁開閉バルブと第4の電磁開閉バルブとを上流側から順に備えた流路とで並列に接続され、
前記第1の電磁開閉バルブと前記第2の電磁開閉バルブとの間と、前記第3の電磁開閉バルブと前記第4の電磁開閉バルブとの間とは、第5の電磁開閉バルブと前記フロースルーセルとを上流側から順に備えた流路で接続され、
前記ポンプから送液される溶液の速度は、ポンプ制御手段に送液速度の指示値を入力することにより制御され
前記電磁開閉バルブは、バルブ制御手段により開閉を制御され、
前記ポンプ制御手段に入力される送液速度の指示値及び前記バルブ制御手段に入力される前記電磁開閉バルブの開閉についての指示値と、前記流量計で計測される溶液速度とを比較し、前記電磁開閉バルブの故障判定を行う故障判定手段を備えたことを特徴とするフロースルー式測定装置。
A flow-through cell type measuring device for measuring a solution sent from a pump with a flow-through cell via an electromagnetic open / close valve,
The pump, the flow meter, the flow-through cell, and the waste liquid container are provided in order from the upstream side,
Between the flow meter and the waste liquid container, a flow path including a first electromagnetic switching valve and a second electromagnetic switching valve in order from the upstream side, a third electromagnetic switching valve, and a fourth electromagnetic switching valve Are connected in parallel with the flow path provided in order from the upstream side,
Between the first electromagnetic switching valve and the second electromagnetic switching valve and between the third electromagnetic switching valve and the fourth electromagnetic switching valve, the fifth electromagnetic switching valve and the flow It is connected with a flow path that has a through cell in order from the upstream side,
Rate of the solution to be fed from the pump is controlled by inputting an indication of the feed rate to the pump control means,
The electromagnetic open / close valve is controlled to open and close by a valve control means,
Comparing the indication value of the liquid feed speed input to the pump control means and the indication value for opening and closing the electromagnetic on-off valve input to the valve control means with the solution speed measured by the flow meter, A flow-through type measuring device comprising failure determining means for determining failure of an electromagnetic opening / closing valve.
前記フロースルーセルには、検出素子として圧電素子を備えることを特徴とする請求項1に記載のフロースルー式測定装置。 The flow-through type measurement apparatus according to claim 1 , wherein the flow-through cell includes a piezoelectric element as a detection element. ポンプから送られる溶液を電磁開閉バルブを介してフロースルーセルにより測定を行うフロースルーセル式測定装置の前記電磁開閉バルブの故障判定方法であって、
前記ポンプと流量計と前記フロースルーセルと廃液容器とが上流側から順に設けられ、
前記流量計と前記廃液容器との間は、第1の電磁開閉バルブと第2の電磁開閉バルブとを上流側から順に備えた流路と、第3の電磁開閉バルブと第4の電磁開閉バルブとを上流側から順に備えた流路とで並列に接続され、
前記第1の電磁開閉バルブと前記第2の電磁開閉バルブとの間と、前記第3の電磁開閉バルブと前記第4の電磁開閉バルブとの間とは、第5の電磁開閉バルブと前記フロースルーセルとを上流側から順に備えた流路で接続され、
前記ポンプから送液される溶液の速度は、ポンプ制御手段に送液速度の指示値を入力することにより制御され
前記電磁開閉バルブは、バルブ制御手段により開閉を制御され、
前記ポンプ制御手段に入力される送液速度の指示値及び前記バルブ制御手段に入力される前記電磁開閉バルブの開閉についての指示値と、前記流量計で計測される溶液速度とを比較し、前記電磁開閉バルブの故障判定を故障判定手段により行い
前記故障判定手段による判定を測定開始前に行うようにしたことを特徴とするフロースルー式測定装置の電磁開閉バルブの故障判定方法。
A failure determination method for the electromagnetic on-off valve of a flow-through cell type measuring device that measures a solution sent from a pump with a flow-through cell via an electromagnetic on-off valve,
The pump, the flow meter, the flow-through cell, and the waste liquid container are provided in order from the upstream side,
Between the flow meter and the waste liquid container, a flow path including a first electromagnetic switching valve and a second electromagnetic switching valve in order from the upstream side, a third electromagnetic switching valve, and a fourth electromagnetic switching valve Are connected in parallel with the flow path provided in order from the upstream side,
Between the first electromagnetic switching valve and the second electromagnetic switching valve and between the third electromagnetic switching valve and the fourth electromagnetic switching valve, the fifth electromagnetic switching valve and the flow It is connected with a flow path that has a through cell in order from the upstream side,
Rate of the solution to be fed from the pump is controlled by inputting an indication of the feed rate to the pump control means,
The electromagnetic open / close valve is controlled to open and close by a valve control means,
Comparing the indication value of the liquid feed speed input to the pump control means and the indication value for opening and closing the electromagnetic on-off valve input to the valve control means with the solution speed measured by the flow meter, Perform failure determination of the electromagnetic open / close valve by failure determination means,
A failure determination method for an electromagnetic on-off valve of a flow-through type measuring device, wherein the determination by the failure determination means is performed before the start of measurement.
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