200935028 九、發明說明： 【發明所屬之技術領域】 本發明係有關於一種务學咸、、目丨丨少 儀，-達==:表表 造成待測物表面的磨損之目的者。輪廓及粗度，且不致 【先前技術】 Ο 〇 在機械工業中尺寸的精密與否& 的良筹，因此利用量測機具進行工件輪=質 =:尺寸的精密為工業界普遍做為 請參我國第862_4號「多功能光 專利案，其係利用雷射光原理作量測 不同用途之測桿，兩_桿之位移m m、有兩組 二測桿可作單向高精度之位移， 用以作標準件，如塊規、塞規之比較校正 作雙向位移，可更換探針，且具有一移動台可在χ_γ 2 上移動，可作圓滑曲面輪廓、尺寸階高 變 =avDT)及指針量錶k校正°兩_棹均具有 量測力之裝置，以避免測量時對被測件之 然而，其因為是使用雷射干涉儀做為進 把成知傷。 量測的相關費用。 備紅叩貝，因此相對增加 再參我國第84217532號「非球面輪 案，該量測儀係用以量測非球面光學鏡 篁u」專利 亢予鏡片及非球面塑膠鏡 5 200935028 。量測儀以兩片標準平面玻璃構成的V t丰導師動槓桿式探針，槓桿1為平衡子，另—姓 ^紅寶石探頭和反射鏡。紅寶石探頭接觸非球面鏡 廓二組純奸賴分別㈣難橫向㈣轉和 縱向南度變化度，最後將兩組位移量以數學模組最佳化3 法’求出非球面參數和形狀誤差。 然而上述結構卻存在著如下所列.之缺失： 1. 其雖利賴學餘的H補正量㈣差 ❹ 〇 極大的誤差。 疋疋仔在耆 2. 槓桿式探針的設計，在量測其位移變化量時， 誤差的現象產生。 貝 【發明内容】 ^發明人即是馨於上述現有結構在實際實施上所且 之，於是乃—本孜孜不倦之精神，並藉由其豐富之專 年之實務經驗所輔佐，而加以改善，並據此研 本發明光學感測之接觸式量測探頭的主要目的， 提供一種低成本、高靈敏度之接觸式之光學感測探頭，使 之二運，於如表面輪廓儀與表面粗度儀等精密機械量測 領域二糟以達職確量_測物之表面輪廓絲度，且不 致造成待測物表面的磨損之目的者。 、本發明光學感測之接觸式量測探頭的目的與功效係 由以下之技術所實現： 其係包括一基座、一固定於基座上的光學感測裝置、 懸吊襞置，挾持該懸吊裝置之導桿的挾持裝置；俾經由… 扶持裝置呈三點點接觸挾持懸吊裝置之導桿的設計，.， 200935028 = 有一維自由度;繼透過該光學感測裝置量測 該懸吊裝置的位移變化量並據此得到一聚焦誤差訊號，利 ，此聚焦誤差訊號可得到懸吊裝置相對於基座的位移 量，進而求得待測物之表面輪廓與粗度。 【實施方式】 為令本發明所運用之技術内容、發明目的及其達成之 功效有更完整且清楚的揭露，茲於下詳細說明之，並請一 併參閱所揭之圖式及圖號： 〇 首先，請參閱第一、二、三、四圖，本發明光學感 測之接觸式量測探頭包括有： 基座（1)，其係設有第一固定面（11)，而相距於第 一固定面（11)適當之距離處，設有往上延伸之第二固 定面（12)及往下延伸之第三固定面（13)，另於該第三 固定面（13)的相對處則設有第四固定面（14);該第一 固定面（11)上設有螺孔（15a〜I5d)。 光學感測裝置（2)，其係固定於基座（1)之第二固 ❹ 疋面（12 )上，該光學感測裝置（2 )設有一位移量測探頭 (21) ’以下請再併參第五圖所示，該位移量測探頭（21) 之内部係分別設有雷射二極體（22)、分光鏡（23)、反 射鏡（24)、準直鏡（25)、物鏡（26)及四象限光感測器 (27) ( four-quadrant photo detector] ° .懸吊裝置（3)’其係固定於基座（1)之第一固定面 (11)上，該懸吊裝置（3)係設有十字型懸吊件（31)與四 根微細樑（32a〜32d)，該四根微細樑（32a~32d)係分別 多且没在十字型懸吊件（31)的各桿體末端處，且該十字 型懸吊件（31)與微細樑（32a〜32d)係配置於基座（1)之 200935028 第一固定面（11)上’並以螺絲（33a~33d)穿過墊片 (34a〜34d)鎖固於基座（！）第一固定面（丨丨）之螺孔 * (15a〜15d)内’又於十字型懸吊件（31)上表面固定有反 射鏡（35) ’藉以使光學感測裝置（2)之聚焦光源可以直 接投射至十字型懸吊件（31)表面之反射鏡（35)上，又 於十字型懸吊件（31)的下表面設一圓柱形導桿（36)， 導桿（36)末端具設探針（37)，以當有探針（37)與待測 物（5)之表面接觸時，該懸吊裝置（3)將會產生位移變 〇 化量，並藉光學感測裝置（2)偵測反射鏡（35)上之反射 光’做光束聚焦訊號處理。 挾持裝置（4)，係由一活動滾柱（41)及二萬向滾珠（42) 構成，該活動滾柱（41)被固定在基座（1)的第三固定面（13) 上，而該二萬向滾珠（42)則被固定在於基座（丨）之第四固 定面（14)上所具之v形缺槽（141)的二端面上，且該活動滾 柱（41)與二萬向滚珠（42)恰與前述之圓柱形導桿（祁）之 周壁相抵，以限制導桿（36)僅能作上下方位的位移動作。 〇 本發明之實施使用時，請再一併參第一、二、三、 =、五圖，該懸吊裝置（3)係固定於基座（1)的第一固 定面（11)上，而光學感測裝置（2)則固定在基座（1)的 第二岐（12)上，並位於相對懸吊裝置（3)的上方處， 挾持裝置（4)係固定在基座（1)之第三及第四固定面 (13)、（14)間，光學感測裝置（2)之位移量測探頭（21) 可投射雷射聚焦光束至固定於十字型懸吊件（31)上方 的反射鏡（35)表面上，而反射鏡（35)之反射光再投射 於光學感測裝置（2)之四象限光感測器（27)，者導桿 (36)末端上之探針（37)接觸待測物（5)表面時，ς會帶 200935028 動導桿（36)產生相對待測物（5)表面凹凸狀態之上下 運動，而因導桿（36)與十字型懸吊件（31)連設，且十 • 字型懸吊件（31)受制於四根微細樑（32a〜32d)，使十字 型懸吊件（31)產生微小的位移變化量，此微小的位移 變化量是經由四象限光感測器（27)量測到的聚焦誤差 訊號〔即四象限之（j +Ε) —(n+IV)〕，經聚焦誤差處 理電路後求得。 其中位移量測探頭（21)之投射光束係由雷射二極 Ο 體（22)射向分光鏡（23)，雷射光束在通過分光鏡（23) 後，經過一反射鏡（24)、準直鏡（25)後成平行光束， 再經由物鏡（26)聚焦在反射鏡（35)上，而反射光束則 循原路徑經物鏡（26)、準直鏡（25)、反射鏡（24)、分 光鏡（23)後而投射至四象限光感測器（27)上。 本發明於光學感測裝置（2)的光學聚焦之原理，係 利1聚焦量測方法中之像散法，所謂像散法是指成像 時橫向與縱向的成像位置不同，因此造成像點的失 ❹ 真，利用此一像散特性做為量測的依據，所以當反射 鏡（35)表面的位置在物鏡（26)的聚焦平面上，反射光 經由準直鏡（25)、反射鏡（24)與分光鏡（23)會在四象 限光感測器（27)上形成一個圓形區域；若反射鏡（35) 表面位於物鏡（26)的非聚焦區域，則經準直鏡（25)、 反射鏡（24)與分光鏡（23)的反射光在四象限光感測器 (2 7 )上形成的形狀則為糖圓形。 即當反射鏡（35)位於如第五圖A所示的非聚焦位 置時=經準直鏡（25)、反射鏡（24)與分光鏡（23)後的 反射光在四象限光感測益（27)會形成錯直橢圓形光點 200935028 【以下併參第六圖】’·四象限光感測器（27)訊號經由 焦誤差處理電路處理後為正電壓輸出【以下併參 · . 圖】；當反射鏡⑽位於第五_所示的聚焦位置時， 反射光在四象限光感測器（27)上形成正圓形光點，四 象限光感測器（27)訊號經聚焦誤差處理電路後為 愿輸出；當反射鏡（35)位於第五圖c的非聚焦位置時$ 反射光在四象限光感測器（27)上形成水平橢圓光點， 四象限光感測器（27)訊號經聚焦誤差訊號處理電路的 ❹ 處理後為負電壓輸出；因此第五圖中A、B與C之區域 分別對應第六圖之A、B與C三個訊號處理圖形，此三 個訊號處理圖形的電壓輸出構成第七圖之聚焦:· 、線〔橫軸為聚焦位置’、縱軸為聚焦誤差電壓訊號'〕，此 聚焦誤差曲線即為鮮量測法#最重要的S曲線，而 此S曲線中的線性區域可作為位移量測之用。 因此本發明乃利用此光學感測裝置（2)之特性，將 其應用於量測懸吊裝置（3)之位移運動量，將光學感測 ❹ 裝置（2)之位移量測探頭（21)與懸吊裝置（3)上方反射 鏡（35)表面的距離恰好切入s曲線的線性區域内，當 懸吊裝置（3)移動時，根據聚焦誤差的輸出電壓，便可 得到懸吊裝置（3)的位移變化量。 而懸吊裝置（3)之設計原理【參第一、二、三、四 圖】，係採對稱式的結構設計，此裝置原本具有六個自 由度仁因四根微細樑（32a〜32d)固定，故可溢止懸吊 裝置（3)夺χ、γ軸方向的位移以及z軸方向的旋轉， 再加上挾持裝置（4)之活動滾柱（41)與二萬向滾珠（42) 恰與懸吊裝置（3)之圓柱形導桿（36)之周壁相抵，限制了 10 200935028 導桿（36)僅能作上下方位的位移動作，使該懸吊裝置（3) 僅具上下移位的單一自由度；而懸吊裝置（3)所剩餘的 一個上下位移運動自由度的運動量，可由光學感測裝 置（2)量得。即為使懸吊裝置（3)具有抑制三自由度的 特性，懸吊裝置（3)是採用十字型懸吊件（31)搭配所設 計四根微細樑（32a〜32d)的長、寬、厚度，利用微細樑 (32a〜32d)於各軸向上剛性的差異，進而產生一固定自 由度的效果，此種對稱式結構設計方式，不僅可使整 體於組裝上的誤差降低，避免不對稱設計所造成的系 統誤差，更由於結構設計簡單，使得製造加工容易， 降低生產成本。 在量測時，首重光學感測之接觸式量測探頭的追蹤性 (trackability)，即指探針（37)在一定的量測速度下，該 探針（37)保持接觸待測物（5)表面的能力。另外，挾持裝 置（4)在設計上，因探針（37)沿著待測物（5)表面垂直運動 時，會有摩擦力效應產生【如第八圖所示】，故需有一最 小彈力克服摩擦力，因此可將運動方程式表示如下： ηιϊ = Fs - 土 μ!\ί + mg . ) 其中m為探針（37)結構質量；έ為加速度；Fs為彈力； Fv為探針（37)接觸於待測物（5)表面所產生的垂直反應力 (vertical reaction force) ; //N 為摩擦力，其中 // 為 銘材質的圓柱導桿（36)與鉻鋼萬向滾珠（42)之間的滾動 摩擦係數，近似值約為0. 001，N為正向挾持力；mg為結 構質量的重力。 當探針（37)接觸待測物（5)表面以進行量測時，探針 (37)無論是向上或向下移動，皆會有摩擦效應的產生，為 11 200935028 番，擦力影響探針（37)回復至原本的平衡位 > 一 ^ t界彈力（Fs—)克服摩擦力，其方程式可 ιΓ:κ^ΐ"^ΧΖι)+呢=烤’其中Ζι為設定克服摩擦力的 的探針（37)位置。過大的接觸力將會直接破 面，可表示成方程式，其中ζ2 為探針（37)絲面最大反應力的位置。200935028 IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a smuggling, smear, and smear instrument, which is the object of causing wear on the surface of the object to be tested. Contour and thickness, and not [previous technology] Ο 精密 The precision of the size of the machine industry is good, so the workpiece wheel is used for the measurement of the workpiece wheel = quality =: the precision of the industry is generally used as the industry Participate in China's No. 862_4 "Multi-Functional Light Patent Case, which uses the principle of laser light to measure the rods for different purposes. The displacement of the two rods is mm, and there are two sets of two rods for one-way high-precision displacement. For standard parts, such as block gauge, plug gauge comparison correction for two-way displacement, the probe can be replaced, and a mobile station can move on χ γ 2 , can be used for smooth surface contour, size step change = avDT) and pointer amount Table k correction ° two _ 棹 have a measuring force device to avoid the measurement of the device under test, however, because it is used as a laser to interfere with the damage. The relevant costs of measurement. Mussels, so the relative increase in China's No. 84,511,530 "aspherical wheel case, the measuring instrument is used to measure aspherical optical mirrors 」u" patented lens and aspheric plastic mirror 5 200935028. The measuring instrument is a two-piece flat glass Vt Fengdao instructor lever probe, lever 1 is the balance, another name ^ ruby probe and mirror. The ruby probe is in contact with the aspherical mirror. The two groups are purely (4) difficult to lateral (four) and longitudinal south degree change, and finally the two sets of displacements are optimized by the mathematical module 3 method to determine the aspheric parameters and shape errors. However, the above structure has the following shortcomings: 1. Although it depends on the H correction of the school (four) difference ❹ 极大 great error.疋疋仔在耆 2. The design of the lever probe, when measuring the amount of displacement change, the phenomenon of error occurs. [Invention] The inventor is immersed in the actual implementation of the above-mentioned existing structure, so it is the spirit of the tireless, and is improved by the rich practical experience of the special year, and According to the main purpose of the optical sensing contact measuring probe of the present invention, a low-cost, high-sensitivity contact optical sensing probe is provided for second-hand operation, such as surface profiler and surface roughness meter. In the field of precision mechanical measurement, it is necessary to achieve the purpose of measuring the surface contour of the object without causing wear on the surface of the object to be tested. The purpose and function of the optical sensing contact measuring probe of the present invention are achieved by the following technologies: comprising a base, an optical sensing device fixed on the base, and a hanging device, holding the The holding device of the guide rod of the suspension device; the design of the guide rod of the suspension device is controlled by the support device at three points., 200935028 = one-dimensional degree of freedom; the suspension is measured by the optical sensing device The displacement variation of the lifting device obtains a focus error signal, and the focus error signal can obtain the displacement amount of the suspension device relative to the base, thereby obtaining the surface contour and the thickness of the object to be tested. [Embodiment] For a more complete and clear disclosure of the technical content, the purpose of the invention and the effects thereof achieved by the present invention, the following is a detailed description, and please refer to the drawings and drawings: First, please refer to the first, second, third and fourth figures. The optical sensing contact measuring probe of the present invention comprises: a base (1) which is provided with a first fixing surface (11) and is spaced apart from each other The first fixing surface (11) is provided with a second fixing surface (12) extending upward and a third fixing surface (13) extending downward, and the opposite of the third fixing surface (13) A fourth fixing surface (14) is disposed at the portion; the first fixing surface (11) is provided with screw holes (15a to I5d). An optical sensing device (2) is fixed on the second solid surface (12) of the base (1), and the optical sensing device (2) is provided with a displacement measuring probe (21). As shown in the fifth figure, the internal components of the displacement measuring probe (21) are respectively provided with a laser diode (22), a beam splitter (23), a mirror (24), a collimating mirror (25), The objective lens (26) and the four-quadrant photo detector (27) (suspension device (3)' is fixed on the first fixing surface (11) of the base (1), The suspension device (3) is provided with a cross type suspension member (31) and four micro beams (32a to 32d), which are respectively many and not in the cross type suspension member ( 31) at the end of each rod, and the cross-shaped suspension member (31) and the micro-beams (32a to 32d) are disposed on the first fixed surface (11) of the 200935028 of the base (1) and are screwed ( 33a~33d) is locked in the screw hole* (15a~15d) of the first fixing surface (丨丨) through the spacer (34a~34d)' and the cross type suspension (31) A mirror (35) is attached to the upper surface to enable the optical sensing device (2) The focusing light source can be directly projected onto the mirror (35) on the surface of the cross type suspension (31), and a cylindrical guide rod (36) is disposed on the lower surface of the cross type suspension member (31). The probe (36) is provided with a probe (37) at the end, so that when the probe (37) is in contact with the surface of the object to be tested (5), the suspension device (3) will generate a displacement amount. And the optical sensing device (2) detects the reflected light on the mirror (35) to perform beam focusing signal processing. The holding device (4) is composed of a movable roller (41) and a 20,000 ball (42) The movable roller (41) is fixed on the third fixing surface (13) of the base (1), and the two-way ball (42) is fixed on the fourth fixing surface of the base (丨). (14) on the two end faces of the v-shaped notch (141), and the movable roller (41) and the omnidirectional ball (42) are opposite to the peripheral wall of the cylindrical guide rod (祁). The restriction guide (36) can only be displaced in the up and down direction. 使用 When using the invention, please refer to the first, second, third, and fifth diagrams together. The suspension device (3) is fixed. Yu Ji (1) on the first fixed surface (11), and the optical sensing device (2) is fixed on the second cymbal (12) of the base (1) and located above the opposite suspension device (3) The holding device (4) is fixed between the third and fourth fixing surfaces (13) and (14) of the base (1), and the displacement measuring probe (21) of the optical sensing device (2) can project the laser Focusing the beam onto the surface of the mirror (35) fixed above the cross-type suspension (31), and the reflected light of the mirror (35) is projected onto the four-quadrant light sensor of the optical sensing device (2) ( 27), when the probe (37) on the end of the guide rod (36) contacts the surface of the object to be tested (5), the 350 belt will bring the 200935028 moving guide rod (36) to generate a surface unevenness relative to the surface of the object to be tested (5). Movement, and the guide rod (36) is connected with the cross type suspension (31), and the ten-shaped suspension member (31) is subject to four micro beams (32a to 32d), so that the cross type suspension member (31) A small amount of displacement change is generated, which is a focus error signal measured by a four-quadrant photosensor (27) (ie, four quadrants (j + Ε) - (n + IV) ], focused Obtained after the difference processing circuit. The projection beam of the displacement measuring probe (21) is directed by the laser diode (22) to the beam splitter (23), and after passing through the beam splitter (23), the laser beam passes through a mirror (24). The collimating mirror (25) is followed by a parallel beam, and then focused on the mirror (35) via the objective lens (26), and the reflected beam follows the original path through the objective lens (26), the collimating mirror (25), and the mirror (24). ), the beam splitter (23) is then projected onto the four-quadrant light sensor (27). The principle of optical focusing of the optical sensing device (2) of the present invention is an astigmatism method in the focusing measurement method. The so-called astigmatism method refers to different imaging positions in the horizontal and vertical directions during imaging, thus causing image points. The astigmatism is used as the basis for measurement, so when the position of the surface of the mirror (35) is on the focal plane of the objective lens (26), the reflected light passes through the collimating mirror (25) and the mirror ( 24) The beam splitter (23) forms a circular area on the four-quadrant light sensor (27); if the mirror (35) surface is located in the unfocused area of the objective lens (26), the collimating mirror (25) The shape of the reflected light of the mirror (24) and the beam splitter (23) on the four-quadrant light sensor (27) is a sugar circle. That is, when the mirror (35) is in the unfocused position as shown in FIG. AA = the reflected light after passing through the collimating mirror (25), the mirror (24) and the beam splitter (23) in the four-quadrant light sensing Yi (27) will form a staggered elliptical spot 200935028 [Following the sixth figure] '·The four-quadrant photosensor (27) signal is processed by the focal error processing circuit and is a positive voltage output [Follow-up. When the mirror (10) is in the focus position shown in the fifth_, the reflected light forms a perfect circular spot on the four-quadrant light sensor (27), and the four-quadrant light sensor (27) signal is focused. The error processing circuit is followed by the output; when the mirror (35) is in the unfocused position of the fifth figure c, the reflected light forms a horizontal elliptical spot on the four-quadrant light sensor (27), and the four-quadrant light sensor (27) The signal is processed by the focus error signal processing circuit and is negative voltage output; therefore, the areas of A, B and C in the fifth figure correspond to the three signal processing patterns of A, B and C of the sixth figure, respectively. The voltage output of the signal processing pattern constitutes the focus of the seventh picture: ·, the line [the horizontal axis is the focus position', vertical The axis is the focus error voltage signal '], and this focus error curve is the most important S curve of the fresh measurement method, and the linear region in the S curve can be used as the displacement measurement. Therefore, the present invention utilizes the characteristics of the optical sensing device (2) and applies it to the displacement movement amount of the measuring suspension device (3), and the displacement measuring probe (21) of the optical sensing device (2) is The distance of the surface of the mirror (35) above the suspension device (3) is cut into the linear region of the s-curve. When the suspension device (3) moves, the suspension device can be obtained according to the output voltage of the focus error (3). The amount of displacement change. The design principle of the suspension device (3) [refer to the first, second, third and fourth figures] is a symmetrical structural design. The device originally has six degrees of freedom and four fine beams (32a to 32d). Fixed, so it can overflow the suspension device (3), the displacement in the γ-axis direction and the rotation in the z-axis direction, plus the movable roller (41) and the omnidirectional ball (42) of the holding device (4) Just offsets the peripheral wall of the cylindrical guide rod (36) of the suspension device (3), limiting the 10 200935028 guide rod (36) can only be displaced in the up and down direction, so that the suspension device (3) only moves up and down The single degree of freedom of the bit; and the amount of motion of the left and right displacement motion degrees of freedom remaining by the suspension device (3) can be measured by the optical sensing device (2). That is, in order to make the suspension device (3) have the characteristic of suppressing three degrees of freedom, the suspension device (3) adopts the cross type suspension (31) and the length and width of the four fine beams (32a to 32d) designed. The thickness is determined by the difference in rigidity between the micro-beams (32a to 32d) in each axial direction, thereby producing a fixed degree of freedom. This symmetrical structural design not only reduces the overall error in assembly, but also avoids asymmetric design. The system error caused by the simple design makes the manufacturing process easy and reduces the production cost. In the measurement, the trackability of the first optical sensing contact measuring probe means that the probe (37) is kept in contact with the object to be tested at a certain measuring speed ( 5) The ability of the surface. In addition, the holding device (4) is designed to have a frictional effect when the probe (37) moves vertically along the surface of the object to be tested (5) [as shown in the eighth figure], so a minimum elastic force is required. To overcome the friction, the equation of motion can be expressed as follows: ηιϊ = Fs - soil μ!\ί + mg . ) where m is the structural quality of the probe (37); έ is the acceleration; Fs is the elastic force; Fv is the probe (37) ) The vertical reaction force generated by contact with the surface of the object to be tested (5); //N is the friction force, where // is the cylindrical guide rod (36) of the name material and the chrome steel universal ball (42) The rolling friction coefficient between the two is approximately 0.001, N is the positive holding force; mg is the gravity of the structural mass. When the probe (37) contacts the surface of the object to be tested (5) for measurement, the probe (37) will have a frictional effect whether it moves up or down, which is 11 200935028. The needle (37) returns to the original balance position > a ^ t boundary elastic force (Fs -) overcomes the friction force, the equation can be ιΓ: κ^ΐ"^ΧΖι)+呢=烤' where Ζι is set to overcome friction Probe (37) position. Excessive contact force will be directly broken and can be expressed as an equation, where ζ2 is the position of the maximum reaction force of the probe (37).
❹ 其中一根微細樑（32a~32d)的彈性係數計算方式為： k/4 24EI/L、1智/12，其巾L、匕、h分別為微細樑 (32a〜32d)的長、寬、高。 假設乂探針（37)沿著簡易正弦表面（sinusoidally surface)則進，糟由參考自由振動位移響應，可以求得探 針（37)的垂直位移，其之方程式（2)為： 2(t) = ^sin(fi?〇 (2) 其中d :正弦表面的振幅；Θ :探針（37)沿著待測物 (5)表面量測時所產生的振動頻率，此振動頻率可藉由正 弦表面的空間波長（Spatial wavelength)，與進給速度 (traverse speed)求得，如方程式（3)所示： 又 (3) 將方程式（2)、（3)代入方程式（1)。當探針ο?)將要 離開待測物（5)表面時的瞬間，探針（37)是呈向下移動， 可表示為方程式（4): ,2πν 2 j _ J^s + 又 ,m (4) 經由上述所推導的動態方程式，可先設計好懸吊裝置 (3)之質量及量測接觸力，再決定欲設計的進給速度v與空 間波長;i，而最小的空間波長可由使用的探針（37)半 12 200935028 ^。將進給速度v、空間波長义代入方程式（3)求得量測的 最大振動頻率，此振動頻率須小於或等於懸吊裝置的 . 第一自然頻率，原因在於避免發生共振的現象而破壞待測 物（5)表面與探針（37)，如此即可設計出四根微細樑 (32a〜32d)的彈性係數。 利用ANSYS有限元素軟體來分析光學感測之接觸式量 測探頭適當的挾持位置，使探針（37)的X、γ方向位移小 至不影響量測精度。所分析的懸吊裝置（3)包括微細樑 〇 (32a〜32d)、十字型懸吊件（31)、導桿（36)、探針（37)， 皆使用10節點92四面元素，分析所設定的參數都和表1〜4 一樣，模擬的接觸力分別設為lmN和0. 5mN，另藉由ANSYS 摒除X、Y方向的位移來假設三點挾持的位置。如第九圖 所示，分別施予lmN和0.5mN的接觸力在<9=0。〜90。和 ρ=0°~90°，觀看十字型懸吊件（31)中心與探針（37)底端 的三方向位移，表1為微細樑（32a〜32d)、表2為十字型 懸吊件（31)及導桿（36)，其中wf是連結微細樑（32a〜32d) 的十字变懸吊件（31)的寬；b是探針（37)的中心到微細樑 (32a~32d)的距離、表3及表4分別為接觸式光學量測探 頭的導桿（36)和探針（37)的尖端材料參數。表5和表β為 接觸力lmN實際分析的結果，表7和表8為接觸力0· 5mN 實際分析的結果。 當挾持位置為距離十字型懸吊件（31)中心12.5mm 時，表5和表6確定了懸吊裝置（3)搭配挾持裝置（4)避免 了其餘方向的位移，其X轴方向和Y轴方向最大位移只有 10nm，此外’使用接觸力lmN在垂直90°時’探針（37)的 位移為5.91#m。 ' 13 200935028 Ο弹性 The elastic modulus of one of the micro-beams (32a~32d) is calculated as: k/4 24EI/L, 1 智/12, and the length L and width of the micro-beams (32a~32d) are respectively L, 匕 and h. ,high. Assuming that the 乂 probe (37) is along a simple sinusoidally surface, the vertical displacement of the probe (37) can be obtained by reference to the free vibration displacement response, and the equation (2) is: 2 (t ) = ^sin(fi?〇(2) where d : the amplitude of the sinusoidal surface; Θ : the vibration frequency produced by the probe (37) along the surface of the object to be tested (5), which can be obtained by The spatial wavelength of the sinusoidal surface is obtained from the traverse speed, as shown in equation (3): (3) Substituting equations (2) and (3) into equation (1). When the needle ο?) is about to leave the surface of the object to be tested (5), the probe (37) is moved downward, which can be expressed as equation (4): , 2πν 2 j _ J^s + again, m (4 Through the above-mentioned dynamic equation, the mass of the suspension device (3) can be designed and the contact force measured, and then the feed velocity v and the spatial wavelength to be designed are determined; i, and the smallest spatial wavelength can be used. Probe (37) Half 12 200935028 ^. The feed velocity v and the spatial wavelength are substituted into equation (3) to obtain the measured maximum vibration frequency, which must be less than or equal to the first natural frequency of the suspension device, because the phenomenon of avoiding resonance is destroyed. The surface of the object (5) is probed with the probe (37), so that the elastic coefficients of the four micro-beams (32a to 32d) can be designed. The ANSYS finite element software is used to analyze the proper holding position of the optical sensing contact probe, so that the X and γ directions of the probe (37) are small enough to not affect the measurement accuracy. The suspension device (3) analyzed includes micro-beams (32a to 32d), cross-type suspensions (31), guide rods (36), and probes (37), all using 10 nodes 92 four-sided elements, analysis institute The set parameters are the same as in Tables 1 to 4. The simulated contact forces are set to lmN and 0.5 mN, respectively, and the displacement of the X and Y directions is removed by ANSYS to assume the position of the three points. As shown in the ninth figure, the contact force applied to lmN and 0.5 mN, respectively, was <9=0. ~90. And ρ = 0 ° ~ 90 °, see the three-way displacement of the center of the cross-type suspension (31) and the bottom end of the probe (37), Table 1 is the micro-beam (32a ~ 32d), Table 2 is the cross-type suspension (31) and a guide rod (36), wherein wf is the width of the cross-change suspension (31) connecting the micro-beams (32a to 32d); b is the center of the probe (37) to the micro-beam (32a to 32d) The distances, Tables 3 and 4 are the tip material parameters of the guide (36) and probe (37) of the contact optical measuring probe, respectively. Table 5 and Table β are the results of the actual analysis of the contact force lmN, and Tables 7 and 8 are the results of the actual analysis of the contact force of 0.5 mN. When the holding position is 12.5 mm from the center of the cross-type suspension (31), Tables 5 and 6 confirm that the suspension device (3) is matched with the holding device (4) to avoid displacement in the remaining directions, and its X-axis direction and Y The maximum displacement in the axial direction is only 10 nm, and in addition, the displacement of the probe (37) is 5.91 #m when the contact force lmN is 90° vertically. ' 13 200935028 Ο
請參第十圖，其為光學感測之接觸式量測探頭（Α)的 實驗架設示意圖，光學感測裝置（2)是置於懸吊裝置（3)之 上，利用調動精密平台（B)由微力感測器【standard deviation 5//m，i.e. 12· 5mV/2.5mV Mn-1】（C)給予探 針（37)—力lmN，觀察光學感測之接觸式量測探頭（A)的光 學感測裝置（2)與微力感測器（C)輸出的失焦訊號（E)，經 過訊號擷取卡【National Instruments PCI-6013 16bit DAQ-Card】（D)擷取，並用電腦（F)不斷的即時紀錄，實驗 的過程為重複操作9次，可得到如第十一圖所示接觸力與 探針（37)位移的線性關係圖。 0 為了求得光學感測之接觸式量測探頭（A)的共振頻 實驗架設如第十二圖所示，使用頻譜分析儀（G)輸出 掃瞒式正弦波訊號，經功率放大器（H)將訊號放大後驅動 奈米定位平台（I)運動，激振光學感測之接觸式量測探頭 (A)的垂直軸’並將光學感測裝置（2)的失焦訊號（E)輸入 頻譜分析儀（G) ’由頻譜分析儀（G)每隔0.25Hz記錄下探 針（37)的振幅比，繪製成第十三圖。由圖中可得出系統之 第一自然共振頻率約在206Hz，自然共振頻率的理論值約 為210 Hz ’實驗值跟理論值做比較相差丨.9%。 光學感測之接觸式量測探頭（A)移量測實驗架設如第 :四圖所示，在實驗中，光學感測之接觸式量測探頭（A) 是架設在三軸奈米定位平台（I)，且奈米定位平台（I)的位 移量測是直接經由每軸内部的線性變位量測計（Linear riable Differentiai Transducers，LVDT)所量測 ’ LVDT 之量測解析度小於lnm。 14 200935028 利用函數產生器（J)產生一 pul se函數，直接驅動奈 米定位平台（I)的Z軸向，並用電腦（F)即時儲存光學感測 之接觸式量測探頭（A)的失焦訊號（E)和奈米定位平台（1) 的LVDT訊號，重複量測九次，第十五圖為重複量測9次 的實驗結果，橫軸為奈米定位平台（I)的位移，縱轴為光 學感測之接觸式量測探頭（A)的位移，經由9次的量測結 果可得光學感測之接觸式量測探頭（A)的量測誤差為 53. lnm，非線性誤差約為〇. 9%。 經由以上的實施說明，可知本發明之「光學感測之接 觸式量測探頭」至少具有如下所列之各項優點： 1. 本發明係藉由懸吊裴置與挾持裝置的組合達成一自由 度的結構設計，其中懸吊裝置之十字塑懸吊件摒除X軸 向、Y軸向的位移自由度和Z軸向的旋轉自由度’挾持 裝置則摒除X軸向、Y軸向的偏擺自由度，據此以利於 進行待測物之表面輪廓的量測。 2. 本發明係利用一自由度光學感測之接觸式量測探頭’其 光學聚焦量測方式具有極高位的移解析度，且擁有不易 受到環境因素影響〔例如：容電雜訊（triboelectric noise)、電磁干擾、濕度、溫度變化...等〕之光學量測 特性，故可確實量測出探針的垂直位移。 3·本發明之光學感測之接觸式量測探頭係由光學量測裝 置、懸吊裝置及挾持裝置配合基座設置而成，其具有成 本低與高量測精度之特色。 綜上所述’本發明實施例確能達到所預期之使用功 效，又其所揭露之具體構造，不僅未曾見諸於同類產品 中’亦未曾公開於申請前，誠已完全符合專利法之規定與 15 200935028 要求，爰依法提出發明專利之申請，懇請惠予審查，並賜 准專利，則實感德便。 Ο ❹ 16 200935028 【圖式簡單說明】 第一圖：本發明光學感測之接觸式量測探頭的組合側視示 . 意圖 第二圖：本發明光學感測之接觸式量測探頭的局部立體分 解圖 第三圖：本發明光學感測之接觸式量測探頭的局部立體組 合圖 第四圖：本發明光學感測之接觸式量測探頭的局部組合俯 ❹ 視圖 第五圖：本發明之光學量測裝.置示意圖 第六圖：本發明之光學量測裝置之四象限感測器的訊號處 理示意圖 第七圖：本發明之光學量測裝置之四象限感測器的s-曲線 第八圖：本發明光學感測之接觸式量測探頭的運動示意圖 第九圖：本發明之光學量測裝置和懸吊裝置之自由體圖 第十圖：本發明光學感測之接觸式量測探頭的實驗架設示 意圖 i 第十一圖：本發明光學感測之接觸式量測探頭其接觸力與 探針位移的線性關係圖 第十二圖：本發明光學感測之接觸式量測探頭動態量測的 實驗架設示意圖 第十三圖：本發明光學感測之接觸式量測探頭的自然頻率 響應圖 第十四圖：本發明光學感測之接觸式量測探頭位移量測實 驗架設示意圖 第十五圖：本發明光學感測之接觸式量測探頭位移量測結 17 200935028 果曲線圖 【主要元件符號說明】Please refer to the tenth figure, which is a schematic diagram of the experimental setup of the optical sensing contact measuring probe (Α). The optical sensing device (2) is placed on the suspension device (3) and utilizes the transfer precision platform (B). The probe (37)-force lmN is applied by a micro force sensor [standard deviation 5//m, ie 12·5mV/2.5mV Mn-1] (C), and the optical sensing contact measuring probe (A) is observed. The optical sensing device (2) and the defocus signal (E) output by the micro-force sensor (C) are captured by a signal acquisition card [National Instruments PCI-6013 16bit DAQ-Card] (D) and used by a computer (F) Continuous on-the-fly recording, the experimental process is repeated 9 times, and the linear relationship between the contact force and the displacement of the probe (37) as shown in Fig. 11 can be obtained. 0 In order to obtain optical sensing, the resonant frequency experiment of the contact measuring probe (A) is set up as shown in Fig. 12, and the spectrum analyzer (G) is used to output the sweeping sine wave signal through the power amplifier (H). The signal is amplified to drive the nano positioning platform (I) to excite the vertical axis of the optical sensing contact measuring probe (A) and to input the defocus signal (E) of the optical sensing device (2) into the spectrum. Analyzer (G) 'The amplitude ratio of the probe (37) recorded by the spectrum analyzer (G) every 0.25 Hz is plotted as the thirteenth image. It can be concluded from the figure that the first natural resonance frequency of the system is about 206 Hz, and the theoretical value of the natural resonance frequency is about 210 Hz. The experimental value differs from the theoretical value by 丨.9%. The optical sensing contact measuring probe (A) is measured and set up as shown in the figure: Figure 4. In the experiment, the optical sensing contact measuring probe (A) is mounted on the three-axis nano positioning platform. (I), and the displacement measurement of the nanopositioning platform (I) is measured directly by Linear riable Differentiai Transducers (LVDT) inside each axis. The measurement resolution of the LVDT is less than 1 nm. 14 200935028 Using function generator (J) to generate a pul se function, directly drive the Z axis of the nano positioning platform (I), and use the computer (F) to instantly store the loss of the optical sensing contact measuring probe (A) The LVDT signal of the focus signal (E) and the nano positioning platform (1) was repeated for nine times. The fifteenth figure is the result of repeated measurement of 9 times, and the horizontal axis is the displacement of the nano positioning platform (I). The vertical measurement is the displacement of the optically sensed contact measuring probe (A). The measurement error of the optically sensed contact measuring probe (A) is 53. lnm, nonlinear The error is approximately 〇. 9%. Through the above description, it can be seen that the "optical sensing contact measuring probe" of the present invention has at least the following advantages: 1. The present invention achieves a freedom by the combination of the suspension device and the holding device. Degree of structural design, in which the cross-shaped suspension of the suspension device eliminates the X-axis, the Y-axis displacement degree of freedom and the Z-axis rotation degree of freedom. The holding device eliminates the X-axis and Y-axis yaw. Degree of freedom, according to which it is advantageous to measure the surface profile of the object to be tested. 2. The present invention utilizes a one-degree-of-freedom optical sensing contact measuring probe whose optical focusing measurement method has a very high degree of shift resolution and is not susceptible to environmental factors (eg, triboelectric noise). ), electromagnetic interference characteristics of electromagnetic interference, humidity, temperature change, etc., so the vertical displacement of the probe can be reliably measured. 3. The optical sensing contact measuring probe of the present invention is formed by an optical measuring device, a suspension device and a holding device with a base, and has the characteristics of low cost and high measuring accuracy. In summary, the embodiment of the present invention can achieve the intended use effect, and the specific structure disclosed therein has not been seen in the same product, nor has it been disclosed before the application, and has fully complied with the provisions of the Patent Law. With the requirements of 15 200935028, if you apply for an invention patent in accordance with the law, you are welcome to review it and grant a patent. Ο ❹ 16 200935028 [Simple description of the diagram] The first figure: the combined side view of the optical sensing contact measuring probe of the present invention. Intent second figure: partial stereoscopic of the optical sensing contact measuring probe of the present invention 3D exploded view of the optical sensing of the contact-measuring probe of the present invention. FIG. 4 is a partial view of the optical sensing contact measuring probe of the present invention. FIG. Optical measurement device. FIG. 6 is a schematic diagram of signal processing of a four-quadrant sensor of the optical measuring device of the present invention. FIG. 7 is a s-curve of a four-quadrant sensor of the optical measuring device of the present invention. 8: Schematic diagram of the movement of the optical sensing contact measuring probe of the present invention. FIG. 9 is a free body diagram of the optical measuring device and the hanging device of the present invention. FIG. 10 is a contact measuring method for optical sensing of the present invention. Schematic diagram of the experimental setup of the probe i. Fig. 11: Linear relationship between contact force and probe displacement of the optical sensing contact probe of the present invention. Twelfth view: Contact measurement of optical sensing of the present invention Schematic diagram of the experimental setup of the dynamic measurement. Thirteenth diagram: Natural frequency response diagram of the contact measurement probe of the optical sensing of the present invention. FIG. 14 is a schematic diagram showing the erection of the displacement measurement probe of the optical sensing of the present invention. The fifteenth figure: the displacement measurement of the contact type measuring probe of the optical sensing of the present invention 17 200935028 Fruit curve diagram [main component symbol description]
(1) 基座 (11) 第一固定面 (12) 第二固定面 (13) 第三固定面 (14) 第四固定面 (141) V形缺槽 (15a〜15d)螺孔 (2) 光學感測裝置 (21) 位移量測探頭 (22) 雷射二極體 (23) 分光鏡 (24) 反射鏡 (25) 準直鏡 (26) 物鏡 (27) 四象限光感測器 (3) 懸吊裝置 (31) 十字型懸吊件 (32a~32d) 微細樑 (33a〜33d)螺絲 (34a~34d) 墊片 (35) 反射鏡 (36) 導桿 (37) 探針 (4) 挾持裝置 (41) 活動滚柱 (42) 萬向滚珠 (5) 待測物 (B) 調動精密平台 (A) 光學感測之接觸式量測探頭 (C) 微力感測器 (D) 訊號擷取卡 (E) 失焦訊號 (F) 電腦 (G) 頻譜分析儀 (H) 功率放大器 ⑴ 奈米定位平台 (J) 函數產生器 18(1) Base (11) First fixing surface (12) Second fixing surface (13) Third fixing surface (14) Fourth fixing surface (141) V-shaped notch (15a to 15d) screw hole (2) Optical sensing device (21) Displacement measuring probe (22) Laser diode (23) Beam splitter (24) Mirror (25) Collimating mirror (26) Objective lens (27) Four-quadrant light sensor (3 Suspension device (31) Cross suspension (32a~32d) Micro beam (33a~33d) Screw (34a~34d) Gasket (35) Mirror (36) Guide rod (37) Probe (4) Holding device (41) movable roller (42) universal ball (5) object to be tested (B) transfer precision platform (A) optical sensing contact measuring probe (C) micro force sensor (D) signal 撷Card Acquisition (E) Defocus Signal (F) Computer (G) Spectrum Analyzer (H) Power Amplifier (1) Nano Positioning Platform (J) Function Generator 18