200934706 九、發明說明 【發明所屬之技術領域】 本發明是關於在預定的區域內 搬運車系統，尤其是關於具備除去 塵埃之除塵裝置的搬運車系統。 【先前技術】 以往，在預定的區域內，具有 人搬運車、高架行走車及有軌道台 的系統的搬運車系統。 例如存在有具備作爲搬運車的 庫，控制其動作的搬運車系統。 該自動倉庫中，設置作爲保管 棚架的載架。並設置有站，該站是 高式起重機的其他搬運車用的物品 堆高式起重機到載架的預定棚 軌道上，使載放物品的昇降台昇降 藉此，在昇降台與載架或站之 品搬運是藉著與堆高式起重機不同 上述自動倉庫爲收納電路基板 場合。此時，自動倉庫內的空氣必 〇 因此，也揭示有自動倉庫內的 技術（例如參閱專利文獻1 )。 使用搬運車搬運物品的 該預定區域內空氣中的 使用堆高式起重機、無 車等搬運車來搬運物品 堆高式起重機的自動倉 部的具有多數物品收納 將物品從載架移載到堆 移載處。 架，或者站爲止行走在 ，退出滑動式叉架。 間移載物品。站間的物 的搬運車進行。 等需高度防塵之製品的 須要保持在清潔的狀態 空氣保持著清潔狀態的 -4- 200934706 根據此一技術，在自動倉庫的載架上複數設置有所謂 精瀘器單元（以下’稱「FFU」）的供給清潔空氣的裝置 。藉此’維持自動倉庫的潔淨度（清潔度）。 〔專利文獻1〕日本特開2005-231774號公報 【發明內容】 〔發明所要解決的課題〕 @ 在此’如上述的自動倉庫，使用搬運車搬運貨物的預 定區域中，舉例灰塵（以下，也有僅稱爲「塵」）在空氣 中漂浮的要因之一進行搬運車的移動。 具體而言，搬運車移動產生的風等所捲起的灰塵等漂 浮在空氣中。因此，搬運車越是迅速移動，越會導致空氣 中更多灰塵的漂浮，逐漸失去其潔淨度。 因此，FFU等除塵裝置設置在自動倉庫等預定區域的 場合，即使搬運車以最大速度移動的場合，可決定除塵裝 φ 置的空氣供給量以維持其潔淨度，並維持其供給量。 亦即，在預定區域內，藉著除塵器供給對應搬運車最 大速度的一定風量。藉此，維持著預定區域內的空氣潔淨 度。 但是，搬運車並不一定經常是以最大速度移動。因此 ，也存在有供給未來所不需的風量的場合。 又，以供給所需的量以上的風量爲要因，會有因爲收 納物及搬運物帶電’使得該物品因靜電而導致破損的場合 。並且，也會有收納物及搬運物容易附著灰塵等的問題。 200934706 當然，搬運車經常地以低速移動時，可抑制因除塵裝 置產生的風量。但是，此時會降低物品的收納及移動等的 作業效率，並非理想的解決方法。 本發明考慮上述習知的課題，提供一種在預定區域內 使用搬運車搬運物品的搬運車系統，可有效維持預定區域 內的潔淨度的搬運車系統爲目的。 Φ 〔解決課題用的手段〕 爲了解決上述習知的課題，本發明的搬運車系統，具 備：在預定區域內搬運物品的搬運車；利用風扇將清潔的 空氣供給上述預定區域內的除塵裝置；及控制上述除塵裝 置，使得上述搬運車的移動速度較預定速度緩慢的場合， 上述除塵裝置對於預定區域內之清潔空氣的單位時間平均 的供給量少於上述搬運車的移動速度爲上述預定速度的場 合的控制裝置。 φ 根據此一構成，搬運車的移動速度與預定速度比較形 成較緩慢的場合，減少除塵裝置單位時間平均的清潔空氣 的供給量。 藉此，搬運車轉移到預定的低速移動狀態時，或者搬 運車停止的場合，即隨著搬運車的移動減少灰塵上揚量的 場合，除塵裝置同時反應移轉移到低速作動。 因此’根據本發明的搬運車系統，可適度維持著預定 區域內的潔淨度，並且可刪減除塵裝置的耗費電力。並可 刪減不需要的風量，而可抑制風爲起因導致靜電造成物品 -6- 200934706 破損的可能性，及灰塵對於物品的附著量。 並且，上述控制裝置控制使上述除塵裝置減緩上述風 扇的旋轉速度，減少上述單位時間平均的供給量。 又，上述除塵裝置具有包含上述風扇的複數風扇，上 述控制裝置也可以控制使得上述除塵裝置停止上述複數風 扇中的1以上風扇的旋轉，減少上述除塵裝置的上述單位 時間平均的供給量。 _ 另外，上述控制裝置也可以使得上述除塵裝置在預定 〇 的期間停止上述風扇的旋轉之後再啓動上述風扇的旋轉， 以減少上述除塵裝置的上述單位時間平均的供給量。 如上述，藉著對預定區域內供給清潔空氣用的風扇旋 轉速度、作動個數及作動時間中的至少其之一的變更，可 以對應搬運車移動速度的最適度値調整除塵裝置的單位時 間平均的空氣供給量。 又，上述控制裝置也可以控制上述除塵裝置，使上述 0 搬運車的移動速度越是緩慢，上述除塵裝置所供給上述單 位時間平均的供給量越是減少。 藉此，隨著搬運車的移動速度的減緩，使除塵裝置的 單位時間平均的空氣供給量多階段地下降。即可更爲有效 地使除塵裝置作動。 又，上述搬運車的移動速度在上述預定速度以上的場 合，上述控制裝置更控制上述除塵裝置，使得朝著上述預 定區域內單位時間平均的供給量比上述搬運車的移動速度 小於上述預定速度時朝著上述預定區域內的清潔空氣的單 200934706 位時間平均的供給量變多。 藉此，例如可運用以搬運車最大速度的一半左右的速 度爲基準値，只要在基準値以上即可使除麈裝置高速作動 ，小於基準値時即使得除塵裝置低速作動。 又，上述控制裝置，也可以具有：取得顯示對上述搬 運車要求物品的搬運量之要求搬運量的取得部，及上述取 得部所取得上述要求搬運量與臨界値比較的比較部，上述 0 比較部進行比較的結果，上述搬運車的移動速度較上述預 定速度緩慢的場合之上述要求搬運量在上述臨界値以下的 場合，控制上述除塵裝置以減少上述單位時間平均的供給 量。 根據此一構成，可經由搬運車所要求的搬運量，判斷 其搬運車是以何種速度進行移動。 具體而言，例如取得來自搬運車系統的管理者所指示 的要求搬運量，可進行隨後其搬運車是否以小於預定速度 Φ 的速度移動的判斷。 又，上述控制裝置，具有：取得上述搬運車的移動速 度的取得部，及比較上述取得部所取得的速度與上述預定 速度的比較部，上述比較部進行比較的結果，上述取得部 所取得的速度較上述預定速度緩慢的場合，控制上述除塵 裝置以減少上述單位時間平均的供給量。 亦即，也可以取得搬運車速度的實測値，判斷搬運車 是否較預定速度緩慢。 又，上述搬運車也可以是堆高式起重機，上述預定的 -8- 200934706 區域爲具備上述堆高式起重機的自動倉庫內的空間。 另外’本發明也可以包含本發明搬運車系統的特徵性 動作步驟作爲物品的搬運方法加以實現。並可以控制裝置 實行各步驟作爲控制程式加以實現。 〔發明效果〕 根據本發明的搬運車系統，可有效維持自動倉庫或無 0 塵室等預定區域內的潔淨度。 具體而言，搬運車的移動速度較預定速度緩慢的場合 ’控制裝置控制使得除塵裝置減少原來不必要的風量，可 以潔淨度維持用的適度風量供給到預定的區域內。 藉此，可適度維持適度潔淨度的同時，減少除塵裝置 的耗費電力。並可抑制起因於風的靜電所導致物品破損的 可能性及灰塵對於物品的附著量。 〇 【實施方式】 以下，針對本發明的實施形態一邊參照圖示說明如下 (實施形態1 ) 首先，使用第1圖〜第4圖說明實施形態1的搬運車 系統1 0的構成。 第1圖是表示本發明實施形態1的搬運車系統10具 備的自動倉庫11的外觀圖。 -9- 200934706 第1圖表示的自動倉庫11藉著有軌道台車的堆高式 起重機12,將物品17自動收納在載架13上，並可以自 動搬出所收納的物品的倉庫。 自動倉庫11，具備：堆高式起重機12;堆高式起重 機12移動用的行走軌道16;沿著堆高式起重機12的通 路所設置的載架13及進出入庫時放置物品的站14。 堆高式起重機12可以在行走軌道16上移動，使升降 φ 台15升降，並且使得滑動式叉架15a進退。藉此，可以 在站1 4與載架1 3之間移動物品1 7。 第2圖是表示本實施形態1的搬運系統10構成的槪 要圖。 如第2圖表示，搬運車系統10除了上述自動倉庫11 之外，並具備除塵裝置20與控制裝置30。 除塵裝置20是藉著風扇對自動倉庫11內供給清潔空 氣的裝置。 〇 具體而言，除塵裝置20，具有：複數個FFU21 ;藉 複數個FFU使吸引的空氣流動的管路24;主濾器25及排 送風扇26。 FFU21具備風扇22與濾器23 ,良P使FFU21單獨仍可 獲得除塵裝置功能的裝置。並且，本實施形態中’除塵裝 置20具有4個FFU2 1。 設置在自動倉庫11地面的4個吸入口 18分別各設有 1 個 FFU21 。 藉著FFU21的風扇22的旋轉，經由吸入口 18將自 -10- 200934706 動倉庫11內的空氣吸入到FFU21內。所吸入的空氣利用 濾器23除塵，排出至管路24。 從4個FFU21所排出的空氣通過管路24藉著主濾器 2 5更加以除塵。 經由主濾器25的空氣藉著排出風扇26，經配置在自 動倉庫11的頂棚的4個排出口 19排出到自動倉庫11內 〇 如上述’空氣在自動倉庫11內的整體從上向下流動 〇 再者’各個風扇22不僅是空氣的吸入，同時具有經 由管路24將清潔的空氣供給自動倉庫n內用的風扇的功 能。 亦即’即使排出風扇26不存在的場合，各個風扇22 朝著吸入自動倉庫n內的空氣方向的旋轉，將各濾器23 及主德器25除去灰塵後的清潔空氣供給到自動倉庫n內 〇 控制裝置30爲控制搬運車的堆高式起重機12及除塵 裝置20動作的裝置。控制裝置3〇具體而言可藉著具有中 央運算裝® ( CPU )、記憶裝置及進行資訊輸出入的介面 等的電腦予以實現。 第3圖是表示自動倉庫11的4個FFU21的配置位置 的上面槪要圖。 並且’第3圖中，爲方便顯示4個FFim的配置， 載架1 3是以點線表示。 -11 - 200934706 如第3圖表示，在形成4列的載架13的各列下面的 地面分別設有吸入口 18。並且吸入口 18例如爲網狀狀的 鐵板所覆蓋，在各個鐵板的下方配置FFU21。又，行走用 軌道16是沿著載架13設置。 以上所設置的FFU21隨著控制裝置30的控制而動作 ，可藉此有效地清淨自動倉庫11內的空氣。 第4圖是表示搬運車系統10的功能性構成的方塊圖 Φ 此外，第4圖是以控制裝置30所控制的裝置等爲主 要圖示，省略載架13等其他構成要素的圖示。 控制裝置30是控制自動倉庫11及除塵裝置20動作 的裝置。控制裝置30具備取得部31及比較部32，在自 動倉庫11及除塵裝置20之間進行訊號的處理來控制該等 的動作。 取得部31是取得對堆高式起重機12所要求之顯示物 φ 品搬運量的要求搬運量的處理部。比較部32是比較取得 部31所取得的要求搬運量與臨界値的處理部。 本實施形態中，控制裝置30是以堆高式起重機12單 位時間平均可搬運之最大量的最大搬運量爲臨界値予以記 憶。 另外，堆高式起重機12要求最大搬運量的場合，堆 高式起重機12是以最大速度移動。 控制裝置30是根據比較部32的要求搬運量與最大搬 運量的比較結果，控制除塵裝置20的動作。藉以實現除 -12- 200934706 塵裝置20的有效動作及有效的空氣清淨化。 再者，搬運量例如是搬運物品的個數。或者’每一搬 運物品所對應搬運距離所賦予重量的數値的和。 例如，將1個物品從站1 4搬運到載架1 3內的其中之 一收納棚架的場合，從站14到收納棚架爲止的距離越遠 堆高式起重機12所應負荷的搬運量越大。 接著，使用第5圖〜第9圖，針對搬運車系統的動 φ 作，以本發明特徵的除塵裝置20的動作控制說明如下。 第5圖是表示搬運車系統10的基本動作的流程圖。 另外，第5圖是表示本發明特徵的控制裝置30對除塵裝 置20之動作控制的基本流程。 搬運車系統10的控制裝置30比較搬運車的堆高式起 重機12的速度與預定的速度（S10)。另外，在此所謂堆 高式起重機12的速度爲該比較時刻的堆高式起重機12的 速度或者之後堆高式起重機12到達的速度（所預測的速 ❾度）。 此一比較的結果，搬運車的堆高式起重機12的移動 速度比預定速度緩慢的場合（S10爲Yes),控制裝置30 控制除塵裝置20，使得堆高式起重機12的移動速度比移 動速度爲預定速度的場合，除塵裝置20的單位時間平均 的清潔空氣供給量變少。 又’堆高式起重機12的移動速度與預定速度相同的 場合（S10爲No) ’不進行除塵裝置20的空氣供給量的 變更。 -13- 200934706 在此，本實施形態中’如上述取得部31取得要求搬 運量，比較部32比較要求搬運量與最大搬運量° 亦即，並非以搬運車的堆高式起重機12的速度與預 定速度比較，而是經由堆高式起重機12的搬運量進行所 要求的速度與最大速度的比較。 第6圖是表示實施形態1的搬運車系統1 〇的動作流 程的流程圖。 @ 再者，除塵裝置20通常是根據控制裝置30所設定的 初始値，開始單位時間平均吸入預定量空氣的動作。又， 隨著開始將對應該預定量的量清淨化空氣送出到自動倉庫 1 1內的動作。 又，上述所謂預定的量是在本實施形態中，堆高式起 重機12即使以最大速度移動的場合，自動倉庫11內空氣 的潔淨度仍然可維持著預定値的量。 如上述’除塵裝置2 0開始通常的動作之後，控制裝 〇 置30的取得部31根據來自搬運車系統10的管理者等的 指示取得要求搬運量（S20)。 比較部32是進行取得部31所取得的要求搬運量與控 制裝置3 0的預定記憶區域所記憶的最大搬運量的比較（ S21 )。 此一比較的結果’要求搬運量小於最大搬運量的場合 (S2 1爲Yes )，控制裝置3〇控制除塵裝置2〇以減少除 塵裝置20的單位時間平均的空氣供給量（S22)。 在此’堆高式起重機12的搬運量與移動速度至少是 -14- 200934706 形成正的相關關係。 因此，要求搬運量小於最大搬運量的場合（S21爲 Yes)是根據其要求堆高式起重機12移動時的速度較最大 速度緩慢的場合。 此時，根據堆高式起重機12移動所捲起的灰塵量是 較最大速度移動的場合減少。因此，控制裝置3 0控制使 除塵裝置20的空氣供給量較最大移動速度的場合少。 U 如上述，本實施形態中，控制裝置3 0可對應於堆高 式起重機12的要求搬運量，控制除塵裝置20的動作。 第7圖是例示要求搬運量；堆高式起重機12的移動 速度；及與除塵裝置20的單位時間平均空氣的供給量的 關係圖。 如第7圖所例示，要求搬運量從最大變化量的W1變 化爲小於W1的W2的場合，進行控制裝置30的控制，使 堆高式起重機12的移動速度從對應最大搬運量的VI變 φ 化爲小於VI的V2。 並且，堆高式起重機12的速度實際上由於有加速時 間，因此不形成與時間軸的平行直線。但是，爲了明確顯 示堆高式起重機12的速度與要求搬運量及除塵裝置20的 動作關係，第7圖是表示各期間中的速度最大値以作爲各 期間中速度的代表値。對於後述的第8圖及第9圖也相同 。並對於後述的實施形態2的搬運車的移動速度也是同樣 〇 控制裝置30控制除塵裝置20以減少除塵裝置20進 -15- 200934706 行的供給量，使得與該堆高式起重機12的移動速度的變 化大致同步。 具體而言，堆高式起重機12的移動速度從最大速度 的VI變化爲小於VI的V2的場合’除塵裝置20爲控制 裝置30所控制，使除塵裝置20的單位時間平均的空氣供 給量從對應最大速度VI的Q1變化爲小於Q1的Q2。 例如，要求搬運量爲最大搬運量一半的場合，控制裝 0 置30控制堆高式起重機12，使移動的速度改變爲最大速 度的大約一半速度。並控制該移動時間、除塵裝置20, 例如使得單位時間平均的空氣供給量改變爲大約一半。 另外，控制裝置30藉著以下的（1)〜（3)的其中之 一方法，或該等方法的組合，來減少除塵裝置20的單位 時間平均的空氣供給量。 (1)降低4個FFU21的風扇22的轉速。 (2 )停止4個FFU21中的1以上的FFU21的作動。 G 亦即，停止4個FFU21中的1個以上風扇22的轉動。 (3 )使4個FFU21的風扇22的轉動在預定的期間 停止之後，在啓動風扇22的轉動。即，使得各FFU21間 歇作動。 例如，使各FFU21的風扇22的轉速改變爲堆高式起 重機12以最大速度移動時的轉速的一半。藉此，可將除 塵裝置20的單位時間平均的空氣供給量減半。 再者，控制裝置30是如上述，在各FFU21的作動狀 況變化的場合，與該變化同步使送出風扇26的轉速變化 -16- 200934706 。藉以使自動倉庫11內的壓力大致保持著一定。 如上述，控制裝置30藉著因應性變化除塵裝置20的 動作，可減少相當於第7圖下段圖的網狀區域的供給量。 藉此，發揮以下有利的效果。 亦即，不需如以往配合搬運車的最大速度所決定的風 量經常地流動於自動倉庫內，可以刪減原來不需要之除麈 裝置20的風量。 U 刪減除塵裝置20的風量可以刪減除塵裝置20的耗費 電力。 又，刪減原來不需要的空氣流量，可以刪減收納物及 搬運物所接觸的風量。藉此，可以抑制因風爲起因的靜電 導致收納物及搬運物的破損可能性及灰塵對於收納物及搬 運物的附著量。 亦即，在電路基板等需高度防塵要求的製品收納於自 動倉庫Η內的場合，與以往的自動倉庫比較，可提升該 φ 等製品的產出率。 如上述，本實施形態的搬運車系統10爲控制裝置30 使得除塵裝置20的動作因應堆高式起重機12的作動狀況 而動態變化，可有效維持著自動倉庫11內的潔淨度。 再者’除塵裝置20的空氣供給量從Q1減少到Q2之 後，堆高式起重機12的移動速度回到VI的場合，控制 裝置30控制除塵裝置20使除塵裝置20的空氣供給量恢 復到Q 1。 在此’第7圖是表示將堆高式起重機12的速度一階 -17- 200934706 段降低之後，除塵裝置20的空氣供給量也一階段降低的 圖。 但是，也可以使除塵裝置20的單位時間平均的空氣 供給量對應堆高式起重機12移動速度的變化而多階段變 化。 第8圖是例示多階段變化除塵裝置20的單位時間平 均空氣供給量的場合之堆高式起重機12的移動速度與該 0 供給量的關係圖。 如第8圖的上段表示，堆高式起重機12的移動速度 是假設依照 VI、V2、V3、V4(V1>V4>V2>V3)的順 序變化的場合。 此時，控制裝置30的取得部31是依序或總括地取得 該等速度基礎的要求搬運量。 比較部32使是將取得部31所取得的要求搬運量分別 與臨界値的最大搬運量比較。或者在此一比較時，不僅大 ❿ 小的關係並求得其比率。 亦即’求取對應最大搬運量有多少搬運量所要求的比 率。控制裝置30根據該比較部32所求得的比率，使除塵 裝置20的單位時間平均的空氣供給量變化。 其結果’如第8圖下段的圖表示，除塵裝置2〇的單 位時間平均的空氣供給量依照Ql、Q2、Q3、Q4(Q1> Q4> Q2> Q3)的順序變化。 亦即，控制裝置30控制除塵裝置2〇，使得堆高式起 重機12的速度越緩慢’除塵裝置的單位時間平均的空 -18- 200934706 氣供給量越少。 相反地，控制除塵裝置20使堆高式起重機12的速度 越快，除塵裝置20的單位時間平均的空氣供給量越是增 加。 如上述，除麈裝置20的單位時間平均的空氣供給量 可追隨著堆高式起重機12速度的變化，更爲有效地維持 著自動倉庫11的潔淨度。 U 再者，相對於堆高式起重機12的某一速度，針對除 塵裝置20單位時間平均的空氣供給量所應供給的量爲何 ，只需以實驗或理論計算等求得最適度値即可。 又，本實施形態中，控制裝置30是以最大搬運量爲 臨界値，以要求搬運量是否小於該臨界値，使除塵裝置 2〇的單位時間平均的空氣供給量變化。 但是’也可以小於最大搬運量的預定搬運量爲臨界値 ，對應該臨界値與要求搬運量的大小關係，來增減除麈裝 φ 置20的單位時間平均的空氣供給量。 亦即，控制裝置30是以堆高式起重機1 2的小於最大 速度的預定速度爲基準，堆高式起重機12的速度較其基 準緩慢的場合，空氣的供給量爲Q0。並且，在預定速度 以上的場合，以空氣供給量較Q0大的Q1進行控制。 第9圖是例示以堆高式起重機12的小於最大速度的 預定速度爲基準控制空氣供給量時的堆高式起重機12的 移動速度與該供給量的關係圖。 如第9圖的上段表示，堆高式起重機12到T1停止之 -19- 200934706 後，從τι作動到T2爲止，假設其間的移動速度的最大 値爲VI的場合。並且，從Τ2到Τ3爲止的移動速度的最 大値爲V2，設定隨後停止的場合。 在此，速度的基準爲V0，如第9圖表示，分別的速 度關係爲V1>V0>V2。 此時，控制裝置30進行以下的控制。亦即，T1爲止 堆高式起重機12的速度（0)爲小於V0»因此，控制裝 H 置30控制除塵裝置20以對應小於基準V0的速度的單位 時間平均的供給量Q 0供給空氣。 又，從T1到T2爲止是堆高式起重機12的速度VI 在基準V0以上。因此，控制裝置3 0控制除塵裝置20以 對應基準V0以上的速度的單位時間平均的供給量Q 1供 給空氣。 另外，T2以後是堆高式起重機12的速度（T3爲止 V2，隨後0 )小於基準V0。因此，控制裝置30控制除塵 φ 裝置20以對應小於基準V0的速度的單位時間平均的供 給量Q0供給空氣。 如上述，控制裝置30是根據堆高式起重機12的移動 速度是否形成基準以上的速度，控制除塵裝置20使得單 位時間平均的供給量不同。 藉此，在自動倉庫11中，通常是預先以低速使除塵 裝製作動，僅搬運量增加的場合，進行除塵裝置20高速 作動的運用。 亦即，自動倉庫1 1在例如時期性的要因物品搬運量 -20- 200934706 比較少的場合等，可更爲有效進行除塵裝置20的有效作 動。 又’本實施形態中’控制裝置3 0的取得部3 1是取得 要求搬運量’比較部32是進行要求搬運量與最大搬運量 的比較。即經由搬運量要求堆高式起重機12的速度的場 合，與最大速度進行比較。 此時，控制裝置30在堆高式起重機12開始處理要求 φ 搬運量用的移動之前，可對應其要求搬運量使除塵裝置 2 0的作動狀況變化（例如，從高速作動轉移至低速作動 )° 但是，也可以直接比較堆高式起重機12的速度與最 大速度。 此時，例如在控制裝置3 0預先記憶堆高式起重機1 2 的最大速度。又，取得部31例如藉著與檢測堆高式起重 機12速度的機器的通訊來取得堆高式起重機12的速度。 0 比較部3 2 —旦藉取得部3 1取得速度的場合，與記憶 在控制裝置30的最大速度比較。控制裝置30對應此一比 較的結果控制除塵裝置20的動作。 即使如上述，控制裝置30可對應堆高式起重機12的 移動速度，控制除塵裝置20以使得除塵裝置20有效的作 動。 並且，除塵裝置20也可以是第2圖所表示的構成以 外的構成。例如，從1個側面吸入空氣藉濾器除塵之後， 以自另一側面排出淨化後空氣的1台FFU作爲除塵裝置 -21 - 200934706 20處理。 又’例如也可以不在地面而是在頂棚配置4台的 FFU21。此時’從地面的4個吸入口 18吸入的空氣通過 管路24以主濾器25除去塵埃之後，更藉著4台的FFU21 除去塵埃形成清潔的空氣。該清潔空氣分別藉著風扇22 供給到自動倉庫1 1內。 亦即，只要藉著風扇對預定的區域內供給清潔空氣的 0 裝置’風扇的數量與配置位置，及塵埃的除去方法等並不 限定於特定物。 又，如本實施形態使用複數個FFU2 1的場合，也可 以對應堆高式起重機12的移動區域，個別控制複數個 FFU21 。 例如，堆高式起重機12從載架13的右方僅對於2列 (參閱第3圖）設定要求載放複數物品的場合。 此時，例如4個FFU21中，也可以從左方使1個或2 ❹ 個FFU21轉移爲低速作動，或者停止。 亦即，也可以控制從堆高式起重機12移動的區域減 少位在較遠位置的FFU2 1的清潔空氣的供給量。即使如 上述，仍可適度維持著潔淨度，並可減少除塵裝置20不 需要的風量。 又，本實施形態中，控制裝置30是對應堆高式起重 機12的速度進行除塵裝置20的動作控制。 但是，控制裝置30也可以對應其他變數進行除塵裝 置20的動作控制。例如，也可以對應堆高式起重機1 2的 -22- 200934706 加速度進行除塵裝置20的動作控制。 例如’堆高式起重機12的加速度爲負時，堆高式起 重機12是位在移動速度降低的狀態。此時，會使得堆高 式起重機12所捲起的灰塵量減少。因此，控制裝置30控 制除塵裝置20以減少除塵裝置20單位時間平均的空氣供 給量。即使如上述，仍可實現除塵裝置20的有效動作。 φ (實施形態2) 如實施形態1的自動倉庫11，同樣有存在於其他預 定區域內搬運爲了獲得電路基板等高度防塵的製品的設施 內。 例如，在作業室內設置工作機械，使搬運精密零件的 搬運車在該作業室內行走的場合。 此時，同樣會隨著搬運車的移動而產生灰塵等的擴散 ，因此有維持著該作業室內的空氣潔淨度的必要。 0 亦即，該作業室有需爲無塵室的必要。此時與實施形 態1的自動倉庫11同樣地，可獲得有效維持著潔淨度。 在此，實施形態2是針對在無塵室內行走的搬運車及 控制無塵室內的空氣除麈用除塵裝置的搬運車系統50說 明如下。 第10圖是表示實施形態2的無人搬運車52的外觀圖 〇 第10圖表示的無人搬運車52是例如藉著無線通訊來 控制移動的搬運車。無人搬運車52是例如搬運複數重疊 -23- 200934706 收納電漿顯示面板用的玻璃基板53後的匣54。 第11圖是表示實施形態2的搬運車系統50的構成槪 要圖。 如第11圖表示，搬運車系統50，具備：無塵室51 ; 除塵裝置60 ;及控制裝置7〇。 無塵室51具備4台的零件組裝機55。該等零件組裝 機55藉著無人搬運車52供給複數玻璃基板53。各零件 ^ 組裝機5 5是將零件組裝在所供給的玻璃基板5 3上。 ❹ 除塵裝置60具有與實施形態1的除塵裝置20相同的 構成，具有：4個FFU61;使4個FFU61所吸引的空氣流 動的管路64;主瀘器65;及送出風扇66。 又，空氣的流動也是與實施形態1相同。亦即，藉著 設置在無塵室51地面的4個吸入口 18的各個FFU61吸 入空氣。 且被各FFU61吸入並藉著各個濾器63將除塵後的空 q 氣排出管路64。所排出的空氣是通過管路64更藉著主濾 器6 5加以除塵。 經由主濾器65的空氣是藉著送出風扇66，經配置在 無塵室51頂棚的4個吹出口 59送出到無塵室51內。 如上述，.空氣是在無塵室51內整體從上向下流動。 再者，實施形態2的各FFU6 1的風扇62是與實施形 態1的風扇22同樣，具有將清潔的空氣供給無塵室51內 用的風扇的功能。 控制裝置30爲控制無人搬運車52及除塵裝置60的 -24- 200934706 動作的裝置。 第12圖是表示無塵室51的4個FFU61的配置位置 的上面槪要圖。 並且’第12圖中，爲了方便表示4個FFU61的配置 位置，以虛線表示各零件組裝機5 5。 如第12圖表示，各FFU61是在4台的零件組裝機55 下的地面分別設置吸入口 58。又，吸入口 58是例如以網 φ 眼狀的鐵板覆蓋，分別在鐵板下配置FFU61。 無人搬運車52在上述預定的間隔中所設置的零件組 裝機55之間移動。無人搬運車52在各零件組裝機55附 近的預定場所放置收納著複數玻璃基板53的匣54。 如上述，供給複數的玻璃基板到各零件組裝機5 5。 並且’組裝零件的玻璃基板53藉著無人搬運車52回收， 例如保管在無塵室5 1外的預定聚集場所。 如上述’無人搬運車52在無塵室51內移動。因此， 0 與實施形態1的堆高式起重機12移動的場合相同，會有 揚起灰塵的問題。 因此’除塵裝置60吸入無塵室51內的空氣除塵。藉 此維持著無塵室51內的潔淨度。 又，爲了實現有效潔淨度的維持，控制裝置70是對 應無人搬運車52的移動速度動態變化除塵裝置6〇的單位 時間平均的清潔空氣的供給量。 第13圖是表示搬運車系統50的功能性構成的方塊圖 -25- 200934706 再者，第4圖中’主要是以控制裝置70所控制的裝 置等爲圖示，省略零件組裝機55等其他構成元件的圖示 〇 實施形態2的搬運車系統50的功能性構成是如第13 圖表示，與實施形態1的搬運車系統10的功能性構成大 致相同。 具體而言，搬運車系統50，具備：控制裝置70;無 ❺ 塵室51 ;及除塵裝置60。 控制裝置70爲控制無人搬運車52及除塵裝置60動 作的裝置。控制裝置70具備取得部71與比較部72，在 無人搬運車52及除塵裝置60之間進行訊號的處理以控制 該等的動作。 取得部71是取得對於無人搬運車52的要求搬運量的 處理部。比較部32是比較取得部31所取得的要求搬運量 與臨界値的處理部。 φ 本實施形態中，控制裝置70是以無人搬運車52單位 時間平均可搬運最大量的最大搬運量作爲臨界値加以記憶 〇 並且，對無人搬運車52要求最大搬運量的場合，無 人搬運車52形成以最大速度移動。 控制裝置70是根據比較部72的要求搬運量與最大搬 運量的比較結果，控制除麈裝置60的動作。藉此，實現 除塵裝置60的有效動作及有效之空氣的清潔化。 具有以上功能構造的實施形態2的搬運車系統50的 -26- 200934706 基本動作是與第5圖流程圖所表示的動作相同。 亦即，控制裝置70比較搬運車的堆高式起重機12的 速度與預定的速度（S10)。 此一比較結果，無人搬運車52的移動速度較預定速 度緩慢的場合（S 1 0爲Yes )，控制裝置70控制除塵裝置 60減少除塵裝置60單位時間平均的空氣供給量。 控制裝置70具體而言與實施形態1的控制裝置3 0相 0 同，根據要求搬運量與最大搬運量的比較來比較無人搬運 車52的最大速度與所要求的速度。 因此，要求搬運量低於最大搬運量的期間，除塵裝置 60的單位時間平均形成較少的空氣供給量。 第14圖是例示要求搬運量；無人搬運車52的移動速 度；及除塵裝置60的單位時間平均的空氣供給量的關係 圖。 如第14圖所例示，實施形態2的要求搬運量；無人 Q 搬運車52的移動速度；及除塵裝置60的單位時間平均的 空氣供給量的關係是與實施形態1相同。 亦即，要求搬運量從最大搬運量W1變化成小於W1 的W2的場合，控制裝置70控制使無人搬運車52的移動 速度從對應最大搬運量的VI變化成小於VI的V2。 又’無人搬運車52的移動速度從最大速度V1變化 成小於VI的V2的場合，控制裝置7〇控制使除塵裝置6〇 的單位時間平均的空氣供給量從對應最大速度V 1的Q 1 變化成小於Q 1的Q2。 -27- 200934706 又，控制裝置70在除塵裝置60的單位時間平均的空 氣供給量減少的方法上也和實施形態1相同。亦即，控制 風扇62的轉速、作動的FFU61的台數、FFU61的作動時 機的其中之一時，可減少單位時間平均的空氣供給量。 另外，控制裝置70是如上述，使各FFU61的作動狀 況變化的場合，與此變化同步使得送出風扇66的轉速變 化。藉以使無塵室51內的壓力大致保持一定。 0 如上述，控制裝置70對應地變化除塵裝置60的動作 ，減少相當於第14圖下段的圖的網狀區域的供給量。 藉此，可刪減除塵裝置60的耗費電力。並可抑制因 風爲起因之靜電導致玻璃基板53破損的可能性及灰塵對 於玻璃基板53的附著量。 亦即，玻璃基板5 3等高度防塵要求的製品收納在無 塵室51內的場合，與習知的無塵室比較，可提升該等製 品的產出率。 Q 如上述’本實施形態的搬運車系統50是控制裝置70 使得除塵裝置60的動作對應無人搬運車52的作動狀態而 動態變化，可有效維持著無塵室51內的潔淨度。 亦即’適度維持著潔淨度，並可刪減除塵裝置60的 耗費電力的同時，可抑制因風爲起因之靜電導致玻璃基板 53破損的可能性及灰塵對於玻璃基板53的附著量。 再者，本實施形態中，除塵裝置60也可以是第n圖 表不構成以外的構成。例如，也可以將4台的FFU61配 置在頂棚而非地面。 -28- 200934706 亦即’只要是以風扇對預定的區域內供給清潔空氣的 裝置即可，風扇的數量與配置位置，及塵埃的除去方法等 在本實施形態中並不加以特別限定。 又’本實施形態中，針對在無塵室51內1台無人搬 運車52行走的場合說明如下。 但是，一般也存在著無塵室51內有複數無人搬運車 52移動的場合。此時，考慮該等複數無人搬運車52的移 φ 動速度’控制除塵裝置60的動作，與本實施形態同樣地 ，可以有效維持著無塵室51內的潔淨度。 第15圖是表示2台無人搬運車52移動的無塵室51 的構成的上面槪要圖。 如第15圖表示，無人搬運車52a與無人搬運車52b 存在於無塵室5 1內，分別地移動，進行相對於各零件組 裝機55之玻璃基板53的供給及回收。 此時，控制裝置70以除塵裝置60的初期値，無人搬 φ 運車52a及無人搬運車52b雙方即使以最大速度移動的場 合’仍可設定可維持著無塵室51的潔淨度的初期値。 又，例如取得部71取得相對於無人搬運車52a及無 人搬運車5 2b的各個要求搬運量。比較部72是進行2個 要求搬運量分別與最大搬運量的比較。 控制裝置70是根據該比較的結果，控制除塵裝置60 的動作。 亦即，相對於無人搬運車52a及無人搬運車52b的要 求搬運量的其中之一低於最大搬運量的場合，控制裝置 -29- 200934706 70控制除塵裝置60以減少除塵裝置60的單位時間平均 的空氣供給量。 藉此’擔保潔淨度的維持確定性，並可刪減除塵裝置 60所不需要的風量。 再者，複數搬運車在應維持著潔淨部的預定區域內移 動的場合’以此一手法控制除塵裝置的動作，同樣具有除 塵裝置之風量刪減的效果。 亦即，實施形態1中，複數堆高式起重機12再自動 倉庫11內移動的場合，控制裝置30也可以使用對於雙方 的要求搬運量，在除塵裝置20進行如上述的控制。 並且’也可以不經由相對於複數搬運車的要求搬運量 ，檢測或取得複數搬運車的速度來比較最大速度。 又’實施形態2的控制裝置70也可以進行第8圖表 示的控制。亦即，也可以對應無人搬運車52移動的速度 變化多階段變化除塵裝置60單位時間平均的空氣供給量 〇 並且，實施形態2的控制裝置70也可以進行第9圖 表示的控制。亦即，無人搬運車52的速度較預定的基準 緩慢的場合，以除塵裝置60單位時間平均的空氣供給量 爲Q0，當預定速度以上的場合，該供給量以大於Q0的 Q 1進行控制。 上述任意的場合，皆不會喪失有效維持無塵室51潔 淨度的效果。 又，實施形態2與實施形態1同樣地，除塵裝置60 -30- 200934706 的構成也可以除的上述以外的構成。 並可對應無人搬運車52的移動區域，各別控制4個 FFU61 〇 例如，僅無人搬運車52頻繁移動的路徑附近的 FFU61以一般或者較爲高速作動。並且，也可以控制使得 從該路徑較遠位置的FFU 61以低速作動轉移或者停止。 如上述，即使控制除塵裝置60的場合，仍可適度維 0 持著潔淨度’並可刪減除塵裝置60所不需要的風量。 (實施形態1及2的補充事項）以上，實施形態1爲 搬運車是以具備堆高式起重機12的搬運車系統10已作說 明，實施形態2爲搬運車是以具備無人搬運車52的搬運 車系統5 0已作說明。 但是，本發明的搬運車系統的搬運車不僅限於堆高式 起重機12及無人搬運車52。 例如，也可以使用設於頂棚的軌道上行走的高架行走 Q 車作爲搬運車，其台數不限定於特定的數量。 亦即，屬本發明搬運車系統的效果的預定區域之有效 潔淨度維持的實現可不需依存於搬運車的種類、大小及台 數等即可充分發揮。 〔產業上的可利用性〕 本發明的搬運車系統可以在預定的區域內使用搬運車 的各種種類的物品作爲搬運的系統加以利用。並且’可以 有效地維持著潔淨度，作爲收納電路基板等要求高度防塵 -31 - 200934706 的製品的自動倉庫及處理以上製品的無塵室的搬運系統等 極爲有用。 【圖式簡單說明】 第1圖是表示本發明實施形態1的搬運系統具備的自 動倉庫的外觀圖。 第2圖是表示實施形態1的搬運系統構成的槪要圖。 第3圖是表示實施形態1的自動倉庫的4個FFU配 置位置的上面槪要圖。 第4圖是表示實施形態1的搬運系統的功能性構成的 方塊圖。 第5圖是表示實施形態1的搬運系統的基本動作的流 程圖。 第6圖是表示實施形態1的搬運系統的動作流程的流 程圖。 第7圖是例示要求搬運量；堆高式起重機的移動速度 :及除塵裝置單位時間平均的空氣供給量的關係圖。 第8圖是例示除塵裝置單位時間平均的空氣供給量的 多階段變化的場合的堆高式起重機的移動速度與該供給量 的關係圖。 第9圖是例示以小於堆高式起重機最大速度的預定速 度爲基準控制空氣供給量的場合的堆高式起重機的移動速 度與該供給量的關係圖。 第10圖是表示實施形態2的無人搬運車的外觀圖。 -32- 200934706 第11圖是表示實施形態2的搬運車系統的構成槪要 圖。 第12圖是表示實施形態2的無塵室的4個FFU配置 位置的上面槪要圖。 第1 3圖是表示實施形態2的搬運系統的功能性構成 的方塊圖。 第14圖是例示要求搬運量；無人搬運車的移動速度 φ ;及除塵裝置單位時間平均的空氣供給量的關係圖。 第15圖是表示2台無人搬運車移動的無塵室51的構 成的上面槪要圖。 【主要元件符號說明】 10、50 :搬運車系統 11 :自動倉庫 12 :堆高式起重機 ❿ 13 :載架 1 4 :站 15 :升降台 15a :滑動式叉架 1 6 :行走軌道 1 7 :物品 1 8、5 8 :吸入口 19、 59 :吹出口 20、 60 :除塵裝置 -33- 200934706BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transport vehicle system in a predetermined area, and more particularly to a transport vehicle system including a dust removing device for removing dust. [Prior Art] Conventionally, a transport vehicle system including a human transport vehicle, an overhead traveling vehicle, and a system having a track platform has been installed in a predetermined area. For example, there is a transport vehicle system that has a library as a transport vehicle and controls its operation. In the automatic warehouse, a carrier that is used as a storage rack is provided. And there is a station, which is a stacking crane for other trucks of the high-lift crane to the predetermined shed rail of the carrier, so that the lifting platform for carrying the articles is lifted and lowered, and the lifting platform and the carrier or the station The goods are transported by the above-mentioned automatic warehouse, which is different from the stacker crane. At this time, the air in the automatic warehouse must be such that the technology in the automatic warehouse is also disclosed (for example, refer to Patent Document 1). In the air in the predetermined area where the goods are transported by the transport vehicle, the automatic storage compartment of the stacker crane is transported by using a stacker such as a stacker crane or a car without a vehicle, and most of the articles are stored to transfer the articles from the carrier to the stack. At the office. Stand, or walk until the station, exit the sliding fork. Transfer items between. The van between the stations is carried out. The product that needs to be highly dust-proof must be kept in a clean state. The air is kept clean. -4- 200934706 According to this technology, a so-called fine-tuner unit (hereinafter referred to as "FFU") is provided on the carrier of the automatic warehouse. a device that supplies clean air. This maintains the cleanliness (cleanliness) of the automated warehouse. [Patent Document 1] Japanese Laid-Open Patent Publication No. 2005-231774 [Draft of the Invention] [Problems to be Solved by the Invention] @ In the above-mentioned automatic warehouse, in a predetermined area where goods are transported by a transport vehicle, dust is exemplified (hereinafter, The only one of the factors that float in the air is the movement of the truck. Specifically, dust or the like rolled up by wind or the like generated by the movement of the transport vehicle floats in the air. Therefore, the more quickly the truck moves, the more it will float in the air and gradually lose its cleanliness. Therefore, when the dust removing device such as the FFU is installed in a predetermined area such as an automatic warehouse, even if the transport vehicle moves at the maximum speed, the air supply amount of the dust removing device φ can be determined to maintain the cleanliness and maintain the supply amount. That is, a certain amount of air corresponding to the maximum speed of the truck is supplied by the dust remover in the predetermined area. Thereby, the air cleanliness in the predetermined area is maintained. However, the truck does not always move at maximum speed. Therefore, there are occasions for supplying air volume that is not needed in the future. Further, in the case where the amount of air required for supply or more is a factor, the article may be charged by the charge and the article may cause damage to the article due to static electricity. Further, there is a problem in that the storage object and the conveyed object are likely to adhere to dust or the like. 200934706 Of course, when the truck is frequently moved at a low speed, the amount of air generated by the dust removing device can be suppressed. However, at this time, work efficiency such as storage and movement of articles is lowered, which is not an ideal solution. The present invention has been made in view of the above-described problems, and an object of a transportation vehicle system that uses a transportation vehicle to transport articles in a predetermined area and that can effectively maintain the cleanliness in a predetermined area. Φ [Means for Solving the Problem] In order to solve the above-described problems, the transport vehicle system of the present invention includes: a transport vehicle that transports an article in a predetermined area; and a dust removing device that supplies clean air to the predetermined area by a fan; And controlling the dust removing device such that the moving speed of the transport vehicle is slower than a predetermined speed, wherein the dust removing device supplies the average amount of clean air per unit time in the predetermined area to be smaller than the moving speed of the transport vehicle to the predetermined speed. Control device for occasions. According to this configuration, when the moving speed of the transport vehicle is slower than the predetermined speed, the supply amount of the clean air per unit time of the dust removing device is reduced. As a result, when the transport vehicle shifts to a predetermined low-speed moving state, or when the transport vehicle stops, that is, as the transporting vehicle moves to reduce the amount of dust lifted, the dust removing device simultaneously shifts to a low-speed operation. Therefore, according to the truck system of the present invention, the cleanliness in the predetermined area can be moderately maintained, and the power consumption of the dust removing device can be eliminated. It can also reduce the amount of air that is not needed, and can suppress the possibility of static electricity caused by static electricity -6- 200934706, and the amount of dust attached to the article. Further, the control means controls the dust removing means to reduce the rotational speed of the fan, and to reduce the average amount of supply per unit time. Further, the dust removing device may include a plurality of fans including the fan, and the control device may control the dust removing device to stop the rotation of one or more of the plurality of fans, thereby reducing the average amount of supply per unit time of the dust removing device. Further, the control device may cause the dust removing device to restart the rotation of the fan after the rotation of the fan is stopped for a predetermined period of time to reduce the average amount of supply per unit time of the dust removing device. As described above, by changing at least one of the fan rotation speed, the number of actuations, and the actuation time for supplying the clean air in the predetermined area, the unit time average of the dust removal device can be adjusted in accordance with the optimum degree of the moving speed of the transport vehicle. Air supply. Further, the control device may control the dust removing device to make the moving speed of the zero transporting vehicle slower, and the supply amount supplied by the dust removing device to the unit time is reduced. As a result, as the moving speed of the transport vehicle is slowed down, the air supply amount per unit time of the dust removing device is decreased in multiple stages. The dust removal device can be operated more effectively. Further, when the moving speed of the transport vehicle is equal to or higher than the predetermined speed, the control device further controls the dust removing device such that the supply amount averaged per unit time in the predetermined region is smaller than the moving speed of the transport vehicle when the moving speed is smaller than the predetermined speed. The time-averaged supply amount of the single 200934706 bit toward the clean air in the above predetermined area becomes large. For this reason, for example, the speed of about half of the maximum speed of the transport vehicle can be used as the reference 値, and the dust removing device can be operated at a high speed when the power is removed from the reference 値, and the dust removing device is operated at a low speed. Further, the control device may include: an acquisition unit that acquires a required conveyance amount for displaying the conveyance amount of the conveyance vehicle, and a comparison unit that acquires the required conveyance amount and the threshold 取得, and the comparison unit As a result of the comparison, when the required transport amount of the transport vehicle is slower than the predetermined speed, the dust removal device is controlled to reduce the average supply amount per unit time. According to this configuration, it is possible to determine at what speed the transport vehicle is moving based on the amount of transport required by the transport vehicle. Specifically, for example, the required transport amount instructed by the manager of the transport vehicle system is obtained, and it is possible to determine whether or not the transport vehicle has subsequently moved at a speed lower than the predetermined speed Φ. Further, the control device includes: an acquisition unit that acquires a moving speed of the transport vehicle, and a comparison unit that compares the speed acquired by the acquisition unit with the predetermined speed, and the comparison unit compares the result obtained by the acquisition unit. When the speed is slower than the predetermined speed, the dust removing device is controlled to reduce the average supply amount per unit time. That is, it is also possible to obtain the actual measurement of the speed of the transport vehicle and determine whether the transport vehicle is slower than the predetermined speed. Further, the transport vehicle may be a stacker crane, and the predetermined area of -8-200934706 is a space in an automatic warehouse including the above-described stacker crane. Further, the present invention may be embodied as a method of transporting articles by including the characteristic operation steps of the transport vehicle system of the present invention. It is also possible to control the device to implement each step as a control program. [Effect of the Invention] According to the transport vehicle system of the present invention, it is possible to effectively maintain the cleanliness in a predetermined area such as an automatic warehouse or a clean room. Specifically, when the moving speed of the transport vehicle is slower than the predetermined speed, the control device controls the dust removing device to reduce the amount of unnecessary air, and supplies the appropriate air volume for maintaining the cleanliness to a predetermined area. Thereby, it is possible to appropriately maintain a moderate degree of cleanliness while reducing the power consumption of the dust removing device. It also suppresses the possibility of damage caused by static electricity caused by wind and the amount of dust attached to the article. [Embodiment] The following describes an embodiment of the present invention with reference to the drawings (Embodiment 1) First, the configuration of the transport vehicle system 10 according to Embodiment 1 will be described with reference to Figs. 1 to 4 . Fig. 1 is an external view showing an automatic warehouse 11 provided in the transport vehicle system 10 according to the first embodiment of the present invention. -9- 200934706 The automatic warehouse 11 shown in Fig. 1 automatically stores the articles 17 on the carrier 13 by means of the stacking crane 12 having the railcars, and can automatically carry out the warehouse of the stored articles. The automatic warehouse 11 includes a stacking crane 12, a traveling rail 16 for moving the stacking crane 12, a carrier 13 provided along the path of the stacking crane 12, and a station 14 for placing articles when entering and leaving the warehouse. The stacker crane 12 is movable on the traveling rail 16, lifting and lowering the lifting table 15, and causing the sliding fork 15a to advance and retreat. Thereby, the article 17 can be moved between the station 14 and the carrier 13. Fig. 2 is a schematic view showing the configuration of the conveyance system 10 of the first embodiment. As shown in Fig. 2, the transport vehicle system 10 includes a dust removing device 20 and a control device 30 in addition to the above-described automatic warehouse 11. The dust removing device 20 is a device that supplies clean air to the automatic warehouse 11 by means of a fan. Specifically, the dust removing device 20 has a plurality of FFUs 21, a pipe 24 through which a plurality of FFUs flow the sucked air, a main filter 25, and a discharge fan 26. The FFU 21 is provided with a fan 22 and a filter 23, and the good P allows the FFU 21 to separately obtain the function of the dust removing device. Further, in the present embodiment, the "dust removing device 20" has four FFUs 2 1 . One of the four suction ports 18 provided on the floor of the automatic warehouse 11 is provided with one FFU 21 respectively. The air in the warehouse 11 from the -10-200934706 is sucked into the FFU 21 via the suction port 18 by the rotation of the fan 22 of the FFU21. The sucked air is removed by the filter 23 and discharged to the line 24. The air discharged from the four FFUs 21 is further removed by the main filter 25 through the line 24. The air passing through the main filter 25 is discharged into the automatic warehouse 11 through the four discharge ports 19 disposed in the ceiling of the automatic warehouse 11 by the discharge fan 26, and the whole air in the automatic warehouse 11 flows from the top to the bottom as described above. Further, each of the fans 22 has not only the suction of air but also the function of supplying clean air through the duct 24 to the fan used in the automatic warehouse n. That is, even if the discharge fan 26 does not exist, the respective fans 22 are supplied to the automatic warehouse n by the rotation of the air in the suction automatic warehouse n toward the air in the automatic warehouse n. The control device 30 is a device that controls the stacking crane 12 and the dust removing device 20 of the transport vehicle. Specifically, the control device 3 can be realized by a computer having a central computing device (CPU), a memory device, and an interface for inputting information. Fig. 3 is a schematic top view showing the arrangement position of the four FFUs 21 of the automatic warehouse 11. And, in Fig. 3, in order to facilitate display of the configuration of four FFims, the carrier 13 is indicated by dotted lines. -11 - 200934706 As shown in Fig. 3, the suction port 18 is provided on the floor below each column of the carrier 13 forming the four rows. Further, the suction port 18 is covered with, for example, a mesh-shaped iron plate, and the FFU 21 is disposed below each of the iron plates. Further, the traveling rail 16 is provided along the carriage 13. The FFU 21 provided above operates in accordance with the control of the control device 30, whereby the air in the automatic warehouse 11 can be effectively cleaned. Fig. 4 is a block diagram showing a functional configuration of the transport vehicle system 10. Fig. 4 is a diagram mainly showing a device controlled by the control device 30, and the like, and other components such as the carrier 13 are omitted. The control device 30 is a device that controls the operation of the automatic warehouse 11 and the dust removing device 20. The control device 30 includes an acquisition unit 31 and a comparison unit 32, and performs signal processing between the automatic warehouse 11 and the dust removal device 20 to control the operations. The acquisition unit 31 is a processing unit that acquires a required conveyance amount of the display item φ product conveyance amount required by the stack crane 12. The comparison unit 32 is a processing unit that compares the required conveyance amount and the threshold 取得 acquired by the acquisition unit 31. In the present embodiment, the control device 30 is recorded as a maximum amount of the maximum amount of transport that can be carried by the stacker crane 12 in a unit time. Further, when the stacker 12 requires the maximum amount of transportation, the stacker 12 moves at the maximum speed. The control device 30 controls the operation of the dust removing device 20 based on the comparison result between the required transport amount and the maximum transport amount of the comparing unit 32. In order to achieve the effective action of the dust device 20 except -12- 200934706 and effective air purification. Furthermore, the amount of conveyance is, for example, the number of articles to be transported. Or the sum of the weights given by the transport distance for each transport item. For example, when one article is transported from the station 14 to one of the racks 1 3 to store the scaffold, the distance from the station 14 to the storage scaffold is greater than the load on the stacker 12 The bigger. Next, the operation control of the dust removing device 20 of the present invention will be described below with reference to the movements of the transport vehicle system using Figs. 5 to 9 . Fig. 5 is a flow chart showing the basic operation of the transport vehicle system 10. Further, Fig. 5 is a basic flow chart showing the control of the operation of the dust removing device 20 by the control device 30 of the present invention. The control device 30 of the truck system 10 compares the speed of the stacker crane 12 of the truck with a predetermined speed (S10). Further, the speed of the stacking crane 12 herein is the speed of the stacker 12 at the comparison time or the speed at which the stacker 12 arrives (predicted speed). As a result of this comparison, when the moving speed of the stacker 12 of the truck is slower than the predetermined speed (S10 is Yes), the control device 30 controls the dust removing device 20 so that the moving speed of the stacker 12 is higher than the moving speed. When the speed is predetermined, the amount of clean air supplied per unit time of the dust removing device 20 decreases. Further, when the moving speed of the stacker 12 is the same as the predetermined speed (No in S10), the air supply amount of the dust removing device 20 is not changed. In the present embodiment, the acquisition unit 31 obtains the required conveyance amount, and the comparison unit 32 compares the required conveyance amount with the maximum conveyance amount °, that is, not the speed of the stacker 12 of the transport vehicle. The predetermined speed is compared, and the required speed is compared with the maximum speed by the carrying amount of the stacker 12. Fig. 6 is a flow chart showing the operation flow of the transport vehicle system 1 of the first embodiment. @ Further, the dust removing device 20 is generally an operation of inhaling a predetermined amount of air per unit time based on the initial enthalpy set by the control device 30. Further, as the operation of feeding the predetermined amount of purge air to the automatic warehouse 1 1 is started. Further, in the above-described embodiment, when the stacker crane 12 is moved at the maximum speed, the cleanliness of the air in the automatic warehouse 11 can be maintained at a predetermined amount. After the normal operation of the dust removing device 20 is started, the acquisition unit 31 of the control device 30 acquires the required transportation amount in accordance with an instruction from the manager or the like of the transportation vehicle system 10 (S20). The comparison unit 32 compares the required conveyance amount acquired by the acquisition unit 31 with the maximum conveyance amount stored in the predetermined memory area of the control device 30 (S21). If the result of the comparison is that the amount of conveyance is less than the maximum amount of conveyance (S2 1 is Yes), the control unit 3 〇 controls the dust removing device 2 to reduce the air supply amount per unit time of the dust removing device 20 (S22). Here, the carrying amount of the stacking crane 12 has a positive correlation with the moving speed of at least -14-200934706. Therefore, when the required amount of conveyance is less than the maximum amount of conveyance (S21 is Yes), the speed at which the stacker 12 is moving at a higher speed than the maximum speed is required. At this time, it is reduced in the case where the amount of dust rolled up by the movement of the stacker 12 is shifted at the maximum speed. Therefore, the control device 30 controls the case where the air supply amount of the dust removing device 20 is smaller than the maximum moving speed. U As described above, in the present embodiment, the control device 30 can control the operation of the dust removing device 20 in accordance with the required conveyance amount of the stacker crane 12. Fig. 7 is a view showing a relationship between the required conveyance amount, the moving speed of the stacker 12, and the supply amount of the average air per unit time of the dust removing device 20. As illustrated in Fig. 7, when the required amount of conveyance is changed from W1 of the maximum change amount to W2 which is less than W1, the control device 30 is controlled to change the moving speed of the stacking crane 12 from the VI corresponding to the maximum conveyance amount. It is reduced to V2 which is smaller than VI. Moreover, the speed of the stacker 12 is actually due to the acceleration time, so that no parallel line with the time axis is formed. However, in order to clearly show the relationship between the speed of the stacker 12 and the required conveyance amount and the operation of the dust removing device 20, Fig. 7 is a view showing the maximum speed in each period as a representative of the speed in each period. The same applies to the eighth and ninth drawings which will be described later. The same as the moving speed of the transport vehicle according to the second embodiment to be described later, the control device 30 controls the dust removing device 20 to reduce the supply amount of the dust removing device 20 into the line -15-200934706, so that the moving speed of the stacker 12 is increased. The changes are roughly synchronized. Specifically, when the moving speed of the stacker 12 changes from the maximum speed VI to less than the VI of the VI, the dust removing device 20 is controlled by the control device 30, and the air supply amount per unit time of the dust removing device 20 is made to correspond. The Q1 of the maximum speed VI changes to Q2 which is smaller than Q1. For example, when the required amount of transportation is required to be half of the maximum amount of transportation, the control unit 30 controls the stacker 12 to change the speed of movement to about half the speed of the maximum speed. And controlling the moving time, the dust removing device 20, for example, causes the air supply amount averaged per unit time to change to about half. Further, the control device 30 reduces the air supply amount per unit time of the dust removing device 20 by one of the following methods (1) to (3) or a combination of the above methods. (1) The rotation speed of the fan 22 of the four FFUs 21 is lowered. (2) The operation of the FFU 21 of one or more of the four FFUs 21 is stopped. That is, the rotation of one or more of the four FFUs 21 is stopped. (3) After the rotation of the fan 22 of the four FFUs 21 is stopped for a predetermined period of time, the rotation of the fan 22 is started. That is, each of the FFUs 21 is caused to operate intermittently. For example, the number of revolutions of the fan 22 of each of the FFUs 21 is changed to half the number of revolutions when the stacker crane 12 is moved at the maximum speed. Thereby, the air supply amount averaged per unit time of the dust removing device 20 can be halved. Further, as described above, when the operation state of each of the FFUs 21 changes, the control device 30 changes the number of revolutions of the delivery fan 26 by -16 to 200934706 in synchronization with the change. Thereby, the pressure in the automatic warehouse 11 is kept substantially constant. As described above, the control device 30 can reduce the amount of supply of the mesh region corresponding to the lower diagram of Fig. 7 by responsively changing the operation of the dust removing device 20. Thereby, the following advantageous effects are exerted. That is, the air volume determined by the maximum speed of the truck can be constantly flowed in the automatic warehouse as in the past, and the air volume of the untwisting device 20 which is not originally required can be deleted. U Depleting the air volume of the dust removing device 20 can reduce the power consumption of the dust removing device 20. In addition, by reducing the amount of air flow that is not required, it is possible to reduce the amount of air that the storage object and the load are in contact with. As a result, it is possible to suppress the possibility of damage to the stored objects and the transported objects due to static electricity caused by the wind, and the amount of dust deposited on the stored objects and the transported objects. In other words, when a product requiring a high degree of dust prevention such as a circuit board is stored in an automatic warehouse, the yield of the product such as φ can be improved as compared with the conventional automatic warehouse. As described above, the transport vehicle system 10 of the present embodiment is the control device 30 such that the operation of the dust removing device 20 dynamically changes in accordance with the operation state of the stacking crane 12, and the cleanliness in the automatic warehouse 11 can be effectively maintained. Further, when the air supply amount of the dust removing device 20 is reduced from Q1 to Q2, and the moving speed of the stacking crane 12 returns to VI, the control device 30 controls the dust removing device 20 to return the air supply amount of the dust removing device 20 to Q1. . Here, Fig. 7 is a view showing that the air supply amount of the dust removing device 20 is also lowered in one step after the speed of the stack crane 12 is lowered in the first step -17 - 200934706. However, the air supply amount per unit time of the dust removing device 20 may be changed in multiple stages in accordance with the change in the moving speed of the stacker crane 12. Fig. 8 is a graph showing the relationship between the moving speed of the stacker 12 and the zero supply amount in the case where the unit time average air supply amount of the multi-stage change dust removing device 20 is exemplified. As shown in the upper part of Fig. 8, the moving speed of the stacker 12 is assumed to be changed in accordance with the order of VI, V2, V3, V4 (V1 > V4 > V2 > V3). At this time, the acquisition unit 31 of the control device 30 acquires the required transportation amount based on the speeds sequentially or collectively. The comparison unit 32 compares the required conveyance amount acquired by the acquisition unit 31 with the maximum conveyance amount of the critical threshold. Or in this comparison, not only the relationship is large but also the ratio is obtained. That is, 'the ratio required for how much the amount of transportation is required for the maximum amount of transportation. The control device 30 changes the air supply amount averaged per unit time of the dust removing device 20 based on the ratio obtained by the comparison unit 32. As a result, as shown in the lower part of Fig. 8, the air supply amount of the unit time average of the dust removing device 2〇 changes in the order of Q1, Q2, Q3, and Q4 (Q1 > Q4 > Q2 > Q3). That is, the control device 30 controls the dust removing device 2A such that the speed of the stacking crane 12 is slower. The average air supply amount per unit time of the dust removing device is -18-200934706. Conversely, by controlling the dust removing device 20 to increase the speed of the stacker 12, the average air supply amount per unit time of the dust removing device 20 is increased. As described above, the average air supply amount per unit time of the tamping device 20 can follow the change in the speed of the stacker 12, and the cleanliness of the automatic warehouse 11 can be more effectively maintained. Further, with respect to the speed of the stacker 12 at a certain speed, the amount of air supply per unit time of the dust removing device 20 is required to be supplied, and it is only necessary to obtain an optimum degree by experimental or theoretical calculation. Further, in the present embodiment, the control device 30 changes the air supply amount per unit time of the dust removing device 2 by using the maximum amount of transportation as the critical value and whether the required carrying amount is smaller than the critical value. However, it is also possible to set the predetermined amount of conveyance smaller than the maximum conveyance amount as the critical value, and to increase or decrease the air supply amount per unit time except for the armor φ set 20 in accordance with the magnitude relationship between the critical enthalpy and the required conveyance amount. That is, the control device 30 is based on a predetermined speed less than the maximum speed of the stacker crane 12, and when the speed of the stacker 12 is slower than the reference, the supply amount of air is Q0. Further, when the speed is equal to or higher than the predetermined speed, the air supply amount is controlled by Q1 which is larger than Q0. Fig. 9 is a view showing a relationship between the moving speed of the stacker 12 and the amount of supply when the air supply amount is controlled based on the predetermined speed less than the maximum speed of the stacker 12. The upper part of Fig. 9 shows the case where the stacking height of the stacking crane 12 to T1 is -19-200934706, and the maximum moving speed between the stacking cranes and the T2 is assumed to be VI. Further, the maximum speed of the moving speed from Τ2 to Τ3 is V2, and the subsequent stop is set. Here, the reference of the speed is V0, and as shown in Fig. 9, the respective speed relationships are V1 >V0> V2. At this time, the control device 30 performs the following control. That is, the speed (0) of the stacker 12 is less than V0 as of T1. Therefore, the control unit 30 controls the dust removing device 20 to supply air at a supply amount Q 0 which is averaged per unit time corresponding to the speed of the reference V0. Further, from T1 to T2, the speed VI of the stacking crane 12 is equal to or higher than the reference V0. Therefore, the control device 30 controls the dust removing device 20 to supply air at a supply amount Q 1 which is averaged per unit time corresponding to the speed of the reference V0 or higher. In addition, after T2, the speed of the stacker 12 (V2 until T3, then 0) is smaller than the reference V0. Therefore, the control device 30 controls the dust removing φ device 20 to supply air at a supply amount Q0 which is averaged per unit time corresponding to the speed of the reference V0. As described above, the control device 30 controls the dust removing device 20 to make the supply amount of the unit time average different depending on whether or not the moving speed of the stacking crane 12 is equal to or higher than the reference speed. As a result, in the automatic warehouse 11, the dust removal device is usually driven at a low speed in advance, and when the amount of transportation is increased, the dust removing device 20 is operated at a high speed. In other words, the automatic warehouse 11 can more effectively perform the effective operation of the dust removing device 20, for example, when the number of articles to be transported in the period -20-200934706 is relatively small. In the present embodiment, the acquisition unit 31 of the control device 30 is a comparison between the required required conveyance amount and the maximum conveyance amount. That is, the speed of the stacker 12 is required to be compared with the maximum speed. At this time, the control device 30 can change the operation state of the dust removing device 20 (for example, from high-speed operation to low-speed operation) in response to the required transportation amount before the stacking crane 12 starts processing the movement for requesting the φ transportation amount. However, it is also possible to directly compare the speed and maximum speed of the stacker 12. At this time, for example, the maximum speed of the stacker crane 1 2 is memorized in advance by the control device 30. Further, the acquisition unit 31 obtains the speed of the stacker crane 12 by, for example, communication with a device that detects the speed of the stacker crane 12. When the speed is obtained by the acquisition unit 31, the comparison unit 3 2 compares with the maximum speed stored in the control unit 30. The control device 30 controls the operation of the dust removing device 20 in response to the result of this comparison. Even as described above, the control device 30 can control the dust removing device 20 in response to the moving speed of the stacker 12 to cause the dust removing device 20 to operate effectively. Further, the dust removing device 20 may have a configuration other than the configuration shown in Fig. 2 . For example, after the air is sucked from one side to remove dust, one FFU that discharges the purified air from the other side is treated as a dust removing device -21 - 200934706 20 . Further, for example, four FFUs 21 may be disposed on the ceiling instead of on the ground. At this time, after the air taken in from the four suction ports 18 on the ground passes through the line 24 to remove the dust by the main filter 25, the dust is removed by the four FFUs 21 to form clean air. The clean air is supplied to the automatic warehouse 11 by the fan 22, respectively. In other words, the number and arrangement of the 0 devices 'fans that supply clean air to the predetermined area by the fan, and the method of removing the dust are not limited to the specific objects. Further, when a plurality of FFUs 2 are used in the present embodiment, a plurality of FFUs 21 can be individually controlled in accordance with the moving area of the stacker 12. For example, the stacker crane 12 is set from the right side of the carrier 13 to only two columns (see Fig. 3) for the case where a plurality of articles are required to be loaded. At this time, for example, in the four FFUs 21, one or two of the FFUs 21 may be shifted to the low speed operation or stopped from the left. That is, it is also possible to control the area from which the stacker 12 moves to reduce the supply amount of the clean air of the FFU 2 1 located at a far position. Even as described above, the degree of cleanliness can be maintained moderately, and the amount of air that is not required by the dust removing device 20 can be reduced. Further, in the present embodiment, the control device 30 controls the operation of the dust removing device 20 in accordance with the speed of the stacker crane 12. However, the control device 30 may perform the operation control of the dust removing device 20 in accordance with other variables. For example, the operation control of the dust removing device 20 may be performed in accordance with the acceleration of -22-200934706 of the stacker crane 12. For example, when the acceleration of the stacker 12 is negative, the stacker 12 is in a state where the moving speed is lowered. At this time, the amount of dust rolled up by the stacker 12 is reduced. Therefore, the control device 30 controls the dust removing device 20 to reduce the air supply amount per unit time of the dust removing device 20. Even as described above, the effective operation of the dust removing device 20 can be achieved. φ (Embodiment 2) As in the automatic warehouse 11 of the first embodiment, it is also present in a facility in which a highly dust-proof product such as a circuit board is transported in another predetermined area. For example, a work machine is installed in the workroom to allow the transporter carrying the precision parts to travel in the workroom. At this time, dust and the like are also diffused as the truck moves, so that it is necessary to maintain the cleanliness of the air in the work chamber. 0 That is, the work room needs to be a clean room. At this time, in the same manner as the automatic warehouse 11 of the first embodiment, it is possible to effectively maintain the cleanliness. Here, the second embodiment is described below with respect to the transport vehicle system 50 for the transport vehicle that travels in the clean room and the dust removing device for controlling the air in the clean room. Fig. 10 is an external view showing the automated guided vehicle 52 of the second embodiment. The unmanned transport vehicle 52 shown in Fig. 10 is a transport vehicle that controls movement by, for example, wireless communication. The unmanned transport vehicle 52 is, for example, a magazine 54 in which a plurality of glass substrates 53 for a plasma display panel are housed in a plurality of overlapping -23-200934706. Fig. 11 is a view showing the configuration of the transport vehicle system 50 of the second embodiment. As shown in Fig. 11, the transport vehicle system 50 includes a clean room 51, a dust removing device 60, and a control device 7A. The clean room 51 is provided with four parts assembly machines 55. The component assembler 55 supplies the plurality of glass substrates 53 via the automated guided vehicle 52. Each part ^ assembly machine 5 5 is a component assembled on the supplied glass substrate 53. ❹ The dust removing device 60 has the same configuration as the dust removing device 20 of the first embodiment, and has four FFUs 61, a pipe 64 that allows the air sucked by the four FFUs 61 to flow, a main damper 65, and a delivery fan 66. Further, the flow of air is also the same as in the first embodiment. That is, air is taken in by each of the FFUs 61 provided in the four suction ports 18 on the floor of the clean room 51. And it is sucked by each FFU 61, and the dust-removed air is discharged from the line 64 by the respective filters 63. The exhausted air is removed by the main flow filter 65 through the line 64. The air that has passed through the main filter 65 is sent to the clean room 51 through the four blowout ports 59 disposed in the ceiling of the clean room 51 by the delivery fan 66. As above,. The air flows from the top to the bottom in the clean room 51 as a whole. Further, the fan 62 of each of the FFUs 6 1 of the second embodiment has a function of supplying clean air to the fan used in the clean room 51, similarly to the fan 22 of the first embodiment. The control device 30 is a device that controls the operation of the unmanned transport vehicle 52 and the dust removing device 60 from -24 to 200934706. Fig. 12 is a schematic top view showing the arrangement position of the four FFUs 61 of the clean room 51. Further, in Fig. 12, in order to facilitate the arrangement of the positions of the four FFUs 61, the respective component assembling machines 55 are indicated by broken lines. As shown in Fig. 12, each of the FFUs 61 is provided with a suction port 58 on the floor of each of the four component assembling machines 55. Further, the suction port 58 is covered with, for example, an iron plate having a mesh shape of φ, and the FFU 61 is disposed under the iron plate. The automated guided vehicle 52 moves between the component assembling machines 55 provided in the predetermined interval described above. The automated guided vehicle 52 places a crucible 54 in which a plurality of glass substrates 53 are housed at a predetermined place near each component assembling machine 55. As described above, a plurality of glass substrates are supplied to the respective component assembling machines 55. Further, the glass substrate 53 on which the components are assembled is recovered by the automated transportation vehicle 52, and is stored, for example, at a predetermined gathering place outside the clean room 51. The above-described 'unmanned vehicle 52' moves in the clean room 51. Therefore, 0 is the same as the case where the stacker 12 of the first embodiment moves, and there is a problem that dust is raised. Therefore, the dust removing device 60 sucks the air in the clean room 51 to remove dust. Thereby, the cleanliness in the clean room 51 is maintained. Further, in order to maintain the effective cleanliness, the control device 70 dynamically changes the supply amount of the clean air per unit time of the dust removing device 6A in accordance with the moving speed of the automated guided vehicle 52. Fig. 13 is a block diagram showing the functional configuration of the transport vehicle system 50. Fig.-25-200934706 In addition, in Fig. 4, the apparatus controlled by the control device 70 is mainly shown as an illustration, and the parts assembly machine 55 and the like are omitted. The functional configuration of the transport vehicle system 50 of the second embodiment is shown in Fig. 13 and is substantially the same as the functional configuration of the transport vehicle system 10 of the first embodiment. Specifically, the transport vehicle system 50 includes a control device 70, a dust-free chamber 51, and a dust removing device 60. The control device 70 is a device that controls the operation of the automated guided vehicle 52 and the dust removing device 60. The control device 70 includes an acquisition unit 71 and a comparison unit 72, and performs signal processing between the automated transportation vehicle 52 and the dust removal device 60 to control the operations. The acquisition unit 71 is a processing unit that acquires a required conveyance amount for the automated guided vehicle 52. The comparison unit 32 is a processing unit that compares the required conveyance amount and the threshold 取得 acquired by the acquisition unit 31. φ In the present embodiment, the control device 70 memorizes the maximum amount of transport of the unmanned transport vehicle 52 per unit time and the maximum transportable amount, and when the unmanned transport vehicle 52 requires the maximum transport amount, the unmanned transport vehicle 52 The formation moves at maximum speed. The control device 70 controls the operation of the buffer removing device 60 based on the comparison result between the required transport amount and the maximum transport amount of the comparing unit 72. Thereby, the effective operation of the dust removing device 60 and the cleaning of the effective air are achieved. The basic operation of -26-200934706 of the transport vehicle system 50 of the second embodiment having the above functional configuration is the same as the operation shown in the flowchart of Fig. 5. That is, the control device 70 compares the speed of the stacker 12 of the truck with a predetermined speed (S10). As a result of the comparison, when the moving speed of the automated guided vehicle 52 is slower than the predetermined speed (S1 0 is Yes), the control device 70 controls the dust removing device 60 to reduce the air supply amount per unit time of the dust removing device 60. Specifically, the control device 70 compares with the control device 30 of the first embodiment, and compares the maximum speed of the automated guided vehicle 52 with the required speed based on the comparison between the required transport amount and the maximum transport amount. Therefore, while the required amount of conveyance is lower than the maximum conveyance amount, the dust removal device 60 forms an average amount of air supply per unit time. Fig. 14 is a diagram showing the relationship between the required carrying amount, the moving speed of the automated guided vehicle 52, and the average air supply amount per unit time of the dust removing device 60. As illustrated in Fig. 14, the required conveyance amount of the second embodiment; the moving speed of the unmanned Q transport vehicle 52; and the relationship between the air supply amount per unit time of the dust removing device 60 are the same as those of the first embodiment. In other words, when the required conveyance amount is changed from the maximum conveyance amount W1 to W2 which is less than W1, the control device 70 controls the movement speed of the automated guided vehicle 52 to be changed from VI corresponding to the maximum conveyance amount to V2 smaller than VI. When the moving speed of the automated guided vehicle 52 changes from the maximum speed V1 to less than V2 of VI, the control device 7 controls the air supply amount averaged per unit time of the dust removing device 6〇 from the Q 1 corresponding to the maximum speed V 1 . Becomes Q2 smaller than Q 1 . -27- 200934706 Further, the control device 70 is also the same as the first embodiment in the method of reducing the air supply amount per unit time of the dust removing device 60. That is, when the number of rotations of the fan 62, the number of the activated FFUs 61, and the operation timing of the FFU 61 are controlled, the average air supply amount per unit time can be reduced. Further, when the control device 70 changes the operation state of each of the FFUs 61 as described above, the rotation speed of the delivery fan 66 changes in synchronization with this change. Thereby, the pressure in the clean room 51 is kept substantially constant. As described above, the control device 70 correspondingly changes the operation of the dust removing device 60, and reduces the amount of supply of the mesh region corresponding to the lower portion of Fig. 14 . Thereby, the power consumption of the dust removing device 60 can be reduced. Further, it is possible to suppress the possibility that the glass substrate 53 is broken due to static electricity caused by the wind and the amount of dust adhered to the glass substrate 53. In other words, when a product having a high degree of dust resistance such as the glass substrate 53 is housed in the clean room 51, the yield of the products can be improved as compared with the conventional clean room. Q As described above, the transport vehicle system 50 of the present embodiment is such that the control device 70 causes the operation of the dust removing device 60 to dynamically change in accordance with the operating state of the automated transport vehicle 52, thereby effectively maintaining the cleanliness in the clean room 51. In other words, the degree of cleanliness is maintained, and the power consumption of the dust removing device 60 can be reduced, and the possibility of damage of the glass substrate 53 due to static electricity caused by wind and the amount of dust adhering to the glass substrate 53 can be suppressed. Further, in the present embodiment, the dust removing device 60 may have a configuration other than that of the nth drawing. For example, four FFUs 61 can also be placed on the ceiling instead of the ground. -28-200934706 That is, the apparatus for supplying clean air to a predetermined area by a fan may be used, and the number and arrangement of the fans, and the method of removing the dust are not particularly limited in the embodiment. In the present embodiment, the following description will be given of the case where one unmanned transport vehicle 52 is traveling in the clean room 51. However, there is generally a case where a plurality of unmanned transport vehicles 52 are moved in the clean room 51. At this time, the operation of the dust removing device 60 is controlled in consideration of the movement speed of the plurality of automated guided vehicles 52, and the cleanliness in the clean room 51 can be effectively maintained as in the present embodiment. Fig. 15 is a top plan view showing the configuration of the clean room 51 in which the two automated transport vehicles 52 move. As shown in Fig. 15, the automated guided vehicle 52a and the automated guided vehicle 52b are stored in the clean room 51, and are separately moved to supply and recover the glass substrate 53 of each component assembly machine 55. At this time, the control device 70 can set the initial stage of maintaining the cleanliness of the clean room 51 even when both the unmanned transport vehicle 52a and the automated transport vehicle 52b are moved at the maximum speed by the initial stage of the dust removing device 60. . Further, for example, the acquisition unit 71 acquires each required transport amount with respect to the automated guided vehicle 52a and the unmanned transport vehicle 52b. The comparison unit 72 compares the two required transport amounts with the maximum transport amount. The control device 70 controls the operation of the dust removing device 60 based on the result of the comparison. That is, when one of the required conveyance amounts of the automated guided vehicle 52a and the automated guided vehicle 52b is lower than the maximum carrying amount, the control device -29-200934706 70 controls the dust removing device 60 to reduce the unit time average of the dust removing device 60. Air supply. By this, the degree of cleanliness of the degree of cleanliness is maintained, and the amount of air that is not required by the dust removing device 60 can be deleted. Further, when a plurality of trucks are moved in a predetermined area where the clean parts are to be maintained, the operation of the dust removing device is controlled by one hand, and the effect of reducing the air volume of the dust removing device is also obtained. In other words, in the first embodiment, when the plurality of stacking cranes 12 are moved in the automatic warehouse 11, the control device 30 can perform the above-described control in the dust removing device 20 by using the required transport amount for both of them. Further, it is also possible to compare the maximum speed without detecting the speed of the plurality of transport vehicles with respect to the required transport amount of the plurality of transport vehicles. Further, the control device 70 of the second embodiment may perform the control shown in Fig. 8. In other words, the air supply amount per unit time of the dust removing device 60 may be changed in multiple stages in accordance with the speed of the movement of the automated guided vehicle 52. Further, the control device 70 according to the second embodiment may perform the control shown in Fig. 9. That is, when the speed of the automated guided vehicle 52 is slower than the predetermined reference, the air supply amount averaged per unit time of the dust removing device 60 is Q0, and when the predetermined speed is equal to or higher than the predetermined speed, the supply amount is controlled by Q 1 greater than Q0. In any of the above cases, the effect of effectively maintaining the clean room 51 cleanliness is not lost. Further, in the second embodiment, similarly to the first embodiment, the configuration of the dust removing device 60-30-200934706 may be other than the above. The FFU 61 can be individually controlled in accordance with the moving area of the automated guided vehicle 52. For example, only the FFU 61 near the path where the automated guided vehicle 52 frequently moves is operated at a relatively high speed or at a relatively high speed. Also, it is also possible to control the FFU 61 that is moved from a position farther from the path to shift or stop at a low speed. As described above, even when the dust removing device 60 is controlled, the degree of cleanliness can be appropriately maintained, and the amount of air which is unnecessary for the dust removing device 60 can be deleted. (Supplementary Items of the First and Second Embodiments) In the first embodiment, the transport vehicle is described in the transport vehicle system 10 including the stacker 12, and in the second embodiment, the transport vehicle is transported by the automated transport vehicle 52. The vehicle system 50 has been described. However, the transport vehicle of the transport vehicle system of the present invention is not limited to the stacker crane 12 and the automated guided vehicle 52. For example, an overhead traveling Q car that travels on a rail on a ceiling may be used as the transport vehicle, and the number of the overhead traveling vehicles is not limited to a specific number. In other words, the effective cleanliness maintenance of the predetermined area of the effect of the transport vehicle system of the present invention can be fully realized without depending on the type, size, number of the transport vehicle, and the like. [Industrial Applicability] The transport vehicle system of the present invention can be used as a transport system using various types of articles of the transport vehicle in a predetermined area. In addition, it is extremely useful as an automatic warehouse for storing products such as a circuit board that requires high dust-proofing, such as a circuit board, and a clean room handling system for processing the above products. [Brief Description of the Drawings] Fig. 1 is an external view showing an automatic warehouse provided in the transportation system according to the first embodiment of the present invention. Fig. 2 is a schematic view showing the configuration of the transport system of the first embodiment. Fig. 3 is a top plan view showing four FFU arrangement positions of the automatic warehouse in the first embodiment. Fig. 4 is a block diagram showing a functional configuration of the conveyance system of the first embodiment. Fig. 5 is a flow chart showing the basic operation of the conveyance system of the first embodiment. Fig. 6 is a flow chart showing the flow of the operation of the transport system of the first embodiment. Fig. 7 is a graph showing the required handling amount; the moving speed of the stacking crane: and the average air supply amount per unit time of the dust removing device. Fig. 8 is a graph showing the relationship between the moving speed of the stacker and the amount of supply in the case where the dust supply device changes the air supply amount per unit time in a plurality of stages. Fig. 9 is a graph showing the relationship between the moving speed of the stacker and the amount of supply when the air supply amount is controlled based on a predetermined speed lower than the maximum speed of the stacker. Fig. 10 is a perspective view showing the automated guided vehicle of the second embodiment. -32- 200934706 Fig. 11 is a view showing the configuration of the transport vehicle system of the second embodiment. Fig. 12 is a top plan view showing four FFU arrangement positions of the clean room of the second embodiment. Fig. 3 is a block diagram showing a functional configuration of the conveyance system of the second embodiment. Fig. 14 is a diagram showing the relationship between the required carrying amount, the moving speed of the unmanned transport vehicle φ, and the average air supply amount per unit time of the dust removing device. Fig. 15 is a top plan view showing the configuration of the clean room 51 in which two unmanned vehicles are moved. [Explanation of main component symbols] 10, 50: Pallet system 11: Automated warehouse 12: Stacker crane ❿ 13: Carrier 1 4: Station 15: Elevator 15a: Sliding fork 1 6 : Walking track 1 7 : Item 1 8, 5 8 : Suction port 19, 59: Blowing outlet 20, 60: Dust removal device -33- 200934706
21 、 61 : 22 、 62 : 23 、 63 : 24 、 64 : 25 ' 6 5 ·· 26 、 66 : 30 、 70 : 31、 71 ： 32 、 72 : 51 :無塵 52 、 52a 5 3 :玻璃 54 :匣 5 5 :零件21, 61 : 22 , 62 : 23 , 63 : 24 , 64 : 25 ' 6 5 · · 26 , 66 : 30 , 70 : 31 , 71 : 32 , 72 : 51 : no dust 52 , 52a 5 3 : glass 54 :匣5 5 : Parts
FFU 風扇 濾器 管路 主濾器 送出風扇 控制裝置 取得部 比較部 室 、52b :無人搬運車 基板 組裝機FFU fan filter line main filter feed fan control unit acquisition unit comparison unit room 52b: unmanned vehicle base unit assembly machine
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