、發明說明： 【發明所屬之技術領域】 本發明係關於-種用以錢工作機器之高架地板系 統以及-種架設南雜板祕以承载工錢㈣方法；特 別疋’本發明應用於當所承載之卫作機器具有相當重量的 情況。 【先前技術】 在現今半導體f程的無塵室或是大型電腦主機的機 房中，為了避免製程設備、機械手臂、或是電腦主機遭受 f塵埃的污染，-般都在地面上另核設高架地板系統。 咼架地板系統中的地板與真正的地面之間相距一定的高 度’再^作機H(抛設備或技腦)放置在此高架地板 i。在高架地板與真正地面間的空間，除了可供布置管線 以及工作人員施工外’亦可設置抽氣設備，持續地將產生 的塵埃帶走，藉此保持環境所需要的潔淨度。 然而’為了維護與方便設置起見，目前 統大多採驗合模_方式，並且可輕易物移動，2 合各式無塵室或是電腦機房的規劃設置；然而，目前的高 架地板系統的承重能力不如真實的地面或是樓:來= 強。一般來說，尚架地板承受工作機器有重量限制，過大 200933010 會造成地板永久變形或破裂，甚輯致塌陷造成工作機器 的損壞。料導體或是面板薇巾’新世代製崎使用的工 作機器愈來，重，前述的變形或破裂現象更為明顯。此 外，當具有南重心之工作機n進行操作而㈣晃動過大 時，傳統的高架地板容易翻覆，造成使用上的危險。 因此需要-種具有更大承重能力的高架地板系統，以 及架設此高架地板系統的方法，可以解決上述的問題。特 別是’這種裝置不會大幅地增加成本，且又容易實施。 【發明内容】 有鑑於先前技藝之缺失，本發明提供一種能夠穩固承 載沈重工作機台之南架地板系統，特別是本發明之高架地 板系統採用額外的支撐座來支撐工作機台的重量，以及避 免工作機器操作時所引起之晃動。 在本發明高架地板系統的實施例中，高架地板系統乃 設置於地面上’用以承載工作機器。此高架地板系統包含 複數個第一支撐座、地板、第二支撐座與組合構件。地板 設置於第一支撐座上，且地板具有組合孔。第二支撐座設 置於地面上’且位於地板下方並與組合孔位置相對應。組 合構件係設置於組合孔中。 6 200933010 此外，在架設高架地板系統的方法實施例中，此方法 包含提供複數個第一支撐座，設置於地面上；提供地板， 設置於第一支撐座上，且在地板上提供組合孔；提供至少 一第二支撐座，設置於地面上，且位於地板下方並與組合 孔位置相對應；裝設工作機器於地板上設置組合構件於組 合孔利用組合構件透過組合孔，分別鎖固於工作機器 以及第二支撐座。[Technical Field] The present invention relates to an elevated floor system for a money working machine and a method for erecting a miscellaneous board to carry wages (four); in particular, the invention is applied to The machine has a considerable weight. [Prior Art] In the clean room of today's semiconductor f-class or the computer room of a large computer mainframe, in order to avoid the dust pollution caused by the process equipment, the robot arm or the computer mainframe, the overhead is additionally set on the ground. Floor system. The floor in the truss floor system is at a certain height from the real floor. The machine H (throwing device or technical brain) is placed on this raised floor i. In the space between the raised floor and the real floor, in addition to the layout of the pipeline and the construction of the staff, air extraction equipment can be provided to continuously remove the generated dust, thereby maintaining the cleanliness required by the environment. However, for the sake of maintenance and convenience, most of the current systems are closed and can be moved easily, and the layout of various clean rooms or computer rooms is planned; however, the current load-bearing system of the raised floor system The ability is not as good as the real ground or the building: come = strong. Generally speaking, there is a weight limit on the working machine. The excessively large 200933010 will cause the floor to be permanently deformed or broken, and the collapse will cause damage to the working machine. Material conductor or panel Wei towel 'The working machine used by the new generation of Kawasaki is getting heavier and heavier, and the aforementioned deformation or cracking phenomenon is more obvious. In addition, when the working machine n with the center of gravity is operated and (4) the shaking is too large, the conventional raised floor is easily overturned, posing a danger of use. Therefore, it is necessary to have a raised floor system with a greater load-bearing capacity and a method of erecting the raised floor system to solve the above problems. In particular, such a device does not significantly increase the cost and is easy to implement. SUMMARY OF THE INVENTION In view of the deficiencies of the prior art, the present invention provides a south frame floor system capable of stably supporting a heavy work machine, and in particular, the elevated floor system of the present invention uses an additional support base to support the weight of the work machine, and Avoid the shaking caused by the operation of the working machine. In an embodiment of the raised floor system of the present invention, the raised floor system is disposed on the ground to carry the work machine. The raised floor system includes a plurality of first support seats, a floor, a second support base, and a composite member. The floor is disposed on the first support and the floor has a combined aperture. The second support is placed on the ground' and is located below the floor and corresponds to the location of the combined aperture. The composite member is disposed in the combined hole. 6 200933010 further, in an embodiment of the method of erecting a raised floor system, the method comprises providing a plurality of first support seats disposed on the ground; providing a floor, being disposed on the first support base, and providing a combined hole on the floor; Providing at least one second support seat disposed on the ground and located under the floor and corresponding to the position of the combined hole; the working machine is disposed on the floor, and the combined member is disposed on the combined hole through the combined hole through the combined hole, respectively locked to work The machine and the second support base.
藉由以下之較佳實施例之敘述並配合圖式說明，本發 明之目的、特徵與優點將更為清楚。 【實施方式】 圖la顯示本發明高架地板系統之一實施例。高架地 板系統100乃設置於地面1〇上，用以承載工作機器2〇。 高架地板系統100寸設置於半導體製程中之無塵室或是·設 置大型電腦的機房；工作機器20則可為半導體製程設備、 機器手臂、或是大型電腦。值得注意的是，地面1〇乃指 無塵至或疋機房之建築本身所提供的地面或是樓面，並非 限定於海平面意義下之地面。 高架地板系統100包含複數個第—支撐座1〇2、地板 104、第二支撐座1〇6、與組合構件1〇8。 7 200933010 首先’複數個第一支樓座102乃設置於地面10上， 而地板104設置於第一支撐座102上。地板1〇4的材料可 為鋁或是其他金屬材料，而第一支撐座1〇2或第二支樓座 106的數目，可根據實際狀況而設計，本發明並不欲加以 限制。另外’地板104與地面1〇的距離(也就是第一支撐 座102或第二支撐座1〇6的高度)一般約為公分至60 公分’但本發明也不欲加以限制。 地板104 —般來說為複數個單元模組組合拼接而成， 在圖la所示之實施例中，第一支撐座1〇2除了在垂直方 向用以支撐起地板104之外，在水平方向更用來耦接鎖固 兩個相鄰之單元模組’使得地板1〇4不至於在水平方向偏 移。每一地板104的單元模組的大小尺寸亦不限定，但較 佳地，單一地板104的單元模組的面積足以涵蓋工作機器 20 ’以減少震動以及避免地板1〇4的翻覆。 ❹ 在地板104初步穩固之後’接著將工作機器2〇裝設 在地板104上，並在地板1〇4底下，更放置至少一個第二 支撐座106來補助支撐工作機器20的重量，而較佳地， 乃沿著工作機器20的四個角落各放置一個第二支撐座 1〇6(圖la中只顯示出兩個第二支撐座106)。關於此部分之 細節，將描述於後。 200933010 ，圖1a所示，第一支撐座102包含第一底面單元l〇2b 以及第-頂面單元102t，第二支稽座106包含第二底面單 元106bee以及第二頂面單元馳。第一底面單元102b與第 二底面單元嶋分顺地面1G接觸，而第—頂面單元 102t與第二頂面單元職分別由地板1()4下方與地板⑽ 接觸來提供支揮力。進一步地，第二支撐座1〇6更包含至 少-側支撐座107(-般為二個至三侧支撐座1〇7)，此侧 ❹ 支撐座1〇7係設置於第二支撐座應之側面，而侧支撐座 107之一端係組接於第二支撐座1〇6之一側，而另一端係 固定於地面10,藉此供提供水平方向與垂直方向之支撐 力0 一般來說，第一底面單元102b以及第二底面單元⑴你 的形狀為矩形；另外，第一頂面單元1〇21以及第二頂面單 元106t的形狀為圓形，並可旋轉以調整其高度。值得注意 Ο 的是，在此實施例中，因為第二支撐座106乃是特別提^ 來支樓工作機台20,需要提供更穩固的支撐力，因此較佳 地’第二頂面單元l〇6b之面積大於第一頂面單元之面積 102b，且第二底面單元l〇6b之面積大於第—底面單元之 面積102b。 此外，地板104具有組合孔1〇5 ’當工作機器2〇裝設 在地板104上’工作機器20的位置乃對應組合孔1〇5，而 200933010 第二支撐座106的位置也對應此組合孔i〇5。較佳地，工 作機器20本身也具有組合孔205，來對準地板1〇4上之 組合孔105，而第二頂面單元106t上也有一組合孔115， 來對準地板104上之組合孔1〇5 ^接著，利用組合構件 108(例如插銷或是螺絲），貫穿通過組合孔205、1〇5、115， 而將工作機器20、地板1〇4、以及第二支揮座1〇6組合固 定，而藉由第二支撐座106達到固定及支撐工作機器2〇 a 的目的。 〇 在另一實施例_，第一支撐座102可參考習知高架地 板系統所使用之支撐座’在此不加贅述。第二支推座1〇6 如圖lb所示，第二頂面單元i〇6t的形狀為圓形，但亦可 為其他形狀’組合孔115的形狀為圓弧形，而第二頂面單 元106t供轉動使組合構件1〇8可位於組合孔115中任一位 置，此種設置可施工人員進一步微調第二支撐座1〇6的位 Q 置與高度’以確保工作機器20被穩固地支樓者。 圖2進一步顯示一種依照本發明實施例之架設高架地 板系統之流程圖’並配合圖la與圖lb，以便使本發明的 精神付以更容易被理解。此方法開始於步驟2〇，提供複數 個弟一支撐座102 ’设置於地面1〇上β在步驟22中，提 供地板104 ’設置在第一支撐座102上，且在地板上提供 組合孔105。步驟24中’裝設工作機器2〇於地板1〇4上， 200933010 其中工作機器20的位置乃對應組合孔i〇5。步驟26中， 提供至少一第二支撐座1〇6，第二支撐座106的位置位於 地板104下方並與組合孔1〇5位置相對應。步驟28中， 利用組合構件108透過組合孔1〇5、205、115，分別鎖固 於工作機器20以及第二支撐座1〇6。舉例來說，第二支樓 座106包含第二頂面單元i〇6t ’使組合構件1〇8貫穿組合 孔105、205、115設置，特別是可以轉動微調第二頂面單 ❹ 元’使組合孔115的位置大致對準於組合孔丨。 藉由以上所述之實施例，本發明之高架地板系統能夠 穩固承載沈重工作機台，特別是採用額外的支撐座來支撐 工作機台的重量，以及避免工作機器操作時所引起之晃 動。 雖然本發明已以實施例揭露如上，然其並非用以限定 本發明’任何具有本發明所屬技術領域之通常知識者，在 不脫離本發明之精神和範圍内，當可作各種更動與潤飾， 並可思揣其他不同的實施例，因此本發明之保護範圍當視 後附申請專利範圍所界定者為準。 【圖式簡單說明】 圖la為本發明高架地板系統實施例之側視圖； 圖lb為本發明中第二支撐座上之第二頂面單元之俯視 11 200933010 圖， 圖2為本發明方法實施例之流程圖。The objects, features, and advantages of the present invention will become more apparent from the description of the appended claims. [Embodiment] Fig. 1a shows an embodiment of the raised floor system of the present invention. The elevated floor system 100 is placed on the floor 1 to carry the working machine. The raised floor system is 100 inches in a clean room in a semiconductor process or in a machine room where a large computer is installed; the work machine 20 can be a semiconductor process device, a robotic arm, or a large computer. It is worth noting that the ground 1〇 refers to the ground or floor provided by the building itself that is dust-free or in the machine room, and is not limited to the ground in the sense of sea level. The raised floor system 100 includes a plurality of first-supporting seats 1, 2, a floor 104, a second supporting seat 1〇6, and a combined member 1〇8. 7 200933010 First, a plurality of first buildings 102 are disposed on the ground 10, and the floor 104 is disposed on the first support base 102. The material of the floor 1〇4 may be aluminum or other metal material, and the number of the first support bases 1 2 or the second stand 106 may be designed according to actual conditions, and the invention is not intended to be limited. Further, the distance between the floor 104 and the floor 1 (i.e., the height of the first support base 102 or the second support base 1 6) is generally about 6 centimeters to the circumference, but the invention is not intended to be limited. The floor 104 is generally formed by splicing a plurality of unit modules. In the embodiment shown in FIG. 1a, the first support seat 1〇2 is horizontally arranged except for supporting the floor 104 in the vertical direction. It is also used to couple and lock two adjacent unit modules' so that the floor 1〇4 is not offset in the horizontal direction. The size of the unit module of each floor 104 is also not limited, but preferably, the unit module of the single floor 104 has an area sufficient to cover the work machine 20' to reduce vibration and avoid overturning of the floor 1 . ❹After the floor 104 is initially stabilized, the work machine 2 is then mounted on the floor 104, and under the floor 1-4, at least one second support 106 is placed to support the weight of the work machine 20, preferably. Ground, a second support seat 1〇6 is placed along each of the four corners of the work machine 20 (only two second support seats 106 are shown in FIG. 1a). Details on this section will be described later. 200933010, shown in Fig. 1a, the first support base 102 includes a first bottom surface unit 102b and a first top surface unit 102t, and the second branch base 106 includes a second bottom surface unit 106bee and a second top surface unit. The first bottom unit 102b and the second bottom unit are in contact with the ground 1G, and the first top unit 102t and the second top unit are respectively brought into contact with the floor (10) under the floor 1 () 4 to provide a supporting force. Further, the second support base 1 6 further includes at least a side support base 107 (generally two to three side support seats 1〇7), and the side support bases 1〇7 are disposed on the second support base. The side of the side support 107 is assembled on one side of the second support seat 〇6, and the other end is fixed to the ground 10, thereby providing a supporting force in the horizontal direction and the vertical direction. The first bottom unit 102b and the second bottom unit (1) are rectangular in shape; in addition, the first top unit 1〇21 and the second top unit 106t are circular in shape and are rotatable to adjust their height. It should be noted that, in this embodiment, since the second support base 106 is specifically for lifting the workbench 20, it is necessary to provide a more stable supporting force, so that the second top unit 1 is preferably The area of the crucible 6b is larger than the area 102b of the first top surface unit, and the area of the second bottom unit unit 16b is larger than the area 102b of the first bottom unit. In addition, the floor 104 has a combination hole 1〇5' when the work machine 2 is mounted on the floor 104. The position of the work machine 20 corresponds to the combination hole 1〇5, and the position of the second support base 106 of 200933010 also corresponds to the combination hole. I〇5. Preferably, the work machine 20 itself also has a combination hole 205 for aligning the combination hole 105 on the floor 1 〇 4, and the second top surface unit 106t also has a combination hole 115 for aligning the combination hole on the floor 104. 1〇5^ Next, the working machine 20, the floor 1〇4, and the second branch 1〇6 are passed through the combination holes 205, 1〇5, 115 by means of a composite member 108 (for example, a bolt or a screw). The combination is fixed, and the second support base 106 achieves the purpose of fixing and supporting the working machine 2〇a. 〇 In another embodiment, the first support base 102 can be referred to the support seat used in the conventional elevated floor system, which is not described herein. The second push block 1〇6 is as shown in FIG. 1b, and the second top surface unit i〇6t has a circular shape, but may be other shapes. The combined hole 115 has a circular arc shape and the second top surface. The unit 106t is rotatable so that the composite member 1〇8 can be located at any of the combination holes 115. This arrangement allows the constructor to further fine tune the position Q and height ' of the second support base 1〇6 to ensure that the work machine 20 is firmly supported. The building. Figure 2 further shows a flow diagram of an elevated floor system in accordance with an embodiment of the present invention, in conjunction with Figures 1a and 1b, to make the spirit of the present invention easier to understand. The method begins in step 2, providing a plurality of brothers a support base 102' disposed on the ground 1〇 in step 22, providing a floor 104' disposed on the first support base 102, and providing a combined aperture 105 on the floor. . In step 24, the working machine 2 is mounted on the floor 1〇4, 200933010, wherein the position of the working machine 20 corresponds to the combined hole i〇5. In step 26, at least one second support seat 1〇6 is provided, the second support base 106 being located below the floor panel 104 and corresponding to the position of the combined hole 1〇5. In step 28, the combination member 108 is respectively locked to the work machine 20 and the second support base 1 through the combination holes 1〇5, 205, 115. For example, the second base 106 includes a second top surface unit i〇6t' such that the composite member 1〇8 is disposed through the combination holes 105, 205, 115, in particular, the second top surface unit can be rotated and fine-tuned. The position of the combination aperture 115 is generally aligned with the combined aperture. With the embodiments described above, the raised floor system of the present invention is capable of stably carrying heavy work machines, particularly with additional support seats to support the weight of the work machine and to avoid sloshing caused by the operation of the work machine. The present invention has been disclosed in the above embodiments, and is not intended to limit the invention to any of the ordinary skill in the art to which the invention pertains, and various changes and modifications may be made without departing from the spirit and scope of the invention. Other different embodiments are contemplated, and the scope of the present invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS Figure la is a side view of an embodiment of a raised floor system of the present invention; Figure 1b is a plan view of a second top unit on a second support base of the present invention 11 200933010, Figure 2 is a method implementation of the present invention Flow chart of the example.
【主要元件符號說明】 地面 10 工作機器 20 高架地板系統 100 第一支撐座 102 地板 104 第二支撐座 106 底面單元 102b、106b 頂面單元 102t、106t 側支撐座 107 組合孔 105、115、205 組合構件 108 '[Main component symbol description] Ground 10 Working machine 20 Raised floor system 100 First support base 104 Floor 104 Second support base 106 Base unit 102b, 106b Top unit 102t, 106t Side support 107 Combination hole 105, 115, 205 Combination Member 108'